KR102702031B1 - Butterfly valve including gate plate internal heating elements - Google Patents

Abstract

A butterfly valve including a heating element inside a gate plate is provided. According to an embodiment, a butterfly valve is a butterfly valve positioned on a conduit through which a fluid is communicated with the inside of a chamber, the butterfly valve including: a housing defining a valve passage communicating with the conduit; a shaft disposed in the housing so as to penetrate the valve passage; and a gate plate coupled with the shaft and disposed within the valve passage, the gate plate having a cross-section corresponding to a shape of the valve passage, wherein the gate plate includes a first heating element, a second plate accommodating the first heating element together with the first plate, and the first plate partially accommodating the first heating element by being coupled with the second plate, and the second plate is coupled with the shaft such that the first plate in a coupled state is spaced apart from the shaft.

Description

Butterfly valve including gate plate internal heating elements

The present invention relates to a butterfly valve, and more particularly, to a butterfly valve including a gate plate internal heating element provided inside the gate plate to support efficient removal of powder accumulated on the gate plate.

The material described in this section merely provides background information for the present embodiment and does not constitute prior art.

A butterfly valve can provide a function of controlling the flow of a fluid guided through a valve passage formed in a valve body according to the degree of rotation of a gate plate, and substantially closing the flow path. A fluid introduced into a specific environment through the butterfly valve can be controlled for supply or discharge, and the creation of a sealed environment can be supported. The butterfly valve is mainly applied to a process chamber that manufactures a semiconductor element with high sensitivity, and provides a function of maintaining the pressure inside the process chamber according to process conditions.

If such a butterfly valve is continuously used, particles of chemical substances generated as the process of the chamber progresses will accumulate in the butterfly valve. In other words, powder corresponding to foreign substances will be generated in the gap between the gate plate and the valve body. In particular, powder accumulated in the gate plate can act as a factor that interferes with the fine movement control of the gate plate.

Accordingly, a method of arranging a heating member or heating element on a conventional valve body or shaft, etc., has been proposed to remove such powder. However, this conventional method indirectly heats the gate plate through heat conduction by heating the valve body or shaft, so heat transfer to the edge of the gate plate was not efficient, and there was a limitation that the powder was not efficiently removed.

In addition, if the heating element comes into contact with the shaft and direct heat is transferred, thermal deformation may occur when the shaft is positioned for precise rotation, which may reduce the accuracy and durability of the shaft, along with a decrease in the durability of the shaft.

Therefore, there is a need for a gate plate and a butterfly valve including the same configured to effectively remove accumulated powder without impairing the durability and operating accuracy of other configurations.

The object of the present invention is to provide a butterfly valve including a heating element inside a gate plate, which can effectively remove accumulated powder by arranging the heating element inside the gate plate.

The object of the present invention is to provide a butterfly valve including a gate plate including an internal heating element, which is coupled to minimize contact between the gate plate including an internal heating element and the shaft, thereby preventing thermal deformation of the shaft.

The purposes of the present invention are not limited to the purposes mentioned above, and other purposes and advantages of the present invention which are not mentioned can be understood by the following description, and will be more clearly understood by the embodiments of the present invention. In addition, it will be easily understood that the purposes and advantages of the present invention can be realized by the means and combinations thereof indicated in the claims.

A butterfly valve according to some embodiments of the present invention is a butterfly valve positioned on a conduit through which a fluid communicates with the inside of a chamber, the butterfly valve comprising: a housing defining a valve passage communicating with the conduit; a shaft disposed in the housing so as to penetrate the valve passage; and a gate plate coupled with the shaft and disposed within the valve passage, the gate plate having a cross-section corresponding to a shape of the valve passage, wherein the gate plate includes a first heating element, a second plate accommodating the first heating element together with the first plate, and the first plate partially accommodating the first heating element by being coupled with the second plate, and the second plate is coupled with the shaft such that the first plate in a coupled state is spaced apart from the shaft.

In addition, the first plate includes a first bottom portion, a first side wall portion extending from a boundary of the first bottom portion and defining a first heating element accommodating space for partially accommodating the first heating element, and the second plate includes a second bottom portion, a second side wall portion extending from a boundary of the second bottom portion and defining a first joining space for coupling with the first plate, and a first connection space and a second connection space for connection with the shaft, and the first joining space defines a second heating element accommodating space for accommodating a remaining portion of the first heating element that is not accommodated in the first heating element accommodating space, and the first connection space and the second connection space can be configured in the second side wall portion to correspond to a longitudinal direction of the shaft.

Additionally, the first side wall portion may further define a first wiring accommodation space for partially accommodating wiring related to the first heating element, and the first coupling space may further define a second wiring accommodation space for accommodating the remaining portion of the second heating element that is not accommodated in the first wiring accommodation space.

In addition, the shaft is further defined with a second joining space that is introduced inwardly for contact with the first joining space and the second joining space of the second plate, and in a state where the first joining space and the second joining space are joined with the second joining space, the joining between the shaft and the second plate can be fixed by welding a first boundary region between the second joining space and the first joining space and a second boundary region between the second joining space and the second joining space.

In addition, the first connection space further includes a first wiring hole communicating with the second wiring receiving space, and the shaft further includes a second wiring hole connecting an upper surface of the second joining space and a side of the shaft, and when the shaft and the second plate are coupled, the first wiring hole and the second wiring hole overlap, and the wiring received through the first wiring receiving space and the second wiring receiving space can extend to the side of the shaft through the first wiring hole and the second wiring hole.

Additionally, the connection between the first plate and the second plate can be fixed by welding the boundary region where the first bottom portion and the first joining space come into contact.

Additionally, the first plate may be configured to have a width lower than the height of the first connection space and the height of the second connection space.

Additionally, the housing may further include a second heating element disposed in the housing.

In addition, the housing may include a first housing having an open area defined in a vertical direction in which the coupling structure in which the shaft and the gate plate are coupled can move; and a second housing covering the first housing to which the coupling structure is coupled to seal the first housing and the coupling structure.

Additionally, the wiring connected to the first heating element can be electrically connected to an external device through a feedthrough disposed in the second housing.

A butterfly valve according to some embodiments of the present invention can more effectively remove powder accumulated on the gate plate by disposing a heating element inside the gate plate.

A butterfly valve according to some embodiments of the present invention can prevent thermal deformation of the shaft by forming an air gap between a gate plate including an internal heating element and a shaft.

In addition to the above-described contents, the specific effects of the present invention are described together with the specific matters for carrying out the invention below.

FIG. 1 is a perspective view of a butterfly valve according to some embodiments of the present invention.
Figure 2 is a perspective view showing the state in which the gate plate is rotated in the butterfly valve of Figure 1.
FIG. 3 is a rear view of a butterfly valve according to some embodiments of the present invention.
FIG. 4 exemplarily illustrates a first plate of a gate plate according to some embodiments of the present invention.
FIG. 5 exemplarily illustrates a second plate of a gate plate according to some embodiments of the present invention.
Fig. 6 illustrates an example of a state in which an internal heating element and wiring are configured in the second plate of Fig. 5.
Figure 7 illustrates an example of a state in which the second plate of Figure 6 and the first plate of Figure 4 are combined.
Figure 8 is a cross-sectional view taken along the cutting lines (A-A', B-B') shown in Figure 7.
FIG. 9 illustrates an example shaft according to some embodiments of the present invention.
FIG. 10 illustrates an exemplary front view of a combined structure combining the gate plate of FIG. 7 with the shaft of FIG. 9.
Fig. 11 is a cross-sectional view taken along line C-C' of Fig. 10.
Figure 12 illustrates an example of a back view of the combined structure of Figure 10.
FIG. 13 is a split perspective view of a butterfly valve according to some embodiments of the present invention.
FIG. 14 is an exemplary diagram illustrating a state in which the first housing and the second housing are separated according to some embodiments of the present invention.
FIG. 15 is an exemplary diagram illustrating a state in which a first housing and a second housing are combined according to some embodiments of the present invention.

The terms or words used in this specification and the claims should not be interpreted as limited to their general or dictionary meanings. In accordance with the principle that the inventor can define the concept of a term or word in order to best explain his or her invention, they should be interpreted as meanings and concepts that are consistent with the technical idea of the present invention. In addition, the embodiments described in this specification and the configurations illustrated in the drawings are only one embodiment in which the present invention is realized, and do not represent the entire technical idea of the present invention, so it should be understood that there may be various equivalents, modifications, and applicable examples that can replace them at the time of this application.

The terms first, second, A, B, etc., used in this specification and claims may be used to describe various components, but the components should not be limited by the terms. The terms are used only to distinguish one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as the second component, and similarly, the second component may also be referred to as the first component. The term "and/or" includes any combination of a plurality of related listed items or any item among a plurality of related listed items.

The terms used in this specification and claims are used only to describe specific embodiments and are not intended to limit the present invention. The singular expression includes the plural expression unless the context clearly indicates otherwise. It should be understood that the terms "comprise" or "have" in this application do not exclude in advance the possibility of the presence or addition of features, numbers, steps, operations, components, parts or combinations thereof described in the specification.

Unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs.

Terms defined in commonly used dictionaries should be interpreted as having a meaning consistent with their meaning in the context of the relevant art, and will not be interpreted in an idealized or overly formal sense, unless expressly defined in this application.

In addition, each configuration, process, procedure or method included in each embodiment of the present invention may be shared within a scope that is not technically contradictory to each other.

Hereinafter, with reference to FIGS. 1 to 15, a butterfly valve including a heating element inside a gate plate according to some embodiments of the present invention will be described.

FIG. 1 is a perspective view of a butterfly valve according to some embodiments of the present invention. FIG. 2 is a perspective view showing a state in which a gate plate is rotated in the butterfly valve of FIG. 1. FIG. 3 is a rear view of a butterfly valve according to some embodiments of the present invention.

Referring to FIG. 1, the butterfly valve (10) includes a gate plate (100), a shaft (110), and a housing (120).

The butterfly valve (10) may be located on a conduit that connects a fluid to the inside of the chamber. The chamber may be a sealed space where physical and chemical reactions are performed, such as in a semiconductor process. For example, the chamber may be a space where a chemical vapor deposition process is performed to form a thin film on a substrate, but the embodiment of the present invention is not limited thereto. The state in which the chamber and the conduit are connected to the external space may change depending on the operating state of the butterfly valve (10), and thus, a change in the pressure inside the chamber may occur.

The gate plate (100) may be a thin plate having a predetermined thickness. The housing (120) constitutes the overall outer shape of the valve, and a valve passage communicating with the conduit may be defined through an inner wall surface.

The valve passage may be an open area that is open to communicate with a conduit. The gate plate (100) may be arranged to correspond to the valve passage and configured to open and close the valve passage.

The shaft (110) may be formed to extend along the X-axis direction and may be arranged to partially penetrate the housing (120). For example, one side of the shaft (110) may penetrate the valve passage and be connected to the interior of the housing (120). The other side of the shaft (110) may be arranged on the outside of the housing (120). The other side of the shaft (110) arranged on the outside of the housing (120) may be connected to a driving member (not shown) that rotates the shaft. The driving member may include an encoder, a motor, a gear box, and a coupler, and may rotate the shaft according to a control signal.

The shaft (110) is configured to partially penetrate the housing (120) and has a distal end rotatably connected to the housing (120). When connected to the housing (120), the shaft (110) can be configured to rotate in a clockwise or counterclockwise direction. The shaft (110) is configured to extend along the X-axis direction and can rotate along the axial direction.

The shaft (110) can be connected to the gate plate (100) while extending so as to pass through the center of the gate plate (100). The shaft (110) positioned so as to pass through the center of the gate plate (100) can be coupled with the gate plate (100). As the shaft (110) is coupled so as to pass through the center of the gate plate (100), the gate plate (100) rotates dependently on the rotation of the shaft (110).

In Fig. 1, the direction in which the fluid is communicated on the conduit may be the Z-axis direction. In a state in which the shaft (110) does not rotate, the gate plate (100) may be positioned to correspond to the X-Y plane and may substantially close the valve passage. The gate plate (100) is controlled to operate in a closed state in which the valve passage is closed when rotation by the shaft (110) is not performed, and in an open state in which the valve passage is opened when rotation by the shaft (110) is performed.

As shown in Fig. 2, when the shaft (110) rotates partly in a counterclockwise or clockwise direction, the gate plate (100) can rotate along with it. The open state can be defined as a state in which the area of the valve passage increases compared to the closed state as the gate plate (100) rotates. As the closed state changes to the open state, the area of the valve passage expands, and the flow rate of the fluid flowing into or out of the chamber changes, thereby changing the pressure of the chamber.

Here, the gate plate (100) may be positioned so that a clearance of a predetermined width is formed with the inner wall surface in the closed state. The butterfly valve (10) may be in a non-sealed state in the closed state, and may not be in a non-sealed state in which the movement of the fluid is completely blocked. The butterfly valve (10) may have a main purpose of controlling the flow rate of the fluid flowing into or out of the chamber to maintain the pressure inside the chamber at a certain level, and this function may be performed in the non-sealed state. However, the embodiment of the present invention is not limited thereto, and the gate plate (100) may be configured to be in close contact with the inner wall surface in the closed state to form a sealed state. In this case, the gate plate (100) may further include a sealing member for sealing, and the sealing member may be arranged along the outer periphery of the gate plate (100). That is, the pressure control inside the chamber may be performed even in the sealed state.

In addition, the gate plate (100) according to some embodiments of the present invention may include an internal heating element. The shaft (110) may accommodate wiring related to the operation of the internal heating element of the gate plate (100) therein. Hereinafter, with reference to FIGS. 4 to 12, the structure and configuration of the gate plate (100) and the shaft (110) according to some embodiments of the present invention will be described in more detail.

FIG. 4 exemplarily illustrates a first plate of a gate plate according to some embodiments of the present invention. FIG. 5 exemplarily illustrates a second plate of a gate plate according to some embodiments of the present invention. FIG. 6 exemplarily illustrates a state in which an internal heating element and wiring are configured in the second plate of FIG. 5. FIG. 7 exemplarily illustrates a state in which the second plate of FIG. 6 and the first plate of FIG. 4 are combined. FIG. 8 is a cross-sectional view taken along the cutting lines (A-A', B-B') of FIG. 7. FIG. 9 exemplarily illustrates a shaft according to some embodiments of the present invention. FIG. 10 exemplarily illustrates a front view of a combined structure in which the gate plate of FIG. 7 is combined with the shaft of FIG. 9. FIG. 11 exemplarily illustrates a cross-sectional view taken along the line C-C' of FIG. 10. FIG. 12 exemplarily illustrates a back view of the combined structure of FIG. 10.

A gate plate (100) according to some embodiments of the present invention includes a first heating element (103), a second plate (102), and a first plate (101).

The gate plate (100) may be a rotating plate having at least one flat surface. The gate plate (100) may be a circular rotating plate, but is not limited thereto. The second plate (102) may form the overall outer shape of the gate plate (100). The flat surface of the gate plate (100) may be one surface of the second plate (102), and a space may be defined inside the second plate (102) for coupling with the first plate (101) and accommodating the first heating element (103). The second plate (102) may be a kind of cover that accommodates the first plate (101) and the first heating element (103) so that they are not exposed to the outside.

The second plate (102) and the first plate (101) may each be formed with an accommodation space for accommodating the first heating element (103). The first plate (101) may be coupled to the second plate (102) so as to be accommodated in the second plate (102). The second plate (102) may have a space further defined therein for accommodating the first plate (101). The first plate (101) accommodates the first heating element (103) together with the second plate (102) while being coupled thereto.

Referring to FIG. 4, the first plate (101) includes a first bottom portion (101A) and a first side wall portion (101B).

The first bottom portion (101A) may be a circular plate of a predetermined width. The first bottom portion (101A) may have a flat shape on one side, and a first side wall portion (101B) is formed on one side to form a receiving space described later.

The first side wall portion (101B) may be a structure formed by extending from the edge of the first bottom portion (101A). The first side wall portion (101B) may be extended vertically from the edge of the first bottom portion (101A) to define a first heating element receiving space (HS1) for partially accommodating the first heating element (103). The first heating element receiving space (HS1) may be configured in a shape corresponding to the outer shape of the first heating element (103) and may partially accommodate the first heating element (103).

The butterfly valve (10) may further include a wiring (104) connected to the first heating element (103). This wiring (104) may be partially accommodated in the gate plate (100) while being connected to the first heating element (103) and may extend to an external device through the inside of the shaft (110). Here, the external device may be a device that provides and receives an electrical signal related to the operation of the first heating element (103). For example, the external device may provide operating power to the first heating element (103). In addition, the external device may be a sensor that senses the state of the first heating element (103).

The first side wall portion (101B) may further define a first wiring accommodation space (LS1) for partially accommodating a wiring (104) connected to the first heating element (103). That is, the first wiring accommodation space (LS1) may be a space through which a wiring (104) connected to the first heating element (103) passes.

Referring to FIG. 5, the second plate (102) may include a second bottom portion (102A) and a second side wall portion (102B).

The second bottom portion (102A) may be a circular plate of a predetermined width. The second bottom portion (102A) may have a flat shape on one side, and a second side wall portion (102B) is formed on one side to form a receiving space described later.

The second side wall portion (102B) may be formed to extend from the edge of the second bottom portion (102A) so as to define a first joining space (BS1) for joining with the first plate (101) and a first connection space (CS1) and a second connection space (CS2) for joining with the shaft (110).

Here, since the second plate (102) is configured to accommodate the first plate (101), the second plate (102) may be configured to have a larger area than the first plate (101). The diameter of the circle forming the outer shape of the second bottom portion (102A) may be configured to be larger than the diameter of the circle forming the outer shape of the first bottom portion (102A).

The first joining space (BS1) may be configured to correspond to the outer shape of the first bottom portion (102A). In practice, the diameter of the circle defining the first joining space (BS1) and the diameter of the circle forming the outer shape of the first bottom portion (102A) may be the same. The first plate (101) may be configured to be accommodated within the first joining space (BS1). The first joining space (BS1) may be a space introduced into the interior of the second side wall portion (102B) so that the first plate (101) may be accommodated.

The first bonding space (BS1) may further define a second heating element receiving space (HS2) for partially receiving the first heating element (103). The second heating element receiving space (HS2) may be configured in a shape corresponding to the outer shape of the first heating element (103) and may partially receive the first heating element (103).

The first heating element (103) can be accommodated in the first heating element accommodating space (HS1) and the second heating element accommodating space (HS2). The first heating element accommodating space (HS1) and the second heating element accommodating space (HS2) can provide an accommodation space corresponding to the entire area of the first heating element (103), and the first heating element accommodating space (HS1) and the second heating element accommodating space (HS2) can accommodate the first heating element (103) together. The first heating element (103) can generate heat and transfer heat to the gate plate (100) while being accommodated in the first heating element accommodating space (HS1) and the second heating element accommodating space (HS2).

In addition, the first bonding space (BS1) may further define a second wiring accommodation space (LS2) for partially accommodating the wiring (104) connected to the first heating element (103). The second wiring accommodation space (LS2) may be a path through which the wiring (104) connected to the first heating element (103) passes. The second wiring accommodation space (LS2) and the first wiring accommodation space (LS1) may provide a space corresponding to the area of the wiring (104), and the second wiring accommodation space (LS2) and the first wiring accommodation space (LS1) may accommodate the wiring (104) together.

The first bonding space (BS1) is composed of a second heating element receiving space (HS2) and a second wiring receiving space (LS2) as receiving spaces and a bonding space excluding these receiving spaces. The bonding space may be a space where the first plate (101) is seated and direct contact is performed.

The first connection space (CS1) and the second connection space (CS2) defined in the second side wall portion (102B) may be spaces for connection with the shaft (110). The first connection space (CS1) and the second connection space (CS2) may be regions in which a step for contact with the shaft (110) is formed in the second side wall portion (102B). The shaft (110) may be connected to the gate plate (100) so that the central axis of the gate plate (100) and the first connection space (CS1) and the second connection space (CS2) pass together. Here, the central axis of the gate plate (100) may be the center point of the second bottom portion (102A). The first connection space (CS1) and the second connection space (CS2) may be configured to be symmetrical with respect to the center of the second plate (102). In addition, the first connection space (CS1) and the second connection space (CS2) may be configured to be symmetrical with respect to the second heating element receiving space (HS2). The width (w1) of the first connection space (CS1) and the width (w2) of the second connection space (CS2) may be configured to correspond to the shaft (110). Specifically, the shaft (110) may further define a space for connection with the gate plate (100), and the width (w1) of the first connection space (CS1) and the width (w2) of the second connection space (CS2) may be defined as widths corresponding to this space.

The first connection space (CS1) may correspond to a path through which the wiring (104) passes. In addition, the first connection space (CS1) may further include a first wiring hole (LL1) that communicates with the second wiring receiving space (LS2). The wiring (104), while connected to the first heating element (103), may pass through the second wiring receiving space (LS2) and the first wiring receiving space (LS1) and may extend to the outside of the gate plate (100) through the first wiring hole (LL1).

FIG. 6 is an exemplary diagram for explaining a state in which a first heating element (103) is accommodated in a second plate (102). Referring to FIG. 6, it can be seen that a lower portion of the first heating element (103) is accommodated in a second heating element accommodation space (HS2). In addition, it can be seen that the wiring (104) is connected to the first heating element (103) and sequentially passes through the second wiring accommodation space (LS2) and the first wiring hole (LL1) to extend outside the gate plate (100). The remaining space in the bonding space (BS1) in which the first heating element (103) and the wiring (104) are not accommodated may be a space in which the first plate (101) is accommodated.

FIG. 7 exemplarily illustrates a state in which a first plate (101) is coupled to a second plate (102). The first plate (101) is accommodated in the first coupling space (BS1) of the second plate, and the first heating element (103) and the wiring (104) are accommodated together. The coupling between the first plate (101) and the second plate (102) can be performed through welding. As the first plate (101) is accommodated in the first coupling space (BS1) of the second plate (102), an area where the first bottom portion (101A) of the first plate (101) and the first coupling space (BS1) of the second plate (102) come into contact, a boundary area (B), can be defined. By performing welding for the boundary area (B), the first plate (101) can be fixedly coupled to the second plate (102) while being accommodated in the second plate (102). In some embodiments, welding may be performed entirely along the boundary area (B), but is not limited thereto, and welding may also be performed based on multiple contact points. Here, welding performed entirely along the boundary area (B) can prevent particles from penetrating into the boundary area (B), and further enhance the bonding strength between the first plate (101) and the second plate (102).

The first side wall portion (101B) can be divided into a region where the first heating element receiving space (HS1) and the first wiring receiving space (LS1) described above are formed, and a structure region surrounding the region. Here, the height of the first side wall portion (101B) can mean a vertical length from one side of the first bottom portion (101A) to the upper part of the first side wall portion (101B). In addition, the width of the first plate (101) can be defined as a value that adds the height of the first bottom portion (101A) and the height of the first side wall portion (101B). The width (h1) of the first plate (101) can be defined as shown in (a) of FIG. 8.

In addition, the second side wall portion (102B) can be divided into a region where the first joining space (BS1), the first connection space (CS1), and the second connection space (CS2) described above are formed, and a structure region surrounding them. Here, the height of the second side wall portion (102B) can mean a vertical length from one side of the second bottom portion (102A) to the upper part of the second side wall portion (102B). In addition, the height of the second side wall portion (102B) can mean a width at which the side wall portion (102B) is drawn inward to define the joining region (BS1). Referring to (a) of FIG. 8, it can be seen that the first heating element (103) is completely accommodated through the joining of the first plate (101) and the second plate (102). In addition, it can be seen that the width (h1) of the first plate (101) is lower than the height (h2) of the second side wall portion (102B), and that the first plate (101) is completely accommodated in the second plate (102).

In addition, the height (h3) of the first connection space (CS1) may mean a vertical length from one side of the second bottom portion (102A) to the upper part of the first connection space (CS1). The height (h3) of the second connection space (CS2) may mean a vertical length from one side of the second bottom portion (102A) to the upper part of the second connection space (CS2). The height of the first connection space (CS1) and the height of the second connection space (CS2) may be the same.

Referring to (b) of FIG. 8, it can be seen that the width (h1) of the first plate (101) is lower than the height (h3) of the first connection space (CS1) and the height (h3) of the second connection space (CS2). The first plate (101) can form a distance from the shaft (110) by the difference between the width (h1) of the first plate (101) and the height (h3) of the first connection space (CS1). That is, the first plate (101) can be coupled to the second plate (102) so that an air gap is formed between the bottom surface (111B) of the shaft (110).

As described above, the first plate (101) and the second plate (102) can be combined to form a gate plate (100) while accommodating a heating element (103) and a wiring (104) therein. The combined gate plate (100) can be combined with a shaft (110) through the first connection space (CS1) and the second connection space (CS2) of the second plate (102).

Referring to FIG. 9, the shaft (110) is configured as a cylindrical shape as a whole, and a second coupling space (111) for coupling with the gate plate (100) may be defined. The second coupling space (111) corresponds to a space introduced into the inside of the shaft (110). The second coupling space (111) is a space for coupling the second plate (102), and two side wall portions (111A) and a bottom portion (111B) may be defined. The bottom portion (111B) has a flat shape and corresponds to an area where contact with the second plate (102) occurs. Through the space between the side wall portions (111A), the second plate (102) may enter the inside of the shaft (110) and may come into contact with the bottom portion (111B). The distance between the two side walls (111A), i.e., the length (d1) of the bottom portion (111B), may correspond to the diameter of the second plate (102). The length (d1) of the bottom portion (111B) may be substantially the same as the diameter of the second plate (102). In addition, the width (d2) of the bottom portion (111B) may correspond to the width (w1) of the first connection space (CS1) and the width (w2) of the second connection space (CS2) of the second plate (102). The width (d2) of the bottom portion (111B) may be substantially the same as the width (w1) of the first connection space (CS1) and the width (w2) of the second connection space (CS2) of the second plate (102).

In addition, the shaft (110) may include a second wiring hole (LL2) configured to penetrate the interior of the shaft (110) so that the bottom portion (111B) and the side portion of the shaft (110) are connected. One end of the second wiring hole (LL2) is formed on the upper portion of the bottom portion (111B), and the other end is formed on the side portion along the longitudinal direction of the shaft (110). The second wiring hole (LL2) may be configured to penetrate the interior of the shaft (110). The wiring (104) extended externally from the gate plate (100) may pass through the interior of the shaft (110) through the second wiring hole (LL2) and extend to the exterior of the shaft (110). Here, one end of the second wiring hole (LL2) formed in the bottom portion (111B) may be configured to correspond to the first wiring hole (LL1). When the gate plate (100) is coupled with the shaft (110), the first wiring hole (LL1) and the second wiring hole (LL2) can overlap. When the first connection space (CS1) and the second connection space (CS2) of the second plate (102) come into contact with the bottom part (111B) of the second coupling space (111) of the shaft (110), the first wiring hole (LL1) and the second wiring hole (LL2) can overlap. Accordingly, when the gate plate (100) is coupled to the shaft (110), the wiring (104) passing through the first wiring hole (LL1) can be directly connected to the second wiring hole (LL2) and can extend to the outside of the shaft (110) through the second wiring hole (LL2).

The gate plate (100) can be coupled to the shaft (110) as shown in FIG. 10, and can form a coupling structure (CB). In an embodiment of the present invention, the coupling structure (CB) means a state in which the gate plate (100) including the wiring (104) and the first heating element (103) is coupled to the shaft (110). In addition, in the coupling structure (CB), the wiring (104) corresponds to a state in which it extends to the outside of the shaft (110) through the second wiring hole (LL2) of the shaft (110).

Here, it can be seen that the coupling between the gate plate (100) and the shaft (110) is performed through the first coupling space (CS1) and the second coupling space (CS2) of the second plate (102). In addition, it can be seen that the first plate (101) is coupled to the second plate (102) while being spaced apart from the shaft (110) by a certain distance (G). The first plate (101) can indirectly maintain a coupling state with the shaft (110) while being coupled to the second plate (102).

Referring to FIG. 11, the distance between the first plate (101) and the bottom portion (111B) of the shaft (110) may be the difference between the width (h1) of the first plate (101) and the height (h3) of the first connection space (CS1). That is, an air gap (G) corresponding to the difference between the width (h1) of the first plate (101) and the height (h3) of the first connection space (CS1) is formed. Through this air gap (G), direct contact between the first plate (101) and the shaft (110) can be blocked, and the contact area between the gate plate (100) and the shaft (110) can be minimized, thereby minimizing heat transfer to the shaft (110).

The gate plate (100) according to an embodiment of the present invention includes a first heating element (103) therein so that removal of particles accumulated on the gate plate (100) can be efficiently performed. In addition, the gate plate (100) is configured such that the first plate (101) located at the bottom does not come into contact with the shaft (110), is connected to the second plate, and the contact area with the shaft (110) is minimized, so that heat transfer to the shaft (110) can be minimized, and durability degradation, thermal deformation, etc. caused by high heat being provided to the shaft (110) can be prevented.

In some embodiments of the present invention, the shaft (110) and the gate plate (100) may be configured as an integral part. It can be seen that no other fastener is used to connect and fix the shaft (110) and the gate plate (100) therebetween. In some embodiments of the present invention, the shaft (110) and the gate plate (100) may be connected to each other through welding without using fasteners such as bolts, screws, nuts, or pins. In the present invention, “integrated” may mean a state in which a connection between two different functional components is performed through welding without using other fasteners.

Since the shaft (110) and the gate plate (100) are not connected through a separate fastener, the gate plate (100) can be configured thinner, and precise control through the gate plate (100) can be possible. In addition, since the shaft (110) and the gate plate (100) are configured as an integral body through welding, the problem of powder or the like accumulating at the area where the fastener is placed, causing contamination or damage to the fastening area, and thus loosening the fastening state, can be prevented at the source.

Referring to FIG. 12, the connection between the shaft (110) and the second plate (102) can be performed by welding the first boundary area (B1) between the first connection space (CS1) and the shaft (110) and the second boundary area (B2) between the second connection space (CS2) and the shaft (110). Here, the welding can be performed based on a plurality of specific contact points among the first boundary area (B1) and the second boundary area (B2), but the embodiment of the present invention is not limited thereto. The welding is performed entirely along the first boundary area (B1) and the second boundary area (B2) to prevent particles from penetrating into the corresponding areas and further enhance the bonding strength between the shaft (110) and the second plate (102).

In addition, in some embodiments, a heat-resistant adhesive layer may be formed between the first plate (101) and the second joining space (111) of the shaft (110). That is, a heat-resistant adhesive layer having a width corresponding to the air gap (G) described above may be formed between the first plate (101) and the second joining space (111) of the shaft (110). The heat-resistant adhesive layer may improve the bonding force between the gate plate (100) and the shaft (110). In addition, the heat-resistant adhesive layer may include a heat-resistant material that can suppress the transfer of heat of the gate plate (100) to the shaft (110) more than a general air layer. That is, the heat-resistant adhesive layer may include a material having lower thermal conductivity than air. For example, the heat-resistant adhesive layer may be a heat-resistant adhesive porous layer including a heat-resistant resin and an acrylic resin, but is not limited thereto. Through the heat-resistant adhesive layer, the bonding strength between the gate plate (100) and the shaft (110) can be further improved, and the heat of the plate heating element (103) can be further prevented from being transferred to the shaft (110). Accordingly, the durability and operational efficiency of the bonding structure (CB) can be further improved.

Again, referring to FIG. 1, the butterfly valve (10) according to some embodiments of the present invention may further include a second heating element (140) for transferring heat to the interior of the housing (120) and a feedthrough (130) for increasing airtightness. The second heating element (140) may provide heat to the housing (120), specifically, to the valve passage within the housing (120). Through the second heating element (140), heat may be transferred to remove particles accumulating in the valve passage of the housing (120).

The feedthrough (130) can accommodate a wire (104) extending through the shaft (110). The feedthrough (130) corresponds to a configuration that connects two different spaces. The feedthrough (130) can transmit electrical signals of two different spaces while maintaining a pressure difference between the inner space and the outer space of the butterfly valve (10). The feedthrough (130) can include a conductor connected to the wire (104) and an insulator surrounding the conductor. The insulator can be composed of a material that has insulating properties, maintains airtightness, and can withstand thermal expansion and vacuum pressure. For example, the insulator can be composed of a ceramic or glass material, but is not limited thereto. The wire (104) can exchange electrical signals with the outside of the valve (10) while maintaining airtightness and pressure inside the valve (10) through the feedthrough (130).

In addition, according to some embodiments of the present invention, the butterfly valve (10) is positioned inside the housing (120) or separated from the housing (120) in a state where the shaft (110) and the gate plate (100) are joined to each other through welding, that is, in a state of an integrated joint structure. To this end, the housing (120) may be configured as a double structure in which the upper and lower parts are separated. For example, when installing the joint structure, the work of positioning the joint structure in which the shaft (110) and the gate plate (100) are joined, and separating the positioned joint structure may be performed while the upper housing is separated from the lower housing, and after all the work is performed, the process of joining the upper housing to the lower housing is performed. Hereinafter, the structure and other configurations of the housing (120) of the butterfly valve (10) according to some embodiments of the present invention will be described in more detail with reference to FIGS. 13 to 15.

FIG. 13 is a fragmentary perspective view of a butterfly valve according to some embodiments of the present invention. FIG. 14 exemplarily illustrates a state in which a first housing and a second housing are separated according to some embodiments of the present invention. FIG. 15 exemplarily illustrates a state in which a first housing and a second housing are coupled according to some embodiments of the present invention.

Referring to FIGS. 13 to 15, a housing (120) of a butterfly valve (10) according to some embodiments of the present invention includes a separable first housing (120A) and a second housing (120B).

The first housing (120A) may be a space in which the main components of the butterfly valve (10) are accommodated and operated. The first housing (120A) may accommodate a coupling structure (CB). The second housing (120B) may be arranged on the upper portion of the first housing (120B) and may seal the first housing (120A) by coupling with the first housing (120A) that accommodates the coupling structure (CB). The coupling structure (CB) is accommodated in the first housing (120A) and may be operated in a sealed state by the second housing (120B).

The first housing (120A) includes a first main body portion (121A), a first fastening portion (122A), a first receiving portion (123A), a valve passage (124A), a shaft receiving portion (125A), a connecting structure passage portion (126A), a first opening portion (127A), and a second housing connecting portion (128A).

The second housing (120B) includes a second main body (121B), a second fastening portion (122B), a second receiving portion (123B), a first sealing portion (124B), a second sealing portion (125B), and a second opening (126B).

The first main body (121A) constitutes the outer shape of the first housing (120A), and other configurations can be arranged and formed. The first fastening portion (122A) can be formed on the upper surface of the first main body (121A) as a configuration for coupling with the second housing (120B). The first receiving portion (123A) can be a space formed inward from the upper surface of the first main body (121A), and can partially accommodate the second heating element (140).

The second main body (121B) forms the outer shape of the second housing (120B), and other configurations can be arranged and formed. The second fastening portion (122B) can be configured to penetrate the second main body (121B) as a configuration for coupling with the first housing (120A). In addition, the second receiving portion (123B) is a space configured to penetrate the second main body (121B) and can partially accommodate the second heating element (140).

The first fastening portion (122A) may be configured in multiples. As illustrated in FIG. 13, the plurality of first fastening portions (122A) may be configured in two symmetrical pieces based on the center of the first main body portion (121A), but the embodiment of the present invention is not limited thereto. In addition, the second fastening portions (122B) may be configured in a number corresponding to the first fastening portions (122A). That is, when the first housing (120A) and the second housing (120B) are coupled, the first fastening portions (122A) and the second fastening portions (122B) may overlap.

As in the example of Fig. 13, the plurality of second fastening portions (122B) may be configured in two and positioned symmetrically with respect to the center of the second main body portion (121B). The number of fastening holes (BT) may also be configured in multiples, corresponding to the number of first fastening portions (122A). In the example of Fig. 13, each of the two fastening holes (BT) may pass through the corresponding second fastening portions (122B) to be coupled with the first fastening portion (122A), and may fix the coupled state of the first housing (120A) and the second housing (120B).

The first housing (120A) and the second housing (120B) can accommodate the second heating element (140) together through the first receiving portion (123A) and the second receiving portion (123B). The second heating element (140) can be configured in plurality, and the corresponding first receiving portion (123A) and the second receiving portion (123B) can be configured respectively. The second receiving portion (123B) can be configured at a position corresponding to the first receiving portion (123A). That is, when the first housing (120A) and the second housing (120B) are combined, the first receiving portion (123A) and the second receiving portion (123B) can overlap. In the example of Fig. 13, two second heating elements (140) may be configured and partially accommodated in two first receiving portions (123A) configured to be symmetrical with respect to the center of the first main body portion (121A). The remaining portions of the two second heating elements (140) are accommodated in two second receiving portions (123B) configured to be symmetrical with respect to the center of the second main body portion (121B).

In addition, the first main body part (121A) has an open space defined inside, and each space may be in communication with each other and may be defined as a valve passage (124A), a shaft receiving portion (125A), a coupling structure passage portion (126A), a first opening (127A), and a second housing coupling portion (128A) depending on the function.

The valve passage (124A) may be open on the inside to correspond to the outer shape of the gate plate (100). The valve passage (124A) may be open along the Z-axis direction, which is the direction of movement of the flow path. The first main body part (121A) may include an inner circumference that is opened in a cylindrical shape along the Z-axis direction to define the valve passage (124A). Here, a first opening (127A) may be formed on one side of the inner circumference. The shaft receiving portion (125A) may be arranged to be spaced apart from the first opening (127A) and may be formed concavely on the other side of the inner circumference. The coupling structure passage (126A) may be an area that is open on both sides along the inner circumference with respect to the shaft receiving portion (125A). That is, the coupling structure passage (126A) may be a passage whose inner circumference is open in a clockwise and counterclockwise direction with respect to the shaft receiving portion (125A).

The space defined by the shaft receiving portion (125A), the coupling structure passage portion (126A) and the second housing coupling portion (128A) may be a space for the coupling structure (CB) to move.

The second housing joint (128A) may be an area that opens the upper surface and interior of the first main body (121A), and may be sealed through joint with the second housing (120B).

The shaft receiving portion (125A) may have a concave shape that is recessed inwardly to correspond to the outer shape of the shaft (110) penetrating the interior of the housing (120). The shaft receiving portion (125A) may be formed along the longitudinal direction of the shaft (110) and may have a shape that corresponds to the outer surface of the shaft (110). The shaft (110) may enter the interior through the shaft receiving portion (125A), but may be partially received and seated in the shaft receiving portion (125A). In a state where a portion of the shaft (110) is coupled and seated in the shaft receiving portion (125A), the shaft (110) may perform rotation along the axial direction.

The coupling structure passage (126A) may be an open area extending to both sides based on the shaft receiving portion (125A). This open area extending to both sides corresponds to a movement space of the gate plate (100). The coupling structure passage (126A) may have an area through which the gate plate (100) can move up and down along the X-axis direction. The coupling structure passage (126A) may provide a space and path through which the gate plate (100) coupled to the shaft (110) can be introduced from the outside into the housing (120).

The first opening (127A) may be configured to have a diameter through which the distal end of the shaft (110) can pass. The distal end of the shaft (110) passing through the first opening (127A) is connected to a driving member that rotates the shaft.

Through the second housing coupling portion (128A), the coupling structure (CB) can enter the interior of the first main body portion (121A), and can be fixed inside the first main body portion (121A) while passing through the shaft receiving portion (125A), the coupling structure passage portion (126A), the valve passage (124A), and the first opening (127A) in sequence. The coupling structure (CB) can enter the valve passage (121A) through the shaft receiving portion (125A) and the coupling structure passage portion (126A). The shaft (100) of the coupling structure (CB) that has entered the valve passage (121A) can pass through the first opening (127A) at its distal end while being coupled to the shaft receiving portion (125A). The distal end of the shaft (110) is arranged outside the first housing (120A) through the first opening (127A). Referring to FIG. 13, a sealing member (S1, S2) for sealing between a shaft (110) located on the outside of a first housing (120A) and a first opening (127A) may be placed between the shaft (110) and the first opening (127A).

In the completed state of being arranged inside the first main body (121A) of the coupling structure (CB), the valve passage (121A) is closed from communication with the outside in the Z direction by the gate plate (100). The first opening (127A) can be sealed through the shaft (100) and the sealing member. The shaft (100) may be seated in the shaft receiving portion (125A). However, even when the coupling structure (CB) is seated and coupled, the coupling structure passage (126A) and the second housing coupling portion (128A) may be open. The coupling structure passage (126A) and the second housing coupling portion (128A) are sealed through the coupling of the second housing (120B) and the first housing (120A).

The second main body (121B) of the second housing (120B) may have a width and depth corresponding to those of the first main body (121A), and may have a rectangular hexagonal structure with a predetermined height. The second sealing portion (125B) may have a structure protruding from the second main body (121B) and may have a shape corresponding to the open shape of the second housing coupling portion (128A). The first sealing portion (124B) may have a structure protruding from the second sealing portion (125B) and may have a shape corresponding to the coupling structure passage portion (126A). The coupling structure passage portion (126A) is an open area along the inner circumferential surface defining the valve passage (121A), and the first sealing portion (124B) may have a shape covering the open inner circumferential surface area. The first sealing portion (124B) may have a structure in which two arch-shaped protrusions having curves corresponding to the inner surface are symmetrically arranged, and the joint structure passageway portion (126A), which is an open area along the inner surface, may be completely sealed by the arch-shaped protrusions.

As in the example of Fig. 14, the second housing (120B) located at the top can be moved downward so that a coupling with the first housing (120A) can be performed as in the example of Fig. 15. The second housing coupling portion (128A) can be closed by a second sealing portion (125B) having a corresponding shape, and the coupling structure passage portion (126A) can be closed by a first sealing portion (124B) having a corresponding shape. Referring to Fig. 15, it can be seen that the coupling structure passage portion (126A) that was opened in Fig. 14 is closed by the first sealing portion (124B) having a corresponding shape. In addition, in some embodiments, a sealing member (not shown) for airtightness between the second housing coupling portion (128A) and the second sealing portion (125B) can be further configured along the surface of the second sealing portion (125B),

The second opening (126B) may be a space where one end of the feedthrough (130) and the shaft (110) are connected. When the second housing (120B) is coupled with the first housing (120A), one end of the shaft (110) of the coupling structure (CB) is coupled with the feedthrough (130) and connected to the second opening (126B). As in the example of Fig. 4, a sealing member may be further arranged in the second opening (126B) to improve the sealing of the butterfly valve (10).

The above description is merely an illustrative description of the technical idea of the present embodiment, and those with ordinary skill in the art to which the present embodiment pertains may make various modifications and variations without departing from the essential characteristics of the present embodiment. Therefore, the present embodiments are not intended to limit the technical idea of the present embodiment but to explain it, and the scope of the technical idea of the present embodiment is not limited by these embodiments. The protection scope of the present embodiment should be interpreted by the following claims, and all technical ideas within a scope equivalent thereto should be interpreted as being included in the scope of the rights of the present embodiment.

Claims (10)

A butterfly valve located on a conduit through which fluid is communicated with the inside of the chamber.
A housing defining a valve passage communicating with the above conduit;
a shaft disposed in the housing so as to penetrate the valve passage; and
Including a gate plate that is arranged within the valve passage and is combined with the shaft and formed to have a cross-section corresponding to the shape of the valve passage,
The above gate plate includes a first heating element, a second plate that accommodates the first heating element together, and a first plate,
The first plate partially accommodates the first heating element by joining with the second plate,
Only the second plate is directly coupled with the shaft, and the first plate is indirectly coupled with the shaft through coupling with the second plate.
The first plate is coupled with the second plate, and a space is formed between the shaft and the first plate.
Butterfly valve.
A butterfly valve located on a conduit through which fluid is communicated with the inside of the chamber.
A housing defining a valve passage communicating with the above conduit;
a shaft disposed in the housing so as to penetrate the valve passage; and
Including a gate plate that is arranged within the valve passage and is combined with the shaft and formed to have a cross-section corresponding to the shape of the valve passage,
The above gate plate includes a first heating element, a second plate that accommodates the first heating element together, and a first plate,
The first plate partially accommodates the first heating element by joining with the second plate,
The second plate is coupled with the shaft so that the first plate in the coupled state is spaced apart from the shaft,
The first plate includes a first bottom portion, a first side wall portion extending from a border of the first bottom portion and defining a first heating element receiving space for partially receiving the first heating element,
The second plate includes a second bottom portion, a second side wall portion extending from a border of the second bottom portion and defining a first joining space for joining with the first plate, and a first connection space and a second connection space for joining with the shaft.
The first coupling space defines a second heating element accommodating space for accommodating the remaining portion of the first heating element that is not accommodated in the first heating element accommodating space.
The first connection space and the second connection space are formed in the second side wall portion so as to correspond to the longitudinal direction of the shaft.
Butterfly valve.
In the second paragraph,
The first side wall portion is further defined with a first wiring accommodation space for partially accommodating wiring related to the first heating element,
The first bonding space is further defined with a second wiring accommodation space for accommodating the remaining portion of the second heating element that is not accommodated in the first wiring accommodation space.
Butterfly valve.
In the third paragraph,
The above shaft further defines a second joining space that is introduced inwardly for contact with the first connecting space and the second connecting space of the second plate,
In a state where the first connection space and the second connection space are connected to the second joining space, the connection between the shaft and the second plate is fixed by welding the first boundary area between the second joining space and the first connecting space and the second boundary area between the second joining space and the second connecting space.
Butterfly valve.
In the fourth paragraph,
The first connection space further includes a first wiring hole communicating with the second wiring receiving space,
The above shaft further includes a second wiring hole connecting the upper surface of the second coupling space and the side of the shaft,
In a state where the above shaft and the second plate are combined, the first wiring hole and the second wiring hole overlap,
The wiring received through the first wiring receiving space and the second wiring receiving space extends to the side of the shaft through the first wiring hole and the second wiring hole.
Butterfly valve.
In the second paragraph,
The connection between the first plate and the second plate is fixed by welding the boundary area where the first floor portion and the first joining space come into contact.
Butterfly valve.
In the second paragraph,
The first plate is configured such that the width is lower than the height of the first connection space and the height of the second connection space.
Butterfly valve.
In claim 1 or 2,
Further comprising a second heating element disposed in the housing;
Butterfly valve.
In claim 1 or 2,
The above housing,
A coupling structure comprising a first housing having an open area defined in a vertical direction in which the shaft and the gate plate are combined and is movable; and a second housing covering the first housing to which the coupling structure is combined and sealing the first housing and the coupling structure.
Butterfly valve.
In Article 9,
The wiring connected to the above first heating element is electrically connected to an external device through a feedthrough arranged in the above second housing.
Butterfly valve.

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