KR102699844B1 - Film forming apparatus and scaffold unit - Google Patents

Abstract

[Task] To improve work efficiency during maintenance
[Solution] An inline deposition device for forming a film on a substrate while returning the substrate comprises a return unit for returning the substrate, and a deposition source unit that includes a first position below the return unit and a second position laterally displaced with respect to the first position. The deposition device comprises a foothold unit that deploys a foothold below the return unit in conjunction with the movement of the deposition source unit from the first position to the second position.

Description

{FILM FORMING APPARATUS AND SCAFFOLD UNIT}

The present invention relates to a membrane device and a footing unit.

Conventionally, an inline device for processing a substrate while returning the substrate has been known. Patent Document 1 discloses an inline substrate processing device in which a plurality of processing units are arranged side by side in the vertical direction.

[Patent Document 1] Japanese Patent Publication No. 2018-93087

In the above conventional technology, maintenance of processing units other than the lowest processing unit must be performed by preparing a stepping stone, etc. For this reason, time is required for preparing and removing the stepping stone, and work efficiency during maintenance may be reduced.

The present invention provides a technique for improving work efficiency during maintenance.

According to one aspect of the present invention,

A return unit for returning the substrate,

A tabernacle unit is provided, which includes a tabernacle source and is movable to a first position below the return unit and a second position laterally displaced with respect to the first position.

An inline deposition device that deposits a film on a substrate while returning the substrate,

A membrane forming device is provided, characterized in that it has a foothold unit that deploys a foothold downward of the return unit in conjunction with the movement of the membrane unit from the first position to the second position.

According to the present invention, work efficiency during maintenance can be improved.

[Figure 1] This is a front view schematically showing a membrane device according to one embodiment.
[Fig. 2] This is a side view of the tabernacle device of Fig. 1.
[Figure 3] This is a drawing schematically showing the internal structure of the membrane device of Figure 1.
[Figure 4] This is a perspective view showing the configuration of the footing unit.
[Figure 5] This is a drawing of the footing unit seen from the front of the tabernacle device.
[Figure 6] This is a drawing explaining the movement of the deposition source unit and the deployment operation of the foothold unit.
[Figure 7] (A) is a drawing of the foothold unit before the deployment operation as seen from the front of the film-forming device. (B) is a drawing of the foothold unit during the deployment operation as seen from the front of the film-forming device.
[Figure 8] This is a plan view schematically showing the positional relationship of the return unit and the footrest unit.
[Figure 9] This is a drawing of the footing unit seen from the front of the tabernacle device.
[Figure 10] A side view of a membrane device according to one embodiment.
[Figure 11] This is a front view schematically showing a membrane device according to one embodiment.
[Fig. 12] This is a plan view of the tabernacle device of Fig. 11.
[Figure 13] This is a front view schematically showing a membrane device according to one embodiment.
[Figure 14] This is a perspective drawing showing the outline of the footing unit.
[Figure 15] This is a drawing showing the configuration of a foothold unit, and is a drawing showing a plurality of mounting parts, an elevating part, and their surrounding configuration.
[Figure 16] This is a drawing showing the configuration of a floor board member, and is a perspective view of the floor board member (81) viewed from the back side.
[Figure 17] This is a perspective view showing the configuration of a rail member.
[Figure 18] This is an operation explanatory diagram explaining the transfer operation of the floor board member from the tact section to the rail member.

Hereinafter, the embodiments will be described in detail with reference to the attached drawings. In addition, the embodiments below do not limit the invention with respect to the scope of the patent claims, and not all combinations of features described in the embodiments are necessarily essential to the invention. Two or more of the multiple features described in the embodiments may be arbitrarily combined. In addition, identical or similar configurations are assigned the same reference numbers, and duplicate descriptions are omitted.

Additionally, in each drawing, the X direction represents the return direction of the substrate, the Y direction represents the width direction intersecting the return direction of the substrate, and the Z direction represents the up-down direction.

<First embodiment>

<Overview of the Tabernacle Device>

Fig. 1 is a front view schematically showing a film forming device (1) according to one embodiment. Fig. 2 is a side view of the film forming device (1) of Fig. 1. Fig. 3 is a drawing schematically showing the internal structure of the film forming device (1) of Fig. 1.

The film forming device (1) is an inline film forming device that forms a film on a substrate while returning the substrate. The film forming device (1) is used, for example, in the manufacture of a display panel of an organic EL display device for a smartphone, and a plurality of devices can be arranged side by side to form a manufacturing line.

In this embodiment, a substrate held on a substrate holding tray (100) is sequentially returned to a film forming apparatus (1), and the film forming apparatus (1) performs deposition of an organic EL on the returned substrate. For example, rather than being returned to the film forming apparatus (1), the substrate is held on a substrate holding tray (100) in a state where it overlaps with a mask in an upstream process and then returned to the film forming apparatus (1). Therefore, in the film forming apparatus (1), a thin film of a deposition material having a predetermined pattern is formed on the substrate by the mask. As a material of the substrate on which deposition is performed in the film forming apparatus (1), glass, resin, metal, etc. can be appropriately selected, and a material in which a resin layer such as polyimide is formed on glass is preferably used. As the deposition material, a material such as an organic material or an inorganic material (metal, metal oxide, etc.) is used. The film forming apparatus (1) is applicable to, for example, a manufacturing apparatus for manufacturing electronic devices such as a display device (flat panel display, etc.), a thin film solar cell, an organic photoelectric conversion element (organic thin film imaging element), or an optical member, and in particular, is applicable to a manufacturing apparatus for manufacturing an organic EL panel. In the following description, an example in which the film forming apparatus (1) forms a film on a substrate by vacuum deposition is described, but the aspect of the film forming method is not limited to this, and various film forming methods such as sputtering or CVD can be applied.

The deposition device (1) includes a return unit (2), a deposition source unit (3), a deposition plate (6), a moving unit (7), and a frame portion (101).

The frame part (101) is installed so as to be able to support components such as the return unit (2) of the membrane device (1). In the example of Fig. 1, the frame part (101) includes columns and beams and supports the return unit (2) and the vacuum pump (102). In addition, a crane for work or a passage for workers to perform maintenance may be installed in the frame part (101).

The return unit (2) returns the substrate. In the present embodiment, the return unit (2) returns the substrate by returning the substrate holding tray (100) that holds and supports the substrate. The return unit (2) includes a return chamber (21) and a return roller (22).

The return chamber (21) is a box-shaped chamber capable of maintaining a vacuum inside. The internal space (210) of the return chamber (21) is maintained in a vacuum atmosphere or an inert gas atmosphere such as nitrogen gas. In the present embodiment, the return chamber (21) is connected to a vacuum pump (102). In the present specification, “vacuum” means a state filled with gas having a pressure lower than atmospheric pressure, or in other words, a reduced pressure state.

In the return chamber (21), an inlet opening (211) through which the substrate holding tray (100) is introduced and an outlet opening (212) through which the substrate holding tray (100) is taken out are formed. In addition, a communication opening (213) is formed at the lower portion of the return chamber (21) to connect the internal space (210) and the internal space (310) of the deposition source chamber (31). Meanwhile, a gate valve (not shown) or the like may be installed in the inlet opening (211) and the outlet opening (212) to maintain the internal space (210) at a vacuum.

The return roller (22) returns the substrate holding tray (100) that holds and supports the substrate. The return roller (22) is installed in the internal space (210) of the return chamber (21). The return roller (22) is a cylindrical member that is formed of, for example, a metal material and is rotatably supported. The return roller (22) is driven by, for example, an electric motor (not shown) installed outside the return chamber (21).

Additionally, in this embodiment, a reinforcing rib (23) is installed at the lower part of the return unit (2).

The deposition source unit (3) is a unit (deposition source unit) having a deposition source (32) (deposition source) that emits a deposition material to the substrate. In the present embodiment, three deposition source units (3) are arranged side by side in the substrate transfer direction (X direction) for one transfer unit (2). However, the number of deposition source units (3) can be set appropriately, and may be two or less or four or more. In addition, the deposition source unit (3) is positioned below the transfer unit (2) and connected to the lower part of the transfer unit (2) when the deposition process is performed. The deposition source unit (3) includes a deposition source chamber (31) and a deposition source (32).

The deposition chamber (31) is a box-shaped chamber capable of maintaining a vacuum inside. The internal space (310) of the deposition chamber (31) can be communicated with the internal space (210) of the return chamber (21) through a communication opening (311) installed at the top of the return chamber (21). During operation, the internal space (310), like the internal space (210), is maintained in a vacuum atmosphere or an inert gas atmosphere such as nitrogen gas.

The deposition source (32) discharges a deposition material for film formation on a substrate conveyed by the conveying unit (2). For example, the deposition source (32) includes a plurality of nozzles (not shown) arranged in a parallel manner in the Y direction, and a deposition material is discharged from each nozzle. In addition, for example, the deposition source (32) includes a storage portion for storing the deposition material and a heater (both not shown) for heating the deposition material stored in the storage portion. The deposition material stored in the storage portion is heated by the heater and vaporized, thereby discharging the deposition material from the deposition source (32).

In addition, the deposition source unit (3) may include a shutter for shielding the deposition source (32) when the deposition source (32) is not in use, or an evaporation rate monitor for monitoring the amount of evaporation of the deposition material by the deposition source (32), etc. (all not shown).

The deposition-blocking plate (6) prevents the deposition material released from the deposition source (32) from being attached to the inner wall of the deposition source chamber (31) or the return chamber (21). For example, the deposition-blocking plate (6) is supported on the deposition source chamber (31). In the present embodiment, the deposition-blocking plate (6) is positioned from the inner space (310) to the inner space (210) so as to cover the deposition source (32), and has an opening formed at the upper portion. With this configuration, a portion of the deposition material is attached to the substrate through the opening, while the remaining deposition material is attached to the deposition-blocking plate (6). In this way, the deposition-blocking plate (6) allows the deposition material to be attached to the substrate, while preventing the deposition material from being attached to the inner wall of the deposition source chamber (31) or the return chamber (21).

Meanwhile, in the present embodiment, the deposition plate (6) is installed so as to be able to move up and down relative to the deposition source chamber (31). More specifically, the deposition plate (6) includes an upper portion (61) and a lower portion (62), and the upper portion (61) is installed so as to be able to move up and down relative to the deposition source chamber (31). As a result, when the deposition source unit (3) is moved laterally by the moving unit (7), the amount of lowering of the deposition source unit (3) required to avoid interference between the return unit (2) and the deposition plate (6) can be reduced.

Meanwhile, in addition to the deposition plate (6), a deposition plate may be installed in the return chamber (21) or the deposition source chamber (31). For example, the deposition plate may be installed on the inner ceiling surface or side surface of the return chamber (21).

The moving unit (7) is a unit that moves the deposition source unit (3). In the present embodiment, the moving unit (7) is installed below the deposition source unit (3), and moves the deposition source unit (3) in the up-and-down direction (Z direction) or the lateral direction (Y direction) while supporting the deposition source unit (3). The moving unit (7) includes a lateral moving section (71) and an elevating section (72).

The lateral movement unit (71) moves the deposition source unit (3) in the lateral direction (Y direction). In the present embodiment, the lateral movement unit (71) moves the deposition source unit (3) in the width direction (Y direction) of the substrate that intersects the substrate transport direction (X direction). The lateral movement unit (71) includes a guide unit (711) installed on the bottom surface, and a driving unit (712) for moving the deposition source unit (3) along the guide unit (711). As the driving unit (712), a well-known technology can be appropriately employed, and for example, a driving wheel capable of running on a rail as the guide unit (711) may be rotated by a motor or the like.

The elevating unit (72) elevates the deposition source unit (3). In the present embodiment, the elevating unit (72) elevates the deposition source unit (3) in the up-and-down direction (Z direction). The elevating unit (72) includes a deposition source unit support unit (721) that supports the deposition source unit (3), and a driving unit (722) that elevates the deposition source unit support unit (721). As the driving unit (722), a well-known technology can be employed, and for example, the deposition source unit support unit (721) may be elevated by an electric cylinder or the like.

In the present embodiment, when maintenance of the return unit (2) is performed, the moving unit (7) moves the deposition source unit (3) laterally from a lower position of the return unit (2), thereby enabling the worker to access the interior of the return chamber (21) from the lower portion of the return chamber (21). At this time, the moving unit (7) moves the deposition source unit (3) downward by the lifting unit (72) and then moves the deposition source unit (3) laterally by the lateral moving unit (71). This operation will be described later together with the operation description of the footrest unit (4) described later (Fig. 6).

Meanwhile, in the present embodiment, the moving unit (7) is installed for each of the plurality of deposition source units (3). Therefore, the film forming apparatus (1) of the present embodiment can independently move each of the plurality of deposition source units (3). Meanwhile, the plurality of moving units (7) may be synchronized to move the plurality of deposition source units (3) together. In addition, a smaller number of moving units (7) than the number of deposition source units (3) may be installed, and the plurality of deposition source units (3) may be moved by one moving unit (7).

Meanwhile, although the description is omitted, the film forming device (1) may include a control device that controls the operation of a return unit (2), a deposition source unit (3), or a moving unit (7), etc.

<Composition of the footing unit>

Fig. 4 is a perspective view showing the configuration of the foothold unit (4), and shows a state in which the foothold (41) is deployed. In addition, Fig. 5 is a drawing of the foothold unit (4) as seen from the front of the film forming device (1), and shows a state in which the foothold (41) is deployed. The foothold unit (4) includes a foothold (41), a lifting portion (42), a handrail portion (43), a connecting portion (44), and a fixing portion (45). Meanwhile, in Fig. 5, the lifting portion (42) and the handrail portion (43) are omitted.

The footrest (41) is used for maintenance of the return unit (2), etc., and is also called a step or step. The footrest (41) includes a pillar part (411), a beam part (412), and a floor board part (413).

The column member (411) supports the beam member (412). One column member (411) includes two column members (4111) and a connecting member (4112) that rotatably connects the two column members (4111) and is in contact with the floor surface. In the present embodiment, a total of four column members (411) are installed. In addition, the column member (4111) is rotatably connected to the beam member (4121) or beam member (4122) of the beam member (412) at an end opposite to the end connected to the connecting member (4112).

The brace (412) supports the floor board (413). The brace (412) includes brace members (4121) and brace members (4122) of different lengths, and a connecting member (4123) that connects the brace members. The brace (412) is composed of two parts spaced apart in the X direction, and each part is connected to each other by two brace members (4121), two brace members (4122), and three connecting members (4123) and installed to extend in the Y direction. In addition, the connecting member (4123) rotatably supports the brace members (4121, 4122). In this way, the brace (412) can be folded because a plurality of brace members are installed rotatably.

The floor board (413) forms an area where a worker can move, such as when performing maintenance on the return unit (2). The floor board (413) is arranged at a predetermined height from a plane on which the film forming device (1) is installed, in order to facilitate the worker's access to the return unit (2). The floor board (413) includes a plurality of plate-shaped members (4131 to 4135) that are installed side by side in the Y direction. The plate-shaped members (4131 to 4135) are each supported at both ends in the X direction by a support member (4121), a support member (4122), or a connecting member (4123). Therefore, the floor board (413) is folded along with the folding of the support member (412).

The elevator (42) is for a worker to get on and off the floor board (413) of the unfolded step (41). In the present embodiment, the elevator (42) is a ladder. However, the elevator (42) may be a staircase, a step, or the like. In addition, the elevator (42) is rotatably supported on, for example, the step (412).

The railing portion (43) includes a plurality of railings (431 to 433) that stand on the floor board portion (413) of the unfolded footboard (41). The railing (431) is rotatably installed on a plate-shaped member (4131), the railing (432) is rotatably installed on a plate-shaped member (4133), and the railing (433) is rotatably installed on a plate-shaped member (4135). When the footboard (41) is folded, the railings (431 to 433) are folded together with the floor board portion (413) in a state where they are collapsed on the floor board portion (413).

In this embodiment, the connecting portion (44) connects the foot plate (41) and the deposition source unit (3) via the moving unit (7) by connecting the foot plate (412) and the moving unit (7). Alternatively, the connecting portion (44) may directly connect the foot plate (41) and the deposition source unit (3).

The fixed part (45) fixedly supports the foot plate (41) at a predetermined position. In the present embodiment, the fixed part (45) supports the end of the supporting member (4121) that is installed furthest from the deposition source unit (3) in the Y direction, on the side farthest from the deposition source unit (3). The fixed part (45) may be supported by a component that does not follow the movement of the deposition source unit (3), such as a frame member (101) or a return unit (2). In this case, the fixed part (45) itself is fixedly installed, but the fixed part (45) may support the supporting member (4121) in a rotational or slidable manner.

In this embodiment, a foothold unit (4) is installed for each of the three deposition source units (3). That is, the film forming apparatus (1) includes three foothold units (4).

However, in the present embodiment, when performing maintenance inside the return chamber (21) of the return unit (2), the worker can move the deposition source unit (3) laterally and access the internal space (210) through the exposed chimney opening (213). On the other hand, since the return unit (2) is installed above the deposition source unit (3), there are cases where the worker cannot perform maintenance on the return unit (2) while standing on the floor. In such a case, if the worker takes time to prepare and remove a stepping stone, etc., the work efficiency during maintenance decreases. Therefore, in the present embodiment, as described below, the stepping stone is deployed downward of the return unit (2) in conjunction with the horizontal movement of the deposition source unit (3).

<Description of the operation of the foothold unit>

Fig. 6 is a drawing explaining the operation of the deposition source unit (3) and the footing unit (4). In addition, Fig. 7(A) is a drawing of the footing unit (4) before the deployment operation as seen from the front of the deposition device (1), and shows the footing unit (4) in the state (ST1) and the state (ST2) of Fig. 6. In addition, Fig. 7(B) is a drawing of the footing unit (4) during the deployment operation as seen from the front of the deposition device (1), and shows the footing unit (4) in the state (ST3) of Fig. 6. Meanwhile, in Fig. 7(A) and Fig. 7(B), the lifting section (42) and the handrail section (43) are omitted.

State (ST1) is a state in which the deposition source unit (3) is located at a connection position (POS1) connected to the return unit (2). State (ST1) is a state in which the film forming device (1) performs deposition on a substrate. In state (ST1), the deposition source unit (3) is located below the return unit (2), and the lower part of the return unit (2) and the upper part of the deposition source unit (3) are connected.

State (ST2) is a state in which the deposition source unit (3) has moved from the connection position (POS1) to the disconnection position (POS2) below it. The deposition source unit (3) is moved in the -Z direction from the connection position (POS1) to the disconnection position (POS2) by the lifting member (72) of the moving unit (7).

Meanwhile, in state (ST1) or state (ST2), the footing unit (4) is in a folded state. In these states, the pillar member (4111), the beam member (4121), and the beam member (4122) are arranged to extend in the Z direction, and the connecting member (4123) is arranged to extend in the Y direction. In addition, the floor board portion (413) is folded along the beam portion (412). As a result, the footing unit (4) is configured compactly in the Y direction as a whole.

State (ST3) is a state during movement to the maintenance position of the deposition source unit (3). The footing (41) of the footing unit (4) is in a state where one end is supported by the fixed part (45) at a predetermined position, and the other end connected to the connecting part (44) moves laterally (right direction in the drawing, -Y direction) in conjunction with the movement of the deposition source unit (3), thereby unfolding from the folded state.

State (ST4) is a state in which the horizontal movement of the deposition unit (3) is completed. In state (ST4), the deposition unit (3) is located at a maintenance position (POS3) where maintenance of the return unit (2) or the deposition unit (3) is performed. In a state in which the deposition unit (3) is located at the maintenance position (POS3), the footrest (41) is deployed downward from the return unit (2).

Fig. 8 is a plan view schematically showing the positional relationship between the return unit (2) and the foothold unit (4). In the present embodiment, when the deposition source unit (3) is positioned at the maintenance position (POS3) (see the deposition source unit (3) in the center of Fig. 8), the deployed foothold (41) is deployed so as to be positioned below the communication opening (213) of the return unit (2). In other words, the deployed foothold (41) is arranged so as to face the communication opening (213) below the return unit (2). In other words, when the deposition source unit (3) is at the maintenance position (POS3), the foothold (41) is arranged so as to overlap the communication opening (213) of the return unit (2) in the vertical direction (Z direction) when viewed from the plan. Since the footrest (41) is positioned below the chimney opening (213), the worker can more easily access the internal space (210) while standing on the footrest. In addition, when the deposition source unit (3) is positioned at the maintenance position (POS3), the footrest (41) may be positioned so as to overlap the chimney opening (213) when viewed in a plan view over the entire area in the Y direction of the chimney opening (213). As a result, the worker can more easily access approximately the entire internal space (210).

As described above, according to the present embodiment, the foothold unit (4) deploys the foothold (41) downward of the return unit (2) in conjunction with the movement of the deposition source unit (3) from the disconnection position (POS2) to the maintenance position (POS3). As a result, when performing maintenance on the return unit (2), access to the return unit (2) becomes easy, and since preparation and removal of a stepping stone or the like are not necessary, work efficiency during maintenance can be improved.

<Second embodiment>

Fig. 9 is a drawing of the footing unit (9) according to the second embodiment, viewed from the front of the film forming device (1), showing the state in which the footing (91) is deployed. In the second embodiment, the shape of the sill and the floor board are different from those of the first embodiment. Hereinafter, in some cases, the same reference numerals are used for the same configuration as that of the first embodiment, and the description thereof is omitted.

In this embodiment, the footing (91) includes a pillar portion (411), a beam portion (912), and a floor board portion (913). The beam portion (912) supporting the floor board portion (913) includes a beam member (9121), a beam member (9122), and a connecting member (9123). Here, the beam member (9121) and the beam member (9122) are installed to be inclined with respect to the Y direction, which is the moving direction of the deposition source unit (3), when the footing (91) is deployed. More specifically, when viewed in the X direction, the direction in which the beam member (9121) and the beam member (9122) extend includes a Y direction component and a Z direction component.

By this configuration, since the axial direction of the supporting member (9121) and the supporting member (9122) is oblique with respect to the movement direction of the deposition source unit (3) at the maintenance position (POS3), the supporting member (9121) and the supporting member (9122) are easily rotated when the deposition source unit (3) moves laterally. Therefore, according to the present embodiment, the unfolded foot plate (91) can be easily folded.

In addition, in the present embodiment, the plate-shaped members (9131 to 9135) have a shape such that the bottom surface of the floor board portion (913) becomes approximately horizontal. In other words, the plate-shaped member (9131), the plate-shaped member (9133), and the plate-shaped member (9135) supported by the beam member (9121) or the beam member (9122) extending obliquely with respect to the Y direction are formed so that the surface constituting the bottom surface of the floor board portion (913) becomes a horizontal surface. In addition, the plate-shaped member (9131), the plate-shaped member (9133), and the plate-shaped member (9135) are formed so that the surface supported by the beam member (9121) or the beam member (9122) becomes an inclined surface corresponding to the direction in which the beam member (9121) or the beam member (9122) extends. By this, the footrest (91) can be easily folded while keeping the bottom surface of the footrest (91) horizontal.

<Other embodiments>

In the first embodiment, the handrail (43) is installed on the footing unit (4), but the handrail may be installed on the lower part of the return unit (2). Fig. 10 is a side view of a film forming device (1) according to one embodiment. In this example, the handrail (931) is installed so as to extend downward from the rib (23) of the return unit (2). This handrail (931) may be installed across the Y direction to the lower part of the return unit (2).

In addition, the position and number of handrails installed can be appropriately changed. For example, in the example of Fig. 4, the handrail portion (43) is installed only on one side in the X direction with respect to the floor board portion (413), but may be installed on both sides in the X direction with respect to the floor board portion (413). Alternatively, when a plurality of stepping stones (41) are installed side by side in the X direction, the handrail portion (43) may be installed only on the ends on both outer sides of the stepping stones (41) on both outer sides in the X direction.

In addition, the connecting portion (44) may be installed so as to be able to release the connection between the foot plate (41) and the deposition source unit (3). As a result, the foot plate (41) can be deployed only when necessary.

In addition, the configuration of the footing (41) can be appropriately changed. In the above embodiment, two pillar members (4111) are connected by a connecting portion (4112), but the pillar members (4111) may independently support the beam (412) by contacting the floor surface.

In addition, the film forming device (1) may be equipped with a sensor that detects a value related to the inclination of the deposition source unit (3). Then, the film forming device (1) may stop the raising/lowering operation of the deposition source unit (3), i.e., the movement operation between the connection position (POS1) and the disconnection position (POS2), if the value related to the inclination of the deposition source unit (3) detected by the sensor does not satisfy a predetermined condition.

For example, the sensor may be one that directly detects the inclination of the deposition source unit (3), such as a pendulum-type or float-type inclination sensor, or one that indirectly detects the inclination, such as an acceleration sensor. In addition, for example, the sensor may be one that detects a value that can determine that an inclination has occurred in the deposition source unit (3), such as a value related to the driving load of the driving units (722) on both sides (e.g., a driving current value) or a load of the deposition source unit (3) applied to the deposition source unit support members (721) on both sides.

In addition, for example, the deposition device (1) may stop the raising/lowering operation of the deposition source unit (3) when the inclination of the deposition source unit (3) detected by the sensor is equal to or greater than the threshold value. Alternatively, the deposition device (1) may stop the raising/lowering operation of the deposition source unit (3) when the difference between the driving current values of the driving units (722) on both sides or the load of the deposition source unit (3) applied to the deposition source unit support unit (721) is equal to or greater than the threshold value.

<Third embodiment>

Fig. 11 is a front view schematically showing a film forming apparatus (13) according to the third embodiment. In addition, Fig. 12 is a plan view of the film forming apparatus (13) of Fig. 11, showing a state in which the central deposition source unit (3) is located at a maintenance position (POS3). This embodiment differs from the first embodiment in that the film forming apparatus (13) includes an extraction unit (5). Hereinafter, in some cases, the same reference numerals are given to the same configuration as the first embodiment and the description thereof is omitted.

The extraction unit (5) extracts a predetermined part from above the deposition source unit (3) located at the maintenance position (POS3). As the predetermined part, for example, a deposition source chamber (31) and a deposition plate (6) accommodated in the deposition source chamber (31) of the deposition source unit (3) can be mentioned. The extraction unit (5) is supported on a frame portion (101) so as to be able to move above the deposition source unit (3). The extraction unit (5) includes a holding portion (51), a vertical moving portion (52), and a horizontal moving portion (53).

The holding member (51) holds and supports a predetermined component. For example, the holding member (51) may hold a predetermined component by moving its tip portion in a predetermined direction, such as a horizontal direction. Alternatively, the holding member (51) may be provided with a hook for hanging a wire for a sling, and may hold and support a predetermined component by hanging it with a wire. Meanwhile, the holding member (51) may be configured to be foldable so as to be able to accommodate different sizes.

The vertical moving part (52) moves the holding part (51) in the vertical direction. Any known technology may be appropriately employed as the vertical moving part (52), but for example, an electric cylinder having a ball screw mechanism or a pneumatic balance cylinder may be used.

The horizontal movement unit (53) moves the holding unit (51) in the horizontal direction. Specifically, the horizontal movement unit (53) moves the vertical movement unit (52) in the horizontal direction, thereby moving the holding unit (51) in the horizontal direction. For example, the horizontal movement unit (53) includes an X-direction movement unit (531) that moves the vertical movement unit (52) in the X direction, and a Y-direction movement unit (532) that moves the vertical movement unit (52) in the Y direction. In the present embodiment, the Y-direction movement unit (532) moves the vertical movement unit (52) in the Y direction, and the X-direction movement unit (531) moves the Y-direction movement unit (532) in the X direction. As the X-direction movement unit (531) and the Y-direction movement unit (532), known technologies may be appropriately employed, but may also be configured to include, for example, a rack and pinion mechanism and an electric motor that rotates the pinion. In addition, by using a gear-type mechanism, movement in at least one of the X and Y directions may be performed by manpower from a worker without having a driving source.

For example, when the extraction unit (5) takes out a predetermined part from the deposition source unit (3) located at the maintenance position (POS3), it places the taken out part on a maintenance stand (not shown). This makes it easier for the worker to perform maintenance than when the part to be maintained is inside the deposition source chamber (31).

Meanwhile, a configuration in which multiple extraction units (5) are installed is also possible. In this case, when the deposition source units (3) on both sides are pulled out to the maintenance position (POS3), extraction of parts from each deposition source unit (3) can be performed in parallel. In addition, when multiple extraction units (5) are installed, for example, a rail portion of the X-direction moving section (531) may be shared.

<Fourth embodiment>

Fig. 13 is a front view schematically showing a film forming device (14) according to the fourth embodiment. In this embodiment, the configuration of the footing unit is different from that of the first embodiment. Hereinafter, the same reference numerals are used for the configurations similar to those of the first embodiment and the description thereof is omitted. In addition, when a plurality of the same components are installed, the reference numerals of some of the components are omitted in order to make the drawing easier to read.

Fig. 14 is a perspective view schematically showing a foothold unit (8). In addition, Fig. 15 is a drawing showing the configuration of the foothold unit (8), and is a drawing showing a plurality of mounting parts (82), an elevating part (84), and their peripheral configuration. The foothold unit (8) includes a plurality of floor board members (81) as a foothold, a plurality of mounting parts (82), a pair of rail members (83), an elevating part (84), and a connecting part (85).

A plurality of floor board members (81a to 81h) (hereinafter collectively referred to as floor board members (81)) are arranged side by side in the vertical direction when the deposition source unit (3) is in the connection position (POS1) or the disconnection position (POS2) (see FIGS. 13 and 15). In addition, a plurality of floor board members (81) are arranged side by side in the horizontal direction when the deposition source unit (3) is in the maintenance position (POS3) (see FIG. 14).

Fig. 16 is a drawing showing the configuration of a floor board member (81), and is a perspective view of the floor board member (81) viewed from the back side. Each of the plurality of floor board members (81) includes a ceiling wall (811), a side wall (812), a positioning portion (813), a positioning portion (814), and an extension portion (815). The ceiling wall (811) is a portion that forms a footrest for a worker. The side wall (812) forms an X-direction side surface of the floor board member (81). The side wall (812) includes a wall portion (812a) that is installed on the inside in the X direction with respect to other portions. The positioning portion (813) determines the positions of the plurality of mounting portions (82). The positioning portion (814) determines the positions of a pair of rail members (83). In this embodiment, the positioning portion (813) is a protrusion that protrudes inwardly in the X direction from the wall portion (812a), and the positioning portion (814) is a protrusion that protrudes outwardly in the X direction from the wall portion (812a).

A plurality of mounting sections (82a to 82h) (hereinafter collectively referred to as mounting sections (82)) are configured to be able to mount a plurality of floor board members (81a to 81h), respectively. The plurality of mounting sections (82) include a plate member (821) on which the floor board member (81) is mounted, and a positioning section (822) (see FIG. 18) installed at a position corresponding to the positioning section (813) of the floor board member (81). In the present embodiment, the positioning section (822) is configured by forming a concave section for receiving the positioning section (813) in a block installed on the plate member (821). In the present embodiment, the positioning sections (822) are installed two at a time in each mounting section (82) spaced apart in the X direction so as to correspond to the position of the positioning section (813) when the floor board member (81) is mounted. Meanwhile, for each tactile part (82), the plate member (821) may be installed in multiple pieces spaced apart in the X direction, or may be composed of one piece.

A pair of rail members (83) support a plurality of floor board members (81) that are arranged laterally side by side. In the present embodiment, the pair of rail members (83) are supported via a connecting portion (831) to a rib (23) or a frame portion (101) of a film forming device (14). Alternatively, the pair of rail members (83) may be directly supported to the rib (23) or the frame portion (101), or may be supported to a support portion arranged on a floor surface. Fig. 17 is a perspective view showing the configuration of the rail member (83). A positioning portion (833) for determining the position of the floor board member (81) is installed on the pair of rail members (83). The positioning portions (833) are installed at predetermined intervals on each of the pair of rail members (83). The positioning part (833) is configured by forming a concave part in a block installed on a rail member (83) to receive the positioning part (814) of the floor board member (81). In addition, a rail-side rack (845), which will be described later, is installed on the lower side of a pair of rail members (83).

Referring again to FIG. 15, the lifting unit (84) elevates a plurality of mounting units (82). The lifting unit (84) includes a support unit (841), a gear (842), a gear (843), a gear (844), a rail-side rack (845), and a support unit-side rack (846). The support unit (841) extends in the elevating direction (vertically in the present embodiment) and supports a plurality of mounting units (82).

The gear (842) rotates when the deposition unit (3) moves between the disconnection position (POS2) and the maintenance position (POS3), by having its teeth (842a) engage with the teeth (845a) (see FIG. 18) of the rail-side rack (845). That is, when the deposition unit (3) moves laterally, the gear (842) moves laterally with respect to the rail-side rack (845), and thus the gear (842) rotates.

The gear (843) transmits the rotation of the gear (842) to the gear (844). In the present embodiment, a Geneva mechanism is formed by the gear (842) and the gear (843). That is, when the convex portion (842b) installed on the gear (842) enters the groove portion (843a) of the gear (843), the rotation of the gear (842) is transmitted to the gear (843), and when not, the rotation is not transmitted. Thereby, the rotation of the gear (842) is intermittently transmitted to the gear (843). In addition, the rotation of the gear (843) is transmitted to the gear (844) when the tooth portion (843b) thereof engages with the tooth portion (844a) of the gear (844). In other words, the rotation of the gear (842) is transmitted to the gear (844) via the gear (843).

In addition, the gear (844) transmits a rotational driving force to the support-side rack (846) by meshing its teeth (844a) with the teeth (846a) of the support-side rack (846). The support-side rack (846) converts the rotation of the gear (844) into linear motion. As the support-side rack (846) moves in the ascending direction (vertical direction) by the rotation of the gear (844), the support (841) on which the support-side rack (846) is installed ascends and descends. Then, a plurality of mounting members (82) supported by the support (841) ascend and descend.

The connecting portion (85) is a connecting portion of the foothold unit (8) with the moving unit (7). When the foothold unit (8) is connected to the moving unit (7) by the connecting portion (85), multiple mounting portions (82), etc. of the foothold unit (8) move laterally in accordance with the horizontal movement of the deposition source unit (3).

Fig. 18 is an operation explanatory drawing explaining the transfer operation of the floor board member (81) from the mounting portion (82) to the rail member (83). Meanwhile, in order to make the drawing easier to read, the rail member (83) and the rail-side rack (845) arranged on the front side of the drawing in the X direction are indicated by broken lines.

In the present embodiment, a plurality of floor board members (81) are arranged side by side in the vertical direction while the deposition source unit (3) is positioned at the connection position (POS1) or the connection release position (POS2). Then, the plurality of floor board members (81) are deployed so as to be arranged laterally in conjunction with the movement of the deposition source unit (3) from the connection release position (POS2) to the maintenance position (POS3). Specifically, a plurality of floor board members (81) are sequentially transferred from a plurality of mounting portions (82) to a pair of rail members (83) in conjunction with the movement of the deposition source unit (3) from the connection release position (POS2) to the maintenance position (POS3), whereby the plurality of floor board members (81) are arranged laterally. Figure 18 illustrates the operation when the floor plate member (81a) mounted on the uppermost mounting member (82a) among the plurality of mounting members (82) is transferred to a pair of rail members (83). However, the operation is also the same when other mounting members (82b to 82h) transfer the floor plate member (8lb to 81h) to a pair of rail members (83).

State (ST101) is a state in which, after the floor board member (8 lb) is transferred from the second receiving member (82b) from the top to a pair of rail members (83), the deposition source unit (3) moves laterally a predetermined distance. In state (ST101), the plurality of receiving members (82) move laterally along with the movement of the deposition source unit (3) by engagement between the teeth (842a) of the gear (842) and the teeth (845a) of the rail-side rack (845). On the other hand, in state (ST101), since the convex portion (842b) is not entered into the groove portion (843a), the lifting operation by the lifting member (84) is not performed. In other words, the receiving member (82) moves in the horizontal direction.

State (ST102) is a state in which the deposition source unit (3) has moved laterally with respect to the rail member (83) by a predetermined distance from state (ST101). In state (ST102), the plurality of mounting portions (82) are moved laterally along with the movement of the deposition source unit (3) and are moved downward by the lifting portion (84). That is, as the convex portion (842b) enters the groove portion (843a), the rotation of the gear (842) is transmitted to the support-side rack (846) through the gear (843) and the gear (844), and the mounting portion (82) is moved downward. For example, when the horizontal movement of the mounting member (82) is performed to a degree that avoids contact between the floor board member (8lb) and the floor board member (81a), intermittent transmission of rotation of the gear (842) is performed to start moving the mounting member (82) downward.

State (ST103) is a state after the floor plate member (81a) is transferred from the mounting portion (82a) to a pair of rail members (83). In state (ST103), the plurality of mounting portions (82) move laterally in accordance with the movement of the deposition source unit (3). During the transition from state (ST102) to state (ST103), the mounting portions (82a) move laterally and downward. Then, when the mounting surface on which the floor plate member (81a) of the mounting portion (82a) is mounted moves from the upper side to the lower side of the supporting surface of the floor plate member (81a) of the pair of rail members (83), the floor plate member (81a) is transferred to the rail member (83). That is, when the mounting member (82a) moves from the upper side to the lower side of a pair of rail members (83), it transfers the floor board member (81a) that is being mounted to the rail member (83).

As described above, in this embodiment, the footrest is deployed downwardly of the return unit (2) in conjunction with the movement of the deposition source unit (3) from the disconnection position (POS2) to the maintenance position (POS3).

Meanwhile, the foothold unit (8) may have an ascending/descending member such as a ladder, stairs, or step that can ascend/descending on a floor board member (81) as a foothold in an unfolded state.

The invention is not limited to the above embodiments, and various modifications and changes are possible within the scope of the invention.

1: Tabernacle Device
2: Return Unit
3: Deposition source unit
4: Foothold Unit
41: Foothold

Claims (19)

A return unit for returning the substrate,
A membrane element unit is provided, which includes a first position below the return unit and a membrane element unit that is movable to a second position transversely displaced from the first position to a return direction in which the return unit returns the substrate.
An inline deposition device that deposits a film on a substrate while returning the substrate,
A membrane forming device characterized by having a foothold unit that deploys a foothold downward of the return unit in conjunction with the movement of the membrane source unit from the first position to the second position. In the first paragraph,
The above footing unit includes a foldable floor board as the footing,
A membrane device characterized in that the folded floor board part is unfolded in conjunction with the movement of the membrane unit from the first position to the second position. In the second paragraph,
The above footing unit is,
A beam as the footing supporting the above floor board,
A membrane device characterized by including a connecting portion connecting the above-mentioned bow and the above-mentioned membrane source unit. In the third paragraph,
A membrane device characterized in that, when the foothold is deployed, the sill is installed at an angle with respect to the direction of movement of the membrane unit. In any one of claims 1 to 4,
A film forming apparatus characterized in that the above-mentioned foothold unit includes a lifting member for a worker to ascend and descend the deployed foothold. In any one of claims 1 to 4,
A membrane forming device, characterized in that the above-mentioned foothold unit includes a railing that stands up against the deployed foothold. In any one of claims 1 to 4,
A deposition apparatus further characterized by including a railing extending downward from the lower portion of the return unit. In any one of claims 1 to 4,
A plurality of the above tabernacle unit are installed side by side in the direction of return of the substrate so as to be able to move independently,
A membrane device, characterized in that the above-mentioned foothold unit is installed for each of the plurality of membrane source units. In any one of claims 1 to 4,
The above return unit includes a communication opening for connecting the internal space of the return unit and the internal space of the tabernacle unit,
A membrane forming device, characterized in that the expanded foothold is positioned so as to face the communication opening at the bottom of the return unit. In the first paragraph,
The above-mentioned footing unit comprises a plurality of floor board members,
In conjunction with the movement of the above tabernacle unit from the first position to the second position, the plurality of floor board members arranged vertically at the first position are arranged horizontally,
A membrane forming device characterized by further comprising an extraction unit for taking out a predetermined part from above the membrane forming unit located at the second position. In Article 10,
The above extraction unit is,
A holding support part that holds and supports the above-mentioned specified parts,
A vertical moving part that moves the above-mentioned holding part in a vertical direction,
A film forming device characterized by including a horizontal moving part that moves the holding support part in a horizontal direction. In the first paragraph,
The above footing unit includes a plurality of floor board members as the footing,
The above multiple floor board members are,
The above tabernacle unit is arranged in a vertical direction while being positioned at the first position,
A membrane device characterized in that the membrane unit is arranged horizontally in conjunction with the movement from the first position to the second position. In Article 12,
The above footing unit is,
A plurality of mounting sections arranged in a vertical direction and capable of mounting each of the plurality of floor board members,
A pair of rail members are included to support the plurality of floor board members arranged in a transverse direction,
A membrane forming device characterized in that the plurality of floor plate members are sequentially transferred from the plurality of mounting members to the pair of rail members in conjunction with the movement of the membrane unit from the first position to the second position, thereby arranging the plurality of floor plate members in a transverse direction. In Article 12,
The above footing unit is,
A plurality of mounting sections arranged in a vertical direction and capable of mounting each of the plurality of floor board members,
A pair of rail members supporting the plurality of floor board members arranged in a transverse direction,
Including an elevator for elevating the above multiple tactile parts,
The above plurality of tactile parts move laterally together with the tabernacle unit when the tabernacle unit moves from the first position to the second position, and also move downward by the lifting unit.
A film forming device characterized in that each of the plurality of mounting sections transfers each of the plurality of floor board members that are mounted to the rail member when moving from the upper side to the lower side of the pair of rail members. In Article 14,
A membrane forming device characterized in that the above-mentioned lifting member intermittently lowers the plurality of floor board members when the membrane unit moves from the first position to the second position. In Article 14 or 15,
The above elevator,
A first rack installed on the above pair of rail members,
When the above tabernacle unit moves from the first position to the second position, a first gear that rotates while engaging with the first rack,
A second gear to which the rotation of the first gear is transmitted,
A support member extending in the direction of elevation and supporting the plurality of said wit members,
A film forming device characterized by including a second rack installed on the support member and moving the support member in an ascending direction by engaging with the second gear. In Article 16,
A film forming device, characterized in that the above-mentioned lifting unit intermittently transmits the rotation of the first gear to the second gear by a Geneva drive. In any one of Articles 13 to 15,
A film forming apparatus, characterized in that each of the plurality of floor board members includes a first positioning part for determining a position for the plurality of mounting parts, and a second positioning part for determining a position for the pair of rail members. A return unit for returning the substrate,
A film source unit is provided, which includes a film source that releases a film material, and is movable between a first position below the return unit and a second position transversely displaced in a return direction intersecting the return direction in which the return unit returns the substrate with respect to the first position.
A footing unit used in an inline deposition device that deposits a film on a substrate while returning the substrate.
A foothold unit characterized in that the foothold is deployed downwardly of the return unit in conjunction with the movement of the tabernacle unit from the first position to the second position.