KR102630346B1 - Plasma reactor for multi-controlling temperature - Google Patents

Abstract

The present invention relates to a multi-temperature controlled plasma reactor capable of individually controlling the temperatures of the reaction body and the magnetic core, comprising: a reaction body in which a plasma generation space is formed; A magnetic core coupled to the reaction body and forming an induced electromotive force for generating plasma in the reaction body using a primary winding; a temperature control device that controls the temperature of the reaction body or the magnetic core; And a heating control signal can be applied to the temperature control device to prevent overcooling of the reaction body or the magnetic core when the plasma is stopped, and to prevent overheating of the reaction body or the magnetic core when the plasma is ignited. It may include a control unit capable of applying a cooling control signal to the temperature control device.

Description

Plasma reactor for multi-controlling temperature}

The present invention relates to a multi-temperature controlled plasma reactor, and more specifically, to a multi-temperature controlled plasma reactor capable of individually controlling the temperatures of the reaction body and the magnetic core.

Plasma is a highly ionized gas containing equal numbers of positive ions and electrons. Plasma discharge is used for gas excitation to generate active gases containing ions, free radicals, atoms, and molecules.

Activated gases are widely used in various fields and can be used in a variety of representative semiconductor manufacturing processes, such as etching, deposition, cleaning, and ashing.

Such plasma can be generated by various methods including direct current (DC) discharge, radio frequency (RF) discharge, and microwave discharge. Direct current discharge is generated by applying a potential between two electrodes in a gas, and high frequency discharge can be generated by capacitively or inductively coupling energy from a power source to the plasma.

The inductively coupled plasma source has a remote plasma (or downstream) structure that injects plasma generated outside the process chamber into the process chamber, a structure with an external discharge bridge coupled with a magnetic core, and a plasma discharge chamber at the top of the process chamber. Various forms, such as combined structures, are being used.

As described in Korean Patent Publication No. 10-2016-0129304, a technology has been developed in a conventional plasma reactor to prevent overheating of the magnetic core and reduce power loss by equipping the magnetic core where induced electromotive force is generated with a cooling kit. It has been done.

However, in such a conventional plasma reactor, the temperatures of the magnetic core and the reaction body cannot be controlled individually, so when the plasma reaction is stopped, particles are generated inside due to rapid cooling of the reaction body, or the temperature of the reaction body decreases when plasma ignition occurs. There were many problems, such as ignition failure or plasma maintenance failure.

The idea of the present invention is to solve these problems, and it is possible to induce a plasma reaction at an optimal temperature, facilitate plasma ignition, and stably maintain plasma to greatly improve product performance. To provide a multi-temperature controlled plasma reactor. However, these tasks are illustrative and do not limit the scope of the present invention.

A multi-temperature controlled plasma reactor according to the spirit of the present invention for solving the above problems includes a reaction body in which a plasma generation space is formed; A magnetic core coupled to the reaction body and forming an induced electromotive force for generating plasma in the reaction body using a primary winding; a temperature control device that controls the temperature of the reaction body or the magnetic core; And a heating control signal can be applied to the temperature control device to prevent overcooling of the reaction body or the magnetic core when the plasma is stopped, and to prevent overheating of the reaction body or the magnetic core when the plasma is ignited. It may include a control unit capable of applying a cooling control signal to the temperature control device.

Additionally, according to the present invention, the temperature control device includes: a first temperature control device capable of controlling the temperature of the reaction body using a first heat exchange device; and a second temperature control device capable of controlling the temperature of the magnetic core using a second heat exchange device.

In addition, the multi-temperature controlled plasma reactor according to the present invention includes a first temperature sensor capable of measuring the temperature of the reaction body; a second temperature sensor capable of measuring the temperature of the magnetic core; And a first temperature control signal may be applied to the first temperature control device by receiving a first temperature signal from the first temperature sensor, and a second temperature signal may be received from the second temperature sensor to control the second temperature. It may further include a control unit capable of applying a second temperature control signal to the device.

In addition, according to the present invention, the first heat exchange device and the second heat exchange device are heat exchange jackets capable of accommodating a heat medium, and the first temperature control device and the second temperature control device include the heat exchange jacket. A heat medium supply line that supplies heat medium; a heat medium recovery line that recovers the heat medium from the heat exchange jacket; and a valve installed in the heat medium supply line or the heat medium recovery line.

In addition, according to the present invention, the control unit includes a first temperature maintenance control unit that maintains the temperature of the reaction body at a first reference value; and a second temperature maintenance control unit that maintains the temperature of the magnetic core at a second reference value.

In addition, according to the present invention, the control unit includes a synchronization control unit that synchronizes the temperature of the reaction body and the temperature of the magnetic core; When the plasma reaction is stopped, a particle prevention temperature control unit that maintains the temperature of the reaction body or the magnetic core above the particle generation temperature to prevent particle generation due to cooling of the reaction body or the magnetic core; and an ignition temperature control unit that maintains the temperature of the reaction body or the magnetic core at an optimal ignition temperature to facilitate plasma ignition during plasma ignition.

According to some embodiments of the present invention as described above, the temperatures of the reaction body and the magnetic core can be individually controlled or precisely synchronized to an optimal state to induce a plasma reaction in an optimal state and facilitate plasma ignition. This has the effect of significantly improving product performance by stably maintaining plasma. Of course, the scope of the present invention is not limited by this effect.

1 is a conceptual diagram conceptually showing a multi-temperature controlled plasma reactor according to some embodiments of the present invention.
FIG. 2 is a perspective view showing an example of the multi-temperature controlled plasma reactor of FIG. 1.
FIG. 3 is a block diagram showing a control unit of the multi-temperature controlled plasma reactor of FIG. 1.

Hereinafter, various embodiments of the present invention will be described in detail with reference to the attached drawings.

The embodiments of the present invention are provided to more completely explain the present invention to those skilled in the art, and the following examples may be modified into various other forms, and the scope of the present invention is as follows. It is not limited to the examples. Rather, these embodiments are provided to make the present disclosure more faithful and complete and to fully convey the spirit of the present invention to those skilled in the art. Additionally, the thickness and size of each layer in the drawings are exaggerated for convenience and clarity of explanation.

The terms used herein are used to describe specific embodiments and are not intended to limit the invention. As used herein, the singular forms include the plural forms unless the context clearly indicates otherwise. Additionally, when used herein, “comprise” and/or “comprising” means specifying the presence of stated features, numbers, steps, operations, members, elements and/or groups thereof. and does not exclude the presence or addition of one or more other shapes, numbers, operations, members, elements and/or groups.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will now be described with reference to drawings that schematically show ideal embodiments of the present invention. In the drawings, variations of the depicted shape may be expected, for example, depending on manufacturing technology and/or tolerances. Accordingly, embodiments of the present invention should not be construed as being limited to the specific shape of the area shown in this specification, but should include, for example, changes in shape resulting from manufacturing.

Hereinafter, the multi-temperature controlled plasma reactor 100 according to various embodiments of the present invention will be described in detail with reference to the drawings.

1 is a conceptual diagram conceptually illustrating a multi-temperature controlled plasma reactor 100 according to some embodiments of the present invention.

First, as shown in FIG. 1, the multi-temperature controlled plasma reactor 100 according to some embodiments of the present invention contains a cleaning gas or process inside the process chamber 1 capable of processing the wafer W. The plasma reactor 100 capable of supplying gas may largely include a reaction body 10, a magnetic core 20, a temperature control device, and a control unit 50.

For example, as shown in FIG. 1, the reaction body 10 can use a toroidal type, that is, a transformer-coupled remote plasma generator (RPG), and has a plasma generation space inside. It may be formed entirely in the form of a hollow hollow tube.

More specifically, as shown in FIG. 1, the reaction body 10 has a hollow shape, and branch pipes are formed so that annular plasma discharge loops are formed on the left and right or upper and lower sides, respectively. It can be.

In addition, for example, as shown in FIG. 1, the reaction body 10 is formed in a first part (upper part) formed in a part of the reaction body 10 and in another part of the reaction body 10, , It may include a second part (lower part) formed to correspond to the first part so that ignition electromotive force is formed.

Here, the reason for forming the reaction body 10 as the above-described first part and the second part, that is, two pieces, is that a plasma discharge occurs between the first part and the second part of the reaction body 10. This may be to form ignition electromotive force or maintenance electromotive force to ignite and maintain it.

That is, the first part may be an upper branch pipe formed in the upper part of the reaction body 10, and the second part may be a lower union pipe formed in the lower part of the reaction body 10. Although not shown, a separate insulating member or sealing member may be installed between the upper branch pipe and the lower composite pipe.

Accordingly, the cleaning gas or the exhaust gas before purification flows into the reaction body 10 through the inlet of the first part, and is plasma ionized inside the reaction body 10 or the exhaust gas is purified to the second part. Cleaning gas or purified exhaust gas may be discharged through the outlet.

That is, the multi-temperature controlled plasma reactor 100 of the present invention can be used for cleaning a process chamber or for purifying exhaust gas.

In addition, for example, as shown in FIG. 1, the magnetic core 20 is coupled to the reaction body 10 and induces plasma generation in the reaction body 10 using the primary winding 21. Electromotive force can be formed.

Therefore, when explaining the operation process of the multi-temperature controlled plasma reactor 100 according to some embodiments of the present invention, when an induced electromotive force is formed in the magnetic core 20 by the primary winding 21, the reaction An annular plasma discharge loop may be generated in the main body 10. Here, a separate reaction gas may be supplied into the reaction body 10.

At this time, when the reaction gas of the chamber or the exhaust gas of the chamber flows into the reaction body 10, plasma energy may be applied and excited into a plasma state, or harmful components may be burned or purified through reactions such as oxidation.

At this time, the chamber may be, for example, an ashing chamber to remove photoresist, a CVD (Chemical Vapor Deposition) chamber configured to deposit an insulating film, and a chemical vapor deposition (CVD) chamber configured to deposit an insulating film, and to form interconnect structures. It may be an etching chamber configured to etch apertures or openings. Alternatively, it may be a PVD chamber configured to deposit a barrier film, or it may be a PVD chamber configured to deposit a metal film.

In addition, for example, as shown in FIG. 1, the control unit 50 controls heating in the temperature control device to prevent overcooling of the reaction body 10 or the magnetic core 20 when the plasma is stopped. A signal can be applied, and a cooling control signal can be applied to the temperature control device to prevent overheating of the reaction body 10 or the magnetic core 20 when plasma is ignited.

In addition, as shown in FIG. 1, the temperature control device may include a first temperature control device 30 and a second temperature control device 40, wherein the first temperature control device 30 , It may be a device that can control the temperature of the reaction body 10 using the first heat exchange device 31.

And, for example, as shown in FIG. 1, the second temperature control device 40 may be a device that can control the temperature of the magnetic core 20 using the second heat exchange device 41.

More specifically, for example, as shown in FIG. 1, the multi-temperature controlled plasma reactor 100 according to some embodiments of the present invention has a first temperature at which the temperature of the reaction body 10 can be measured. The first temperature control device receives a first temperature signal from the sensor (S1), a second temperature sensor (S2) capable of measuring the temperature of the magnetic core 20, and the first temperature sensor (S1) ( 30), and can apply a second temperature control signal to the second temperature control device 40 by receiving a second temperature signal from the second temperature sensor (S2). It may further include a control unit 50.

Therefore, when describing the operation process of the multi-temperature controlled plasma reactor 100 according to some embodiments of the present invention, the control unit 50 controls the reaction body 10 using the first temperature sensor S1. The temperature can be measured, and based on this, the first temperature control device 30 is controlled to keep the temperature of the reaction body 10 in an optimal state within the reference range even during plasma ignition, plasma reaction, or after the plasma reaction is stopped. It can be maintained.

In addition, the control unit 50 may measure the temperature of the magnetic core 20 using the second temperature sensor S2, and based on this, control the second temperature control device 40 to generate plasma. Even during ignition, plasma reaction, or cessation of plasma reaction, the temperature of the magnetic core 20 can be maintained in an optimal state within the reference range.

At this time, for more efficient temperature maintenance, the temperatures of the reaction body 10 and the magnetic core 20 may be synchronized with each other. That is, the reaction body 10 and the magnetic core 20 can complement each other because they can exchange heat with each other, and this temperature control is determined by the size of the reaction body 10 and the magnetic core 20, It can be optimized in complex ways depending on structure, environment, materials, etc. This optimization algorithm can be determined through repeated experiments, simulations, etc., and a detailed description will be omitted here.

FIG. 2 is a perspective view showing an example of the multi-temperature controlled plasma reactor 100 of FIG. 1.

As shown in FIGS. 1 and 2, the first heat exchange device 31 and the second heat exchange device 41 of the multi-temperature controlled plasma reactor 100 according to some embodiments of the present invention use a heat medium. It may be a heat exchange jacket that can accommodate and is in thermal contact with the reaction body 10 or the magnetic core 20.

This heat exchange jacket is one in which a space or flow path capable of accommodating a heat medium is formed, and a wide variety of shapes and types of heat exchanger structures can be applied.

In addition, for example, as shown in FIGS. 1 and 2, the first temperature control device 30 and the second temperature control device 40 have a heat medium supply line (L1) that supplies the heat medium to the heat exchange jacket. ) It may include a heat medium recovery line (L2) that recovers the heat medium from the heat exchange jacket and a flow control valve (V) installed in the heat medium supply line (L1) or the heat medium recovery line (L2).

Therefore, as shown in FIG. 1, for example, if the heating medium is a refrigerant, when the temperature of the reaction body 10 or the magnetic core 20 exceeds the standard value, the control unit 50 operates the flow control valve. By applying an open signal to (V), the flow rate of the refrigerant can be increased to cool the temperature of the heat exchange jacket, thereby lowering the temperature of the reaction body 10 or the magnetic core 20.

FIG. 3 is a block diagram showing the control unit 50 of the multi-temperature controlled plasma reactor 100 of FIG. 1.

As shown in FIG. 3, the control unit 50 of the multi-temperature controlled plasma reactor 100 according to some embodiments of the present invention sets a first temperature to maintain the temperature of the reaction body 10 at a first reference value. A maintenance control unit 51, a second temperature maintenance control unit 52 that maintains the temperature of the magnetic core 20 at a second reference value, and a temperature of the reaction body 10 and the temperature of the magnetic core 20. A synchronization control unit 53 for synchronizing the reaction body 10 or the magnetic core to prevent particle generation due to rapid cooling of the reaction body 10 or the magnetic core 20 when the plasma reaction is stopped. A particle prevention temperature control unit 54 that maintains the temperature of the particle (20) above the particle generation temperature and, when igniting the plasma, ignites the temperature of the reaction body 10 or the magnetic core 20 to facilitate plasma ignition. It may include an ignition temperature control unit 55 that maintains the optimal temperature.

Here, various values such as the first reference value, the second reference value, particle generation temperature, and optimal ignition temperature can be optimized according to the reaction environment, type, shape of parts, specifications, etc.

These control units may be in the form of various electronic components such as microprocessors, central processing units, CPUs, and boards, or in the form of various circuits, various programs, or in the form of electrical signals, and detailed descriptions thereof will be omitted.

Therefore, the temperatures of the reaction body 10 and the magnetic core 20 can be individually controlled or precisely synchronized to an optimal state to induce a plasma reaction in an optimal state, facilitate plasma ignition, and maintain plasma. By making it stable, the performance of the product can be greatly improved.

The present invention has been described with reference to the embodiments shown in the drawings, but these are merely exemplary, and those skilled in the art will understand that various modifications and equivalent other embodiments are possible therefrom. Therefore, the true scope of technical protection of the present invention should be determined by the technical spirit of the attached patent claims.

W: wafer
1: Process chamber
10: Reaction body
20: magnetic core
21: primary winding
30: first thermostat
31: first heat exchange device
40: second temperature control device
41: second heat exchange device
S1: first temperature sensor
S2: second temperature sensor
L1: Heat medium supply line
L2: Heat medium recovery line
V: flow control valve
50: control unit
51: first temperature maintenance control unit
52: second temperature maintenance control unit
53: synchronous control unit
54: anti-particle temperature control unit
55: Ignition temperature control unit
100: Multi-temperature controlled plasma reactor

Claims (6)

A reaction body in which a plasma generation space is formed;
A magnetic core coupled to the reaction body and forming an induced electromotive force for generating plasma in the reaction body using a primary winding;
a temperature control device that controls the temperature of the reaction body or the magnetic core; and
A heating control signal can be applied to the temperature control device to prevent overcooling of the reaction body or the magnetic core when the plasma is stopped, and the temperature is adjusted to prevent overheating of the reaction body or the magnetic core when the plasma is ignited. a control unit capable of applying a cooling control signal to the regulating device; Including,
The control unit,
During plasma ignition, an ignition temperature control unit that heats the reaction body or the magnetic core to maintain the temperature at an optimal ignition temperature to facilitate plasma ignition;
A multi-temperature controlled plasma reactor comprising: According to claim 1,
The temperature control device is,
a first temperature control device capable of controlling the temperature of the reaction body using a first heat exchange device; and
A multi-temperature controlled plasma reactor comprising a second temperature control device capable of controlling the temperature of the magnetic core using a second heat exchange device. According to claim 2,
a first temperature sensor capable of measuring the temperature of the reaction body;
a second temperature sensor capable of measuring the temperature of the magnetic core; and
A first temperature control signal may be applied to the first temperature control device by receiving a first temperature signal from the first temperature sensor, and a second temperature signal may be applied to the second temperature control device by receiving a second temperature signal from the second temperature sensor. a control unit capable of applying a second temperature control signal to;
A multi-temperature controlled plasma reactor further comprising: According to claim 2,
The first heat exchange device and the second heat exchange device are heat exchange jackets capable of accommodating a heat medium,
The first temperature control device and the second temperature control device,
a heat medium supply line supplying the heat medium to the heat exchange jacket;
a heat medium recovery line that recovers the heat medium from the heat exchange jacket; and
A valve installed in the heat medium supply line or the heat medium recovery line;
Including, a multi-temperature controlled plasma reactor. According to claim 2,
The control unit,
a first temperature maintenance control unit that maintains the temperature of the reaction body at a first reference value; and
a second temperature maintenance control unit that maintains the temperature of the magnetic core at a second reference value;
A multi-temperature controlled plasma reactor comprising: According to claim 2,
The control unit,
a synchronization control unit that synchronizes the temperature of the reaction body and the temperature of the magnetic core; and
A particle prevention temperature control unit that maintains the temperature of the reaction body or the magnetic core above the particle generation temperature to prevent particle generation due to rapid cooling of the reaction body or the magnetic core when the plasma reaction is stopped;
A multi-temperature controlled plasma reactor comprising:

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