KR102615484B1 - Heat treatment apparatus - Google Patents

Abstract

[Problem] It is possible to prevent the structure of a heat treatment device that heat-treats a workpiece using superheated steam from becoming complicated, and it is also possible to prevent stagnation of the atmosphere from occurring in the heat treatment chamber where the heat treatment of the workpiece is performed. , provides a heat treatment device.
[Solution] The heat treatment apparatus 1 is provided with a heat treatment chamber 11, a water vapor supply part 13, and a water vapor discharge part 15. The heat treatment chamber 11 is provided with an inlet 31 through which the object to be treated 10 is brought in and an outlet 32 through which the object 10 is discharged, and the object 10 is conveyed from the inlet 31 toward the outlet 32. Heat treatment is performed on the object to be treated (10). The water vapor supply unit 13 is installed in the heating region HR in the heat treatment chamber 11 and supplies superheated water vapor into the heat treatment chamber 11. The water vapor discharge unit 15 is installed in the heat treatment chamber 11 on the inlet 31 side and the outlet 32 side with respect to the water vapor supply part 13, and discharges superheated water vapor in the heat treatment chamber 11 into the heat treatment chamber. Discharged to the outside of (11).

Description

Heat treatment apparatus {HEAT TREATMENT APPARATUS}

The present invention relates to a heat treatment apparatus that performs heat treatment on an object to be treated by heating the object with superheated steam.

Conventionally, a heat treatment apparatus has been known that heats the object to be treated by heating it with superheated steam (see, for example, Patent Document 1). The heat treatment apparatus described in Patent Document 1 has a heat treatment chamber installed as a heating furnace where heat treatment of the object to be treated is performed, and a heating area for heating the object to be treated is formed in the heat treatment chamber. The heating area within the heat treatment chamber is divided into a plurality of zones installed adjacent to each other in order from the upstream side to the downstream side in the transfer direction of the object to be treated. And, the heat treatment apparatus of Patent Document 1 is configured so that the object to be treated is heated by superheated steam while being sequentially conveyed within each zone, and heat treatment of the object to be treated is performed.

Additionally, the heat treatment apparatus of Patent Document 1 is configured so that water vapor as superheated water vapor is supplied to each of a plurality of zones in the heat treatment chamber. More specifically, an opening is provided on the upper surface of each zone in the heat treatment chamber, and water vapor as superheated steam is supplied into each zone from the opening on the upper surface of each zone. Additionally, in the heat treatment apparatus of Patent Document 1, exhaust holes are formed on the lower surfaces of each zone in the heat treatment chamber. Accordingly, the heat treatment apparatus of Patent Document 1 is configured so that in each zone in the heat treatment chamber, water vapor supplied from an opening in the upper surface and passing through each zone is discharged from an exhaust hole in the lower surface.

Japanese Patent Publication No. 2015-2325

The heat treatment apparatus disclosed in Patent Document 1 is configured to supply superheated water vapor from an opening on the upper surface and discharge water vapor from an exhaust hole on the lower surface in each of a plurality of zones arranged in the direction of conveyance of the object to be treated in the heat treatment chamber. It is done. For this reason, a configuration for supplying superheated water vapor into the heat treatment chamber and then discharging the water vapor used to heat the object to be treated to the outside is required for each of the plurality of zones in the heat treatment chamber, making the structure of the heat treatment device complicated. There is a problem with throwing it away.

In addition, as described above, the heat treatment apparatus of Patent Document 1 supplies superheated water vapor from an opening on the upper surface and discharges water vapor from an exhaust hole on the lower surface in each of a plurality of zones in the heat treatment chamber. For this reason, in each zone within the heat treatment chamber, water vapor flows from the opening on the upper surface to the exhaust hole on the lower surface, forming a flow of water vapor that is distributed in each zone and flows from top to bottom. As a result, it becomes difficult for water vapor to flow in a direction parallel to the transport direction of the object to be treated within the heat treatment chamber. As a result, there is a large deviation in the flow of water vapor along the direction parallel to the direction of conveyance of the object to be treated, and areas in which the flow of water vapor stagnates are likely to occur. As a result, areas in which the atmosphere is stagnant are likely to occur in the heat treatment chamber. Lose.

If stagnation of the atmosphere is likely to occur within the heat treatment chamber, uneven distribution of overheated water vapor is likely to occur within the heat treatment chamber, and uneven heat treatment is likely to occur among a plurality of objects to be heat treated within the same heat treatment chamber. There is a problem with it becoming easier. Additionally, in the case of processing in which gas is generated by vaporizing some components from the object to be treated during heat treatment, if stagnation occurs in the heat treatment chamber, the gas generated from the object to be treated stays in the area where the stagnation occurred. Additionally, if the atmosphere stagnates and the gas generated from the object to be treated during heat treatment stays, the purity of the superheated water vapor in the heating area decreases, leading to a decrease in heat treatment efficiency. In addition, the gas generated from the object to be treated and remaining in the area where the atmosphere is stagnant is not discharged from the heat treatment chamber, but liquefies as the temperature decreases when the heat treatment is completed, and condenses on the ceiling or walls in the heat treatment chamber. . Additionally, there is a problem that when a new heat treatment is started, components condensed on the ceiling or walls in the heat treatment chamber drip on the object to be treated, causing contamination in the object to be treated.

Additionally, as a treatment in which some components vaporize from the object to be treated and gas is generated during heat treatment, there is, for example, sintering treatment. In the sintering treatment, the object to be treated as a sintered body integrated with a binder containing an oil component is heated to vaporize and remove the binder. During this treatment, if the vaporized binder stays in the area where the atmosphere is stagnant and is not discharged, it will liquefy as the temperature decreases when the heat treatment is completed and condense on the ceiling or walls in the heat treatment chamber. Then, when a new heat treatment is started, the binder components that have condensed on the ceiling or walls in the heat treatment chamber drop on the object to be treated, causing contamination in the object to be treated.

As described above, if stagnation of the atmosphere is likely to occur in the heat treatment chamber, it is easy to cause non-uniformity in heat treatment among a plurality of objects to be heat treated in the same heat treatment chamber, and further, heat treatment may occur among the objects to be treated. Problems such as a decrease in heat treatment efficiency due to retention of gas and contamination of the object to be treated are likely to occur. Therefore, there is a need to realize a heat treatment device that suppresses stagnation of the atmosphere in the heat treatment chamber.

By taking the above-mentioned circumstances into consideration, the present invention can prevent the complexity of the structure of a heat treatment device that heat-treats the object to be treated using superheated steam, and also prevents stagnation of the atmosphere in the heat treatment chamber where the heat treatment of the object to be treated is performed. The purpose is to provide a heat treatment device that can suppress heat dissipation.

(1) In order to solve the above problems, a heat treatment apparatus according to a certain aspect of the present invention relates to a heat treatment apparatus that heats the object to be treated with superheated steam and performs heat treatment of the object to be treated. In addition, the heat treatment apparatus according to a certain aspect of the present invention is provided with an inlet through which the object to be treated is brought in and an outlet through which the object to be treated is discharged, and heat treatment of the object conveyed from the inlet toward the outlet is performed. is installed in a heat treatment chamber and a heating area, which is an area where the object to be treated is heated in the heat treatment chamber, and supplies superheated steam into the heat treatment chamber; and, in the heat treatment chamber, with respect to the water vapor supply unit. It is installed on the inlet side and the outlet side, respectively, and has a water vapor discharge unit that discharges superheated water vapor in the heat treatment chamber to the outside of the heat treatment chamber.

According to this configuration, the object to be treated is heated by superheated steam supplied into the heat treatment chamber from a steam supply unit installed in the heating area of the heat treatment chamber, and heat treatment of the object is performed. Then, the superheated steam used to heat the object to be treated flows from the steam supply unit installed in the heating area toward the steam discharge unit provided at the entrance and exit sides of the heat treatment chamber, respectively, and is discharged from the water vapor discharge unit to the outside of the heat treatment chamber. For this reason, in the heat treatment chamber, the flow of water vapor flows from the water vapor supply part in the heating area toward the inlet side and is discharged to the outside from the water vapor discharge part, and the flow of water vapor flows from the water vapor supply part in the heating area towards the outlet side and is discharged to the outside from the water vapor discharge part. A stream of water vapor is formed. And, in the heat treatment chamber, a more uniform flow of water vapor with less variation in flow rate is formed along a direction parallel to the transport direction of the object to be treated from the water vapor supply section in the heating area toward each of the inlet and outlet sides. As a result, it becomes difficult to create an area in the heat treatment chamber where the flow of water vapor stagnates, and as a result, it becomes difficult to create an area where the atmosphere stagnates in the heat treatment chamber.

Therefore, according to the above configuration, it is possible to suppress the stagnation of the atmosphere within the heat treatment chamber where heat treatment of the object to be processed is performed. In addition, according to the above configuration, stagnation of the atmosphere within the heat treatment chamber can be suppressed, thereby preventing heat treatment unevenness among a plurality of objects to be heat treated within the same heat treatment chamber. In addition, it is possible to suppress a decrease in heat treatment efficiency due to retention of gas generated from the object to be treated and the occurrence of contamination of the object to be treated.

In addition, according to the above configuration, the simple structure in which the water vapor supply part is installed in the heating area of the heat treatment chamber and the water vapor discharge part is installed on the inlet and outlet sides of the heat treatment chamber prevents the occurrence of atmospheric stagnation in the heat treatment chamber. A heat treatment device capable of suppressing heat treatment can be realized. For this reason, it is possible to prevent the structure of the heat treatment apparatus that heat-treats the object to be treated using superheated steam from becoming complicated.

As described above, according to the above configuration, it is possible to prevent the complexity of the structure of the heat treatment apparatus that performs heat treatment of the object to be treated by superheated steam, and also prevents stagnation of the atmosphere from occurring in the heat treatment chamber where the heat treatment of the object to be treated is performed. A heat treatment device capable of suppressing heat dissipation can be provided.

(2) further provided with a gas supply part that supplies at least one of an inert gas and air into the heat treatment chamber, the inlet is open to the outside of the heat treatment chamber, and the gas supply part is provided to the heat treatment chamber. In some cases, an inlet-side gas supply part installed closer to the inlet than the water vapor discharge part installed to the inlet side is provided with respect to the water vapor supply part.

According to this configuration, since the entrance to the heat treatment chamber is open to the outside, the work of bringing the object to be treated into the heat treatment chamber can be carried out continuously, quickly and easily. As a result, the heat treatment process can be continued and the work efficiency of heat treatment can be improved. According to the above configuration, in addition to the inlet being open, the water vapor supply part is installed further on the inlet side than the water vapor discharge part installed on the inlet side to supply at least one of an inert gas and air into the heat treatment chamber. A gas supply unit is installed at the inlet side. For this reason, the atmosphere in the heat treatment chamber can be separated between the inlet open to the outside and the water vapor discharge section by using the gas supplied from the inlet side gas supply section. That is, the atmosphere of the area from the water vapor supply unit to the inlet-side gas supply unit can be separated from the atmosphere of the area from the inlet open to the outside to the inlet-side gas supply unit. As a result, in a heat treatment device with an open inlet to improve the work efficiency of heat treatment, the atmosphere in the area from the water vapor supply part to the water vapor discharge part can be blocked from the outside, and the treatment target due to overheated water vapor in the heating area can be prevented. Heat treatment of water can be performed efficiently.

(3) The inlet side gas supply section is installed in a pair, and in the heat treatment chamber, an inlet side that exhausts the gas in the heat treatment chamber to the outside of the heat treatment chamber is between the pair of inlet side gas supply sections. In some cases, an exhaust part is installed.

According to this configuration, a pair of inlet-side gas supply units is installed, and an inlet-side exhaust unit is installed between them. For this reason, from the water vapor discharge section toward the inlet side, they are arranged in the following order: the water vapor discharge section, one of the pair of inlet side gas supply sections, the inlet side exhaust section, and the other of the pair of inlet side gas supply sections. With this configuration, a small amount of water vapor that flows to the inlet side but is not completely discharged from the water vapor discharge section and leaks is mixed with the gas supplied from one of the pair of inlet side gas supply sections and is diluted. Then, the water vapor mixed with the gas supplied from one of the pair of inlet-side gas supply units and diluted is exhausted to the outside from the inlet-side exhaust unit. For this reason, some water vapor that flows to the inlet side to leak out of the water vapor discharge section is also exhausted from the inlet side exhaust section. As a result, it is possible to prevent water vapor from flowing into the low-temperature area between the inlet and the exhaust part on the inlet side. This prevents water vapor from flowing into the low-temperature area between the inlet side exhaust unit and the inlet, causing condensation. By preventing the occurrence of condensation, moisture is prevented from dripping on the object to be treated brought in from the inlet, making the object to be treated wet, and affecting the heat treatment state of the object to be treated. In addition, according to the above configuration, water vapor is supplied by the gas supplied from the other of the pair of inlet-side gas supply parts, that is, by the gas supplied from the inlet-side gas supply part disposed between the inlet-side exhaust part and the inlet. The atmosphere of the area from the supply part to the inlet-side gas supply part and the atmosphere of the area from the inlet to the inlet-side gas supply part can be more reliably separated and blocked.

(4) A gas supply part that supplies at least one of an inert gas and air is further provided in the heat treatment chamber, the outlet is open to the outside of the heat treatment chamber, and the gas supply part supplies the heat treatment chamber. In some cases, the outlet-side gas supply part installed on the outlet side is provided further than the water vapor discharge part installed on the outlet side with respect to the water vapor supply part.

According to this configuration, since the outlet of the heat treatment chamber is open to the outside, the work of carrying out the object to be treated from the heat treatment chamber can be carried out continuously, quickly and easily. As a result, the heat treatment process can be continued and the work efficiency of heat treatment can be improved. According to the above configuration, in addition to the outlet being open, the water vapor supply part is installed further on the outlet side than the water vapor discharge part installed on the outlet side to supply at least one of the inert gas and air into the heat treatment chamber. A gas supply unit is installed on the outlet side. For this reason, the atmosphere in the heat treatment chamber can be separated between the outlet open to the outside and the water vapor discharge part by the gas supplied from the outlet side gas supply part. That is, the atmosphere of the area from the water vapor supply unit to the outlet-side gas supply unit can be separated from the atmosphere of the area from the outlet open to the outside to the outlet-side gas supply unit. As a result, in a heat treatment device with an open outlet to improve the work efficiency of heat treatment, the atmosphere in the area from the water vapor supply part to the water vapor discharge part can be blocked from the outside, and the treatment target due to overheated water vapor in the heating area can be prevented. Heat treatment of water can be performed efficiently.

(5) The outlet side gas supply units are installed in pairs, and in the heat treatment chamber, between the pair of outlet side gas supply units, an outlet side exhausts the gas in the heat treatment chamber to the outside of the heat treatment chamber. An exhaust unit is installed.

According to this configuration, a pair of outlet-side gas supply units is installed, and an outlet-side exhaust unit is installed between them. For this reason, from the water vapor discharge section toward the outlet side, they are arranged in the following order: the water vapor discharge section, one of the pair of outlet side gas supply sections, the outlet side exhaust section, and the other of the pair of outlet side gas supply sections. With this configuration, some water vapor that flows to the outlet side but is not completely discharged from the water vapor discharge section and leaks is mixed with the gas supplied from one of the pair of outlet side gas supply sections and is diluted. Then, the water vapor mixed with the gas supplied from one of the pair of outlet-side gas supply parts and diluted is exhausted to the outside from the outlet-side exhaust part. For this reason, some water vapor that flows to the outlet side to leak out of the water vapor discharge section is also exhausted from the outlet side exhaust section. As a result, it is possible to prevent water vapor from flowing into the low-temperature area between the outlet side exhaust portion and the outlet. This prevents water vapor from flowing into the low-temperature area between the outlet side exhaust unit and the outlet, causing condensation. By preventing the occurrence of condensation, it is prevented from dripping moisture on the object to be treated and making the object wet when the object to be treated is carried out from the outlet. In addition, according to the above configuration, the gas supplied from the other of the pair of outlet-side gas supply parts, that is, the outlet-side gas supply part disposed between the outlet-side exhaust part and the outlet, is used to separate the water vapor from the water vapor supply part to the outlet-side gas supply part. The atmosphere of the area up to and the atmosphere of the area from the outlet to the outlet gas supply part can be more reliably separated and blocked.

(6) The water vapor supply unit is provided with a pair of nozzle parts arranged to face each other in the conveyance direction of the object to be treated, and each of the pair of nozzle parts is positioned at an intermediate position of the pair of opposing nozzle parts. In some cases, it is configured to blow out superheated water vapor.

According to this configuration, superheated water vapor blown out from each of the pair of nozzle parts of the water vapor supply unit flows toward the middle position of the pair of opposing nozzle parts. In the area between a pair of opposing nozzle portions, there is a case where a partition plate configured to partially regulate the flow of gas in the direction parallel to the conveyance direction of the object to be treated is provided, and there is a case where such a partition plate is not provided. There are cases. In the case where a partition plate is installed, each superheated water vapor blown out from each nozzle unit and flowing toward the middle position of the pair of nozzle units collides with the partition plate, causing a cross-section perpendicular to the conveyance direction of the object to be processed in the heating area. As it spreads throughout the entire area, it reverses and flows in a direction parallel to the transport direction of the object to be processed. In addition, when the partition plate is not installed, the superheated water vapor ejected from each nozzle unit and flowing toward the middle position of the pair of nozzle units collides with each other and forms a cross section perpendicular to the conveyance direction of the object to be treated in the heating area. It spreads throughout the entire area and flows as if reversed and returning in a direction parallel to the transport direction of the object to be processed. For this reason, regardless of whether the partition plate is installed or not, the superheated water vapor blown out from each nozzle unit flows toward the middle position of the pair of nozzle units, is reversed, and is then processed in the heating area. The water spreads across the entire cross section perpendicular to the conveyance direction of the water, and flows in a direction parallel to the conveyance direction of the object to be treated, toward the direction opposite to the intermediate position of the pair of nozzle portions. That is, the superheated water vapor blown out from each of the pair of nozzle parts spreads over the entire cross section of the heating area after the flow is reversed at the middle position of the pair of nozzle parts, and flows in a direction parallel to the conveyance direction of the object to be processed. They flow in opposite directions. For this reason, the superheated water vapor blown out from one of the pair of nozzle parts flows in a state spread across the entire cross section of the heating area from the middle position side of the pair of nozzle parts toward the entrance side of the heat treatment chamber. Then, the superheated water vapor blown out from the other of the pair of nozzle parts flows in a state spread across the entire cross section of the heating area from the middle position side of the pair of nozzle parts toward the outlet side of the heat treatment chamber. As a result, in the heat treatment chamber, the flow rate is spread over the entire cross section of the heating area along the direction parallel to the conveyance direction of the object to be treated, from the intermediate position side of the pair of nozzle portions toward each of the inlet side and the outlet side. The smaller the deviation, the more uniform the flow of water vapor is formed. As a result, it becomes more difficult to create areas in the heat treatment chamber where the flow of water vapor stagnates, and as a result, it becomes more difficult to create areas where the atmosphere stagnates in the heat treatment chamber. Therefore, according to the above configuration, stagnation of the atmosphere within the heat treatment chamber can be further suppressed.

(7) An inlet-side partition plate is provided between each of the pair of inlet-side gas supply units and the inlet-side exhaust part, and the inlet-side partition plate is configured to correspond to the transport direction of the object to be treated in the heat treatment chamber. There are cases where it is configured to partially regulate the flow of gas in a parallel direction.

According to this configuration, an inlet-side partition plate is provided between each of the pair of inlet-side gas supply units and the inlet-side exhaust unit to partially regulate the flow of gas in a direction parallel to the transport direction of the object to be processed. For this reason, a state in which the atmosphere can be more easily separated can be formed between a pair of inlet-side gas supply units disposed with the inlet-side exhaust unit in between, while maintaining a state in which the atmosphere is communicated so that the gas can flow. . As a result, the atmosphere in the area from the water vapor supply unit to the inlet-side gas supply unit and the atmosphere in the area from the inlet to the inlet-side gas supply unit can be more efficiently separated and blocked.

(8) An outlet-side partition plate is provided between each of the pair of outlet-side gas supply parts and the outlet-side exhaust part, and the outlet-side partition plate is configured to correspond to the transport direction of the object to be treated in the heat treatment chamber. There are cases where it is configured to partially regulate the flow of gas in a parallel direction.

According to this configuration, an outlet-side partition plate is provided between each of the pair of outlet-side gas supply units and the outlet-side exhaust unit to partially regulate the flow of gas in a direction parallel to the transport direction of the object to be processed. For this reason, a state in which the atmosphere can be more easily separated can be formed between a pair of outlet-side gas supply parts disposed with the outlet-side exhaust part in between, while maintaining a state in which the atmosphere is communicated so that the gas can flow. . As a result, the atmosphere in the area from the water vapor supply unit to the outlet-side gas supply unit and the atmosphere in the area from the outlet to the outlet-side gas supply unit can be more efficiently separated and blocked.

According to the present invention, it is possible to prevent the complexity of the structure of a heat treatment device that heat-treats the object to be treated using superheated steam, and also prevents stagnation of the atmosphere from occurring in the heat treatment chamber where the heat treatment of the object to be treated is performed. You can.

1 is a diagram schematically showing an example of a heat treatment apparatus according to an embodiment of the present invention.
FIG. 2 is a diagram schematically showing the water vapor supply section, water vapor supply system, water vapor discharge section, water vapor discharge system, gas supply section, gas supply system, etc. of the heat treatment apparatus.
FIG. 3 is an enlarged view showing a part of the heat treatment device, FIG. 3 (A) is an enlarged view showing the entrance to the heat treatment chamber in the heat treatment device and its vicinity, and FIG. 3 (B) is an enlarged view showing, This is an enlarged view showing the exit of the heat treatment chamber in the heat treatment apparatus and its vicinity.
FIG. 4 is an enlarged view showing the water vapor supply section and its vicinity in the heat treatment chamber of the heat treatment apparatus.
FIG. 5 is a schematic cross-sectional view of a part of the heat treatment apparatus, FIG. 5 (A) is a view showing the state viewed from the line AA line of FIG. 4, and FIG. 5 (B) is a view showing the line BB in FIG. 4 This is a drawing showing the state seen from the line arrow gaze position.
FIG. 6 is an enlarged view showing the inlet side water vapor discharge section and the inlet side gas supply section and their vicinity in the heat treatment chamber of the heat treatment apparatus.
FIG. 7 is a schematic cross-sectional view of a part of the heat treatment apparatus, FIG. 7 (A) is a view showing the state viewed from the line arrow line CC in FIG. 6, and FIG. 7 (B) is a view showing the line DD in FIG. 6 This is a drawing showing the state seen from the line arrow gaze position.
FIG. 8 is an enlarged view showing the outlet-side water vapor discharge portion and the outlet-side gas supply portion and their vicinity in the heat treatment chamber of the heat treatment apparatus.
FIG. 9 is a schematic cross-sectional view of a part of the heat treatment apparatus, FIG. 9 (A) is a view showing the state viewed from the line arrow line EE in FIG. 8, and FIG. 9 (B) is a view showing the line FF in FIG. 8. This is a drawing showing the state seen from the line arrow gaze position.
FIG. 10 is a diagram for explaining the flow of superheated water vapor and inert gas in the heat treatment chamber of the heat treatment apparatus.
FIG. 11 is a diagram for explaining the flow of superheated water vapor and inert gas in the heat treatment chamber of the heat treatment apparatus, and FIG. 11 (A) shows the flow of superheated water vapor and inert gas in the area around the water vapor supply unit. It is an explanatory diagram, and FIG. 11(B) is a diagram illustrating the flow of superheated water vapor and inert gas in the area around the inlet side water vapor discharge unit and the inlet side gas supply part, and FIG. 11(C) is, This is a diagram explaining the flow of superheated water vapor and inert gas in the area around the outlet-side water vapor discharge unit and the outlet-side gas supply unit.

EMBODIMENT OF THE INVENTION Hereinafter, the form for carrying out this invention will be described with reference to the drawings.

[Overview of heat treatment device]

1 is a diagram schematically showing an example of a heat treatment apparatus 1 according to an embodiment of the present invention. Figure 2 shows the water vapor supply unit 13, the water vapor supply system 14, the water vapor discharge part 15, the water vapor discharge systems 16a, 16b, the gas supply part 17, and the gas supply system 18 of the heat treatment device 1. ) is a diagram schematically showing the etc. FIG. 3 is an enlarged view of a part of the heat treatment device 1, and FIG. 3 (A) is an enlarged view of the entrance 31 of the heat treatment chamber 11 in the heat treatment device 1 and its vicinity. 3(B) is an enlarged view showing the outlet 32 of the heat treatment chamber 1 in the heat treatment apparatus 1 and its vicinity.

Referring to FIGS. 1 to 3 , the heat treatment apparatus 1 is configured as an apparatus that heats the metal object 10 to be processed 10 with superheated steam to heat treat the object 10 . In addition, superheated water vapor is water vapor heated to a temperature higher than the boiling point, and is dry water vapor at a temperature higher than the boiling point. The heat treatment apparatus 1 is provided with a heat treatment chamber 11 provided with an inlet 31 through which the object 10 is brought in and an outlet 32 through which the object 10 is discharged. In the heat treatment apparatus 1, in the heat treatment chamber 11, the object 10 is conveyed from the inlet 31 toward the outlet 32 and heated with superheated steam to heat the object 10. Heat treatment is performed. Examples of heat treatment on the object 10 performed using superheated steam in the heat treatment apparatus 1 include degreasing treatment and sintering treatment.

When degreasing treatment is performed in the heat treatment apparatus 1, the object 10 to which machining or other processing has been performed in the treatment process prior to treatment in the heat treatment apparatus 1 is brought into the heat treatment apparatus 1. And in the heat treatment apparatus 1, the fats and oils adhering to the object 10 to be treated are vaporized by heating with superheated steam and are removed from the object 10 to be treated. Moreover, when sintering treatment is performed in the heat treatment apparatus 1, the object 10 to be treated, which is constituted as a sintered material bound with a binder containing an oil or fat component, is brought into the heat treatment apparatus 1. In the heat treatment device 1, the object 10 is heated by superheated steam to vaporize and remove the binder, and then further heated by superheated steam to remove the binder. ) is sintered.

In the heat treatment apparatus 1, the object 10 to be treated is brought into the heat treatment chamber 11 and heated by superheated steam while being transported within the heat treatment chamber 11. Thereby, heat treatment is performed on the object 10 to be treated. Then, the object 10 on which heat treatment in the heat treatment chamber 11 has been completed is taken out from the heat treatment chamber 11 . Additionally, the object to be treated 10 is continuously transported to the heat treatment chamber 11, is subjected to heat treatment while being continuously transported within the heat treatment chamber 11, and is continuously unloaded from the heat treatment chamber 11.

The object 10 to be processed in the heat treatment device 11 is, for example, installed as a metal member, and is installed as a member whose outer shape is substantially ring-shaped or substantially cylindrical. Examples of the object 10 having a substantially ring-shaped or substantially cylindrical shape include, for example, the core (iron core) of an electric motor, race members such as the outer and inner rings of a rolling bearing, gears such as spur gears, and rolling bearings. Examples include rollers, shafts, washers, etc. In addition, the object to be processed 10 does not have to be configured as a substantially ring-shaped or substantially cylindrical member, and may be configured as a member formed in a shape other than a substantially ring-shaped or substantially cylindrical shape. For example, it may be of various shapes, such as a cylinder shape, a prism shape, a square cylinder shape, a rectangular parallelepiped shape, a cube shape, a rod shape, a plate shape, a shape having a special cross-sectional shape, or a surface shape.

In Figure 3 (A), which is an enlarged view of the entrance 31 and the vicinity of the heat treatment chamber 11 in the heat treatment apparatus 1, the object to be treated 10 is brought into the heat treatment chamber 11. It indicates the status. Moreover, in FIG. 3(B) which is an enlarged view of the exit 32 of the heat treatment chamber 11 in the heat treatment apparatus 1 and its vicinity, the object 10 to be treated is inside the heat treatment chamber 11. It shows the state in which it is being transported and taken out of the heat treatment chamber 11. Referring to FIG. 3 (A) and FIG. 3 (B), when the object 10 is brought into the heat treatment chamber 11, it is placed, for example, in a case 10a formed in a thin box shape. It is brought in in a deployed state. In the case 10a, a plurality of objects 10 are stored in a state in which they are spread out and arranged at approximately equal intervals. Then, the object to be treated 10 is brought into the heat treatment chamber 11 while placed in the case 10a. In addition, the case 10a for storing the plurality of objects 10 has, for example, a plurality of holes formed on the surrounding side and bottom surfaces and a top surface so that the surrounding gas can pass through with almost no resistance. An opening is formed. Accordingly, the superheated water vapor in the atmosphere within the heat treatment chamber 11 is configured to flow through the case 10a. Additionally, the case 10a may have a structure that allows superheated water vapor in the atmosphere within the heat treatment chamber 11 to flow through the case 10a with almost no resistance, and may be formed, for example, of a net-shaped member. .

The heat treatment device 1 includes a heat treatment chamber 11, a heater 12, a water vapor supply unit 13, a water vapor supply system 14, a water vapor discharge part 15, a water vapor discharge system 16a, 16b, and a gas supply part ( 17), gas supply system (18), inlet side exhaust part (19), outlet side exhaust part (20), exhaust system (21a, 21b), partition plate (22), binder discharge part (23), gas curtain part (24) and a control unit (25). Hereinafter, the configuration of the heat treatment device 1 will be described in detail.

[Heat treatment room]

FIG. 4 is an enlarged view showing the water vapor supply unit 13 and its vicinity in the heat treatment chamber 11 of the heat treatment apparatus 1. FIG. 5 is a schematic cross-sectional view of a part of the heat treatment device 11, FIG. 5 (A) is a view showing the state viewed from the arrow line A-A in FIG. 4, and FIG. 5 (B) is a view showing This is a diagram showing the state seen from the line B-B arrow line in 4. 1 to 5, the heat treatment chamber 11 is provided with an inlet 31 through which the object to be treated 10 is brought in and an outlet 32 through which the object 10 is taken out, and the inlet 31 It is configured as a heat treatment furnace in which heat treatment is performed on the object 10 conveyed from ) toward the outlet 32.

The heat treatment chamber 11 has an external shape of a tunnel extending linearly in a cylindrical shape, and a processing space in which the object 10 to be treated 10 is transported and heat treatment of the object 10 is performed is provided therein. there is. The transport direction of the object 10, that is, the direction in which the object 10 is transported within the heat treatment chamber 11, is a direction parallel to the longitudinal direction in which the heat treatment chamber 11 extends in a cylindrical shape. . 1 to 3, the transport direction of the to-be-processed object 10 is indicated by a dashed-dotted arrow X1, and is hereinafter referred to as the transport direction X1.

The heat treatment chamber 11 has a pair of side walls 11a, 11b, a ceiling wall 11c, and a bottom wall 11d. A pair of side walls 11a, 11b, a ceiling wall 11c, and a bottom wall 11d of the heat treatment chamber 11 are formed of plate-shaped members made of steel. The heat treatment chamber 11 is formed of a plate-shaped member made of steel so that heat from a heater 12, which will be described later and heats the heat treatment chamber 11 from the outside, can be easily conducted. A pair of side walls 11a and 11b are arranged in parallel, and both are provided as wall portions extending along the vertical direction and the conveyance direction X1. The ceiling wall 11c is installed as a wall portion dividing the upper ceiling portion of the heat treatment chamber 11, and is installed to integrally join the upper ends of a pair of side walls 11a and 11b. Additionally, the ceiling wall 11c is formed to extend in an arch shape in a cross section perpendicular to the conveyance direction X1. The bottom wall 11d is installed as a wall portion dividing the bottom part of the heat treatment chamber 11, and is installed to integrally join the lower ends of the pair of side walls 11a and 11b.

The inlet 31 of the heat treatment chamber 11 is provided as an opening through which the object to be treated 10 in the heat treatment chamber 11 is brought in. In this embodiment, the inlet 31 is provided as an opening defined by the end of the side wall 11a, the end of the side wall 11b, the end of the ceiling wall 11c, and the end of the bottom wall 11d. The inlet 31 is provided as an opening at one end of the heat treatment chamber 11 in a direction parallel to the conveyance direction It is open at the end of the upstream side. The entrance 31 is open to the outside of the heat treatment chamber 11, and there is no door, so it is always open to the outside. Additionally, as described above, the object to be treated 10 is brought into the heat treatment chamber 11 through the inlet 31 while being stored in the case 10a.

The outlet 32 of the heat treatment chamber 11 is provided as an opening through which the object to be treated 10 from the heat treatment chamber 11 is taken out. In this embodiment, the outlet 32 is provided as an opening defined by the end of the side wall 11a, the end of the side wall 11b, the end of the ceiling wall 11c, and the end of the bottom wall 11d. And, the outlet 32 is provided as an opening in the end of the heat treatment chamber 11 on the opposite side to the end on the inlet 31 side in the direction parallel to the conveyance direction X1, and the heat treatment chamber ( It is opened at the downstream end in the conveyance direction X1 in 11). The outlet 32 is open to the outside of the heat treatment chamber 11, and has no door, so it is always open to the outside. Additionally, as described above, the object to be treated 10 is carried out of the heat treatment chamber 11 from the outlet 32 while being stored in the case 10a.

Additionally, in the heat treatment chamber 11, a heating region HR, which is an area where the object to be treated 10 is heated, is provided. The heating region HR is set as a partial region in the heat treatment chamber 11 in the conveyance direction X1. In addition, in FIG. 1, the heating region HR in the heat treatment chamber 11 is indicated by arrows at both ends as a predetermined range in the conveyance direction X1, and is shown outside the heat treatment chamber 11. It is schematically represented by a single-ended arrow.

Inside the heat treatment chamber 11, the object 10 to be treated is heated by superheated steam supplied from a water vapor supply unit 13, which will be described later, and a heater 12, which will be described later, heats the heat treatment chamber 11 from the outside. As the heat treatment chamber 11 is heated, it is also heated by the atmosphere within the heat treatment chamber 11 heated through the heat treatment chamber 11. For this reason, in the heat treatment chamber 11, the heating region HR, which is an area where heating of the object 10 is performed, consists of heating by superheated steam and heating by heat from the heater 12 (i.e., heating by heat from the heater 12). It is configured as an area that performs at least one of the following: heating by the atmosphere within the heat treatment chamber 11 heated through the heat treatment chamber 11 by heat from (12).

Additionally, within the heat treatment chamber 11, heating of the object 10 by heat from the heater 12 is performed in the area where the heater 12 is disposed in the conveyance direction X1. And, the heating of the object to be treated 10 by superheated steam is performed in a region in the heat treatment chamber 11 where the atmosphere contains superheated steam. In this embodiment, the area in the heat treatment chamber 11 where heating of the object 10 by superheated steam is performed is from the steam supply unit 13 to the inlet gas supply unit of the gas supply unit 17 to be described later. It is an area up to (36a) and an area from the water vapor supply part 13 to the outlet side gas supply part 37b of the gas supply part 17, which will be described later. In the present embodiment, in the heat treatment chamber 11, the area where heating of the object 10 by heat from the heater 12 is performed is where heating of the object 10 by superheated steam occurs. It is included in the area where it is carried out. That is, in the conveyance direction It is placed inside the area where this is performed. For this reason, in this embodiment, the heating region HR is an area from the water vapor supply part 13 to the inlet side gas supply part 36a in the gas supply part 17 described later, and from the water vapor supply part 13 This is an area up to the outlet side gas supply part 37b of the gas supply part 17, which will be described later.

Additionally, in this embodiment, as described above, the area where heating is performed by heat from the heater 12 is disposed inside the area where heating is performed by superheated water vapor. For this reason, in the area within the heating region HR where heating is performed by heat from the heater 12, both heating by the heat from the heater 12 and heating by superheated water vapor are performed. all. And, in an area within the heating area HR where the heater 12 is not disposed and heating by heat from the heater 12 is not performed, only heating by superheated water vapor is performed.

In addition, in this embodiment, an example is given in which the area where heating by heat from the heater 12 is performed is arranged inside the area where heating by superheated water vapor is performed, but this does not have to be the case. The area where the object to be processed 10 is heated by heat from the heater 12 may be arranged from the inside to the outside of the area where the object 10 is heated by superheated steam. In this case, the area where heating by superheated water vapor is performed is disposed inside the area where heating by heat from the heater 12 is performed. And, the heating region HR is an area including an area where heating by superheated water vapor is performed, and becomes an area where heating by heat from the heater 12 is performed.

Additionally, a conveyance mechanism 33 is installed in the heat treatment chamber 11. The transport mechanism 33 is installed as a mechanism for transporting the object 10 within the heat treatment chamber 11 . In addition, in this embodiment, the transport mechanism 33 transports the object 10 to be processed 10 to the case 10a, that is, to transport the object 10 stored in the case 10a. Consists of. The conveyance mechanism 33 is disposed in the lower area within the heat treatment chamber 11, and is disposed along the conveyance direction X1 above the bottom wall 11d parallel to the wall surface of the bottom wall 11d. . The conveyance mechanism 33 is configured as a mechanism that conveys the object to be processed 10 by, for example, an endless mesh belt 34 that goes around. Then, the conveyance mechanism 33 moves the mesh belt 34 around so that the object 10 stored in the case 10a disposed on the upper surface of the mesh belt 34 is conveyed together with the case 10a. Consists of.

In addition, the endless mesh belt 34, for example, has a structure in which roller chains are respectively installed on both edges in the width direction, and is driven by a plurality of drive shafts 35 on which sprockets that engage the roller chains are installed. It is driven and configured to move around. The plurality of drive shafts 35 are inserted inside the mesh belt 34 and are installed to rotate about each axis. The plurality of drive shafts 35 are arranged to extend in parallel with each other and are arranged to extend along a direction perpendicular to the pair of side walls 11a and 11b. Additionally, each drive shaft 35 is rotatably supported with respect to a pair of side walls 11a and 11b. In addition, each drive shaft 35 is provided with a pair of sprockets 35a and 35a arranged apart from each other in its axial direction, and each sprocket 35a is attached to each roller chain at both edges of the mesh belt 34. They are interlocked. In addition, at least one of the plurality of drive shafts 35 is configured to be rotationally driven by an electric motor (not shown) that operates based on a control command from the control unit 25. When the drive shaft 35 is driven to rotate by an electric motor, the rotation drive of the drive shaft 35 is transmitted to the mesh belt 34 through engagement of the sprocket 35a and the roller chain. Then, the mesh belt 34, which is freely supported by the plurality of drive shafts 35, is rotated. When the mesh belt 34 performs a circling motion, the object 10 disposed on the upper surface of the mesh belt 34 is transported while stored in the case 10a.

[heater]

Referring to FIG. 1, a plurality of heaters 12 are installed as a mechanism to heat the heat treatment chamber 11 from the outside. The plurality of heaters 12 are arranged in series along the longitudinal direction of the heat treatment chamber 11 (that is, along the conveyance direction X1). In addition, in the drawings after FIGS. 2 and 4, the heater 12 is omitted.

Each heater 12 covers a heating element (not shown) arranged around the heat treatment chamber 11, and the surroundings of the heat treatment chamber 11 and the heating element further outside the heating element arranged around the heat treatment chamber 11. It is composed of an insulating member (not shown) arranged as follows. The heating element is arranged to heat the pair of side walls 11a, 11b, the ceiling wall 11c, and the bottom wall 11d in the heat treatment chamber 11 from the outside. The heating element includes, for example, a heat transfer element that converts electrical energy supplied from a power source (not shown) into heat energy, and is configured to generate heat by applying electricity to the heat transfer element. Additionally, the heating element of the heater 12 operates based on control commands from the control unit 25 and generates heat. When the heating element of the heater 12 operates and generates heat based on a control command from the control unit 25, the pair of side walls 11a and 11b of the heat treatment chamber 11 and the cloth are heated by the heat from the heating element of the heater 12. The barrier wall 11c and the bottom wall 11d are heated. Thereby, the atmosphere within the heat treatment chamber 11 is heated. In addition, the object 10 transported through the heat treatment chamber 11 is heated by superheated steam and is also heated by the atmosphere inside the heat treatment chamber 11 heated by the heat from the heater 12.

[Steam Supply Department]

1, 2, 4, and 5, the water vapor supply unit 13 is installed in the heating region HR in the heat treatment chamber 11 and supplies superheated water vapor into the heat treatment chamber 11. It is installed as an instrument. In the heat treatment apparatus 1 illustrated in this embodiment, the water vapor supply unit 13 is installed in the central portion of the conveyance direction X1 of the to-be-processed object 10 in the heating region HR. Additionally, the water vapor supply unit 13 may be disposed in the heating region HR, and may be installed on the inlet 31 side or the outlet 32 side rather than the central portion in the conveyance direction X1.

The water vapor supply unit 13 is comprised of a pair of nozzle parts 38a and 38b that supply superheated water vapor supplied from the water vapor supply system 14, which will be described later, into the heat treatment chamber 11. Each of the pair of nozzle portions 38a and 38b is provided as a member that extends in a cylindrical shape and whose both ends in the cylindrical axis direction are closed. A pair of nozzle parts 38a and 38b are arranged to face each other in the conveyance direction X1 of the object 10 to be processed. And, in the conveyance direction It is arranged on the outlet 32 side. Moreover, in this embodiment, the pair of nozzle parts 38a, 38b is arranged in the central part of the conveyance direction X1 in the heating region HR within the heat treatment chamber 11. Then, the nozzle portion 38a is disposed closer to the inlet 31 than the central position in the conveyance direction X1 in the heating region HR, and the nozzle portion 38b is disposed in the heating region HR It is arranged on the outlet 32 side rather than the central position in the conveyance direction X1. Additionally, each nozzle portion 38a, 38b is disposed within the heat treatment chamber 11 with its cylindrical axis extending horizontally along the width direction of the heat treatment chamber 11. In addition, the width direction of the heat treatment chamber 11 is in the longitudinal direction of the heat treatment chamber 11 extending horizontally (i.e., the conveyance direction X1) and the height direction of the heat treatment chamber 11 (i.e., the vertical direction). It is defined as a direction perpendicular to the

In addition, each nozzle portion 38a, 38b is connected to each water vapor supply pipe 42a, 42b of the water vapor supply system 14, which will be described later, at a substantially central position in the cylindrical axis direction. Additionally, the nozzle portion 38a is connected to the water vapor supply pipe 42a, and the nozzle portion 38b is connected to the water vapor supply pipe 42b. Each of the water vapor supply pipes 42a and 42b penetrates the ceiling wall 11c of the heat treatment chamber 11 and is connected to each nozzle portion 38a and 38b within the heat treatment chamber 11. Each water vapor supply pipe 42a, 42b connected to each nozzle portion 38a, 38b is fixed to the ceiling wall 11c while penetrating the ceiling wall 11c. Accordingly, within the heat treatment chamber 11, each nozzle portion 38a, 38b is supported on the ceiling wall 11c via each water vapor supply pipe 42a, 42b.

The inside of each nozzle section 38a, 38b and the inside of each water vapor supply pipe 42a, 42b are in communication, and the superheated steam supplied from each water vapor supply pipe 42a, 42b is connected to each nozzle section 38a, 38b. ) is supplied inside. Additionally, a plurality of nozzle holes 39 are formed in each nozzle portion 38a, 38b. Each nozzle hole 39 is formed as a through hole opened in a circular shape, for example. In addition, the opening shape of each nozzle hole 39 is not limited to a circular shape, and may be formed in various shapes such as a rectangular shape or a slit-shaped shape, for example. The plurality of nozzle holes 39 are arranged in a straight line along the cylindrical axis direction in each nozzle portion 38a, 38b, for example, at equal intervals. In addition, since the cylindrical axis direction of each nozzle part 38a, 38b follows the width direction of the heat treatment chamber 11, the plurality of nozzle holes 39 in each nozzle part 38a, 38b are heat treated. It is arranged along the width direction of the thread 11. Superheated water vapor supplied to each nozzle section 38a and 38b from each water vapor supply pipe 42a and 42b fills each nozzle section 38a and 38b and flows outward from a plurality of nozzle holes 39. It is taken out. As superheated water vapor is blown out from the plurality of nozzle holes 39, superheated water vapor is supplied from each nozzle portion 38a and 38b into the heat treatment chamber 11.

In addition, in the nozzle portion 38a, the plurality of nozzle holes 39 arranged along the cylindrical axis direction are all open toward the middle position of the pair of opposing nozzle portions 38a and 38b. , It opens toward the outlet 32 side. For this reason, the superheated water vapor supplied into the heat treatment chamber 11 from the nozzle part 38a disposed on the inlet 31 side among the pair of nozzle parts 38a and 38b is on the side opposite to the inlet 31 side. It is taken out from the nozzle portion 38a toward the outlet 32 side. In addition, in this embodiment, in the nozzle portion 38a, the plurality of nozzle holes 39 are opened toward the central position of the conveyance direction X1 in the heating region HR. In addition, the nozzle portion 38a is disposed on the inlet 31 side rather than the central position in the conveyance direction X1 in the heating region HR, and each nozzle hole 39 of the nozzle portion 38a is, It opens toward the exit 32 side. For this reason, the superheated water vapor supplied into the heat treatment chamber 11 from the nozzle portion 38a disposed closer to the inlet 31 than the central position in the conveyance direction X1 in the heating region HR is at the inlet 31. It is taken out from the nozzle portion 38a from the side toward the central position side of the conveyance direction X1 in the heating region HR.

In addition, in the nozzle portion 38b, the plurality of nozzle holes 39 arranged along the cylindrical axis direction are all open toward the middle position of the pair of opposing nozzle portions 38a and 38b. , It is open toward the inlet 31 side. For this reason, among the pair of nozzle parts 38a and 38b, the superheated water vapor supplied into the heat treatment chamber 11 from the nozzle part 38b disposed on the outlet 32 side is on the side opposite to the outlet 32 side. It is taken out from the nozzle portion 38b toward the inlet 31 side. In addition, in this embodiment, in the nozzle portion 38b, the plurality of nozzle holes 39 are opened toward the central position of the conveyance direction X1 in the heating region HR. In addition, the nozzle portion 38b is disposed on the outlet 32 side rather than the central position in the conveyance direction X1 in the heating region HR, and each nozzle hole 39 of the nozzle portion 38b is, It opens toward the entrance (31). For this reason, the superheated water vapor supplied into the heat treatment chamber 11 from the nozzle portion 38a disposed closer to the outlet 32 than the central position in the conveyance direction It is taken out from the nozzle portion 38b from the side toward the central position side of the conveyance direction X1 in the heating region HR.

With the above configuration, each of the pair of nozzle parts 38a and 38b is configured to blow out superheated water vapor toward the intermediate position of the pair of opposing nozzle parts 38a and 38b. In addition, in this embodiment, the nozzle portion 38a is located in the central portion of the conveyance direction It is arranged to blow out superheated water vapor toward the central position of X1). And, the nozzle portion 38b is positioned at the center of the conveyance direction X1 in the heating region HR from the outlet 32 side. It is arranged to blow out superheated water vapor toward the side. For this reason, the pair of nozzle portions 38a and 38b are positioned in the conveyance direction They are placed opposite each other. And, each of the pair of nozzle portions 38a and 38b is configured to blow out superheated water vapor toward the central position of the conveyance direction X1 of the object 10 in the heating region HR. .

[Water vapor supply system]

2, 4, and 5, the water vapor supply system 14 is installed as a mechanism to generate superheated water vapor and supply the superheated water vapor to the water vapor supply unit 13. And the water vapor supply system 14 is comprised of a superheated water vapor generating unit 40 and water vapor supply pipes 41, 42a, and 42b.

The superheated steam generating unit 40 is installed as a mechanism for generating superheated steam by heating water, and is comprised of a boiler and a superheater. The boiler heats and evaporates water to generate saturated water vapor at a boiling point temperature, and the superheater generates superheated water vapor by further heating the saturated water vapor generated in the boiler. The superheated steam generation unit 40 operates based on control commands from the control unit 25 and generates superheated steam. That is, the boiler and superheater operate based on control commands from the control unit 25, and superheated water vapor is generated. When the superheated steam generator 40 operates in accordance with a control command from the control unit 25 to generate superheated steam, a pair of the steam supply unit 13 is supplied through the steam supply pipes 41, 42a, and 42b, which will be described later. Superheated water vapor is supplied to the nozzle portions 38a and 38b.

The water vapor supply pipe 41 is connected to the superheated water vapor generating unit 40 at its upstream end, and is installed as a piping system that supplies superheated water vapor generated in the superheated water vapor generating part 40. Additionally, the water vapor supply pipe 41 is connected to the water vapor supply pipe 42a and the water vapor supply pipe 42b at its downstream end. That is, the water vapor supply pipe 41 is connected to the water vapor supply pipes 42a and 42b so as to branch in parallel. The water vapor supply pipe 42a is installed as a piping system connecting the water vapor supply pipe 41 and the nozzle portion 38a, and superheated water generated in the superheated water vapor generation unit 40 and supplied through the water vapor supply pipe 41 It is configured to supply water vapor to the nozzle portion 38a. The water vapor supply pipe 42b is installed as a piping system connecting the water vapor supply pipe 41 and the nozzle portion 38b, and superheated water generated in the superheated water vapor generating unit 40 and supplied through the water vapor supply pipe 41 It is configured to supply water vapor to the nozzle portion 38b.

[Water vapor discharge unit]

FIG. 6 is an enlarged view showing the inlet side water vapor discharge portion 15a (described later) and the inlet side gas supply portions 36a and 36b (described later) and their vicinity in the heat treatment chamber 11 of the heat treatment apparatus 1. FIG. 7 is a schematic cross-sectional view of a part of the heat treatment apparatus 1, FIG. 7 (A) is a view showing a state viewed from the line C-C line of FIG. 6, and FIG. 7 (B) is a view showing a This is a diagram showing the state seen from the line D-D arrow line of 6. FIG. 8 is an enlarged view showing the outlet side water vapor discharge portion 15b (described later) and the outlet side gas supply portions 37a and 37b (described later) and their vicinity in the heat treatment chamber 11 of the heat treatment apparatus 1. FIG. 9 is a schematic cross-sectional view of a part of the heat treatment apparatus 1, FIG. 9 (A) is a view showing the state viewed from the line E-E arrow line of FIG. 8, and FIG. 9 (B) is a view showing a This is a diagram showing the state seen from the line F-F line arrow line 8.

1 to 3 and 6 to 9, the water vapor discharge unit 15 is installed as a mechanism for discharging superheated water vapor in the heat treatment chamber 11 to the outside of the heat treatment chamber 11. In addition, the water vapor discharge section 15 is installed on the inlet 31 side and the outlet 32 side with respect to the water vapor supply section 13 in the heat treatment chamber 11, respectively.

On the inlet 31 side of the heat treatment chamber 11, an inlet side water vapor discharge portion 15a is provided as a water vapor discharge portion 15. On the outlet 32 side of the heat treatment chamber 11, an outlet-side water vapor discharge portion 15b is provided as a water vapor discharge portion 15. In this embodiment, the inlet side water vapor discharge portion 15a and the outlet side water vapor discharge portion 15b are disposed within the heating region HR in the heat treatment chamber 11, and the They are each arranged in areas near both ends in the conveyance direction X1. In addition, in this embodiment, the inlet side water vapor discharge portion 15a is disposed on the inlet 31 side among the plurality of heaters 12 lined up along the conveyance direction X1 in the heat treatment chamber 11. It is arranged in a position corresponding to the heater 12. And, the outlet side water vapor discharge unit 15b is connected to the heater 12 disposed on the outlet 32 side among the plurality of heaters 12 lined up along the conveyance direction X1 in the heat treatment chamber 11. are placed in corresponding positions. In addition, the inlet side water vapor discharge portion 15a and the outlet side water vapor discharge portion 15b are located in areas near each end of the heating region HR in a direction parallel to the conveyance direction X1. It is disposed in the area on the side of the barrier 11c, that is, in the area on the upper half side in the cross section perpendicular to the conveyance direction X1 of the heat treatment chamber 11.

The inlet side water vapor discharge portion 15a and the outlet side water vapor discharge portion 15b are configured identically and are formed in the shape of a hollow box extending along the width direction of the heat treatment chamber 11. In addition, each of the inlet side water vapor discharge portion 15a and the outlet side water vapor discharge portion 15b has an upper wall 43a extending in an arch shape along the ceiling wall 11c in a cross section perpendicular to the conveyance direction X1. and a lower wall 43b extending horizontally, and a pair of side walls 43c and 43d extending along a cross section perpendicular to the conveyance direction X1. Accordingly, the hollow areas inside each of the inlet side water vapor discharge portion 15a and the outlet side water vapor discharge portion 15b are divided into an upper wall 43a, a lower wall 43b, and a pair of side walls 43c, 43d. It is formed as a dome-shaped hollow area surrounded by an arc.

In addition, a plurality of through holes (not shown) for sucking in superheated water vapor are formed in the lower walls 43b of each of the inlet side water vapor discharge section 15a and the outlet side water vapor discharge section 15b. Superheated water vapor is sucked in from each of the inlet side water vapor discharge section 15a and the outlet side water vapor discharge section 15b and discharged from the heat treatment chamber 11.

[Water vapor discharge system]

2 and 6 to 9, the water vapor discharge systems 16a and 16b suck superheated water vapor from the inlet side water vapor discharge section 15a and the outlet side water vapor discharge section 15b and discharge it into the heat treatment chamber 11. It is installed as a mechanism to discharge superheated water vapor to the outside. And the water vapor discharge systems 16a and 16b are connected to each of the inlet side water vapor discharge section 15a and the outlet side water vapor discharge section 15b. In addition, the water vapor discharge system 16a is connected to the inlet side water vapor discharge section 15a, and the superheated water vapor sucked into the inlet side water vapor discharge section 15a is sucked into the water vapor discharge system 16a and stored in the heat treatment chamber ( 11) is discharged from. In addition, the water vapor discharge system 16b is connected to the outlet side water vapor discharge section 15b, and the superheated water vapor sucked into the outlet side water vapor discharge section 15b is sucked into the water vapor discharge system 16b and stored in the heat treatment chamber ( 11) is discharged from.

The water vapor discharge system 16a and the water vapor discharge system 16b are configured in the same manner, and both are provided with a water vapor discharge pipe 44 and an ejector 45.

Each water vapor discharge pipe 44 of the water vapor discharge systems 16a and 16b penetrates the ceiling wall 11c of the heat treatment chamber 11, and discharges water vapor from the inlet side water vapor discharge portion 15a and the outlet side within the heat treatment chamber 11. It is connected to each of the discharge portions 15b. The inside of each of the inlet side water vapor discharge part 15a and the outlet side water vapor discharge part 15b and each water vapor discharge pipe 44 are in communication, and the inlet side water vapor discharge part 15a and the outlet side water vapor discharge part 15b are in communication with each other. The superheated water vapor sucked into each is sucked into each water vapor discharge pipe 44. In addition, each water vapor discharge pipe 44 connected to each of the inlet side water vapor discharge part 15a and the outlet side water vapor discharge part 15b is fixed to the ceiling wall 11c while penetrating the ceiling wall 11c. It is done. Accordingly, in the heat treatment chamber 11, each of the inlet side water vapor discharge portion 15a and the outlet side water vapor discharge portion 15b is supported on the ceiling wall 11c through each water vapor discharge pipe 44. .

Each ejector 45 of the water vapor discharge system 16a, 16b has an inlet side water vapor discharge portion 15a and an outlet side water vapor discharge portion 15b in each water vapor discharge pipe 44. ) is connected at the end opposite to the end connected to each of the ). In addition, each ejector 45 generates negative pressure using high-pressure fluid, thereby discharging superheated water vapor from each of the inlet side water vapor discharge section 15a and the outlet side water vapor discharge section 15b through each water vapor discharge pipe 44. It is installed as a mechanism to suction and discharge the suctioned superheated water vapor to the outside.

Each ejector 45 of the water vapor discharge system 16a, 16b has, for example, a nozzle to which compressed air as a high-pressure fluid is supplied, a body covering the circumference of the nozzle, and a discharge port that communicates with the body and opens to the outside. It is composed of an installed diffuser. The nozzle is configured to supply compressed air from a compressed air supply source (not shown). Additionally, on the upstream side of the nozzle, an electromagnetic valve is installed that opens and closes based on control commands from the control unit 25, which will be described later, and the supply and discharge of compressed air to the nozzle is controlled. The body divides the area around the downstream end of the nozzle as a negative pressure generation area and is connected to each water vapor discharge pipe 44. In addition, at the portion connected to the downstream end of each water vapor discharge pipe 44 in the body, an electromagnetic valve is installed that opens and closes based on a control command from the control unit 25, and operates the ejector 45 to discharge each water vapor discharge pipe. When a suction operation of superheated water vapor is performed through (44), the electromagnetic valve is opened.

When the binder is discharged by the inlet side water vapor discharge section 15a and the outlet side water vapor discharge section 15b, each ejector ( The electromagnetic valve of 45 opens, and the ejector 45 operates. That is, the solenoid valve on the upstream side of the nozzle opens, and the solenoid valve installed at the portion connected to the downstream end of each water vapor discharge pipe 44 in the body opens, and each ejector 45 operates. When each ejector 45 operates, compressed air is blown out from the nozzle into the body at high speed, thereby generating negative pressure within the body, thereby causing the water vapor discharge portion 15a on the inlet side and the water vapor discharge portion 15a on the outlet side through each water vapor discharge pipe 44. Superheated water vapor inside each of the water vapor discharge portions 15b is sucked in. The superheated water vapor inside each of the inlet side water vapor discharge section 15a and the outlet side water vapor discharge section 15b is sucked into each water vapor discharge pipe 44, so that the inlet side water vapor discharge section 15a and the outlet side water vapor discharge section ( Superheated water vapor in the heat treatment chamber 11 is sucked in from a plurality of through holes provided in each lower wall 43b of 15b). The superheated water vapor sucked into each of the inlet side water vapor discharge section 15a and the outlet side water vapor discharge section 15b flows to the body of each ejector 45 through each water vapor discharge pipe 44, and is discharged from the nozzle within the body. It is mixed with the blown compressed air. Then, the mixed gas of superheated water vapor and compressed air flows downstream within the diffuser and is discharged to the outside from the discharge port of the diffuser. In this way, the superheated water vapor in the heat treatment chamber 11 is sucked in from each of the inlet side water vapor discharge section 15a and the outlet side water vapor discharge section 15b and passes through each water vapor discharge pipe 44 and each ejector 45. is discharged to the outside.

[Gas Supply Department]

1 to 3 and 6 to 9, the gas supply unit 17 is installed as a mechanism for supplying at least one of an inert gas and air into the heat treatment chamber 11. That is, the gas supply unit 17 is a mechanism for supplying an inert gas into the heat treatment chamber 11, a mechanism for supplying air into the heat treatment chamber 11, or a mechanism for supplying inert gas and air into the heat treatment chamber 11. It is installed as a mechanism to supply mixed gas. In addition, in this embodiment, the gas supply unit 17 is configured as a mechanism for supplying an inert gas into the heat treatment chamber 11. The inert gas supplied by the gas supply unit 17 into the heat treatment chamber 11 is, for example, nitrogen gas. Additionally, examples of inert gases other than nitrogen gas supplied by the gas supply unit 17 include helium and argon gas.

In the heat treatment apparatus 1, as the gas supply parts 17, an inlet side gas supply part 36a, 36b and an outlet side gas supply part 37a, 37b are provided. In the heat treatment chamber 11, the inlet side gas supply parts 36a and 36b are installed on the inlet 31 side with respect to the water vapor supply part 13, and the outlet side gas supply parts 37a and 37b are located on the water vapor supply part 13. ) is installed on the outlet 32 side.

The inlet side gas supply portions 36a and 36b are installed as a pair, and are further inlet ( 31) It is installed on the side. Each of the pair of inlet-side gas supply portions 36a and 36b is provided as a member that extends, for example, in a cylindrical shape and whose both ends in the cylindrical axis direction are closed. In the present embodiment, the pair of inlet side gas supply units 36a and 36b are disposed in an area near the end of the inlet 31 side in a direction parallel to the conveyance direction X1 of the heating region HR. It is done. And, the pair of inlet side gas supply parts 36a, 36b are arranged in a line along the conveyance direction X1, and the inlet side gas supply part 36a is positioned at the inlet ( 31) It is placed on the side. Additionally, each of the inlet side gas supply portions 36a and 36b is disposed within the heat treatment chamber 11 with its cylindrical axis extending horizontally along the width direction of the heat treatment chamber 11.

In addition, each inlet side gas supply section 36a, 36b is connected to each branch pipe 48a, 48b of the later-described gas supply system 18 that supplies inert gas at a substantially central position in the cylindrical axis direction. You are connected. Additionally, the inlet side gas supply part 36a is connected to the branch pipe 48a, and the inlet side gas supply part 36b is connected to the branch pipe 48b. Each branch pipe 48a, 48b penetrates the ceiling wall 11c of the heat treatment chamber 11 and is connected to each inlet side gas supply section 36a, 36b within the heat treatment chamber 11. Each branch pipe 48a, 48b connected to each inlet side gas supply part 36a, 36b is fixed to the ceiling wall 11c while penetrating the ceiling wall 11c. Accordingly, within the heat treatment chamber 11, each inlet side gas supply section 36a, 36b is supported on the ceiling wall 11c via each branch pipe 48a, 48b.

The inside of each inlet side gas supply section 36a, 36b and the inside of each branch pipe 48a, 48b are in communication, and the inert gas supplied from each branch pipe 48a, 48b is connected to each inlet side gas supply section 36a. , 36b) is supplied to the interior. Additionally, a plurality of nozzle holes (not shown) are formed in each of the inlet side gas supply portions 36a and 36b. A plurality of nozzle holes are arranged in a straight line along the cylindrical axis direction in each of the inlet side gas supply portions 36a and 36b, for example, arranged in a line at equal intervals. In addition, the plurality of nozzle holes arranged along the cylindrical axis direction in each of the inlet side gas supply portions 36a and 36b are all open downward. For this reason, the inert gas is blown out from each of the inlet side gas supply parts 36a and 36b downward.

By the above configuration, the inert gas supplied from each branch pipe 48a, 48b to each inlet side gas supply section 36a, 36b is filled within each inlet side gas supply section 36a, 36b, and a plurality of It is discharged from the nozzle hole downward toward the outside. Then, the inert gas is blown out from the plurality of nozzle holes, so that the inert gas is supplied into the heat treatment chamber 11 from each of the inlet side gas supply parts 36a and 36b. Inert gas is supplied from the inlet side gas supply parts 36a and 36b installed on the inlet 31 side rather than the inlet side water vapor discharge part 15a, so that heat treatment is performed between the inlet 31 and the inlet side water vapor discharge part 15a. The atmosphere within the room 11 is separated.

The outlet side gas supply portions 37a and 37b are installed as a pair, and have a greater outlet ( 32) It is installed on the side. Each of the pair of outlet-side gas supply portions 37a and 37b is, for example, provided as a member that extends in a cylindrical shape and whose both ends in the cylindrical axis direction are closed. In the present embodiment, the pair of outlet-side gas supply units 37a and 37b are disposed in an area near the end of the outlet 32 side in a direction parallel to the conveyance direction X1 of the heating region HR. It is done. In addition, the pair of outlet-side gas supply parts 37a and 37b are arranged in a row along the conveyance direction X1, and the outlet-side gas supply part 37b has an outlet ( 32) It is placed on the side. In addition, each outlet-side gas supply part 37a, 37b is arranged in the heat treatment chamber 11 with its cylindrical axis extending horizontally along the width direction of the heat treatment chamber 11.

In addition, each outlet-side gas supply section 37a, 37b is connected to each branch pipe 48c, 48d of the later-described gas supply system 18 that supplies inert gas at a substantially central position in the cylindrical axis direction. You are connected. Additionally, the outlet side gas supply part 37a is connected to the branch pipe 48c, and the outlet side gas supply part 37b is connected to the branch pipe 48d. Each of the branch pipes 48c and 48d penetrates the ceiling wall 11c of the heat treatment chamber 11 and is connected to the gas supply portions 37a and 37b on each outlet side within the heat treatment chamber 11. Each branch pipe 48c, 48d connected to each outlet side gas supply part 37a, 37b is fixed to the ceiling wall 11c while penetrating the ceiling wall 11c. Accordingly, within the heat treatment chamber 11, each outlet side gas supply section 37a, 37b is supported on the ceiling wall 11c via each branch pipe 48c, 48d.

The inside of each outlet side gas supply section 37a, 37b and the inside of each branch pipe 48c, 48d are in communication, and the inert gas supplied from each branch pipe 48c, 48d is connected to each outlet side gas supply section 37a. , 37b) is supplied to the interior. Additionally, a plurality of nozzle holes (not shown) are formed in each outlet-side gas supply section 37a, 37b. A plurality of nozzle holes are arranged in a straight line along the cylindrical axis direction in each outlet-side gas supply section 37a, 37b, for example, arranged in a line at equal intervals. In addition, the plurality of nozzle holes arranged along the cylindrical axis direction in each outlet-side gas supply section 37a and 37b are all open downward. For this reason, the inert gas is blown out from each outlet side gas supply section 37a and 37b toward the downward direction.

By the above configuration, the inert gas supplied from each branch pipe 48c, 48d to each outlet side gas supply section 37a, 37b is filled within each outlet side gas supply section 37a, 37b, and a plurality of It is discharged from the nozzle hole downward toward the outside. Then, the inert gas is blown out from the plurality of nozzle holes, so that the inert gas is supplied into the heat treatment chamber 11 from each outlet side gas supply part 37a, 37b. Inert gas is supplied from the outlet side gas supply parts 37a and 37b installed on the outlet 32 side rather than the outlet side water vapor discharge part 15b, thereby performing heat treatment between the outlet 32 and the outlet side water vapor discharge part 15b. The atmosphere within the room 11 is separated.

[Gas supply system]

2 and FIGS. 6 to 9, the gas supply system 18 is installed as a mechanism for supplying an inert gas to the gas supply unit 17. In addition, the gas supply system 18 is provided with an inert gas source 46, a common pipe 47, branch pipes 48a, 48b, 48c, 48d, and gas supply valves 49a, 49b, 49c, 49d. Consists of.

The inert gas supply source 46 is installed as a supply source for supplying inert gas at a high pressure above atmospheric pressure, and is configured as, for example, a container such as a tank or cylinder in which inert gas compressed to a high pressure above atmospheric pressure is stored. The common pipe 46a is connected to the inert gas supply source 46 and is installed as a piping system for supplying high-pressure inert gas from the inert gas supply source 46 to the branch pipes 48a, 48b, 48c, and 48d. .

The branch pipes 48a, 48b, 48c, and 48d branch from the common pipe 47, and are connected to the common pipe 47 and the inlet-side gas supply portions 36a, 36b and the outlet-side gas supply portion 37a of the gas supply portion 17. It is installed as a piping system connecting , 37b). Four branch pipes 48a, 48b, 48c, and 48d branch from the common pipe 47 in parallel. In addition, each branch pipe 48a and 48b is connected to each inlet side gas supply part 36a and 36b, and each branch pipe 48c and 48d is connected to each outlet side gas supply part 37a and 37b, respectively. I'm doing it. Specifically, the branch pipe 48a connects the common pipe 47 and the inlet side gas supply section 36a, and is configured to supply an inert gas to the inlet side gas supply section 36a. The branch pipe 48b connects the common pipe 47 and the inlet side gas supply part 36b, and is configured to supply an inert gas to the inlet side gas supply part 36b. The branch pipe 48c connects the common pipe 47 and the outlet-side gas supply part 37a and is configured to supply an inert gas to the outlet-side gas supply part 37a. The branch pipe 48d connects the common pipe 47 and the outlet side gas supply part 37b and is configured to supply an inert gas to the outlet side gas supply part 37b.

Each of the gas supply valves 49a, 49b, 49c, and 49d is installed as a solenoid valve, and is installed on each of the branch pipes 48a, 48b, 48c, and 48d. In addition, the gas supply valve 49a is installed in the branch pipe 48a, the gas supply valve 49b is installed in the branch pipe 48b, and the gas supply valve 49c is installed in the branch pipe 48c, A gas supply valve 49d is installed in the branch pipe 48d. Each gas supply valve 49a, 49b, 49c, and 49d is configured to switch the state of each branch pipe 48a, 48b, 48c, and 48d between an open state and a closed state by performing an opening and closing operation. Each gas supply valve 49a, 49b, 49c, and 49d operates based on control commands from the control unit 25. In accordance with the control command from the control unit 25, each gas supply valve 49a, 49b, 49c, and 49d performs an opening operation, and the state of each branch pipe 48a, 48b, 48c, and 48d is switched to the open state. At this time, the inert gas supply source 46, each inlet side gas supply part 36a, 36b, and each outlet side gas supply part 37a, 37b are connected to the common pipe 47 and each branch pipe 48a, 48b, 48c, 48d. It communicates through. Accordingly, the inert gas supplied from the inert gas supply source 46 is supplied to each inlet gas supply section 36a, 36b and each outlet side through the common pipe 47 and each branch pipe 48a, 48b, 48c, 48d. It is supplied to the gas supply units 37a and 37b. Then, inert gas is supplied into the heat treatment chamber 11 from each of the inlet side gas supply parts 36a and 36b and each of the outlet side gas supply parts 37a and 37b. In addition, each gas supply valve 49a, 49b, 49c, and 49d performs a closing operation based on a control command from the control unit 25, and the state of each branch pipe 48a, 48b, 48c, and 48d is in the closed state. When the switch is made and communication is interrupted, the inert gas is not supplied to the heat treatment chamber 11.

[Inlet side exhaust, outlet side exhaust]

1 to 3 and 6 to 9, the inlet side exhaust part 19 and the outlet side exhaust part 20 exhaust the gas in the heat treatment chamber 11 to the outside of the heat treatment chamber 11. It is established as a mechanism for this purpose.

The inlet side exhaust section 19 is installed between a pair of inlet side gas supply sections 36a and 36b in the heat treatment chamber 11. That is, the inlet side exhaust section 19 is installed in the heat treatment chamber 11 in an area between the inlet side gas supply section 36a and the inlet side gas supply section 36b. For this reason, in the area within the heat treatment chamber 11 on the inlet 31 side rather than the inlet side water vapor discharge section 15a, the inlet side moves from the inlet side water vapor discharge section 15a side toward the inlet 31 side. The water vapor discharge section 15a, the inlet side gas supply section 36b, the inlet side exhaust section 19, and the inlet side gas supply section 36a are arranged in this order. In addition, the inlet side exhaust section 19 is an area on the ceiling wall 11c side in the area between the pair of inlet side gas supply parts 36a and 36b in the heat treatment chamber 11, that is, heat treatment. It is arranged in an area on the upper half side of the cross section perpendicular to the conveyance direction X1 of the yarn 11.

The outlet side exhaust portion 20 is installed between a pair of outlet side gas supply portions 37a and 37b in the heat treatment chamber 11. That is, the outlet-side exhaust unit 20 is installed in the heat treatment chamber 11 in an area between the outlet-side gas supply unit 37a and the outlet-side gas supply unit 37b. For this reason, in the area within the heat treatment chamber 11 on the outlet 32 side rather than the outlet side water vapor discharge section 15b, the direction is from the outlet side water vapor discharge section 15b side toward the outlet 32 side. The water vapor discharge part 15b, the outlet side gas supply part 37a, the outlet side exhaust part 20, and the outlet side gas supply part 36b are arranged in this order. In addition, the outlet side exhaust section 20 is an area on the ceiling wall 11c side in the area between the pair of outlet side gas supply parts 37a and 37b in the heat treatment chamber 11, that is, heat treatment. It is arranged in an area on the upper half side of the cross section perpendicular to the conveyance direction X1 of the yarn 11.

The inlet side exhaust portion 19 and the outlet side exhaust portion 20 are configured identically and are formed in a hollow box shape extending along the width direction of the heat treatment chamber 11. And, each of the inlet side exhaust section 19 and the outlet side exhaust section 20 includes an upper wall 50a extending in an arch shape along the ceiling wall 11c in a cross section perpendicular to the conveyance direction X1; It is comprised of a horizontally extending lower wall 50b and a pair of side walls 50c and 50d extending along a cross section perpendicular to the conveyance direction X1. Accordingly, the hollow area inside each of the inlet side exhaust portion 19 and the outlet side exhaust portion 20 is an arc surrounded by the upper wall 50a, the lower wall 50b, and the pair of side walls 50c and 50d. It is formed as a dome-shaped hollow area.

In addition, a plurality of through holes (not shown) for sucking in the gas in the heat treatment chamber 11 are formed in the lower walls 50b of each of the inlet side exhaust section 19 and the outlet side exhaust section 20. The gas in the heat treatment chamber 11 is sucked in from each of the inlet side exhaust part 19 and the outlet side exhaust part 20 and discharged from the heat treatment chamber 11. In addition, from the inlet side exhaust section 19, an inert gas is supplied into the heat treatment chamber 11 from the inlet side gas supply section 36b, and an inert gas is supplied into the heat treatment chamber 11 from the inlet side gas supply section 36a to the inlet ( 31) side, the inert gas flowing to the opposite side, and some superheated water vapor that is not discharged from the inlet side water vapor discharge portion 15a but flows toward the inlet 31 side are sucked in and discharged as gas in the heat treatment chamber 11. . In addition, in the outlet side exhaust unit 20, the inert gas supplied into the heat treatment chamber 11 from the outlet side gas supply part 37a and the inert gas supplied into the heat treatment chamber 11 from the outlet side gas supply part 37b are supplied to the outlet 32. ) side, and some superheated water vapor that flows toward the outlet 32 rather than being discharged from the outlet side water vapor discharge portion 15b is sucked in and discharged as gas in the heat treatment chamber 11.

[Exhaust system]

2 and 6 to 9, the exhaust systems 21a and 21b suck in the gas in the heat treatment chamber 11 from the inlet side exhaust portion 19 and the outlet side exhaust portion 20 and It is installed as a mechanism to exhaust gas to the outside of the heat treatment chamber 11. And the exhaust systems 21a and 21b are connected to each of the inlet side exhaust section 19 and the outlet side exhaust section 20. In addition, the exhaust system 21a is connected to the inlet side exhaust part 19, and the gas in the heat treatment chamber 11 sucked into the inlet side exhaust part 19 is sucked into the exhaust system 21a and is sucked into the heat treatment chamber 19. It is discharged from (11). And, the exhaust system 21b is connected to the outlet side exhaust part 20, and the gas in the heat treatment chamber 11 sucked into the outlet side exhaust part 20 is sucked into the exhaust system 21b and the gas in the heat treatment chamber 11 is sucked into the exhaust system 21b. It is discharged from (11).

The exhaust system 21a and the exhaust system 21b are configured identically, and both include a gas exhaust pipe 51 and an ejector 52.

Each gas exhaust pipe 51 of the exhaust systems 21a and 21b penetrates the ceiling wall 11c of the heat treatment chamber 11, and has an inlet side exhaust portion 19 and an outlet side exhaust portion ( It is connected to each of 20). The inside of each of the inlet side exhaust part 19 and the outlet side exhaust part 20 and each gas exhaust pipe 51 are in communication, and suction is sucked into each of the inlet side exhaust part 19 and the outlet side exhaust part 20. The generated gas is sucked into each gas exhaust pipe (51). In addition, each gas exhaust pipe 51 connected to each of the inlet side exhaust part 19 and the outlet side exhaust part 20 is fixed to the ceiling wall 11c while penetrating the ceiling wall 11c. . Accordingly, within the heat treatment chamber 11, each of the inlet side exhaust section 19 and the outlet side exhaust section 20 is supported on the ceiling wall 11c through each gas exhaust pipe 51.

Each ejector 52 of the exhaust systems 21a and 21b is connected to each of the inlet side exhaust portion 19 and the outlet side exhaust portion 20 of each gas exhaust pipe 51. It is connected at the end opposite to the end connected to . Then, each ejector 52 generates negative pressure using high-pressure fluid, thereby sucking gas from each of the inlet side exhaust section 19 and the outlet side exhaust section 20 through each gas exhaust pipe 51, It is also installed as a mechanism to discharge the sucked gas to the outside. Each ejector 52 of the exhaust systems 21a and 21b is configured in the same manner as each ejector 45 of the water vapor exhaust systems 16a and 16b. That is, each ejector 52 is comprised of a nozzle to which compressed air as a high-pressure fluid is supplied, a body covering the periphery of the nozzle, and a diffuser provided with a discharge port that communicates with the body and opens to the outside. Then, the electromagnetic valve installed on the upstream side of the nozzle and the downstream end of the gas exhaust pipe 51 in the body opens and closes based on a control command from the control unit 25, which will be described later, thereby operating the ejector 52. This is controlled.

When the gas in the heat treatment chamber 11 is discharged by the inlet side exhaust section 19 and the outlet side exhaust section 20, the exhaust system 21a, 21b is discharged based on a control command from the control section 25. The electromagnetic valve of each ejector 52 opens, and the ejector 52 operates. That is, the solenoid valve on the upstream side of the nozzle opens, and the solenoid valve installed in the portion connected to the downstream end of each gas exhaust pipe 51 in the body opens, and each ejector 52 operates. As each ejector 52 operates, gas inside each of the inlet side exhaust section 19 and the outlet side exhaust section 20 is sucked in through each gas exhaust pipe 51. As each gas of the inlet side exhaust part 19 and the outlet side exhaust part 20 is sucked into each gas exhaust pipe 51, the respective lower walls of the inlet side exhaust part 19 and the outlet side exhaust part 20 ( Gas in the heat treatment chamber 11 is sucked in from a plurality of through holes provided in 50b). The gas sucked into each of the inlet side exhaust section 19 and the outlet side exhaust section 20 flows to the body of each ejector 52 through each gas exhaust pipe 51 and is mixed with compressed air within the body. It is discharged to the outside from the discharge port of the diffuser of each ejector 52. In this way, the gas in the heat treatment chamber 11 is sucked in from each of the inlet side exhaust portion 19 and the outlet side exhaust portion 20 and discharged to the outside through each gas exhaust pipe 51 and each ejector 52. do.

[Partition board]

1 to 9, a plurality of partition plates 22 are provided. In the present embodiment, the plurality of partition plates 22 include partition plates 22a, 22b, 22c, 22d, 22e, 22f, 22g, 22h, 22i, 22j) are installed. The plurality of partition plates 22 (22a to j) are arranged along the conveyance direction X1 within the heat treatment chamber 11.

Each partition plate 22 (22a to j) is provided as a flat member that partially blocks the upper half of the heat treatment chamber 11 in a cross section perpendicular to the conveyance direction X1. In addition, the upper edge portion of each partition plate 22 (22a to j) is arranged along the ceiling wall 11c and is fixed to the ceiling wall 11c. Each partition plate 22 (22a to j) is installed to spread along a cross section perpendicular to the conveyance direction X1 of the heat treatment chamber 11 in the upper half area of the heat treatment chamber 11. there is. Each partition plate 22 (22a to j) is installed as described above, thereby allowing gas flow in the direction parallel to the conveyance direction X1 of the object to be treated 10 in the heat treatment chamber 11. It is configured to partially regulate the flow. In addition, in this embodiment, each partition plate 22 (22a to j) regulates the flow of gas in the area on the upper half side in the cross section perpendicular to the conveyance direction X1 of the heat treatment chamber 11. It is configured to allow the flow of gas in the area on the lower half side.

2, 3, 6, and 7, among the plurality of partition plates 22, the partition plates 22a and 22b are the entrance partition plates 22a and 22b in the present embodiment. It is installed. The inlet side partition plates 22a and 22b are respectively installed between each of the pair of inlet side gas supply parts 36a and 36b and the inlet side exhaust part 19. More specifically, the inlet side partition plate 22a is installed between the inlet side gas supply part 36a and the inlet side exhaust part 19, and is positioned on the inlet 31 side with respect to the inlet side exhaust part 19. They are placed next to each other. In addition, the inlet side partition plate 22b is installed between the inlet side exhaust section 19 and the inlet side gas supply section 36b, and is adjacent to each other on the outlet 32 side with respect to the inlet side exhaust section 19. It is placed.

According to the above-described arrangement, in the area near the inlet gas supply portions 36a and 36b in the heat treatment chamber 11, from the inlet 31 side toward the outlet 32 side, the inlet gas supply portion ( 36a), the inlet side partition plate 22a, the inlet side exhaust part 19, the inlet side partition plate 22b, and the inlet side gas supply part 36b are arranged in this order. And, the inlet side partition plates 22a and 22b are located in the area near the inlet side gas supply portions 36a and 36b, in the transport direction X1 of the object to be treated 10 in the heat treatment chamber 11. It is configured to partially regulate the flow of gas in the parallel direction.

Also, with reference to FIGS. 2, 3, 6, and 7, among the plurality of partition plates 22, partition plates 22c and 22d are located within the heat treatment chamber 11, and are located at the inlet side water vapor discharge portion 15a. It is placed near . Additionally, the partition plates 22c and 22d are arranged on both sides of the inlet side water vapor discharge portion 15a in the conveyance direction X1. More specifically, the partition plate 22c is installed between the inlet side gas supply part 36b and the water vapor discharge part 15a, and are adjacent to each other on the inlet 31 side with respect to the inlet side water vapor discharge part 15a. It is placed like this. Additionally, the partition plates 22d are arranged adjacent to each other on the outlet 32 side with respect to the inlet side water vapor discharge portion 15a.

2, 4, and 5, among the plurality of partition plates 22, partition plates 22e and 22f are a pair of partition plates in the water vapor supply unit 13 within the heat treatment chamber 11. It is installed between the nozzle portions 38a and 38b. Additionally, a binder discharge portion 23, which will be described later, is disposed between the partition plate 22e and the partition plate 22f. In addition, the partition plates 22e are arranged adjacent to each other on the inlet 31 side with respect to the binder discharge unit 23, and the partition plates 22f are arranged on the outlet 32 side with respect to the binder discharge unit 23. They are placed next to each other.

2, 3, 8, and 9, among the plurality of partition plates 22, partition plates 22g and 22h are located within the heat treatment chamber 11 and are connected to the outlet side water vapor discharge portion 15b. It is placed near . Additionally, the partition plates 22g and 22h are arranged on both sides of the outlet side water vapor discharge portion 15b in the conveyance direction X1. More specifically, the partition plates 22g are arranged adjacent to each other on the inlet 31 side with respect to the outlet side water vapor discharge portion 15b. In addition, the partition plate 22h is installed between the water vapor discharge part 15b and the outlet side gas supply part 37a, and is arranged adjacent to each other on the outlet 32 side with respect to the outlet side water vapor discharge part 15b. there is.

2, 3, 8, and 9, among the plurality of partition plates 22, partition plates 22i, 22j are the outlet partition plates 22i, 22j in the present embodiment. It is installed. The outlet side partition plates 22i and 22j are respectively installed between each of the pair of outlet side gas supply parts 37a and 37b and the outlet side exhaust part 20. More specifically, the outlet side partition plate 22i is installed between the outlet side gas supply part 37a and the outlet side exhaust part 20, and is located on the outlet 32 side with respect to the outlet side exhaust part 20. They are placed next to each other. In addition, the outlet-side partition plate 22j is installed between the outlet-side exhaust part 20 and the outlet-side gas supply part 37b, and is adjacent to each other on the outlet 32 side with respect to the outlet-side exhaust part 20. It is placed.

According to the above-described arrangement, in the area near the outlet gas supply parts 37a and 37b in the heat treatment chamber 11, from the inlet 31 side toward the outlet 32 side, the outlet gas supply part ( 37a), the outlet side partition plate 22i, the outlet side exhaust part 20, the outlet side partition plate 22j, and the outlet side gas supply part 37b are arranged in this order. And, the outlet side partition plates 22i and 22j are located in the area near the outlet side gas supply portions 37a and 37b, in the transport direction X1 of the object to be treated 10 in the heat treatment chamber 11. It is configured to partially regulate the flow of gas in the parallel direction.

[Binder discharge section]

1, 2, 4, and 5, the binder discharge portion 23 heat-treats the vaporized binder generated from the object 10 when sintering is performed in the heat treatment device 1. It is installed as a mechanism for discharging to the outside of the room 11. The binder discharge section 23 is used to discharge a large amount of binder, for example, when a large amount of binder is generated from the object 10 during sintering in the heat treatment device 1. do.

The binder discharge section 23 is disposed between the partition plate 22e and the partition plate 22f in the heat treatment chamber 11, and is located at the central position in the conveyance direction X1 in the heating region HR. It is placed. The partition plates 22e and 22f are disposed between the pair of nozzle parts 38a and 38b of the water vapor supply part 13, and are provided on the inlet 31 side with respect to the binder discharge part 23. 22e) is disposed, and a partition plate 22f is disposed on the outlet 32 side. For this reason, in this embodiment, in the central part of the conveyance direction 22e), the binder discharge section 23, the partition plate 22f, and the nozzle section 38b are arranged in this order. In addition, the binder discharge section 23 is located in the area between the partition plates 22e and 22f in the heat treatment chamber 11, in the area on the ceiling wall 11c side, that is, for the transfer of the heat treatment chamber 11. It is arranged in the area on the upper half side of the cross section perpendicular to the direction X1.

The binder discharge portion 23 is formed in a hollow box shape extending along the width direction of the heat treatment chamber 11. And, the binder discharge section 23 includes an upper wall 23a extending in an arch shape along the ceiling wall 11c in a cross section perpendicular to the conveying direction X1, a lower wall 23b extending horizontally, and a conveying direction X1. It is comprised of a pair of side walls 23c and 23d extending along a cross section perpendicular to the direction X1. As a result, the hollow region within the binder discharge portion 23 is formed as an arc-shaped dome-shaped hollow region surrounded by the upper wall 23a, lower wall 23b, and a pair of side walls 23c and 23d. And, a plurality of through holes (not shown) for sucking in the binder are formed in the lower wall 23b of the binder discharge portion 23. Additionally, when the binder is sucked in from the binder discharge portion 23 and discharged from the heat treatment chamber 11, the binder is sucked into the binder discharge portion 23 and discharged together with the gas in the atmosphere within the heat treatment chamber 11. That is, the gas containing a high concentration of binder in the atmosphere within the heat treatment chamber 11 is sucked into the binder discharge portion 23, and the binder is sucked into the binder discharge portion 23 and discharged from the heat treatment chamber 11.

In addition, the binder discharge unit 23 is connected to a binder discharge system 53 for sucking in gas containing a large amount of binder from the binder discharge unit 23 and discharging the gas containing the binder to the outside of the heat treatment chamber 11. You are connected. The binder discharge system 53 is comprised of a binder discharge pipe 54 and an ejector 55.

The binder discharge pipe 54 penetrates the ceiling wall 11c of the heat treatment chamber 11 and is connected to the binder discharge portion 23 within the heat treatment chamber 11. The inside of the binder discharge section 23 and the binder discharge pipe 54 are in communication, and the binder-containing gas sucked into the binder discharge section 23 is sucked into the binder discharge pipe 54. Additionally, the binder discharge pipe 54 connected to the binder discharge section 23 is fixed to the ceiling wall 11c while penetrating the ceiling wall 11c. Accordingly, in the heat treatment chamber 11, the binder discharge portion 23 is supported on the ceiling wall 11c through the binder discharge pipe 53.

The ejector 55 is connected to the binder discharge pipe 54 at an end opposite to the end connected to the binder discharge portion 23. And, the ejector 55 generates negative pressure using high-pressure fluid, thereby sucking in the gas containing the binder from the binder discharge section 23 through the binder discharge pipe 54 and discharging the sucked gas to the outside. It is installed as an instrument. The ejector 55 of the binder discharge system 53 is configured in the same way as the ejector 45 of the water vapor discharge systems 16a and 16b. That is, the ejector 55 is comprised of a nozzle to which compressed air as high-pressure fluid is supplied, a body covering the periphery of the nozzle, and a diffuser provided with a discharge port that communicates with the body and opens to the outside. Then, the electromagnetic valve installed on the upstream side of the nozzle and the downstream end of the binder discharge pipe 54 in the body opens and closes based on a control command from the control unit 25 to be described later, thereby operating the ejector 55. This is controlled.

When the binder is discharged by the binder discharge unit 23, the electromagnetic valve of the ejector 55 is opened based on a control command from the control unit 25, and the ejector 55 operates. That is, the solenoid valve on the upstream side of the nozzle opens, and the solenoid valve installed in the portion connected to the downstream end of the binder exhaust pipe 54 in the body opens, and the ejector 55 operates. As the ejector 55 operates, the gas in the binder discharge section 23 is sucked in through the binder exhaust pipe 54. As the gas in the binder discharge section 23 is sucked into the binder exhaust pipe 54, the gas containing the binder in the heat treatment chamber 11 is discharged from the plurality of through holes provided in the lower wall 23b of the binder exhaust section 23. It is inhaled. The gas containing the binder sucked into the binder exhaust section 23 flows into the body of the ejector 55 through the binder exhaust pipe 54 and is mixed with the compressed air blown out from the nozzle within the body to form the ejector 55. It is discharged to the outside from the discharge port of the diffuser. In this way, the gas containing the binder in the heat treatment chamber 11 is sucked in from the binder discharge portion 23 and discharged to the outside through the binder exhaust pipe 54 and the ejector 55.

[Gas curtain part]

1 and 3, the gas curtain portion 24 has an end portion on the inlet 31 side and an end portion on the outlet 32 side in the heat treatment chamber 11, where the inert gas spreads in a curtain shape. It is installed as a mechanism to spray inert gas to form an area. At the end of the heat treatment chamber 11 on the inlet 31 side, an inlet gas curtain portion 24a is provided as the gas curtain portion 24, and at the end of the heat treatment chamber 11 on the outlet 32 side. , As the gas curtain portion 24, an outlet gas curtain portion 24b is provided.

The inlet gas curtain portion 24a and the outlet gas curtain portion 24b are each formed in the shape of a hollow box and have a gas supply box into which the inert gas is supplied from the inert gas supply source 46. The gas supply box of the inlet gas curtain part 24a is installed at the end of the inlet 31 side of the heat treatment chamber 11, and the gas supply box of the outlet gas curtain part 24b is installed in the heat treatment chamber 11. It is installed at the end of the outlet 32 side. Each gas supply box of the inlet gas curtain section 24a and the outlet gas curtain section 24b is connected to the common pipe 47 of the gas supply system 18 through a pipe (not shown), and is inert. It is configured to supply an inert gas from a gas source 46.

Additionally, a plurality of injection holes communicating within the heat treatment chamber 11 are formed in each gas supply box of the inlet gas curtain portion 24a and the outlet gas curtain portion 24b. And, a plurality of injection holes provided in each gas supply box are configured to spray the inert gas supplied from the inert gas supply source 46 into the interior of the heat treatment chamber 11. In addition, the plurality of injection holes in the gas supply box of the inlet gas curtain portion 24a are configured to inject the inert gas so that the inert gas spreads in a curtain shape along a direction parallel to the opening surface of the inlet 31. . And, the plurality of injection holes in the gas supply box of the outlet gas curtain portion 24b are configured to inject the inert gas so that the inert gas spreads in a curtain shape along a direction parallel to the opening surface of the outlet 32. . At the end of the inlet 31 side of the heat treatment chamber 11, the inert gas is sprayed in a curtain shape from the inlet gas curtain portion 24a, thereby creating a heat treatment chamber ( 11) The atmospheres of the inner and outer regions are separated. In addition, the inert gas is injected in a curtain shape from the outlet gas curtain portion 24b at the end on the outlet 32 side of the heat treatment chamber 11, thereby causing heat treatment in the vicinity of the outlet 32 of the heat treatment chamber 11. The atmospheres of the inner and outer regions of the room 11 are separated.

[Control unit]

Referring to FIG. 2, the transfer mechanism 33, heater 12, water vapor supply system 14, water vapor discharge system 16a, 16b, gas supply system 18, and exhaust system 21a of the heat treatment chamber 11. , 21b), the operation of the binder discharge system 53 is controlled by the control unit 25. Specifically, the control unit 25 includes an electric motor that drives the drive shaft 35 of the conveyance mechanism 33, a heating element of the heater 12, and a boiler of the superheated steam generator 40 of the steam supply system 14. and a superheater, a solenoid valve of the ejector 45 of the water vapor discharge system 16a, 16b, gas supply valves 49a to d of the gas supply system 18, and an electromagnetic valve of the ejector 52 of the exhaust system 21a, 21b. By controlling the operation of the valve and the electromagnetic valve of the ejector 55 of the binder discharge system 53, the conveyance mechanism 33, the heater 12, the water vapor supply system 14, and the water vapor discharge system 16a, 16b. , controls the operations of the gas supply system 18, the exhaust systems 21a and 21b, and the binder discharge system 53.

In addition, the control unit 25 includes hardware and processors such as a CPU (Central Processing Unit), memories such as RAM (Random Access Memory) and ROM (Read Only Memory), operation units such as an operation panel operated by the user, and an interface circuit. It is composed of etc. The memory of the control unit 25 includes the electric motor driving the drive shaft 35, the heating element of the heater 12, the boiler and superheater of the superheated steam generator 40, the electromagnetic valve of the ejector 45, and the gas supply valve ( 49a to d), a program for creating control commands for controlling the operation of the solenoid valve of the ejector 52, the solenoid valve of the ejector 55, etc. is stored. For example, when the operator operates the operation unit, the above-mentioned program is read from memory by the hardware processor and executed. Accordingly, the above control command is created, and based on the control command, the electric motor driving the drive shaft 35, the heating element of the heater 12, the boiler and superheater of the superheated steam generation unit 40, and the ejector ( The solenoid valve of 45), the gas supply valves 49a to d, the solenoid valve of the ejector 52, the solenoid valve of the ejector 55, etc. operate.

[Operation of heat treatment device]

Next, an example of the processing operation of the heat treatment device 1 will be described. When the processing operation of the heat treatment device 1 is started, first, based on a control command from the control unit 25, the transfer mechanism 33, heater 12, and water vapor supply system 14 of the heat treatment chamber 11 , the operation of the water vapor discharge systems 16a and 16b, the gas supply system 18 and the exhaust systems 21a and 21b is started. When the processing operation of the heat treatment device 1 is started based on a control command from the control unit 25, the heat treatment device 1 specifically performs the following operations.

First, the atmosphere in the heat treatment chamber 11 is heated by the heater 12. Specifically, electricity is supplied to the heating element of the heater 12, the heating element generates heat, and the heat treatment chamber 11 is heated from the outside by the heater 12. Then, the heat treatment chamber 11 is heated from the outside, thereby heating the atmosphere within the heat treatment chamber 11.

Additionally, in the heat treatment chamber 11, the electric motor driving the drive shaft 35 of the conveyance mechanism 33 starts operating, and the circumferential movement of the mesh belt 34 of the conveyance mechanism 33 starts, The transfer mechanism 33 becomes capable of transporting the object 10 within the heat treatment chamber 11 . In addition, by appropriately setting the rotational speed of the electric motor, the conveyance speed when conveying the object 10 by the circumferential motion of the mesh belt 34, that is, the object 10 by the conveyance mechanism 33 ) The conveyance speed is set to be a predetermined speed. In addition, the transfer speed of the object to be treated 10 by the transport mechanism 33 is appropriately set according to heat treatment conditions such as the heat treatment time of the object to be treated 10 to be heat treated within the heat treatment chamber 11.

In addition, the boiler and superheater of the superheated steam generation unit 40 of the steam supply system 14 operate, and superheated steam is continuously generated. In addition, the temperature of the superheated steam generated in the superheated steam generator 40 and the amount of superheated steam generated per unit time depend on the heat treatment conditions of the object to be treated 10, which is subject to heat treatment by heating with superheated steam. It is set appropriately. Heated steam generated in the superheated steam generator 40 is continuously supplied to a pair of nozzle units 38a and 38b of the steam supply unit 13 through the steam supply pipes 41, 42a and 42b. In addition, the superheated water vapor supplied to each nozzle section 38a and 38b is taken out from a plurality of nozzle holes 39 of each nozzle section 38a and 38b, and the superheated water vapor is continuously supplied into the heat treatment chamber 11. .

Additionally, the operation of each ejector 45 of the water vapor discharge systems 16a and 16b is started. As a result, the superheated water vapor in the heat treatment chamber 11 is sucked in from each of the inlet side water vapor discharge section 15a and the outlet side water vapor discharge section 15b and is discharged to the outside through each water vapor discharge pipe 44 and each ejector 45. is discharged continuously.

In addition, the supply of inert gas into the heat treatment chamber 11 from the inlet side gas supply parts 36a and 36b and the outlet side gas supply parts 37a and 37b of the gas supply part 17 is started. Specifically, the gas supply valves 49a to d of the gas supply system 18 operate to perform an opening operation, so that the inert gas supplied from the inert gas supply source 46 flows into the common pipe 47 and each branch pipe. It is continuously supplied to the inlet side gas supply parts (36a, 36b) and the outlet side gas supply parts (37a, 37b) through (48a~d). And, inert gas is continuously supplied into the heat treatment chamber 11 from the inlet side gas supply parts 36a and 36b and the outlet side gas supply parts 37a and 37b.

Additionally, the operation of the ejector 52 of the exhaust systems 21a and 21b is started. As a result, the gas in the heat treatment chamber 11 is sucked in from each of the inlet side exhaust portion 19 and the outlet side exhaust portion 20 and is continuously discharged to the outside through each gas exhaust pipe 51 and each ejector 52. is discharged.

In addition, the binder discharge system 53 operates in accordance with a control command from the control unit 25 in the case of heat treatment conditions in which sintering treatment is performed in the heat treatment apparatus 1 and a large amount of binder is generated from the object to be treated 10. It works. During operation of the ejector 55 of the binder discharge system 53, gas containing a high concentration of binder in the atmosphere within the heat treatment chamber 11 is sucked into the binder discharge portion 23 and discharged from the heat treatment chamber 11. .

As described above, when the processing operation of the heat treatment device 1 is started, superheated steam supplied from the steam supply unit 13 installed in the central portion of the conveyance direction X1 in the heating region HR is transferred to the heat treatment chamber 11. ) is full and fluid within it. And, a flow of superheated steam flowing from the steam supply unit 13 to the steam discharge unit 15 on the inlet 31 side and the outlet 32 side is continuously formed. That is, while the heat treatment chamber 11 is filled with superheated steam, the flow of superheated steam flows from the steam supply unit 13 to the inlet steam discharge unit 15a, and from the water vapor supply unit 13 to the outlet side steam discharge unit 15b. ) is formed continuously.

In addition, the inert gas supplied from the inlet side gas supply parts 36a and 36b of the gas supply part 17 flows so as to spread in the area near the inlet side gas supply parts 36a and 36b in the heat treatment chamber 11. . As a result, the atmosphere is separated by the inert gas in the area near the inlet side gas supply portions 36a and 36b. In addition, the inert gas supplied from the outlet side gas supply parts 37a and 37b of the gas supply part 17 flows so as to spread in the area near the outlet side gas supply parts 37a and 37b in the heat treatment chamber 11. . As a result, the atmosphere is separated by the inert gas in the area near the outlet side gas supply portions 37a and 37b.

As described above, when the processing operation of the heat treatment device 1 is started, in the heat treatment chamber 11, the water vapor flows from the water vapor supply part 13 to the water vapor discharge part 15 on the inlet 31 side and the outlet 32 side. In addition to continuously forming a flow of superheated water vapor, separation of the atmosphere is also performed by the inert gas supplied from the gas supply unit 17.

Here, the separation of the flow of water vapor and the atmosphere by the inert gas within the heat treatment chamber 11 during operation of the heat treatment apparatus 1 will be further explained. 10 and 11 are diagrams for explaining the flow of superheated water vapor and inert gas in the heat treatment chamber 11 of the heat treatment apparatus 1. In addition, FIG. 11 (A) is a diagram explaining the flow of superheated steam in the area around the steam supply unit 13. FIG. 11B is a diagram illustrating the flow of superheated water vapor and inert gas in the area around the inlet side water vapor discharge portion 15a and the inlet side gas supply portions 36a and 36b. FIG. 11C is a diagram illustrating the flow of superheated water vapor and inert gas in the area around the outlet side water vapor discharge portion 15b and the outlet side gas supply portions 37a and 37b. 10 and 11, the direction of the flow of superheated water vapor in the heat treatment chamber 11 is schematically indicated by a broken arrow, and the flow of the inert gas in the heat treatment chamber 11 The direction is schematically indicated by a solid arrow.

10 and 11 (A), the superheated water vapor blown out from each of the pair of nozzle parts 38a and 38b of the water vapor supply part 13 is in the pair of nozzle parts 38a and 38b. It flows toward the intermediate position side, and in this embodiment, it flows toward the central position side in the conveyance direction X1 of the to-be-processed object 10 in the heating region HR. Additionally, partition plates 22e and 22f are provided in the area between the pair of nozzle parts 38a and 38b and near the central position of the heating area HR. For this reason, each superheated water vapor is taken out from each nozzle portion 38a, 38b and flows toward the middle position side of the pair of nozzle portions 38a, 38b (in this embodiment, the central position side of the heating region HR). collides with the partition plates 22e and 22f. That is, superheated water vapor blown out from the nozzle portion 38a collides with the partition plate 22e, and superheated water vapor blown out from the nozzle portion 38b collides with the partition plate 22f. Then, the superheated water vapor blown out from each nozzle portion 38a and 38b and colliding with the partition plates 22e and 22f spreads across the entire cross section perpendicular to the conveyance direction X1 in the heating region HR. It flows in a direction parallel to the conveyance direction (X1) as if reversed and returning.

As described above, the superheated water vapor blown out from the nozzle portion 38a flows toward the intermediate position side of the pair of nozzle portions 38a and 38b, is reversed, and then flows in the conveyance direction X1 in the heating region HR. It spreads over the entire vertical cross-section and flows along a direction parallel to the conveyance direction That is, the superheated water vapor blown out from the nozzle portion 38a extends along the cross section of the heating region HR from the middle position side of the pair of nozzle portions 38a and 38b toward the inlet 31 side of the heat treatment chamber 11. It flows and spreads throughout. Then, the superheated water vapor blown out from the nozzle portion 38b flows toward the middle position side of the pair of nozzle portions 38a and 38b, is reversed, and then flows perpendicular to the conveyance direction X1 in the heating region HR. It spreads over the entire cross section and flows in a direction parallel to the conveyance direction That is, the superheated water vapor blown out from the nozzle portion 38b extends along the cross section of the heating region HR from the middle position side of the pair of nozzle portions 38a and 38b toward the outlet 32 side of the heat treatment chamber 11. It flows and spreads throughout. Accordingly, within the heat treatment chamber 11, from the intermediate position side of the pair of nozzle portions 38a and 38b toward each of the inlet 31 side and the outlet 32 side, parallel to the conveyance direction X1 An approximately uniform flow of water vapor with little variation in flow rate is formed, spreading across the entire cross section of the heating region HR along the direction.

In addition, the superheated water vapor blown out from the nozzle portion 38a and flowing toward the inlet 31 flows toward the inlet side water vapor discharge portion 15a, as shown in Figures 10 and 11 (B), and the inlet side water vapor is discharged. It is sucked in from the part 15a and discharged to the outside of the heat treatment chamber 11. In addition, the superheated water vapor flowing toward the inlet side water vapor discharge section 15a passes through the area below the partition plate 22d and exits the inlet side from a plurality of through holes in the lower wall 43b of the inlet side water vapor discharge section 15a. It is sucked into the water vapor discharge unit (15a). In addition, the superheated water vapor blown out from the nozzle section 38b and flowing toward the outlet 32 flows toward the outlet side water vapor discharge section 15b, as shown in Figures 10 and 11 (C), and discharges the outlet side water vapor. It is sucked in from the part 15b and discharged to the outside of the heat treatment chamber 11. In addition, the superheated water vapor flowing toward the outlet side water vapor discharge section 15b passes through the area below the partition plate 22g and exits the inlet side from a plurality of through holes in the lower wall 43b of the outlet side water vapor discharge section 15b. It is sucked into the water vapor discharge unit (15a).

As described above, in the heat treatment chamber 11, a substantially uniform flow of superheated water vapor flowing from the water vapor supply section 13 to the water vapor discharge section 15 on the inlet 31 side and the outlet 32 side is continuously formed. . For this reason, the area from the water vapor supply section 13 to the water vapor discharge section 15 on the inlet 31 side and the outlet 32 side is filled with superheated water vapor in a flowing state, and a heating region ( A roughly uniform flow of superheated water vapor with little variation in flow rate is continuously formed, spreading across the entire cross section of HR).

Additionally, in the area within the heat treatment chamber 11 on the inlet 31 side rather than the inlet side water vapor discharge section 15a, as shown in FIGS. 10 and 11 (B), the inlet side gas supply section 36a and Inert gas is blown out from each of the inlet side gas supply parts 36b.

The inert gas is blown out from the inlet side gas supply unit 36a so as to spread downward. The inert gas taken out from the inlet side gas supply part 36a spreads to fill the area near the inlet side gas supply part 36b. And, a part of the inert gas that has spread to fill the area near the inlet side gas supply part 36a flows toward the area on the inlet 31 side rather than the inlet side gas supply part 36a. For this reason, the gas in the atmosphere of the area on the inlet 31 side is prevented from flowing toward the inlet side gas supply section 36a. As a result, the atmosphere in the area from the water vapor supply unit 13 to the inlet gas supply units 36a, 36b and the atmosphere in the area from the inlet 31 to the inlet gas supply units 36a, 36b are more reliably separated. and is blocked. Additionally, a part of the inert gas blown out from the inlet side gas supply section 36a flows toward the inlet side gas exhaust section 19 and spreads to fill the area below the partition plate 22a. passes through the area below. Then, the inert gas that has passed through the area below the partition plate 22a is sucked into the inlet side gas exhaust section 19 through a plurality of through holes in the lower wall 50b of the inlet side gas exhaust section 19 and enters the heat treatment chamber. It is discharged to the outside of (11).

Additionally, the inert gas is blown out from the inlet side gas supply unit 36b so as to spread downward. The inert gas blown out and spread downward from the inlet side gas supply section 36b flows toward the inlet side gas exhaust section 19 and spreads to fill the area below the partition plate 22b. Passes through the area below. Then, the inert gas that has passed through the area below the partition plate 22b is sucked into the inlet side gas exhaust section 19 through a plurality of through holes in the lower wall 50b of the inlet side gas exhaust section 19 and enters the heat treatment chamber. It is discharged to the outside of (11).

Additionally, in the area near the inlet side gas supply section 36b, some water vapor that has flowed toward the inlet 31 so as to leak out rather than being completely discharged from the inlet side water vapor discharge section 15a is connected to the inlet side gas supply section 36b. ) is mixed with the inert gas supplied into the heat treatment chamber 11, and is diluted. Then, the water vapor mixed with the inert gas and diluted supplied into the heat treatment chamber 11 from the inlet side gas supply part 36b is exhausted to the outside through the inlet side exhaust part 19. For this reason, some water vapor flowing toward the inlet 31 to leak from the inlet side water vapor discharge section 15a is also exhausted from the inlet side exhaust section 19.

As described above, the inert gas supplied from the inlet side gas supply parts 36a and 36b flows so as to spread in the area near the inlet side gas supply parts 36a and 36b in the heat treatment chamber 11. Then, a flow of inert gas flowing toward the inlet 31 and a flow of inert gas flowing toward the inlet gas exhaust portion 19 disposed between the inlet side gas supply portions 36a and 36b are continuously formed. As a result, in the area near the inlet gas supply units 36a and 36b, the atmosphere is separated by the inert gas supplied into the heat treatment chamber 11 from the inlet gas supply units 36a and 36b.

In addition, in the area on the outlet 32 side of the heat treatment chamber 11 rather than the outlet side water vapor discharge section 15b, as shown in FIGS. 10 and 11 (C), the outlet side gas supply section 37a and Inert gas is blown out from each of the outlet side gas supply portions 37b.

Inert gas is blown out from the outlet side gas supply unit 37a so as to spread downward. The inert gas blown out and spread downward from the outlet side gas supply section 37a flows toward the outlet side gas exhaust section 20 and spreads to fill the area below the partition plate 22i. Passes through the area below. Then, the inert gas that has passed through the area below the partition plate 22i is sucked into the outlet side gas exhaust section 20 through a plurality of through holes in the lower wall 50b of the outlet side gas exhaust section 20 and enters the heat treatment chamber. It is discharged to the outside of (11).

Additionally, in the area near the outlet side gas supply section 37a, some water vapor that has flowed toward the outlet 32 so as to leak out rather than being completely discharged from the outlet side water vapor discharge section 15b is connected to the outlet side gas supply section 37a. ) is mixed with the inert gas supplied into the heat treatment chamber 11, and is diluted. Then, water vapor mixed with and diluted with the inert gas supplied into the heat treatment chamber 11 from the outlet-side gas supply unit 37a is exhausted to the outside through the outlet-side exhaust unit 20. For this reason, some water vapor flowing toward the outlet 32 to leak from the outlet side water vapor discharge section 15b is also exhausted from the outlet side exhaust section 20.

Additionally, the inert gas is blown out from the outlet side gas supply unit 37b so as to spread downward. The inert gas taken out from the outlet side gas supply part 37b spreads to fill the area near the outlet side gas supply part 37b. And, a part of the inert gas that has spread to fill the area near the outlet-side gas supply part 37b flows toward the area on the outlet 32 side rather than the outlet-side gas supply part 37b. For this reason, the gas in the atmosphere of the area on the outlet 32 side is prevented from flowing toward the outlet side gas supply section 37b rather than the outlet side gas supply section 37b. As a result, the atmosphere of the area from the water vapor supply unit 13 to the outlet-side gas supply units 37a and 37b and the atmosphere of the area from the outlet 32 to the outlet-side gas supply units 37a and 37b are more reliably separated. and is blocked. Additionally, a portion of the inert gas blown out from the outlet side gas supply section 37b flows toward the outlet side gas exhaust section 20 and spreads to fill the area below the partition plate 22j. passes through the area below. Then, the inert gas that has passed through the area below the partition plate 22j is sucked into the outlet side gas exhaust section 20 through a plurality of through holes in the lower wall 50b of the outlet side gas exhaust section 20 and enters the heat treatment chamber. It is discharged to the outside of (11).

As described above, the inert gas supplied from the outlet side gas supply parts 37a and 37b flows so as to spread in the area near the outlet side gas supply parts 37a and 37b in the heat treatment chamber 11. Then, a flow of inert gas flowing toward the outlet 32 and a flow of inert gas flowing toward the outlet gas exhaust portion 20 disposed between the outlet gas supply portions 37a and 37b are continuously formed. Accordingly, in the area near the outlet side gas supply parts 37a and 37b, the atmosphere is separated by the inert gas supplied into the heat treatment chamber 11 from the outlet side gas supply parts 37a and 37b.

As described above, when the processing operation of the heat treatment device 1 is started and each device operates, in the area from the water vapor supply part 13 to the water vapor discharge part 15 on the inlet 31 side and the outlet 32 side, , a flow of superheated water vapor filling the heat treatment chamber 11 and flowing approximately uniformly is continuously formed. Then, the atmosphere is separated by an inert gas in the vicinity of the inlet gas supply portions 36a and 36b and the vicinity of the outlet gas supply portions 37a and 37b, respectively. In this state, the object 10 stored in the case 10a is brought into the heat treatment chamber 11.

The object 10 stored in the case 10a is repeatedly and continuously introduced into the heat treatment chamber 11 from the inlet 31 in order. More specifically, when one of the cases 10a in which a plurality of objects 10 are stored is brought into the heat treatment chamber 11 through the entrance 31, after a predetermined time has elapsed, a plurality of objects 10 are stored. The next case 10a is brought into the heat treatment chamber 11 through the inlet 31. And, with each passing of a predetermined time, the next case 10a containing a plurality of objects 10 to be treated is brought into the heat treatment chamber 11 through the inlet 31. In this way, the case 10a containing a plurality of objects 10 to be treated is sequentially and repeatedly introduced into the heat treatment chamber 11 from the entrance 31.

When the case 10a containing the object to be treated 10 is brought into the heat treatment chamber 11 through the inlet 31, the case 10a is placed on the upper surface of the mesh belt 34 of the conveyance mechanism 33, and is placed on the mesh belt 34. Together with the circling operation of (34), the inside of the heat treatment chamber 11 is conveyed in the conveyance direction (X1). The object 10 to be processed, which is transported together with the case 10a in the transport direction , heating by superheated water vapor in the heating region HR is started. In addition, the object 10 to be treated is in the inlet side water vapor discharge section 15a from the time it passes below the inlet side gas supply section 36a until it reaches the vicinity of the inlet side gas supply section 36b. It is heated by slightly superheated water vapor that flows toward the inlet 31 without being discharged. Then, between reaching the vicinity of the inlet side gas supply section 36b and passing through the area below the inlet side water vapor discharge section 15a, the above slightly superheated water vapor flowing toward the inlet side 31 and , it is heated by an atmosphere heated by heat from the heater 12.

When the object 10 passes below the inlet side water vapor discharge portion 15a, the heat treatment chamber 11 fills the heat treatment chamber 11 and flows approximately uniformly from the water vapor supply portion 13 to the inlet side gas discharge portion 15a. It is conveyed in the conveyance direction (X1) in an atmosphere of superheated water vapor. Then, the object to be treated 10 continues to be heated in the above-described atmosphere in which superheated water vapor flows. Additionally, during this time, the object to be treated 10 is also heated by the atmosphere heated by the heat from the heater 12.

The object to be treated 10 is conveyed to the central part of the heating region HR while being heated as described above. Then, when the object 10 passes below the water vapor supply unit 13 installed in the central portion of the heating region HR, the heat treatment chamber 11 fills the heat treatment chamber 11 and is discharged from the water vapor supply unit 13 approximately uniformly. The superheated water vapor flowing into the side gas discharge section 15b is conveyed in the atmosphere in the conveyance direction X1. Then, the object to be treated 10 continues to be heated in the above-described atmosphere in which superheated water vapor flows. Additionally, during this time, the object to be treated 10 is also heated by the atmosphere heated by the heat from the heater 12.

The object 10 to be treated, which is conveyed in the conveyance direction In addition, the heat treatment using superheated steam that needs to be performed on the object to be treated 10 mainly passes below the inlet side water vapor discharge section 15a and then passes through the area below the water vapor supply section 13 to the outlet side water vapor. This is done by heating with superheated water vapor until it reaches the area below the discharge section 15b.

When the object 10 passes through the area below the outlet side water vapor discharge section 15b, it is heated by slightly superheated water vapor that flows toward the outlet 32 without being discharged from the outlet side water vapor discharge section 15b. do. In addition, when the object 10 is transported from the area below the outlet side water vapor discharge part 15b to the outlet 32 side, it passes below the outlet side exhaust part 20 and reaches the outlet side gas supply part 37b. reaches the lower region and exits the heating region HR. When the object 10 passes through the area below the outlet-side gas supply section 37b and exits the heating region HR, it passes through the heat treatment chamber 11 to the outlet 32 without being subjected to heat treatment. It is conveyed along the conveyance direction (X1) until . Then, when the outlet 32 is reached, the object 10 stored in the case 10a is taken out of the heat treatment chamber 11 from the outlet 32. In addition, the case 10a in which the object to be treated 10 is stored is repeatedly and continuously brought into the heat treatment chamber 11 in order, and is repeatedly and continuously carried out in order when taken out from the outlet 32. do.

When the heat treatment of all objects 10 requiring heat treatment in the heat treatment device 1 is completed and all objects 10 are taken out of the heat treatment chamber 11, according to a control command from the control unit 25 As a result, the operation of the conveyance mechanism 33, heater 12, water vapor supply system 14, water vapor discharge system 16a, 16b, gas supply system 18, and exhaust system 21a, 21b is stopped. Thereby, the processing operation of the heat treatment device 1 ends.

[Effect of this embodiment]

As described above, according to the heat treatment apparatus 1 of the present embodiment, the subject to be treated is The water 10 is heated to heat-treat the object 10. In addition, the superheated steam used to heat the object 10 is supplied from the steam supply unit 13 installed in the heating region HR, respectively, on the inlet 31 side and the outlet 32 side of the heat treatment chamber 11. It flows toward the water vapor discharge portion 15 (15a, 15b) and is discharged from the water vapor discharge portion 15 (15a, 15b) to the outside of the heat treatment chamber. For this reason, in the heat treatment chamber 11, the flow of water vapor flowing from the water vapor supply section 13 in the heating region HR toward the inlet 31 and discharged to the outside from the inlet side water vapor discharge section 15a, and the heating A flow of water vapor is formed that flows from the water vapor supply part 13 in the region HR toward the outlet 32 and is discharged to the outside from the outlet side water vapor discharge part 15b. And, within the heat treatment chamber 11, the conveyance direction A more uniform flow of water vapor with less variation in flow velocity is formed along the direction parallel to . As a result, it becomes difficult to create a region in the heat treatment chamber 11 where the flow of water vapor stagnates, and as a result, it becomes difficult to create a region where the atmosphere stagnates within the heat treatment chamber 11.

Therefore, according to the heat treatment apparatus 1 of the present embodiment, it is possible to suppress stagnation of the atmosphere within the heat treatment chamber 11 where heat treatment of the object 10 is performed. In addition, according to the heat treatment device 1, stagnation of the atmosphere within the heat treatment chamber 11 can be suppressed, so that a plurality of objects to be heat treated 10 are subjected to heat treatment within the same heat treatment chamber 11. ), it is possible to suppress the occurrence of non-uniformity in the heat treatment, and it is also possible to suppress the decrease in heat treatment efficiency due to retention of gas generated in the object to be treated 10 and the occurrence of contamination of the object to be treated 10. can do.

Moreover, according to this embodiment, the water vapor supply part 13 is installed in the heating region HR of the heat treatment chamber 11, and the water vapor discharge part 15 (15a, 15b) is located at the inlet 31 of the heat treatment chamber 11. ) side and the outlet 32 side, the heat treatment device 1 that can suppress the occurrence of atmospheric stagnation within the heat treatment chamber 11 can be realized. For this reason, it is possible to prevent the structure of the heat treatment device 1, which heat-treats the object 10 using superheated steam, from becoming complicated.

As described above, according to the present embodiment, not only can the complexity of the structure of the heat treatment device 1 that performs heat treatment of the object 10 using superheated water vapor be prevented, but also the heat treatment of the object 10 can be performed. It is possible to provide a heat treatment device (1) that can suppress stagnation of the atmosphere within the heat treatment chamber (11) where the heat treatment is performed.

In addition, according to the heat treatment apparatus 1 of the present embodiment, the inlet 31 of the heat treatment chamber 11 is open to the outside, so the operation of carrying the object 10 into the heat treatment chamber 11 is performed. It can be done continuously, quickly and easily. As a result, the heat treatment process can be continued and the work efficiency of heat treatment can be improved. According to the heat treatment device 1, in addition to the inlet 31 being open, the inlet 31 side is further disposed on the inlet 31 side than the inlet side water vapor discharge portion 15a provided on the inlet 31 side with respect to the water vapor supply section 13. Inlet side gas supply units 36a and 36b are installed to supply inert gas into the heat treatment chamber 11. For this reason, the atmosphere in the heat treatment chamber 11 is separated between the inlet 31 open to the outside and the inlet side water vapor discharge part 15a by the inert gas supplied from the inlet side gas supply parts 36a and 36b. can do. That is, the atmosphere of the area from the water vapor supply unit 13 to the inlet gas supply units 36a and 36b is separated from the atmosphere of the area from the inlet 31 open to the outside to the inlet gas supply units 36a and 36b. You can. Accordingly, in the heat treatment apparatus 1 with the inlet 31 open in order to improve the work efficiency of heat treatment, the atmosphere in the area from the water vapor supply part 13 to the water vapor discharge part 15a on the inlet side can be blocked from the outside. This allows efficient heat treatment of the object 10 using superheated water vapor in the heating region HR.

Moreover, according to the heat treatment apparatus 1 of this embodiment, a pair of inlet side gas supply parts 36a and 36b is provided, and an inlet side exhaust part 19 is provided between them. For this reason, from the inlet side water vapor discharge section 15a toward the inlet 31 side, there are the inlet side water vapor discharge section 15a, the inlet side gas supply section 36b, the inlet side exhaust section 19, and the inlet side gas supply section ( They are arranged in the order of 36a). By this configuration, some of the water vapor that flows toward the inlet 31 so as to leak out rather than being completely discharged from the inlet side water vapor discharge section 15a is mixed with the inert gas supplied from the inlet side gas supply section 36b and is diluted. do. Then, the water vapor mixed with the inert gas supplied from the inlet side gas supply part 36b and diluted is exhausted to the outside from the inlet side exhaust part 19. For this reason, some water vapor flowing toward the inlet 31 to leak from the inlet side water vapor discharge section 15a is also exhausted from the inlet side exhaust section 19. As a result, it is possible to prevent water vapor from flowing into the low-temperature area between the inlet-side exhaust portion 19 and the inlet 31. This prevents water vapor from flowing into the low-temperature area between the inlet-side exhaust unit 19 and the inlet 31 and causing condensation. By preventing the occurrence of condensation, moisture is prevented from dripping on the object 10 brought in through the inlet 31, making the object 10 wet and affecting the heat treatment state of the object 10. do. In addition, according to the above configuration, the inert gas supplied from the inlet side gas supply part 36a disposed between the inlet side exhaust part 19 and the inlet 31 causes the inert gas to flow from the water vapor supply part 13 to the inlet side gas supply part. The atmosphere in the area up to (36a, 36b) and the atmosphere in the area from the inlet 31 to the inlet side gas supply portions 36a, 36b can be more reliably separated and blocked.

In addition, according to the heat treatment apparatus 1 of the present embodiment, the outlet 32 of the heat treatment chamber 11 is open to the outside, so the operation of carrying out the object 10 from the heat treatment chamber 11 is performed. It can be done continuously, quickly and easily. As a result, the heat treatment process can be continued and the work efficiency of heat treatment can be improved. Moreover, according to the heat treatment device 1, in addition to the outlet 32 being open, the outlet side steam discharge portion 15b installed on the outlet 32 side with respect to the water vapor supply portion 13 is further removed from the outlet 32 side. There are outlet gas supply units 37a and 37b installed in the heat treatment chamber 11 to supply inert gas. For this reason, the atmosphere in the heat treatment chamber 11 is separated between the outlet 32 open to the outside and the outlet side water vapor discharge part 15b by the inert gas supplied from the outlet side gas supply parts 37a and 37b. can do. That is, the atmosphere of the area from the water vapor supply unit 13 to the outlet gas supply units 37a and 37b is separated from the atmosphere of the area from the outlet 32 open to the outside to the outlet gas supply units 37a and 37b. You can. Accordingly, in the heat treatment apparatus 1 with the outlet 32 open in order to improve the work efficiency of heat treatment, the atmosphere in the area from the water vapor supply part 13 to the outlet side water vapor discharge part 15b can be blocked from the outside. This allows efficient heat treatment of the object 10 using superheated water vapor in the heating region HR.

Moreover, according to the heat treatment apparatus 1 of this embodiment, a pair of outlet side gas supply parts 37a and 37b are provided, and an outlet side exhaust part 20 is provided between them. For this reason, from the outlet side water vapor discharge part 15b toward the outlet 32 side, the outlet side water vapor discharge part 15b, the outlet side gas supply part 37a, the outlet side exhaust part 20, and the outlet side gas supply part ( They are arranged in the order of 37b). By this configuration, some of the water vapor that flows toward the outlet 32 so as to leak out rather than being completely discharged from the outlet side water vapor discharge section 15b is mixed with the inert gas supplied from the outlet side gas supply section 37a and is diluted. do. Then, the water vapor mixed with the inert gas supplied from the outlet side gas supply part 37b and diluted is exhausted to the outside from the outlet side exhaust part 20. For this reason, some water vapor flowing toward the outlet 32 to leak from the outlet side water vapor discharge section 15b is also exhausted from the outlet side exhaust section 20. As a result, it is possible to prevent water vapor from flowing into the low temperature area between the outlet side exhaust unit 20 and the outlet 32. This prevents water vapor from flowing into the low-temperature area between the outlet-side exhaust unit 20 and the outlet 32 and causing condensation. By preventing the occurrence of condensation, moisture is prevented from dripping onto the object 10 and making the object 10 wet when the object 10 is unloaded from the outlet 32 . In addition, according to the above configuration, the gas supplied from the outlet side gas supply part 37b disposed between the outlet side exhaust part 20 and the outlet 32 causes the outlet side gas supply part ( The atmosphere in the area up to 37a and 37b) and the atmosphere in the area from the outlet 32 to the outlet side gas supply parts 37a and 37b can be more reliably separated and blocked.

Moreover, according to the heat treatment apparatus 1 of this embodiment, the water vapor supply part 13 is provided with a pair of nozzle parts 38a and 38b. Then, the superheated water vapor blown out from each of the pair of nozzle parts 38a and 38b flows toward the middle position of the pair of opposing nozzle parts 38a and 38b. In the area between the pair of opposing nozzle portions 38a and 38b, a partition plate 22e is configured to partially regulate the flow of gas in a direction parallel to the conveyance direction X1 of the object 10. , 22f) is installed. Each superheated water vapor blown out from each nozzle portion 38a, 38b and flowing toward the middle position side of the pair of nozzle portions 38a, 38b collides with the partition plates 22e, 22f and enters the heating region HR. In this way, it spreads across the entire cross section perpendicular to the conveyance direction For this reason, the superheated water vapor blown out from each nozzle portion 38a, 38b flows toward the intermediate position side of the pair of nozzle portions 38a, 38b, is reversed, and then reaches the object to be treated ( 10) in a state spread across the entire cross section perpendicular to the conveyance direction ) flows in a direction parallel to the That is, the superheated water vapor blown out from each of the pair of nozzle parts 38a and 38b has a cross section of the heating region HR after the flow is reversed at the intermediate position side of the pair of nozzle parts 38a and 38b. In a state spread throughout, they flow in a direction parallel to the transport direction X1 of the object 10, away from each other. For this reason, the superheated water vapor blown out from the nozzle portion 38a flows along the cross section of the heating region HR from the middle position side of the pair of nozzle portions 38a and 38b toward the inlet 31 side of the heat treatment chamber 11. It flows and spreads throughout the . Then, the superheated water vapor blown out from the nozzle portion 38b extends along the cross section of the heating region HR from the middle position side of the pair of nozzle portions 38a and 38b toward the outlet 32 side of the heat treatment chamber 11. It flows and spreads throughout. Accordingly, within the heat treatment chamber 11, the object to be treated 10 is transported from the intermediate position side of the pair of nozzle portions 38a and 38b toward each of the inlet 31 side and the outlet 32 side. As the water vapor spreads over the entire cross section of the heating region HR along the direction parallel to the direction As a result, it becomes more difficult to create a region in the heat treatment chamber 11 where the flow of water vapor stagnates, and as a result, it becomes more difficult to create a region where the atmosphere stagnates within the heat treatment chamber 11. Therefore, according to the above configuration, stagnation of the atmosphere within the heat treatment chamber 11 can be further suppressed.

In addition, according to the heat treatment apparatus 1 of the present embodiment, between each of the pair of inlet side gas supply parts 36a and 36b and the inlet side exhaust part 19, the conveyance direction of the object 10 ( Inlet side partition plates 22a and 22b are provided to partially regulate the flow of gas in the direction parallel to X1). For this reason, between the pair of inlet side gas supply parts 36a and 36b arranged across the inlet side exhaust part 19, the atmosphere is maintained in a state of communication so that the gas can flow, and the atmosphere can be viewed. It can form a state that is easy to separate. As a result, the atmosphere of the area from the water vapor supply unit 13 to the inlet gas supply units 36a and 36b is more efficiently separated from the atmosphere of the area from the inlet 31 to the inlet gas supply units 36a and 36b. You can block it.

Moreover, according to the heat treatment apparatus 1 of this embodiment, between each of the pair of outlet side gas supply parts 37a and 37b and the outlet side exhaust part 20, the conveyance direction of the object 10 ( Exit-side partition plates 22i and 22j are provided to partially regulate the flow of gas in the direction parallel to X1). For this reason, between the pair of outlet side gas supply parts 37a and 37b arranged with the outlet side exhaust part 20 in between, the atmosphere is maintained in a state of communication so that the gas can flow, and the atmosphere can be viewed. It can form a state that is easy to separate. As a result, the atmosphere of the area from the water vapor supply unit 13 to the outlet-side gas supply units 37a and 37b is more efficiently separated from the atmosphere of the area from the outlet 32 to the outlet-side gas supply units 37a and 37b. You can block it.

[Variation example]

Although embodiments of the present invention have been described above, the present invention is not limited to the above-described embodiments and can be implemented with various modifications within the scope of the claims. For example, the following modification may be implemented.

(1) In the above-described embodiment, the heating area is configured as an area from the water vapor supply part to the inlet side gas supply part, and an area from the water vapor supply part to the outlet side gas supply part. However, it does not have to be like this, and other The form may be implemented. The heating area may be an area where heating of the object to be processed in the heat treatment chamber is performed, and may include heating by superheated steam and heating by heat from the heater (i.e., the atmosphere in the heat treatment chamber heated through the heat treatment chamber by heat from the heater). It is configured as an area where at least one of (heating by) is performed. For example, if a heater that heats the heat treatment chamber from the outside is arranged over the area from the entrance to the outlet of the heat treatment chamber, the area spanning the entire length from the entrance to the outlet of the heat treatment chamber is the heating area. This happens.

(2) In addition, in the above-described embodiment, a form in which the water vapor discharge unit is installed in the central portion of the heating area in the direction of conveyance of the object to be treated is exemplified, but this does not have to be the case, and other forms may be implemented. For example, the water vapor supply unit may be installed on the inlet side or outlet side rather than the central portion of the heating area in the transfer direction of the object to be processed.

(3) In addition, in the above-described embodiment, a configuration is exemplified in which the water vapor supply portion is provided with a pair of nozzle portions arranged opposite to each other in the conveyance direction of the object to be processed. However, this does not have to be the case, and other configurations can be implemented. It's okay. For example, the water vapor supply unit may be configured to include one or three or more nozzle units. In addition, in the above-described embodiment, the nozzle portion formed in a cylindrical shape is exemplified, but the shape of the nozzle portion does not have to be as is, and may be implemented with various changes. For example, the nozzle portion may be formed in various shapes such as a box shape, a rectangular cylinder shape, or a shape in which a plurality of cylindrical parts are connected with their interiors communicating. In addition, in the above-described embodiment, a form in which a plurality of nozzle holes are provided in the nozzle part to blow out superheated water vapor toward the middle position of a pair of nozzle parts is exemplified, but this does not have to be the case, and other forms are implemented. It's okay. For example, in the nozzle portion, a plurality of nozzle holes may be provided to blow out superheated water vapor upward or downward. Alternatively, in the nozzle portion, a plurality of nozzle holes may be provided to blow out superheated water vapor toward a side opposite to the middle position side of the pair of nozzle portions.

(4) In addition, in the above-described embodiment, a form in which a pair of partition plates and a binder discharge part are provided between a pair of nozzle parts of the water vapor supply part is exemplified, but this does not have to be the case, and other forms may be implemented. For example, between a pair of nozzle parts of the water vapor supply part, a binder discharge part may not be provided and a single partition plate may be provided. Alternatively, a form may be implemented in which no partition plate is provided between the pair of nozzle portions of the water vapor supply portion and a binder discharge portion is provided. Alternatively, a configuration may be implemented in which neither the partition plate nor the binder discharge portion is provided between the pair of nozzle portions of the water vapor supply portion.

(5) In addition, in the above-described embodiment, a form in which the gas supply unit supplies an inert gas into the heat treatment chamber is exemplified, but this does not have to be the case, and other forms may be implemented. For example, a gas supply unit may supply air into the heat treatment chamber. Alternatively, a form in which the gas supply unit supplies a mixed gas of inert gas and air into the heat treatment chamber may be implemented.

(6) In addition, in the above-described embodiment, a form in which the inlet-side gas supply units are installed as a pair is exemplified, but this does not have to be the case, and other forms may be implemented. For example, a form in which one or three or more inlet-side gas supply units may be installed may be implemented. In addition, in the above-described embodiment, the inlet side gas supply part formed in a cylindrical shape is exemplified, but the shape of the inlet side gas supply part does not have to be as is, and may be implemented with various changes. For example, the inlet side gas supply part may be formed in various shapes such as a box shape, a rectangular cylinder shape, or a shape in which a plurality of cylindrical parts are connected with their interiors in communication. In addition, in the above-described embodiment, a form in which a plurality of nozzle holes are provided in the inlet-side gas supply part to blow out gas downward is exemplified, but this does not have to be the case, and other forms may be implemented. For example, in the nozzle portion, a plurality of nozzle holes may be provided to blow out gas in a direction other than downward.

(7) In addition, in the above-described embodiment, a form in which the outlet-side gas supply units are installed as a pair is exemplified, but this does not have to be the case, and other forms may be implemented. For example, one or three or more outlet-side gas supply units may be installed. In addition, in the above-described embodiment, the outlet-side gas supply part formed in a cylindrical shape is exemplified, but the shape of the outlet-side gas supply part does not have to be as is, and may be implemented with various changes. For example, the outlet-side gas supply portion may be formed in various shapes such as a box shape, a rectangular cylinder shape, or a shape in which a plurality of cylindrical parts are connected with their interiors in communication. In addition, in the above-described embodiment, a form in which a plurality of nozzle holes are provided in the outlet-side gas supply part to blow out gas downward is exemplified, but this does not have to be the case, and other forms may be implemented. For example, in the nozzle portion, a plurality of nozzle holes may be provided to blow out gas in a direction other than downward.

The present invention relates to a heat treatment device that performs heat treatment on a workpiece by heating the workpiece with superheated steam, and can be widely applied.

1 heat treatment device
10 Materials to be treated
11 Heat treatment room
13 Steam supply unit
15, 15a, 15b water vapor outlet
17 Gas supply department
19 Inlet side exhaust part
20 outlet side exhaust
31 entrance
exit 32
36a, 36b inlet side gas supply unit (gas supply unit)
37a, 37b outlet side gas supply unit (gas supply unit)
HR heating zone

Claims (8)

A heat treatment device for performing heat treatment on an object to be treated by heating the object with superheated steam,
A heat treatment chamber provided with an inlet through which the object to be treated is brought in and an outlet through which the object to be treated is taken out, and where heat treatment is performed on the object to be treated transported from the inlet toward the outlet;
a water vapor supply unit installed in a heating area in the heat treatment chamber, which is an area where the object to be treated is heated, and supplying superheated water vapor into the heat treatment chamber;
In the heat treatment chamber, a water vapor discharge part installed at the inlet side and the outlet side with respect to the water vapor supply part, respectively, and discharging superheated water vapor in the heat treatment chamber to the outside of the heat treatment chamber;
an ejector that sucks superheated water vapor from the water vapor discharge unit and discharges it to the outside of the heat treatment chamber;
A pair of partition plates disposed on both sides in a transport direction of the object to be treated with the water vapor discharge portion interposed therebetween,
The water vapor discharge portion is formed in a hollow box shape extending along the width direction of the heat treatment chamber in a direction perpendicular to the transport direction of the object to be treated, and has a plurality of through holes for sucking in superheated water vapor. ,
The partition plate is installed to spread along a cross section perpendicular to the conveyance direction of the object to be treated, and is configured to partially regulate the flow of gas in a direction parallel to the direction of transport of the object to be treated in the heat treatment chamber. There is a heat treatment device. In claim 1,
further comprising a gas supply unit supplying at least one of an inert gas and air into the heat treatment chamber,
The inlet is open to the outside of the heat treatment chamber,
The heat treatment apparatus, wherein, as the gas supply part, an inlet side gas supply part is provided further on the inlet side than the water vapor discharge part installed on the inlet side with respect to the water vapor supply part in the heat treatment chamber. In claim 2,
The inlet side gas supply unit is installed as a pair,
In the heat treatment chamber, an inlet side exhaust portion for exhausting gas in the heat treatment chamber to the outside of the heat treatment chamber is provided between a pair of the inlet gas supply portions. In claim 1,
further comprising a gas supply unit supplying at least one of an inert gas and air into the heat treatment chamber,
The outlet is open to the outside of the heat treatment chamber,
A heat treatment apparatus, wherein, as the gas supply part, an outlet-side gas supply part is provided in the heat treatment chamber further on the outlet side than the water vapor discharge part installed on the outlet side with respect to the water vapor supply part. In claim 4,
The outlet side gas supply unit is installed as a pair,
In the heat treatment chamber, an outlet side exhaust part for exhausting gas in the heat treatment chamber to the outside of the heat treatment chamber is provided between a pair of the outlet side gas supply parts. The method according to any one of claims 1 to 5,
The water vapor supply section includes a pair of nozzle sections arranged to face each other in the conveyance direction of the object to be treated,
A heat treatment apparatus, wherein each of the pair of nozzle parts is configured to blow out superheated water vapor toward an intermediate position of the pair of opposing nozzle parts. In claim 3,
An inlet-side partition plate is provided between each of the pair of inlet-side gas supply units and the inlet-side exhaust unit, respectively,
The heat treatment apparatus, wherein the inlet side partition plate is configured to partially regulate the flow of gas in a direction parallel to the conveyance direction of the object to be treated in the heat treatment chamber. In claim 5,
An outlet-side partition plate is provided between each of the pair of outlet-side gas supply units and the outlet-side exhaust unit, respectively,
The heat treatment apparatus wherein the outlet side partition plate is configured to partially regulate the flow of gas in a direction parallel to the conveyance direction of the object to be treated in the heat treatment chamber.

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