KR102461941B1 - Conductance-adjustable vacuum valve - Google Patents

Abstract

The present invention relates to a vacuum valve with an adjustable conductance, capable of preventing generation of eddy currents due to a rapid conductance change, which comprises: a valve body (110); a lower driving chamber (120); an opening/closing piston unit (130); an upper driving chamber (150); a control piston (160); a conductance control unit (140); and an upper cap (170).

Description

Conductance-adjustable vacuum valve

The present invention relates to a vacuum valve, and more particularly, to a vacuum valve capable of adjusting conductance by adjusting an opening degree in an open position for forming vacuum pressure.

Many vacuum systems are used to proceed with a manufacturing process of a semiconductor device. For example, in the case of chemical vapor deposition, when a gas is injected into a vacuum chamber in which a semiconductor wafer is disposed and a predetermined energy is delivered to generate plasma, a reaction occurs on the wafer to form a thin film.

Unnecessary reactants generated in the process of forming the thin film are discharged through a pump and piping. A vacuum valve capable of controlling the degree of vacuum is installed in such a vacuum system.

A conventional vacuum valve uses a vacuum pump to discharge gas inside a vacuum chamber to form a vacuum. When the vacuum valve is opened, the gas inside the vacuum chamber is discharged and a vacuum pressure is formed, and when the vacuum valve is closed, the discharge of the gas inside is blocked.

However, when the conventional vacuum valve is opened from a closed state to an open state, the flow of gas per unit time, that is, conductance is too large, so that a large amount of gas suddenly flows in the initial stage of vacuum formation. This sudden gas flow causes a vortex phenomenon inside the vacuum chamber.

When a vortex phenomenon occurs, fine particles scatter inside the vacuum chamber and contaminate the inside of the chamber, causing deterioration of process quality.

In addition, sensitive parts such as ceramics and glass may be damaged due to impact caused by a sudden gas flow.

Registered Patent No. 10-1124377 "Vacuum process valve"

SUMMARY OF THE INVENTION It is an object of the present invention to provide a vacuum valve capable of variously adjusting conductance according to a chamber capacity and a pump size during vacuum formation.

The above objects and various advantages of the present invention will become more apparent from preferred embodiments of the present invention by those skilled in the art.

The above object of the present invention can be achieved by a vacuum valve capable of controlling conductance. The vacuum valve of the present invention includes a valve body 110 having a chamber connector 111 connected to a vacuum chamber at the lower portion and a pump connector 113 connected to a vacuum pump on the side thereof; a lower driving chamber 120 coupled to the upper portion of the valve body 110 and having a lower air inlet 121 formed at a lower front surface thereof; An upper piston 133 formed horizontally inside the lower driving chamber 120, a lower piston 131 formed in a size to block the chamber connector 111 inside the valve body 110, and the upper piston 133 and the lower piston 131 are connected, and the rise of the upper piston 133 according to whether air is supplied to the lower air inlet 121 is transmitted to the lower piston 131, and the lower piston 131 an opening/closing piston part 130 having a connecting shaft 132 for moving the lower piston 131 between a closed position for closing the chamber connector 111 and an open position for opening the chamber connector 111; an upper driving chamber 150 provided above the lower driving chamber 120 and having an upper air inlet 157 formed on an upper front thereof; It is accommodated in the upper driving chamber 150, the upper pressure compression 161 is extended toward the lower driving chamber 120, and depending on whether air is injected through the upper air inlet 157, the upper driving chamber ( 150) a control piston 160 that moves up and down the inside; It is provided between the upper driving chamber 150 and the lower driving chamber 120 to guide the upper pressure compression 161 to the lower driving chamber 120, and the lower air inlet 121 and the upper air inlet. When air is simultaneously injected into 157, the upper pressure compression 161 is lowered together with the adjustment piston 160 and pressurizes the upper piston 133, which rises, so that the chamber connector 111 is moved to the intermediate open position. Conductance control unit 140 to open and; and an upper cap 170 coupled to an upper portion of the upper driving chamber 150 .

According to an embodiment, the conductance adjusting unit 140 is located between the lower driving chamber 120 and the upper driving chamber 150 and has a rotating plate accommodating groove 141-2 on the plate surface except for the corner region. The adjustment housing 141 which is recessed and in which the shaft insertion hole 141-6 for guiding the upper pressing shaft 161 downward is formed through the middle region of the rotary plate receiving groove 141-2; It is accommodated in the rotation plate receiving groove 141-2 of the adjustment housing 141, the outer periphery is exposed to the outside of the adjustment housing 141, and is rotated by an external force, and an adjustment bolt coupling hole 143a is formed therein. Adjustment rotation plate 143 and; It is screwed to the adjustment bolt coupling hole 143a so as to surround the upper pressing shaft 161 and includes an adjustment bolt 145 having a position indicator pin 145c extending horizontally toward the outside at one end, and the adjustment bolt ( 145 may be moved up and down between the upper driving chamber 150 and the adjusting housing 141 inside the adjusting rotary plate 143 according to the forward and reverse rotation of the adjusting rotary plate 143 .

According to one embodiment, when air is injected into the upper air inlet 157 and the adjusting piston 160 is lowered, the adjusting bolt 145 is in contact with the lower part of the adjusting piston 160 and the adjusting piston 160 ), the descending height of the adjustment piston 160 may correspond to a height at which the lower piston 131 opens the chamber connector 111 in the intermediate open position.

According to one embodiment, a pin receiving groove 141-4 in which the position indication pin 145c is accommodated is formed at a predetermined depth on the outer periphery of the adjusting housing 141, and the pin receiving groove 141-4 is A position display scale 141-5 indicating the position of the current position display pin 145c may be formed along the height direction on the outer circumferential surface.

The vacuum valve according to the present invention can be moved to an intermediate open position between the closed position and the open position by further including an adjustment piston for adjusting the opening position of the opening and closing piston part.

Accordingly, there is an effect that can prevent the occurrence of eddy currents due to a sudden change in conductance when the initial vacuum pressure is applied.

In addition, the vacuum valve of the present invention has the advantage of being able to adjust the lowering height of the adjustment piston by using the rotation control plate and the adjustment bolt, so that it can be variously adjusted to the capacity of the vacuum chamber and the conductance suitable for the size of the vacuum pump.

1 is a perspective view showing an external configuration of a vacuum valve according to the present invention;
2 is a front view showing the front configuration of the vacuum valve according to the present invention;
3 is a cross-sectional view showing the cross-sectional configuration of the closed position of the vacuum valve according to the present invention;
4 is an exploded perspective view showing the disassembled configuration of the conductance control unit of the vacuum valve according to the present invention;
5 is a cross-sectional view showing the cross-sectional configuration of the open position of the vacuum valve according to the present invention;
6 is a cross-sectional view showing the cross-sectional configuration of the intermediate open position of the vacuum valve according to the present invention;
7 and 8 are cross-sectional views illustrating an operation process of a vacuum valve according to a modified example of the present invention.

In order to fully understand the present invention, preferred embodiments of the present invention will be described with reference to the accompanying drawings. Embodiments of the present invention may be modified in various forms, and the scope of the present invention should not be construed as being limited to the embodiments described in detail below. This example is provided to more completely explain the present invention to those of ordinary skill in the art. Accordingly, the shape of elements in the drawings may be exaggerated to emphasize a clearer description. It should be noted that the same members in each drawing are sometimes shown with the same reference numerals. Detailed descriptions of well-known functions and configurations determined to unnecessarily obscure the gist of the present invention will be omitted.

Figure 1 is a perspective view showing the configuration of a vacuum valve 100 according to the present invention, Figure 2 is a front view showing the front configuration of the vacuum valve 100, Figure 3 is a cross-section of the closed position of the vacuum valve (100) It is a cross-sectional view showing the configuration.

As shown, the vacuum valve 100 according to the present invention is provided between a vacuum chamber in which a vacuum is to be formed, and a vacuum pump that discharges the gas inside the vacuum chamber to the outside so that a vacuum is formed inside the vacuum chamber, and is provided with a control unit (not shown). It opens and closes under the control of the city) and allows the gas inside the vacuum chamber to be discharged by the vacuum pump.

The vacuum valve 100 of the present invention includes a valve body 110 having a chamber connector 111 connected to a vacuum chamber and a pump connector 113 connected to a vacuum pump, and is provided on the valve body 110 to provide a chamber. The opening/closing piston part 130 for opening and closing the connector 111, the closing position and the opening/closing piston part provided at the upper part of the valve body 110, the opening/closing piston part 130 is moved to the lower part to close the chamber connector 111, and the opening/closing piston part ( The lower driving chamber 120 is moved to the upper part to move between the open positions for opening the chamber connector 111 , and the adjusting piston 160 is provided to move up and down on the upper part of the lower driving chamber 120 , and , the adjustment piston 160 is provided between the upper and lower driving chamber 150 and the upper driving chamber 150 to press the opening and closing piston unit 130 by moving up and down, and the upper driving chamber 150 and the lower driving chamber 120, the adjusting piston 160 ) by adjusting the height at which the opening and closing piston unit 130 is pressed, the conductance adjusting unit 140 for adjusting the opening height of the intermediate open position between the closed position and the open position, and the upper part covering the upper part of the upper driving chamber 150 . and a cap 170 .

The vacuum valve 100 of the present invention includes an adjustment piston 160 that adjusts the elevation of the opening and closing piston unit 130 in addition to the opening and closing piston unit 130 that opens and closes the chamber connector 111 of the valve body 110 by moving up and down. ) is further included. Thereby, the vacuum valve 100 of the present invention can be adjusted to an intermediate open position partially open between the open position and the closed position in addition to the open position in which the chamber connector 111 is fully opened and the closed position in the closed state, thereby forming a vacuum pressure. It is possible to prevent eddy current caused by a sudden change in conductance in the initial stage.

In addition, the vacuum valve 100 of the present invention may further include a conductance adjusting unit 140 for adjusting the lifting height of the adjusting piston 160 to variously adjust the opening height of the intermediate open position. Accordingly, there is an advantage that the conductance can be appropriately adjusted according to the capacity of the vacuum chamber and the size of the vacuum pump.

The valve body 110 connects the vacuum chamber and the vacuum pump. 1 and 3, a chamber connector 111 connected to a vacuum chamber (not shown) is extended on the lower part of the valve body 110, and a pump connector 113 connected to the vacuum pump is formed on the side surface. is formed by extension. The positions of the chamber connector 111 and the pump connector 113 may be opposite to each other depending on the design direction.

The lower driving chamber 120 is disposed on the upper portion of the valve body 110 . A first sealing member 115 is provided in the boundary region between the lower driving chamber 120 and the valve body 110 to prevent internal pneumatic pressure from being discharged to the outside.

The lower driving chamber 120 drives the opening/closing piston unit 130 so that the opening/closing piston unit 130 accommodated therein moves up and down to open and close the chamber connector 111 . As shown in FIG. 3 , a lower air inlet 121 through which air is introduced is formed on the front surface of the lower driving chamber 120 , and the connecting shaft 132 of the opening and closing piston unit 130 is connected to the bottom surface of the valve body 110 . ), a connecting shaft guide hole 123 is formed through, and a pressing shaft insertion hole 129 into which the upper pressing shaft 161 of the adjustment piston 160 is inserted is formed through the upper surface.

In addition, a screw coupling hole 127 to which the screw coupling end 173a of the fixing screw 173 is screwed is provided at the bottom edge of the lower driving chamber 120 . A screw thread is formed on the inner wall surface of the screw coupling hole 127 to be screwed with the screw coupling end 173a.

The connecting shaft guide hole 123 is provided with a second sealing member 123a to prevent air leakage when the connecting shaft 132 moves up and down.

The lower air inlet 121 is provided at a position corresponding to the upper piston 133 of the opening/closing piston unit 130, and as shown in FIG. Acts to cause the upper piston 133 to rise.

The pressure shaft insertion hole 129 allows the upper pressure compression 161 of the adjustment piston 160 to be inserted into the lower drive chamber 120 so that the upper pressure axis 161 interlocks with the vertical movement of the adjustment piston 160 . As shown in FIG. 6, the upper piston 133 is pressed.

The screw coupling hole 127 has a fixing screw 173 inserted through the upper cap 170, the upper driving chamber 150, and the adjusting housing 141 as shown in FIG. 3 to the lower driving chamber 120. It is screwed so that the positions of the lower driving chamber 120, the adjustment housing 141, the upper driving chamber 150, and the upper cap 170 are fixed.

The valve body 110 and the lower driving chamber 120 are fixed by a fastening member (not shown) not shown in the drawings.

The opening/closing piston unit 130 is provided in the lower driving chamber 120 and the valve body 110 and moves between the closed position and the open position to open and close the chamber connector 111 of the valve body 110 . As shown in FIG. 3 , the opening/closing piston unit 130 has a lower piston 131 formed in an area capable of blocking the chamber connector 111 , and a position corresponding to the lower air inlet 121 in the lower driving chamber 120 . A bellows covering between the upper piston 133 positioned horizontally in the 135) and an elastic member 137 provided between the lower part of the lower driving chamber 120 and the lower piston 131 to apply an elastic force in the direction in which the lower piston 131 closes the chamber connector 111. .

The lower piston 131 moves up and down to open and close the chamber connector 111 . As shown in FIG. 3 , the lower piston 131 descends from the inside of the valve body 110 to close the chamber connector 111 to a closed position to block the discharge of gas inside the chamber body, and as shown in FIG. It rises to open the chamber connector 111 and moves between the open positions where the gas inside the chamber body is discharged to the pump connector 113 .

The upper piston 133 moves up and down depending on whether air is injected into the lower air inlet 121 of the lower driving chamber 120 . As shown in FIG. 3, if air is not injected into the lower air inlet 121, the upper piston 133 is located on the bottom surface of the lower driving chamber 120, and as shown in FIG. 5, the lower air inlet 121 ) when air is injected, the upper piston 133 is raised to the upper part of the lower driving chamber 120 .

The connecting shaft 132 connects the upper piston 133 and the lower piston 131 to transmit the vertical movement of the upper piston 133 to the lower piston 131 .

As shown in FIG. 3 , the elastic member 137 applies an elastic force in a direction in which the lower piston 131 is lowered to block the chamber connector 111 . Accordingly, when the injection of air into the lower air inlet 121 is blocked, the lower piston 131 is lowered by the elastic force of the elastic member 137 .

In order for the upper piston 133 to rise, air having a pressure exceeding the elastic force of the elastic member 137 is supplied to the lower air inlet 121 .

The bellows 135 covers the outside of the elastic member 137 to prevent dust or dust generated during compression and extension of the elastic member 137 from flowing into the vacuum chamber through the chamber connector 111 .

The adjustment piston 160 moves up and down and adjusts the height at which the upper piston 133 rises to adjust the opening height of the lower piston 131 in the middle open position. The upper driving chamber 150 applies a driving force so that the adjusting piston 160 moves up and down. The upper cap 170 covers the open upper part of the upper driving chamber 150 to prevent external leakage of air.

When the adjusting piston 160 is moved up and down by the upper driving chamber 150 , the conductance adjusting unit 140 adjusts the descending height so that the conductance is adjusted.

4 is an exploded perspective view illustrating the coupling relationship between the conductance adjusting unit 140 and the upper driving chamber 150 , the adjusting piston 160 and the upper cap 170 .

As shown, the adjustment piston 160 is provided in the form of a disk, and the upper pressing shaft 161 extends vertically downward. The upper cap 170 is coupled to the upper portion of the upper driving chamber 150 and covers the open upper driving chamber 150 . An adjustment piston receiving groove 171 in which the adjustment piston 160 is accommodated is formed on the lower surface of the upper cap 170 .

A plurality of fixing screws 173 are inserted into the corner region of the upper cap 170 . The fixing screw 173 is extended to the bottom surface of the lower driving chamber 120 as shown in FIG. 3 , and the screw insertion hole 155 of the upper driving chamber 150 and the lower screw insertion of the adjusting housing 141 are formed. After being sequentially inserted into the balls (141-7), the screw coupling ends (173a) are screwed into the screw coupling holes (127) of the lower driving chamber (120).

The upper driving chamber 150 drives the adjusting piston 160 to move up and down. The upper driving chamber 150 includes an upper driving chamber body 151 having a space in which the adjusting piston 160 moves up and down, and an upper air inlet 157 provided on the front upper part of the upper driving chamber body 151. do. The upper air inlet 157 allows air (A) to be injected to pressurize the upper portion of the adjusting piston 160 as shown in FIG. 6 . Thereby, the adjusting piston 160 presses the opening and closing piston part 130 so that it is located in the intermediate open position.

A bolt moving hole 153 for accommodating the adjusting bolt 145 of the conductance adjusting unit 140 to be moved up and down is formed through the bottom surface of the upper driving chamber body 151 .

The conductance adjusting unit 140 adjusts the lowering position of the adjusting piston 160 so that the opening/closing piston unit 130 is positioned at an intermediate open position between the open position and the closed position. The conductance control unit 140 is accommodated in the control housing 141 and the control housing 141 provided between the lower drive chamber 120 and the upper drive chamber 150 as shown in FIGS. 3 and 4 . and the adjustment rotation plate 143 provided so as to be rotatable from the outside by the operator, and the adjustment rotation plate 143 are screwed to the inside and move up and down according to the forward and reverse rotation of the adjustment rotation plate 143, and the adjustment piston 160 is lowered Includes an adjustment bolt 145 to limit the position.

The adjustment housing 141 supports the adjustment rotation plate 143 to be rotated, and the adjustment bolt 145 supports to be moved up and down by the rotation of the adjustment rotation plate 143 . The adjustment housing 141 is recessed to correspond to the shape of the adjustment rotation plate 143 in the adjustment housing body 141-1 and the adjustment housing body 141-1 so that the adjustment rotation plate 143 can be rotated. A rotating plate receiving groove 141-2 for accommodating, a bolt receiving groove 141-3 that is recessed in the central region of the rotating plate receiving groove 141-2, and the adjustment bolt 145 is inserted, and a bolt receiving groove A shaft insertion hole 141-6 which is formed through the bottom surface of 141-3 and guides the upper pressure shaft 161 to the lower drive chamber 120, and in the corner region of the adjustment housing body 141-1. It is provided and includes a lower screw insertion hole (141-7) into which the fixing screw (173) is inserted.

The rotating plate accommodating groove 141-2 is recessed in a form in which the adjusting rotating plate 143 is inscribed with respect to the plate surface of the adjusting housing body 141-1. Accordingly, when the adjustment rotation plate 143 is accommodated in the rotation plate receiving groove 141-2, as shown in FIG. 1, the adjustment rotation plate 143 is exposed to the outside by the four sides of the adjustment housing body 141-1. .

The user presses the control rotation plate 143 exposed to the outside with a finger to rotate the control rotation plate 143 forward and reverse to adjust the descending height of the adjustment piston 160 and adjust the opening degree of the intermediate opening position.

The adjustment rotation plate 143 has an adjustment bolt coupling hole 143a to which the adjustment bolt 145 is coupled therethrough. A first screw thread (143b) is formed on the inner wall surface of the adjustment bolt coupling hole (143a) and is screwed with the adjustment bolt (145).

The bolt accommodating groove 141-3 is recessed to correspond to the shape of the adjustment bolt 145 in the central region of the bottom of the rotating plate accommodating groove 141-2. A pin receiving groove 141-4 is recessed toward the front of the adjustment housing 141 in the bolt receiving groove 141-3. The position indicating pin 145c of the adjustment bolt 145 is inserted into the pin receiving groove 141-4.

The adjustment bolt 145 is provided in a non-circular cross-section so that only vertical movement is possible without rotation while being accommodated in the bolt receiving groove 141-3. The adjustment bolt 145 is provided with a cross-section formed in a curved surface on both sides so as to be screwed with the first screw thread (143b) of the adjustment rotation plate 143, the front and rear are provided in a horizontal shape.

The adjustment bolt 145 has a position indicating pin 145c extended toward the front and inserted into the pin receiving groove 141-4.

A second screw thread 145b corresponding to the first screw thread 143b is formed in both curved areas on the outer circumferential surface of the adjustment bolt 145 . When the operator rotates the adjustment bolt 145 forward and reverse from the outside, the adjustment bolt 145 in which the second screw thread 145b is screwed to the first screw thread 143b is inserted into the bolt receiving groove 141-3 and cannot be rotated. It only moves up and down in place.

A pressure shaft guide hole 145a for guiding the upper pressure axis 161 to the lower portion is formed through the inside of the adjustment bolt 145 .

The adjusting bolt 145 moves up and down between the bolt receiving groove 141-3 and the bolt moving hole 153 and limits the height at which the adjusting piston 160 is lowered in the middle open position. That is, as shown in FIG. 6 , when air is injected through the upper air inlet 157 and the adjustment piston 160 is lowered by air pressure, the adjustment bolt 145 comes into contact with the lower portion of the adjustment piston 160 and is adjusted. Limit the descending height of the piston (160).

Accordingly, the height of the upper pressure compression 161 extended downward from the adjustment piston 160 and inserted into the lower driving chamber 120 is also limited, and when the upper piston 133 is raised, the upper pressure compression 161 and Ascending height is limited.

The protrusion height (d) of the adjustment bolt 145 from the bottom surface of the upper drive chamber 150 controls the separation height between the lower piston 131 and the chamber connector 111, that is, the opening height h2 of the intermediate open position. do. The higher the protrusion height d of the control bolt 145 is, the higher the opening height h2 of the intermediate open position increases, so that the flow rate of the gas moving from the vacuum chamber to the vacuum pump side per hour, that is, the conductance increases.

Here, the current height of the adjustment bolt 145 can be confirmed by the operator from the outside through the current height of the position indication pin 145c as shown in FIG. 2 . An engraved reference line (a) is displayed on the position indicating pin 145c, and on the outer wall surface of the pin receiving groove 141-4 of the adjustment housing body 141-1, the position indicating scale 141-5 along the height direction. this is formed

The user may check and adjust the conductance of the intermediate open position based on the reference line (a) of the position display pin 145c located on the position display scale 141-5. That is, the higher the height of the position display pin 145c of the position display scale 141-5, the higher the opening height and the higher the conductance can be adjusted.

On the other hand, as shown in FIG. 2 , a pair of sensor insertion grooves 125 , 147 , 158 are coaxially formed on both sides of the lower drive chamber 120 , the adjustment housing 141 and the upper drive chamber 150 on both sides along the height direction. provided in a recessed manner.

A sensor (not shown) for detecting the opening and closing of the vacuum valve 100 through the current height of the opening/closing piston unit 130 is coupled to the pair of sensor insertion grooves 125 , 147 , and 158 .

The process of using the vacuum valve 100 according to the present invention having such a configuration will be described with reference to FIGS. 1 to 6 .

The vacuum valve 100 is installed so that the chamber connector 111 of the valve body 110 is connected to a vacuum chamber (not shown) and the pump connector 113 is connected to a vacuum pump (not shown).

When the vacuum chamber (not shown) is in the blocking position to prevent external leakage of gas, the lower piston 131 is lowered by the elastic force of the elastic member 137 as shown in FIG. 3 to close the chamber connector 111 . block

In this state, when it is desired to form a vacuum pressure inside the vacuum chamber (not shown), air A is injected into the lower air inlet 121 as shown in FIG. 5 .

When air (A) is injected into the lower air inlet 121 and a pressure exceeding the elastic force of the elastic member 137 is applied to the upper piston 133, the upper piston 133 rises upward. The rising of the upper piston 133 is transmitted to the lower piston 131 through the connecting shaft 132 , and the lower piston 131 rises to open the chamber connector 111 . The chamber connector 111 is opened, and the gas A1 inside the vacuum chamber (not shown) is discharged through the pump connector 113, and a vacuum pressure is applied to the vacuum chamber (not shown).

At this time, the upper piston 133 is raised to a height h1 in contact with the upper surface of the lower driving chamber 120 by air pressure, and the lower piston 131 is raised to the same height h1 as the upper piston 133 and is opened. keep the position

On the other hand, if the operator wants to prevent the vortex from being generated when the vacuum pressure is formed in the open position, as shown in FIG. 6 , the adjustment rotation plate 143 is rotated to raise the adjustment bolt 145 .

After the adjustment bolt 145 is raised by a desired height (d), the operator simultaneously supplies air (A) to the lower air inlet 121 and the upper air inlet 157 .

The upper piston 133 rises by the air pressure injected into the lower air inlet 121 . Then, the adjusting piston 160 is lowered by the air pressure injected into the upper air inlet 157 . The adjusting piston 160 descends to a position in contact with the adjusting bolt 145 , and the upper pressure compression 161 is in contact with the upper part of the ascending upper piston 133 .

The height of the upper piston 133 is limited by the upper pressure compression 161 and rises only by the second height h2. Accordingly, the lower piston 131 is also opened to the middle open position as much as the second height h2.

Compared to the fully open position of FIG. 5 , the middle open position of FIG. 6 has a low open height (h2 < h1), so the flow rate of the gas A1 discharged from the vacuum chamber to the vacuum pump, that is, conductance is reduced. Accordingly, it is possible to solve the conventional problem that a vortex is generated inside the vacuum chamber due to a sudden change in conductance.

The operator examines whether a vortex is generated inside the vacuum chamber at the intermediate open position, and when the vortex continues to occur, the conductance can be further reduced by lowering the height of the adjustment bolt 145 further.

On the other hand, Figures 7 and 8 are exemplary views showing the cross-sectional configuration of the vacuum valve (100a) according to a modified example of the present invention.

In the vacuum valve 100 of the preferred embodiment described above, the operator was able to adjust the conductance through the adjusting bolt 145 and the adjusting rotating plate 143 .

On the other hand, in the vacuum valve 100a according to the modified example, the intermediate opening position is adjusted by inserting the conductance control block 180 having a fixed height.

At this time, the height h3 of the conductance control block 180 is set to the optimum intermediate open position height at which no vortex is generated due to experiments.

Thereby, it is possible to adjust between the closed position shown in FIG. 7(a), the open position shown in FIG. 7(b), and the intermediate open position shown in FIG.

As described above, the vacuum valve according to the present invention may be moved to an intermediate open position between the closed position and the open position by additionally including an adjustment piston for adjusting the opening position of the opening/closing piston part.

Accordingly, there is an effect that can prevent the occurrence of eddy currents due to a sudden change in conductance when the initial vacuum pressure is applied.

In addition, the vacuum valve of the present invention has the advantage of being able to adjust the lowering height of the adjustment piston by using the rotation control plate and the adjustment bolt, so that it can be variously adjusted to the capacity of the vacuum chamber and the conductance suitable for the size of the vacuum pump.

The embodiments of the vacuum valve of the present invention described above are merely exemplary, and those of ordinary skill in the art to which the present invention pertains can appreciate that various modifications and equivalent other embodiments are possible therefrom. There will be. Therefore, it will be well understood that the present invention is not limited to the forms recited in the above detailed description. Therefore, the true technical protection scope of the present invention should be determined by the technical spirit of the appended claims. It is also to be understood that the present invention includes all modifications, equivalents and substitutions falling within the spirit and scope of the invention as defined by the appended claims.

100: vacuum valve 110: valve body
111: chamber connector 113: pump connector
115: first sealing member 120: lower driving chamber
121: lower air inlet 123: connecting shaft guide hole
123a: second sealing member 125: lower sensor insertion groove
127: screw coupling hole 129: pressure shaft insertion hole
130: opening and closing piston part 131: lower piston
131a: third sealing member 132: connecting shaft
133: upper piston 133a: fourth sealing member
135: bellows 137: elastic member
140: conductance control unit 141: control housing
141-1: adjusting housing body 141-2: rotating plate receiving groove
141-3: bolt receiving groove 141-4: pin receiving groove
141-5: position display scale 141-6: shaft insertion hole
141-7: lower screw insertion hole 143: adjusting rotation plate
143a: adjustment bolt coupling hole 143b: first thread
145: adjustment bolt 145a: pressure shaft guide hole
145b: second thread 145c: positioning pin
147: middle sensor insertion groove 150: upper drive chamber
151: upper drive chamber body 153: bolt moving hole
155: screw insertion hole 157: upper air inlet
158: upper sensor insertion groove 160: adjusting piston
161: upper compression 170: upper cap
171: upper piston receiving groove 173: fixing screw
173a: screw coupling end 180: conductance control block
a: baseline
A: Air
A1: gas

Claims (4)

a valve body 110 having a chamber connector 111 connected to the vacuum chamber at the lower portion and a pump connector 113 connected to the vacuum pump on the side thereof;
a lower driving chamber 120 coupled to the upper portion of the valve body 110 and having a lower air inlet 121 formed at a lower front surface thereof;
An upper piston 133 formed horizontally inside the lower driving chamber 120, a lower piston 131 formed in a size to block the chamber connector 111 inside the valve body 110, and the upper piston 133 and the lower piston 131 are connected, and the rise of the upper piston 133 according to whether air is supplied to the lower air inlet 121 is transmitted to the lower piston 131, and the lower piston 131 an opening/closing piston part 130 having a connecting shaft 132 for moving the lower piston 131 between a closed position for closing the chamber connector 111 and an open position for opening the chamber connector 111;
an upper driving chamber 150 provided above the lower driving chamber 120 and having an upper air inlet 157 formed on an upper front thereof; It is accommodated in the upper driving chamber 150, the upper pressure compression 161 is extended toward the lower driving chamber 120, and depending on whether air is injected through the upper air inlet 157, the upper driving chamber ( 150) a control piston 160 that moves up and down in the interior;
It is provided between the upper driving chamber 150 and the lower driving chamber 120 to guide the upper pressure compression 161 to the lower driving chamber 120, and the lower air inlet 121 and the upper air inlet. When air is simultaneously injected into 157, the upper pressure compression 161 is lowered together with the adjustment piston 160 and pressurizes the upper piston 133, which rises, so that the chamber connector 111 is moved to the intermediate open position. Conductance control unit 140 to open and;
Conductance controllable vacuum valve comprising an upper cap (170) coupled to the upper portion of the upper driving chamber (150).
The method of claim 1,
The conductance control unit 140,
It is located between the lower driving chamber 120 and the upper driving chamber 150, and a rotating plate receiving groove 141-2 is formed in the plate surface except for the corner area, and the upper temporary compression 161 is guided to the lower part. an adjustment housing 141 having a shaft insertion hole 141-6 formed through the middle region of the rotary plate receiving groove 141-2;
It is accommodated in the rotation plate receiving groove 141-2 of the control housing 141, the outer periphery is exposed to the outside of the control housing 141, and is rotated by an external force, and an adjustment bolt coupling hole 143a is formed therein. Adjustment rotation plate 143 and;
It includes an adjustment bolt 145 screwed to the adjustment bolt coupling hole 143a so as to surround the upper pressure compression 161 and having a position indicator pin 145c horizontally extended toward the outside at one end,
The adjustment bolt 145 is moved up and down between the upper drive chamber 150 and the adjustment housing 141 inside the adjustment rotation plate 143 according to the forward and reverse rotation of the adjustment rotation plate 143. A vacuum valve with adjustable conductance.
3. The method of claim 2,
When air is injected into the upper air inlet 157 and the adjusting piston 160 is lowered, the adjusting bolt 145 comes into contact with the lower part of the adjusting piston 160 and limits the descending height of the adjusting piston 160 . and
The lowering height of the adjusting piston (160) corresponds to the height at which the lower piston (131) opens the chamber connector (111) in the intermediate open position.
4. The method of claim 3,
A pin accommodating groove 141-4 in which the position indicating pin 145c is accommodated is formed at a predetermined depth on the outer periphery of the adjustment housing 141, and the current position indicating pin is formed on the outer peripheral surface of the pin accommodating groove 141-4. Conductance controllable vacuum valve, characterized in that the position display scale (141-5) indicating the position of the (145c) is formed along the height direction.

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