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KR102356224B1 - Hard coating layer for cutting tools with excellent peeling resistance - Google Patents

Hard coating layer for cutting tools with excellent peeling resistance Download PDF

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KR102356224B1
KR102356224B1 KR1020190173913A KR20190173913A KR102356224B1 KR 102356224 B1 KR102356224 B1 KR 102356224B1 KR 1020190173913 A KR1020190173913 A KR 1020190173913A KR 20190173913 A KR20190173913 A KR 20190173913A KR 102356224 B1 KR102356224 B1 KR 102356224B1
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layer
hard
hkl
present
hard coating
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KR20210081696A (en
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안진우
이동열
강재훈
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한국야금 주식회사
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34Nitrides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/36Carbonitrides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C23C30/005Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)

Abstract

본 발명의 목적은 밀착력이 우수하고, 내마모성과 인성이 향상된 절삭공구용 경질피막을 제공함에 있다.
상기와 같은 목적을 달성하기 위해, 본 발명에서는 경질 기체의 표면에 형성되는 경질피막으로 상기 경질피막은 상기 경질 기체 상에 TiN을 주상으로 포함하는 제 1층과 상기 제 1층 상에 형성되고 라멜라 구조의 Ti1-xAlxCyNz (x, y, z의 범위가 필요합니다) 을 주상으로 포함하는 제 2층을 포함하고, 상기 제 1층과 상기 제 2층은 동일한 우선배향 결정면을 가지며, 상기 우선배향 결정면은 하기 [식 1]로 표시되는 TC가 가장 높은 결정면인 절삭공구용 경질피막을 제공한다.
[식 1]
TC(hkl) = I(hkl)/Io(hkl){1/nΣI(hkl)/Io(hkl)}-1
(여기서, I(hkl) = (hkl) 반사강도, Io(hkl) = JCPDS 카드 42-1489에 따른 표준 강도, n= 계산에 사용된 반사의 횟수, (hkl) 반사는 (111), (200), (220), (311), (331), (420), (422) 및 (511)을 사용하는 것)
An object of the present invention is to provide a hard coating for a cutting tool with excellent adhesion and improved wear resistance and toughness.
In order to achieve the above object, in the present invention, a hard film is formed on the surface of a hard substrate. a second layer containing as a main phase Ti 1-x Al x C y N z (ranges of x, y, z are required) of the structure, wherein the first layer and the second layer have the same preferred orientation crystal plane , and the preferred orientation crystal plane provides a hard coating for a cutting tool, which is a crystal plane having the highest TC expressed by the following [Equation 1].
[Equation 1]
TC(hkl) = I(hkl)/I o (hkl){1/nΣI(hkl)/I o (hkl)} -1
(where I(hkl) = (hkl) reflection intensity, I o (hkl) = standard intensity according to JCPDS card 42-1489, n = number of reflections used in the calculation, (hkl) reflection is (111), ( 200), (220), (311), (331), (420), (422) and (511))

Description

내박리성이 우수한 절삭 공구용 경질피막 {Hard coating layer for cutting tools with excellent peeling resistance}Hard coating layer for cutting tools with excellent peeling resistance}

본 발명은 절삭공구용 경질피막에 관한 것으로, 보다 상세하게는 경질기체 상에 접합력이 우수한 AlTiN 박막을 형성함으로써 만들어지는 우수한 내박리성을 가지는 절삭공구용 경질피막에 관한 것이다.The present invention relates to a hard film for a cutting tool, and more particularly, to a hard film for a cutting tool having excellent peeling resistance made by forming an AlTiN thin film having excellent bonding strength on a hard substrate.

절삭성능 향상 및 수명개선을 위해 초경합금, 서멧(cermet), 엔드밀, 드릴류 등의 경질기체 위에 경질피막인 TiN, TiAlN, AlTiN, Al2O3와 같은 박막을 증착하는 방식이 사용되고 있다.In order to improve cutting performance and lifespan, a method of depositing a thin film such as TiN, TiAlN, AlTiN, Al 2 O 3 as a hard film on a hard gas such as cemented carbide, cermet, end mill, drills, etc. is used.

1980년대까지는 절삭공구에 TiN을 코팅하여 절삭성능 및 수명을 향상시키고자 하였으나, 일반적인 절삭가공시 약 600 ~ 700℃ 정도 열이 발생하게 되므로, 1980년대 후반에는 기존의 TiN 보다 경도와 내산화성이 높은 TiAlN으로 코팅기술이 변천되었고, 내마모성 및 내산화성을 더욱 향상시키기 위해 Al을 더 첨가시킨 AlTiN 박막이 개발되었다. AlTiN 박막은 Al2O3 산화층을 형성함으로써, 고온 내산화성과 내마모성을 향상시키는 효과를 얻었으나, 경질 기체와의 결합력이 약한 문제가 있다.Until the 1980s, TiN was coated on cutting tools to improve cutting performance and lifespan, but during general cutting, about 600 ~ 700℃ heat is generated. The coating technology was changed to TiAlN, and an AlTiN thin film with added Al was developed to further improve wear resistance and oxidation resistance. The AlTiN thin film has an effect of improving high-temperature oxidation resistance and abrasion resistance by forming an Al 2 O 3 oxide layer, but has a weak bonding strength with a light gas.

최근 들어, 피삭재는 점차 고경도화되고 있으며, 열전도도가 낮고 공구와 용착이 심한 난삭재에 대한 절삭가공이 많아지고 있다. 이러한 고경도 피삭재에 대한 고속 절삭 가공 및 난삭재에 대한 고속 절삭 가공 시 우수한 절삭성능 및 수명을 얻기 위해서는 우수한 내산화성과 내마모성을 가지는 것이 중요하다. In recent years, work-pieces are becoming increasingly hardened, and cutting processes for difficult-to-cut materials with low thermal conductivity and severe welding with tools are increasing. It is important to have excellent oxidation resistance and wear resistance in order to obtain excellent cutting performance and lifespan during high-speed cutting for high-hardness workpieces and high-speed cutting for difficult-to-cut materials.

이러한 요구에 대하여, 내산화성과 내마모성이 우수한 AlTiN 박막이 새로운 대안으로서 부각되고 있으나, 낮은 내박리특성과 인성이 문제가 되어 적용 범위를 넓히는데 제약이 되고 있다.In response to these demands, an AlTiN thin film with excellent oxidation resistance and abrasion resistance is emerging as a new alternative, but low peel resistance and toughness become problems, limiting the broadening of the application range.

일례로, 하기 특허문헌에서는 라멜라 구조를 가지면서 동시에 특정한 결정면으로 우선 배향시킨 집합조직을 갖는 AlTiN 박막을 통해 보다 향상된 내마모성을 구현한 경질피막에 대해 개시하고 있다. 하지만, AlTiN 박막의 적용에 가장 문제가 되는 경질 기체와의 결합력을 향상시키는 기술에 대해서는 개시하지 않고 있다.As an example, the following patent documents disclose a hard film having improved abrasion resistance through an AlTiN thin film having a lamellar structure and a texture preferentially oriented to a specific crystal plane at the same time. However, the technology for improving the bonding strength with the hard gas, which is the most problematic in the application of the AlTiN thin film, is not disclosed.

대한민국공개특허공보 제2016-0130752호Republic of Korea Patent Publication No. 2016-0130752

본 발명의 목적은 밀착력이 우수하고, 내마모성과 인성이 향상된 절삭공구용 경질피막을 제공함에 있다.An object of the present invention is to provide a hard coating for a cutting tool with excellent adhesion and improved wear resistance and toughness.

상기와 같은 목적을 달성하기 위해, 본 발명에서는 경질 기체의 표면에 형성되는 경질피막으로 상기 경질피막은 상기 경질 기체 상에 TiN을 주상으로 포함하는 제 1층과 상기 제 1층 상에 형성되고 라멜라 구조의 Ti1-xAlxC1-yNy (0.6≤x<1.0, 0≤y≤1) 을 주상으로 포함하는 제 2층을 포함하고, 상기 제 1층과 상기 제 2층은 동일한 우선배향 결정면을 가지는 절삭공구용 경질피막을 제공한다.In order to achieve the above object, in the present invention, a hard film is formed on the surface of a hard substrate. and a second layer including as a main phase Ti 1-x Al x C 1-y N y (0.6≤x<1.0, 0≤y≤1) of the structure, wherein the first layer and the second layer are the same To provide a hard coating for a cutting tool having a preferentially oriented crystal plane.

본 발명에 따른 경질피막은, 내산화성과 내마모성이 우수한 라멜라 조직을 갖는 AlTiN을 주상으로 하는 AlTiN 층의 하부에 경질 기체와의 결합력이 우수한 TiN을 주상으로 하는 TiN 층을 배치하고, 상기 TiN 층의 우선배향 조직과 AlTiN층의 우선배향 조직을 동일하게 함으로써, 경질피막의 내박리성을 종래에 비해 보다 향상시킬 수 있다.In the hard film according to the present invention, a TiN layer containing TiN having excellent bonding strength with a hard gas as a main phase is disposed under an AlTiN layer containing AlTiN having a lamellar structure excellent in oxidation resistance and abrasion resistance as a main phase, and By making the preferential orientation structure and the preferential orientation structure of the AlTiN layer the same, the peel resistance of the hard film can be improved more than in the prior art.

도 1은 본 발명의 일 실시형태에 따른 경질피막의 구조를 나타낸 것이다.
도 2는 본 발명의 실시예 1에 따른 경질피막의 단면 미세조직을 나타낸 것이다.
도 3은 본 발명의 실시예 2에 따른 경질피막의 단면 미세조직을 나타낸 것이다.
도 4는 본 발명의 실시예 1에 따른 경질피막의 X선 회절분석 결과를 나타낸 것이다.
도 5는 본 발명의 실시예 2에 따른 경질피막의 X선 회절분석 결과를 나타낸 것이다.
1 shows the structure of a hard film according to an embodiment of the present invention.
2 shows a cross-sectional microstructure of the hard film according to Example 1 of the present invention.
3 shows a cross-sectional microstructure of the hard film according to Example 2 of the present invention.
4 shows the results of X-ray diffraction analysis of the hard film according to Example 1 of the present invention.
5 shows the results of X-ray diffraction analysis of the hard film according to Example 2 of the present invention.

이하, 첨부 도면을 참조하여 본 발명의 실시예를 상세히 설명한다.Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

그러나 다음에 예시하는 본 발명의 실시예는 여러 가지 다른 형태로 변형될 수 있으며, 본 발명의 범위가 다음에 상술하는 실시예에 한정되는 것은 아니다. 본 발명의 실시예는 당 업계에서 평균적인 지식을 가진 자에게 본 발명을 보다 완전하게 설명하기 위하여 제공되는 것이다.However, the embodiments of the present invention illustrated below may be modified in various other forms, and the scope of the present invention is not limited to the embodiments described below. The embodiments of the present invention are provided to more completely explain the present invention to those of ordinary skill in the art.

본 발명에서, 경질 기체의 표면에 형성되는 경질피막으로 상기 경질피막은 상기 경질 기체 상에 TiN을 주상으로 포함하는 제 1층과 상기 제 1층 상에 형성되고 라멜라 구조의 Ti1-xAlxC1-yNy (0.6≤x<1.0, 0≤y≤1) 을 주상으로 포함하는 제 2층을 포함하고, 상기 제 1층과 상기 제 2층은 동일한 우선배향 결정면을 가지는 절삭공구용 경질피막을 제공한다.In the present invention, as a hard film formed on the surface of a hard substrate, the hard film is formed on the first layer and the first layer containing TiN as a main phase on the hard substrate and has a lamellar structure of Ti 1-x Al x C 1-y N y (0.6≤x<1.0, 0≤y≤1) for a cutting tool comprising a second layer including the main phase, the first layer and the second layer having the same preferred orientation crystal plane Provides a hard film.

도 1에서 도시된 바와 같이 경질 기체(100) 상에 형성되는 경질피막은 우선 경질 기체(100) 바로 위에 TiN을 주상으로하는 제 1층(200)이 형성되고 그 위에 다시 Ti1-xAlxC1-yNy (0.6≤x<1.0, 0≤y≤1)을 주상으로하는 제 2층(300)이 형성된다. As shown in FIG. 1 , in the hard film formed on the hard substrate 100 , the first layer 200 having TiN as a main phase is formed directly on the hard substrate 100 , and then again Ti 1-x Al x The second layer 300 having C 1-y N y (0.6≤x<1.0, 0≤y≤1) as a main phase is formed.

본 발명에 있어서 '주상'이라고 하면, 제 1층 또는 제 2층을 구성하는 부피분율로 80% 이상, 바람직하게는 90% 이상, 보다 바람직하게는 95% 이상을 이루는 상(phase)을 의미한다.In the present invention, the term 'main phase' refers to a phase constituting 80% or more, preferably 90% or more, more preferably 95% or more by volume fraction constituting the first or second layer. .

이러한 제 1층과 제 2층은 동일한 우선배향 결정면을 가지게 된다. 제 2층의 주상인 Ti1-xAlxC1-yNy 을 포함하는 경질피막은 일반적으로 초경합금, 서멧(cermet) 등과 같은 경질 기체 상에 형성되면 경질 기체와의 접합력이 약해서 절삭 가공 중 쉽게 박리되는 문제가 있게 된다. 이와 같은 문제를 해결하기 위해 본 발명에서는 경질 기체와 Ti1-xAlxC1-yNy 을 주상으로 하는 피막 사이에 경질 기체와 결합력이 우수한 TiN을 주상으로 하는 중간 피막을 개재시키고, 이들 피막들 간의 우선배향 결정면을 동일하게 함으로써 TiN을 주상으로 하는 중간 피막과 Ti1-xAlxC1-yNy 을 주상으로 하는 경질피막 사이의 결합력을 높이고 최종적으로 경질 기체와 Ti1-xAlxC1-yNy 을 주상으로 하는 경질피막 사이의 결합력을 높일 수 있다. 이에 따라, 고온 내산화성과 내마모성이 우수한 Ti1-xAlxC1-yNy 을 주상으로 하는 경질피막의 내박리성을 향상시킬 수 있게 된다.The first and second layers have the same preferred orientation crystal plane. When the hard film including Ti 1-x Al x C 1-y N y , which is the main phase of the second layer, is formed on a hard substrate such as cemented carbide or cermet, the bonding strength with the hard substrate is weak, so that during cutting There is a problem of easily peeling off. In order to solve this problem, in the present invention, an intermediate film containing TiN having excellent bonding strength with the hard gas is interposed between the light gas and the film having Ti 1-x Al x C 1-y N y as the main phase, and these By making the preferential orientation crystal planes the same between the films, the bonding force between the intermediate film having TiN as the main phase and the hard film having Ti 1-x Al x C 1-y N y as the main phase is increased, and finally, the light gas and Ti 1-x It is possible to increase the bonding force between the hard film having Al x C 1-y N y as the main phase. Accordingly, it is possible to improve the peel resistance of the hard film having Ti 1-x Al x C 1-y N y as a main phase, which is excellent in high temperature oxidation resistance and abrasion resistance.

본 발명에 있어서, '우선배향 결정면'은 경질피막에 대한 XRD 분석 시에 AlTiN층 및 TiN층에 해당하는 피크 중에서 각각 최대 강도 피크를 나타내는 결정면을 의미한다.In the present invention, the 'preferentially oriented crystal plane' refers to a crystal plane showing the maximum intensity peak, respectively, among the peaks corresponding to the AlTiN layer and the TiN layer during XRD analysis of the hard film.

또한, 제 2층은 라멜라 구조의 Ti1-xAlxC1-yNy 을 주상으로 하는데, 일반적으로 Ti1-xAlxC1-yNy 을 주상으로 하는 피막은 인성이 약하고 이에 따라 내충격성이 열세일 수 있다. 라멜라 구조를 가지는 피막은 이러한 인성을 향상시킬 수 있는 구조로 인성 향상 효과를 극대화하기 위해 바람직하게는 라멜라 층간 간격은 100nm 이하인 것이 바람직하다.In addition, the second layer has a lamellar structure of Ti 1-x Al x C 1-y N y as a main phase, and in general , a film having Ti 1-x Al x C 1-y N y as a main phase has weak toughness and thus Accordingly, the impact resistance may be inferior. The film having a lamellar structure is a structure capable of improving such toughness, and in order to maximize the effect of improving the toughness, the interlayer spacing of the lamellar layers is preferably 100 nm or less.

또한, 본 발명에서, 상기 제 2층은 면심입방구조(fcc)를 갖는 조직의 부피분율이 90 vol% 이상인 절삭공구용 경질피막을 제공한다.In addition, in the present invention, the second layer provides a hard coating for cutting tools in which the volume fraction of the tissue having a face-centered cubic structure (fcc) is 90 vol% or more.

Ti1-xAlxC1-yNy 을 주상으로 하는 경질피막은 성막 조건에 따라 면심입방구조(fcc)와 조밀육방구조(hcp) 구조가 나타날 수 있는데, 내마모성, 내충격성 등에서 면심입방구조인 것이 더 유리하고 따라서 면심입방구조가 90 vol%이상이어야 면심입방 구조에 따른 특성이 경질피막에서 충분히 발현될 수 있기 때문에, 제 2층의 결정구조는 면심입방구조가 90 vol% 이상인 것이 바람직하다.A hard film having Ti 1-x Al x C 1-y N y as a main phase can have a face-centered cubic structure (fcc) and a dense hexagonal structure (hcp) depending on the film formation conditions. It is more advantageous to have a face-centered cubic structure and therefore, the face-centered cubic structure must be at least 90 vol% so that the characteristics according to the face-centered cubic structure can be sufficiently expressed in the hard film. .

본 발명의 일 실시형태에서 상기 우선배향 결정면은 (111)면인 절삭공구용 경질피막을 제공한다.In one embodiment of the present invention, the preferred orientation crystal plane provides a hard coating for a cutting tool that is a (111) plane.

또한, 본 발명의 또 다른 일 실시형태에서 상기 우선배향 결정면은 (200)면인 절삭공구용 경질피막을 제공한다.Further, in another embodiment of the present invention, the preferential orientation crystal plane provides a (200) plane, a hard coating for a cutting tool.

상술한 바와 같이 본 발명에 따른 경질피막에서 제 1층과 제 2층의 우선배향 결정면은 동일한데, 제 2층은 바람직하게 절삭성능이 우수한 (111)면 또는 (200)면으로 우선배향한 집합조직을 가질 수 있다.As described above, in the hard film according to the present invention, the preferred orientation crystal planes of the first layer and the second layer are the same, and the second layer is a set preferentially oriented to the (111) plane or (200) plane, which has excellent cutting performance. You can have an organization.

본 발명에서, 상기 제 1층의 두께는 0㎛을 초과하면서 2㎛ 이하인 절삭공구용 경질피막을 제공한다. TiN을 주상으로 하는 제 1층은 경질 기체와 결합력이 우수한 특성을 이용하여 최종 경질피막의 결합력을 향상시키는 것을 목적으로 형성되는 것으로 내마모성이나 내산화성은 Ti1-xAlxC1-yNy 을 주상으로 하는 제 2층 보다 열세이다. 따라서, 제 1층의 두께는 제 2층의 결합력을 향상시킬 수 있을 만큼만 유지하는 것이 바람직하고, 이를 위해서 제 1층의 두께는 2㎛인 것이 바람직하고, 더 바람직하게는 1㎛ 이하이다.In the present invention, the thickness of the first layer is more than 0㎛ and 2㎛ or less to provide a hard coating for a cutting tool. The first layer with TiN as the main phase is formed for the purpose of improving the bonding strength of the final hard film by using the excellent bonding strength with the hard gas, and the wear resistance or oxidation resistance is Ti 1-x Al x C 1-y N y It is inferior to the second floor, which is mainly composed of Therefore, it is preferable to maintain the thickness of the first layer only enough to improve the bonding strength of the second layer, and for this purpose, the thickness of the first layer is preferably 2 μm, more preferably 1 μm or less.

또한, 상기 제 2층의 두께는 2~6㎛인 것이 바람직한데, 이는 제 2층의 두께가 2㎛ 미만일 경우 내마모성 및 내산화성이 충분하지 않을 수 있고, 6㎛ 초과일 경우 내부응력에 의한 박리문제가 발생할 수 있기 때문이다.In addition, it is preferable that the thickness of the second layer is 2 to 6 μm, which may not be sufficient in abrasion resistance and oxidation resistance when the thickness of the second layer is less than 2 μm, and when it exceeds 6 μm, peeling due to internal stress Because problems can arise.

이하, 본 발명을 보다 구체적으로 설명하기 위해, 본 발명에 따른 바람직한 실시예를 첨부된 도면을 참조하여 보다 상세하게 설명한다. 그러나, 본 발명은 여기에서 설명되는 실시예에 한정되지는 않는다.Hereinafter, in order to describe the present invention in more detail, preferred embodiments according to the present invention will be described in more detail with reference to the accompanying drawings. However, the present invention is not limited to the embodiments described herein.

[실시예 1][Example 1]

먼저, 초경합금 모재는, 초경합금의 바인더로 작용하는 Co의 함량이 7중량%, 4족, 5족 또는 6족의 원소를 포함하는 탄화물 또는 탄질화물은 그 함량이 5중량%를 첨가하여 13시간 혼합 분쇄 이후 스프레이 드라이 공법을 이용하여 혼합분말을 얻는다. 얻어진 혼합분말을 가지고 CNMG120408-MP 형번 제작을 위해 2ton/㎠의 압력으로 프레스를 수행하여 성형체를 제조하였다.First, the cemented carbide base material has a content of 7% by weight of Co acting as a binder of the cemented carbide, and carbides or carbonitrides containing elements of Group 4, 5 or 6 are mixed for 13 hours by adding 5% by weight. After grinding, a mixed powder is obtained using a spray-drying method. With the obtained mixed powder, a molded article was prepared by pressing at a pressure of 2 ton/cm 2 to manufacture the CNMG120408-MP model number.

이어서, 600℃에서 탈지(dewaxing) 공정을 수행하여, 성형체 제조과정에 투입된 유기 바인더 성분을 제거한 후, 불활성 가스 분위기에서 1 ~ 2시간 동안 소결을 진행하고, 600℃까지 불활성 가스 분위기에서 소정의 냉각속도 냉각시킨 후, 자연냉각시키는 방법으로 소결공정을 수행하여, 경질피막 형성용 모재를 제조하였다.Next, a dewaxing process is performed at 600° C. to remove the organic binder component added to the molded article manufacturing process, and then sintering is performed in an inert gas atmosphere for 1 to 2 hours, followed by a predetermined cooling in an inert gas atmosphere to 600° C. After speed cooling, a sintering process was performed by a natural cooling method to prepare a base material for forming a hard film.

상기 제조된 모재 위에 열적 CVD 방법에 의해 Ti1-xAlxC1-yNy 층을 증착하였다. 이를 위해 850℃, 5mbar의 압력하에서, 75mm 핫월(hot-wall) CVD 반응기 내에 8ml/min의 TiCl4, 12ml/min의 N2, 100ml/min의 H2 가스를 도입하여 TiN층을 형성 하였다. 이후 800℃, 5mbar의 압력하에서, 4ml/min의 TiCl4, 20ml/min의 AlCl3, 1200ml/min의 H2 혼합 가스를 도입하여 80ml/min의 NH3 및 160ml/min의 N2, 0.5ml/min의 CH3CN 혼합물을 제2 가스 공급으로 반응기 내로 통과 시켰다. 25분의 코팅 시간이 지난 후, 두께 4㎛의 검은 회색층의 Ti1-xAlxC1-yNy 이 형성되었다. A Ti 1-x Al x C 1-y N y layer was deposited on the prepared base material by thermal CVD. To this end, a TiN layer was formed by introducing 8ml/min TiCl 4 , 12ml/min N 2 , 100ml/min H 2 gas into a 75mm hot-wall CVD reactor under a pressure of 850°C and 5mbar. Then, 800 ℃, under a pressure of 5mbar, 4ml/min TiCl 4 , 20ml/min AlCl 3 , 1200ml/min H 2 Mixed gas was introduced to 80ml/min NH 3 and 160ml/min N 2 , 0.5ml A CH 3 CN mixture at /min was passed into the reactor as a second gas feed. After a coating time of 25 minutes, Ti 1-x Al x C 1-y N y of a black gray layer with a thickness of 4 μm was formed.

[실시예 2] [Example 2]

실시예 1과 같이 열적 CVD 방법에 의해 Ti1-xAlxC1-yNy 층을 WC/Co 경질 금속 커팅 인서트 상에 증착하였다. 이를 위해 800℃, 5mbar의 압력하에서, 75mm 핫월(hot-wall) CVD 반응기 내에 6ml/min의 TiCl4, 10ml/min의 N2, 70ml/min의 H2, 가스를 도입하여 TiN층을 형성 하였다. 이후 800℃, 5mbar의 압력하에서, 3ml/min의 TiCl4, 18ml/min의 AlCl3, 1200ml/min의 H2 혼합 가스를 도입하여 70ml/min의 NH3 및 140ml/min의 N2 혼합물을 제2 가스 공급으로 반응기 내로 통과 시켰다. 30분의 코팅 시간이 지난 후, 두께 5㎛의 검은 회색층의 Ti1-xAlxC1-yNy 이 형성되었다 A Ti 1-x Al x C 1-y N y layer was deposited on the WC/Co hard metal cutting insert by thermal CVD method as in Example 1. For this, a TiN layer was formed by introducing 6ml/min TiCl 4 , 10ml/min N 2 , 70ml/min H 2 , and gas into a 75 mm hot-wall CVD reactor under a pressure of 800° C. and 5 mbar. . After 800 ℃, under a pressure of 5 mbar, 3ml/min TiCl 4 , 18ml/min AlCl 3 , 1200ml/min H 2 mixed gas was introduced by introducing 70ml/min of NH 3 and 140ml/min of N 2 mixture. 2 gas feed was passed into the reactor. After 30 minutes of coating time, Ti 1-x Al x C 1-y N y of a black gray layer with a thickness of 5 μm was formed

미세조직microstructure

도 2는 본 발명의 실시예 1에 따른 경질피막의 단면 미세조직을 나타낸 것이다. 도 2에서 확인되는 바와 같이, 실시예 1에 따른 경질피막의 AlTiN층은 주상정으로 성장하면서, 주상정의 내부에 수평하게 자발적으로 생성되는 나노 다층 구조인 라멜라 조직이 형성되어 있음이 관찰된다.Figure 2 shows the cross-sectional microstructure of the hard film according to Example 1 of the present invention. As can be seen in FIG. 2 , it is observed that, while the AlTiN layer of the hard coating according to Example 1 grows into columnar crystals, a lamellar structure, which is a nano-multilayered structure spontaneously generated horizontally, is formed inside the columnar crystals.

도 3은 본 발명의 실시예 2에 따른 경질피막의 단면 미세조직을 나타낸 것이다. 도 3의 경우에도 도 2와 같이 명료하게 촬영되지 않았으나 실시예 1과 동일하게 라멜라 조직이 형성되어 있음이 확인되었다.3 shows a cross-sectional microstructure of the hard film according to Example 2 of the present invention. Even in the case of FIG. 3, it was not clearly photographed as in FIG. 2, but it was confirmed that a lamellar tissue was formed in the same manner as in Example 1.

경질피막의 XRD 분석XRD analysis of hard film

도 4는 본 발명의 실시예 1에 따른 경질피막의 X선 회절분석 결과를 나타낸 것이다. 도 4에서 확인되는 바와 같이, 실시예 1에 따라 제조된 경질피막의 AlTiN층의 최대 강도를 나타내는 피크는 (111)면이고, TiN층의 최대 강도를 나타내는 피크도 (111)면이다.4 shows the results of X-ray diffraction analysis of the hard film according to Example 1 of the present invention. 4, the peak indicating the maximum intensity of the AlTiN layer of the hard coating prepared according to Example 1 is the (111) plane, and the peak indicating the maximum intensity of the TiN layer is also the (111) plane.

즉, 본 발명의 실시예 1에 따른 경질피막은 경질 기체의 표면에 (111)면으로 배향된 TiN층을 형성한 후에 (111)면으로 배향된 AlTiN층을 형성함으로써, 결정구조 간의 유사성이 증대하여, 양 층 간의 결합력이 향상되게 된다.That is, in the hard film according to Example 1 of the present invention, a TiN layer oriented in a (111) plane is formed on the surface of a hard substrate and an AlTiN layer oriented in a (111) plane is formed, thereby increasing the similarity between crystal structures. Thus, the bonding force between the two layers is improved.

도 5는 본 발명의 실시예 2에 따른 경질피막의 X선 회절분석 결과를 나타낸 것이다. 도 5에서 확인되는 바와 같이, 실시예 1에 따라 제조된 경질피막의 AlTiN층의 최대 강도를 나타내는 피크는 (200)면이고, TiN층의 최대 강도를 나타내는 피크도 (200)면이다. 이에 따라 실시예 1과 마찬가지로 AlTiN층과 TiN층 간의 결정구조의 유사성이 증대하여, 양 층 간의 결합력이 향상되게 된다.5 shows the results of X-ray diffraction analysis of the hard film according to Example 2 of the present invention. 5, the peak indicating the maximum intensity of the AlTiN layer of the hard coating prepared according to Example 1 is the (200) plane, and the peak indicating the maximum intensity of the TiN layer is also the (200) plane. Accordingly, similarity to the crystal structure between the AlTiN layer and the TiN layer increases as in Example 1, and the bonding force between the two layers is improved.

Claims (5)

경질 기체의 표면에 형성되는 경질피막으로,
상기 경질피막은 상기 경질 기체 상에 TiN을 주상으로 포함하는 제 1층과 상기 제 1층 상에 형성되고 라멜라 구조의 Ti1-xAlxC1-yNy (0.6≤x<1.0, 0≤y≤1) 을 주상으로 포함하는 제 2층을 포함하고,
상기 제 1층과 상기 제 2층은 동일한 우선배향 결정면을 가지고,
상기 제 1층의 두께는 0을 초과하고 1㎛ 미만이고, 제 2층의 두께는 3㎛을 초과하고 6㎛이하인, 절삭공구용 경질피막.
A hard film formed on the surface of a hard gas,
The hard film is formed on the first layer and the first layer including TiN as a main phase on the hard substrate and has a lamellar structure of Ti 1-x Al x C 1-y N y (0.6≤x<1.0, 0 ≤ y ≤ 1) including a second layer including the main phase,
The first layer and the second layer have the same preferred orientation crystal plane,
The thickness of the first layer is greater than 0 and less than 1 μm, and the thickness of the second layer is greater than 3 μm and less than or equal to 6 μm, a hard coating for a cutting tool.
제 1항에 있어서,
상기 제 2층은 면심입방구조의 부피분율이 90 vol% 이상인, 절삭공구용 경질피막.
The method of claim 1,
The second layer is a hard film for cutting tools, wherein the volume fraction of the face-centered cubic structure is 90 vol% or more.
제 1항에 있어서,
상기 우선배향 결정면은 (111)면인, 절삭공구용 경질피막.
The method of claim 1,
The preferred orientation crystal plane is a (111) plane, a hard coating for a cutting tool.
제 1항에 있어서,
상기 우선배향 결정면은 (200)면인, 절삭공구용 경질피막.
The method of claim 1,
The preferred orientation crystal plane is a (200) plane, a hard coating for a cutting tool.
삭제delete
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