KR102241945B1 - Material supplying apparatus and method of operating the same - Google Patents

Abstract

The present invention includes a container storing powder raw materials and provided with an outlet, a press provided in the container and capable of moving and rotating in at least one direction, and a screw provided outside the press, and the powder raw material is prepared using a screw by rotation of the press. A raw material supply device and a thin film deposition device having the same are provided for moving to an outlet and applying pressure to a powder raw material by moving a press.

Description

Material supplying apparatus and method of operating the same

The present invention relates to a raw material supply device, and more particularly, to a raw material supply device capable of quantitatively supplying organic raw material powder, and a driving method thereof.

In general, the method of forming a thin film is a PVD (Physical Vapor Deposition) method in which a thin film is formed using physical collision including sputtering, and a CVD (Chemical Vapor Deposition) method in which a thin film is formed using a chemical reaction. It can be broadly classified as.

The CVD method generally uses a gaseous reaction raw material, but when it is difficult to produce a gaseous reaction raw material, a solid powder raw material is vaporized and then a thin film is deposited using the vaporized raw material gas. For example, in the case of an organic light emitting diode (OLED), a powder raw material in a solid state is used for the organic thin film. Accordingly, an organic thin film deposition apparatus using the CVD method includes at least one raw material supply device for supplying powder raw materials stored in a separate canister into a chamber.

As such a raw material supply device, the powder raw material stored in the container is supplied into the chamber by a method using a pressure difference or a method using a screw thread. The method of using the pressure difference generates a pressure difference between the container and the chamber by supplying a predetermined gas into the container as shown in Korean Patent Application Publication No. 2008-0019808, and powder raw materials are ejected out of the container by the pressure difference. It is a method to be supplied into the chamber. In this method, the supply amount of the raw material powder is controlled by the injection pressure of the gas. However, this method has a problem in that the amount and type of powder raw material remaining in the container is affected by moisture and static electricity, so that the amount of powder raw material supplied is changed every time.

On the other hand, in the method of using a screw wire, a rotary shaft with a screw wire is installed inside the container to rotate the rotary shaft, and by the rotation of the rotary shaft, the powder raw material is ejected out of the container along the screw wire to be supplied into the chamber. In this method, the supply amount of the raw material powder is controlled by the pitch of the screw and the rotational speed of the screw. However, this method is not suitable for supplying a small amount of raw material because the powder raw material may not be supplied into the chamber because the powder raw material is stuck between the screw lines when the particles of the powder raw material become dense, and the amount of the powder raw material supplied is also There are different problems.

As described above, in the organic thin film deposition apparatus according to the prior art, it is difficult to quantitatively supply the raw material powder, and it is more difficult to supply the raw material powder in a trace amount. Therefore, it is difficult to uniformly control the thickness of the thin film, and various problems such as deterioration of film quality characteristics occur, and it is difficult to stably perform the thin film process.

In order to solve these problems of the prior art, Korean Patent Registration No. 10-1055979 uses a load sensor, that is, a fine measuring scale, to measure the load of the powder raw material and supply it to an external device when the load of the powder raw material reaches the target load. As a result, a raw material supply device capable of supplying a powder raw material in a fixed quantity is proposed. However, since this method cannot be installed in a vacuum chamber in which the load sensor cannot be installed, there is a problem in that a space for installing the load sensor must be separately provided. In addition, since the organic powder raw material has high aggregation properties, there is a problem that it is impossible to quantitatively supply a fine mass of 10 mg or less.

The present invention provides a raw material supply device capable of quantitatively supplying an organic powder raw material having high aggregation properties and a driving method thereof.

The present invention provides a raw material supply device and a driving method thereof capable of supplying an organic powder having high aggregation property smoothly by supplying an organic powder raw material using pressure.

A raw material supply device according to an aspect of the present invention comprises: a first container storing a powder raw material and provided with an outlet; A second container that is movable and has a smaller volume than the first container; A transfer unit provided in the first container to move the powdered raw material to the second container; And a powder volume control part extending from the transfer part and controlling an amount of the powder raw material accommodated in the second container.

The second container includes a horizontal channel extending in one direction and connected to the first container; And a transfer shaft inserted into the horizontal channel and having at least one transfer hole formed therein.

The transfer unit is movable in at least one direction, the press rotatable; And a screw provided outside the press.

The powder volume control unit includes a probe provided under the press and capable of being inserted and protruded into the press.

A raw material supply device according to another aspect of the present invention includes a container for storing a powder raw material and provided with an outlet; A press provided in the container, movable in at least one direction, and rotatable; And a screw provided outside the press, and the powdered raw material is moved to the outlet by using the screw by rotation of the press, and pressure is applied to the powdered raw material by the movement of the press to discharge.

It further includes a probe provided under the press and capable of being inserted and protruded into the press.

A horizontal channel extending in one direction and connected to the at least one container; And a transfer shaft inserted into the horizontal channel and having at least one transfer hole formed therein, wherein the transfer shaft is reciprocable within the horizontal channel to fill the at least one transfer hole with the raw material powder or use an external device. To be supplied.

The transfer hole has an upper corner round.

At least a portion of the probe is inserted into the press, protruded outside the press, and inserted into the transfer hole.

The transfer shaft transfers the other powder material filled in the other transfer hole to the external device when one transfer hole is filled with one powder material, and transfers the one powder material filled in the one transfer hole to the external device. When filling the other powder raw material in the other transfer hole.

A gas supply unit connected to one side of the transfer pipe to supply gas for transferring the powder raw material; And a reciprocating drive coupled to one end of the transfer shaft to reciprocate the transfer shaft.

A method of driving a raw material supply device according to an aspect of the present invention comprises: supplying a powder raw material to a first container; Moving the powdered raw material in the first container to a second container; Adjusting the amount of the powder raw material moved to the second container using a powder volume control unit; And supplying the powdered raw material supplied to the second container to an external device by moving the second container.

A press provided in the first container, rotatable and movable in at least one direction, and a conveying unit including a screw provided outside the press, and the powder raw material is moved by rotation of the press and the screw.

The powder volume control part is provided under the press and can be inserted and protruded into the press, and the amount of the powder raw material is adjusted according to the degree of insertion or protrusion of the press of the powder volume control part.

A method of driving a raw material supply device according to another aspect of the present invention comprises: supplying a powder raw material into a container; Rotating a press and a screw in the container to move the powdered raw material to an outlet; Aligning the outlet and the transfer hole by moving a transfer shaft provided with a transfer hole in a predetermined area; Discharging the raw material from the outlet to the transfer hole by moving the press downward; And supplying the raw material filled in the transfer hole to an external device by moving the transfer shaft.

Further comprising a step of further providing a probe under the press, and inserting the probe into the transfer hole.

The transfer hole has an upper corner round, and the probe is inserted into the transfer hole along the upper corner of the transfer hole.

In an embodiment of the present invention, a press that can be moved up and down in a hopper and a screw outside the press are provided, and the powder raw material is moved downward using the rotation of the screw, and then pressure is applied to the powder raw material using a press. Discharge powdered raw materials. In addition, at least one or more hoppers are provided to store at least one raw material for powder, and at least one raw material for powder is supplied to an external device by reciprocating motion of a transfer shaft having at least one transfer hole corresponding to the number of hoppers.

Advantageous Effects of Invention According to the present invention, by applying pressure to the powder raw material using a press and discharging it, it is possible to smoothly discharge the organic powder raw material having good coagulation. In addition, the amount of the powder raw material can be quantitatively controlled and supplied according to the contact area between the press and the powder raw material, the pitch interval of the screw, and the inner volume of the conveying hole. Therefore, since the thin film process can be carried out more stably, such as being able to easily control the thickness of the thin film, it is possible to manufacture a thin film product of higher efficiency and higher quality.

In addition, by providing at least one or more hoppers and at least one or more transfer holes, it is possible to supply at least one raw material powder using one raw material supply device. Therefore, it is possible to easily form a thin film formed of at least one or more raw materials.

1 is a schematic cross-sectional view of a hopper as a raw material supply device according to an embodiment of the present invention.
2 is a schematic cross-sectional view of a raw material supply device having a hopper according to an embodiment of the present invention.
3 to 6 are schematic diagrams for explaining a method of driving a raw material supply device according to an embodiment of the present invention.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but will be implemented in a variety of different forms, only the present embodiments make the disclosure of the present invention complete, and the scope of the invention to those of ordinary skill in the art. It is provided to be fully informed.

1 is a schematic cross-sectional view of a raw material supply device according to an embodiment of the present invention, a schematic cross-sectional view of a hopper.

Referring to FIG. 1, a hopper 100 according to an embodiment of the present invention includes a container body 110 providing a predetermined space in which a powder raw material 10 is stored, and a cover covering an upper portion of the container body 110 ( 120), a press 130 provided in the container body 110, and a screw 140 provided outside the press 130. In addition, a probe 150 provided under the press 130 and a driving unit 160 for vertically driving and rotating the press 130 may be further included.

The container body 110 has a predetermined space therein to store the powder raw material 10 used as a deposition raw material, for example, in the case of an organic thin film deposition process, the organic raw material in the form of a solid powder. The container body 110 may be provided in a shape having a narrow lower width. For example, the container body 110 has a shape perpendicular to a predetermined area from the top to the bottom side, has a shape that gradually narrows downward therefrom, and has a shape that is vertical again from the top to the bottom side. That is, the container body 110 may be provided in a funnel shape, for example. The container body 110 may be provided in a funnel shape as a whole, or may have a vertical shape on the outside and a funnel shape on the inside. In this case, an area having a width narrower than that of other areas under the container body 110 becomes the outlet 112 through which the powdered raw material 10 is discharged. Meanwhile, a mixing means (not shown) for mixing the powdered raw material 10 stored therein may be further provided in the container body 110. For example, a vibrator is provided in the container body 110 to prevent agglomeration of the powder raw material 10 or sticking in the container body 110 by mixing the powder raw material 10 at any time. Of course, the mixing means may be any means capable of mixing the powdered raw material 10 stored in the container body 110.

The cover 120 is coupled to the upper portion of the container body 110 so as to be detachable or openable. A cover 120 is provided on the container body 110 to provide a container for storing and sealing the powdered raw material 10. In addition, an inlet 122 for supplying the powdered raw material 10 to one area of the cover 120 is provided. The inlet 122 is connected to a raw material storage unit (not shown) through a raw material supply pipe (not shown). Accordingly, the raw material powder stored in the raw material storage unit may be supplied into the container body 110 through the raw material supply pipe and the inlet. In this case, a controller, for example, a valve (not shown) for controlling the supply of the powder material may be provided in a predetermined region of the raw material supply pipe. Meanwhile, the inlet 122 and the raw material supply pipe are not provided, and the powder raw material 10 may be injected into the inner space of the container body 110 after the cover 120 is separated or opened from the container body 110.

The press 130 may be provided in the container body 110 in the supply direction of the raw material powder 10. That is, the press 130 may be provided in the container body 100 in a vertical direction. The press 130 may move in the vertical direction inside the container body 110 and may rotate. That is, the press 130 may move in the vertical direction while rotating, and may rotate after vertical movement or may move vertically after rotation. In addition, the press 130 may be provided in a shape corresponding to the inner shape of the container body 110. For example, the press 130 may be provided in an approximately cylindrical shape, and a portion of the lower portion may have a smaller diameter than other regions. For example, in the press 130, a first area having a first diameter may be provided from an upper side to a lower side of a predetermined area, and a second area having a second diameter smaller than the first diameter may be provided downward therefrom. In addition, a third region whose width is narrowed from the first diameter to the second diameter may be further provided between the first region and the second region. In this case, the first diameter may be larger than the inner diameter of the outlet 112, and the second diameter may be smaller than the inner diameter of the outlet 112. That is, the second diameter may be provided smaller than the inner diameter of the outlet 112 so that the second area under the press 130 can be inserted into the outlet 112 on the lower side of the container body 110. In addition, the second region of the press 130 may be provided with a length equal to or longer than the length of the outlet 112. This is to prevent the first region that is not inserted when the second region of the press 130 is inserted into the discharge port 112 from contacting the inlet of the discharge port 112. As the press 130 moves downward, the pressure is applied to the outlet 112, and accordingly, the powdered raw material 10 accumulated in the outlet 112 can be moved downward. That is, as the press 130 moves downward, pressure may be applied to the discharge port 112, so that the raw material powder 10 of the discharge port 112 may be smoothly supplied to the lower side. Accordingly, the press 130 functions as a conveying unit for conveying the powder raw material 10 downward.

The screw 140 is provided outside the press 130 and is provided to be rotatable. For example, the screw 140 is fixed to the outer surface of the press 130 and provided along the outer surface of the press 130, and may rotate together with the press 130. That is, as the press 130 rotates, the screw 140 may rotate. In order to rotate and vertically move the press 130 in this way, a driving unit 160 may be provided on the outer upper part of the hopper 100. The driving unit 160 may include a rotating unit that rotates the press 130 and a moving unit that moves the press 130 up and down. In addition, it is possible to simultaneously rotate and vertically drive the press 130 by using one driving unit 160. It is preferable that the driving unit 160 rotates the press 130 according to the direction of the screw 140. That is, when the screw 140 is provided to proceed to the right, the press 130 may be rotated to the right to move the raw material powder 10 to the discharge port 112 according to the moving direction of the screw 140. Conversely, when the screw 140 is provided to proceed to the left, the press 130 may be rotated to the left to move the raw material powder 10 to the outlet 112 according to the direction of the screw 140. Here, the amount of the raw material powder 10 transferred to the outlet 112 can be adjusted by the contact area where the raw material powder contacts the press 130, the number of rotations of the press 130, the pitch interval of the screw 140, etc. . In particular, a small amount of raw material powder 10 can be transferred by controlling the rotation speed of the press 130 in a fine and precise manner by operating the driving unit in the form of a pulse. Accordingly, the screw 140 functions as a conveying unit for conveying the powder raw material 10 downward.

The probe 150 is provided under the press 130 and may be provided to be inserted and protruded into the press 130. That is, the probe 150 may be elastically coupled to the inside of the press 130 so that the probe 150 may be inserted into the press 130 by pressure from the lower side. In addition, when the pressure is removed, the probe 150 may protrude outward from the press 130. Since the protruding portion 150 must be inserted into the second region of the press 130, its diameter may be provided smaller than the inner diameter of the second region of the press 130. This probe 150 is provided to detect the position where the raw material powder 10 is put. For example, when a transfer shaft moving in a horizontal direction is provided under the hopper 100, and the raw material powder 10 is supplied to the transfer hole of the transfer shaft, the probe 150 is formed of the transfer hole and the discharge port 112. It is prepared to align the position. That is, when the probe 150 is partially inserted into the outlet 112, the probe 150 maintains a protruding state, and accordingly, it can be determined that the transfer hole 310 and the outlet 112 are aligned. In addition, the probe 150 may be inserted into the press 130 by an elastic force, so that the probe 150 may be prevented from being damaged due to a collision with the transfer shaft in the process of detecting the location of the transfer hole. That is, before the positions of the outlet 112 and the transfer hole are aligned by the probe 150, the probe 150 may rub against the transfer shaft, and the probe 150 inserted into the transfer hole is moved by the transfer shaft. Although it may collide with the sidewall of the transfer hole, in this case, since the probe 150 is inserted into the press 130 by the elastic force, damage of the probe 150 can be prevented. Meanwhile, since the probe 150 is provided, a collision between the transfer shaft and the press 130 can be prevented, and accordingly, damage to the transfer shaft or the press 130 can be prevented. That is, if the outlet 112 and the transfer hole do not match, the transfer shaft and the press 130 may collide when the press 130 moves downward and applies pressure, and accordingly, the transfer shaft or the press 130 Although it may be damaged, this problem can be solved because the probe 150 determines the alignment of the transfer hole and the outlet 112. Meanwhile, the probe 150 may function as a powder volume control unit that adjusts the amount of the powder raw material 10 supplied to the lower side. That is, the probe 150 at least partially protrudes from the lower side of the press 130 and moves along with the movement toward the lower side of the press 130 to apply pressure to the raw material powder 10. In this case, the supply amount of the raw material powder 10 may be adjusted according to the degree to which the probe 150 is inserted into the press 130 or protruded from the inside.

2 is a schematic cross-sectional view of a raw material supply device having a hopper according to an embodiment of the present invention.

Referring to FIG. 2, a raw material supply device according to an embodiment of the present invention includes a hopper 100 that stores raw material powder and supplies it, and a horizontal channel 210 and a transfer pipe 221 extending in one direction. ) And a second container 200 for transferring the raw material powder supplied from the hopper 100, and a transfer shaft for horizontally transferring the raw material powder supplied from the hopper 100 by being inserted into the horizontal channel 210 and reciprocating ( 300). In addition, the raw material supply device may further include a reciprocating driving unit 500 coupled to a side surface of the second container 200 to reciprocate the transfer shaft 300.

The hopper 100 is provided in the container body 110 to provide a predetermined space in which the powder raw material 10 is stored, a cover 120 covering an upper portion of the container body 110, and moves up and down. A possible press 130, a screw 140 provided outside the press 130 and moving the powdered raw material 10 to the lower side of the container, a probe 150 provided under the press 130, and a hopper ( It may include a driving unit 160 for driving the press 130 up and down and rotationally driving the press 130 provided on the outer upper part of the 100).

The second container 200 includes a horizontal channel 210 extending in one direction, for example, in a horizontal direction, and a transfer pipe 221 for transferring the raw material powder supplied from the hopper 100 downward. The conveying pipe 221 is a passage for supplying the powdered raw material 10 to the conveying gas to an external device, and its upper side communicates with a gas supply unit (not shown) that supplies an inert gas such as _{Ar, N 2, and the lower side thereof.} It is connected to an external device (not shown) to supply the silver powder raw material 10, for example, a chamber in which a thin film deposition process is performed. In addition, it is preferable that a valve 222 is installed between the transfer pipe 221 and the gas supply unit to regulate the supply flow of gas. The horizontal channel 210 and the transfer pipe 221 may be configured by passing through a single member, or by passing through a separate member and then combining them. On the other hand, in order to prevent leakage of the powdered raw material 10 supplied into the horizontal channel 210, a first sealing member 410 such as a quad-ring is provided at the outer periphery of the transfer shaft 300. It may be installed, and a second sealing member 420 such as a bellows may be installed outside the end of the horizontal channel 210 into which the transfer shaft 300 is inserted.

A part of the transfer shaft 300 is inserted into the horizontal channel 210 to reciprocate inside the horizontal channel 210, and the powder raw material 10 supplied from the hopper 100 is loaded on the transfer shaft 300. Thus, at least one transfer hole 310 for transferring through the transfer pipe 221 is provided. At this time, the transfer hole 310 is aligned with the outlet 112 when the powder raw material 10 is loaded, and is transferred to a position aligned with the transfer pipe 221 when the powder raw material 10 is discharged. In addition, the transfer hole 310 is provided in a shape in which the upper corner is round. In this way, the upper corner of the transfer hole 310 is formed to be round, so that the probe 150 of the hopper 100 is at least partially inserted into the transfer hole 310 or the transfer shaft 300 is moved, so that the probe 150 is transferred to the transfer hole ( When exiting from 310), the probe 150 may be moved along the upper corner. In addition, since the upper corner of the transfer hole 310 is formed to be round, an alignment margin between the probe 150 and the transfer hole 310 may be increased. That is, compared to the case where the upper portion of the transfer hole 310 is formed vertically, when the upper portion of the transfer hole 310 is formed to be round, the upper width of the transfer hole 310 becomes larger, so the alignment margin between the probe 150 and the transfer hole 310 Can increase. On the other hand, the outer diameter of the transfer shaft 300 is formed equal to or slightly smaller than the inner diameter of the horizontal channel 210, and is driven reciprocally while being rubbed along the inner wall of the horizontal channel 210 or supported by the inner wall of the horizontal channel 210 It is desirable to be. At this time, if the surface friction force between the transfer shaft 300 and the horizontal channel 210 is too large, foreign matter may be generated by the friction force, so at least one of them is preferably made of a material having a low surface roughness. For example, the transfer shaft 300 is preferably made of a ceramic material capable of lowering surface roughness through surface treatment or a Teflon-based fluororesin material having self-lubricating properties.

A reciprocating driving unit 500 including a cylinder 510 and a piston 520 reciprocally driven inside the cylinder 510 is disposed on the side of the second container 200, and a transfer shaft ( 300) one end is combined. The outer diameter of the piston 520 is formed equal to or slightly smaller than the inner diameter of the cylinder 510 and is driven reciprocally while being rubbed along the inner wall of the cylinder 510 or supported by the inner wall of the cylinder 510. At this time, if airtightness cannot be maintained by the piston 520 itself, an airtight member 530 such as a rubber ring may be additionally installed on the outer periphery of the piston 520 to further increase airtightness. The reciprocating drive unit 500 of the present embodiment is a means for reciprocating the transfer shaft 300 inserted into the horizontal channel 210 inside the horizontal channel 210, and any configuration is possible as long as the purpose thereof can be achieved. . For example, as shown in Figure 2, the reciprocating drive unit 500 is formed with an entrance 540 through which air enters and exits at one side of the cylinder 510, and the piston 520 according to the pressure change inside the cylinder 510 This may be configured in a pneumatic method that operates, and unlike this, it may be configured in a hydraulic method in which the piston 520 operates while fluid is in and out through the entrance 540. Further, it may be configured with a linear motor or the like capable of converting rotational motion into linear motion.

Meanwhile, in the present invention, a heating member (not shown) may be provided on the side of the hopper 100. The heating member removes moisture contained in the powder raw material 10 by heating the powder raw material 10 stored in the hopper 100 to a predetermined temperature, for example, 100° C. It serves to prevent clogging. Therefore, it is possible to prevent agglomeration and clogging caused by excessive moisture contained in the powder raw material 10, and thus, even when the powder raw material 10 is in a small amount, it can be quantitatively and accurately controlled and supplied. Meanwhile, for this purpose, a heating member may be further provided to heat at least one of the transfer pipe 231 and the gas supply unit.

A method of operating a raw material supply device including a hopper according to another embodiment of the present invention configured as described above will be described with reference to FIGS. 3 to 6 as follows.

First, as shown in FIG. 3, a predetermined amount of a powder raw material 10 is supplied into the container body 110. In this case, the powdered raw material 10 may be supplied through the inlet 122. However, in the absence of the inlet 122, the cover 120 may be removed, and a predetermined amount of the powdered raw material 10 may be supplied to the container body 110, and then the cover 120 may be recombined. In this case, the powder raw material 10 supplied to the container body 110 may be mixed, crushed, and compressed to have a dense structure suitable for a thin film process. Then, the press 130 is rotated using the driving unit 160, and accordingly, the screw 140 rotates to move the powder raw material 10 downward. In this case, the driving unit 160 may rotate the press 130 according to the direction of the screw 140. That is, when the screw 140 is provided to proceed to the right, the press 130 is rotated to the right to transfer the raw material powder 10 to the outlet 112 according to the traveling direction of the screw 140, and the screw 140 When provided to proceed to the left, the press 130 may be rotated to the left to transfer the raw material powder 10 to the discharge port 112 according to the moving direction of the screw 140. Here, the amount of the raw material powder 10 transferred to the outlet 112 can be adjusted by the contact area of the raw material powder 10 in contact with the press 130, the number of rotations of the press 130, the pitch interval of the screw 140, etc. I can. In addition, by operating the driving unit 160 in a pulse form to finely and precisely control the rotational speed of the press 130, a trace amount of raw material powder 10 can be transferred. On the other hand, the probe 150 at the lower side of the press 130 is spaced apart from the side surface of the transfer shaft 300, and at least a part of the probe 150 is inserted into the press 130.

In addition, as shown in FIG. 4, the transfer shaft 300 is moved so that the transfer hole 310 is aligned with the outlet 112. At this time, as shown in FIG. 5, the probe 150 is completely protruded from the press 130 and at least partially is inserted into the outlet 112, and the transfer hole 310 along the rounded upper corner of the transfer hole 310 Is inserted into That is, if the probe 150 protrudes from the press 130 before the outlet 112 and the transfer hole 310 are completely aligned, the probe 150 is the transfer hole 310 as shown in FIG. 5(a). It is inserted into the transfer hole 310 along the rounded upper corner of the. Subsequently, as shown in FIG. 5B, the transfer shaft 300 is further moved so that the probe 150 is completely inserted into the transfer hole 310. Accordingly, it is determined that the outlet 112 and the transfer hole 310 are aligned. When the transfer hole 310 and the discharge port 112 are aligned in this way, the driving unit 160 moves the press 130 downward to apply pressure to the discharge port 112 by the press 130. Accordingly, the powdered raw material 10 collected in the outlet 112 can be smoothly discharged to the transfer hole 310 by the pressure of the press 130.

Subsequently, as shown in FIG. 6, when the powder raw material 10 is filled in the transfer hole 310, the transfer shaft 300 moves so that the transfer hole 310 forms a straight line with the transfer port 131. At this time, before the transfer shaft 300 is moved, the press 120 is moved upward and the probe 150 is inserted into the press 120. However, if the transfer shaft 300 is moved before the probe 150 is inserted into the press 120, the probe 150 may be bent along the upper corner rounded by the transfer hole 310. Meanwhile, a transfer gas for transferring the powdered raw material 10 to an external device may be supplied to the upper side of the transfer port 131. Accordingly, the quantitative powder raw material 10 filled in the transport hole 310 is mixed with the transport gas and discharged through the lower side of the transport port 131 and then supplied to an external device requiring the powder raw material 10.

As described above, in the raw material supply device according to an embodiment of the present invention, a press 130 that can move up and down and rotatable in the hopper 100 and a screw 140 outside the press 130 are provided, and the screw 140 After moving the powdered raw material 10 downward using the rotation of the powder raw material 10 by using a press 130, the pressure is applied to the powder raw material 10 and discharged. Therefore, by applying pressure to the powder raw material 10 and discharging it, it is possible to smoothly discharge the organic powder raw material having good coagulation. In addition, the amount of the powder raw material may be quantitatively controlled and supplied according to the contact area between the press 130 and the powder raw material 10, the pitch interval of the screw 140, and the inner volume of the transfer hole 310.

On the other hand, the raw material supply apparatus according to the present invention may supply at least two powder raw materials sequentially or simultaneously, including a hopper for storing and supplying at least two powder raw materials, respectively, and a transport shaft having at least two transport holes. For example, at least two or more hoppers are provided for storing and supplying at least two or more raw material powders respectively, and at least two or more transfer holes are provided in the transfer shaft inserted into the horizontal channel, so that the raw material powder supplied from each of the hoppers can be supplied. have. In such a raw material supplying device, when one raw material powder is filled in one transport hole of the transfer shaft, the other raw material powder in the other transport hole is transferred to an external device along the transport pipe, and when the other raw material powder is filled in the other transport hole, one transport hole is filled. One raw material powder is transferred to an external device along the transfer pipe. That is, in accordance with the horizontal reciprocating motion of the transfer shaft, one filling of the raw material powder and the other feeding of the raw material powder are repeated. Accordingly, it is possible to repeat the filling of one raw material powder and the supply of the other raw material powder by the reciprocating motion of the transfer shaft, so that a thin film formed of at least two or more raw materials can be easily formed using a single raw material supply device.

Although the technical idea of the present invention has been described in detail according to the above embodiment, it should be noted that the above embodiment is for the purpose of description and not for the limitation thereof. In addition, those skilled in the art in the technical field of the present invention will be able to understand that various embodiments are possible within the scope of the technical idea of the present invention.

100: hopper 110: container body
120: cover 130: press
140: screw 150: probe
200: second container 300: transfer shaft
410, 420: sealing member 500: reciprocating drive unit

Claims (17)

A first container for storing powdered raw materials and provided with an outlet;
A transfer unit provided in the first container to move the powdered raw material to the discharge port; And
It extends from the transfer unit, and includes a powder volume control unit for adjusting the amount of the powder raw material accommodated in the outlet,
The transfer unit,
A press that is movable in at least one direction and is rotatable; And
Raw material supply device comprising a; screw provided outside the press.
The method according to claim 1,
Including; a second container that is movable and has a volume smaller than the first container to the powder raw material receiving portion,
The second container includes a horizontal channel extending in one direction and connected to the first container; And
The raw material supply device including a transfer shaft inserted into the horizontal channel, at least one transfer hole is formed. delete The raw material supply apparatus of claim 1, wherein the powder volume control unit includes a probe provided under the press and capable of being inserted and protruded into the press.
A container for storing powdered raw materials and provided with an outlet;
A press provided in the container, movable in at least one direction, and rotatable; And
Including a screw provided outside the press,
A raw material supply device for moving the powdered raw material to the discharge port by using the screw by rotation of the press, and applying pressure to the powder raw material by the movement of the press to discharge it.
The raw material supply apparatus according to claim 5, further comprising a probe provided under the press and capable of being inserted and protruded into the press.
The method as set forth in claim 6, further comprising: a horizontal channel extending in one direction and connected to the at least one container; And
Further comprising a transfer shaft inserted into the horizontal channel, at least one transfer hole is formed,
The feed shaft is reciprocated within the horizontal channel to fill the at least one feed hole with the raw material powder or to be supplied to an external device.
delete The raw material supplying device of claim 7, wherein at least a portion of the probe is inserted into the press, protruded outside the press, and inserted into the conveying hole. delete delete delete delete delete delete delete delete

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