KR102180087B1 - Smart automated sample stage - Google Patents

Abstract

The present invention relates to a smart automated sample stage used to stably place a sample when scanning a sample surface using an atomic force microscope.
The present invention is equipped with an XY coordinate control function and a rotation function and a 360° omnidirectional inclination control function in order to solve the disadvantage of having to finely focus at the time whenever the observation area is moved if the surface of the sample is not flat during the experiment. By implementing a new sample stage with the addition of, in the case of samples whose surface is inclined in one direction, the surface is flattened using the tilt control function, and then the surface can be smoothly observed without fine focus adjustment. While enabling accurate experimentation, by implementing a new sample stage with XY coordinate control function, rotation function, and 360° omnidirectional tilt control function as well as automatic coordinate tracking function, the part that enters the field of view of the lens after rotation of the sample is changed. In this case, a smart automated sample stage that can further increase the efficiency of the experiment, such as finding the existing observation site and allowing the position of the sample to be automatically adjusted after rotation, without the need to manually adjust the position of the sample. to provide.

Description

Smart automated sample stage}

The present invention relates to a smart automated sample stage, and more particularly, to a stage used to stably arrange a sample when scanning a sample surface using an atomic force microscope.

In general, Atomic Force Microscopy (AFM) is a device that determines the shape of a sample surface by measuring the interaction force between atoms generated when a fine probe is brought close to the sample surface.

While electron microscopes are usually operated only in a vacuum state, an atomic force microscope can be used in the atmosphere, and potential demand is gradually increasing as it can find not only the shape of the sample surface but also the electromagnetic and physical properties of the sample.

When scanning the surface of a sample with such an atomic force microscope, the stage plays an important role in the placement of the sample. In particular, the stage applied to an atomic force microscope that can measure the shape in micrometers or nanometers should be easy to mount the sample. , It is required to enable a stable scan when scanning a sample, and various functions such as being able to move in various directions such as a straight line or rotation are required.

In the case of the existing AFM sample stage, products that can automatically adjust linear and rotational motions using a motor have been suggested, but ferroelectrics that are currently emerging as they do not have the mechanism necessary to perform these two motions in combination. In research that requires omnidirectional observation of samples such as research, there is an inefficiency.

Most of the observable areas of atomic force microscopes are on the micrometer scale, but the displacement of the sample caused by rotation is relatively large, so it is impossible to track the coordinates of the sample that change after rotation unless linear and rotational motions work in combination.

For this reason, an unnecessary process of manually locating the sample again takes a lot of time.

In addition, when observing or manipulating a sample with a constant gradient change, it is unnecessary to focus the optical microscope of the atomic force microscope every time, and to solve this problem, an object that can compensate for the gradient is supported under the sample. It also leads to inaccurate results.

In the case of the commercially available AFM tilt-adjusted sample stage, 360° tilt adjustment is not possible without rotation of the observed sample, and in the case of the omnidirectional tilt adjustment of other measuring equipment, a hydraulic device is used. The size and height of the stage are very high, making it unsuitable for use as a sample stage for an atomic force microscope.

The shortcomings of the existing sample stage are summarized as follows.

1) When moving the sample in the X-Y axis direction, the sample must be moved manually.

2) To give rotation, draw a circle on a piece of paper, place a sample on it, and rotate it manually.

3) After rotation, observe the atomic force microscope and find the sample that has fallen out of the working range and move it back manually.

4) When observing and working on an inclined sample, the focus of the atomic force microscope must be adjusted according to the inclination.

Korean Patent Registration No. 10-1847357 Korean Patent Registration No. 10-1664379 Korean Patent Registration No. 10-1400289 US registered patent US 8089053

Therefore, the present invention was conceived in consideration of such points, and in order to solve the disadvantage of having to finely focus at the time whenever the observation area is moved if the surface of the sample is not flat during the experiment, the XY coordinate control function and rotation By implementing a new sample stage that is equipped with a function and added a 360° omnidirectional tilt control function, in the case of a sample whose surface is inclined in one direction, use the tilt control function to flatten the surface and then finely adjust the focus. Its purpose is to provide a smart automated sample stage that enables more efficient and accurate experiments, such as allowing smooth observation without the need.

In addition, another object of the present invention is to implement a new sample stage with an XY coordinate control function, a rotation function, and an automatic coordinate tracking function as well as a 360° omnidirectional inclination control function, so that the part that enters the field of view of the lens after rotation of the sample is changed. In this case, a smart automated sample stage that can further increase the efficiency of the experiment, such as finding the existing observation site and allowing the position of the sample to be automatically adjusted after rotation, without the need to manually adjust the position of the sample. It is in providing.

In other words, due to the characteristics of the atomic force microscope, the rotation function of the sample stage is essential because the result varies depending on the direction of observation, but the problem is that the part that enters the field of view of the lens after rotation is different. Need to adjust.

However, because the existing technology has limitations, the existing observation site was found by manually adjusting the position of the sample.

Accordingly, in the present invention, by storing an existing position and then adding a function that automatically adjusts the position to an existing observation site after rotation, the experiment can be conducted more efficiently.

In order to achieve the above object, the smart automation sample stage provided by the present invention has the following features.

The smart automation sample stage includes an X actuator that is supported on the base stage and provides power for the movement of the X control module and the X control module, and a Y that is supported on the X control module and is movable along the Y axis. A Y actuator that provides power for movement of the control module and the Y control module, a tilt rotation module that is supported on the Y control module and rotatable while having a first rack, and a first spur gear capable of meshing with the first rack. Tilt while having a tilt rotation actuator that provides power for rotation of the tilt rotation module while having, a tilt module supported on the tilt rotation module and capable of tilting while having a second rack, and a worm screw capable of interlocking with the second rack It consists of a structure including a tilt actuator that provides power for tilting the module.

Therefore, the smart automated sample stage has an XY coordinate control function, a rotation function, and a 360° omnidirectional inclination control function, so that the sample observation and operation can be performed easily, quickly and precisely, and the efficiency and accuracy of research and processes. There is a feature that allows you to increase the value.

This smart automation sample stage is supported on the tilt rotation module and has a rotation stage that is rotatable while having a third rack and a second spur gear that can be engaged with the third rack, and a rotation actuator that provides power for rotation of the rotation stage. It may further include.

In particular, the smart automation sample stage is installed in a structure that is elastically supported between the tilt module side and the tilt rotation module side, as well as a torsion spring that relieves backlash when tilting the tilt module, as well as between the Y control module and the tilt rotation module and tilt. It may further include a pair of cross roller rings which are disposed between the module and the rotation stage and guide the rotation of the tilt rotation module and the rotation stage.

In such a smart automation sample stage, the X actuator and Y actuator can apply a combination of a stepper motor and a ball screw.

In addition, the smart automation sample stage includes a pair of X cross roller guides that guide the movement of the X control module while being installed on the base stage, and a pair of Y cross roller guides that guide the movement of the Y control module while being installed on the X control module. It may further include a guide.

Here, it is preferable that the tilt and rotation module, the tilt module, and the rotation stage are disposed inside the center of the Y control module so as to lower the overall height of the sample stage.

In a preferred embodiment, it is preferable that the second rack of the tilt module has an arc-shaped gear tooth surface that is convex downward while forming a coaxial structure with the tilting center of the tilt module.

By applying the smart automated sample stage provided by the present invention, it is possible to completely eliminate the inefficient processes occurring in the field of research and work using an atomic microscope that has emerged in recent years, and thus the efficiency of the research process and work time as follows. And accuracy can be ensured.

1) Increase research efficiency

When observing and manipulating a sample, manually adjusting the rotation and tilt takes a lot of time inefficiently.

At this time, the smart automated sample stage can be used to automatically move to a desired location, and a location of interest in an atomic force microscope in use or a location of interest in another microscope can be entered and moved with one click whenever desired.

In addition, when rotating and tilting, you can easily adjust by automatically specifying the desired angle.

In addition, when rotating, the position of interest moved while rotating can be immediately called, and when the inclination is adjusted and observed, observation can be performed efficiently without a separate task of focusing on a plane with a constant inclination.

Observation and maneuvering can be made easier and faster in this way.

2) Improvement of research accuracy

Several studies using atomic force microscopy require accuracy within micrometers.

If the sample is manually adjusted, fine adjustment in micrometer units is impossible.

In addition, it is difficult to bring up accurate results if the rotation and tilt are manually adjusted in fine and precise studies such as piezoelectric devices and where the study results vary according to the direction and inclination of the sample.

The error can be reduced to within micrometers by automatically adjusting the rotation and tilt adjustments using a smart automated sample stage.

In addition, if the position is moved after rotation and tilt adjustment, the previously entered position of interest can be accurately moved.

When using such a smart automated sample stage, errors in research can be reduced and research and work can be carried out more precisely.

1 to 3 are perspective views showing a smart automated sample stage according to an embodiment of the present invention
4 is a perspective view showing a method of controlling XY coordinate movement in a smart automation sample stage according to an embodiment of the present invention
5 is a perspective view showing a rotation control method in a smart automated sample stage according to an embodiment of the present invention
6 and 7 are perspective views showing a method of controlling tilting (tilting) in a smart automated sample stage according to an embodiment of the present invention;
8 is a schematic diagram showing a sequence of an automatic tracking system in a smart automation sample stage according to an embodiment of the present invention

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

1 to 3 are perspective views illustrating a smart automated sample stage according to an embodiment of the present invention.

1 to 3, the smart automated sample stage includes an X control module 11 and an X actuator 12 as means for moving the sample in the X-axis direction.

The X control module 11 is in the form of a square plate, and is supported on the base stage 10 and installed in a structure capable of moving along the X-axis direction.

To this end, a pair of X cross roller guides 29 arranged side by side along the X-axis direction are installed on both sides of the upper surface of the base stage 10, and the X control module ( 11) is installed and supported.

Accordingly, when the X control module 11 moves in the X-axis direction, it can be accurately moved in a straight line while being guided by the X cross roller guide 29, and when linearly moving by the X cross roller guide 30 Roll, pitch, and yaw phenomena generated can be prevented.

In addition, the X ball thread 31 having a long hole is formed side by side at one side end of the X control module 11, and the long hole of the X ball thread 31 at this time is a ball screw of the X actuator 12 (12b) can be inserted through.

Accordingly, while the ball screw 12b is supported in the X ball thread 31 of the X control module 11, it can be freely supported around its own axis.

The X actuator 12 is an actuator that provides power for moving the X control module 11 in the X-axis direction, and is formed in the form of a combination of a stepper motor 12a and a ball screw 12b.

Here, the stepper motor 12a is installed on the motor support plate 32a formed on the base plate 10, and the ball screw 12b is a screw portion 12b-1 and a nut portion 12b-2. At this time, the screw part 12b-1 is inserted into the long hole of the X ball thread 31 in the X control module 11, and the nut part 12b-2 is after the X ball thread 31. It is fastened to the end, and the shaft of the stepper motor 12a and the rear end of the ball screw 12b are connected via a coupling 33.

Accordingly, by the operation of the X actuator 11, that is, the drive of the stepper motor 12a and the ball screw transmission of the ball screw 12b, the Y control module 13, the tilt rotation module 16, etc. The entire X control module 11 including a can be linearly moved back and forth along the X-axis direction.

In addition, the smart automation sample stage includes a Y control module 13 and a Y actuator 14 as means for moving the sample in the Y-axis direction.

The Y control module 13 is in the form of a square block, and is supported on the X control module 11 and installed in a structure capable of moving along the Y-axis direction.

To this end, a pair of Y cross roller guides 30 arranged side by side along the Y-axis direction are installed on both sides of the upper surface of the X control module 11, and the Y control module in the Y cross roller guide 30 installed in this way. (13) It is installed in a structure that is laid and supported.

Accordingly, when the Y control module 13 moves in the Y-axis direction, it can be accurately moved in a straight line while being guided by the Y cross roller guide 30, and when the Y cross roller guide 30 moves linearly Roll, pitch, and yaw phenomena generated can be prevented.

In addition, a Y ball thread 34 having a long hole is formed side by side at one side end of the Y control module 13, and the long hole of the Y ball thread 34 at this time is a ball screw of the Y actuator 14 (14b) can be inserted through.

Accordingly, while the ball screw 14b is supported in the Y ball thread 34 of the Y control module 13, it can be freely supported around its own axis.

The Y actuator 14 is an actuator that provides power for moving the Y control module 13 in the Y-axis direction, and is formed in a combination form of a stepper motor 14a and a ball screw 14b.

Here, the stepper motor 14a is installed on the motor support plate 32b formed on the X control module 11, and the ball screw 14b is a screw portion 14b-1 and a nut portion 14b-2. ), and the screw part 14b-1 at this time is inserted into the long hole of the Y ball thread 34 in the Y control module 13, and the nut part 14b-2 is the Y ball thread 34. It is fastened to the rear end, and the shaft of the stepper motor 14a and the rear end of the ball screw 14b are connected via a coupling 33.

Accordingly, by the operation of the Y actuator 14, that is, by driving the stepper motor 14a and the ball screw transmission of the ball screw 14b, a Y control module including a rotation and tilt module 16, which will be described later ( 13) The whole can be moved linearly back and forth along the Y-axis direction.

In particular, in the Y control module 13, a space portion 35 formed of a circular hole structure vertically penetrating the block center region is formed, and a tilt rotation module 16 to be described later in the space portion 35 thus formed. , The rotation stage 24 and the like can be inserted and arranged.

Here, a stepped portion 36 is formed on the inner circumferential surface of the space portion 35, and a cross roller ring 28 is installed on the stepped portion 36 at this time, and tilted on the cross roller ring 28 installed in this way. The module 16 can be mounted and supported.

For example, the outer ring of the cross roller ring 28 is fixed to the step portion 36 of the Y control module 13, and the edge of the tilt rotation module 16 is fixed to the inner ring of the cross roller ring 28. The wing part can be put on and supported.

Accordingly, the tilt rotation module 16 is supported by the cross roller ring 28 to receive guidance during rotational movement, and in addition, a wobble phenomenon that may occur during rotational movement is prevented. It is possible to increase the precision of the rotational motion.

In addition, a groove 37 is formed on one side of the space 35 on the bottom of the Y control module 13, and a tilt rotation actuator 22, which will be described later, is installed in the groove 37 formed in this way. You will be able to.

In addition, the smart automation sample stage includes a tilt rotation module 16 and a tilt rotation actuator 18 as a means for rotating a sample in a tilted posture.

The tilt rotation module 16 supports the tilt module 20 and the rotation stage 24 and rotates them.

To this end, the tilt and rotation module 16 has a circular plate shape that takes a horizontal position, and is inserted concentrically in the interior of the space 35 formed in the Y control module 13, and the space 35 It is installed in a rotatable structure while being supported by being placed on the stepped portion 36 in ).

A circular first rack 15 is formed on the bottom surface of the tilt rotation module 16 along the periphery, and the first rack 15 at this time is the first spur gear 17 of the tilt rotation actuator 18 It will be able to mesh with.

In addition, a square box-shaped actuator housing 38 with an open top is formed on one side of the bottom of the tilt rotation module 16, and a tilt actuator 22, which will be described later, is inserted into the actuator housing 38 formed in this way. Can be installed.

In addition, on the upper surface of the tilt rotation module 16, a pair of shaft brackets 39 are vertically formed on both sides with the open portion of the actuator housing 38 interposed therebetween, and between the shaft brackets 39 on both sides. In addition, the second rack 19 of the tilt module 20 is positioned therein, and the second rack 19 positioned in this manner can be fastened together with the shaft bracket 39 by the tilt shaft 40.

The tilt rotation actuator 18 is a means for providing power for rotation of the tilt rotation module 16, and a stepper motor or the like can be applied as the tilt rotation actuator 18 at this time.

This tilt rotation actuator 18 is installed in a structure supported in the groove 37 formed in the Y control module 13, and a first spur gear 17 is provided on the axis of the tilt rotation actuator 18 installed in this way. In addition to being mounted, the first spur gear 17 at this time can be engaged with the first rack 15 in the tilt rotation module 16.

Accordingly, when the tilt rotation actuator 18 is operated, a tilt rotation module including a tilt module 20, a rotation stage 24, etc. is performed by a meshing transmission between the first spur gear 17 and the first rack 15 ( 16) The whole can be rotated around its own axis.

In addition, the smart automated sample stage includes a tilt module 20 and a tilt actuator 22 as means for tilting the sample.

The tilt module 20 serves to tilt the rotation stage 24 as well as the sample placed thereon while supporting the rotation stage 24.

To this end, the tilt module 20 has a circular plate shape having a circular rack housing 41 protruding upward in the center, and teeth are formed inside the rack housing 41 at this time. A second rack 19 having a semicircular cross section in which the outer circumferential surface is arranged in parallel along the tilting direction is formed, and the second rack 19 formed in this way can be engaged with the worm screw 21 of the tilt actuator 22. There will be.

Here, the second rack 19 of the tilt module 20 forms a coaxial structure with the tilting center of the tilt module 20 (a portion where the tilt axis is coupled), and a gear tooth surface convex downwards. Surface), and thus, when the tilt module 20 is tilted, the second rack 19 can always perform an electric action while maintaining a meshing relationship with the worm screw 21.

The tilt module 20 is concentrically inserted into the interior of the space 35 formed in the Y control module 13 and arranged parallel to the top of the tilt rotation module 16 and tilts up and down. It is installed as.

For example, the tilt module 20 is horizontally arranged parallel to the top of the tilt rotation module 16, and the second rack 19 in the tilt module 20 at this time is in the tilt rotation module 16. It is located between the shaft brackets 39 on both sides, and in this state, the tilt shaft 40 is horizontally fastened to the rack housing 41, the second rack 19, and the shaft bracket 39, so that the tilt module ( 20) is supported by the shaft bracket 39 and can be tilted up and down using the tilt shaft 40 as a rotational center axis.

The tilt actuator 22 is a means for providing power for tilting the tilt module 20, and a stepper motor or the like can be applied as the tilt actuator 22 at this time.

The tilt actuator 22 is installed in a structure supported in the actuator housing 38 formed in the tilt rotation module 16, and a horizontal posture worm screw 21 is located on the axis of the tilt actuator 22 installed in this way. In addition to being mounted, the worm screw 21 at this time can be engaged with the second rack 19 in the tilt module 20.

Therefore, when the tilt actuator 22 is operated, the entire tilt module 20 including the rotating stage 24 is driven by the meshing motion between the worm screw 21 and the second rack 19. It can be tilted (rotated) around the center.

In addition, the smart automation sample stage includes a pair of cross roller rings 28 as means for assisting the stable rotational movement of the tilt rotation module 16 and the rotation stage 24.

These cross roller rings 28 are disposed between the Y control module 13 and the rotation and tilt module 16 and between the tilt module 20 and the rotation stage 24, respectively, and the tilt rotation module 16 and the rotation stage 24 ) To guide the rotation.

To this end, one of the two cross roller rings 28 is installed between the Y control module 13 and the rotation and tilt module 16, and the outer of the cross roller ring 28 installed in this way The ring is placed on and fixed to the stepped portion 36 formed in the space portion 35 of the Y control module 13, and the rotation and tilt module 16 is placed on the inner ring.

In addition, the remaining one cross roller ring 28 is installed between the tilt module 16 and the rotation stage 24, and the outer ring of the cross roller ring 28 installed in this way is placed on the tilt module 16 side and fixed. In addition, the rotating stage 16 is placed on the inner ring.

Accordingly, when the tilt rotation module 16 and the rotation stage 24 rotate, the tilt rotation module 16 and the rotation stage 24 can be stably rotated while receiving rotation guidance of each inner ring in contact therewith. In addition, it is possible to increase the precision of the rotational movement by preventing a wobble phenomenon that may occur during the rotational movement.

In addition, the smart automation sample stage includes a torsion spring 27 as a means for mitigating backlash when tilting the tilt module 20.

The torsion spring 27 is installed in a structure that is elastically supported between the tilt module 20 side and the tilt rotation module 16 side, and serves to alleviate the backlash when tilting the tilt module 20.

For example, the torsion spring 27 is disposed around a tilt axis 40 that serves as a central axis when tilting the tilt module 20, and one end of the torsion spring 27 disposed in this way is a tilt module On the bottom surface of 20, the other end is supported on the upper surface of the tilt rotation module 16, respectively.

In this way, since the elastic force exerted by the torsion spring 27 installed between the tilt module 20 and the tilt rotation module 16 acts on the tilt module 20 side and the tilt rotation module 16 side, the tilt module ( When tilting 20), backlash can be reduced.

In addition, the smart automated sample stage includes a rotating stage 24 and a rotating actuator 26 as means for mounting and rotating the sample.

The rotation stage 24 is a circular cap shape taking a horizontal posture, and a circular third rack 23 disposed along the periphery is formed inside, and at the same time, the third rack 23 is a rotary actuator 26 ) Can be engaged with the second spur gear 25.

This rotation stage 24 is inserted and disposed concentrically on the innermost side of the space 35 formed in the Y control module 13 and a cross roller ring 28 disposed on the upper side of the tilt module 20. ), and is installed in a rotatable structure while being supported.

That is, the outer ring of the cross roller ring 28 is fixedly installed on the tilt module 20, and the rotation stage 24 is placed and supported on the inner ring at this time, and accordingly, the rotation stage 24 is a cross roller ring ( As it is supported by the inner ring of 28), it is possible to receive guidance during the rotational movement, and in addition, the wobble phenomenon that may occur during the rotational movement is prevented, thereby increasing the precision of the rotational movement.

The upper surface of the rotating stage 24 installed in this way is exposed to the outside, and the sample can be mounted on the exposed upper surface at this time.

The rotation actuator 26 is a means for providing power for rotation of the rotation stage 24, and a stepper motor or the like can be applied as the rotation actuator 26 at this time.

This rotation actuator 26 is installed in a structure supported on the upper surface of the tilt module 20, and a second spur gear 25 is mounted on the shaft of the rotation actuator 26 installed in this way, and the second spur gear at this time. 25 is able to engage the second rack 23 on the rotating stage 24.

Therefore, when the rotation actuator 26 is operated, the rotation stage 24 as well as the sample placed thereon are centered on its own axis by the meshing transmission between the second spur gear 25 and the second rack 23. It can be rotated.

In particular, the tilt rotation module 16, the tilt module 20 and the rotation stage 24 belonging to the smart automation sample stage are formed inside the center of the Y control module 13, that is, in the center of the Y control module 13 It can be disposed in the space portion 35, whereby the overall height of the sample stage can be lowered and the size of the sample stage can be reduced, and as a result, advantageous points in terms of handling as well as space occupancy can be obtained.

4 is a perspective view showing a method for controlling movement of X-Y coordinates in a smart automation sample stage according to an embodiment of the present invention.

As shown in FIG. 4, when the stepper motors 12a and 14a of the X actuator 12 and the Y actuator 14 are operated for XY coordinate control, the ball screw 12b connected by the coupling 33 As power is transmitted to 14b), the X control module 12 and the Y control module 13 are respectively moved in the X-axis direction and the Y-axis direction.

At this time, detailed operation is possible through the ball screw (12b, 14b) and the precision is increased.

When the X control module 12 and the Y control module 13 move along the ball screws 12b and 14b, a perfect straight movement is achieved by the X cross roller guide 29 and the Y cross roller guide 30 on both sides. It becomes possible and has a more precise movement.

Two of these mechanisms can be installed on each floor to control movement in the X and Y axes, respectively.

5 is a perspective view showing a rotation control method in a smart automated sample stage according to an embodiment of the present invention.

As shown in Fig. 5, here is a state in which the rotating stage 24 is rotated.

That is, when the rotary actuator 26 is operated, the second spur gear 25 and the third rack 23 on the actuator side are engaged and rotated, so that the rotary stage 24 can be rotated. It is possible to control the rotation of the placed sample.

6 and 7 are perspective views illustrating a method of controlling tilting (tilting) in a smart automated sample stage according to an embodiment of the present invention.

As shown in FIGS. 6 and 7, when the worm screw 21 in the shaft of the tilt actuator 22 is rotated, the power at this time is transmitted to the second rack 19 engaged with the worm screw 21, Therefore, the tilt module 20 and the rotation stage 24 thereon are inclined.

In this state, a rotation stage inclined through transmission between the first spur gear 17 and the first rack 15 while preventing backlash using the torsion spring 27 and operating the tilt rotation actuator 18 The tilt rotation module 16 including (16) and the tilt module 20 is rotated to obtain a 360° omnidirectional tilt.

At this time, by rotating the rotation stage 24 in the opposite direction to the tilt rotation module 16 through the operation of the rotation actuator 26 and the transmission between the second spur gear 25 and the third rack 23, the sample between tilt rotation Prevent rotation.

As an example, in this tilt mechanism, the rotating stage 24 can be tilted by "moving by an angle within 10 degrees of tilt" when the tilting command is performed, and 360 degrees can be adjusted in all directions.

This tilt adjustment mechanism was placed in the center of the X-Y position adjustment mechanism to lower the height, and circular cross roller rings 28 were placed above and below the tilt adjustment mechanism to enable 360° tilt adjustment in all directions.

8 is a schematic diagram showing a sequence of an automatic tracking system in a smart automation sample stage according to an embodiment of the present invention.

As shown in Fig. 8, the automatic coordinate adjustment system includes a program for X-Y coordinate control and rotation and tilt control.

After moving to the desired point, eg "X:400, Y:340" coordinates, register the coordinates.

Up to 100 can be registered and can be recalled when desired.

When a rotational motion for observation from a different angle is commanded, the positions of the registered coordinates are changed. At this time, the registered coordinates can be calculated and moved easily through the command.

Coordinate tracking is performed based on the coordinate registration history.

With this program, you can study the samples in changed directions.

As an example of an automatic coordinate adjustment system, when a "move to previous position" command is entered, the position is tracked using the input record (using rotation angle and relative coordinates), and automatically moves to the recorded position, from the previous position. It can be observed from different angles.

As an example of specifying absolute and relative coordinates, the command "Move to X:, Y: (absolute coordinates)" → save the point being observed as relative coordinates [P1:(, ), P2:(, ), ---, P100:(, )]→Rotate for observation from different angles→Rotate to desired angle→Track coordinates with the rotated angle and stored relative coordinates→Move to the point that was being observed→ Observe the same point from a different angle (new opponent If you command "Move to P1" from the coordinates, you can place the sample at the desired XY coordinates through the process of moving from the new relative coordinates to P1), and you can observe it while tilting 360° in all directions.

As described above, the smart automation sample stage of the present invention can be adjusted to a smaller scale movement through more precise stepper motors, gears, and ball screws, and through smaller stepper motors, gears, ball screws, and cross roller bearings. Smaller and lower sample stages allow for scale improvement.

In addition, the smart automation sample stage of the present invention is a fully automated sample stage. By connecting a communication device (Bluetooth or Wi-Fi Internet connection, etc.) to the sample stage in addition to improving the quality of research based on future convergence with the ICT industry, Also, it is possible to improve the environment of research such as remote control of the sample stage.

10: base stage
11: X control module
12: X actuator
13: Y control module
14: Y actuator
15: first rack
16: tilt rotation module
17: first spur gear
18: tilt rotation actuator
19: second rack
20: tilt module
21: worm screw
22: tilt actuator
23: third rack
24: rotating stage
25: second spur gear
26: rotary actuator
27: torsion spring
28: cross roller ring
29: X cross roller guide
30: Y cross roller guide
31: X ball thread
32a,32b: Motor support plate
33: coupling
34: Y ball thread
35: space part
36: step portion
37: groove
38: actuator housing
39: shaft bracket
40: tilt axis
41: rack housing

Claims (10)

An X actuator 12 that provides power for moving the X control module 11 and the X control module 11 while being supported on the base stage 10 and movable along the X axis;
A Y control module 13 supported on the X control module 11 and movable along the Y axis and a Y actuator 14 providing power for movement of the Y control module 13;
A tilt rotation module 16 supported on the Y control module 13 and rotatable while having a first rack 15 and a first spur gear 17 capable of meshing with the first rack 15 A tilt rotation actuator 18 providing power for rotation of the rotation module 16;
The tilt module 20 is supported on the tilt rotation module 16 and has a tilt module 20 capable of tilting while having a second rack 19 and a worm screw 21 capable of meshing with the second rack 19. ) A tilt actuator 22 providing power for tilting;
A rotating stage having a rotating stage 24 supported on the tilt rotating module 16 and rotatable while having a third rack 23 and a second spur gear 25 capable of meshing with the third rack 23 A rotation actuator 26 providing power for rotation of 24;
As long as they are disposed between the Y control module 13 and the tilt rotation module 16 and between the tilt module 20 and the rotation stage 24, respectively, to guide the rotation of the tilt rotation module 16 and the rotation stage 24 Including; a pair of cross roller rings 28;
A pair of shaft brackets 39 are vertically formed on the upper surface of the tilt and rotation module 16, and a circular rack housing 41 protruding upward is provided in the center of the tilt module 20, and the shaft Between the brackets 39, a second rack 19 having a semicircular cross section that forms a coaxial structure with the tilting center of the tilt module 20 and includes an arc-shaped gear tooth surface that is convex downwards is arranged in the tilting direction. Accordingly, the rack housing 41 is arranged side by side inside the rack housing 41, and the rack housing 41, the second rack 19, and the shaft bracket 39 are horizontally fastened by the tilt shaft 40,
The tilt module 20 is a smart automated sample stage, characterized in that the tilt module 20 is supported by the shaft bracket 39 and tilts up and down using the tilt shaft 40 as a rotational center axis.

delete The method according to claim 1,
It characterized in that it further comprises a torsion spring 27 that is installed in a structure that is elastically supported between the tilt module 20 side and the tilt rotation module 16 side to alleviate backlash when tilting the tilt module 20 Smart automation sample stage.
delete The method according to claim 1,
The X actuator 12 is a smart automation sample stage, characterized in that consisting of a stepper motor (12a) and a ball screw (12b).
The method according to claim 1,
The Y actuator 14 is a smart automation sample stage, characterized in that consisting of a stepper motor (14a) and a ball screw (14b).
The method according to claim 1,
Smart automation sample stage, characterized in that it further comprises a pair of X cross roller guides (29) installed on the base stage (10) and guiding the movement of the X control module (11).
The method according to claim 1,
Smart automated sample stage, characterized in that it further comprises a pair of Y cross roller guides (30) installed on the X control module (11) and guiding the movement of the Y control module (13).
The method according to claim 1,
The tilt and rotation module (16), the tilt module (20) and the rotation stage (24) are arranged inside the center of the Y control module (13) to lower the height of the smart automated sample stage. delete

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