KR102179334B1 - Resin molded product manufacturing apparatus, resin molding system, and resin molded product manufacturing method - Google Patents

Abstract

The present invention relates to an apparatus for manufacturing a resin molded article, a resin molded system, and a method for manufacturing a resin molded article, which can simplify the device configuration and widen the usable pressurization range. The apparatus for manufacturing a resin molded article allows the second platen to be moved in the vertical direction by an elevating mechanism, and moves the intermediate plate in the vertical direction through an interlocking mechanism along with the motion of the arm mounted on the second platen. Make it possible.

Description

Resin molded product manufacturing device, resin molding system, and resin molded product manufacturing method {RESIN MOLDED PRODUCT MANUFACTURING APPARATUS, RESIN MOLDING SYSTEM, AND RESIN MOLDED PRODUCT MANUFACTURING METHOD}

The present invention relates to an apparatus for producing a resin molded product, a resin molding system, and a method for producing a resin molded product.

For example, in Japanese Unexamined Patent Application Publication No. 2014-233882 (Patent Document 1), a ball screw mechanism for closing a mold with a first closing force between a fixed platen in connection with a movable platen and a movable ball screw mechanism A resin mold apparatus having a toggle link mechanism for holding the final resin pressure by closing the mold with a second closing force in which the clamping force is further strengthened than the first closing force in connection with the platen is disclosed.

Patent Document 1: Japanese Unexamined Patent Publication No. 2014-233882

However, since it is necessary to assemble two mechanisms of a ball screw mechanism and a toggle link mechanism in the resin mold apparatus described in Patent Document 1, the apparatus configuration is complicated.

In addition, in the toggle link mechanism of the resin mold device described in Patent Document 1, since the force applied to the resin molding object increases rapidly when a plurality of connected link members are approached in a linear state from a bent state at the connection portion, it can be used. The pressure range is narrowed, and the thickness of the lead frame and the like included in the resin molding object is limited.

According to the embodiment disclosed herein, the first platen, a pair of press frames fixed to the first platen so as to be spaced apart in a horizontal direction while extending vertically downward of the first platen, and the first platen And a second platen facing each other and spaced apart in a vertical direction, an intermediate plate between the first platen and the second platen, an elevating mechanism configured to enable the second platen to move in the vertical direction, and the second platen An arm extending in one direction to which one end is connected is provided, and a first bearing member, a second bearing member, and a third bearing member are mounted in this order from one end to the other end of the arm, and a first bearing member is attached to one end of the arm. The first block is mounted through the bearing member, the first bearing member is movably disposed within the first opening of the first block, the first block is connected to the second platen, and With the movement in the vertical direction, one end of the arm can be moved so as to draw an arc between the top dead center and the bottom dead center with the center of the third bearing member at the other end of the arm as a point. Between the second block is mounted through the second bearing member, the second bearing member is disposed to be movable inside the second opening of the second block, and the intermediate plate and the intermediate plate to interlock the second block It is possible to provide an apparatus for manufacturing a resin molded article in which an interlocking mechanism is connected between the second block and the intermediate plate is movable in the vertical direction through the interlocking mechanism in accordance with the operation of the arm.

According to the embodiment disclosed herein, it is possible to provide a resin molding system provided with the apparatus for producing a resin molded article described above.

According to the embodiment disclosed herein, it is possible to provide a method for manufacturing a resin molded article using the apparatus for manufacturing a resin molded article described above.

The above and other objects, features, aspects and advantages of the present invention will become apparent from the following detailed description of the present invention, which is understood in connection with the accompanying drawings.

1 is a schematic elevational view of a main part of an apparatus for manufacturing a resin molded article according to an embodiment.
2 is a schematic side perspective view of a main part of the apparatus for manufacturing a resin molded article according to the embodiment shown in FIG. 1.
3 is a schematic perspective view of a main part of the apparatus for manufacturing a resin molded article according to the embodiment shown in FIG. 1.
Fig. 4 is a schematic perspective perspective view of an enlarged main part of the apparatus for manufacturing a resin molded article according to the embodiment shown in Fig. 3.
5 is a schematic enlarged cross-sectional view taken along VV in FIG. 4.
6 is a schematic side perspective view of a main part of the apparatus for manufacturing a resin molded article of the embodiment shown in FIGS. 2 to 4.
7 is a schematic perspective perspective view illustrating a part of a manufacturing process in the method for manufacturing a resin molded article of the embodiment.
8 is a schematic side perspective view illustrating a part of a manufacturing process in the method for manufacturing a resin molded article of the embodiment.
9 is a schematic perspective view of a first mold holder and a second mold holder shown in FIGS. 7 and 8;
10 is a schematic cross-sectional view illustrating a part of a manufacturing process in a method for manufacturing a resin molded article of the embodiment.
11 is a schematic cross-sectional view illustrating a part of a manufacturing process in the method for manufacturing a resin molded article of the embodiment.
12 is a schematic cross-sectional view illustrating a part of a manufacturing process in the method for manufacturing a resin molded article of the embodiment.
13 is a schematic plan view of the resin molding system of the embodiment.
14 is a schematic cross-sectional view illustrating a part of a manufacturing process in the method for manufacturing a resin molded article of the embodiment.
15 is a schematic cross-sectional view illustrating a part of a manufacturing process in the method for manufacturing a resin molded article of the embodiment.
16 is a schematic perspective perspective view illustrating a part of a manufacturing process in the method for manufacturing a resin molded article of the embodiment.
17 is a schematic side perspective view illustrating a part of a manufacturing process in the method for manufacturing a resin molded article of the embodiment.
Fig. 18 is a schematic perspective perspective view in which a main part of the apparatus for manufacturing a resin molded article according to the embodiment shown in Fig. 17 is enlarged.
19 is a schematic perspective perspective view illustrating a part of a manufacturing process in the method for manufacturing a resin molded article of the embodiment.
20 is a schematic side perspective view illustrating a part of a manufacturing process in the method for manufacturing a resin molded article of the embodiment.
Fig. 21 is a schematic perspective perspective view of an enlarged main part of the apparatus for manufacturing a resin molded article according to the embodiment shown in Fig. 20;
22 is a schematic cross-sectional view illustrating a part of a manufacturing process in the method for manufacturing a resin molded article of the embodiment.
Fig. 23 is a schematic side view illustrating a moving distance of a first bearing member within a first opening when moving between a top dead center and a bottom dead center of a power point, which is one end of an arm.
Fig. 24 is a schematic side view illustrating a moving distance of a second bearing member within a second opening when moving between a top dead center and a bottom dead center of an intensified point, which is one end of an arm.
25 is a schematic cross-sectional view illustrating a part of a manufacturing process in the method for manufacturing a resin molded article of the embodiment.
Fig. 26 is a schematic plan view illustrating an example of a positional relationship between a ball screw and a servo motor of the apparatus for manufacturing a resin molded article of the embodiment.
Fig. 27 is a schematic plan view illustrating an example of a positional relationship between a ball screw and a servo motor of the apparatus for manufacturing a resin molded article of the embodiment.

Hereinafter, embodiments will be described. In addition, in the drawings used in the description of the embodiment, the same reference numerals denote the same or corresponding parts.

1 is a schematic elevational view of a main part of an apparatus for manufacturing a resin molded article according to an embodiment. As shown in FIG. 1, the apparatus 1 for manufacturing a resin molded article according to the embodiment includes a first platen 11, a second platen 12, and a third platen 13 . One end of a pair of press frames 17 is fixed to the first platen 11 so as to extend vertically downward of the first platen 11 and to have an interval in the horizontal direction. The other ends of the pair of press frames 17 are fixed to each of both ends of the third platen 13. Further, the first platen 11, the third platen 13, and the press frame 17 may be integrally formed as, for example, a casting.

In the region between the first platen 11 and the third platen 13 in the extending direction (vertical direction) of the press frame 17, the first platen 11 and the third platen 13 The second platen 12 is arranged so as to be spaced apart from each other and to face each of the first platen 11 and the third platen 13.

In the region between the first platen 11 and the second platen 12 in the extending direction of the press frame 17, a distance between the first platen 11 and the second platen 12 The intermediate plate 91 is disposed so as to float and face each of the first platen 11 and the second platen 12.

In the region between the second platen 12 and the third platen 13 in the extending direction of the press frame 17, while one end is fixed to the second platen 12, the third platen 13 A pair of ball screws 100 with the other end fixed to) are disposed. In this embodiment, the ball screw 100 functions as a lifting mechanism that enables the second platen 12 to move in the vertical direction. The ball screws 100 are arranged at intervals from each other in the horizontal direction, respectively.

The inner surface of one end of the plate-shaped lifter plate 103 is fixed to the intermediate plate 91 so as to extend vertically below the intermediate plate 91. Further, to the outer surface of the lifter plate 103, a linear rail 102, e.g., an elongated member extending vertically below the lifter plate 103, is fixed. On the other hand, on each of the pair of press frames 17, a plurality of linear motion blocks 101 are mounted at intervals from each other in the vertical direction. The plurality of linear motion blocks 101 are each fixed to a side wall portion of the press frame 17.

Here, the linear motion rail 102 is attached to each of the plurality of linear motion blocks 101 so as to be movable in the vertical direction. Therefore, the intermediate plate 91 can be moved vertically upward or vertically with the movement of the lifter plate 103 fixed to the intermediate plate 91 vertically upward or downward. The linear movement guide 150 is constituted by the linear movement rail 102 and the linear movement block 101. Moreover, the linear motion rail 102 can be attached to the press frame 17, and the linear motion block 101 can also be attached to the lifter plate 103.

In FIG. 2, a schematic side perspective view of a main part of the apparatus 1 for manufacturing a resin molded article according to the embodiment shown in FIG. 1 is shown. In addition, in FIG. 3, a schematic perspective view of a main part of the apparatus 1 for manufacturing a resin molded article of the embodiment shown in FIG. 1 is shown. In addition, in FIG. 4, a schematic perspective view in which the main part of the apparatus 1 for manufacturing a resin molded article of the embodiment shown in FIG. 3 is enlarged is shown.

As shown in FIG. 2, the apparatus 1 for manufacturing a resin molded article of the embodiment includes an inner plate 116 and an outer plate 118. On both sides of the inner plate 116, outer plates 118 extending in the vertical direction are disposed, respectively. A first concave portion 118a, which is a relatively large local horizontal recess, is provided in the upper and lower portions of each outer plate 118, and an outer plate between the two first recesses 118a in the vertical direction ( A second concave portion 118b, which is a relatively small local horizontal recess, is provided in the central portion of the 118. In the first concave portion 118a, an elastic member 113 such as a spring that can be extended and contracted in the vertical direction is disposed. The convex portion 116a is fitted in the second concave portion 118b via a spacer 117.

As shown in FIGS. 3 and 4, the apparatus 1 for manufacturing a resin molded article of the embodiment is provided with a lower linear guide 120. 3 and 4, the lower linear movement guide 120 includes a plurality of lower linear movement blocks 124 mounted so that the lower linear movement rail 123 and the lower linear movement rail 123 are movable in the vertical direction. It is equipped with. The plurality of lower linear motion blocks 124 are each fixed to an inner plate 116 extending in the vertical direction. The lower linear rail 123 is fixed to the lifter plate 103.

As shown in Figs. 2 to 4, the apparatus 1 for manufacturing a resin molded article according to the embodiment further includes an arm 104 on the vertical lower side of the inner plate 116 and the outer plate 118. . The arm 104 has a shape extending in one direction, and spans from one end to the other end of the arm 104, the first bearing member 105, the second bearing member 106, and the third bearing member 121 ), spaced apart from each other, and installed in this order.

In this embodiment, two 1st bearing members 105 are spaced apart from each other in the normal direction of the paper in FIG. 2, and are arrange|positioned. The arm 104 is interposed between the two first bearing members 105, and the two first bearing members 105 can be rotated about the first shaft 109 with respect to the arm 104 It is mounted on the first shaft 109 so as to be. The first shaft 109 is attached to the arm 104 so as to extend in a direction crossing the extending direction of the arm 104.

In addition, each of the two first bearing members 105 is disposed in each of the first openings 107 of the two sidewalls of the first block 114 spaced apart from each other. Each of the two first bearing members 105 is mounted so that the inside of the first opening 107 is movable in the horizontal direction with respect to the first block 114. Accordingly, the first block 114 is mounted to one end of the arm 104 through the first bearing member 105.

As the first bearing member 105, for example, a roller follower which is a rolling bearing using a needle roller can be used. In this case, the inner ring of the first bearing member 105 is fixed to the first shaft 109 which is the focus point of the arm 104, and the outer surface of the outer ring of the first bearing member 105 is the first block 114 It can be arranged so as to be able to contact the inner surface of the first opening 107 of the. In this case, when moving the second platen 12 vertically upward, the lower surface of the inner surface of the first opening 107 of the first block 114 is the outer surface of the outer ring of the first bearing member 105 And set the size of the first opening 107 so that the upper surface of the inner surface of the first opening 107 of the first block 114 does not contact the outer surface of the outer ring of the first bearing member 105 desirable. In addition, when a roller follower is used as the first bearing member 105, compared with a rack and pinion mechanism, the frequency of lubrication oil lubrication can be reduced.

In the present embodiment, two second bearing members 106 are also arranged at intervals apart from each other in the normal direction of the paper in FIG. 2. The arm 104 is fitted between the two second bearing members 106, and the two second bearing members 106 are rotatable about the second axis 110 with respect to the arm 104. It is mounted on the second shaft 110 so as to be supported. The second shaft 110 is attached to the arm 104 so as to extend in a direction crossing the extending direction of the arm 104.

Further, each of the two second bearing members 106 is disposed in each of the second openings 108 of the two sidewalls of the second block 115 spaced apart from each other. Each of the two second bearing members 106 is mounted so that the inside of the second opening 108 is movable in the horizontal direction with respect to the second block 115. Accordingly, the second block 115 is mounted on the center of the arm 104 through the second bearing member 106.

As the second bearing member 106, for example, a roller follower which is a rolling bearing using a needle roller can be used. In this case, the inner ring of the second bearing member 106 is fixed to the second shaft 110 serving as the working point of the arm 104, and the outer surface of the outer ring of the second bearing member 106 is the second block 115 It may be disposed to be in contact with the inner surface of the second opening 108 of the. Further, in this case, when moving the second platen 12 vertically upward, the upper surface of the inner surface of the second opening portion 108 of the second block 115 is the outer surface of the outer ring of the second bearing member 106 And set the size of the second opening 108 so that the lower surface of the inner surface of the second opening 108 of the second block 115 does not contact the outer surface of the outer ring of the second bearing member 106 desirable. In addition, when a roller follower is used as the second bearing member 106, compared with the rack-and-pinion mechanism, the frequency of lubrication oil lubrication can be reduced.

In the present embodiment, two third bearing members 121 are also arranged at intervals in the normal direction of the paper in FIG. 2. The arm 104 is interposed between the two third bearing members 121, and the two third bearing members 121 are rotatable about the third axis 111 with respect to the arm 104. It is mounted on the third shaft 111 so as to be supported. The third shaft 111 is attached to the arm 104 so as to extend in a direction crossing the extending direction of the arm 104.

Unlike the first bearing member 105 and the second bearing member 106, the third bearing member 121 is not movable in the horizontal direction with respect to the third block 119. The third block 119 is fixed to the apparatus 1 for manufacturing a resin molded article of the embodiment, and is not movable with respect to the press frame 17, for example.

As the third bearing member 121, for example, a deep ball ball bearing can be used. In this case, the inner ring of the third bearing member 121 can be fixed to the third shaft 111 of the arm 104, and the outer ring of the third bearing member 121 can be fixed to the third block 119. .

In Fig. 2, for convenience of explanation, illustration of the lower linear rail 123 and the lower linear motion block 124 on the inner plate 116 are omitted.

In the apparatus 1 for manufacturing a resin molded article of the embodiment, the first block 114 is attached to the second platen 12 by, for example, a connecting member 122 such as a plate, as shown in FIG. 3. It is fixed. Accordingly, with the movement of the second platen 12 in the vertical direction by the ball screw 100, the first block 114 also moves in the vertical direction. With the movement of the first block 114 in the vertical direction, one end of the arm 104 on which the first bearing member 105 is mounted is focused on the portion on which the first shaft 109 is mounted, With the other end of the arm 104 on which the 3-axis 111 is mounted as a point, it is movable to draw an arc between the top dead center and the bottom dead center.

Fig. 5 is a schematic enlarged cross-sectional view taken along V-V in Fig. 4. As shown in FIG. 5, the inner surface of the lifter plate 103 is positioned so as to face each other in parallel with the outer surface of the inner plate 116 and the outer surface of the outer plate 118, respectively. As described above, the lower linear block 124 and the second block 115 are fixed to the inner plate 116. A lower linear rail 123 and an outer plate 118 are fixed to the lifter plate 103. Moreover, the lower linear motion rail 123 is attached to the lower linear motion block 124 so that it can move in a vertical direction.

The lifter plate 103, the lower linear rail 123, and the lower linear block 124 are provided with the intermediate plate 91 and the second block 115 so as to link the intermediate plate 91 with the second block 115. It works as an interlocking mechanism 160 that connects with. In addition, the lower linear motion rail 123 may be attached to the inner plate 116 and the lower linear motion block 124 may be attached to the lifter plate 103.

Therefore, as shown in the plan view of Fig. 6, the other end (third shaft 111) of the arm 104 accompanying the movement of the second platen 12 by the ball screw 100 in the vertical direction By the movement of the arc shape of one end (first axis 109), which is the emphasis of the arm 104 as a point, the portion of the second axis 110, which is the working point of the arm 104, also moves in an arc shape. . At this time, while the first bearing member 105 moves in the horizontal direction within the first opening 107 of the first block 114, the second bearing member 106 is a second bearing member 106 of the second block 115 The inside of the opening 108 moves in the horizontal direction. In addition, the first block 114 and the second block 115 move in the vertical direction. In addition, the third block 119 and the third bearing member 121 do not move.

For example, as shown in FIG. 6, the linear distance between the first axis 109 and the third axis 111 is L, and the straight line between the second axis 110 and the third axis 111 When the distance is set to half the distance L/2, the moving distance in the vertical direction of the first block 114 becomes H, and the moving distance in the vertical direction of the second block 115 becomes H/2, which is half the distance. .

Further, in FIG. 6 as well, for convenience of explanation, illustration of the lower linear rail 123 and the lower linear motion block 124 on the inner plate 116 are omitted.

Hereinafter, a method of manufacturing a resin molded article according to an embodiment, which is an example of a method of manufacturing a resin molded article using the apparatus 1 for manufacturing a resin molded article according to the embodiment, will be described with reference to FIGS. 7 to 25. First, as shown in a schematic perspective view of Fig. 7 and a schematic side perspective view of Fig. 8, a first type holder 14 is provided on the lower surface side of the first platen 11 and the lower surface side of the intermediate plate 91. While installing, the second type holder 15 is installed on the upper surface side of the second platen 12 and the upper surface side of the intermediate plate 91. At this time, the power point (first axis 109), which is one end of the arm 104, is located at the bottom dead center, which is the lowest point in the vertical direction. When the force point (first axis 109), which is one end of the arm 104, is located at the bottom dead center, the force point (first axis 109) of the arm 104 is higher than the action point (the second axis 110). It is located vertically below, and the action point (second axis 110) of the arm 104 is positioned vertically below the point (third axis 111).

In addition, as shown in FIGS. 7 and 8, arms 104 are provided on each of both side surfaces of the apparatus 1 for manufacturing a resin molded article of the embodiment. When the power point (first shaft 109), which is one end of the arm 104, is located at the bottom dead center, when viewed in a plan view of the side of the manufacturing device 1, it is provided on one side of the manufacturing device 1 The extending direction of the first arm 104 becomes a relationship intersecting with the extending direction of the second arm 104 provided on the other side surface of the manufacturing apparatus 1.

In Fig. 9, schematic perspective views of the first type holder 14 and the second type holder 15 shown in Figs. 7 and 8 are shown. The first type holder 14 is provided with the first heat insulating member 22 on the first platen 11 side, and the first heater plate 23 on the second platen 12 side A first type holder heater 25 configured to heat a mold (not shown) is provided. In addition, the 1st type holder 14 is provided with the 1st plate 21 on the 1st platen 11 side more than the 1st heat insulating member 22, and the periphery of the 1st heater plate 23 It is provided with a 1st side wall 24 extending vertically downward from the beginning. In the present embodiment, the first heater plate 23 has four first type holder heaters 25 spaced apart from each other and extending in a horizontal direction.

The second type holder 15 is provided with the second heat insulating member 32 on the second platen 12 side, and the second heater plate 33 is provided on the first platen 11 side. A second type holder heater 35 configured to heat a mold (not shown) is provided. In addition, the 2nd type holder 15 is provided with the 2nd plate 31 on the 2nd platen 12 side more than the 2nd heat insulating member 32, and the periphery of the 2nd heat insulating member 32 A second side wall 34 extending vertically upward is provided. In this embodiment, the second heater plate 33 includes four second type holder heaters 35 spaced apart from each other and extending in a horizontal direction.

Next, as shown in the schematic cross-sectional view of FIG. 10, while fixing the first mold 41 on the first heater plate 23 of the first mold 14, the second mold 15 Fix the second type 42 on the second heater plate 33 of ). A cavity 43 is provided on the side of the first mold 41 of the second mold 42. As a result, the first mold 41 is attached to the lower surface of the first platen 11 and the lower surface of the intermediate plate 91, and the upper surface of the second platen 12 and the upper surface of the intermediate plate 91 The second type 42 is attached.

Next, as shown in the schematic cross-sectional view of FIG. 11, the mold release film 52 is provided so as to cover the cavity 43 of the second mold 42. Next, by vacuum suctioning the space in the cavity 43 covered with the release film 52, as shown in the schematic cross-sectional view of Fig. 12, the surface of the second mold 42 constituting the cavity 43 is released. The film 52 is brought into close contact.

Next, from the support member supplying device 201 of the supply module 1001 of the resin molding system 1000 of the embodiment shown in the schematic plan view in FIG. 13, the support member 51 to be a molding object for resin molding is It is supplied to the upper side of the conveyance mechanism 301.

The support member 51 is capable of supporting a semiconductor chip, a chip-shaped electronic component, or a film (including a conductive film, an insulating film, and a semiconductor film), for example, a lead frame, a substrate, Interposers, semiconductor substrates (silicon wafers, etc.), metal substrates, glass substrates, ceramic substrates, resin substrates, wiring substrates, and the like. Further, the shape of the support member 51 is not particularly limited, and the surface shape of the support member 51 may be, for example, a circular shape or a square shape. In addition, the support member 51 may or may not include a wiring. Further, the support member 51 may contain a carrier of a plate-shaped member used for a FO-WLP (Fan Out Wafer Level Package) or FO-PLP (Fan Out Panel Level Package).

Next, the conveyance mechanism 301 to which the support member 51 is supplied moves along the longitudinal movement rail 401 provided in the supply module 1001 to reach the resin material supply device 202.

Next, the resin material supply device 202 transfers the resin material 61 to the lower side of the conveying mechanism 301 so that the conveying mechanism 301 holds the solid resin material 61 under the conveying mechanism 301. To supply. Therefore, the conveyance mechanism 301 holds the support member 51 from the upper side and the resin material 61 from the lower side at this stage.

Next, the conveyance mechanism 301 moves in the transverse direction along the transverse moving rail 402 in a state where the support member 51 is held on the upper side and the resin material 61 is held on the lower side, Reach the resin sealing module 1002 of the resin molding system 1000 of the form. The conveying mechanism 301 reaching the resin encapsulation module 1002 moves in the longitudinal direction along the longitudinal movement rail 403 and reaches the apparatus 1 for manufacturing a resin molded article of the embodiment. In addition, although four resin sealing modules 1002 are described in FIG. 13, it is not limited to this, It is possible to increase or decrease the number of resin sealing modules 1002.

Next, as shown in the schematic cross-sectional view of FIG. 14, a release film in close contact with the second mold 42 while attaching the support member 51 to the first mold 41 from the transport mechanism 301 The resin material 61 is supplied from the conveyance mechanism 301 on the top 52. In addition, in this embodiment, the support member 51 provided with the semiconductor substrate 51a and the semiconductor chip 51b on the semiconductor substrate 51a is used.

Next, while heating the first type 41 by the first type holder heater 25 of the first heater plate 23, the second type holder heater 35 of the second heater plate 33 Thus, the second mold 42 is heated. At this time, the first platen 11 is heated by the first platen heater 18. Further, the resin material 61 is melted by heating the second mold 42 by the second holder heater 35, and as shown in the schematic cross-sectional view of FIG. 15, a fluid resin 71 is produced. do.

Next, as shown in the schematic perspective view of Fig. 16, the schematic side perspective view of Fig. 17, and the enlarged schematic perspective view of the main part of Fig. 18, by driving the ball screw 100, the second platen (12) is moved vertically upward.

In the configurations shown in Figs. 16 to 18, the power point (first shaft 109), which is one end of the arm 104, is located at an intermediate point between the top dead center and the bottom dead center. When the force point (first axis 109), which is one end of the arm 104, is at the midpoint, the force point (first axis 109), the action point (second axis 110) and the point of the arm 104 (The third axis 111) extends in the horizontal direction, and the strength of the arm 104 (first axis 109), the action point (second axis 110) and the point (third axis 111) The position of the height in the vertical direction becomes the same. Therefore, when the power point (first shaft 109), which is one end of the arm 104, is located at the midpoint, in the plan view of the side surface of the manufacturing device 1, it is provided on one side of the manufacturing device 1 The extending direction of the first arm 104 is parallel to the extending direction of the second arm 104 provided on the other side surface of the manufacturing apparatus 1. In addition, during movement between the top dead center and the bottom dead center of the power point (first shaft 109), which is one end of the first arm 104, the first bearing member 105 moves within the first opening 107 The direction is reversed. For example, when the first bearing member 105 moves inside the first opening 107 from the state shown in FIG. 8 (bottom dead center) to the state shown in FIG. 17, the first bearing member 105 moves to the right side of the paper in these drawings. Then, when moving from the state shown in FIG. 17 to the state (top dead center) shown in FIG. 20 to be described later, it moves to the left side of the paper in these figures. At this time, the second bearing member 106 also moves in the same direction inside the second opening 108 and is similarly reversed. With such a configuration, the length of the first opening 107 of the first block 114 in the horizontal direction and the length of the second opening 108 of the second block 115 in the horizontal direction can be reduced. The enlargement of the apparatus 1 for manufacturing a resin molded article of the embodiment can be suppressed.

Next, as shown in a schematic perspective view of Fig. 19, a schematic side perspective view of Fig. 20, and an enlarged schematic perspective view of the main part of Fig. 21, by further driving the ball screw 100, the second flash The button 12 is further moved vertically upward. As a result, as shown in the schematic cross-sectional view of FIG. 22, the first mold 41 and the second mold 42 are closed. At this time, as shown in FIG. 22, the fluid resin 71 comes into contact with the surface of the support member 51.

Further, at this time, the power point (first axis 109), which is one end of the arm 104, is located at the top dead center, which is the highest point in the vertical direction. When the power point (first shaft 109), which is one end of the arm 104, is located at the top dead center, the power point (first shaft 109) of the arm 104 is higher than the action point (second shaft 110). It is located vertically above, and the action point of the arm 104 (the second axis 110) is positioned vertically above the point (the third axis 111).

In addition, when the power point (first shaft 109), which is one end of the arm 104, is located at the top dead center, it is provided on one side of the manufacturing device 1 in the plan view of the side surface of the manufacturing device 1 The extension direction of the first arm 104 that has been formed becomes a relationship intersecting with the extension direction of the second arm 104 provided on the other side of the manufacturing apparatus 1.

In addition, as described above, when the power point (first shaft 109), which is one end of the arm 104, passes from the bottom dead center to the middle point and moves to the top dead center, the second platen 12 is the ball screw 100 ) Moves vertically upward, and the intermediate plate 91 moves vertically upward with the movement of the lifter plate 103 vertically upward.

At this time, as shown in FIG. 6, since the moving distance in the vertical direction of the first block 114 becomes larger than the moving distance in the vertical direction of the second block 115, the second block 114 is connected to the second block 114. The moving distance of the platen 12 in the vertical direction is also greater than the moving distance of the intermediate plate 91 connected to the second block 115 in the vertical direction. That is, the movement distance of the lifter plate 103 and the movement distance of the second platen 12 in the case of movement between the top dead center and the bottom dead center of the power point (first axis 109) that is one end of the arm 104 Is different. Thereby, the movement distance of the second mold 42 installed in the second mold holder 15 mounted on the second platen 12 vertically upward is determined by the first mold holder mounted on the intermediate plate 91 ( Since the first mold 41 provided in 14) is larger than the vertically upward movement distance, the first mold 41 and the second mold 42 can be closed.

In addition, since the first platen 11 is fixed and does not move in the vertical direction, the second type 42 installed on the second type holder 15 mounted on the intermediate plate 91 moves vertically upward. Since the distance is larger than the distance to move vertically upward of the first mold 41 installed on the first mold holder 14 mounted on the first platen 11, these first mold 41 and the second mold Closing of (42) is also possible.

The first openings 107 of the first block 114 and the second openings 108 of the second block 115 are extended in the horizontal direction, respectively. During the movement between the top dead center and the bottom dead center of the power point (first shaft 109), which is one end of the arm 104, the first bearing member 105 moves in the horizontal direction inside the first opening 107 , The second bearing member 106 moves in the horizontal direction within the second opening 108. At this time, the movement distance in the horizontal direction in the first opening 107 of the first bearing member 105 when the power point (first shaft 109), which is one end of the arm 104, moves between the top dead center and the bottom dead center , L1 shown in the schematic side view of FIG. 23, and the moving distance in the horizontal direction in the second opening 108 of the second bearing member 106 becomes L2 shown in the schematic side view of FIG. 24, and L1> The relationship of L2 is established.

Further, as described above, the elastic member 113 is disposed in the first concave portion 118a of the outer plate 118, the convex portion 116a of the inner plate 116 and the second of the outer plate 118 The concave portion 118b is fitted through the spacer 117, and the inner plate 116 and the outer plate 118 are connected. With such a configuration, the second block 115 and the intermediate plate 91 can be interlocked through the elastic member 113. Therefore, in this case, the support member 51 is provided in each of the first mold 41 and the second mold 42, and the thickness of the support member 51 provided on the first mold 41 and the second mold ( Even if there is a variation between the thicknesses of the support member 51 provided in 42), the variation can be adjusted by stretching the elastic member 113 in the vertical direction.

Thereafter, after curing the fluid resin 71, the second platen 12 is moved vertically downward. Thereby, as shown in the schematic cross-sectional view of FIG. 25, the resin molded article 82 in which the surface of the support member 51 is sealed with the cured resin 81 is manufactured.

The resin molded article 82 manufactured as described above is carried out from the resin molded article manufacturing apparatus 1 by the conveying mechanism 301 shown in FIG. 13. Then, the conveying mechanism 301 holding the resin molded product 82 moves to the transverse direction moving rail 402 along the longitudinal moving rail 403 provided in the resin sealing module 1002. Then, the conveyance mechanism 301 moves along the horizontal movement rail 402 to the storage module 1003 of the resin molding system 1000 of the embodiment in the horizontal direction. The conveyance mechanism 301 that has reached the storage module 1003 moves to the resin molded article storage device 203 along the longitudinal movement rail 404 provided in the storage module 1003. After that, the resin molded product 82 is accommodated in the resin molded product storage device 203 from the transport mechanism 301.

Further, for example, as shown in the schematic plan view of FIGS. 26 and 27, the apparatus 1 for manufacturing a resin molded article according to the embodiment is configured to move the second platen 12 in the vertical direction. The ball screw 100a and the second ball screw 100b, the first servo motor 141a configured to drive the first ball screw 100a, and the second servo motor configured to drive the second ball screw 100b (141b) may be provided. Here, to drive the first ball screw (100a) and the second ball screw (100b), while crossing the belt between the first ball screw (100a) and the first servomotor (141a), the second ball In the case of crossing the belt between the screw 100b and the second servomotor 141b, from the viewpoint of suppressing the enlargement of the apparatus 1 for manufacturing a resin molded article of the embodiment, for example, as shown in FIG. , The direction 1100 in which the first ball screw 100a and the second ball screw 100b are arranged crosses the direction 1200 in which the arm 104 extends, and the first servomotor 141a and It is preferable that the second servomotor 141b is located on the same side with respect to the second platen 12.

In addition, as a modified example of the resin molding system of the embodiment shown in FIG. 13, an embodiment in which the resin molded article storage device 203 is provided in the supply module 1001 without using the storage module 1003 can be illustrated. . In this case, one conveying mechanism supplies the support member 51 from the supply module 1001 to the resin sealing module 1002, and the resin molded product 82 after production by the resin molded product manufacturing apparatus 1 Can be stored in the resin molded article storage device 203 in the supply module 1001 again.

In addition, as a modification example of the resin molding system of the embodiment shown in FIG. 13, an embodiment in which the resin material supply device 202 is provided in the storage module 1003 can also be illustrated. In this case, a transport mechanism (not shown) collectively combines the release film 52 and the resin material 61 cut in advance from the storage module 1003 to the resin molded article manufacturing apparatus 1 installed in the resin sealing module 1002. In addition to supplying, the transfer mechanism can recover the mold release film 52 after the resin molded article 82 is manufactured by the resin molded article manufacturing apparatus 1.

According to the resin molded article manufacturing apparatus 1 of the embodiment described above, since it is not necessary to use a toggle link mechanism, the apparatus configuration can be simplified compared to the resin mold apparatus described in Patent Document 1, and can be used. The pressurized range can be widened.

Although the embodiments have been described above, it is also planned from the beginning to appropriately combine the configurations of the respective embodiments described above.

Although the embodiment of the present invention has been described, it should be considered that the embodiment disclosed this time is illustrative and not restrictive in all respects. The scope of the present invention is indicated by the claims, and it is intended that the meanings equivalent to the claims and all changes within the scope are included.

[Industrial availability]

According to the embodiment disclosed herein, it is possible to provide an apparatus for manufacturing a resin molded article, a resin molding system, and a method for manufacturing a resin molded article.

1: apparatus for manufacturing a resin molded article 11: first platen
12: second platen 13: third platen
14: type 1 holder 15: type 2 holder
17: press frame 18: first platen heater
19: second platen heater 21: first plate
22: first heat insulating member 23: first heater plate
24: first side wall 25: first type holder heater
31: second plate 32: second heat insulating member
33: second heater plate 34: second side wall
35: type 2 holder heater 41: type 1
42: type 2 43: cavity,
51 support member 51a semiconductor substrate
51b: semiconductor chip 52: release film
61: resin material 71: fluid resin
81: cured resin 82: resin molded product
91: intermediate plate 100: ball screw
100a: 1st Ball Screw 100b: 2nd Ball Screw
101: linear block 102: linear rail
103: lifter plate 104: arm
105: first bearing member 106: second bearing member
107: first opening 108: second opening
109: 1st axis 110: 2nd axis
111: third axis 113: elastic member
114: first block 115: second block
116: inner plate 116a: convex portion
117: spacer 118: outer plate
118a: first concave portion 118b: second concave portion
119: third block 120: lower linear guide
121: third bearing member 122: connecting member
123: lower direct acting rail 124: lower direct acting block
130: servo motor 141a: first servo motor
141b: second servo motor 150: linear guide
160: interlock mechanism 201: support member supply device
202: resin material supply device 203: resin molded article storage device
301: conveying mechanism 301: longitudinal moving rail
4402: lateral moving rail 403: longitudinal moving rail
1000: resin molding system 1001: supply module
1002: resin sealing module 1003: storage module
1100, 1200: direction

Claims (13)

The first platen,
A pair of press frames fixed to the first platen so as to be extended vertically downward of the first platen and spaced in a horizontal direction,
A second platen facing and spaced apart from the first platen in a vertical direction,
An intermediate plate between the first platen and the second platen,
An elevating mechanism configured to enable the second platen to move in a vertical direction,
It has an arm extending in one direction, one end connected to the second platen,
A first mold for holding a molding object is attached to the intermediate plate, and a second mold for holding a resin material is attached to the second platen,
A first bearing member, a second bearing member, and a third bearing member are mounted in the order of the arm from one end to the other end,
A first block is mounted on the one end of the arm through the first bearing member,
The first bearing member is disposed to be movable within the first opening of the first block,
The first block is connected to the second platen, and according to the movement of the second platen in the vertical direction, the one end of the arm is brought to the center of the third bearing member of the other end of the arm as a point. So that it can be moved to draw an arc between the top dead center and the bottom dead center,
A second block is mounted between the one end of the arm and the other end through the second bearing member,
The second bearing member is disposed to be movable within the second opening of the second block,
An interlocking mechanism is connected between the intermediate plate and the second block so that the intermediate plate is interlocked with the second block,
The apparatus for manufacturing a resin molded article, wherein the intermediate plate is movable in a vertical direction through the interlocking mechanism in accordance with an operation of the arm. The method of claim 1,
The interlocking mechanism includes a lifter plate fixed to the intermediate plate so as to extend vertically downward of the intermediate plate,
It is mounted between the lifter plate and the press frame and includes a linear movement guide including a linear movement rail extending in a vertical direction and a linear movement block movable in a vertical direction with respect to the linear movement rail,
The second block is connected to the lifter plate,
The apparatus for manufacturing a resin molded article, wherein the intermediate plate is movable in a vertical direction through the lifter plate in accordance with the operation of the arm. The method of claim 2,
The apparatus for manufacturing a resin molded article, wherein a moving distance of the lifter plate and a moving distance of the second platen when moving between the top dead center and the bottom dead center of the one end of the arm are different. The method of claim 1,
And a connecting member configured to connect the first block and the second platen. The method of claim 1,
The lifting mechanism drives a first ball screw and a second ball screw configured to move the second platen in a vertical direction, a first servo motor configured to drive the first ball screw, and the second ball screw It has a second servo motor configured to,
A direction in which the first ball screw and the second ball screw are arranged crosses a direction in which the arm extends,
The apparatus for manufacturing a resin molded article, wherein the first servomotor and the second servomotor are located on the same side with respect to the second platen. The method of claim 1,
At a midpoint between the top dead center and the bottom dead center, the arm is extended in a horizontal direction. The method of claim 1,
The first opening and the second opening are extended in a horizontal direction,
During movement between the top dead center and the bottom dead center of the one end of the arm, while the first bearing member moves in the horizontal direction within the first opening, the second bearing member moves inside the second opening. An apparatus for manufacturing a resin molded article, characterized in that it moves in a horizontal direction. The method of claim 7,
In the case of movement between the top dead center and the bottom dead center of the one end of the arm, the moving distance in the horizontal direction within the first opening of the first bearing member is a horizontal direction within the second opening of the second bearing member An apparatus for producing a resin molded article, characterized in that it is longer than a moving distance of. The method according to any one of claims 1 to 8,
An apparatus for manufacturing a resin molded article, characterized in that during movement between the top dead center and the bottom dead center of the one end of the arm, the direction of movement of the first bearing member into the first opening portion is reversed. A resin molding system comprising the apparatus for producing a resin molded article according to any one of claims 1 to 8. A resin molding system comprising the apparatus for producing a resin molded article according to claim 9. As a manufacturing method of a resin molded article using the manufacturing apparatus of a resin molded article according to any one of claims 1 to 8,
Attaching the first type to the intermediate plate, and
A step of attaching a second type to the second platen, and
A step of installing the molding object in the first mold,
A step of supplying the resin material to the second mold,
A method for producing a resin molded article, comprising a step of closing the first mold and the second mold. As a manufacturing method of a resin molded article using the manufacturing apparatus of the resin molded article according to claim 9,
Attaching the first type to the intermediate plate, and
A step of attaching a second type to the second platen, and
A step of installing the molding object in the first mold,
A step of supplying the resin material to the second mold,
A method for producing a resin molded article, comprising a step of closing the first mold and the second mold.

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