KR102046081B1 - Vision Inspection Module and device inspection apparatus - Google Patents

Abstract

One or more light sources for irradiating light to the surface of the inspection object; A vision inspection module comprising two or more image acquisition units arranged sequentially in a direction perpendicular to the movement direction on the surface of the inspection object and acquiring an image of the inspection object to which light is irradiated by the light source; It starts.

Description

Vision inspection module and device inspection apparatus having same

The present invention relates to a device inspection apparatus, and to a vision inspection module for inspecting the appearance of the device and a device inspection device having the same.

After completion of the package process, the semiconductor device is shipped to the customer tray after the burn-in test and the like, and the semiconductor device is shipped with a marking process such as a serial number and a manufacturer's logo on the surface of the semiconductor device. .

In order to improve the reliability of the product, the semiconductor device is inspected for the appearance and surface condition of the semiconductor device such as whether the lead or the ball grid is broken, the crack is present, or the scratch is present. The vision test process is performed.

However, as the surface state inspection such as the appearance state of the semiconductor device and whether the marking is good or the like is added, it affects the time for performing the entire process according to the inspection time.

In particular, when the vision inspection process of the appearance state and the surface state of the semiconductor device is inefficient, there is a problem that the productivity of the semiconductor device is reduced by reducing the overall working efficiency.

On the other hand, in vision inspection of a semiconductor device, inspection of the surface state of the semiconductor device, that is, the presence of cracks, scratches, and marking states, acquires an image of the two-dimensional shape of the top or bottom surface of the semiconductor device, and obtains the obtained image. This is done by a two-dimensional vision inspection process.

In addition, inspection of the abnormality of the lead of the semiconductor device, breakage of the ball, abnormality of the bump, etc. is performed by a three-dimensional vision inspection process of acquiring an image of the three-dimensional shape of the semiconductor device and analyzing the acquired image.

However, the conventional semiconductor device vision inspection apparatus is configured to perform only one of two-dimensional vision inspection and three-dimensional vision inspection of a semiconductor device, or is configured to be performed by separate modules in one device.

However, when the conventional semiconductor device vision inspection apparatus is configured to perform only one of two-dimensional vision inspection and three-dimensional vision inspection, a device for two-dimensional vision inspection and three-dimensional vision inspection is separately required, so There is a problem of increasing the vision inspection cost due to the need for a double device.

In addition, when the conventional semiconductor device vision inspection device is configured to be performed by separate modules in one device, the configuration of the device is complicated and the inspection speed of each configuration is different. In particular, the vision of the three-dimensional vision inspection is low and overall vision is low. There is a problem of reducing the inspection speed of the inspection.

In addition, unlike standardized memory devices, semiconductor devices that are difficult to standardize, such as system LSIs such as smartphones, tablets, CPUs, and GPUs, vary in size depending on the application device. Since it requires a separate device for the vision inspection of the semiconductor device, there is a problem that increases the vision inspection cost.

Furthermore, vision inspection equipment must be provided according to the type for the inspection of the system LSI produced in a relatively small amount compared to the memory device, which may increase the manufacturing cost of the system LSI.

SUMMARY OF THE INVENTION An object of the present invention is to provide a vision inspection module capable of vision inspection regardless of the size and type of the inspection object, and a device inspection apparatus having the same.

Another object of the present invention is to provide a vision inspection module capable of a greater number of vision inspection and a device inspection device having the same.

The present invention has been made to achieve the object of the present invention as described above, the present invention comprises one or more light sources for irradiating light to the surface of the inspection object; A vision inspection module comprising two or more image acquisition units arranged sequentially in a direction perpendicular to the moving direction on the surface of the inspection object and acquiring an image of the inspection object to which light is irradiated by the light source; It starts.

Each image acquisition area of the two or more image acquisition units may be disposed to be perpendicular to the moving direction on the surface of the inspection object, and the image acquisition area may partially overlap the neighboring image acquisition area.

The plurality of image acquisition units may be installed to be movable along a direction perpendicular to the movement direction on the surface of the inspection object.

The plurality of light sources are provided in plurality, the plurality of light sources are arranged in order to be perpendicular to the movement direction on the surface of the inspection object, each irradiation area irradiated by the light sources on the surface of the inspection object Some of the neighboring irradiation areas may overlap.

The image acquisition units may be configured in two, and may include a line scanner or a camera.

The light source may be installed to be inclined with respect to the surface of the inspection object to irradiate light, and the image acquisition unit may be installed with its light receiving axis inclined with respect to the surface of the inspection object.

At least one of the image acquisition unit and the light source may be installed in two or more, and at least one of the image acquisition unit and the light source may be installed to be movable in a direction perpendicular to the moving direction on the surface of the inspection object. have.

The image acquisition unit may acquire an image of the inspection object while the inspection object is moved.

The image acquisition unit may be installed to be movable along the guide unit for guiding the movement in the frame, and may be linearly driven by the linear driver installed in the frame.

The present invention also includes a loading unit for loading a test object by loading a plurality of test objects in a tray; A first pick-up tool installed at one side of the loading unit and picking up at least one inspection object from the loading unit and reloading it on the tray of the loading unit after vision inspection; A first vision inspection unit including the vision inspection module and performing vision inspection on the bottom surface of the inspection object picked up and transported by the first pick-up tool; Disclosed is a device inspection apparatus comprising an unloading unit for classifying and inspecting an inspection object according to a vision inspection result of the first vision inspection unit.

The loading unit may further include a second vision inspection unit installed on the movement path of the tray to inspect the upper surface of the inspection object loaded on the tray.

The unloading unit may include a good tray unit for loading an inspection object, which is inspected as a result of vision inspection, into a tray, and one or more sorting tray units for loading an inspection object, which is inspected as being defective, in a tray.

In the vision inspection module and the device inspection apparatus having the same according to the present invention, two or more image acquisition units for acquiring an image of a silver inspection target are installed, and thus a plurality of image acquisition units can acquire images for a larger number of inspection targets, or As a result, an image can be obtained for a large inspection object.

In particular, an image acquisition unit such as a camera significantly increases the manufacturing cost when the size of the image acquisition area for image acquisition is large, and obtaining a relatively large image acquisition area by arranging a plurality of image acquisition units having a relatively small image acquisition area. It is possible to significantly reduce the manufacturing cost of the vision inspection module.

1 is a perspective view showing a vision inspection module according to the present invention.
2 is a plan view illustrating the vision inspection module of FIG. 1.
3 is a side view showing the vision inspection module of FIG.
4A and 4B are conceptual views showing the inspection process by the vision inspection module of FIG. 1, which are conceptual views seen from a plan view and side views, respectively.
5 is a plan view illustrating a device inspection apparatus having the vision inspection module of FIG. 1.

Hereinafter, a vision inspection module and a device inspection apparatus having the same according to the present invention will be described in detail with reference to the accompanying drawings.

Vision inspection module 100 according to the present invention, as shown in Figures 1 to 4b, at least one light source 110 for irradiating light to the surface of the inspection object 10; Two or more image acquisition units 120 that are sequentially disposed perpendicular to the moving direction on the surface of the inspection object 10 and acquire an image of the inspection object 10 to which light is irradiated by the light source 110. and; And a frame 130 on which the light source 110 and the image acquisition unit 120 are installed.

In this case, the inspection target 10 is any object that requires inspection of the surface of a wafer state, a device in a packaging process, a packaged device, as well as a substrate on which a semiconductor process such as a solar cell device and an LCD panel is performed. It is also possible.

In particular, the inspection of the inspection object 10 by this module can be a two-dimensional or three-dimensional vision inspection, three-dimensional vision inspection is most preferred.

The frame 130 is a frame in which the light source 110 and the image acquisition unit 120 are installed, and may be configured in one or more frame members.

For example, as illustrated in FIG. 1, the frame 130 faces the opening frame 131 having the opening 131a and the opening 131a to be coupled with the opening frame 131, and the light source 110. ) And one or more support frames 132 and 133 for supporting the image acquisition unit 120.

The opening frame 131 is configured to form a stable structure together with the support frames 132 and 133, and various configurations are possible.

In particular, the opening frame 131 may have an opening 131a for transmitting light and acquiring an image, and may have a plate shape for coupling with a structure to be installed, such as a device inspection apparatus to be described later.

On the other hand, the opening 131a is capable of irradiating light to the inspection object 10 that is moved from the upper side, and the image acquisition unit 120 allows the image acquisition unit 120 to acquire an image of the inspection object 10 to which light is irradiated ( Any configuration may be used as long as it is formed at 131 and is capable of irradiation and image acquisition of light.

The support frames 132 and 133 are configured to support the light source 110 and the image acquisition unit 120, and various configurations are possible according to the support structure.

For example, as shown in FIGS. 1 and 2, the support frames 132, 133, and 134 may have an opening frame 131 such that one end thereof is coupled to each other and the combined portion protrudes above the opening frame 131. The first support frame 132 and the second support frame 133 coupled to the first support frame 132 and the second support frame 133 and the first support frame 132 and the second support frame 133 respectively. In addition to connecting to the frame 133 may include a connection frame 134, at least one of the light source 110 and the image acquisition unit 120 is installed.

In this case, the first support frame 132 and the second support frame 133 may form a V shape in which the coupling form is reversed.

Meanwhile, the first support frame 132 and the second support frame 133 are coupled to the opening frame 131 by the coupling bracket 136 as shown in FIG. 1 for the convenience of coupling the opening frame 131. Can be.

The first support frame 132 and the second support frame 133 may have any configuration as long as the light source 110 and the image acquisition unit 120 can be supported, and as shown in FIG. Can have

In addition, the first support frame 132 and the second support frame 133 are coupled to each other so as to be rotatable in combination with each other, the angle formed by the light source 110 and the image acquisition unit 120 with respect to the inspection object 10 Can be changed.

The connection frame 134 connects each of the first support frame 132 and the second support frame 133 with the first support frame 132 and the second support frame 133 that face each other, and the light source 110. And at least one of the image acquisition unit 120 may be installed in various configurations.

The light source 110 is configured to irradiate light to the inspection target 10 so that the image acquisition unit 120 may acquire an image of the inspection target 10. It can be configured to generate.

In addition, the light source 110 may be configured to generate a line laser so as to obtain an image of the inspection object while the inspection object 10 is linearly moved.

In particular, the line laser constituting the light source 110 preferably has a linear shape larger than the width of the inspection object 10 in a direction perpendicular to the moving direction of the rectangular inspection object 10.

On the other hand, the light source 110 is fixed to the frame 130 constituting the module 100 or the inspection object to correspond to the FOV of the camera constituting the image acquisition unit 120, the size of the inspection target 10, etc. It may be configured to enable the distance adjustment for 10).

In addition, the light source 110 is installed in the frame 130 to adjust the irradiation angle with respect to the inspection object 10, or relative movement such as one-dimensional relative movement, two-dimensional linear movement to the surface of the inspection object 10 It may be installed in various ways such as to be installed on the frame 130 to enable.

In addition, the light source 110 has an irradiation angle with respect to the surface of the inspection object 10 to be perpendicular to the surface of the inspection object 10 to irradiate light or to make an inclination to irradiate light with respect to the inspection object 10. The irradiation angle of the light can be variously set according to the design and the design.

In this case, the image acquisition unit 120 may also be installed with the light receiving axis, that is, the optical axis constituting the image acquisition unit 120 inclined to the surface of the inspection object (10).

In particular, the inclination angle of the light source 110 with respect to the surface of the inspection object 10 may be varied in such a way that the inclination angles of the image acquisition unit 120 with respect to the surface of the inspection object 10 are symmetrical or asymmetric with each other. And the image acquisition unit 120 may be variously arranged.

In addition, the light source 110 may be installed in plural instead of one.

When the plurality of light sources 110 are installed, the plurality of light sources 110 are sequentially arranged perpendicularly to the moving direction on the surface of the inspection object 10, and each light source is disposed on the surface of the inspection object 10. Each irradiated area irradiated by the 110 is preferably overlapped with a neighboring irradiated area.

In addition, the plurality of light sources 110 are installed to be movable in the width direction perpendicular to the moving direction of the inspection object 10 such that the entire irradiation area formed by the plurality of irradiation areas is the width of the inspection object 10. It may be configured so that light is irradiated to the inspection object 10 sufficiently over.

The image acquisition unit 120 is a component for acquiring an image of the inspection target 10 irradiated with light by the light source 110, and has a relative movement between a camera and a measurement target having a predetermined shooting area, such as a digital camera. A line scanner or the like for acquiring an image may be used. Here, the image acquisition unit 120 may acquire an image in a state where the inspection object 10 is fixed, or obtain an image in a relative movement with respect to the inspection object 10, in particular, in a state in which the inspection object 10 is moved. have.

The image acquisition unit 120 may be installed by various methods, such as being fixed to the frame 130 or installed to be movable.

Here, the image acquisition unit 120 may be installed to be movable in a variety of ways in the frame 130.

As an example, as shown in FIG. 1, the image acquisition unit 120 is installed to be movable along the guide unit 135 for guiding its movement in the connecting frame 134 of the frame 130. 130), for example, is linearly driven by the linear driving unit 136 installed on any one of the support frames.

The image acquisition unit 120 may be installed to be movable in a moving direction, for example, in a width direction, of the inspection object 10 to form image acquisition areas AA1 and AA2 corresponding to the width of the inspection object 10. Will be.

That is, when the width of the inspection object 10 is relatively large, the plurality of image acquisition units 120 move in the direction of increasing the length of the image acquisition areas AA1 and AA2, and when the inspection object 10 is relatively small, the image acquisition areas AA1, Moving in the direction of reducing the length of AA2) enables the vision inspection for the inspection object 10 of various sizes.

As described above, the image acquisition unit 120 is installed in two or more, i.e., a plurality, so that the image acquisition of a larger number of inspection objects 10 is possible, or the image of the inspection object 10 having a relatively large size. There is an advantage that can be obtained.

In particular, when the image acquisition unit 120 is installed as one, it is possible to acquire an image for a relatively large number of inspection objects 10, or to acquire an image for a relatively large inspection object 10. In order to use a relatively expensive equipment, such as the configuration of the optical system is complicated, in the present invention, by using a plurality of image acquisition unit 120 it is possible to use a relatively low-cost equipment to significantly reduce the cost of the module Can be.

Meanwhile, when two or more image acquisition units 120 are installed, each of the two or more image acquisition units 120 may include the inspection targets (A1, AA2) as shown in FIGS. 4A and 4B. It is preferable that the image acquisition area AA1 overlaps with the neighboring image acquisition area AA2 on the surface of 10) and is perpendicular to the direction of movement thereof.

In this case, the image acquisition area AA1 overlaps with the neighboring image acquisition area AA2 to allow an image acquisition for the inspection object 10 having a relatively large width through image synthesis.

In this case, the plurality of image acquisition units 120 are installed to be movable along the width direction perpendicular to the moving direction on the surface of the inspection object 10 so that the entire image acquisition areas AA1 and AA2 are inspected. It can be made to correspond enough to the width of.

Here, a part of each of the image acquisition areas AA1 of the plurality of image acquisition units 120 overlaps with an adjacent image acquisition area AA2 so that the images acquired by each image acquisition unit 120 are overlapped with an adjacent image. This is to use as a composition standard to form a single image for vision inspection by referring to the section.

That is, the plurality of images acquired by the plurality of image acquisition units 120 are synthesized into one image based on the overlapping portions of the adjacent images and used as data for vision inspection.

In addition, when the plurality of image acquisition units 120 are installed to be inclined with respect to the surface of the inspection object 10, the plurality of image acquisition units 120 are sequentially arranged along the length directions of the image acquisition areas AA1 and AA2 on the surface of the inspection object 10. Can be arranged.

In this case, as shown in FIG. 2 and FIG. 3, the plurality of image acquisition units 120 are preferably alternately disposed along the length direction of the image acquisition areas AA1 and AA2.

As described above, when the plurality of image acquisition units 120 are arranged to be staggered with each other, the direction of the image acquisition for the inspection object 10 is different from each other, thus enabling more accurate three-dimensional inspection.

In summary, when at least one of the image acquisition unit 120 and the light source 110 is installed in two or more, when the size of the width of the inspection object 10 is changed, the image acquisition unit 120 and the light source are changed. At least one of the 110 is installed to be movable in the direction perpendicular to the movement direction on the surface of the inspection object 10 to correspond to the changed width of the inspection object 10 and the irradiation area and image of the light source 110 By adjusting the image acquisition area of the acquirer 120, it is possible to optimize the vision inspection for the inspection object 10.

The vision inspection module having the configuration as described above may be applied to various devices as a module for performing vision inspection on an inspection object.

As an example, the vision inspection module according to the present invention may be applied to a device inspection apparatus for performing a vision inspection on a device.

In this case, the device may be a device in a wafer state, a device in a packaging process, a device in which packaging is completed, or a substrate in which a semiconductor process such as a solar cell device or an LCD panel substrate is performed.

Hereinafter, a device inspection apparatus to which a vision inspection module according to the present invention is applied will be described in detail with reference to the accompanying drawings.

Device inspection apparatus according to the present invention, as shown in Figure 5, the loading unit 400 for loading the inspection object 10 by loading a plurality of inspection objects 10 in the tray 20; The first pick-up tool 600 installed on one side of the loading unit 400 and picking up at least one inspection object 10 from the loading unit 400 and reloading the tray 20 of the loading unit 400 after vision inspection. )and; A first vision inspection unit 101 including a vision inspection module 100 according to the present invention and performing vision inspection on the bottom surface of the inspection object 10 picked up and transported by the first pick-up tool 600; According to the vision inspection result of the first vision inspection unit 101 may include an unloading unit 300 to classify the inspection target and load on the tray 20.

Here, the tray 20 is a configuration for transporting the inspection object 10 is seated, it is possible to have a variety of configurations, such as a seating groove (2a) is formed in which the inspection object 10 is seated.

The loading unit 400 is a configuration for supplying the inspection target 10, which is an inspection target, to the vision inspection unit 50, and a plurality of inspection targets 10 in a state of being seated in a seating groove 2a formed in the tray 20. The vision inspection unit 50 is configured to be transported to inspect them.

The loading unit 400 may be configured in various ways. As illustrated in FIG. 5, the guide unit 410 and the tray 20 for guiding the movement of the tray 20 on which the plurality of inspection objects 10 are stacked are provided. ) May include a driving unit (not shown) for moving along the guide unit 410.

The first pick-up tool 600 is composed of a plurality of pickers (see Fig. 4b; 611) installed on the support bracket 630, the support bracket 630 is a transport tool guide 601 installed on the main body 10 It is movably installed along.

The pickers 611 may be configured in various ways as devices for picking up and transporting the inspection target 10, and may be configured in various arrangements such as 1 × 8 and 2 × 8, and each picker 611 may be located in Shanghai-dong ( Z direction movement) may be configured to include a suction head for picking up and picking up the inspection object 10 by generating a vacuum pressure.

The unloading unit 300 has a configuration similar to that of the loading unit 400, and according to the number of inspection results of the inspection object 10, good quality G, defective 1 or abnormal 1 (R1), defective 2 or abnormal 2 A plurality of configurations may be provided so as to provide a classification level of (R2).

That is, the unloading unit 300 loads a good tray unit for loading the inspection object, which is examined as a result of the vision inspection, into the tray 20, and a test object 10, which is inspected as being defective, as a result of the vision inspection, on the tray. Various configurations are possible, including one or more sorting trays.

Each unloading unit 300 includes a guide unit 310 installed in parallel with one side of the loading unit 400, and a driving unit (not shown) for moving the tray 2 along the guide unit 310. Can be configured.

Meanwhile, the tray 2 may be transported between the loading unit 400 and the unloading unit 300 by a tray transfer device (not shown), and the inspection object 10 may be loaded in the unloading unit 300. It may further include a bin tray 200 for supplying the empty tray (2) that is not.

In this case, the bin tray 200 includes a guide part 210 installed in parallel with one side of the loading part 400, and a driving part (not shown) for moving the tray 2 along the guide part 210. Can be configured.

In addition, the unloading unit 300 may separately install a second pick-up tool 620 for transferring the inspection object 10 according to the classification level of each unloading unit 300 between each unloading unit 300. Can be.

The first vision inspection unit 101 includes a vision inspection module 100 illustrated in FIGS. 1 to 4b, and an inspection object that is picked up and transported by the first pick-up tool 600 as illustrated in FIG. 4b ( Perform a vision test on the bottom of 10), especially 3D vision test.

On the other hand, the device inspection apparatus according to the present invention is installed on the moving path of the tray 20 in the loading unit 400, the second vision inspection unit 500 for inspecting the upper surface of the inspection target 10 loaded on the tray 20 It may further include.

The second vision inspection unit 500 performs a vision inspection by relative movement, that is, X-axis movement, Y-axis movement, XY-direction movement, rotational movement, etc. with the inspection object 10, so that the modular two-dimensional vision inspection unit It may include a guide portion (510, 540) for guiding the movement in the X-axis direction and Y-axis direction of the (530).

Since the above has just been described with respect to some of the preferred embodiments that can be implemented by the present invention, the scope of the present invention, as is well known, should not be construed as limited to the above embodiments, the present invention described above It will be said that both the technical idea and the technical idea which together with the base are included in the scope of the present invention.

100: vision inspection module
110: light source 120: image acquisition unit

Claims (17)

At least one light source for irradiating light onto the surface of the inspection object;
It includes two or more image acquisition parts that are sequentially disposed perpendicular to the direction of movement on the surface of the inspection object to obtain an image of the inspection object irradiated with light by the light source,
Each image acquisition area of the two or more image acquisition units is disposed perpendicular to the direction of movement on the surface of the inspection object,
The image acquisition area extends the length of the entire image acquisition area in a direction perpendicular to the moving direction of the inspection object by overlapping a portion with the neighboring image acquisition area,
A plurality of images obtained by the image acquisition unit is synthesized into a single image based on the overlapping portion of the adjacent image,
And the image acquisition unit acquires an image of the inspection target while the inspection target is moved. delete The method according to claim 1,
And the at least two image acquisition parts are installed to be movable along a direction perpendicular to the movement direction on the surface of the inspection object. The method according to claim 1,
The plurality of light sources are provided in plurality, the plurality of light sources are arranged in sequence in the direction perpendicular to the movement direction on the surface of the inspection object, each irradiation area irradiated by the respective light sources on the surface of the inspection object Vision inspection module, characterized in that overlapping with the neighboring irradiation area. The method according to claim 1,
The vision inspection module, characterized in that the two image acquisition unit. The method according to claim 1,
The image acquisition unit vision inspection module, characterized in that it comprises a line scanner or a camera. The method according to claim 1,
The light source is installed to be inclined to the surface of the inspection object to irradiate light, the image acquisition unit is a vision inspection module, characterized in that the light receiving axis is installed inclined with respect to the surface of the inspection object. The method according to claim 1,
At least one of the image acquisition unit and the light source is installed in two or more, and at least one of the image acquisition unit and the light source is installed to be movable in a direction perpendicular to the moving direction on the surface of the inspection object. Vision inspection module. delete The method according to claim 1,
The image acquisition unit is installed in plurality,
And the plurality of image acquisition units are alternately arranged along the longitudinal direction of the image acquisition area of each of the image acquisition units. The method according to any one of claims 1, 3 to 8 and 10,
And an opening frame having an opening formed therein, and at least two support frames opposed to the opening and coupled to the opening frame to support the light source and the image acquisition unit. The method according to claim 11,
And the image acquisition unit is installed to be movable along the guide unit for guiding its movement in the support frame, and is linearly driven by a linear driver installed in the support frame. A loading unit for loading a test target by loading a plurality of test targets on a tray;
A first pick-up tool installed at one side of the loading unit to pick up at least one inspection object from the loading unit and reload it on the tray of the loading unit after vision inspection;
Claim 1, claim 3 to claim 8 and claim 10, including a vision inspection module according to any one of the first vision for performing a vision inspection on the bottom of the inspection object picked up and transported by the first pickup tool An inspection unit;
And an unloading unit configured to classify the inspection target and load the inspection target according to the vision inspection result of the first vision inspection unit. According to claim 13,
And a second vision inspection unit installed on the moving path of the tray in the loading unit to inspect an upper surface of the inspection object loaded on the tray. The method according to claim 13,
The unloading unit includes a good tray unit for loading an inspection object, which is inspected as a result of vision inspection, into a tray, and at least one sorting tray unit for loading an inspection object, which is inspected as being defective as a result of vision inspection, in a tray. Inspection device. The method according to claim 13,
And an opening frame having an opening formed therein, and at least two support frames opposed to the opening and coupled to the opening frame to support the light source and the image acquisition unit. The method according to claim 16,
And the image acquisition unit is installed to be movable along the guide unit for guiding its movement in the support frame, and is linearly driven by a linear driving unit installed in the support frame.

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