KR101891570B1 - Roll sheet manufacturing apparatus and mask manufacturing system having the same - Google Patents

Abstract

Disclosed are a roll sheet processing apparatus for manufacturing a mask and a mask manufacturing system having the same. According to one embodiment of the present invention, the roll sheet processing apparatus capable of preventing a poor mask from being mass-produced comprises a sheet developing unit developing a basic roll sheet wound in a roll shape and having photoresist (PR) applied on both sides; and a pre-development drying unit disposed in front of the sheet developing unit and preliminarily drying the basic roll sheet before the basic roll sheet reaches the sheet developing unit to prevent the PR from being arbitrarily separated from the basic roll sheet.

Description

[0001] The present invention relates to a roll sheet processing apparatus and a mask manufacturing system having the same,

The present invention relates to a roll sheet processing apparatus for manufacturing a mask and a mask manufacturing system including the roll sheet processing apparatus. More particularly, the present invention can significantly improve the adhesion of a photoresist to a roll sheet, And to a mask manufacturing system including the same, which can prevent a bad mask from being mass-produced as the photoresist is separated.

There are a liquid crystal display (LCD) and an organic light emitting display (OLED) as a flat panel display substrate or a display substrate.

Among them, an OLED is a cemented carbide thin film display device which realizes a color image by self-emission of an organic material, and has become a promising display device because of its simple structure and high light efficiency. As a result, OLEDs are widely applied to mobile phones including TVs and monitors.

On the other hand, the recent penetration rate of mobile phones has been increasing all over the world because recent mobile phones, also called smart phones, have become personal necessities.

Especially, considering the fact that mobile phones are replaced every two or three years, mobile phone makers are forced to invest in facilities for mass production of mobile phones.

In order to construct a facility for mass production of such a mobile phone, a corresponding number of masks must be secured. That is, in order to apply the above-described OLED to the display of a cellular phone, the substrate must undergo a number of processes such as a deposition process and an etching process. A mask is used to perform the processes for the deposition of the substrate . The mask at this time is a metal mask made of a metal.

The mask used in the deposition process of the substrate may be repeatedly used several times or several times or more. However, if it is determined that there is a possibility of occurrence of defects, it is necessary to perform the deposition process on the substrate while replacing the mask frequently.

In order to replace the mask with the equipment from time to time, a large number of masks must be retained. Therefore, there is a need for a mask manufacturing system for manufacturing masks in large quantities.

In order to mass-produce a mask through a mask manufacturing system, a roll sheet wound in a roll shape is required, and a photoresist (PR) is applied on both sides of the roll sheet The mask can be manufactured after the roll sheet processing operation is performed.

At this time, the photoresist applied on both sides of the roll sheet plays a very important role in allowing the roll sheet to be made into a mask while causing a chemical reaction in the etching process, which is one of the mask manufacturing processes. It must remain firmly adhered to the sheet and should not be randomly separated from the roll sheet.

However, in the conventional method of simply applying the photoresist to the roll sheet as before, the adhesion of the photoresist to the roll sheet is significantly lowered, so that the photoresist is arbitrarily separated from the roll sheet during the process of transferring the roll sheet, It is necessary to develop a technique for improving the adhesion of the photoresist.

Korea Patent Office Application No. 10-2011-0031334

SUMMARY OF THE INVENTION Accordingly, the present invention has been made in view of the above problems, and it is an object of the present invention to provide a lithographic apparatus and a lithographic apparatus, which can significantly improve adhesion of a photoresist to a roll sheet, A roll sheet processing apparatus for manufacturing a mask, and a mask manufacturing system including the same.

According to an aspect of the present invention, there is provided a sheet developing apparatus, comprising: a sheet developing unit for developing an initial roll sheet formed by winding a roll shape and having a photoresist (PR) formed on both sides thereof; And a pre-development step of pre-drying the initial roll sheet before the initial roll sheet reaches the sheet developing unit to prevent the photoresist from being randomly separated on the initial roll sheet, The apparatus for processing a roll sheet for manufacturing a mask, which comprises a drying unit, may be provided.

And a post-drying unit disposed downstream of the sheet developing unit for drying the initial roll sheet after completion of the developing process by the sheet developing unit to prevent the photoresist from being randomly separated on the initial roll sheet can do.

The drying time of the initial roll sheet by the post-development drying unit may be longer than the drying time of the initial roll sheet by the pre-development drying unit.

Both the pre-development drying unit and the post-development drying unit include a hot air dryer for drying the initial roll sheet with hot air; And an ultraviolet dryer for drying the initial roll sheet with ultraviolet light (UV).

A post-development flushing unit disposed on a process line between the sheet developing unit and the post-development drying unit, for washing the remaining developer on the initial roll sheet passed through the sheet developing unit; And a water remover disposed downstream of the process of the post-development water wash unit, and after the development wash to remove moisture on the initial roll sheet from which the developer is washed.

An initial roll sheet feeding unit disposed upstream of the sheet developing unit and supplying the initial roll sheet; And a slimming liquid is sprayed to the initial roll sheet so that the thickness of the initial roll sheet fed from the initial roll sheet feeding unit can be processed into a thin plate of a level required in a mask manufacturing process, And a sheet slimming unit for chemically slimming the initial roll sheet.

Wherein the sheet slimming unit comprises: a slimming unit housing forming an outer appearance and into which the initial roll sheet enters and leaves; An initial roll sheet transferring unit disposed in the slimming unit housing for transferring the initial roll sheet into and out of the slimming unit housing; An upper piping portion disposed above the initial roll sheet conveying portion and having a plurality of upper injection nozzles for spraying the slimming liquid downward toward the initial roll sheet being conveyed by the action of the initial roll sheet conveying portion; A lower piping portion disposed at a lower portion of the upper piping portion and having a plurality of lower injection nozzles upwardly injecting the slimming liquid toward the initial roll sheet being transported by the action of the initial roll sheet transporting portion; And a pipe driving part connected to the upper pipe part and the lower pipe part and driving the upper pipe part and the lower pipe part in at least one direction to secure spray uniformity of the slimming liquid sprayed on the initial roll sheet can do.

The pipeline driving unit includes: a driving housing; An upper slider connected to the upper pipe portion and slidably driving the upper pipe portion; An upper sliding plate disposed on the upper portion of the driving housing and connected to the upper slider, the upper sliding plate being slidable in a direction in which the upper piping portion is driven; A lower slider connected to the lower pipe portion and slidably driving the lower pipe portion; A lower sliding plate disposed at an upper portion of the drive housing and connected to the lower slider, the lower sliding plate being slidably moved in a direction in which the lower pipe portion is driven; And a slider driving unit provided in the driving housing and connected to the upper sliding plate and the lower sliding plate, for alternately driving the upper slider and the lower slider.

The initial roll sheet feeding unit and the sheet slimming unit being disposed on a process line between the initial roll sheet feeding unit and the sheet slimming unit and spraying a degreasing liquid on the initial roll sheet unwound from the initial roll sheet feeding unit and supplied to the sheet slimming unit, And a sheet degreasing unit for removing foreign matter.

A sheet heat treatment unit disposed downstream of the process of the sheet slimming unit, for heat treating an initial roll sheet having completed the slimming process; And a photoresist application unit disposed behind the process of the sheet heat treatment unit, the photoresist application unit applying the photoresist to both surfaces of the initial roll sheet.

According to another aspect of the present invention, there is provided an image forming apparatus comprising: a sheet developing unit for developing an initial roll sheet formed by being wound in a roll shape and having a photoresist (PR) A pre-development drying unit disposed in front of a process of the sheet developing unit and preliminarily drying the initial roll sheet before the initial roll sheet reaches the sheet developing unit to prevent the photoresist from being arbitrarily separated on the initial roll sheet, A roll sheet processing apparatus for producing a mask; A roll sheet supplying unit for supplying a roll sheet formed by winding in a roll shape to a processing line in which an etching process is performed in the apparatus for processing a roll sheet for mask making; And a roll sheet etching unit which is provided at one side of the process line and which carries out an etching process for the first surface which is one surface of the roll sheet.

The roll sheet processing apparatus for mask making is characterized in that the initial roll sheet which is disposed after the step of the sheet developing unit and in which the development process by the sheet developing unit is completed is dried again to randomly separate the photoresist on the initial roll sheet And a post-development post-drying unit.

The drying time of the initial roll sheet by the post-development drying unit may be longer than the drying time of the initial roll sheet by the pre-development drying unit, and both the pre-development drying unit and the post- A hot air dryer for drying the initial roll sheet; And an ultraviolet dryer for drying the initial roll sheet with ultraviolet light (UV).

Wherein said roll sheet processing apparatus for mask making comprises a post-development flushing unit disposed on a process line between said sheet developing unit and said post-drying unit, said flushing washing unit cleaning said developer remaining on said initial roll sheet passed through said sheet developing unit; And a water remover disposed downstream of the process of the post-development water wash unit, and after the development wash to remove moisture on the initial roll sheet from which the developer is washed.

The roll sheet processing apparatus for mask making comprises an initial roll sheet feeding unit disposed in front of the process of the sheet developing unit and supplying the initial roll sheet; And a slimming liquid is sprayed to the initial roll sheet so that the thickness of the initial roll sheet fed from the initial roll sheet feeding unit can be processed into a thin plate of a level required in a mask manufacturing process, And a sheet slimming unit for chemically slimming the initial roll sheet.

The roll sheet processing apparatus for mask making is characterized in that the initial roll sheet feed unit and the sheet slimming unit are disposed on a process line between the initial roll sheet feed unit and the sheet slimming unit, A sheet degreasing unit for spraying a liquid to remove foreign matter on the initial roll sheet; A sheet heat treatment unit disposed downstream of the slurry washing step of the water eliminator and for heat treating the initial roll sheet after the slimming process; And a photoresist application unit disposed behind the process of the sheet heat treatment unit, the photoresist application unit applying the photoresist to both surfaces of the initial roll sheet.

And the other of the roll sheet which is disposed between the roll sheet supply unit and the roll sheet etching unit and is released from the roll sheet supply unit and supplied to the roll sheet etching unit before the etching process for the first surface of the roll sheet proceeds, And a tape laminating unit for etching resistance for laminating an etching resistance tape resistant to etching to the second surface which is the side surface.

Wherein the etching resistance tape laminating unit is disposed on one side of a process line in which the roll sheet is fed from the roll sheet feeding unit to the roll sheet etching unit, And may be a tape laminating unit for etching resistance during feeding during continuous feeding and laminating to the second surface of the roll sheet.

The tape laminating unit for etching resistance may further comprise: a tape supply roller for supplying the tape for etching resistance; A laminating drive roller rotatably disposed on a second surface of the roll sheet, the laminating drive roller receiving the tape for etching resistance supplied from the tape supply roller and laminating the tape on the second surface of the roll sheet; A laminating driven roller rotatably disposed on the opposite side of the laminating driving roller with the roll sheet interposed therebetween; A tape transfer roller which is disposed between the tape supply roller and the laminating drive roller and through which the tape for etching resistance passes and transfers the tape for etching resistance supplied from the tape supply roller to the laminating drive roller; And a protective film recovery roller disposed adjacent to the tape transfer roller and interacting with the tape transfer roller and recovering a protective film on the tape for etching resistance passed through the tape transfer roller.

And a tape peeling unit disposed behind the roll sheet etching unit for etching the tape for etching resistance.

And a pre-etching step of pre-etching the roll sheet before proceeding with the etching process, wherein the pre-etching is performed between the tape lamination unit for etching resistance and the roll sheet etching unit, And may further include a pre-etching unit.

And a functional non-hygroscopic unit for removing an etchant or foreign matter remaining on the roll sheet, which is directly connected to the exit of the roll sheet etching unit, using the washing water or the water mixed with the cleaning agent, .

An etching resist application unit for applying an etching resistive material resistant to etching to the first surface of the roll sheet on which the etching process is completed; And an etching resistive curing unit disposed behind the etching resistive coating unit and curing the etching resistive agent.

A roll sheet cutting unit disposed behind the etching resistive coating unit and cutting the roll sheet into unit sized unit sheets; And a carrier laminating unit disposed behind the roll sheet cutting unit and laminating a carrier to the unit sheet for transporting the unit sheet.

And a sheet etch unit disposed behind the carrier laminating unit and forming a pattern hole by performing an etching process on the second surface of the unit sheet.

The sheet etching unit may be a rate variable sheet etching unit in which a speed is accelerated at an inlet and an outlet through which the carrier is introduced and discharged.

The speed variable type sheet etching unit includes: a sheet-like unit body portion; A carrier movement module provided within the sheet-shaped unit body portion and configured to move the carrier; A plurality of second etchant spraying modules provided in the sheet-like unit body portion and spraying an etching solution onto the unit sheet in a spraying manner in the sheet-like unit body portion; And a carrier acceleration module disposed in the sheet-like unit body portion and disposed at at least one of an inlet portion through which the carrier flows and a discharge portion through which the carrier is discharged, and which accelerates the carrier relatively quickly at the position have.

According to the present invention, the adhesion of the photoresist to the roll sheet can be remarkably improved as compared with the conventional method, and thus the defective mask can be prevented from being mass-produced as the photoresist is separated during the manufacturing process of the mask.

1 is a plan view of a mask produced by a mask manufacturing system according to an embodiment of the present invention.
2 is a schematic configuration diagram of a mask manufacturing system according to an embodiment of the present invention.
3 is a configuration diagram of a mask manufacturing system according to an embodiment of the present invention.
4 is an enlarged view of a first process line of the roll sheet processing apparatus for producing a mask shown in Fig.
5 is an internal structural perspective view of the sheet slimming unit shown in Fig.
6 is a side view of the piping driver.
7 is a perspective view of the piping driving unit.
8 is a cross-sectional view of the piping driver.
9 and 10 are views showing the operation of the piping driver.
11 is an enlarged view of a second process line of the roll sheet processing apparatus for mask making shown in Fig.
12 is an enlarged view of the tape lamination unit area for etching resistance shown in Fig.
13 is an enlarged view of the roll sheet etching unit shown in Fig.
14 is an enlarged view of the functional non-hygroscopicity protection unit area shown in Fig.
Fig. 15 is a perspective view of the functional gravity-water spraying unit. Fig.
16 is a rear perspective view of FIG. 15. FIG.
17 is an internal structural view of the functional gravity hermetic wing washer unit.
18 is a diagram showing the operation of FIG.
19 is an enlarged view of the tape peeling unit area for etching resistance shown in Fig.
20 is an enlarged view of the area of the etching resistive coating unit shown in Fig.
21 is an enlarged view of the roll sheet cutting unit area shown in Fig.
22 is an enlarged view of the speed variable sheet etching unit shown in Fig.
23 is a control block diagram of a mask manufacturing system according to an embodiment of the present invention.

In order to fully understand the present invention, operational advantages of the present invention, and objects achieved by the practice of the present invention, reference should be made to the accompanying drawings and the accompanying drawings which illustrate preferred embodiments of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. Like reference symbols in the drawings denote like elements.

FIG. 1 is a plan view of a mask manufactured by a mask manufacturing system according to an embodiment of the present invention, FIG. 2 is a schematic configuration diagram of a mask manufacturing system according to an embodiment of the present invention, and FIG. Fig. 4 is an enlarged view of a first process line of the roll sheet processing apparatus for mask making shown in Fig. 3, and Fig. 5 is an enlarged view of the inside of the sheet slimming unit shown in Fig. 4 7 is a perspective view of the piping driving unit, FIG. 8 is a sectional view of the piping driving unit, FIGS. 9 and 10 are views showing the operation of the piping driving unit, and FIG. 11 is a perspective view of the piping driving unit, FIG. 12 is an enlarged view of the area of the tape lamination unit for etching resistance shown in FIG. 3, and FIG. 13 is an enlarged view of the roll of the roll shown in FIG. Sheet 15 is an enlarged view of the functional non-hog waterproofing unit area shown in Fig. 3, Fig. 15 is a perspective view of the functional non-hog waterproofing unit, Fig. 16 is a rear perspective view of Fig. 15, 19 is an enlarged view of the tape peeling unit area for etching resistance shown in Fig. 3, Fig. 20 is an enlarged view of an etching resistance peeling unit area for etching resistance shown in Fig. 3 Fig. 21 is an enlarged view of the roll sheet cutting unit area shown in Fig. 3, and Fig. 22 is an enlarged view of the speed variable sheet etching unit shown in Fig.

Referring to these drawings, the mask manufacturing system according to the present embodiment can significantly improve the adhesion of the photoresist (PR) to the roll sheet 10, So that the defective mask can be prevented from being mass-produced as the photoresist PR is separated.

The mask manufacturing system according to the present embodiment which can provide such an effect can include the first to fourth process lines (a to d) of FIG. 3 for the automatic manufacture of the mask 30, (B) a pre-development drying unit 420 and a post-development drying unit 460 are provided so that the adhesion of the photoresist PR to the photosensitive drum 10 can be significantly improved as compared with the prior art do.

The first to fourth process lines (a to d) shown in FIG. 3 will be briefly described.

The first process line (a) of FIG. 3 is a first line of the roll sheet processing apparatus for producing a mask according to the present embodiment, in which the initial roll sheet 1 (see FIG. 2) Is a processing line for applying photoresist (PR) on both sides of the initial roll sheet 1 after processing to a thickness of less than a micron. Of course, the scope of the present invention is not limited to these numerical values.

The second process line (b) of FIG. 3 is a process for drying and developing an initial roll sheet 1 on both sides of which a photoresist (PR) is applied to form a roll sheet 10 (see FIG. 2) .

The third process line (c) and the fourth process line (d) of FIG. 3 are the same as those of the first embodiment, except that the roll sheet 10 for slimming the thickness of the roll sheet processing apparatus for mask production and having the photoresist (PR) Thereby manufacturing the mask 30 substantially. Therefore, various devices such as etching, cutting, and the like can be provided in order in the third process line (c) and the fourth process line (d).

For reference, the first to fourth process lines (a to d) are separately shown in FIG. 3, but these lines may be formed as a single in-line. Therefore, the scope of the present invention is not limited to the shape of the drawings.

Hereinafter, a line for slimming the initial roll sheet 1 through a roll sheet processing apparatus for mask making and applying a photoresist PR to both surfaces thereof is referred to as a first process line (a), and a photoresist (PR) A line for drying and developing the initial roll sheet 1 coated with the roll sheet 10 is referred to as a second process line b and a line for carrying out the first etching process for the roll sheet 10 through the roll sheet etching unit 150 Is referred to as a third process line (c), and the line for carrying out the second etching process on the unit sheet 20 through the speed variable type sheet etching unit 270 is referred to as a fourth process line (d) .

Prior to a specific description of the mask manufacturing system according to the present embodiment, the structure of the mask 30 will be briefly described first with reference to Fig.

The mask 30 manufactured by the mask manufacturing system according to an embodiment of the present invention includes a mask sheet 31 formed by cutting a predetermined area in a unit sheet 20 to be described later, A plurality of mask pattern portions 32 may be formed.

One side of the mask sheet 31 can be utilized as a portion to be clamped in the facility when the mask 30 is put into the process facility.

The mask pattern portion 32 is a portion formed on the mask sheet 31 by an etching process to be described later. Although the mask 30 in which a plurality of mask pattern portions 32 are formed is shown in the drawing, a single mask pattern portion 32 may be formed in the mask sheet 31.

In addition, unlike the drawing, a plurality of lines of mask pattern portions 32 may be formed on the mask sheet 31, all of which are within the scope of the present invention.

In the mask pattern portion 32, a plurality of pattern holes 33 are formed for passing a deposition material during a deposition process of a substrate used for a display of a mobile phone or the like, in particular, an OLED substrate.

In this embodiment, the pattern holes 33 formed on the mask pattern portion 32 may all have the same rectangular shape. Of course, the pattern hole 33 may be changed into a polygonal shape, a circular shape, an elliptical shape, or the like, and therefore the scope of the present invention is not limited to the shape of the drawing.

A mask manufacturing system having the structure as shown in Fig. 3 is proposed for mass production of such a mask 30, in particular, a continuous process.

As described above, the first to fourth process lines (a to d) constituting the mask manufacturing system perform various processes in addition to the roll sheet processing apparatus for mask making, the roll sheet etching unit 150 and the speed variable type sheet etching unit 270 A large number of high-quality masks 30 can be mass-produced through their organic mechanisms.

However, since the structure of the mask manufacturing system shown in FIG. 3 is somewhat complicated, for the sake of clarity, only a few of the core structures of the mask manufacturing system shown in FIG. 3 are extracted and schematically shown in FIG. A brief structure and operation of the mask manufacturing system according to the first embodiment will be described first.

Referring to FIG. 2, in the mask manufacturing system according to the present embodiment, a roll sheet 10 is used which is wound in a roll shape for mass production of the mask 30.

The roll sheet 10 means that a sheet-like metal such as an invar material is wound in a roll shape as shown in Fig. 2 (a). For reference, invar is an alloy with 63.5% of iron and 36.5% of nickel added and having a small thermal expansion coefficient.

On both sides of the roll sheet 10 made of invar material, a photoresist (PR) is formed. Photoresist (PR) refers to a polymer resin that causes chemical changes upon irradiation with light. The negative photoresist is called a photoresist, and the photoresist disappears because the polymer solubilizes only the portion of the photoresist that the light touches. The photoresist is called a photoresist. The photoresist PR may be applied on both sides of the roll sheet 10 in advance.

On the other hand, the initial roll sheet 1 is used to obtain the roll sheet 10 described above. The initial roll sheet 1 is manufactured and supplied at the factory. The initial roll sheet 1 is a roll sheet processing apparatus for producing a mask according to the present embodiment, that is, the first process line (a) and the second process (B) so that it can be formed into the roll sheet 10 as shown in Fig. 2 (a), which is compatible with the manufacture of the mask 30. The detailed structure of the roll sheet processing apparatus for mask making will be described later.

In order to manufacture the mask 30 using the roll sheet 10 as described above, an etching resistance tape (tape) 13 is attached to one side of the roll sheet 10 as shown in FIG. 2 (b) lt; / RTI >

The tape 13 for etching resistance serves to resist etching so that etching does not proceed on the surface where the tape 13 for etching resistance is laminated. In this embodiment, the tape 13 for etching resistance is a UV (ultraviolet ray) tape 13.

The roll sheet 10 laminated with the tape 13 for etching resistance enters the roll sheet etching unit 150 as shown in FIG. 2 (c). Then, the first surface, which is one surface of the roll sheet 10, is etched through the roll sheet etching unit 150. In other words, approximately one half of the cross section of the roll sheet 10 is etched and cut into a groove shape.

Etching (or etching) means eroding a metal or a semiconductor such as the roll sheet 10 according to the present embodiment. The portion of the roll sheet 10 not covered with the photoresist PR is chemically etched It is removed with chemicals, that is, etching liquid (etching liquid). Since the etching resistance tape 13 is preliminarily laminated on the second surface of the roll sheet 10 during the etching process through the roll sheet etching unit 150, Only the first surface, which is one surface of the roll sheet 10, is etched.

The roll sheet 10 on which the first side is etched is taken out from the roll sheet etching unit 150 and then inverted as shown in Fig. 2 (d). That is, the first side that is etched in the drawing is turned upside down.

Then, an etching resist 14 is applied to the etched first surface region as shown in FIG. 2 (e). The first surface of the roll sheet 10 has already been etched and, for example, the ½-end face thereof is in the form of a groove, so that it is difficult to laminate the above-described etching resistance tape 13 on the roll sheet 10. 2 (e), instead of the etching resistance tape 13, an etching resistance agent 14 having the same function is applied.

After the etching resist 14 is applied to the etched first surface area of the roll sheet 10, the roll sheet 10 is cut to form a unit size sheet 20 of unit size, followed by a speed variable sheet etch The etching process for the second surface region that has not yet been etched proceeds through the unit 270.

In this case, since the unit sheet 20 cut to a unit size is of a very thin thin plate type and may not be smoothly conveyed, a carrier 50 is laminated on the unit sheet 20 to form a unit sheet 20 Is transported. The carrier 50 is made of a glass material and is laminated with the unit sheet 20 to transfer the unit sheet 20 to the speed variable sheet etching unit 270 and the rear process.

The unit sheet 20 laminated to the carrier 50 is introduced into the speed variable sheet etching unit 270 as shown in FIG. 2F. Then, the second surface, which is the remaining surface of the unit sheet 20, is etched through the speed variable type sheet etching unit 270. In other words, the remaining one-sided cross section of the unit sheet 20 is etched so that the pattern hole 33 (see FIG. 1) is formed.

After the pattern hole 33 is formed through so-called secondary etching through the speed variable type sheet etching unit 270, the etching resist 14 and the photoresist PR remaining on the unit sheet 20 are removed And then the unit sheet 20 is separated from the carrier 50 while a certain portion is cut, so that the mask 30 can be finally manufactured.

The simplified structure of the mask manufacturing system described above and the operation thereof are excerpted from only a core part of the constitutions of the substantial mask manufacturing system of FIG. 3, and in order to implement the mask manufacturing system substantially, A means for transferring the roll sheet 10, a means for removing the tape 13 for etching resistance, a means for removing the roll sheet 10 or the unit sheet 20 before and after the etching, Various means such as means for cleaning, means for cutting the roll sheet 10 into a unit sheet 20, means for removing the etching resist 14 and the photoresist PR are arranged on the system first process line, It should work organically with the configurations. Therefore, the detailed structure of the mask manufacturing system according to the present embodiment, and other operations, methods, and the like will be described with reference to FIGS. 3 to 22. FIG.

Referring to FIG. 3, the mask manufacturing system according to the present embodiment mainly includes a first process line 1 for slimming an initial roll sheet 1 through a roll sheet processing apparatus for mask making, and applying a photoresist PR to both surfaces thereof (b) for drying and developing the initial roll sheet 1 to which the photoresist PR is applied, and a second process line (b) for drying and developing the initial roll sheet 1 coated with the photoresist (PR) through the roll sheet etching unit 150 A third process line (c) for carrying out the car-etching process, and a fourth process line (d) for carrying out the second etching process for the unit sheet 20 through the speed variable-type sheet etching unit 270. As mentioned above, the first to fourth process lines (a to d) may be a unified in-line that is not separated from each other.

Hereinafter, for convenience of explanation, the first process line (a) will be described sequentially from the beginning. As shown in FIGS. 3 and 4, the first process line (a) includes an initial roll sheet supply unit 311, a sheet degreasing unit 320, a degreasing and rinsing unit 330, After the degreasing flushing, the water eliminator 340, the sheet slimming unit 350, the slimming after flushing unit 380, the slushing flushing water eliminator 383, the sheet heat treatment unit 390, and the roll seat rewinding unit 312 . We look at them in order.

The initial roll sheet feeding unit 311 serves to supply the initial roll sheet 1 wound and formed into a roll shape to the first process line (a).

A drive roller portion 313 is provided on the first process line (a) for supplying the initial roll sheet 1. The driving roller portion 313 serves to pull the initial roll sheet 1 by the power of a motor or the like and supply it to the first process line (a). A plurality of idle rollers 314 for guiding the initial roll sheet 1 are provided on the first process line (a).

The sheet degreasing unit 320 is disposed behind the initial roll sheet feeding unit 311 and ejects the degreasing liquid to the initial roll sheet 1 which is unwound from the initial roll sheet feeding unit 311, 1) to remove foreign matter on the surface.

In this embodiment, the sheet degreasing unit 320 supplies the degreasing liquid to the initial roll sheet 1 by a spraying method. The sheet degreasing unit 320 includes a degreasing solution receiving tank 321, a degreasing solution roller 322 provided in the degreasing solution receiving tank 321 to guide the initial roll sheet 1 and a degreasing solution roller 322 And a degreasing liquid spray 323 for spraying the degreasing liquid to the initial roll sheet 1.

The degreasing washable unit 330 is disposed behind the sheet degreasing unit 320 and serves to clean the remaining degreasing liquid on the initial roll sheet 1 through the sheet degreasing unit 320. The degreasing and flotation unit 330 cleans the remaining degreasing liquid on the initial roll sheet 1 in a spray manner. At this time, the washing liquid may be ordinary water without chemicals.

After the degreasing and flushing, the water eliminator 340 is disposed behind the degreasing and flushing unit 330 and serves to remove the water on the initial roll sheet 1 from which the degreasing liquid has been cleaned. After degreasing and washing, the water remover 340 includes an air knife 341. The residual moisture on the initial roll sheet 1 can be removed because strong air (air) is injected at the linear exit of the air knife 341 and is directed to the initial roll sheet 1.

On the other hand, the sheet slimming unit 350 is configured such that the thickness of the initial roll sheet 1 fed from the initial roll sheet feeding unit 311 can be processed into a thin sheet of the level required in the mask manufacturing process, Slimming liquid is sprayed on the initial roll sheet 1 to chemically slimming the initial roll sheet 1.

As described above, the thickness of the initial roll sheet 1 manufactured and supplied by the roll sheet manufacturer may be usually 30 to 50 microns. The thickness of the initial roll sheet 1 must be processed to a thickness of 20 microns or less, for example, Or a high-precision mask can be manufactured.

Therefore, it is necessary to process the initial roll sheet 1, that is, to slice it into a shirred sheet before the mask 30 is actually produced, which is carried out by the sheet slimming unit 350. The sheet slimming unit 350 applied to the present embodiment chemically slips the initial roll sheet 1 by ejecting a slimming liquid to the initial roll sheet 1 out of the rolling roll method.

3 to 10, the sheet slimming unit 350 includes a slimming unit housing 361, an initial roll sheet feeding portion 364, an upper pipe portion 365, a lower pipe portion 366, And may include a driving unit 370.

The slimming unit housing 361 is an appearance frame having a box-shaped cabinet shape. The initial roll sheet 1 can be inserted into and out of one side of the slimming unit housing 361 and the other side. Accordingly, the slimming unit housing 361 may be equipped with a plurality of rollers.

The initial roll sheet feeding portion 364 is disposed in the slimming unit housing 361 and serves to feed the initial roll sheet 1 into and out of the slimming unit housing 361. [ The initial roll sheet transferring portion 364 may be formed of a combination of a plurality of rollers and gears (including bevel gears).

The upper pipe portion 365 is a pipe disposed on the upper portion of the initial roll sheet conveying portion 364. The upper piping portion 365 is provided with a plurality of upper spray nozzles 365a for spraying the slimming liquid downward toward the initial roll sheet 1 being conveyed by the action of the initial roll sheet transfer portion 364. [

The lower pipe portion 366 is a pipe disposed at the lower portion of the upper pipe portion 365. The lower piping portion 366 is provided with a plurality of lower injection nozzles 366a for spraying the slimming liquid upwardly toward the initial roll sheet 1 being conveyed by the action of the initial roll sheet transfer portion 364. [ The slip liquid is sprayed to the initial roll sheet 1 by the upper pipe portion 365 and the lower pipe portion 366, so that the initial roll sheet 1 can be processed into a thin plate.

The piping drive unit 370 is connected to the upper piping unit 365 and the lower piping unit 366 and is connected to the upper piping unit 365 and the lower piping unit 366 to secure spray uniformity of the slimming liquid sprayed onto the initial roll sheet 1. [ And serves to drive the lower pipe portion 366 in at least one direction. For example, as shown by the arrows in Fig. 6, the pipe drive unit 370 can alternately drive the upper pipe portion 365 and the lower pipe portion 366 back and forth. When the slimming liquid is sprayed onto the initial roll sheet 1 while the piping driving unit 370 drives the upper piping 365 and the lower piping 366 in the forward and backward directions alternately, the spray uniformity of the slimming liquid is improved So that the initial roll sheet 1 can be uniformly slipped.

The piping driving unit 370 is provided in a form that the parts are coupled to the driving housing 371. The pipe drive unit 370 includes an upper slider 372 connected to the upper pipe unit 365 and slidably driving the upper pipe unit 365 and a lower slider 372 disposed at the upper portion of the drive housing 371 and connected to the upper slider 372 An upper sliding plate 373 slidably moved in a direction in which the upper piping 365 is driven, a lower slider 374 connected to the lower piping 366 and slidably driving the lower piping 366, And a lower sliding plate 375 disposed on the upper portion of the driving housing 371 and connected to the lower slider 374 and slidingly moved in a direction in which the lower pipe portion 366 is driven.

In this structure, a slider driving unit 376 is provided in the pipe driving unit 370 to alternately drive the upper slider 372 and the lower slider 374. [

The slider driving unit 376 is provided in the driving housing 371 and is connected to the upper sliding plate 373 and the lower sliding plate 375 to alternately drive the upper slider 372 and the lower slider 374 do.

As the slider drive unit 376 alternately drives the upper slider 372 and the lower slider 374, the upper pipe unit 365 and the lower pipe unit 366 are alternately driven forward and backward as shown in FIG. And the slimming liquid is injected into the initial roll sheet 1 through such an action, so that the uniformity of spraying of the slimming liquid can be improved.

The slider drive unit 376 is connected to the speed reducer 376a and is disposed between the upper sliding plate 373 and the lower sliding plate 375 in the drive housing 371 and a servo motor 376b for generating power, A rotating shaft 376c connected to the servo motor 376b and rotated by the operation of the servo motor 376b and an upper cam connected to the upper end of the rotating shaft 376c and rotated simultaneously with the rotating shaft 376c. An upper engaging member 376e which is coupled to the upper cam plate 376d via an upper elongated hole 373a of the upper sliding plate 373 and a lower engaging member 376e which is connected to the lower end of the rotating shaft 376c, And a lower engaging member 376g which is engaged with the lower cam plate 376f via a lower elongated hole 375a of the lower sliding plate 375 .

9 and 10 in the process of rotating the upper cam plate 376d and the lower cam plate 376f when the servo motor 376b is operated and the rotating shaft 376c is rotated, So that the upper slider 372 and the lower slider 374 can be alternately driven forward and backward.

The post-slimming water wash unit 380 is disposed behind the process of the sheet slimming unit 350 and serves to wash the slimming liquid remaining on the initial roll sheet 1 through the sheet slimming unit 350. [ As described above, since the slurry liquid, which is a chemical, is sprayed on the initial roll sheet 1 for processing the initial roll sheet 1 into a thin plate, the slurry post-sloshing unit 380 is applied to clean and remove the slurry liquid.

The post-slimming water wash unit 380 includes a plurality of water water details 381 for cleaning the slimming liquid remaining on the initial roll sheet 1 using water and a plurality of water water details 381 between the water water details 381 And a chemical water detail 382 for cleaning the slurry remaining on the initial roll sheet 1 through an acidic or alkaline chemical.

Since the acid water detail 382 for chemical agent is applied to the flushing unit 380 after slimming, it is very helpful to wash the slimming liquid remaining on the initial roll sheet 1.

After the slimming water washing, the water eliminator 383 is disposed behind the process of the water washing unit 380 after the slimming, and serves to remove moisture on the washed initial roll sheet 1 by the slimming liquid. After the slimming water washing, the water eliminator 383 also includes an air knife 384 like the water eliminator 340 after the above-mentioned degreasing and flushing. Residual on the initial roll sheet 1 can be removed because strong air (air) is ejected at the linear exit of the air knife 384 and directed to the initial roll sheet 1. [

The sheet heat treatment unit 390 is disposed behind the water eliminator 383 after the slimming water treatment and serves to heat the initial roll sheet 1 after the slimming process is completed.

The surface of the initial roll sheet 1 may be in a weak state because the initial roll sheet 1 has been chemically treated through the slimming liquid which is a chemical agent. Thus, in order to strengthen the weak surface of the initial roll sheet 1, A heat treatment unit 390 is applied.

The roll seat rewinding unit 312 rewires and rolls the sheet after the heat treatment through the sheet heat treatment unit 390. Of course, the roll seat winding unit 312 may be removed and the first process line (a) may be directly connected to the second process line (b) to form an inline.

On the other hand, a photoresist application unit 500 (see FIG. 3) is provided behind the process of the first process line (a). The photoresist coating unit 500 applies photoresist (PR) on both sides of the initial roll sheet 1 as shown in FIG. 2 (a).

In this embodiment, the photoresist application unit 500 is provided as a separate device between the first process line (a) and the second process line (b). However, the photoresist application unit 500 can be included in any one of the first process line (a) and the second process line (b) and can be inlined.

Next, as shown in Figs. 3 and 11, the second process line (b) is provided with a thin roll sheet feeding unit 411, a pre-development drying unit 420, a sheet developing unit A post-development water wash unit 440, a post-development water wash unit 450, a post-development drying unit 460, and a roll seat rewinding unit 412 are disposed. We look at them in order.

The thin roll sheet feeding unit 411 serves to supply the initial roll sheet 1, which has been thinned through the first processing line (a) of Fig. 3, to the second processing line (b).

The main driving unit 415 is provided on the second process line b for supplying the thinned-up initial roll sheet 1. The main drive unit 415 pulls the initial roll sheet 1 by the power of a motor or the like to supply the initial roll sheet 1 to the second process line b. A plurality of idle rollers 416 for guiding the initial roll sheet 1 are provided on the second process line b. A driving unit 417 for driving the initial roll sheet 1 together with the main driving unit 415 is provided in front of the post-development drying unit 460.

The sheet developing unit 430 has a role of developing the initial roll sheet 1 formed by applying the photoresist PR on both sides through the photoresist coating unit 500 do. The phenomenon is known as the work of making the latent image formed in the emulsion film of the photoresist (PR) into a visible image. The development process can be carried out by exposing the photoresist PR applied on both sides of the initial roll sheet 1 to the developer for a predetermined time.

The buffer unit 418 is provided in front of the process of the sheet developing unit 430 because a certain period of time is required in the developing process. The buffer unit 418 serves to adjust the processing speed between the thin roll sheet supply unit 411 and the pre-development drying unit 420 between the thin roll sheet supply unit 411 and the pre-development drying unit 420.

After development, the water wash unit 440 is disposed behind the process of the sheet developing unit 430 and serves to clean the remaining developing solution on the initial roll sheet 1 that has passed through the sheet developing unit 430. [ At this time, the washing liquid may be ordinary water without chemicals.

After the development water washing, the water eliminator 450 is arranged behind the post-development water wash unit 440 and serves to remove the water on the initial roll sheet 1 from which the developer has been washed. After the water wash, the dewaterer 450 includes an air knife 451. Because strong air (air) is ejected from the linear outlet of the air knife 451 to the initial roll sheet 1, The residue on the substrate 1 can be removed.

On the other hand, the pre-development drying unit 420 is arranged in front of the process of the sheet developing unit 430, and the initial roll sheet 1 is dried in advance before the initial roll sheet 1 reaches the sheet developing unit 430 Thereby preventing the photoresist PR from being separated arbitrarily on the initial roll sheet 1.

The post-development drying unit 460 is disposed behind the sheet developing unit 430 and includes an initial roll sheet 1 having completed the developing process by the sheet developing unit 430 as in the pre-developing drying unit 420 And dried again to prevent the photoresist PR from being separated from the initial roll sheet 1 at random.

In this embodiment, the pre-development drying unit 420 and the post-development drying unit 460 are disposed before and after the sheet developing unit 430, but before development, the pre-development drying unit 420 sets the photoresist PR to 1 The photoresist PR can be completely integrated into the initial roll sheet 1 by completely baking the photoresist PR in a secondary manner after the developing unit 460 has dried after development. Therefore, the adhesion of the photoresist PR to the initial roll sheet 1 can be significantly improved as compared with the prior art. As a result, the photoresist PR is separated during the manufacturing process of the mask 30, .

The drying time of the initial roll sheet 1 by the post-drying unit 460 in this embodiment is set longer than the drying time of the initial roll sheet 1 of the post-development unit 460. [

Both the pre-development drying unit 420 and the post-development drying unit 460 are provided with a hot air dryer 461 for drying the initial roll sheet 1 with hot air and an initial roll sheet 1 for ultraviolet And an ultraviolet dryer 462 for drying the ultraviolet light. As described above, since the initial roll sheet 1 is dried by using both hot air and ultraviolet rays, the drying efficiency can be improved.

The roll seat rewinding unit 412 is completely dried and the roll sheet 10 is rewound in a roll manner. Of course, it is also possible to remove the roll seat rewinding unit 412 and to cause the second process line (b) to be inline with the third process line (c) directly as described above.

3, the third process line (c) includes a roll sheet supply unit 110, a tape laminating unit 120 for etching resistance, a pre-etching unit 140, A preliminary cleaning and dewatering unit 145, a roll sheet etching unit 150, a functional gravity hiding unit 160, a tape peeling unit 180 for etching resistance, and a roll sheet collecting unit 112 are disposed. We look at them in order.

3 and 12, the roll sheet feeding unit 110 is formed by winding a roll sheet 10 (see Fig. 2) wound in a roll form for the production of the mask 30, (c) in which the etching process is carried out.

A first roll sheet drive roller 101 and a plurality of roll sheet guide rollers 103 are provided so that the roll sheet 10 is unwound through the roll sheet supply unit 110 and supplied to the third process line c .

The first roll sheet driving roller 101 is disposed on the third process line c between the roll sheet feeding unit 110 and the roll sheet collecting unit 112 and rotates the roll sheet 10 to the roll sheet collecting unit 112). The first roll sheet driving roller 101 pulls the roll sheet 10 by the driving force of a motor (not shown) and moves it to the roll sheet collecting unit 112 as a post-process.

A plurality of roll sheet guide rollers 103 are arranged on the third process line (c), and guide the roll sheet 10 to be fed. The roll sheet guide rollers 103 are disposed in some places in both the third process line c and the fourth process line d in Fig. 3 to feed the roll sheet 10 while applying tension to the roll sheet 10 It serves as a guide.

12, a roll sheet spreading guide 107 is provided around the roll sheet feeding unit 110 in addition to the roll sheet guide rollers 103 for feeding the roll sheet 10 flatly spread. The roll sheet spreading guide 107 may be applied in the same manner to the periphery of the post-etch roll sheet feeding unit 210 as shown in FIG.

A tape laminating unit 120 for etching resistance is provided behind the process of the roll sheet feeding unit 110. The tape resistance laminating unit 120 for etching resistance is disposed between the roll sheet supply unit 110 and the roll sheet etching unit 150 as shown in Figs. 3 and 12, Which is the other side of the roll sheet 10 fed from the roll sheet feeding unit 110 to the roll sheet etching unit 150 before the etching process for the etching resist tape 13 , tape, see FIG. 2). The etching resistance tape 13 is etched through only the first surface of the roll sheet 10, which is one surface of the roll sheet 10, through the roll sheet etching unit 150.

In this embodiment, the tape lamination unit 120 for etching resistance is constituted such that the roll sheet 10 is disposed on one side of the third process line c and the tape 13 for etching resistance in a roll- And is applied to the tape laminating unit 120 for etching resistance while being fed continuously to the second surface of the sheet 10 and laminating. As the roll sheet 10 is fed, the etching resistance tape 13 is laminated on one side of the roll sheet 10, thereby leading to a continuous process, thereby improving the productivity.

The etching resistance tape laminating unit 120 includes a tape supply roller 121, a laminating drive roller 122, a laminating driven roller 123, a tape transfer roller 124, and a protective film recovery roller 125.

The tape supply roller 121 supplies the tape 13 for etching resistance. In the case of this embodiment, a roll-shaped etching resistance tape 13 is used for the continuous process.

The laminating driving roller 122 is rotatably disposed on the second surface of the roll sheet 10 and receives the tape 13 for etching resistance supplied from the tape supply roller 121, Laminating to the surface.

The laminating driven roller 123 is a roller that is rotatably disposed on the opposite side of the laminating drive roller 122 with the roll sheet 10 therebetween. While the laminating drive roller 122 is operated by a motor or the like, the laminating driven roller 123 may be a free rotation type roller.

The tape transfer roller 124 is disposed between the tape supply roller 121 and the laminating drive roller 122 and passes through the tape 13 for etching resistance and is wound around the tape for the etching resistance 13 to the laminating drive roller 122. The application of the protective film collecting roller 125 can be facilitated by the tape transfer roller 124. [

The protective film collecting roller 125 is disposed adjacent to the tape transfer roller 124 and interacts with the tape transfer roller 124 and forms a protective film (not shown) on the tape 13 for etching resistance passed through the tape transfer roller 124 Not shown). The protective film recovered through the protective film collecting roller 125 is discarded.

A first roll sheet buffer unit 130, a pre-etching unit 140, and a pre-cleaning and water remover 145 are sequentially arranged behind the process of the tape resistance laminating unit 120 for etching resistance.

The first roll sheet buffer unit 130 is disposed between the tape laminating unit 120 for etching resistance and the pre-etching unit 130 as shown in Figs. 3 and 12, and the tape lamination unit 120 for etching resistance And the pre-etching unit 130. The pre-

The pre-etching unit 140 is disposed between the tape lamination unit 120 for etching resistance and the roll sheet etching unit 150 on the third process line (c) as shown in FIG. 3, Is introduced into the roll sheet etching unit 150 and performs a pre-etching process for the roll sheet 10 before proceeding with the etching process.

The pre-etching unit 140 includes a pre-etching bath 141 in which an etchant is filled and a pre-etching bath 141 in which the roll sheet 10 is deeply dipped in the etching solution in the pre- And a plurality of pre-etching guide rollers 142 for guiding the conveyance of the roll sheet 10 so as to be discharged.

The roll sheet 10 is first etched through the pre-etching unit 140 once through the roll sheet etching unit 150, thereby improving the efficiency of etching. However, in some cases, the pre-etching unit 140 may be omitted in the process. A system in which the pre-etching unit 140 is omitted in this way should also fall within the scope of the present invention.

The pre-cleaning and dewatering unit 145 is disposed between the pre-etching unit 130 and the roll sheet etching unit 150, as shown in FIG. 3, to clean the roll sheet 10 on which the pre- . Since the roll sheet 10 is lightly and simply pre-etched through the pre-etching unit 140, the pre-cleaning and the water eliminator 145 are also lightly and simply cleaned.

In this embodiment, the pre-cleaning and dewatering unit 145 includes a pre-cleaner 146 for cleaning the roll sheet 10 while spraying water toward the roll sheet 10, a roll sheet 10 having been cleaned, And an air knife 147 that winds up residual water on the surface of the air knife 147. Since the pre-cleaning and dewatering unit 145 is similar to the partial structure of the functional hydrosulfite unit 160 described below, a detailed description of the pre-washing and dewatering unit 145 will be given later with reference to the functional non- And a description thereof will be omitted here.

A roll sheet etching unit 150 is provided behind the pre-cleaning and dewatering unit 145. 2, 3, and 13, the roll sheet etching unit 150 serves to conduct a roughly ½ etching process on the first surface, which is one surface of the roll sheet 10.

This roll sheet etching unit 150 has a roll sheet etching cabinet 151. The roll sheet etching cabinet 151 is a cabinet structure in which a plurality of etching chambers 151a for etching the roll sheet 10 are formed. The etching chambers 151a communicate with each other.

The roll sheet etching cabinet 151 is provided with a roll sheet drawing roller portion 152 and a roll sheet drawing roller portion 153. [ The roll sheet drawing roller unit 152 is disposed in the entrance area of the roll sheet etching cabinet 151 and serves to draw the roll sheet 10 into the inside of the roll sheet etching cabinet 151. The roll sheet take-out roller unit 153 is disposed in the exit area of the roll sheet etching cabinet 151 and serves to draw (discharge) the roll sheet 10 to the outside of the roll sheet etching cabinet 151.

A plurality of first etchant spray modules 154 are provided in the roll sheet etch cabinet 151. The first etchant spray modules 154 spray the etchant in a spray manner toward the roll sheet 10 being conveyed in the roll sheet etch cabinet 151 to form an approximately 1 / 2 The etching process is carried out. The second etchant spray module 273, which will be described later, likewise applies a uniformity of the etchant spray because the first etchant spray module 154 injects the etchant by the spray method.

The functional non-wettable waterproofing unit 160 is provided in the rear of the process of the roll sheet etching unit 150. The functional gravimetric wet scrubber 160 is directly connected to the outlet of the roll sheet etching unit 150, as shown in Figures 3 and 14 to 18, and is provided with wash water or water, And removes the etchant or foreign matter remaining on the rolled sheet 10 after the etching process.

The functional gravity water wash unit 160 includes a unit cabinet 161 and a non-dehydrated waterproof module 162, first to third waterproof modules 167 to 169, and a moisture removal module 178 on the unit cabinet 161, As shown in Fig.

The non-hydrosulfite module 162, the first to third hydroscope modules 167 to 169, and the moisture elimination module 178 having different functions and roles are mounted on the unit cabinet 161 on a position-by-position basis, When the unit 160 is implemented, it is easy to install in the system, and there is an advantage that positional movement is free. Therefore, the functional gravity hermeticidal waterproofing unit 160 can be easily applied not only to the rear portion of the roll sheet etching unit 150 but also to the rear portion of the speed variable sheet etching unit 270, as shown in Fig.

The unit cabinet 161 forms the appearance of the functional gravity hermetic washable unit 160. Since the nonwatering module 162, the first to third water wash modules 167 to 169, and the water removal module 178 are to be mounted on the unit cabinet 161 on a position-by-position basis, the unit cabinet 161 is made of metal Frame.

A foot 161a for adjusting the height and supporting the floor can be disposed at the lower end of the unit cabinet 161. [ The unit cabinet 161 is provided with means for supplying washing water or water mixed with cleaning chemicals to the non-dehydration module 162 and the first to third water wash modules 167 to 169 at a fixed amount and a constant pressure.

A first drain portion 179a and a second drain portion 179b are provided below the unit cabinet 161. [ The first drain portion 179a is disposed on the lower side of the unit cabinet 161 and drains the wash water mixed with the washing chemicals dropped by the non-hygroscopic module 162. The second drain portion 179b is disposed on the other side of the lower portion of the unit cabinet 161 and drains the water dropped by the first to third water wash modules 167 to 169.

The specific gravity water wash module 162 is provided on one side of the upper part of the unit cabinet 161 and serves to remove the etchant remaining on the roll sheet 10 having been etched using the washing water mixed with the washing chemicals. The first to third water wash modules 167 to 169 and the water removal module 178 are similar, but the non-water wash module 162 has a cabinet or a drawer structure. It is therefore easy to install or maintain internal components.

The non-hydrosulfite module 162 may include a non-hydrosulfite module housing 163, a roll sheet transfer section 164, an upper piping section 165, a lower piping section 166, and a piping driving section 170.

The non-wet-swept module housing 163 is an exterior frame having a box-shaped cabinet shape. An inflow portion 163a through which the roll sheet 10 flows is formed at one side of the non-impregnated waterproofing module housing 163. The roll sheet 10 flowing into the inflow portion 163a passes through the non-dehydration module 162, the first to third water wash modules 167 to 169, and the moisture removal module 178 in order, (See Fig. 16) of the first roll sheet drying unit 178a, and then to the first roll sheet drying unit 105. [

The roll sheet transferring portion 164 is disposed in the non-hygrosis module housing 163 and serves to transfer the roll sheet 10 having passed through the inflow portion 163a to the first to third water wash modules 167 to 169 . The roll sheet conveying portion 164 formed by a combination of a plurality of rollers and gears (including bevel gears) may be provided in the same manner in all of the first to third washable modules 167 to 169.

The upper pipe portion 165 is a pipe disposed on the upper portion of the roll sheet transfer portion 164. The upper pipe portion 165 is provided with a plurality of upper injection nozzles 165a for spraying wash water mixed with the cleaning agent toward the roll sheet 10 being transported by the action of the roll sheet transfer portion 164.

The lower piping portion 166 is a piping disposed at the lower portion of the upper piping portion 165. The lower pipe portion 166 is provided with a plurality of lower injection nozzles 166a for upwardly injecting wash water mixed with the cleaning agent toward the roll sheet 10 being transported by the action of the roll sheet transfer portion 164.

The piping driving unit 170 is connected to the upper piping unit 165 and the lower piping unit 166. The piping driving unit 170 is connected to the upper piping unit 165 and the lower piping unit 166 to secure the uniformity of the washing water mixed with the cleaning chemicals sprayed onto the roll sheet 10. [ 165 and the lower piping portion 166 in at least one direction. For example, as shown by the arrows in FIG. 18, the piping driver 170 can alternately drive the upper piping section 165 and the lower piping section 166 back and forth. When the pipe driving part 170 drives the upper pipe part 165 and the lower pipe part 166 in an alternately forward and backward direction and the washing water mixed with the washing chemicals is injected into the roll sheet 10, And the uniformity of washing can be improved.

The first to third water wash modules 167 to 169 are disposed adjacent to the non-hygroscopic module 162 on the unit cabinet 161 and are disposed adjacent to the roll sheet 10 passing through the non- And serves to remove foreign matters remaining on the roll sheet 10.

In the case of this embodiment, three first to third water wash modules 167 to 169 are disclosed. Of course, the scope of the present invention is not limited to these numerical values. The first to third water wash modules 167 to 169 are arranged adjacently to each other in the lateral direction, and the water spray intensity gradually decreases toward the later process.

All of the first to third water receiving modules 167 to 169 are disposed in the upper and lower portions of the roll sheet 10 being conveyed in the water wash module housings 167a to 169a and the water wash module housings 167a to 169a, And a plurality of water injectors 167b-169b for spraying the water toward the roll sheet 10 at the location. The number of water injectors 167b to 169b provided in the first to third water receiving modules 167 to 169 is different from that of the water injectors 167b to 169b provided in the first to third water receiving modules 167 to 169 The roles are the same. Since the water injectors 167b to 169b are washed in the form of spraying water as in the specific gravity water wash module 162, there is no unevenness and it is advantageous in ensuring uniformity.

The water removal module 178 is disposed adjacent to the third water wash module 169 on the unit cabinet 161 and remains on the roll sheet 10 with respect to the roll sheet 10 past the third water wash module 169 It removes the water as much as possible.

Such a water removal module 178 is disposed at the top and bottom of the roll sheet 10 being transported in the water removal module housing 178a and in the water removal module housing 178a, And a plurality of air knives 178b for spraying straight air toward the air outlet 178b. The residue on the roll sheet 10 can be removed because strong air (air) is ejected from the straight exit of the air knife 178b to the roll sheet 10.

The first roll sheet drying unit 105, the etching resistance tape peeling unit 180, and the roll sheet collecting unit 112 are disposed in order behind the functional specific gravity water wash unit 160.

3, the first roll sheet drying unit 105 is disposed behind the functional non-hygroscopic wiping unit 160 and includes a roll sheet 10 that has been cleaned through the functional grabbing unit 160 It plays a role of drying. The first roll sheet drying unit 105 may be hot air drying, and the roll sheet 10 passing through the first roll sheet drying unit 105 takes no water at all.

The tape peeling unit 180 for etching resistance is disposed behind the process of the roll sheet etching unit 150 as shown in Figs. 3 and 19, and the tape 13 for etching resistance, which has been laminated for the first etching process, . The tape peeling unit 180 for etching resistance may include a peeling light irradiator 181 and a tape stripper 183 for etching resistance.

The stripping light irradiator 181 serves to irradiate light toward the tape 13 for etching resistance so that the tape 13 for etching resistance is stripped from the roll sheet 10. The light at this time may be ultraviolet light.

The etching resistance tape stripper 183 is disposed behind the stripping light irradiator 181 and removes the tape 13 for etching resistance which is peeled off from the roll sheet 10 by the action of the stripping light irradiator 181 . The tape 13 for etching resistance, which is recovered through the etching resistance tape holder 183, is discarded.

The etching resistance tape rewinder 183 includes a tape peeling drive roller 184 for peeling the etching resistance tape 13 from the roll sheet 10 while being contacted with the etching resistance tape 13, A tape removing roller 186 for winding and recovering an etching resistance tape 13 to be peeled off, a tape peeling driven roller 185 rotatably disposed on the opposite side of the tape peeling drive roller 184, And a tape guide roller 187 disposed between the tape peeling drive roller 184 and the tape recovery roller 186 and guiding the tape to be recovered.

Since the etching resistance tape stripper 183 is driven in a roll type and the tape 13 for etching resistance is stripped and recovered, the process does not need to be interrupted, thereby contributing to the improvement of productivity.

The roll sheet recovery unit 112 is disposed on the third process line c on the opposite side of the roll sheet supply unit 110 as shown in Figs. 3 and 19, and the first surface of the roll sheet 10 And serves to recover the rolled sheet 10 which is etched and the etching resistance tape 13 peels off. Of course, as described above, the roll sheet recovery unit 112 may be connected to the post-etch roll sheet supply unit 210 and used as a single functional device.

Finally, in the fourth process line (d), as shown in FIG. 3, the roll sheet supply unit 210, the etching resistive coating unit 220, the second roll sheet drying unit A unit 231, an etching resistance hardening unit 235, a roll sheet cutting unit 250, a carrier laminating unit 260, and a speed variable sheet etching unit 270 are disposed. We look at them in order.

The post-etch roll sheet feeding unit 210 is configured to feed the roll sheet 10, which has been subjected to the etching process for the first surface through the third process line (c), to the fourth process line ( d.

When the roll sheet supply unit 210 after the etching feeds the roll sheet 10 to the fourth process line (d), the surface that has been etched in the third process line (c) faces upward. Then, the roll sheet 10 having completed the etching process for the first surface is fed to the fourth process line (d) by the action of the second roll sheet drive roller 102 (see Fig. 21). In other words, the second roll sheet drive roller 102 drives the roll sheet 10 of the roll sheet supply unit 210 after etching toward the roll sheet cutting unit 250. The second roll sheet drive roller 102 has the same role as the first roll sheet drive roller 101 described above, that is, serves to pull the roll sheet 10 by the driving force of the motor.

A second roll sheet buffer unit 218 is provided behind the process of the post-etch roll sheet feeding unit 210. The second roll sheet buffer unit 218 is disposed between the post-etch roll sheet supply unit 210 and the etching resistive coating unit 220 as shown in FIGS. 3 and 20, And controls the process speed between the etching resistive coating unit 210 and the etching resistive coating unit 220.

An etching resistive coating unit 220 is provided behind the second roll sheet buffer unit 218. 2, 3 and 20, the etching resistive agent applying unit 220 is provided on the first surface of the roll sheet 10 on which the 1/2 etching process is completed on the third process line (c) And serves to apply the resistive etching resist 14. The first surface of the roll sheet 10 has already been etched and, for example, the ½-end face thereof is in the form of a groove, so that it is difficult to laminate the above-described etching resistance tape 13 on the roll sheet 10. 2 (e), instead of the etching resistance tape 13, an etching resistance agent 14 having the same function is applied.

A second roll sheet drying unit 231 and an etching resistance hardening unit 235 are disposed in order behind the process of the etching resistive coating unit 220. [

The second roll sheet drying unit 231 is disposed between the etching resistive coating unit 220 and the etching resistive curing unit 235 as shown in Figs. 3 and 20, and the etching resistive agent 14 And serves to dry the coated roll sheet 10. The second roll sheet drying unit 231 may also be hot air dried as in the first roll sheet drying unit 105 described above.

The etching resistive curing unit 235 is disposed behind the process of the etching resistive coating unit 220 and serves to cure the etching resistive material 14. The etch resist 14 applied to the first side of the roll sheet 10 through the etch resist application unit 220 can be of the gel type because if it is not cured it can flow down during the second etching So that the etching resistive agent 14 applied to the first surface through the etching resistive hardening unit 235 can be hardened.

On the fourth process line (d), a roll sheet cutting unit 250 is provided behind the process of the etching resistive curing unit 235. The roll sheet cutting unit 250 is disposed behind the process of the etching resistive coating unit 220 as shown in Figs. 3 and 21, and cuts the roll sheet 10 into a unit sheet 20 of a unit size . The unit size may be a cell phone size or a monitor size.

21, the roll sheet cutting unit 250 is schematically shown. The roll sheet cutting unit 250 includes a cutter 251 for cutting the rolled sheet 10 while being driven up and down, And a cutting die 252 for supporting the roll sheet 10 of the object.

A spread roller 253 for spreading the roll sheet 10 can be rotatably disposed in front of the cutting die 252 so that the cutting efficiency can be enhanced while being cut to an exact size.

During the cutting operation of the roll sheet 10, the conveyance of the roll sheet 10 may be temporarily stopped. At this time, in order to compensate the progressive flow of the roll sheet 10 in the previous process, (Not shown).

The carrier laminating unit 260 is disposed behind the process of the roll sheet cutting unit 250 as shown in Figs. 3 and 21 and is provided with a carrier 50 , and laminating the carrier.

Since the roll sheet 10 is of a roll to roll type, the unit sheet 20 in the form of a thin film is difficult to be conveyed by itself. Therefore, the carrier 50 is laminated on the unit sheet 20 to transport the unit sheet 20 while supporting the unit sheet 20. The carrier 50 may be a glass material and is laminated to the top of the unit sheet 20. An intermediate transfer roller 262 is disposed between the carrier laminating unit 260 and the sheet etch unit 270.

The sheet etch unit 270 is disposed behind the process of the carrier laminating unit 260 as shown in FIGS. 2, 3 and 22, and carries out an etching process on the second side of the unit sheet 20 It plays a role. In the state of the roll sheet 10, the first etching process proceeds through the roll sheet etching unit 150 and the second etching process proceeds through the sheet etching unit 270 in the state of the unit sheet 20, The above-described pattern hole 33 (see FIG. 1) can be formed only on the substrate 20.

On the other hand, the sheet etching unit 260 applied to this embodiment is a speed variable sheet etching unit 270 in which the speed is accelerated at the entrance and exit where the carrier 50 is introduced and discharged.

When the speed is accelerated at the entrance and exit through which the carrier 50 is introduced and discharged, defects at the entrance and exit can be reduced. In fact, considering the fact that the defective rate is high in the inlet and outlet area where the unit sheet 20 is introduced and discharged, there is an advantage that the defective rate can be reduced by applying the speed variable sheet etching unit 270. The rate variable sheet etching unit 270 includes a sheet-shaped unit body portion 271, a carrier moving module 272, a plurality of second etchant spray modules 273, and a carrier acceleration module 274.

The sheet-like unit body portion 271 forms the appearance of the speed variable type sheet etching unit 270. The sheet-like unit body portion 271 has a cabinet shape.

The carrier moving module 272 is provided in the sheet-like unit body portion 271 and serves to move the carrier 50. [ The carrier transfer module 272 may be applied as a roller resistant to the etchant.

A plurality of second etchant spray modules 273 are provided in the sheet-shaped unit body portion 271 and are arranged in the sheet-like unit body portion 271 to move the etching solution toward the unit sheet 20 being moved through the carrier moving module 272 Spraying method. The uniformity of the etchant spraying can be ensured because the etchant is sprayed by the spraying method.

The carrier acceleration module 274 is disposed at least at one of the inlet portion 271a through which the carrier 50 flows and the outlet portion 271b through which the carrier 50 discharges and the carrier 50 is moved relatively quickly It accelerates. The carrier acceleration module 274 is applied to both the inlet portion 271a through which the carrier 50 flows and the outlet portion 271b through which the carrier 50 is discharged. However, the carrier acceleration module 274 may be applied to only one of the inflow portion 271a and the discharge portion 271b. The carrier acceleration module 274 includes an inlet side carrier acceleration module 275 and an outlet side carrier acceleration module 276.

The inlet-side carrier acceleration module 275 is provided on the inflow portion 271a side of the sheet-shaped unit body portion 271 and is provided on the side of the carrier 50 that is introduced into the sheet- And accelerates the speed relatively faster than the speed of the carrier shifting module 272.

The discharge side carrier acceleration module 276 is provided on the side of the discharge portion 271b of the sheet type unit body portion 271 and is provided with a carrier 50 ) Relative to the speed of the carrier shifting module 272. In this case,

Both the inlet-side carrier acceleration module 275 and the outlet-side carrier acceleration module 276 can be applied as rollers. The position sensing unit 278 and the controller 280 are further provided for the operation of the inlet side carrier acceleration module 275 and the exhaust side carrier acceleration module 276.

The position sensing unit 278 detects whether the carrier 50 on which the unit sheet 20 is laminated reaches the inlet 271a or the outlet 271b. The position sensing unit 278 may be, for example, a proximity sensor, and may be disposed on the inner and outer sides of the sheet-like unit body portion 271.

The controller 280 controls the operation of the carrier acceleration module 274, that is, the operation of the inlet side carrier acceleration module 275 and the outlet side carrier acceleration module 276, based on the detection signal of the position sensing portion 278 . That is, when the carrier 50 on which the unit sheet 20 is laminated reaches the inlet 271a or the discharge portion 271b, control is performed so that the inlet-side carrier acceleration module 275 and the outlet-side carrier acceleration module 276 are operated. The speed of the carrier 50 that flows into the sheet-shaped unit body portion 271 and the speed of the carrier 50 that is discharged from the sheet-shaped unit body portion 271 are relatively quickly accelerated so as to prevent defects from occurring therein.

The controller 280 performing such a role may include a central processing unit 281 (CPU), a memory 282 (MEMORY), and a support circuit 283 (SUPPORT CIRCUIT).

The central processing unit 281 may be one of various computer processors that can be industrially applied to control the operation of the carrier acceleration module 274 based on the sensing signal of the position sensing unit 278 in this embodiment.

The memory 282 (MEMORY) is connected to the central processing unit 281. The memory 282 may be a computer readable recording medium and may be located locally or remotely and may be any of various types of storage devices such as, for example, a random access memory (RAM), a ROM, a floppy disk, May be at least one or more memories.

The support circuit 283 (SUPPORT CIRCUIT) is coupled with the central processing unit 281 to support the typical operation of the processor. Such a support circuit 283 may include a cache, a power supply, a clock circuit, an input / output circuit, a subsystem, and the like.

In this embodiment, the controller 280 controls the operation of the carrier acceleration module 274 based on the sensing signal of the position sensing section 278, and such a series of control processes and the like can be stored in the memory 282. [ Typically, a software routine may be stored in memory 282. The software routines may also be stored or executed by other central processing units (not shown).

Although processes according to the present invention are described as being performed by software routines, it is also possible that at least some of the processes of the present invention may be performed by hardware. As such, the processes of the present invention may be implemented in software executed on a computer system, or in hardware such as an integrated circuit, or in combination of software and hardware.

The functional non-wettable waterproofing unit 160 provided in the third process line (c) described above is also applied to the downstream of the process of the speed variable type sheet etching unit 270. [ The functional non-hygroscopic unit 160 applied to the rear of the speed variable sheet etching unit 270 is also directly connected to the outlet of the variable speed sheet etching unit 270, So as to remove the etchant or foreign matter remaining on the unit sheet 20 after the etching process. The description of the functional non-wettable waterproofing unit 160 disposed behind the process of the variable speed sheet etching unit 270 is replaced with the above description, and redundant description is avoided.

Hereinafter, the operation of the mask manufacturing system according to the present embodiment will be described with reference to Figs. 2 and 3. Fig.

First, the operation is on the first and second process lines (a, b). The initial roll sheet 1 manufactured and supplied at the factory is supplied to the first process line (a) through the initial roll sheet supply unit 311 and is degreased through the sheet degreasing unit 320 to remove foreign matter. Thereafter, the degreasing solution is washed through the degreasing and washing water unit 330, and the water is removed through the water eliminator 340 after degreasing and flushing.

Next, the initial roll sheet 1 is slipped to a thickness corresponding to the manufacture of the mask 30 through the sheet slimming unit 350. After the slimming, the slimming liquid is washed through the slimming water wash unit 380, and the water is removed through the slurry water washing unit 383 after the slimming water washing. After the heat treatment is performed through the sheet heat treatment unit 390 to secure the rigidity, the sheet is rewound to the roll seat rewinding unit 312.

The rewinned initial roll sheet 1, that is, the thin initial slip sheet 1 slipped thinly is supplied to the second process line b through the thin roll sheet feed unit 411. [

The thin initial roll sheet 1 supplied to the second process line (b) is primarily dried via the pre-development drying unit 420, and then developed through the sheet developing unit 430. Then, after the developing solution is washed through the post-development water washing unit 440, the water is removed through the water eliminator 450 after the development wash. Then, it is secondarily dried through the post-development drying unit 460, and then rewound to the roll seat rewinding unit 412.

In this embodiment, the pre-development drying unit 420 and the post-development drying unit 460 are disposed before and after the sheet developing unit 430, but before development, the pre-development drying unit 420 sets the photoresist PR to 1 The photoresist PR can be completely integrated into the initial roll sheet 1 by completely baking the photoresist PR in a secondary manner after the developing unit 460 has dried after development. Therefore, the adhesion of the photoresist PR to the initial roll sheet 1 can be significantly improved as compared with the prior art. As a result, the photoresist PR is separated during the manufacturing process of the mask 30, .

Next, the operation is on the third process line (c). The processed roll sheet 10 is fed to the roll sheet feeding unit 110 through the second process line b described above and the roll sheet 10 is unrolled in the roll sheet feeding unit 110 and fed do. Next, in the tape resistance laminating unit 120 for etching resistance, the etching resistance tape 13 is laminated on the second surface, which is one surface of the roll sheet 10, as shown in FIG. 2 (b).

Next, the roll sheet 10 to which the tape 13 for etching resistance is laminated is pre-etched via the pre-etching unit 140 and then cleaned and dried through the pre-cleaning and the water remover 145. Then, the first surface, which is one surface of the roll sheet 10, is etched, that is, the first surface is etched through the roll sheet etching unit 150. In other words, approximately one half of the cross section of the roll sheet 10 is etched and cut into a groove shape.

The primary etched roll sheet 10 is removed from the roll sheet etch unit 150 and washed and dried through the functional graphene hydrosulfide unit 160 and then dried and etched through the tape peeling unit 180 for etch resistance After the tape 13 is peeled off, it is collected in the roll sheet collecting unit 112.

Next, operation on the fourth process line (d) is performed. After the etching, the roll sheet feeding unit 210 feeds the primary-etched roll sheet 10 to a post-process. At this time, the etched side faces upward.

The roll sheet 10 fed through the post-etch roll sheet feed unit 210 is coated with an etching resist 14 on the etched side, i.e., the first side, through the etch resist application unit 220. Then, the applied resistive agent 14 is cured while passing through the second roll sheet drying unit 231 and the etching resistive curing unit 235.

The roll sheet 10 is then processed through a roll sheet cutting unit 250 into a unit sized unit sheet 20 and then the carrier 50 is laminated to one side in the carrier laminating unit 260.

The unit sheet 20 laminated with the carrier 50 is led into the speed variable sheet etching unit 270 by the action of the carrier 50. Then, the second surface, which is the remaining surface of the unit sheet 20, is etched through the speed variable type sheet etching unit 270. In other words, the remaining one-sided cross section of the unit sheet 20 is etched so that the pattern hole 33 (see FIG. 1) is formed.

After the pattern hole 33 is formed through so-called secondary etching through the speed variable type sheet etching unit 270, the etching resist 14 and the photoresist PR remaining on the unit sheet 20 are removed And then the unit sheet 20 is separated from the carrier 50 while a certain portion is cut, so that the mask 30 can be finally manufactured.

According to the present embodiment having the structure and function as described above, the adhesion of the photoresist (PR) to the roll sheet (10) can be remarkably improved as compared with the conventional one, It is possible to prevent the defective mask from being mass-produced as the photoresist PR is separated.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention. It is therefore intended that such modifications or alterations be within the scope of the claims appended hereto.

1: initial roll sheet 10: roll sheet
14: etching resistance 20: unit sheet
30: mask 31: mask sheet
32: pattern part 33: pattern hole
50: Carrier
120: Tape laminating unit for etching resistance
130: first roll sheet buffer unit 150: roll sheet etching unit
160: Functional gravity water wash unit 162: Specific gravity water washing module
170: Piping drive part 180: Tape peeling unit for etching resistance
210: a roll sheet feeding unit after etching 220: an etching resistive agent dispensing unit
250: roll sheet cutting unit 260: carrier laminating unit
270: speed variable type sheet etching unit 320: sheet degreasing unit
350: sheet slimming unit 390: sheet heat treatment unit
420: pre-development drying unit 430: sheet developing unit
460: post-development drying unit 500: photoresist coating unit

Claims (27)

A sheet developing unit for developing an initial roll sheet formed by being wound in a roll shape and formed by applying a photoresist (PR) on both sides;
A preliminary drying step of preliminarily drying the initial roll sheet prior to the initial roll sheet reaching the sheet developing unit to prevent the photoresist from being arbitrarily separated on the initial roll sheet, unit;
An initial roll sheet feeding unit disposed upstream of the sheet developing unit and supplying the initial roll sheet; And
A slimming liquid is sprayed to the initial roll sheet so that the thickness of the initial roll sheet fed from the initial roll sheet feeding unit can be processed into a thin sheet required for a mask manufacturing process, A sheet slimming unit for chemically slimming the roll sheet,
The sheet slimming unit includes:
A slimming unit housing which forms an outer appearance and into which the initial roll sheet enters and leaves;
An initial roll sheet transferring unit disposed in the slimming unit housing for transferring the initial roll sheet into and out of the slimming unit housing;
An upper piping portion disposed above the initial roll sheet conveying portion and having a plurality of upper injection nozzles for spraying the slimming liquid downward toward the initial roll sheet being conveyed by the action of the initial roll sheet conveying portion;
A lower piping portion disposed at a lower portion of the upper piping portion and having a plurality of lower injection nozzles upwardly injecting the slimming liquid toward the initial roll sheet being transported by the action of the initial roll sheet transporting portion; And
And a pipe driving part connected to the upper pipe part and the lower pipe part and driving the upper pipe part and the lower pipe part in at least one direction in order to secure spray uniformity of the slimming liquid sprayed on the initial roll sheet, ,
The pipe-
A drive housing;
An upper slider connected to the upper pipe portion and slidably driving the upper pipe portion;
An upper sliding plate disposed on the upper portion of the driving housing and connected to the upper slider, the upper sliding plate being slidable in a direction in which the upper piping portion is driven;
A lower slider connected to the lower pipe portion and slidably driving the lower pipe portion;
A lower sliding plate disposed at an upper portion of the drive housing and connected to the lower slider, the lower sliding plate being slidably moved in a direction in which the lower pipe portion is driven; And
And a slider driving unit provided on the driving housing and connected to the upper sliding plate and the lower sliding plate for alternately driving the upper slider and the lower slider. The method according to claim 1,
And a post-drying unit disposed downstream of the sheet developing unit for drying the initial roll sheet after completion of the developing process by the sheet developing unit to prevent the photoresist from being randomly separated on the initial roll sheet Wherein said mask sheet is a sheet. 3. The method of claim 2,
Wherein the drying time of the initial roll sheet by the post-development drying unit is longer than the drying time of the initial roll sheet by the pre-development drying unit. 3. The method of claim 2,
Both of the pre-development drying unit and the post-development drying unit,
A hot air dryer for drying the initial roll sheet with hot air; And
And an ultraviolet drier for drying the initial roll sheet by ultraviolet rays (UV, ultraviolet). 3. The method of claim 2,
A post-development flushing unit disposed on a process line between the sheet developing unit and the post-development drying unit, for washing the remaining developer on the initial roll sheet passed through the sheet developing unit; And
Further comprising a water remover disposed downstream of the process of the post-development water wash unit and after the development wash to remove moisture on the initial roll sheet from which the developer has been washed. delete delete delete The method according to claim 1,
The initial roll sheet feeding unit and the sheet slimming unit being disposed on a process line between the initial roll sheet feeding unit and the sheet slimming unit and spraying a degreasing liquid on the initial roll sheet unwound from the initial roll sheet feeding unit and supplied to the sheet slimming unit, Further comprising a sheet degreasing unit for removing foreign matter. The method according to claim 1,
A sheet heat treatment unit disposed downstream of the process of the sheet slimming unit, for heat treating an initial roll sheet having completed the slimming process; And
Further comprising a photoresist coating unit disposed behind the process of the sheet heat treatment unit and applying the photoresist to both surfaces of the initial roll sheet. A sheet developing unit for developing an initial roll sheet formed by being wound in a roll shape and having a photoresist (PR, Photo Resist) applied on both surfaces thereof; And a pre-development drying unit for preliminarily drying the initial roll sheet before the initial roll sheet reaches the sheet developing unit to prevent the photoresist from being arbitrarily separated on the initial roll sheet, Device;
A roll sheet supplying unit for supplying a roll sheet formed by winding in a roll shape to a processing line in which an etching process is performed in the apparatus for processing a roll sheet for mask making;
A roll sheet etching unit provided at one side of the process line and performing an etching process on a first surface which is one surface of the roll sheet;
An etching resist application unit for applying an etching resistive material resistant to etching to the first surface of the roll sheet on which the etching process is completed;
An etching resistive curing unit disposed behind the etching resistive coating unit and curing the etching resistive agent;
A roll sheet cutting unit disposed behind the etching resistive coating unit and cutting the roll sheet into unit sized unit sheets; And
And a carrier laminating unit disposed behind the roll sheet cutting unit and laminating a carrier to the unit sheet for transferring the unit sheet. 12. The method of claim 11,
The apparatus for processing a roll sheet for mask making,
And a post-drying unit disposed downstream of the sheet developing unit for drying the initial roll sheet after completion of the developing process by the sheet developing unit to prevent the photoresist from being randomly separated on the initial roll sheet And said mask manufacturing system. 13. The method of claim 12,
The drying time of the initial roll sheet by the post-developing unit is longer than the drying time of the initial roll sheet by the pre-developing unit,
Both of the pre-development drying unit and the post-development drying unit,
A hot air dryer for drying the initial roll sheet with hot air; And
And an ultraviolet drier for drying said initial roll sheet with ultraviolet light (UV). 13. The method of claim 12,
The apparatus for processing a roll sheet for mask making,
A post-development flushing unit disposed on a process line between the sheet developing unit and the post-development drying unit, for washing the remaining developer on the initial roll sheet passed through the sheet developing unit; And
Further comprising a water remover disposed downstream of the process of the post-development water wash unit, and after development water cleaning to remove water on the initial roll sheet from which the developer has been washed. 12. The method of claim 11,
The apparatus for processing a roll sheet for mask making,
An initial roll sheet feeding unit disposed upstream of the sheet developing unit and supplying the initial roll sheet; And
A slimming liquid is sprayed to the initial roll sheet so that the thickness of the initial roll sheet fed from the initial roll sheet feeding unit can be processed into a thin sheet required for a mask manufacturing process, Further comprising a sheet slimming unit for chemically slimming the roll sheet. 16. The method of claim 15,
The apparatus for processing a roll sheet for mask making,
The initial roll sheet feeding unit and the sheet slimming unit being disposed on a process line between the initial roll sheet feeding unit and the sheet slimming unit and spraying a degreasing liquid on the initial roll sheet unwound from the initial roll sheet feeding unit and supplied to the sheet slimming unit, A sheet degreasing unit for removing foreign matter;
A sheet heat treatment unit for heat-treating the initial roll sheet having completed the slimming process; And
Further comprising a photoresist application unit disposed behind the process of the sheet heat treatment unit and applying the photoresist to both surfaces of the initial roll sheet. 12. The method of claim 11,
And the other of the roll sheet which is disposed between the roll sheet supply unit and the roll sheet etching unit and is released from the roll sheet supply unit and supplied to the roll sheet etching unit before the etching process for the first surface of the roll sheet proceeds, Further comprising a tape laminating unit for etching resistance for laminating an etching resistance tape resistant to etching to a second side which is a side surface of the mask. 18. The method of claim 17,
The tape lamination unit for etching resistance comprises:
The roll sheet is placed on one side of the process line to be fed from the roll sheet feeding unit to the roll sheet etching unit and the tape for etching resistance is continuously fed to the second side of the roll sheet being fed And a tape laminating unit for etching resistance during feeding and laminating. 18. The method of claim 17,
The tape lamination unit for etching resistance comprises:
A tape supply roller for supplying the etching resistance tape;
A laminating drive roller rotatably disposed on a second surface of the roll sheet, the laminating drive roller receiving the tape for etching resistance supplied from the tape supply roller and laminating the tape on the second surface of the roll sheet;
A laminating driven roller rotatably disposed on the opposite side of the laminating driving roller with the roll sheet interposed therebetween;
A tape transfer roller which is disposed between the tape supply roller and the laminating drive roller and through which the tape for etching resistance passes and transfers the tape for etching resistance supplied from the tape supply roller to the laminating drive roller; And
And a protective film recovery roller disposed adjacent to the tape transfer roller and interacting with the tape transfer roller and recovering a protective film on the tape for etching resistance passed through the tape transfer roller, . 18. The method of claim 17,
Further comprising a tape peeling unit for etching resistance for peeling off the tape for etching resistance, the tape peeling unit being disposed behind the roll sheet etching unit. 18. The method of claim 17,
And a pre-etching step of pre-etching the roll sheet before proceeding with the etching process, wherein the pre-etching is performed between the tape lamination unit for etching resistance and the roll sheet etching unit, Further comprising a pre-etching unit. 12. The method of claim 11,
Further comprising a functional non-hygroscopic unit for removing an etchant or foreign matter remaining on the roll sheet on which the etching process is completed by using washing water or water mixed with washing chemicals, directly connected to the outlet of the roll sheet etching unit Wherein the mask is a mask. delete delete 12. The method of claim 11,
Further comprising a sheet etching unit disposed behind the carrier laminating unit to form a pattern hole by performing an etching process on the second surface of the unit sheet. 26. The method of claim 25,
Wherein the sheet etching unit is a rate variable sheet etching unit in which a speed is accelerated at an inlet and an outlet through which the carrier is introduced and discharged. 27. The method of claim 26,
Wherein the speed variable sheet etching unit comprises:
A sheet-like unit body portion;
A carrier movement module provided within the sheet-shaped unit body portion and configured to move the carrier;
A plurality of second etchant spraying modules provided in the sheet-like unit body portion and spraying an etching solution onto the unit sheet in a spraying manner in the sheet-like unit body portion; And
And a carrier acceleration module disposed in the sheet-like unit body part and disposed at at least any one of an inlet part through which the carrier flows and a discharge part through which the carrier is discharged and which accelerates the carrier relatively quickly at the position .

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