KR101849606B1 - Spatially-resolved spectral imaging apparatus based on single-shot - Google Patents

Abstract

Thereby providing a spectroscopic analysis apparatus. The spectroscopic analysis apparatus includes a pedestal for supporting a sample for analyzing an internal component, a light source for irradiating the first light to the surface of the sample, and a second light scattering from the sample due to the first light, The first light emitted from the sample and the second light obtained from the sample are not interfered with each other.

Description

{SPATIALLY-RESOLVED SPECTRAL IMAGING APPARATUS BASED ON SINGLE-SHOT}

The present invention relates to an apparatus for imaging and analyzing a spectroscopic spectrum that varies according to a space inside a sample.

In general, a fluorescence spectrometer based on a fluorescence phenomenon based on a luminescence phenomenon or a Raman spectrometer based on a scattering phenomenon can be applied to various fields including bio-industry, pharmaceutical industry, environment application, homeland security, scientific investigation, It is an excellent analytical instrument used in the field.

Rapid advances in the laser technology and optical products industries have recently been extended to field-penetrating spectroscopy applications capable of non-invasive detection of chemical or biological targets such as pharmaceutical products, medical diagnostics and biomedical imaging. However, the depth limitation of noninvasive detection in turbid materials is very difficult to overcome.

Recent research in deep Raman spectroscopy has focused on improving the detection depth and providing the chemical information of the analyte below the turbid media.

Spatially resolved and temporally resolved depths including transmission Raman spectroscopy, spatially offset Raman spectroscopy (SORS), and time-resolved Raman spectroscopy. The deep Raman method has been developed and widely used in depth Raman spectroscopy.

The conventional quality verification method has problems such as delay of the process time and mixing of impurities because the chemical substance present in the packaging material must be taken out to the outside for analysis and the conventional depth spectrometry apparatus acquires only one spectrum per position Therefore, in order to obtain the entire data according to the depth, it is troublesome to add and analyze signals for each position.

An embodiment of the present invention is to provide a spectroscopic analyzer capable of easily analyzing an internal component existing in a sample without taking it out to the outside.

An embodiment of the present invention is to provide a spectroscopic analysis apparatus capable of easily obtaining the entire data of a spectrum along a depth at a fixed light irradiation position.

According to an aspect of the present invention, there is provided an apparatus for analyzing at least one internal component, comprising: a pedestal for supporting a sample; A light source having a fixed light irradiation position for irradiating the surface of the sample with the first light; And at least one second scattered light obtained from the inside of the sample in accordance with a depth of the sample when the first scattered light is scattered from the surface of the sample due to the first light and the first light is irradiated to the inside of the sample, And a detector for collecting the spectrum of the second light and detecting an internal component of the sample, wherein the detector detects the first scattered light and the at least one second scattered light A receiving unit; A detector spaced apart from the receiver and capable of detecting a specific spectrum in the first and second scattered light received through the receiver and obtaining total data of a spectrum along a depth at one light irradiation position; And an analyzer for analyzing the specific spectrum detected through the detector to determine the internal components of the sample. The receiver removes interference from the laser light source and detects spatial resolution of the first scattered light and the second scattered light scattered from the sample A first spatial filter to be improved; A first convex lens disposed apart from the first spatial filter, the first convex lens imaging the first scattered light and the second scattered light; A second convex lens for imaging the first scattered light and the second scattered light focused from the first convex lens to the detector and a second convex lens positioned between the first convex lens and the second convex lens and passing through the first convex lens, A filter unit including a first filter and a second filter capable of selectively transmitting the first scattered light and the second scattered light while blocking the transmission of the laser light scattered light from the light source scattered light, the first scattered light and the second scattered light; And a second spatial filter disposed between the second convex lens and the detector for eliminating interference from the laser light source and improving the spatial resolution of the first scattered light and the second scattered light transmitted from the second convex lens, The detector includes a dispersion optical system that receives the first scattered light and the second scattered light transmitted from the second convex lens and makes the light propagate at different angles according to the wavelength of light, and a second optical system that receives the first scattered light and the second scattered light, And a two-dimensional detection sensor for two-dimensionally receiving light by selecting a wavenumber and an amplitude from two scattered lights.

At this time, the first light irradiated to the sample and the second light obtained from the sample may not interfere with each other.

At this time, the light source is disposed on the surface of the sample, and the incident angle of the first light irradiated to the sample may be more than 0 degrees and less than 80 degrees.

Here, the light source may be spaced apart from the second light so that the second light collected by the detection unit does not interfere with the first light, and the light source may be spaced apart from the sample to be scattered by a predetermined distance (L1) And the light source may be irradiated at a position spaced apart from the center of the sample surface by a predetermined height (H).

In this case, the light source further includes a lens for focusing the light source on the sample, and the predetermined distance L1 may be determined according to the focal length of the lens.

At this time, the predetermined distance L1 may be 10 mm to 100 mm, and the predetermined height H may be 0 mm to 50 mm.

Here, the light source may be a laser light source, and the laser light source may be one of a solid laser, a gas laser, and a diode laser.

At this time, the sample includes a first sample located on the outer surface of the sample, a second sample located on the inner side of the first sample, and a third sample located on the inner side of the second sample, 1 scattered light is obtained from the first sample, the second scattered light is obtained from the second sample, and the second light may further include third scattered light obtained from the third sample.

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The spectroscopic analysis apparatus according to an embodiment of the present invention can easily, safely and clearly detect any internal components existing in the sample without taking it out to the outside.

The spectroscopic analyzing apparatus according to an embodiment of the present invention can easily obtain the entire data of the spectrum along the depth at one light irradiation position and detect the large area component at a time by including the detecting unit.

The spectroscopic analysis apparatus according to an embodiment of the present invention can detect impurities and component composition ratios quickly and accurately for all samples including a two-dimensional detection sensor.

1 is a perspective view showing a spectroscopic analysis apparatus according to an embodiment of the present invention.
2 is a cross-sectional view illustrating operation of the spectroscopic analysis apparatus according to an embodiment of the present invention.
FIG. 3 is a schematic view showing operation of a spectroscopic analysis apparatus according to an embodiment of the present invention.
FIG. 4 is a schematic view showing that light in a sample is scattered when a spectroscopic analysis apparatus according to an embodiment of the present invention is operated.
5 is a schematic diagram illustrating operation of a spectroscopic analysis apparatus according to an embodiment of the present invention.
FIG. 6 is a graph showing spectra detected on the surface and inside of the sample detected by the detection unit of the spectroscopic analysis apparatus according to an embodiment of the present invention. FIG.
FIG. 7 is a graph showing spectra in a sample among the spectra detected by the detection unit of the spectroscopic analysis apparatus according to an embodiment of the present invention. FIG.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings, which will be readily apparent to those skilled in the art to which the present invention pertains. The present invention may be embodied in many different forms and is not limited to the embodiments described herein. In order to clearly illustrate the present invention, parts not related to the description are omitted, and the same or similar components are denoted by the same reference numerals throughout the specification.

In this specification, the terms "comprises" or "having" and the like refer to the presence of stated features, integers, steps, operations, elements, components, or combinations thereof, But do not preclude the presence or addition of one or more other features, integers, steps, operations, components, parts, or combinations thereof. Also, where a section such as a layer, a film, an area, a plate, or the like is referred to as being "on" another section, it includes not only the case where it is "directly on" another part but also the case where there is another part in between. On the contrary, where a section such as a layer, a film, an area, a plate, etc. is referred to as being "under" another section, this includes not only the case where the section is "directly underneath"

1 is a perspective view showing a spectroscopic analysis apparatus according to an embodiment of the present invention. 2 is a cross-sectional view illustrating operation of the spectroscopic analysis apparatus according to an embodiment of the present invention. FIG. 3 is a schematic view showing operation of a spectroscopic analysis apparatus according to an embodiment of the present invention. FIG. 4 is a schematic view showing that light in a sample is scattered when a spectroscopic analysis apparatus according to an embodiment of the present invention is operated. 5 is a schematic diagram illustrating operation of a spectroscopic analysis apparatus according to an embodiment of the present invention. FIG. 6 is a graph showing spectra detected on the surface and inside of the sample detected by the detection unit of the spectroscopic analysis apparatus according to an embodiment of the present invention. FIG. FIG. 7 is a graph showing spectra in a sample among the spectra detected by the detection unit of the spectroscopic analysis apparatus according to an embodiment of the present invention. FIG.

In the following description, it is assumed that the detection unit side is defined forward in the sample in FIG. 1 and the sample side is defined in the detection unit in the rear direction.

Referring to FIG. 1, a spectroscopic analyzer 1 according to an embodiment of the present invention may include a light source 100, a sample 200, and a detector 300. Accordingly, the spectroscopic analysis apparatus 1 according to the embodiment of the present invention can easily, safely and clearly detect any internal components existing in the sample 200 without taking it out to the outside.

In an embodiment of the present invention, a pedestal (not shown) may be installed vertically to the ground to support the sample 200 having various thicknesses and geometric structures for analyzing internal components. At this time, if the base 200 can stably fix the sample 200, its size, shape or material is not limited.

Referring to FIG. 1, in an embodiment of the present invention, the light source unit 100 may irradiate the first light 112 to the surface of the sample 200. At this time, the light source unit 100 may be any one of a diode laser, a solid laser, and a gas laser, which is a laser light source 110 having a monochromatic wavelength.

In an embodiment of the present invention, an optical fiber (not shown) may transfer the first light 112 to the transfer unit 130. In this case, the optical fiber is an optical fiber in which the refractive index of the central portion is high and the refractive index of the outer portion is low, so that light passing through the center portion is totally reflected. The optical fiber is a single mode optical fiber or a multi-mode optical fiber ).

Referring to FIG. 1, the transfer unit 130 can control the position of the first light 111 irradiated to the sample 200. At this time, the transfer unit 130 can control the irradiation position manually or automatically.

Referring to FIG. 2, in one embodiment of the present invention, the transfer unit 130 may include a first lens 132, a band-pass filter 134, and a second lens 136. Meanwhile, in an embodiment of the present invention, the first lens 132 may convert the first light 112 received from the optical fiber into parallel light. Here, the first lens 132 may be a plano-convex lens, a biconvex lens, an aspherical convex lens, or the like, but is not limited thereto.

On the other hand, the band-pass filter 134 can attenuate frequencies other than a specific range, for example, 1-5 nm, from the parallel light received from the first lens 132. Also, the band-pass filter can transmit the parallel light to the second lens 136.

On the other hand, the second lens 136 can focus the parallel light passing through the band-pass filter 134 and irradiate the sample.

The laser light source 110 may be spaced apart from the second light so that the second light 250 collected by the detection unit 300 and the first light 112 do not interfere with each other.

Referring to FIG. 2, in one embodiment of the present invention, the laser light source 110 may be disposed on a surface of a sample 200 installed perpendicular to the ground. At this time, the laser light source 110 may have an incident angle (?) Of the first light (112) irradiated to the sample (200) of more than 0 degrees and less than 80 degrees.

In one embodiment of the present invention, the angle of incidence [theta] of the first light 112 may preferably be between 30 degrees and 70 degrees. More preferably from 40 degrees to 60 degrees.

The larger the incident angle? Of the first light 112 is, the greater the probability that the incident light directly enters the sample 200, and the larger the signal, the lower the degree of separation between the signals, The overall signal intensity entering the sample 200 is reduced while the separation between the signals can be increased.

However, in one embodiment of the present invention, an optimum incident angle may vary depending on the degree of scattering of the sample 200.

Also, the spectroscopic analysis apparatus 1 according to an embodiment of the present invention can prevent the first light 112 irradiated to the sample 200 from interfering with the second light 250 obtained from the sample.

At this time, in the embodiment of the present invention, the sample 200 may be formed with the scattering surface A where the first light 112 is irradiated and the irradiation point P and the second light 250 are scattered. The irradiation position of the laser light source may be spaced apart from the second light 250 scattered by the sample 200 by a predetermined height H.

That is, the laser light source 110 irradiates the sample 200 at a position spaced apart from the center of the sample where the second light 250 is scattered by a predetermined height H, and the laser light source 110 irradiates the sample The distance L1 between the first and second end portions is equal to the distance L1.

In one embodiment of the present invention, the predetermined distance L1 is a value obtained by multiplying the focal length of the second lens 136 by cos ([theta]), and may vary depending on the focal length. At this time, the predetermined distance L1 may be 10 mm to 100 mm. The predetermined height H may be more than 0 mm but not more than 50 mm.

Accordingly, the spectroscopic analysis apparatus 1 according to an embodiment of the present invention can easily obtain the entire data of the spectrum along the depth at the irradiation point P, which is one irradiation position, It is possible to easily, safely and clearly detect any internal component without taking it out to the outside,

Referring to FIG. 3, in one embodiment of the present invention, the sample 200 may include a first sample 210, a second sample 220, and a third sample 230. At this time, the first sample 210 is located on the outer side of the sample 200, the second sample 220 is located on the inner side of the first sample, and the third sample 230 is located on the inner side of the second sample can do.

At this time, the first sample 210, the second sample 220, and the third sample 230 may be different materials, and the second sample and the third sample may be the same material in some cases.

In one embodiment of the present invention, the second light 250 includes first scattered light 252 scattered from the first sample 210, second scattered light 254 obtained from the second sample 220, The second scattered light 256 and the third scattered light 256 obtained from the second scattered light 230. [ Where the second light 250 may be Raman or fluorescent.

In an embodiment of the present invention, the second light 250 may be laser light source scattering light (not shown), first scattering light 252, second scattering light 254, and third scattering light 256.

Referring to FIG. 2, the detector 300 detects the scattered light of the second light 250, that is, the first scattered light 252, the second scattered light 254, and the second scattered light 254, 3 scattered light 256 may be placed on the scattering path. At this time, the detector 300 collects spectra of the first scattered light 252, the second scattered light 254, and the third scattered light 256 obtained by scattering from the sample 200 due to the first light, and detects the internal components of the sample can do.

1 and 2, the detector 300 may include a receiver 310, a detector 330, and an analyzer 350 in one embodiment of the present invention.

The branch analyzer 1 according to the embodiment of the present invention can easily, safely and clearly detect any internal components existing in the sample without taking it out to the outside.

2 and 3, in an embodiment of the present invention, the receiving unit 310 includes a first spatial filter 312, a first convex lens 314, a first filter 316, a second filter 318, A second convex lens 322, and a second spatial filter 324.

Meanwhile, in an embodiment of the present invention, the first spatial filter 312 can be used to improve the image recorded on the detector 330, and by using it, interference can be removed from the laser light source and spatial resolution can be improved . The first spatial filter 312 can transmit the second light 250 scattered by the sample 200 to the first convex lens 314 as parallel light.

Referring to FIG. 2, the convex lens 314 may be spaced apart from the center of the sample 200 by a predetermined distance L2 in an embodiment of the present invention. At this time, in one embodiment of the present invention, the predetermined distance L2 may be more than 20 mm but less than 300 mm.

The first convex lens 314 transmits the first scattered light 252 scattered in the sample 200, the second scattered light 254 and the third scattered light 256 to the first filter 316 To the second filter (318). At this time, the first convex lens 314 may be a flat convex lens, a double convex convex lens, an aspherical convex lens, or the like, but is not limited thereto.

In one embodiment of the present invention, the first filter 316 and the second filter 318 may be long wavelength transmissive filters, and the first filter 316 and the second filter 318 may be termed filter portions, The first filter 316 and the second filter 318 of the first filter 316 and the second filter 318 are arranged in the order of the laser light source scattered light, the first scattered light 252, the second scattered light 254 and the third scattered light 256 which have passed through the first convex lens 314 It is possible to selectively transmit the first scattered light 252, the second scattered light 254, and the third scattered light 256.

That is, in one embodiment of the present invention, the first filter 316 and the second filter 318 can prevent transmission of the laser beam scattered light.

The second convex lens 322 diffuses the first scattered light 252, the second scattered light 254, and the third scattered light 256, which have passed through the second filter 318, Filter 324, as shown in FIG.

At this time, the second convex lens 322 may be a flat convex lens, a double-convex convex lens, an aspherical convex lens, or the like.

Referring to FIG. 3, in an embodiment of the present invention, a second spatial filter 324 may be used to improve the image recorded in the detector 330, which may be used to remove interference from the laser light source, Can be improved. The second spatial filter 312 may transmit the second light 250 transmitted from the second convex lens 322 to the detector 330 as parallel light.

The spectrometer 1 according to the embodiment of the present invention can detect spectra having different depth information in order to obtain the entire depth information at one irradiation point P of the detector 330.

Meanwhile, in one embodiment of the present invention, the detector 330 may include a dispersion optical system 332 and a two-dimensional detection sensor 334. The dispersion optical system 332 receives the first scattered light 252, the second scattered light 254 and the third scattered light 256 transmitted from the second convex lens 322 and proceeds at different angles according to the wavelength of the light You can make it.

At this time, since the first scattered light 252, the second scattered light 254, and the third scattered light 256 incident through the second convex lens 322 have various wavelengths, the lights having different wavelengths are split and travel at different angles .

The light having different wavelengths is received by the two-dimensional detection sensor 334 and the two-dimensional detection sensor 334 receives one of the second light 250 received through the dispersion optical system 332 .

5, the two-dimensional detection sensor 334 selects a wave number and an amplitude from the second light 250 received through the dispersion optical system 332 and receives the light two-dimensionally can do.

3, the analyzer 350 analyzes the spectrum signal detected by the two-dimensional detection sensor 334 to detect a first sample 210 in the sample 200, a second sample 210 in the sample 200, (220) and the third sample (230).

4 to 7, the spectroscopic analyzer 1 according to the embodiment of the present invention includes the first scattered light 252 scattered from the first sample 210, the second scattered light 252 obtained from the second sample 220, The third scattered light 256 obtained from the second scattered light 254 and the third sample 230 is detected by the detector 330 and transmitted to the analyzer 350 to detect the internal components of the sample 200 Only the scattered spectrum can be detected and the internal components can be grasped.

The spectroscopic analysis apparatus according to an embodiment of the present invention can easily, safely and clearly detect any internal components existing in the sample without taking it out to the outside.

The spectroscopic analyzing apparatus according to an embodiment of the present invention can easily obtain the entire data of the spectrum along the depth at one light irradiation position including the detection unit.

The spectroscopic analyzing apparatus according to an embodiment of the present invention can easily obtain the entire data of the spectrum along the depth at one light irradiation position including the two-dimensional detection sensor.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.

1: Spectral analysis stationary 100: Light source unit
110: laser light source 112: first light
130: transfer part 132: first lens
134: band filter 136: second lens
200: sample 210: first sample
220: second sample 230: third sample
250: second light 252: first scattered light
254: Second scattered light 256: Third scattered light
300: Detector 310: Receiver
312: first spatial filter 314: first convex lens
316: first filter 318: second filter
322: second convex lens 324: second spatial filter
330: detector 332: dispersion optical system
334: two-dimensional detection sensor 350: analyzer

Claims (11)

A pedestal for supporting a sample for analyzing at least one internal component;
A light source having a fixed light irradiation position for irradiating the surface of the sample with the first light; And
At least one second scattered light obtained from the inside of the sample according to the depth of the sample when the first scattered light is scattered from the surface of the sample due to the first light and the first light is irradiated to the inside of the sample And a detector for collecting a spectrum of the second light and detecting an internal component of the sample,
The detection unit
A receiver for receiving the first scattered light and the at least one second scattered light;
A detector spaced apart from the receiver and capable of detecting a specific spectrum in the first and second scattered light received through the receiver and obtaining total data of a spectrum along a depth at one light irradiation position; And
And an analyzer for analyzing the specific spectrum detected through the detector and determining the internal components of the sample,
The receiving unit
A first spatial filter for removing interference from a laser light source and improving spatial resolution of first scattered light and second scattered light scattered from the sample;
A first convex lens disposed apart from the first spatial filter, the first convex lens imaging the first scattered light and the second scattered light;
A second convex lens for imaging the first scattered light and the second scattered light focused from the first convex lens with the detector,
The first convex lens and the second convex lens to prevent transmission of the laser light source scattered light from the laser light source scattered light, the first scattered light and the second scattered light that have passed through the first convex lens and the first scattered light and the second scattered light, A filter portion including a first filter and a second filter capable of selectively transmitting the light; And
And a second spatial filter disposed between the second convex lens and the detector for eliminating interference from the laser light source and improving spatial resolution of the first scattered light and the second scattered light transmitted from the second convex lens,
The detector
A dispersion optical system for receiving the first scattered light and the second scattered light transmitted from the second convex lens and advancing at different angles according to the wavelength of light;
And a two-dimensional detection sensor for selecting a wave number and an amplitude from among the first scattered light and the second scattered light received through the dispersion optical system and receiving the light in two dimensions
Spectrometer. The method according to claim 1,
Wherein the first light irradiated to the sample and the second light obtained from the sample do not interfere with each other. 3. The method of claim 2,
Wherein the light source is disposed on the surface of the sample, and the incident angle of the first light irradiated to the sample is greater than 0 degrees and less than or equal to 80 degrees. The method of claim 3,
Wherein the light source is spaced apart from the second light so that the second light collected by the detector does not interfere with the first light, wherein the light source is spaced apart from the sample to be scattered by a predetermined distance And the light source is irradiated at a position spaced apart from the center of the sample surface by a predetermined height (H). 5. The method of claim 4,
Wherein the light source further comprises a lens for focusing the light source on the sample, wherein the predetermined distance L1 is determined according to a focal distance of the lens. 6. The method of claim 5,
The predetermined distance L1 is 10 mm to 100 mm, and the predetermined height H is more than 0 mm but not more than 50 mm. The method according to claim 1,
Wherein the light source is a laser light source and the laser light source is one of a solid state laser, a gas laser, and a diode laser. The method according to claim 1,
The sample
A first sample located on the outer side of the sample, a second sample located on the inner side of the first sample, and a third sample located on the inner side of the second sample,
Wherein the first scattered light is obtained from the first sample, the second scattered light is obtained from the second sample, and the second light further comprises third scattered light obtained from the third sample.
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