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KR101793524B1 - Focused-magnetic-field vibration-response microscopy - Google Patents

Focused-magnetic-field vibration-response microscopy Download PDF

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Publication number
KR101793524B1
KR101793524B1 KR1020160030426A KR20160030426A KR101793524B1 KR 101793524 B1 KR101793524 B1 KR 101793524B1 KR 1020160030426 A KR1020160030426 A KR 1020160030426A KR 20160030426 A KR20160030426 A KR 20160030426A KR 101793524 B1 KR101793524 B1 KR 101793524B1
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South Korea
Prior art keywords
magnetic field
sample
probe
focused
bobbin
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KR1020160030426A
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Korean (ko)
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KR20170106812A (en
Inventor
양찬호
김광은
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한국과학기술원
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Priority to KR1020160030426A priority Critical patent/KR101793524B1/en
Publication of KR20170106812A publication Critical patent/KR20170106812A/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/045—Self-actuating probes, i.e. wherein the actuating means for driving are part of the probe itself, e.g. piezoelectric means on a cantilever probe
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B31/00—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
    • B24B31/10—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving other means for tumbling of work
    • B24B31/102—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving other means for tumbling of work using an alternating magnetic field
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/36—DC mode
    • G01Q60/363—Contact-mode AFM

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)

Abstract

Field of the Invention The present invention relates to a condensing magnetic field vibration reaction microscope, and more particularly, to a condensing magnetic field vibration reaction microscope for measuring a surface shape of a sample using a deformation of a magnetomechanical sample by a focused magnetic field.
The scanning probe microscope of the present invention may further include a focusing AC magnetic field generator for applying an AC magnetic field focused on the sample to vibrate the sample. Further, the present invention further includes a lock-in amplifier for extracting only the motion of the probe synchronized with the frequency of the AC magnetic field during the movement of the detected probe.

Description

{FOCUSED-MAGNETIC-FIELD VIBRATION-RESPONSE MICROSCOPY}

Field of the Invention The present invention relates to a condensing magnetic field vibration reaction microscope, and more particularly, to a condensing magnetic field vibration reaction microscope for measuring a surface shape of a sample using a deformation of a magnetomechanical sample by a focused magnetic field.

In general, a scanning probe microscope (SPM) is a robust instrument in nanoscale science and technology. It measures the height and other physical properties of the surface while moving the tip of the probe over the surface of the sample to be observed. . The scanning probe microscope may be a Scanning Tunneling Microscope (AFM), an Atomic Force Microscopy (AFM), a Near Field Scanning Optical Microscope (NSOM), a Magnetic Force Microscope (MFM) There are a variety of ways.

Among them, the magnetic force microscope (MFM) is utilized in the fields of nonvolatile magnetic memories such as MRAM and spintronics devices, which are the next generation memory devices, and high density hard disk storage devices. In particular, the nanoscale structure and the polarization properties of magnetic materials are analyzed It is regarded as a very important technology.

However, a conventional magnetic force microscope measures the magnetic force distribution of a sample using a probe coated with a magnetic substance such as cobalt, chromium, or nickel as a microscope for measuring the magnetic force of the sample. Since the magnetic force microscope operates in a noncontact mode, .

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems,

A focusing magnetic field generator is introduced in a scanning probe microscope to transform a specimen by applying an alternating magnetic field focused on the specimen, and a focused magnetic field vibration reaction microscope with an improved resolution for detecting the deformation of the specimen in contact mode It has its purpose.

According to an aspect of the present invention, there is provided a condensing magnetic field vibration reaction microscope,

The scanning probe microscope may further include a focusing AC magnetic field generator for applying an AC magnetic field focused on the sample to vibrate the sample.

Furthermore, the focused magnetic field vibration reaction microscope may further include a lock-in amplifier for extracting only the motion of the probe synchronized with the frequency of the AC magnetic field during the movement of the detected probe.

The focusing AC magnetic field generator includes a bobbin including a through hole in a direction parallel to the axis and a coil wound on an outer surface of the bobbin. A rod-shaped metal core inserted into the through-hole to amplify a magnetic field; A pedestal provided at a lower portion of the bobbin and coupled to one end of the metal core at an upper center thereof and supporting the bobbin and the metal core; And a platform disposed on the bobbin to prevent vibration of the bobbin from being transmitted to the sample.

In addition, the diameter of the metal core may become narrower toward the distal end of the other-side end portion of the metal core that directs the sample.

Further, the lifting bar may be physically spaced apart from the bobbin, the metal core, and the pedestal.

In addition, the focusing magnetic field vibration reaction microscope may operate in a contact mode.

According to an aspect of the present invention, there is provided a method of measuring a sample using a condensing magnetic field vibration reaction microscope,

Applying an alternating magnetic field to the sample; Detecting a movement of the probe according to the vibration, the localized region of the sample having received the magnetic field by the focused AC magnetic field vibrates; Extracting only the motion of the probe synchronized with the frequency of the AC magnetic field during the movement of the probe; And moving the sample or the probe based on the extracted motion information of the probe.

The present invention can produce a focused magnetic field tremor response microscope having a spatial resolution of ~ 10 nm and recognizing a micro-tremor response of ~ 10 pm by simply introducing a focused AC magnetic field generator into a commonly used scanning probe microscope .

BRIEF DESCRIPTION OF THE DRAWINGS The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of the specification, illustrate embodiments of the invention and, together with the description, serve to explain the principles of the invention.
FIG. 1 shows the configuration of a focusing magnetic field vibration reaction microscope according to the present invention.
FIG. 2 shows an example of a converging alternating magnetic field generator according to the present invention.
FIG. 3 illustrates an example of a concentrated magnetic field vibration reaction microscope equipped with a focused alternating magnetic field generator according to the present invention.
FIG. 4 is a flowchart illustrating a method of measuring a sample using a condensing magnetic field vibration reaction microscope according to the present invention.
FIG. 5 shows the result of measurement of the surface shape of a sample in a state in which a focused AC magnetic field is not applied.
FIG. 6 shows the result of measurement of the surface shape of the sample under the application of the focused AC magnetic field.

BRIEF DESCRIPTION OF THE DRAWINGS The present invention is capable of various modifications and various embodiments, and specific embodiments will be described in detail below with reference to the accompanying drawings.

The following examples are provided to aid in a comprehensive understanding of the methods, apparatus, and / or systems described herein. However, this is merely an example and the present invention is not limited thereto.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the following description, well-known functions or constructions are not described in detail since they would obscure the invention in unnecessary detail. The following terms are defined in consideration of the functions of the present invention, and may be changed according to the intention or custom of the user, the operator, and the like. Therefore, the definition should be based on the contents throughout this specification. The terms used in the detailed description are intended only to describe embodiments of the invention and should in no way be limiting. Unless specifically stated otherwise, the singular form of a term includes plural forms of meaning. In this description, the expressions "comprising" or "comprising" are intended to indicate certain features, numbers, steps, operations, elements, parts or combinations thereof, Should not be construed to preclude the presence or possibility of other features, numbers, steps, operations, elements, portions or combinations thereof.

It is also to be understood that the terms first, second, etc. may be used to describe various components, but the components are not limited by the terms, and the terms may be used to distinguish one component from another .

Hereinafter, exemplary embodiments of a focused magnetic field vibration reaction microscope according to the present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 shows the configuration of a focusing magnetic field vibration reaction microscope according to the present invention.

1, a condensing magnetic field vibration reaction microscope according to the present invention includes a probe 4, a laser generator 102, a photodetector 104, a scanner 106, a current supplier 108, a lock- A controller 110, a controller 112, and a focused AC magnetic field generator 10.

First, the probe 4 may include a needle and a cantilever. The needle moves in contact or non-contact with the surface of the sample 2, and senses various forces in relation to the sample. (Z-axis) perpendicular to the specimen 2 by means of the test piece 2.

The laser generator 102 irradiates the probe 4 with a laser to sense the movement of the probe 4.

The photodetector 104 receives the reflected laser beam from the probe 4 and senses the position and movement of the probe 4.

The scanner 106 can move the sample 2 in the x and y axis directions so that the probe 4 can detect the entire surface of the sample 2. [ The scanner 106 may be configured to control the probe 4 to move in the x- and y-axis directions, instead of moving the sample 2, although not shown in the drawings have.

The current supply 108 may supply power to each configuration of a focused magnetic field tremor response microscope according to the present invention. In particular, an AC current can be supplied to the AC magnetic field generator 10 so that an AC magnetic field can be generated.

The lock-in amplifier 110 can remove a noise signal that is not related to the surface measurement of the sample 2 among the motion information of the probe 4 received by the photodetector 104. Since the movement of the probe 4 having a frequency different from the frequency of the alternating magnetic field generated by the focusing AC magnetic field generator 10 is independent of the shape measurement of the surface of the sample 2, .

The controller 112 receives information from the lock-in amplifier 110 and transmits feedback information to the scanner 106 so that the scanner 106 can accurately position the sample 2 or the probe 4 .

The focused alternating magnetic field generator 10 generates an alternating magnetic field that is focused using the alternating current received from the current supply 108. The generated alternating magnetic field is applied to the sample (2). When the focused alternating magnetic field is applied to the sample 2, a back pressure magnetic effect is generated by the magnetic properties of the particles, and this back pressure magnetic phenomenon causes deformation of the sample 2. In particular, when the sample (2) has a ferromagnetic characteristic, the degree of deformation due to the applied alternating magnetic field is increased, so that the effect of the condensing magnetic field vibration reaction microscope according to the present invention can be enhanced. In addition, it is possible to minimize the application of a magnetic field to an unnecessary region by focusing the magnetic field. This can prevent the area outside the measurement area from shaking and minimize noise generation, thereby significantly improving the sensitivity. In addition, even when the sample (2) has ferromagnetic characteristics as well as ferroelectric characteristics, reverse magnetic field phenomenon occurs in the ferromagnetic characteristic region of the sample (2) when an alternating magnetic field is applied to the sample (2) Thereby causing deformation of the characteristic region. The modified ferromagnetic characteristic region is transferred to the ferroelectric region and causes a piezoelectric phenomenon. With this principle, the probe 4 passes the surface of the deformed sample 2 and measures the surface shape of the sample 2 with respect to the magneto-electric characteristic.

FIG. 2 shows an example of a converging alternating magnetic field generator 10 according to the present invention.

2, the focused alternating magnetic field generator 10 according to the present invention may comprise a pedestal 11, a metal core 12, a bobbin 13, and a platform 14. have.

The bobbin 13 includes a through hole at a center in a direction parallel to the axis of the bobbin 13. Although not shown, a coil through which the current supplied by the current supplier 108 is wound is formed on the outer surface of the bobbin 13 as a solenoid. The strength of the alternating magnetic field generated by adjusting the coil material or the number of windings can be controlled. When a current flows through the coil, an alternating magnetic field is generated in a direction parallel to the through hole, and the alternating magnetic field is applied to the sample (2).

The metal core 12 is inserted into the through-hole of the bobbin as a bar-shaped metal to amplify a magnetic field generated by a coil wound on the bobbin. The end portion of the metal core 12 that is directed to the sample 2 may be made to have a narrowed diameter, that is, a sharp tip, so that the magnetic flux density can be increased. In addition, by inserting the metal core 12 having a sharp tip, application of a magnetic field to an unnecessary area can be minimized. Preferably, the metal core 12 may be a high permeability alloy in which a small amount of Mo, Cr, Mn, or the like is added to a binary alloy of nickel and iron.

The pedestal 11 is installed at a lower portion of the bobbin 13 and the one end of the metal core 12 can be coupled to the upper center of the pedestal 11. And serves to couple and support the bobbin 13 and the metal core 12.

The platform 14 may be in the form of a barrel surrounding the bobbin 13, the metal core 12 and the pedestal 11. The platform 14 may be physically spaced apart from the bobbin 13 and the pedestal 11 so that the vibration of the bobbin 13 is not transmitted to the sample 2.

However, it is needless to say that the converging alternating current magnetic field generator 10 shown in FIG. 2 is only one example of a device capable of generating a focused alternating magnetic field, and may be manufactured in various other forms.

FIG. 3 illustrates an example of a concentrated magnetic field vibration reaction microscope equipped with a focused alternating magnetic field generator according to the present invention.

The magnetic field generator 10 of FIG. 2 is inserted into a spacer 15 and mounted on a real microscope to realize a condensing magnetic field vibration reaction microscope according to the present invention.

FIG. 4 is a flowchart illustrating a method of measuring a sample using a condensing magnetic field vibration reaction microscope according to the present invention.

A method of measuring a sample using a condensing magnetic field vibration reaction microscope according to the present invention includes the steps of applying an AC magnetic field focused on a sample (S410), detecting a movement of the probe (S420), measuring a probe synchronized with the frequency of the AC magnetic field A step of extracting only a motion (S430), and a step of moving a sample or a probe based on the extracted information (S440).

First, in step S410, an AC magnetic field is applied to the sample 2 to be measured using the focused AC magnetic field generator 10. Deformation of the particles of the sample (2) is induced by the back pressure magnetic effect by the alternating magnetic field. In particular, when the sample (2) has at least one of the ferromagnetic characteristic and the ferroelectric characteristic, the effect of the alternating magnetic field can be increased.

In step S420, the movement of the probe 4 due to the deformation of the sample 2 is detected. When the probe 4 passes the surface of the sample 2, the laser generator 102 irradiates the probe 4 with a laser, and the reflected laser is detected by the photodetector 104, ) In the vertical direction of the sample (2). In addition, the surface shape of the sample 2 is imaged using the motion of the detected sample 2.

In step S430, only probe motions synchronized with the alternating magnetic field generated by the AC magnetic field generator 10 are extracted. That is, the reliability of the sample measurement can be improved by excluding the movement of the probe 4 not by the alternating magnetic field.

In step S440, the sample 2 or the probe 4 is moved based on the extracted information. The position of the specimen 2 or the probe 4 is changed so that the probe 4 can scan the entire surface of the specimen surface. The positions of all the regions of the surface of the sample 2 can be measured by repeating the steps of S410 to S430. Specifically, the controller 112, which has received the motion information of the probe 4 by the alternating magnetic field from which the noise signal is removed from the lock-in amplifier 110, controls the scanner 106 to detect the movement of the sample 2 or the probe 4, .

FIG. 5 shows the result of measurement of the surface shape of a sample in a state in which a focused AC magnetic field is not applied.

In the left image of FIG. 5, the region that appears bright and protruded is a region having ferromagnetic characteristics, and the region that appears flat is a region having ferroelectric characteristics. However, as can be seen from the right image, it can be confirmed that the shape of the surface of the sample is not measured properly when the focused AC magnetic field is not applied to the sample.

FIG. 6 shows the result of measurement of the surface shape of the sample under the application of the focused AC magnetic field.

When a focused AC magnetic field is applied to a sample, a response signal due to a back-pressure magnetic phenomenon is detected in a region having a ferromagnetic characteristic, a deformation of the ferromagnetic characteristic region is transmitted to a region having a ferroelectric characteristic, Is detected. It can be confirmed that the shape of the surface of the sample is relatively specifically measured in a manner similar to the actual left image.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, but, on the contrary, . Therefore, the scope of the present invention should not be limited to the described embodiments, but should be determined by the scope of the appended claims, as well as the appended claims.

2: Sample 4: Probe
10: focusing magnetic field generator 11: pedestal
12: metal core 13: bobbin
14: Material 15: Spacer
102: laser generator 104: photo detector
106: scanner 108: current supply
110: lock-in amplifier 112: controller

Claims (7)

In a scanning probe microscope,
Further comprising a focused AC magnetic field generator for applying an AC magnetic field focused on the sample to vibrate the sample;
The focusing AC magnetic field generator includes:
A bobbin including a through hole in a side-by-side direction and a coil wound on an outer side;
And a rod-shaped metal core inserted into the through-hole to amplify a magnetic field,
Wherein the metal core comprises:
Wherein a diameter of the other end portion of the metal core that is oriented toward the sample becomes narrower toward the tip end.
The method according to claim 1,
The focusing magnetic field tremor reaction microscope,
And a lock-in amplifier for extracting only the movement of the probe synchronized with the frequency of the focused AC magnetic field during the movement of the detected probe.
The method according to claim 1,
The focusing AC magnetic field generator includes:
A pedestal provided at a lower portion of the bobbin and coupled to one end of the metal core at an upper center thereof and supporting the bobbin and the metal core; And
And a platform disposed on the bobbin for preventing vibration of the bobbin from being transmitted to the specimen.
delete The method of claim 3,
The above-
Wherein the bobbin, the metal core, and the pedestal are physically spaced apart from each other.
The method according to claim 1,
The focusing magnetic field tremor reaction microscope,
Wherein the contact microscope is operated in a contact mode.
A method for measuring a sample using a focused magnetic field vibration reaction microscope according to claim 1,
Applying an alternating magnetic field to the sample;
Detecting a movement of the probe due to the oscillation of the localized region of the sample by the focused AC magnetic field;
Extracting only the motion of the probe synchronized with the frequency of the AC magnetic field during the movement of the probe;
And moving the sample or probe based on the motion information of the extracted probe.
KR1020160030426A 2016-03-14 2016-03-14 Focused-magnetic-field vibration-response microscopy KR101793524B1 (en)

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KR101793524B1 true KR101793524B1 (en) 2017-11-06

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001255258A (en) * 2000-03-10 2001-09-21 Fujitsu Ltd Magnetic field measuring device
JP2001264231A (en) * 2000-03-20 2001-09-26 Nec Corp Scanning ac hole microscope and its measuring method
JP2010175534A (en) 2009-01-05 2010-08-12 Hitachi High-Technologies Corp Magnetic device inspection apparatus and magnetic device inspection method

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001255258A (en) * 2000-03-10 2001-09-21 Fujitsu Ltd Magnetic field measuring device
JP2001264231A (en) * 2000-03-20 2001-09-26 Nec Corp Scanning ac hole microscope and its measuring method
JP2010175534A (en) 2009-01-05 2010-08-12 Hitachi High-Technologies Corp Magnetic device inspection apparatus and magnetic device inspection method

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