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KR101774537B1 - Heat processing apparatus for display panel using heat convection - Google Patents

Heat processing apparatus for display panel using heat convection Download PDF

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Publication number
KR101774537B1
KR101774537B1 KR1020150140479A KR20150140479A KR101774537B1 KR 101774537 B1 KR101774537 B1 KR 101774537B1 KR 1020150140479 A KR1020150140479 A KR 1020150140479A KR 20150140479 A KR20150140479 A KR 20150140479A KR 101774537 B1 KR101774537 B1 KR 101774537B1
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KR
South Korea
Prior art keywords
heat
heating
heating member
display panel
chamber
Prior art date
Application number
KR1020150140479A
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Korean (ko)
Other versions
KR20170041327A (en
Inventor
김민형
정우열
박상범
Original Assignee
(주) 예스티
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Application filed by (주) 예스티 filed Critical (주) 예스티
Priority to KR1020150140479A priority Critical patent/KR101774537B1/en
Publication of KR20170041327A publication Critical patent/KR20170041327A/en
Application granted granted Critical
Publication of KR101774537B1 publication Critical patent/KR101774537B1/en

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L51/529—

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Optics & Photonics (AREA)
  • Furnace Details (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Abstract

A heat treatment apparatus for heat-treating a display panel according to the present invention includes a chamber member constituting an overall appearance of a heat treatment apparatus, a panel support member provided inside the chamber member, and a heating member disposed inside the chamber member And the heating member is installed at the upper and lower portions of the chamber member, the heating member includes a heating member for generating heat by supplied electric power, and a heating member for transmitting heat generated from the heating member to a display panel And a heat dissipating member for dissipating heat.
According to the present invention, heat generated from a heat source is transferred to the display panel through convection, thereby heating the entire area of the heated display panel.
Further, by preventing breakage of the heating device installed in the heat treatment apparatus, it is possible to prevent contamination of the display panel and decrease in production yield.

Description

TECHNICAL FIELD [0001] The present invention relates to a display panel heat treatment apparatus using a heat convection phenomenon,

The present invention relates to a heat-treating apparatus for a display panel, and more particularly, to a heat-treating apparatus for a display panel, which is configured to transmit heat generated from a heat source to a display panel through convection, thereby heating the panel to be heated uniformly, The present invention relates to a display panel heat treatment apparatus using a thermal convection phenomenon configured to prevent breakage.

2. Description of the Related Art [0002] Recently, display panel technology has been dramatically developed due to the rapid development and spread of electric and electronic devices such as a computer or a TV.

In view of the fact that such a display panel is rapidly becoming larger in size and higher in resolution, the role of the manufacturing apparatus is becoming more important.

Generally, in order to manufacture a display panel, a photoresist is applied to form a pattern on a panel, and the display panel is heated to cure the photoresist film.

At this time, in order to form a precise pattern on the display panel, an operation of raising the temperature uniformly over the entire area of the display panel is required.

If a uniform temperature rise is not achieved over the entire area of the display panel, a temperature deviation occurs in the pattern or a thermal imbalance occurs in the display panel itself, resulting in local shrinkage or expansion of the panel. Is an obstacle to forming a uniform pattern on the display panel.

On the other hand, the heating device disposed inside the heat treatment apparatus of the display panel repeatedly performs heating and cooling, and thus has a problem that it is easily broken due to a slight contraction and expansion.

If the heating apparatus inside the heat treatment apparatus is broken, the operation of the apparatus should be interrupted for repairing the heat treatment apparatus. Therefore, not only the whole heat treatment yield is reduced but also the surface of the display panel is contaminated or damaged due to impurities generated at the time of breakage.

SUMMARY OF THE INVENTION The present invention has been conceived to solve the problems as described above, and it is an object of the present invention to provide a display panel which is configured to transmit heat generated from a heat source to a display panel through convection, And a display panel heat treatment apparatus using the heat convection phenomenon.

Another object of the present invention is to provide a display panel heat treatment apparatus using heat convection phenomenon configured to prevent breakage of a heating apparatus installed in a heat treatment apparatus.

According to an aspect of the present invention, there is provided a heat treatment apparatus for heat-treating a display panel, the apparatus comprising: a chamber member forming an outer appearance of a heat treatment apparatus; a panel support member disposed inside the chamber member; Wherein the heating member is installed at the upper and lower portions of the chamber member, the heating member includes: a heating member for generating heat by supplied electric power; and a heating member for heating the heat generated from the heating member, And a heat dissipating member for transmitting the light to the display panel.

Preferably, the heating member includes a fixing block for supporting the heating member.

Here, the heating member may include a frame member for supporting the fixing block and the heat radiation member.

Preferably, the heating member includes an insulator surrounding the heat line and the heat line, and a protective tube surrounding the insulator.

Here, the protective pipe may be made of stainless steel.

Preferably, the heating member is formed in a pipe shape having a circular cross section, the fixing block is formed in a straight bar shape, and the fixing block is provided with a recess on which the heating member can be mounted.

In addition, the heat dissipation member may be formed in a square plate shape, and the heat dissipation member may be made of a stainless steel material.

Preferably, the heating member is detachably mounted on a recess of the fixing block, the heating member is disposed between the fixing block and the heat dissipating member, the fixing block is fixed to the frame member, The position is fixed.

Here, the fixed block may be formed of stainless steel.

In addition, a plurality of panel supporting members may be provided across the chamber member, and the heating member may be installed to face the panel supporting member at the upper and lower portions of the chamber member.

Preferably, the chamber member is formed in a hexahedral shape, and the heating member is provided on a side surface of the chamber member.

Preferably, the heating member is detachably mounted on a recess of the fixing block, and the fixing block is fixed to the frame member, so that the heating member is not fixed to the frame member and the heat- And is disposed below the heat dissipating member.

Further, a plurality of heat dissipation units, each of which is formed by disposing the heat generating member on the lower portion of the heat dissipating member via the fixed block, may be provided on the frame member to constitute the heating member.

According to the present invention, heat generated from a heat source is transferred to the display panel through convection, thereby heating the entire area of the heated display panel.

Further, by preventing breakage of the heating device installed in the heat treatment apparatus, it is possible to prevent contamination of the display panel and decrease in production yield.

BRIEF DESCRIPTION OF THE DRAWINGS The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiments of the invention and, together with the description, serve to explain the principles of the invention.
1 is a perspective view of a heat treatment apparatus for a display panel using thermal convection phenomenon according to the present invention,
2 is a cross-sectional perspective view of the heat treatment apparatus,
3 is a perspective view of a heating member disposed inside the heat treatment apparatus,
4 is a perspective view of a heating member, a fixing block, and a heat dissipating member included in the heating member,
5 is a side cross-sectional view showing a state where a heating member is mounted on a fixed block,
6 is a side cross-sectional view of the heating member.

Hereinafter, the configuration of the present invention will be described in detail with reference to the accompanying drawings.

Prior to this, the terms used in the specification and claims should not be construed in a dictionary sense, and the inventor may, on the principle that the concept of a term can be properly defined in order to explain its invention in the best way And should be construed in light of the meanings and concepts consistent with the technical idea of the present invention.

Therefore, the embodiments shown in the present specification and the drawings are only exemplary embodiments of the present invention, and not all of the technical ideas of the present invention are presented. Therefore, various equivalents It should be understood that water and variations may exist.

FIG. 1 is a perspective view of a heat treatment apparatus for a display panel using a heat convection phenomenon according to the present invention, FIG. 2 is a sectional perspective view of the heat treatment apparatus, FIG. 3 is a perspective view of a heating member disposed inside the heat treatment apparatus, FIG. 5 is a side cross-sectional view showing a state where a heating member is mounted on a fixing block, and FIG. 6 is a side sectional view of the heating member.

1 to 6, a heat treatment apparatus for heat-treating a display panel according to the present invention includes a chamber member 10 constituting the entire outer appearance of a heat treatment apparatus, a panel support member 10 provided inside the chamber member 10, And a heating member 30 disposed inside the chamber member 10. The heating member 30 is installed on the upper and lower portions of the chamber member 10 and the heating member 30 Includes a heat generating member 22 for generating heat by supplied electric power and a heat radiating member 25 for transmitting the heat generated from the heat generating member 22 to the display panel 100 to be heat treated Feature.

The chamber member 10 is formed in a hexahedron shape to accommodate the display panel and heat-treat the inside of the chamber while forming the outer appearance of the heat treatment apparatus according to the present invention.

The chamber member 10 is formed of a metal wire and a metal panel. On one side of the chamber member 10, control switches for controlling various components of the heat treatment apparatus according to the present invention are installed.

A door member (not shown) is disposed in front of the chamber member 10 so that the display panel can be introduced into and discharged from the chamber member 10 through the door member.

A panel supporting member 40 for supporting the display panel 100 to be subjected to the heat treatment is installed across the chamber member 10 in the chamber member 10.

A plurality of panel support members 40 are formed in a straight rod shape and are arranged in a height direction in an inner space of the chamber member 10 so that the display panel 100 carried from the outside is supported on the panel support member 40 As shown in FIG.

The heating member 30 provided on the ceiling surface and the bottom surface of the chamber member 10 in a state where a plurality of the display panels 100 are housed in the chamber member 10 in a hexahedron shape in the height direction And the display panel 100 is heated by generating heat.

That is, the heating member 30 is installed facing the ceiling surface and the bottom surface of the chamber member 10, and the heating member 30 is arranged in a hexahedron so that the display panel 100 can be more uniformly heated. Or may be disposed inside the side of the chamber member 10 in the shape of a circle.

The heating member 30 is configured to heat the display panel 100 in the chamber member 10. The heating member 30 includes a heating member 22 for generating heat by electric power supplied from the heating member 22, And a heat dissipating member 25 for dissipating generated heat.

The heating member 22 is configured to generate heat by electric energy. An electric heating wire 22-1 for generating heat by electric energy is disposed in the inside of the heating member 22, (22-2).

A protective tube 22-3 for protecting the heat generating member 22 from an external force is disposed outside the insulator 22-2 so as to surround the insulator 22-2.

Here, the insulator 22-2 may be formed by coating magnesium oxide (MgO) having electrical conductivity and high thermal conductivity on the outside of the heating wire 22-1.

Further, the protective pipe 22-3 is formed of a circular cross-section tube made of stainless steel having high thermal conductivity and high rigidity and elasticity.

Thus, the heat generating member 22 is formed in the shape of a pipe having a circular cross section as a whole, and a connector connecting portion 23 for connecting to an external connector is formed at an end thereof.

The heat generating member 22 is bent and disposed at a predetermined length so as to be arranged in a longer area at a limited area under the heat radiating member 25 formed in a rectangular shape.

3 and 4, the heating member 22 is curved at a predetermined interval to be arranged as long as possible below the heat dissipating member 25, and preferably two The connector connecting portion 23 of the heat generating member 22 protrudes outside the heat radiating member 25 in a state where the heat generating members 22 are disposed below the rectangular heat radiating member 25. [

The heat dissipating member 25 is formed in a rectangular plate shape as a whole and has a flat hexagonal shape without a bottom surface to receive the heating member 22 and the fixing block 26 therein.

The heat dissipating member 25 may be made of stainless steel, ceramic, quartz, or the like so that the heat transmitted from the heat generating member 22 can be smoothly transferred to the display panel 100 through heat convection , And stainless steel.

The heat generating member 22 is accommodated in the concave portion 26-1 of the fixing block 26 so that the heat generated from the heat generating member 22 can be transmitted to the heat radiating member 25, So that the lower surface of the member 25 faces.

The fixing block 26 supports the heating member 22 while being fixed to the heat dissipating member 25 so that the heating member 22 is fixed to the lower surface of the heat dissipating member 25, (26).

The fixing block 26 is formed in a straight rod shape and has recesses 26-1 in which the heating member 22 having a circular section can be seated.

At this time, the interval between the concave portions 26-1 is formed at the same interval as the bending distance of the heating member 22 formed by bending.

The heating member 22 is detachably mounted on the recess of the fixing block 26 and the fixing block 26 is fixed to the heat releasing member 25 so that the heating member 22 Is disposed below the heat dissipating member (25) in a state where it is not fixed to the frame member (35) and the heat dissipating member (25).

Therefore, even when the length of the heating member 22 is expanded or contracted by cooling due to the heat generated in the heating member 22, the heating member 22 can be prevented from being separated from the concave portion of the fixing block 26 26-1. That is, since the position of the heating member 22 is not fixed by the fixing block 26, breakage of the heating member 22 due to expansion and contraction is prevented.

The fixing block 26 may have a high thermal conductivity to transmit heat generated from the heating member 22 to the heat dissipating member 25 through the convex portion 26-1 of the fixing block 26 The branch is made of stainless steel material.

The assembled heat dissipation unit 20 is assembled with the frame member 32 using the coupling means 32 such as a bolt and a nut in a state where the heat generating member 22 and the fixing block 26 are installed below the heat dissipating member 25, 35 are provided.

That is, a plurality of heat dissipation units 20 are disposed on the frame member 35, and the heat dissipation unit 22 is disposed below the heat dissipation member 25 via the fixed block 26, Thereby constituting the member 30.

The number of the heat dissipation units 20 may be adjusted according to the size of the chamber member 10 and the number of the heat dissipation units 20 may be set in the frame member 35. In a state where the heat dissipation unit 20 is installed in a rectangular frame member 35, Can be provided on the upper or lower surface or the side surface of the member (10).

According to the present invention, since the heat generated from the heat generating member 22 is transmitted to the display panel 100 to be heat treated by the heat convection phenomenon through the heat dissipating member 25, It is possible to heat the entire display panel 100 region more evenly than in the case of transferring the display panel 100.

While the present invention has been described with reference to the exemplary embodiments and the drawings, it is to be understood that the technical scope of the present invention is not limited to these embodiments and that various changes and modifications will be apparent to those skilled in the art. Various modifications and variations may be made without departing from the scope of the appended claims.

10: chamber member
20: Heat dissipation unit
30: heating member
40: panel supporting member
100: Display panel

Claims (13)

A heat treatment apparatus for heat treating a display panel,
The chamber member constituting the entire outer surface of the heat treatment apparatus
A panel support member installed inside the chamber member;
And a heating member disposed inside the chamber member,
Wherein the heating member is installed at an upper portion and a lower portion of the chamber member,
The heating member
A heating member for generating heat by supplied electric power;
A heat dissipating member for transmitting heat generated from the heat generating member to a display panel to be heat treated;
A fixing block for supporting the heating member;
And a frame member for supporting the fixing block and the heat radiation member,
Wherein the heating member includes an insulator that surrounds a heat line and an outer portion of the heat line, and a protective tube that surrounds the insulator,
The protection tube is made of a stainless steel material,
The heating member is formed in a pipe shape of a circular section,
The fixed block is formed in a straight bar shape and is formed of stainless steel,
Wherein the fixing block is formed with a recess on which the heating member is seated,
The heating member is seated in the recess of the fixing block and is disposed between the fixing block and the heat radiation member,
The fixing block is fixed to the frame member and the position of the heating member is fixed so that the heating member is disposed below the heat dissipating member in a state that it is not fixed to the frame member and the heat dissipating member,
The heat dissipation member is formed in a rectangular plate shape made of stainless steel,
Wherein a plurality of panel support members are provided across the chamber member,
Wherein the heating member is installed to face the panel supporting member at an upper portion and a lower portion of the chamber member. The method according to claim 1,
Wherein the chamber member is formed in a hexahedral shape,
And the heating member is installed on a side surface of the chamber member. The method according to claim 1,
Wherein a plurality of heat dissipating units, each of which is configured by disposing the heat generating member on a lower portion of the heat dissipating member via the fixing block, is provided on the frame member to constitute the heating member. . delete delete delete delete delete delete delete delete delete delete
KR1020150140479A 2015-10-06 2015-10-06 Heat processing apparatus for display panel using heat convection KR101774537B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020150140479A KR101774537B1 (en) 2015-10-06 2015-10-06 Heat processing apparatus for display panel using heat convection

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020150140479A KR101774537B1 (en) 2015-10-06 2015-10-06 Heat processing apparatus for display panel using heat convection

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KR20170041327A KR20170041327A (en) 2017-04-17
KR101774537B1 true KR101774537B1 (en) 2017-09-20

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Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102081801B1 (en) * 2018-12-12 2020-02-26 한국고요써모시스템(주) Sheath heater sealing device of heat treatment oven chamber

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101391304B1 (en) * 2012-11-06 2014-05-02 주식회사 제우스 Cable for high temperature and heat treatment device which used this
KR101462616B1 (en) * 2013-10-25 2014-11-14 주식회사 이엔씨 테크놀로지 Heat treatment unit of substrate for flat panel display
KR101462460B1 (en) * 2013-07-24 2014-11-18 주식회사 나래나노텍 Supporting Device for Divided Window Plates of Chamber for Heat Treatment of Substrates, and Chamber for Heat Treatment of Substrates and Heat Treatment Apparatus of Substrate Having the Same

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101391304B1 (en) * 2012-11-06 2014-05-02 주식회사 제우스 Cable for high temperature and heat treatment device which used this
KR101462460B1 (en) * 2013-07-24 2014-11-18 주식회사 나래나노텍 Supporting Device for Divided Window Plates of Chamber for Heat Treatment of Substrates, and Chamber for Heat Treatment of Substrates and Heat Treatment Apparatus of Substrate Having the Same
KR101462616B1 (en) * 2013-10-25 2014-11-14 주식회사 이엔씨 테크놀로지 Heat treatment unit of substrate for flat panel display

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