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KR101768658B1 - Carbazole derivatives, photopolymerization initiator and photoresist composition containing the same - Google Patents

Carbazole derivatives, photopolymerization initiator and photoresist composition containing the same Download PDF

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KR101768658B1
KR101768658B1 KR1020160009918A KR20160009918A KR101768658B1 KR 101768658 B1 KR101768658 B1 KR 101768658B1 KR 1020160009918 A KR1020160009918 A KR 1020160009918A KR 20160009918 A KR20160009918 A KR 20160009918A KR 101768658 B1 KR101768658 B1 KR 101768658B1
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heteroaryl
cycloalkyl
heterocycloalkyl
alkyl
aryl
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KR20170089557A (en
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김성현
김상하
허윤희
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(주)켐이
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    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07DHETEROCYCLIC COMPOUNDS
    • C07D209/00Heterocyclic compounds containing five-membered rings, condensed with other rings, with one nitrogen atom as the only ring hetero atom
    • C07D209/56Ring systems containing three or more rings
    • C07D209/80[b, c]- or [b, d]-condensed
    • C07D209/82Carbazoles; Hydrogenated carbazoles
    • C07D209/86Carbazoles; Hydrogenated carbazoles with only hydrogen atoms, hydrocarbon or substituted hydrocarbon radicals, directly attached to carbon atoms of the ring system
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07DHETEROCYCLIC COMPOUNDS
    • C07D209/00Heterocyclic compounds containing five-membered rings, condensed with other rings, with one nitrogen atom as the only ring hetero atom
    • C07D209/56Ring systems containing three or more rings
    • C07D209/80[b, c]- or [b, d]-condensed
    • C07D209/82Carbazoles; Hydrogenated carbazoles
    • C07D209/88Carbazoles; Hydrogenated carbazoles with hetero atoms or with carbon atoms having three bonds to hetero atoms with at the most one bond to halogen, e.g. ester or nitrile radicals, directly attached to carbon atoms of the ring system
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509Filters, e.g. light shielding masks
    • G02F1/133514Colour filters
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/0007Filters, e.g. additive colour filters; Components for display devices
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • G03F7/031Organic compounds not covered by group G03F7/029

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  • Chemical & Material Sciences (AREA)
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  • Crystallography & Structural Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
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  • Plural Heterocyclic Compounds (AREA)

Abstract

본 발명은 신규한 카바졸 유도체, 이를 포함하는 광중합 개시제 및 포토레지스트 조성물에 관한 것으로, 본 발명에 따른 카바졸 유도체는 한 분자내에 옥심 에스테르기와 포스포네이트기를 동시에 가짐으로써, 종래 광중합 개시제에 비하여 자외선을 효과적을 흡수할 수 있을 뿐 아니라 고 감도, 내열성 및 내화학성을 구현할 수 있으며, 이를 포함하여 우수한 잔막율, 현상성 및 강도(Strength)의 구현이 가능한 광중합 개시제 조성물 및 포토레지스트 조성물을 제공한다.The present invention relates to a novel carbazole derivative, a photopolymerization initiator comprising the same, and a photoresist composition. The carbazole derivative according to the present invention has oxime ester group and phosphonate group in one molecule at the same time, And a photoresist composition which can realize high sensitivity, heat resistance and chemical resistance, and which can realize an excellent residual film ratio, developability and strength, as well as a photopolymerization initiator composition and a photoresist composition.

Description

카바졸 유도체, 이를 포함하는 광중합 개시제 및 포토레지스트 조성물{Carbazole derivatives, photopolymerization initiator and photoresist composition containing the same}[0001] The present invention relates to a carbazole derivative, a photopolymerization initiator comprising the same, and a photoresist composition containing the photoresist composition.

본 발명은 카바졸 유도체, 이를 포함하는 광중합 개시제 및 포토레지스트 조성물 에 관한 것으로, 보다 상세하게 옥심 에스테르기와 포스포네이트기를 동시에 포함하는 것을 특징으로 하는 신규한 카바졸 유도체, 이를 포함하는 광중합 개시제 및 포토레지스트 조성물에 관한 것이다.The present invention relates to a carbazole derivative, a photopolymerization initiator and a photoresist composition containing the same, more specifically, to a carbazole derivative containing oxime ester group and phosphonate group at the same time, a photopolymerization initiator containing the same, To a resist composition.

광중합 개시제는 조사된 빛에 의해 라디칼 활성종을 생성시켜 다관응성 모노머의 광중합반응을 일으킬 수 있어 노광된 부위가 선택적으로 경화되어 다양한 패턴을 형성할 수 있기 때문에 광경화성 잉크, 감광성 인쇄판, 각종 포토레지스트 등에 사용되고 있다. 이러한 특성을 갖는 광중합 개시제로는 아세토페논 유도체, 옥심 에스테르 유도체, 트리아진 유도체, 벤조페논 유도체, 바이이미다졸 유도체, 아실 포스핀 옥사이드 유도체 등 여러 종류의 화합물이 알려져 있으며, 이중 가장 많이 사용되어지고 있는 광중합 개시제로는 아세토페논 유도체, 옥심 에스테르 유도체, 트리아진 유도체 등을 들 수 있다. 아세토페논 유도체는 색특성, 용해성이 좋고 가격이 비교적 저렴하지만 충분한 감도를 내기 위해서는 고형분 중 3% 이상, 심지어 10% 이상을 사용해야 하므로 잔막률이 낮아지고, 액정 오염의 원인이 될 수 있으며, 고안료 농도의 조성물, 특히 흑색 감광성 조성물에서는 감도가 미약하여 단독으로 사용할 경우 패턴의 탈착이 심각하게 일어난다는 문제점을 가진다. 옥심 에스테르 유도체는 색깔을 거의 띄지 않고 투과도가 높으며, 조성물 내에서 안정성과 상용성이 우수하지만 UV 광원 흡수에 효율적이지 못해 공정시간이 길어지는 문제점을 가지며, 안료의 농도가 높거나 코팅 막의 두께가 2.5 ㎛ 이상이 되는 후막의 경화도를 충분히 만족하지 못하여 여전히 미세 패턴의 형성에 난점이 있고, 형성된 패턴이 제품에서 요구되는 CD (critical dimension)나 기계적 강도를 만족시킬 수 없었다(특허문헌 1 및 2). 또한, 트리아진 유도체에 있어 광조사에 의해 분해되어 할로겐 라디칼을 발생시키는 할로메틸 트리아진 유도체는 상술한 광중합 개시제에 비해 UV 광원에 대한 감도가 양호한 것으로 알려져 있으나 결정성이 커서 도포 후 표면위로 석출되거나 필름 내에서 빠르게 결정화되는 경향이 있다는 단점을 가진다(특허문헌 3).The photopolymerization initiator can generate a radical active species by the irradiated light to cause a photopolymerization reaction of the polycondensation monomer, They can be selectively cured to form various patterns. Therefore, they are used in photocurable ink, photosensitive printing plate, various photoresists, and the like. As a photopolymerization initiator having such properties, various kinds of compounds such as acetophenone derivatives, oxime ester derivatives, triazine derivatives, benzophenone derivatives, bimidazole derivatives and acylphosphine oxide derivatives are known, and most of them are used Examples of the photopolymerization initiator include acetophenone derivatives, oxime ester derivatives, and triazine derivatives. Acetophenone derivatives have good color characteristics and good solubility and are relatively inexpensive. However, in order to obtain sufficient sensitivity, the residual film ratio is lowered, which may cause liquid crystal contamination, since 3% or more, or even 10% Concentration of the composition, particularly the black photosensitive composition, has a weak sensitivity, and there is a problem that desorption of the pattern is seriously occurred when the composition is used alone. The oxime ester derivative has low coloring and high transparency and is excellent in stability and compatibility in the composition but is not efficient in absorbing UV light source and has a problem that the process time is prolonged. When the concentration of the pigment is high or the thickness of the coating film is 2.5 It is still difficult to form a fine pattern because the curing degree of the thick film is not sufficiently satisfied, and the formed pattern can not satisfy the CD (critical dimension) and the mechanical strength required in the product (Patent Documents 1 and 2). Further, halomethyltriazine derivatives which are decomposed by light irradiation to generate halogen radicals in the triazine derivatives are known to have good sensitivity to a UV light source as compared with the above-mentioned photopolymerization initiators, but they have a high crystallinity, And tends to be rapidly crystallized in the film (Patent Document 3).

상술한 바와 같은 문제점을 해결하기 위하여, 보다 높은 감도와 우수한 열 안정성 및 저장 안정성 등과 같은 특성을 가져 원가 절감 효과 및 산업 현장의 요구를 충족시킬 수 있는 새로운 광중합 개시제에 관한 지속적인 연구가 요구되고 있다. In order to solve the problems as described above, there is a demand for a new photopolymerization initiator which has characteristics such as higher sensitivity, excellent thermal stability and storage stability, and can meet cost reduction effect and industrial field demand.

이에, 본 출원인은 소량의 사용으로도 UV 광원을 효율적으로 흡수하여, 충분한 감도를 구현할 수 있어 액정의 오염원이 줄어들고, 패턴의 잔막률 향상뿐 아니라 다른 원재료의 가용 폭을 높일 수 있는 카바졸 유도체, 이를 포함하는 광중합 개시제 및 포토레지스트 조성물을 제공하고자 본 발명을 완성하였다.Therefore, the applicant of the present invention has found that a carbazole derivative which can efficiently absorb a UV light source and realize a sufficient sensitivity to reduce a contamination source of a liquid crystal, improve a residual film ratio of pattern and increase the usable width of other raw materials, The present invention has been completed to provide a photopolymerization initiator and a photoresist composition containing the same.

(특허문헌1)미국등록특허제4590145호(Patent Document 1) United States Patent No. 4590145 (특허문헌2)미국등록특허제4255513호(Patent Document 2) United States Patent No. 4255513 (특허문헌3)일본공개특허제2013-531086호(Patent Document 3) Japanese Laid-Open Patent Application No. 2013-531086

본 발명의 목적은 종래 광중합 개시제에 비하여 자외선을 효과적으로 흡수하여 현저하게 향상된 감도, 내열성 및 내화학성을 가지는 신규의 카바졸 유도체를 제공하는 것이다.An object of the present invention is to provide a novel carbazole derivative which absorbs ultraviolet light effectively compared with conventional photopolymerization initiators and has remarkably improved sensitivity, heat resistance and chemical resistance.

또한, 본 발명의 또 다른 목적은 보다 적은량의 사용으로도 잔막율, 현상성 및 강도(Strength) 등의 우수한 물성의 구현이 가능한 신규의 카바졸 유도체를 포함하는 광중합 개시제 조성물 및 포토레지스트 조성물을 제공하는 것이다.Another object of the present invention is to provide a photopolymerization initiator composition and a photoresist composition comprising a novel carbazole derivative capable of realizing excellent physical properties such as residual film ratio, developability and strength even with a smaller amount of use .

본 발명은 하기 화학식 1 로 표시되는 신규한 카바졸 유도체를 제공한다.The present invention provides a novel carbazole derivative represented by the following general formula (1).

[화학식 1][Chemical Formula 1]

Figure 112016008925599-pat00001
Figure 112016008925599-pat00001

[화학식 1에 있어서,In the formula (1)

L1은 단일결합, (C1-C20)알킬렌, (C2-C20)알케닐렌, -C(=O)-, -O-, -S-, -S(=O)-, -SO2- 및 -Se-에서 선택되며;L 1 is a single bond, (C1-C20) alkylene, (C2-C20) alkenylene, -C (= O) -, -O-, -S-, -S (= O) -, -SO 2 - And -Se-;

R1 은 (C1-C30)알킬, (C3-C30)시클로알킬, (C3-C30)헤테로시클로알킬, (C6-C30)아릴, (C3-C30)헤테로아릴, 니트로(-NO2), 시아노(-CN), -C(=O)R11 또는 -C(=O)OR12 이고, 상기 R11 및 R12는 각각 독립적으로 수소, 중수소(deuterium), (C1-C30)알킬, (C3-C30)시클로알킬, (C3-C30)헤테로시클로알킬, (C6-C30)아릴 및 (C3-C30)헤테로아릴에서 선택되며, 상기 R11 및 R12 의 시클로알킬, 헤테로시클로알킬, 아릴 및 헤테로아릴은 (C1-C30)알킬 또는 (C1-C30)알콕시로 더 치환될 수 있고;R 1 is (C1-C30) alkyl, (C3-C30) cycloalkyl, (C3-C30) heterocycloalkyl, (C6-C30) aryl, (C3-C30) heteroaryl, nitro (-NO 2), a cyano (= O) R 11 or -C (= O) OR 12 wherein R 11 and R 12 are each independently selected from the group consisting of hydrogen, deuterium, (C 1 -C 30) C3-C30) cycloalkyl, (C3-C30) heterocycloalkyl, (C6-C30) aryl and (C3-C30) is selected from a heteroaryl, wherein the R 11 and the cycloalkyl, heterocycloalkyl of R 12, aryl, and The heteroaryl may be further substituted with (C1-C30) alkyl or (C1-C30) alkoxy;

R2 및 R3 는 각각 독립적으로 수소, 중수소(deuterium), (C1-C30)알킬, (C3-C30)시클로알킬, (C3-C30)헤테로시클로알킬, (C6-C30)아릴 또는 (C3-C30)헤테로아릴이고;R 2 and R 3 are each independently selected from the group consisting of hydrogen, deuterium, (C 1 -C 30) alkyl, (C 3 -C 30) cycloalkyl, (C 3 -C 30) heterocycloalkyl, (C 6 -C 30) C30) heteroaryl;

R4 및 R5 는 각각 독립적으로 (C6-C30)아릴, (C3-C30)헤테로아릴, (C2-C30)알케닐, (C2-C30)알키닐, (C2-C30)알케닐옥시, (C2-C30)알키닐옥시 또는 -L2-OC(=O)-R13이고, 상기 R13은 (C2-C30)알케닐, (C2-C30)알키닐이며, 상기 R4 및 R5 는 서로 연결되어 고리를 형성할 수 있으며, R4 및 R5 중 하나 이상은 반드시 불포화기를 포함하며, L2은 (C1-C30)알킬렌이며;R 4 and R 5 are each independently selected from the group consisting of (C 6 -C 30) aryl, (C 3 -C 30) heteroaryl, (C 2 -C 30) alkenyl, (C 2 -C 30) alkynyl, C2-C30) alkynyloxy or -L 2 -OC (= O) -R 13 , and wherein R 13 is (C2-C30) alkenyl, (C2-C30) and alkynyl, wherein R 4 and R 5 is And at least one of R 4 and R 5 necessarily contains an unsaturated group; L 2 is (C 1 -C 30) alkylene;

n은 0 또는 1의 정수이며;n is an integer of 0 or 1;

상기 R1 의 알킬, 시클로알킬, 헤테로시클로알킬, 아릴 또는 헤테로아릴과 R2 및 R3의 알킬, 시클로알킬, 헤테로시클로알킬, 아릴 또는 헤테로아릴과 R4 및 R5 의 알케닐, 알키닐 또는 고리는 각각 독립적으로 (C1-C30)알킬, (C2-C30)알케닐, (C2-C30)알키닐, (C3-C30)시클로알킬, (C3-C30)헤테로시클로알킬, 할로겐, 시아노, 니트로, -CR24, -OR21, -SR22, -NR21R22, -C(=O)R23, -C(=O)OR23, -C(=O)N R21R22 및 P(=O)(OR21)(OR22)로 이루어진 군으로부터 선택된 하나 이상의 치환기로 더 치환될 수 있으며, 상기 R21 내지 R23은 각각 독립적으로 수소, 중수소(deuterium), 할로겐, (C1-C30)알킬, (C2-C30)알케닐, (C3-C30)시클로알킬(C1-C30)알킬, (C3-C30)시클로알킬, (C3-C30)헤테로시클로알킬, (C6-C30)아릴 또는 (C3-C30)헤테로아릴이고, 상기 R24는 할로겐이며, 상기 헤테로시클로알킬 및 헤테로아릴은 B, N, O, S, P(=O), Si 및 P로부터 선택된 하나 이상의 헤테로원자를 포함한다.]The alkyl, cycloalkyl, heterocycloalkyl, aryl or heteroaryl of R 1 and the alkyl, cycloalkyl, heterocycloalkyl, aryl or heteroaryl of R 2 and R 3 and the alkenyl, alkynyl or heteroaryl of R 4 and R 5 , (C3-C30) cycloalkyl, (C3-C30) heterocycloalkyl, halogen, cyano, cyano, nitro, -CR 24, -OR 21, -SR 22, -NR 21 R 22, -C (= O) R 23, -C (= O) OR 23, -C (= O) NR 21 R 22 , and P (= O) (OR 21 ) (OR 22 ), and R 21 To R 23 are each independently selected from hydrogen, heavy hydrogen (deuterium), halogen, (C1-C30) alkyl, (C2-C30) alkenyl, (C3-C30) cycloalkyl (C1-C30) alkyl, (C3-C30) cycloalkyl, (C3-C30), and heterocycloalkyl, (C6-C30) aryl or (C3-C30) heteroaryl, wherein R 24 is a halogen, wherein the heterocycloalkyl and heteroaryl are B, N, O, S , P (= O), Si and P.

본 발명의 일 실시예에 따른 상기 카바졸 유도체는 하기 화학식 2로 표시되는 것일 수 있다.The carbazole derivative according to an embodiment of the present invention may be represented by the following formula (2).

[화학식 2](2)

Figure 112016008925599-pat00002
Figure 112016008925599-pat00002

[화학식 2에 있어서,In the formula (2)

L1 은 각각 독립적으로 단일결합 또는 (C1-C20)알킬렌이며;L 1 are each independently a single bond or (C 1 -C 20) alkylene;

R1 은 (C1-C20)알킬, (C3-C20)시클로알킬, (C3-C20)헤테로시클로알킬, (C6-C20)아릴, (C3-C20)헤테로아릴, 니트로(-NO2), 시아노(-CN), -C(=O)R11 또는 -C(=O)OR12 이고, 상기 R11 및 R12는 각각 독립적으로 (C1-C20)알킬, (C3-C20)시클로알킬, (C3-C20)헤테로시클로알킬, (C6-C20)아릴 또는 (C3-C20)헤테로아릴이고;R 1 is (C1-C20) alkyl, (C3-C20) cycloalkyl, (C3-C20) heterocycloalkyl, (C6-C20) aryl, (C3-C20) heteroaryl, nitro (-NO 2), a cyano (= O) R 11 or -C (= O) OR 12 wherein R 11 and R 12 are each independently selected from the group consisting of (C 1 -C 20) alkyl, (C 3 -C 20) cycloalkyl, (C3-C20) heterocycloalkyl, (C6-C20) aryl or (C3-C20) heteroaryl;

R2 및 R3 는 각각 독립적으로 (C1-C20)알킬, (C3-C20)시클로알킬, (C3-C20)헤테로시클로알킬, (C6-C20)아릴 또는 (C3-C20)헤테로아릴이고;R 2 and R 3 are each independently (C 1 -C 20) alkyl, (C 3 -C 20) cycloalkyl, (C 3 -C 20) heterocycloalkyl, (C 6 -C 20) aryl or (C 3 -C 20) heteroaryl;

R6 는 (C2-C20)알케닐 또는 (C2-C20)알키닐이고;R 6 is (C2-C20) alkenyl or (C2-C20) alkynyl;

R5 는 (C6-C20)아릴, (C3-C20)헤테로아릴, (C2-C20)알케닐, (C2-C20)알키닐, (C2-C20)알케닐옥시, (C2-C20)알키닐옥시 또는 -L2-OC(=O)-R13이고, 상기 R13은 (C2-C20)알케닐, (C2-C20)알키닐이며, 상기 R5 및 R6 는 서로 연결되어 고리를 형성할 수 있으며, L2은 (C1-C7)알킬렌이며;R 5 is selected from the group consisting of (C 6 -C 20) aryl, (C 3 -C 20) heteroaryl, (C 2 -C 20) alkenyl, (C 2 -C 20) alkynyl, (C 2 -C 20) alkenyloxy, is oxy or -L 2 -OC (= O) -R 13, wherein R 13 is (C2-C20) alkenyl, (C2-C20) alkynyl is, form a ring is the R 5 and R 6 are connected to each other L < 2 > is (C1-C7) alkylene;

n은 0 또는 1의 정수이며;n is an integer of 0 or 1;

상기 R1 의 알킬, 시클로알킬, 헤테로시클로알킬, 아릴 또는 헤테로아릴과 R2 및 R3의 알킬, 시클로알킬, 헤테로시클로알킬, 아릴 또는 헤테로아릴과 R5 및 R6 의 알케닐, 알키닐 또는 고리는 각각 독립적으로 (C1-C20)알킬, (C2-C20)알케닐, (C2-C20)알키닐, (C3-C20)시클로알킬, (C3-C20)헤테로시클로알킬, 할로겐, 시아노, 니트로, -CR24, -OR21, -SR22, -NR21R22, -C(=O)R23, -C(=O)OR23, -C(=O)N R21R22 및 P(=O)(OR21)(OR22)로 이루어진 군으로부터 선택된 하나 이상의 치환기로 더 치환될 수 있으며, 상기 R21 내지 R23은 각각 독립적으로 수소, 중수소(deuterium), 할로겐, (C1-C20)알킬, (C2-C20)알케닐, (C3-C20)시클로알킬(C1-C20)알킬, (C3-C20)시클로알킬, (C3-C20)헤테로시클로알킬, (C6-C20)아릴 또는 (C3-C20)헤테로아릴이고, 상기 R24는 할로겐이며, 상기 헤테로시클로알킬 및 헤테로아릴은 B, N, O, S, P(=O), Si 및 P로부터 선택된 하나 이상의 헤테로원자를 포함한다.]The alkyl, cycloalkyl, heterocycloalkyl, aryl or heteroaryl of R 1 and the alkyl, cycloalkyl, heterocycloalkyl, aryl or heteroaryl of R 2 and R 3 and the alkenyl, alkynyl or heteroaryl of R 5 and R 6 , Each of the rings is independently selected from the group consisting of (C1-C20) alkyl, (C2-C20) alkenyl, (C2- C20) alkynyl, (C3- C20) cycloalkyl, (C3-C20) heterocycloalkyl, nitro, -CR 24, -OR 21, -SR 22, -NR 21 R 22, -C (= O) R 23, -C (= O) OR 23, -C (= O) NR 21 R 22 , and P (= O) (OR 21 ) (OR 22 ), and R 21 To R 23 are each independently selected from hydrogen, heavy hydrogen (deuterium), halogen, (C1-C20) alkyl, (C2-C20) alkenyl, (C3-C20) cycloalkyl (C1-C20) alkyl, (C3-C20) cycloalkyl, (C3-C20), and heterocycloalkyl, (C6-C20) aryl or (C3-C20) heteroaryl, wherein R 24 is a halogen, wherein the heterocycloalkyl and heteroaryl are B, N, O, S , P (= O), Si and P.

본 발명의 일 실시예에 따른 카바졸 유도체의 상기 R4 및 R5 는 각각 독립적으로 (C6-C20)아릴, (C3-C20)헤테로아릴, (C2-C7)알케닐, (C2-C7)알키닐, (C2-C7)알케닐옥시, (C2-C7)알키닐옥시 또는 -L2-OC(=O)-R13이고, 상기 L2은 (C1-C7)알킬렌이고, 상기 R13은 (C2-C7)알케닐, (C2-C7)알키닐이며, 상기 R4 및 R5 는 서로 연결되어

Figure 112016008925599-pat00003
또는
Figure 112016008925599-pat00004
의 고리를 형성할 수 있으며, 상기 R31 및 R32 는 각각 독립적으로 수소, (C2-C7)알케닐, (C2-C7)알키닐, (C3-C20)시클로알킬 또는 (C3-C20)헤테로시클로알킬이고, 상기 R31 및 R32 중 하나 이상은 불포화기를 포함하는 것을 특징으로 한다.Each of carbazole derivatives wherein R 4 and R 5 are, each independently, according to an embodiment of the invention (C6-C20) aryl, (C3-C20) heteroaryl, (C2-C7) alkenyl, (C2-C7) alkynyl, (C2-C7) alkenyloxy, (C2-C7) alkynyloxy or -L 2 -OC (= O) -R 13 , and wherein L 2 is (C1-C7) alkylene, wherein R 13 is (C2-C7) alkenyl, (C2-C7) alkynyl, and R 4 and R 5 are connected to each other
Figure 112016008925599-pat00003
or
Figure 112016008925599-pat00004
A can form a ring, wherein R 31 and R 32 are each independently hydrogen, (C2-C7) alkenyl, (C2-C7) alkynyl, (C3-C20) cycloalkyl or (C3-C20) heteroaryl Cycloalkyl, and at least one of R 31 and R 32 includes an unsaturated group.

본 발명은 상기 화학식 1로 표시되는 카바졸 유도체를 포함하는 광중합 개시제 조성물 및 포토레지스트 조성물을 제공한다.The present invention provides a photopolymerization initiator composition and a photoresist composition comprising the carbazole derivative represented by the general formula (1).

또한, 본 발명은 상술한 카바졸 유도체를 사용하여 자외선을 효율적으로 흡수하고 높은 감도로 우수한 잔막률, 기계적 강도, 내열성, 내화학성 및 내현상성 등을 컬러필터 또는 블랙 매트릭스를 제공할 수 있다. 특히 광학적 밀도를 맞추기 위해 고함량의 색제를 사용하는 블랙 매트릭스의 경우에도 소량의 사용으로도 동일 노광량 대비 높은 감도를 보여, 보다 향상된 물리적 특성을 구현할 수 있다.In addition, the present invention can provide a color filter or a black matrix that absorbs ultraviolet rays efficiently using the above-described carbazole derivative and has excellent sensitivity, excellent residual film ratio, mechanical strength, heat resistance, chemical resistance, Particularly, in the case of a black matrix using a high coloring agent to adjust the optical density, even a small amount of the black matrix exhibits high sensitivity compared to the same exposure amount, thereby realizing more improved physical characteristics.

본 발명에 따른 카바졸 유도체는 분자내 옥심 에스테르기와 포스포네이트기를 동시에 가짐으로써, 종래 광중합 개시제보다 우수한 감도를 가질 뿐 아니라 우수한 용해성과 색제, 다기능 모노머(multi functional monomer) 또는 바인더 수지 등과의 향상된 상용성을 가질 수 있을 뿐 아니라 높은 열 안정성으로 인해 노광 및 포스트베이크 공정 등에서 발생하는 아웃개싱을 효과적으로 억제하여 불량률을 최소화 할 수 있다. Since the carbazole derivative according to the present invention has both intramolecular oxime ester group and phosphonate group in the molecule, it has superior sensitivity than conventional photopolymerization initiators and has improved solubility and improved commerciality with colorants, multi functional monomers or binder resins It is possible to minimize the defective rate by effectively suppressing the outgassing occurring in the exposure and postbake processes due to the high thermal stability.

본 발명에 따른 높은 감도를 가지는 카바졸 유도체를 포함하는 포토레지스트 조성물은 빛을 조사함으로써 불포화 결합을 갖는 중합성 화합물의 중합 및 경화 반응의 속도를 현저하게 향상시킬 수 있을 뿐 아니라 치환체의 종류에 따라 중합 및 경화 반응 속도를 적절하게 조절하여, 목적하는 물성을 구현 할 수 있으며, 티올기, 실릴기 등을 포함하는 광증감제와의 추가 반응을 일으켜 보다 향상된 물성의 구현이 가능하다.The photoresist composition containing the carbazole derivative having high sensitivity according to the present invention can remarkably improve the polymerization and curing reaction rate of the polymerizable compound having unsaturated bonds by irradiation with light, The desired physical properties can be realized by appropriately controlling the polymerization and curing reaction rates, and addition reaction with the photosensitizer containing a thiol group, a silyl group and the like can be performed to realize more improved physical properties.

또한, 본 발명에 따른 포토레지스트 조성물은 낮은 노광량으로도 우수한 반응성을 구현할 수 있으므로, 고함량의 색제를 사용해야 하는 블랙 매트릭스의 경우에도 현저하게 향상된 잔막율, 기계적 강도, 내열성, 내화학성 및 내현상성 등의 물성을 나타낼 수 있다.Further, since the photoresist composition according to the present invention can realize excellent reactivity even at a low exposure dose, even in the case of a black matrix in which a high colorant is to be used, the photoresist composition has remarkably improved residual film ratio, mechanical strength, heat resistance, And the like.

따라서, 본 발명에 따른 카바졸 유도체는 액정표시소자의 컬럼 스페이서, 오버코트, 패시베이션 재료 등의 경화에 유리할 뿐 아니라 고온 공정 특성에도 유리하다는 장점을 가진다.Accordingly, the carbazole derivative according to the present invention is advantageous not only in curing of a column spacer, an overcoat, a passivation material, etc. of a liquid crystal display element but also in a high temperature process characteristic.

본 발명에 따른 신규한 카바졸 유도체, 이를 포함하는 광중합 개시제 및 포토레지스트 조성물 에 대하여 이하 상술하나, 이때 사용되는 기술 용어 및 과학 용어에 있어서 다른 정의가 없다면, 이 발명이 속하는 기술 분야에서 통상의 지식을 가진 자가 통상적으로 이해하고 있는 의미를 가지며, 하기의 설명에서 본 발명의 요지를 불필요하게 흐릴 수 있는 공지 기능 및 구성에 대한 설명은 생략한다.The present invention relates to a novel carbazole derivative, a photopolymerization initiator and a photoresist composition containing the same, which will be described below. However, unless otherwise defined in technical terms and scientific terms used herein, And a description of known functions and configurations that may unnecessarily obscure the gist of the present invention will be omitted in the following description.

본 발명의 목적을 달성하기 위하여, 옥심 에스테르기와 포스포네이트기를 동시에 포함함으로써, 보다 향상된 광 감도를 가질 수 있으며, 이는 하기 화학식 1로 표시되는 카바졸 유도체일 수 있다.In order to accomplish the object of the present invention, the oxazole ester group and the phosphonate group may be simultaneously included to have a higher optical sensitivity, which may be a carbazole derivative represented by the following general formula (1).

[화학식 1][Chemical Formula 1]

Figure 112016008925599-pat00005
Figure 112016008925599-pat00005

[화학식 1에 있어서,In the formula (1)

L1은 단일결합, (C1-C20)알킬렌, (C2-C20)알케닐렌, -C(=O)-, -O-, -S-, -S(=O)-, -SO2- 및 -Se-에서 선택되며;L 1 is a single bond, (C1-C20) alkylene, (C2-C20) alkenylene, -C (= O) -, -O-, -S-, -S (= O) -, -SO 2 - And -Se-;

R1 은 (C1-C30)알킬, (C3-C30)시클로알킬, (C3-C30)헤테로시클로알킬, (C6-C30)아릴, (C3-C30)헤테로아릴, 니트로(-NO2), 시아노(-CN), -C(=O)R11 또는 -C(=O)OR12 이고, 상기 R11 및 R12는 각각 독립적으로 수소, 중수소(deuterium), (C1-C30)알킬, (C3-C30)시클로알킬, (C3-C30)헤테로시클로알킬, (C6-C30)아릴 및 (C3-C30)헤테로아릴에서 선택되며, 상기 R11 및 R12 의 시클로알킬, 헤테로시클로알킬, 아릴 및 헤테로아릴은 (C1-C30)알킬 또는 (C1-C30)알콕시로 더 치환될 수 있고;R 1 is (C1-C30) alkyl, (C3-C30) cycloalkyl, (C3-C30) heterocycloalkyl, (C6-C30) aryl, (C3-C30) heteroaryl, nitro (-NO 2), a cyano (= O) R 11 or -C (= O) OR 12 wherein R 11 and R 12 are each independently selected from the group consisting of hydrogen, deuterium, (C 1 -C 30) C3-C30) cycloalkyl, (C3-C30) heterocycloalkyl, (C6-C30) aryl and (C3-C30) is selected from a heteroaryl, wherein the R 11 and the cycloalkyl, heterocycloalkyl of R 12, aryl, and The heteroaryl may be further substituted with (C1-C30) alkyl or (C1-C30) alkoxy;

R2 및 R3 는 각각 독립적으로 수소, 중수소(deuterium), (C1-C30)알킬, (C3-C30)시클로알킬, (C3-C30)헤테로시클로알킬, (C6-C30)아릴 또는 (C3-C30)헤테로아릴이고;R 2 and R 3 are each independently selected from the group consisting of hydrogen, deuterium, (C 1 -C 30) alkyl, (C 3 -C 30) cycloalkyl, (C 3 -C 30) heterocycloalkyl, (C 6 -C 30) C30) heteroaryl;

R4 및 R5 는 각각 독립적으로 (C6-C30)아릴, (C3-C30)헤테로아릴, (C2-C30)알케닐, (C2-C30)알키닐, (C2-C30)알케닐옥시, (C2-C30)알키닐옥시 또는 -L2-OC(=O)-R13이고, 상기 R13은 (C2-C30)알케닐, (C2-C30)알키닐이며, 상기 R4 및 R5 는 서로 연결되어 고리를 형성할 수 있으며, R4 및 R5 중 하나 이상은 반드시 불포화기를 포함하며, L2은 (C1-C30)알킬렌이며;R 4 and R 5 are each independently selected from the group consisting of (C 6 -C 30) aryl, (C 3 -C 30) heteroaryl, (C 2 -C 30) alkenyl, (C 2 -C 30) alkynyl, C2-C30) alkynyloxy or -L 2 -OC (= O) -R 13 , and wherein R 13 is (C2-C30) alkenyl, (C2-C30) and alkynyl, wherein R 4 and R 5 is And at least one of R 4 and R 5 necessarily contains an unsaturated group; L 2 is (C 1 -C 30) alkylene;

n은 0 또는 1의 정수이며;n is an integer of 0 or 1;

상기 R1 의 알킬, 시클로알킬, 헤테로시클로알킬, 아릴 또는 헤테로아릴과 R2 및 R3의 알킬, 시클로알킬, 헤테로시클로알킬, 아릴 또는 헤테로아릴과 R4 및 R5 의 알케닐, 알키닐 또는 고리는 각각 독립적으로 (C1-C30)알킬, (C2-C30)알케닐, (C2-C30)알키닐, (C3-C30)시클로알킬, (C3-C30)헤테로시클로알킬, 할로겐, 시아노, 니트로, -CR24, -OR21, -SR22, -NR21R22, -C(=O)R23, -C(=O)OR23, -C(=O)N R21R22 및 P(=O)(OR21)(OR22)로 이루어진 군으로부터 선택된 하나 이상의 치환기로 더 치환될 수 있으며, 상기 R21 내지 R23은 각각 독립적으로 수소, 중수소(deuterium), 할로겐, (C1-C30)알킬, (C2-C30)알케닐, (C3-C30)시클로알킬(C1-C30)알킬, (C3-C30)시클로알킬, (C3-C30)헤테로시클로알킬, (C6-C30)아릴 또는 (C3-C30)헤테로아릴이고, 상기 R24는 할로겐이며, 상기 헤테로시클로알킬 및 헤테로아릴은 B, N, O, S, P(=O), Si 및 P로부터 선택된 하나 이상의 헤테로원자를 포함한다.]The alkyl, cycloalkyl, heterocycloalkyl, aryl or heteroaryl of R 1 and the alkyl, cycloalkyl, heterocycloalkyl, aryl or heteroaryl of R 2 and R 3 and the alkenyl, alkynyl or heteroaryl of R 4 and R 5 , (C3-C30) cycloalkyl, (C3-C30) heterocycloalkyl, halogen, cyano, cyano, nitro, -CR 24, -OR 21, -SR 22, -NR 21 R 22, -C (= O) R 23, -C (= O) OR 23, -C (= O) NR 21 R 22 , and P (= O) (OR 21 ) (OR 22 ), and R 21 To R 23 are each independently selected from hydrogen, heavy hydrogen (deuterium), halogen, (C1-C30) alkyl, (C2-C30) alkenyl, (C3-C30) cycloalkyl (C1-C30) alkyl, (C3-C30) cycloalkyl, (C3-C30), and heterocycloalkyl, (C6-C30) aryl or (C3-C30) heteroaryl, wherein R 24 is a halogen, wherein the heterocycloalkyl and heteroaryl are B, N, O, S , P (= O), Si and P.

본 발명에 따른 카바졸 유도체는 자외선을 효과적으로 흡수하여 라디칼을 생성하는 효율이 우수하고, 각종 불포화기를 가지는 중합성 화합물의 중합 및 경화 반응에 효율적인 개시제로 작용하여 반응 속도 및 감도 등을 적절하게 조절할 수 있을 뿐 아니라 이로부터 제조되는 광감재의 잔막율, 기계적 강도, 내열성, 내화학성 및 내현상성 등의 물성을 현저하게 향상시킬 수 있다.The carbazole derivative according to the present invention is excellent in the efficiency of absorbing ultraviolet rays to produce radicals and acts as an effective initiator in the polymerization and curing reaction of polymerizable compounds having various unsaturated groups, so that the reaction rate and sensitivity can be appropriately controlled Mechanical strength, heat resistance, chemical resistance, and developability of the photosensitive material produced therefrom can be remarkably improved.

이때, 상기 광감재는 TFT LCD 컬러필터 제조용 안료분산형 감광재, TFT LCD 및 유기발광다이오드 등의 블랙 매트릭스 형성용 감광재, 오버코트층 형성용 감광재, 컬럼 스페이서 감광재, 컬러필터 감광재, 유기절연막용 감광재 및 인쇄배선반용 감광재 등 일 수 있으나 이에 한정되는 것은 아니다.At this time, the photosensitive material is a photosensitive material for forming a black matrix such as a pigment dispersed type photosensitive material for TFT LCD color filter, a TFT LCD and an organic light emitting diode, a photosensitive material for forming an overcoat layer, a photosensitive material for a column spacer, A photosensitive material for a printing wiring board, and the like, but is not limited thereto.

본 발명의 용어 "단일결합"은 카바졸기의 N과 포스포네이트기의 P가 직접결합되어 단일결합을 이루는 것을 의미하는 것이며, 본 발명의 용어 "알킬", "알콕시" 및 그 외 "알킬"부분을 포함하는 모든 치환체는 직쇄 또는 분쇄 형태를 모두 포함하는 탄화수소 라디칼을 의미하는 것일 수 있다. 이때, 상기 알킬은 바람직하게 (C1-C20)알킬 일 수 있으며, 보다 바람직하게는 메틸, 에틸, 프로필, 부틸, 펜틸, 헥실, 헵틸 등에서 선택되는 단쇄의 탄화수소 라디칼 일 수 있으나 이에 한정되는 것은 아니다. The term " single bond "of the present invention means that N of the carbazole group and P of the phosphonate group are directly bonded to form a single bond, and the terms" alkyl ", " Quot; moiety " may < / RTI > refer to a hydrocarbon radical that includes both linear and branched forms. The alkyl may be preferably (C1-C20) alkyl, more preferably a short chain hydrocarbon radical selected from methyl, ethyl, propyl, butyl, pentyl, hexyl, heptyl and the like, but is not limited thereto.

또한, 용어 "알케닐"은 이중결합을 하나이상 포함하는 직쇄 또는 분쇄 형태의 불포화 탄화수소 라디칼을 의미하는 것으로, 구체적인 예로 에테닐, 프로프-1-엔-1-일, 프로프-1-엔-2-일, 프로프-2-엔-1-일, 프로프-2-엔-2-일, 부트-1-엔-1-일, 부트-1-엔-2-일, 2-메틸-프로프-1-엔-1-일, 부트-2-엔-1-일, 부트-2-엔-2-일, 부타-1,3-디엔-1-일, 부타-1,3-디엔-2-일 등일 수 있으나 이에 한정되는 것은 아니다. 용어 "알키닐"은 삼중결합을 하나이상 포함하는 직쇄 또는 분쇄 형태의 불포화 탄화수소 라디칼을 의미하는 것으로, 구체적인 예로 에티닐, 프로프-1-인-1-일, 프로프-2-인-1-일, 부트-1-인-1-일, 부트-1-인-3-일 또는 부트-3-인-1-일 등에서 선택되는 단쇄의 탄화수소 라디칼 일 수 있으나 이에 한정되는 것은 아니다. In addition, the term "alkenyl" means an unsaturated hydrocarbon radical in the form of a straight chain or a branched chain containing at least one double bond, and specific examples thereof include ethenyl, prop-1-en-1-yl, 2-yl, prop-2-en-1-yl, 1-yl, but-2-en-1-yl, but-2-en-2-yl, buta- Di-2-yl, and the like, but is not limited thereto. The term "alkynyl" means an unsaturated hydrocarbon radical in the form of a straight or branched chain containing at least one triple bond, and specific examples thereof include ethynyl, prop-1-yn-1-yl, 1-yl, -but-1-yn-1-yl, but-1-yn-3-yl or but-3-yn-1-yl and the like.

본 발명의 용어 "시클로알킬"은 3 내지 9개의 탄소 원자의 완전히 포화 및 부분적으로 불포화된 탄화수소 고리를 의미하는 것일 수 있으며, 아릴 또는 헤테로아릴이 융합되어 있는 경우도 포함하는 것일 수 있다. 또한 용어 "헤테로시클로알킬"은 B, N, O, S, P(=O), Si 및 P로부터 선택된 하나 이상의 헤테로원자를 포함하는 일환상 또는 다환상 비방향족 라디칼일 수 있다.The term "cycloalkyl ", as used herein, may refer to fully saturated and partially unsaturated hydrocarbon rings of from 3 to 9 carbon atoms, including those where aryl or heteroaryl is fused. The term "heterocycloalkyl" can also be a monocyclic or polycyclic non-aromatic radical comprising at least one heteroatom selected from B, N, O, S, P (= O), Si and P.

또한 본 발명의 용어 "아릴"은 하나의 수소 제거에 의해서 방향족 탄화수소로부터 유도된 유기 라디칼로, 일환상 또는 다환상 방향족 탄화수소 라디칼일 수 있고, 각 고리에 적절하게는 3 내지 7개, 바람직하게는 5 또는 6개의 고리원자를 포함하는 단일 또는 융합 고리계를 포함하며, 다수개의 아릴이 단일결합으로 연결되어 있는 형태까지 포함하며, 구체적인 예로 페닐, 나프틸, 비페닐, 터페닐, 안트릴, 인데닐(indenyl), 플루오레닐, 페난트릴, 트라이페닐레닐, 피렌일, 페릴렌일, 크라이세닐, 나프타세닐, 플루오란텐일 등으로 예시될 수 있으나 이에 한정되는 것은 아니다.The term "aryl " of the present invention is an organic radical derived from an aromatic hydrocarbon by the removal of one hydrogen, which may be monocyclic or polycyclic aromatic hydrocarbon radicals, suitably containing from 3 to 7, Includes a single or fused ring system containing 5 or 6 ring atoms and includes a form in which a plurality of aryls are connected by a single bond, and specific examples thereof include phenyl, naphthyl, biphenyl, terphenyl, anthryl, But are not limited to, indenyl, fluorenyl, phenanthryl, triphenylenyl, pyrenyl, perylenyl, crycenyl, naphthacenyl, fluoranthenyl and the like.

본 발명의 용어 "헤테로아릴"은 하나의 수소 제거에 의해서 방향족 탄화수소로부터 유도된 유기 라디칼로 B, N, O, S, P(=O), Si 및 P로부터 선택된 하나 이상의 헤테로원자를 포함하는 3 내지 8개의 고리원자를 포함하는 일환상 또는 다환상 방향족 탄화수소 라디칼일 수 있고, 각 고리에 적절하게는 3 내지 7개, 바람직하게는 5 또는 6개의 고리원자를 포함하는 단일 또는 융합 고리계를 포함하며, 다수개의 헤테로아릴이 단일결합으로 연결되어 있는 형태까지 포함하며, 구체적인 예로 퓨릴, 티오펜일, 피롤릴, 피란일, 이미다졸릴, 피라졸릴, 티아졸릴, 티아디아졸릴, 이소티아졸릴, 이속사졸릴, 옥사졸릴, 옥사디아졸릴, 트리아진일, 테트라진일, 트리아졸릴, 테트라졸릴, 퓨라잔일, 피리딜, 피라진일, 피리미딘일, 피리다진일 등의 단환 헤테로아릴; 및 벤조퓨란일, 벤조티오펜일, 이소벤조퓨란일, 벤조이미다졸릴, 벤조티아졸릴, 벤조이소티아졸릴, 벤조이속사졸릴, 벤조옥사졸릴, 이소인돌릴, 인돌릴, 인다졸릴, 벤조티아디아졸릴, 퀴놀릴, 이소퀴놀릴, 신놀리닐, 퀴나졸리닐, 퀴놀리진일, 퀴녹살리닐, 카바졸릴, 페난트리딘일, 벤조디옥솔릴 등의 다환식 헤테로아릴; 등으로 예시될 수 있으나 이에 한정되는 것은 아니다.The term "heteroaryl ", as used herein, refers to an organic radical derived from an aromatic hydrocarbon by the removal of one hydrogen, such as 3, including at least one heteroatom selected from B, N, O, S, P To 8 ring atoms, and includes a single or fused ring system, suitably containing from 3 to 7, preferably 5 or 6, ring atoms in each ring And includes a form in which a plurality of heteroaryls are connected by a single bond. Specific examples include furyl, thiophenyl, pyrrolyl, pyranyl, imidazolyl, pyrazolyl, thiazolyl, thiadiazolyl, isothiazolyl, Monocyclic heteroaryl such as isoxazolyl, oxazolyl, oxadiazolyl, triazinyl, tetrazinyl, triazolyl, tetrazolyl, furazanyl, pyridyl, pyrazinyl, pyrimidinyl and pyridazinyl; And benzofuranyl, benzofuranyl, benzothiophenyl, isobenzofuranyl, benzoimidazolyl, benzothiazolyl, benzoisothiazolyl, benzoisoxazolyl, benzoxazolyl, isoindolyl, indolyl, indazolyl, benzothiadiazole Polycyclic heteroaryl such as benzyl, tolyl, quinolyl, isoquinolyl, cinnolinyl, quinazolinyl, quinolizinyl, quinoxalinyl, carbazolyl, phenanthridinyl, benzodioxolyl and the like; But the present invention is not limited thereto.

또한, 본 발명의 용어 "알킬렌" 또는 "알케닐렌"은 (C1-C20)알킬 또는 (C2-C20)알케닐로부터 각각 1개의 수소원자를 제거한 후 남아있는 2가의 잔기를 의미하는 것으로, 바람직하게는 C2 내지 C7의 탄소수를 가지는 것일 수 있으나 이에 한정되는 것은 아니다.The term "alkylene" or "alkenylene" in the present invention means a residual divalent residue after removal of one hydrogen atom from (C1-C20) May have a carbon number of C2 to C7, but the present invention is not limited thereto.

본 발명의 용어 "할로겐"은 플루오로, 클로로, 브로모 또는 아이오도를 의미한다. The term "halogen" of the present invention means fluoro, chloro, bromo or iodo.

본 발명의 일 실시예에 따른 상기 화학식 1로 표시되는 카바졸 유도체는 용매에 대한 높은 용해도 및 다양한 범위의 흡수 스펙트럼에서 고 감도를 가지기 위한 측면에서, 하기 화학식 2로 표시되는 카바졸 유도체 일 수 있다.The carbazole derivative represented by Chemical Formula 1 according to an embodiment of the present invention may be a carbazole derivative represented by Chemical Formula 2 in view of high solubility in solvents and high sensitivity in a wide range of absorption spectra .

[화학식 2](2)

Figure 112016008925599-pat00006
Figure 112016008925599-pat00006

[화학식 2에 있어서,In the formula (2)

L1 은 각각 독립적으로 단일결합 또는 (C1-C20)알킬렌이며;L 1 are each independently a single bond or (C 1 -C 20) alkylene;

R1 은 (C1-C20)알킬, (C3-C20)시클로알킬, (C3-C20)헤테로시클로알킬, (C6-C20)아릴, (C3-C20)헤테로아릴, 니트로(-NO2), 시아노(-CN), -C(=O)R11 또는 -C(=O)OR12 이고, 상기 R11 및 R12는 각각 독립적으로 (C1-C20)알킬, (C3-C20)시클로알킬, (C3-C20)헤테로시클로알킬, (C6-C20)아릴 또는 (C3-C20)헤테로아릴이고;R 1 is (C1-C20) alkyl, (C3-C20) cycloalkyl, (C3-C20) heterocycloalkyl, (C6-C20) aryl, (C3-C20) heteroaryl, nitro (-NO 2), a cyano (= O) R 11 or -C (= O) OR 12 wherein R 11 and R 12 are each independently selected from the group consisting of (C 1 -C 20) alkyl, (C 3 -C 20) cycloalkyl, (C3-C20) heterocycloalkyl, (C6-C20) aryl or (C3-C20) heteroaryl;

R2 및 R3 는 각각 독립적으로 (C1-C20)알킬, (C3-C20)시클로알킬, (C3-C20)헤테로시클로알킬, (C6-C20)아릴 또는 (C3-C20)헤테로아릴이고;R 2 and R 3 are each independently (C 1 -C 20) alkyl, (C 3 -C 20) cycloalkyl, (C 3 -C 20) heterocycloalkyl, (C 6 -C 20) aryl or (C 3 -C 20) heteroaryl;

R6 는 (C2-C20)알케닐 또는 (C2-C20)알키닐이고;R 6 is (C2-C20) alkenyl or (C2-C20) alkynyl;

R5 는 (C6-C20)아릴, (C3-C20)헤테로아릴, (C2-C20)알케닐, (C2-C20)알키닐, (C2-C20)알케닐옥시, (C2-C20)알키닐옥시 또는 -L2-OC(=O)-R13이고, 상기 R13은 (C2-C20)알케닐, (C2-C20)알키닐이며, 상기 R4 및 R5 는 서로 연결되어 고리를 형성할 수 있으며, L2은 (C1-C7)알킬렌이며;R 5 is selected from the group consisting of (C 6 -C 20) aryl, (C 3 -C 20) heteroaryl, (C 2 -C 20) alkenyl, (C 2 -C 20) alkynyl, (C 2 -C 20) alkenyloxy, is oxy or -L 2 -OC (= O) -R 13, wherein R 13 is (C2-C20) alkenyl, (C2-C20) and alkynyl, wherein R 4 and R 5 are connected to each other to form a ring L < 2 > is (C1-C7) alkylene;

n은 0 또는 1의 정수이며;n is an integer of 0 or 1;

상기 R1 의 알킬, 시클로알킬, 헤테로시클로알킬, 아릴 또는 헤테로아릴과 R2 및 R3의 알킬, 시클로알킬, 헤테로시클로알킬, 아릴 또는 헤테로아릴과 R5 및 R6 의 알케닐, 알키닐 또는 고리는 각각 독립적으로 (C1-C20)알킬, (C2-C20)알케닐, (C2-C20)알키닐, (C3-C20)시클로알킬, (C3-C20)헤테로시클로알킬, 할로겐, 시아노, 니트로, -CR24, -OR21, -SR22, -NR21R22, -C(=O)R23, -C(=O)OR23, -C(=O)N R21R22 및 P(=O)(OR21)(OR22)로 이루어진 군으로부터 선택된 하나 이상의 치환기로 더 치환될 수 있으며, 상기 R21 내지 R23은 각각 독립적으로 수소, 중수소(deuterium), 할로겐, (C1-C20)알킬, (C2-C20)알케닐, (C3-C20)시클로알킬(C1-C20)알킬, (C3-C20)시클로알킬, (C3-C20)헤테로시클로알킬, (C6-C20)아릴 또는 (C3-C20)헤테로아릴이고, 상기 R24는 할로겐이며, 상기 헤테로시클로알킬 및 헤테로아릴은 B, N, O, S, P(=O), Si 및 P로부터 선택된 하나 이상의 헤테로원자를 포함한다.]The alkyl, cycloalkyl, heterocycloalkyl, aryl or heteroaryl of R 1 and the alkyl, cycloalkyl, heterocycloalkyl, aryl or heteroaryl of R 2 and R 3 and the alkenyl, alkynyl or heteroaryl of R 5 and R 6 , Each of the rings is independently selected from the group consisting of (C1-C20) alkyl, (C2-C20) alkenyl, (C2- C20) alkynyl, (C3- C20) cycloalkyl, (C3-C20) heterocycloalkyl, nitro, -CR 24, -OR 21, -SR 22, -NR 21 R 22, -C (= O) R 23, -C (= O) OR 23, -C (= O) NR 21 R 22 , and P (= O) (OR 21 ) (OR 22 ), and R 21 To R 23 are each independently selected from hydrogen, heavy hydrogen (deuterium), halogen, (C1-C20) alkyl, (C2-C20) alkenyl, (C3-C20) cycloalkyl (C1-C20) alkyl, (C3-C20) cycloalkyl, (C3-C20), and heterocycloalkyl, (C6-C20) aryl or (C3-C20) heteroaryl, wherein R 24 is a halogen, wherein the heterocycloalkyl and heteroaryl are B, N, O, S , P (= O), Si and P.

또한, 본 발명의 일 실시예에 따른 상기 카바졸 유도체는 옥심 에스테르기와 포스포네이트기를 포함하는 치환기와 상기 R4 및 R5 치환체의 위치에 불포화기를 반드시 하나 이상을 포함하는 포스포네이트기(phosphonate group) 또는 포스피네이트기(phosphinate group)을 가짐으로써, 자외선에 대한 감도 및 내열성을 현저하게 향상시킬 수 있음을 확인하였다. 또한, 티올기, 실릴기 등을 포함하는 광증감제와 반응하여 기판에 대한 높은 밀착성 및 높은 강도의 미세 패턴 형성이 가능하다.In addition, the carbazole derivative according to an embodiment of the present invention includes a substituent group containing an oxime ester group and a phosphonate group, and a phosphonate group having at least one unsaturated group at the R 4 and R 5 substituent group or a phosphinate group, it was confirmed that the sensitivity to ultraviolet rays and the heat resistance can be remarkably improved. Also, it can react with a photosensitizer containing a thiol group, a silyl group or the like to form a fine pattern with high adhesion to a substrate and high strength.

본 발명에 따른 상기 R4 및 R5 의 위치에 치환 가능한 치환체는 제한되지는 않으나 티올기, 실릴기 등을 포함하는 광증감제와 함께 사용함으로써, 우수한 감도 및 열 안정성으로 인해 고온경화(postbake)시 퓸 발생 등을 최소화 할 수 있는 측면에서 바람직하게 페닐, 나프틸, 비페닐, 터페닐 또는 하기 구조에서 선택되는 것 일 수 있다.The substituents which can be substituted at the positions of R 4 and R 5 according to the present invention are not limited, but when used in combination with a photosensitizer containing a thiol group, a silyl group and the like, a high temperature postbake due to excellent sensitivity and thermal stability, Naphthyl, biphenyl, terphenyl, or the following structure, from the viewpoint of minimizing the occurrence of cracks and the like.

Figure 112016008925599-pat00007
Figure 112016008925599-pat00007

본 발명의 일 실시예에 따른 카바졸 유도체의 상기 R4 및 R5 는 각각 독립적으로 (C6-C20)아릴, (C3-C20)헤테로아릴, (C2-C7)알케닐, (C2-C7)알키닐, (C2-C7)알케닐옥시, (C2-C7)알키닐옥시 또는 -L2-OC(=O)-R13이고, 상기 L2은 (C1-C7)알킬렌이고, 상기 R13은 (C2-C7)알케닐, (C2-C7)알키닐이며, 상기 R4 및 R5 는 서로 연결되어

Figure 112016008925599-pat00008
또는
Figure 112016008925599-pat00009
의 고리를 형성할 수 있으며, 상기 R31 및 R32 는 각각 독립적으로 수소, (C2-C7)알케닐, (C2-C7)알키닐, (C3-C20)시클로알킬 또는 (C3-C20)헤테로시클로알킬인 것 일 수 있으며, 상기 R31 및 R32 중 하나 이상은 불포화기를 포함하는 것을 특징으로 한다.Each of carbazole derivatives wherein R 4 and R 5 are, each independently, according to an embodiment of the invention (C6-C20) aryl, (C3-C20) heteroaryl, (C2-C7) alkenyl, (C2-C7) alkynyl, (C2-C7) alkenyloxy, (C2-C7) alkynyloxy or -L 2 -OC (= O) -R 13 , and wherein L 2 is (C1-C7) alkylene, wherein R 13 is (C2-C7) alkenyl, (C2-C7) alkynyl, and R 4 and R 5 are connected to each other
Figure 112016008925599-pat00008
or
Figure 112016008925599-pat00009
A can form a ring, wherein R 31 and R 32 are each independently hydrogen, (C2-C7) alkenyl, (C2-C7) alkynyl, (C3-C20) cycloalkyl or (C3-C20) heteroaryl Cycloalkyl, and at least one of R 31 and R 32 includes an unsaturated group.

본 발명의 일 실시예에 따른 상기 카바졸 유도체는 적은 양으로도 광중합 개시제로써 충분한 감도를 구현할 수 있어 액정의 오염원을 최소화하여 패턴의 잔막율을 향상시킬 뿐 아니라 조성물 제조 시 다른 원재료의 가용 폭을 높일 수 있다는 장점을 가지는 측면에서, 바람직하게 L1 이 (C1-C7)알킬렌일 수 있으나 이에 한정되는 것은 아니다.The carbazole derivative according to an embodiment of the present invention can realize sufficient sensitivity as a photopolymerization initiator even in a small amount to minimize the contamination source of the liquid crystal to thereby improve the residual film ratio of the pattern and increase the usable width of other raw materials L 1 may preferably be (C 1 -C 7) alkylene, but is not limited thereto.

본 발명의 일 실시예에 따른 상기 카바졸 유도체는 보다 바람직하게, 소량의 사용으로도 UV 광원을 효율적으로 흡수 할 수 있으며, 감도 및 고온공정 특성이 우수한 측면으로 하기 구조에서 선택되는 것 일 수 있으나 이에 한정되는 것은 아니다.The carbazole derivative according to an embodiment of the present invention can more effectively absorb the UV light source even in a small amount of use and can be selected from the following structures in terms of sensitivity and high temperature process characteristics But is not limited thereto.

Figure 112016008925599-pat00010
Figure 112016008925599-pat00010

Figure 112016008925599-pat00011
Figure 112016008925599-pat00011

본 발명에 따른 카바졸 유도체는 하기 반응식 1 내지 2로 표시되는 방법으로 제조될 수 있으며, 이외 다양한 합성법으로 제조될 수 있음은 물론이다.The carbazole derivative according to the present invention can be prepared by the method shown in the following Reaction Schemes 1 and 2, and can be prepared by various synthetic methods.

[반응식 1][Reaction Scheme 1]

Figure 112016008925599-pat00012
Figure 112016008925599-pat00012

[반응식 2][Reaction Scheme 2]

Figure 112016008925599-pat00013
Figure 112016008925599-pat00013

본 발명에 따른 카바졸 유도체는 UV광원 흡수율을 현저하게 향상시킬 수 있을 뿐 아니라 치환기 변화에 따라 포토레지스트의 조성물의 패턴 특성 조절과 내열성 및 내화학성 등의 박막 물성 조절이 용이하다. 즉, 본 발명에 따른 포토레지스트의 조성물은 블랙 매트릭스, 컬러필터, 컬럼스페이서, 유기절연막, 오버코트용 포토레지스트 조성물 등에 적용 가능하며, 특히 고함량의 색제를 필요로하는 블랙 매트릭스에 효과적으로 적용될 수 있다.The carbazole derivative according to the present invention not only remarkably improves the UV light absorption rate but also can control the pattern properties of the composition of the photoresist according to the substituent change and control the physical properties of the thin film such as heat resistance and chemical resistance. That is, the composition of the photoresist according to the present invention can be applied to a black matrix, a color filter, a column spacer, an organic insulating film, a photoresist composition for an overcoat, and the like, and can be effectively applied to a black matrix requiring a high colorant.

본 발명은 상기 카바졸 유도체를 포함하는 광중합 개시제 조성물을 제공한다.The present invention provides a photopolymerization initiator composition comprising the carbazole derivative.

또한, 본 발명은 상기 카바졸 유도체를 포함하는 포토레지스트 조성물을 제공한다. The present invention also provides a photoresist composition comprising the carbazole derivative.

본 발명에 따른 포토레지스트(감광재) 조성물은 바인더 수지, 색재 및 본 발명에 따른 카바졸 유도체를 포함하며, 상기 카바졸 유도체를 전체 포토레지스트 조성물 100 중량%에 대하여 0.01 내지 15 중량%로 포함할 수 있으며, 바람직하게는 0.01 내지 10 중량%, 보다 바람직하게는 0.01 내지 5 중량%로 포함되는 것이 광 개시 후 분해되는 부산물에 의한 오염을 최소화 할 수 있어 좋다. The photoresist composition according to the present invention comprises a binder resin, a colorant, and a carbazole derivative according to the present invention, wherein the carbazole derivative is contained in an amount of 0.01 to 15% by weight based on 100% by weight of the total photoresist composition Preferably 0.01 to 10% by weight, more preferably 0.01 to 5% by weight, may minimize contamination by by-products decomposed after photoinitiation.

상기 바인더 수지는 당해 기술분야에서 공지된 것이라면 한정되지는 않으나 본 발명에 따른 상기 카바졸 유도체와의 높은 혼화도를 가지는 측면에서 평균 분자량 2,000 내지 30O,O00 g/mol, 분산도는 1.0 내지 10.0 범위의 아크릴 중합체, 노볼락 수지 등을 사용할 수 있다. 이때, 상기 아크릴 중합체는 하기 단량체들을 포함하는 단량체들의 공중합체 일 수 있으며, 단량체는 이에 한정되는 것은 아니나, 이의 구체적인 예로는 메틸(메타)아크릴레이트, 에틸(메타)아크릴레이트, 프로필(메타)아크릴레이트, 부틸(메타)아크릴레이트, 펜틸(메타)아크릴레이트, 헥실(메타)아크릴레이트, 시클로헥실(메타)아크릴 레이트, 헵틸(메타)아크릴레이트, 옥틸(메타)아크릴레이트, 노닐(메타)아크릴 레이트, 데실(메타)아크릴레이트, 라우릴(메타)아크릴레이트, 도데실(메타) 아크릴레이트, 테트라데실(메타)아크릴레이트, 헥사데실(메타)아크릴레이트, 이소보닐(메타)아크릴레이트, 아다만틸(메타)아크릴레이트, 디시클로펜타닐(메타) 아크릴레이트, 디시클로펜테닐(메타)아크릴레이트, 벤질(메타)아크릴레이트, 2-메톡시에틸(메타)아크릴레이트, 2-에톡시에틸(메타)아크릴레이트, 아크릴산, 메타아크릴산, 이타코닉산, 말레익산, 말레익산무수물, 말레익산모노알킬 에스터, 모노알킬 이타코네이트, 모노알킬 퓨말레이트, 글리시딜아크릴레이트, 글리시딜 메타아크릴레이트, 3,4-에폭시부틸(메타)아크릴레이트, 2,3-에폭시시클로헥실 (메타)아크릴레이트, 3,4-에폭시시클로헥실메틸(메타)아크릴레이트, 3-메틸 옥세탄-3-메틸(메타)아크릴레이트, 3-에틸옥세탄-3-메틸(메타)아크릴레이트, 스틸렌, α-메틸스틸렌, 아세톡시스틸렌, N-메틸말레이미드, N-에틸말레이미드, N-프로필말레이미드, N-부틸말레이미드, N-시클로헥실말레이미드, (메타)아크릴 아미드, N-메틸(메타)아크릴아미드 등을 들 수 있으며, 이들을 각각 단독으로 또는 2종 이상 일 수 있으며, 상기 노볼락 수지는 페놀계 화합물과 알데히드계 화합물을 부가축합 반응시켜 얻어지는 것일 수 있으며, 상기 페놀계 화합물은 특별히 제한되지 않으며, 구체적인 예로는 페놀, o-, m-, 및 p-크레졸, 2,5-크실레놀, 3,4-크실레놀 3,5-크실레놀, 2,3,5-트리메틸페놀, 2-t-부틸페놀, 3-t-부틸페놀, 4-t-부틸페놀, 2-에틸페놀, 3-에틸페놀, 4-에틸페놀, 3-메틸-6-t-부틸페놀, 4-메틸-2-t-부틸페놀, 2-나프톨, 1,3-디히드록시나프탈렌, 1,5-디히드록시나프탈렌, 1,7-디히드록시나프탈렌 등을 들 수 있으며, 이들을 1종 또는 2종 이상 혼합된 것 일 수 있으며, 상기 알데히드계 화합물 또한 특별히 제한되지 않으며, 구체적인 예로는 포름알데히드, p-포름알데히드, 아세트알데히드, 프로필알데히드, 페닐알데히드, α- 및 β-페닐프로필알데히드, 벤즈알데히드, o-, m- 및 p-히드록시벤즈알데히드, o- 및 p-메틸벤즈알데히드, 글루타르알데히드, 글리옥살 등을 들 수 있으며, 이들을 1종 또는 2종 이상 혼합된 것 일 수 있으며, 바람직하게는 벤질(메타)크릴레이트 및 메타아크릴산의 공중합체인 것이 좋다.The binder resin is not limited if it is known in the art, but it has an average molecular weight of 2,000 to 300, 000 g / mol and a dispersion degree of 1.0 to 10.0 in terms of high compatibility with the carbazole derivative according to the present invention Acrylic polymer, novolak resin, and the like. The acrylic polymer may be a copolymer of monomers containing the following monomers. Specific examples of the monomer include, but not limited to, methyl (meth) acrylate, ethyl (meth) acrylate, (Meth) acrylate, pentyl (meth) acrylate, hexyl (meth) acrylate, cyclohexyl (meth) acrylate, heptyl (Meth) acrylate, dodecyl (meth) acrylate, isooctyl (meth) acrylate, isooctyl (meth) acrylate, (Meth) acrylate, dicyclopentanyl (meth) acrylate, dicyclopentenyl (meth) acrylate, benzyl (meth) acrylate, 2-methoxyethyl (Meth) acrylic acid, methacrylic acid, itaconic acid, maleic acid, maleic acid anhydride, maleic acid monoalkyl ester, monoalkyl itaconate, monoalkyl fumarate, glycidyl acrylate (Meth) acrylate, 3,4-epoxycyclohexylmethyl (meth) acrylate, 3,4-epoxycyclohexylmethyl (meth) acrylate, (Meth) acrylate, styrene,? -Methylstyrene, acetoxystyrene, N-methylmaleimide, N-ethylmaleimide, (Meth) acrylamide, N-methyl (meth) acrylamide, etc. These monomers may be used alone or in combination of two or more kinds thereof. The novolak resin is a phenolic compound and an aldehyde compound The phenolic compound is not particularly limited, and specific examples thereof include phenol, o-, m-, and p-cresol, 2,5-xylenol, 3,4- Butylphenol, 4-t-butylphenol, 2-ethylphenol, 3-ethylphenol, 3-t- Butylphenol, 4-methyl-2-t-butylphenol, 2-naphthol, 1,3-dihydroxynaphthalene, 1,5-dihydroxynaphthalene, 1 And 7-dihydroxynaphthalene. These may be one or a mixture of two or more of them. The aldehyde compound is not particularly limited, and specific examples thereof include formaldehyde, p-formaldehyde, acetaldehyde Propyl aldehyde,? - and? -Phenyl propyl aldehyde, benzaldehyde, o-, m- and p-hydroxybenzaldehyde, o- and p-methylbenzaldehyde, glutaraldehyde, , Glycidyl, and the like can be mentioned the oxalate, these may be that the mixture of at least one or two, preferably benzyl (meth) acrylate and meth preferably a copolymer of acrylic acid.

상기 색재는 당해 기술분야에서 공지된 것이라면 한정되지는 않으나, 이의 구체적인 예로는 수용성 아조 안료, 불용성 아조 안료, 프타로시아닌 안료, 퀴나크리돈 안료, 이소인돌리논 안료, 이소인돌린 안료, 페리렌 안료, 페리논 안료, 디옥사진 안료, 안트라퀴논 안료, 디안트라퀴노닐 안료, 안트라피리미딘 안료, 안탄트론(anthanthrone) 안료, 인단트론(indanthrone) 안료, 프라반트론 안료, 피란트론(pyranthrone) 안료, 디케토피로로피롤 안료 등을 들 수 있다. 상기 무기 안료는 금속 산화물이나 금속 착염 등의 금속 화합물을 들 수 있고, 구체적으로는 철, 코발트, 알루미늄, 카드뮴, 납, 구리, 티탄, 마그네슘, 크롬, 아연, 안티몬 등의 금속의 산화물 또는 복합 금속 산화물, 카본블랙 등을 들 수 있다. 특히, 상기 유기 안료 및 무기 안료는 색지수(The Society of Dyers and Colourists 출판)에서 피그먼트로 분류되어 있는 화합물을 사용할 수 있고, 보다 구체적인 예로는 C.I. 피그먼트 옐로우 13, 20, 24, 31, 53, 83, 86, 93, 94, 109, 110, 117, 125, 129, 137, 138, 139, 147, 148, 150, 153, 154, 166, 173, 180 및 185; C.I. 피그먼트 오렌지 13, 31, 36, 38, 40, 42, 43, 51, 55, 59, 61, 64, 65 및 71; C.I. 피그먼트 레드 9, 97, 105, 122, 123, 144, 149, 166, 168, 176, 177, 180, 192, 208, 215, 216, 224, 242, 254, 255 및 264; C.I. 피그먼트 바이올렛 14, 19, 23, 29, 32, 33, 36, 37 및 38; C.I. 피그먼트 블루 15(15:3, 15:4, 15:6등), 21, 28, 60, 64 및 76; C.I. 피그먼트 그린 7, 10, 15, 25, 36, 47 및 58; C.I 피그먼트 브라운 28; C.I 피그먼트 블랙 1 및 7, Lactam Black, 등 색지수(C.I.) 번호의 안료를 들 수 있으나, 이들로 한정되는 것은 아니다. 또한 상기 색재는 분산액의 형태로 사용될 수 있으며, 이때 색재 분산액을 형성하는 용매로는 에틸렌글리콜 아세테이트, 에틸셀로솔브, 프로필렌글리콜 메틸에테르아세테이트, 에틸락테이트, 폴리에틸렌글리콜, 사이클로헥사논, 프로필렌글리콜 메틸에테르, 프로필렌글리콜모노메틸에테르아세테이트, 프로필렌글리콜메틸에테르프로피오네이트 등을 사용할 수 있으며, 상기 색재 분산액은 전체 중량 100중량%를 기준으로 고형분 색재 함량이 0.1 내지 30 중량%로 혼합된 것이 좋다.The coloring material is not limited as long as it is known in the art, and specific examples thereof include water-soluble azo pigments, insoluble azo pigments, phthalocyanine pigments, quinacridone pigments, isoindolinone pigments, isoindoline pigments, Anthanthrone pigments, indanthrone pigments, pravanthrone pigments, pyranthrone pigments, anthraquinone pigments, anthraquinone pigments, anthanthrone pigments, anthanthrone pigments, anthanthrone pigments, indanthrone pigments, Pigments, diketopyrrolo pyrrole pigments, and the like. Specific examples of the inorganic pigment include oxides of metals such as iron, cobalt, aluminum, cadmium, lead, copper, titanium, magnesium, chromium, zinc and antimony, Oxide, carbon black and the like. Particularly, the organic pigments and inorganic pigments can be compounds classified as pigments in the color index (published by The Society of Dyers and Colourists), and more specific examples include CI Pigment Yellow 13, 20, 24, 31, 53 , 83, 86, 93, 94, 109, 110, 117, 125, 129, 137, 138, 139, 147, 148, 150, 153, 154, 166, 173, 180 and 185; CI Pigment Orange 13, 31, 36, 38, 40, 42, 43, 51, 55, 59, 61, 64, 65 and 71; CI Pigment Red 9, 97, 105, 122, 123, 144, 149, 166, 168, 176, 177, 180, 192, 208, 215, 216, 224, 242, 254, 255 and 264; CI Pigment Violet 14, 19, 23, 29, 32, 33, 36, 37 and 38; CI Pigment Blue 15 (15: 3, 15: 4, 15: 6, etc.), 21, 28, 60, 64 and 76; CI Pigment Green 7, 10, 15, 25, 36, 47 and 58; CI Pigment Brown 28; CI Pigment Black 1 and 7, Lactam Black, and Pigments of Color Index (CI) number. The coloring material may be used in the form of a dispersion. Examples of the solvent for forming the coloring material dispersion include ethylene glycol acetate, ethyl cellosolve, propylene glycol methyl ether acetate, ethyl lactate, polyethylene glycol, cyclohexanone, propylene glycol methyl Ether, propylene glycol monomethyl ether acetate, propylene glycol methyl ether propionate, and the like. The colorant dispersion may be prepared by mixing 0.1 to 30% by weight of the solid content colorant based on 100% by weight of the total weight of the colorant dispersion.

본 발명에 따른 포토레지스트 조성물은 포함하는 광증감제를 더 포함할 수 있다. 이때, 상기 광 증감제는 티올기, 실릴기 등의 반응성 치환체를 가지는 것이 바람직하며, 이들을 포함하는 광증감제는 본 발명에 따른 카바졸 유도체와 급격하게 반응하여 현저하게 향상된 광에 대한 감도를 구현할 수 있을 뿐 아니라 이를 이용하여 제조된 컬러필터, 블랙 매트릭스 등의 잔막율 및 현상성을 월등하게 향상시킬 수 있어 좋다.The photoresist composition according to the present invention may further comprise a photosensitizer. At this time, it is preferable that the photosensitizer has a reactive substituent such as a thiol group and a silyl group, and the photosensitizer containing the photosensitizer reacts rapidly with the carbazole derivative according to the present invention to realize sensitivity to the remarkably enhanced light And the residual film ratio and developability of a color filter, a black matrix and the like manufactured using the same can be significantly improved.

본 발명에 따른 카바졸 유도체와 높은 반응성을 가지는 상기 광증감제는 티올기, 실릴기 등을 포함하는 것이라면 한정되지 않으며, 이의 비 한정적인 일예로 펜타에리스리톨 테트라키스 티오글리콜레이트(pentaerythritol tetrakis thioglycolate), 펜타에리스리톨 테트라키스 티오프로피오네이트(pentaerythritol tetrakis thiopropionate) 및 펜타에리스리톨 테트라키스 3-메르캅토부틸레이트[Pentaerythritol tetrakis (3-mercapto butylate) 등의 티올기를 포함하는 광증감제; 에서 선택되는 하나 이상일 수 있다. 또한, 본 발명에 따른 카바졸 유도체는 티올기 또는 실릴기 등의 반응성 치환체와 하이드로실릴레이션(Hydrosilylation) 반응, 티올-올레핀 첨가(Tiol-olefin addition)반응, 티올-아세틸렌 첨가(Tiol-acetylene addition)반응 등을 일으킬 수 있다.The photo-sensitizer having high reactivity with the carbazole derivative according to the present invention is not limited as long as it includes a thiol group, a silyl group, and the like. As a non-limiting example, pentaerythritol tetrakis thioglycolate, A photosensitizer containing a thiol group such as pentaerythritol tetrakis thiopropionate and pentaerythritol tetrakis (3-mercapto butylate); ≪ / RTI > In addition, the carbazole derivative according to the present invention may be produced by reacting a reactive substituent such as a thiol group or a silyl group with a hydrosilylation reaction, a thiol-olefin addition reaction, a thiol-acetylene addition reaction, Reaction and the like.

또한, 이는 포토레지스트 조성물 100 중량%를 기준으로 0.01 내지 10 중량%로 혼합될 시, 본 발명에 따른 카바졸 유도체와의 반응으로 인해 최적의 감도를 구현할 수 있어 좋다.In addition, when the photoresist composition is mixed in an amount of 0.01 to 10% by weight based on 100% by weight of the photoresist composition, optimal sensitivity can be achieved due to reaction with the carbazole derivative according to the present invention.

또한, 본 발명에 따른 포토레지스트 조성물은 상기 색재, 카바졸 유도체, 바인더 수지 및 반응성기(티올기, 실릴기 등)를 포함하는 광증감제 이외 용매, 접착보조제, 열중합 금지제, 레벨링제, 소포제 등에서 선택되는 하나 이상의 추가 첨가제를 더 포함할 수 있다.In addition, the photoresist composition according to the present invention may further contain a solvent other than the photosensitizer containing the colorant, the carbazole derivative, the binder resin and the reactive group (thiol group, silyl group, etc.), an adhesion aid, Antifoaming agents, and the like.

상기 용매로는 바인더 수지, 본 발명에 따른 광중합 개시제 및 추가 첨가제와의 상용성을 고려하여 에틸아세테이트, 부틸아세테이트, 디에틸렌글리콜디메틸에테르, 디에틸렌글리콜 디메틸에틸에테르, 메틸메톡시프로피오네이트, 에틸에톡시프로피오네이트(EEP), 에틸락테이트, 프로필렌글리콜모노메틸에테르아세테이트(PGMEA), 프로필렌글리콜메틸에테르프로피오네이트(PGMEP), 프로필렌글리콜메틸에테르, 프로필렌글리콜프로필에테르, 메틸셀로솔브아세테이트, 에틸셀로솔브아세테이트, 디에틸렌글리콜메틸아세테이트, 디에틸렌글리콜에틸아세테이트, 아세톤, 메틸이소부틸케톤, 시클로헥사논, 디메틸포름아미드(DMF), N,N-디메틸아세트아미드(DMAc), N-메틸-2-피롤리돈(NMP), ?-부틸로락톤, 디에틸에테르, 에틸렌글리콜 디메틸 에테르, 다이글라임(Diglyme), 테트라하이드로퓨란(THF), 메탄올, 에탄올, 프로판올, 이소-프로판올, 메틸셀로솔브, 에틸셀로솔브, 디에틸렌글리콜메틸 에테르, 디에틸렌글리콜에틸에테르, 디프로필렌글리콜메틸에테르, 톨루엔, 크실렌, 헥산, 헵탄, 옥탄 등의 용매를 각각 단독 또는 2종 이상 혼합하여 사용할 수 있으나 이에 한정되는 것은 아니다.As the solvent, ethyl acetate, butyl acetate, diethylene glycol dimethyl ether, diethylene glycol dimethyl ethyl ether, methyl methoxy propionate, ethyl (meth) acrylate and the like are added in consideration of compatibility with the binder resin, the photopolymerization initiator according to the present invention, Propylene glycol monomethyl ether acetate (PGMEA), propylene glycol methyl ether propionate (PGMEP), propylene glycol methyl ether, propylene glycol propyl ether, methyl cellosolve acetate, ethyl lactate, ethyl lactate, Diethyleneglycol ethyl acetate, acetone, methyl isobutyl ketone, cyclohexanone, dimethylformamide (DMF), N, N-dimethylacetamide (DMAc), N-methyl (NMP),? -Butyrolactone, diethyl ether, ethylene glycol dimethyl ether, Diglyme, The solvent is selected from the group consisting of tetrahydrofuran (THF), methanol, ethanol, propanol, iso-propanol, methyl cellosolve, ethyl cellosolve, diethylene glycol methyl ether, diethylene glycol ethyl ether, dipropylene glycol methyl ether, toluene, , Heptane, and octane may be used alone or in combination of two or more, but the present invention is not limited thereto.

상기 접착보조제는 에폭시기 또는 아민기를 갖는 실리콘계 화합물 일 수 있으나 이에 한정되는 것은 아니며, 구체적인 예로는 (3-글리시드옥시프로필)트리메톡시실란, (3-글리시드옥시프로필)트리에톡시실란, (3-글리시드옥시프로필)메틸디메톡시실란, (3-글리시드옥시프로필)메틸디에톡시실란, (3-글리시드옥시프로필)디메틸메톡시실란, (3-글리시드옥시프로필)디메틸에톡시실란, 3,4-에폭시부틸트리메톡시실란, 3,4-에폭시부틸트리에톡시실란, 2-(3,4-에폭시시클로헥실)에틸트리메톡시실란, 2-(3,4-에폭시시클로헥실)에틸트리에톡시실란, 2-메타크릴 옥시 프로필 트리메톡시실란 및 아미노프로필트리메톡시 실란 등이 있으며, 이들을 각각 단독으로 또는 2종 이상 혼합하여 사용할 수 있다.The adhesion promoter may be a silicone compound having an epoxy group or an amine group, but is not limited thereto. Specific examples thereof include (3-glycidoxypropyl) trimethoxysilane, (3-glycidoxypropyl) triethoxysilane, (3-glycidoxypropyl) dimethyldimethoxysilane, (3-glycidoxypropyl) methyldiethoxysilane, (3-glycidoxypropyl) dimethylmethoxysilane, , 3,4-epoxybutyltrimethoxysilane, 3,4-epoxybutyltriethoxysilane, 2- (3,4-epoxycyclohexyl) ethyltrimethoxysilane, 2- (3,4-epoxycyclohexyl ) Ethyltriethoxysilane, 2-methacryloxypropyltrimethoxysilane, and aminopropyltrimethoxysilane, which may be used alone or in combination of two or more.

또한 당업계에서 상용으로 사용되는 추가 첨가제로 하이드로퀴논, 알킬에테르 등의 치환기를 갖는 하이드로퀴논류, 부틸카테콜 등의 알킬에테르 등의 치환기를 갖는 카테콜류, 피로갈롤류, 2,2,6,6-테트라메틸-1-피페리디닐옥시라디칼 등의 라디칼 보족제, 티오페놀류, β-나프틸아민류 및 β-나프톨류 등에서 선택되는 하나 이상의 열중합 금지제; BM Chemie사의 BM-1000, BM-1100 등. 다이 닛폰 잉키 가가꾸 고교(주)사의 메카 팩 F 142D, 동 F 172, 동 F 173, 동 F 183 등, 스미토모 스리엠(주)사의 프로라드 FC-135, 동 FC-170C, 동 FC-430, 동 FC-431 등, 아사히 그라스(주)사의 사프론 동 S-112, 동 S-113, 동 S-131, 동 S-141, 동S-145 등, 도레이 실리콘(주)사의 SH-28PA, 동-190, 동-193, SZ-6032, SF-8428 등, 의 시판품의 레벨링제 등을 더 혼합하여 사용될 수 있으나 이에 한정되는 것은 아니다.Further, as additional additives commonly used in the art, hydroquinone, hydroquinone having a substituent such as an alkyl ether, catechol having a substituent such as an alkyl ether such as butyl catechol, pyrogallol, 2,2,6, A radical chelating agent such as 6-tetramethyl-1-piperidinyloxy radical, at least one heat polymerization inhibitor selected from thiophenols,? -Naphthyl amines and? -Naphthols; BM-1000 and BM-1100 from BM Chemie. Mechac-packs F 142D, F 172, F 173, and F 183 manufactured by Dainippon Ink & Chemicals Incorporated. Prorad FC-135, FC-170C, FC-430, FC-431 of Sumitomo Heavy Industries, S-112, S-113, S-131, S-141 and S-145 of Saffron copper of Asahi Glass Co., SH-28PA, Dong-190, Dong-93, SZ-6032 and SF-8428 of Toray Silicone Co., A leveling agent of a commercially available product, etc. may be further mixed and used, but the present invention is not limited thereto.

이하, 본 발명을 하기의 실시예에 의거하여 좀 더 상세히 설명하고자 한다. 단, 하기 실시예는 본 발명을 예시하기 위한 것일 뿐 한정하지는 않는다. 하기 모든 화합물 실시예는 글로브 박스 또는 슐랭크 관(schlenk line)을 이용하여 비활성 아르곤 또는 질소 분위기 하에서 수행 하였으며, 생성물은 양성자 핵자기 공명 분광법(1H Nuclear Magnetic Resonance, NMR)를 이용하여 분석하였다. Hereinafter, the present invention will be described in more detail based on the following examples. However, the following examples are illustrative of the present invention but are not limited thereto. All of the following compound examples were run in an inert argon or nitrogen atmosphere using a glove box or Schlenk line and the product was analyzed using 1 H Nuclear Magnetic Resonance (NMR).

(실시예 1) 1-(9-(3-디알릴프로필포스포네이트)-6-나프토일-9H-카바졸-3-일)-에탄온 옥심-O-아세테이트 (1) 제조(Example 1) 1- (9- (3-allyl propyl phosphonate) -6-naphthoyl -9 H-carbazole-3-yl) ethanone oxime acetate -O- (1) Preparation

단계1. 9-(3-클로로프로필)-9H-카바졸 제조Step 1. 9- (3-chloropropyl) -9 H - carbazol-prepared

카바졸50.0g(299.03mmol), 테트라부틸암모늄브로마이드 1.92g(5.98mmol)을 톨루엔 200ml에 녹인 용액에 50% 수산화나트륨 수용액 400ml를 천천히 가하였다. 상기 혼합물을 40℃로 승온한 후 1-브로모-3-클로로프로판 70.61g(448.54mmol)을 톨루엔 80ml에 희석하여 혼합물에 천천히 적가하였다. 상기 혼합물을 40℃에서 5시간 동안 교반시켰다. 얼음 증류수 300ml 천천히 부어주며 반응을 종료한 후 유기층을 분리하고, 수세를 2회 반복하였다. 유기층에 무수 황산마그네슘으로 건조한 후 무수 황산마그네슘을 여과 분별하였다. 여과액을 감압농축한 후 얻은 생성물을 실리카겔 컬럼크로마토그래피(용매: 에틸아세이트산:노말헥산=1:8)로 정제하여9-(3-클로로프로필)-9H-카바졸 66.32g(수율 91%)를 얻었다To a solution of 50.0 g (299.03 mmol) of carbazole and 1.92 g (5.98 mmol) of tetrabutylammonium bromide in 200 ml of toluene, 400 ml of 50% sodium hydroxide aqueous solution was slowly added. After the temperature of the mixture was raised to 40 占 폚, 70.61 g (448.54 mmol) of 1-bromo-3-chloropropane was diluted in 80 ml of toluene and slowly added dropwise to the mixture. The mixture was stirred at 40 < 0 > C for 5 hours. After 300 ml of ice distilled water was poured slowly, the reaction was terminated, and the organic layer was separated and washed with water twice. The organic layer was dried over anhydrous magnesium sulfate, and anhydrous magnesium sulfate was filtered off. The filtrate was concentrated under reduced pressure and then purified by silica gel column chromatography to obtain the product (solvent: ethyl Oh glyphosate acid: n-hexane = 1: 8) to give 9- (3-chloropropyl) -9 H - carbazol 66.32g (Yield 91%) was obtained

1H-NMR (δ ppm: CDCl3) : 2.23-2.29(2H,m), 3.45(2H,t), 4.47(2H,t), 7.22(2H,t), 7.40-7.45(4H,m), 8.06(2H,d) 1 H-NMR (δ ppm: CDCl 3): 2.23-2.29 (2H, m), 3.45 (2H, t), 4.47 (2H, t), 7.22 (2H, t), 7.40-7.45 (4H, m) , 8.06 (2H, d)

단계 2. (9-(3-클로로프로필)-9H-카바졸-3-일)나프탈렌-1-일 메탄온 제조Step 2. Preparation of (9- (3-chloropropyl) -9 H - carbazol-3-yl) naphthalen-1-yl methanone prepared

상기 단계1에서 제조된 9-(3-클로로프로필)-9H-카바졸 20.0g(80.73mmol), 나프토일클로라이드 18.47g(96.88mmol)을 디클로로메탄 200ml에 녹인 후 염화알루미늄 10.87g(96.88mmol)을 0℃에서 천천히 나누어 첨가하였다. 0℃에서 2시간 동안 더 교반시킨 후 상온에서 12시간 더 교반하였다. 상기 반응물을 얼음 증류수 400ml에 천천히 부어주며 반응을 종료 후 유기층을 분리하고, 수세를 2회 반복하였다. 유기층에 무수 황산마그네슘으로 건조한 후 무수 황산마그네슘을 여과 분별하였다. 여과액을 감압농축한 후 얻은 생성물을 실리카겔 컬럼크로마토그래피(용매: 에틸아세이트산:노말헥산=1:4)로 정제하여 (9-(3-클로로프로필)-9H-카바졸-3-일)나프탈렌-1-일 메탄온 23.77g(수율 74%)를 얻었다Of 9- (3-chloropropyl) prepared in Step 1 -9 H - carbazol 20.0g (80.73mmol), naphthoyl chloride was dissolved 18.47g (96.88mmol) in 200ml dichloromethane and aluminum chloride 10.87g (96.88mmol ) Was slowly added at 0 < 0 > C. After further stirring at 0 ° C for 2 hours, stirring was further continued at room temperature for 12 hours. The reaction mixture was slowly poured into 400 ml of ice distilled water. After completion of the reaction, the organic layer was separated and washed with water twice. The organic layer was dried over anhydrous magnesium sulfate, and anhydrous magnesium sulfate was filtered off. The filtrate was concentrated under reduced pressure and then purified by silica gel column chromatography to obtain the product (solvent: ethyl Oh glyphosate acid: n-hexane = 1: 4) to give (9- (3-chloropropyl) -9 H - carbazol-3 23.77 g (yield: 74%) of naphthalen-1-ylmethanone was obtained

1H-NMR (δ ppm: CDCl3) : 2.25-2.30(2H,m), 3.44(2H,t), 4.46(2H,t), 7.27(1H,t), 7.35-7.52(6H,m), 7.92-8.02(2H,m), 8.10-8.23(5H,m) 1 H-NMR (δ ppm: CDCl 3): 2.25-2.30 (2H, m), 3.44 (2H, t), 4.46 (2H, t), 7.27 (1H, t), 7.35-7.52 (6H, m) , 7.92-8.02 (2H, m), 8.10-8.23 (5H, m)

단계 3. 1-(9-(3-클로로프로필)-6-나프토일-9H-카바졸-3-일)-에탄-1-온Step 3. 1 - (9- (3-chloropropyl) -6-naphthoyl -9 H-carbazole-3-yl) -ethane-1-one

상기 단계2에서 제조된 (9-(3-클로로프로필)-9H-카바졸-3-일)나프탈렌-1-일 메탄온 10.0g(25.13mmol), 아세틸클로라이드 2.36g(30.16mmol)을 디클로로메탄 100ml에 녹인 후 염화알루미늄 3.38g(30.16mmol)을 0℃에서 천천히 나누어 첨가하였다. 0℃에서 2시간 동안 더 교반시킨 후 상온에서 12시간 더 교반하였다. 상기 반응물을 얼음 증류수 200ml에 천천히 부어주며 반응을 종료 후 유기층을 분리하고, 수세를 2회 반복하였다. 유기층에 무수 황산마그네슘으로 건조한 후 무수 황산마그네슘을 여과 분별하였다. 여과액을 감압농축한 후 얻은 생성물을 실리카겔 컬럼크로마토그래피(용매: 에틸아세이트산:노말헥산=1:4)로 정제하여 1-(9-(3-클로로프로필)-6-나프토일-9H-카바졸-3-일)-에탄-1-온 8.62g(수율 78%)를 얻었다Prepared in Step 2 (Synthesis of 9- (3-chloropropyl) -9 H - carbazol-3-yl) naphthalen-1-yl -methanone 10.0g (25.13mmol), acetyl chloride 2.36g (30.16mmol) dichloro Methane, and 3.38 g (30.16 mmol) of aluminum chloride was slowly added thereto at 0 ° C. After further stirring at 0 ° C for 2 hours, stirring was further continued at room temperature for 12 hours. The reaction mixture was slowly poured into 200 ml of ice-distilled water. After completion of the reaction, the organic layer was separated and washed with water twice. The organic layer was dried over anhydrous magnesium sulfate, and anhydrous magnesium sulfate was filtered off. The filtrate was concentrated under reduced pressure, and the obtained product was purified by silica gel column chromatography (solvent: ethyl acetate: n-hexane = 1: 4) to obtain 1- (9- (3-chloropropyl) -6- H -carbazol-3-yl) -ethan-1-one (yield 78%)

1H-NMR (δ ppm: CDCl3) : 2.21-2.37(5H,m), 3.42(2H,t), 4.48(2H,t), 7.41-7.52(5H,m), 7.82-7.99(2H,m), 8.04-8.20(6H,m) 1 H-NMR (δ ppm: CDCl 3): 2.21-2.37 (5H, m), 3.42 (2H, t), 4.48 (2H, t), 7.41-7.52 (5H, m), 7.82-7.99 (2H, m), 8.04-8.20 (6 H, m)

단계 4. 1-(9-(3-디알릴프로필포스포네이트)-6-나프토일-9H-카바졸-3-일)-에탄-1-온Step 4. 1 - (9- (3-diallyl-propyl phosphonate) -6-naphthoyl -9 H-carbazole-3-yl) -ethane-1-one

알릴알콜 5.02g(86.38mmol)과 트리에틸아민 8.74g(86.38mmol)을 질소분위기 하에서 디클로로메탄 90ml에 용해시키고 0 ℃로 유지한 다음, 삼염화인 3.75g(27.28mmol)를 디클로로메탄 10ml에 희석하여 천천히 적가한 다음 1시간 상온에서 교반하였다. 반응물을 여과지를 사용하여 침전물과 여과액으로 분리한다. 여과액을 에틸아세테이트로 희석하여 증류수로 수세를 하였다. 유기층에 무수 황산마그네슘으로 건조한 후 무수 황산마그네슘을 여과 분별하였다. 여과액을 감압농축한 후 얻은 생성물을 디메틸아세트아마이드 20ml로 용해시키고 상기 단계 3에서 제조된 1-(9-(3-클로로프로필)-6-나프토일-9H-카바졸-3-일)-에탄-1-온 10.0g(22.73mmol)을 투입하였다. 반응물을 110 ℃로 승온하여 12시간 동안 환류교반하였다. 증류수 100ml 에 천천히 부어주며 반응을 종료한 후에 디클로로메탄 200ml로 생성물을 추출하였다. 유기층을 분리하고, 수세를 2회 반복하였다. 유기층에 무수 황산마그네슘으로 건조한 후 무수 황산마그네슘을 여과 분별하였다. 여과액을 감압농축한 후 얻은 생성물을 실리카겔 컬럼크로마토그래피(용매: 에틸아세이트산:노말헥산=1:2)로 정제하여 1-(9-(3-디알릴프로필포스포네이트)-6-나프토일-9H-카바졸-3-일)-에탄-1-온 6.94g(수율 54%)를 얻었다(86.38 mmol) of allyl alcohol and 8.74 g (86.38 mmol) of triethylamine were dissolved in 90 ml of dichloromethane under nitrogen atmosphere, and the temperature was maintained at 0 ° C. Then, 3.75 g (27.28 mmol) of phosphorus trichloride was diluted in 10 ml of dichloromethane And the mixture was stirred at room temperature for 1 hour. The reaction product is separated into a precipitate and a filtrate using a filter paper. The filtrate was diluted with ethyl acetate and washed with distilled water. The organic layer was dried over anhydrous magnesium sulfate, and anhydrous magnesium sulfate was filtered off. The filtrate was concentrated under reduced pressure The obtained product was dissolved in 20ml dimethyl acetamide was prepared as described in Step 3 1 - (9- (3-chloropropyl) -6-naphthoyl -9 H - carbazol-3-yl) -Ethan-1-one (10.0 g, 22.73 mmol). The reaction was heated to 110 ° C and refluxed and stirred for 12 hours. After pouring slowly into 100 ml of distilled water, the reaction was terminated and the product was extracted with 200 ml of dichloromethane. The organic layer was separated and washed with water twice. The organic layer was dried over anhydrous magnesium sulfate, and anhydrous magnesium sulfate was filtered off. The filtrate was concentrated under reduced pressure, and the obtained product was purified by silica gel column chromatography (solvent: ethyl acetate: n-hexane = 1: 2) to obtain 1- (9- (3-diallylpropylphosphonate) naphthoyl -9 H-carbazole-3-yl) ethane-1-one was obtained 6.94g (54% yield)

1H-NMR (δ ppm: CDCl3) : 1.65-1.85(2H,m), 2.27-2.46(5H,m), 4.22-4.40(4H,m), 4.52(2,t), 5.10-5.15(2H,d), 5.24-5.32(2H,d), 5.92-6.08(2H,m), 7.44-7.57(5H,m), 7.88-8.04(2H,m), 8.05-8.22(6H,m) 1 H-NMR (δ ppm: CDCl 3): 1.65-1.85 (2H, m), 2.27-2.46 (5H, m), 4.22-4.40 (4H, m), 4.52 (2, t), 5.10-5.15 ( (2H, d), 5.24-5.32 (2H, d), 5.92-6.08 (2H, m), 7.44-7.57 (5H, m), 7.88-8.04

단계 5. 1-(9-(3-디알릴프로필포스포네이트)-6-나프토일-9H-카바졸-3-일)-에탄온 옥심 제조Step 5. 1- (9- (3-allyl propyl phosphonate) -6-naphthoyl -9 H-carbazole-3-yl) ethanone oxime prepared

상기 단계 4에서 제조된 1-(9-(3-디알릴프로필포스포네이트)-6-나프토일-9H-카바졸-3-일)-에탄-1-온 10.0g(17.68mmol)을 질소분위기 하에서 디메틸아세트아마이드 70ml로 용해시키고 히드록시아민 히드로클로라이드 1.84g(26.52mmol)를 적가하였다. 반응물을 승온하여 70 ℃에서 2시간 동안 교반 후 상온으로 냉각하였다. 반응물을 증류수 200ml에 천천히 부어주며 반응을 종료하였다. 고체 침전물을 여과하여 메탄올:증류수(3:1) 혼합액으로 세척하고 건조하여1-(9-(3-디알릴프로필포스포네이트)-6-나프토일-9H-카바졸-3-일)-에탄온 옥심 7.39g(72%)을 얻었다.Ethane-1-one 10.0g (17.68mmol) - 1-a prepared in the above Step 4 (9- (3-allyl propyl phosphonate) -6-naphthoyl -9 H - carbazol-3-yl) Was dissolved in 70 ml of dimethylacetamide under nitrogen atmosphere and 1.84 g (26.52 mmol) of hydroxyamine hydrochloride was added dropwise. The reaction product was heated, stirred at 70 ° C for 2 hours, and cooled to room temperature. The reaction was poured slowly into 200 ml of distilled water and the reaction was terminated. The solid precipitate was filtered off, methanol: distilled water (3: 1) and washed with a mixed solution and dried to obtain 1 - (9- (3-allyl propyl phosphonate) -6-naphthoyl -9 H - carbazol-3-yl) -Ethanone oxime (72%).

1H-NMR (δ ppm: CDCl3) : 1.52-1.80(2H,m), 2.20-2.41(5H, m), 4.20-4.37(4H,m), 4.50(2H,t), 5.18-5.22(2H,d), 5.24-5.34(2H,d), 5.95-6.11(2H,m), 7.56-7.67(5H,m), 7.95-8.12(2H,m), 8.31-8.48(6H,m), 11.02(1H,s) 1 H-NMR (? Ppm: CDCl 3 ): 1.52-1.80 (2H, m), 2.20-2.41 (5H, m), 4.20-4.37 (4H, m), 4.50 2H, d), 5.24-5.34 (2H, d), 5.95-6.11 (2H, m), 7.56-7.67 (5H, m), 7.95-8.12 (2H, m), 8.31-8.48 11.02 (1 H, s)

단계 6. 1-(9-(3-디알릴프로필포스포네이트)-6-나프토일-9H-카바졸-3-일)-에탄온 옥심-O-아세테이트 제조Step 6. 1 - (9- (3-allyl propyl phosphonate) -6-naphthoyl -9 H-carbazole-3-yl) -ethanone oxime-O-acetate prepared

상기 단계 5에서 제조된 1-(9-(3-디알릴프로필포스포네이트)-6-나프토일-9H-카바졸-3-일)-에탄온 옥심 5.0g(8.61mmol)을 에틸아세트산 40ml로 용해시키고 무수 초산 1.32g(12.928mmol) 투입하였다. 반응물을 승온하여 80℃에서 2시간 동안 교반한 후 실온으로 냉각하였다. 상기 반응물을 헥산 50ml에 천천히 적가하였다. 생성되는 고체 침천물을 여과하여 후 건조하여 1-(9-(3-디알릴프로필포스포네이트)-6-나프토일-9H-카바졸-3-일)-에탄온 옥심-O-아세테이트 4.02g(75%)을 얻었다The 1-prepared in Step 5 (9- (3-allyl propyl phosphonate) -6-naphthoyl -9 H-carbazole-3-yl) -ethyl the ethanone oxime 5.0g (8.61mmol) ethyl , And 1.32 g (12.928 mmol) of acetic anhydride was added thereto. The reaction mixture was heated to 80 DEG C for 2 hours, and then cooled to room temperature. The reaction was slowly added dropwise to 50 ml of hexane. After filtered off the solid needle cheonmul produced by drying 1 - (9- (3-diallyl-propyl phosphonate) -6-naphthoyl -9 H-carbazole-3-yl) -ethanone oxime-O-acetate 4.02 g (75%) of the title compound was obtained

1H-NMR (δ ppm: CDCl3) : 1.60-1.82(2H,m), 2.25-2.47(8H,m), 4.22-4.38(4H,m), 4.52(2H,t), 5.10-5.19(2H,d), 5.22-5.32(2H,d), 5.94-6.05(2H,m), 7.47-7.58(5H,m), 7.85-8.05(2H,m), 8.06-8.21(6H,m) 1 H-NMR (? Ppm: CDCl 3 ): 1.60-1.82 (2H, m), 2.25-2.47 (8H, m), 4.22-4.38 (4H, m), 4.52 (2H, t), 5.10-5.19 (2H, d), 5.22-5.32 (2H, d), 5.94-6.05 (2H, m), 7.47-7.58 (5H, m), 7.85-8.05

(실시예 2) 1-(9-(6-디프로핀-2-일헥실포스포네이트)-6-니트로-9H-카바졸-3-일)페닐메탄온 옥심-O-아세테이트(2)의 제조(Example 2) 1- (9- (2-yl-hexyl phosphonate pin 6-deep) -9-nitro-6 H - carbazol-3-yl) phenyl methanone oxime - O - acetate (2 )

단계1. 9-(6-브로모헥실)-9H-카바졸 제조Step 1. 9- (6-Bromo-hexyl) -9 H - carbazol-prepared

카바졸30.0g(179.42mmol), 테트라부틸암모늄브로마이드 1.16g(3.59mmol)을 톨루엔 400ml에 녹인 용액에 50% 수산화나트륨 수용액 300ml를 천천히 가하였다. 상기 혼합물을 40℃로 승온한 후 1,6-다이브로모헥산 87.54g(358.83mmol)을 톨루엔 80ml에 희석하여 혼합물에 천천히 적가하였다. 상기 혼합물을 40℃에서 5시간 동안 교반시켰다. 얼음 증류수 300ml 천천히 부어주며 반응을 종료한 후 유기층을 분리하고, 수세를 2회 반복하였다. 유기층에 무수 황산마그네슘으로 건조한 후 무수 황산마그네슘을 여과 분별하였다. 여과액을 감압농축한 후 얻은 생성물을 실리카겔 컬럼크로마토그래피(용매: 에틸아세이트산:노말헥산=1:8)로 정제하여9-(6-브로모헥실)-9H-카바졸 36.14g(수율 61%)를 얻었다. 300 ml of 50% sodium hydroxide aqueous solution was slowly added to a solution of 30.0 g (179.42 mmol) of carbazole and 1.16 g (3.59 mmol) of tetrabutylammonium bromide in 400 ml of toluene. After the temperature of the mixture was raised to 40 占 폚, 87.54 g (358.83 mmol) of 1,6-dibromohexane was diluted in 80 ml of toluene and slowly added dropwise to the mixture. The mixture was stirred at 40 < 0 > C for 5 hours. After 300 ml of ice distilled water was poured slowly, the reaction was terminated, and the organic layer was separated and washed with water twice. The organic layer was dried over anhydrous magnesium sulfate, and anhydrous magnesium sulfate was filtered off. The filtrate was concentrated under reduced pressure and then purified by silica gel column chromatography to obtain the product Photography (solvent: ethyl Oh glyphosate acid: n-hexane = 1: 8) to yield 9- (6-Bromo-hexyl) -9 H in - carbazol 36.14g ( Yield: 61%).

1H-NMR (δ ppm: CDCl3) : 1.37-1.44(2H,m), 1.48-1.55(2H,m), 1.77-1.85(2H,m), 1.91-1.98(2H,m), 3.36(2H,t), 4.34(2H,t), 7.23(2H,t), 7.39-7.45(4H,m), 8.08(2H,d) 1 H-NMR (? Ppm: CDCl 3 ): 1.37-1.44 (2H, m), 1.48-1.55 (2H, m), 1.77-1.85 2H), 4.34 (2H, t), 7.23 (2H, t), 7.39-7.45 (4H, m), 8.08

단계 2. (9-(6-브로모헥실)-9H-카바졸-3-일)페닐메탄온 제조Step 2. Preparation of (9- (6-Bromo-hexyl) -9 H - carbazol-3-yl) phenyl methanone prepared

상기 단계1에서 제조된 9-(6-브로모헥실)-9H-카바졸 20.0g(60.56mmol), 벤조일클로라이드 10.22g(72.67mmol)을 디클로로메탄 200ml에 녹인 후 염화알루미늄 8.15g(72.67mmol)을 0℃에서 천천히 나누어 첨가하였다. 0℃에서 2시간 동안 더 교반시킨 후 상온에서 12시간 더 교반하였다. 상기 반응물을 얼음 증류수 400ml에 천천히 부어주며 반응을 종료 후 유기층을 분리하고, 수세를 2회 반복하였다. 유기층에 무수 황산마그네슘으로 건조한 후 무수 황산마그네슘을 여과 분별하였다. 여과액을 감압농축한 후 얻은 생성물을 실리카겔 컬럼크로마토그래피(용매: 에틸아세이트산:노말헥산=1:4)로 정제하여 (9-(6-브로모헥실)-9H-카바졸-3-일)페닐메탄온 17.88g(수율 68%)를 얻었다Prepared in Step 1 of 9- (6-Bromo-hexyl) -9 H - carbazol 20.0g (60.56mmol), benzoyl chloride was dissolved 10.22g (72.67mmol) in 200ml dichloromethane, aluminum chloride, 8.15g (72.67mmol ) Was slowly added at 0 < 0 > C. After further stirring at 0 ° C for 2 hours, stirring was further continued at room temperature for 12 hours. The reaction mixture was slowly poured into 400 ml of ice distilled water. After completion of the reaction, the organic layer was separated and washed with water twice. The organic layer was dried over anhydrous magnesium sulfate, and anhydrous magnesium sulfate was filtered off. The filtrate was concentrated under reduced pressure and then purified by silica gel column chromatography to obtain the product (solvent: ethyl Oh glyphosate acid: n-hexane = 1: 4) to give (9- (6-Bromo-hexyl) -9 H - carbazol -3 - yl) phenylmethanone (yield: 68%) was obtained

1H-NMR (δ ppm: CDCl3) :1.37-1.42(2H,m), 1.44-1.52(2H,m), 1.77-1.85(2H,m), 1.87-1.94(2H,m), 3.34(2H,t), 4.32-4.35(2H,t), 7.30-7.44(4H,m), 7.50-7.59(3H,m), 8.10-8.25(4H,m), 8.74(1H,s) 1 H-NMR (? Ppm: CDCl 3 ): 1.37-1.42 (2H, m), 1.44-1.52 (2H, m), 1.77-1.85 (2H, m), 1.87-1.94 (2H, t), 4.32-4.35 (2H, t), 7.30-7.44 (4H, m), 7.50-7.59 (3H, m), 8.10-8.25

단계 3. 1-(9-(6-브로모헥실)-6-니트로-9H-카바졸-3-일)페닐메탄온Step 3. 1 - (9- (6-Bromo-hexyl) -9-nitro-6 H - carbazol-3-yl) phenyl-methanone

아세트산 30ml과 무수아세트산 60ml 혼합하여 질산구리수화물 5.62g(24.17mmol)을 투입한 후 상온에서 10분간 교반하였다. 상기 단계 2에서 제조된 (9-(6-브로모헥실)-9H-카바졸-3-일)페닐메탄온 10.0g(23.02mmol)을 아세트산 20ml에 용해한 후 천천히 적가하였다. 상온에서 2시간 동안 교반한 후에 얼음 증류수 100ml에 천천히 부어준 다음 침전된 고체를 여과하여 건조하여 1-(9-(6-브로모헥실)-6-니트로-9H-카바졸-3-일)페닐메탄온 9.71g(88%)을 얻었다.30 ml of acetic acid and 60 ml of acetic anhydride were mixed, and 5.62 g (24.17 mmol) of copper nitrate hydrate was added thereto, followed by stirring at room temperature for 10 minutes. 10.0 g (23.02 mmol) of the (9- (6-bromohexyl) -9 H -carbazol-3-yl) phenylmethanone prepared in the above step 2 was dissolved in 20 ml of acetic acid and then slowly added dropwise. After stirring for 2 hours at room temperature and dried by filtration gave slowly then the precipitated solid was poured into ice distilled water 100ml 1- (9- (6- bromohexyl) -9-nitro-6 H - carbazol-3-yl ) Phenyl methanone (88%).

1H-NMR (δ ppm: CDCl3) : 1.38-1.45(2H,m), 1.46-1.53(2H,m), 1.79-1.87(2H,m), 1.90-1.95(2H,m), 3.37(2H,t), 4.38-4.41(2H,t), 7.35-7.57(5H,m), 8.13-8.22(3H,m), 8.34(1H,d), 8.69(1H,d), 8.97(1H,d) 1 H-NMR (? Ppm: CDCl 3 ): 1.38-1.45 (2H, m), 1.46-1.53 (2H, m), 1.79-1.87 (2H, t), 4.38-4.41 (2H, t), 7.35-7.57 (5H, m), 8.13-8.22 (3H, m), 8.34 d)

단계 4. 1-(9-(6-디프로핀-2-일헥실포스포네이트)-6-니트로-9H-카바졸-3-일)페닐메탄온 제조Step 4. Preparation of 1- (9- (6-deep-2-yl-hexyl phosphonate pin) -9-nitro-6 H - carbazol-3-yl) phenyl methanone prepared

프로파질알콜 4.44g(79.27mmol)과 트리에틸아민 8.02g(79.27mmol)을 질소분위기 하에서 디클로로메탄 70ml에 용해시키고 0 ℃로 유지한 다음, 삼염화인 3.44g(25.03mmol)를 디클로로메탄 10ml에 희석하여 천천히 적가한 다음 1시간 상온에서 교반하였다. 반응물을 여과지를 사용하여 침전물과 여과액으로 분리한다. 여과액을 에틸아세테이트로 희석하여 증류수로 수세를 하였다. 유기층에 무수 황산마그네슘으로 건조한 후 무수 황산마그네슘을 여과 분별하였다. 여과액을 감압농축한 후 얻은 생성물을 디메틸아세트아마이드 20ml로 용해시키고 상기 단계 3에서 제조된 1-(9-(6-브로모헥실)-6-니트로-9H-카바졸-3-일)페닐메탄온 10.0g(20.86mmol)을 투입하였다. 반응물을 110 ℃로 승온하여 12시간 동안 환류교반하였다. 증류수 100ml 에 천천히 부어주며 반응을 종료한 후에 디클로로메탄 200ml로 생성물을 추출하였다. 유기층을 분리하고, 수세를 2회 반복하였다. 유기층에 무수 황산마그네슘으로 건조한 후 무수 황산마그네슘을 여과 분별하였다. 여과액을 감압농축한 후 얻은 생성물을 실리카겔 컬럼크로마토그래피(용매: 에틸아세이트산:노말헥산=1:2)로 정제하여 1-(9-(6-디프로핀-2-일헥실포스포네이트)-6-니트로-9H-카바졸-3-일)페닐메탄온 8.59g(수율 74%)를 얻었다(79.27 mmol) of propyl alcohol and 8.02 g (79.27 mmol) of triethylamine were dissolved in 70 ml of dichloromethane and maintained at 0 ° C. Then, 3.44 g (25.03 mmol) of phosphorus trichloride was diluted with 10 ml of dichloromethane And the mixture was stirred at room temperature for 1 hour. The reaction product is separated into a precipitate and a filtrate using a filter paper. The filtrate was diluted with ethyl acetate and washed with distilled water. The organic layer was dried over anhydrous magnesium sulfate, and anhydrous magnesium sulfate was filtered off. The filtrate was concentrated under reduced pressure The obtained product was dissolved in 20ml dimethyl acetamide was prepared as described in Step 3 1- (9- (6-Bromo-hexyl) -9-nitro-6 H - carbazol-3-yl) Phenylmethanone (10.0 g, 20.86 mmol) was added thereto. The reaction was heated to 110 ° C and refluxed and stirred for 12 hours. After pouring slowly into 100 ml of distilled water, the reaction was terminated and the product was extracted with 200 ml of dichloromethane. The organic layer was separated and washed with water twice. The organic layer was dried over anhydrous magnesium sulfate, and anhydrous magnesium sulfate was filtered off. The filtrate was concentrated under reduced pressure, and the obtained product was purified by silica gel column chromatography (solvent: ethyl acetate: n-hexane = 1: 2) to obtain 1- (9- (6-dipropyn- carbonate) -9-nitro-6 H - carbazol-3-yl) phenyl methanone was obtained 8.59g (74% yield)

1H-NMR (δ ppm: CDCl3) : 1.35-1.42(2H,m), 1.47-1.55(2H,m), 1.77-1.85(2H,m), 1.92-2.20(2H,m), 2.27-2.32(2H,t), 2.40-2.47(2H,m), 4.14-4.28(4H,m), 4.40(2H,t), 7.38-7.59(5H,m), 8.15-8.25(3H,m), 8.34(1H,d), 8.72(1H,d), 9.02(1H,d) 1 H-NMR (? Ppm: CDCl 3 ): 1.35-1.42 (2H, m), 1.47-1.55 (2H, m), 1.77-1.85 (2H, t), 2.40-2.47 (2H, m), 4.14-4.28 (4H, m), 4.40 (2H, t), 7.38-7.59 (5H, m), 8.15-8.25 8.34 (1H, d), 8.72 (1H, d), 9.02 (1H, d)

단계 5. 1-(9-(6-디프로핀-2-일헥실포스포네이트)-6-니트로-9H-카바졸-3-일)페닐메탄온 옥심-O-아세테이트 제조Step 5. 1- (9- (6-deep-2-yl-hexyl phosphonate pin) -9-nitro-6 H - carbazol-3-yl) phenyl methanone oxime - O - acetate prepared

상기 단계 4에서 제조된 1-(9-(6-디프로핀-2-일헥실포스포네이트)-6-니트로-9H-카바졸-3-일)페닐메탄온을 사용하는 것을 제외하고는 동일한 방법으로 실시예 1의 단계 5 내지 단계 6를 수행하여 1-(9-(6-디프로핀-2-일헥실포스포네이트)-6-니트로-9H-카바졸-3-일)페닐메탄온 옥심-O-아세테이트 4.24g(79%)을 얻었다.The 1 prepared in Step 4 (as 9- (6-dipped pin-2-yl-hexyl phosphonate) -9-nitro-6 H - carbazol-3-yl) but using phenyl-methanone by performing step 5 to step 6 in example 1 in the same manner as 1- (9- (2-yl-hexyl phosphonate pin 6-deep) -9-nitro-6 H - carbazol-3-yl ) Phenylmethanone oxime- O -acetate (4.24 g, 79%).

1H-NMR (δ ppm: CDCl3) : 1.32-1.42(2H,m), 1.46-1.58(2H,m), 1.76-1.87(2H,m), 1.90-2.21(2H,m), 2.28-2.34(2H,t), 2.38-2.46(2H,m), 3.72(3H,s), 4.18-4.30(4H,m), 4.42(2H,t), 7.42-7.62(5H,m), 8.19-8.30(3H,m), 8.38(1H,d), 8.80(1H,d), 9.09(1H,s) 1 H-NMR (? Ppm: CDCl 3 ): 1.32-1.42 (2H, m), 1.46-1.58 (2H, m), 1.76-1.87 (2H, t), 2.38-2.46 (2H, m), 3.72 (3H, s), 4.18-4.30 (4H, m), 4.42 8.30 (1H, d), 9.09 (1H, s)

(실시예 3) 1-(9-(3-알릴페닐프로필포스피네이트)-6-니트로-9H-카바졸-3-일)-1,2-프로판디온-2- 옥심-O-아세테이트(5)의 제조(Example 3) 1 - (9- (3-allyl-phenyl-propyl phosphinate) -9-nitro-6 H - carbazol-3-yl) -1,2-propane-dione-2-oxime - O - acetate (5)

단계1. 1-(9-(3-클로로프로필)-6-니트로-9H-카바졸-3-일)-1-프로판온 제조Step 1. 1 - (9- (3-chloropropyl) -6-nitro -9 H - carbazol-3-yl) -1-propanone prepared

상기 실시예 1의 단계1에서 제조된 9-(3-클로로프로필)-9H-카바졸을 사용하여 상기 실시예 1의 단계2에서 염화프로피오닐을 사용하는 것을 제외하고는 동일한 방법으로 (9-(3-클로로프로필)-9H-카바졸-3-일)-1-프로판온을 제조한 후 상기 실시예 2의 단계 3과 동일한 방법으로 1-(9-(3-클로로프로필)-6-니트로-9H-카바졸-3-일)-1-프로판온 18.86g(수율 82%)를 얻었다.Of 9- (3-chloropropyl) -9 H prepared in Step 1 of Example 1 using the carbazole in Step 2 of Example 1 in the same manner except for the use of propionyl chloride (9 - (3-chloro-propyl) -9 H-carbazole-3-yl) -1-propanone was prepared in the same manner as in step 3 of example 2 1- (9- (3-chloropropyl) - 6-nitro -9 H - carbazol-3-yl) -1-propanone was obtained 18.86g (82% yield).

1H-NMR (δ ppm: CDCl3) : 1.24(3H,t), 2.23-2.34(4H,m), 3.47(2H,t), 4.48(2H,t), 7.46-7.51(2H,m) 8.20-8.24(1H,d), 8.40-8.44(1H,d), 8.75(1H,s), 9.04(1H,s) 1 H-NMR (δ ppm: CDCl 3): 1.24 (3H, t), 2.23-2.34 (4H, m), 3.47 (2H, t), 4.48 (2H, t), 7.46-7.51 (2H, m) 8.20-8.24 (1H, d), 8.40-8.44 (1H, d), 8.75 (1H, s), 9.04

단계 2. 1-(9-(3-알릴페닐프로필포스피네이트)-6-니트로-9H-카바졸-3-일)-1-프로판온 제조Step 2. 1 - (9- (3-allyl-phenyl-propyl phosphinate) -9-nitro-6 H - carbazol-3-yl) -1-propanone prepared

상기 단계1에서 제조된 1-(9-(3-클로로프로필)-6-니트로-9H-카바졸-3-일)-1-프로판온 사용하여 상기 실시예 1의 단계4에서 디클로로페닐포스핀을 사용하는 것을 제외하고는 동일한 방법으로 1-(9-(3-알릴페닐프로필포스피네이트)-6-니트로-9H-카바졸-3-일)-1-프로판온 7.82g(수율 55%)을 얻었다.The 1 prepared in Step 1 (Synthesis of 9- (3-chloropropyl) -6-nitro -9 H - carbazol-3-yl) -1-dichlorophenyl phosphine in Step 4 of Example 1 by using propanone the same method, except for using the pin as 1- (9- (3-allyl-phenyl-propyl phosphinate) -9-nitro-6 H - carbazol-3-yl) -1-propanone 7.82g (yield: 55%).

1H-NMR (δ ppm: CDCl3) : 1.27(3H,t), 1.65-1.82(2H,m), 2.26-2.38(4H,m), 4.17-4.21(2H,m), 4.54(2H,t), 5.11-5.14(1H,d),5.27-5.35(1H,d),5.98-6.10(1H,m), 7.42-7.58(5H,m), 7.80-7.88(2H,m), 8.22-8.27(1H,d), 8.42-8.45(1H,d), 8.77(1H,s), 9.02(1H,s) 1 H-NMR (δ ppm: CDCl 3): 1.27 (3H, t), 1.65-1.82 (2H, m), 2.26-2.38 (4H, m), 4.17-4.21 (2H, m), 4.54 (2H, m), 7.80-7.88 (2H, m), 8.22-7.58 (1H, m) 8.27 (1H, d), 8.42-8.45 (1H, d), 8.77 (1H, s), 9.02

단계 3. 1-(9-(3-알릴페닐프로필포스피네이트)-6-니트로-9H-카바졸-3-일)-1,2-프로판디온-2-옥심 제조Step 3. 1 - (9- (3-allyl-phenyl-propyl phosphinate) -9-nitro-6 H - carbazol-3-yl) -1,2-propane-dione-2-oxime prepared

상기 단계 2에서 제조된 1-(9-(3-알릴페닐프로필포스피네이트)-6-니트로-9H-카바졸-3-일)-1-프로판온 10.0g(20.39mmol)을 질소분위기 하에서 테트라하이드로퓨란 80ml로 용해시킨 후 4N 염화수소(1,4-디옥산) 20ml와 이소펜틸아질산 2.87g(24.47mmol)을 투입하여 실온에서 4시간 교반하였다. 반응물을 증류수 150ml에 천천히 부어주며 반응을 종료하였다. 고체 침전물을 여과한 후 아세트산에틸에 용해하고, 포화탄산수소나트륨과 증류수로 순서대로 세척하였다. 유기층에 무수 황산마그네슘으로 건조한 후 무수 황산마그네슘을 여과 분별하였다. 여과액을 감압 농축한 1-(9-(3-알릴페닐프로필포스피네이트)-6-니트로-9H-카바졸-3-일)-1,2-프로판디온-2-옥심 7.31g(수율 69%)을 얻었다..Prepared in Step 2 1- (9- (3-allyl-phenyl-propyl phosphinate) -9-nitro-6 H - carbazol-3-yl) propane-1-on-10.0g (20.39mmol) nitrogen , 20 ml of 4N hydrogen chloride (1,4-dioxane) and 2.87 g (24.47 mmol) of isopentyl nitrite were added thereto, followed by stirring at room temperature for 4 hours. The reaction was poured slowly into 150 ml of distilled water and the reaction was terminated. The solid precipitate was filtered, dissolved in ethyl acetate, and washed sequentially with saturated sodium hydrogencarbonate and distilled water. The organic layer was dried over anhydrous magnesium sulfate, and anhydrous magnesium sulfate was filtered off. The filtrate was concentrated under reduced pressure 1 - (9- (3-allyl-phenyl-propyl phosphinate) -9-nitro-6 H - carbazol-3-yl) -1,2-propane-dione-2-oxime 7.31g ( Yield 69%).

1H-NMR (δ ppm: CDCl3) : 1.64-1.83(2H,m), 2.24(3H,s), 2.27-2.34(2H,t), 4.16-4.21(2H,m), 4.52(2H,t), 5.10-5.15(1H,d), 5.25-5.33(1H,d), 5.97-6.07(1H,m), 7.45-7.60(5H,m), 7.82-7.92(2H,m), 8.24-8.28(1H,d), 8.45-8.47(1H,d), 8.79(1H,s), 9.05(1H,s), 10.59(1H,s) 1 H-NMR (δ ppm: CDCl 3): 1.64-1.83 (2H, m), 2.24 (3H, s), 2.27-2.34 (2H, t), 4.16-4.21 (2H, m), 4.52 (2H, m), 7.82-7.92 (2H, m), 8.24-7.60 (1H, m) S), 9.05 (1H, s), 10.59 (1H, s), 8.25 (1H,

단계 4. 1-(9-(3-알릴페닐프로필포스피네이트)-6-니트로-9H-카바졸-3-일)-1,2-프로판디온-2- 옥심-O-아세테이트 제조Step 4. 1 - (9- (3-allyl-phenyl-propyl phosphinate) -9-nitro-6 H - carbazol-3-yl) -1,2-propane-dione-2-oxime - O - acetate prepared

상기 단계 3에서 제조된 1-(9-(3-알릴페닐프로필포스피네이트)-6-니트로-9H-카바졸-3-일)-1,2-프로판디온-2-옥심을 사용하는 것을 제외하고는 동일한 방법으로 실시예 1의 단계 6를 수행하여 1-(9-(3-알릴페닐프로필포스피네이트)-6-니트로-9H-카바졸-3-일)-1,2-프로판디온-2- 옥심-O-아세테이트 3.78g(수율70%)을 얻었다.Prepared in the step 3, 1- (9- (3-allyl-phenyl-propyl phosphinate) -9-nitro-6 H - carbazol-3-yl) -1,2-propane-dione-2-oxime using the 1 and is to perform the step 6 of example 1 in the same way except that (9- (3-allyl-phenyl-propyl phosphinate) -9-nitro-6 H - carbazol-3-yl) 1,2 -Propanedione-2-oxime- O -acetate (yield: 70%).

1H-NMR (δ ppm: CDCl3) : 1.63-1.82(2H,m), 2.22(3H,s), 2.25-2.35(2H,t), 3.36(3H,s), 4.15-4.21(2H,m), 4.50(2H,t), 5.12-5.16(1H,d), 5.24-5.30(1H,d), 5.92-6.0(1H,m), 7.42-7.58(5H,m), 7.82-7.90(2H,m), 8.26-8.29(1H,d), 8.44-8.46(1H,d), 8.80(1H,s), 9.02(1H,s) 1 H-NMR (δ ppm: CDCl 3): 1.63-1.82 (2H, m), 2.22 (3H, s), 2.25-2.35 (2H, t), 3.36 (3H, s), 4.15-4.21 (2H, m), 4.50 (2H, t), 5.12-5.16 (IH, d), 5.24-5.30 (IH, d), 5.92-6.0 (IH, m), 7.42-7.58 (5H, m), 7.82-7.90 (2H, m), 8.26-8.29 (1H, d), 8.44-8.46

(실시예 4) 1-(9-(3-(-5-노르보르넨-2,2-디메틸)프로필포스포네이트)- 6-톨루오일-9H-카바졸-3-일)-에탄온 옥심-O-아세테이트(6)(Example 4) 1- (9- (3 - (- 5-norbornene-2,2-dimethyl) propyl phosphonate) - 6-toluoyl -9 H-carbazole-3-yl) ethane On oxime- O -acetate (6)

단계1. 1-(9-(3-클로로프로필)-6-톨루오일-9H-카바졸-3-일)-에탄-1-온 제조Step 1. 1 - (9- (3-chloropropyl) -6-toluoyl -9 H-carbazole-3-yl) ethane-1-one prepared

상기 실시예 1의 단계1에서 제조된 9-(3-클로로프로필)-9H-카바졸을 사용하여 상기 실시예 1의 단계2에서 염화-2-메틸벤조일을 사용하는 것을 제외하고는 동일한 방법으로 (9-(3-클로로프로필)-9H-카바졸-3-일)-O-톨일 메탄온을 제조한 후 상기 실시예 1의 단계 3과 동일한 방법으로 1-(9-(3-클로로프로필)-6-톨루오일-9H-카바졸-3-일)-에탄-1-온 18.98g(수율 85%)를 얻었다.In the same manner except for using the carbazole the use of 2-methylbenzoyl chloride in step 2 of Example 1 to the Example 1 9- (3-chloropropyl) -9 H prepared in Step 1 of (9- (3-chloropropyl) -9H-carbazol-3-yl) -O-tolylmethanone was prepared in the same manner as in step 3 of Example 1, propyl) -6-toluoyl -9 H-carbazole-3-yl) ethane-1-one was obtained 18.98g (85% yield).

1H-NMR (δ ppm: CDCl3) : 2.20-2.35(5H,m), 2.37(3H,s), 3.44(2H,t), 4.45(2H,t), 7.34-7.42(2H,m), 7.48-7.60(3H,m), 8.16-8.28(3H,m), 8.76-8.84(2H,m) 1 H-NMR (δ ppm: CDCl 3): 2.20-2.35 (5H, m), 2.37 (3H, s), 3.44 (2H, t), 4.45 (2H, t), 7.34-7.42 (2H, m) , 7.48-7.60 (3H, m), 8.16-8.28 (3H, m), 8.76-8.84 (2H, m)

단계 2. 1-(9-(3-(-5-노르보르넨-2,2-디메틸)프로필포스포네이트)- 6-톨루오일-9H-카바졸-3-일)-에탄-1-온 제조Step 2. 1 - (9- (3 - (- 5-norbornene-2,2-dimethyl) propyl phosphonate) - 6-toluoyl -9 H-carbazole-3-yl) -ethane -1 - on manufacturing

5-노르보르넨-2,2-디메탄올 9.75g(63.20mmol)과 트리에틸아민 6.70g(66.21mmol)을 질소분위기 하에서 디클로로메탄 100ml에 용해시키고 0 ℃로 유지한 다음, 메틸디클로로포스파이트 8.00g(60.19mmol)를 디클로로메탄 20ml에 희석하여 천천히 적가한 다음 1시간 상온에서 교반하였다. 반응물을 여과지를 사용하여 침전물과 여과액으로 분리한다. 여과액을 에틸아세테이트로 희석하여 증류수로 수세를 하였다. 유기층에 무수 황산마그네슘으로 건조한 후 무수 황산마그네슘을 여과 분별하였다. 여과액을 감압농축한 후 얻은 생성물을 디메틸아세트아마이드 20ml로 용해시키고 상기 단계 1에서 제조된 1-(9-(3-클로로프로필)-6-톨루오일-9H-카바졸-3-일)-에탄-1-온 10.0g(24.76mmol)을 투입하였다. 반응물을 120 ℃로 승온하여 12시간 동안 환류교반하였다. 증류수 100ml 에 천천히 부어주며 반응을 종료한 후에 디클로로메탄 200ml로 생성물을 추출하였다. 유기층을 분리하고, 수세를 2회 반복하였다. 유기층에 무수 황산마그네슘으로 건조한 후 무수 황산마그네슘을 여과 분별하였다. 여과액을 감압농축한 후 얻은 생성물을 실리카겔 컬럼크로마토그래피(용매: 에틸아세이트산:노말헥산=1:2)로 정제하여 1-(9-(3-(-5-노르보르넨-2,2-디메틸)프로필포스포네이트)- 6-톨루오일-9H-카바졸-3-일)-에탄-1-온 6.89g(수율 49%)를 얻었다9.75 g (63.20 mmol) of 5-norbornene-2,2-dimethanol and 6.70 g (66.21 mmol) of triethylamine were dissolved in 100 ml of dichloromethane under a nitrogen atmosphere, and the mixture was maintained at 0 캜. Then, methyldichlorophosphite g (60.19 mmol) was diluted in 20 ml of dichloromethane, and the mixture was slowly added dropwise, followed by stirring at room temperature for 1 hour. The reaction product is separated into a precipitate and a filtrate using a filter paper. The filtrate was diluted with ethyl acetate and washed with distilled water. The organic layer was dried over anhydrous magnesium sulfate, and anhydrous magnesium sulfate was filtered off. The filtrate was concentrated under reduced pressure The obtained product was dissolved in 20ml dimethyl acetamide was prepared as described in Step 1, 1- (9- (3-chloropropyl) -6-toluoyl -9 H - carbazol-3-yl) -Ethan-1-one (10.0 g, 24.76 mmol). The reaction was heated to 120 DEG C and refluxed and stirred for 12 hours. After pouring slowly into 100 ml of distilled water, the reaction was terminated and the product was extracted with 200 ml of dichloromethane. The organic layer was separated and washed with water twice. The organic layer was dried over anhydrous magnesium sulfate, and anhydrous magnesium sulfate was filtered off. The filtrate was concentrated under reduced pressure, and the obtained product was purified by silica gel column chromatography (solvent: ethyl acetate: n-hexane = 1: 2) to obtain 1- (9- (3- (5- 2-dimethyl) propyl phosphonate) - 6-toluoyl -9 H-carbazole-3-yl) ethane-1-one was obtained 6.89g (yield: 49%)

1H-NMR (δ ppm: CDCl3) : 1.42-1.65(4H,m), 1.72-1.85(2H,m), 2.25-2.57(10H,m) 4.02-4.17(4H,m), 4.50(2H,t), 6.01-6.15(2H,m), 7.36-7.45(2H,m), 7.50-7.64(3H,m), 8.17-8.30(3H,m), 8.75-8.86(2H,m) 1 H-NMR (δ ppm: CDCl 3): 1.42-1.65 (4H, m), 1.72-1.85 (2H, m), 2.25-2.57 (10H, m) 4.02-4.17 (4H, m), 4.50 (2H m), 8.17-8.30 (3H, m), 8.75-8.86 (2H, m), 7.31-7.45 (2H, m)

단계3. 1-(9-(3-(-5-노르보르넨-2,2-디메틸)프로필포스포네이트)- 6-톨루오일-9H-카바졸-3-일)-에탄온 옥심-O-아세테이트Step 3. 1 - (9- (3 - (- 5-norbornene-2,2-dimethyl) propyl phosphonate) - 6-toluoyl -9 H-carbazole-3-yl) -ethanone oxime-O- acetate

상기 단계 2에서 제조된 1-(9-(3-(-5-노르보르넨-2,2-디메틸)프로필포스포네이트)- 6-톨루오일-9H-카바졸-3-일)-에탄-1-온을 사용하는 것을 제외하고는 동일한 방법으로 실시예 1의 단계 5 내지 단계 6를 수행하여 1-(9-(3-(-5-노르보르넨-2,2-디메틸)프로필포스포네이트)- 6-톨루오일-9H-카바졸-3-일)-에탄온 옥심-O-아세테이트 3.75g(수율 70%)을 얻었다.Prepared in Step 2 1- (9- (3 - (- 5-norbornene-2,2-dimethyl) propyl phosphonate) - 6-toluoyl -9 H-carbazole-3-yl) - Ethan-1-one was used to carry out steps 5 to 6 of Example 1 in the same manner to give 1- (9- (3- (5-norbornene-2,2-dimethyl) phosphonate) - 6-toluoyl -9 H-carbazole-3-yl) -ethanone oxime-O-acetate to obtain the 3.75g (yield 70%).

1H-NMR (δ ppm: CDCl3) : 1.42-1.63(4H,m), 1.73-1.86(2H,m), 2.22-2.61(13H,m), 4.0-4.15(4H,m), 4.52(2H,t), 6.04-6.17(2H,m), 7.35-7.46(2H,m), 7.50-7.65(3H,m), 8.18-8.32(3H,m), 8.73-8.85(2H,m) 1 H-NMR (δ ppm: CDCl 3): 1.42-1.63 (4H, m), 1.73-1.86 (2H, m), 2.22-2.61 (13H, m), 4.0-4.15 (4H, m), 4.52 ( M), 8.38-8.85 (2H, m), 7.50-7.65 (3H, m), 8.18-8.32

(실시예 5) 포토레지스트 조성물의 제조(Example 5) Preparation of photoresist composition

벤질메타크릴레이트/메타아크릴산 (몰비 70/30, 분자량 20,000 g/mol, 산가 100 KOH mg/g) 공중합체인 알칼리 가용성 바인더 수지 9.8 g, 그린 안료 분산액(C.I. 피그먼트 그린 7, 20wt% in PGMEA) 30g, 디펜타에리스리톨 헥사아크릴레이트 10g, 상기 실시예1에서 제조된 카바졸 유도체 0.5g, 펜타에리스리톨 테트라키스 3-메르캅토부틸레이트 0.1g, 2-메타크릴 옥시 프로필 트리메톡시실란 0.1g, 용매인 프로필렌글리콜모노메틸에테르아세테이트(PGMEA) 49.5g을 순차적으로 혼합하여, 상온에서 3시간 동안 교반하여 포토레지스트 조성물을 제조하였다. 9.8 g of an alkali soluble binder resin as a copolymer of benzyl methacrylate / methacrylic acid (molar ratio 70/30, molecular weight 20,000 g / mol, acid value 100 KOH mg / g), green pigment dispersion (CI Pigment Green 7, 20 wt% in PGMEA) , 10 g of dipentaerythritol hexaacrylate, 0.5 g of the carbazole derivative prepared in Example 1, 0.1 g of pentaerythritol tetrakis 3-mercaptobutyrate, 0.1 g of 2-methacryloxypropyltrimethoxysilane, And 49.5 g of propylene glycol monomethyl ether acetate (PGMEA) were successively mixed and stirred at room temperature for 3 hours to prepare a photoresist composition.

상기 방법으로 제조된 포토레지스트 조성물에 대한 평가는 유리 기판 위에서 실시하였으며, 포토레지스트 조성물의 감도, 잔막율, 내화학성 및 현상성 등의 성능을 측정하여 그 결과를 하기 표 1에 나타내었다.Evaluation of the photoresist composition prepared by the above method was performed on a glass substrate, and the performances such as sensitivity, residual film ratio, chemical resistance and developability of the photoresist composition were measured and the results are shown in Table 1 below.

1.감도1. Sensitivity

유리 기판 위에 상기 포토레지스트 조성물을 스핀 코팅하여 100 에서 90초 동안 전열처리하고, 스텝 마스크를 이용하여 노광한 후 0.04 % KOH 수용액에서 현상하였다. 스텝 마스크 패턴이 초기 두께 대비 80 % 두께를 유지하는 노광량을 감도로 평가하였다. The above photoresist composition was spin-coated on a glass substrate and subjected to a heat treatment at 100 for 90 seconds, exposed using a step mask, and developed in a 0.04% KOH aqueous solution. The exposure amount at which the step mask pattern was maintained at 80% thickness with respect to the initial thickness was evaluated as sensitivity.

2.잔막율2. Residual film rate

상기 포토레지스트 조성물을 기판 위에 스핀 코팅하여 100 에서 90초 동안 전열처리하고, 365 nm에서 노광시킨 후, 220 에서 30분 동안 후열처리(포스트베이크)를 실시하여 레지스트 막의 포스트베이크 전 후의 두께 비율(%)을 측정하였다.After the photoresist composition was spin-coated on the substrate, it was subjected to a heat treatment at 100 for 90 seconds, followed by exposure at 365 nm, post-baking (post-baking) at 220 for 30 minutes, ) Were measured.

3.내화학성3. Chemical resistance

상기 포토레지스트 조성물을 기판 위에 스핀 코팅한 후, 전열처리 및 노광, 후열처리 등의 공정을 거쳐 형성된 레지스트 막을 NMP용액에 60 에서 10분 동안 담근 후 레지스트 막의 외관 변화를 관찰하였다. After the photoresist composition was spin-coated on the substrate, the resist film formed by the preheating treatment, the exposure treatment, the post-heat treatment, and the like was immersed in the NMP solution for 60 minutes for 10 minutes, and then the appearance change of the resist film was observed.

이때, 외관 변화가 없는 것을 양호(○), 약간의 상태 변화가 감지되는 것을 보통(△), 외관이 박리되거나 용제 색깔이 변질된 것을 불량(X)으로 표기하였다. At this time, it was indicated that the appearance change was not good (O), that slight change of state was detected (Δ), the appearance was peeled or the solvent color was changed, and the defect (X) was indicated.

4.현상성4. Developability

현상성은 노광된 기판을 60초간 0.04% KOH 수용액으로 현상시켰을 때의 현상과정을 관찰하여 표기한 것으로, 현상이 깨끗하게 되고 현상 후의 패턴이 양호하게 형성된 경우를 ○, 현상이 잘 되긴 하나 현상시간이 오래 걸리고 패턴의 직진성이 좋지 못한 경우를 △, 현상성이 떨어져 패턴이 깨끗하게 형성되지 못하고 직진성도 떨어지는 경우를 X 로 표시하였다. Developability was evaluated by observing the development process when the exposed substrate was developed with a 0.04% KOH aqueous solution for 60 seconds. When the development was clean and the pattern after development was well formed, the development was good, but the development time was long A case in which the straightness of the pattern is not good, a case in which the pattern is not formed clearly and the straightness is also inferior due to poor developability is indicated by X. [

(실시예 6) 포토레지스트 조성물의 제조(Example 6) Preparation of photoresist composition

상기 실시예1에서 제조된 카바졸 유도체 대신에 상기 실시예 2에서 제조된 카바졸 유도체0.5g을 사용한 것을 제외하고는 상기 실시예 5와 동일한 조성 및 방법으로 포토레지스트 조성물을 제조한 후 상기 실시예 5의 방법으로 포토레지스트 조성물을 제조한 후 이의 감도, 잔막율, 내화학성 및 현상성 등의 성능을 측정하여 그 결과를 하기 표 1에 나타내었다.A photoresist composition was prepared in the same manner as in Example 5 except that 0.5 g of the carbazole derivative prepared in Example 2 was used instead of the carbazole derivative prepared in Example 1, The photoresist composition was prepared in the same manner as in Example 1, and its sensitivity, residual film ratio, chemical resistance and developability were measured. The results are shown in Table 1 below.

(실시예 7) 포토레지스트 조성물의 제조(Example 7) Preparation of photoresist composition

상기 실시예1에서 제조된 카바졸 유도체 대신에 상기 실시예 3에서 제조된 카바졸 유도체0.5g을 사용한 것을 제외하고는 상기 실시예 5와 동일한 조성 및 방법으로 포토레지스트 조성물을 제조한 후 상기 실시예 5의 방법으로 포토레지스트 조성물을 제조한 후 이의 감도, 잔막율, 내화학성 및 현상성 등의 성능을 측정하여 그 결과를 하기 표 1에 나타내었다.A photoresist composition was prepared in the same manner as in Example 5 except that 0.5 g of the carbazole derivative prepared in Example 3 was used instead of the carbazole derivative prepared in Example 1, The photoresist composition was prepared in the same manner as in Example 1, and its sensitivity, residual film ratio, chemical resistance and developability were measured. The results are shown in Table 1 below.

(실시예 8) 포토레지스트 조성물의 제조(Example 8) Preparation of photoresist composition

상기 실시예1에서 제조된 카바졸 유도체 대신에 상기 실시예 4에서 제조된 카바졸 유도체0.5g을 사용한 것을 제외하고는 상기 실시예 5와 동일한 조성 및 방법으로 포토레지스트 조성물을 제조한 후 상기 실시예 5의 방법으로 포토레지스트 조성물을 제조한 후 이의 감도, 잔막율, 내화학성 및 현상성 등의 성능을 측정하여 그 결과를 하기 표 1에 나타내었다.A photoresist composition was prepared in the same manner as in Example 5 except that 0.5 g of the carbazole derivative prepared in Example 4 was used instead of the carbazole derivative prepared in Example 1, The photoresist composition was prepared in the same manner as in Example 1, and its sensitivity, residual film ratio, chemical resistance and developability were measured. The results are shown in Table 1 below.

(비교예 1) 포토레지스트 조성물의 제조 (Comparative Example 1) Preparation of photoresist composition

상기 실시예 1에서 제조된 카바졸 유도체 대신에 OXE-02 (BASF제품, 하기 구조 참조) 0.5g을 사용한 것을 제외하고는 상기 실시예 5와 동일한 조성 및 방법으로 포토레지스트 조성물을 제조한 후 상기 실시예 5의 방법으로 포토레지스트 조성물의 감도, 잔막율, 내화학성 및 현상성 등의 성능을 측정하여 그 결과를 하기 표 1에 나타내었다. A photoresist composition was prepared in the same manner as in Example 5 except that 0.5 g of OXE-02 (product of BASF, refer to the following structure) was used in place of the carbazole derivative prepared in Example 1, The properties of the photoresist composition such as sensitivity, residual film ratio, chemical resistance and developability were measured by the method of Example 5, and the results are shown in Table 1 below.

(OXE-02 구조)(OXE-02 structure)

Figure 112016008925599-pat00014
Figure 112016008925599-pat00014

Figure 112016008925599-pat00015
Figure 112016008925599-pat00015

상기 표 1에서와 같이, 본 발명에 따른 카바졸 유도체를 함유한 포토레지스트 조성물은 비교예의 포토레지스트 조성물에 비해 감도가 매우 우수하며, 잔막율, 내화학성 및 현상성 등의 물성 또한 우수함을 알 수 있다. As shown in Table 1, the photoresist composition containing the carbazole derivative according to the present invention is superior in sensitivity to the photoresist composition of the comparative example, and has excellent physical properties such as residual film ratio, chemical resistance and developability have.

Claims (9)

하기 화학식 1로 표시되는 카바졸 유도체;
[화학식 1]
Figure 112017023942136-pat00016

[화학식 1에 있어서,
L1은 단일결합, (C1-C20)알킬렌, (C2-C20)알케닐렌, -C(=O)-, -O-, -S-, -S(=O)-, -SO2- 및 -Se-에서 선택되며;
R1 은 (C1-C30)알킬, (C3-C30)시클로알킬, (C3-C30)헤테로시클로알킬, (C6-C30)아릴, (C3-C30)헤테로아릴, 니트로(-NO2), 시아노(-CN), -C(=O)R11 또는 -C(=O)OR12 이고, 상기 R11 및 R12는 각각 독립적으로 수소, 중수소(deuterium), (C1-C30)알킬, (C3-C30)시클로알킬, (C3-C30)헤테로시클로알킬, (C6-C30)아릴 및 (C3-C30)헤테로아릴에서 선택되며, 상기 R11 및 R12 의 시클로알킬, 헤테로시클로알킬, 아릴 및 헤테로아릴은 (C1-C30)알킬 또는 (C1-C30)알콕시로 더 치환될 수 있고;
R2 및 R3 는 각각 독립적으로 수소, 중수소(deuterium), (C1-C30)알킬, (C3-C30)시클로알킬, (C3-C30)헤테로시클로알킬, (C6-C30)아릴 또는 (C3-C30)헤테로아릴이고;
R4 및 R5 는 각각 독립적으로 (C6-C30)아릴, (C3-C30)헤테로아릴, (C2-C30)알케닐, (C2-C30)알키닐, (C2-C30)알케닐옥시, (C2-C30)알키닐옥시 또는 -L2-OC(=O)-R13이고, 상기 R13은 (C2-C30)알케닐, (C2-C30)알키닐이며, 상기 R4 및 R5 는 서로 연결되어 고리를 형성할 수 있으며, R4 및 R5 중 하나 이상은 반드시 불포화기를 포함하며, L2은 (C1-C30)알킬렌이며;
n은 0 또는 1의 정수이며;
상기 R1 의 알킬, 시클로알킬, 헤테로시클로알킬, 아릴 또는 헤테로아릴과 R2 및 R3의 알킬, 시클로알킬, 헤테로시클로알킬, 아릴 또는 헤테로아릴과 R4 및 R5 의 알케닐, 알키닐 또는 고리는 각각 독립적으로 (C1-C30)알킬, (C2-C30)알케닐, (C2-C30)알키닐, (C3-C30)시클로알킬, (C3-C30)헤테로시클로알킬, 할로겐, 시아노, 니트로, -OR21, -SR22, -NR21R22, -C(=O)R23, -C(=O)OR23, -C(=O)NR21R22 및 P(=O)(OR21)(OR22)로 이루어진 군으로부터 선택된 하나 이상의 치환기로 더 치환될 수 있으며, 상기 R21 내지 R23은 각각 독립적으로 수소, 중수소(deuterium), 할로겐, (C1-C30)알킬, (C2-C30)알케닐, (C3-C30)시클로알킬(C1-C30)알킬, (C3-C30)시클로알킬, (C3-C30)헤테로시클로알킬, (C6-C30)아릴 또는 (C3-C30)헤테로아릴이고, 상기 헤테로시클로알킬 및 헤테로아릴은 B, N, O, S, P(=O), Si 및 P로부터 선택된 하나 이상의 헤테로원자를 포함한다.]
A carbazole derivative represented by the following formula (1);
[Chemical Formula 1]
Figure 112017023942136-pat00016

In the formula (1)
L 1 is a single bond, (C1-C20) alkylene, (C2-C20) alkenylene, -C (= O) -, -O-, -S-, -S (= O) -, -SO 2 - And -Se-;
R 1 is (C1-C30) alkyl, (C3-C30) cycloalkyl, (C3-C30) heterocycloalkyl, (C6-C30) aryl, (C3-C30) heteroaryl, nitro (-NO 2), a cyano (= O) R 11 or -C (= O) OR 12 wherein R 11 and R 12 are each independently selected from the group consisting of hydrogen, deuterium, (C 1 -C 30) C3-C30) cycloalkyl, (C3-C30) heterocycloalkyl, (C6-C30) aryl and (C3-C30) is selected from a heteroaryl, wherein the R 11 and the cycloalkyl, heterocycloalkyl of R 12, aryl, and The heteroaryl may be further substituted with (C1-C30) alkyl or (C1-C30) alkoxy;
R 2 and R 3 are each independently selected from the group consisting of hydrogen, deuterium, (C 1 -C 30) alkyl, (C 3 -C 30) cycloalkyl, (C 3 -C 30) heterocycloalkyl, (C 6 -C 30) C30) heteroaryl;
R 4 and R 5 are each independently selected from the group consisting of (C 6 -C 30) aryl, (C 3 -C 30) heteroaryl, (C 2 -C 30) alkenyl, (C 2 -C 30) alkynyl, C2-C30) alkynyloxy or -L 2 -OC (= O) -R 13 , and wherein R 13 is (C2-C30) alkenyl, (C2-C30) and alkynyl, wherein R 4 and R 5 is And at least one of R 4 and R 5 necessarily contains an unsaturated group; L 2 is (C 1 -C 30) alkylene;
n is an integer of 0 or 1;
The alkyl, cycloalkyl, heterocycloalkyl, aryl or heteroaryl of R 1 and the alkyl, cycloalkyl, heterocycloalkyl, aryl or heteroaryl of R 2 and R 3 and the alkenyl, alkynyl or heteroaryl of R 4 and R 5 , (C3-C30) cycloalkyl, (C3-C30) heterocycloalkyl, halogen, cyano, cyano, (= O) OR 23 , -C (= O) NR 21 R 22, and P (= O) R 23 , -NR 21 , -SR 22 , -NR 21 R 22 , (OR < 21 >) (OR < 22 >), and R < 21 & To R 23 are each independently selected from hydrogen, heavy hydrogen (deuterium), halogen, (C1-C30) alkyl, (C2-C30) alkenyl, (C3-C30) cycloalkyl (C1-C30) alkyl, (C3-C30) (C3-C30) heterocycloalkyl, (C6-C30) aryl or (C3-C30) heteroaryl, said heterocycloalkyl and heteroaryl being optionally substituted with B, N, O, S, P Si and < RTI ID = 0.0 > P. ≪ / RTI >
제1항에 있어서,
하기 화학식 2로 표시되는 카바졸 유도체;
[화학식 2]
Figure 112017023942136-pat00017

[화학식 2에 있어서,
L1 은 각각 독립적으로 단일결합 또는 (C1-C20)알킬렌이며;
R1 은 (C1-C20)알킬, (C3-C20)시클로알킬, (C3-C20)헤테로시클로알킬, (C6-C20)아릴, (C3-C20)헤테로아릴, 니트로(-NO2), 시아노(-CN), -C(=O)R11 또는 -C(=O)OR12 이고, 상기 R11 및 R12는 각각 독립적으로 (C1-C20)알킬, (C3-C20)시클로알킬, (C3-C20)헤테로시클로알킬, (C6-C20)아릴 또는 (C3-C20)헤테로아릴이고;
R2 및 R3 는 각각 독립적으로 (C1-C20)알킬, (C3-C20)시클로알킬, (C3-C20)헤테로시클로알킬, (C6-C20)아릴 또는 (C3-C20)헤테로아릴이고;
R6 는 (C2-C20)알케닐 또는 (C2-C20)알키닐이고;
R5 는 (C6-C20)아릴, (C3-C20)헤테로아릴, (C2-C20)알케닐, (C2-C20)알키닐, (C2-C20)알케닐옥시, (C2-C20)알키닐옥시 또는 -L2-OC(=O)-R13이고, 상기 R13은 (C2-C20)알케닐, (C2-C20)알키닐이며, 상기 R4 및 R5 는 서로 연결되어 고리를 형성할 수 있으며, L2은 (C1-C7)알킬렌이며;
n은 0 또는 1의 정수이며;
상기 R1 의 알킬, 시클로알킬, 헤테로시클로알킬, 아릴 또는 헤테로아릴과 R2 및 R3의 알킬, 시클로알킬, 헤테로시클로알킬, 아릴 또는 헤테로아릴과 R5 및 R6 의 알케닐, 알키닐 또는 고리는 각각 독립적으로 (C1-C20)알킬, (C2-C20)알케닐, (C2-C20)알키닐, (C3-C20)시클로알킬, (C3-C20)헤테로시클로알킬, 할로겐, 시아노, 니트로, -OR21, -SR22, -NR21R22, -C(=O)R23, -C(=O)OR23, -C(=O)N R21R22 및 P(=O)(OR21)(OR22)로 이루어진 군으로부터 선택된 하나 이상의 치환기로 더 치환될 수 있으며, 상기 R21 내지 R23은 각각 독립적으로 수소, 중수소(deuterium), 할로겐, (C1-C20)알킬, (C2-C20)알케닐, (C3-C20)시클로알킬(C1-C20)알킬, (C3-C20)시클로알킬, (C3-C20)헤테로시클로알킬, (C6-C20)아릴 또는 (C3-C20)헤테로아릴이고, 상기 헤테로시클로알킬 및 헤테로아릴은 B, N, O, S, P(=O), Si 및 P로부터 선택된 하나 이상의 헤테로원자를 포함한다.]
The method according to claim 1,
A carbazole derivative represented by the following formula (2);
(2)
Figure 112017023942136-pat00017

In the formula (2)
L 1 are each independently a single bond or (C 1 -C 20) alkylene;
R 1 is (C1-C20) alkyl, (C3-C20) cycloalkyl, (C3-C20) heterocycloalkyl, (C6-C20) aryl, (C3-C20) heteroaryl, nitro (-NO 2), a cyano (= O) R 11 or -C (= O) OR 12 wherein R 11 and R 12 are each independently selected from the group consisting of (C 1 -C 20) alkyl, (C 3 -C 20) cycloalkyl, (C3-C20) heterocycloalkyl, (C6-C20) aryl or (C3-C20) heteroaryl;
R 2 and R 3 are each independently (C 1 -C 20) alkyl, (C 3 -C 20) cycloalkyl, (C 3 -C 20) heterocycloalkyl, (C 6 -C 20) aryl or (C 3 -C 20) heteroaryl;
R 6 is (C2-C20) alkenyl or (C2-C20) alkynyl;
R 5 is selected from the group consisting of (C 6 -C 20) aryl, (C 3 -C 20) heteroaryl, (C 2 -C 20) alkenyl, (C 2 -C 20) alkynyl, (C 2 -C 20) alkenyloxy, is oxy or -L 2 -OC (= O) -R 13, wherein R 13 is (C2-C20) alkenyl, (C2-C20) and alkynyl, wherein R 4 and R 5 are connected to each other to form a ring L < 2 > is (C1-C7) alkylene;
n is an integer of 0 or 1;
The alkyl, cycloalkyl, heterocycloalkyl, aryl or heteroaryl of R 1 and the alkyl, cycloalkyl, heterocycloalkyl, aryl or heteroaryl of R 2 and R 3 and the alkenyl, alkynyl or heteroaryl of R 5 and R 6 , Each of the rings is independently selected from the group consisting of (C1-C20) alkyl, (C2-C20) alkenyl, (C2- C20) alkynyl, (C3- C20) cycloalkyl, (C3-C20) heterocycloalkyl, (= O) OR 23 , -C (= O) NR 21 R 22, and P (= O) R 23 , -NR 21 , -SR 22 , -NR 21 R 22 , (OR < 21 >) (OR < 22 >), and R < 21 & To R 23 are each independently selected from hydrogen, heavy hydrogen (deuterium), halogen, (C1-C20) alkyl, (C2-C20) alkenyl, (C3-C20) cycloalkyl (C1-C20) alkyl, (C3-C20) O, S, P (= O), or (C3-C20) heteroaryl, wherein said heterocycloalkyl and said heteroaryl are optionally substituted with one or more substituents selected from the group consisting of H, alkyl, cycloalkyl, (C3-C20) heterocycloalkyl, Si and < RTI ID = 0.0 > P. ≪ / RTI >
제1항에 있어서,
R4 및 R5 는 각각 독립적으로 (C6-C20)아릴, (C3-C20)헤테로아릴, (C2-C7)알케닐, (C2-C7)알키닐, (C2-C7)알케닐옥시, (C2-C7)알키닐옥시 또는 -L2-OC(=O)-R13이고, 상기 L2은 (C1-C7)알킬렌이고, 상기 R13은 (C2-C7)알케닐, (C2-C7)알키닐이며, 상기 R4 및 R5 는 서로 연결되어
Figure 112016008925599-pat00018
또는
Figure 112016008925599-pat00019
의 고리를 형성할 수 있으며, 상기 R31 및 R32 는 각각 독립적으로 수소, (C2-C7)알케닐, (C2-C7)알키닐, (C3-C20)시클로알킬 또는 (C3-C20)헤테로시클로알킬인 카바졸 유도체.
The method according to claim 1,
R 4 and R 5 are each independently selected from the group consisting of (C 6 -C 20) aryl, (C 3 -C 20) heteroaryl, (C 2 -C 7) alkenyl, (C 2 -C 7) alkynyl, C2-C7) alkynyloxy or -L 2 -OC (= O) -R 13 , and wherein L 2 is alkylene (C1-C7), wherein R 13 is (C2-C7) alkenyl, (C2- C7) alkynyl, and R < 4 > and R < 5 &
Figure 112016008925599-pat00018
or
Figure 112016008925599-pat00019
A can form a ring, wherein R 31 and R 32 are each independently hydrogen, (C2-C7) alkenyl, (C2-C7) alkynyl, (C3-C20) cycloalkyl or (C3-C20) heteroaryl Carbazole derivatives which are cycloalkyl.
제 1항에 있어서,
하기 구조에서 선택되는 것인 카바졸 유도체;
Figure 112016008925599-pat00020

Figure 112016008925599-pat00021
The method according to claim 1,
A carbazole derivative selected from the following structures;
Figure 112016008925599-pat00020

Figure 112016008925599-pat00021
제1항에 따른 카바졸 유도체를 포함하는 광중합 개시제 조성물.A photopolymerization initiator composition comprising a carbazole derivative according to claim 1. 제1항에 따른 카바졸 유도체 및 색재를 포함하는 포토레지스트 조성물.A photoresist composition comprising a carbazole derivative and a colorant according to claim 1. 제6항에 있어서,
상기 포토레지스트 조성물은 티올기 또는 실릴기를 포함하는 광증감제를 더 포함하는 것인 포토레지스트 조성물.
The method according to claim 6,
Wherein the photoresist composition further comprises a photosensitizer comprising a thiol group or a silyl group.
제6항에 따른 포토레지스트 조성물을 포함하는 컬러필터.A color filter comprising the photoresist composition according to claim 6. 제6항에 따른 포토레지스트 조성물을 포함하는 블랙 매트릭스.A black matrix comprising the photoresist composition according to claim 6.
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