KR101697362B1 - A colored photo resist composition, a pattern forming method using the same and a color filter fabricated by the method - Google Patents
A colored photo resist composition, a pattern forming method using the same and a color filter fabricated by the method Download PDFInfo
- Publication number
- KR101697362B1 KR101697362B1 KR1020090093293A KR20090093293A KR101697362B1 KR 101697362 B1 KR101697362 B1 KR 101697362B1 KR 1020090093293 A KR1020090093293 A KR 1020090093293A KR 20090093293 A KR20090093293 A KR 20090093293A KR 101697362 B1 KR101697362 B1 KR 101697362B1
- Authority
- KR
- South Korea
- Prior art keywords
- photosensitive resin
- colored photosensitive
- acid
- photopolymerization initiator
- resin composition
- Prior art date
Links
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Images
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2/00—Processes of polymerisation
- C08F2/46—Polymerisation initiated by wave energy or particle radiation
- C08F2/48—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133514—Colour filters
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
- G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
- Y10S430/1055—Radiation sensitive composition or product or process of making
- Y10S430/106—Binder containing
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Nonlinear Science (AREA)
- Medicinal Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- Mathematical Physics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Optics & Photonics (AREA)
- Materials For Photolithography (AREA)
Abstract
본 발명은 (A)착색제; (B)바인더 중합체; (C)고분지화(Hyperbranched) 폴리에스테르 아마이드 아크릴레이트 올리고머를 포함하는 광중합성 화합물; 및 (D)광중합 개시제를 포함하는 것을 특징으로 하는 착색감광성수지조성물, 이를 이용한 패턴 형성방법 및 이를 이용한 컬러필터에 관한 것이다. 본 발명은 패턴의 직선성이 우수하며, 패턴 늘어짐이 발생하지 않는 칼라필터용 도막층을 형성할 수 있는 착색감광성수지조성물, 이를 이용한 패턴형성방법 및 이를 이용한 컬러필터에 관한 것이다.(A) a colorant; (B) a binder polymer; (C) a photopolymerizable compound comprising a hyperbranched polyester amide acrylate oligomer; And (D) a photopolymerization initiator, a pattern forming method using the same, and a color filter using the same. The present invention relates to a colored photosensitive resin composition which is excellent in the linearity of a pattern and can form a coating layer for a color filter which does not cause pattern sagging, a pattern forming method using the same, and a color filter using the same.
착색감광성수지조성물, 컬러필터, 씨모쓰(CMOS), 씨아이에쓰(CIS), 촬영소자 A colored photosensitive resin composition, a color filter, a CMOS (Complementary Metal Oxide Semiconductor), a CIS (CIS)
Description
본 발명은 촬영소자 및 평판표시소자 등에 사용되는 컬러필터를 구성하는 착색감광성수지조성물, 이를 이용한 패턴형성방법 및 이를 이용한 컬러필터에 관한 것이다. 더 상세하게는 고분지화(Hyperbranched) 폴리에스테르 아마이드 아크릴레이트 올리고머를 포함하는 광중합성 화합물을 포함하는 착색감광성수지조성물, 이를 이용한 패턴형성방법 및 이를 이용한 컬러필터에 관한 것이다.The present invention relates to a colored photosensitive resin composition constituting a color filter used for a photographing element and a flat panel display element, a pattern forming method using the same, and a color filter using the same. More particularly, the present invention relates to a colored photosensitive resin composition comprising a photopolymerizable compound containing a hyperbranched polyester amide acrylate oligomer, a pattern forming method using the same, and a color filter using the same.
종래부터, 착색감광성수지조성물을 이용한 컬러필터의 제작방법으로는 감광성수지조성물에 의한 패턴 형성 후 패턴을 염색하는 염색법, 형성된 패턴에 전압을 인가하여 분산시킨 안료를 포함한 조성물을 이온화하여 형성하는 전착법, 열경화 혹은 광경화 조성물을 포함하는 잉크를 뿌려 제작하는 인쇄법, 및 안료가 분산된 감광성 조성물을 이용하여 패턴을 형성하는 안료 분산법 등이 사용되고 있다. 또한 촬영소자의 제작에는 착색감광성수지조성물과 같이 안료를 사용하여 분산시킨 조성물을 사용하는 경우와, 안료 및 염료를 사용한 조성물 혹은 염료만을 이용한 조성물 등을 사용하는 경우가 있다.Conventionally, as a production method of a color filter using a colored photosensitive resin composition, a dyeing method of dyeing a pattern after forming a pattern by a photosensitive resin composition, an electrodeposition method of forming a composition containing a pigment dispersed by applying a voltage to a formed pattern, A printing method in which an ink containing a thermosetting or photo-curable composition is sprayed, and a pigment dispersion method in which a pattern is formed using a photosensitive composition in which a pigment is dispersed. Further, in the production of a photographic element, a composition using a pigment such as a colored photosensitive resin composition, a composition using a pigment and a dye, or a composition using only a dye may be used.
안료 및/또는 염료를 사용한 종래의 착색감광성수지조성물의 구성성분으로는, 착색제, 바인더 중합체, 광중합성 화합물, 광중합 개시제, 및 용매 등을 들 수 있다. 이러한 착색감광성수지조성물은 통상 실온의 청정실에서 착색제와 용매의 혼합물을 바인더 중합체, 광중합성 화합물 및 광중합 개시제의 혼합물에 포함시킴으로써 수득할 수 있다. 또한, 상기 착색감광성수지조성물을 사용하여 착색패턴을 효과적으로 수득하기 위해서는, 착색제를 고농도로 함유하는 착색감광성수지조성물을 사용하는 것이 바람직하다.Examples of the constituent components of the conventional colored photosensitive resin composition using the pigment and / or the dye include a colorant, a binder polymer, a photopolymerizable compound, a photopolymerization initiator, and a solvent. Such a colored photosensitive resin composition can be obtained by incorporating a mixture of a colorant and a solvent in a mixture of a binder polymer, a photopolymerizable compound and a photopolymerization initiator, usually in a clean room at room temperature. In order to effectively obtain a coloring pattern by using the colored photosensitive resin composition, it is preferable to use a colored photosensitive resin composition containing a colorant at a high concentration.
그러나 고농도의 착색제를 포함하는 경우, 막두께가 낮아지거나, 감도가 늦어지거나, 보관시 증점 및 막두께가 증가 혹은 투과율 저하, 잔사가 발생하는 등의 단점이 있다. 또한 하부기판의 영향에 따라서 잔사의 정도가 심해지는 경우도 있다. 예를 들어, 베어 실리콘 기판(Bare Silicone Wafer)의 경우에는 잔사 발생 정도가 심각하지 않다가, 평탄화막(Overcoat, OC)상에서는 잔사가 심하게 발생하는 경우가 종종 있다. 이를 막기 위해 공정상의 처리로 잔사를 해결하기도 하나, 공정시간이 길어지고, 공정 수의 증가에 따른 처리 비용의 증대가 이루어지므로 바람직하지 않다.However, when a high concentration of a colorant is contained, there is a disadvantage in that the film thickness is lowered, the sensitivity is lowered, the thickening point and film thickness are increased, or the transmittance is lowered and residue is generated. In addition, the degree of the residue may be increased depending on the influence of the lower substrate. For example, in the case of a bare silicon substrate (bare silicon wafer), the degree of residue generation is not serious, but on a flattening film (overcoat, OC), a residue often occurs. In order to prevent this, the residues may be solved by a process step, but the process time is long and the processing cost is increased with an increase in the number of process steps.
본 발명의 목적은 고분지화(Hyperbranched) 폴리에스테르 아마이드 아크릴레이트 올리고머를 포함하는 광중합화합물에 포함시켜, 넓은 공정마진을 갖으며, 밀착성이 양호하고 특히 패턴의 직선성이 우수하며, 패턴 늘어짐이 발생하지 않는 착색감광성수지조성물, 이를 이용한 패턴형성방법 및 이를 이용한 컬러필터를 제공하는 것이다.It is an object of the present invention to provide a photopolymerizable composition containing a hyperbranched polyester amide acrylate oligomer having a wide process margin, good adhesion, particularly excellent linearity of pattern, A method of forming a pattern using the same, and a color filter using the same.
상기의 목적을 달성하기 위해서, 본 발명은 (A)착색제; (B)바인더 중합체; (C)고분지화(Hyperbranched) 폴리에스테르 아마이드 아크릴레이트 올리고머를 포함하는 광중합성 화합물; 및 (D)광중합 개시제를 포함하는 것을 특징으로 하는 착색감광성수지조성물을 제공한다.In order to achieve the above objects, the present invention provides a colorant composition comprising (A) a colorant; (B) a binder polymer; (C) a photopolymerizable compound comprising a hyperbranched polyester amide acrylate oligomer; And (D) a photopolymerization initiator. The present invention also provides a colored photosensitive resin composition.
또한, 본 발명은 기판 상에 상기 착색감광성수지조성물을 이용하여 착색감광성수지층을 형성하고, 상기 착색감광성수지층을 선택적으로 노광하고, 상기 선택적으로 노광된 착색감광성수지층을 현상하는 것을 특징으로 하는 착색패턴 형성방법을 제공한다.Further, the present invention is characterized in that a colored photosensitive resin layer is formed on the substrate using the colored photosensitive resin composition, the colored photosensitive resin layer is selectively exposed, and the selectively exposed colored photosensitive resin layer is developed And a method of forming a coloring pattern.
또한, 본 발명은 상기 착색감광성수지조성물을 이용한 컬러필터를 제공한다.The present invention also provides a color filter using the colored photosensitive resin composition.
본 발명의 착색감광성수지조성물은 액정표시소자(LCD) 및 상보성 금속 산 화물 반도체 이미지 센서의 컬러필터에 적합하고, 넓은 공정 마진을 갖고, 밀착성이 양호하며, 우수한 패턴의 직선성 및 패턴 늘어짐이 없는 효과가 있다.INDUSTRIAL APPLICABILITY The colored photosensitive resin composition of the present invention is suitable for a color filter of a liquid crystal display element (LCD) and a complementary metal oxide semiconductor image sensor, has a wide process margin, is excellent in adhesion and has excellent linearity and pattern sagging It is effective.
이하, 본 발명을 구체적으로 설명한다. Hereinafter, the present invention will be described in detail.
1. 착색감광성수지조성물1. Colored photosensitive resin composition
본 발명의 착색감광성수지조성물은 (A)착색제, (B)바인더 중합체, (C) 광중합성 화합물, (D)광중합 개시제 및 (E)용매를 포함한다.The colored photosensitive resin composition of the present invention comprises (A) a colorant, (B) a binder polymer, (C) a photopolymerizable compound, (D) a photopolymerization initiator and (E) a solvent.
상기 (A)착색제는 유기안료, 무기안료, 유기염료 및 무기염료로 이루어진 군에서 선택되는 1종 또는 2종 이상을 포함할 수 있고, 밀베이스의 형태로 존재할 수 있다. 상기 유기안료 및/또는 유기염료는 합성 색소 또는 천연 색소일 수 있다. 상기 유기 안료는 필요한 경우, 로진 처리, 산성 기 또는 염기성 기가 도입되어 있는 안료 유도체를 사용하는 표면 처리, 중합체 화합물 등을 사용하는 안료의 표면에 대한 그라프트 처리, 황산 미세 입자화 방법 등에 의한 미세 입자화 처리, 또는 불순물을 제거하기 위해 유기 용매 또는 물 등에 의한 세정 처리를 실시할 수 있다. 상기 무기 안료는 금속 산화물, 금속 착염, 황산바륨(체질 안료)의 무기염 등일 수 있다. 이때, 상기 밀베이스의 주목적인 색을 띠는 층은 기존의 밀베이스에서 사용되는 안료와 동일하다. The colorant (A) may include one or more kinds selected from the group consisting of organic pigments, inorganic pigments, organic dyes and inorganic dyes, and may exist in the form of a mill base. The organic pigments and / or organic dyes may be synthetic or natural pigments. If necessary, the organic pigment may be subjected to a surface treatment using a pigment derivative in which a rosin treatment, an acidic group or a basic group is introduced, a graft treatment on the surface of a pigment using a polymer compound or the like, A cleaning treatment with an organic solvent or water or the like may be carried out to remove impurities. The inorganic pigment may be a metal oxide, a metal complex salt, an inorganic salt of barium sulfate (extender pigment), or the like. At this time, the main coloring layer of the mill base is the same as the pigment used in the conventional mill base.
또한, 상기 안료와 상기 염료는 칼라 인덱스(Color Index, 출판사: The Society of Dyers and Colourists) 내에 안료 및 염료로서 분류된 화합물을 사용할 수 있고, 상기 안료 및 상기 염료는 각각 단독 또는 2종 이상을 포함하여 사용할 수 있다. 상기 안료와 상기 염료의 구체적인 예는 하기와 같다.The pigments and the dyes may be classified into pigments and dyes in the Color Index (The Society of Dyers and Colors), and the pigments and the dyes may be used alone or in combination of two or more. Can be used. Specific examples of the pigment and the dye are as follows.
상기 안료의 구체적인 예로는, C.I. 안료 황색(Pigment Yellow)1호, C.I. 안료 황색 12호, C.I. 안료 황색 13호, C.I. 안료 황색 14호, C.I. 안료 황색 15호, C.I. 안료 황색 16호, C.I. 안료 황색 17호, C.I. 안료 황색 20호, C.I. 안료 황색 24호, C.I. 안료 황색 31호, C.I. 안료 황색 53호, C.I. 안료 황색 83호, C.I. 안료 황색 86호, C.I. 안료 황색 93호, C.I. 안료 황색 94호, C.I. 안료 황색 109호, C.I. 안료 황색 110호, C.I. 안료 황색 117호, C.I. 안료 황색 125호, C.I. 안료 황색 128호, C.I. 안료 황색 137호, C.I. 안료 황색 138호, C.I. 안료 황색 139호, C.I. 안료 황색 147호, C.I. 안료 황색 148호, C.I. 안료 황색 150호, C.I. 안료 황색 153호, C.I. 안료 황색 154호, C.I. 안료 황색 166호, C.I. 안료 황색 173호,C.I. 안료 오렌지색 (Pigment Orange) 13호, C.I. 안료 오렌지색 31호, C.I. 안료 오렌지색 36호, C.I. 안료 오렌지색 38호, C.I. 안료 오렌지색 40호, C.I. 안료 오렌지색 42호, C.I. 안료 오렌지색 43호, C.I. 안료 오렌지색 51호, C.I. 안료 오렌지색 55호, C.I. 안료 오렌지색 59호, C.I. 안료 오렌지색 61호, C.I. 안료 오렌지색 64호, C.I. 안료 오렌지색 65호, C.I. 안료 오렌지색 71호, C.I. 안료 오렌지색 73호, C.I. 안료 적색(Pigment Red) 9호, C.I. 안료 적색 97호, C.I. 안료 적색 105호, C.I. 안료 적색 122호, C.I. 안료 적색 123호, C.I. 안료 적색 144호, C.I. 안료 적색 149호, C.I. 안료 적색 166호, C.I. 안료 적색 168호, C.I. 안료 적색 176호, C.I. 안료 적색 177호, C.I. 안료 적색 180호, C.I. 안료 적색 192호, C.I. 안료 적색 215호, C.I. 안료 적색 216호, C.I. 안료 적색 224호, C.I. 안료 적색 242호, C.I. 안료 적색 254호, C.I. 안료 적색 264호, C.I. 안료 적색 265호, C.I. 안료 청색(Pigment Blue) 15호, C.I. 안료 청색 15:3호, C.I. 안료 청색 15:4호, C.I. 안료 청색 15:6호, C.I. 안료 청색 60호,C.I. 안료 자주색(Pigment Violet) 1호, C.I. 안료 자주색 19호, C.I. 안료 자주색 23호, C.I 안료 자주색 29호, C.I 안료 자주색 32호, C.I 안료 자주색 36호, C.I 안료 자주색 38호,C.I. 안료 녹색(Pigment Green) 7호, C.I. 안료 녹색 36호, C.I. 안료 갈색(Pigment Brown) 23호, C.I. 안료 갈색 25호 등을 들 수 있다.Specific examples of the pigment include C.I. Pigment Yellow No. 1, C.I. Pigment yellow No. 12, C.I. Pigment yellow No. 13, C.I. Pigment yellow No. 14, C.I. Pigment yellow No. 15, C.I. Pigment yellow No. 16, C.I. Pigment yellow No. 17, C.I. Pigment yellow No. 20, C.I. Pigment yellow No. 24, C.I. Pigment yellow No. 31, C.I. Pigment Yellow No. 53, C.I. Pigment Yellow 83, C.I. Pigment Yellow No. 86, C.I. Pigment yellow 93, C.I. Pigment Yellow 94, C.I. Pigment yellow No. 109, C.I. Pigment Yellow No. 110, C.I. Pigment yellow No. 117, C.I. Pigment Yellow No. 125, C.I. Pigment yellow No. 128, C.I. Pigment yellow No. 137, C.I. Pigment yellow 138, C.I. Pigment yellow No. 139, C.I. Pigment yellow No. 147, C.I. Pigment yellow No. 148, C.I. Pigment Yellow No. 150, C.I. Pigment yellow 153, C.I. Pigment yellow 154, C.I. Pigment yellow 166, C.I. Pigment yellow No. 173, C.I. Pigment Orange No. 13, C.I. Pigment Orange No. 31, C.I. Pigment orange No. 36, C.I. Pigment Orange No. 38, C.I. Pigment orange No. 40, C.I. Pigment orange No. 42, C.I. Pigment orange No. 43, C.I. Pigment Orange No. 51, C.I. Pigment orange No. 55, C.I. Pigment Orange No. 59, C.I. Pigment Orange No. 61, C.I. Pigment orange No. 64, C.I. Pigment orange No. 65, C.I. Pigment orange No. 71, C.I. Pigment Orange No. 73, C.I. Pigment Red No. 9, C.I. Pigment red No. 97, C.I. Pigment red No. 105, C.I. Pigment Red 122, C.I. Pigment Red 123, C.I. Pigment red No. 144, C.I. Pigment red No. 149, C.I. Pigment Red 166, C.I. Pigment Red No. 168, C.I. Pigment Red 176, C.I. Pigment Red 177, C.I. Pigment red No. 180, C.I. Pigment red No. 192, C.I. Pigment Red 215, C.I. Pigment Red 216, C.I. Pigment Red 224, C.I. Pigment Red 242, C.I. Pigment Red 254, C.I. Pigment Red No. 264, C.I. Pigment red No. 265, C.I. Pigment Blue No. 15, C.I. Pigment Blue 15: 3, C.I. Pigment Blue 15: 4, C.I. Pigment Blue 15: 6, C.I. Pigment Blue No. 60, C.I. Pigment Violet No. 1, C.I. Pigment purple No. 19, C.I. Pigment Purple No. 23, C.I Pigment Purple No. 29, C.I Pigment Purple No. 32, C.I Pigment Purple No. 36, C.I Pigment Purple No. 38, C.I. Pigment Green No. 7, C.I. Pigment green No. 36, C.I. Pigment Brown 23, C.I. Pigment brown No. 25, and the like.
상기 (A)착색제는 본 발명의 착색감광성수지조성물 내 휘발성 성분을 휘발시킨 후의 고형 함유량을 기준으로, 10중량% 내지 50중량%로 포함된다. 상술한 범위를 만족하면, 상기 (A)착색제와 (B)바인더 중합체의 비율이 알맞게 착색감광성수지조성물 내에 포함되어, 가열공정에서 착색제가 산화되는 것을 방지할 수 있다. 또한, 우수한 착색력을 발휘하는 이점이 있다.The above (A) colorant is contained in an amount of 10% by weight to 50% by weight, based on the solid content after volatile components in the colored photosensitive resin composition of the present invention are volatilized. When the above-mentioned range is satisfied, the ratio of the colorant (A) to the binder polymer (B) is appropriately included in the colored photosensitive resin composition, thereby preventing oxidation of the colorant in the heating process. In addition, there is an advantage of exhibiting excellent coloring power.
상기 (B)바인더 중합체는 착색제를 착색감광성수지조성물 내에 분산시켜 포토레지스트 공정 중 현상공정 시, 착색감광성수지조성물을 이용하여 형성된 착색감광성수지층의 비노광영역을 제거하고, 노광영역을 잔류시키는 성능을 부여하는 역할을 수행한다.The binder polymer (B) may be prepared by dispersing a colorant in a colored photosensitive resin composition to remove non-exposed areas of the colored photosensitive resin layer formed using the colored photosensitive resin composition during the development process in the photoresist process, And the like.
상기 (B)바인더 중합체는 표준 물질로서 폴리스티렌을 사용하여 겔 침투 크로마토그래피(GPC)로 측정한 중량평균분자량(MW)이 5,000 내지 400,000이고, 10,000 내지 300,000인 것이 바람직하다.The binder polymer (B) preferably has a weight average molecular weight (MW) measured by gel permeation chromatography (GPC) using polystyrene as a standard substance of 5,000 to 400,000 and preferably 10,000 to 300,000.
상기 (B)바인더 중합체는 카르복실기를 갖는 단량체를 포함하는 중합체를 포함하는 것이 바람직하다.The binder polymer (B) preferably includes a polymer containing a monomer having a carboxyl group.
상기 카르복실기를 갖는 단량체의 예로는 분자 내에 1개 이상의 카르복실기를 갖는 불포화 카르복실산, 예컨대 불포화 모노카르복실산, 불포화 디카르복실산 등을 들 수 있다. 이들의 구체적인 예로는 아크릴산, 메타크릴산, 크로톤산, 이타콘산, 말레산, 푸말산 등을 들 수 있다. 상기 카르복실기를 갖는 단량체는 탄소-탄소 불포화 결합을 갖는 화합물이며, 각각 단독으로 또는 2종 이상이 사용할 수 있다.Examples of the monomer having a carboxyl group include unsaturated carboxylic acids having at least one carboxyl group in the molecule, such as unsaturated monocarboxylic acids and unsaturated dicarboxylic acids. Specific examples thereof include acrylic acid, methacrylic acid, crotonic acid, itaconic acid, maleic acid, and fumaric acid. The monomer having a carboxyl group is a compound having a carbon-carbon unsaturated bond, and each may be used alone or in combination of two or more.
상기 (B)바인더 중합체는 카르복실기를 갖는 단량체로 이루어진 단독 중합체일 수 있지만, 바인더 중합체는 카르복실기를 갖는 단량체와 다른 단량체로 이루어진 공중합체일 수도 있다. 여기서, 상기 다른 단량체는 탄소-탄소 불포화 결합을 갖고 있고, 상기 카르복실기를 갖는 단량체와 공중합할 수 있는 단량체이다. The binder polymer (B) may be a homopolymer composed of a monomer having a carboxyl group, but the binder polymer may be a copolymer composed of a monomer having a carboxyl group and another monomer. Here, the other monomer is a monomer having a carbon-carbon unsaturated bond and capable of copolymerizing with the monomer having a carboxyl group.
상기 다른 단량체의 구체적인 예로는 방향족 비닐 화합물, 불포화 카르복실레이트 화합물, 불포화 아미노알킬 카르복실레이트 화합물, 불포화 글리시딜 카르복실레이트 화합물, 비닐 카르복실레이트 화합물, 비닐 시아나이드 화합물 및 불포화 옥세탄 카르복실레이트 화합물 등을 들 수 있다.Specific examples of the other monomer include an aromatic vinyl compound, an unsaturated carboxylate compound, an unsaturated aminoalkyl carboxylate compound, an unsaturated glycidyl carboxylate compound, a vinyl carboxylate compound, a vinyl cyanide compound and an unsaturated oxetanecarboxylic acid And the like.
상기 비닐화합물의 구체적인 예로는 스티렌, α-메틸스티렌, 비닐톨루엔 등을 들 수 있다. 상기 불포화 카르복실레이트 화합물의 구체적인 예로는 메틸 아크릴레이트, 메틸 메타크릴레이트, 에틸 아크릴레이트, 에틸 메타크릴레이트, 부틸 아크릴레이트, 부틸 메타크릴레이트, 2-히드록시에틸 아크릴레이트, 2-히드록시에틸 메타크릴레이트, 벤질 아크릴레이트, 벤질 메타크릴레이트 등을 들 수 있다. 상기 불포화 아미노알킬 카르복실레이트 화합물의 구체적인 예로는 아미노에틸 아크릴레이트 등을 들 수 있다. 상기 불포화 글리시딜 카르복실레이트 화합물의 구체적인 예로는 글리시딜 메타크릴레이트 등을 들 수 있다. 상기 비닐 카르복실레이트 화합물의 구체적인 예로는 비닐 아세테이트, 비닐 프로피오네이트 등을 들 수 있다. 상기 비닐 시아나이드 화합물의 구체적인 예로는 아크릴로니트릴, 메타크릴로니트릴, α-클로로아크릴로니트릴 등을 들 수 있다. 상기 불포화 옥세탄 카르복실레이트 화합물의 구체적인 예로는 3-메틸-3-아크릴옥시 메틸 옥세탄, 3-메틸-3-메타크릴옥시 메틸 옥세탄, 3-에틸-3-아크릴옥시 메틸 옥세탄, 3-에틸-3-메타크릴옥시 메틸 옥세탄, 3-메틸-3-아크릴옥시 에틸 옥세탄, 3-메틸-3-메타크릴옥시 에틸 옥세탄, 3-메틸-3-아크릴옥시 에틸 옥세탄 및 3-메틸-3-메타크릴옥시 에틸 옥세탄 등을 들 수 있다. 상기 다른 단량체는 각각 단독으로 또는 2종 이상이 사용될 수 있다.Specific examples of the vinyl compound include styrene,? -Methylstyrene, vinyltoluene, and the like. Specific examples of the unsaturated carboxylate compound include methyl acrylate, methyl methacrylate, ethyl acrylate, ethyl methacrylate, butyl acrylate, butyl methacrylate, 2-hydroxyethyl acrylate, 2-hydroxyethyl Methacrylate, benzyl acrylate, benzyl methacrylate, and the like. Specific examples of the unsaturated aminoalkyl carboxylate compound include aminoethyl acrylate and the like. Specific examples of the unsaturated glycidyl carboxylate compound include glycidyl methacrylate and the like. Specific examples of the vinyl carboxylate compound include vinyl acetate and vinyl propionate. Specific examples of the vinyl cyanide compound include acrylonitrile, methacrylonitrile,? -Chloroacrylonitrile, and the like. Specific examples of the unsaturated oxetanecarboxylate compound include 3-methyl-3-acryloxymethyloxetane, 3-methyl-3-methacryloxymethyloxetane, 3-ethyl- Methyl-3-acryloxyethyl oxetane, 3-methyl-3-acryloxyethyl oxetane, 3-methyl- Methyl-3-methacryloxyethyloxetane and the like. These other monomers may be used alone or in combination of two or more.
상기 공중합체의 예로는 3-에틸-3-메타크릴옥시 메틸 옥세탄/벤질 메타크릴레이트/메타크릴산 공중합체, 3-에틸-3-메타크릴옥시 메틸 옥세탄/벤질 메타크릴레이트/메타크릴산/스티렌 공중합체, 3-에틸-3-메타크릴옥시 메틸 옥세탄/메틸 메타크릴레이트/메타크릴산 공중합체, 3-에틸-3-메타크릴옥시 메틸 옥세탄/메틸 메타크릴레이트/메타크릴산/스티렌 공중합체 등을 들 수 있다. Examples of the copolymer include 3-ethyl-3-methacryloxymethyloxetane / benzyl methacrylate / methacrylic acid copolymer, 3-ethyl-3-methacryloxymethyloxetane / benzyl methacrylate / Ethyl-3-methacryloxymethyloxetane / methyl methacrylate / methacrylic acid copolymer, 3-ethyl-3-methacryloxymethyl oxetane / methyl methacrylate / methacrylic acid / Acid / styrene copolymer and the like.
상기 (B) 바인더 중합체가 상기 공중합체일 경우, 공중합체 총 중량에 대 하여, 상기 카르복실기를 갖는 단량체는 5중량% 내지 50중량%로 포함되는 것이 바람직하고, 10중량% 내지 40중량% 포함되는 것이 가장 바람직하다. 상기 카르복실기를 갖는 단량체 단위가 5중량% 미만으로 포함된다면, 현상공정을 수행할 때 착색감광성수지조성물의 광선 조사 영역이 잔류되지 않을 수 있고, 50중량% 초과하여 포함된다면, 상기 (B)바인더 중합체가 형성되지 않는 문제점이 발생할 수 있다.When the binder polymer (B) is the copolymer, the amount of the monomer having a carboxyl group is preferably 5 wt% to 50 wt%, more preferably 10 wt% to 40 wt%, based on the total weight of the copolymer Is most preferable. If the monomer unit having a carboxyl group is contained in an amount of less than 5% by weight, the light-irradiated region of the colored photosensitive resin composition may not remain when the developing process is carried out, and if it contains more than 50% by weight, A problem may arise in which the film is not formed.
상기 (B)바인더 중합체는 본 발명의 착색감광성수지조성물 내 휘발성 성분을 휘발시킨 후의 고형 함유량을 기준으로 10중량% 내지 50중량% 포함된다. 상술한 범위를 만족하면, 현상 시 광선 미조사 영역을 제거하고, 광선 조사 영역을 잔류시키는 성능을 부여하여 우수한 패턴을 형성할 수 있는 이점이 있다.The binder polymer (B) is contained in an amount of 10% by weight to 50% by weight based on the solid content after volatile components in the colored photosensitive resin composition of the present invention are volatilized. When the above-mentioned range is satisfied, there is an advantage that an excellent pattern can be formed by giving a capability of removing the light non-irradiated area and remaining the light irradiated area at the time of development.
상기 (C)광중합성 화합물은 노광에 의해 상기 (D)광중합 개시제로부터 발생되는 활성 라디칼, 산 등에 의해 중합될 수 있는 화합물이고, 고분지화(Hyperbranched) 폴리에스테르 아마이드 (메타)아크릴레이트 올리고머를 포함한다. The photopolymerizable compound (C) is a compound which can be polymerized by an active radical, an acid, or the like generated from the photopolymerization initiator (D) by exposure and includes a hyperbranched polyester amide (meth) acrylate oligomer .
본 발명의 고분지화 폴리에스테르 아마이드 (메타)아크릴레이트 올리고머는 2세대 이상이고, 하기 화학식 1로 표시되는 화합물인 것이 바람직하다. The polymerized polyester amide (meth) acrylate oligomer of the present invention is preferably a compound represented by the following general formula (1), which is a second generation or more.
<화학식1> ≪ Formula 1 >
X-[-A]l X - [- A] l
상기 화학식 1에서,In Formula 1,
X는 고분지화(Hyperbranched) 폴리에스테르 아마이드 아크릴레이트 올리고머의 중심성분을 이루는 것으로, 탄소수 2 내지 20의 지방족 혹은 방향족 잔기의 말단에 말단에 2 내지 4개의 카르보닐기를 갖는 작용기이고,X represents a central component of a hyperbranched polyester amide acrylate oligomer and is a functional group having 2 to 4 carbonyl groups at the ends of the aliphatic or aromatic residue having 2 to 20 carbon atoms,
l은 2 내지 4이고, l is 2 to 4,
A는 상기 카르보닐기에 결합되어 있는 하기 화학식 2의 기이다.A is a group of the following formula (2) bonded to the carbonyl group.
<화학식 2> (2)
-B-C -B-C
상기 화학식 2에서, In Formula 2,
B는 1개 이상의 에스테르 결합 및 1개 이상의 아마이드 결합을 포함하는 2가 이상의 유기기이고, B is a divalent or higher-valent organic group containing at least one ester bond and at least one amide bond,
C는 -CO-CR1=CH2, C is -CO-CR 1 = CH 2,
R1은 H 또는 CH3이다. R 1 is H or CH 3 .
B는 바람직하게는 에스테르 및 아마이드 결합을 1개 이상 함께 포함하고 말단에 1개 이상의 옥시드기를 갖는 2가 이상의 유기기이다. B is preferably a divalent or higher-valent organic group containing at least one ester and amide bond and having at least one oxide group at the terminal.
상기 화학식 1로 표시되는 고분지화 폴리에스테르 아마이드 아크릴레이트 올리고머에 대하여 보다 상세하게 설명하면, 안하이드라이드(anhydride) 1개에 디에탄올아민(diethanolamine)이 반응하여 4개의 수산기를 갖는 화합물이 형성되고, 이 화합물이 상기 화학식 1로 표시되는 고분지화 폴리에스테르 아마이드 아크릴레이트의 코어(core) 역할을 하게 된다. 이어서, 상기 코어에 안하이드라이드에 1개 의 디에탄올아민이 반응한 화합물이 부가되어 브랜치(branch)를 형성하게 되면서 형성된다.More specifically, the highly branched polyester amide acrylate oligomer represented by Formula 1 is reacted with an anhydride to form a compound having four hydroxyl groups, This compound serves as a core of the highly branched polyester amide acrylate represented by the above formula (1). Subsequently, a compound in which one diethanolamine is reacted with the anhydride is added to the core to form a branch.
상기 고분지화(Hyperbranched) 폴리에스테르 아마이드 아크릴레이트 올리고머는 표준 물질로서 폴리스티렌을 사용하여 겔 침투 크로마토그래피(GPC)로 측정한 중량평균분자량이 400 내지 10,000이고, 1,000 내지 6,000인 것이 바람직하다. 상기 분자량이 상술한 범위이면, 합성이 용이한 이점이 있다. The hyperbranched polyester amide acrylate oligomer preferably has a weight average molecular weight of 400 to 10,000 as measured by gel permeation chromatography (GPC) using polystyrene as a standard, and preferably 1,000 to 6,000. When the molecular weight is in the above range, there is an advantage that synthesis is easy.
상기 고분지화(Hyperbranched) 폴리에스테르 아마이드 아크릴레이트 올리고머는 직접 제조하여 사용할 수 있다.The hyperbranched polyester amide acrylate oligomer can be directly prepared and used.
상기 (C)광중합성 화합물은 상기 고분지화(Hyperbranched) 폴리에스테르 아마이드 아크릴레이트 올리고머를 단독으로 이용될 수 있지만, 중합 가능한 탄소-탄소 불포화 결합을 갖는 화합물 등을 더 포함할 수 있다. 상기 화합물은 일작용성의 광중합성 화합물, 이작용성의 광중합성 화합물 또는 삼작용성 이상인 다작용성의 광중합성 화합물일 수 있다.The above-mentioned (C) photopolymerizable compound may further include the above-mentioned hyperbranched polyester amide acrylate oligomer alone, but may further include a compound having a polymerizable carbon-carbon unsaturated bond and the like. The compound may be a monofunctional photopolymerizable compound, a bifunctional photopolymerizable compound, or a trifunctional or more multifunctional photopolymerizable compound.
상기 일작용성의 광중합성 화합물의 예로는 노닐페닐카비톨 아크릴레이트, 2-히드록시-3-페녹시프로필 아크릴레이트, 2-에틸헥실카비톨 아크릴레이트, 2-히드록시에틸 아크릴레이트, N-비닐피롤리돈 등을 들 수 있다. 상기 이작용성의 광중합성 화합물의 예로는 1,6-헥산디올 디아크릴레이트, 1,6-헥산디올 디메타크릴레이트, 에틸렌 글리콜 디아크릴레이트, 에틸렌 글리콜 디메타크릴레이트, 네오펜틸 글리콜 디아크릴레이트, 네오펜틸 글리콜 디메타크릴레이트, 트리에틸렌 글리콜 디아크릴레이트, 트리에틸렌 글리콜 디메타크릴레이트, 비스페놀 A의 비스(아크릴로일 옥시에틸) 에테르, 3-메틸펜탄디올 디아크릴레이트, 3-메틸펜탄디올 디메타크릴레이트 등을 들 수 있다. 상기 다관능 아크릴 올리고머 및 다관능 아크릴 모노머의 예로는 트리메틸올프로판 트리아크릴레이트, 트리메틸올프로판 트리메타크릴레이트, 펜타에리스리톨 트리아크릴레이트, 펜타에리스리톨 트리메타크릴레이트, 펜타에리스리톨 테트라아크릴레이트, 펜타에리스리톨 테트라메타크릴레이트, 디펜타에리스리톨 펜타아크릴레이트, 디펜타에리스리톨 펜타메타크릴레이트, 디펜타에리스리톨 헥사아크릴레이트, 디펜타에리스리톨 헥사메타크릴레이트 등을 들 수 있다.Examples of the monofunctional photopolymerizable compound include nonylphenylcarbitol acrylate, 2-hydroxy-3-phenoxypropyl acrylate, 2-ethylhexylcarbitol acrylate, 2-hydroxyethyl acrylate, N-vinyl Pyrrolidone and the like. Examples of the bifunctional photopolymerizable compound include 1,6-hexanediol diacrylate, 1,6-hexanediol dimethacrylate, ethylene glycol diacrylate, ethylene glycol dimethacrylate, neopentyl glycol diacrylate , Neopentyl glycol dimethacrylate, triethylene glycol diacrylate, triethylene glycol dimethacrylate, bis (acryloyloxyethyl) ether of bisphenol A, 3-methylpentanediol diacrylate, 3-methylpentane Diol dimethacrylate, and the like. Examples of the polyfunctional acryl oligomer and polyfunctional acrylic monomer include trimethylolpropane triacrylate, trimethylolpropane trimethacrylate, pentaerythritol triacrylate, pentaerythritol trimethacrylate, pentaerythritol tetraacrylate, pentaerythritol tetra Methacrylate, dipentaerythritol pentaacrylate, dipentaerythritol penta methacrylate, dipentaerythritol hexaacrylate, dipentaerythritol hexa methacrylate, and the like.
상기 (C)광중합성 화합물이 상기와 같이, 상기 (Hyperbranched) 폴리에스테르 아마이드 아크릴레이트 이외에 다른 화합물을 포함할 경우, 상기 (Hyperbranched) 폴리에스테르 아마이드 아크릴레이트는 상기 (C)광중합성 화합물 총 중량에 대하여, 5 내지 100중량%로 포함되는 것이 바람직하다. 상술한 범위로 포함되면, 잔사 및 패턴 직진성과 패턴 늘어짐에 이점이 있다.When the (C) photopolymerizable compound contains a compound other than the hyperbranched polyester amide acrylate as described above, the (Hyperbranched) polyester amide acrylate may be added to the total weight of the photopolymerizable compound (C) By weight, and 5 to 100% by weight. When included in the above-mentioned range, there is an advantage in the residue and pattern straightness and pattern sagging.
상기 (C)광중합성 화합물은 본 발명의 착색감광성수지조성물 내 휘발성 성분을 휘발시킨 후의 고형 함유량을 기준으로 10중량% 내지 50중량%로 포함된다. 상술한 범위를 만족하면, 패턴 뜯김 현상이 발생하지 않고, 우수한 패턴을 형성할 수 있으며, 공정 중 본 발명의 착색감광성수지조성물이 균일하게 도포되고 역테이퍼 및 잔사 발생을 방지할 수 있는 이점이 있다.The (C) photopolymerizable compound is contained in an amount of 10% by weight to 50% by weight based on the solid content after volatile components in the colored photosensitive resin composition of the present invention are volatilized. When the above-mentioned range is satisfied, an excellent pattern can be formed without causing pattern peeling, and the colored photosensitive resin composition of the present invention can be uniformly applied during the process, and reverse taper and residue generation can be prevented .
상기 (D)광중합 개시제는 광 조사에 의해 활성 라디칼을 발생시키는 활성 라디칼 발생제 또는 산을 발생시키는 산 발생제 등을 예로 들 수 있다. 상기 활성 라디칼 발생제의 예로는 아세토페논계 광중합 개시제, 벤조인계 광중합 개시제, 벤조페논계 광중합 개시제, 티오크산톤계 광중합 개시제, 트리아진계 광중합 개시제 등을 들 수 있다.Examples of the photopolymerization initiator (D) include an active radical generator that generates an active radical upon irradiation with light or an acid generator that generates an acid. Examples of the active radical generator include an acetophenone photopolymerization initiator, a benzoin photopolymerization initiator, a benzophenone photopolymerization initiator, a thioxanthone photopolymerization initiator, and a triazine photopolymerization initiator.
상기 아세토페논계 광중합 개시제의 예로는 디에톡시아세토페논, 2-히드록시-2-메틸-1-페닐프로판-1-온, 벤질디메틸케탈, 2-히드록시-2-메틸-1-[2-(2-히드록시에톡시)페닐]프로판-1-온, 1-히드록시시클로헥실 페닐 케톤, 2-메틸-2-모르폴리노-1-(4-메틸티오페닐)프로판-1-온, 2-벤질-2-디메틸아미노-1-(4-모르폴리노페닐)부탄-1-온 및 2-히드록시-2-메틸-1-[4-(1-메틸비닐)페닐]프로판-1-온의 올리고머 등을 들 수 있다. Examples of the acetophenone photopolymerization initiator include diethoxyacetophenone, 2-hydroxy-2-methyl-1-phenylpropan-1-one, benzyldimethylketal, 2- (2-hydroxyethoxy) phenyl] propan-1-one, 1-hydroxycyclohexyl phenyl ketone, 2- Methyl-1- [4- (1-methylvinyl) phenyl] propane-1-one and 2-hydroxy-2-methyl- -One oligomers, and the like.
상기 벤조인계 광중합 개시제의 예로는 벤조인, 벤조인 메틸 에테르, 벤조인 에틸 에테르, 벤조인 이소프로필 에테르, 벤조인 이소부틸 에테르 등을 들 수 있다. 상기 벤조페논계 광중합 개시제의 예로는 벤조페논, 메틸 o-벤조일 벤조에이트, 4-페닐벤조페논, 4-벤조일-4'-메틸디페닐 설파이드, 3,3',4,4'-테트라(t-부틸퍼옥시카르보닐)벤조페논, 2,4,6-트리메틸벤조페논 등을 들 수 있다. 상기 티오크산톤 (D)광중합 개시제의 예로는 2-이소프로필티오크산톤, 4-이소프로필티오크산톤, 2,4-디에틸티오크산톤, 2,4-디클로로티오크산톤, 1-클로로-4-프로폭시티오크산톤 등을 들 수 있다.Examples of the benzoin-based photopolymerization initiator include benzoin, benzoin methyl ether, benzoin ethyl ether, benzoin isopropyl ether, and benzoin isobutyl ether. Examples of the benzophenone photopolymerization initiator include benzophenone, methyl o-benzoyl benzoate, 4-phenylbenzophenone, 4-benzoyl-4'-methyldiphenyl sulfide, 3,3 ', 4,4'-tetra (t -Butylperoxycarbonyl) benzophenone, 2,4,6-trimethylbenzophenone, and the like. Examples of the thioxanthone (D) photopolymerization initiator include 2-isopropylthioxanthone, 4-isopropylthioxanthone, 2,4-diethylthioxanthone, 2,4-dichlorothioxanthone, -4-propoxyoctanoic acid, and the like.
상기 트리아진계 광중합 개시제의 예로는 2,4-비스(트리클로로메틸)-6-(4-메톡시페닐)-1,3,5-트리아진, 2,4-비스(트리클로로메틸)-6-(4-메톡시나프틸)-1,3,5-트리아진, 2,4-비스(트리클로로메틸)-6-피페로닐-1,3,5-트리아진, 2,4-비스 (트리클로로메틸)-6-(4-메톡시스티릴)-1,3,5-트리아진, 2,4-비스(트리클로로메틸)-6-[2-(5-메틸푸란-2-일)에테닐]-1,3,5-트리아진, 2,4-비스(트리클로로메틸)-6-[2-(푸란-2-일)에테닐]-1,3,5-트리아진, 2,4-비스(트리클로로메틸)-6-[2-(4-디에틸아미노-2-메틸페닐)에테닐]-1,3,5-트리아진, 2,4-비스(트리클로로메틸)-6-[2-(3,4-디메톡시페닐)에테닐]-1,3,5-트리아진 등을 들 수 있다.Examples of the triazine photopolymerization initiator include 2,4-bis (trichloromethyl) -6- (4-methoxyphenyl) -1,3,5-triazine, 2,4-bis (trichloromethyl) -6 - (4-methoxynaphthyl) -1,3,5-triazine, 2,4-bis (trichloromethyl) -6-piperonyl-1,3,5-triazine, (Trichloromethyl) -6- [2- (5-methylfuran-2- (4-methoxystyryl) -1,3,5-triazine, Yl) ethenyl] -1,3,5-triazine, 2,4-bis (trichloromethyl) -6- [2- (furan- , 2,4-bis (trichloromethyl) -6- [2- (4-diethylamino-2-methylphenyl) ethenyl] -1,3,5-triazine, 2,4- ) -6- [2- (3,4-dimethoxyphenyl) ethenyl] -1,3,5-triazine.
또한, 상기 활성 라디칼 발생제로서는, 예를 들면 2,4,6-트리메틸벤조일디페닐포스핀 옥사이드, 2,2'-비스(o-클로로페닐)-4,4',5,5'-테트라페닐-1,2'-바이이미다졸, 10-부틸-2-클로로아크리돈, 2-에틸안트라퀴논, 벤질, 9,10-페난트렌퀴논, 캄포퀴논, 메틸 페닐글리옥실레이트, 티타노센 화합물 등을 사용할 수도 있다.Examples of the active radical generator include 2,4,6-trimethylbenzoyldiphenylphosphine oxide, 2,2'-bis (o-chlorophenyl) -4,4 ', 5,5'-tetra Phenyl-1,2'-bimidazole, 10-butyl-2-chloroacridone, 2-ethylanthraquinone, benzyl, 9,10-phenanthrenequinone, camphorquinone, methylphenylglyoxylate, Etc. may be used.
또한, 상기 활성 라디칼 발생제는 상업적으로 이용 가능한 것들도 사용할 수 있다. 상업적으로 이용 가능한 광중합 개시제로서는, 예를 들면 「이가큐어(Irgacure)-907」(상품명, 종류: 아세토페논계 광중합 개시제, 제조사: 시바-가이기) 등을 들 수 있다.In addition, commercially available active radical generating agents may be used. Commercially available photopolymerization initiators include, for example, " Irgacure-907 " (trade name, type: acetophenone-based photopolymerization initiator;
상기 산 발생제의 예로는 오늄염, 예컨대 4-히드록시페닐디메틸설포늄 p-톨루엔설포네이트, 4-히드록시페닐디메틸설포늄 헥사플루오로안티모네이트, 4-아세톡시페닐디메틸설포늄 p-톨루엔설포네이트, 4-아세톡시페닐ㆍ메틸ㆍ벤질설포늄 헥사플루오로안티모네이트, 트리페닐설포늄 p-톨루엔설포네이트, 트리페닐설포늄 헥사플루오로안티모네이이트, 디페닐요오도늄 p-톨루엔설포네이트, 디페닐요오도늄 헥사플루오로안티모네이트 등, 니트로벤질 토실레이트, 벤조인 토실레이트 등을 들 수 있다. Examples of the acid generator include an onium salt such as 4-hydroxyphenyldimethylsulfonium p-toluenesulfonate, 4-hydroxyphenyldimethylsulfonium hexafluoroantimonate, 4-acetoxyphenyldimethylsulfonium p- Benzenesulfonium hexafluoroantimonate, triphenylsulfonium p-toluenesulfonate, triphenylsulfonium hexafluoroantimonate, diphenyliodonium p-toluenesulfonate, diphenylsulfonium p-toluenesulfonate, Toluene sulfonate, diphenyl iodonium hexafluoroantimonate and the like, nitrobenzyl tosylate, and benzoin tosylate.
상기 언급한 화합물 중에는 활성 라디칼 발생제로서 활성 라디칼과 함께 동시에 산을 발생시키는 화합물도 포함될 수 있다. 예를 들면, 상기 트리아진계 광중합 개시제는 산 발생제로서 사용될 수 있다. 상기 광중합 개시제는 각각 단독으로 또는 2종 이상의 조합으로 사용할 수 있다.Among the above-mentioned compounds, a compound capable of generating an acid simultaneously with an active radical as an active radical generator may also be included. For example, the triazine-based photopolymerization initiator can be used as an acid generator. These photopolymerization initiators may be used alone or in combination of two or more.
상기 (D)광중합 개시제는 본 발명의 착색감광성수지조성물 내 휘발성 성분을 휘발시킨 후의 고형 함유량을 기준으로 0.01중량% 내지 10중량%로 포함되고, 바람직하게는 0.1중량% 내지 5중량%로 포함된다. 상술한 범위를 만족하면, 패턴 뜯김 현상이 발생하지 않고, 우수한 패턴을 형성할 수 있으며, 공정 중 잔사 발생을 방지할 수 있는 이점이 있다.The photopolymerization initiator (D) is contained in an amount of 0.01% by weight to 10% by weight, preferably 0.1% by weight to 5% by weight, based on the solid content after volatilization of the volatile components in the colored photosensitive resin composition of the present invention . When the above-mentioned range is satisfied, an excellent pattern can be formed without occurrence of pattern peeling, and there is an advantage that residue can be prevented from being generated during the process.
상기 (D)광중합 개시제는 광중합 개시 보조제를 더 포함할 수 있다. 상기 광중합 개시 보조제는 상기 (D)광중합 개시제에 의해 개시되는 상기 (C)광중합성 화합물의 중합을 증진시키기 위해 상기 (D)광중합 개시제와 함께 사용되는 화합물이다. 상기 광중합 개시 보조제로서는, 예를 들면 아민계 광중합 개시 보조제, 알콕시안트라센계 광중합 개시 보조제 등을 들 수 있다.The photopolymerization initiator (D) may further comprise a photopolymerization initiator. The photopolymerization initiation assistant is a compound used together with the photopolymerization initiator (D) for promoting polymerization of the photopolymerizable compound (C) initiated by the photopolymerization initiator (D). Examples of the photopolymerization initiator include amine-based photopolymerization initiators, alkoxyanthracene photopolymerization initiators, and the like.
상기 아민계 광중합 개시 보조제의 예로는 트리에탄올아민, 메틸디에탄올아민, 트리이소프로판올아민, 메틸 4-디메틸아미노벤조에이트, 에틸 4-디메틸아미노벤조에이트, 이소아밀 4-디메틸아미노벤조에이트, 2-디메틸아미노에틸벤조에이트, 2-에틸헥실 4-디메틸아미노벤조에이트, N,N-디메틸 p-톨루이딘, 4,4'-비스(디메틸아미노)벤조페논(일반명: 마이클러스(Michler's) 케톤), 4,4'-비스(디에틸아미노)벤조페논, 4,4'-비스(에틸메틸아미노)벤조페논 등을 들 수 있다.Examples of the amine photopolymerization initiation auxiliary include triethanolamine, methyldiethanolamine, triisopropanolamine, methyl 4-dimethylaminobenzoate, ethyl 4-dimethylaminobenzoate, isoamyl 4-dimethylaminobenzoate, 2-dimethylamino N, N-dimethyl p-toluidine, 4,4'-bis (dimethylamino) benzophenone (generic name: Michler's ketone), 4, 4'-bis (diethylamino) benzophenone, and 4,4'-bis (ethylmethylamino) benzophenone.
상기 알콕시안트라센계 광중합 개시 보조제의 예로는 9,10-디메톡시안트라센, 2-에틸-9,10-디메톡시안트라센, 9,10-디에톡시안트라센, 2-에틸-9,10-디에톡시안트라센 등을 들 수 있다.Examples of the alkoxyanthracene-based photopolymerization initiator include 9,10-dimethoxyanthracene, 2-ethyl-9,10-dimethoxyanthracene, 9,10-diethoxyanthracene, 2-ethyl-9,10-diethoxyanthracene, etc. .
상기 광중합 개시 보조제로서는 상업적으로 이용 가능한 것들도 사용할 수 있다. 이러한 상업적으로 이용 가능한 광중합 개시 보조제로서는, 예를 들면「EAB-F」(상품명: 호도가야 케미칼 컴파니 리미티드 제품) 등을 들 수 있다. Commercially available photopolymerization initiators may also be used. Examples of such commercially available photopolymerization initiators include " EAB-F " (trade name, product of Hodogaya Chemical Co., Ltd.) and the like.
그러한 광중합 개시 보조제를 사용하는 경우, 상기 광중합 개시 보조제는 상기 (D)광중합 개시제 1 몰 당 0.01몰 내지 10몰로 포함될 수 있고, 바람직하게는 0.1몰 내지 5몰 포함될 수 있다. 상기 광중합 개시 보조제가 0.01몰 미만으로 포함된다면, 상기 광중합 개시 보조제로 인한 효과를 구현할 수 없고, 10몰 초과하여 포함된다면, 제조비용이 상승하는 문제점이 발생할 수 있다. When such a photopolymerization initiator is used, the photopolymerization initiator may be contained in an amount of 0.01 to 10 mol, preferably 0.1 to 5 mol per mol of the photopolymerization initiator (D). If the amount of the photopolymerization initiator is less than 0.01 mol, the effect due to the photopolymerization initiator can not be achieved. If the amount of the photopolymerization initiator is more than 10 mol, the production cost may increase.
본 발명의 착색감광성수지조성물에 포함되는 (E)용매는 적당한 점성을 갖고, 나머지 성분들을 용이하게 용해시킬 수 있다. 상기 (E) 용매는 본 발명의 착색감광성수지조성물 총 중량에 대하여 50 내지 90 중량%로 포함되는 것이 바람직하다.The solvent (E) contained in the colored photosensitive resin composition of the present invention has an appropriate viscosity and can easily dissolve the remaining components. The solvent (E) is preferably contained in an amount of 50 to 90% by weight based on the total weight of the colored photosensitive resin composition of the present invention.
상기 (E)용매는 통상의 착색감광성 조성물에서 사용된 것과 동일한 용매를 사용할 수 있다. 상기 (E)용매의 예로는 에틸렌 글리콜 모노알킬 에테르, 예컨대 에틸렌 글리콜 모노메틸 에테르, 에틸렌 글리콜 모노에틸 에테르, 에틸렌 글리콜 모노프로필 에테르, 에틸렌 글리콜 모노부틸 에테르 등, 디에틸렌 글리콜 디알킬 에테르, 예컨대 디에틸렌 글리콜 디메틸 에테르, 디에틸렌 글리콜 디에틸 에테르, 디에틸렌 글리콜 디프로필 에테르, 디에틸렌 글리콜 디부틸 에테르 등, 에틸렌 글리콜 알킬 에테르 아세테이트, 예컨대 메틸셀로솔브 아세테이트, 에틸셀로솔브 아세테이트 등, 알킬렌 글리콜 알킬 에테르 아세테이트, 예컨대 프로필렌 글리콜 모노메틸 에테르 아세테이트, 프로필렌 글리콜 모노에틸 에테르 아세테이트, 프로필렌 글리콜 모노프로필 에테르 아세테이트, 메톡시부틸 아세테이트, 메톡시펜틸 아세테이트 등, 방향족 탄화수소, 예컨대 벤젠, 톨루엔, 크실렌 등, 케톤, 예컨대 메틸 에틸 케톤, 아세톤, 메틸 아밀 케톤, 메틸 이소부틸 케톤, 시클로헥산온 등, 알콜, 예컨대 에탄올, 프로판올, 부탄올, 헥산올, 시클로헥산올, 에틸렌 글리콜, 글리세린 등, 에스테르, 예컨대 에틸 3-에톡시프로피오네이트, 메틸 3-메톡시프로피오네이트 등, 고리형 에스테르, 예컨대 γ-부티롤락톤 등을 들 수 있다. 상기 (E)용매는 각각 단독으로 또는 2종 이상이 사용될 수 있다. The solvent (E) may be the same solvent as that used in conventional colored photosensitive compositions. Examples of the solvent (E) include ethylene glycol monoalkyl ethers such as ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol monopropyl ether, and ethylene glycol monobutyl ether; diethylene glycol dialkyl ethers such as diethylene Ethylene glycol alkyl ether acetates such as methyl cellosolve acetate and ethyl cellosolve acetate, alkylene glycol alkyl ethers such as ethylene glycol diethyl ether, diethylene glycol diethyl ether, diethylene glycol dipropyl ether, and diethylene glycol dibutyl ether; Ether acetates such as propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, propylene glycol monopropyl ether acetate, methoxybutyl acetate, methoxypentyl acetate, etc., aromatic hydrocarbons, examples Methyl ethyl ketone, methyl isobutyl ketone and cyclohexanone; alcohols such as ethanol, propanol, butanol, hexanol, cyclohexanol, ethylene glycol, Glycerin and the like, esters such as ethyl 3-ethoxypropionate and methyl 3-methoxypropionate, and cyclic esters such as? -Butyrolactone. The above (E) solvents may be used alone or in combination of two or more.
본 발명의 착색감광성수지조성물은 (F)첨가제를 더 포함할 수 있으며, 상기 (F)첨가제의 예로는 충전제, 상기 (B)바인더 중합체를 제외한 다른 중합체, 계면활성제, 밀착성 증진제, 항산화제, 자외선 흡수제, 응집 방지제, 유기산, 유기 아미노 화합물, 및 경화제 등을 들 수 있다.The colored photosensitive resin composition of the present invention may further comprise (F) an additive. Examples of the additive (F) include fillers, polymers other than the binder polymer (B), surfactants, adhesion promoters, antioxidants, ultraviolet Absorbing agents, anti-aggregation agents, organic acids, organic amino compounds, and curing agents.
상기 다른 중합체의 예로는 폴리비닐 알콜, 폴리아크릴산, 폴리에틸렌 글리콜 모노알킬 에테르, 폴리플루오로알킬 아크릴레이트 등을 들 수 있다. 상기 계면활성제의 예로는 폴리에스테르계 중합체 분산제, 아크릴계 중합체 분산제, 폴리 우레탄계 중합체 분산제, 양이온계 계면활성제, 음이온계 계면활성제, 비이온계 계면활성제 등을 들 수 있으며, 이들은 각각 단독으로 또는 2종 이상의 조합으로 사용한다. 상기 안료분산제는 착색제 1중량부를 기준으로 0.01중량부 이상으로 포함되고, 바람직하게는 0.05중량부 이상으로 포함된다. 상기 밀착성 증진제의 예로는 비닐트리메톡시실란, 비닐트리에톡시실란, 비닐트리스(2-메톡시에톡시)실란, N-(2-아미노에틸)-3-아미노프로필메틸디메톡시실란, N-(2-아미노에틸)-3-아미노프로필트리메톡시실란, 3-아미노프로필트리에톡시실란, 3-글리시독시프로필트리메톡시실란, 3-글리시독시프로필메틸디메톡시실란, 2-(3,4-에폭시시클로헥실)에틸트리메톡시실란, 3-클로로프로필메틸디메톡시실란, 3-클로로프로필트리메톡시실란, 3-메타크릴옥시프로필트리메톡시실란, 3-머캅토프로필트리메톡시실란 등을 들 수 있다. 상기 항산화제의 예로는 2,2-티오비스(4-메틸-6-t-부틸페놀), 2,6-디-t-부틸페놀 등을 들 수 있다. 상기 자외선 흡수제의 예로는 2-(3-t-부틸-5-메틸-2-히드록시페닐)-5-클로로벤조트리아졸, 알콕시벤조페논 등을 들 수 있다. 상기 응집 방지제의 예로는 나트륨 폴리아크릴레이트 등을 들 수 있다. 상기 유기산의 예로는 지방족 모노카르복실산, 예컨대 포름산, 아세트산, 프로피온산, 부티르산, 발레르산, 피발산, 카프론산, 디에틸아세트산, 에난트산(enanthic acid), 카프릴산 등, 지방족 디카르복실산, 예컨대 옥살산, 말론산, 숙신산, 글루타르산, 아디프산, 피멜산, 수베르산, 아젤라산(azelaic acid), 세바크산, 브라실산, 메틸말론산, 에틸말론산, 디메틸말론산, 메틸숙신산, 테트라메틸숙신산, 시클로헥산디카르복실산, 이타콘산, 시트라콘산, 말레산, 푸말산, 메자콘산 등, 지방족 트리카르복실산, 예컨대 트리카르복실 산, 아코니트산, 캄포론산 등, 방향족 모노카르복실산, 예컨대 벤조산, 톨루산, 쿠멘산, 헤멜리트산, 메시틸렌산 등, 방향족 디카르복실산, 프탈산, 이소프탈산, 테레프탈산 등, 방향족 폴리카르복실산, 예컨대 트리멜리트산, 트리메스산, 멜로판산, 피로멜리트산 등, 그리고 다른 산을 들 수 있다. 상기 유기 아미노 화합물의 예로는 모노(시클로)알킬아민, 예컨대 n-프로필아민, i-프로필아민, n-부틸아민, i-부틸아민, s-부틸아민, t-부틸 아민, n-펜틸아민, n-헥실아민, n-헵틸아민, n-옥틸아민, n-노닐아민, n-데실아민, n-운데실아민, n-도데실아민, 시클로헥실아민, 2-메틸시클로헥실아민, 3-메틸시클로헥실아민, 4-메틸시클로헥실아민 등, 디(시클로)알킬아민, 예컨대 메틸에틸아민, 디에틸아민, 메틸 n-프로필아민, 에틸 n-프로필아민, 디 n-프로필아민, 디 i-프로필아민, 디 n-부틸아민, 디 i-부틸아민, 디 s-부틸아민, 디 t-부틸아민, 디 n-펜틸아민, 디 n-헥실아민, 메틸시클로헥실아민, 에틸시클로헥실아민, 디시클로헥실아민 등, 트리(시클로)알킬아민, 예컨대 디메틸에틸아민, 메틸디에틸아민, 트리에틸아민, 디메틸 n-프로필아민, 디에틸 n-프로필아민, 메틸 디 n-프로필아민, 에틸 디 n-프로필아민, 트리 n-프로필아민, 트리 i-프로필아민, 트리 n-부틸아민, 트리 i-부틸아민, 트리 s-부틸아민, 트리 t-부틸아민, 트리 n-펜틸아민, 트리 n-헥실아민, 디메틸시클로헥실아민, 디에틸시클로헥실아민, 메틸디시클로헥실아민, 에틸디시클로헥실아민, 트리시클로헥실아민 등, 모노(시클로)알칸올아민, 예컨대 2-아미노에탄올, 3-아미노-1-프로판올, 1-아미노-2-프로판올, 4-아미노-1-부탄올, 5-아미노-1-펜탄올, 6-아미노-1-헥산올, 4-아미노-1-시클로헥산올 등, 디(시클로)알칸올아민, 예컨대 디에탄올아민, 디 n-프로판올아민, 디 i-프로판올아민, 디 n-부탄올아민, 디 i-부탄올아민, 디 n-펜탄올아민, 디 n-헥산올아민, 디(4-시클로헥산올)아민 등, 트리(시클로)알칸올아민, 예컨대 트리에탄올아민, 트리 n-프로판올아민, 트리 i-프로판올아민, 트리 n-부탄올아민, 트리 i-부탄올아민, 트리 n-펜탄올아민, 트리 n-헥산올아민, 트리(4-시클로헥산올)아민 등, 아미노(시클로)알칸디올, 예컨대 3-아미노-1,2-프로판디올, 2-아미노-1,3-프로판디올, 4-아미노-1,2-부탄디올, 4-아미노-1,3-부탄디올, 4-아미노-1,2-시클로헥산디올, 4-아미노-1,3-시클로헥산디올, 3-디메틸아미노-1,2-프로판디올, 3-디에틸아미노-1,2-프로판디올, 2-디메틸아미노-1,3-프로판디올, 2-디에틸아미노-1,3-프로판디올 등, 아미노기 함유 시클로알칸메탄올, 예컨대 1-아미노시클로펜탄온메탄올, 4-아미노시클로펜탄온메탄올, 1-아미노시클로헥산온메탄올, 4-아미노시클로헥산온메탄올, 4-디메틸아미노시클로펜탄메탄올, 4-디에틸아미노시클로펜탄메탄올, 4-디메틸아미노시클로헥산메탄올, 4-디에틸아미노시클로헥산메탄올 등, 아미노카르복실산, 예컨대 β-알라닌, 2-아미노부티르산, 3-아미노부티르산, 4-아미노부티르산, 2-아미노이소부티르산, 3-아미노이소부티르산, 2-아미노발레르산, 5-아미노발레르산, 6-아미노카프론산, 1-아미노시클로프로판카르복실산, 1-아미노시클로헥산카르복실산, 4-아미노시클로헥산카르복실산 등, 방향족 아민, 예컨대 아닐린, o-메틸아닐린, m-메틸아닐린, p-메틸아닐린, p-에틸아닐린, p-n-프로필아닐린, p-i-프로필아닐린, p-n-부틸아닐린, p-t-부틸아닐린, 1-나프틸아민, 2-나프틸아민, N,N-디메틸아닐린, N,N-디에틸아닐린, p-메틸-N,N-디메틸아닐린 등, 아미노벤질 알콜, 예컨대 o-아미노벤질 알콜, m-아미노벤질 알콜, p-아미노벤질 알콜, p-디메틸아미노벤 질 알콜, p-디에틸아미노벤질 알콜 등, 아미노페놀, 예컨대 o-아미노페놀, m-아미노페놀, p-아미노페놀, p-디메틸아미노페놀, p-디에틸아미노페놀 등, 아미노벤조산, 예컨대 m-아미노벤조산, p-아미노벤조산, p-디메틸아미노벤조산, p-디에틸아미노벤조산 등, 그리고 다른 산을 들 수 있다. 상기 경화제는 패턴형성을 위한 공정에 있어서 현상 후 후굽기처리에 의해 바인더 중합체와의 가교결합으로 인해 착색패턴을 경화시켜 그것의 기계적 강도를 향상시키는데 사용된다. 상기 경화제는 후굽기에 의해 바인더 중합체 내의 카르복실기와 반응하여 바인더 중합체를 가교 결합시킬 수 있는 화합물이고, 그의 예로는 에폭시 화합물, 옥세탄 화합물을 들 수 있다.Examples of the other polymer include polyvinyl alcohol, polyacrylic acid, polyethylene glycol monoalkyl ether, and polyfluoroalkyl acrylate. Examples of the surfactant include a polyester polymer dispersant, an acrylic polymer dispersant, a polyurethane polymer dispersant, a cationic surfactant, an anionic surfactant, and a nonionic surfactant. These surfactants may be used alone or in combination of two or more Used in combination. The pigment dispersant is contained in an amount of 0.01 part by weight or more, preferably 0.05 part by weight or more, based on 1 part by weight of the colorant. Examples of the adhesion promoter include vinyltrimethoxysilane, vinyltriethoxysilane, vinyltris (2-methoxyethoxy) silane, N- (2-aminoethyl) -3-aminopropylmethyldimethoxysilane, N- Aminopropyltrimethoxysilane, 3-aminopropyltriethoxysilane, 3-glycidoxypropyltrimethoxysilane, 3-glycidoxypropylmethyldimethoxysilane, 2- ( 3-chloropropylmethyldimethoxysilane, 3-chloropropyltrimethoxysilane, 3-methacryloxypropyltrimethoxysilane, 3-mercaptopropyltrimethoxysilane, 3- Ethoxy silane, and the like. Examples of the antioxidant include 2,2-thiobis (4-methyl-6-t-butylphenol), 2,6-di-t-butylphenol and the like. Examples of the ultraviolet absorber include 2- (3-t-butyl-5-methyl-2-hydroxyphenyl) -5-chlorobenzotriazole and alkoxybenzophenone. Examples of the anti-aggregation agent include sodium polyacrylate and the like. Examples of the organic acid include aliphatic monocarboxylic acids such as formic acid, acetic acid, propionic acid, butyric acid, valeric acid, pivalic acid, capronic acid, diethylacetic acid, enanthic acid, caprylic acid, etc., aliphatic dicarboxylic acids Such as oxalic acid, malonic acid, succinic acid, glutaric acid, adipic acid, pimelic acid, suberic acid, azelaic acid, sebacic acid, brassylic acid, methylmalonic acid, ethylmalonic acid, dimethylmalonic acid, Aliphatic tricarboxylic acids such as tricarboxylic acid, aconitic acid, camphoronic acid, etc., such as methylsuccinic acid, tetramethylsuccinic acid, cyclohexanedicarboxylic acid, itaconic acid, citraconic acid, maleic acid, , Aromatic monocarboxylic acids such as benzoic acid, toluic acid, cumenic acid, hemelitic acid and mesitylenic acid, aromatic dicarboxylic acids, phthalic acid, isophthalic acid and terephthalic acid, aromatic polycarboxylic acids such as trimellitic acid, Trieste, Melodic acid, pyromellitic acid, and the like, and other acids. Examples of the organic amino compound include mono (cyclo) alkylamines such as n-propylamine, i-propylamine, n-butylamine, i-butylamine, s-butylamine, heptylamine, n-octylamine, n-nonylamine, n-decylamine, n-undecylamine, n-dodecylamine, cyclohexylamine, 2-methylcyclohexylamine, 3- Methylcyclohexylamine, 4-methylcyclohexylamine and the like, di (cyclo) alkylamines such as methylethylamine, diethylamine, methylnopropylamine, ethylnopropylamine, di- Butylamine, di-n-butylamine, di-n-pentylamine, di-n-hexylamine, methylcyclohexylamine, ethylcyclohexylamine, dicyclopentylamine (Cyclo) alkylamines such as dimethylethylamine, methyldiethylamine, triethylamine, dimethyl n-propylamine, diethyl n-propylamine, methyl propylamine, tri-n-butylamine, tri-i-butylamine, tri-s-butylamine, tri-t-butylamine, tri Mono (cyclo) alkanolamines such as pentylamine, trihexylamine, dimethylcyclohexylamine, diethylcyclohexylamine, methyldicyclohexylamine, ethyldicyclohexylamine and tricyclohexylamine, Amino-1-pentanol, 6-amino-1-hexanol, 4-amino-1-butanol, -Cyclohexanol, di (cyclo) alkanolamines such as diethanolamine, di-propanolamine, di-propanolamine, di-n-butanolamine, di-butanolamine, di- Tri (cyclo) alkanolamines such as triethanolamine, tri-n-propanolamine, tri-i-propanol Amino (cyclo) alkanediols such as triethanolamine, tri-n-butanolamine, tri-n-pentanolamine, Amino-1,2-butanediol, 4-amino-1, 3-butanediol, 4-amino-1,2-cyclohexanediol 1,3-cyclohexanediol, 3-dimethylamino-1,2-propanediol, 3-diethylamino-1,2-propanediol, 2-dimethylamino- 2-diethylamino-1,3-propanediol, and the like, amino group-containing cycloalkane methanol such as 1-aminocyclopentanone methanol, 4-aminocyclopentanone methanol, 1-aminocyclohexanone methanol, 4-aminocyclohexane Dimethylaminocyclopentanemethanol, 4-dimethylaminocyclopentanemethanol, 4-dimethylaminocyclopentanemethanol, 4-dimethylaminocyclohexanemethanol and 4-diethylaminocyclohexanemethanol, aminocarboxylic acid, Aminobutyric acid, 2-aminobutyric acid, 3-aminoisobutyric acid, 2-aminobutyric acid, 5-aminobutyric acid, 6-aminocaproic acid, Aminocyclohexanecarboxylic acid, and 4-aminocyclohexanecarboxylic acid; aromatic amines such as aniline, o-methylaniline, m-methylaniline, p-methylaniline, p N-dimethylaniline, N, N-diethylaniline, N, N-dimethylaniline, N, N-dimethylaniline, aminobenzyl alcohol, m-aminobenzyl alcohol, p-aminobenzyl alcohol, p-dimethylaminobenzyl alcohol, p-diethylaminobenzyl alcohol, Alcohols and the like, aminophenols such as o-aminophenol, m-aminophenol, p-aminophenol, p-dimethylaminophenol, p -Diethylaminophenol, aminobenzoic acids such as m-aminobenzoic acid, p-aminobenzoic acid, p-dimethylaminobenzoic acid, p-diethylaminobenzoic acid and the like, and other acids. The curing agent is used in the process for pattern formation to improve its mechanical strength by curing the coloring pattern due to crosslinking with the binder polymer by post-development baking treatment. The curing agent is a compound capable of reacting with a carboxyl group in the binder polymer by post-baking to crosslink the binder polymer, and examples thereof include an epoxy compound and an oxetane compound.
상기 에폭시 화합물의 예로는 에폭시 수지인 비스페놀 A계 에폭시 수지, 수소화 비스페놀 A계 에폭시 수지, 베스페놀 F계 에폭시 수지, 수소화 비스페놀 F계 에폭시 수지, 노볼락계 에폭시 수지, 다른 방향족계 예폭시 수지, 지환족계 에폭시 수지, 복소환족계 에폭시 수지, 글리시딜 에스테르계 수지, 글리시딜아민계 수지, 에폭시화 오일 등을 들 수 있다. 또한, 상기 에폭시 수지의 브롬화 유도체; 에폭시 수지 및 이것의 브롬화 유도체를 제외한 다른 지방족계, 지환족계 또는 방향족계 에폭시 화합물; 부타디엔의 (공)중합체의 에폭시화 물질, 이소프렌의 (공)중합체의 에폭시화 물질, 글리시딜 (메타)아크릴레이트의 (공)중합체, 트리글리시딜 이소시아누레이트 등을 들 수 있다.Examples of the epoxy compound include epoxy resins such as bisphenol A epoxy resin, hydrogenated bisphenol A epoxy resin, bisphenol F epoxy resin, hydrogenated bisphenol F epoxy resin, novolac epoxy resin, Based epoxy resins, heterocyclic epoxy resins, glycidyl ester-based resins, glycidylamine-based resins, and epoxidized oils. Brominated derivatives of the above epoxy resins; Aliphatic, alicyclic or aromatic epoxy compounds other than epoxy resins and brominated derivatives thereof; An epoxidation material of (co) polymer of butadiene, an epoxidation material of (co) polymer of isoprene, (co) polymer of glycidyl (meth) acrylate, and triglycidyl isocyanurate.
상기 옥세탄 화합물의 예로는 카르보네이트 비스옥세탄, 크실렌 비스옥세탄, 아디페이트 비스옥세탄, 테레프탈레이트 비스옥세탄, 시클로헥산디카르복실산 비스옥세탄 등을 들 수 있다.Examples of the oxetane compound include carbonate bisoxetane, xylene bisoxetane, adipate bisoxetane, terephthalate bisoxetane, and cyclohexanedicarboxylic acid bisoxetane.
본 발명의 착색감광성수지조성물은 에폭시 화합물 내의 에폭시기 및 옥세탄 화합물 내의 옥세탄 골격의 개환 중합을 일으킬 수 있는 화합물을 경화제와 함게 함유할 수 있다. 이러한 화합물로서는, 예를 들면 다가 카르복실산, 다가 카르복실산 무수물, 산 발생제 등을 들 수 있다.The colored photosensitive resin composition of the present invention may contain a compound capable of causing ring-opening polymerization of an oxetane skeleton in an epoxy compound and an oxetane compound in an epoxy compound together with a curing agent. Examples of such compounds include polycarboxylic acids, polycarboxylic acid anhydrides, acid generators, and the like.
상기 다가 카르복실산의 예로는 방향족계 다가 카르복실산인 프탈산, 3,4-디메틸프탈산, 이소프탈산, 테레프탈산, 피로멜리트산, 트리메틸리트산, 1,4,5,8-나프탈렌테트라카르복실산, 3,3',4,4'-벤조페논테트라카르복실산 등을 들 수 있다. 상기 지방족계 다가 카르복실산인 숙신산, 글루타르산, 아디프산, 1,2,3,4-부탄테트라카르복실산, 말레산, 푸말산, 이타콘산 등, 지환족계 다가 카르복실산, 예컨대 헥사히드로프탈산, 3,4-디메틸테트라히드로프탈산, 헥사히드로이소프탈산, 헥사히드로테레프탈산, 1,2,4-시클로펜탄트리카르복실산, 1,2,4-시클로헥산트리카르복실산, 시클로펜탄테트라카르복실산, 1,2,4,5-시클로헥산테트라카르복실산 등을 들 수 있고, 다른 산을 들 수 있다.Examples of the polyvalent carboxylic acid include aromatic polycarboxylic acids such as phthalic acid, 3,4-dimethylphthalic acid, isophthalic acid, terephthalic acid, pyromellitic acid, trimethylic acid, 1,4,5,8-naphthalenetetracarboxylic acid, 3,3 ', 4,4'-benzophenonetetracarboxylic acid, and the like. Alicyclic polyvalent carboxylic acids such as succinic acid, glutaric acid, adipic acid, 1,2,3,4-butanetetracarboxylic acid, maleic acid, fumaric acid and itaconic acid, which are aliphatic polycarboxylic acids, Hydroxycarboxylic acid, 1,2,4-cyclohexanetricarboxylic acid, cyclopentanetetracarboxylic acid, 1,2,4-cyclohexanetricarboxylic acid, 1,2-cyclohexanetricarboxylic acid, Carboxylic acid, 1,2,4,5-cyclohexanetetracarboxylic acid and the like, and other acids can be mentioned.
상기 다가 카르복실산 무수물의 예로는 방향족계 다가 카르복실산 무수물인 프탈산 무수물, 피로멜리트산 무수물, 트리멜리트산 무수물, 3,3',4,4'-벤조페논테트라카르복실산 이무수물 등, 지방족계 다가 카르복실산 무수물, 예컨대 이타콘산 무수물, 숙신산 무수물, 시트라콘산 무수물, 도데세닐숙신산 무수물, 트리카르발릴산 무수물, 말레산 무수물, 1,2,3,4-부탄테트라카르복실산 이무수물 등을 들 수 있고, 지환족계 다가 카르복실산 무수물인 헥사히드로프탈산 무수물, 3,4-디메 틸테트라히드로프탈산 무수물, 1,2,4-시클로펜탄트리카르복실산 무수물, 1,2,4-시클로헥산트리카르복실산 무수물, 시클로펜탄테트라카르복실산 이무수물, 1,2,4,5-시클로헥산 테트라카르복실산 이무수물, 힘산 무수물(hymic anhydride), 나드산 무수물 등, 에스테르기 함유 카르복실산 무수물, 예컨대 에틸렌 글리콜 비스트리멜리트산, 글리세린 트리스트리멜리트산 무수물 등을 들 수 있고, 다른 산을 들 수 있다.Examples of the polycarboxylic acid anhydrides include aromatic polycarboxylic anhydrides such as phthalic anhydride, pyromellitic anhydride, trimellitic anhydride, 3,3 ', 4,4'-benzophenonetetracarboxylic acid dianhydride, Aliphatic polycarboxylic acid anhydrides such as itaconic anhydride, succinic anhydride, citraconic anhydride, dodecenylsuccinic anhydride, tricarbalic anhydride, maleic anhydride, 1,2,3,4-butanetetracarboxylic acid dianhydride Water and the like, and examples thereof include hexahydrophthalic anhydride which is an alicyclic polycarboxylic anhydride, 3,4-dimethyltetrahydrophthalic anhydride, 1,2,4-cyclopentanetricarboxylic anhydride, 1,2,4 Cyclohexanetricarboxylic acid dianhydride, cyclic pentanetricarboxylic acid dianhydride, 1,2,4,5-cyclohexanetetracarboxylic acid dianhydride, hymic anhydride, nadic anhydride, etc., ester group-containing Carboxylic acid Anhydrides such as ethylene glycol bistrimellitic acid and glycerin tristrimellitic acid anhydride, and other acids.
상기 에폭시 수지 경화제로서 상업적으로 이용 가능한 것들을 사용할 수 있다. 상업적으로 이용 가능한 에폭시 수지 경화제는, 예를 들면 '아데카 경화제 EH-700(Adeka Hardener EH-700)'(상품명, 아사히 덴카 고교 가부시키가이샤 제품), '라카시드(Rickacid) HH'(상품명, 뉴 저팬 케미칼 컴파니 리미티드 제품), 'MH-700'(상품명, 뉴 저팬 케미칼 리미티드 제품) 등을 들 수 있다. Commercially available ones as the epoxy resin curing agent may be used. Commercially available epoxy resin curing agents include, for example, 'Adeka Hardener EH-700' (trade name, available from Asahi Denka Kogyo K.K.) and 'Rickacid HH' (trade name, New Japan Chemical Co., Ltd.) and 'MH-700' (New Japan Chemical Co., Ltd.).
상기 경화제는 각각 단독으로 또는 2종 이상을 사용할 수 있다. These curing agents may be used alone or in combination of two or more.
상기 (F)첨가제는 착색제와 용매의 조성물 내에 용액의 형태로 포함될 수 있으면 그 혼합물에 미리 용해시킬 수 있다. 일반적으로, 상기 (F)첨가제는 상기 (B)바인더 중합체, (C)광중합성 화합물 및 (D)광중합 개시제와 미리 혼합된다.The (F) additive may be previously dissolved in the mixture if it can be contained in the form of a solution in a composition of a colorant and a solvent. Generally, the (F) additive is premixed with (B) the binder polymer, (C) the photopolymerizable compound and (D) the photopolymerization initiator.
본 발명의 착색감광성수지조성물은 고해상도 및 고감도, 넓은 마진을 달성하는데 유리하며, 밀착성이 우수하기 때문에 컬러필터를 구성하는 착색패턴을 형성하는 원료로써 유용하다.The colored photosensitive resin composition of the present invention is advantageous for achieving high resolution, high sensitivity and wide margin, and is excellent in adhesion, and therefore is useful as a raw material for forming a coloring pattern constituting a color filter.
2. 착색감광성수지조성물의 제조방법2. Manufacturing method of colored photosensitive resin composition
본 발명의 착색감광성수지조성물의 제조방법의 일실시예를 설명한다.One embodiment of the method for producing the colored photosensitive resin composition of the present invention will be described.
우선, 상기 (A)착색제를 상기 (E)용매에 포함시키고, 상기 (A)착색제가 포함된 용매에 상기 (B)바인더 중합체, 상기 (C)광중합성 화합물, 및 상기 (D)광중합 개시제를 포함시켜 본 발명의 착색감광성수지조성물을 제조할 수 있다. 상기 (A)착색제는 상기 (E)용매에 용해되거나 분산된 상태로 존재할 수 있다. 또한, 상기 (F)첨가제로 안료분산제를 더 포함시킬 수 있는데, 상기 안료분산제가 용액의 형태로 존재할 수 있으면, 미리 포함시킬 수 있다.The binder polymer (B), the photopolymerizable compound (C), and the photopolymerization initiator (D) are added to the solvent containing the colorant (A) in the solvent (E) To thereby prepare the colored photosensitive resin composition of the present invention. The colorant (A) may be dissolved or dispersed in the solvent (E). In addition, the (F) additive may further include a pigment dispersant, which may be included in advance if the pigment dispersant can be present in the form of a solution.
또한, 본 발명의 착색감광성수지조성물의 제조방법의 다른 실시예를 설명한다.Further, another embodiment of the method for producing the colored photosensitive resin composition of the present invention will be described.
상기 용매(E)의 일부에 상기 (A)착색제가 포함시켜 제 1 혼합물을 제조한다. 상기 (E)용매의 나머지에 상기 (B)바인더 중합체, 상기 (C)광중합성 화합물, 및 상기 (D)광중합 개시제를 포함시켜 제 2 혼합물을 제조한다. 상기 제 1 혼합물에 상기 제 2 혼합물을 포함시키거나, 상기 제 2 혼합물에 상기 제 1 혼합물을 포함시켜 본 발명의 착색감광성수지조성물을 제조할 수 있다.A first mixture is prepared by incorporating the colorant (A) in a part of the solvent (E). A second mixture is prepared by adding the binder polymer (B), the photopolymerizable compound (C), and the photopolymerization initiator (D) to the remainder of the solvent (E). The colored photosensitive resin composition of the present invention can be prepared by incorporating the second mixture into the first mixture or by incorporating the first mixture into the second mixture.
3. 착색감광성수지조성물의 패턴형성방법3. Pattern formation method of colored photosensitive resin composition
도 1 내지 도 9는 본 발명에 의한 착색감광성수지조성물의 패턴형성방법의 일례인 컬러필터의 제조방법을 설명한 도면이다.1 to 9 are diagrams for explaining a method for producing a color filter which is an example of a pattern forming method of the colored photosensitive resin composition according to the present invention.
도 1을 참조하면, 유리 또는 실리콘 웨이퍼로 이루어진 기판(2)을 제공하 고, 상기 기판(2) 상에 본 발명의 착색감광성수지조성물을 이용하여 제 1 착색감광성수지층(1)을 형성한다. 상기 기판(2)이 실리콘 웨이퍼인 경우, 전하결합소자(CCD) 및 상보성 금속 산화막 반도체 이미지 센서(CIS) 등을 상기 실리콘 웨이퍼의 표면 상에 형성할 수 있다. 상기 제 1 착색감광성수지층(1)은 예를 들면 용매(F)에 의해 희석된 착색감광성수지조성물을 스핀, 슬릿후 스핀, 슬릿, 잉크젯 방식 등의 코팅법에 의해 기판 상에 도포하여 형성할 수 있다. 또한, 상기 용매(E) 등과 같은 휘발성 성분들을 휘발시키기 위하여 소프트 베이크(soft-bake)를 수행할 수 있다. Referring to FIG. 1, a substrate 2 made of glass or a silicon wafer is provided, and a first colored photosensitive resin layer 1 is formed on the substrate 2 using the colored photosensitive resin composition of the present invention . When the substrate 2 is a silicon wafer, a charge coupled device (CCD) and a complementary metal oxide semiconductor image sensor (CIS) may be formed on the surface of the silicon wafer. The first colored photosensitive resin layer 1 is formed by coating a colored photosensitive resin composition diluted with a solvent F on a substrate by a coating method such as spin, slit, spin, slit, or inkjet method . In addition, a soft-bake may be performed to volatilize the volatile components such as the solvent (E).
도 2를 참조하면, 상기 제 1 착색감광성수지층(1)을 포토마스크(3)를 이용하여 자외선, 예컨대 i라인(파장: 436 nm), KrF-Eximer(파장: 248 nm) 등의 광선(4)에 선택적으로 노출시킨다. 2, the first colored photosensitive resin layer 1 is irradiated with ultraviolet light such as i-line (wavelength: 436 nm) or KrF-Eximer (wavelength: 248 nm) using a photomask 3 4).
여기서, 상기 포토마스크(3)는 광선(4)을 차폐하는 차광층(32)과 광선(4)을 투과하는 투광부(33)를 포함하는 유리판(31)을 제공함으로써 형성될 수 있다. 상기 투광부(33)의 패턴에 따라, 상기 착색감광성수지층(1)을 노광할 수 있다. 상기 광의 조사량은 사용된 (B)바인더 중합체의 유형 및 함유량, (A)착색제의 컬러 및 함유량, (C)광중합성 화합물의 유형 및 함유량, (D)광중합 개시제의 유형 및 함유량 등에 따라 적절히 선택한다. 상기 착색감광성수지층을 노광한 후, 노광 후 굽기(post exposure bake: PEB)를 수행할 수 있다.Here, the photomask 3 may be formed by providing a glass plate 31 including a light-shielding layer 32 for shielding the light ray 4 and a light-transmitting portion 33 for transmitting the light ray 4. The colored photosensitive resin layer 1 can be exposed according to the pattern of the transparent portion 33. [ The dose of the light is appropriately selected depending on the type and content of the binder polymer (B), the color and the content of the colorant (C), the type and content of the photopolymerizable compound (D), the type and content of the photopolymerization initiator . After the colored photosensitive resin layer is exposed, post exposure bake (PEB) may be performed.
도 3을 참조하면, 상기 노광된 제 1 착색감광성수지층(1)을 현상하여 제 1 착색패턴(5)을 형성한다. 상기 현상은 침지법으로 수행될 수 있으며, 상기 침지법 에 사용되는 현상제로서는 예를 들면 알칼리 화합물, 예컨대 탄산나트륨, 수산화나트륨, 수산화칼륨, 탄산칼륨, 수산화테트라메틸암모늄 등의 수용액을 들 수 있다. 이때, 상기 현상에 의해 형성된 제 1 착색패턴(5)은 상기 제 1 착색감광성수지층(1)의 노광 영역(12)이다. 또한, 현상 후에는 기판을 세정하고, 건조시킬 수 있다. 이어서, 건조 후에는 하드 베이크(hard bake)를 실시할 수도 있다. 상기 하드 베이크에 의해, 상기 제 1 착색패턴(5)이 경화되고, 기계적 강도가 향상된다. 상기 하드 베이크를 수행할 때의 온도는 보통 180℃ 이상, 바람직하게는 200℃ 내지 250℃이다. Referring to FIG. 3, the exposed first colored photosensitive resin layer 1 is developed to form a first
도 4를 참조하면, 상기 제 1 착색패턴(5)이 형성된 기판(2) 상에 본 발명의 착색감광성수지조성물을 이용한 제 2 착색감광성수지층(1')을 형성한다.Referring to FIG. 4, a second colored photosensitive resin layer 1 'using the colored photosensitive resin composition of the present invention is formed on a substrate 2 having the first
도 5를 참조하면, 도 2의 설명과 동일하게 상기 제 2 착색감광성수지층(1')을 선택적으로 노광한다.Referring to FIG. 5, the second colored photosensitive resin layer 1 'is selectively exposed in the same manner as in FIG.
도 6을 참조하면, 상기 선택적으로 노광된 제 2 착색감광성수지층(1')을 현상하여, 제 2 착색패턴(5')를 형성한다. 현상공정에서 사용되는 현상제는 도 1c에 대한 설명에서 상술하였으므로 생략한다. 여기서, 상기 제 2 착색패턴(5')는 상기 제 1 착색패턴(5)과 서로 다른 색을 나타낸다.Referring to FIG. 6, the selectively exposed second colored photosensitive resin layer 1 'is developed to form a second colored pattern 5'. The developer used in the developing process has been described in detail with reference to FIG. 1C and therefore will not be described. Here, the second coloring pattern 5 'has a different color from the
도 7을 참조하면, 상기 제 1 및 제 2 착색패턴(5, 5')이 형성된 기판 상에 제 3 착색감광성수지층(1")을 형성한다. 상기 제 3 착색감광성수지층(1")의 형성방법은 상기 제 1 및 제 2 착색감광성수지층(1, 1')의 형성방법과 동일하다.7, a third colored photosensitive resin layer 1 "is formed on a substrate on which the first and second
도 8을 참조하면, 상기 제 3 착색감광성수지층(1")를 선택적으로 노광한 다. 상기 노광방법은 상술하였으므로 생략한다.8, the third colored photosensitive resin layer 1 "is selectively exposed. Since the above-mentioned exposure method has been described above, it will be omitted.
도 9를 참조하면, 상기 노광된 제 3 착색감광성수지층(1")을 현상하여 제 3 착색패턴(5")을 형성한다. 이 때, 상기 제 3 착색패턴(5")는 상기 제 1 및 제 2 착색패턴(5, 5')와 서로 상이한 색을 나타낸다.Referring to Fig. 9, the exposed third colored photosensitive resin layer 1 "is developed to form a third
도 10 및 도 11은 도 1 내지 도 9에서 도시된 방법으로 제조된 색화소를 나타낸 도면이다.Figs. 10 and 11 are views showing color pixels manufactured by the method shown in Figs. 1 to 9. Fig.
도 10을 참조하면, 모자이크형 컬러필터를 포함하는 색화소를 나타내고, 도 11을 참조하면, 스트라이프 매트릭스형 컬러필터를 포함하는 색화소를 나타낸다.Referring to Fig. 10, a color pixel including a mosaic color filter is shown. Referring to Fig. 11, a color pixel including a stripe-matrix color filter is shown.
이하, 실시예를 참조하여 본 발명을 보다 상세히 설명하고자 하나, 본 발명이 이들 실시예에 의해 한정되는 것은 아니다.Hereinafter, the present invention will be described in more detail with reference to Examples, but the present invention is not limited by these Examples.
합성예 1: 고분지화(Hyperbranched) 폴리에스테르 아마이드 아크릴레이트 C-2 합성Synthesis Example 1: Hyperbranched polyester amide Acrylate C-2 Synthesis
온도계가 설치된 아조 트로픽 냉각 콘텐서와 교반장치, 온도조절장치가 장착된 1L 반응기에 165.16g의 디이소프로판올 아민(제조사: 머크), 139.25g의 숙시닉 안하이드라이드(Succinic anhydride, 제조사: 머크)를 반응기에 투입하고 140℃까지 승온하였다. 140℃에서 축합 탈수물이 빠져나오기 시작하며, 아조트로픽 콘덴서의 온도가 50℃ 이하로 떨어지면 반응기의 온도를 10℃씩 승온하여 180℃까지 반응온도를 올렸다. 반응온도 180℃에서 더 이상 콘덴서 온도가 상승하지 않으면 톨 루엔 80g를 투입 축합반응을 정반응으로 유도하였으며, 탈수물이 18.02g 나온 후 반응을 종결하고 상온으로 온도를 내렸다. 119.14g의 아크릴산(제조사: 엘지화학), 200g의 톨루엔, 2.5g의 파라 톨루엔 설폰닉 엑시드, 0.04g의 나이트로 벤젠, 0.4g의 부틸산화 히드록시 톨루엔(제조사: 이스트만사, 상품명: BHT)을 투입하고 에어 버블링 하면서 톨루엔의 끓는점까지 온도를 승온하여 에스터 축합반응을 다시 진행하였다. 탈수물이 29.8g 나오면 반응을 중단하고 반응물을 분류장치에 투입하고 증류수 500g으로 1차 세척을 한 후 반응물을 교반하면서 10% 수산화 나트륨 수용액을 pH 6 내지 7이 되도록 투입하여 미반응 아크릴산을 제거하였다. 5% 소금물을 500g을 투입하여 다시 한번 반응물을 정제한 후, 50g의 마그네슘 설페이드를 투입 잔존하는 수분을 제거하였으며, 이를 다시 여과지를 이용하여 필터하여 남아있는 고체 물질을 제거하였다. 제조된 결과물을 1리터 반응기에 투입 후 메톡시 페놀(제조사: 이스트만사, 상품명: HQMME) 0.2중량부 투입하고 교반하면서 온도 60℃, 1000미리바의 압력으로 톨루엔을 제거하여 고분지화(Hyperbranched) 폴리에스테르 아마이드 아크릴 올리고머를 제조하였다. 165.16 g of diisopropanolamine (manufacturer: Merck) and 139.25 g of succinic anhydride (Merck, manufacturer) were added to a 1 L reactor equipped with an azototropic cooling condenser equipped with a thermometer, a stirrer and a temperature controller And the temperature was raised to 140 캜. The condensed dehydrate starts to escape at 140 ° C. When the temperature of the azototropic condenser drops to 50 ° C. or lower, the reactor temperature is increased by 10 ° C. to raise the reaction temperature to 180 ° C. When the condenser temperature did not rise at 180 ° C, 80 g of toluene was added to the reaction mixture, and 18.02 g of dehydrated product was obtained. The reaction was terminated and the temperature was lowered to room temperature. (Manufactured by Eastman Chemical Co., Ltd., trade name: BHT) in an amount of 119.14 g of acrylic acid (manufactured by LG Chemie), 200 g of toluene, 2.5 g of para toluenesulfonic acid, 0.04 g of nitrobenzene and 0.4 g of butylated hydroxytoluene And the temperature was raised to the boiling point of toluene while air bubbling was carried out to carry out the ester condensation reaction again. When 29.8 g of dehydrated water was obtained, the reaction was stopped. The reaction mixture was put into a fractionator and washed with 500 g of distilled water. The reaction mixture was stirred while 10% sodium hydroxide aqueous solution was added thereto to a pH of 6 to 7 to remove unreacted acrylic acid . 500 g of 5% brine was added to purify the reaction substance again, and then 50 g of magnesium sulfide was added to remove residual moisture. The remaining water was removed by filtration using a filter paper. 0.2 parts by weight of methoxyphenol (manufactured by Eastman Corporation, trade name: HQMME) was added and the toluene was removed at a temperature of 60 ° C and a pressure of 1,000 mbar while stirring to obtain a hyperbranched poly Ester amide acrylic oligomer was prepared.
실시예1 내지 실시예 8, 비교예1 및 비교예2: 착색감광성수지조성물의 제조Examples 1 to 8, Comparative Examples 1 and 2: Preparation of colored photosensitive resin composition
표 1에 기재된 조성비로 착색제, 첨가제 및 용매를 포함하는 밀베이스를 수득하였다. 23℃에서 교반 하에서 밀베이스에 표 1에 기재된 조성비로 바인더 중합체, 광중합성 화합물, 광중합 개시제, 및 용매를 포함하는 혼합물을 1시간에 걸쳐 적가하여 착색감광성수지조성물을 제조하였다. 여기서, 용매를 제외한 모든 구 성요소는 고형분이다.A mill base containing a colorant, an additive and a solvent at a composition ratio shown in Table 1 was obtained. A mixture containing a binder polymer, a photopolymerizable compound, a photopolymerization initiator and a solvent was added dropwise over a period of one hour to the mill base at 23 占 폚 under stirring to prepare a colored photosensitive resin composition. Here, all components except solvent are solid.
(중량부)coloring agent
(Parts by weight)
(중량부)Binder polymer
(Parts by weight)
(중량부)Photopolymerizable compound
(Parts by weight)
(중량부)Photopolymerization initiator
(Parts by weight)
(중량부)menstruum
(Parts by weight)
(중량부)additive
(Parts by weight)
=6.305.23 / 1.07
= 6.30
=6.305.23 / 1.07
= 6.30
=5.033.77 / 1.26
= 5.03
=6.305.23 / 1.07
= 6.30
=5.032.52 / 2.51
= 5.03
=6.305.23 / 1.07
= 6.30
=5.031.26 / 3.77
= 5.03
=6.305.23 / 1.07
= 6.30
=6.305.23 / 1.07
= 6.30
=6.294.72 / 1.57
= 6.29
=6.305.23 / 1.07
= 6.30
=6.293.15 / 3.14
= 6.29
=6.305.23 / 1.07
= 6.30
=6.291.57 / 4.72
= 6.29
=7.966.53 / 1.43
= 7.96
=7.966.53 / 1.43
= 7.96
A-1: 청색안료 (C.I. Pigment blue 15:6호)A-1: Blue pigment (CI Pigment blue 15: 6)
A-2: 자주색 안료(C.I. Pigment violet 23호)A-2: Purple pigment (CI Pigment violet No. 23)
B-1: 메타크릴산과 벤질 메타크릴레이트와의 공중합체(메타크릴산 단위와 벤질 메타크릴레이트 단위의 몰비: 3:7, 중량평균분자량: 25,000)B-1: Copolymer of methacrylic acid and benzyl methacrylate (molar ratio of methacrylic acid unit to benzyl methacrylate unit: 3: 7, weight average molecular weight: 25,000)
C-1: 디펜타에리스리톨 헥사아크릴레이트C-1: dipentaerythritol hexaacrylate
C-2: 합성예 1로 제조된 고분지화(Hyperbranched) 폴리에스테르 아마이드 아크릴레이트C-2: Hyperbranched polyester amide acrylate prepared in Synthesis Example 1
D-1: 광중합 개시제 이가큐어-907 (상품명, 제조사: 시바-가이기)D-1: Photopolymerization initiator IGACURE-907 (trade name, manufactured by Shiba-Kagi)
E-1: 프로필렌 글리콜 모노메틸 에테르 아세테이트E-1: Propylene glycol monomethyl ether acetate
F-1: 비이온계 안료분산제F-1: Non-ionic pigment dispersant
시험예: 착색감광성수지조성물의 성능 평가Test Example: Performance Evaluation of Colored Photosensitive Resin Composition
23℃의 청정실에서 유리 기판(제조사: 코닝사, 상품명: No.1737, 두께: 0.7㎜)의 표면 상에, 실시예1 내지 실시예8, 비교예1 및 비교예2의 착색감광성수지조성물을 스핀 코팅법에 의해서 도포하였다. 그 후, 90℃에서 90초간 건조시켜 휘발 성분을 휘발시켜서 착색감광성수지층을 형성하였다. 형성된 착색감광성수지층을 23℃로 냉각시킨 후, 포토마스크를 이용하여 선택적으로 i선(파장 365㎚)으로 노광하였다. 이 때, i선의 광원으로는 초고압 수은 램프를 사용하고 조사광량은 150mJ/㎠으로 하였다. 포토마스크로는, 라인 폭 1㎛, 2㎛, 3㎛, 4㎛, 5㎛, 6㎛, 7㎛, 8㎛, 9㎛, 10㎛, 20㎛, 30㎛, 40㎛, 50㎛ 및 100㎛를 갖는 라인 및 도트(dot)의 형태로 색화소를 형성하기 위한 포토마스크를 사용하였다.The colored photosensitive resin compositions of Examples 1 to 8 and Comparative Examples 1 and 2 were spun on the surface of a glass substrate (manufacturer: Corning, product name: No.1737, thickness: 0.7 mm) Coating method. Thereafter, the resultant was dried at 90 DEG C for 90 seconds to volatilize the volatile components to form a colored photosensitive resin layer. The colored photosensitive resin layer thus formed was cooled to 23 캜 and selectively exposed to i-line (wavelength: 365 nm) using a photomask. At this time, an ultra-high pressure mercury lamp was used as a light source of the i-line, and the irradiation light amount was set to 150 mJ / cm 2. As the photomask, a line width of 1 占 퐉, 2 占 퐉, 3 占 퐉, 4 占 퐉, 5 占 퐉, 6 占 퐉, 7 占 퐉, 8 占 퐉, 9 占 퐉, 10 占 퐉, 20 占 퐉, 30 占 퐉, A photomask for forming color pixels in the form of lines and dots having a diameter of 占 퐉 was used.
이어서, 상기 선택적으로 노광된 착색감광성수지층을 현상액인 수산화테트라메틸암모늄 0.04중량%를 포함하는 수용액에 23℃에서 침지하여 현상하였다. 그 후 순수한 물로 세정한 후, 220℃에서 90초간 후굽기하여 착색패턴을 형성하였다. 수득된 착색패턴의 두께는 0.8㎛, 최소 라인 폭(해상도)은 1㎛이었다. 수득된 착색패턴의 직선성과 잔사, 패턴 늘어짐을 관찰하여 하기 표 2에 기재하였다.Subsequently, the selectively exposed colored photosensitive resin layer was immersed in an aqueous solution containing 0.04% by weight of tetramethylammonium hydroxide as a developer at 23 占 폚. Thereafter, it was washed with pure water and then baked at 220 캜 for 90 seconds to form a colored pattern. The thickness of the obtained color pattern was 0.8 mu m, and the minimum line width (resolution) was 1 mu m. The linearity of the obtained coloring pattern and the residue and pattern sagging were observed and are shown in Table 2 below.
※ 패턴의 직선성> 1: 심한불량, 2: 불량, 3: 보통, 4: 양호, 5: 매우양호 ※ Linearity of pattern> 1: Severe defect, 2: Bad, 3: Normal, 4: Good, 5: Very good
※ 패턴의 늘어짐> 1: 심한불량, 2: 불량, 3: 보통, 4: 양호, 5: 매우양호※ Pattern sagging> 1: Severe defect, 2: Bad, 3: Normal, 4: Good, 5: Very good
도 1는 컬러필터 및 촬영소자의 제조공정 중, 공정이 적색-녹색-청색의 순서일 경우 기판 상에 착색감광성수지조성물(적색)로 도포된 것을 나타낸 도면이다.BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a diagram showing that a color photosensitive resin composition (red) is applied on a substrate when the steps are red-green-blue in the process of manufacturing a color filter and a photographic element.
도 2는 도 1의 기판에 포토마스크를 사용하여 빛을 선택적으로 통과시켜 노광 부위의 착색감광성수지조성물을 반응시키는 것을 나타낸 도면이다.FIG. 2 is a view showing that a colored photosensitive resin composition in an exposed portion is reacted by selectively passing light through a substrate using the photomask of FIG. 1.
도 3은 도 2의 기판의 미노광 부분을 현상액을 이용하여 제거하고 노광 부분이 남아 있는 것을 나타낸 도면이다.FIG. 3 is a view showing that the unexposed portion of the substrate of FIG. 2 is removed using a developing solution and the exposed portion remains.
도 4는 도 3의 기판이 착색감광성수지조성물(녹색)로 도포된 것을 나타낸 도면이다.Fig. 4 is a view showing that the substrate of Fig. 3 is coated with a colored photosensitive resin composition (green).
도 5는 도 4의 기판에 포토마스크를 사용하여 빛을 선택적으로 통과시켜 노광 부분에 착색감광성수지조성물을 반응시키는 것을 나타낸 도면이다.FIG. 5 is a view showing that a colored photosensitive resin composition is reacted with an exposed portion by selectively passing light through a substrate using the photomask of FIG. 4.
도 6는 도 5의 기판의 미노광 부분을 현상액을 이용하여 제거하고 노광 부분이 남아 있는 것을 나타낸 도면이다.FIG. 6 is a view showing that the unexposed portion of the substrate of FIG. 5 is removed using a developing solution and the exposed portion remains.
도 7는 도 6의 기판이 착색감광성수지조성물(청색)로 도포된 것을 나타낸 도면이다.Fig. 7 is a view showing that the substrate of Fig. 6 is coated with a colored photosensitive resin composition (blue).
도 8는 도 7의 기판에 포토마스크를 사용하여 빛을 선택적으로 통과시켜 노광 부분에 착색감광성수지조성물을 반응시키는 것을 나타낸 도면이다.FIG. 8 is a view showing that a colored photosensitive resin composition is reacted with an exposed portion by selectively passing light through a substrate using the photomask of FIG. 7; FIG.
도 9는 도 7의 기판의 미노광 부분을 현상액으로 이용하여 제거하고 노광 부분이 남아 있는 것을 나타낸 도면이다.FIG. 9 is a view showing that the unexposed portion of the substrate of FIG. 7 is removed using a developing solution and the exposed portion remains.
도 10는 모자이크 매트릭스형 컬러 필터를 나타낸 도면이다.10 is a view showing a mosaic matrix type color filter.
도 11은 스트라이프(stripe) 매트릭스형 컬러 필터를 나타낸 도면이다.11 is a diagram showing a stripe matrix type color filter.
<도면에 대한 부호 설명>[Description of the Drawings]
1: 제 1 착색감광성수지층 1': 제 2 착색감광성수지층1: first colored photosensitive resin layer 1 ': second colored photosensitive resin layer
1": 제 3 착색감광성수지층 2: 기판1 ": third colored photosensitive resin layer 2: substrate
3: 포토마스크 31: 유리판3: Photomask 31: Glass plate
32: 차광층 33: 투광부32: light shielding layer 33:
4: 광선 5: 제 1 착색패턴4: light ray 5: first coloring pattern
5': 제 2 착색패턴 5": 제 3 착색패턴5 ': second colored pattern 5' ': third colored pattern
5R: 적색 화소 5G: 녹색 화소5R: red pixel 5G: green pixel
5B: 청색 화소 6: 컬러필터5B: blue pixel 6: color filter
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