KR101672770B1 - Coating apparatus and coating method - Google Patents
Coating apparatus and coating method Download PDFInfo
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- KR101672770B1 KR101672770B1 KR1020100106082A KR20100106082A KR101672770B1 KR 101672770 B1 KR101672770 B1 KR 101672770B1 KR 1020100106082 A KR1020100106082 A KR 1020100106082A KR 20100106082 A KR20100106082 A KR 20100106082A KR 101672770 B1 KR101672770 B1 KR 101672770B1
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Abstract
Provided is a coating apparatus and a coating method which can improve productivity and can achieve a reduction in cost without increasing the size of the entire apparatus.
The coating apparatus has a pair of transfer pins 21, 22 for applying a paste-like coating agent P to the coated portion 20. And is alternately displaced from the state displacement means 25 to the first state and the second state. In the first state, the first transfer pin 21 corresponds to the upper side of the coating agent paste to which the paste-like coating agent P is adhered, and the second transfer pin 22 corresponds to the upper side of the coated portion 20. In the second state, the second transfer pin 22 corresponds to the upper side of the coating agent paste in which the paste-like coating agent P is held, and the first transfer pin 21 corresponds to the upper side of the receiving portion 20. The transfer pins 21 and 22 are moved in the vertical Z-axis direction in the first state and the second state by the Z-axis direction moving means.
Description
The present invention relates to a coating apparatus and a coating method.
In a semiconductor manufacturing apparatus, there is a step of applying a paste to a lead frame or the like. For this reason, conventionally, a transferring pin is used as a coating device for applying a paste (
This coating apparatus is provided with an
In this case, the first table 6 is provided with an L-
Next, a method of applying the paste to the work (coated portion) 13 using such a coating apparatus will be described. 12, the
10 and 11, it is necessary to reciprocate the
Therefore, it is possible to propose to shorten the working time by arranging two such devices. However, when the two units are installed, the entire apparatus becomes larger and the cost becomes higher.
It is also possible to provide a pair of transfer pins for transferring the coating agent to the donut portion, and to receive the coating agent from one transfer pin and to transfer the coating agent from the other transfer pin to the donated portion. For example, the transfer pin may be disposed at a position opposite to the rotational axis of the rotating body by 180 degrees.
In this case, when one rotary transfer pin is made to correspond to the paste tray and the other transferring pin is made to correspond to the rotary shaft, the rotating body is lowered so that one rotary transfer pin receives the rotary transfer agent, The coating agent can be transferred from the transfer pin on the side of the substrate to the substrate. When the rotating body is rotated to bring the other transferring pin into contact with the paste plate and one transferring pin is brought into correspondence with the receiving portion so that the rotating body is lowered, The coating agent can be transferred from the one transferring pin to the receiving portion simultaneously with the receiving operation.
As a result, it is possible to shorten the coating operation time as a whole. Incidentally, in such a coating operation, there is a case where the transfer pin is desired to be brought into contact with the to-be-exposed portion on the application side, or the transfer pin is not desired to be contacted. Further, there is a case where the transfer pin is desired to be deeply immersed in the paste on the side of the paste plate, or it is desired to be dipped into the paste in a shallow manner. However, since the upper and lower amounts of the pair of transfer pins are set to the same value, they can not cope with such needs.
SUMMARY OF THE INVENTION It is therefore an object of the present invention to provide a coating apparatus and a coating method capable of improving productivity in view of such a situation and achieving a reduction in cost as a whole of the apparatus. Another object of the present invention is to provide a coating apparatus capable of applying a coating agent with high accuracy in accordance with the amount of the coating agent to be used and the coating agent to be used.
A first coating device of the present invention is a coating device having a pair of transfer pins for applying a paste-like coating agent to a to-be-coated part, wherein the first transfer pin corresponds to the upper side of the coating agent paste part in which the paste- The first transfer pin corresponds to the upper side of the coated part and the second transfer pin corresponds to the upper side of the coating agent paste part in which the paste type coating agent is poured, And a Z-axis direction moving means for moving the transfer pins in the Z-axis direction in the vertical direction in the first state and the second state.
According to the application device of the present invention, the first state and the second state can be alternately displaced by the state displacement means. When the first transfer pin corresponds to the upper side of the coating agent layer, the second transfer pin is positioned above the coated portion. When the second transfer pin corresponds to the upper side of the coating agent layer, As shown in FIG. The first transfer pin (or the second transfer pin) can receive the coating agent from the coating agent superimposed portion by lowering the transfer pins in the first state or the second state through the Z-axis direction moving means, The coating agent can be transferred from the pin (or the first transfer pin) to the to-be-coated portion of the work. That is, the coating agent can be applied to the other transfer pins while receiving the coating agent from the coating agent paste in one transfer pin. Therefore, it is possible to improve the workability twice as much as that of the conventional apparatus.
The state displacement means is provided in a displacement stage which is an XYZ stage, and the Z-axis direction moving means can be constituted by a Z-axis direction moving mechanism of the displacement stage. With this structure, the state displacement means can be moved in the vertical direction by the Z-axis direction moving mechanism of the displacement stage, and the coating agent can be applied to the other transfer pins while stably receiving the coating agent from the coating agent reservoir at one transfer pin have.
The Z-axis direction moving means may include a moving mechanism for independently displacing the respective transfer pins in the Z-axis direction, and the state displacement means may be disposed in the XY-stage displacement stage. Each transfer pin can be independently displaced in the Z-axis direction, so that even if the height positions of the coating agent paste and the to-be-coated portion are different, the transfer pins can be moved up and down so as to correspond to their height positions.
A paste dish is preferably provided on the displacement stage. In this manner, when the paste plate is provided on the displacement stage, the distance between the paste plate and the to-be-exposed portion can be prevented from being distanced.
Wherein said state displacement means comprises a belt member on which said pair of transfer pins are laid, a drive mechanism for driving said belt member, and a control means for controlling said drive mechanism so that first and
In this state displacement means, the first transfer pin and the second transfer pin can be alternately and stably displaced to the first state and the second state by driving the belt member by the driving mechanism while being controlled by the control means.
(The position of the coating agent grommet) at which the transfer pin receives the paste-like coating agent is higher than the position where the coating agent is transferred, or is lower than the position where the coating agent is transferred, or the position where the receiving position and the receiving position are the same do.
The belt member of the state displacement means may be inclined with respect to the horizontal plane corresponding to the receiving position and the to-be-covered portion. As a result, the lengths of the first transfer pin and the second transfer pin can be set to be the same in the vertical direction, and the stroke in the Z-axis direction can be made the same.
The movement locus of the pair of transfer pins by the state displacement means has a crisscross shape when viewed in a plan view, and when the transfer pin is positioned above the to-be-covered portion, the transfer pin is moved close to the intersection of the movement locus On the end point. Here, the end point is the turning point of the transfer pin (point at which the transfer pin returns to the coating agent side). The end point near the intersection of the movement trajectory shall include the coating agent high end side and the opposite side of the coating agent high end side than the intersection point. The proximity means that the transfer pin on the end point is allowed to be transferred to the intended area when the transfer pin is lowered along the vertical direction.
Wherein the movement locus of the pair of transfer pins by the state displacement means has a crisscross shape when viewed in a plan view, and when the transfer pin is positioned above the to-be-covered portion, the transfer pin is moved on the intersection of the movement locus It is preferable to place it.
However, when the belt member having the pair of transfer pins is used as the state displacement means as described above, the positions of the transfer fins when transferring the coating agent are shifted in the direction orthogonal to the first state and the direction in which the second state is displaced Inevitably. Therefore, in this case, when transferring to the first transferring pin and transferring to the second transferring pin, it is necessary to displace the transferring pin in the direction of absorbing the shift. On the other hand, when the pair of transfer fins each form a crisscrossing trajectory when seen in a plane, when transferring the coating agent to the to-be-coated portion with the transfer pin, The transfer pins can be lowered along the vertical direction). Therefore, even when transferring to the first transferring pin, transferring to the second transferring pin, the transferring can be performed from the same position to almost the same position, and there is no need to adjust the position of the transferring pin.
Wherein said state displacement means comprises: a support arm for supporting said pair of transfer pins, an arm guide mechanism for guiding movement of each support arm along said movement locus, and a pair of support arms, The other support arm moves from the to-be-coated part side to the coating agent holding part side, and when one of the support arms moves from the to-be-coated part side to the coating agent holding part side, And an arm control mechanism for controlling the arm guide mechanism to move the arm guide mechanism.
If the support arm, the arm guide mechanism, and the arm control mechanism are provided, each transfer pin can be accurately positioned on the intersection of the movement locus by stably moving the crest trajectory.
The second coating device of the present invention is provided with a pair of transfer pins for receiving the coating agent in the form of dipping or contacting the lower end of the coating agent of the coating agent and for transferring the coating agent to the coated part, Receiving the coating agent from one of the transfer pins and transferring the coating agent from the other transfer pin to the coated portion while receiving the coating agent from the other transfer pin and transferring the coating agent from one transfer pin to the coated portion, Wherein the transfer fin is lowered along the vertical direction when the coating agent is received and when the coating agent is transferred, the paste pan constituting the coating agent paste in which the coating agent is held, And a position adjusting mechanism for performing adjustment.
According to the coating apparatus of the present invention, when one transfer pin is made to correspond to a paste plate and the other transfer pin is made to correspond to the to-be-coated portion and each transfer pin is lowered, And at the same time, the coating agent can be transferred from the other transfer pin to the to-be-coated portion. When the other transfer pin is brought into contact with the paste plate and the transfer pin is lowered in a state in which one transfer pin is on the to-be-capped portion, the transfer agent is received from the other transfer pin, The coating agent can be transferred from the transfer pin to the donor portion.
It is possible to adjust the height position of the paste dish in the vertical direction by the position adjusting mechanism. Therefore, if the paste plate is positioned at the upper position, when the transfer pin corresponding to the paste plate is lowered, it can be deeply immersed in the coating agent held in the paste plate. If the transfer plate corresponding to the paste plate is lowered when the paste plate is positioned at the lower position, the transfer plate may be dipped into the coating agent adhering to the paste plate, or the upper surface of the transfer agent may be in contact with the upper surface of the transfer plate . In addition, when immersed deeply in the coating agent, the immersion time can be lengthened, and when immersed in the coating agent in a shallow manner, the immersion time can be shortened. Therefore, the application amount of the coating agent to be adhered to the transfer pin can be adjusted. In addition, even if it is contacted with the to-bead portion at the lowermost position of the transfer pin, the tip of the transfer pin does not come into contact with the to-be-embraced portion at the lowermost position of the tip of the transfer pin, A predetermined small clearance may be generated.
It is possible to make the vertical transfer amount of the pair of transfer pins the same or to synchronize the vertical transfer of the pair of transfer pins.
It is possible to adjust the height position of the paste plate based on the height position of the tip (lower end) of the transfer pin on the side of the to-be-caught portion at the time of descent when the upper and lower amounts of the transfer fins are the same. That is, the tip of the transfer pin comes into contact with the to-be-exposed portion at the lowermost position of the transfer pin, or the tip of the transfer pin does not contact the to-be-exposed portion at the lowermost position of the transfer pin, Or the like.
The coating method of the present invention is a coating method for applying a paste-like coating agent to a to-be-coated portion, wherein the tip of the first transfer pin is dipped or contacted with a pasty coating agent to receive the coating agent, A first step of transferring and applying the applied coating agent to the to-be-coated part; and a step of coating the top of the second transfer fin with the paste-like coating agent in a dipping form or a contact form to receive the coating agent, And the second step of transferring and applying the coating liquid to the to-be-covered part, and performing the first step and the second step alternately. Here, the dipping form or the contact form refers to a state in which the tip of the transfer pin is immersed in the coating agent, or the tip of the transfer pin is in contact with the coating agent, and a state in which the coating agent can adhere to the tip of the transfer pin Or a state in which the coating agent can adhere to the tip end near the tip end surface from the tip end surface).
According to the coating method of the present invention, the coating agent can be applied from another transfer pin while receiving the coating agent from the coating agent paste in one transfer pin. Therefore, it is possible to improve the workability twice as much as the conventional method.
In this method, when the first step and the second step are carried out alternately, the locus of movement of each transfer pin has a crisscross shape in plan view, and when transferring the coating agent to the to-be- Can be positioned on the end point close to the intersection of the movement locus.
When the first step and the second step are alternately performed, the locus of movement of each transfer pin has a crisscross shape in plan view, and the transfer pin when transferring the coating agent to the to-be- It is preferable to arrange it on the intersection of the locus.
Thus, even when transferring to the first transferring pin, transferring to the second transferring pin, the transferring to the same or almost the same area can be performed.
(Effects of the Invention)
In the first coating device and coating method of the present invention, the workability can be improved twice as much as that of the conventional apparatus and method, and the productivity is excellent. In addition, the entire device can be made compact, and the cost can be reduced.
When the Z-axis direction moving means is constituted by the Z-axis direction moving mechanism of the displacement stage, the first transfer pin and the second transfer pin can be moved up and down simultaneously, thereby further shortening the working time. In addition, the number of shafts can be reduced, and the cost can be reduced.
In the case where the transfer pins can be independently displaced in the Z-axis direction, the transfer fins can be moved up and down so as to correspond to the height positions of the coating agent paste and the to-be-coated portion. By this, stable drawing of the coating agent and stable application of the coating agent are possible.
When the paste plate is provided on the displacement stage, it is possible to prevent the distance between the paste plate and the to-be-coated portion from being distanced and to reduce the amount of movement of the transfer pin, thereby effectively preventing the transfer time from being prolonged, I can do it.
By providing the paste plate on the displacement stage, the paste plate can be disposed at a higher position than the portion to be coated where the coating agent is to be transferred. This makes it possible to position the paste plate on the workpiece to be coated and stably apply the coating agent to the to-be-coated portion of all the workpieces to which the coating agent is to be transferred.
The first transfer pin and the second transfer pin can be alternately and stably displaced to the first state and the second state in the case where the state displacement means is provided with the belt member, the drive mechanism and the control means, And can be configured at low cost.
The length of the first transfer pin and that of the second transfer pin can be set to be equal to each other, and the length of the belt in the Z-axis direction Stroke can also be made to be the same and small stroke, and the Z-axis can be a single axis, thereby achieving cost reduction. Particularly, in this coating apparatus, by adding a state displacement means provided with a belt member or the like, it is improved in vertex movement. Therefore, positioning and the like are facilitated, and the state displacement means can be constituted by an inexpensive member (such as a belt member), thereby achieving low cost.
In the case where the pair of transfer fins each form a crisscrossing trajectory when viewed in a plane, even when transferring to the first transfer pin, transferring to the second transfer pin, Transfer can be performed, stabilization of the transfer operation can be achieved, and high precision transfer can be achieved. Even when the first state is shifted from the first state to the second state, even when the second state is shifted to the first state, adjustment in the X direction or the Y direction of the transfer pin is not required and the controllability is excellent.
If the support arm, the arm guide mechanism, and the arm control mechanism are provided, each transfer pin can stably move the crest-shaped movement locus, and can be accurately positioned on the intersection of the locus of movement, have.
According to the second application device of the present invention, the application device of the present invention can improve workability twice as much as that of the conventional device and method, and is excellent in productivity. In addition, the entire device can be made compact, and the cost can be reduced.
The kind of the coating agent using the application amount of the coating agent to be adhered to the transfer pin on the side of the paste plate, and the coating amount of the coating agent to be coated can be used. The kind of the coating agent, The height position of the transfer pin with respect to the to-bead portion can be adjusted according to the amount of the application agent applied to the transfer pin. Therefore, a chip or the like can be mounted to the to-be-covered portion with high accuracy.
Particularly, when the upper and lower amounts of the pair of transfer pins are the same, by adjusting the height position of the paste plate, it is possible to prevent the film from being dipped deeply in the coating agent or dipped into the coating agent or the top surface of the transfer agent Quot; state " can be stabilized, and the application amount of the coating agent to the to-be-coated portion by the transfer pin can be adjusted with high accuracy. In addition, by synchronizing the vertical movement of the pair of transfer pins, the application of the coating agent by one transfer pin and the application by the other transfer pin can be stably performed at the same time, and productivity can be improved.
1 is a schematic side view of a coating apparatus according to an embodiment of the present invention.
2 is a simplified front view of the coating device of FIG.
FIG. 3A is a schematic view showing a first state of the coating apparatus of FIG. 1; FIG.
FIG. 3B is a schematic view showing the second state of the coating apparatus of FIG. 1; FIG.
4 is a simplified block diagram of the state displacement means.
5 is a simplified side view of a coating apparatus according to another embodiment of the present invention.
6 is a simplified front view of the applicator of FIG.
7A is a simplified plan view of a coating device according to another embodiment of the present invention in a state in which the second transfer pin corresponds to the upper side of the coating agent paste.
FIG. 7B is a simplified plan view of a main part in a neutral state, showing a coating device according to another embodiment of the present invention. FIG.
Fig. 7C is a simplified plan view of a coating device according to another embodiment of the present invention in a state in which the first transfer pin corresponds to the upper side of the coating agent paste.
Fig. 8 is a simplified perspective view of the main part of the coating device shown in Fig. 7; Fig.
Fig. 9 is a side view of the main part of the coating device shown in Fig. 7;
10 is a simplified side view of a conventional applicator.
11 is a simplified front view of the applicator of Fig.
12 is a schematic view showing a coating process.
1 and 2 show a coating apparatus according to the present invention in which a pair of transfer pins 21 and 22 for applying a paste-like coating agent P to a
The transfer pins 21 and 22 are allowed to be displaced by the state displacement means 25 in the state (position). The state displacement means 25 includes a
2, the
The
The state shown in Fig. 3A is referred to as a first state, and the state shown in Fig. 3B may be referred to as a second state, and the first state and the second state are alternately shifted. That is, the displacement from the first state to the second state is determined by moving the
The
The
The
The
However, the traveling
Thus, the
A horizontal table 52 is provided on the
The position of the horizontal table 52 can be adjusted by the
Therefore, when the traveling
Next, a method of applying the coating agent (P) using the apparatus will be described with reference to Fig. 1 and Fig. The workpiece W is a semiconductor chip, and a plurality of workpieces W are stacked on an XY table (not shown). The
That is, the
After the
Thereafter, the
Then, the
After returning to the first state in this way, it is lowered along the Z-axis direction again. The lower end of the
Thereafter, the process is repeatedly changed in order to finish the application work of the coating agent (P) to all the works (W) on the XY table. That is, in this coating method, the front end of the
According to the application device of the present invention, the first state and the second state can be alternately displaced by the state displacement means. When the
Since the Z-axis direction moving means for moving the transfer pins 21 and 22 in the Z-axis direction is constituted by the Z-axis direction moving mechanism of the
A
If the state displacement means 25 is provided with the
Since the receiving position where the transfer pin 21 (22) receives the paste-like coating agent P (located at the coating agent reservoir) is higher than the receiving
Since the
The
The kind of the coating agent P using the coating amount of the coating agent P adhered to the transfer pins 21 and 22 on the side of the
In this embodiment, since the
Since the
5 and Fig. 6 show another embodiment. In this case, the
This
The travel blocks 32a and 32b are supported by the pin support blocks 61 and 62 and the transfer pins 21 and 22 are supported by the pin support blocks 61 and 62 respectively. The transfer pins 21 and 22 reciprocate along the Z-axis direction through a moving mechanism including
The pin support blocks 61 and 62 are attached to the
Next, a coating method using the coating apparatus shown in Figs. 5 and 6 will be described. In this case also, the
In this first state, the
As a result, the
In this state, the
As described above, even in this coating apparatus, the tip of the
Therefore, even in the coating apparatuses shown in Figs. 5 and 6, it is possible to improve the workability twice as much as that of the conventional apparatus, and the productivity is excellent. In addition, the entire device can be made compact, and the cost can be reduced. Particularly, even if the height positions of the coating agent paste (paste plate 53) and the to-
It is not necessary to vertically move the
However, if the
In the above embodiment, the
In each of the above-described embodiments, when changing from the first state to the second state or changing from the second state to the first state, the transfer pins 21, As shown in Fig. 3, the movable member moves in a state in which it is separated at a predetermined interval in a direction orthogonal to the moving direction. Therefore, when transferring from the
Therefore, the state displacement means 25 shown in Figs. 7 to 9 is configured such that the movement loci L1 and L2 of the pair of
The state displacement means 25 includes
The
The
Therefore, the guide rails 80, 80 provided on the oblique side face are also arranged so as to approach sequentially from the base end side toward the tip end side. The
The
The driving shaft of the driving motor is connected to the
7C, a
7B from the state in which the swinging
7B, the supporting
The movement of the
The apparatus having the state displacement means 25 shown in Figs. 7 to 9 can perform the same transfer operation as the apparatus provided with the state displacement means 25 shown in Fig. 7C, the
When the
Therefore, when the pair of transfer pins 21 and 22 form a trajectory of crisscrossing in a plan view, even when transferring to the
In this case as well, the
7 to 9, the planarizing
In this case, on the contrary, the
As described above, when the flattening
7 to 9, in the state where the transfer pins 21 (22) are positioned above the to-
Therefore, even in the case of transferring to the first transfer pin, transfer to the second transfer pin can be carried out to almost the same area, so that the transfer operation can be stabilized and transfer precision can be achieved .
Although the embodiment of the present invention has been described above, the present invention is not limited to the above-described embodiment and can be modified in various ways. For example, without using the
As shown in FIG. 1 and the like, when the
Further, as shown in FIG. 5 and the like, a cylinder mechanism, a ball screw mechanism, or the like may be used as a moving mechanism in which the
The movement of the
As a difference in height between the coating agent retaining portion and the workpiece W to be covered 20, a table on which the workpiece W is mounted is moved in a range in which the horizontal table 52 supporting the
The diameter dimension and the material of the transfer pins 21 (22) are also dipped or contacted with the coating agent paste so that the coating agent (P) can be received and the coating agent (20) P) can be transferred. Further, the shape of the end face of the transfer pin 21 (22) may be flat or may have a concavo-convex portion. The displacement speed from the first state to the second state and the displacement speed from the second state to the first state can also be adjusted in the range in which the coating agent P attached to the transfer pin 21 (22) , The material of the transfer pin 21 (22), the shape, the size, and the like of the transfer pin (21).
In the apparatuses shown in Figs. 7 to 9, the
In the apparatuses shown in Figs. 7 to 9, as shown in Fig. 5 and Fig. 6, the
7 to 9, when the transfer fin 21 (22) is lowered along the vertical direction to the end point near the crossing point O, did. However, the transfer pins 21 (22) can be lowered by moving the transfer pins 21 (22) toward the center line passing through the intersection O. Therefore, in the vicinity, the transfer pin 21 (22) on the end point is not limited to the range that can be transferred to the intended
As the state displacement means 25, a transfer pin may be arranged at a position opposite to the rotational axis of the rotating body by 180 °.
In the manufacture of semiconductors, it is used in the step of applying a paste-like coating agent to a lead frame or the like to be coated. The coating agent is a resin adhesive such as an epoxy resin or a polyimide resin, a silver paste, or the like. Use transfer pins. The lower end of the transfer pin is immersed in a coating agent held in a paste dish to receive the coating agent. The received coating agent is transferred to the donor portion.
20:
25: state displacement means 26: belt member
27: drive mechanism 28: control means
35: Displacement stage 53: Paste plate
55:
73, 74: arm guide mechanism 75: arm control mechanism
P: Coating agent (paste)
Claims (16)
Wherein the first transfer pin corresponds to the upper side of the coating agent paste in which the paste-like coating agent is held, the first state in which the second transfer pin corresponds to the upper side of the coated portion, and the second state in which the second transfer pin is in contact with the paste- State shifting means for countering the upward direction of the coating agent holding portion and alternately displacing the first transfer pin to a second state corresponding to the upper side of the to-be-sunken portion; And
And Z-axis direction moving means for moving the transfer pins in the Z-axis direction in the vertical direction in the first state and the second state,
The state displacing means is configured such that when the first transfer pin and the second transfer pin reciprocate in a straight line between the coating agent retaining portion and the receiving portion and the first transferring pin is displaced from the coating agent retaining portion to the receiving portion, When the second transfer pin is displaced from the coated portion to the coating agent layer and the second transfer pin is displaced from the coating agent layer to the coated portion, the first transfer pin is displaced from the coated portion to the coating agent layer .
Wherein said state displacement means is provided in a displacement stage which is an XYZ stage and said Z axis direction moving means is constituted by a Z axis direction moving mechanism of said displacement stage.
Wherein said Z-axis direction moving means is provided with a moving mechanism for independently displacing each of the transfer pins in the Z-axis direction, and said state displacement means is disposed in a displacement stage which is an XY stage.
Wherein a paste plate constituting the coating agent paste is provided on the displacement stage.
Wherein the receiving position at which the transfer pin receives the paste-like coating agent is higher than the to-be-delivered portion to which the coating agent is transferred.
Wherein said state displacement means comprises a belt member on which said pair of transfer pins are laid, a drive mechanism for driving said belt member, and a control means for controlling said drive mechanism so that first and second transfer pins 2 state to a state in which the substrate is in contact with the substrate.
Wherein the belt member of said state displacement means is inclined with respect to a horizontal plane corresponding to said receiving position and said to-be-covered portion.
Wherein the movement locus of the pair of transfer pins by the state displacement means has a crisscross shape when seen in a plan view, and when the transfer pin is positioned above the to-be-covered portion, the transfer pin is moved to the intersection of the movement locus Wherein the coating unit is positioned on the near end point.
Wherein the movement locus of the pair of transfer pins by the state displacement means has a crisscross shape when viewed in a plan view, and when the transfer pin is positioned above the to-be-concealed portion, In the coating device.
Wherein said state displacement means comprises:
A support arm for supporting the pair of transfer pins;
An arm guide mechanism for guiding movement of each support arm along the movement locus; And
When one support arm moves from the coating agent holding portion side to the to-beating portion side, the other supporting arm moves from the to-be-coated portion side to the coating agent holding portion side, and when one of the supporting arms moves to the coating agent holding portion side from the to- And an arm control mechanism for controlling the arm guide mechanism so that the other support arm moves from the application agent holding portion side to the to-bead portion side.
Receiving the coating agent from one of the transfer pins and simultaneously transferring the coating agent from the other transfer pin to the to-be-coated portion, receiving the coating agent from the other transfer pin and transferring the coating agent from the one transfer pin to the to- ;
Wherein when the application agent is received and the application agent is transferred, the transfer pin is lowered along the vertical direction,
And a position adjusting mechanism for adjusting the height position of the paste plate in the vertical direction.
Wherein the upper and lower amounts of the pair of transfer pins are the same.
And the upper and lower motions of the pair of transfer pins are synchronized with each other.
A first step of transferring the coating agent adhered to the second transfer pin to the to-be-coated portion and applying the coating agent while the tip of the first transfer pin is immersed or in contact with the paste-like coating agent,
And a second step of transferring the coating agent adhered to the first transfer fin to the to-be-coated portion and applying the coating agent while the tip of the second transfer pin is immersed or in contact with the paste-like coating agent;
The first transferring pin and the second transferring pin each reciprocate between the coating agent holding portion and the receiving portion in a straight line, and when the first transferring pin is displaced from the coating agent holding portion to the receiving portion, When the first transfer pin is displaced from the aspiration part to the coating agent layer and the second transfer pin is displaced from the coating agent layer to the coated part, Wherein the coating is carried out alternately.
Wherein the movement locus of each transfer pin when the first step and the second step are alternately formed has a crisscross shape in plan view and is characterized in that the transfer pin when transferring the coating agent to the to- Is located on the end point close to the intersection of the trajectory.
Wherein the movement locus of each transfer pin when the first step and the second step are alternately formed has a crisscross shape in plan view and is characterized in that the transfer pin when transferring the coating agent to the to- And a second step of disposing the second substrate on an intersection of the trajectories.
Applications Claiming Priority (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JPJP-P-2009-249019 | 2009-10-29 | ||
| JP2009249019 | 2009-10-29 | ||
| JP2009271462A JP5009354B2 (en) | 2009-11-30 | 2009-11-30 | Coating device |
| JPJP-P-2009-271452 | 2009-11-30 | ||
| JP2009271452A JP5009353B2 (en) | 2009-10-29 | 2009-11-30 | Coating apparatus and coating method |
| JPJP-P-2009-271462 | 2009-11-30 |
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| WO2014031987A2 (en) * | 2012-08-23 | 2014-02-27 | Selwyn Gary S | Chemical stick finishing method and apparatus |
| TWI584879B (en) * | 2013-11-06 | 2017-06-01 | All Ring Tech Co Ltd | Coating method and device |
| JP7398122B2 (en) * | 2021-06-03 | 2023-12-14 | 株式会社クリエイティブコーティングス | Electronic component manufacturing method and paste coating device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2002198382A (en) | 2000-12-25 | 2002-07-12 | Matsushita Electric Ind Co Ltd | Eqipment for transferring bonding past, transfer pin and method for transferring bonding past |
| JP2006134982A (en) | 2004-11-04 | 2006-05-25 | Matsushita Electric Ind Co Ltd | Paste for solder jointing and solder jointing method |
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| JPH0738500B2 (en) * | 1985-12-20 | 1995-04-26 | 松下電器産業株式会社 | Coating device |
| JPH0793336B2 (en) | 1988-01-18 | 1995-10-09 | 株式会社新川 | Paste application device in die bonder |
| CN2323881Y (en) * | 1995-04-13 | 1999-06-16 | 华源实业(集团)股份有限公司 | Gluer for producing soft magnetic disc with gluing method |
| JPH1066911A (en) * | 1996-08-27 | 1998-03-10 | Matsushita Electric Works Ltd | Liquid coating method and device therefor |
| CN201176020Y (en) * | 2008-02-02 | 2009-01-07 | 许清圳 | Two-station auto thermal transfer printer |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2002198382A (en) | 2000-12-25 | 2002-07-12 | Matsushita Electric Ind Co Ltd | Eqipment for transferring bonding past, transfer pin and method for transferring bonding past |
| JP2006134982A (en) | 2004-11-04 | 2006-05-25 | Matsushita Electric Ind Co Ltd | Paste for solder jointing and solder jointing method |
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| KR20110047152A (en) | 2011-05-06 |
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