KR101672263B1

KR101672263B1 - An electron microscope holder and probe unit therefor

Info

Publication number: KR101672263B1
Application number: KR1020150057828A
Authority: KR
Inventors: 김영운; 김성일
Original assignee: 서울대학교산학협력단
Priority date: 2015-04-24
Filing date: 2015-04-24
Publication date: 2016-11-17
Also published as: KR20160127239A

Abstract

The present invention relates to a holder apparatus for an electron microscope and a probe unit applied thereto. SUMMARY OF THE INVENTION It is an object of the present invention to provide a holder apparatus for an electron microscope capable of enlarging the range of movement of a probe and a probe unit applied thereto. To this end, a probe unit for an electron microscope holder apparatus according to the present invention comprises: a piezoelectric tube extending along an axial direction; A fixing member supported at one end of the piezoelectric tube; An insulating rod coupled to the fixing member so as to extend in the axial direction in the transverse direction; A probe support member detachably coupled to the insulating bar; And an electrically conductive probe supported by the probe support member. The holder device for an electron microscope according to the present invention comprises: the probe unit; A frame having a shaft hole for receiving the piezoelectric tube; And a specimen-holding block supported on the frame and having a specimen-placing portion placed at a position spaced apart from the probe in the axial direction.

Description

TECHNICAL FIELD [0001] The present invention relates to a holder device for an electron microscope and a probe unit applied thereto,

The present invention relates to a holder apparatus for an electron microscope and a probe unit applied thereto.

There is an increasing interest in research that can apply electrical signals to the specimen to be analyzed and observe the characteristics and microstructural changes of the specimen in real time in the electron microscope. For this research, stable and easy control of the probe that applies electrical signals to the specimen is important.

However, the conventional holder device for an electron microscope having a probe unit has a problem that the moving range of the probe is relatively narrow, space efficiency is low, and assembling workability is poor.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a holder apparatus for an electron microscope capable of enlarging the range of movement of a probe and a probe unit applied thereto.

A probe unit for an electron microscope holder apparatus according to the present invention includes: a piezoelectric tube extending along an axial direction; A fixing member supported at one end of the piezoelectric tube; An insulating rod coupled to the fixing member so as to extend in the axial direction in the transverse direction; A probe support member detachably coupled to the insulating bar; And an electrically conductive probe supported by the probe support member.

Here, the fixing member has the receiving hole penetrating in the transverse direction, and one end of the insulating film is inserted into the receiving hole and is supported in the form of a cantilever, the probe supporting member can be easily detached from the insulating rod with a simple structure .

And the probe supporting member includes a pair of elastic supporting portions having mutually opposite insertion holes into which the insulating film can be inserted and connecting the adjacent adjacent portions of the pair of elastic supporting portions so that the pair of elastic supporting portions maintain a predetermined gap Wherein the probe is supported by the elastic connection portion so that the probe supporting member can be easily coupled to the insulating rod and the probe supporting member can be easily coupled to the insulating rod in the transverse direction and the circumferential direction It is possible to facilitate the movement of the position.

The fixing member may include a flat portion extending in the axial direction in the axial direction and a fixing portion extending from the flat portion in the axial direction to support the insulating bar. In the specimen supporting block, The length of the probe supporting member can be relatively long, and the lateral moving range of the probe supporting member can be extended.

The holder apparatus for an electron microscope according to the present invention comprises: the probe unit; A frame having a shaft hole for receiving the piezoelectric tube; And a specimen-holding block supported on the frame and having a specimen-placing portion placed at a position spaced apart from the probe in the axial direction.

The holder device for an electron microscope according to the present invention and the probe unit applied thereto are compact and allow a range of movement of the probe within a limited space of the specimen support block to allow analysis of various parts of the specimen, align. And, when the insulating film base is supported in the form of a cantilever, the probe supporting member is detachable to the insulating bar with a simple structure. In addition, when the fixing member has the deflection portion, the length of the insulating film base in the specimen supporting block can be relatively longer, and the lateral movement range of the probe supporting member can be extended. The probe supporting member may include a pair of elastic supporting portions having insertion holes into which the insulating film base can be inserted and facing each other and elastic supporting portions connecting the adjacent edge portions of the pair of elastic supporting portions and providing a resilient force In the case of including the elastic connecting portion, the probe supporting member can be relatively easily coupled to the insulating rod and the lateral and circumferential positional shifts of the probe supporting member with respect to the insulating rod can be facilitated.

1 is a perspective view showing a holder apparatus for an electron microscope provided with a probe unit,
2 is an enlarged perspective view of the probe unit side,
3 is a perspective view of a probe unit according to the present invention,
4 is an exploded perspective view of the probe unit,
5 is a plan view.

Fig. 1 is a perspective view showing an electron microscope holder apparatus provided with a probe unit 10, and Fig. 2 is an enlarged perspective view of the probe unit side. As shown in these drawings, the probe unit 10 is installed in a holder apparatus for an electron microscope. The holder device for an electron microscope includes a frame 110 having a shaft hole extending in the axial direction, a specimen seating part 131 supported by the frame 110 and disposed at a position spaced apart from the shaft hole in the axial direction, (Not shown).

The frame 110 is exposed to the outside of the electron microscope and is connected to an operation unit 150 that can be operated by an operator. The operation unit 150 includes an X-axis operation unit 151, a Y-axis operation unit 152, and a Z-axis operation unit 153 for controlling the probe unit. The X axis control unit 151, the Y axis control unit 152 and the Z axis control unit 153 are connected to the piezoelectric tube 200 to adjust the piezoelectric tube 200 in the X axis direction, the Y axis direction, and the Z axis direction. The piezoelectric tube 200 includes a piezoelectric element capable of mechanical deformation according to an electrical signal.

FIG. 3 is a perspective view of a probe unit according to the present invention, FIG. 4 is an exploded perspective view of the probe unit, and FIG. 5 is a plan view. 1 and 2, a probe unit according to the present invention includes a piezoelectric tube 200 having an engaging end 210 facing the specimen seating part 131 and disposed in the shaft hole of the frame 110, . An insulating member 300 made of an electrically insulating material is coupled to the coupling end 210 of the piezoelectric tube 200. An insertion hole 310 is formed in the insulating member 300.

The fixing member 400 is inserted and coupled to the insertion hole 310 of the insulating member 300. The fixing member 400 includes an insertion portion 410 extending along the axial direction and inserted into the insertion hole 310 of the insulating member 300, a flat portion 420 and a flat portion 420 extending in the axial direction in the axial direction 420 extending in the axial direction. Here, the fixing member 400 may be directly connected to the insertion portion 410 and the fixing portion 430 without the placement portion 420. The fixing portion 430 has a receiving hole 431 formed to pass through in the transverse direction with respect to the axial direction. The fixing member 400 may be directly coupled to the coupling end 210 of the piezoelectric tube 200 without interposing the insulating member 300.

In the receiving hole 431 of the fixing portion 430, an insulating insulating bar 500 is inserted along the transverse direction and is coupled in a cantilevered manner. The insulating rod 500 is preferably made of a cylindrical ruby. Here, ruby is a monocrystalline material to which alumina is added with a small amount of chromium, and has excellent insulating performance and abrasion resistance, and exhibits uniform physical properties as a whole. The fixing portion 430 may not have the receiving hole 431. [ At this time, the insulating member 500 may be fastened to the fixing portion 430 in a protruding groove manner or may be bonded with an adhesive.

The probe supporting member 600 is detachably coupled to the insulating rod 500. The probe supporting member 600 is connected to a pair of elastic supporting portions 610 having mutually opposite insertion holes 611 into which the insulating rod 500 can be inserted and a pair of elastic supporting portions 610, And an elastic connecting portion 620 that provides an elastic force such that the pair of elastic supporting portions 610 maintain a constant gap. The probe supporting member 600 is inserted into the insulating rod 500 supported in the form of a cantilever through the insertion hole 611 in a state where the gap between the pair of elastic supporting portions 610 is narrowed, The gap between the pair of resilient supporting portions 610 is re-opened by the elastic force and fixed to the insulating rod 500. Here, it is preferable that the insertion hole 611 is slightly larger than the diameter of the insulating bar 500.

A probe supporting hole 621 through which the probe 800 can be inserted is formed in the elastic connecting portion 620. The pair of elastic supporting portions 610 have a shape that is opened at a predetermined angle about the elastic connecting portion 620. One of the pair of elastic supporting portions 610 has an electrical contact portion 613 bent outward from the plate surface of the elastic supporting portion 610. The electrical contact 613 facilitates the operator to handle the small probe support member 600 and serves as a contact portion of an electric line electrically connected to the probe 800 to be described later.

The probe 800 is inserted and coupled to the electrically conductive metal tube 700 and the metal tube 700 is inserted into the probe support hole 621 and coupled. Here, the probe support member 600, the metal tube 700, and the probe 800 are both electrically connected to each other as electrical conductors. The probe 800 may be directly coupled to the probe supporting hole 621 without mediating the metal tube 700. [

The probe unit having such a structure is connected to the manipulation unit 150 through the support rod 140 disposed inside the frame 110 and the feedthrough 160. A plurality of wiring holes 161 penetrating along the axial direction are formed in the feedthrough 160 at predetermined intervals along the circumferential direction. A dynamic O-ring 163 is provided on the outer diameter of the feedthrough 160. The dynamic O-ring 163 seals the inside of the shaft hole of the frame 110. Electric lines for electrically connecting the operating portion 150 and the piezoelectric tube 200 and the electrical contact portion 613 are wired to the plurality of wiring holes 161. The electric line may directly connect the operating unit 150 and the probe 800.

On the other hand, the insulating bar 500 may be supported on both sides of the fixing member 400 in the form of both arms.

The probe supporting member 600 may be detachably coupled to the insulating rod 500 by a clamping method, a clamping method, or the like.

With this structure, the probe 800 can be brought into contact with a relatively wide range of the specimen that is seated on the specimen seating portion 131 according to the following procedure.

First, the operator sets the region of the specimen to be analyzed, and then moves the probe supporting member 600, which is equipped with the probe 800, to the insulating rod 500 so that the probe 800 can be contacted to various regions within the region. Place it in the proper position while moving along the longitudinal direction. If necessary, the probe support member 600 is rotated in the circumferential direction about the axis of the insulating bar 500 to adjust the direction of the probe 800 toward the test piece. When positioning of the probe supporting member 600 is completed, the holder device is mounted on the electron microscope with the specimen placed on the specimen placing part 131.

The X, Y, and Z axis positions of the piezoelectric tube 200 are adjusted through the operation unit 150 and an electrical signal is supplied to a specific region of the specimen to be analyzed through the probe 800, Observe and analyze changes. Here, the probe 800 may serve not only to impart an electrical signal to the specimen, but also to receive an electrical signal generated from the specimen.

110: frame 130: specimen support block
131: specimen seating part 140:
150: operating part 151: X-axis operating part
152: Y axis control unit 153: Z axis control unit
160: Feedthrough 161: Wiring ball
163: O-ring 200: Piezoelectric tube
210: engaging end 300: insulating member
310: fixing member insertion hole 400: fixing member
410: insertion part 420:
430: fixing part 431: receiving hole
500: insulating rod 600: probe supporting member
610: elastic support portion 611: insertion hole
613: electrical contact portion 620: elastic connection portion
621: probe support hole 700: metal tube
800: Probe 10: Probe unit

Claims

A probe unit for an electron microscope holder device,
A piezoelectric tube extending along the axial direction;
A fixing member supported at one end of the piezoelectric tube;
An insulating rod coupled to the fixing member so as to extend in the axial direction in the transverse direction;
A probe support member detachably coupled to the insulating bar;
And an electrically conductive probe supported by the probe support member,
Wherein the fixing member includes a flat portion extending in the axial direction in the axial direction and a fixing portion extending from the flat portion in the axial direction to support the insulating bar. .

The method according to claim 1,
Wherein the fixing member has the receiving hole penetrating in the transverse direction and one end of the insulating film is inserted into the receiving hole and is supported in a cantilevered manner.

3. The method of claim 2,
Wherein the probe support member comprises:
A pair of elastic supporting portions which have mutually opposite insertion holes into which the insulating film can be inserted and elastic connecting portions which connect adjacent adjacent portions of the pair of elastic supporting portions and which provide an elastic force such that the pair of elastic supporting portions maintain a constant interval, / RTI >
Wherein the probe is supported by the elastic connection portion.

delete

In a holder device for an electron microscope,
A probe unit according to any one of claims 1 to 3;
A frame having a shaft hole for receiving the piezoelectric tube;
And a specimen-holding block supported on the frame and having a specimen-placing part placed at a position spaced apart from the probe in the axial direction, on which the specimen is placed.