KR101610158B1 - X-ray detector with metal substrates - Google Patents

Abstract

The present invention relates to a detector for detecting an X-ray image, and more particularly, to a detector for detecting an X-ray image, which comprises a detector body which forms a closed space in which a gas layer for filling a gas and converts an X-ray signal into an electric signal is formed, An electrode, and an insulating layer formed on the inside of the detector body, the detector body being made of a metal material having high X-ray transmittance.

According to the present invention, in the manufacturing process of an X-ray detector using a conventional plasma display panel, the structure of the substrate on which the panel is formed is formed of a metal material, and the dielectric for preventing current is formed into an insulating film layer of a polymer- By introducing a room temperature electrode, it is possible to remove all the processes at a high temperature and to proceed the process at room temperature, thereby remarkably shortening the production time, and improving the stability of the substrate and increasing the yield.

X-ray detector, metal substrate, room temperature electrode, insulating film layer

Description

DETECTOR FOR X-RAY DETECTOR WITH METAL SUBSTRATES

The present invention relates to a detector for detecting an X-ray image, and more particularly, to a detector for detecting an X-ray image, and more particularly to a detector for detecting an X- Ray image detecting apparatus capable of reading an electronic number by using an electronic circuit to implement an X-ray image.

Particularly, in forming the detector for X-ray image detection of such a gas type, the structure of the substrate on which the panel is formed is formed of a metal material, and the dielectric material for preventing electric conduction is formed as an insulating film layer of a polymer- The present invention relates to a technique capable of increasing the yield by increasing the stability of the substrate while significantly shortening the production time by allowing the process to be carried out at room temperature by removing all processes at high temperature by introducing a room temperature electrode

X-ray inspection methods widely used in medicine, engineering and the like are photographed using an X-ray detection film, and a predetermined film printing step is performed in order to know the result. However, there is a problem in that it takes a long time for the usability because it can recognize a photograph of a desired object after a certain time after the elapse of a certain time. In particular, when the film itself is damaged due to difficulty in storage and storage of the film after photographing, It has been difficult to confirm such a problem.

In order to solve the above problems, a detector for X-ray image detection using a TFT (Thin Film Transistor) has been researched / developed. The detector using the TFT realizes the advantage of using the TFT as a switching element and diagnosing the result in real time immediately after taking the X-ray.

However, the conventional detector using the TFT has many problems due to the manufacture of the photodiode in the manufacturing process, the power consumption is very high and the stability of the device is lowered and a lot of heat is generated. Further, in addition to the difficulty in manufacturing, one thin film transistor is required for each pixel in the panel, which makes it difficult to increase the area, increase the cost, and lower the sensitivity.

 In order to overcome these problems, there has been an effort to overcome by the structural changes. However, digital equipments have also suffered from low X-ray conversion efficiency, deterioration of image characteristics (resolution, luminance), image distortion, excessive patient dose, In recent years, there has been a great demand for the development of an innovative digital image device that can overcome these problems. Recently, as a substitute device, a PDP A method to utilize it was proposed.

 In PDP, a discharge voltage is applied to two substrates coated with a plurality of electrodes, such as Xe or Ne, and then a discharge voltage is applied. A phosphor formed in a predetermined pattern is excited by ultraviolet rays generated by the discharge voltage, , A video device that obtains text or graphics.

1 is a cross-sectional view schematically showing a detector for X-ray image detection using a conventional plasma display (PDP).

Referring to FIG. 1, a detector 100 using a plasma display (PDP) includes two substrates 110 disposed adjacent to and facing each other with a discharge gap, a dielectric layer 120 formed on an opposite surface of the substrate, A barrier rib 140 formed between the dielectric layer and the dielectric layer to form a closed cell structure on the inner surface of the substrate and a barrier rib formed on one side of the inner surface of the barrier rib and the substrate, And a gas layer 160 filled in the closed cell formed by the barrier ribs and the substrate and excited by the radiation to generate electrons.

In the digital X-ray image detector using the PDP structure, when the X-ray transmitted through the human body reaches the gas layer 160, the gas layer 160 is irradiated with X- And the PDP structure is used as a radiation detector substrate by utilizing the electron emission effect of the radiation by the gas layer 160.

In addition, the X-ray that does not interact with the gas layer 160 interacts with the fluorescent layer 150 located below the gas layer 160, and as a result, visible light is generated. The visible light generated at this time functions as a work function A low photo negative electrode layer (not shown) emits electrons and is used as a radiation detector substrate. The emitted electrons are accelerated by an electrode located on the substrate to ionize the gas in the gas layer 160 or directly reach the electrode.

As the gas is ionized, electrons and holes are generated. The electrons are also accelerated by the electric field to ionize the other gas or to be attracted to the collecting electrode. The electrons thus collected are converted into image data, which are output to the lead-out device, and output as an image, thereby generating a radiation image. Instead of the fluorescent layer 150, a photoconductive layer (not shown) may be used which generates electrons and holes in response to X-rays.

However, the detector of such a plasma display panel panel structure generally has a fatal weakness which makes it difficult to inject the gas, which is an X-ray conversion layer, at a high pressure higher than the atmospheric pressure by using the substrate as a glass material. That is, since the injection of the high-pressure gas is difficult, the realization of high sensitivity is limited.

In addition, during the manufacturing process of the PDP panel, the production time is delayed due to the continuous high-temperature firing process, which causes the material to weaken and breaks due to the high vacuum pressure. Therefore, it is possible to solve the prolongation of the manufacturing time according to the high-temperature firing process in the process of manufacturing the detector for detecting the x-ray image using the PDP, to reduce the transmittance of the x-ray by the substance and to solve the difficulty of injecting the x- There is a strong demand for the production of detectors.

SUMMARY OF THE INVENTION The present invention has been conceived to solve the above-mentioned problems, and an object of the present invention is to provide an X-ray detector using a conventional plasma display panel in which the structure of the substrate is made of a metal material, Series epoxy or the like and introducing a room temperature electrode so as to remove all the processes at a high temperature so that the process can be performed at room temperature so that the production time is remarkably shortened and the stability of the substrate is high, Ray detectors.

In order to solve the above-described problems, an X-ray detector according to the present invention includes a detector body that forms a closed space in which a gas layer filled with gas and converts an X-ray signal into an electrical signal is formed, A plurality of electrodes, and an insulating layer formed of a material capable of being subjected to a low-temperature process formed inside the detector body, wherein the detector body is formed of a metal material having high X-ray transmittance. As a result, it is possible to reduce the manufacturing time by eliminating the high-temperature sintering process, and the materials applicable to various low-temperature processes can be used, and all the processes can be performed at room temperature, thereby simplifying the manufacturing process, shortening the process time, An advantage of improving the yield can be realized.

In addition, the detector body may be formed of a metal substrate including an upper substrate and a lower substrate. This makes it possible to realize a low-cost, high-sensitivity digital radiographic image while enhancing the stability by using a substrate having high strength while increasing the x-ray transmittance.

Further, the metal substrate of the present invention can be made of Al or Cu.

The insulating layer of the present invention is characterized by being formed of a polymer-based material, and is preferably formed of an epoxy.

The insulating layer may be formed on the upper surface or the lower surface of the plurality of electrodes.

Further, in disposing the insulating film layer, it is possible to make the space between the substrate and the adjacent electrode and the space between the adjacent electrodes.

Particularly, it is preferable that the above-mentioned insulating film layer has a thickness of 1 to 1000 mu m.

In addition, the plurality of electrodes may be formed of two or three electrodes formed inside or outside the detector body.

In particular, in the arrangement of the electrodes, the plurality of electrodes may include a first electrode and a second electrode respectively formed on the upper substrate and the lower substrate, and a third electrode formed on the inner or lower portion of the lower substrate.

In the arrangement of the three-phase electrode structure described above, the second electrode and the third electrode are formed inside the lower substrate, and the second electrode, the third electrode, and the lower substrate are separated from each other by the insulating film layer A second electrode is formed inside the lower substrate, a third electrode is formed outside the lower substrate, and a space is formed between the lower substrate and each electrode by the insulating film layer. .

In addition, unlike the above arrangement structure, a second electrode and a third electrode are formed outside the lower substrate, and the second electrode, the third electrode, and the lower substrate are spaced apart by the insulating film layer .

In the structure of the three-phase electrode described above, it is preferable that the first electrode and the second electrode are arranged so as to cross each other at right angles.

The third electrode may be a front electrode, and the detector may be an X-ray image detector.

In addition, the thickness of each of the electrodes may be 1 to 1000 μm.

Further, in order to enable production at room temperature according to the gist of the present invention, each of the electrodes may be formed as a normal-temperature electrode.

In addition, the detector body of the present invention may be manufactured such that the detector body is spaced apart through a support for supporting the upper substrate and the lower substrate.

In particular, the support may be formed of a metal, a ceramic, or a polymer.

The support may be formed in any shape selected from a circle, an ellipse, and a polygon.

The organic light emitting display device may further include a circuit unit configured to read an image signal and to lead out a signal amount of electrons and holes formed by voltages applied to the first and third electrodes through the second electrode .

Also, the detector for X-ray image detection, which is characterized in that the gas layer of the present invention is made of Penning gas, can be provided.

In particular, the penning gas may be formed of any one selected from Xe, Kr, Ar, Ne, and He, or may be formed of a mixed penning gas in which two or more gases selected from among Xe, Kr, Ar, Ne and He are mixed.

Above the mixing Penning gas is Xe + Ne, Kr + Ne, Ar + Ne, Xe + CO 2, Kr + CO 2, Ar + CO 2, Xe + CH 4, Kr + CH 4, Ar + CH 4 in the selection Any one can be used.

According to the present invention, in the manufacturing process of an X-ray detector using a conventional plasma display panel, the structure of the substrate on which the panel is formed is formed of a metal material, and the dielectric for preventing current is formed into an insulating film layer of a polymer- By introducing a room temperature electrode, it is possible to remove all the processes at a high temperature and to proceed the process at room temperature, thereby remarkably shortening the production time, and improving the stability of the substrate and increasing the yield.

As described above, the present invention relates to a new type of gas type flat panel digital X-ray detecting apparatus, which can manufacture a panel at a low temperature without a high-temperature process, Ray image detection by a low-temperature process of a new structure capable of injecting a high-pressure gas.

Hereinafter, the structure and operation of the present invention will be described in detail with reference to the accompanying drawings.

Referring to FIG. 2, FIG. 2 schematically shows a detector for digital X-ray image detection, which is capable of performing a low-temperature process according to the present invention and is manufactured so as to facilitate high-pressure gas injection.

In the present invention, a detector body (10, 20) for forming a closed space in which a gas layer (g) for filling an internal gas and converting an X-ray signal into an electric signal is formed, 40b, 40c, and 40d formed of a material capable of being subjected to a low-temperature process, which is formed inside the detector body, and a plurality of electrodes 30a, 30b, and 30c. The detector body described above is formed of the upper substrate 10 and the lower substrate 20, but may be integrally formed with another embodiment.

The upper and lower substrates 10 and 20 may be disposed in opposing relation to each other. In addition to the sealing process 50, the upper and lower substrates 10 and 20 may be separated from each other by a predetermined distance, 60).

It is preferable that the substrate 10 and 20 are basically formed of a metal material having a high X-ray transmittance, and the metal material forming the metal substrate may be Ni, Ti, AL, Cu, Al) or copper (Cu) may be used. Such a metal substrate is excellent in strength, and is not broken even when a high-pressure gas is injected, thereby ensuring stability.

The insulating film layers 40a, 40b, 40c, and 40d are formed between the substrate, the electrodes, and the electrodes to prevent short-circuiting. A material that enables low-temperature processing without using a conventional dielectric material, It is desirable to use materials. Particularly preferably, epoxy can be used, which has the advantage of being stably bonded at a low temperature while being hardened at room temperature and having an adhesive strength.

The electrodes (30a, 30b, 30c) are disposed on the inside and the outside of the substrate, and a room temperature electrode is preferably used instead of the conventional high temperature electrode. In particular, epoxy is printed on the metal substrate Two or three kinds of electrodes can be formed on the inside or the outside of the substrate. In the present preferred embodiment, the three-phase electrode is described as an example, but it is needless to say that two electrodes can be formed.

The plurality of electrodes formed in the present invention is basically formed of three electrodes, which are composed of the first to third electrodes 30a to 30c.

The first electrode 30a is formed on the lower side of the upper substrate 10 and the insulating layer 40a is formed on the upper and lower surfaces of the first electrode. In the present invention, it is possible to use a polymer material as the insulating layer, and preferably an epoxy can be printed and used as described above.

In addition, two second electrodes 30b and third electrodes 30c may be formed on the lower substrate. In this case, as shown in FIG. 2A, (FIG. 2B) disposed on the upper and lower surfaces of the lower substrate, respectively, or a structure (FIG. 2C) in which the second and third electrodes are disposed outside the lower substrate.

2A, when two electrodes are formed on an upper portion of a lower substrate, insulating layers 40b and 40c are formed between the respective electrodes, and a gap between the lower substrate 20 and an adjacent electrode (third electrode) It is preferable to form the insulating film layer 40d.

As described above, the insulating layer prevents shorting between the substrate and the electrode, between the electrode and the electrode, and is also applicable to the low-temperature process. Especially, the insulating layer is preferably formed using an epoxy material. The insulating layer may have a thickness of 1 to 100 μm for the purpose of preventing short-circuiting. The thickness of the first and second electrodes may also be 1 to 100 μm for improving the efficiency.

The first electrode 30a and the second electrode 30b are preferably patterned electrodes that are formed in a horizontal or vertical direction in the direction of the upper and lower substrates, respectively, and are formed so as to intersect each other.

In addition, the third electrode 30c may be a front electrode formed entirely.

The first electrode 30a and the third electrode 30c are respectively disposed on two substrates to apply an electric field and the second electrode 30b serves to transmit a signal to the outside. That is, when gas collides with the X-ray to generate electrons, information is read from the second electrode 30b (lead-out electrode).

FIG. 2B illustrates another arrangement of the second electrode and the third electrode formed on the lower electrode according to the present invention. 2A, a second electrode 30b is formed on the upper surface of the lower substrate 20 to be spaced apart from the insulating layer 40c, and an insulating layer 40d is formed on the lower surface of the lower substrate. A third electrode 30c spaced apart from the first electrode 30 is formed.

2C shows a structure in which a second electrode and a third electrode are arranged outside the lower substrate, and the role of each electrode is the same. Of course, in this case as well, it is preferable that the space between the electrodes and the substrate is separated by the insulating film layer.

The supporting part 60 of the present invention can separate pixels and serve as a support for supporting the substrate and can be formed using a mold in the shape of a barrier. Further, the supporting part 60 can directly form a lower substrate or an upper substrate, So as to be integrally formed with the barrier ribs. Of course, such a support may be removed if it is a pixel separation, in which case the metal substrate can be maintained in the form of a flat panel. In addition to the shape of the barrier rib, the support may be formed in the shape of a circle, an ellipse, or a polygon, and may be formed using a metal, ceramic, or polymer material.

In the present invention, a metal substrate and a polymer-based insulating film layer for a low-temperature process are formed so as to basically constitute components to be subjected to a high-temperature process in a low-temperature process, And a highly sensitive detector with high yield and high stability can be provided while remarkably shortening the production time. Especially, in the aspect of the X-ray transmittance, the detector according to the present invention can secure remarkable superiority. The following {Table 1} is a comparison chart measuring x-ray transmittance according to the state of each substrate.

{Table 1}

※ X-ray condition: 70kvp, 100mA, 0.032sec /; Temperature: 25.4 占 폚 / Humidity: 68%

In the above results, it can be seen that the epoxy substrate is applied to the aluminum substrate in the case where the x-ray transmittance is high and the current is most completely prevented.

Referring to FIG. 3, FIG. 3 is a graph showing signals of a flat panel gas x-ray detector manufactured by a vacuum and high temperature process of 2.0 × 10 ^-6 Torr using a soda glass substrate. According to the following formula, the value of 0.20nC / mR.cm ² is obtained in terms of sensitivity in this case.

{1}

Referring to Figure 4, Figure 4 shows the signals of an x-ray detector according to the present invention made in a low-temperature, vacuum-free process with varying materials and manufacturing processes. In this case, the sensitivity converted according to the above formula 1 is 0.42 nC / mR · cm 2.

Comparing the panels of FIG. 3 and FIG. 4, the present invention is more excellent in terms of sensitivity, and in particular, the manufacturing time can be reduced by about 80% or more because high temperature exhaust and firing process are not required. In particular, even if the same gas is injected, since the structure is stable without a high-temperature process, a highly efficient flat panel gas x-ray detector with much higher sensitivity can be manufactured.

The following {Table 2} compares the transmittance of the metal material applied to the substrate of the detector according to the present invention.

{Table 2}

※ X-ray condition: 70kvp, 100mA, 0.032sec / Temperature: 21.5 ℃ / Humidity: 35%

As can be seen from the above Table 2, it can be seen that the transmittance of copper and aluminum is remarkably high in a material applicable for forming the substrate. In particular, in terms of transmittance, these two metals can achieve the same transmittance as the soda glass substrate , A significantly higher transmittance than the PD200 glass substrate can be realized. The detector manufactured using the metal substrate according to the present invention can manufacture a high-efficiency X-ray detector with much higher sensitivity.

Also, when compared to conventional detectors with low yield and high price, it is possible to implement a large-area digital radiation image with relatively low cost, convenient and simple in manufacturing process, and high sensitivity. When such a high sensitivity can be realized, the user can implement a high sensitivity with a low dose to the patient.

The closed space constituting the detector for detecting an X-ray image according to the present invention is sealed with a structure capable of filling a gas, and a gas (g) is filled therein so as to be able to emit electrons in response to X- have. The gas filling space serves to convert an X-ray signal into an electrical signal, and may be filled with pure penning gas or mixed penning gas to be sealed.

More specifically, the pure penning gas to be filled in the gas layer may be selected from Xe, Kr, Ar, Ne, and He. The mixed penning gas may be a mixture of two or more of the pure penning gases, You may use any one selected from Xe + Ne, Kr + Ne, Ar + Ne, Xe + CO 2, Kr + CO 2, Ar + CO 2, Xe + CH 4, Kr + CH 4, Ar + CH 4 .

The amount of the pure penning gas or mixed penning gas to be filled can be adjusted by using the pressure, and it is desirable to maintain the gas pressure as high as possible in order to increase the X-ray sensitivity. That is, the most important factor for increasing the detection sensitivity of the gas type is the gas pressure. In the present invention, it is possible to provide a unique structure capable of high-pressure gas filling.

In the present invention, electronic information generated by scanning an x-ray on one pixel of an x-ray detector having a three-phase electrode can be read and processed on a screen. For example, electronic information generated in one pixel is read out Electrode) to form one peak for each pixel. When this peak information is calculated and processed on the display, an x-ray image can be acquired.

At this time, in the case where the barrier rib, which is the support portion of the present invention, is formed, the crosstalk phenomenon is prevented so that interference of signals can be prevented and accurate information can be read. Therefore, it is preferable that the present invention further comprises a circuit unit for reading out a signal amount formed by the voltages applied by the first and third electrodes through the second electrode.

When the outermost electrons forming the gas layer in the gas impinging on the X-ray in the gas layer are ionized, the amount of signal formed by the electrons accumulated through the second electrode is read by the circuit part to detect the image.

More specifically, the circuit unit reads a video signal in a read-out manner in a passive matrix type in which signal amounts due to electrons and holes accumulated in each pixel portion are sequentially read to implement image information.

The detector for X-ray image detection using the substrate and the processing method according to the present invention can improve the yield by shortening the manufacturing time by eliminating the high temperature process which is a problem of the conventional detector, There is an advantage that it can use. Specifically, in the present invention, a metal substrate is used for such a process, a room temperature electrode is used instead of a high temperature electrode, and a material capable of a low temperature process such as an epoxy is used as an insulating film layer. So that all of the high-temperature processes can be removed and the whole process can be performed at room temperature. As a result, it is possible to increase the stability of the substrate by eliminating the cracking phenomenon of the substrate during the process, and the production time can be remarkably reduced by the room temperature process.

In particular, when compared to conventional detectors with low yields and high cost, the manufacturing process is simple, and the process time is short, while the yield can be increased. Using a metal substrate with high x-ray transmittance and high strength, It is possible to provide an advantage that a detector having a digital radiographic image with high sensitivity can be provided.

In the foregoing detailed description of the present invention, specific examples have been described. However, various modifications are possible within the scope of the present invention. The technical idea of the present invention should not be limited to the embodiments of the present invention but should be determined by the equivalents of the claims and the claims.

1 is a cross-sectional view schematically showing a detector for X-ray image detection using a conventional plasma display (PDP).

FIGS. 2A to 2C are cross-sectional views of an X-ray detector according to the present invention.

3 is a graph of a detection signal of an X-ray detector according to the prior art.

4 is a graph of a detection signal of the X-ray detector according to the present invention.

Claims (25)

A detector body including a pair of metal substrates composed of an upper substrate and a lower substrate spaced apart from each other and forming a discharge space; A first electrode disposed on an inner surface of the upper substrate and insulated from the upper substrate and a second electrode and a third electrode disposed on an inner surface or an outer surface of the lower substrate and insulated from the metal substrate, A plurality of electrodes; At least one insulating film layer disposed on a surface of the plurality of electrodes; And a detector for detecting an X-ray image. The method according to claim 1, Wherein the insulating film layer is disposed between a surface of the upper substrate and an electrode adjacent to a surface of the lower substrate among the plurality of electrodes, Detector for X-ray image detection. The method of claim 2, Wherein the metal substrate comprises: Al, Cu, Ni, and Ti. The method of claim 2, The insulating film layer A second electrode disposed in contact with the surface of the electrode, Detector for X-ray image detection. The method of claim 4, The insulating film layer A detector for X-ray image detection comprising a polymeric material. The method of claim 4, The insulating film layer A detector for X-ray image detection comprising an epoxy. The method of claim 4, The insulating film layer Ray detector is disposed on both surfaces of at least one of the plurality of electrodes. The method according to any one of claims 1 to 7, Wherein the insulating film layer has a thickness of 1 占 퐉 to 1000 占 퐉. delete delete The method according to any one of claims 1 to 7, Wherein the plurality of electrodes comprise: A first electrode disposed on an inner surface of the upper substrate with an insulating film interposed therebetween, The second electrode and the third electrode are disposed inside the lower substrate of the metal substrate, And the insulating film layer is disposed between the second electrode, the third electrode, and the lower substrate. The method according to any one of claims 1 to 7, Wherein the plurality of electrodes comprise: A first electrode disposed on an inner surface of the upper substrate with an insulating film interposed therebetween, A second electrode is disposed inside the lower substrate of the metal substrate, A third electrode is disposed outside the lower substrate, And the insulating film layer is disposed between the lower substrate and the second electrode and the third electrode. The method according to any one of claims 1 to 7, Wherein the plurality of electrodes comprise: A first electrode disposed on an inner surface of the upper substrate with an insulating film interposed therebetween, A second electrode and a third electrode are disposed outside the lower substrate of the metal substrate, And the insulating film layer is disposed between the second electrode, the third electrode, and the lower substrate. The method of claim 11, And the first electrode and the second electrode are arranged to cross each other. The method of claim 11, And the third electrode is a front electrode. The method of claim 11, Wherein the thickness of the first electrode, the second electrode, and the third electrode is 1 占 퐉 to 1000 占 퐉. The method of claim 11, Wherein the first electrode, the second electrode, and the third electrode are normal-temperature electrodes. The method according to any one of claims 1 to 7, And a support for separating the pair of metal substrates from each other. 19. The method of claim 18, Wherein the support is a metal, ceramic, or polymer based material. 19. The method of claim 18, The support portion And a plurality of X-ray detectors are arranged to divide the discharge space. The method of claim 11, And a circuit unit for reading out a signal amount due to electrons and holes formed by a voltage applied to the first and third electrodes through the second electrode. The method according to any one of claims 1 to 7, And a gas layer filled in the discharge space. 23. The method of claim 22, The gas- Xe, Kr, Ar, Ne, and He. 23. The method of claim 22, The gas- Xe, Kr, Ar, Ne, and He. 27. The method of claim 24, The mixture Penning gas is Xe + Ne, Kr + Ne, Ar + Ne, Xe + CO 2, Kr + CO 2, Ar + CO 2, Xe + CH 4, Kr + CH 4, Ar + CH 4 any one selected from Detector for X-ray image detection.

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