KR101351399B1 - Apparatus and method of processing substrate - Google Patents

Abstract

The present invention relates to a substrate processing apparatus and a substrate processing method for preventing a plasma discharge from being transferred to a substrate, thereby minimizing damage and deterioration of film quality due to the plasma discharge. A process chamber providing a; A substrate support part disposed in the process chamber to support a substrate; A chamber lead disposed above the process chamber so as to face the substrate support; And first and second gas buffer spaces spaced apart from each other and installed on the lower surface of the chamber lid to separate and supply the first and second gases, and activate the second gas to inject the gas onto the substrate. And a spray module, wherein the gas spray module forms a plasma in a plasma discharge space spaced apart from an upper surface of the substrate using a first gas supplied from the first gas buffer space, and the second gas buffer space. Injecting the second gas from the plasma discharge space characterized in that it is activated.

Description

[0001] APPARATUS AND METHOD OF PROCESSING SUBSTRATE [0002]

The present invention relates to a substrate processing apparatus, and more particularly, to a substrate processing apparatus and a substrate processing method for increasing the deposition uniformity of a thin film deposited on a substrate.

Generally, in order to manufacture a solar cell, a semiconductor device, a flat panel display, etc., a predetermined thin film layer, a thin film circuit pattern, or an optical pattern must be formed on the surface of the substrate. For this purpose, A semiconductor manufacturing process such as a thin film deposition process, a photolithography process for selectively exposing a thin film using a photosensitive material, and an etching process for forming a pattern by selectively removing a thin film of an exposed portion are performed.

Such a semiconductor manufacturing process is performed inside a substrate processing apparatus designed for an optimum environment for the process, and recently, a substrate processing apparatus for performing a deposition or etching process using plasma is widely used.

The substrate processing apparatus using plasma includes a plasma enhanced chemical vapor deposition (PECVD) apparatus for forming a thin film using plasma, a plasma etching apparatus for etching and patterning a thin film.

1 is a schematic view for explaining a conventional substrate processing apparatus.

Referring to FIG. 1, a general substrate processing apparatus includes a chamber 10, a plasma electrode 20, a susceptor 30, and a gas injection means 40.

The chamber 10 provides a reaction space for the substrate processing process. At this time, the bottom surface of one side of the chamber 10 communicates with the exhaust port 12 for exhausting the reaction space.

The plasma electrode 20 is installed on the upper part of the chamber 10 to seal the reaction space.

One side of the plasma electrode 20 is electrically connected to an RF (Radio Frequency) power source 24 through a matching member 22. At this time, the RF power supply 24 generates and supplies RF power to the plasma electrode 20.

In addition, the central portion of the plasma electrode 20 is in communication with the gas supply pipe 26 for supplying a process gas for the substrate processing process.

The matching member 22 is connected between the plasma electrode 20 and the RF power supply 24 to match the load impedance and the source impedance of the RF power supplied from the RF power supply 24 to the plasma electrode 20. [

The susceptor 30 is installed inside the chamber 10 to support a plurality of substrates S to be loaded from the outside. The susceptor 30 is electrically opposite to the plasma electrode 20 and is electrically grounded via a support shaft 32 that supports the susceptor 30. At this time, the support shaft 32 is surrounded by the support shaft 32 and the bellows 34 which seals the lower surface of the chamber 10.

The gas injection means 40 is installed below the plasma electrode 20 so as to face the susceptor 30. A gas buffer space 42 is formed between the gas injection means 40 and the plasma electrode 20 to which the process gas supplied from the gas supply pipe 26 penetrating the plasma electrode 20 is supplied. At this time, the process gas is mixed with a source gas and a reactive gas for forming a predetermined thin film on the substrate (S), and is supplied to the gas buffer space (42). The gas injection means 40 injects the process gas into the reaction space through a plurality of gas injection holes 44 communicated with the gas buffer space 42.

In such a general substrate processing apparatus, the substrate S is loaded into the susceptor 30, and then RF power is supplied to the plasma electrode 20 while spraying a predetermined process gas into the reaction space of the chamber 10. By forming a plasma discharge P between the injection means 40 and the susceptor 30, molecules of the process gas ionized by the plasma discharge P are deposited on the substrate S to form a predetermined amount on the substrate S. Form a thin film.

However, in the conventional substrate processing apparatus, since the space where the process gas is injected and the space where the plasma discharge P is formed are the same, the plasma discharge P is made on the substrate S, and accordingly, the plasma discharge There is a problem that the substrate S is damaged and the film quality is degraded by (P). In addition, in the conventional substrate processing apparatus, the process gas ionized by the plasma discharge P is deposited around the gas injection hole 44 to form an abnormal thin film of a powder component, which causes particles to fall on the substrate. There is a problem.

Disclosure of Invention The present invention has been made in view of the above-described problems, and an object of the present invention is to provide a substrate processing apparatus and a substrate processing method which prevent the plasma discharge from being transferred to the substrate, thereby minimizing damage and degradation of the substrate due to the plasma discharge. It is done.

According to an aspect of the present invention, there is provided a substrate processing apparatus comprising: a process chamber for providing a reaction space; A substrate support part disposed in the process chamber to support a substrate; A chamber lead disposed above the process chamber so as to face the substrate support; And first and second gas buffer spaces spaced apart from each other and installed on the lower surface of the chamber lid to separate and supply the first and second gases, and activate the second gas to inject the gas onto the substrate. And a spray module, wherein the gas spray module forms a plasma in a plasma discharge space spaced apart from an upper surface of the substrate using a first gas supplied from the first gas buffer space, and the second gas buffer space. Injecting the second gas from the plasma discharge space characterized in that it is activated.

The gas injection module may include a ground electrode and a plasma electrode that are alternately arranged to be parallel to each other while being spaced apart from an upper surface of the substrate, and the plasma discharge space is between an end of each of the ground electrode and the plasma electrode. It is done.

The plasma electrode and the ground electrode may be stepped to have a predetermined height difference.

The first gas supplied to the first gas buffer space is injected into the gas injection space provided between the ground electrode and the plasma electrode through a first gas injection member, and the second gas is supplied to the second gas buffer space. The gas is injected into the plasma discharge space through the second gas injection member formed inside the plasma electrode.

A first gas supply hole formed to have a first diameter and communicating with the first gas buffer space; And a first gas injection hole formed to have a second diameter smaller than the first diameter and communicating with the first gas supply hole while communicating with the gas injection space.

The gas injection member may include a second gas supply hole vertically formed inside the plasma electrode to communicate with the second gas buffer space; A second gas distribution hole formed in the lower portion of the plasma electrode along a length direction of the plasma electrode to communicate with the second gas supply hole; And a second gas injection hole which is formed under the plasma electrode to communicate with the second gas distribution hole and injects the second gas in the lower and both side directions.

The second gas injection hole is formed in the central portion of the lower surface of the plasma electrode so as to communicate with the second gas distribution hole to inject the second gas in the downward direction; And a pair of side holes formed at each of both side surfaces of the lower surface of the plasma electrode with respect to the center hole so as to communicate with the second gas distribution hole, and spraying the second gas in both side directions. do.

The gas injection module may include: a lower frame having a plurality of ground electrodes projecting side by side to have a predetermined distance while being spaced apart from an upper surface of the substrate; An upper frame coupled to an upper surface of the lower frame to provide the first gas buffer space, and coupled to a lower surface of the chamber lead to provide the second gas buffer space; A plurality of first gas injection holes formed in the lower frame so as to communicate with the first gas buffer space to inject the first gas into a gas injection space between the ground electrode and the plasma electrode; A plurality of plasma electrodes disposed perpendicular to a lower surface of the lower frame to be disposed between the ground electrodes while being spaced apart from an upper surface of the substrate; A plasma power distribution member disposed on a lower surface of the upper frame to distribute plasma power and supply the plasma power to the plasma electrode; And a plurality of second gas injection holes which are formed inside each of the plurality of plasma electrodes to communicate with the second gas buffer space and inject the second gas into the plasma discharge space.

The plasma discharge space is characterized in that between the ground electrode and the termination of each of the plasma electrode.

The gas injection module may further include a gas diffusion member installed on a lower surface of the upper frame to diffuse the first gas supplied to the first gas buffer space into the first gas buffer space. Substrate processing apparatus.

According to another aspect of the present invention, there is provided a substrate processing method including: mounting at least one substrate on a substrate support installed in a process chamber; Forming a plasma in a plasma discharge space spaced from an upper surface of the substrate by using a first gas supplied to a first gas buffer space of a gas injection module provided on the substrate support; And injecting a second gas supplied to a second gas buffer space of the gas injection module spatially separated from the first gas buffer space into the plasma discharge space to activate the second gas through the plasma to activate the second gas. It characterized in that it comprises a step of depositing on the upper surface.

The gas injection module may further include a ground electrode and a plasma electrode that are alternately arranged to be parallel to each other while being spaced apart from an upper surface of the substrate, wherein the plasma discharge space is between an end of each of the ground electrode and the plasma electrode. It features.

The gas injection module may further include a ground electrode and a plasma electrode that are alternately arranged to be parallel to each other while being spaced apart from an upper surface of the substrate, and the plasma discharge space is stepped to have a predetermined height difference with the ground electrode. It is characterized in that between the termination of each of the plasma electrodes.

The first gas supplied to the first gas buffer space is injected into a gas injection space provided between the ground electrode and the plasma electrode, and the second gas supplied to the second gas buffer space is inside the plasma electrode. It is characterized in that the injection through the second gas injection hole formed in the plasma discharge space.

The second gas may be injected in the direction of the lower side and both sides of the plasma electrode by the second gas injection hole.

According to the solution of the said subject, the substrate processing apparatus and substrate processing method which concern on this invention have the following effects.

First, by separating the first and second gas through the spatially separated first and second gas buffer space, and forming a plasma in the plasma discharge space spaced from the upper surface of the substrate to prevent the plasma discharge from being transferred to the substrate Substrate damage and film quality degradation due to plasma discharge can be minimized.

Second, by separating and spraying the first gas and the second gas, it is possible to minimize the deposition of the abnormal thin film on the inner wall of the ground electrode and the plasma electrode.

1 is a schematic view for explaining a conventional substrate processing apparatus.
2 is a schematic view of a substrate processing apparatus according to an embodiment of the present invention.
3 is an exploded perspective view schematically illustrating the chamber lid and the gas injection module illustrated in FIG. 2.
4 is an exploded perspective view schematically illustrating the gas injection module illustrated in FIG. 3.
FIG. 5 is a cross-sectional view schematically illustrating a cross section of the II ′ line illustrated in FIG. 3.
FIG. 6 is a cross-sectional view schematically illustrating a cross section of the II-II ′ line illustrated in FIG. 3.
7 is a plan view conceptually showing ground electrodes and plasma electrodes alternately arranged on a substrate in the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings.

2 is a schematic view of a substrate processing apparatus according to an embodiment of the present invention, FIG. 3 is an exploded perspective view schematically illustrating the chamber lid and the gas injection module illustrated in FIG. 2, and FIG. 4 is illustrated in FIG. 3. 5 is a cross-sectional view schematically illustrating a gas injection module, and FIG. 5 is a cross-sectional view schematically illustrating a cross section of the II 'line shown in FIG. 3, and FIG. 6 is a cross-sectional view schematically showing a cross section of the II-II' line shown in FIG. 3. .

2 to 6, a substrate processing apparatus according to an embodiment of the present invention may include a process chamber 110 that provides a reaction space and a substrate support that is disposed in the process chamber 110 to support the substrate S. Referring to FIG. 120, a chamber lead 130 disposed above the process chamber 110 so as to face the substrate support part 120, and a plasma electrode provided on the bottom surface of the chamber lead 130 and not overlapping the top surface of the substrate S. And a gas injection module 140 that forms a plasma P in the plasma discharge space PDS between the PE and the ground electrode GE, activates the process gas PG, and sprays it onto the substrate S. do.

The process chamber 110 provides a reaction space for a substrate processing process (eg, a thin film deposition process). The bottom and / or side surfaces of the process chamber 110 may be in communication with an exhaust pipe 112 for exhausting the gas of the reaction space.

The substrate support part 120 is installed inside the process chamber 110 and supports the plurality of substrates S or one large area substrate S. In this case, an area of each of the plurality of substrates S may have a 1/4 area in the one large area substrate S.

The substrate support 120 may be electrically floating or grounded. The substrate supporter 120 is supported by a support shaft 122 penetrating the central bottom surface of the process chamber 110. At this time, the support shaft 122 exposed to the outside of the lower surface of the process chamber 110 is sealed by the bellows 124 installed on the lower surface of the process chamber 110.

The substrate support part 120 may be elevated to process conditions of the substrate processing process. In this case, the support shaft 122 of the substrate support part 120 is supported by the lifting shaft 126 of the lifting device 128. Accordingly, the upper surface of the substrate support part 120 is located relatively close to the lower surface of the gas injection module 140 within the process condition range by the elevating of the elevating shaft 126 according to the driving of the elevating device 128. Or relatively remote.

The chamber lid 130 is installed to cover the upper portion of the process chamber 110 to seal the reaction space. In addition, the chamber lid 130 supports the gas injection module 140. To this end, a lower surface of the chamber lid 130 is provided with a module coupling groove to which the gas injection module 140 is inserted and coupled.

On the upper surface of the chamber lid 130, first and second gas supply parts for separately separating and supplying the process gas PG, that is, the first and second gases G1 and G2, to the gas injection module 140 ( 150 and 160 are installed, and a plasma power supply unit 170 for supplying plasma power to the plasma electrode PE of the gas injection module 140 is installed.

The first gas supply unit 150 generates and supplies the first gas G1 for forming the plasma P in the space between the plasma electrode PE and the ground electrode GE to the gas injection module 140. The second gas supply unit 160 generates and supplies a second gas G2 including a material of a thin film to be deposited on the substrate S to the gas injection module 140. Here, the first gas G1 may be made of a reaction gas that reacts with the second gas G2 to form the thin film, and a purge gas for purging (or cleaning) the undeposited second gas G2. (Or cleaning gas). For example, when the silicon thin film is formed on the substrate S, the first gas G1 may be hydrogen (H2), and the second gas (G2) may be silane (SiH4).

The plasma power supply unit 170 generates a plasma power supply for forming the plasma P in a space between the plasma electrode PE and the ground electrode GE and supplies the plasma power to the plasma electrode PE. In this case, the plasma power source may be high frequency power or radio frequency (RF) power, for example, low frequency (LF) power, middle frequency (MF), high frequency (HF) power, or very high frequency (VHF) power. Can be. At this time, the LF power has a frequency in the range of 3 kHz to 300 kHz, the MF power has a frequency in the range of 300 kHz to 3 MHz, the HF power has a frequency in the range of 3 MHz to 30 MHz, And may have a frequency in the range of 300 MHz.

The plasma power supply unit 170 may include an impedance matching circuit (not shown) for matching the load impedance and the source impedance of the plasma power supplied to the plasma electrode PE. The impedance matching circuit may include at least two impedance elements (not shown) formed of at least one of a variable capacitor and a variable inductor.

The gas injection module 140 includes a ground electrode GE and a plasma electrode PE facing each other and is inserted into and coupled to a module coupling groove provided on a lower surface of the chamber lid 130. The gas injection module 140 forms a plasma P in the plasma discharge space PDS between the end of each of the plasma electrode PE and the ground electrode GE, thereby forming a process gas PG, that is, a second gas G2. Is activated and sprayed onto the substrate (S). That is, the gas injection module 140 injects the first gas G1 into the gas injection space provided between the ground electrodes GE and the plasma electrodes PE, which are alternately arranged in parallel with each other, to the plasma electrodes PE. Plasma P is applied to the plasma discharge space PDS by applying a plasma power supply, and the second gas G2 is injected into the plasma discharge space PDS through the plasma electrode PE. The second gas G2 is activated and sprayed onto the substrate S through the. To this end, the gas injection module 140 includes a lower frame 210, a support frame 220, an upper frame 230, a plasma power distribution member 240, and a plurality of plasma electrodes PE.

The lower frame 210 includes a ground plate 211, a ground sidewall 213, a plurality of ground electrodes GE, a plurality of electrode connection members 215, a plurality of pipe through holes 217, and a plurality of first gases. The injection member 219 is comprised.

The ground plate 211 is formed in a flat plate shape and faces the substrate support part 120.

The ground side wall 213 protrudes to have a predetermined height along the edge portion of the ground plate 211. The ground sidewall 213 is coupled to a lower edge portion of the upper frame 230 to space the upper surface of the ground plate 211 and the lower surface of the upper frame 230 by a predetermined height difference. Accordingly, a first gas buffer space 142 is provided between the upper surface of the lower frame 210 and the lower surface of the upper frame 230.

The plurality of ground electrodes GE protrude from the lower surface of the ground plate 211 to have a first height, and are disposed in parallel with each other to have a predetermined interval on the lower surface of the ground plate 211. Accordingly, the first gas injection space GSS is provided between the plurality of parallel ground electrodes GE.

Each of the plurality of electrode connection members 215 is provided on an upper surface of the ground plate 211 to be electrically connected to the plurality of plasma electrodes PE. At this time, each of the plurality of electrode connection members 215 is provided on the upper surface of the ground plate 211 to be electrically insulated from the ground plate 211 by an insulator (not shown). Each of the plurality of electrode connection members 215 is electrically connected to the plurality of plasma power distribution members 240 to electrically connect the plurality of plasma power distribution members 240 and each of the plurality of plasma electrodes PE.

Each of the plurality of pipe through holes 217 is formed to pass through the ground plate 211 and overlaps each of the plurality of plasma electrodes PE. In this case, three first through holes 217 may be formed at regular intervals in the ground plate 211 overlapping one plasma electrode PE.

Each of the plurality of first gas injection members 219 may pass through the ground plate 211 to communicate with the first gas buffer space 142 and the first gas injection space GSS. Each of the plurality of first gas injection members 219 injects the first gas G1 flowing from the first gas buffer space 142 to the first gas injection space GSS at a predetermined pressure. To this end, each of the plurality of first gas injection members 219 includes a first gas inflow hole 219a and a first gas injection hole 219b as illustrated in FIG. 5.

The first gas inlet hole 219a is formed to have a first diameter from an upper surface of the ground plate 211 so as to communicate with the first gas buffer space 142.

The first gas injection hole 219b is formed through the ground plate 211 from the lower portion of the first gas injection hole 219b so as to communicate with the first gas supply hole 219a and to communicate with the gas injection space GSS. do. In this case, the first gas injection hole 219b is formed to have a second diameter smaller than the first diameter of the first gas inlet hole 219a in order to inject the first gas G1 at a predetermined pressure. In addition, the height of the first gas inlet hole 219a may be higher than the height of the first gas injection hole 219b for smooth inflow of the first gas G1.

The first gas injection holes 219b are formed in two rows to have a predetermined interval along the length direction of each of the gas injection spaces GSS.

In FIG. 5, the diameter of the first gas injection hole 219b is formed to be vertical, but is not limited thereto. The diameter of the first gas injection hole 219b may be a gas from the first gas inlet hole 219a. It may increase toward the injection space GSS. That is, the first gas injection hole 219b communicates with the first gas inlet hole 219a and communicates with the inlet having the second diameter, and the gas injection space GSS, when the first gas injection hole 219b is larger than the first or second diameter. It may have an outlet having a diameter and an inclined surface between the inlet and the outlet.

As shown in FIGS. 2 and 5, the support frame 220 is mounted on the chamber wall of the process chamber 110 to support the lower inner wall of the module coupling groove of the chamber lid 130. Support the edges. The support frame 220 is made of a metal material to electrically ground the lower frame 210 by electrically connecting the lower frame 210 and the chamber lid 130.

The upper frame 230 includes an upper plate 231, an upper sidewall 233, a plurality of power supply rods 235, a first tube coupling hole 237, and a plurality of tube insertion holes 239. .

The upper plate 231 is formed in a flat plate shape is coupled to the upper surface of the lower frame 210. Accordingly, the first gas buffer space 142 is provided between the lower surface of the upper plate 231 and the upper surface of the lower frame 210.

The upper sidewall 233 protrudes to have a predetermined height along the edge portion of the upper plate 231. The upper sidewall 233 is coupled to the lower edge portion of the chamber lid 130 to space the upper surface of the upper plate 231 from the lower surface of the chamber lid 130 by a predetermined height difference. Accordingly, a second gas buffer space 144 is provided between the upper surface of the upper frame 230 and the lower surface of the chamber lid 130.

The plurality of power supply rods 235 are formed to be surrounded by the insulator and installed to penetrate the upper plate 231 to be electrically connected to the plasma power distribution member 240. In addition, the plurality of power supply rods 235 are inserted into the rod through hole 131 formed in the chamber lid 130 and electrically connected to the plasma power supply 170. The plurality of power supply rods 235 transfer the plasma power supplied from the plasma power supply unit 170 to the plasma power distribution member 240.

The pipe coupling hole 237 is formed through the upper plate 231 so as to communicate with the first gas buffer space 142. The first gas supply pipe 238 connected to the first gas supply unit 150 and penetrating the chamber lid 130 is coupled to the pipe coupling hole 237. Accordingly, the first gas G1 is supplied to the pipe coupling hole 237 through the first gas supply pipe 238 from the first gas supply unit 150.

The first gas G1 supplied to the pipe coupling hole 237 is supplied to the first gas buffer space 142 and diffused in the first gas buffer space 142, thereby lowering the aforementioned lower frame 210. It is injected into the gas injection space GSS through the plurality of first gas injection members 219 formed in the.

On the other hand, the gas injection module 140 is a gas diffusion member 250 for diffusing the first gas (G1) supplied to the first gas buffer space 142 to the entire inner region of the first gas buffer space 142. It may be configured to further include.

As shown in FIG. 5, the gas diffusion member 250 is installed on a lower surface of the upper frame 230 so as to overlap the lower portion of the pipe coupling hole 237 and is supplied through the pipe coupling hole 237. The first gas G1 is diffused to the entire inner region of the first gas buffer space 142. The lower surface of the upper frame 230 overlapping the gas diffusion member 250 may be concave.

Each of the plurality of tube insertion holes 239 is formed at regular intervals to penetrate the upper plate 231 and communicate with the second gas buffer space 144. Each of the plurality of pipe coupling holes 237 overlaps each of the plurality of pipe through holes 217 formed in the lower frame 210.

The second gas buffer space 144 is supplied with a second gas G2 from the second gas supply unit 160 through a plurality of second gas supply lines 133 formed in the chamber lid 130.

Plasma power distribution member 240 is inserted into the lower surface of the upper frame 230 is electrically connected to the plurality of power supply rods 235 and the plasma power delivered from the plurality of power supply rods 235 a plurality of plasma Supply to electrode PE. To this end, the plasma power distribution member 240 includes a line insulating member 242 and a power supply line 244.

The line insulating member 242 is made of an insulating material to electrically insulate the power supply line 244. That is, the line insulating member 242 electrically insulates the lower frame 210 from the power supply line 244.

The power supply line 244 is provided on the line insulating member 242 and electrically connected to each of the plurality of power supply rods 235. The power supply line 244 is electrically connected to each of the plurality of electrode connection members 215 penetrating through the line insulating member 242. The power supply line 244 transfers plasma power supplied from each of the plurality of power supply rods 235 to each of the plurality of electrode connection members 215.

The power supply line 244 allows uniform plasma power to be supplied to each plasma electrode PE regardless of the arrangement position of the plurality of plasma electrodes PE. To this end, the power supply line 244 may be formed of a single layer or a multilayer structure so that the line resistance according to the distance between each of the plurality of power supply rods 235 and each plasma electrode PE is compensated.

Each of the plurality of plasma electrodes PE is inserted into the gas injection space GSS so as to be parallel to the ground electrode GE of the lower frame 210 at predetermined intervals. Each of the plurality of plasma electrodes PE forms a plasma P in the plasma discharge space PDS according to the plasma power supplied from the plasma power supply 170, and is supplied from the second gas buffer space 144. The gas G2 is injected into the plasma discharge space PDS to activate the second gas G2. To this end, each of the plurality of plasma electrodes PE includes an electrode frame 251, a plurality of second gas supply pipes 253, a second gas injection member 255, and the like, as illustrated in FIGS. 2 to 5. And a plurality of power connection units 257.

The electrode frame 251 is formed to have a rectangular cross section having a predetermined length and is inserted into the gas injection space GSS provided by the ground electrode GE. Both side surfaces of the electrode frame 251 are opposite to the ground electrode GE, and a bottom surface of the electrode frame 251 is formed to have a semicircular cross section, and is spaced apart from the top surface of the substrate support part 120 by a predetermined distance. To be opposed. The electrode frame 251 is made of a metal material and serves to generate the plasma P in the plasma discharge space PDS according to the plasma power supplied from the plasma power supply unit 170.

The plasma discharge space PDS according to the present invention is not formed in a region between the plasma electrode and the substrate as in the prior art, but is formed between the plasma electrode PE and the ground electrode GE facing each other. Therefore, according to the present invention, since the plasma discharge space PDS does not overlap with the substrate S supported by the substrate support 120 and / or the thin film formed on the substrate S, the substrate is discharged by plasma discharge. The problem that S is damaged and the film quality deposited on the substrate S is degraded can be solved.

In particular, as can be seen in the enlarged view of FIG. 2, according to an embodiment of the present invention, the distance d between the plasma electrode EP and the substrate S is greater than the distance between the plasma electrode PE and the ground electrode GE. ) Can be solved by solving the plasma discharge. If the distance d between the plasma electrode PE and the substrate S is smaller than the distance between the plasma electrode PE and the ground electrode GE, the plasma electrode PE and the substrate S are supported. Plasma discharge may also occur between the substrate support units 120, which may adversely affect the substrate S by the plasma discharge.

In addition, according to an embodiment of the present invention, since the plasma electrode PE and the ground electrode GE protrude in a direction perpendicular to the upper surface of the substrate S, the cations or electrons generated by the plasma discharge are generated. It does not move to the (S) plane, but moves in the direction of the plasma electrode PE or the ground electrode GE, which is parallel to the upper surface of the substrate S, thus minimizing the influence of the substrate S due to the plasma discharge. have.

The lower surface of the plasma electrode PE, that is, the electrode frame 251 and the ground electrode GE are disposed to have a predetermined height difference h. That is, the lower surface of the electrode frame 251 protrudes toward the substrate S to have a predetermined height h than the lower surface of the ground electrode GE. In this way, the lower surface of the electrode frame 251 and the ground electrode GE are formed to be stepped so that the plasma discharge space PDS is not formed between the electrode frame 251 facing each other and the inner surface of each of the ground electrode GE. In addition, the plasma discharge space PDS may be formed between the stepped electrode frame 251 and each end of each of the ground electrodes GE. Accordingly, due to the plasma formed between the inner surface of each of the electrode frame 251 and the ground electrode GE, the abnormal thin film may be prevented from being deposited on the inner surface of each of the electrode frame 251 and the ground electrode GE. have.

The plurality of second gas supply pipes 253 are formed perpendicular to the upper surface of the electrode frame 251 to be inserted into the pipe through-holes 217 formed in the lower frame 210, such that the electrode frame 251 is lower frame 210. It should be installed perpendicular to the lower surface of the In this case, three second gas supply pipes 253 having a predetermined interval may be formed on the upper surface of the electrode frame 251.

Each of the plurality of second gas supply pipes 253 is formed in the electrode frame 251 to be electrically connected to the electrode frame 251. Accordingly, in order to electrically insulate the lower frame 210 and the second gas supply pipe 253 which are in a ground state, each of the plurality of second gas supply pipes 253 is installed on a lower surface of the lower frame 210. The electrode insulating member 260 is inserted into the tube through hole 217 to be electrically insulated from the lower frame 210 by the electrode insulating member 260.

Each of the plurality of second gas supply pipes 253 communicates with the second gas buffer space 144 through a second gas delivery pipe 270 inserted into and coupled to the pipe through hole 217.

The second gas delivery pipe 270 is formed to be surrounded by an insulator, is inserted perpendicular to the pipe through hole 217, and is coupled to the second gas supply pipe 253, and the first gas buffer space 142 is formed. It penetrates and is inserted into the tube insertion hole 239 formed in the upper frame 230 to communicate with the second gas buffer space 144. Accordingly, the second gas supply pipe 253 communicates with the second gas buffer space 144 through the second gas delivery pipe 270, thereby allowing the second gas buffer space 144 from the second gas supply part 160. ) Is supplied into the electrode frame 251 through the second gas delivery pipe 270 and the second gas supply pipe 253.

Between the second gas supply pipe 253 and the second gas delivery pipe 270 may be sealed by a sealing member such as an O-ring, and the second gas delivery pipe 270 and the pipe. Between the insertion holes 239 may be sealed by the sealing member.

The second gas injection member 255 is formed in the electrode frame 251 to inject the second gas G2 supplied through the second gas supply pipe 253 into the plasma discharge space PDS. To this end, the second gas injection member 255 includes a plurality of second gas supply holes 255a, a second gas distribution hole 255b, and a plurality of second gas injection holes 255c.

Each of the plurality of second gas supply holes 255a is formed perpendicular to the inside of the electrode frame 251 to communicate with each of the plurality of second gas supply pipes 253. Accordingly, each of the plurality of second gas supply holes 255a communicates with the second gas buffer space 144 through the second gas supply pipe 253 and the second gas delivery pipe 270, thereby providing a second gas buffer. The second gas G2 is supplied from the space 144.

The second gas distribution hole 255b is formed in the lower surface of the electrode frame 251 along the length direction of the electrode frame 251 and communicates with each of the plurality of second gas supply holes 255a. The second gas distribution hole 255b is supplied with a second gas G2 supplied through the second gas supply hole 255a.

Each of the plurality of second gas injection holes 255c is formed at regular intervals through the lower surface of the electrode frame 251 so as to communicate with the second gas distribution holes 255b. The plurality of second gas injection holes 255c injects the second gas G2 distributed by the second gas distribution holes 255b in the lower and both side directions. To this end, the second gas injection hole 255c includes a center hole CH and a pair of side holes SH1 and SH2.

The center hole CH passes through the center of the lower surface of the electrode frame 251 and communicates with the second gas distribution hole 255b so as to substrate the second gas G2 supplied through the second gas distribution hole 255b. Spray in the downward direction perpendicular to the support 120. The second gas G2 injected through the center hole CH is formed in the plasma discharge space PDS by being injected into a portion of the plasma discharge space PDS formed under the electrode frame 251. It is activated by the plasma P and sprayed onto the substrate S.

Each of the pair of side holes SH1 and SH2 communicates with the second gas distribution hole 255b through the lower both sides of the electrode frame 251 based on the center hole CH, thereby communicating with the second gas distribution hole. The second gas G2 supplied through 255b is injected toward the end of the adjacent ground electrode GE. In this case, each of the pair of side holes SH1 and SH2 is formed to face the bottom surface of the ground electrode GE.

The second gas G2 injected through each of the pair of side holes SH1 and SH2 is injected toward the bottom surface of the ground electrode GE, thereby terminating the respective ends of the electrode frame 251 and the ground electrode GE. It is activated by the plasma P formed in the plasma discharge space PDS formed therebetween and is injected onto the substrate S. Accordingly, the first electrode G1 injected into the gas injection space between the ground electrode GE and the plasma electrode PE is prevented from stagnation or vortex on the lower surface and the lower surface of the ground electrode GE. It is possible to prevent the abnormal thin film from being deposited in the lower region of GE).

Each of the plurality of power connection portions 257 is formed perpendicular to the upper surface of the electrode frame 251 and is inserted into and electrically connected to the electrode connection member 215 formed on the lower frame 210. Each of the plurality of power connection units 257 supports the electrode frame 251 and serves to supply plasma power to the electrode frame 251. That is, as illustrated in FIG. 6, each of the plurality of power connection units 257 is inserted into and coupled to the electrode connection member 215 formed in the lower frame 210, and the plasma power distribution member is formed through the electrode connection member 215. Electrically connected to 240 allows plasma power supplied from the plasma power distribution member 240 to be applied to the electrode frame 251.

The plurality of power connection units 257 and the electrode connection member 215 may be sealed by a sealing member such as an O-ring, and the electrode connection member 215 and the lower frame 210 may be sealed. Can be sealed by the sealing member.

The gas injection module 140 as described above applies plasma power to the plasma electrode PE while injecting the first gas G1 into the gas injection space provided between the ground electrode GE and the plasma electrode PE. Plasma P is formed in the plasma discharge space PDS between the ground electrode GE and each end of the plasma electrode PE, and the plasma is formed through the second gas injection hole 255 of the plasma electrode PE. By injecting the second gas G2 into the discharge space PDS, the second gas G2 activated by the plasma P of the plasma discharge space PDS is injected onto the substrate S. Accordingly, a predetermined thin film is deposited on the substrate S by the activated second gas G2. In this case, as shown in FIG. 7, since the ground electrode GE and the plasma electrode PE are alternately arranged side by side on the substrate S, the activated second gas G2 is formed on the upper surface of the substrate S. As shown in FIG. The film is sprayed over the entire region, and thus a thin film having a uniform thickness is formed over the entire region of the upper surface of the substrate S. FIG.

The substrate processing method using the substrate processing apparatus according to the embodiment of the present invention described above is as follows.

First, a plurality of substrates S or one large-area substrate S is loaded on the substrate support 120 to be placed thereon.

Then, the first gas supplied to the first gas buffer space 142 by supplying the first gas G1 to the first gas buffer space 142 of the gas injection module 140 through the first gas supply unit 150. The gas G1 is injected into the gas injection space between the ground electrode GE and the plasma electrode PE through the first gas injection hole 219 of the lower frame 210. As described above, the plasma power is supplied to the plasma electrode PE through the plasma power supply unit 170 while the first gas G1 is injected. Accordingly, the electric field is applied to the plasma discharge space PDS between the ground electrode GE and the end of each of the plasma electrodes PE by the ground electrode GE in the ground state and the plasma electrode PE to which the plasma power is supplied. The plasma P is formed in the plasma discharge space PDS.

Simultaneously with the formation of the plasma P, the second gas G2 is supplied to the second gas buffer space 144 through the second gas supply unit 160, and the plasma electrode (eg, through the second gas buffer space 144). By supplying the second gas G2 to the second gas injection hole 255 of the PE, the second gas G2 is injected into the plasma discharge space PDS through the second gas injection hole 255. Accordingly, the second gas G2 is activated by the plasma P formed in the plasma discharge space PDS and sprayed onto the substrate S to be deposited on the upper surface of the substrate S to form a predetermined thin film. do.

As described above, the substrate processing apparatus and the substrate processing method according to the embodiment of the present invention provide the first and second gas buffer spaces spatially separated in the gas injection module 140 and supply the first gas buffer space to the first gas buffer space. Plasma P is formed in the plasma discharge space PDS spaced apart from the upper surface of the substrate S by using the first gas G1, and the second gas G supplied to the second gas buffer space is plasma. By spraying the discharge space PDS to activate the second gas G2 in accordance with the plasma P and spraying the substrate S, a thin film having a uniform thickness can be formed over the entire area of the upper surface of the substrate S. FIG. . Accordingly, the present invention prevents the plasma discharge from being transferred to the substrate, thereby minimizing damage and degradation of the substrate due to the plasma discharge, and separating the first and second gases G1 and G2 from the ground electrode. Deposition of the abnormal thin film on the inner wall of the plasma electrode can be minimized.

It will be understood by those skilled in the art that the present invention may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. It is therefore to be understood that the above-described embodiments are illustrative in all aspects and not restrictive. The scope of the present invention is defined by the appended claims rather than the detailed description and all changes or modifications derived from the meaning and scope of the claims and their equivalents are to be construed as being included within the scope of the present invention do.

110: process chamber 120: substrate support
130: chamber lid 140: gas injection module
150: first gas supply unit 160: second gas supply unit
170: plasma power supply 210: lower frame
220: support frame 230: upper frame
GE: ground electrode PE: plasma electrode

Claims (15)

A process chamber providing a reaction space;
A substrate support part disposed in the process chamber to support a substrate;
A chamber lead disposed above the process chamber so as to face the substrate support; And
A first gas and a second gas, which are installed on a lower surface of the chamber lid, are supplied separately, and inject the first gas to form a plasma in a plasma discharge space spaced from an upper surface of the substrate, and to form a plasma in the second plasma discharge space. And a gas injection module for injecting a gas to inject a second gas activated by the plasma onto the substrate,
The gas injection module is configured to include a ground electrode and a plasma electrode alternately arranged to be parallel to each other while being spaced apart from the upper surface of the substrate,
And the plasma discharge space is between the ground electrode and the plasma electrode. delete The method of claim 1,
And the plasma electrode and the ground electrode are stepped to have a height difference. The method of claim 1,
The first gas is injected into the gas injection space provided between the ground electrode and the plasma electrode through a first gas injection member,
And the second gas is injected into the plasma discharge space through a second gas injection member formed inside the plasma electrode. 5. The method of claim 4,
The first gas injection member,
A first gas supply hole formed to have a first diameter and to which the first gas is supplied; And
And a first gas injection hole formed to have a second diameter smaller than the first diameter and in communication with the first gas supply hole, the first gas injection hole communicating with the gas injection space. 5. The method of claim 4,
Wherein the gas injection member
A second gas supply hole formed perpendicular to the inside of the plasma electrode to supply the second gas;
A second gas distribution hole formed in the lower portion of the plasma electrode along a length direction of the plasma electrode to communicate with the second gas supply hole; And
And a second gas injection hole formed below the plasma electrode so as to communicate with the second gas distribution hole and injecting the second gas in the lower and both side directions. The method according to claim 6,
The second gas injection hole,
A central hole formed in a central portion of a lower surface of the plasma electrode so as to communicate with the second gas distribution hole and injecting the second gas downward; And
And a pair of side holes formed on each of both side surfaces of the lower surface of the plasma electrode with respect to the center hole so as to communicate with the second gas distribution hole, and spraying the second gas in both side directions. Substrate processing apparatus. The method of claim 1,
The gas injection module,
A lower frame in which the ground electrode and the plasma electrode protrude alternately vertically to be parallel to each other while being spaced apart from an upper surface of the substrate;
Coupled to an upper surface of the lower frame to provide a first gas buffer space through which the first gas is supplied, and a second gas buffer space through which the second gas is supplied while being spatially separated from the first gas buffer space; An upper frame coupled to a lower surface of the chamber lid;
A plasma power distribution member installed on a lower surface of the upper frame to distribute plasma power and supply the plasma power to the plasma electrode;
A plurality of first gas injection holes formed in the lower frame so as to communicate with the first gas buffer space to inject the first gas into a gas injection space between the ground electrode and the plasma electrode; And
And a plurality of second gas injection holes which are formed inside each of the plurality of plasma electrodes to communicate with the second gas buffer space and inject the second gas into the plasma discharge space. Device. The method of claim 8,
And the plasma discharge space is between the ground electrode and an end of each of the plasma electrodes. The method of claim 8,
The gas injection module may further include a gas diffusion member installed on a lower surface of the upper frame to diffuse the first gas supplied to the first gas buffer space into the first gas buffer space. Substrate processing apparatus. Mounting at least one substrate on a substrate support installed inside the process chamber;
Plasma is injected into a plasma discharge space between a ground electrode and a plasma electrode which are alternately arranged to be parallel to each other while being spaced apart from an upper surface of the substrate by injecting a first gas supplied to a gas injection module installed inside the process chamber so as to face the substrate support. Forming a; And
And injecting a second gas, which is spatially separated from the first gas, to be supplied to the gas ejection module into the plasma discharge space, to inject a second gas activated by the plasma onto the upper surface of the substrate. A substrate processing method characterized by the above-mentioned. The method of claim 11,
And the plasma discharge space is between the ground electrode and an end of each of the plasma electrodes. 13. The method of claim 12,
And the ground electrode and the plasma electrode are stepped to have a height difference. The method of claim 11,
The first gas is injected into the gas injection space provided between the ground electrode and the plasma electrode,
And the second gas is injected into the plasma discharge space through a second gas injection hole formed in the plasma electrode. 15. The method of claim 14,
And the second gas is injected into the lower side and both side directions of the plasma electrode by the second gas injection hole.

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