KR101206526B1 - Method for forming fine patterns by molding fine droplets - Google Patents

Abstract

The present application relates to a pattern formation method using the micro-droplet casting method. More specifically, it relates to a method for forming a fine pattern using droplets by applying pressure to an elastic layer containing a liquid material to elute droplets to form droplet patterns, and forming negative patterns corresponding to the droplet patterns on the molding member. will be.

Description

Micro pattern formation method using microdroplet casting method {METHOD FOR FORMING FINE PATTERNS BY MOLDING FINE DROPLETS}

The present application relates to a method of forming a micropattern using a microdroplet casting method. More specifically, the present invention relates to a method of forming a micropattern by replicating a droplet pattern formed by applying pressure to an elastic layer containing a liquid substance to elute the microdroplets using a casting mold method.

When manufacturing semiconductors, electronics, photoelectrics, magnetics, display devices, microelectromechanical devices, etc., a process of forming a micropattern on a substrate is inevitably performed. There is a photolithography method of forming a fine pattern using light. The photolithography method is applied to a substrate on which a material to be patterned is laminated (or deposited) on a polymer material having a responsiveness to light (for example, a photoresist, etc.), and a reticle designed in an arbitrary pattern of interest. The light is transmitted through the polymer material through the light, and the polymer material exposed through the developing process is removed to form a pattern mask (or an etching mask) having a target fine pattern on the material to be patterned. Thereafter, by performing an etching process using a pattern mask, the material laminated on the substrate is patterned into a desired pattern. On the other hand, in the photolithography method as described above, the circuit line width (or pattern line width) is determined by the wavelength of light used in the exposure process. Therefore, in consideration of the current state of the art, it is very difficult to form an ultrafine pattern, for example, an ultrafine pattern having a line width of 100 nm or less, on a substrate using a photolithography process. In addition, in the conventional photolithography method, in order to form a fine pattern on a substrate, there are various steps, for example, substrate cleaning, substrate surface treatment, photosensitive polymer coating, low temperature heat treatment, exposure, development, high temperature heat treatment, cleaning, and the like. In addition to the long and complicated manufacturing time because of the process must be performed, there is a problem that requires the use of expensive equipment, which is a factor that leads to a rise in manufacturing costs and a decrease in productivity.

Recently, various kinds of techniques for replacing the complicated and expensive photolithography process have been proposed. Such alternative techniques include the imprinting method, the micro-contact printing method, and the inkjet printing method. Etc.

Among the various conventional techniques described above, the stamping method forms a fine pattern on the polymer by pressing a pattern mold having a large hardness having a desired shape (pattern) with a physical force, for example, reactive ion etching. Etching) and the like to transfer it to the substrate. However, the above-described imprinting method has a fatal disadvantage that the polymer thin film and the substrate are deformed or broken because the high pressure is used when pressing.

The conventional microcontact printing method is a method of chemically changing a surface state by contacting an elastomeric polymer mold having a shape of a desired shape on a substrate, thereby leaving only a desired portion, and then etching or selectively depositing it. However, the conventional micro-contact printing method as described above has a disadvantage in that the separation degree of the implemented pattern or the selectivity during etching is poor.

The conventional inkjet printing method is a method of printing an image of a predetermined color by discharging minute droplets of printing ink to a desired position on a recording medium.

However, when forming a predetermined image or pattern using the inkjet head, there is a disadvantage in that the resolution of the pattern that can be implemented is limited. Specifically, according to the inkjet printing method, it is difficult to realize a resolution of about 10 μm or less even in a laboratory, and the resolution of about 50 μm is known to be limited in actual production sites.

Therefore, the present application forms a micro pattern on the substrate through a simple and economical process using a micro-droplet casting method, using this to produce a structure of a form difficult to manufacture through a general pattern forming process, or nanoscale An object of the present invention is to provide a method of forming a layered structure that can implement excellent characteristics occurring in a region to a structure of a macroscopic scale region.

However, the problems to be solved by the present invention are not limited to the problems described above, and other problems not described can be clearly understood by those skilled in the art from the following description.

In order to achieve the above object, an aspect of the present application, by applying pressure to an elastic layer containing a liquid material to elute the micro-droplets of the liquid material to the surface of the elastic layer to form a droplet pattern; And forming a recessed pattern corresponding to the droplet pattern on the molding member by contacting the molding member with the droplet pattern.

Another aspect of the present application provides a micropattern structure formed by a micropattern forming method using the microdroplet molding method as described above.

According to the present invention, by injecting the liquid material in the elastic layer that may include a liquid material and by eluting the liquid droplets to form a fine pattern by duplicating the droplet pattern on the thin film, a high-resolution fine pattern without deformation or breakage of the thin film or substrate Can be provided. In addition, the micropattern can be formed by a simple process of applying pressure to the elastic layer, which can reduce manufacturing costs and improve productivity. In addition, by using the micropattern forming method of the present application layered structure that can produce a structure of the form difficult to manufacture through a general pattern forming process, or to implement the excellent characteristics occurring in the nanoscale region to the structure of the macroscopic scale region Can be provided.

1 is a process chart for explaining a method of forming a fine pattern using an elastic layer having a flat surface according to an embodiment of the present application.
2 is a process chart for explaining a method of forming a fine pattern using an elastic layer having a corrugated pattern according to an embodiment of the present application.
3 is a flowchart illustrating a method of forming a fine pattern using an elastic layer having a flat surface according to an embodiment of the present disclosure.
Figure 4 is a schematic diagram showing the compression of the elastic layer by pressing one direction of the elastic layer in an embodiment of the present application.
FIG. 5 is an electron micrograph of a droplet pattern formed by eluting droplets on a surface of a flat elastic layer in an embodiment of the present disclosure.
6 is an AFM photograph of a pattern formed by varying the time to apply pressure to the elastic layer having a flat surface in one embodiment of the present application.
7 is an AFM photograph of a pattern formed by varying the time to apply a pressure to the elastic layer having a corrugated pattern in one embodiment of the present application.

Throughout this specification, when a layer or member is located "on" with another layer or member, it is not only when a layer or member is in contact with another layer or member, but also between two layers or another member between the two members. Or when another member is present. In addition, when a part is said to "include" a certain component, which means that it may further include other components, except to exclude other components unless specifically stated otherwise.

As used herein, the terms "about", "substantially", and the like, are used at, or in close proximity to, numerical values when manufacturing and material tolerances inherent in the meanings indicated are provided to aid the understanding herein. In order to prevent the unfair use of unscrupulous infringers.

In one aspect of the present application, the method for forming a micropattern using a microdroplet casting method, applying pressure to an elastic layer containing a liquid material to elute the microdroplets of the liquid material on the surface of the elastic layer to form a droplet pattern and; And contacting the molding member with the droplet pattern to form an intaglio pattern corresponding to the droplet pattern on the molding member.

As used herein, the elastic layer has absorbency for the liquid material and may be used without particular limitation as long as it is commonly used in the art. In an exemplary embodiment, the elastomer layer may include one selected from the group consisting of organic polymers, inorganic polymers, organic-inorganic hybrid polymers, and combinations thereof having absorption to the liquid material. For example, the elastomer layer may include polydimethylsiloxane (PDMS), polyimide, polyurethane, polyurethane-acrylate, epoxy resin, polyethylene, polypropylene, and ethylene vinyl. Acetate, polyester, foam polyethylene, polyacrylates, polycarbonates, polystyrenes, acrylonitrilebutadienestadienes, polyurethane rubbers, acrylic rubbers, silicone rubbers, latexes Rubber, urethane foam (foam), acrylic foam, silicone foam, and combinations thereof may be selected from the group consisting of, but is not limited thereto.

In an exemplary embodiment, a pattern may be formed on one surface of the elastic layer. In one embodiment, the pattern formed on the elastic layer may include a pleated pattern, but is not limited thereto. The pleated pattern may have a pattern of various shapes that are regular or irregular. For example, the pleated pattern may include a regular or irregular wave pattern, but is not limited thereto.

In an exemplary embodiment, the elastic body may be prepared by curing a prepolymer capable of forming the elastomeric polymer, but is not limited thereto. The prepolymer may be used without particular limitation as known in the art as being capable of forming the elastomeric polymer. In one embodiment, the elastomer may be prepared by applying or casting a prepolymer or a solution containing the same, or a solution containing the prepolymer and the curing agent on a suitable substrate and then curing. . In one embodiment, the curing may use heat curing or UV curing, but is not limited thereto. The term " prepolymer " refers to a polymer having a relatively low degree of polymerization obtained by, for example, progressing the polymerization reaction to a certain extent in order to facilitate molding, when molding is difficult when the polymerization is completed. A monomer, a catalyst, a crosslinking agent, and / or a curing agent and the like are added to the prepolymer and reacted under appropriate conditions to obtain a final polymer. Prepolymers of most polymers are commercially available, for example PDMS (polydimethylsiloxane) As the prepolymer, Sylgard 184 (manufactured by Dow Corning), RTV 615A and 615B (manufactured by General Electric) can be used, and various other products such as polyurethane prepolymer can be purchased.

In an exemplary embodiment, the amount of the liquid material contained or absorbed in the elastic layer may be controlled by curing the elastic layer into which the liquid material is injected, before applying pressure to the elastic layer into which the liquid material is injected. It is not limited to this.

In an exemplary embodiment, when the elastomer layer is prepared by curing the corresponding prepolymer, the prepolymer itself may serve as a liquid material. In this case, by controlling the degree of curing of the prepolymer, it is possible to control the amount of the liquid material contained in the elastic layer by controlling the amount of the prepolymer remaining in the elastic layer formed by the curing.

In an exemplary embodiment, when the elastomer layer is prepared by curing a mixture comprising a corresponding prepolymer and a curing agent, the prepolymer itself may serve as a liquid material. In this case, by adjusting the ratio of the curing agent mixed with the prepolymer to adjust the degree of curing of the prepolymer, by adjusting the amount of the prepolymer remaining in the elastic layer formed by the curing contained in the elastic layer The amount of the liquid substance can be adjusted.

In an exemplary embodiment, the method may further include adjusting the amount of the liquid material absorbed into the elastic layer by additionally injecting the liquid material after curing the elastic layer, but is not limited thereto. In one embodiment, when the elastomer layer is prepared by curing the corresponding prepolymer or a mixture of the prepolymer and the curing agent, the prepolymer itself may serve as a liquid material, and after curing the prepolymer, the liquid material As an additional injection of the prepolymer, the amount of the liquid material absorbed in the elastic layer may be controlled, but is not limited thereto.

In an exemplary embodiment, a layer of a mixed solution comprising a prepolymer and a curing agent is formed on a substrate, the prepolymer is further injected as the liquid material, and the layer of the mixed solution is cured to form the elastomeric layer. It may be, but is not limited thereto.

In example embodiments, the method may further include transferring the droplet pattern onto a substrate or a separate pattern before contacting the molding member with the droplet pattern, but is not limited thereto.

In an exemplary embodiment, the microdroplets may include having a nanometer size or micrometer size, but is not limited thereto.

In an exemplary embodiment, the liquid material may include one selected from the group consisting of an organic liquid, an inorganic liquid, and a combination thereof, but is not limited thereto. The liquid material may be absorbed into the elastic layer, and may be used without particular limitation as long as it is commonly used in the art. For example, the organic liquid may be selected from the group consisting of liquid aliphatic hydrocarbons, liquid aromatic hydrocarbons, liquid ketones, liquid ethers, liquid esters, liquid alcohols, liquid amines, and liquid amides, or include mixtures thereof. It may be, but is not limited thereto. Alternatively, the liquid material may include, for example, the prepolymer that may be used to form the elastomer layer, as described above, but is not limited thereto.

In an exemplary embodiment, as described above, when the elastic layer is prepared by curing the corresponding prepolymer, the prepolymer itself may serve as a liquid material.

In an exemplary embodiment, the liquid material may include inorganic nanoparticles, but is not limited thereto. For example, the inorganic nanoparticles may include metal nanoparticles, inorganic semiconductor nanoparticles, metal oxide nanoparticles, or mixtures thereof, but are not limited thereto. In one embodiment, the inorganic nanoparticles may be injected into the elastic layer is dispersed in a suitable solvent such as water, alcohol, or an organic solvent, but is not limited thereto.

In example embodiments, the method may include forming a plurality of layers by repeating the droplet pattern formation and the intaglio pattern corresponding to the droplet pattern on the molding member a plurality of times, but are not limited thereto. .

In an exemplary embodiment, the molding member may be in a fluid state, but is not limited thereto. The molding member used herein may be used without particular limitation as long as it is commonly used in the art. As a non-limiting example thereof, the molding member may include polyurethane acrylate (PUA), polyethylene glycol diacrylate (PEG-DA), polyester acrylate or perfluorinated polyether dimethacrylate (PFPE-DMA), or the like. UV curable polymers; Polydimethylsiloxane (PDMS), MINS (polyurethane-based material), polycarbonate (polycarbonate, PC), PVA (polyvinylalcohol), epoxy resin, urethane, Teflon (Teflon) and may be selected from the group consisting of a combination thereof But it is not limited thereto. Alternatively, the molding member may include a liquid such as water and alcohol, but is not limited thereto.

In another aspect of the present application, it is possible to provide a fine pattern structure formed by the method.

By the method of forming a micropattern according to the present application, a micropattern is formed on a substrate through a simple and economical process using a droplet pattern, and by using the micropattern, the structure of the macroscale region is characterized by excellent characteristics occurring in the nanoscale region. It can form a layered structure that can be implemented in. For example, the method of forming a micropattern of the present application may be applied to fabrication of a polarizer, a hologram, a superhydrophobic material, a diffraction grating, a reflector, and a micro-fluidic channel.

DETAILED DESCRIPTION Hereinafter, embodiments and examples of the present disclosure will be described in detail with reference to the accompanying drawings so that those skilled in the art may easily implement the present disclosure.

It should be understood, however, that the present invention may be embodied in many different forms and is not limited to the embodiments and examples described herein. In the drawings, the same reference numbers are used throughout the specification to refer to the same or like parts.

Hereinafter, with reference to FIGS. 1 to 3, an embodiment of the pattern forming method using the micro-droplet molding method will be described.

Referring to FIG. 1, a solution in which a prepolymer and a curing agent are mixed to form an elastomer layer is coated or cast on a suitable substrate (not shown) to form an elastomer forming layer 101 including the prepolymer and the curing agent (FIG. 1A). Then, the prepolymer is injected as the liquid material 104 to form a layer of the liquid material under the elastic body forming layer (FIG. 1B). At this time, the layer of the liquid material is located under the elastic body forming layer by the density difference. Subsequently, the elastomer layer 102 including the prepolymer and the curing agent may be thermally cured or UV cured to form the elastomer layer 102 (FIG. 1C). For example, the proportion of the liquid material injected into the elastic body forming layer may be maintained at 5 wt% or less, 3 wt% or less, or 1 wt% or less, but is not limited thereto. However, those skilled in the art will know that the composition ratio of the other ranges belonging to the specific ranges described above, which can be recognized that belongs to the disclosure of the present application.

When the ratio of the curing agent decreases, the amount of hardening of the elastomeric forming layer decreases to increase the amount of liquid substance remaining inside the elastic layer, and conversely, increasing the ratio of the curing agent increases the amount of curing of the elastomeric forming layer. As a result, the amount of the liquid substance remaining in the elastic layer is reduced. By adjusting the ratio of the curing agent as described above, it is possible to control the amount of the liquid substance remaining inside the elastic layer after curing by adjusting the degree of curing of the elastic body forming layer. The ratio of the prepolymer to the curing agent may be adjusted in the range of 5: 1 to 100: 1 by weight, but one of ordinary skill in the art will know the composition ratio of other ranges belonging to the specific ranges described above, which belong to the present disclosure. It can be recognized. In one embodiment, after applying or casting a solution of the prepolymer and the curing agent on an appropriate substrate, the prepolymer may be additionally added to control the amount of the prepolymer as a liquid substance remaining inside the formed elastic layer. In another embodiment, when it is known to have an unreacted prepolymer inside, such as a PDMS elastomer, the amount of the prepolymer as a liquid substance that remains uncured can be reduced by additionally reducing the amount of hardener without adding a prepolymer. The process can be carried out by adjusting.

In this manner, before the step of applying the following pressure, the amount of the liquid material 104 in the elastic layer 102 may be adjusted to adjust the amount and / or size of the microdroplets eluted by pressurization.

Subsequently, the layer of the liquid material is turned upward, and then pressure is applied to the elastic layer 102 to elute the microdroplets 104a on the surface of the elastic layer (FIG. 1D). The direction in which pressure is applied to the elastic layer into which the liquid material is injected is not particularly limited. For example, pressure may be applied to one side or both sides of the elastic layer, but is not limited thereto.

For example, by varying the intensity and time of applying pressure to the elastic layer, the size of the microdroplets formed by adjusting the degree of the microdroplets of the liquid substance eluted to the surface of the elastic layer and the interval between the microdroplets By adjusting the shape of the droplet pattern can be adjusted.

For example, by applying pressure to the elastomer layer, at least about 5%, or from about 5% to about 50%, or from about 5% to about 40%, or from about 5% to about 30%, or about 5% to about 20%, about 5% to about 15%, or about 5% to about 10% compression, but is not limited thereto. One of ordinary skill in the art would recognize that the percentage ratios of other ranges belonging to the specific ranges described above are within the disclosure herein.

For example, the elastic layer 102 may be momentarily pressurized or may be pressurized for several seconds or minutes, but is not limited thereto. The shorter the time for applying pressure to the elastic layer, the smaller the size of the eluted liquid droplets. On the contrary, the longer the time for applying pressure to the elastic layer, the larger the size of the eluted liquid droplets.

Subsequently, the droplet pattern 104a formed by the microdroplets eluted on the surface of the elastic layer as described above is contacted with the molding member 106 to form an intaglio pattern corresponding to the droplet pattern on the molding member (FIG. 1E). At this time, if necessary, the method may further include curing the molding member in which the intaglio pattern corresponding to the droplet pattern is formed. The curing method may be used a conventional method in the art to which the present application belongs, and is not particularly limited. For example, the molding member may be cured by being exposed to heat or ultraviolet rays, but is not limited thereto. When the molding member 106 is in a fluid state, after applying or casting the molding member in a fluid state on the droplet pattern, the substrate 108 is covered to form an intaglio pattern corresponding to the droplet pattern on the molding member. .

Further, by using the above method, not only a single layer but also a plurality of intaglio patterns can be formed. For example, a plurality of patterns may be repeated by repeatedly forming a droplet pattern on the surface of the elastic layer and contacting the formed droplet pattern with the molding member to form an intaglio pattern corresponding to the droplet pattern on the molding member. Can be formed.

In another embodiment, referring to FIG. 2, the elastic layer 102 may use a pattern formed on a surface opposite to a surface on which the liquid material 104 is injected (FIG. 2A). For example, the pattern formed on the side opposite to the surface on which the liquid material is injected may include a wrinkled pattern, but is not limited thereto.

The elastic layer having the corrugated pattern may be formed by using a mold having a corrugated pattern on its surface to control its structure and shape. For example, as a method of forming an elastic layer having the corrugated pattern, a polymer mold having a target shape is brought into close contact with a substrate on which a multilayer thin film is formed, and fluidity is imparted to an underlying layer through heat treatment. Physical self-assembly of microstructures by anisotropic buckling through a simple process that induces a buckling shape and physically controls the buckling phenomenon according to the shape of the polymer template. , Advanced Materials 14, 1383 (2002)), but is not limited to such.

2A and 2B, an elastomer forming layer 101 including the prepolymer and a curing agent is coated or cast by applying or casting a solution in which a prepolymer and a curing agent are mixed to form an elastomer layer on a mold 110 having a corrugated pattern. 2A, and then the prepolymer is injected as the liquid material 104 to form a layer of the liquid material under the elastic body forming layer (FIG. 2B). At this time, the layer of the liquid material is located under the elastic body forming layer by the density difference. Subsequently, the elastomer layer 102 including the prepolymer and the curing agent may be thermally cured or UV cured to form the elastomer layer 102 (FIG. 2C). For example, the ratio of the liquid material injected into the elastic body forming layer may be maintained at 5% or less, or 3% or less, or 1% or less, but is not limited thereto. However, those skilled in the art will know that the composition ratio of the other ranges belonging to the specific ranges described above, which can be recognized that belongs to the disclosure of the present application.

Next, referring to FIG. 2D, after the mold 110 having the corrugated pattern is turned upward, the mold is removed so that the layer of the liquid material having the corrugated pattern is positioned upward on the surface of the elastic layer. Pressure is applied to the elastic layer 102 to elute the microdroplets 104a on the surface of the elastic layer. In the step of applying pressure to the elastic layer 102a having the corrugated pattern, the position of the eluted microdroplets may be adjusted. Referring to FIG. 2D, unlike the flat elastic layer 102, the elastic layer 102a having the corrugated pattern is eluted only at the bone portion of the corrugated pattern, not at the floor of each corrugation. do. This allows for selective elution of the microdroplets due to the expansion of the volume at the ridges and the contraction of the volume at the valleys due to the application of lateral pressure. As such, the position of the microdroplets formed on the surface of the elastic layer may be adjusted by using the structural characteristics of the elastic layer 102a having the corrugated pattern.

For example, by varying the intensity and time of applying pressure to the elastic layer, the size of the microdroplets formed by adjusting the degree of the microdroplets of the liquid substance eluted to the surface of the elastic layer and the interval between the microdroplets By adjusting the shape of the droplet pattern can be adjusted. For example, by applying pressure to the elastomer layer, the elastomer layer is at least about 5%, or from about 5% to about 50%, or from about 5% to about 40%, or from about 5% to about 30%, or about 5% to about 20%, about 5% to about 15%, or about 5% to about 10% compression, but is not limited thereto. One of ordinary skill in the art would recognize that the percentage ratios of other ranges belonging to the specific ranges described above are within the disclosure herein.

For example, the elastic layer 102 may be momentarily pressurized or may be pressurized for several seconds or minutes, but is not limited thereto. The shorter the time for applying pressure to the elastic layer, the smaller the size of the eluted liquid droplets. On the contrary, the longer the time for applying pressure to the elastic layer, the larger the size of the eluted liquid droplets.

Subsequently, the droplet pattern 104a formed by the microdroplets eluted on the surface of the elastic layer as described above is contacted with the molding member 106 to form an intaglio pattern corresponding to the droplet pattern on the molding member. At this time, if necessary, the method may further include curing the molding member in which the intaglio pattern corresponding to the droplet pattern is formed. The curing method may be used a conventional method in the art to which the present application belongs, and is not particularly limited. For example, the molding member may be cured by being exposed to heat or ultraviolet rays, but is not limited thereto. When the molding member 106 is in a fluid state, after applying or casting the molding member in a fluid state on the droplet pattern, the substrate 108 is covered to form an intaglio pattern corresponding to the droplet pattern on the molding member. .

In addition, by using the above-described method, not only a single layer but also a plurality of intaglio patterns can be formed. For example, a plurality of patterns may be repeated by repeatedly forming a droplet pattern on the surface of the elastic layer and contacting the formed droplet pattern with the molding member to form an intaglio pattern corresponding to the droplet pattern on the molding member. Can be formed.

Hereinafter, the present invention will be described with reference to Examples, but the present invention is not limited thereto. In addition, the description is not described herein, so those skilled in the art that can be sufficiently technically inferred the description thereof will be omitted.

It was an elastomer layer using a PDMS (polydimethylsiloxane), a prepolymer and a curing agent for forming PDMS (Sylgard 184 silicone elastomer kit, Dow corning Corp.) for the elastic body 10 to form: a solution mixed in a weight ratio of 1 Patricia After casting on a silicon wafer bonded to a plate (Petri Dish) and injecting the PDMS-forming prepolymer as a liquid material, the PDMS elastomer layer by heat-curing the PDMS-forming prepolymer and the curing agent mixed solution layer at 70 ℃ for 2 hours Formed. At this time, in order to flatten the surface of the PDMS elastomer layer formed by the thermosetting, the elastomer layer was cured on the silicon wafer. Due to the difference in density between the elastomer layer and the liquid material in the curing process, a layer of the PDMS prepolymer was formed on the elastomer layer and the lower surface as the liquid material. Subsequently, after the liquid layer was turned upward, the elastic layer was compressed by 10% and maintained for 10 minutes to elute microdroplets of the PDMS prepolymer as a liquid substance on the surface of the elastic layer.

As shown in FIG. 4, 10% of the total length of the PDMS layer was compressed by using a device capable of applying force in one direction of the PDMS layer including the liquid material layer.

 The droplet pattern formed by the eluted microdroplets was observed under a microscope, and the micrograph is shown in FIG. 5.

Finally, PUA (polyurethane acrylate) in fluid state was used as the molding member. The eluted droplet pattern was contacted with the PUA molding member to form an intaglio pattern corresponding to the droplet pattern on the PUA molding member. The PUA molding member was patterned and UV cured in the same manner to form a micropattern.

Using an elastic layer as described in Example 1 having a flat surface as the elastic layer, and forming a fine pattern in the same manner as in Example 1, applying pressure to the flat elastic layer in which the liquid material is injected AFM image (scale) of the pattern formed for each of the case where the pressure is applied to compress the elastic layer to 10% as described in Example 1, but the pressure is applied momentarily and the pressure is applied for 1 minute (scale) 10 μm X × 10 μm) are shown in FIGS. 6A and 6B, respectively.

In the step of using an elastic layer having a corrugated pattern on one surface, to form a fine pattern in the same manner as in Example 1, applying pressure to the elastic layer having a corrugated pattern in which the liquid material is injected, AFM photograph (scale 15 μm × 15 μm) of the pattern formed for the case where the pressure was applied to compress the elastic layer to 10% as described in Example 1 but the pressure was applied for 10 seconds, 1 minute, and 5 minutes, respectively. Are shown in Fig. 7 (a: press for 10 seconds, b: press for 1 minute, c: press for 5 minutes), respectively.

As described above, the present application has been described in detail, but the present disclosure is not limited to the above embodiments, and may be modified in various forms, and may be modified by those skilled in the art within the technical spirit of the present disclosure. It is obvious that many other variations are possible.

101: elastic body forming layer
102: elastic layer
102a: elastic layer having a corrugated pattern
104: liquid substance
104a: microdroplets (or droplet patterns)
106: molding member
108: substrate
110: mold having a pleated pattern

Claims (12)

Applying pressure to an elastic layer containing a liquid substance to elute microdroplets of the liquid substance onto the surface of the elastic layer to form a droplet pattern;
Contacting a molding member with the droplet pattern to form an intaglio pattern corresponding to the droplet pattern in the molding member:
Including,
Micro pattern formation method using the micro-droplet casting method.
The method of claim 1,
The elastic layer is a fine pattern forming method using a micro-droplet casting method comprising a one selected from the group consisting of polymers, inorganic materials and combinations thereof having an absorbing power to the liquid material.
The method of claim 1,
A method for forming a micropattern using a microdroplet casting method, comprising: forming the elastomer layer by curing the prepolymer capable of forming the elastomer layer or a mixture including the prepolymer and a curing agent.
The method of claim 3, wherein
The prepolymer itself acts as the liquid substance,
Controlling the amount of the liquid material contained in the elastomer layer by adjusting the proportion of the curing agent mixed with the prepolymer, thereby controlling the amount of the prepolymer remaining inside the elastomer layer formed by the curing. The fine pattern formation method using the micro-droplet casting method.
The method of claim 3, wherein
The prepolymer itself serves as the liquid substance,
Forming a layer of a mixed solution comprising the elastomeric layer-forming prepolymer and a curing agent on a substrate, further injecting the prepolymer as the liquid material, and then curing the layer of the mixed solution. Micropattern forming method using casting method.
The method of claim 1,
And transferring the droplet pattern onto a substrate or a separate pattern before contacting the molding member with the droplet pattern.
The method of claim 1,
The liquid material is a micropattern forming method using a micro-droplet casting method comprising the one selected from the group consisting of organic liquid, inorganic liquid and combinations thereof.
The method of claim 1,
The liquid material is a fine pattern formation method using the micro-droplet molding method that comprises inorganic nanoparticles.
The method of claim 1,
And forming a plurality of patterns by repeating the droplet pattern formation and the intaglio pattern corresponding to the droplet pattern on the molding member a plurality of times.
The method of claim 1,
The pattern is formed on one surface of the elastic layer, fine pattern formation method using the micro-droplet molding method.
11. The method of claim 10,
The pattern formed on one surface of the elastic layer comprises a corrugated pattern, fine pattern formation method using the micro-droplet molding method.
It is formed by a micropattern forming method using the molding method of the microdroplets of any one of claims 1 to 11,
Including an intaglio pattern corresponding to the droplet pattern,
Fine pattern structure.

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