KR101125573B1 - Apparatus for manufacturing fine clad by sabsurface activated bonding process - Google Patents

Abstract

The present invention according to the embodiment of the present invention is an apparatus for manufacturing ultra-thin metal-precision layered composite material using the SAB method, the housing, at least one pump, unwinder, plasma processing unit having a voltage of up to 5kW, water-cooled guide It includes a roller, conductance, a low-pressure rolling unit with a load cell capable of controlling loads up to 3000 kg and its value, a rolling roll with crown, and a winder. By performing surface activation and low pressure rolling of the base material by plasma treatment during the process of transferring the precision layered composite material to be bonded by the unwinder and the winder, the precision layered composite material can be efficiently produced in a vacuum state.

Surface Activated Bond (SAB), Fine Layered Composite (Fine Clad), Surface Activated, Low Rolled, FIOG

Description

Ultrathin-metal precision layered composite fabrication apparatus using surface-activated bonding method {APPARATUS FOR MANUFACTURING FINE CLAD BY SAB (SURFACE ACTIVATED BONDING) PROCESS}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for producing ultrathin metal precise layered composite material using surface activated bonding (SAB), and more particularly to a flexible input output gate (FIOG), a lithium ion secondary battery, and a fuel cell. The present invention relates to an apparatus for manufacturing an ultrathin metal precision layered composite material applicable to the present invention.

Due to the rapid development of the IT industry, there is a demand for high performance of hardware that is used as an electronic and electronic precision parts material in the information and communication field. As a result, low power miniaturization technology, enhanced wired / wireless communication functions, and miniaturization, intelligence, and high functionalization of personal portable terminals such as mobile phones have also been required.

In particular, as printed circuit boards (PCBs), which are the most important components for thin and thin electronic components, are replaced with flexible printed circuit boards (FPCBs) from rigid circuit boards, the core components of existing circuit boards and It is required to reduce the thickness of the material and improve its characteristics to peripheral parts. As such core parts, polymer materials, ceramic materials and metal materials are used independently or in combination to be applied as one integrated part. In particular, copper alloy ultrathin-metal fine layer composite material (precision layer composite material), which is a composite material using copper ultrathin and copper ultrathin, has been increasingly used as a core material for peripheral components as well as circuit boards. In particular, ultra-thin metal-precision layered composite materials using copper foil are not only applied as core components of FIOG (Flexible Input Output Gate) for FPC and HDD, but also core materials of high-precision electronic components such as LI / LIP Battery IOG and PTC.

Copper alloy ultrathin-metal precision layered composite materials are manufactured by laminating metals such as Al, Ni, Ag, Au on copper foil, and are generally manufactured by EBP (Electrolytic Plated Bonding). The EPB process is a method of manufacturing different types of metals, such as Ni, by electrolytic or electroless plating on pretreated copper foil.

However, according to this method, the physical properties of the material are changed, the types of materials that can be bonded are limited, and molding in the form of a precision layered composite material is difficult. Another method is the SAB method used in the present invention is a joining method, which has recently emerged as an advanced technology in the manufacture of precision layered composite materials in Japan and the like. It is a process to make a metal precision layered composite material. The SAB method does not change the physical properties of the material compared to conventional joining methods (low pressure rolling at room temperature enables low pressure stress), and there are various types of joining and molding in a clad form. Has In addition, this process has a smooth bonding surface, which is advantageous for transmitting and receiving electrical signals since it undergoes ion etching before processing, regardless of the thickness and material of the material, and there is no deformation of the alloy layer at the bonding interface. However, in order to suppress adhesion failure due to oxide at the bonding interface, optimum conditions for activation conditions of the surface state through pretreatment and rolling conditions for improving adhesion are required.

Accordingly, the present invention is to solve the problems between the above processes in the manufacturing of the precision layered composite material, the object of the present invention is to provide a device that can produce a more efficient ultra-metal precision layered composite material using the SAB method. There is.

The apparatus for manufacturing ultra-thin metal precise layered composite material using the SAB method according to the embodiment of the present invention, the first chamber for charging the first metal foil and the second metal foil, the first chamber is provided in the first chamber And an ion gun for irradiating a plasma to the surface of the second metal foil, a second chamber into which the plasma-treated first metal foil and the second metal foil are charged, and the first metal foil and plasma-treated in the second chamber. It comprises a rolling unit for joining the surfaces of the second metal foil to each other low-rolling.

Precision layered composite material manufacturing apparatus according to another embodiment of the present invention further comprises a conductance (conductance) is installed between the first chamber and the second chamber to maintain the difference in the degree of vacuum between the first chamber and the second chamber. can do.

On the other hand, the precision layered composite material manufacturing apparatus according to another embodiment of the present invention may further include a guide roller for transferring the plasma treated first metal foil and the second metal foil to the second chamber.

The guide roller may include a cooling passage for cooling the first metal foil and the second metal foil.

The ion gun may process the first metal foil and the second metal foil with a plasma power of 300w to 3Kw, respectively.

On the other hand, the precision layered composite material manufacturing apparatus according to another embodiment of the present invention, the unwinder (un-winder) provided in the first chamber so that the first metal foil and the second metal foil is mounted; And a winder provided in the second chamber to wind the manufactured precision layered composite material.

The apparatus may further include a stress control device provided in the first chamber to control stresses of the first metal foil and the second metal foil transferred from the unwinder.

The stress control device may include a sensor for measuring a load applied to the first metal foil and the second metal foil, and a brake device installed to adjust the stress based on the load measured by the sensor.

Precision layered composite material manufacturing apparatus according to another embodiment of the present invention further comprises a position control device provided in the first chamber to adjust the position of the ends of the first metal foil and the second metal foil conveyed from the unwinder. It may include.

The position control device includes a sensor for detecting end positions of the first metal foil and the second metal foil, and an actuator for adjusting end positions of the first metal foil and the second metal foil based on the position detected by the sensor. can do.

The winder may transfer the first metal foil and the second metal foil from the unwinder during a plasma treatment and a low rolling process at a driving speed of 10 m / min or less.

The first chamber may have a vacuum degree of 10 ⁻⁵ to 10 ⁻⁶ Torr, and the second chamber may have a vacuum degree of 10 ⁻⁶ to 10 ⁻⁷ Torr.

The rolling unit may be rolled by applying a reduction ratio of 1 to 3%.

The rolling unit may be rolled under a rolling load of 3000kg or less.

The first metal foil may be made of Cu and Cu alloys, and the second metal foil may be made of Ni, Al, Ag, or Au alloys.

The ion gun may inject 200-300 sccm of high purity Ar gas to generate plasma to surface treat the first metal foil and the second metal foil.

The rolling unit may be low rolled using a roll having a crown of 0.05 mm or less.

The rolling unit may include a load cell capable of reading a pressure load value and an indicator capable of displaying a value read from the load cell.

An apparatus for manufacturing ultra-thin metal precision layered composite material using SAB method according to an embodiment of the present invention, a housing, at least one pump, an unwinder, a plasma processing unit having a voltage of up to 5 kW, a water-cooled guide roller, conductance (conductance), a low-pressure rolling unit with a load cell capable of controlling loads up to 3000 kg and its value, a rolling roll with crown, and a winder.

According to the present invention, the apparatus for producing ultrathin metal fine layered composite material according to the SAB method may be applied to the low layer of the low rolling unit in consideration of the bending deformation of the roller. In manufacturing, a roll crown may be applied to maintain uniform bonding strength between the edge portion and the center portion. The roll crown may apply 0.05 mm (MAX).

The apparatus for producing ultra-metal-precision layered composite material according to the SAB method according to the present invention is a stress control device (ATC: Auto provided in the first chamber to control the stress of the first metal foil and the second metal foil conveyed from the unwinder) And a tension controller).

The stress control device (ATC) is a sensor for measuring the load applied to the first metal foil and the second metal foil, a brake installed to adjust the stress based on the load measured by the sensor, and the base material detected by the stress sensor. And a controller device for controlling the operation of the brake based on the stress value and the set stress pack.

An apparatus for manufacturing ultrathin metal precision layered composite material by the SAB method is a position control device (EPC: Edge Position) provided in the first chamber to adjust the lateral position of the ends of the first metal foil and the second metal foil conveyed from the unwinder. Controller may be further included.

The position control device EPC includes a sensor for detecting end positions of the first metal foil and the second metal foil, an actuator for adjusting end positions of the first metal foil and the second metal foil based on the position detected by the sensor, and the edge position sensor. The controller may include a controller that controls the actuator based on an edge position value of the base material detected by the base material.

The plasma processing unit may be equipped with a gas supply supplying a plasma generating gas to the first chamber and automatically adjusting the injection amount through a sensor, and generating a plasma by using the plasma generating gas supplied by the gas supply. It may include an ion gun (Ion Gun). The ion gun may include an ion emitting part for emitting ions of the plasma generating pot, and the ion emitting part may have a shape longer than the height. In addition, the ion emitting unit may have an effective treatment width of 400 mm or more.

The first chamber may have a vacuum degree of 10 ⁻⁵ to 10 ⁻⁷ Torr and the second chamber may have a vacuum degree of 10 ⁻⁶ to 10 ⁻⁸ Torr.

The rolling unit may be rolled by applying a reduction ratio of 1 to 3%. The rolling unit is capable of low rolling precision layered composite materials with a rolling load of 3000 kg or less.

The first metal foil may be made of Cu and Cu-based alloys, and the second metal foil may be made of Ni-based, Al-based, Ag-based, or Au-based alloys.

By performing surface activation and low pressure rolling of the base material by plasma treatment during the process of transferring the precision layered composite material to be bonded by the unwinder and the winder, the precision layered composite material can be efficiently produced in a vacuum state.

In addition, by adjusting the initial position of the base material or the edge position between the air, the base material can be unwound and wound more uniformly, and thus the joining quality of the base material can be improved.

In addition, by adjusting the initial stress of the base material or inter-process, damage to the base material can be prevented, and the bonding strength of the precision layered composite material can be improved through stress control.

In addition, it is possible to control the change in the physical properties of the base material to be bonded between processes by minimizing the thermal effect of the water-cooled guide roller,

In addition, by controlling the load load through the load cell and the indicator of the low rolling unit, it is possible to apply a pressing load suitable for the characteristics of the base material to be joined, the edge portion and the center by the roll applied the crown of the constituting device of the low rolling unit Uniform bonding strength of the part can be realized.

Furthermore, according to the manufacturing method of the precision layered composite material using the SAB method according to the present invention can have a smooth and uniform bonding interface, which is advantageous for transmitting and receiving electrical signals, and various kinds according to the required characteristics without changing the physical properties of the material It has the effect of joining the materials.

That is, according to the present invention, it is possible to manufacture an ultrathin metal fine layered composite material having excellent bonding strength and good mechanical properties in an optimum process atmosphere using the SAB method.

DETAILED DESCRIPTION Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art may easily implement the present invention.

The main configuration and function of the apparatus according to the embodiment of the present invention are as follows. The ultrathin metal precision layered composite material manufacturing apparatus using copper and copper alloy includes a housing forming two sealed chambers. The housing is formed with a partition wall therein to form a first chamber, which is a space in which plasma processing is performed on two base materials bonded to each other, and a second chamber in which the two base materials subjected to plasma surface activation are low-rolled. A connecting passage is formed to connect the chambers to each other. The connecting passage in the above may be an elongated connecting passage connecting both chambers, and the two base materials to be joined to each other are transferred from the first chamber to the second chamber through the connecting passage.

In addition, the housing may be provided with a door for access of the worker and the base material to be joined and a window for observing the working state from the outside. The material and shape of the housing can be variously changed.

At least one pump is operated such that the first chamber is at a first set vacuum degree and the second chamber is at a second set vacuum degree. Since the vacuum degrees of both chambers can be set to different vacuum degrees so as to be suitable for each process, it is preferable that the connecting passage described above is formed so that both chambers having different vacuum degrees can each maintain the set vacuum degree as much as possible. For this purpose, the connection passage is preferably formed to have a small vacuum conductance.

The at least one pump may include a rotary pump that can be used as an auxiliary pump in the initial vacuum and the high vacuum, and a turbomolecular pump and a cryo pump for the high vacuum.

For example, the turbomolecular pump may be connected to the first chamber to form a vacuum degree in the plasma processing chamber, and the cryo pump may be connected to the second chamber to form a vacuum degree of the low rolling process chamber. . In addition, the pump for forming a high vacuum is of course not limited to the two pumps.

The unwinder is disposed in the first chamber, and is formed to fix the two base materials to be joined and to release the two base materials sequentially.

The plasma processing unit is disposed in the first chamber and performs plasma processing on the surfaces of the two substrates facing each other so that the surfaces of the two substrates released from the unwinder are activated, and the maximum applied voltage can be set up to 5 kW. .

The gas supplier is installed in the housing and supplies the plasma generating gas to the plasma processing chamber. It may also include a plasma generation gas source and a valve that can block the gas supply.

Ion guns are provided in pairs so as to perform surface activation treatment by plasma on the surfaces of the two base materials to be bonded to each other. The ion gun generates plasma using the plasma generating gas supplied by the gas supplier.

The water-cooled guide roller may also be disposed in the first chamber, and may include a function of minimizing the thermal effect of the plasma-treated base material to control the surface-activated base material by plasma to minimize the change of physical properties between processes.

The conductance maintains a vacuum gradient between the first chamber and the second chamber so that the vacuum levels of both chambers can be maintained in substantially different states, and the vacuum levels of both chambers can be maintained substantially in different states. The minimum appropriate passage and spacing can be maintained so that the low rolling can be achieved in the shortest time after the plasma treatment.

The low rolling unit is disposed in the second chamber and plasma-treated by the plasma processing unit so that the opposite surfaces of the two base materials activated by the plasma processing unit are joined to each other and then flows through the connection passage through the water-cooled guide roller. Low pressure rolling. The low rolling unit can control the maximum load up to 3000kg so that the low rolling rate of the ultra-thin material between processes by the mechanical manual screw method within 1 to 3%, and is equipped with a load cell that can measure the rolling load can do. It may also include a load cell indicator device that can display the value of the load cell mounted.

In addition, the low rolling unit is preferably located in the position that can be maximized the efficiency of the bonding strength by low rolling the plasma-treated ultra-thin material in the shortest time located immediately after the conductance of the term.

The winder may have a processing speed from 0.5 m / min to 10 m / min so that the base material can be surface activated by plasma in the first chamber by the driving thereof, and then by the driving of the unwinder. The base material surface-treated from the first chamber to the second chamber is transferred to wind the two base materials joined by the low pressure rolling unit in the second chamber.

On the other hand, although not shown in the drawings, the precision layered composite material manufacturing system according to an embodiment of the present invention may be provided with a full auto touch panel (Full Auto Touch Panel) for collective control of the entire process. It can be formed to input or set various conditions generated in the process on the full auto touch panel. For example, it can be designed to control gas input, plasma power, process speed, tension, pump and valve operation, etc., thereby simplifying process control.

1 is a schematic view showing an apparatus for producing a precision layered composite material according to an embodiment of the present invention. The apparatus described below is for illustrating the present invention, and the present invention is not limited thereto, and some components may be modified, added, or omitted as necessary.

The apparatus for producing a precision layered composite material described below is configured to induce bonding through low rolling after surface activation treatment.

As shown in Figure 1, the precision layered composite material manufacturing apparatus according to an embodiment of the present invention includes a first chamber (chamber, 100) and the second chamber 200, the inside of the first chamber 100 Winder (un-winder) 10, Edge Position Controller (EPC) 12, Auto Tension Controller (ATC, 14), ion-gun (16), and guide roller (guide roller, 18) is also provided, inside the second chamber 200 is provided with a conductance 20 (conductance), a rolling unit 22 (rolling unit), and a winder (winder, 24). .

In addition, although not shown in the drawing, a control interface for displaying an operation state of an automatic tension controller (ATC) and an edge position controller (EPC) and inputting a command for controlling the control interface (Control) interface) may be provided.

The first chamber 100 is for plasma treatment and may be maintained at a high vacuum of 10 ⁻⁵ to 10 ⁻⁶ Torr.

In the apparatus for manufacturing a precision layered composite material according to an embodiment of the present invention, a roll-to-roll method is used to efficiently manufacture the precision layered composite material. Therefore, the apparatus for manufacturing a precision layered composite material includes an unwinder 10 in which raw materials may be mounted in the first chamber 100 and the second chamber 200, and a winder in which the manufactured precision layered composite material is mounted. 24).

The unwinder 10 is equipped with a first metal foil and a second metal foil serving as a material of the precision layered composite material. The unwinder 10 may be provided with a brake system to adjust the stress. In this case, the ATC 14 and the EPC 12 may be installed to induce a stable material flow in the roll-to-roll process.

The EPC 12 is installed inside the first chamber 100 to uniformly match the edges. The EPC 12 includes a sensor and an actuator. The sensor detects edge position information of the raw material conveyed from the unwinder 10, and the actuator adjusts the position of the raw material by using the same.

ATC 14 is installed to prevent wrinkles of the material and to improve the effect of low rolling. The ATC 14 has a sensor and a brake device. The sensor checks the load of the raw material, and the brake device operates to maintain the stress.

The ion gun 16 ionizes the gas to generate a plasma. As shown, two ion guns 16 are provided for surface activation of the first and second metal foils, respectively. In this case, as the plasma generating gas, high purity Ar (99.999%) or O 2, N 2, and mixed gas may be used. The ion gun 16 is a place where the actual surface activation treatment is performed to remove foreign matters through periodic cleaning. Otherwise, shorts between positive and negative poles may occur due to particles. Since the initial generated plasma is not uniform and arcs are generated, in the actual surface activation process, the plasma may be stabilized before the process may be performed to achieve uniform and sufficient surface activation.

In this case, the ion gun 16 may surface-treat the first metal foil and the second metal foil by injecting 200 to 300 sccm of high purity argon (Ar) gas to generate a plasma.

Since the ion release function of the ion gun and the specific configuration for realizing the same are already known to those skilled in the art, a detailed description thereof will be omitted.

The water-cooled guide roller 18 is a roller for transferring the surface activated metal foil to the second chamber 200. In this case, the guide roller 18 may be configured as a water-cooled roller in order to prevent a change in physical properties due to the temperature rise of the ultrathin material during the plasma treatment. 2 is a schematic view of the water-cooled guide roller 18.

The second chamber 200 is for low rolling and may be maintained at a high vacuum of 10 ⁻⁷ torr and more.

The conductance 20 is installed to gradient the degree of vacuum between the first chamber 100 and the second chamber 200. At this time, it is desirable to reduce the length of the conductance 20 so that the metal foil to be transported by surface activation can be subjected to low rolling as quickly as possible. In addition, it is preferable to reduce the passage interval in order to prevent the vacuum gradient decrease due to the length adjustment of the conductance 20.

The rolling unit 22 rolls the first and second metal foils transferred from the conductance 20. In this case, a screw-type reduction system may be used for optimal low rolling. In addition, the rolling unit 22 may be provided with a load cell so as to measure the down load. In addition, the rolling unit 22 may include an indicator capable of displaying a value read from the load cell.

In addition, in order to prevent bending deformation of the rolling roll due to the rolling load, a crown may be applied to make the roll surface curved so that the material produced may have a uniform bonding strength as a whole. The appearance of the roll to which the crown is applied is shown in FIG. 3. Winder 24 is configured to wind the manufactured precision layered composite material. In this case, the rolling unit 22 may perform low rolling by using a roll having a crown of 0.05 mm or less.

At this time, the winder 24 may transfer the first metal foil and the second metal foil from the unwinder 10 at a driving speed of 10 m / min or less during the plasma treatment and the low rolling process.

Figure 4 is a flow chart showing a manufacturing method of ultra-metal-fine layered composite material using the SAB method according to an embodiment of the present invention.

In the manufacture of the precision layered composite material by the manufacturing apparatus of the precision layered composite material according to the embodiment of the present invention, the copper alloy ultrathin-metal precision layered composite material is manufactured by low rolling after a plasma activated surface treatment of another kind of copper foil. The physical properties of the material do not change. In addition, it is possible to mold in the form of a variety of precision layered composite material regardless of the thickness and type of material. In addition, the precision layered composite material produced by the manufacturing method according to the present embodiment has a flat bonding surface by plasma treatment, and there is no deformation of the alloy layer at the bonding interface.

1 is a schematic diagram of a precision layered composite material manufacturing apparatus according to an embodiment of the present invention.

2 is a schematic view showing the guide roller of FIG.

3 shows a rolling roll to which the crown is applied.

Figure 4 is a flow chart for the manufacturing process using the precision layered composite material manufacturing apparatus of the present invention.

Claims (18)

A first chamber for charging the first metal foil and the second metal foil, An ion gun provided in the first chamber to irradiate plasma to the surfaces of the first metal foil and the second metal foil, respectively; A second chamber in which the plasma-treated first metal foil and the second metal foil are transferred; A rolling unit provided in the second chamber to bond the surfaces of the first metal foil and the second metal foil that are plasma-processed to each other to perform low pressure rolling; And a conductance provided between the first chamber and the second chamber to maintain a difference in vacuum between the first chamber and the second chamber. delete The method according to claim 1, And a guide roller for transferring the plasma treated first metal foil and the second metal foil to the second chamber. The method of claim 3, The guide roller is a manufacturing apparatus of a precision layered composite material comprising a cooling passage for cooling the first metal foil and the second metal foil. The method according to claim 1, The ion gun is a precision layered composite material manufacturing apparatus for treating the first metal foil and the second metal foil with a plasma power of 300w to 3Kw, respectively. The method according to claim 1, An unwinder provided in the first chamber to mount the first metal foil and the second metal foil; And Apparatus for producing a precision layered composite material further comprises a winder (winder) provided in the second chamber to wind the manufactured precision layered composite material. The method according to claim 6, And a stress control device provided in the first chamber to control the stresses of the first metal foil and the second metal foil conveyed from the unwinder. 8. The method of claim 7, The stress control device, A sensor for measuring a load applied to the first metal foil and the second metal foil; Brake device is installed to adjust the stress based on the load measured by the sensor Precision layered composite material manufacturing apparatus comprising a. The method according to claim 6, And a position control device provided in the first chamber to adjust positions of ends of the first metal foil and the second metal foil conveyed from the unwinder. The method of claim 9, The position control device, A sensor for detecting end positions of the first metal foil and the second metal foil; Actuator for adjusting the end position of the first metal foil and the second metal foil based on the position detected by the sensor Precision layered composite material manufacturing apparatus comprising a. The method according to claim 6, The winder is a precision layered composite material manufacturing apparatus for transferring the first metal foil and the second metal foil during the plasma treatment and low rolling process from the unwinder at a driving speed of 10m / min or less. The method according to claim 1, The first chamber has a vacuum degree of 10 ^-5 to 10 ^-6 Torr, and the second chamber has a vacuum degree of 10 ^-6 to 10 ^-7 Torr precision manufacturing apparatus of the layered composite material. The method according to claim 1, The rolling unit is a precision layered composite material manufacturing apparatus for rolling by applying a reduction ratio of 1 to 3%. The method according to claim 1, The rolling unit is a manufacturing apparatus of a precision layered composite material which is rolled under a load of less than 3000kg. The method according to claim 1, The first metal foil is made of Cu and Cu alloy, the second metal foil is a device for producing a precision layered composite material consisting of Ni-based, Al-based, Al-based, Ag-based or Au-based alloy. The method according to claim 1, The ion gun is a device for producing a precision layered composite material for surface treatment of the first metal foil and the second metal foil by generating a plasma by injecting high purity Ar gas of 200 to 300sccm. The method according to claim 1, The rolling unit is a low-rolling precision manufacturing apparatus of the composite material using a roll having a crown of 0.05mm or less. The method according to claim 1, The rolling unit is a device for manufacturing a precision layered composite material comprising a load cell that can read the pressure load value and an indicator that can display the value read from the load cell.

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