KR101099531B1 - Module for transferring a substrate and apparatus for processing a substrate having the same - Google Patents

Abstract

A substrate processing apparatus comprising a substrate transfer module, wherein the substrate transfer module includes a transfer chamber extending in a horizontal direction and having a transfer region extending from one side of the load / unload region and a load / unload region of the substrate. A plate-shaped transfer base for transferring the substrate is disposed in the transfer chamber, and a support portion for supporting the substrate is disposed on the transfer base. The transfer base is moved in the horizontal direction by the driver in the carry-in / out area and the transfer area, and thus the substrate may be transferred in the substrate transfer direction.

Description

Substrate transfer module and substrate processing apparatus including same {Module for transferring a substrate and apparatus for processing a substrate having the same}

The present invention relates to a substrate transfer module and a substrate processing apparatus including the same. More particularly, the present invention relates to a substrate transfer module and a substrate processing apparatus including the same for transferring the substrate to the substrate processing module in order to perform predetermined processing processes on the substrate in the manufacture of the flat panel display apparatus.

In general, certain processing processes may be performed on large area substrates, such as glass substrates, in the manufacture of flat panel display devices. For example, unit processes such as an etching process, a strip process, a cleaning process, a drying process, and the like may be performed on the substrate, and the apparatus for performing the unit processes is generally performed while moving the substrate in an inline manner. Can be.

The conventional substrate processing apparatus may include a substrate transfer module and a substrate processing module. The substrate transfer module and the substrate processing module may be stacked in a vertical direction. In particular, the substrate processing module may be disposed under the substrate transfer module, and a load elevator and an unload elevator may be disposed at both sides of the substrate transfer module and the substrate processing module, respectively.

The substrate transfer module includes a substrate processing chamber extending in a horizontal direction, a load / unload unit disposed at a central portion of the substrate processing chamber, and a substrate moving in the transfer region between the load / unload unit and the load elevator. It may include a transfer unit.

Although not shown in detail, the substrate processing module may supply a processing fluid onto the substrate while moving the substrate in a horizontal direction. In particular, the substrate processing module may include a plurality of processing units for respectively performing an etching process or a strip process, a cleaning process, a drying process, and the like for the substrate. In addition, the substrate may be transported by a plurality of rollers in the substrate processing module.

In the load / unload unit and the transfer unit the substrate may be conveyed by a plurality of rollers, and the load elevator and the unload elevator may also receive and transfer the substrate using a plurality of rollers.

On the other hand, the rollers in the respective units and elevators may be rotated by separate drives, respectively. This is because the loading operation and the unloading operation of the substrate are performed separately. Therefore, when using such a substrate transfer module, a large amount of particles can be generated by the rotation of a number of rollers, thereby contaminating the substrate. In addition, the cost of constructing the rollers and the driving portions is relatively large, thereby increasing the manufacturing cost of the substrate processing apparatus.

One object of the present invention for solving the above problems is to provide a substrate transfer module that can reduce the particle generation and can reduce the manufacturing cost.

Another object of the present invention for solving the above problems is to provide a substrate processing apparatus that can reduce the particle generation and can reduce the manufacturing cost.

A substrate transfer module according to an aspect of the present invention for achieving the above object is a transfer chamber extending in the horizontal direction and having a transfer region extending to the one side from the carry-in / export region and the carry-in / export region of the substrate, and the transfer chamber A transfer base in a plate form for transferring the substrate, a support portion disposed on the transfer base and supporting the substrate, and moving the transfer base in the loading / exporting region and the transfer region in the horizontal direction; It may include a drive unit to.

According to embodiments of the present invention, the support part may include a plurality of transfer rollers supporting the substrate to allow the substrate to move in the horizontal direction.

According to embodiments of the present invention, the substrate transfer module may further include a load elevator and an unload elevator, respectively, connected to both sides of the substrate transfer chamber to transfer the substrate in a vertical direction.

According to embodiments of the present invention, the substrate transfer module is arranged on the support to be spaced apart in the horizontal direction at regular intervals and extend in parallel in another horizontal direction perpendicular to the horizontal direction and the rotating shafts are mounted And a motor for rotating the rotating shafts.

According to embodiments of the present invention, each of the load and unload elevators may include load rollers and unload rollers, respectively, to enable the transfer of the substrate between the transfer rollers.

According to embodiments of the present disclosure, the substrate transfer module may further include a rotation driver disposed on the driver to rotate the transfer base.

According to another aspect of the present invention, there is provided a substrate processing apparatus including a transfer chamber extending in a horizontal direction and having a transfer area extending from one side of the carry-in / out area and a transfer area extending from the carry-in / out area to the one side; A transfer base in the form of a plate disposed in the chamber for transferring the substrate, a support disposed on the transfer base to support the substrate, and the transfer base in the carry-in / out area and the transfer area in the horizontal direction; A substrate transfer module including a driving unit for moving, a substrate processing module extending in parallel with the substrate transfer module under the substrate transfer module, for performing a processing process on the substrate, the substrate transfer module and the substrate; A substrate disposed on one side of the processing module and transported by the substrate transfer module A load elevator for transferring to the substrate processing module and the substrate processing module; and a substrate disposed on the other side of the substrate transfer module and the substrate processing module and processed by the substrate processing module to be transferred upward to the substrate transfer module. It may include an unload elevator for.

According to embodiments of the present disclosure, the substrate processing module may include a plurality of processing units that perform a plurality of processing processes on the substrate while transferring the substrate in an inline manner.

According to the embodiments of the present invention as described above, the substrate is transported by the transport base and the drive unit in the loading and unloading area and the transport area in the substrate transport chamber, so that the installation by a plurality of rollers, rotating shafts and areas in a conventional apparatus No configuration of the driven parts is required. Therefore, the particle generation amount in the substrate transfer chamber can be greatly reduced.

In addition, since the number of elements for transferring the substrate is greatly reduced, it is possible to greatly reduce the manufacturing cost of the substrate transfer module and the substrate processing apparatus including the same.

BRIEF DESCRIPTION OF THE DRAWINGS The invention will be described in more detail below with reference to the accompanying drawings showing embodiments of the invention. However, the present invention should not be construed as limited to the embodiments described below, but may be embodied in various other forms. The following examples are provided to fully convey the scope of the invention to those skilled in the art, rather than to allow the invention to be fully completed.

When an element is described as being disposed or connected on another element or layer, the element may be placed or connected directly on the other element, and other elements or layers may be placed therebetween. It may be. Alternatively, where one element is described as being directly disposed or connected on another element, there may be no other element between them. Similar reference numerals will be used throughout for similar elements, and the term “and / or” includes any one or more combinations of related items.

The terms first, second, third, etc. may be used to describe various items such as various elements, compositions, regions, layers and / or portions, but the items are not limited by these terms . These terms are only used to distinguish one element from another. Accordingly, the first element, composition, region, layer or portion described below may be represented by the second element, composition, region, layer or portion without departing from the scope of the invention.

Spatially relative terms such as "bottom" or "bottom" and "top" or "top" may be used to describe the relationship of one element to other elements as described in the figures. Can be. Relative terms may include other orientations of the device in addition to the orientation shown in the figures. For example, if the device is reversed in one of the figures, the elements described as being on the lower side of the other elements will be fitted as being on the upper side of the other elements. Thus, the typical term "bottom" may include both "bottom" and "top" orientations for a particular orientation in the figures. Similarly, if the device is reversed in one of the figures, the elements described as "below" or "below" of the other elements will be fitted "above" of the other elements. Thus, a typical term "below" or "below" may encompass both orientations of "below" and "above."

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used below, what is shown in the singular also includes the plural unless specifically indicated otherwise. In addition, where the terms “comprises” and / or “comprising” are used, they are characterized by the presence of the forms, regions, integrals, steps, actions, elements and / or components mentioned. It is not intended to exclude the addition of one or more other forms, regions, integrals, steps, actions, elements, components, and / or groups.

Unless defined otherwise, all terms including technical and scientific terms have the same meaning as would be understood by one of ordinary skill in the art having ordinary skill in the art. Such terms, such as those defined in conventional dictionaries, will be construed as having meanings consistent with their meanings in the context of the related art and description of the invention, and ideally or excessively intuitional unless otherwise specified. It will not be interpreted.

Embodiments of the invention are described with reference to cross-sectional illustrations that are schematic illustrations of ideal embodiments of the invention. Accordingly, changes from the shapes of the illustrations, such as changes in manufacturing methods and / or tolerances, are those that can be expected. Accordingly, embodiments of the present invention are not to be described as limited to the particular shapes of the areas described as the illustrations but to include deviations in the shapes. For example, a region described as flat may generally have roughness and / or nonlinear shapes. Also, the sharp edges described as illustrations may be rounded. Accordingly, the regions described in the figures are entirely schematic and their shapes are not intended to describe the precise shape of the regions nor are they intended to limit the scope of the invention.

1 is a schematic configuration diagram illustrating a substrate transfer module and a substrate processing apparatus including the same according to an embodiment of the present invention, and FIG. 2 is a schematic plan view illustrating the substrate transfer module illustrated in FIG. 1. .

1 and 2, the substrate transfer module 100 according to an embodiment of the present invention loads the substrate 20 into the substrate processing module 200 in the substrate processing apparatus 10 and the substrate processing module ( 200 can be used to unload. In particular, the substrate processing apparatus 10 may be used to perform processing processes for a large area substrate 20 such as a glass substrate in a process for manufacturing a flat panel display device.

The substrate transfer module 100 may include a substrate transfer chamber 102, a transfer base 104, a support part, a horizontal driver 120, and the like.

The substrate transfer chamber 102 may extend in a horizontal direction and provide a space in which the substrate 20 is transferred. The internal space of the substrate transfer chamber 102 may be divided into a loading / exporting area 102a and a transfer area 102b of the substrate. The transfer area 102b may extend to one side from the import / export area 102a.

The loading / exporting area 102a is an area in which the substrate 20 is carried in or taken out from the outside of the substrate transfer chamber 102, and is not shown, but the loading / exporting of the substrate 20 is performed. The door may be provided.

In the transfer chamber 102, a transfer base 104 may be disposed to move in the horizontal direction in order to transfer the substrate 20. A support may be disposed on the transfer base 104 to support the substrate 20, and the transfer base 104 may have a plate shape to support the substrate 20.

A plurality of transfer rollers 106 may be used as the support. The transfer rollers 106 may be arranged to move the substrate 20 in a horizontal direction.

3 is a plan view for explaining the transfer rollers on the transfer base shown in FIG. 1, and FIG. 4 is a schematic front view for explaining the transfer rollers shown in FIG.

3 and 4, a plurality of rotating shafts 108 may be arranged on the transfer base 104 so as to be spaced apart at regular intervals in the horizontal direction, that is, the substrate transfer direction, and the rotating shafts 108 may be The substrates may be disposed parallel to each other in another horizontal direction perpendicular to the substrate transfer direction. The conveying rollers 106 may be mounted to the rotating shafts 108 to rotate together with the rotating shafts 108.

Although not shown in detail, a plurality of support members (not shown) may be disposed on the transfer base 104 to rotatably support the rotation shafts 108.

One side of the transfer base 104 may be provided with a bracket 110 for mounting the rotary shafts (108). Ends of the rotating shafts 108 may extend through the bracket 110, and pulleys 112 may be mounted at ends of the extended rotating shafts 108, respectively. The rotating shafts 108 may be connected by a belt 114 connecting the pulleys 112 to each other, and a motor 116 for providing rotational force to one of the rotating shafts 108 may be connected. In addition, the bracket 110 may be equipped with a plurality of idle rollers 118 to maintain a constant tension of the belt 114. As shown, although the motor 116 is represented as being directly connected to one of the rotational shafts 108, the motor 116 may be connected to one of the rotational shafts 108 via a transmission.

Referring to FIGS. 1 and 2 again, a horizontal driver 120 for moving the transfer base 104 in the substrate transfer direction may be disposed in the transfer chamber 102.

As the horizontal driver 120, a linear transfer device using a timing belt and a pulley may be used. However, the present invention will not be limited by the configuration of the horizontal driver 120. For example, the horizontal drive unit 120 may be a linear driving device using a ball screw that can switch the rotational force of the motor to a linear driving force may be used, alternatively, a linear motor, a rodless cylinder may be used.

Load elevator 130 and unload elevator 140 for moving the substrate 20 in the vertical direction may be connected to both side portions of the substrate transfer chamber 102, respectively. For example, the load elevator 130 may be adjacent to the transfer area 102b, and the unload elevator 140 may be adjacent to the import / export area 102a.

The load elevator 130 is used to lower and transfer the substrate 20 transferred by the transfer base 104 to the substrate processing module 200, and the unload elevator 140 may serve as the substrate processing module ( It can be used to raise the substrate 20 treated by the 200 and transfer it to the transfer base 104.

The load and unload elevators 130 and 140 may have vertical transfer plates 132 and 142, respectively, and a plurality of load rollers 134 may be disposed on the vertical transfer plate 132 of the load elevator 130. A plurality of unload rollers 144 may be disposed on the vertical transport plate 142 of the unload elevator 140.

The substrate processing module 200 may transfer the substrate 20 in an inline manner, and may perform various processing processes on the substrate 20 while the substrate 20 is transferred. For example, the substrate processing module 200 may include a plurality of processing units 202 for performing a series of processing processes, such as an etching or strip process, a cleaning process, a drying process, or the like, for the substrate 20. Each of the processing units 202 may transfer the substrate 20 in a horizontal direction by using the transfer rollers 204.

Although not shown in detail, the load and unload elevators 130 and 140 may include driving units (not shown) for rotating the load rollers 134 and the unload rollers 144. The load elevator 130 may receive the substrate 20 from the transfer rollers 106 on the transfer base 104 using the load rollers 134 which are rotatable by the driving units. The substrate 20 may be transferred to the substrate processing module 200 by rotating the rollers 134. Similarly, the unload elevator 140 may receive the substrate 20 from the substrate processing module 200 by rotating the unload rollers 144, and transfer rollers on the transfer base 104. The substrate 20 may be transferred to the 106.

On the other hand, the transfer base 104 may be rotatably disposed to bring the substrate 20 into the substrate transfer chamber 102 and to carry the substrate 20 from the substrate transfer chamber 102. For example, a rotation driver 122 for rotating the transport base 104 may be disposed on the horizontal driver 120, and the transport base 104 may be disposed on the rotation driver 122. have.

FIG. 5 is a schematic plan view for describing an operation of the rotation driving unit illustrated in FIG. 1 and a loading and unloading of a substrate using the same.

Referring to FIG. 5, the transfer base 104 is driven by the rotation driver 122 such that the rotation shafts 108 are disposed in parallel with the transfer direction of the substrate 10 in the loading / exporting area 102a. Can be rotated. After the transfer base 104 is rotated, the robot arm 30 disposed outside the substrate transfer chamber 102 may enter the substrate transfer chamber 102 while supporting the substrate 20. Subsequently, the substrate 20 may be loaded onto the transfer rollers 106 by lowering the robot arm 30. In this case, the robot arm 30 may descend through the space between the transfer rollers 106 and may retreat after the substrate 20 is loaded.

In addition, the substrate 20 processed by the substrate processing module 200 is transferred to the transfer rollers 106 on the transfer base 104 moved by the unload elevator 140 to the carry-in / out area 102a. After being transferred, the substrate 20 may be rotated for carrying out of the substrate 20. After the transfer base 104 is rotated, the robot arm 30 may enter through the space between the transfer rollers 106. The robot arm 30 may be raised to unload the substrate 20 from the transfer rollers 106 and then retracted for unloading the substrate 20.

According to the embodiments of the present invention as described above, the substrate is transported by the transport base and the drive unit in the loading and unloading area and the transport area in the substrate transport chamber, so that the installation by a plurality of rollers, rotating shafts and areas in a conventional apparatus No configuration of the driven parts is required. Therefore, the particle generation amount in the substrate transfer chamber can be greatly reduced.

In addition, since the number of elements for transferring the substrate is greatly reduced, it is possible to greatly reduce the manufacturing cost of the substrate transfer module and the substrate processing apparatus including the same.

In addition, the substrate transfer module according to the embodiments of the present invention can reduce the time and cost required for the maintenance of the substrate processing apparatus because the maintenance target elements are relatively small compared to the conventional substrate transfer module.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the present invention as defined by the following claims It can be understood that

1 is a schematic diagram illustrating a substrate transfer module and a substrate processing apparatus including the same according to an embodiment of the present invention.

FIG. 2 is a schematic plan view for explaining the substrate transfer module illustrated in FIG. 1.

3 is a plan view for explaining the conveying rollers on the conveying base shown in FIG.

FIG. 4 is a schematic front view for describing the transfer rollers shown in FIG. 3.

FIG. 5 is a schematic plan view for describing an operation of the rotation driving unit illustrated in FIG. 1 and a loading and unloading of a substrate using the same.

Explanation of symbols on the main parts of the drawings

10 substrate processing apparatus 20 substrate

30: robot arm 100: substrate processing module

102: substrate transfer chamber 102a: import / export area

102b: transfer area 104: transfer base

106: feed roller 108: rotating shaft

110: bracket 112: pulley

114: belt 116: motor

118: idle pulley 120: horizontal drive unit

122: rotation drive 130: road elevator

132: vertical feed plate 134: rod roller

140: unload elevator 142: vertical transfer plate

144: unloading roller 200: substrate processing module

202: processing unit 204: feed roller

Claims (8)

A transfer chamber extending in a horizontal direction, said transfer chamber having a carrying / out area of the substrate and a transfer area extending to one side from said carrying / out area; A transfer base disposed in the transfer chamber and configured to transfer the substrate; A support disposed on the transfer base and supporting the substrate; And And a driving unit for moving the transfer base in the horizontal direction in the carrying / out area and the transfer area. The substrate transfer module of claim 1, wherein the support portion comprises a plurality of transfer rollers that support the substrate to allow the substrate to move in the horizontal direction. The substrate transfer module of claim 2, further comprising a load elevator and an unload elevator respectively connected to both sides of the substrate transfer chamber to transfer the substrate in a vertical direction. The rotating shaft of claim 3, further comprising: rotating shafts arranged to be spaced apart at a predetermined interval in the horizontal direction on the support part, extending in parallel in another horizontal direction perpendicular to the horizontal direction, and the conveying rollers mounted thereon; And And a motor for rotating the rotating shafts. 5. A substrate transfer module according to claim 4, wherein each of the load and unload elevators comprises load rollers and unload rollers, respectively, to enable transfer of the substrate between the transfer rollers. The substrate transfer module of claim 1, further comprising a rotation driver disposed on the driver and configured to rotate the transfer base. A transfer chamber having a transfer region extending in a horizontal direction and extending to one side from the import / export region, a transfer base disposed in the transfer chamber and configured to transfer the substrate; A substrate transfer module disposed on a transfer base and including a support unit moving in the horizontal direction to support the substrate, and a driving unit to move the transfer base in the horizontal direction in the loading / exporting area and the transfer area; A substrate processing module extending in parallel with the substrate transfer module below the substrate transfer module and performing a processing process on the substrate; A load elevator disposed at one side of the substrate transfer module and the substrate processing module and configured to transfer the substrate transferred by the substrate transfer module downward to the substrate processing module; And And an unload elevator disposed at the other side of the substrate transfer module and the substrate processing module to transfer the substrate processed by the substrate processing module upward to the substrate transfer module. 8. The substrate processing apparatus of claim 7, wherein the substrate processing module includes a plurality of processing units that perform a plurality of processing processes on the substrate while transferring the substrate in an inline manner.

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