KR101011691B1 - Photomask-less exposure system - Google Patents

Abstract

The present invention relates to a photomaskless exposure apparatus, comprising a Y-axis transfer robot for plate movement; A plate value table installed on the Y axis slide base of the Y axis transport robot; An X axis transport robot for moving a light source positioned perpendicularly to the Y axis transport robot; A light irradiation head installed on the X axis slide base of the X axis transport robot and irradiating light to the screen plate; A light irradiation apparatus connected to the light irradiation head and transmitting light thereto; A touch panel connected to the light irradiation device, the X axis transport robot, and the Y axis transport robot and controlling the light irradiation device, the X axis transport robot, and the Y axis transport robot according to the input pattern; And a pattern input program unit connected to the touch panel and inputting a pattern of the screen plate as a numerical signal, and transmitting the input signal to the touch panel.

Therefore, conventional processes consisting of exposure image input to a computer, exposure with a laser, development, fixation, washing with water, and completion of a dry mask are simple to input a pattern of screen making into a pattern input part as a numerical signal and operate a touch panel. Since the process is simplified, the screen-printing plate making process is greatly reduced, and the developing and washing processes are eliminated, thereby preventing the unsensitized photosensitive material generated in this process from leaking into the waste liquid.

Panel Mount Table, Light Irradiation Head, Light Irradiation Device, Touch Panel, Pattern Input Program

Description

Photomask-less exposure system

The present invention relates to a screen printing plate making apparatus, and more particularly to a photomaskless exposure apparatus that does not require a photomask.

In general, screen printing is a printing method in which ink is transferred onto a printed object by placing ink on a screen and pushing ink into a hole in a net with a squeeze. At this time, the wire or image to be printed on the screen is a mesh so that the ink can be discharged, the non-wire portion is filled with a photosensitive resin or other material. The photosensitive resist resin is applied to the entire surface of the screen so that the non-wire portion can be filled with the photosensitive resin, the photomask is closely adhered to the screen, and then developed to produce a printing plate. The manufacturing process of the photomask used at this time is largely divided, and is made through the 6-step process. That is, processes such as image input, exposure, development, fixing, washing with water, and drying are necessary. As such, a lot of processes are required to manufacture the photomask to complete the screen printing plate. A brief summary of this process is as follows.

13 processes such as exposure image input to computer ⇒ exposure with laser ⇒ development ⇒ fixation ⇒ flushing ⇒ drying ⇒ mask completion (film / glass) storage ⇒ screen strap ⇒ P / R coating ⇒ drying ⇒ mask exposure ⇒ wet development ⇒ drying ⇒ Engraving is completed through. Of course, there may be more fine processes between these processes.

In particular, a six-step process for producing a photomask: exposure image input ⇒ exposure with laser ⇒ development ⇒ fixation ⇒ washing with water ⇒ drying ⇒ mask completion (film / glass) storage process increases working time and work force, In addition to a significant increase in labor and manufacturing costs, the more processes, the more complicated the quality control. Another big problem is that unsensitized photosensitive materials from developing and washing are leaked into the waste liquid, causing major environmental pollution. 500 tons are emitted.

SUMMARY OF THE INVENTION An object of the present invention for solving the above problems is to provide a photomaskless exposure apparatus that can greatly reduce the plate-making process of the screen printing plate.

Another object of the present invention is to provide a photomaskless exposure apparatus in which the developing and washing processes are eliminated.

It is still another object of the present invention to provide a photomaskless exposure apparatus in which a screen plate is easily fixed to a plate mounting table.

Still another object of the present invention is to provide a photomaskless exposure apparatus capable of easily adjusting the vertical gap between the light irradiation head and the screen plate.

The photomaskless exposure apparatus of the present invention for achieving the above object, the bed accommodated in the case; Y-axis transport robot for moving the plate is installed on the upper surface of the bed in the Y-axis direction for reciprocating the Y-axis slide base installed therein; A plate mounting table installed on the Y axis slide base of the plate movement Y-axis transfer robot, the screen plate being fixed to an upper surface, and transported in the Y axis direction together with the screen plate; A screen plate fixing part installed on the plate mounting table to correct and fix the position of the screen plate seated on an upper surface thereof; An X-axis transport robot, which is installed on the upper surface of the bed in the X-axis direction and reciprocates the X-axis slide base installed thereon, and is positioned to be orthogonal to the upper part of the Y-axis transport robot; A light irradiation head installed on the X-axis slide base of the X-axis transfer robot and moved along the X-axis direction to irradiate light to the screen plate; A light irradiation distance adjusting unit installed between the X axis slide base and the light irradiation head of the X axis transfer robot to adjust a vertical distance between the light irradiation head and the screen plate; A light irradiation apparatus installed on an upper surface of the bed and connected to the light irradiation head to transmit light thereto; A touch panel installed in the case and connected to the light irradiation device, the X axis transport robot, and the Y axis transport robot, and controlling the light irradiation device, the X axis transport robot, and the Y axis transport robot according to an input pattern; And a pattern input program unit connected to the touch panel and inputting a pattern of a screen plate as a numerical signal, and transmitting the input signal to the touch panel.

Another feature of the photomaskless exposure apparatus of the present invention is that the case is provided with a cover of a transparent material so as to open and close the inside and to see the inside in a closed state, and the solvent in the resist applied to the screen plate is evaporated. The upper exhaust fan and side exhaust fan are installed on the upper and side surfaces of the case so as to discharge it to the outside when possible.

Another feature of the photomaskless exposure apparatus of the present invention is that the screen plate fixing unit includes stoppers installed around the plate table so that the edges of the screen plate are supported, and the screen plate mounted on the plate table. The X-axis clamp is installed on the stopper so that one side of the screen plate is in close contact with the corresponding stopper by pushing in the X-axis direction, and the other side of the screen plate is pushed in the Y-axis direction by pushing the screen plate seated on the plate value table. It consists of a Y-axis clamp installed in the stopper to be in close contact with the corresponding stopper.

Another feature of the photomaskless exposure apparatus of the present invention is that the light irradiation head includes an optical fiber light guide for guiding the light irradiated from the light irradiation device, and a condensing lens for condensing the guided light provided in the optical fiber light guide. And a slit coupled to the optical fiber guide at the bottom of the condensing lens and blocking only a portion of the light so that the condensed light is irradiated to a predetermined size.

Still another feature of the photomaskless exposure apparatus of the present invention is that the light irradiation distance adjusting unit is fixed to the Y axis slide base of the Y axis transport robot and reciprocated in the Y axis direction, and the light irradiation head is moved in the Z axis direction. Z-axis fixed table for guiding to be transported and formed with a guide groove in the Z-axis direction, a guide is formed so that the light irradiation head is installed and slide-coupled to the guide groove of the Z-axis fixed table, and a rack gear formed on one surface of the guide. A pinion gear is formed on the holder and the Z-axis fixing table so as to rotate clockwise or counterclockwise, and is engaged with the rack gear of the guide. The lens holder is rotated when rotated clockwise or counterclockwise. It consists of adjusting screw to move along the Z-axis fixing table in the Z-axis direction.

Another feature of the photomaskless exposure apparatus of the present invention is that the light irradiation apparatus is a UV LED light source capable of irradiating a light source having a wavelength of 365 nm without diffusing light without instantaneous heat generation and light emission.

In the present invention as described above, the conventional processes consisting of exposure image input to the computer, exposure by laser, development, fixation, washing with water, and completion of dry mask are inputted into the pattern input program unit as a numerical signal to the pattern of screen making. And the simple process of operating the touch panel is greatly reduced, the screen-printing plate making process is greatly reduced, thereby reducing the working time and labor, and greatly reduce the overall manufacturing cost.

In the photomaskless exposure apparatus of the present invention, the development and washing process are eliminated, so that the unsensitized photosensitive material generated in this process is prevented from leaking into the waste liquid, thereby preventing environmental pollution.

According to the present invention, when the screen plate is seated on the top of the plate mounting table and the X-axis clamp is locked, the screen plate is pushed in the X-axis direction while one side of the screen plate is elastically supported by the corresponding stopper, and the two Y-axis clamps are locked. As the screen plate is pushed in the Y-axis direction, the other side of the screen plate is elastically supported by the corresponding stoppers. Therefore, the position of the screen plate on the plate table is corrected and fixed by a relatively simple operation of seating the screen plate on the top of the plate table and locking the X-axis clamp and the Y-axis clamp. Therefore, the work of positioning and fixing the screen plate is very simple, and thus the work efficiency can be improved.

According to the present invention, when the adjustment screw is rotated clockwise or counterclockwise, the lens holder and the light irradiation head are moved in the Z-axis direction along the Z-axis fixing table. Therefore, it is possible to easily adjust the vertical distance between the light irradiation head and the screen plate by rotating the adjustment screw.

Specific features and advantages of the present invention will become more apparent from the following description taken in conjunction with the accompanying drawings.

FIG. 1 is a schematic perspective view showing a photomatrix exposure apparatus of the present invention, FIG. 2 is a schematic side view of FIG. 1, and FIG. 3 is a side view of main components of the exposure apparatus. FIG. 4 is a front view of FIG. 3, FIG. 5 is a plan view of FIG. 3, and FIG. 6 is a partial perspective view of an essential part of the present invention. 7A and 7B are schematic cross-sectional views showing one embodiment of an X-axis clamp and a Y-axis clamp, and FIGS. 8A and 8B are schematic plan views showing an operating state of the Y-axis clamp, and FIGS. 9A to 9C are screen plates. Schematic plan views sequentially showing a state in which the screen fixing unit is fixed to the plate mounting table. FIG. 10 is a schematic cross-sectional view showing a light irradiation head, FIG. 11 is a schematic enlarged perspective view showing a light irradiation distance control unit, and FIG. 12 is a partial cross-sectional view of FIG.

The photomaskless exposure apparatus of the present invention, the case 20, the bed 10, the Y-axis transfer robot 30, the plate table 40, the screen fixing part 50, the X-axis transfer robot 60 , Light irradiation head 70, light irradiation distance adjusting unit 80, light irradiation apparatus 90, touch panel 100, pattern input program unit 110.

As shown in FIGS. 1 and 2, the case 20 accommodates a plurality of parts and is seated on an upper portion of the frame 2. Such a case 20 is provided with a cover 21 made of a transparent material so that the inside can be opened and closed and the inside can be viewed through. One side of the cover 21 is coupled to the case 20 and the hinge 23, the other side of the cover 21 is provided with a handle 22 to open and close the cover 21. In addition, the case 20, the upper exhaust fan 24 and the side exhaust fan 25 on the upper and side surfaces of the case 20 so that the solvent in the resist applied to the screen plate (1) is evaporated to the outside when evaporated ) Is installed. The light intensity control panel 26 is installed at one side of the front surface of the case 20, and the intensity of the irradiated light can be adjusted through the light intensity control panel 26.

The bed 10 is seated inside the case 20, as shown in Figures 2 to 6, the main parts of the present invention is installed on the upper surface.

2 to 6, the Y-axis transfer robot 30 is installed on the upper surface of the bed 10 in the Y-axis direction long as shown in Figure 2 to reciprocate the Y-axis slide base 31 installed thereon. For the transfer of the Y-axis slide base 31, various methods can be used. It is possible to transfer by hydraulic method such as hydraulic cylinder and rodless cylinder, and also by mechanical type consisting of drive motor, belt and pulley, and means for reciprocating the Y axis slide base 31 along the Y axis. Either way is possible.

The plate mounting table 40 is installed on the Y-axis slide base 31 of the Y-axis transfer robot 30 for plate movement as shown in FIGS. 2 to 6, and the screen plate 1 is fixed to the upper surface of the screen. It is conveyed in the Y-axis direction with the plate 1.

The screen fixing part 50 is installed in the plate mounting table 40 as shown in Figs. 2 to 6 and 7A to 9C to correct and fix the position of the screen plate 1 seated on the upper surface thereof. Let's do it.

The screen fixing part 50 is composed of stoppers 51, X-axis clamp 52, and Y-axis clamp 53. The stopper 51 is provided around the plate table 40 so that the edge of the screen plate 1 is supported. Two stoppers 51 are provided at each of both rear edges of the rear plate table 40, and two stoppers 51 are provided at both front sides of the plate table 40. The X-axis clamp 52 is mounted to the stopper 51 on one rear side.

The X-axis clamp 52 pushes the screen plate 1 seated on the plate table 40 in the X-axis direction so that one side of the screen plate 1 is in close contact with the corresponding stopper 51. Is installed. The X-axis clamp 52 has a high step 52a having one end fixed to the stopper 51 and a step 52b formed at the other end thereof, and the other step being engaged with the step 52b of the high tip 52a at one end thereof. A handle 52c in which a 52d is formed and one end thereof are fixed to the handle 52c and installed to penetrate the high information 52a and the stopper 51, and the other end of the operating shaft 52e is opposed to the screen plate 1. ), The washer 52f fixed to the operating shaft 52e, the high intelligence 52a and the stopper 51 are provided inside, and one end is supported inside the high intelligence 52a, and the other end washer 52f. It is made of a spring 52g which is supported on the elastic shaft and elastically supports the operating shaft 52e and the handle 52c toward the screen plate 1 side.

The Y-axis clamp 53 is mounted on the stopper 51 so that the other side of the screen plate 1 comes into close contact with the corresponding stopper 51 by pushing the screen plate 1 seated on the plate table 40 in the Y-axis direction. do. The Y-axis clamp 53 has a high step 53a having one end fixed to the stopper 51 and a step 53b formed at the other end thereof, and another step to engage the step 53b of the high info 53a at one end thereof. A handle 53c on which the 53d is formed, and one end fixed to the handle 53c and installed to penetrate the high information 53a and the stopper 51, and the other end of the operating shaft 53e opposite to the screen plate 1. ), The washer 53f fixed to the operating shaft 53e, the high intelligence 53a and the stopper 51 are provided inside, and one end is supported inside the high intelligence 53a, and the other end washer 53f. It is made of a spring 53g which is supported on the elastic shaft and elastically supports the operating shaft 53e and the handle 53c toward the screen plate 1 side.

The X axis transfer robot 60 for moving the light source is installed on the upper surface of the bed 10 in the X axis direction as shown in FIGS. 2 to 6 so as to reciprocate the Y axis slide base 61 installed thereon and Y It is located at the top of the axis transfer robot 30 to be orthogonal to it.

The light irradiation head 70 is installed in the X-axis slide base 61 of the X-axis transport robot 60 as shown in FIGS. 2 to 6 and 10 to 12, and is transferred along the X-axis direction. The screen plate (1) is irradiated with light. The light irradiation head 70 is composed of an optical fiber light guide 71 fixed to the lens holder 83, a collecting lens 72, a slit 73.

The optical fiber light guide 71 guides the light irradiated from the light irradiation apparatus 90. The condensing lens 72 is provided in the optical fiber light guide 71 to condense guided light. The slit 73 is coupled to the optical fiber guide 84 at the bottom of the condenser lens 72, and a hole 74 is formed at the center thereof. The slit 73 blocks a part of the light so that the collected light is irradiated to a certain size, and passes only a certain size of light through the hole 74.

The light irradiation distance adjusting unit 80 is installed between the X axis slide base 61 and the light irradiation head 70 of the X axis moving robot 60 as shown in FIGS. 2, 3, 11, and 12. The vertical distance between the light irradiation head 70 and the screen plate 1 is adjusted. The light irradiation distance adjusting unit 80 is composed of a Z-axis fixing table 81, a lens holder 83, and an adjusting screw 86.

The Z-axis fixing table 81 is fixed to the Y-axis slide base 31 of the Y-axis transfer robot 30 and reciprocated in the Y-axis direction, and guides the light irradiation head 70 to be transferred in the Z-axis direction. And the guide groove 82 in the Z-axis direction is formed.

The lens holder 83 is provided with a guide 84 so that the light irradiation head 70 is installed and slide-coupled to the guide groove 82 of the Z-axis fixing table 81, and a rack gear (1) on one surface of the guide 84. 85) is formed.

The adjustment screw 86 is installed on the Z-axis fixing table 81 so as to rotate clockwise or counterclockwise, and the pinion gear 87 is formed to be engaged with the rack gear 85 of the guide 84 around the clock. When rotating in the clockwise or counterclockwise direction, the lens holder 83 is transported in the Z-axis direction along the Z-axis fixing table 81.

As shown in FIG. 6, the light irradiation apparatus 90 is installed on the upper surface of the bed 10 and connected to the light irradiation head 70 to transmit light thereto. The light irradiation apparatus 90 is capable of instantaneous lighting and extinguishing without heat generation, and is made of a UV LED light source capable of irradiating a light source having a wavelength of 365 nm without diffusing light.

As shown in FIG. 1, the touch panel 100 is installed in the case 20 and connected to the light irradiation apparatus 90, the X-axis transfer robot 60, and the Y-axis transfer robot 30, and to the input pattern. Accordingly, the light irradiation apparatus 90 and the X-axis transfer robot 60, Y-axis transfer robot 30 is controlled.

The pattern input program unit 110 is connected to the touch panel 100 as shown in FIG. 1, the pattern of the screen plate is input as a numerical signal, and transmits the input signal to the touch panel 100.

The photomaskless exposure apparatus of the present invention in such a configuration is operated as follows.

First, the screen plate 1 is seated on the plate mounting table 40 as shown in FIG. 9A. When the screen plate 1 is seated, the X-axis clamp 52 is operated. That is, the handle 52c of the X-axis clamp 52 is pulled slightly and rotated so that the step 52d of the handle 52c and the step 52b of the high information 52a are engaged with each other. In this way, the spring 52g is restored by the width of the step 52b and 52d, and the operating shaft 52e is pushed toward the screen plate 1, so that the end of the operating shaft 52e is pushed to the screen plate 1. Push the corresponding side of the elastically. The screen plate 1 is pushed by the operating shaft 52e, and one side thereof is supported by the corresponding stopper 51 as shown in Fig. 9B.

After the X-axis clamp 52 is locked, the Y-axis clamp 53 is also locked as shown in FIG. 9C. That is, by slightly pulling the knob 53c of the Y-axis clamp 53 in the state shown in FIG. 8A and rotating it, the step 53d of the handle 53c and the step 53b of the high information 53a are rotated as shown in FIG. 8B. Engage each other. In this way, the spring 53g is restored by the width of the stepped portions 53b and 53d, and the operating shaft 53e is pushed toward the screen plate 1, so that the end of the operating shaft 53e is pushed to the screen plate 1. Push the corresponding side of the elastically. The screen plate 1 is pushed by the actuating shaft 53e and the rear one side thereof is supported by the corresponding two stoppers 51.

When the screen plate 1 is fixed, the signal is input as a numerical value according to the screen engraving pattern through the pattern input program unit 110. The pattern input through the pattern input program unit 110 is operated through the automatic touch panel 100.

By inputting the numerical value of the pattern through the pattern input program unit 110, it is possible to adjust the total movement distance, the micro movement range, and the movement speed of the light source to the X and Y axes. When the pattern is input and stored through the pattern input program unit 110, the touch panel 100 is operated to operate the X-axis transfer robot 60, the Y-axis transfer robot 30, and the light irradiation device 90 according to the input pattern. ) To work. Here, the operation may be switched to the automatic mode or the manual mode by a program input to the touch panel 100.

In the program of the touch panel 100, four types of patterns 1 to 4 are basically stored, and a total of 50 pattern types can be stored. The case of pattern 3 is described as an example.

In the case of pattern 3, four locations in the Y-axis direction, four locations in the X-axis direction, and 16 locations in total are irradiated with a point irradiation method, and the irradiation time is set to irradiate for 1 second each. When the pattern 3 is selected, the plate value table 40 is moved one step in the Y axis direction by the Y axis transport robot 30, and the light irradiation head 70 is moved in the X axis direction by the X axis transport robot 60. The light is irradiated onto the screen plate 1 by one second while being transferred step by step. In this way, a total of 16 places are irradiated on the screen plate 1 in a point irradiation method.

The light irradiation apparatus 90 generates light to radiate light from the light irradiation head 70 and transmits the light to the light irradiation head 70 through the optical fiber. As the light source of the light irradiation apparatus 90, a UV LED light source capable of turning on and off the light is used. The characteristic of the UV LED light source is no heat generation, and only the 365 nm wavelength light source can be irradiated without diffusion.

Light transmitted to the light irradiation head 70 is focused through the light collecting lens 72 and then irradiated through the hole 74 of the slit 73. As light passes through the hole 74 of the slit 73, only light of a constant size, that is, a desired size, is irradiated. The diameter of the holes 74 of the slit 73 can be made up to 10 microns, so that light of 10 microns can be irradiated.

On the other hand, through the light irradiation distance adjusting unit 80 can adjust the light irradiation distance of the UV LED light source and the screen plate (1) apple. By rotating the adjustment screw 86, the lens holder 83 is elevated in the Z-axis direction along the Z-axis fixing table 81, so that the light irradiation distance can be adjusted. At this time, the error range of light irradiation distance is ± 1 micron.

When the light irradiation distance is determined, the intensity of the irradiation light is adjusted through the light amount control panel 26 on one side of the case 20. In the case of the light intensity, the ratio can be adjusted from 0 to 100%, the irradiation time can be adjusted, and the total exposure amount is determined through the light intensity and the irradiation time.

The light irradiation head 70 is moved in the X-axis direction by the X-axis transfer robot 60 and the plate value table 40 is moved in the Y-axis direction by the Y-axis transfer robot 30, so that the light source is moved in the X-axis direction, Irradiate light to the screen plate (1) while moving in the error range of ± 1 micron in the Y-axis direction.

While the screen plate 1 is irradiated, the solvent contained in the resist applied to the screen plate 1 is evaporated. The smell of the evaporated solvent is discharged to the outside through the upper exhaust fan 24 and the side exhaust fan 25 of the case 20.

The photomaskless exposure apparatus of the present invention has the following advantages.

First, conventional processes consisting of exposure image input to a computer, exposure with a laser, development, fixation, washing with water, and completion of dry mask are inputted to the pattern input program unit 110 by inputting a pattern of screen making into a numerical signal and then using a touch panel ( Since it is simplified to a simple process for operating 100), the screen-making process of the screen plate 1 is drastically reduced, thereby reducing work time and labor, and greatly reducing the overall manufacturing cost.

Second, since the developing and washing process of the photomaskless exposure apparatus of the present invention is eliminated, the problem that the unsensitized photosensitive material generated in this process is leaked into the waste liquid is prevented, thereby preventing the environmental pollution problem.

Third, when the screen plate 1 is seated on the top of the plate mounting table 40 and the X-axis clamp 52 is locked, the screen plate 1 is pushed in the X-axis direction while the screen plate 1 is attached to the corresponding stopper 51. One side of the elastically supported, and locking the two Y-axis clamps 53, the screen plate 1 is pushed in the Y-axis direction while the other side of the screen plate 1 is elastic to the corresponding stoppers 51 Is supported.

Accordingly, the screen plate 1 is mounted on the plate table 40 by a relatively simple operation of seating the screen plate 1 on the top of the plate table 40 and locking the X-axis clamp 52 and the Y-axis clamp 53. After the position of is corrected, it is fixed. Therefore, the position correction and fixing operation of the screen plate 1 is very easy, so that the work efficiency can be improved.

Fourth, when the adjustment screw 86 is rotated clockwise or counterclockwise, the lens holder 83 and the light irradiation head 70 is moved in the Z-axis direction along the Z-axis fixing table 81. Therefore, by rotating the adjustment screw 86, it is possible to easily adjust the vertical gap between the light irradiation head 70 and the screen plate (1).

1 is a schematic perspective view showing a photomatrix exposure apparatus of the present invention

FIG. 2 is a schematic side view of FIG. 1

Figure 3 is a side view of the main parts of the exposure apparatus

4 is a front view of FIG. 3

5 is a plan view of FIG.

Figure 6 is a partial perspective view of the main portion of the present invention

7A and 7B are schematic plan cross-sectional views showing one embodiment of the X-axis clamp and the Y-axis clamp.

8a and 8b are schematic plan views showing the operating state of the Y-axis clamp

9A to 9C are schematic plan views sequentially showing a state in which a screen plate is fixed to a plate mounting table by a screen plate fixing unit.

10 is a schematic cross-sectional view showing a light irradiation head

11 is a schematic enlarged perspective view showing a light irradiation distance control unit

12 is a partial cross-sectional view of FIG.

* Description of the symbols for the main parts of the drawings *

1: screen plate 2: frame

10: bed 20: case

21: cover 22: handle

23: hinge 24: upper exhaust fan

25: side exhaust fan 26: light control panel

30: Y axis transfer robot 31: Y axis slide base

40: Pan value table 50: Screen height adjustment

51: stopper 52: X axis clamp

52a, 53a: high information 52b, 53d: step

52c, 53c: Handle 52e, 53e: Operating shaft

52f, 53f: Washer 52g, 53g: Spring

53: Y axis clamp 60: X axis transfer robot

61: X axis slide base 70: light irradiation head

71: optical fiber light guide 72: condensing lens

73: slit 74: hole

80: light irradiation distance control unit 81: Z axis fixed table

82: guide groove 83: land holder

84: guide 85: rack gear

86: adjusting screw 87: pinion gear

90: light irradiation device 100: touch panel

110: pattern input program unit

Claims (6)

A bed 10 accommodated in the case 20; A plate movement Y-axis transfer robot 30 installed on the upper surface of the bed 10 in the Y-axis direction to reciprocate the Y-axis slide base 31 installed thereon; The plate mounting table 40 is installed on the Y-axis slide base 31 of the plate movement Y-axis transfer robot 30 and the screen plate 1 is fixed to the upper surface and is transferred in the Y-axis direction together with the screen plate 1. ); A screen plate fixing part (50) installed in the plate mounting table (40) to correct and fix the position of the screen plate (1) seated on an upper surface thereof; X-axis transfer for light source movement is installed on the upper surface of the bed 10 in the X-axis direction and reciprocated to transfer the X-axis slide base 61 installed thereon and located at the top of the Y-axis transfer robot 30 to be orthogonal thereto. Robot 60; A light irradiation head 70 installed on the X-axis slide base 61 of the X-axis transfer robot 60 to be transported in the X-axis direction and irradiating light to the screen plate 1 according to the X-axis slide base 61; Light irradiation distance control is installed between the X axis slide base 61 and the light irradiation head 70 of the X axis transfer robot 60 to adjust the vertical distance between the light irradiation head 70 and the screen plate (1) Part 80; A light irradiation apparatus (90) installed on an upper surface of the bed (10) and connected to the light irradiation head (70) to transmit light thereto; Installed in the case 20 and connected to the light irradiation apparatus 90 and the X-axis transfer robot 60, Y-axis transfer robot 30, the light irradiation apparatus 90 and X-axis transfer according to the input pattern A touch panel 100 for controlling the robot 60 and the Y-axis transfer robot 30; And a pattern input program unit 110 connected to the touch panel 100 and inputting a pattern of a screen plate as a numerical signal and transmitting the input signal to the touch panel 100. Maskless exposure apparatus. The method of claim 1, wherein the case 20, Transparent cover 21 is provided to open and close the inside and to see the inside in a closed state, The upper exhaust fan 24 and the side exhaust fan 25 are installed on the upper and side surfaces of the case 20 so that the solvent in the resist applied to the screen plate 1 is discharged to the outside when evaporated. A photomaskless exposure apparatus characterized by the above-mentioned. According to claim 1, wherein the screen fixing unit 50, Stoppers 51 installed around the plate table 40 so that the edge of the screen plate 1 is supported, X-axis installed on the stopper 51 so that one side of the screen plate 1 is in close contact with the corresponding stopper 51 by pushing the screen plate 1 seated on the plate mounting table 40 in the X-axis direction. With clamp 52, Y-axis installed in the stopper 51 so that the other side of the screen plate 1 is in close contact with the corresponding stopper 51 by pushing the screen plate 1 seated on the plate mounting table 40 in the Y-axis direction. Photomaskless exposure apparatus, characterized in that consisting of a clamp (53). The method of claim 1, wherein the light irradiation head 70, An optical fiber light guide 71 for guiding light irradiated from the light irradiation device 90; A condenser lens 72 installed in the optical fiber light guide 71 for condensing guided light; Photomask, characterized in that made of a slit (73) coupled to the optical fiber guide (84) below the condensing lens (72) and blocking only a portion of the light so that the focused light is irradiated to a certain size. Lease exposure apparatus. According to claim 1, The light irradiation distance adjusting unit 80, It is fixed to the Y-axis slide base 31 of the Y-axis transfer robot 30 and reciprocated in the Y-axis direction and guides the light irradiation head 70 to be transferred in the Z-axis direction and guide grooves in the Z-axis direction. A Z-axis fixing table 81 on which 82 is formed, The light irradiation head 70 is installed and the guide 84 is formed so that the slide is coupled to the guide groove 82 of the Z-axis fixing table 81, the lens gear formed of the rack gear 85 on one surface of the guide 84 Holder 83, The pinion gear 87 is installed on the Z-axis fixing table 81 so as to rotate in a clockwise or counterclockwise direction and is engaged with the rack gear 85 of the guide 84 around the clockwise or counterclockwise direction. Photo-lensless exposure apparatus, characterized in that the lens holder (83) is made of an adjustment screw (86) to be transferred in the Z-axis direction along the Z-axis fixing table (81) when rotating. The method of claim 1, wherein the light irradiation apparatus 90, Photomaskless exposure apparatus characterized by consisting of a UV LED light source that can be turned on and off instantaneously without heat generation and irradiated with a light source of 365nm wavelength without diffusing light.

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