KR100951221B1 - 렌즈에 있어서의 표리면의 광축 편심량의 측정 방법 - Google Patents
렌즈에 있어서의 표리면의 광축 편심량의 측정 방법 Download PDFInfo
- Publication number
- KR100951221B1 KR100951221B1 KR1020087005324A KR20087005324A KR100951221B1 KR 100951221 B1 KR100951221 B1 KR 100951221B1 KR 1020087005324 A KR1020087005324 A KR 1020087005324A KR 20087005324 A KR20087005324 A KR 20087005324A KR 100951221 B1 KR100951221 B1 KR 100951221B1
- Authority
- KR
- South Korea
- Prior art keywords
- measuring
- reference point
- aspherical lens
- vertex
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000003287 optical effect Effects 0.000 title claims description 43
- 238000000691 measurement method Methods 0.000 title 1
- 238000005259 measurement Methods 0.000 claims abstract description 24
- 238000000034 method Methods 0.000 claims description 23
- 238000003384 imaging method Methods 0.000 claims description 7
- 238000005286 illumination Methods 0.000 claims 2
- 239000000523 sample Substances 0.000 abstract description 10
- 238000001514 detection method Methods 0.000 description 9
- 238000012545 processing Methods 0.000 description 9
- 238000013461 design Methods 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 238000000465 moulding Methods 0.000 description 3
- 238000004364 calculation method Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000003708 edge detection Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229910052745 lead Inorganic materials 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000008901 benefit Effects 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
- G01M11/025—Testing optical properties by measuring geometrical properties or aberrations by determining the shape of the object to be tested
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0221—Testing optical properties by determining the optical axis or position of lenses
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
- G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
- G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
- G02B19/0052—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a laser diode
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/02—Simple or compound lenses with non-spherical faces
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Geometry (AREA)
- Optics & Photonics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005228760 | 2005-08-05 | ||
JPJP-P-2005-00228760 | 2005-08-05 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20080031509A KR20080031509A (ko) | 2008-04-08 |
KR100951221B1 true KR100951221B1 (ko) | 2010-04-05 |
Family
ID=37727303
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020087005324A Expired - Fee Related KR100951221B1 (ko) | 2005-08-05 | 2006-08-03 | 렌즈에 있어서의 표리면의 광축 편심량의 측정 방법 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4767255B2 (ja) |
KR (1) | KR100951221B1 (ja) |
CN (1) | CN101233386B (ja) |
WO (1) | WO2007018118A1 (ja) |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20090144999A1 (en) * | 2006-11-30 | 2009-06-11 | Lau Kam C | Interior contour measurement probe |
JP5236962B2 (ja) * | 2008-02-18 | 2013-07-17 | 株式会社ミツトヨ | 被測定物の表裏面測定方法 |
CN101576641B (zh) * | 2008-05-07 | 2011-12-28 | 亚洲光学股份有限公司 | 光学系统中的嵌合式镜片组及其嵌合精度补正方法 |
JP2010237189A (ja) * | 2009-03-11 | 2010-10-21 | Fujifilm Corp | 3次元形状測定方法および装置 |
JP5337955B2 (ja) * | 2009-05-19 | 2013-11-06 | 株式会社ミツトヨ | 形状測定装置、形状測定方法、及びプログラム |
JP2010281792A (ja) * | 2009-06-08 | 2010-12-16 | Fujifilm Corp | 非球面体測定方法および装置 |
US8184301B2 (en) * | 2009-08-19 | 2012-05-22 | Benz Research And Development Corporation | Surface alignment and positioning method and apparatus |
US8665425B2 (en) | 2010-04-13 | 2014-03-04 | Konica Minolta Advanced Layers, Inc. | Eccentricity measuring method |
WO2012001929A1 (ja) * | 2010-07-01 | 2012-01-05 | パナソニック株式会社 | 波面収差測定装置及び波面収差測定方法 |
US20120133957A1 (en) * | 2010-11-30 | 2012-05-31 | Widman Michael F | Laser confocal sensor metrology system |
WO2013119775A1 (en) | 2012-02-10 | 2013-08-15 | Johnson & Johnson Vision Care, Inc. | Method and apparatus for determining a thickness profile of an ophthalmic lens using a single point thickness and refractive index measurements |
AU2014261378B2 (en) * | 2013-05-02 | 2017-02-16 | Carl Zeiss Ag | Method and system for determining the spatial structure of an object |
DE102013219838B4 (de) * | 2013-09-30 | 2015-11-26 | Carl Zeiss Ag | Verfahren und System für das Ermitteln der räumlichen Struktur eines Gegenstands |
WO2015146634A1 (ja) * | 2014-03-28 | 2015-10-01 | コニカミノルタ株式会社 | 非球面の偏心量測定方法及び形状解析方法 |
DE102014007203A1 (de) * | 2014-05-19 | 2015-11-19 | Luphos Gmbh | Vorrichtung und Verfahren zur geometrischen Vermessung eines Objekts |
EP3180597B1 (en) * | 2014-08-15 | 2021-02-17 | Zygo Corporation | Optical evaluation of lenses and lens molds |
JP6302864B2 (ja) * | 2015-03-31 | 2018-03-28 | 富士フイルム株式会社 | レンズの形状測定方法及び形状測定装置 |
US10295754B2 (en) * | 2017-05-11 | 2019-05-21 | Nalux Co., Ltd. | Position determination method and element |
JP7201312B2 (ja) | 2017-07-26 | 2023-01-10 | 株式会社ダイセル | 光学部品、及びその製造方法 |
DE102018201481A1 (de) | 2018-01-31 | 2019-08-01 | Carl Zeiss Vision Gmbh | Vorrichtung und Verfahren zur Bestimmung der dreidimensionalen Oberflächengeometrie von Objekten |
KR102028699B1 (ko) * | 2018-02-21 | 2019-11-04 | 지메스소프트 주식회사 | 렌즈의 3차원 형상 측정 방법 및 이를 위한 시스템 |
JP7034803B2 (ja) * | 2018-03-30 | 2022-03-14 | 浜松ホトニクス株式会社 | 測距ユニット及び光照射装置 |
CN109764817A (zh) * | 2019-01-14 | 2019-05-17 | 南京信息工程大学 | 非接触式透镜中心厚测量系统及方法 |
JP7537930B2 (ja) | 2020-07-28 | 2024-08-21 | 株式会社ミツトヨ | 形状測定方法 |
CN113310455B (zh) * | 2021-04-08 | 2023-07-11 | 超丰微纳科技(宁波)有限公司 | 一种检测模压成型加工双面镜偏心量的方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001324309A (ja) | 2000-05-15 | 2001-11-22 | Canon Inc | 三次元形状測定装置 |
JP2003083739A (ja) | 2001-09-14 | 2003-03-19 | Minolta Co Ltd | 三次元形状計測装置 |
JP2004028672A (ja) | 2002-06-24 | 2004-01-29 | Olympus Corp | 非球面偏心測定装置及び非球面偏心測定方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3725817B2 (ja) * | 2001-11-20 | 2005-12-14 | オリンパス株式会社 | 非球面レンズの偏心測定方法及び偏心測定装置 |
-
2006
- 2006-08-03 WO PCT/JP2006/315396 patent/WO2007018118A1/ja active Application Filing
- 2006-08-03 CN CN2006800281259A patent/CN101233386B/zh not_active Expired - Fee Related
- 2006-08-03 KR KR1020087005324A patent/KR100951221B1/ko not_active Expired - Fee Related
- 2006-08-03 JP JP2007529527A patent/JP4767255B2/ja active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001324309A (ja) | 2000-05-15 | 2001-11-22 | Canon Inc | 三次元形状測定装置 |
JP2003083739A (ja) | 2001-09-14 | 2003-03-19 | Minolta Co Ltd | 三次元形状計測装置 |
JP2004028672A (ja) | 2002-06-24 | 2004-01-29 | Olympus Corp | 非球面偏心測定装置及び非球面偏心測定方法 |
Also Published As
Publication number | Publication date |
---|---|
JPWO2007018118A1 (ja) | 2009-02-19 |
CN101233386B (zh) | 2010-09-29 |
WO2007018118A1 (ja) | 2007-02-15 |
JP4767255B2 (ja) | 2011-09-07 |
KR20080031509A (ko) | 2008-04-08 |
CN101233386A (zh) | 2008-07-30 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR100951221B1 (ko) | 렌즈에 있어서의 표리면의 광축 편심량의 측정 방법 | |
JP6193218B2 (ja) | 表面を非接触にて測定するための方法および装置 | |
US7209242B2 (en) | Non-contact surface configuration measuring apparatus and method thereof | |
KR20110106823A (ko) | 비구면체 측정 방법 및 장치 | |
EP1985968B1 (en) | Noncontact measuring apparatus for interior surfaces of cylindrical objects based on using the autofocus function that comprises means for directing the probing light beam towards the inspected surface | |
KR20140048824A (ko) | 교정 장치, 교정 방법 및 계측 장치 | |
JP4791118B2 (ja) | 画像測定機のオフセット算出方法 | |
JP2002250622A (ja) | 光学素子及びその型の形状測定方法及び装置 | |
JP5098174B2 (ja) | 3次元形状測定装置 | |
JP4846295B2 (ja) | 3次元座標測定装置及び方法 | |
JP2005201703A (ja) | 干渉測定方法及び干渉測定システム | |
KR20240142522A (ko) | 형상측정장치 | |
JP4311952B2 (ja) | 3次元座標測定方法 | |
JP3180091B2 (ja) | レーザーオートフォーカスによる非接触寸法測定方法 | |
JP6190168B2 (ja) | 合焦方法、合焦装置、露光方法、およびデバイス製造方法 | |
JP2007218931A (ja) | 光学面の形状測定方法および装置および記録媒体 | |
JPH07311117A (ja) | 多眼レンズ位置測定装置 | |
JP6980304B2 (ja) | 非接触内面形状測定装置 | |
JP3235782B2 (ja) | 位置検出方法及び半導体基板と露光マスク | |
JP2002221409A (ja) | 光学面の形状測定方法および装置および記録媒体 | |
US6831792B2 (en) | Objective lens, combination of objective lenses, and method for adjusting optical system using objective lens | |
JP3385082B2 (ja) | 非球面測定装置 | |
JP7317976B2 (ja) | レンズ固定部および光学系におけるシリンドリカルレンズの位置合わせ方法 | |
CN112880585A (zh) | 非接触形状测定装置 | |
Hiersemenzel | Development towards a focus variation based micro-co-ordinate measuring machine |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
PA0105 | International application |
Patent event date: 20080304 Patent event code: PA01051R01D Comment text: International Patent Application |
|
PA0201 | Request for examination | ||
PG1501 | Laying open of application | ||
E701 | Decision to grant or registration of patent right | ||
PE0701 | Decision of registration |
Patent event code: PE07011S01D Comment text: Decision to Grant Registration Patent event date: 20100218 |
|
GRNT | Written decision to grant | ||
PR0701 | Registration of establishment |
Comment text: Registration of Establishment Patent event date: 20100329 Patent event code: PR07011E01D |
|
PR1002 | Payment of registration fee |
Payment date: 20100329 End annual number: 3 Start annual number: 1 |
|
PG1601 | Publication of registration | ||
FPAY | Annual fee payment |
Payment date: 20130322 Year of fee payment: 4 |
|
PR1001 | Payment of annual fee |
Payment date: 20130322 Start annual number: 4 End annual number: 4 |
|
FPAY | Annual fee payment |
Payment date: 20140324 Year of fee payment: 5 |
|
PR1001 | Payment of annual fee |
Payment date: 20140324 Start annual number: 5 End annual number: 5 |
|
FPAY | Annual fee payment |
Payment date: 20160322 Year of fee payment: 7 |
|
PR1001 | Payment of annual fee |
Payment date: 20160322 Start annual number: 7 End annual number: 7 |
|
FPAY | Annual fee payment |
Payment date: 20170317 Year of fee payment: 8 |
|
PR1001 | Payment of annual fee |
Payment date: 20170317 Start annual number: 8 End annual number: 8 |
|
LAPS | Lapse due to unpaid annual fee | ||
PC1903 | Unpaid annual fee |
Termination category: Default of registration fee Termination date: 20190109 |