KR100947135B1 - Automatic Teaching Method of Vertical Heat Treatment Equipment and Mobile Loading Mechanism - Google Patents

Abstract

 The mobile stacking mechanism 21 of the vertical heat treatment apparatus 1 according to the present invention includes a base 25 that can be lifted and retracted, and a plurality of substrate supporting tools installed on the base to support the wafer W. Has 20. The base 25 is provided with a first sensor 45 which emits a light beam toward the advancing direction of the substrate support 20 and detects the target member by the reflected light. A second sensor 40 for detecting the target member is provided at the distal end by blocking the light rays traveling between the distal end portions. When the target member 44 provided with the position detecting protrusions 49 and 50 at a specific position is disposed at a predetermined position of the wafer boat 8, the base 25 is lifted and pivoted, and the substrate support 20 is moved forward and backward. do. The position of the target member, that is, based on the detection signals of the first sensor 45 and the second sensor obtained at this time, and the encoder values of the respective drive systems related to the operation of the base 25 and the substrate support 20 The target moving loading position of the wafer is automatically detected.

Vertical heat treatment device, mobile stacking mechanism, wafer, base, substrate support

Description

VERTICAL HEAT TREATING APPARATUS AND AUTOMATIC TEACHING METHOD FOR TRANSFER MECHANISM}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an automatic teaching method of a vertical heat treatment apparatus and a moving stacking mechanism, and more particularly to a technique of automatic teaching allowing a moving stacking mechanism for moving stacking a workpiece to find an operation target point by itself.

The manufacture of a semiconductor device includes a step of subjecting a workpiece, for example, a semiconductor wafer, to various heat treatments such as oxidation, diffusion, CVD, and annealing. As one of the heat treatment apparatuses for performing these processes, the vertical heat treatment apparatus which can heat-process a plurality of wafers at once is used.

This vertical heat treatment apparatus includes a heat treatment furnace, a holding tool (also referred to as a wafer boat) carried in and out of the heat treatment furnace by holding a plurality of wafers at intervals in the vertical direction, and storing a plurality of wafers at predetermined intervals. A mobile stacking mechanism for moving the wafers between the container (also called a carrier or a cassette) and the holding tool is provided. The movable stacking mechanism has a base that can be moved and pivoted, and a plurality of substrate supports which are disposed on the base so as to be movable forward and backward, each of which can support a wafer (see JP 2002-164406A, for example). .

The moving stacking mechanism is configured as a robot that automatically performs a predetermined moving stacking operation based on a control program stored in advance in the control unit. The teaching of the wafer transfer loading target position while the operator manipulates the mobile loading mechanism manually (non-automatically) by remote operation so that such a mobile loading mechanism can transfer the wafer to an appropriate position in the holding tool or the storage container ( teaching).

Since the teaching precision depends on the skill of the operator, it may require a long time for teaching or the target position cannot be taught with sufficient precision. In addition, unlike the product wafer, the dummy wafer disposed at the predetermined portion of the holding tool is not loaded for each processing, and is placed at the same position for a long time, so that position shift is likely to occur due to vibration or the like. For this reason, position correction which returns a position of a dummy wafer to an accurate position is performed regularly. However, it is difficult to carry out this correction quickly and accurately by a conventional mobile stacking mechanism. In addition, when the wafer is held at an appropriate position in the holding tool, for example, when the wafer protrudes outward from the holding tool, an accident such as dropping or damage of the wafer may occur.

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and has a vertical heat treatment apparatus having a moving stacking mechanism having an automatic teaching system capable of automatically teaching a target position and eliminating fluctuations in teaching accuracy due to anthropogenic elements. It is an object of the present invention to provide an automatic teaching method of the mobile stacking mechanism.

Further, another object of the present invention is to make it possible to quickly and accurately perform periodic position correction of a dummy wafer.

Further, another object of the present invention is to enable monitoring of the state of the workpiece in the holding tool unloaded from the heat treatment furnace before and after the heat treatment, and to prevent an accident such as damage of the workpiece.

The present invention provides a heat treatment furnace, a holding tool carried in and out of the heat treatment furnace by holding a plurality of objects to be processed in a plurality of stages at predetermined intervals in a vertical direction, a lifting and pivoting base, and a retractable base installed on the base. A moving stacking mechanism for moving the workpiece between the holding container and the holding container for storing the plurality of workpieces at predetermined intervals, the moving stacking mechanism for supporting the workpiece; A target member provided at a target position to which the target object in the storage container is to be moved and loaded, a first sensor provided at the base and emitting light toward the advancing direction of the substrate support and detecting the target member by the reflected light; And is installed at the two ends of the substrate support to block the light rays traveling between the two ends. Calculating and recognizing the target position on the basis of a second sensor for detecting a member, detection signals of the first sensor and the second sensor, and encoder values of a drive system of the mobile loading mechanism associated with each detection signal; Provided is a vertical heat treatment apparatus having a control unit.

In one suitable embodiment, the target member has a substrate portion having a shape substantially the same as that of the target object, and a reflective surface protruding from a center portion on the substrate portion to reflect light rays emitted from the first sensor on a peripheral surface thereof. 2nd blood detected by the said 2nd sensor provided in the 1st detection part and the upper part of the said 1st detection part, or two protrusions provided in the symmetrical position on the board | substrate part which sandwiches a 1st detection part, and is detected by the said 2nd sensor. The detector is provided.

In one preferred embodiment, the control unit moves the base in the vertical direction when calculating and recognizing the target position to find a position at which the detection signal of the first sensor is inverted. A first step of calculating a center of the up and down direction of a target member based on an encoder value of a drive system related to vertical movement of a base; and a position at which the detection signal of the first sensor is inverted by pivoting the base around a vertical axis And a second step of calculating a center of rotational direction of the target member based on the encoder value of the drive system related to the rotational movement of the base at the inverted position, and operating the substrate support in the front-rear direction. To find the position at which the detection signal of the second sensor is reversed, and then to the forward and backward movement of the substrate support at the reverse position. It is comprised so that a 3rd process of calculating the center with respect to the front-back direction of a target member based on the encoder value of the drive system concerned may be performed.

Preferably, the substrate support is provided with a holding mechanism for holding the object to be interposed between front and back. According to this, periodical positional correction of the dummy wafer can be performed quickly and accurately.

Preferably, the second sensor is configured and arranged to detect the state of the object in the holding tool by scanning in the vertical direction along the object held in multiple stages in the holding tool. According to this, the state of the to-be-processed object in the holding tool before and after heat processing can be monitored.

In addition, the present invention is to hold the plurality of objects to be processed in a multi-stage at a predetermined interval in the vertical direction, the holding tool to be carried in and out of the heat treatment furnace, the lifting and pivoting base and the retractable installed on the base to support the object A vertical heat treatment apparatus having a plurality of substrate supporting tools, comprising a storage container for accommodating a plurality of objects to be processed at predetermined intervals and a moving loading mechanism for moving the object to be stacked between the holding members. In the method for teaching the moving stacking mechanism, a target member is provided at a predetermined target position for moving and stacking a target object in the holding tool or the storage container, and the light beam is directed on the base toward the advancing direction of the substrate holding tool. And a first sensor which detects the target member by the reflected light while firing the light. 2nd sensor which detects a target member by interrupting the light ray which propagates between the two front end parts is installed in the two front end parts of a support, and finds the position which the detection signal of the said 1st sensor is reversed by moving the base to an up-down direction, A first step of calculating a center in a vertical direction of a target member based on an encoder value of a drive system related to vertical movement of the base at the inverted position; A second step of finding a position at which the detection signal is reversed and calculating a center of rotation direction of the target member based on the encoder value of the drive system related to the rotational movement of the base at the reversed position; The earth is operated in the front-rear direction to find a position at which the detection signal of the second sensor is inverted, and the device at this inversion position To the encoder value of the drive system according to the paper before and after the movement of the earth is based by performing a third step of calculating the center of the front-rear direction of the target member provides a teaching how to recognize the target position.

1 is a longitudinal sectional view schematically showing one embodiment of a vertical heat treatment apparatus according to the present invention.

2 is a side view of the mobile stacking mechanism.

3 is a side view of the mobile stacking mechanism of FIG. 2 viewed from another direction;

4 is a plan view showing a substrate holding tool and its associated parts of the mobile stacking mechanism.

5 is a plan view of a ring-shaped support plate.

Fig. 6 is a plan view from below showing the substrate support.

7 is a plan view from below showing another substrate support.

Fig. 8 is a schematic side view showing the locking portion and the accommodation portion of the substrate support tip.

Fig. 9 is a schematic side view showing the movable engaging portion and the accommodating portion on the substrate support base end side.

Fig. 10 is a schematic side view showing the movable engaging portion and the driving portion on the substrate support base end side.

11 is a perspective view illustrating the calculation of the turning direction position and the vertical direction position of the target point in automatic teaching.

12 is a plan view for explaining calculation of the front-rear position of a target point.

13 is a view showing another example of the target member, (a) is a plan view, and (b) is a front view.

14 (a) to 14 (c) are schematic side views illustrating the operation of the mobile stacking mechanism.

[Description of the code]

1: vertical heat treatment device

3: heat treatment furnace

9: holding fixture

16: storage container

20: substrate support

21: mobile loading mechanism

25: base of mobile loading mechanism

28: holding mechanism of mobile stacking mechanism

44: target member

45: first sensor

40: second sensor

47: control unit

48: substrate portion of the target member

49a: reflective surface of the target member

49: first detected part of target member

50: second detected part of target member

EMBODIMENT OF THE INVENTION Below, the best form for implementing this invention is demonstrated in detail based on attached drawing. 1 is a longitudinal sectional view schematically showing an embodiment of a vertical heat treatment apparatus according to the present invention, FIG. 2 is a side view of the mobile loading mechanism, FIG. 3 is a side view of the mobile loading mechanism of FIG. It is a top view which shows the board | substrate holding tool of a mobile stacking mechanism, and its related parts.

As shown in Fig. 1, this vertical heat treatment apparatus 1 has a housing 2 forming an outer portion of the apparatus, and a vertical heat treatment furnace 3 is provided above the housing 2. The heat treatment furnace 3 accommodates a to-be-processed object, for example, a thin disk-shaped semiconductor wafer W, and performs a predetermined treatment, for example, a CVD treatment. The heat treatment furnace 3 opens and closes a longitudinally elongated processing vessel, eg, a reaction tube 5 made of quartz and a furnace inlet 4 of the reaction tube 5, the lower end of which is opened as the furnace inlet 4. Cover the periphery of the reaction tube 5 and the heater (heating mechanism) 7 capable of heating the inside of the reaction tube 5 to a predetermined controlled temperature, for example, 300 to 1,200 ° C. It is mainly composed.

In the housing 2, a reaction tube 5 constituting the heat treatment furnace 3 and a base plate 8 made of stainless steel supporting the heater 7 are horizontally provided. The base plate 8 is formed with an opening (not shown) for inserting the reaction tube 5.

The reaction tube 5 is inserted through the opening of the base plate 8 upward from the lower side and fixed to the base plate 8 by the flange support member with the outward flange portion formed at the lower end of the reaction tube 5 to react. The tube 5 is installed on the base plate 8. The reaction tube 5 can be removed from the base plate 8 by cleaning or the like. The reaction tube 5 is connected to a plurality of gas introduction tubes for introducing a processing gas or a purge inert gas into the reaction tube 5, and a vacuum pump and a pressure control valve capable of controlling the pressure of the reaction tube 5 in a reduced pressure. The exhaust pipe which it has is connected (not shown).

A work area (loading area) 10 is provided below the base plate 8 in the housing 2. The holding tool (boat) 9 provided on the lid 6 using this working area 10 is loaded into the heat treatment furnace 3 (ie, the reaction tube 5) and simultaneously from the heat treatment furnace 3. It is unloaded and moving stacking of the wafer W with respect to the holding tool 9 is performed. The work area 10 is provided with a lifting mechanism 11 which lifts the lid 6 to load the boat 9 into the heat treatment furnace 3 and to unload it from the heat treatment furnace 3. The lid 6 contacts the open end of the furnace inlet 4 to seal the furnace inlet 4. The lower part of the lid 6 is provided with a rotating mechanism (not shown) for rotating the holding tool 9.

The holding tool 9 includes a main body portion 9a for supporting a plurality of wafers W in multiple stages, and a leg portion 9b for supporting the main body portion 9a, and the leg portion 9b rotates. It is connected to the rotating shaft of the mechanism. The holding tool 9 in the example of illustration is made of quartz, for example, and a large diameter, for example, a large number of wafers W having a diameter of 300 mm, for example about 75 sheets, in a horizontal posture via the ring-shaped support plate 15. It can hold | maintain at a predetermined space | interval, for example, 11 mm pitch in an up-down direction. A lower heating mechanism (not shown) is provided between the main body 9a and the lid 6 to prevent a temperature drop in the reaction tube 5 due to heat dissipation from the furnace inlet 4. In addition, the holding | maintenance tool 9 does not need to have the leg part 9b, and in this case, the main-body part 9a is mounted on the cover 6 via a heat insulating cylinder. The holding tool 9 includes a plurality of struts 12, a ceiling plate 13 and a bottom plate 14 connected to the upper end and the lower end of the strut 12, and a ring-shaped support plate disposed on the strut 12 ( 15). The ring-shaped support plate 15 is arranged in multiple stages in engagement with the concave or convex portions provided in the support 12 at predetermined intervals. The ring support plate 15 is, for example, made of quartz or ceramic, has a thickness of about 2 to 3 mm, and is formed to an outer diameter slightly larger than the outer diameter of the wafer W. As shown in FIG.

In the front part of the housing 2, a mounting table (also called a load port) 17 is provided. On the mounting table 17, a storage container (referred to as a carrier or a cassette) 16, which stores a plurality of wafers W, for example, about 25 sheets at predetermined intervals, is loaded, and the housing 2 is stored from the storage container 16. ), Carrying in and out of the wafer W are performed. The storage container 16 is a hermetically sealed storage container provided with the removable cover which is not shown in the front surface. In the front part of the work area 10, the door mechanism 18 which removes the cover of the storage container 16 and communicates the inside of the storage container 16 in the working area 10 is provided. In the work area 10, a plurality of substrate supports 20 are arranged at predetermined intervals, and the transfer stacks for carrying out the transfer of the wafers W between the storage container 16 and the holder 9 are carried out. The mechanism 21 is provided.

Outside the working area 10, a storage shelf 22 for storing the storage container 16 above the front part in the housing 2, and a storage container from the mounting table 17 to the storage shelf 22 or vice versa. A conveyance mechanism (not shown) for conveying (16) is provided. In addition, in order to suppress or prevent the heat in the high temperature furnace from being discharged from the furnace inlet 4 to the lower working area 10 when the lid 6 is opened, the furnace inlet 4 is located above the working area 10. ), A shutter mechanism 23 is provided to cover or prevent the cover. Further, below the mounting table 17, an aligner 43 is provided for aligning cutouts (for example, notches) provided on the outer circumference of the wafer W that is moved and stacked by the moving loading mechanism in one direction. have.

The movable stacking mechanism 21 supports a plurality of sheets, for example, five substrate supports (also called forks or support plates) for supporting a plurality of sheets, for example, five wafers W at a predetermined interval in the vertical direction. (20a to 20e)]. The center substrate support 20a can move forward and backward independently of other substrate supports. Substrate supports (1, 2, 4, and 5th from the top) 20b, 20c, 20d, and 20e other than the center substrate support 20a are the center substrate support 20a by a pitch conversion mechanism (not shown). It can move steplessly up and down with respect to). That is, the five substrate supports 20a to 20e can change the vertical gap (pitch) steplessly on the basis of the central substrate support 20a. Thereby, even when the accommodating pitch of the wafer in the storage container 16 and the mounting pitch of the wafer in the holding tool 9 are different, a plurality of wafers W at one time between the storage container 16 and the holding tool 9 are provided. ) Can be moved and loaded.

The movable loading mechanism 21 has a base 25 that can be lifted and lowered. The movable loading mechanism 21 is provided with the lifting arm 24 which can move to an up-down direction by a ball screw, and the box-shaped base 25 is provided in this lifting arm 24 so that it can pivot in a horizontal plane. On the base 25, the first movable body 26 for moving the center substrate support 20a forward and the center substrate support 20a interposed therebetween are arranged two by one. The second moving body 27 which enables the four substrate supporters 20b to 20e to move forward is provided so as to move forward and backward along the longitudinal direction of the base 25. Thereby, by moving only the first moving body 26, the sheet moving stack for moving and stacking one wafer, and the first and second moving bodies 26 and 27 are moved together to move five wafers simultaneously in the case of a plurality of sheets. It is possible to selectively carry out a batch movement stack for moving stacking. As mentioned above, in order to operate the 1st and 2nd moving bodies 26 and 27, the movement mechanism which is not shown in figure is provided in the inside of the base 25. As shown in FIG. As the movement mechanism and the pitch conversion mechanism, those disclosed in JP 2001-44260A can be used, for example.

The moving stacking mechanism 21 has a coordinate (coordinate axis) of the vertical axis (z axis), the pivot axis (θ axis) and the front and rear axis (x axis), and the drive system and the pivot axis for moving the base 25 in the vertical axis direction. The drive system which rotates around, the drive system which moves the board | substrate support tool 20 to a front-back-axis direction, and the encoder which detects the rotation angle of the drive part of each drive system are shown (not shown). The detection value by this encoder is an encoder value (ENC value), and it is used for the automatic teaching system in which the mobile loading mechanism (mobile loading robot) 21 discovers an operation target point by itself as mentioned later.

As shown in Figs. 11 and 12, the vertical heat treatment apparatus 1 is an automatic teaching system of the moving stacking mechanism 21, which includes a target member 44, a first sensor 45, and a second sensor 40. As shown in Figs. ) And a control unit 47. The target member 44 is provided at a predetermined target position to move (load) the wafer W in the holding tool 9 or in the storage container 16. The first sensor 45 is provided at one end of the base 25, and emits a light beam, for example, a laser beam, in the longitudinal direction of the base 25, so that the target member (B) is reflected by the reflected light from the target member 44. 44 is formed as a reflective sensor, for example, a laser sensor (laser displacement meter). The second sensor 40 is provided at both ends of the center substrate support 20a to detect the target member 44 by blocking the light beams that the target member 44 travels between the two ends, for example, photoelectric. It is formed as a mapping sensor consisting of a switch. The control part 47 has a function which calculates and recognizes the said target position based on the detection signal of the 1st sensor 45 and the 2nd sensor 40, and the encoder value of the drive system of the moving loading mechanism 21. FIG.

Each board | substrate support tool 20 is formed by the thin plate of an alumina ceramic, for example, Preferably it is formed in substantially U shape from the planar view which split | disconnected the front-end | tip part bilaterally (FIGS. 4, 6 and See FIG. 7). The moving stacking mechanism 21 is equipped with the holding mechanism 28 which can hold | maintain one wafer W from back and front under each board | substrate support tool 20. As shown in FIG. As shown in Figs. 8 to 10, the gripping mechanism 28 is provided at a distal end of the substrate support 20, and is provided with a fixed latch 30 for hanging the front edge of the wafer W, and a substrate support ( It is provided with the movable latch part 31 which is provided in the base end part of 20, and detachably hangs the rear edge part of the wafer W, and the drive mechanism which drives this movable latch part 31, for example, the air cylinder 32. As shown in FIG. Doing.

By advancing the movable locking portion 31 in the air cylinder 32, the wafer W can be held between the movable locking portion 31 and the fixed locking portion 30 between the front and the rear, and the movable locking is held. By retracting the portion 31, the wafer W can be released. It is preferable that the notch part 33 for avoiding interference with the movable locking part 31 is provided in the base end part of the board | substrate support tool 20. As shown in FIG.

The fixed locking portion 30 and the movable locking portion 31 preferably have inclined surfaces 30a and 31a to support the periphery of the wafer W so that the wafer W is not separated from its own weight therefrom. Do. In addition, each substrate support 20 has a spacer g between the lower surface of each substrate support 20 and the upper surface of the wafer W held therein as a spacer so that the front and rear edges of the wafer W are spaced apart. It is preferable that the accommodation parts 34 and 35 which accommodate a part are provided. In the example of illustration, one accommodating part 34 is provided in the left and right of the front-end | tip part of the board | substrate support tool 20, and one accommodating part 35 is provided in the left and right of the base end part, respectively. Moreover, the accommodating part 34 and the fixed latch part 30 of the front end side are formed integrally (as a single component), and compactness is aimed at. The fixed locking portion 30, the movable locking portion 31, and the receiving portions 34 and 35 are preferably formed of a heat resistant resin, for example, PEEK (Polyetheretherketone).

When the outer diameter of the ring-shaped support plate 15 is larger than the outer diameter of the wafer W, as shown in Figs. 4 and 5, in order to avoid interference between the fixed locking portion 30 and the movable locking portion 31, As needed, in order to avoid interference with the accommodating part 35 of the base part side, it is preferable that notch parts 36 and 37 are provided in the ring-shaped support plate 15. As shown in FIG. In addition, when the outer diameter of the ring-shaped support plate 15 is smaller than the outer diameter of the wafer W, it is not necessary to provide cutouts 36 and 37 in the ring-shaped support plate 15.

Between the upper surface of the substrate support 20 and the lower surface of the fixed latch portion 30 so that one substrate support 20 can be inserted into the gap between two ring-shaped support plates 15 and 15 adjacent to the upper and lower sides. The distance h is a dimension smaller than the distance k (about 7.7 mm) between the lower surface of the upper ring-shaped support plate 15 and the upper surface of the wafer W loaded on the lower ring-shaped support plate 15. For example, the thickness is preferably about 5.95 mm. Moreover, the 2nd sensor (mapping sensor) 40 is provided in the front-end | tip part of the board | substrate support tool 20a used at the time of sheet | leaf movement loading.

In the example of illustration, the sensor head 40a of the 2nd sensor 40 which can let in and out of an infrared ray is provided in one front end of the board | substrate support 20, and the second sensor in the other front end of the board | substrate support 20 is provided. The reflecting mirror 41 which reflects the infrared light radiate | emitted from the sensor head 40a of 40, and makes it enter the sensor head 40a of the 2nd sensor 40 is provided. If the moving stacking mechanism is moved at the time of automatic teaching and the infrared ray is blocked by the target member 44 as the detected portion, the position of the target member 44 can be detected based on the encoder value at that time. In the example of illustration, the 2nd sensor 40 has a detection mechanism not shown, and the light emitting element and light receiving element provided in the detection mechanism are connected to the sensor head 40a via the optical fiber 42. As shown in FIG. As shown in Fig. 5, the movable stacking mechanism 21 is placed in the vertical direction along the wafer W holding the second sensor 40 in the holder 9 in multiple stages (paper surface vertical direction in Fig. 5). By scanning at, the presence or absence of the wafer W at each stage in the holding tool 9 can be detected, and the detection result can be recorded (matched) in association with the positional information, and held before and after the processing. The holding state of the wafer of the support tool 9, for example, the presence or absence of protruding (position shift in the X-axis direction) can be detected.

Next, the target member 44 used for automatic teaching will be described. As shown in Fig. 11, the target member 44 includes a substrate portion 48 having a shape substantially the same as that of the wafer W, a first to-be-detected portion 49 protruding from the center portion on the substrate portion 48, and The first to-be-detected part 49 is provided with the 2nd to-be-detected part 50 provided. The first to-be-detected part 49 has the reflecting surface 49a which reflects the light beam emitted from the 1st sensor 45, for example, a laser beam, on the peripheral surface. The second to-be-detected portion 50 is formed in a small axis (pin) shape and is detected by the second sensor 40. Instead of protruding one second detected portion 50 onto the first detected portion 49, the first detected portion 49 is interposed with respect to the first detected portion 49 at a position symmetrical with respect to the first detected portion 49. Two second to-be-detected portions 50 may be provided on the substrate portion 48 (see Fig. 13). In this case, the center of the two second to-be-detected parts 50 and 50 is based on the encoder value related to the X-axis when the two second to-be-detected parts 50 and 50 are respectively detected by a 2nd sensor. X position coordinates can be calculated. Since the target member 44 of FIG. 13 can suppress the height dimension lower than that of the target member 44 of FIG. 11, the target member 44 into the storage container 16 or the alignment device 43 having a smaller capacity than the holding tool 9 can be provided. It is suitable for installation.

The control unit 47 recognizes (records or stores) the target position (target point) by executing the following first, second and third steps when performing automatic teaching. In the first step, as shown in Fig. 11, the drive system of the moving stacking mechanism 21 related to the movement of the base 25 in the vertical direction (z-axis) direction is operated to detect the detection signal of the first sensor 45 [ The position (on both ends of the first detected part 49 in the up-and-down direction) where the ON and OFF are reversed is found, and the center of the center of the target member 44 is up and down from the encoder values at the two inverted positions. The position (that is, the position in the vertical direction of the first detected portion 49) is calculated. In the second step, the drive system of the moving stacking mechanism 21 associated with the movement of the base 25 in the direction of the pivot axis (θ axis) is operated to invert the detection signals (on, off) of the first sensor 45. [The right and left ends of the first to-be-detected part 49] is located, and the position of the center of the pivoting direction of the target member 44 from the encoder values at the two inverted positions (that is, the first to-be-detected part 49 The position of the center in the left and right directions] is calculated. In the third process, as shown in FIG. 12, the position where the detection signal (on, off) of the second sensor 40 is reversed by operating the front and rear axes (x-axis) of the center substrate support 20a. 2, the front and rear ends of the portion to be detected 50, and the position of the center (the position of the center of the front and rear direction of the second to-be-detected part) is determined from the encoder values at the two reverse positions. Is calculated. In the automatic teaching, preferably, the target member 44 is provided at a predetermined position of a plurality of portions in the holding tool, for example, six (6 points), and the x, z and θ coordinates of each point are calculated. The x, z and θ coordinates of each position other than the predetermined position are obtained by dividing the difference in the coordinate values of the two target member mounting points by the number of wafers W to be installed between the two target member mounting points [ie And the installation pitch of the wafer W] can be obtained by appropriately adding or subtracting the coordinate value of the predetermined position.

14 (a) to 14 (c), the operation of the moving stacking mechanism 21 at the time of the wafer W moving stacking will be described schematically. First, the substrate support 20 is inserted into the storage container, and the movable locking portion 31 of the holding mechanism 28 under the substrate support 20 is moved so as to approach the fixed locking portion 30 (the holding mechanism). (28) is closed] The wafer W is held. In this state, the substrate holder 20 is withdrawn from the storage container, and the wafer W is taken out from the storage container, and the substrate support 20 is then placed above the ring-shaped support plate 15 of the holding tool 9. Position (Fig. 14 (a)). Next, the movable locking portion 31 of the holding mechanism 28 is moved away from the fixed locking portion 30 (opening the holding mechanism 28) to release the wafer W from the holding mechanism 28 to form a ring. It loads on the support plate 15 (FIG. 14 (b)). Next, the substrate support 20 is raised, and the substrate support 20 is removed from the retaining support 9 (Fig. 14 (c)).

According to the above embodiment, the following advantageous effects can be obtained.

Since the movable stacking mechanism 21 has a plurality of sheets, for example, five substrate supports 20 (20a to 20e), the wafer (for the holding tool 9 having a plurality of ring-shaped support plates 15) is used. A plurality of pieces of W) can be moved and stacked, for example, five by one, so that the movement loading time can be significantly shortened. In addition, since the movable stacking mechanism 21 is provided with the holding mechanism 28 which grips the wafer W under each board | substrate support 20, it is necessary to enlarge the space | interval between adjacent board | substrate support 20. There is no. Therefore, the pitch between the ring-shaped support plates 15 of the holding tool 9 can be reduced to about 11 mm from about 16 mm in the conventional manner, and the number of treatments can be increased to about 75 sheets, which is 1.5 times that of the conventional 50 sheets. In addition, the throughput can be improved.

In addition, the holding mechanism 28 is provided at the distal end of the substrate support 20 to fix the front edge of the wafer W, and is provided at the proximal end of the substrate support 20 to provide the wafer W. FIG. And a movable engaging portion 31 for detachably hanging the rear edge of the slit and a driving portion 32 for driving the movable engaging portion 31 forward and backward, so that the wafer W can be easily supported with a simple structure. It can hold | maintain below 20. In addition, the receiving portions 34 and 35 accommodate the front and rear peripheral portions of the wafer W so that a gap exists between the lower surface of each substrate support 20 and the upper surface of the wafer W in each substrate support 20. ), It is possible to prevent the upper surface of the wafer W from being rubbed and damaged by the lower surface of the substrate support 20 when holding the wafer W from the upper side. In addition, since the cutouts 36 and 37 are provided in the ring-shaped support plate 15 to avoid the interference between the fixed locking portion 30 and the movable locking portion 31, the gripping mechanism 28 is connected to the ring-shaped support plate 15. The wafer W can be reliably gripped from above without interference.

As described above, the vertical heat treatment apparatus 1 according to the present invention holds the heat treatment furnace 3 and the plurality of wafers W in multiple stages at predetermined intervals in the vertical direction at a predetermined interval, and carries them in and out of the heat treatment furnace 3. And a plurality of substrate supporters 20 supporting the wafers W, being provided on the base 25 and the base 25 which can be elevated and pivoted, and which can be moved forward and backward. In the movable holding mechanism 21 and the holding mechanism 9 which carry out the movable loading of the wafer W between the storage container 16 and the holding tool 9 which receive the wafer W at predetermined intervals. Alternatively, a light beam, for example, is provided at a target member 44 installed at a predetermined target position for moving and stacking the wafer W in the storage container 16 and the base member 25 and in the advancing direction of the substrate support 20. For example, the first sensor 45 for emitting the laser light and detecting the target member 44 by the reflected light, The second sensor 40 and the first sensor 45 and the second sensor 40 which are provided at both ends of the support 20a and detect the target member 44 by blocking the light rays traveling between the both ends. And a control unit 47 for calculating, recognizing, and recording a target position based on an encoder signal of each drive system of the moving stacking mechanism 21 associated with each detection signal. According to this configuration, the teaching of the operation target position (target point) of the mobile stacking mechanism 21 can be performed automatically, and the fluctuation in teaching accuracy caused by an artificial factor can be eliminated.

In addition, the target member 44 is provided with a substrate portion 48 having a shape substantially the same as that of the wafer W, a light beam projecting in the center portion on the substrate portion 48, and emitted from the first sensor 45 on the peripheral surface thereof, For example, the first to-be-detected part 49 which has the reflecting surface 49a which reflects a laser beam, and the board | substrate part which has one or the 1st to-be-detected part 49 in the upper part of the 1st to-be-detected part 49 between. Two projection parts 50 are provided in the symmetrical position on the 48, and the 2nd detected part 50 detected by the 2nd sensor 40 is provided. This makes it possible to easily teach the target position.

In addition, the controller 47 operates the base 25 in the up-and-down axis (z-axis) direction to find a position where the detection signal of the first sensor 45 is inverted, and the top and bottom of the base 25 in this inverted position. A first process of calculating a vertical center of the target member 44 based on an encoder value of a drive system related to movement; and operating the base 25 in a pivot axis (θ-axis) direction or a left-right direction to obtain a first sensor. The position where the detection signal of 45 is reversed is found, and the pivot direction center or left and right center of the target member 44 is calculated from the encoder value of the drive system related to the pivotal movement of the base 25 at this reverse position. 2nd process and the board | substrate support tool 20a operate in the front-back axis (x-axis) direction, and find the position where the detection signal of the 2nd sensor 40 is reversed, and the board | substrate support tool 20 in this inversion position On the basis of the encoder value of the drive system relating to Executing the third step of calculating the front-rear direction center of the table member (44) to recognize the target position. For this reason, teaching can be performed automatically and accurately.

Moreover, since the board | substrate support tool 20 is equipped with the holding mechanism 28 which hold | maintains the wafer W between back and front, the wafer W can be hold | maintained reliably. For this reason, since there exists no possibility that the position shift of the wafer W hold | maintained in the board | substrate support tool 20 may occur, the wafer W can be moved at high speed and the wafer W can be correctly positioned. Therefore, compared with the case where the wafer W is conveyed by loading onto the substrate support 20 as in the related art (when the conveying speed is high, the wafer may fall off), the conveying speed can be increased and conveyed. In addition, periodical positional correction of the dummy wafer can be performed quickly. These contribute to the improvement of the throughput of the vertical heat treatment apparatus 1. In addition, the second sensor 40 can not only detect the target member 44 during automatic teaching, but also the wafer W held in multiple stages in the holding tool 9 unloaded from the reaction tube 5. By scanning along the vertical direction, the state of the wafer W before and after a process can be detected. In this way, by monitoring the state of the wafer W in the holding tool 9 before and after the process, accidents such as damage to the wafer W can be prevented in advance, and the operation reliability of the vertical heat treatment apparatus 1 can be prevented. Can be improved.

As mentioned above, although embodiment of this invention was described in detail by drawing, this invention is not limited to the said embodiment, A various design change etc. are possible in the range which does not deviate from the summary of this invention. For example, in the above embodiment, a ring boat having a ring-shaped support plate is used as the retainer, but the retainer may be a normal boat (called a rudder boat) that does not use a ring-shaped support plate. In the above embodiment, the mobile stacking mechanism is configured to hold the wafer from above the wafer to below the substrate support. However, the mobile stacking mechanism may be configured to hold the wafer on the substrate support from below the wafer by rotating the structure of the substrate support upward and downward. good.

Claims (6)

A heat treatment furnace (3), A holding tool 9 which is carried in and out of the heat treatment furnace 3 by holding a plurality of workpieces in multiple stages at predetermined intervals in the vertical direction; Storage for lifting and pivoting the base 25 and a plurality of substrate supporters 20 which are provided on the base 25 so as to be retractable and support the object to be processed, and accommodate the plurality of objects to be processed at predetermined intervals. It is a moving stacking mechanism 21 which carries out the moving stack of the to-be-processed object between the container 16 and the said holding support 9, and one of the said several board | substrate support 20 is different from the other board | substrate support 20. A mobile loading mechanism 21 which is configured to be able to move forward and backward independently, It is installed in the base 25 and simultaneously emits a light beam toward the advancing direction of the substrate support 20, and moves the target object in the holding tool 9 or the storage container 16 by the reflected light. A first sensor 45 for detecting a target member 44 installed at a target position to be performed; A second sensor 40 provided at two tip ends of the one substrate support 20 to detect the target member 44 by blocking light rays traveling between the two tip ends; The target position is calculated and recognized based on the detection signals of the first sensor 45 and the second sensor 40 and the encoder values of the drive system of the mobile loading mechanism 21 associated with each detection signal. And a control unit 47, The target member 44 is provided with a substrate portion 48 and a reflective surface 49a protruding from the central portion on the substrate portion 48 to reflect light rays emitted from the first sensor 45 to the peripheral surface. Two protruding portions are provided at a symmetrical position on the first to-be-detected portion 49 having one and the upper portion of the first to-be-detected portion 49 or on a substrate portion 48 having the first to-be-detected portion 49 therebetween. And a second to-be-detected part (50) detected by the second sensor (40). delete The method of claim 1, wherein the controller 47, when calculating and recognizing the target position, moves the base 25 in the vertical direction to find a position at which the detection signal of the first sensor 45 is inverted. A first step of calculating a center of the up-down direction of the target member 44 based on the encoder value of the drive system related to the up-down movement of the base 25 at the inverted position, and the base 25 By turning around the vertical axis, the position where the detection signal of the first sensor 45 is reversed is found, and the target member (based on the encoder value of the drive system related to the rotational movement of the base 25 at this reverse position) The second step of calculating the center of the rotational direction of the 44, and the position where the detection signal of the second sensor 40 is reversed by operating the one substrate support 20 in the front and rear direction, the reverse Said one in position The vertical heat treatment apparatus, configured to perform a third step of calculating a center of the front and rear directions of the target member 44 based on the encoder value of the drive system related to the forward and backward movement of the substrate support 20. . The vertical heat treatment apparatus according to claim 1, wherein the plurality of substrate supporters (20) are provided with holding mechanisms (28) each holding the object to be interposed from front to back. The state of the to-be-processed object in the holding | maintenance tool 9 of Claim 1 by which the said 2nd sensor 40 scans in the up-down direction along the to-be-processed object hold | maintained in the holding | maintenance tool 9 in multiple stages. The vertical heat treatment apparatus, characterized in that the configuration and arrangement so as to detect. Retaining tools 9 carried in and out of the heat treatment furnace 3 by holding a plurality of workpieces in multiple stages at predetermined intervals in the vertical direction, the base 25 that can be elevated and pivoted, and the base 25 are moved back and forth. It has a plurality of board | substrate supporters 20 which are provided so that it can support a to-be-processed object, and are accommodated between the storage container 16 and the said holding | maintenance tool 9 which receive a several piece of a to-be-processed object at predetermined intervals. In the longitudinal heat treatment apparatus 1 provided with the mobile loading mechanism 21 which carries out mobile loading, in the method of teaching the said mobile loading mechanism 21, The target member 44 is provided at a predetermined target position to move and load the object to be processed in the holding tool 9 or the storage container 16, Unlike the other substrate support 20, one of the plurality of substrate support 20 is configured to be able to advance and retreat alone, At the same time, the first substrate 45 is provided with the first sensor 45 that detects the target member 44 by the reflected light while emitting a light beam toward the advancing direction of the substrate support 20 on the base 25. At the two distal ends of the support tool 20, a second sensor 40 for detecting the target member 44 is provided by blocking light rays traveling between both distal ends, The target member 44 is provided with a substrate portion 48 and a reflective surface 49a protruding from the central portion on the substrate portion 48 to reflect light rays emitted from the first sensor 45 to the peripheral surface. Two protruding portions are provided at a symmetrical position on the first to-be-detected portion 49 having one and the upper portion of the first to-be-detected portion 49 or on a substrate portion 48 having the first to-be-detected portion 49 therebetween. And a second detected portion 50 detected by the second sensor 40, The base 25 is moved up and down to find a position at which the detection signal of the first sensor 45 is inverted, and the encoder value of the drive system related to the vertical movement of the base 25 at the inverted position is found. Based on a first step of calculating a center of the target member 44 in an up-down direction, and turning the base 25 around a vertical axis to find a position at which the detection signal of the first sensor 45 is inverted, A second step of calculating a center of rotation direction of the target member 44 on the basis of the encoder value of the drive system related to the rotational movement of the base 25 at the inverted position, and the one substrate support tool; (20) is operated in the front-rear direction while being spaced forward than other substrate supports (20) to find a position at which the detection signal of the second sensor (40) is inverted. Back and forth Teachings wherein recognizing the target position by the encoder on the basis of the value of a driving system that is running a consecutive third step of calculating the center of the front-rear direction of the target member (44).

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