KR100911740B1 - System for Field Emission and Electrical Property Measurement - Google Patents

Abstract

The present invention relates to a system for measuring the physical properties of a measurement sample in a high vacuum state, the multifunctional vacuum measurement system for measuring the physical properties of the measurement sample in a high vacuum state, comprising: a vacuum chamber; A grid electrode formed in the vacuum chamber; A high voltage power supply for applying a voltage to the grid electrode through a feedthrough formed to penetrate one surface of the vacuum chamber; A turbo pump for evacuating the vacuum chamber; A sample probe as a cathode for measuring the physical properties of the measurement sample with the measurement sample mounted and inserted into the vacuum chamber; And a liquid refrigerant circulation path for supplying a liquid refrigerant to pass through the sample probe, wherein the sample probe is formed from the vacuum chamber without affecting the degree of vacuum of the vacuum chamber while the measurement sample is mounted. It is characterized in that it is configured to be removable.

Vacuum chamber, carbon nanotube (CNT), field emission characteristics, DAQ

Description

System for Field Emission and Electrical Property Measurement

The present invention relates to a system for measuring the physical properties of a measurement sample in a high vacuum state, and more particularly, to a field emission source such as silicon or carbon nanotube (CNT), which is recently used as a field emission display (FED) device. field emission source or newly synthesized materials and basic physical properties such as current and voltage characteristics, temperature and pressure characteristics, and lifetime measurement of new materials are obtained more conveniently, conveniently and accurately in high vacuum. A system can be stored or displayed.

In the field of materials engineering, the field of carbon nanotubes (CNTs), a field emission device that is widely used for physical property analysis of newly developed new materials and materials, or as a physical property test and vacuum electronic device of manufactured semiconductor wafers. In investigating the emission characteristics, the properties of the developed materials (physical properties such as voltage, current, temperature and pressure) are tested in a relatively high vacuum state (eg 10 ^-6 torr or higher vacuum atmosphere). In addition, the inspection of the properties of a new material or new material often requires a high vacuum test of, for example, 10 ^-7 torr or higher, and in a cryogenic state that exhibits superconductivity, which dramatically improves the physical properties of general materials. Physical property testing of materials is also required.

However, according to the prior art, there is no standardized equipment for analyzing the spectroscopic characteristics as well as the electrical properties of the field emission device, the synthesized new material and the new material, so that users can use the measurement system temporarily produced by the user. In addition, the measurement system was not only complicated in size and structure, but also hardly considered in terms of physical property inspection of the measurement sample under high vacuum or cryogenic conditions of 10 ^-7 torr or more. There is a problem.

In addition, according to the prior art as described above, the experiment was carried out with all the components mounted in the vacuum chamber when the measurement sample was tested, and the sample material to be tested was loaded into the vacuum chamber or the vacuum chamber. In the case of unloading out, the measurement method and procedure are complicated because the vacuum is usually broken and the inlet of the vacuum chamber must be opened, and when the measurement sample is remounted and the experiment is performed again while the vacuum is broken. There was a lot of inconvenience in terms of time because it had to generate the required high vacuum.

That is, when it is conventionally necessary to perform an experiment while maintaining a vacuum, for example, in order to collect data of various samples in a short time, frequent replacement of a measurement sample or mal-function of a mounted sample Due to the time and effort, the samples that are difficult to install must be removed from the vacuum chamber again by destroying the vacuum again, and the new samples must be fitted, and the experiment should be carried out after securing the vacuum according to the conditions. There was a problem that the method and procedure is complicated, such as requiring more time when required.

In addition, recent researches have been conducted by many researchers to commercialize a field emission display (FED), a back light unit (BLU), and a cold cathode X-ray source. Although many researches have been conducted to investigate electric field characteristics such as electric field emission characteristics, current, voltage, etc. of carbon nanotubes (CNT), which are present, many users have difficulty in conducting research with conventional devices. to be. In addition, sometimes high vacuum (eg, 10 ^-7 torr or more) is required to check the physical properties of materials, and physical property tests of cryogenic materials are required, but conventional measuring equipment can meet these requirements. It is hard to do it

In addition, it is predicted that various new materials based on nanomaterials including carbon nanotubes (CNT), which are mentioned above, will be developed due to the development of technology for material synthesis. For example, characterization of current and voltage characteristics, temperature, pressure, etc. will be important, and thus the demand for convenient and accurate measurement systems for characterization is expected to increase constantly. Furthermore, considering the superconducting phenomena in the high vacuum and cryogenic conditions of these developed nanomaterials is a very informative and necessary study, it is a simple and convenient standardized measurement to facilitate these experiments. Development of the system is essential.

The present invention has been made to solve the problems of the prior art as described above, a system capable of more efficiently inspecting the physical properties of the measurement sample by reducing the enormous effort and time required to inspect the properties of the material in a vacuum state To provide that purpose.

In addition, the present invention understands the principle of quantum mechanical field emission from which electrons are emitted, and field emission of field emission devices such as carbon nanotubes (CNTs), which has been proven to have the best performance as emitters. When testing characteristics, or when measuring physical properties of existing materials or various newly developed materials in a high vacuum atmosphere, if the sample device has a problem or needs to be replaced by another sample, Another object is to provide a sample probe as a negative electrode module for use in multifunctional measuring equipment in which the sample can be easily and easily replaced.

The present invention also provides a vacuum system capable of maintaining a vacuum, a system capable of measuring temperature and pressure, a voltage and current measurement, an imaging system for visualizing electron emission states of CNTs, and a measurement of liquid nitrogen and liquid helium. It consists of a cryogenic system that can deliver samples to a lab-based Data Aquisition System (DAQ) that automatically acquires and stores data for all measurement variables, as described above. It is another object to provide a versatile vacuum measurement system.

The system according to the present invention for achieving the above object is for measuring the physical properties of the measurement sample in a high vacuum state, comprising: a vacuum chamber; A grid electrode formed in the vacuum chamber; A high voltage power supply for applying a voltage to the grid electrode through a feedthrough formed to penetrate one surface of the vacuum chamber; A turbo pump for evacuating the vacuum chamber; A sample probe as a cathode for measuring the physical properties of the measurement sample with the measurement sample mounted and inserted into the vacuum chamber; And a liquid refrigerant circulation path for supplying a liquid refrigerant to pass through the sample probe, wherein the sample probe is formed from the vacuum chamber without affecting the degree of vacuum of the vacuum chamber while the measurement sample is mounted. It is characterized in that it is configured to be removable.

Here, the measurement sample is a field emission device, the physical property may be any one of the field emission characteristics, electrical conductivity, voltage, current, temperature, pressure characteristics and superconducting characteristics in the cryogenic state.

In addition, the measurement sample mounted on the sample probe may form an ohmic contact using silver paint.

In addition, the sample probe is preferably formed to penetrate the sample probe guideline so that it can be mounted or detached to or from the vacuum chamber.

The sample probe guideline also includes a valve system formed between two O-rings and the two O-rings, wherein one end of the sample probe on which the measurement sample is mounted is close to the vacuum chamber of the two O-rings and the valve. By locking the valve system after passing through the system, it is preferable that the vacuum degree of the vacuum chamber is maintained when the sample probe is detached from the vacuum chamber.

In addition, the measurement sample may be fixed to one end of the sample probe through a bolt, or the measurement sample may be mounted on the top surface of the sample probe using silver paint.

Here, the vacuum chamber is preferably formed integrally with the turbo pump.

The system may further include an insulation layer formed between the grid electrode and the field emission device mounted to the sample probe, wherein the measurement sample is a field emission device.

In addition, the grid electrode may be formed of a metal mesh or a metal structure in a solid form.

Alternatively, the grid electrode may be formed as a transparent electrode, and in this case, the grid electrode may be coated with a fluorescent material for visualizing an electron beam generated from a field emission device mounted on the sample probe.

The system may further include a CCD camera mounted on one surface of the vacuum chamber and a CCD controller for controlling the same, and may automatically acquire, display, and store data regarding physical properties of the measurement sample in real time. It may further comprise an imaging and processing system equipped with a data acquisition (DAQ) program.

In addition, a heating wire may be installed on the outer wall of the vacuum chamber or a liquid refrigerant circulation path may be installed.

If the system according to the present invention is commercialized, it is very easy to develop a new concept x-ray light source based on CNTs, which is superior in technology and function, compared to the thermal cathode type x-ray light source, which consumes a lot of power. It can replace the X-ray light source, which was only imported, and can supply it at a relatively low price.

In addition, the present invention can easily measure the field emission characteristics of the CNT in a high vacuum, cryogenic state that can not be measured by the conventional CNT field emission device, the field emission phenomenon of CNT generated at cryogenic temperatures By providing new research results, new technologies can be created and led.

In addition, as described above with respect to the CNT, a research for the use as a backlight unit (BLU), a field emission display (FED) or vacuum electronic devices, a cold cathode x-ray source, and various nano-bio sensors has been conducted. In an active situation around the world, the present invention contributes to the development of basic science by providing an experimental system that can facilitate the physical property testing of CNTs. It is expected to take the lead.

In addition, the present invention can be easily used by the user as compared to the equipment for measuring the field emission characteristics of the conventional CNT, and also can significantly improve the measurement time and improve the accuracy of the measurement data by incorporating LabView-based automatic DAQ system It can work.

Hereinafter, exemplary embodiments of the present invention will be described with reference to the accompanying drawings.

1 shows a schematic configuration of a multifunctional vacuum measurement system for field emission and electrical property evaluation measurement according to a preferred embodiment of the present invention.

Referring to FIG. 1, a system for measuring physical properties of a measurement sample in a high vacuum state (hereinafter referred to as a multifunctional vacuum measurement system) includes a vacuum chamber 100, a turbo pump 101, and a CCD controller. 102, an imaging and processing system 103, a pump and vacuum gauge controller 104, a temperature meter 106, and a high voltage power supply 105, and optionally may include a rotary pump 107. .

As described below, the vacuum chamber 100 may have a problem in a cathode part to which the measurement sample is mounted to measure physical properties of the measurement sample, or may complete measurement of the physical property of one measurement sample to another measurement sample. The sample probe can be mounted and detached with a structure capable of removing and assembling only the cathode part when it is to be replaced, while maintaining the vacuum inside the vacuum chamber when mounting or detaching the sample probe to replace the measurement sample. It is configured to. In the present specification, the physical properties of the measurement sample may be a field emission property, a current, or a voltage property of the field emission device when the measurement sample is a field emission device such as carbon nanotubes (CNT), and the measurement sample is a nanomaterial. In the case of a new element or a new material, it may be an electrical characteristic, a temperature, or a pressure characteristic such as electrical conductivity, voltage, and current of the measurement sample, and in some cases, for example, in a high vacuum state or a cryogenic state of 10 ^-7 Torr or more. It can also be a superconducting property. In addition, the vacuum chamber 100 may be configured to increase the degree of vacuum if necessary by installing a heating wire on the outer wall of the vacuum chamber 100 so as to outgas from the material forming the inner wall and the pipe, although not shown. In addition, it may be configured to quickly dry the wet vacuum chamber by forming a liquid refrigerant circulation path at the same time as the installation of the hot wire.

The turbo pump 101 is for evacuating the vacuum chamber 100 together with the rotary pump 107, which is optionally included, to exhaust the vacuum chamber 100 to a high vacuum of at least 10 ⁻⁶ Torr or more. Any kind of pump may be used, and since this is well known to those skilled in the art, the detailed description thereof will be omitted.

The CCD controller 102 is for visualizing electron beam characteristics generated in the cathode portion of the vacuum chamber 100, particularly when the measurement sample is a field emission device, and the imaging and processing system 103 and the vacuum chamber (described later) It is used to measure the field emission characteristics of the field emission device in conjunction with the CCD camera installed on the upper surface of the device 100 and simultaneously to image the light emission pattern generated from the field emission device.

The imaging and processing system 103 is equipped with a LabView-based automated data acquisition (DAQ) program to synchronize data with the CCD controller 102 and other components to automatically obtain data regarding the physical characteristics of the measurement sample. Acquire and convert the obtained data into an image. Therefore, according to the present invention, since the LabView-based DAQ can be developed and interlocked with the measurement system to acquire, display and store data on the physical characteristics of the measurement sample to be measured in real time, the accuracy of the measured data At the same time, the electron generating shape of the field emission device such as carbon nanotubes (CNT) can be measured in real time.

The pump and vacuum gauge controller 104 is for precisely controlling the degree of vacuum of the vacuum chamber 100 by controlling the turbo pump 101 and / or the rotary pump 107, and the high voltage power supply 105. Is for applying a high voltage to the various electrodes in the vacuum chamber 100, the temperature measuring device 106 is for measuring the temperature of the sample mounted on the cathode in the vacuum chamber (100).

FIG. 2 is a view for explaining the detailed configuration of the vacuum chamber 100 shown in FIG. 1 and the sample probe 115 as a cathode part used therein.

Referring to FIG. 2, the vacuum chamber 100 according to the present invention is preferably manufactured using a metal capable of maintaining a vacuum for field emission experiments and superconductivity experiments, and a grid as an anode part inside the vacuum chamber 100. A sample probe 115 configured to mount an electrode 110, a measurement sample 111 so that the measurement sample 111 is placed inside the vacuum chamber 100, and the sample probe 115 on which the measurement sample is mounted When mounted to or detached from the vacuum chamber 100, a sample probe guide line 112 for guiding the sample probe 115, a support 113 for supporting the grid electrode 110, and the like, and the grid electrode ( Applying a voltage to the 110 comprises a voltage applying unit 114.

The grid electrode 110 is made of, for example, a material having good electrical conductivity, such as stainless specicial use stainless steel (SUS), copper, iron, tungsten, and the like, particularly when the measurement sample 111 is a field emission device. It may be formed of a metal structure in a mesh or solid form. The grid electrode 110 may be formed to abut the measurement sample mounted on the cathode of the sample probe 115 as shown, but according to the present invention by changing the mounting position of the sample probe 115, the grid The distance between the electrode 110 and the cathode of the sample probe 115 may be easily changed.

The grid electrode 110 may also be manufactured as a transparent electrode (eg, MgO or ITO electrode) to measure the light emission phenomenon of a field emission source such as carbon nanotubes mounted on the sample probe 115. This transparent electrode may be manufactured to be coated. In the transparent electrode, a fluorescent material such as a phosphor such that an electron beam generated from an electron emission source such as a carbon nanotube is shaped by using a CCD camera 124 installed on the upper surface of the outside of the vacuum chamber 100. This may be coated and thus may be configured to identify the image in real time simultaneously with image acquisition as described above in conjunction with the image and processing system 103 shown in FIG. 1.

In the present embodiment, the grid electrode 110 is shown as a single electrode, the grid electrode 110 is an electron beam due to the collision by the electrons emitted from the cathode when measuring the field emission characteristics of the field emission device It should be noted that it includes a positive electrode electrode for emitting light or an electron focusing electrode for focusing electrons emitted from the negative electrode portion, and encompasses the structure of any positive electrode portion together with the negative electrode portion described later.

The measurement sample 111 is a measurement sample mounted on the cathode, and is manufactured to have a size that fits into the probe at the upper end of the sample probe 115 as described below. In this case, the measurement sample 111 may be formed to form ohmic contact with the cathode part using silver paint. In addition, the measurement sample 111 may be fixed to the sample probe 115 by the bolt 116 as shown, and in some cases the sample probe 115 using only silver paint It may be fixed to the sample probe 115 by being adhered to the top.

An insulating layer 112 may be formed between the grid electrode 110 and the sample probe 115. In particular, when the measurement sample 111 is a field emission device such as a carbon nanotube, the grid electrode 110 may be formed. In order to insulate between and the sample probe 115, for example, it is made of a low conductivity material, such as ceramic, Teflon, bellspell, alumina.

In addition, a support 113 may be formed in the vacuum chamber 100, which is an insulating layer supporting the grid electrode 110, the measurement sample 111, and the insulating layer 112. Like (112), it is preferable that the material is made of a material having low electrical conductivity, such as ceramic, Teflon, bellspell, alumina, or the like.

The vacuum chamber 100 may further include a voltage applying unit 114 and a feed through 117 for applying a high voltage to the grid electrode 110. The voltage applying unit 114 is preferably made of a material having good conductivity such as SUS, copper, iron, and the like, and the feedthrough 117 is outside the vacuum electrode 110 through the voltage applying unit 114. It is preferably made of a high pressure MHV, SHV, etc. in order to facilitate the application of high voltage as a role of applying a voltage to the).

The sample probe 115 is for mounting the measurement sample 111, and moves along the sample probe guideline 112 to place the measurement sample 111 inside the vacuum chamber 110, as will be described later. And when coupled with the valve system 125 and the two o-rings 126, 126 ', when taken out of the vacuum chamber 100 to replace the measurement sample, the sample prep is maintained while maintaining the vacuum of the vacuum chamber 100. Only the bottom portion 115 is configured to be detachable from the vacuum chamber 100.

The measurement sample 111 is preferably mounted on the measurement sample 111 so as to be fixed to the sample probe 115 as the cathode part, and then fixed by being twisted with a bolt 116, if necessary. The measurement sample 111 may be mounted on the top surface of the 115 to be in ohmic contact with silver paint.

In addition, the sample probe 115 is equipped with a thermometer 128 such as a thermometer and the temperature probe shown in FIG. 1 with the sample probe 115 mounted to the vacuum chamber 100. In conjunction with 106), it is desirable to be able to measure the temperature of the measurement sample in real time.

The sample probe 115 may also include a liquid coolant jet and a liquid coolant inlet 118 and 119, wherein the liquid coolant jet and the liquid coolant inlet 118 and 119 may determine the temperature of the measurement sample 111. The liquid refrigerant is ejected to form a circulation path 127 which is designed to circulate through the sample probe 115 from the outside of the vacuum chamber 110 so that a refrigerant such as liquid nitrogen or liquid helium to be cryogenically lowered. To inject. The pressure gauge 120 is a gauge for measuring the pressure of the liquid refrigerant, and the reservoir 121 is preferably installed outside the vacuum chamber 110 to circulate the liquid refrigerant from the outside of the vacuum chamber 100.

The vacuum chamber 100 according to the present invention may further include a side viewport 122 and a top viewport 123, and a CCD camera 124 may be mounted on the top viewport 123. The side view port 122 is a viewport for observing the side view inside the vacuum chamber, the upper viewport 123 is a viewport for measuring the emission of the grid electrode 110, the transparent inside the grid electrode 110 The outer diameter of the CCD camera 124 may be measured to measure the state of light emitted from the electrode, and materials such as quartz and metal may be used. The CCD camera 124 is connected to the CCD controller 102 shown in FIG. 1 through a cable (not shown) to measure light emission of the grid electrode 110.

In addition, the vacuum chamber 100 according to the present invention preferably comprises the turbo pump 101 integrally, and although not shown, it is necessary to mount a small turbo pump, which does not generate vibration, in the vacuum chamber to be implemented in the present invention. It can also have a structure that maintains the vacuum at time.

Multifunctional vacuum measuring system according to the present invention having the structure as described above, largely investigate the field emission characteristics of the field emission device such as silicon or carbon nanotubes (CNT) and physical properties such as current, voltage of new materials or new materials It can be used to Of course, in performing these two experiments, it is common that only the measurement sample can be taken out and mounted when a measurement sample needs to be replaced.

First, when the measurement sample is a field emission device such as carbon nanotubes (CNTs), in order to investigate the field emission characteristics, electrons generated from the sample probe 115 and the cathode part, which are constituted by the field emission emitter, are extracted. It is composed of a grid electrode 110, the structure to ensure that the insulating layer 112 that can electrically insulate the grid electrode 110 and the carbon nanotube (CNT) cathode that is the electron emission source is fixed in the vacuum chamber 100 Will have In this case, when the cathode part does not operate correctly, the sample probe 115 to which the CNT field emission source is mounted may be easily extracted to the outside of the vacuum chamber 100 while maintaining a high vacuum inside the vacuum chamber 100. After replacing only the discharge element, it may be inserted into the vacuum chamber 100 again.

 In addition, even in the case of measuring current and voltage when the measurement sample is a new material and a material synthesized with a new material, the structure for measuring the field emission characteristic fixed in the vacuum chamber 100 may be used as it is. For example, in place of a field emission source such as CNT on the sample probe 115, the grid electrode 110, which is fixed in the vacuum chamber 100, may be brought into contact with the upper surface of the measurement sample. In this way, the current and voltage characteristics of the measurement sample can be investigated.

In addition, as a method for examining the physical properties in the cryogenic state in all the measurement samples including the above-mentioned field emission device, the liquid nitrogen, liquid helium, etc. are circulated inside the sample probe 115. Since the circuit 127 is included, the measurement sample can be easily cooled.

Hereinafter will be described in detail the configuration of the sample probe 115 that can be separated and inserted while maintaining the vacuum of the vacuum chamber 100 according to the present invention.

First, FIGS. 3A and 3B show a state in which the measurement sample 111 is mounted on the sample probe 115 according to the present invention. FIG. 3A shows the growth of the carbon nanotubes 301 as the measurement sample 111. The negative electrode substrate 302 is mounted on the sample probe 115, and FIG. 3B illustrates a nanomaterial-based measurement sample for measuring physical properties such as superconductivity, voltage, and current in a cryogenic state. 303 is shown mounted on the sample probe 115. The substrate 302 or the nanomaterial-based measurement sample 303 is preferably manufactured to have a size that fits into the sample probe at the top of the sample probe 115, and after mounting them, can be fixed by pecking with a bolt 116. It is configured to be. Alternatively, as described above, the cathode substrate 302 or the measurement sample 303 may be mounted on the top surface of the sample probe 115 using silver paint.

Figures 4a to 4c is a negative electrode separated sample for measuring physical properties such as field emission characteristics and electrical conductivity characteristics of the nanotube-grown substrate and the measurement sample in the cryogenic state in accordance with a preferred embodiment of the present invention This is a view for explaining a process in which the probe is separated from the vacuum chamber.

Referring to FIG. 4A, the negative electrode detachable sample probe 115 according to the present invention is configured to be detachable to the vacuum chamber 100 by moving through the sample probe guide line 112. 112 includes two O-rings 126 and 126 'for maintaining the vacuum of the vacuum chamber 100 and a valve system 125 installed between the two O-rings 126 and 126'.

When the sample probe 115 with the measurement sample 111 is withdrawn from the vacuum chamber 100, the measurement sample 111 is the vacuum chamber of the two O-rings 126, 126 'as shown in FIG. 4B. By locking the valve system 125 after it has been moved up to line A through the O-ring 126 and valve system 125 adjacent to 100, the vacuum in the vacuum chamber 100 is not destroyed, as shown in FIG. 4C. In this state, only the sample probe 115 can be separated.

In addition, although not shown in detail, the sample probe 115 used in the present invention may have a configuration in which an insulating layer made of ceramic, Teflon, or the like is inserted in the middle of the sample probe to insulate the portion where the cathode is mounted.

Although preferred embodiments of the present invention have been described above, the multifunctional vacuum measuring system according to the present invention can be modified and applied in various forms within the scope of the technical idea of the present invention. For example, although the embodiment shown in FIGS. 4A-4C has been described as maintaining the vacuum of the vacuum chamber upon replacement of the measurement sample by a valve system between two O-rings 126, the invention is not so limited. It will be apparent to those skilled in the art that any configuration can be adopted as long as it can be separated and inserted while maintaining the vacuum of the vacuum chamber. After all, the embodiments and drawings are merely for the purpose of describing the details of the invention, and are not intended to limit the scope of the technical idea of the invention, the scope of the present invention is not limited to the claims to be described later and It should be judged to include an even range.

1 shows a schematic configuration of a multifunctional vacuum measurement system for electric field emission and electrical property evaluation measurement according to a preferred embodiment of the present invention.

FIG. 2 is a view for explaining the detailed configuration of the vacuum chamber shown in FIG. 1 and a sample probe as a cathode part used therein.

3A and 3B show a state in which a measurement sample is mounted on a sample probe according to the present invention.

4A to 4C show a vacuum of a negative electrode separated sample probe for measuring physical properties such as field emission characteristics and electrical conductivity characteristics of a substrate on which nanotubes are grown and a measurement sample in a cryogenic state according to a preferred embodiment of the present invention. It is a figure for demonstrating the process separated from a chamber.

Claims (15)

A system for measuring the physical properties of a measurement sample at high vacuum, A vacuum chamber; A grid electrode formed in the vacuum chamber; A high voltage power supply for applying a voltage to the grid electrode through a feedthrough formed to penetrate one surface of the vacuum chamber; A turbo pump for evacuating the vacuum chamber; A sample probe as a cathode for measuring the physical properties of the measurement sample with the measurement sample mounted and inserted into the vacuum chamber; And A liquid refrigerant circulation path for supplying a liquid refrigerant to pass through the sample probe, And the sample probe is configured to be detachable from the vacuum chamber without affecting the degree of vacuum of the vacuum chamber while the measuring sample is mounted. The method of claim 1, The measurement sample is a field emission device, and the physical property is any one of a field emission property, an electrical conductivity, a voltage, a current, a temperature, a pressure property, and a superconducting property in a cryogenic state. The method of claim 1, And the measurement sample mounted to the sample probe forms an ohmic contact using silver paint. The method of claim 1, And the sample probe is formed to penetrate the sample probe guideline so that the sample probe can be attached to or detached from the vacuum chamber. The method of claim 4, wherein The sample probe guideline includes a valve system formed between two O-rings and the two O-rings, and one end of the sample probe of the sample probe mounted with the O-ring close to the vacuum chamber of the two O-rings and the valve system. Locking the valve system after passing so that the degree of vacuum in the vacuum chamber is maintained when the sample probe is detached from the vacuum chamber. The method of claim 1, The measurement sample is fixed to one end of the sample probe via a bolt or the measurement sample is mounted on the top surface of the sample probe using silver paint. delete The method of claim 1, And the vacuum chamber is integrally formed with the turbopump. The method of claim 1, And the measurement sample is a field emission device and further comprises an insulating layer formed between the grid electrode and the field emission device mounted to the sample probe. The method of claim 1, The grid electrode is formed of a metal structure in a metal mesh or solid form. The method of claim 9, And the grid electrode is formed of a transparent electrode. The method of claim 11, The grid electrode is coated with a fluorescent material for visualizing an electron beam generated from a field emission device mounted to the sample probe. The method of claim 1, The system further comprises a CCD camera mounted on one side of the vacuum chamber and a CCD controller for controlling it. The method of claim 13, And an imaging and processing system equipped with an automatic data acquisition (DAQ) program for real-time acquisition, display, and storage of data relating to physical properties of the measurement sample. The method of claim 1, The heating wire is installed on the outer wall of the vacuum chamber or the system characterized in that the liquid refrigerant circulation is installed.

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