KR100905642B1 - Embedded Chip Printed Circuit Board and Method of Fabricating the same - Google Patents

Abstract

The present invention forms a via hole in the thin insulating material after laminating a thin insulating material on the chip pad to form a circuit pattern electrically connected to the chip pad through copper plating on the thin insulating material larger than the size of the chip pad. The present invention relates to a chip embedded printed circuit board capable of embedding a chip inside a printed circuit board without being limited to pad sizes and spacing of embedded chips and a method of manufacturing the same.

Thin, Chip, Embedded, Resin Film, Printed Circuit Board

Description

Embedded chip printed circuit board and its manufacturing method {Embedded Chip Printed Circuit Board and Method of Fabricating the same}

The present invention forms a via hole in the thin insulating material after laminating a thin insulating material on the chip pad to form a circuit pattern electrically connected to the chip pad through copper plating on the thin insulating material larger than the size of the chip pad. The present invention relates to a chip embedded printed circuit board capable of embedding a chip inside a printed circuit board without being limited to pad sizes and spacing of embedded chips and a method of manufacturing the same.

In recent years, as electronic devices such as mobile phones, digital AV devices, and IC cards become more functional, demands for higher functionality and miniaturization of printed circuit boards constituting electronic devices have increased rapidly.

As a result, the space in which the semiconductor devices are embedded in the printed circuit board is further reduced, and chip embedded in which the semiconductor devices are embedded in the printed circuit board instead of the surface of the printed circuit board in order to increase the mounting efficiency of the semiconductor device per unit volume. Various methods of manufacturing printed circuit boards have been studied.

1A to 1G are flowcharts illustrating a method of manufacturing a chip embedded printed circuit board according to the related art.

First, as shown in FIG. 1A, the core substrate 100 having the inner circuit patterns 104a and 104b formed on both surfaces of the first insulating layer 102 is prepared.

In the core substrate 100, via holes 106 are formed in the core substrate 100 to electrically connect the inner circuit patterns 104a and 104b formed on both surfaces of the first insulating layer 102. That is, a cavity 108 for embedding a chip is formed.

Thereafter, as illustrated in FIG. 1B, a tape 110 is attached to a lower portion of the core substrate 100 on which the cavity 108 is formed, and then a chip, which is a semiconductor element, is formed in the cavity 108 as illustrated in FIG. 1C. 112).

At this time, the chip 112 is embedded in the cavity 108 so that the chip pad 114 faces where the tape 110 is not attached, and is fixed by the tape 110.

Thereafter, as illustrated in FIG. 1D, a second insulating layer 116 is stacked on the chip pad 114.

In this case, as the second insulating layer 116, Ajinomoto build-up film (ABF) or prepreg (PPG) is used.

After stacking the second insulating layer 116, the tape 110 attached to the lower portion of the core substrate 100 is removed as shown in FIG. 1E.

Thereafter, as illustrated in FIG. 1F, a second insulating layer 116 is stacked below the core substrate 100 from which the tape 110 is removed.

After the second insulating layer 116 is stacked below the core substrate 100, the second insulating layer 116 is exposed to expose the inner circuit patterns 104a and 104b formed on both surfaces of the core substrate 100 through a drilling process. After the via hole is formed and the via hole is formed, a copper plating layer is formed on the inner wall of the via hole, the exposed inner circuit pattern, and the second insulating layer 116 through an electroless copper plating and an electrolytic copper plating process.

Thereafter, after the dry film is coated on the copper plating layer, the remaining dry film except for the portion where the circuit pattern is to be formed is removed, and the copper plating layer of the portion where the dry film is removed with the etching solution is removed, as shown in FIG. 1G. Patterns 118a and 118b are formed.

However, in the conventional method of manufacturing a chip-embedded printed circuit board according to the related art, after a chip, which is an IC element, is embedded in a cavity processed in a core substrate, an insulation layer is collectively laminated on both sides of the core substrate, and the insulation is laminated on both sides of the core substrate. After the via holes are formed in the layer, the chip pads and the inner circuit patterns formed on the core substrate are electrically connected. There is a problem in that the size and spacing of the chip pads are limited.

Accordingly, the present invention forms a via hole in the thin insulating material after stacking the thin insulating material on the chip pad to form a circuit pattern electrically connected to the chip pad through copper plating on the thin insulating material larger than the size of the chip pad. An object of the present invention is to provide a chip embedded printed circuit board and a method of manufacturing the same, which are not limited to pad sizes and spacing of chips formed and embedded therein.

A chip embedded printed circuit board according to an embodiment of the present invention includes a core substrate having a first inner circuit pattern formed on both surfaces of a first insulating layer and a cavity for embedding a chip inside the first insulating layer; A chip embedded in the cavity and formed with a chip pad for electrical connection with the outside; A second insulating layer stacked below the core substrate and having an outer circuit pattern formed therein to be electrically connected to the first inner circuit pattern; A third insulating layer formed on the core substrate at a height of 1/4 to 1/2 of the height of the second insulating layer and having a second inner circuit pattern formed thereon electrically connected to the chip pads; And a fourth insulating layer stacked on the second insulating layer and having an outer circuit pattern formed thereon to be electrically connected to the first inner circuit pattern and the second inner circuit pattern.

In the chip embedded printed circuit board according to an exemplary embodiment of the present invention, the first insulating layer is FR-4, the second insulating layer is any one of ABF and PPG, and the third insulating layer is made of a resin film.

In the chip embedded printed circuit board according to the exemplary embodiment of the present invention, the fourth insulating layer is formed of the same material as any one of the second insulating layer and the third insulating layer.

In the chip embedded printed circuit board according to the exemplary embodiment of the present invention, the third insulating layer has a height of 1/2 of the height of the second insulating layer.

In accordance with another aspect of the present invention, a method of manufacturing a chip embedded printed circuit board may include: (a) forming a cavity in a core substrate on which inner circuit patterns are formed on both surfaces of a first insulating layer; (b) laminating tape on top of the core substrate; (c) embedding the chip inside the cavity such that a chip pad formed on the chip is attached to the tape; (d) removing the tape after laminating a second insulating layer under the core substrate; (e) stacking a third insulating layer having a height of 1/4 to 1/2 of the second insulating layer on the core substrate from which the tape is removed; (f) forming a first outer circuit pattern connected to the chip pad on the third insulating layer; And (g) stacking a fourth insulating layer on the third insulating layer and forming a second outer layer circuit pattern connected to the inner circuit pattern and the first outer layer circuit pattern on the fourth insulating layer. Characterized in that.

In the method of manufacturing a chip embedded printed circuit board according to an embodiment of the present disclosure, in the step (e), a third insulating layer having a height of 1/2 of the height of the second insulating layer is stacked on the core substrate.

The present invention forms a via hole in the thin insulating material after laminating a thin insulating material on the chip pad to form a circuit pattern electrically connected to the chip pad through copper plating on the thin insulating material larger than the size of the chip pad. The chip can be embedded inside a printed circuit board without being limited by the pad size and spacing of embedded chips.

In addition, the present invention forms a circuit pattern that is electrically connected to the chip pad on the thin insulating material and is larger than the size of the chip pad, and then electrically connects the circuit pattern formed on the thin insulating material to the external circuit. The extra space for hole matching locations can be freed up to improve the yield of the on-chip process.

In the present invention, since the third insulating layer having a height of 1/4 to 1/2 of the second insulating layer laminated on the core substrate is laminated on the chip pad, the via hole is formed in the third insulating layer. Since the depth of the via hole formed in the third insulating layer is low, the size of the via hole can be reduced.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

2 is a cross-sectional view of a chip embedded printed circuit board according to an exemplary embodiment of the present invention.

Referring to FIG. 2, a chip embedded printed circuit board according to an exemplary embodiment may include a core substrate 10 and a core substrate having first inner layer circuit patterns 14a and 14b formed on both surfaces of a first insulating layer 12. The chip 14 embedded in the cavity 10, the second insulating layer 22 stacked under the core substrate 10, the third insulating layer 24 stacked on the core substrate 10, and the third insulation And a fourth insulating layer 28 stacked on top of the layer 24.

In the core substrate 10, a cavity 15 in which the chip 14 is embedded may be formed in the first insulating layer 12, and the first inner layer circuit patterns 14a and 2 may be formed on both surfaces of the first insulating layer 12. 14b) is formed.

As the first insulating layer 12 of the core substrate 10, FR-4 is used.

The chip 14 is embedded in the cavity 15 formed in the core substrate 10, and is electrically connected to the second inner layer circuit pattern 26 formed on the third insulating layer 24 through the chip pad 16. .

The second insulating layer 22 is stacked below the core substrate 10, and an outer layer circuit pattern 30b electrically connected to the first inner layer circuit pattern 14b formed on the core substrate 10 is formed below. .

As the second insulating layer 22, either one of ABF and prepreg (PPG) is used.

The third insulating layer 24 is stacked on the core substrate 10, and a second inner layer circuit pattern 26 electrically connected to the chip pad 16 is formed thereon.

In this case, the second inner circuit pattern 26 is formed larger than the chip pad 16.

A resin film is used as the third insulating layer 24 and has a height of 1/4 to 1/2, preferably 1/2 of the height of the second insulating layer 22.

The fourth insulating layer 28 is stacked on top of the third insulating layer 24, and the outer circuit patterns 30a electrically connected to the first inner circuit patterns 14a and the second inner circuit patterns 26 are formed thereon. ) Is formed.

3A to 3F are flowcharts illustrating a method of manufacturing a chip embedded printed circuit board according to an exemplary embodiment of the present invention.

First, as illustrated in FIG. 3A, a core substrate 10 having first inner circuit patterns 14a and 14b formed on both surfaces of the first insulating layer 12 is prepared.

In this case, a via hole 20 for electrically connecting the first inner layer circuit patterns 14a and 14b formed on both surfaces of the core substrate 10 is formed in the core substrate 10, and the chip 14 is formed inside the core substrate 10. Cavity 15 for embedding () is formed.

The first insulating layer 12 of the core substrate 10 is made of resin as a base material, and has excellent electrical characteristics, but insufficient mechanical strength, and the dimensional change (thermal expansion coefficient) due to temperature is about 10 times larger than that of metal. In order to compensate for the defects of the resin, reinforcing materials such as paper, glass fiber, and nonwoven fabric are mixed.

The core substrate 10 is formed by the following method.

First, the copper foil laminated sheet in which copper foil is interposed on both surfaces of the 1st insulating layer 12 is processed by drilling, and the via hole 20 which penetrates a copper foil laminated sheet is formed.

At this time, YAG (Yttrium Aluminum Granet) laser or CO ₂ laser is used for drilling.

After the via hole 20 is formed, a copper plating layer is formed on the inner wall of the via hole and the copper foil through an electroless copper plating process and an electrolytic copper plating process.

After the copper plating layer is formed, the dry film is coated on the copper plating layer, and then the dry film of the remaining portions except for the portion where the inner circuit pattern is to be formed is removed through an exposure and development process.

Thereafter, the dry film is removed with an etchant to remove the exposed copper plating layer and copper foil to form the first inner layer circuit patterns 14a and 14b.

After the first inner layer circuit patterns 14a and 14b are formed, the cavity 15 in which the chip, which is a semiconductor element, is to be mounted is formed by drilling.

In this case, the cavity 15 is formed to penetrate the core substrate 10.

As a result, the core substrate 10 shown in FIG. 3A is formed.

Herein, the method of forming the core substrate 10 using the copper foil laminate having copper foil interposed on both surfaces of the first insulating layer 12 has been described, but the via hole 20 is formed in the first insulating layer 12 without the copper foil. The core substrate 10 may be formed.

After the core substrate 10 is formed, the tape 18, which is a fixing member, is attached to the upper portion of the core substrate 10, and the chip 14 having the chip pad 16 formed therein is embedded in the cavity 15.

At this time, since the chip pad 16 is attached to the tape 18, the chip 14 embedded in the cavity 15 is fixed by the chip pad 16.

Thereafter, as shown in FIG. 3B, the second insulating layer 22 is stacked below the core substrate 10 to which the tape 18 is not attached.

At this time, any one of ABF and prepreg is used as the second insulating layer 22.

After laminating the second insulating layer 22, as shown in FIG. 3C, the tape 18 attached to the upper portion of the core substrate 10 is removed, and the thin film is formed on the upper portion of the core substrate 10 from which the tape 18 is removed. The third insulating layer 24 is laminated.

At this time, the height of the third insulating layer 24 has a 1/4 to 1/2 height, preferably 1/2 height of the second insulating layer 22.

As the third insulating layer 24, a resin film is used.

After stacking the third insulating layer 24, as illustrated in FIG. 3D, the third insulating layer 24 is processed by drilling to form via holes to expose the chip pads 16.

Thereafter, a copper plating layer is formed on the inner wall of the via hole and the upper portion of the third insulating layer 24 through an electroless copper plating process and an electrolytic copper plating process.

After the copper plating layer is formed, the dry film is coated on the copper plating layer, and then the dry film of the remaining portions except for the portion to be formed as the second inner layer circuit pattern 26 is removed through an exposure and development process.

Thereafter, the copper plating layer of the portion from which the dry film is removed is removed with an etchant to form the second inner layer circuit pattern 26.

After the second inner circuit pattern 26 is formed, the fourth insulating layer 28 is stacked on the third insulating layer 24.

In this case, the same material as that of the second insulating layer 22 and the third insulating layer 24 may be used for the fourth insulating layer 28.

After the fourth insulating layer 28 is laminated, the first inner circuit patterns 14a and 14b and the second inner circuit patterns 26 are exposed to the second insulating layer 22 and the fourth insulating layer 28. Form via holes.

Thereafter, a copper plating layer is formed on the inner wall of the via hole, the second insulating layer 22, and the fourth insulating layer 28 through an electroless copper plating process and an electrolytic copper plating process.

After the copper plating layer is formed, the dry film is applied on the copper plating layer, and then the dry film of the remaining portions except for the portion where the outer circuit pattern is to be formed is removed through an exposure and development process.

Thereafter, the dry film is removed to remove the exposed copper plating layer with an etchant to form the outer circuit patterns 30a and 30b as shown in FIG. 2F.

As described above, the chip embedded printed circuit board and the method of manufacturing the same according to an exemplary embodiment of the present invention laminate a third insulating layer, which is a thin insulating material, on a chip pad, and then form a via hole in the third insulating layer to form a chip pad through copper plating. Since a second inner layer circuit pattern electrically connected to the second semiconductor layer is formed on the third insulating layer larger than the size of the chip pad, the chip may be embedded in the printed circuit board without being limited by the pad size and spacing of the embedded chip.

In addition, the chip embedded printed circuit board and the method of manufacturing the same according to an embodiment of the present invention are formed on the third insulating layer, which is a thin insulating material, electrically connected to the chip pads, and after forming a circuit pattern larger than the size of the chip pads, an external circuit. By electrically connecting the circuit pattern formed on the third insulating layer with the spare space for the hole matching position on the limited chip pad can be secured, it is possible to improve the yield of the chip embedded process.

In addition, the chip embedded printed circuit board and the method of manufacturing the chip according to the embodiment of the present invention are thin, that is, a chip pad having a third insulating layer having a height of 1/4 to 1/2 of the second insulating layer laminated on the core substrate. Since the via hole is formed in the third insulating layer after the stacked layer, the depth of the via hole formed in the third insulating layer is reduced, thereby reducing the size of the via hole.

1A to 1G are views illustrating a manufacturing process of a chip embedded printed circuit board according to the prior art.

2 is a cross-sectional view illustrating a chip embedded printed circuit board according to an exemplary embodiment of the present invention.

3A to 3F are views illustrating a manufacturing process of a chip embedded printed circuit board according to an exemplary embodiment of the present invention.

<Explanation of symbols for the main parts of the drawings>

10, 100: core substrate 12, 22, 24, 28, 102, 116: insulating layer

14a, 14b, 26, 30a, 30b, 104a, 104b, 118a, 118b: circuit pattern

14, 112: chip 15, 108: cavity

16, 114: chip pads 18, 110: tape

20, 108: Via Hole

Claims (6)

A core substrate having first inner circuit patterns formed on both surfaces of the first insulating layer, and a cavity for embedding a chip in the first insulating layer; A chip embedded in the cavity and formed with a chip pad for electrical connection with the outside; A second insulating layer stacked below the core substrate and having an outer circuit pattern formed therein to be electrically connected to the first inner circuit pattern; A third insulating layer stacked on the core substrate at a height of 1/4 to 1/2 of the height of the second insulating layer and having a second inner circuit pattern formed thereon to be electrically connected to the chip pads; And And a fourth insulating layer stacked on the second insulating layer and having an outer circuit pattern formed thereon and electrically connected to the first inner circuit pattern and the second inner circuit pattern. . The method of claim 1, Wherein the first insulating layer is FR-4, the second insulating layer is any one of ABF and PPG, and the third insulating layer is a resin film. The method of claim 1, The fourth insulating layer is a chip embedded printed circuit board, characterized in that made of the same material as any one of the second insulating layer and the third insulating layer. The method of claim 1, And the third insulating layer has a height 1/2 of the height of the second insulating layer. (a) forming a cavity in a core substrate having inner circuit patterns formed on both surfaces of the first insulating layer; (b) laminating tape on top of the core substrate; (c) embedding the chip inside the cavity such that a chip pad formed on the chip is attached to the tape; (d) removing the tape after laminating a second insulating layer under the core substrate; (e) stacking a third insulating layer having a height of 1/4 to 1/2 of the second insulating layer on the core substrate from which the tape is removed; (f) forming a first outer circuit pattern connected to the chip pad on the third insulating layer; And (g) stacking a fourth insulating layer on the third insulating layer and forming a second outer layer circuit pattern connected to the inner circuit pattern and the first outer layer circuit pattern on the fourth insulating layer. Method of manufacturing a chip embedded printed circuit board, characterized in that. The method of claim 5, wherein In the step (e), a third insulating layer having a height of 1/2 of the height of the second insulating layer is laminated on the core substrate.

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