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KR100852730B1 - Method for preventing oxide layer formation in via hole and through hole working of circuit - Google Patents

Method for preventing oxide layer formation in via hole and through hole working of circuit Download PDF

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Publication number
KR100852730B1
KR100852730B1 KR1020070075451A KR20070075451A KR100852730B1 KR 100852730 B1 KR100852730 B1 KR 100852730B1 KR 1020070075451 A KR1020070075451 A KR 1020070075451A KR 20070075451 A KR20070075451 A KR 20070075451A KR 100852730 B1 KR100852730 B1 KR 100852730B1
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South Korea
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hole
copper
processing
via hole
laser
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KR1020070075451A
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Korean (ko)
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안우영
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안우영
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0011Working of insulating substrates or insulating layers
    • H05K3/0017Etching of the substrate by chemical or physical means
    • H05K3/0041Etching of the substrate by chemical or physical means by plasma etching
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/40Forming printed elements for providing electric connections to or between printed circuits
    • H05K3/4038Through-connections; Vertical interconnect access [VIA] connections

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Laser Beam Processing (AREA)
  • Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)

Abstract

A method for preventing formation of an oxide layer in processing a via hole and a through hole of a circuit board is provided to minimize a plating error of an interface by closely adhering a copper plated layer to a flexible copper clad laminate during a plating process for formation of the copper plated layer. A method for preventing formation of an oxide layer in processing a via hole and a through hole of a circuit board includes the step of: processing the via hole or the through hole while offsetting a photoelectric effect by supplying an electron and a cation through an ionizer or a plasma generation device(100) to a portion where the hole is processed by a UV laser in processing the via hole or the through hole on a flexible copper clad laminate(10) by using the UV laser.

Description

회로기판의 비어홀 또는 스루홀 가공시 산화층 생성방지방법{METHOD FOR PREVENTING OXIDE LAYER FORMATION IN VIA HOLE AND THROUGH HOLE WORKING OF CIRCUIT}METHOD FOR PREVENTING OXIDE LAYER FORMATION IN VIA HOLE AND THROUGH HOLE WORKING OF CIRCUIT}

본 발명은 연성회로기판의 제조에 관한 것으로, 더욱 상세하게는 연성회로기판의 소재가 되는 동박적층필름에 레이저 드릴링을 통한 비어홀 또는 스루홀 가공시 광전효과의 발생에 따라 비어홀 또는 스루홀의 내부에 형성되는 산화층의 생성을 방지함으로써 제조되는 연성회로기판의 품질을 향상시킬 수 있도록 한 회로기판의 비어홀 또는 스루홀 가공시 산화층 생성방지방법에 관한 것이다.The present invention relates to the manufacture of a flexible circuit board, and more particularly, to the inside of the via hole or through hole according to the occurrence of the photoelectric effect during the via hole or through hole processing through laser drilling on the copper foil laminated film that is the material of the flexible circuit board. The present invention relates to a method of preventing oxide layer generation during via hole or through hole processing of a circuit board to improve the quality of a flexible circuit board manufactured by preventing the formation of an oxide layer.

연성회로기판(FPCB; Flexible Printed Circuit Board)은 전자제품이 소형화 및 경량화가 되면서 개발된 전자부품으로 작업성이 뛰어나고 내열성 및 내약품성이 강하며 열에 강하므로 모든 전자제품의 핵심부품으로서 널리 적용되고 있다.Flexible Printed Circuit Board (FPCB) is an electronic component developed as electronic products become smaller and lighter, and is widely applied as a core component of all electronic products because of its excellent workability, heat resistance, chemical resistance, and heat resistance. .

이러한 연성회로기판은 도 1에 나타낸 바와 같이, 구리(Cu)가 폴리이미드(PI) 필름 상에 적층된 구조의 동박적층필름(FCCL)(10)을 기판의 소재로 주로 사 용하며, 일반적으로 동박적층필름(10)에 회로간 도통을 위한 비어홀 또는 회로간 도통 및 부품탑재를 위한 스루홀(20)을 드릴링하는 공정과, 상기 비어홀이나 스루홀(20) 가공의 드릴링공정 후 동박적층필름(10)의 일면 또는 양면에 동도금층(30)을 형성시키는 공정과, 상기 동도금층(30)이 형성된 동박적층필름(10) 상에 감광성필름(DFR; Dry Film Photoresist)(40)을 적층한 후 노광 및 식각을 행하여 회로패턴을 형성시키는 공정에 의해 제조되어진다.As shown in FIG. 1, the flexible circuit board mainly uses a copper clad laminated film (FCCL) 10 having a structure in which copper (Cu) is laminated on a polyimide (PI) film as a material of a substrate. Copper foil laminated film after the process of drilling the through-hole 20 for inter-circuit conduction or inter-circuit conduction and component mounting in the copper foil laminated film 10, and the drilling process of processing the via hole or through-hole 20 ( 10) forming a copper plating layer 30 on one side or both sides, and laminating a photosensitive film (DFR; Dry Film Photoresist) 40 on the copper foil laminated film 10 on which the copper plating layer 30 is formed. It manufactures by the process of exposing and etching and forming a circuit pattern.

이때, 비어홀 또는 스루홀(20)의 가공은 레이저를 사용하는 기술이 보편화되고 있는데, 보통 100um 초과의 비어홀(BVH) 또는 스루홀(PTH)은 이산화탄소 레이저를 주로 사용하고, 100um 이하의 비어홀 또는 스루홀은 UV 레이저를 주로 사용한다.At this time, the processing of the via hole or through-hole 20 is a general technique using a laser, the via hole (BVH) or through-hole (PTH) of more than 100um usually uses a carbon dioxide laser, via holes or through less than 100um Hall mainly uses UV lasers.

그런데, 종래 연성회로기판을 제조함에 있어 UV 레이저를 사용하여 동박적층필름(10)에 비어홀 또는 스루홀을 드릴 가공시 UV 레이저빔이 접촉됨에 따라 동박적층필름(10)의 구리(Cu)와 폴리이미드(PI)가 녹으므로 인하여 비어홀 또는 스루홀이 형성되는데, 이때 드릴 가공되는 비어홀 또는 스루홀측에는 도 2에서 보여주는 바와 같이 레이저빔의 접촉에 따른 구리(Cu)와 폴리이미드(PI)의 용융으로 이산화탄소(CO2)와 산소(O2)가 대기중에 조성되고 금속성을 갖는 동박적층필름(10)의 구리(Cu)는 UV 레이저의 짧은 파장(1~400nm)과 접촉됨에 의해 광전효과(photoelectric effect)가 발생되어 전자를 방출함으로써 Cu+나 Cu2+로 대전되며, 광전효과에 의해 대전되는 Cu+나 Cu2+는 대기중에 조성된 CO2 및 O2와 결합하여 비어홀 또는 스루홀 내부에 CuO 및 CuCO3의 산화층(50)을 형성시키는 문제점이 있었으며, Cu+ 또는 Cu2+와 대기중에 조성된 CO2와의 결합시 부산물인 탄소(C)가 생성되는 문제점이 있었다.However, in manufacturing a conventional flexible circuit board, copper (Cu) and poly of the copper laminated film 10 are contacted as the UV laser beam is contacted when drilling via holes or through holes in the copper laminated film 10 using a UV laser. Due to the melting of the mid PI, a via hole or a through hole is formed. In this case, as shown in FIG. 2, a via hole or a through hole is formed by melting copper (Cu) and polyimide (PI) due to contact of a laser beam. Carbon dioxide (CO 2 ) and oxygen (O 2 ) are formed in the atmosphere and the copper (Cu) of the copper clad laminated film 10 having metallicity is brought into contact with the short wavelength (1 to 400 nm) of the UV laser photoelectric effect ) is generated by emitting electrons and charged with Cu + or Cu 2+, Cu + or Cu 2+ which is charged by the photoelectric effect is CuO inside the via hole or a through-hole in combination with the CO 2 and O 2 composition in the atmosphere and the oxide layer 50 of CuCO 3 Was the problem of formation, there is a problem in that the generation of Cu + or Cu 2+ and CO 2 when combined with by-product carbon (C) the composition into the atmosphere.

이로 인하여, 이후 동박적층필름(10) 상에 회로패턴 및 도통을 위한 동도금층(30)을 전기도금하여 형성시킬시 도 3에서의 계면관찰사진에서와 같이, 동박적층필름을 구성하는 구리와 전기도금에 의해 형성되는 동도금층의 상호 계면부분에 산화층의 형성으로 인한 들뜸현상이 초래되는 문제점이 있었다.Therefore, when the copper plating layer 30 is formed by electroplating on the copper foil laminated film 10 to form a circuit pattern and conduction, as shown in the interface observation photograph of FIG. There was a problem in that the lifting phenomenon caused by the formation of the oxide layer in the inter-interface portion of the copper plating layer formed by plating.

또한, 동도금 후 계면부분에 존재하는 원소 및 원소의 중량을 분석한 결과 구리(Cu) 68.82중량%, 산소(O) 4.51중량%, 탄소(C) 26.67중량%가 분포함을 보여주고 있는데, 비금속성인 다량의 탄소가 함유되어 있고 구리원소가 현격히 부족함을 나타내고 있다.In addition, as a result of analyzing the weight of elements and elements present in the interface portion after copper plating, it shows that 68.82% by weight of copper (Cu), 4.51% by weight of oxygen (O), 26.67% by weight of carbon (C). It contains a large amount of carbon in adults and a marked lack of copper.

이에 따라, 비어홀 또는 스루홀 내부의 계면부분 불량으로 도통불량이 발생되고 저항치가 높아지는 등 연성회로기판의 품질을 저하시키는 요인으로 지적되고 있다.Accordingly, it is pointed out as a factor that lowers the quality of the flexible circuit board, such as poor conduction and resistance increases due to a poor interface portion inside the via hole or through hole.

본 발명은 연성회로기판의 소재가 되는 동박적층필름에 UV 레이저 드릴링을 통한 비어홀 또는 스루홀 가공시 광전효과의 발생에 따라 비어홀 또는 스루홀의 내부에 형성되는 산화층의 생성을 방지함으로써 제조되는 연성회로기판의 품질을 향상시킬 수 있도록 한 회로기판의 비어홀 또는 스루홀 가공시 산화층 생성방지방법을 제공하는데 그 목적이 있다.The present invention is a flexible circuit board manufactured by preventing the formation of an oxide layer formed in the via hole or the through-hole according to the occurrence of the photoelectric effect during the processing of the via hole or through hole through the UV laser drilling in the copper foil laminated film that is the material of the flexible circuit board An object of the present invention is to provide a method of preventing oxide layer generation during via hole or through hole processing of a circuit board to improve the quality of the circuit board.

즉, 본 발명은 UV 레이저 드릴링에 의한 비어홀 또는 스루홀 가공시 발생되던 광전효과를 상쇄시켜 동박적층필름 상의 가공되는 홀 내부에 산화층의 생성을 방지함으로써 이후 동도금층의 형성을 위한 도금공정 진행시 계면부분의 도금불량을 없애 도금품질은 물론 제품의 품질을 향상시킬 수 있도록 하는데 있다.That is, the present invention cancels the photoelectric effect generated during the processing of the via hole or the through hole by UV laser drilling, thereby preventing the formation of an oxide layer inside the hole to be processed on the copper-clad laminate film, thereby interfacing the plating process for forming the copper plating layer thereafter. It is to improve plating quality as well as product quality by eliminating plating defects of parts.

본 발명은 구리가 폴리이미드 필름 상에 적층된 구조의 동박적층필름에 UV 레이저를 사용하여 비어홀 또는 스루홀을 드릴링하는 공정과, 상기 UV 레이저 가공에 의해 비어홀이나 스루홀이 형성된 동박적층필름에 동도금층을 형성시키는 공정을 포함하는 연성회로기판의 제조공정에 있어서,The present invention is a process of drilling via holes or through holes using a UV laser to a copper foil laminated film having a structure in which copper is laminated on a polyimide film, and a copper foil laminated film having a via hole or through hole formed by the UV laser processing. In the manufacturing process of a flexible circuit board comprising a step of forming a plating layer,

상기 UV 레이저를 사용하여 동박적층필름에 비어홀 또는 스루홀을 가공시 UV 레이저에 의한 홀 가공이 이루어지는 부분으로 이오나이저 또는 플라즈마발생장치를 이용한 전자(e-)와 양이온(O2+)을 공급하여 광전효과를 상쇄시키면서 비어홀 또는 스루홀 가공을 행하도록 구성하는 것을 특징으로 한다.When processing via holes or through holes in the copper-clad laminated film using the UV laser, the electrons (e-) and cations (O 2+ ) using an ionizer or a plasma generator are supplied to the hole processing by the UV laser. The via hole or through hole processing is performed while canceling the photoelectric effect.

본 발명은 UV 레이저 드릴링에 의한 비어홀 또는 스루홀 가공시 빛과 금속의 접촉에 의해 발생되던 전자방출의 광전효과를 상쇄시키는 효과가 있고 이에 따라 동박적층필름 상에 가공되는 비어홀 또는 스루홀 내부에 산화층의 생성을 효과적으로 방지할 수 있으며, 이후 동박적층필름 상에 동도금층의 형성을 위한 도금공정 진행시 동도금층을 밀착되게 형성시킬 수 있어 계면부분의 도금불량을 없앨 수 있고 도금품질의 향상을 도모할 수 있음은 물론 회로기판 제조에 따른 제품의 전반적인 품질향상을 꾀할 수 있다.The present invention has an effect of canceling the photoelectric effect of the electron emission generated by the contact of light and metal during the processing of the via hole or through hole by UV laser drilling, and thus an oxide layer inside the via hole or through hole processed on the copper-clad laminated film. It is possible to effectively prevent the formation of the copper foil, and then the copper plating layer can be formed to be in close contact with the copper plating layer to form a copper plating layer on the copper foil laminated film, thereby eliminating the plating defect at the interface portion and improving the plating quality. In addition, it is possible to improve the overall quality of the product according to the circuit board manufacturing.

본 발명을 첨부된 도면을 참조하여 상세히 설명하면 다음과 같다.Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

본 발명에 의한 회로기판의 비어홀 또는 스루홀 가공시 산화층 생성방지방법은 도 1에서 보여주는 바와 같이, 구리(Cu)가 폴리이미드(PI) 필름 상에 적층된 구조의 동박적층필름(10)에 UV 레이저를 사용하여 비어홀 또는 스루홀(20)을 드릴링하는 공정과, 상기 UV 레이저 가공에 의해 비어홀이나 스루홀(20)이 형성된 동박적층필름(10)에 동도금층(30)을 형성시키는 공정을 포함하는 연성회로기판의 제조공정에 있어서,As shown in FIG. 1, the method for preventing the formation of an oxide layer during the processing of a via hole or a through hole of a circuit board according to the present invention is performed on a copper laminated film 10 having a structure in which copper (Cu) is laminated on a polyimide (PI) film. Drilling a via hole or through hole 20 using a laser, and forming a copper plating layer 30 on the copper-clad laminated film 10 having the via hole or through hole 20 formed by the UV laser processing. In the manufacturing process of the flexible circuit board,

상기 UV 레이저를 사용하여 동박적층필름(10)에 비어홀 또는 스루홀을 가공시 UV 레이저에 의한 홀 가공이 이루어지는 부분으로 도 4에서와 같이, 이오나이 저(ionizer) 또는 플라즈마발생장치(100)를 이용하여 전자(e-)와 양이온(O2+)을 공급하면서 비어홀 또는 스루홀 가공을 수행하도록 구성되게 한다.Hole processing is performed by UV laser when processing via holes or through holes in the copper foil laminated film 10 using the UV laser, as shown in FIG. 4, the ionizer or the plasma generating apparatus 100. It is configured to perform via hole or through hole processing while supplying electrons (e−) and cations (O 2+ ).

즉, UV 레이저를 사용하여 동박적층필름(10)에 비어홀 또는 스루홀을 가공시 UV 레이저빔이 접촉됨에 따라 구리(Cu)와 폴리이미드(PI)의 용융이 수행되어 비어홀 또는 스루홀이 형성되기 시작하고 금속성의 구리에 UV 레이저빔이 접촉됨에 따라 광전효과에 의한 전자방출로 구리는 Cu+나 Cu2+로 대전되기 시작하는데, 본 발명에서는 홀 가공부분으로 이오나이저 또는 플라즈마발생장치(100)를 이용하여 다량의 전자와 양이온을 인공적으로 공급함에 따라 전자방출이 이루어져 대전되는 구리 표면의 Cu+와 결합하게 되므로 광전효과를 상쇄시키면서 대전현상이 더욱 심화되는 것을 차폐하는 작용을 하게 되며 대전되는 구리(Cu+)이온이 공기중의 CO2 및 O2와 쉽게 결합하는 결합력을 상쇄시키면서 결합에 따른 부산물인 비금속성의 탄소(C)가 생성되는 것까지 차단하는 작용을 하게 된다.That is, when processing the via hole or through hole in the copper foil laminated film 10 using a UV laser, as the UV laser beam contacts, melting of copper (Cu) and polyimide (PI) is performed to form a via hole or through hole. When the UV laser beam is brought into contact with metallic copper, copper is started to be charged with Cu + or Cu 2+ by electron emission due to the photoelectric effect. In the present invention, the ionizer or the plasma generator 100 is used as a hole processing part. By artificially supplying a large amount of electrons and cations by using electrons, the electrons are emitted and combined with Cu + on the surface of the charged copper, which acts to shield the deepening of the charging phenomenon while canceling the photoelectric effect. (Cu +) is geotkka ions offset the binding force which easily combine with CO 2 and O 2 in the air, while generating a by-product of electronegative carbon (C) according to the coupling It is the functional block.

이에 따라, 본 발명에 의한 이오나이저 또는 플라즈마발생장치(100)를 이용한 비어홀 또는 스루홀 레이저 드릴 가공 후, 동박적층필름(10) 상에 회로패턴 및 도통을 위한 동도금층을 전기 도금하여 형성시킬시 도 5에서의 계면관찰사진에서와 같이, 동박적층필름을 구성하는 구리와 전기도금에 의해 형성되는 동도금층의 상호 계면부분이 밀접하게 연결 형성되어 있음을 보여주고 있고 종래와는 달리 광전효과에 의한 산화층의 생성으로 들뜸현상이 초래되던 문제점이 개선되었음을 보여주고 있다.Accordingly, after the via-hole or through-hole laser drill processing using the ionizer or the plasma generating apparatus 100 according to the present invention, the copper plating layer for the circuit pattern and the conduction is formed on the copper-clad laminated film 10 by electroplating. As shown in the interface observation photograph in FIG. 5, it is shown that mutually interfacial portions of copper plating layers formed by copper plating and electroplating of copper foil laminated films are closely connected to each other. It has been shown that the problem of lifting caused by the formation of the oxide layer is improved.

또한, 동도금 후 계면부분에 존재하는 원소 및 원소의 중량을 분석한 결과 구리(Cu) 97.63중량%, 산소(O) 2.37중량%가 분포함을 보여주고 있어 구리의 비중이 거의 전체를 포함하고 있고 산소가 줄어들어 있으며 비금속성인 탄소가 함유되어 있지 않음을 나타내고 있다.In addition, as a result of analyzing the weight of elements and elements present in the interface portion after copper plating, 97.63% by weight of copper (Cu) and 2.37% by weight of oxygen (O) are distributed, and the specific gravity of copper is almost entirely included. Oxygen is reduced and does not contain non-metallic carbon.

따라서, 본 발명에 의하면, 종래 UV 레이저에 의한 비어홀 또는 스루홀 가공시 광전효과에 의해 발생되던 산화층의 생성을 억제시킬 수 있으며, 비어홀 또는 스루홀 가공 후 행하는 도금공정시 비어홀 또는 스루홀의 내부 동박적층필름 상의 구리층과 동도금층과의 계면부분에 대한 들뜸현상의 불량을 개선하는 효과 및 계면부분의 저항치를 크게 감소시킬 수 있는 품질 향상효과를 제공하게 되는 것이다.Therefore, according to the present invention, it is possible to suppress the generation of the oxide layer generated by the photoelectric effect during the processing of the via hole or the through hole by the conventional UV laser, and the internal copper lamination of the via hole or the through hole during the plating process performed after the via hole or the through hole processing. It is to provide an effect of improving the defect of the lifting phenomenon on the interface portion between the copper layer and the copper plating layer on the film and a quality improvement effect that can greatly reduce the resistance of the interface portion.

도 1은 종래 일 실시예에 의한 연성회로기판의 제조공정을 개략적으로 나타낸 도면.1 is a view schematically showing a manufacturing process of a flexible circuit board according to an embodiment of the prior art.

도 2는 종래 연성회로기판의 제조시 레이저 드릴공정을 설명하기 위해 나타낸 도면.2 is a view showing for explaining a laser drill process in the manufacturing of a conventional flexible circuit board.

도 3은 종래기술에 의한 전기 동도금 후 계면상태를 관찰한 사진.Figure 3 is a photograph observing the interface state after electroplating according to the prior art.

도 4는 본 발명에 의한 회로기판의 제조시 레이저 드릴공정을 설명하기 위해 나타낸 도면.Figure 4 is a view showing for explaining the laser drilling process in the manufacture of the circuit board according to the present invention.

도 5는 본 발명에 의한 전기 동도금 후 계면상태를 관찰한 사진.5 is a photograph observing the interface state after the electroplating according to the present invention.

Claims (1)

구리가 폴리이미드 필름 상에 적층된 구조의 동박적층필름에 UV 레이저를 사용하여 비어홀 또는 스루홀을 드릴링하는 공정과, 상기 UV 레이저 가공에 의해 비어홀이나 스루홀이 형성된 동박적층필름에 동도금층을 형성시키는 공정을 포함하는 연성회로기판의 제조공정에 있어서,Forming a copper plating layer on a copper foil laminated film in which via holes or through holes are formed by drilling a via hole or through hole using a UV laser to a copper foil laminated film having a structure in which copper is laminated on a polyimide film, and by the UV laser processing. In the manufacturing process of a flexible circuit board comprising the step of: 상기 UV 레이저를 사용하여 동박적층필름에 비어홀 또는 스루홀을 가공시 UV 레이저에 의한 홀 가공이 이루어지는 부분으로 이오나이저 또는 플라즈마발생장치를 이용한 전자(e-)와 양이온(O2+)을 공급하여 광전효과를 상쇄시키면서 비어홀 또는 스루홀 가공을 행하도록 구성하는 것을 특징으로 하는 회로기판의 비어홀 또는 스루홀 가공시 산화층 생성방지방법.When processing via holes or through holes in the copper-clad laminated film using the UV laser, the electrons (e-) and cations (O 2+ ) using an ionizer or a plasma generator are supplied to the hole processing by the UV laser. A method of preventing the formation of an oxide layer during a via hole or through hole processing of a circuit board, characterized in that the via hole or through hole processing is performed while canceling the photoelectric effect.
KR1020070075451A 2007-07-27 2007-07-27 Method for preventing oxide layer formation in via hole and through hole working of circuit KR100852730B1 (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101299257B1 (en) 2012-07-30 2013-08-22 주식회사 에스아이 플렉스 The printed circuit board manufacturing method
KR102634922B1 (en) 2023-02-15 2024-02-08 주식회사 태성 Device for preventing oxidation on substrate

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20010047631A (en) 1999-11-22 2001-06-15 전세호 Method of making blind-via hole in PCB
JP2001230518A (en) * 2000-02-16 2001-08-24 Mitsubishi Gas Chem Co Inc Method for forming hole by using carbon dioxide gas laser and its post-treatment method
KR20060112587A (en) 2003-10-06 2006-11-01 신꼬오덴기 고교 가부시키가이샤 Method of forming via hole in resin layer

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20010047631A (en) 1999-11-22 2001-06-15 전세호 Method of making blind-via hole in PCB
JP2001230518A (en) * 2000-02-16 2001-08-24 Mitsubishi Gas Chem Co Inc Method for forming hole by using carbon dioxide gas laser and its post-treatment method
KR20060112587A (en) 2003-10-06 2006-11-01 신꼬오덴기 고교 가부시키가이샤 Method of forming via hole in resin layer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101299257B1 (en) 2012-07-30 2013-08-22 주식회사 에스아이 플렉스 The printed circuit board manufacturing method
KR102634922B1 (en) 2023-02-15 2024-02-08 주식회사 태성 Device for preventing oxidation on substrate

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