KR100844374B1 - Method for manufacturing thin film transistor array - Google Patents

Abstract

A TFT array manufacturing method is provided to remove a conductive layer for forming source and drain electrodes through dry etching, thereby accurately controlling a pattern size. On a substrate, a gate electrode is formed(S800~S806). On the substrate including the gate electrode, a gate insulating layer, a semiconductor layer and a conductive layer are sequentially laminated(S808,S810). The semiconductor layer includes an active layer and an ohmic contact layer. The conductive layer is dry-etched through an electrode pattern where a source electrode and a drain electrode are not separated(S814). By etching the semiconductor layer of a pattern area unhidden by the electrode pattern as forming source and drain electrodes by etching a channel area of the electrode pattern, the gate insulating layer is exposed.

Description

Method for manufacturing thin film transistor array

1A to 1E illustrate a thin film transistor patterning process of a liquid crystal display using a conventional five mask.

2A to 2C are cross-sectional views taken along the line AA ′ of FIG. 1.

3A to 3D illustrate a thin film transistor patterning process of a liquid crystal display using a conventional four mask.

4A to 4C are cross-sectional views taken along the line AA ′ of FIG. 3.

5A to 5D illustrate a thin film transistor patterning process of a liquid crystal display using 4 masks according to the present invention.

6A to 6D are cross-sectional views taken along the line AA ′ of FIG. 5.

FIG. 7 is a diagram illustrating a facility configuration for manufacturing a thin film transistor array according to a first embodiment of the present invention. FIG.

8 is a flow chart of a thin film transistor array manufacturing process according to a first embodiment of the present invention.

FIG. 9 is a diagram illustrating a facility configuration for manufacturing a thin film transistor array according to a second embodiment of the present invention. FIG.

10 is a flow chart of a thin film transistor array manufacturing process according to a second embodiment of the present invention.

The present invention relates to a method of manufacturing a thin film transistor array, and more particularly, to a method of manufacturing a thin film transistor of a liquid crystal display device by a four mask process.

In the liquid crystal display (LCD), the manufacturing process of the thin film transistor and the thin film transistor array is one of very important process, which greatly affects the yield as well as the performance of the device.

Conventional thin film transistor array manufacturing has been performed through a 5 mask process or a 4 mask process.

In the conventional five mask process, a process of forming a gate on a glass substrate using a gate mask, a process of forming an active layer using an active mask, a process of forming source / drain and channel portions using a source / drain mask, and passivation forming a passivation layer (protective layer) using a passivation mask and forming a pixel electrode using a pixel mask.

1A to 1E are views illustrating a thin film transistor patterning process of a liquid crystal display using a conventional five mask, and FIGS. 2A to 2C are cross-sectional views taken along the line AA ′ of FIG. 1.

Referring to a process of generating a gate and a source / drain in the conventional five mask process, first, a gate electrode 102 is formed on the glass substrate 100 as shown in FIGS. 1A and 2A through a gate mask.

Thereafter, as shown in FIG. 1B, the gate insulating layer 104 and the active layer / omic contact layer 106 are deposited. In this case, the ohmic contact layer 202 is deposited together on the active layer 200, and the gate insulating layer 104, the active layer 200, and the ohmic contact layer 202 are patterned as shown in FIGS. 1C and 2B through an active mask.

After the patterning, the conductive layer 108 is stacked by sputtering as shown in FIG. 1D, and the source electrode 112, the drain electrode 114, and the channel unit 110 as shown in FIGS. 1E and 2C through the source / drain mask. To form.

A four mask process without an active mask has been proposed in place of such a five mask process.

3A to 3D illustrate a thin film transistor patterning process of a liquid crystal display using a conventional four mask, and FIGS. 4A to 4C are cross-sectional views taken along the line AA ′ of FIG. 3.

 In the conventional four mask process, first, the gate electrode 102 is formed on the glass substrate 100 as shown in FIGS. 3A and 4A through the gate mask.

Thereafter, as shown in FIG. 3B, the gate insulating layer 104, the active layer / omic contact layer 106, and the conductive layer 108 for forming a source / drain are stacked. In this case, as shown in FIG. 4B, an ohmic contact layer 202 is deposited on the active layer 200.

Next, as shown in FIGS. 3C and 4B, the gate insulating layer 104, the active layer / omic contact layer 106, and the conductive layer 108 are patterned through the source / drain mask. 108 is first wet-etched in such a manner that the source and the drain are not separated, and the active layer / omic contact layer 106 is etched through a separate process.

Next, the channel region is opened through photoresist ashing, and the conductive layer 108 and the ohmic contact layer 200 of the channel region are etched to etch the channel portion 110, the source electrode 112, and the drain electrode 114. ).

After the channel portion 110 is formed, the pot resist for source / drain patterning is wet stripped.

As described above, in the conventional four mask process, since the conductive layer 108 is wet etched, there is a problem in that the accuracy of the pattern size due to the isotropy of the wet etch is reduced.

In addition, in the related art, the wet etching and the wet strip are used in the process of forming the gate electrode, thereby reducing the accuracy of the pattern size.

In addition, there is an inefficient problem in that the etching of the conductive layer 108 and the etching of the active layer / omic contact layer 106 are performed in separate processes, and the process of stripping the photoresist pattern is required. There was a problem that can not reduce the number of processes.

In addition, the conventional four-mask process uses hot water rinsing to suppress the occurrence of Al corrosion constituting the conductive layer 108, which not only increases the manufacturing process cost but also moves the substrate from the vacuum equipment to the atmosphere. Since there is a need to move, there was a problem in decreasing the mass productivity of the manufacturing process.

In the present invention, to solve the problems of the prior art as described above, to propose a thin film transistor array manufacturing method capable of precise control of the pattern size.

Another object of the present invention is to provide a thin film transistor array manufacturing method that can reduce the etching-related equipment.

Another object of the present invention is to provide a method of manufacturing a thin film transistor array that can increase the productivity by removing the work in the atmosphere.

Another object of the present invention is to provide a thin film transistor array manufacturing method that can reduce the number of processes in manufacturing a thin film transistor array.

In order to achieve the above object, according to a preferred embodiment of the present invention, a method of manufacturing a thin film transistor array of a liquid crystal display device, comprising: (a) forming a gate electrode on a substrate; (b) forming a sequentially stacked stacked structure including a gate insulating film, a semiconductor layer, and a conductive layer on a substrate including the gate electrode, the semiconductor layer including an active layer and an ohmic contact layer; (c) dry etching the conductive layer with an electrode pattern in which source and drain electrodes are not separated; (d) etching the channel region of the electrode pattern to form a source electrode and a drain electrode, and simultaneously etching the semiconductor layer of the pattern region not covered by the electrode pattern to expose the gate insulating film. Provided is a method of manufacturing a thin film transistor array.

According to another embodiment of the present invention, a method of manufacturing a thin film transistor array of a liquid crystal display device comprising: (a) sputtering a gate conductive layer on a substrate; (b) dry etching the gate conductive layer to form a gate electrode; (c) forming a sequentially stacked stacked structure including a gate insulating film, a semiconductor layer, and a conductive layer on the substrate including the gate electrode, the semiconductor layer including an active layer and an ohmic contact layer; (d) etching the conductive layer into an electrode pattern in which source and drain electrodes are not separated; And (e) etching the channel region of the electrode pattern to form a source electrode and a drain electrode, and simultaneously etching the semiconductor layer of the pattern region not covered by the electrode pattern to expose the gate insulating layer. Provided is a method of manufacturing a thin film transistor array.

As the invention allows for various changes and numerous embodiments, particular embodiments will be illustrated in the drawings and described in detail in the written description. However, this is not intended to limit the present invention to specific embodiments, it should be understood to include all modifications, equivalents, and substitutes included in the spirit and scope of the present invention. In describing the drawings, similar reference numerals are used for similar elements.

Terms such as first, second, A, and B may be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as the second component, and similarly, the second component may also be referred to as the first component. The term and / or includes a combination of a plurality of related items or any item of a plurality of related items.

When a component is referred to as being "connected" or "connected" to another component, it may be directly connected to or connected to that other component, but it may be understood that other components may be present in between. Should be. On the other hand, when a component is said to be "directly connected" or "directly connected" to another component, it should be understood that there is no other component in between.

The terminology used herein is for the purpose of describing particular example embodiments only and is not intended to be limiting of the present invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In this application, the terms "comprise" or "have" are intended to indicate that there is a feature, number, step, operation, component, part, or combination thereof described in the specification, and one or more other features. It is to be understood that the present invention does not exclude the possibility of the presence or the addition of numbers, steps, operations, components, components, or a combination thereof.

Unless defined otherwise, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art. Terms such as those defined in the commonly used dictionaries should be construed as having meanings consistent with the meanings in the context of the related art and shall not be construed in ideal or excessively formal meanings unless expressly defined in this application. Do not.

 Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the following description of the present invention, the same reference numerals will be used for the same means regardless of the reference numerals in order to facilitate the overall understanding.

5A to 5D illustrate a thin film transistor patterning process of a liquid crystal display using 4 masks according to the present invention, and FIGS. 6A to 6D are cross-sectional views taken along the line AA ′ of FIG. 5.

The present invention can be applied to a four mask process. First, the present invention forms the gate electrode 502 on the substrate 500 through the gate mask.

The substrate 500 may include a transparent insulating substrate such as soda lime glass applied to the liquid crystal display.

In addition, the gate electrode 502 may be formed as a double layer of upper and lower portions of molybdenum / aluminum (Mo / Al) or molybdenum / alminerine (Mo / AlNd).

Next, as shown in FIG. 5B, a laminated structure of the gate insulating film 504, the semiconductor layer 506, and the conductive layer 508 is formed.

Here, the gate insulating layer 504 may be made of silicon nitride (SiNx), and may be preferably formed to have a thickness of 4000 Å.

The semiconductor layer 506 may include an active layer 600 and an ohmic contact layer 602.

The active layer 600 is for channel formation of the thin film transistor and may be made of intrinsic amorphous Si (i-a-Si).

According to the present invention, the active layer 600 may be deposited to have a thickness of 1000 to 3000 mW, preferably 2000 mW using plasma-enhanced chemical vapor deposition (PECVD).

An electric field is applied to the active layer 600 through the gate insulating film 504 according to the control signal applied to the gate electrode 502, and the active layer 600 on the gate electrode 502 forms a channel according to the control signal. The thin film transistor performs an on / off operation.

The ohmic contact layer 602 is for forming an ohmic contact between the source / drain region of the active layer 600 and the conductive layer 508. For example, doped amorphous silicon (n + a-Si) may be formed. It may be formed to a thickness of 200 kPa to 1,000 kPa, and preferably may be formed to a thickness of about 500 kPa.

The conductive layer 508 is for forming a source / drain electrode. For example, the conductive layer 508 may be formed of a multilayer in which the upper and lower layers are molybdenum / aluminum / molybdenum (Mo / Al / Mo). The conductive layer 508 may be formed to have an upper Mo of 500 kV to 1500 kV, a middle Al of 3000 kV to 6000 kV, and a lower Mo of 200 kV to 1000 kV by sputtering.

Thereafter, source and drain electrodes are formed using a source / drain mask. According to the first embodiment of the present invention, only the conductive layer 508 is first formed through dry etching, as shown in FIGS. 5C and 6B. The lower layer is exposed by patterning the first photoresist layer 604. In this case, the conductive layer 508 is not separated into a source electrode and a drain electrode.

In this case, the first photoresist layer 604 is formed in a relatively thin portion where the channel portion is formed. This may be implemented by using a slit-like or lattice-shaped exposure mask or a portion of the exposure mask 605 having a translucent portion. . In addition, any method can be used as long as the amount of light can be varied for each part.

Conventionally, the conductive layer 508 is wet etched, but dry etching is performed according to the present invention.

The etching of the conductive layer 508 according to the present invention may be performed in a dual frequency capacitively coupled plasma (DFCCP) reactive ion etching (RIE) chamber.

More specifically, when the upper / middle / lower layer of the conductive layer 508 is made of Mo / Al / Mo, the upper Mo (Top Mo) is set as the dual frequency of the DFCCP RiE chamber to 27.12 MHz (6 kWatt) and 3.2 MHz, respectively. (12 kWatt), the pressure is maintained at 30 mTorr, and dry etching using Cl ₂ / SF ₂ as an etchant.

At this time, the etchant Cl ₂ / SF ₂ is Each of about 7000 sccm (Standard Cubic Centimeter per Minute) and 1000 sccccm may be applied.

The middle and lower Al and Mo (Bottom-Mo) were used to maintain the dual frequencies of the DFCCP RiE chamber at 27.12 MHz (6 kWatt), 3.2 MHz (12 kWatt) and pressure at 10 mTorr, using Cl ₂ / BCl ₃ as an etchant. Dry etch by

At this time, about 2000 sccm may be applied to the etchant Cl ₂ / BCl ₃ .

Thereafter, the first photoresist film 604 is subjected to photoresist pull-back ashing to form a second photoresist film 606 as shown in FIG. 6C. As a result, the channel region 610 of the conductive layer 508 is exposed.

Here, photoresist ashing may be performed in the above-described DFCCP RiE chamber through 27.12 MHz (6 kWatt), 3.2 MHz (12 kWatt) dual frequency, 30 mTorr pressure and about 10000 sccm O ₂ and 300 sccm SF ₆ .

After the channel region 610 is exposed, the conductive layer 508 is separated into the source electrode 512 and the drain electrode 514 using the second photoresist layer 606, and is simultaneously covered by the conductive layer 508. The active layer 600 and the ohmic contact layer 602 of the pattern region 608, which are not portions, are removed, and the active layer 600 of the channel region 610 is exposed.

According to the present invention, the conductive layer 508 and the ohmic contact layer 602 of the channel region 610 are removed by dry etching, wherein the active layer 600 and the ohmic contact layer of the pattern region 608 region are removed. 602 is simultaneously removed in-situ and self etching.

Here, the upper Mo of the conductive layer 508 is 27.12 MHz (6 kWatt), 3.2 MHz (12 kWatt) dual frequency, 30 mTorr pressure and SF ₂ of about 7000 sccm and SF ₆ in the above DFCCP RiE chamber. It can be etched through an etchant.

Al / Bottom-Mo, the median and sublayers of the conductive layer 508, was used in the above-described DFCCP RiE chamber with 27.12 MHz (6 kWatt), 3.2 MHz (12 kWatt) dual frequency, 10 mTorr pressure and about 2000 sccm Cl ₂ and 2000 sccm BCl ₃ Etched through etchant.

On the other hand, the active layer 600 and the ohmic contact layer 602 in the pattern region 608 simultaneously with the dry etching of the conductive layer 508 are 27.12 MHz (6 kWatt) in the above-described DFCCP RiE chamber under the same conditions as the removal of the upper Mo layer. ), dual frequency, and 30mTorr pressure for about 7000sccm Cl ₂ and SF ₆ of 1000sccm of 3.2MHz (12kWatt) It may be in situ and self-etched through the etchant. In this process, the ohmic contact layer 602 of the channel region 610 may be removed together.

According to the present invention, in forming the source / drain electrodes and the channel portion, the etching of the active layer / omic contact layer is in-situ and self-etched simultaneously with the etching of the channel region, thereby simplifying the process and reducing defects.

In addition, according to the present invention, since all of the above etching processes are made of dry etching having anisotropy, accurate control of the pattern size is possible, which is an accurate pattern such as a full HD TV or a quad HD TV. It can be preferably applied to manufacturing processes in which size control is required.

According to the present invention, a post anti-corrosion treatment for preventing Al corrosion of the conductive layer is performed after the etching process. The post-treatment process according to the invention is performed in a DFCCP RiE chamber with 27.12 MHz (6 kWatt), 3.2 MHz (12 kWatt) dual frequency, 30 mTorr pressure and about 500 sccm CHF ₃ and 5000 sccm O _2. Can be performed under conditions.

Conventionally, in order to prevent Al corrosion, hot water rinsing should be performed in air by extracting from vacuum equipment, but the post-treatment process according to the present invention is exposed to air because it proceeds in situ after the dry etching process. The problem does not occur.

After the post-treatment process is completed, the second photosensitive film 606 using oxygen plasma is stripped to prevent corrosion of Al by Cl groups remaining in the second photosensitive film 606.

Removal of the second photoresist film 606 was performed in a HDP ICP High Density Plasma Inductive Coupled Plasma Reactive ion Etching chamber with dual frequency of 13.56 MHz (6 kWatt), 3.39 MHz (12 kWatt), 10 mTorr pressure and approximately 5000 sccm O _2. Can be performed under conditions.

According to the present invention, the removal of the second photoresist layer 606 may also be performed under vacuum conditions, thereby ensuring mass productivity and lowering the manufacturing cost.

Meanwhile, according to the second embodiment of the present invention, the gate electrode 602 may be formed through dry etching, and the gate photoresist for patterning the gate electrode 602 may be dry stripped.

According to the second embodiment of the present invention, dry etching for the formation of the gate electrode 602 is performed in a DFCCP RiE chamber with a dual frequency of 27.12 MHz (6 kWatt), 3.2 MHz (12 kWatt), 10 mTorr pressure and about 2000 sccm Cl ₂ , 500 sccm BCl ₃ And Ar conditions of 2000 sccm.

In addition, the dry strip is a dual frequency of 13.56 MHz (6 kWatt), 3.39 MHz (12 kWatt), 10 mTorr pressure in an HDP ICP High Density Plasma Inductive Coupled Plasma Reactive ion Etching (ILP) chamber, such as the removal of the second photoresist layer 606. And about 5000 sccm O ₂ Can be carried out under conditions

In the second embodiment of the present invention, the process of forming the source / drain electrodes is the same as in the first embodiment, and a detailed description thereof will be omitted.

FIG. 7 is a diagram illustrating a configuration of a thin film transistor array according to a first embodiment of the present invention, and FIG. 8 is a flowchart illustrating a thin film transistor array manufacturing process according to a first embodiment of the present invention.

A thin film transistor array manufacturing process according to the present invention will be described in detail with reference to FIGS. 7 and 8.

As shown in FIG. 7, the thin film transistor array manufacturing equipment according to the present invention is sputtering equipment 700, PECVD equipment 702, photolithography / development (P / D) equipment 704, wet cleaning (Wet). Cleaning and strip equipment 706, wet etching equipment 708, inspection equipment 710, and dry etching equipment 712.

Referring to FIGS. 7 and 8, a gate electrode is formed through the process indicated by A. FIG.

First, the conductive layer for forming the gate electrode 502 on the substrate 500 in the sputtering equipment 700 is sputtered (step 800), and the gate photoresist for patterning the gate electrode 502 in the P / D equipment 702. The forming process is performed (step 802).

 Thereafter, wet etching for forming a gate electrode is performed in the wet etching equipment 708 (step 804), and a wet strip of the gate photoresist film is performed in the wet cleaning / strip equipment 706 after the wet etching (step 806).

Through the process A described above, the gate electrode 502 as shown in FIG. 5A is formed.

Meanwhile, referring to the process indicated by B, the semiconductor layer 506 is deposited on the substrate on which the gate electrode is formed by the PECVD apparatus 702 (step 808), and then the conductive layer is formed to form the source / drain electrode on the sputtering apparatus 700. The layer is sputtered (step 810).

Thereafter, a first photosensitive film 604 is formed in the P / D equipment 702 (step 812).

According to the present invention, the process of forming the source electrode 512, the drain electrode 514, and the channel part 612 may be performed in the dry etching equipment 712.

In the dry etching equipment 712, the conductive layer 508 is dry etched in a form that is not separated into the source / drain electrodes through the first photoresist layer 512 (step 814).

The first photoresist layer 604 used in the step 814 becomes the second photoresist layer 606 through the photoresist pullback ashing in the dry etching equipment 712, and the channel region 610 is opened (step 816).

Thereafter, the dry etching equipment 712 forms the channel portion 612 through dry etching (step 818), where the active layer 600 and the ohmic contact layer of the pattern region 608 that are not removed in step 814 are formed. 602 is simultaneously removed in-situ and self etching.

After forming the channel portion, an anti-corrosion treatment (ACT) and photoresist full ashing to prevent Al corrosion in the dry etching equipment 712 is performed (step 820).

According to the present invention, the dry etching equipment 712 of FIG. 7 is provided with a DFCCP RiE chamber and an HDP ICP RiE chamber at the same time. In the DFCCP RiE chamber, the above-described steps 814 to 818 are performed using the O ₂ plasma in the HDP ICP RiE chamber. One step 820 is performed.

Therefore, in one dry etching equipment 712, simultaneous etching of the conductive layer, the channel region 610 and the active layer 600 and the ohmic contact layer 602, PR pullback ashing, post-processing and photoresist pool ashing (dry) Ashing) can be used to increase the efficiency of the process.

 After the channel portion 612, the source electrode 512, and the drain electrode 514 are formed by the above steps, the passivation layer is deposited, the passivation photoresist film is formed, and the above pattern is processed according to the process indicated by C of FIGS. 7 and 8. The passivation layer through dry etching and the wet strip of the passivation photoresist are performed (steps 822 to 828).

In this case, the passivation layer may be made of poly-silicon nitride (p-SiNx), and preferably, may have a thickness of 2000 μs.

In addition, the present invention is applied to the manufacture of a thin film transistor for a liquid crystal display device, according to the process shown in Fig. 7 and 8, the pixel layer sputtering, pixel photoresist film formation, pixel layer wet etching and the wet strip of the pixel photoresist Is performed (steps 830 to 836).

The pixel layer may be made of indium zinc oxide (IZO) or indium tin oxide (ITO), and may have a thickness of 1000 μs.

9 is a diagram illustrating a configuration of a thin film transistor array according to a second embodiment of the present invention, and FIG. 10 is a flowchart illustrating a thin film transistor array manufacturing process according to a second embodiment of the present invention.

9 and 10, the processes indicated by B, C, and D are the same as those described with reference to FIGS. 7 and 8, and thus a detailed description thereof will be omitted.

However, the second embodiment of the present invention may also include performing step 814 of FIG. 8 by wet etching.

According to the process indicated by A in FIGS. 9 and 10, first, in the sputtering equipment 700, the conductive layer for forming the gate electrode 502 on the substrate 500 is sputtered (step 1000), and the P / D equipment ( In operation 702, a process of forming a gate photoresist film for patterning the gate electrode 502 is performed (step 1002).

 Thereafter, dry etching for forming the gate electrode is performed in the dry etching equipment 712 (step 1004), and after the dry etching, a dry strip of the gate photoresist film is performed in the same dry etching equipment 712 (step 1006).

According to the second embodiment of the present invention, since the gate electrode 602 is performed by dry etching, the accuracy of patterning can be improved.

Preferred embodiments of the present invention described above are disclosed for purposes of illustration, and those skilled in the art will be able to make various modifications, changes, and additions within the spirit and scope of the present invention. Additions should be considered to be within the scope of the following claims.

As described above, according to the present invention, there is an advantage that accurate control of the pattern size is possible by removing the conductive layer for forming the source / drain electrodes by dry etching.

In addition, according to the present invention, the active layer and the ohmic contact layer present in the pattern region during the etching of the channel portion forming the source / drain electrode are in-situ and self-etched, thereby reducing the process.

In addition, according to the present invention, after the channel portion forming the source / drain electrodes, a post-treatment process may be performed to prevent Al corrosion in a vacuum condition, thereby advantageously preventing Al corrosion.

In addition, according to the present invention, it is possible to process the ashing of the etching and the source / drain patterns for forming the source / drain electrodes in the dry etching equipment, thereby improving mass productivity.

Further, according to the present invention, the gate electrode can be performed by dry etching, thereby increasing the accuracy of patterning.

Claims (16)

In the method of manufacturing a thin film transistor array of a liquid crystal display device, (a) forming a gate electrode on the substrate; (b) forming a sequentially stacked stacked structure including a gate insulating film, a semiconductor layer, and a conductive layer on a substrate including the gate electrode, the semiconductor layer including an active layer and an ohmic contact layer; (c) dry etching the conductive layer with an electrode pattern in which source and drain electrodes are not separated; (d) etching the channel region of the electrode pattern to form a source electrode and a drain electrode, and simultaneously etching the semiconductor layer of the pattern region not covered by the electrode pattern to expose the gate insulating film, The step (d) of etching the semiconductor layer of the pattern region simultaneously with the formation of the source electrode and the drain electrode is performed under a dual frequency condition in which plasma is generated and etched at two different frequencies. Manufacturing method. The method of claim 1, In step (c), (c1) etching a molybdenum top-Mo film of the conductive layer in the channel region; And (c2) etching the aluminum upper layer and the molybdenum sub-layer (bottom-Mo) of the conductive layer positioned in the channel region. The method of claim 2, The step (c1) uses Cl ₂ / SF ₆ as an etchant, and the step (c2) uses Cl ₂ / BCl ₃ as an etchant. The method of claim 1, In the step (c), the first photoresist layer formed on the channel region, the non-separated source electrode and the drain electrode is used as an etching mask. And the first photoresist film is thinner than the thickness of the film formed on the non-separated source and drain electrodes. The method of claim 4, wherein (e) a pull-back ashing treatment of the first photoresist layer. The method of claim 5, The pullback ashing process may be performed under O ₂ / SF ₆ plasma conditions. The method of claim 5, In the step (d), the thin film transistor array manufacturing method comprising using a second photoresist film having a channel region opened through the pullback ashing process as an etching mask. The method of claim 7, wherein and (f) performing a post-treatment step to prevent corrosion of the aluminum constituting the conductive layer. The method of claim 8, The post-treatment process is a thin film transistor array manufacturing method characterized in that carried out under the CHF ₃ / O ₂ plasma conditions. The method of claim 8, and (g) further stripping the second photoresist film under O ₂ plasma conditions. The method of claim 10, Step (a) to (g) is a thin film transistor array manufacturing method characterized in that performed in the same dry etching equipment. The method of claim 11, Steps (a) to (f) are performed in a dual frequency capacitively coupled plasma (DFCCP) reactive ion etching (RIE) chamber, The step (g) is a thin film transistor array, characterized in that performed in HDP ICP High Density Plasma Inductive Coupled Plasma Reactive ion Etching (RIE) chamber. The method of claim 12, In step (d), Etching a molybdenum top layer of the conductive layer positioned in the channel region; Etching the aluminum upper layer and molybdenum sub-layer (bottom-Mo) of the conductive layer positioned in the channel region; And And etching the ohmic contact layer under the conductive layer in the channel region. The method of claim 13, And the semiconductor layer of the pattern region is in-situ self etching when the upper molybdenum layer is etched. In the method of manufacturing a thin film transistor array of a liquid crystal display device, (a) sputtering a gate conductive layer on the substrate; (b) dry etching the gate conductive layer to form a gate electrode; (c) forming a sequentially stacked stacked structure including a gate insulating film, a semiconductor layer, and a conductive layer on the substrate including the gate electrode, the semiconductor layer including an active layer and an ohmic contact layer; (d) etching the conductive layer into an electrode pattern in which source and drain electrodes are not separated; And (e) etching the channel region of the electrode pattern to form a source electrode and a drain electrode, and simultaneously etching the semiconductor layer of the pattern region not covered by the electrode pattern to expose the gate insulating film, And (e) the etching of the semiconductor layer by the pattern region, which proceeds simultaneously with the etching of the channel region of the electrode pattern, is performed under a dual frequency condition. The method of claim 15, And dry stripping the photoresist for forming the gate electrode.

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