KR100832801B1 - Laser cutting device with polygon mirror - Google Patents

Abstract

The present invention relates to a laser cutting device, comprising: a light source for generating light, a galvanometer scanner for reflecting light generated from the light source to have a predetermined refractive angle, and a plurality of light paths for reflecting the light reflected from the galvanometer scanner. A polygon scanner having a reflecting surface of the lens and a spindle motor for driving the polygon scanner, a correction optical system for error correction of an optical path due to a mirror slope of the polygon scanner, and an optical guiding light passing through the correction optical system to a substrate An optical path recognition unit comprising a unit, a first light receiving unit for receiving light having an initial optical path, and a second light receiving unit for receiving light having an optical path, among the effective optical paths of light reflected from the reflection surface of the polygon scanner; The controller controls the light source based on the synchronization signal received from the recognition unit, and the controller controls job information to be performed on the substrate. And characterized by consisting of an external information unit for providing, by making sure that delicate and perform a quick cutting action according to the specifications required by the fine adjustment of the optical path is the invention to improve the productivity and workability of the product

Description

Laser cutting device using polygon mirror

(A) and (b) is a perspective view showing a cutting state of a substrate according to the prior art,

Figure 2 shows a laser cutting device to which the polygon mirror according to the present invention

Perspective,

Figure 3 is used in the laser cutting device applying the polygon mirror according to the present invention

Detailed view of the combined structure of polygon scanner and galvanometer scanner,

Figure 4 is used in the laser cutting device applying the polygon mirror according to the present invention

Configuration diagram for polygon scanner and spindle motor,

5 is used in the laser cutting device applying the polygon mirror according to the present invention

A plan view showing an example of a correction optical system,

6 is used in the laser cutting device to which the polygon mirror according to the present invention is applied.

Plan view showing another example of a correction optical system,

(A) and (b) are perspective views which show the cutting | disconnection state of the board | substrate by this invention.

<Description of Symbols for Major Parts of Drawings>

10: substrate 100: light source

101: collimating lens 102: focus lens

103: polygon scanner 104: spindle motor

105: imaging lens 106: reflection mirror

108, 109: first and second light receiving unit 110: control unit

120: external information source 130: stage

140: support frame 150: base frame

160: adjusting unit 170: solenoid

200: galvanometer scanner 201; Reflector

202: drive unit 203: total reflection mirror

300: correction optical system 301, 302, 303: correction lens

304 and 305: Fresnel lens

The present invention relates to a laser cutting device to which a polygon mirror is applied, and configured to cut a substrate or glass by a laser by using a scanner and a correction optical system for adjusting a laser and a laser path, so that the fine path of the optical path is fine. It is an invention that improves the productivity and workability of the product by adjusting the substrate or glass to precise and rapid cutting work according to the required patterns and specifications through adjustment.

With the advent of the information age, high-definition and large-scale display are required for various kinds of display devices used as AV devices such as televisions and OA monitors.PDP, S / M (Shadow Mask), PCB, C / F ( The demand for color filters, LCDs, and semiconductors is steadily increasing.

As an example of this, the LCD has a slimmer and lighter weight than other conventional display devices, and can be easily installed in a narrow space, and a full color display is used. have.

The LCD is composed of a liquid crystal display panel, a driving circuit, a backlight, and the like. In the manufacturing process of the liquid crystal display panel, a process of cutting a glass substrate on which electrical wiring is formed by a known process is required to a predetermined size. In addition, in a liquid crystal display panel having electrical wiring provided on an X-Y matrix, a process of cutting a substrate to insulate the shorted electrical wiring in order to avoid defects caused by static electricity is required.

In addition, development and practical use to provide a large screen for display devices such as cathode ray tube (CRT) display, LCD, plasma display, electro luminescence display (hereinafter referred to as EL display), or light emitting diode (LED) display are in progress. However, when the screen size of the liquid crystal display panel becomes large, the defective rate due to disconnection of signal lines, pixel defects, etc. in the manufacturing process of the liquid crystal display panel is rapidly increased, and there is also a problem of raising the price of the liquid crystal display panel.

Accordingly, in order to solve these problems, a process of forming a plurality of small substrates by connecting the plurality of small substrates from the side to one large substrate has been developed for at least one of the pair of substrates constituting the liquid crystal display panel. After manufacturing a plurality of small substrates and connecting them side by side to each other to produce one large active matrix substrate, one large substrate provided with a color filter (i.e., an opposite substrate) is attached to the active matrix substrate.

The work process of the large-screen liquid crystal display panel also needs to cut the connection surface between the active matrix substrates with high precision in order to minimize the connection between the substrates, thereby minimizing the connection area between the substrates. Therefore, in the manufacture of PDP, S / M (Shadow Mask), PCB, C / F (Color Filter), LCD, semiconductor, etc. mentioned above, it is important from the viewpoint of high precision whether the cutting surface of the glass substrate is precisely cut or not. Many methods and apparatuses for this purpose have been disclosed in the prior art, which will be described with reference to the accompanying drawings.

1 (a) and (b) are perspective views showing a cutting state of a substrate according to the prior art. Referring to the drawings, the conventional cutting of the glass substrate for the liquid crystal display device, as shown in Figure 1 (a), after bonding the upper and lower plates (1a, 1b) of the liquid crystal display device by physical contact such as diamond cutter After cutting the upper plate 1b along the cutting line A1 with a cutting tool, the lower plate 1a is cut continuously along the cutting line A2.

As a result, the two substrates 1a and 1b are cut in the same shape as shown in FIG. 1 (b). As the cut surface is enlarged in the drawing, the cutting surface is uneven as shown, thus adding a grinding process to the cutting surface. Will be performed. However, in performing such a process, when the glass fragments generated during cutting adhere to the surface of the substrate, not only the defect is caused to the substrate but also a separate process is required to remove the substrate, and the substrate is broken by the cutting defect. In some cases, the yield may be reduced, and static electricity may be generated during the polishing process.

The present invention is to solve the above problems, it is configured to cut the substrate or glass through a laser using a scanner and a correction optical system for adjusting the laser and the laser path, precisely in accordance with the required pattern or standard It is an object of the present invention to provide a laser cutting device using a polygon mirror to improve the productivity and workability of the product by enabling the cutting operation to be performed quickly and quickly.

In order to solve the above problems, the present invention provides a light source for generating light, a galvanometer scanner that reflects light generated by the light source to have a predetermined refractive angle, and a plurality of light paths that are reflected by the galvanometer scanner. A polygon scanner having a reflecting surface and a spindle motor for driving the polygon scanner, a correction optical system for error correction of an optical path due to a mirror slope of the polygon scanner, and an optical unit for guiding light passing through the correction optical system to a substrate And an optical path recognition unit including a first light receiving unit receiving light having an initial optical path and a second light receiving unit receiving light having a final optical path among the effective optical paths of the light reflected from the reflection surface of the polygon scanner. The control unit controls the light source according to the synchronization signal received from the recognition unit, and the operation information to be performed on the substrate. It characterized by consisting of an external intelligence provided to the controller.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

Figure 2 is a perspective view showing a laser cutting device applying a polygon mirror according to the present invention, Figure 3 is a detailed view of the coupling structure of the polygon scanner and galvanometer scanner used in the laser cutting device applying a polygon mirror according to the present invention. 4 is a configuration diagram of a polygon scanner and a spindle motor used in a laser cutting device to which a polygon mirror according to the present invention is applied. FIG. 5 is a plan view showing an example of a correction optical system used in a laser cutting device applying a polygon mirror according to the present invention, and FIG. 6 shows another example of a correction optical system used in a laser cutting device applying a polygon mirror according to the present invention. It is a top view shown, and FIG.7 (a) and (b) are perspective views which show the cutting | disconnection state of the board | substrate by this invention.

2 to 5, the present invention provides a light source 100 for generating light, a galvanometer scanner 200 and a galvanometer scanner 200 for reflecting light generated from the light source to have a predetermined refractive angle. Polygon scanner (103) having a plurality of reflecting surfaces for adjusting the optical path reflected from the) and the spindle motor (104) for driving the polygon scanner (103), and the optical path due to the slope of the mirror surface of the polygon scanner (103) Correction optical system 300 for error correction, optical units 105 and 106 for guiding light passing through the correction optical system 300 to the substrate 10, and reflections from the reflection surface of the polygon scanner 103 An optical path recognition unit (108, 109) comprising a first light receiving unit (108) for receiving light having an initial light path and a second light receiving unit (109) for receiving light having a last light path among the effective light paths of the received light; By the synchronization signal received by the optical path recognition unit 108,109 It is characterized in that the control unit 110 for controlling the source 100, configured to perform the operation information to the substrate to an external information unit 120 provided in the control unit 110.

The light source 100 may be implemented using a laser diode that emits laser light of point light. Since the laser diode employed in the light source 100 is a semiconductor device, the light output increases when the temperature decreases. When the light output is lowered, the light source driver 111 may be mounted on the controller 100 to control the laser output of high efficiency by continuously monitoring the variation of the laser output and the driving current according to the temperature change.

The light source driver 111 is known as a circuit having an inverting amplifier and a buffer and controlled and operated by the control unit 110 to maintain a constant intensity of the laser light.

A collimating lens 101 which makes the light emitted from the light source 100 into parallel light or convergent light with respect to the optical axis is installed on the light path emitted from the light source 100 and passes through the collimating lens 101. It is appropriate to install a focusing lens 102 for forming a laser light in a horizontal linear direction on the light path. The collimating lens 101 and the focusing lens 102 are a light source 100 and a galvanometer scanner. Disposed in turn on the laser path between 200.

As shown in FIGS. 2 and 3, the galvanometer scanner 200 guides the light to the polygon scanner 103 by adjusting the light path by reflecting the light generated from the light source to have a predetermined refractive angle. A conventional galvanometer scanner composed of a mirror unit 201 rotatably mounted to reflect light and a driver unit 202 supporting the mirror unit 201 and rotating the mirror unit 201. It is reasonable to implement such that the driving is controlled by the controller 110. In addition, as an example of the galvanometer scanner 200 may be provided with a total reflection mirror 203 for changing the vertical path of the light generated from the light source 100 to adjust the installation position of the mirror unit 201. .

The light passing through the focus lens 102 passes through the total reflection mirror 203 and its path is vertically refracted, and the degree of refraction can be adjusted according to the installation angle of the total reflection mirror 203, and the refraction is reflected by the total reflection mirror 203. The reflected light is reflected by the mirror unit 201 which is rotated after being transmitted to the mirror unit 201 where the rotation is controlled by the control unit 120 so that the light can be easily projected to the calculated position for the desired pattern formation. It enters into the polygon scanner 103 at a refractive index.

The polygon scanner 103 for reflecting the light incident from the galvanometer scanner 200 again is formed around a polygonal surface and is rotated at high speed, and the light source is changed according to the angle change of the reflecting surface according to the rotation. Angles reflecting the laser light emitted from 100 are different. Therefore, laser light reflected in different directions on the reflecting surface of the rotating polygon scanner 103 is continuous, thereby scanning in the main scanning direction A. FIG.

In the polygon scanner 103, six reflective surfaces are arranged at equal intervals, and are rotatably supported by the spindle motor 104. The spindle motor 104 is coupled to the support frame 140 and controlled to rotate at a constant speed by the controller 110.

At this time, when the center axis of the spindle motor 104 and the rotation axis of the polygon scanner 103 do not coincide, mirror slope occurs when the polygon scanner 103 is rotated, which affects the optical path reflected by the polygon scanner 103. In order to prevent this, it is reasonable to mount the correction optical system 300 for error correction of the optical path at the output terminal of the polygon scanner 103 in order to prevent this.

The correction optical system 300 may use a general wobble-free optical system, and as shown in FIG. 5, the front and rear surfaces of the correction optical system 300 are negative, respectively, as shown in FIG. 5. It can be implemented by consisting of three correction lenses 301, 302, and 303 having curved surfaces.

At this time, the front and rear left and right curvature radii r1, r2, and r3, r4 of the front lens 301 and the center lens 302 have the same dimensions as the upper and lower curvature radii, and the rear lens ( In the case of 303, the front left and right curvature radii r5 and the upper and lower curvature radii are the same, and the rear left and right curvature radii r6 and the upper and lower curvature radii are formed differently so that the front, rear, and center lenses 302 of the front lens 301 are different. The front, rear, and front surfaces of the rear range 303 may be spherical surfaces, and the rear surface of the rear lens 303 may be formed by a toric surfac.

The three correction lenses 301, 302, and 303 composed of the negative curved surfaces have a constant scanning speed of the luminous flux, and have a dynamic function of correcting errors that are finely moved perpendicular to the scanning direction of the luminous flux. The left and right curvature r6 at the rear of the rear lens 303 of the rear lens 300 is different from the upper and lower curvature radii, and the left and right curvature r6 of the rear lens 303 contributes to maintaining a constant beam scanning speed in the scanning direction. The upper and lower curvatures contribute to preventing the movement of the luminous flux caused by the mirror slope of the polygon scanner 103, thereby preventing errors in the optical path and improving the degree of freedom requiring accurate imaging of the light.

Further, since six surfaces of the first lens of the correction lenses 301, 302, and 303 are formed as negative curved surfaces, the ratio of the focal length f1 in the scanning direction and the focal length f2 in the direction perpendicular to the scanning direction is 3.0 < It is designed to be in the range of f1 <f2 <4.0, and the rear curvature radius r2 of the front lens 301 is formed larger than the front curvature radius r3 of the center lens 302 so that the luminous flux can be effectively focused. Can be carried out.

As another example of the correction optical system 300, as shown in FIG. 6, a pair of Fresnel lenses 304 and 305 having a flat surface and an uneven surface may face the polygon scanner 103. It can be arranged.

The correction optical system 300 according to the above configuration includes one or more Fresnel lenses 304 and 305 composed of a flat surface and an uneven surface side by side so that the flat surface faces the polygon scanner 103 side, so that the light source 100 When the light generated from the light beam passes through the collimating lens 101 and the focus lens 102 to form parallel light and then is reflected by the polygon scanner 103, the Fresnel lenses 304 and 305 having a flat surface in front are located. Improves the transmittance of light and makes the scanning speed constant to form a linear focal locus, and especially when the Fresnel lenses 304 and 305 are installed in close proximity to the optical units 105 and 106, the mirror slope of the polygon scanner 103 is It is to correct the shake caused by the.

The optical units 105 and 106 may include an imaging lens 105 and a reflection mirror 106. The imaging lens 105 may scan light scanned in the main scanning direction A to the substrate 10. Image to focus on. The reflection mirror 106 reflects the light formed by the imaging lens 105 in a predetermined path, thereby forming the image on the substrate 10.

The optical path recognition units 108 and 109 include a first light receiver 108 and a second light receiver 109. The first light receiver 108 may receive light having an initial optical path among the effective optical paths of the light reflected by the polygon scanner 103 to recognize the initial synchronization signal, and may be implemented using a photodiode. The signal received by the first light receiver 108 is transmitted to the controller 110, and the second light receiver 109 receives the light having the last light path among the effective light paths of the light reflected by the polygon scanner 103. In order to recognize the last synchronization signal, the photodiode can also be implemented. The light reception signal from the second light receiver 109 is transmitted to the controller 110.

The control unit 110 includes the light source driver 111, the motor driving driver 113, a stage driving driver 115 for driving the stage 130, and an adjusting unit driving driver 117. The control unit 110 controls the on / off time of the light source 100 as well as the on / off time of the light source 100 based on the cutting information provided from the external information source 120, but at the first and second light receiving units 108 and 109. The light source driver 111 is controlled based on the transmitted synchronization signal.

In addition, the controller 110 may control the drive motor 113 and the stage drive driver 115 so that the spindle motor 103 and the drive unit 202 maintain the rotation of the constant speed during the drive control of the light source 100. In particular, the stage driving driver 115, which is controlled by the controller 110, selectively drives the stage 130 in the main scanning direction A and the sub scanning direction B orthogonal to the main scanning direction A.

The stage 130 is a work table on which the substrate 10 is supported. The substrate 10 placed on the stage 130 is based on a simultaneous signal received by the first and second light receiving units 108 and 109. The stage 130 is driven in the main scanning direction A and the sub scanning direction B by the drive driver 115 so as to be in the scan position.

The external information source 120 may include a computer capable of programming a cutting pattern. Therefore, the computer programs the preset or stored data in a cutting pattern and supplies the same to the controller 110. The substrate 10 placed on the stage 130 may be a semiconductor wafer, an LCD, a PDP panel, a PCB, or the like. In this embodiment, a liquid crystal display panel (LCD), that is, a glass substrate (hereinafter referred to as a glass substrate 10). Indicates.

In addition, as shown in FIG. 4, the rotation axis of the polygon scanner 103 may be finely adjusted to adjust the reflection surface angle of the polygon scanner 103. The adjustment unit 160 is appropriate to implement by consisting of a base frame 150, the support frame 140 is placed, and a solenoid 170 installed between the support frame 140 and the base frame 150, The base frame 150 is coupled to support the support frame 140 at a predetermined distance apart.

The solenoid 170 is driven by the solenoid drive driver 115 controlled by the controller 110 to change the support angle of the support frame 140. When the solenoid 170 is driven, one side of the support frame 140 is further away from the base frame 150, so that the position of the polygon scanner 103 can be adjusted at the center of rotation of the polygon scanner 103. It is reasonable to be located at a distant point.

When the attitude of the polygon scanner 103 is adjusted by the adjusting unit 160 as described above, the vertical direction of the reflective surface of the polygon scanner 103 is adjusted to finely adjust the direction of the scanned light in the sub-scanning direction more precisely. It becomes possible.

According to the above configuration, the light source 100 emits laser light with a constant power, and the power of the laser light emitted from the light source 100 is controlled by the driver 111. In addition, the power of the emitted light is monitored by the first and second light receiving units 108 and 109, so that the controller 100 removes the driver 111 based on the power of the monitored outgoing light.

The emitted light passes through the collimating lens 101 and the focus lens 102 and forms an image on the reflecting surface of the polygon scanner 103. The focus lens 102 is a conventional cylindrical lens or a cylindrical lens. It is reasonable to implement using a telecentric lens. At this time, the polygon scanner 103 rotates at a constant speed at high speed, reflects the incident light in the main scanning direction A to form scan light, and the correction optical system 300 corrects an error of the scan light.

The scan light passes through the imaging lens 105 and passes through a predetermined path, and the first light receiving unit 108 receives initial light from among light paths having an effective light path, thereby transmitting a synchronization signal to the controller 110. To pass. In addition, the second light receiver 109 receives the last light of the effective optical path, thereby transmitting the synchronization signal to the controller 110. The control unit 110 drives the stage 130, the light source 100, and the adjustment unit 160 based on the synchronization signals transmitted from the light receiving units 108 and 109 to position the substrate 10. Will be cut at.

As described above, when cutting the glass substrate 10 by laser using the galvanos scanner 140, the polygon scanner 103, and the correction optical system 300, they are delicately bonded as shown in FIG. The upper and lower plates 10a and 10b are smoothly cut by the laser irradiation along the cutting planes A1 and A2, and TAB, TCP or FPC formed at the cutting plane points are formed to prevent breakage during adhesive bonding, thus providing precise cutting. As a result, the quality of the product can be improved and the cost can be reduced by shortening the processing step.

As described above, the present invention is configured to cut a substrate or glass by using a scanner and a correction optical system for adjusting a laser and a laser path, so that the cutting operation is precisely performed according to a required pattern or standard. It is an invention that exerts an excellent effect of improving the productivity and workability of a product by allowing it to be done.

Claims (4)

A polygon scanner and a polygon scanner having a light source for generating light, a galvanometer scanner for reflecting light generated from the light source to have a predetermined refractive angle, and a plurality of reflecting surfaces for adjusting the light paths reflected by the galvanometer scanner. A spindle motor for driving a light source, a correction optical system for error correction of an optical path due to a mirror slope of the polygon scanner, an optical unit for guiding light passing through the correction optical system to a substrate, and a reflection from the reflection surface of the polygon scanner The optical path recognition unit comprises a first light receiving unit for receiving light having an initial optical path and a second light receiving unit receiving light having a last optical path among the effective light paths of the light, and a synchronization signal received by the optical path recognition unit. Consists of a control unit for controlling the light source and an external information unit for providing the control unit with job information to be performed on the substrate Laser cutting device applying a polygon mirror, characterized in that. The method of claim 1, The galvanometer scanner is rotatably mounted and reflects the light generated from the light source; A driving part supporting the mirror part and rotating the mirror part; And a total reflection mirror configured to change a vertical path of the light generated by the light source. The method of claim 1, The correction optical system is a laser cutting device applying a polygon mirror, characterized in that the front, the rear is composed of three correction lenses each having a negative curvature of a predetermined curvature. The method of claim 1, The correction optical system includes a pair of fresnel lenses having a flat surface and an uneven surface, wherein the flat surface of the fresnel lens is mounted in parallel toward the polygon scanner.

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