KR100756112B1 - Apparatus having inductive antenna for generating plasma at atmospheric pressure - Google Patents

Abstract

The atmospheric pressure plasma generator according to the present invention includes a first oscillator for supplying a first frequency signal, at least one induction antenna, an induction antenna, and a first oscillator for receiving a first frequency signal at one end and delivering an induced electromotive force for plasma discharge. A first impedance matcher connected therebetween, a first electrode facing the induction antenna and electrically connected to ground, a dielectric plate positioned between the first electrode and the induction antenna, and a plasma discharge formed between the dielectric plate and the first electrode It is configured to include an area. The discharge gas input to the plasma discharge region receives the induced electromotive force from the induction antenna to perform plasma discharge.

Description

Atmospheric plasma generator with induction antenna {APPARATUS HAVING INDUCTIVE ANTENNA FOR GENERATING PLASMA AT ATMOSPHERIC PRESSURE}             

1 is a block diagram schematically showing an atmospheric pressure plasma generating apparatus using an induction antenna of the present invention;

FIG. 2 is a diagram illustrating an example in which a variable impedance circuit is connected to the induction antenna of FIG. 1; FIG.

3A to 3C show examples of configuring the variable impedance circuit of FIG. 1 using a variable capacitor or a variable inductor;

4 is a view showing an example in which an ignition circuit is configured in the atmospheric pressure plasma generator of FIG. 2;

FIG. 5 is a view showing an example in which a dielectric plate and a first electrode are formed in a flat plate type in the atmospheric pressure plasma generator according to the present invention; FIG.

6 is a diagram illustrating an example in which a processing substrate is disposed in the plasma generating apparatus of FIG. 5;

7 is a view showing an example in which an ignition circuit is configured in the plasma generator of FIG. 5;

8 is a plan view showing an example in which a plurality of induction antennas are arranged on a dielectric plate;

FIG. 9 is a plan view showing an example in which a dielectric plate is formed of a circular plate and an induction antenna wound in a circular shape on top thereof is installed; FIG.

10 is a view showing an example in which the first electrode is separated and installed on both sides of the induction antenna in the atmospheric pressure plasma generator of the present invention;

FIG. 11 is a view showing an example in which an ignition circuit is configured in the plasma generator of FIG. 10; FIG.

12 is a view showing an example in which a gas input tube is installed in the plasma generating apparatus of FIG.

13A to 13C are plan views of diaphragms installed in the gas input pipe;

14 is a view showing an example in which the dielectric plate and the first electrode are configured in a cylindrical shape in the atmospheric pressure plasma generator according to the present invention;

15 is a cross-sectional view taken along line A-A of FIG. 14;

FIG. 16 is a cross-sectional view taken along line B-B in FIG. 14; FIG.

17 and 18 show an example in which a plurality of induction antennas are installed;

19 is a view showing an example in which the induction antenna is wound in a spiral in the longitudinal direction in the atmospheric plasma generator of FIG. 14;

20 is a cross-sectional view taken along line C-C of 19;

FIG. 21 is a diagram illustrating an example in which an induction antenna is wound around a plurality of ferrite cores and installed in the atmospheric pressure plasma generator of FIG. 14; FIG.

FIG. 22 is a diagram illustrating an example of configuring an ignition circuit in the atmospheric pressure plasma generator of FIG. 14.

Explanation of symbols on the main parts of the drawings

10: inductive antenna 12, 32: impedance matcher

14, 34: oscillator 16: variable impedance circuit

20: dielectric plate 22: plasma discharge region

24: electrode

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an atmospheric plasma generator, and more particularly to an atmospheric plasma generator for generating plasma by a dielectric barrier discharge (DBD) using an induction antenna.

At present, atmospheric pressure plasma (atmospheric pressure plasma) does not require a conventional vacuum system (vacuum system) and can be applied directly to an existing production line without a reaction chamber at 1 atm (760 torr) can be processed in a continuous process. Techniques for generating atmospheric plasma include dielectric barrier discharge (DBD), corona discharge, microwave discharge, arc discharge and the like. These technologies are used in a variety of industries.

The dielectric barrier discharge maximizes the voltage efficiency applied by the AC power by using the charge build-up phenomenon of the dielectric to obtain a uniform glow discharge. Atmospheric pressure plasma is useful for processes such as cleaning and surface modification of organic contaminants. For example, it is used for cleaning a large plate, ashing, PFC gas purification, etc. in a semiconductor manufacturing process.

There is a demand for an atmospheric pressure plasma generator capable of improving yields when processing a large wafer of 300 mm or more in a semiconductor device production process. In addition, in the process of using semiconductor devices such as TFT LCD and PDP (Plasma Display Panel), various kinds of large glass and polymer plates are used, and these sizes are getting larger and more processing speed can be effectively coped with. There is a need for an atmospheric pressure plasma generator which is fast and has no limitation on processing size.

Until now, the atmospheric pressure plasma has a Capacitor Coupled Plasma (CCP) method, and ion particles, which are accelerated by a dielectric, installed between two plate electrodes to which a high voltage is applied, strongly collide with each other, resulting in a short lifetime and consequent particle generation. In addition, in order to obtain a high-density plasma, ion particles accelerated when a high voltage is supplied collide more strongly, and the problem of particle generation is further exacerbated with the problem of shortening the dielectric life.

Problems in the plasma discharge of the CCP method can be solved by using the plasma of the inductive coupled plasma (ICP) method, the inventors were able to obtain the plasma discharge of the ICP method using an induction antenna at atmospheric pressure. Accordingly, the present inventors provide an atmospheric pressure plasma generator having an induction antenna.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and its object is to provide an atmospheric pressure plasma generating apparatus capable of generating plasma in an ICP (Inductive Coupled Plasma) method using an induction antenna, thereby enabling high-density plasma generation using high voltage. In addition, the present invention provides an atmospheric pressure plasma generator capable of preventing an accelerated ion particle from colliding strongly with a dielectric material, thereby increasing the dielectric lifetime.

In order to achieve the above object, the atmospheric pressure plasma generator includes: a first oscillator for supplying a first frequency signal; At least one induction antenna receiving a first frequency signal at one end and delivering an induced electromotive force for plasma discharge; A first impedance matcher coupled between the induction antenna and the first oscillator; A first electrode positioned opposite the induction antenna and electrically connected to ground; A dielectric plate positioned between the first electrode and the induction antenna; Including a plasma discharge region formed between the dielectric plate and the first electrode, the discharge gas input to the plasma discharge region receives the induced electromotive force from the induction antenna to perform a plasma discharge.

According to a preferred embodiment of the present invention, at least one second electrode is disposed to face the first electrode with a dielectric plate interposed therebetween to transfer the induced electromotive force for ignition to cause plasma discharge; A second oscillator for supplying a second frequency signal to the second electrode; And a second impedance matcher coupled between the second electrode and the second oscillator. And a variable impedance circuit electrically connected between the other end of the induction antenna and the ground.

In a preferred embodiment of the present invention, the dielectric plate has a plate shape, and the at least one induction antenna is arranged to be wound in a flat spiral on one side of the dielectric plate, and the first electrode corresponds to the area of the dielectric plate. It has a flat plate shape and is disposed at a predetermined interval on the other side of the dielectric plate.

In a preferred embodiment of the present invention, the induction antenna is wound in a flat spiral, the first electrode is composed of two separate plate-shaped electrodes which are separately installed so as to face each other around the induction antenna, the dielectric plate Is provided on both sides so as to face each other between each of the two plate-shaped electrodes separated from the induction antenna and having a flat plate shape, and the plasma discharge regions are separated from both sides of the induction antenna.

In a preferred embodiment of the present invention, the first electrode and the dielectric plate each have a hollow tubular shape; The dielectric tube is embedded inside the first electrode tube, and a plasma discharge region is formed between the first electrode tube and the dielectric tube; The induction antenna is embedded in the hollow region of the dielectric tube.

(Example)

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the present invention is not limited to the embodiments described herein and may be embodied in other forms. The embodiments introduced herein are provided to make the disclosed contents thorough and complete, and to fully convey the spirit of the present invention to those skilled in the art.

The atmospheric pressure plasma generator according to the present invention is a device for generating plasma at atmospheric pressure and is a new plasma generator in which an ICP discharge using an induction antenna and a dielectric discharge method of a CCP method are mixed.

1 is a block diagram schematically showing an atmospheric pressure plasma generating apparatus using an induction antenna of the present invention. Referring to the drawings, the atmospheric pressure plasma generator according to the present invention includes an induction antenna 10, a first impedance matcher 12, a first oscillator 14, a dielectric plate 20, and a first electrode 24. Equipped. Since the dielectric plate 20 and the first electrode 24 are positioned to face each other at a predetermined interval, the plasma discharge region 22 is provided. The dielectric plate 20 may be made of a dielectric material such as glass, alumina, boron nitride, silicon carbide, silicon nitride, quartz, magnesium oxide, or the like. The first electrode 24 can be reworked using a conductive metal such as stainless steel, aluminum, or copper.

The first oscillator 14 generates a first frequency signal in the range of several to several hundred MHz, and the first frequency signal is input to one end of the induction antenna 10 through the first impedance matcher 12. The induction antenna 10 is positioned outside the plasma discharge region with the dielectric plate 20 interposed therebetween, and receives the first frequency signal to transmit induced electromotive force for the plasma discharge to the plasma discharge region 22. The first electrode 24 is electrically connected to ground. The discharge gas, which is input to the plasma discharge region 22 at atmospheric pressure, receives the induced electromotive force from the induction antenna 10 to perform plasma discharge.

Herein, the electric field induced again by the magnetic field induced by the induction antenna 10 is generally induced in parallel with the dielectric plate 20 and the first electrode 24. Thus, the acceleration path of the gas ion particles is substantially parallel to the dielectric plate 20 and the first electrode 24. Therefore, the case where the ion particles collide strongly with the dielectric plate 20 and the first electrode 24 vertically is very low, so that the lifetime of the dielectric plate 20 and the first electrode 24 can be extended.

On the other hand, the induction antenna 10 functions as an antenna for transmitting induced electromotive force and also serves as an electrode for CCP (Capacitor Coupled Plasma) discharge together with the first electrode 24. Therefore, the induction antenna 10 can obtain the effects of the ICP discharge and CCP discharge in duplicate. As will be described later in detail, the induction antenna 10 may be configured with one or more, and when configured with two or more, it is connected to the first impedance matcher 12 in parallel.

A variable impedance circuit may be added to the other end of the induction antenna 10 to adjust the intensity of the ICP discharge of the induction antenna 10. 2 is a diagram illustrating an example in which the variable impedance circuit 16 is connected to the other end of the induction antenna 10 of FIG. 1. By controlling the impedance of the variable impedance circuit 16, the ICP discharge intensity of the induction antenna 10 may be adjusted. The variable impedance circuit 16 may be configured as a variable capacitor or a variable inductor as shown in FIGS. 3A to 3C.

As shown in FIG. 3A, the variable impedance circuit 16 may include a variable capacitor C1 having one end connected to the other end of the induction antenna 10 and the other end connected to the ground. As shown in FIG. 3B, the variable impedance circuit 16 may be configured as a variable inductor L1 having one end connected to the other end 10 of the induction antenna and the other end connected to ground. Alternatively, the variable impedance circuit 16 may include a capacitor C2 and a variable inductor L1 connected in series between the other end of the induction antenna 10 and the ground. In addition, the variable impedance circuit 16 may be embodied by various circuit configurations.

The atmospheric pressure plasma generator of the present invention may further comprise an ignition circuit for generating plasma discharge. 4 is a diagram illustrating an example of configuring an ignition circuit in the atmospheric pressure plasma generator of FIG. 2.

The ignition circuit is composed of a second electrode 30, a second impedance matcher 32, and a second oscillator 34. The second electrode 30 is installed to face the first electrode 24 with the dielectric plate 20 interposed therebetween, and the second oscillator 34 generates a second frequency signal to generate a second impedance matcher 32. Input to the second electrode 30 through). The second frequency signal is a signal in the range of tens to hundreds of Khz and is a frequency signal of a lower band than the first frequency signal. The second electrode 30 is for CCP discharge together with the first electrode 24 to transfer induced electromotive force for initial ignition for the plasma discharge to the discharge gas input to the plasma discharge region 22.

The atmospheric pressure plasma generating apparatus of the present invention as described above may be embodied as in the first to third embodiments described below. However, the plasma generating apparatus of the present invention is not limited to the embodiments described herein and may be embodied in other forms. The embodiments introduced herein are provided to make the disclosed contents thorough and complete, and to fully convey the spirit of the present invention to those skilled in the art.

Example 1

FIG. 5 is a diagram illustrating an example in which a dielectric plate and a first electrode are formed in a flat plate type in the atmospheric pressure plasma generator according to the present invention. As shown in the figure, the dielectric plate 20 has a rectangular plate shape. The shape of the dielectric plate 20 may have a circular or polygonal flat plate shape in addition to quadrangles. The induction antenna 10 is arranged by winding a spiral plate on one side of the dielectric plate 20, has a band shape having a predetermined thickness, and is wound in a spiral shape parallel to the dielectric plate 20. The first electrode 24 has a flat plate shape corresponding to the area of the dielectric plate 20 and is disposed at the other side of the dielectric plate 20 at predetermined intervals. The plasma discharge region 22 is formed between the dielectric plate 20 and the first electrode plate 24.

As shown in FIG. 6, a processing substrate 26, such as a semiconductor wafer or a liquid crystal glass plate, is positioned between the dielectric plate 20 and the first electrode plate 24, that is, on top of the first electrode plate 24. can do. Alternatively, the plasma processing process may be performed while the processing substrate 26 progresses between the dielectric plate 20 and the first electrode plate 24. For example, it can be used for ashing or cleaning processes, such as a semiconductor wafer and a liquid crystal glass.

FIG. 7 is a diagram illustrating an example of configuring an ignition circuit in the plasma generator of FIG. 5. Referring to the drawings, the plate-shaped second electrode 30 for the ignition circuit is installed on one side of the dielectric plate 20 where the induction antenna 10 is located to face the first electrode plate 24. The second electrode plate 30 is connected to the second oscillator 34 through the second impedance matcher 32.

The induction antenna 10 may be configured in plural, and as shown in FIG. 8, the induction antenna 10 may be arranged on the dielectric plate 20. As shown in FIG. 9, the dielectric plate 20 may be configured as a circular plate, and the induction antenna 10 may also be configured to be wound in a circular shape.

Example 2

10 is a diagram illustrating an example in which the first electrodes are separated and installed on both sides of the induction antenna in the atmospheric pressure plasma generator according to the present invention. As shown in the figure, the induction antenna 10 is wound in a flat spiral, and the separated plate-shaped first electrodes 24a and 24b are installed so as to face each other at a predetermined distance with respect to the induction antenna 10. . Between the induction antenna 10 and each of the separated first electrodes 24a and 24b, balanced dielectric plates 20a, 20b, 21a and 21b are provided to face each other. Thus, the plasma discharge regions 22a and 22b are formed separately on both sides of the induction antenna 10, and the discharge gas is input to the two plasma discharge regions 22a and 22b which are separated.

The separated first electrodes 24a and 24b are respectively connected to ground, and one end of the induction antenna 10 is connected to the first oscillator 14 through the first impedance matcher 12. The other end of the induction antenna 10 is connected to ground through a variable impedance circuit.

FIG. 11 is a diagram illustrating an example of configuring an ignition circuit in the plasma generator of FIG. 10. Referring to the drawings, the plate-shaped second electrode 30 for the ignition circuit is installed to face the first electrodes 24a and 24b between the dielectric plates 20a and 20b located on both sides of the induction antenna 10. do. The second electrode 30 is connected to the second oscillator 34 through the second impedance matcher 32.

FIG. 12 is a diagram illustrating an example in which a gas input tube is installed in the plasma generator of FIG. 11. Referring to the drawings, a gas supply pipe 40 for supplying a discharge gas is installed on the two separated plasma discharge regions 22a and 22b. The gas supply pipe 40 has a gas outlet 41 having a lower portion opened in the longitudinal direction, and the dielectric plates 21a and 21b provided at the separated first electrodes 24a and 24b have a gas outlet 41. Dielectric plates 23a and 23b are installed so as to extend up to. The upper ends of the dielectric plates 20a and 20b provided on both sides of the induction antenna 10 are also connected by the dielectric plate 20c.

The gas supply pipe 40 supplies the discharge gas as a whole on the upper side of the plasma discharge regions 22a and 22b. At this time, multiple gas plates 43a, 43b, 43c in which a plurality of holes are formed are installed in the gas supply pipe 40 so that the discharge gas supplied has an even density. In the first multiple diaphragm 43a installed at the bottom, holes of the same size are distributed evenly. The hole size increases from the outside to the center portion of the second multi-plate 43b provided in the middle, and the hole size decreases from the center to the outside of the third multi-plate 43c provided at the top.

Example 3

FIG. 14 is a view illustrating an example in which a dielectric plate and a first electrode are formed in a cylindrical shape in the atmospheric pressure plasma generator according to the present invention, FIG. 15 is a sectional view taken along line A-A of FIG. 14, and FIG. 16 is a sectional view taken along line B-B of FIG.

In this embodiment, the first electrode 24 and the dielectric plate 20 each have a hollow tubular shape. The dielectric tube 20 is embedded inside the first electrode tube 24, but a plasma discharge region 22 is formed between the first electrode tube 24 and the dielectric tube 20. The induction antenna 10 is embedded in the hollow region 52 of the dielectric tube 20. The first electrode tube 24 has a 'C' shape with a portion of the outer lower portion opened in the longitudinal direction, and spacers (both ends) at both ends thereof to have mutual discharge distances at both ends of the first electrode tube 24 and the dielectric tube 20. 53a, 53b) are mounted and supported. It is preferable to use an insulator for the spacers 53a and 53b.

The hollow plasma chamber 50 is formed by the first electrode tube 24, the dielectric tube 20, and the spacers 53a and 53b. Here, the shape of the plasma chamber 50 is not limited to a cylindrical shape, but may be modified into a rectangular or polygonal cylindrical shape. Since the lower part of the first electrode tube 24 is opened in the longitudinal direction to form an opening 51 for discharging the plasma gas, the openings 51 are provided with gas outlets 58a and 58b facing each other in the longitudinal direction.

A gas supply pipe 54 for supplying a discharge gas is installed at an outer upper end of the first electrode tube 24. Although not illustrated in detail, the gas supply pipe 54 is connected to a gas supply source (not shown). The gas supply pipe 54 and the first electrode tube 24 respectively have a plurality of perforated holes 56 and 57 formed on opposite surfaces, and discharge gas is uniformly supplied through the plurality of through holes 56 and 57. do. At least one cooling tube 55 may be installed in the first electrode tube 24. The cooling tube 55 is connected to a cooling water source (not shown). In this embodiment the cooling tube 32 is mounted on top of the outer electrode tube 21.

At least one induction antenna 10 is installed in the hollow region 52 of the dielectric tube 20. The induction antenna 20 has a strip shape having a predetermined thickness and is wound spirally in parallel to be mounted in the longitudinal direction in the hollow region 52. One end of the induction antenna 10 is connected to the first oscillator 14 through the first impedance matcher 12, and the other end thereof is connected to the variable impedance circuit 16.

17 and 18 illustrate an example in which a plurality of induction antennas are installed. In the hollow region 52, a plurality of induction antennas 10a to 10d may be separately installed. As shown in FIG. 17, a plurality of induction antennas 10a to 10c are arranged in the longitudinal direction in the hollow region 52. Alternatively, as shown in FIG. 18, a plurality of induction antennas 10a to 10d are arranged in an inside of the dielectric tube 20. In this case, each of the plurality of induction antennas is connected at one end thereof in parallel to one end of the first impedance matcher 12 and at the other end thereof in parallel to the variable impedance circuit 16.

FIG. 19 is a view illustrating an example in which an induction antenna is wound in a spiral in the longitudinal direction in the atmospheric plasma generator of FIG. 14, and FIG. 20 is a cross-sectional view taken along line C-C of FIG. As shown in the figure, the induction antenna 10 mounted in the hollow region of the dielectric tube 20 is mounted spirally wound along the longitudinal direction of the hollow region 52. One end of the induction antenna 10 is connected to the first oscillator 14 via the first impedance matcher 12, and the other end is connected to the variable impedance circuit 16.

FIG. 21 is a diagram illustrating an example in which an induction antenna is wound around a plurality of ferrite cores and installed in the atmospheric pressure plasma generator of FIG. 14. As shown in the figure, a plurality of ferrite cores 17 are mounted in series in the hollow region 52 of the dielectric tube 20, and one or more induction antennas 10a, 10b are wound around the ferrite core 17. . The ferrite core 17 may have a lower portion of the ferrite core 17 to have a 'C' shape. By mounting the ferrite core 17, the intensity of the magnetic field induced from the induction antennas 10a and 10b can be made higher, and a stronger electric field can be obtained.

FIG. 22 is a diagram illustrating an example of configuring an ignition circuit in the atmospheric pressure plasma generator of FIG. 14. Referring to the drawings, in the cylindrical plasma chamber 50 as described above, the hollow region 52 of the dielectric tube 20 faces at least one second electrode plate 30a so as to face the first electrode tube 24 on its inner side. 30b) is installed to transfer the induced electromotive force for ignition to cause the plasma discharge. The second electrode plates 30a and 30b are connected to the second oscillator 34 through the second impedance matcher 32.

In the atmospheric pressure plasma generator of the present invention as described above, the plasma discharge is generated by the electric field induced by the induction antenna 10 and the electric field between the induction antenna 10 and the first electrode 24. At this time, the generated ion particles are very unlikely to collide perpendicularly to the dielectric plate 20 or the first electrode 24 under the influence of two electric fields. Therefore, even when a high voltage is applied, it is possible to prevent the dielectric plate 20 or the first electrode 24 from being easily damaged by the strong collision of the ion particles, thereby obtaining a high-density, powerful plasma using the high voltage. In addition, the atmospheric pressure plasma apparatus of the present invention is capable of a large-area plasma treatment by combining two or more atmospheric pressure plasma generators to suit the process characteristics and the size of the workpiece.

In the above, the configuration and operation of the atmospheric pressure plasma generating apparatus according to the present invention has been shown in accordance with the above description and drawings, but this is merely described as an example and various changes and modifications within the scope without departing from the technical spirit of the present invention. Of course this is possible.

As described in detail above, the atmospheric pressure plasma generator of the present invention prevents the accelerated ion particles from colliding strongly with the external electrode and the dielectric tube vertically by using the induction antenna, thereby extending the life of the external electrode tube and the dielectric tube. It is possible to use a high voltage to obtain a high density plasma.

Claims (22)

A first oscillator for supplying a first frequency signal; At least one induction antenna receiving a first frequency signal at one end and delivering an induced electromotive force for plasma discharge; A first impedance matcher coupled between the induction antenna and the first oscillator; A first electrode positioned opposite the induction antenna and electrically connected to ground; A dielectric plate positioned between the first electrode and the induction antenna; A plasma discharge region formed between the dielectric plate and the first electrode; At least one second electrode disposed to face the first electrode with a dielectric plate interposed therebetween to transfer the induced electromotive force for ignition to cause plasma discharge; A second oscillator for supplying a second frequency signal to the second electrode; A second impedance matcher coupled between the second electrode and the second oscillator; And A variable impedance circuit electrically connected between the other end of the induction antenna and the ground; The discharge gas input to the plasma discharge region is ignited by receiving the induction electromotive force for ignition from the second electrode, the atmospheric pressure plasma generating apparatus for receiving the induction electromotive force from the induction antenna to maintain the plasma discharge. delete The atmospheric pressure plasma generator of claim 1, wherein the first frequency signal has a higher frequency than the second frequency signal. delete The apparatus of claim 1, wherein the variable impedance circuit includes a variable capacitor having one end connected to the other end of the induction antenna and the other end connected to the ground. The apparatus of claim 1, wherein the variable impedance circuit comprises a variable inductor having one end connected to the other end of the induction antenna and the other end connected to the ground. The apparatus of claim 1, wherein the variable impedance circuit comprises a variable inductor and a capacitor connected in series between the other end of the induction antenna and a ground. The atmospheric pressure plasma generating apparatus of claim 1, wherein the induction antennas are connected in series with two or more antennas connected in parallel to an impedance matching unit. The atmospheric pressure plasma generating apparatus of claim 1, wherein the induction antenna has a band shape having a predetermined thickness and is wound in a spiral shape parallel to the dielectric plate. The method of claim 1, wherein the dielectric plate has a flat plate shape, the at least one induction antenna is arranged in a spiral wound in a flat plate on one side of the dielectric plate, the first electrode is a flat plate shape corresponding to the area of the dielectric plate And an atmospheric pressure plasma generator having a predetermined interval on the other side of the dielectric plate. delete The inductive antenna of claim 1, wherein the induction antenna is wound in a flat spiral shape, and the first electrode is composed of two separate plate-shaped electrodes which are separately installed so as to face opposite sides of the induction antenna, and the dielectric plate has a flat plate shape. And installed on both sides so as to face between each of the two plate-shaped electrodes separated from the induction antenna, Atmospheric pressure plasma generator is formed by separating the plasma discharge region on both sides of the induction antenna. delete 13. The apparatus of claim 12, further comprising a gas supply pipe for supplying a discharge gas to the two separate plasma discharge regions; The dielectric plates installed on the separated first electrode side extend to the gas outlet of the gas supply pipe; The gas supply pipe is supplied to the discharge gas as a whole from one side of the plasma discharge region, atmospheric pressure plasma generating apparatus is provided with a plurality of diaphragm formed with a plurality of holes to have a uniform density of the supplied discharge gas. The method of claim 1, wherein the first electrode and the dielectric plate each have a hollow tubular shape; The dielectric tube is embedded in an inner hollow region of the first electrode tube, and a plasma discharge region is formed between the first electrode tube and the dielectric tube; The induction antenna is an atmospheric pressure plasma generator is embedded in the hollow region of the dielectric tube. The atmospheric pressure plasma generator as set forth in claim 15, further comprising spacers mounted on both ends of the first electrode tube and the dielectric tube so as to have mutual discharge distances. The gas supply pipe according to claim 15, further comprising: a gas supply pipe mounted outside the first electrode pipe to supply a discharge gas to the plasma discharge region; The first electrode tube is an atmospheric pressure plasma generating apparatus having an opening portion which is partially opened in the longitudinal direction to inject the plasma gas. 16. The atmospheric pressure plasma generator as set forth in claim 15, wherein the induction antenna has a band shape having a predetermined thickness and is wound spirally in parallel to be mounted in a longitudinal direction in a hollow region of the dielectric tube. The atmospheric pressure plasma generator as set forth in claim 15, wherein the induction antenna is spirally wound along the longitudinal direction of the hollow region of the plasma chamber and is mounted in the longitudinal direction in the hollow region of the dielectric tube. The apparatus of claim 15, wherein a plurality of ferrite cores are mounted in the hollow region of the dielectric tube, and the induction antenna is wound around a ferrite core. 21. The apparatus of claim 20, wherein the ferrite core is partially open. delete

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