KR100723758B1 - Self-assembly assisted fabrication method of good ordered nanoparticles using periodically exposed pattern. - Google Patents

Abstract

The present invention relates to the fabrication of nanoparticles present in an insulator in a metal-insulator-semiconductor structure to be used in nonvolatile memory device construction. Nanoparticles such as silicon (Si), germanium (Ge), and platinum (platinum) must be uniformly manufactured in an insulator in order to realize fast response speed, low power consumption, and nonvolatile characteristics of the memory device. In order to form such nanoparticles, amorphous Si, Ge, Pt, etc. are deposited on an insulator layer to form crystalline nanoparticles through a rapid thermal process (RTP) or an annealing process. However, the nanoparticles produced in this way have a very wide distribution, which makes it difficult to apply nonvolatile memory. In order to overcome this problem, the present invention relates to a method of manufacturing a uniform and good nanoparticles (nanoparticles) by selectively forming a deposition region through the pattern during deposition of the amorphous material to block the region where the atoms of the deposition material diffuse.

Si nanoparticles, Ge nanoparticles, patterns, self-assembly, memory

Description

Self-assembly assisted fabrication method of good ordered nanoparticles using periodically exposed pattern.} Self-assembly assisted fabrication method of good ordered nanoparticles using periodically exposed pattern.}

1 is a schematic block diagram of a method for producing a uniform and good nanoparticles by effectively blocking the movement of particles between the exposed patterns by the pattern formation regularly exposed in the embodiment of the present invention. FIG. 1A is a tunnel oxide layer forming process, FIG. 1B is a process of spin coating a photoresist on a substrate, FIG. 1C is a process of developing, FIG. 1D is an amorphous Si or Ge deposition process, FIG. 1E is a remaining photoresist removing process, and FIG. 1F Is a gate oxide layer deposition process, FIG. 1G is a process of forming crystalline Si or Ge nanoparticles from an amorphous Si or Ge thin film through annealing, and FIGS. 1H and 1I are plan views when the regularly exposed patterns are rectangular and circular, respectively. Indicates.

FIG. 2 is an embodiment of the present invention, which effectively blocks particle movement between exposed patterns by regularly exposed pattern formation, and simultaneously forms irregular mesa-shaped irregularities through an etching process. In this way, a uniform and well-ordered nanoparticle is manufactured using a strain field caused by a lattice constant difference between the substrate and the deposition material during thin film deposition. FIG. 2A is a tunnel oxide layer forming process, FIG. 2B is an amorphous Si or Ge deposition process, FIG. 2C is a process of spin coating a photoresist on a substrate, FIG. 2D is a developing process, FIG. 2E is a residual photoresist removing and etching process, and FIG. 2f is a gate oxide layer deposition process, FIG. 2g is a process of forming crystalline Si or Ge nanoparticles from an amorphous Si or Ge thin film through annealing, and FIGS. 2h and 2i are plan views when regular mesa shapes are rectangular and circular, respectively. Indicates.

FIG. 3 is a schematic diagram illustrating a conceptual sequence of a method for manufacturing nanoparticles having a long / short distance rule applying a method of generating a block copolymer to a substrate having regular irregularities by etching after pattern formation according to an embodiment of the present invention. to be. 3A shows a process of spin coating a photoresist on a substrate, FIG. 3B shows a process of developing, FIG. 3C shows an etching process for making an uneven substrate, FIG. 3D shows a process of spin coating a block copolymer, and FIG. 3E shows annealing. The process of separating the block copolymer through the phase, Figure 3f is a process of melting the hydrophilic polymer in the phase-separated block copolymer, Figure 3g is an etching process for forming a tunnel oxide layer, Figure 3h is a tunnel oxide layer forming process, Figure 3i is an amorphous Si, Ge, or Pt deposition process, FIG. 3j is a gate oxide layer deposition process, FIG. 3k is a plan view of FIG. 3j, and FIG. 3l is an crystalline Si, Ge, or Pt nanocrystal in an amorphous Si, Ge, or Pt thin film through annealing. The process of making the particles, Fig. 3m shows a plan view of Fig. 3l.

* Explanation of symbols for the main parts of the drawings

10: substrate

11: photoresist

12: block copolymer monolayer

13: tunnel oxide layer

14: gate oxide layer

15: amorphous Si, Ge, or Pt (amorphous silicon, germanium or platinum)

121: hydrophilic polymer

122: hydrophobic polymer

150: crystalline Si, Ge or Pt nanoparticles (polycrystalline silicon, germanium or platinum nanoparticle)

The present invention is directed to the crystalline nanoparticles generated in the insulator of the metal-insulator-semiconductor structure to be used in the construction of the nonvolatile memory device to solve the short storage time, the volatile problem, and the application of high voltage, which are the problems of the conventional memory device. will be. These nanoparticles are produced through the crystallization process of amorphous Si (silicon) or Ge (germanium), and the size of nanoparticles produced during this process has various distributions, which adversely affects the application of non-volatile memory to nanoparticles. give. In order to overcome the problems caused by spontaneous crystallization of nanoparticles, the present invention selectively deposits an amorphous material through a pattern to block long-range diffusion of atoms caused by the crystallization of the amorphous material. It aims to achieve fast response speed, low power consumption, and non-volatile characteristics by manufacturing memory devices composed of conductor nanoparticles such as nanoparticles and Pt.

The limit of resolution for producing regular patterns by the conventional photolithography method is about 50 nanometers (nm). On the other hand, there are many methods for producing nanoparticles of less than 50 nanometers, but it is impossible to accurately control the size of nanoparticles, and in particular, there are many problems in device applications because there is no long / short distance rule in nanoparticle distribution.

Another example of the prior art is an electron beam lithography method that compensates for the problems of the prior art, but since the pattern must be made one by one at every position where the nanoparticles are to be formed, it is impossible to apply a large-area substrate. Holding it.

The present invention is a method that can solve the two major problems of the prior art at the same time to form a pattern regularly exposed to the substrate and then depositing amorphous Si (silicon) or Ge (germanium) on the exposed substrate. Since the amorphous material deposited regularly is blocked from neighboring amorphous through the pattern, it is possible to obtain uniform and well-ordered nanoparticles after annealing. The present invention aims to apply the memory device of the nanoparticles made through this process.

delete

delete

The present invention to achieve the above object is a first step of making a tunnel oxide (tunnel oxide) layer on the substrate; A second step of spin coating a photoresist on the substrate on which the tunnel oxide layer is formed and forming a pattern; Depositing amorphous Si, Ge, or Pt on the patterned substrate; A fourth step of depositing a gate oxide layer on the substrate on which the amorphous material is deposited and forming crystalline Si, Ge, or Pt nanoparticles through a rapid thermal process (RTP) or annealing process; Consists of.
The present invention is a method of producing Si, Ge or Pt nanoparticles with uniform and good alignment by effectively blocking particle movement between exposed patterns by regularly exposed pattern action, and overcome the limitation of resolution by making regular patterns. Using this method, we propose a new concept of nanoparticle fabrication with high density, long and short distance ordering arrangement with low cost and mass productivity.
According to the present invention, in the process of forming a pattern on a substrate and an RTP (Rapid Thermal Process) or annealing an amorphous material regularly exposed due to the pattern, amorphous Si, Ge, or Pt is total free energy (total free). In order to minimize energy, the present invention relates to a method for producing uniform and well-ordered nanoparticles using the principle of forming nanoparticle morphology through surface diffusion and crystallization.

The preferred embodiment according to the present invention will be described.

The substrate uses a p-type or n-type doped silicon substrate and is a physical vapor deposition (PLD), reactive sputtering, which is a physical vapor deposition method using a Si target in an oxygen atmosphere. Tunnel oxide is preferably formed by a method such as a molecular beam epitaxy method, a thermal evaporation method, or a chemical vapor deposition (MOCVD) method, which is a chemical vapor deposition method.

As the pattern forming method of the second step, photolithography, laser interference lithography, electron beam lithography, x-ray lithography, and copolymer template methods are preferable.

The amorphous material forming step of the third step is a pulsed laser deposition (PLD), a reactive sputtering method, a molecular beam epitaxy method, which is a physical vapor deposition method (PVD) at room temperature using a Si, Ge or Pt target (target) For example, it is preferable to form an amorphous thin film by the MOCVD method, which is a thermal evaporation method or a chemical vapor deposition method (CVD).

The fourth step is a physical vapor deposition method (PVD), a reactive sputtering method, a reactive sputtering method, and a molecular beam epitaxy method using a Si target in an oxygen atmosphere in the same manner as the first step. For example, it is preferable to form a gate oxide layer by a thermal evaporation method or a chemical vapor deposition method (CVD), and to form Si, Ge, or Pt nanoparticles by performing RTP or annealing in a high temperature vacuum furnace.

As described above, the present invention is a method for producing uniform, well-aligned Si, Ge or Pt nanoparticles by effectively blocking particle movement between exposed patterns by regularly exposed pattern application, and having a resolution capable of making regular patterns. Overcoming the limitations and using them, we propose a new method for the production of nanoparticles with high density, long and short distance ordering arrangements with low cost and mass productivity.

Claims (1)

A first step of making a tunnel oxide layer on the substrate; A second step of spin coating a photoresist on the substrate on which the tunnel oxide layer is formed and forming a pattern; Depositing amorphous Si, Ge, or Pt on the patterned substrate; A fourth step of depositing a gate oxide layer on the substrate on which the amorphous material is deposited and forming crystalline Si, Ge, or Pt nanoparticles through a rapid thermal process (RTP) or annealing process; Configured nanoparticles manufacturing method.

Images