KR100666601B1 - A dubble bellows sealed actuated high vacuum and high temperature valve - Google Patents

Abstract

A high temperature and high vacuum valve of a dual bellows seal actuator is provided to increase sealing between a passage unit and a driving unit, and the external surface of a valve by mounting a bellows double. A high temperature and high vacuum valve of a dual bellows seal actuator comprises upper and lower bodies(10,20) formed with a driving unit at the upper side and a passage at the lower side; a groove unit(11) forming the predetermined depth and width inside by opening the upper surface of the upper body; a penetration(12) bored with predetermined size on the lower surface at the center of the groove unit, and extended downwardly; a first bellows(30) fixed to the upper side of the groove, and vertically moved toward the lower side; a second bellows(40) fixed to the lower surface, inserted in the penetration, vertically moved at predetermined width; a rod(50) fixing the end of the upper side to the first bellows, penetrating the center of the second bellows, having the downward length, and carrying a sealing unit(51) at the end of the lower side; a sheet(60) installed between a passage(A1,A2) of the lower body, provided with a hole(61) with the predetermined size; a cover(70) for covering the upper surface of the upper body; and an air intake hole(H1,H2) formed at the cover and the groove.

Description

A Dubble bellows sealed actuated high vacuum and high temperature valve

1 is a cross-sectional view showing an example of a conventional bellows chamber high temperature valve;

Figure 2 is a cross-sectional view showing an example of the double bellows seal actuator high temperature and high vacuum valve of the present invention,

Figure 3 is a separate perspective view showing an example of the sealing means of the double bellows seal actuator high temperature and high vacuum valve of the present invention,

Figure 4 is a state of use showing a valve shutoff example of the double bellows seal actuator high temperature and high vacuum valve of the present invention,

Figure 5 is a state of use showing a valve distribution example of the double bellows seal actuator high temperature and high vacuum valve of the present invention,

Figure 6 is a side cross-sectional view showing another embodiment of the sealing means of the double bellows seal actuator high temperature and high vacuum valve of the present invention,

Figure 7 is a side cross-sectional view showing another embodiment of the first bellows of the double bellows seal actuator high temperature and high vacuum valve of the present invention.

[Explanation of symbols on the main parts of the drawings]

10: upper body 11: groove portion

12: through hole 13A: upper step

13B: Lower step 20: Lower body

30: first bellows 31, 34: upper plate

31A, 34A: Opening holes 32, 35: Lower plate

33, 36: coupling hole 40: second bellows

40A: through hole 41: top plate

42: lower plate 50: rod

51: sealing means 52: ball lift

52A: step 54: metal plate
54A: Metal plate fixing part 60: Sheet
61: hall 62: groove
63: Voltcher B: Ball

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G: Welding part H1, H2: Air inlet hole

S: Thread R: Groove
H3: ventilation hole

The present invention relates to a valve for high temperature and high vacuum using a bellows, and in more detail, to increase the heat resistance and airtightness of a flow path part for controlling a fluid or gas, and a driving part for operating the flow path part, and thereby the flow path part and the drive part. It is a double bellows seal actuator for high temperature and high vacuum valves that is used by directly installing the required position in a high temperature working environment by reducing the gap between them.

The valve basically consists of a control part that controls the fluid or gas, and a body that structurally secures the control part. These valves are used to control the fluid or gas, the physical and chemical properties, and the operation method. Accordingly, various types of valves are manufactured.

For this reason, the most important aspects of the valve structure are the pressure retaining part, the valve ball catcher performing the function of the valve in direct contact with the fluid or gas, and the driving unit operating the ball catcher.

On the other hand, the components of the valve generally used vary depending on the environment in which the conventional high temperature valves used for high temperature are formed of a flow path part with a strong heat resistance, and relatively high pressure compared to the flow path part. And a driving part which is inevitably composed of a component having low heat resistance, and is formed to have a predetermined distance from the high temperature working part.

In more detail, the conventional high temperature valve is provided with a flow path part composed of a high heat resistant component on one side, and a driving part for opening and closing a hemispherical ball or seat seal part provided inside the flow path part to perform a function of the valve. The stem is provided so as to have a certain distance from the flow path portion.

On the other hand, through a stem of a predetermined length connecting the seal portion and the drive portion of the flow path portion, the reciprocating motion of the drive portion is transmitted to the seal portion to perform the opening and closing function of the valve.

In the case of the conventional high temperature valve, the distance between the flow path part and the driving part is difficult to maintain the airtightness of the transfer medium such as air pressure used for the reciprocating motion of the driving part, and thus the accuracy of the opening and closing function of the ball catcher is inferior. It is not possible to control the opening and closing of fluid or gas accurately, and because it keeps airtight with parts made of materials with low heat resistance such as gasket and packing, the driving part to which the parts are applied is kept at a certain distance from the hot part of the workplace. There was a technical limitation that can only be installed by placing.

 In addition, the seal part of the hemispherical ball or seat is a very simple but precise part that directly affects the shutoff performance of the valve. In this regard, the leak tightness of the valve is an important factor for general valve performance. This is an important point that is directly related to the structure and precision of the VO.

Therefore, when the ball catcher structure is weak or the rigidity of the valve structure is insufficient, the airtightness of the seating may be weakened by the system pressure, and due to the large number of structural discontinuities, thermal deformation and mechanical changes due to temperature change may occur. The load deforms the seating structure or the seating contact force weakens, causing leakage.

For this reason, it is implemented in various forms to maintain airtightness in the ball catcher, and among them, the metal-to-metal seating method and the soft seating method are mainly used. Doing.

 The airtightness method by contacting the metal surface with the metal surface should be free from damage of the disc and the ball catcher in order to maintain the air tightness of the ball catcher and the disc or plug of the valve, and can back up the high contact compression pressure between the disc and the ball catcher. The seating surface of the valve has a high corrosion resistance and abrasion resistance such as stellite, has a high yield strength and hardness, and has a low affinity between dissimilar or homogeneous metals. It is generally used by brazing.

On the other hand, the soft seating method is a method for maintaining an internal closeness close to perfection with less force than the sheeting method between the metal, it is composed of a material having a good resilient material and resistant to temperature and pressure, but also Secondly, it is designed to be seated between metals.

The gland packing applied to the opening and closing of the ball catcher according to the seating method is provided with airtightness to prevent the smooth operation due to the friction caused by the repeated opening and closing operation for a long time, and when the valve stem is expanded by heat, it interferes with the reciprocating motion. There was a problem.

Therefore, bellows sealed valves constructed by replacing the gland packings with bellows have been developed and used.

The bellows is precisely manufactured by precision processing welding technology, and has sealing properties, stretching and bending properties, and is used as a sealing element of a valve used in a vacuum or high temperature, high pressure, highly corrosive fluid or a volatile poison fluid, and an explosive fluid. It is used.

It is provided for sealing the drive unit 100 as shown in FIG. 1 when the drive unit 100 is reciprocated due to the air pressure or the like interlocked with the ball catcher 110, one-way airtight through the one-way bellows 120 In addition, the packing 130 is used for most of the other parts, so that the packing 130 is deformed at high temperature and high pressure, making it difficult to maintain airtightness. As a result, the bellows seal valve has the bellows itself in a high temperature environment. Even if there is heat resistance that can be applied and implemented, leakage occurs due to deformation of the packing 130, so that the entire valve cannot be directly installed and used in a high temperature environment.

On the other hand, the valve to open and close using the ball has a direction restriction of the inflow and discharge of the inner flow path portion, there is a problem that can not operate properly if the direction is incorrectly installed.

Therefore, the double bellows is used to maintain airtightness to the outside and the ball catcher side of the valve, thereby constructing a valve suitable for high temperature using two bellows without the use of gasket, packing and O-ring, and also the flow path part and the driving part. By integrating without a stem, the size of the valve is greatly reduced, and at the same time, the inventors have invented a valve that can be directly installed and used in a high-temperature workplace.

Accordingly, the present invention has been made in view of the above-described conventional problems, and a first object of the present invention is to provide a valve for use in a high temperature or high vacuum environment. It is possible to provide a high temperature valve in which the flow path part and the entire driving part can be directly installed in a high temperature work part by maintaining airtightness without using any weak heat-resistant parts such as gaskets, packings, and O-rings.

It is a second object of the present invention to provide a valve in which a valve using a ball of a valve is configured so that the valve can be operated regardless of the direction in which the fluid / gas flows, thereby enabling easy installation.

An object of the present invention as described above has a flow path portion including a flow path of a predetermined size to the left and right, opening and closing means for opening and closing the flow path, the drive unit for operating the opening and closing means and the operation and airtight between the flow path and the drive unit A bellows seal valve having a bellows for maintaining a pressure, comprising: an upper and lower bodies including a driving part at an upper side and a flow path part at a lower side thereof;

A groove having an upper surface of the upper body opened to have a predetermined width and depth inward;

A through-hole formed in a predetermined size through the lower surface of the center side of the groove portion and having a reversal length;

A first bellows fixed to an upper side of the groove and vertically flowing downward at a predetermined depth;

A second bellows fixed to a bottom of the groove part and interpolated to a side of the through hole by a predetermined depth and vertically flowing up and down;

A rod having an upper end fixed to the first bellows and an upper end thereof, having a downward length passing through the center side of the second bellows, and having a sealing means at a lower end thereof;

A sheet provided between the flow paths of the lower body to form a hole having a predetermined size;

A cover having a predetermined size covering an upper surface of the upper body;

An air inlet hole provided in the cover and the groove, respectively;

It is achieved by sealing by welding the outer circumferential surface joining the cover and the upper and lower bodies.

On the other hand, in the present invention, the first bellows is fixed to the upper end of the groove portion, the upper side plate is formed with an opening hole of a predetermined size on the center side, and is provided to flow up and down inside the groove portion, A coupling hole having a predetermined size may be formed and provided as a lower plate coupled to an upper end of the rod.

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In addition, in the present invention, the second bellows, a through hole of a predetermined size is formed in the center side to allow the rod to be inserted and flow up and down, the upper side plate is fixed to the lower step of the groove portion, and the upper body of The lower plate is inserted into the through-hole and flows up and down, and the lower end is a lower plate integrally or tightly fixed to the sealing means of the rod, and the rod having an upward length at the center of the upper surface of the sealing means is formed on the upper plate of the upper plate. After being inserted into the through hole, it may be provided to be protruded upwards a certain length upward.

On the other hand, in the present invention, the sealing means has a predetermined length on both sides of the lower end of the rod having a downward length, at least two or more ball lift is provided with a stepped width formed in the inner side facing each other at the lower end And a ball positioned between the ball lifts and being lifted up / down by the stepped jaw, and a ball catcher which is formed to have a predetermined number of grooves on the upper surface of the seat of the lower body to bind the ball lifts up and down. In the configuration, the ball may be formed of a ceramic material.

Further, in the present invention, the sealing means is provided at the lower end of the rod having a metal plate having a predetermined surface, and a metal plate fixing part for fixing the metal plate, a predetermined width that the metal plate is in contact with the upper surface of the sheet It may be provided that the contact surface of the formed.

The above and other objects, advantages and features of the present invention will become more apparent from the following detailed description taken in conjunction with the accompanying drawings of preferred embodiments.

Hereinafter, the present invention will be described in more detail with reference to the accompanying drawings.

In the accompanying drawings of the present invention, Figure 2 is a cross-sectional view showing an example of the double bellows seal actuator high temperature and high vacuum valve of the present invention, Figure 3 is a double bellows seal actuator of the present invention sealed in the high temperature and high vacuum valve Figure 4 is a separate perspective view showing an example of the means, Figure 4 is a state diagram showing a valve shut-down example of the double bellows seal actuator high temperature and high vacuum valve of the present invention, Figure 5 is a double bellows seal actuator of the present invention for high temperature and high vacuum Figure 6 is a state of use showing a valve distribution example of the valve, Figure 6 is a side cross-sectional view showing another embodiment of the sealing means of the double bellows seal actuator high temperature and high vacuum valve of the present invention, Figure 7 is another of the first bellows of the present invention An embodiment is a cross-sectional view.

The present invention includes a flow path part including flow paths A1 and A2 having a predetermined size to the left and right, opening and closing means for opening and closing the flow paths A1 and A2, a driving part for operating the opening and closing means, and the flow path part and the A bellows seal valve having a bellows for maintaining the operation and airtightness between the driving portions, wherein the upper and lower bodies 10 and 20 are provided with a driving portion on the upper side and a flow path portion on the lower side.

On the other hand, the upper surface of the upper body 10 is provided with a groove portion 11 having a predetermined width and depth inwardly, and is formed through the predetermined size through the lower surface of the center side of the groove portion 11 having a lengthwise direction The through hole 12 is provided.

In addition, the first bellows (30) is fixed to the upper side of the groove portion 11 and flows up and down to a predetermined depth, fixed to the bottom of the groove portion 11 is inserted into a predetermined depth to the through hole 12 side, It has a second bellows (40) which flows in a predetermined width up and down.

The first and second bellows 30 and 40 will be described in more detail. The upper plate 31 is fixed to the upper step 13A of the groove 11 and has an opening hole 31A having a predetermined size in the center side. And a lower plate 32 which is provided to flow upward and downward in the groove part 11, and has a coupling hole 33 having a predetermined size in a center side thereof and is coupled to an upper end of the rod 50. It may be provided as a first bellows (30).

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In addition, a through hole 40A having a predetermined size is formed at the center side to allow the rod 50 to be interpolated to flow up and down, and has an upper plate 41 fixed to the lower step 13B of the groove 11. And, it is inserted into the through-hole 12 of the upper body 10 and flows up and down, the lower end to the lower plate 42 integrally or tightly fixed to the sealing means 51 of the rod 50 The second bellows having the rod 50 having an upward length at the center of the upper surface of the sealing means 51 is inserted into the through hole 40A of the upper plate 41 and then protrudes a predetermined length upward. 40).

On the other hand, the first bellows 30 and the upper end is fixed and has a downward length penetrating through the center side of the second bellows 40, provided with a rod 50 having a sealing means 51 at the lower end The sheet 60 is provided between the flow paths A1 and A2 of the lower body 20 to form holes 61 having a predetermined size.

As a first embodiment of the sealing means 51, the lower end has a predetermined length on both sides of the lower end of the rod 50, and a stepped portion 52A having a predetermined width is formed in the inner side facing each other at the lower end. At least two ball lifts (52), having a ball (B) positioned between the ball lifts (52) and spanned by the step (52A) and lifted up / down, the lower body (20) of Forming a predetermined number of grooves (62) on the upper surface of the sheet 60 is provided with a ball catcher (63) which is coupled to the ball lift 52 to move up and down, the ball (B) is excellent in heat resistance It may be formed of a ceramic material or a metal material.

On the other hand, as a second embodiment of the sealing means 51, provided on the lower end of the rod 50, the metal plate 54 having a predetermined surface, and the metal plate fixing portion (54A) for fixing the metal plate 54 And a contact surface having a predetermined width to be in contact with the metal plate 54 may be formed on an upper surface of the sheet 60.

In addition, provided with a cover 70 of a predetermined size covering the upper surface of the upper body 10, the air inlet holes (H1, H2) are formed in the cover 70 and the groove 11, respectively, The cover 70 and the outer peripheral surfaces of the upper and lower bodies 10 and 20 are welded and sealed.

Reference numeral "G" is a welded portion that seals the outer circumferential surface between the upper and lower bodies 10 and 20.

Reference numeral "S" is a screw portion for inserting into the coupling hole 41 formed in the lower plate 32 of the first bellows (30).

Reference numeral "R" is a groove provided at an end of the shaft having a predetermined height protruding into the opening hole 31A of the first bellows 30 and the upper plate 31.

The double bellows chamber actuator of the present invention configured as described above is a valve for high temperature and high vacuum, as shown in Figure 2 is provided with a driving portion on the upper body 10 side, the flow path portion is provided on the lower body 20 side The fluid flowing through the flow paths A1 and A2 inside the upper and lower bodies 10 and 20 is welded (G) to the upper body 10 and the lower body 20 in contact with each other. To prevent leakage of gas, and the cover 70 coupled to the upper surface of the upper body 10 also welds (G) the outer peripheral surface thereof to contact the first bellows 30 to prevent leakage of compressed air to the outside. In order to seal the material, the upper and lower bodies 10 and 20 may be integrally formed to maintain the airtightness.

In addition, the fluid / gas can flow into any one of the flow path (A1, A2), which is the ball lifter 52 is provided in the sealing means 51 as shown in FIG. The ball (B) is transported to have a predetermined height from the (63), and the ball (B) when the ball lift (52) is upwardly transferred due to the step (52A) protruding inward to the lower end of the ball lift (52) ) Is conveyed upward over the step 52A, and the fluid / gas flowing along the flow paths A1 and A2 flows freely without interference of the ball B.

When the ball lift 52 is naturally downward by compressed air or the spring elastic pressure of the first and second bellows (30, 40), the ball (B) which is in close contact with the ball lift 52 is Since a certain depth is inserted into the hole 61 of the seat 60 and then compressed, the sheet 60 blocks and opens and closes the flow of fluid / gas flowing through the flow paths A1 and A2.

On the other hand, the ball lift 52 is holding the ball (B) only by the step (52A), can be naturally rotated according to the flow of the fluid / gas, and also the step (52A) and the ball (B) Since the area of the contact portion between the) is small, foreign matters are mixed in the fluid / gas, and even if caught between the ball B and the step 52A, the ball B can be easily removed through rotation.

As a right embodiment of the ball (B) it is preferable to be provided with a ceramic ball (B) is a high-density processed ceramic, which is a heat-resistant material resistant to high temperature, but it can be modified to various materials to facilitate those skilled in the art In addition, although it is specified that two steps are formed on both sides as a right embodiment of the step 52A, this is an example for smoothing the rotation of the ball (B), the range that does not inhibit the rotation of the ball (B) It may be provided with many inside.

On the other hand, the sealing means 51 is to receive a reciprocating motion of the driving unit through the rod 50 of a predetermined length upward on the upper surface, the lower plate 32 of the first bellows (30) The rod 50 screwed with the coupling hole 33 is transferred to the lower plate 32 of the first bellows 30 due to the shanghai transport.

In addition, the upper plate 31 of the first bellows 30 is inserted and fixed to the step (13A) formed on the upper end of the groove 11 of the upper body 10, the first bellows (30) By isolating the distribution of the inner and outer peripheral surface of the, isolating space is formed to block the flow of compressed air between the upper side and the inside of the first bellows 30 and the lower portion of the groove (11).

Compressed air flows into the first bellows 30 through the air inlet hole H1 communicating with the upper side of the first bellows 30 to apply downward pressure to the lower plate 32, and the groove portion The lower plate 32 of the first bellows 30 is conveyed up and down by applying an upward pressure to the lower plate 32 through the air inlet hole H2 communicating with the lower side of 11.

For this reason, the rod 50 having one end coupled to the coupling hole 33 of the first bellows 30 and the lower plate 32 is also conveyed together in the vertical transfer of the lower plate 32. A gap is formed between the rod 50 and the through hole 12 of the upper body 10 so that the compressed air introduced through the air inlet hole H2 leaks to the flow path portion or the fluid at the flow path portion is moved to the outside. The second bellows 40 is provided to isolate the through hole 12 and the through hole 40A to prevent leakage.

The second bellows 40 will be described in more detail. When the compressed air is introduced into the air inlet hole H2 to upwardly convey the lower plate 32 of the first bellows 30, the groove portion ( 11) While the compressed air is filled on the lower side, an upward pressure is applied to the lower plate 32 of the first bellows 30, and between the through hole 40A of the second bellows 40 and the rod 50. Compressed air flows into the formed micro-gap to apply downward pressure to the lower plate 42 of the second bellows 40.

At this time, the amount of compressed air for raising the lower plate 32 of the first bellows 30 is greater than the amount of compressed air for lowering the lower plate 42 of the second bellows 40, resulting in the second. The lower plate 42 of the bellows 40 is raised by the upward movement of the lower plate 32 of the first bellows 30 even though the lower plate 42 is subjected to downward pressure.

On the other hand, the rod 50 can be set to have a predetermined height through the elastic pressure that basically acts on the first and second bellows (30, 40), for example, the first and second bellows ( Under the elastic pressure of the 30 and 40, the rod 50 is pushed downward so that the ball lift 52, which is the sealing unit 51, is lowered, so that the upper surface of the hole 61 of the seat 60 is lowered. By being in close contact with each other, the flow path can be set to be blocked by the elastic force of the first and second bellows (30, 40) without injecting a separate compressed air, and vice versa, the first and second bellows (30, Due to the elastic force of 40, the rod 50 may be pulled upward, so that the ball lift 52 may be spaced apart to have a predetermined height.

Hereinafter, the operation of the double bellows of the present invention according to the opening and closing of the flow path will be described in more detail.

When blocking the flow path;

As shown in FIG. 4, in order to block the fluid / gas flowing from one side of the flow paths A1 and A2 to the other side, the air inlet hole H1 provided in the cover 70 on the upper side of the upper body 10. Inject compressed air into the inside through).

When compressed air flows into the groove 11, through the opening hole 31A formed in the upper plate 31 of the first bellows 30 fixed to the step 13A of the groove 11. Compressed air flows into the first bellows 30 to push the lower plate 32 which is relatively flowable to downwardly move it.

At this time, since the compressed air injected is blocked from the inside of the first bellows 30 and the lower side of the groove 11 due to the characteristics of the first bellows 30, the compressed air is lowered to the groove 11. As it does not leak, it can receive maximum down pressure of compressed air.

On the other hand, the rod 50 screwed with the coupling hole 33 of the lower plate 32 of the first bellows 30 is lowered in conjunction with this because the lower plate 32 is transported downward, As a result, the ball lift 52 provided at the lower end of the rod 50 is downward so that the ball B between the ball lifts 52 compresses the hole 61 of the seat 60. Thus, by blocking the center side of the flow path (A1, A2) to block the flow of the flow path portion.

Distribution of the flow path;

As shown in FIG. 5, the first bellows may flow as the volume of the compressed air injected through the air inlet hole H2 provided on one side of the lower surface of the upper portion 11 of the upper body 10 expands. The lower plate 32 of the (30) is transferred upward, the rod 50, which is interlocked with this in accordance with the upward transfer of the lower plate 32 is at the same time, the rod 50 is provided at the lower end The ball lift 52 is upward and spaced apart from the ball B, which compresses the hole 61 of the seat 60, to have a predetermined height upward, and flow between the flow paths A1 and A2 flows.

On the other hand, the compressed air introduced into the lower surface of the groove 11 is introduced into the gap between the through hole 40A of the second bellows 40 and the rod 50, the lower plate of the second bellows 40 A downward pressure is applied to the 42, but this is because the intensity of the compressed air pressure that raises the lower plate 32 of the first bellows 30 is large so that the lower plate 42 of the second bellows 40 is increased. The lower plate 42 of the second bellows 40 is also upwardly moved as the lower plate 32 of the first bellows 30 is upwardly acted.

That is, a small amount of compressed air leaking into the gap between the through hole 40A and the through hole 12 of the second bellows 40 into which the rod 50 is interpolated is caused by the second bellows 40. The outside is blocked, resulting in complete leakage of upper compressed air and lower fluid / gas through the first and second bellows 30, 40.

Therefore, the present invention is a double bellows combined as a form of the airtight through the first and second bellows (30, 40) to completely prevent leakage, a separate airtight for gasket and airtight, such as packing and O-ring Since it is implemented without using a holding member, there is no heat deformation due to a high temperature environment, thereby enabling high density airtightness even at a high temperature.

On the other hand, in the present invention, as the right embodiment of the sealing means 51, provided with the ball lift 42 provided with the step (B) of the ball (B) and the ball (B) span Although it is specified that, as another embodiment of the sealing means 51 is provided with the metal plate 54 having a predetermined size and thickness as shown in Figure 6, the metal plate fixing portion 54A for inserting the metal plate 54 The metal plate 54 may be configured to be in close contact with the top surface of the sheet 60 in close contact with the upper surface of the sheet 60. The material of the metal plate 54 is mainly composed of nickel, chromium, iron, and the like. It is preferable that it is formed of inconel, which is a heat resistant alloy added with titanium, aluminum, manganese, and silicon, but may be modified to various materials for easy implementation by those skilled in the art according to a usage environment such as high temperature or high vacuum.
The opening and closing means of the present invention refers to a double bellows, which corresponds to the first and second bellows (30, 40), the sealing means 51 leaks the flow path when moving up and down through the opening and closing means Means a configuration that can be sealed without, they are configured to allow the vertical movement of the opening and closing means directly linked to the sealing means 51 through the rod 50, respectively. Here, the correct embodiment of the sealing means 51 of the present invention, but described as consisting of the ball carrier 52 and the ball (B) and the ball catcher 63, but will be modified to other sealing means It can be.

In addition, as another embodiment of the first bellows 30, the upper plate 34 is provided on the upper side of the groove portion 11, as shown in FIG. 7, on the contrary, the lower plate 35 is the groove portion ( 11), and the upper plate 34 is maintained in an upward state by the elastic force between the upper and lower plates 34 and 35 so that the valve is opened and closed without a separate pneumatic injection for opening and closing the valve. When the valve is shut off, the compressed air is injected through the upper air inlet hole H1 to lower the upper plate 34, and at this time, flows into the lower side of the groove part 11 through the lower vent hole H3. Air is naturally discharged to the outside. Due to the downward of the upper plate 34, the rod 50 may be downwardly modified so as to block the valve.

Here, when the upper plate 34 is downward, the vent hole (H3) for discharging the inner air to the outside is provided on the bottom surface of the groove 11 to facilitate the distribution of the internal air, thereby opening and closing the valve The compressed air inlet for the injection of the compressed air for lowering the upper plate 34 by only the air inlet hole (H1) without the need to separate the valve is blocked, when the injection of compressed air is blocked the upper and lower plates (34) By the elastic force between the 35, the upper plate 34 is up to take the structure that the flow path is automatically distributed.

Therefore, the present invention is a means for preventing the leakage of the fluid / gas flowing into the flow path (A1, A2) by welding (G) or integrally manufactured to the upper and lower bodies 10, 20 to prevent leakage, In addition, the first and second bellows (30, 40) are provided on the upper and lower sides, respectively, to prevent the leakage of compressed air and fluid / gas in and out, the first without the use of gaskets and packing and O-ring And a combination of the second bellows (30, 40) to constitute an actuator that can slide without leakage inside and outside.

On the other hand, although it is specified that it is used in a high temperature environment as an exemplary embodiment of the present invention, this may be applied to a high vacuum environment that requires confidentiality as an example.

By using the double bellows seal actuator high temperature and high vacuum valve of the present invention constructed and acting as described above, the gap between the flow path part and the driving part is minimized to reduce the size of the entire valve and maintain the airtightness such as gasket, packing and O-ring. There is an advantage that can be installed directly in the high temperature work by using only a heat-resistant material without the use of the member, there is an effect of increasing the bidirectional airtightness between the valve outer surface and the drive unit and the flow path through the double bellows.

In addition, it is easy to install by allowing the inflow and outflow of fluid / gas to any one side of the flow path, and there is no heat deformation due to the high temperature by using a ceramic ball applicable to high temperature work as a sealing means. There is an effect that can achieve the purpose of blocking and opening and closing.

Although the present invention has been described in connection with the above-mentioned preferred embodiments, it will be readily apparent to those skilled in the art that various other modifications and variations can be made without departing from the spirit and scope of the invention. It is obvious that all modifications belong to the appended claims.

Claims (7)

A flow path part including flow paths A1 and A2 having a predetermined size on the left and right sides, opening and closing means for opening and closing the flow paths A1 and A2, and a driving part for operating the opening and closing means and an operation between the flow path part and the driving part. And a bellows seal valve having a bellows for maintaining airtightness, the bellows seal valve comprising: upper and lower bodies (10,20) having a driving portion at an upper side and a flow passage portion at a lower side thereof; A groove portion 11 having an upper surface of the upper body 10 opened to have a predetermined width and depth inwardly; A through hole 12 penetratingly formed at a predetermined size on a lower surface of the center side of the groove 11 and having a downward length; A first bellows (30) fixed to an upper side of the groove part (11) and vertically flowing downward at a predetermined depth; A second bellows (40) fixed to the bottom of the groove (11) and interpolated to the through hole (12) by a predetermined depth and flowing up and down by a predetermined width; A rod (50) having an upper end fixed to the first bellows (30) and having a downward length through the center side of the second bellows (40) and having a sealing means (51) at the lower end; A seat 60 provided between the flow paths A1 and A2 of the lower body 20 to form a hole 61 having a predetermined size; A cover 70 having a predetermined size covering an upper surface of the upper body 10; Double bellows seal actuator high temperature and high vacuum valve, characterized in that composed of the air inlet holes (H1, H2) provided in the cover (70) and the groove portion (11), respectively. According to claim 1, The first bellows (30), The upper plate (31) is fixed to the upper step (13A) of the groove portion 11 and the opening hole (31A) of a predetermined size is formed in the center side; The groove 11 is provided to be moved up and down inside, and the coupling hole 33 of a predetermined size is formed in the center side is composed of a lower plate 32 that is coupled to the upper end of the rod 50 Bellows-Sealed Actuator Valves for high temperature and high vacuum. A flow path part including flow paths A1 and A2 having a predetermined size on the left and right sides, opening and closing means for opening and closing the flow paths A1 and A2, and a driving part for operating the opening and closing means and an operation between the flow path part and the driving part. And a bellows seal valve having a bellows for maintaining airtightness, the bellows seal valve comprising: upper and lower bodies (10,20) having a driving portion at an upper side and a flow passage portion at a lower side thereof; A groove portion 11 having an upper surface of the upper body 10 opened to have a predetermined width and depth inwardly; A through hole 12 penetratingly formed at a predetermined size on a lower surface of the center side of the groove 11 and having a downward length; The upper plate 34 is inserted into the groove 11 and flows up and down, and the lower plate 35 is fixed to the bottom of the groove 11 to form an opening hole 34A in the center side. A first bellows (30); A second bellows (40) fixed to the bottom of the groove (11) and interpolated to the through hole (12) by a predetermined depth and flowing up and down by a predetermined width; A rod having an upper end fixed to the upper plate 34 of the first bellows 30 and having a downward length passing through the center side of the second bellows 40 and having a sealing means 51 at the lower end thereof. 50; A seat 60 provided between the flow paths A1 and A2 of the lower body 20 to form a hole 61 having a predetermined size; A cover 70 having a predetermined size covering an upper surface of the upper body 10; Double bellows chamber actuator high temperature and high dust, characterized in that it comprises an air inlet hole (H1) provided in each of the cover 70, and the ventilation hole (H3) provided in the bottom surface of the groove portion 11 and penetrates to the outside Shared valve. According to claim 1, The second bellows (40), the through-hole 40A of a predetermined size for allowing the rod 50 is inserted into the upper and lower flow in the center side is formed, the lower step of the groove portion 11 An upper plate 41 fixed to 13B; It is inserted into the through hole 12 of the upper body 10 and flows up and down, the lower end of the lower plate 42 is integrally or tightly fixed to the sealing means 51 of the rod 50, The double bellows characterized in that the rod 50 having an upward length at the center of the upper surface of the sealing means 51 is inserted into the through hole 40A of the upper plate 41 and then protrudes a predetermined length upward. Seal actuator Valves for high temperature and high vacuum. The method of claim 1, wherein the sealing means 51 has a downward length having a predetermined length on both sides of the lower end of the rod 50, a stepped 52A of a predetermined width is formed in the inner side facing each other at the lower end A ball lift 52 provided with at least two; A ball B positioned between the ball lifts 52 and being lifted up / down by the step 52A; Double formed by forming a predetermined number of grooves (62) on the upper surface of the seat 60 of the lower body 20, the ball lifter (52) is coupled to the upper and lower conveying guides Bellows-Sealed Actuator Valves for high temperature and high vacuum. The method of claim 1, wherein the sealing means (51) is provided at the lower end of the rod 50, the metal plate 54 having a predetermined surface, and the metal plate fixing portion (54A) for fixing the metal plate 54 And a seating surface having a predetermined width in which the metal plate 54 is in contact with an upper surface of the seat 60. A double bellows seal actuator valve for high temperature and high vacuum. 6. The double bellows seal actuator high temperature and high vacuum valve according to claim 5, wherein the ball (B) is made of ceramic material.

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