KR100646944B1 - Mothod for trensfering tray that remove to chamber - Google Patents

Abstract

The present invention relates to a tray to be transferred to a chamber, and more particularly to a transfer method of a tray which is transferred to a chamber to be temporarily transferred to a selected chamber so that a predetermined work is performed.

According to the present invention, a plurality of chamber internal conditions up to the chamber n to which the tray is to be transferred are detected by the controller, the gates of the chambers are collectively opened based on the detected data, and the tray is temporarily transferred to the chamber n. The gates of the chambers are made closed.

According to the present invention, the chambers up to chamber n for the operation of the tray are collectively opened so that the time for transferring the tray to the chamber n for the operation is significantly shortened, and the stopper installed in each chamber passed while the tray is transported The operation is stopped so that the stop of the tray by this stopper is eliminated so that the feed speed of the tray can be maintained continuously.

 Board, Mask, Tray, Chamber

Description

Method for transporting tray to chamber {Mothod for trensfering tray that remove to chamber}             

1 is a flowchart illustrating a method of transferring a tray to a chamber according to a preferred embodiment of the present invention.

FIG. 2 is a flowchart of determining whether the internal conditions of the chamber for conveying the tray are met by the controller of FIG. 1;

3 is a flowchart differently illustrated to describe FIG. 2;

4 is a flowchart illustrating a method of transferring a tray to a chamber according to another embodiment of the present invention.

5 is a flowchart illustrating a method of transferring a tray to a chamber according to another embodiment of the present invention.

The present invention relates to a transfer method of a tray, and more particularly, to a transfer method of a tray to be transferred to a chamber in which the tray can be temporarily transferred to a selected chamber.

In general, an electroluminescent display device, which is one of flat panel displays, is classified into an inorganic electroluminescent display device and an organic electroluminescent display device according to a material used as a light emitting layer, and the organic electroluminescent display device can be driven at low voltage and is light in weight. It is attracting attention because of its thinness and wide viewing angle as well as fast response speed.

The organic light emitting device of the organic light emitting display device includes an anode, an organic material layer, and a cathode that are stacked on a substrate. The organic material layer includes an organic material layer of an organic light emitting layer that recombines holes and electrons to form excitons and emits light, and also between the cathode and the organic light emitting layer to smoothly transport holes and electrons to the organic light emitting layer to improve luminous efficiency. The organic material layer of the hole injection layer and the electron transport layer is interposed between the anode and the organic light emitting layer while interposing the organic material layer of the electron injection layer and the electron transport layer.

The organic light emitting device having the above-described structure is generally manufactured by a physical vapor deposition method such as a vacuum deposition method, an ion plating method and a sputtering method or a chemical vapor deposition method by a gas reaction. In particular, in order to form the organic material layer of the organic EL device, a vacuum deposition method in which an organic vapor material formed by evaporating an organic material in a vacuum chamber is sprayed from a deposition source and deposited on a substrate is widely used.

Recently, in response to the increase in size of the display, the size of the substrate has been enlarged, and in order to deposit the organic material layer on such a large substrate, a deposition system has been developed in which an evaporation source is sprayed while vertically moving up and down in a vacuum chamber.

Such a deposition system is provided with a drive shaft for moving the deposition source in the vertical direction, and the drive shaft is rotated by the drive means. Due to the axial rotation of the drive shaft, the deposition source injects the organic vapor material formed by evaporating the organic material while moving in the vertical vertical direction.

In addition, a vertical alignment system has been studied in which the substrate and the mask are aligned in a granular state so that a warp phenomenon of the substrate is removed while the substrate coated with the material sprayed from the evaporator is large.

The substrate tray holder installed reciprocally to be fixed in the granular state requires a holder plate disposed in the same shape as the substrate tray while the fastening member is fastened to the substrate.

In addition, in order to maintain the granularity between the substrate and the mask, a substrate tray and a mask tray, which are transferred to the granularity while the substrate and the mask are fixed, are required, and the tray is transferred to a predetermined vacuum chamber to perform a selected process.

At this time, research on an optimal method for transferring the tray to a predetermined vacuum chamber is required.

Hereinafter, the opening and closing by the gate of the chamber will be described as opening and closing of the chamber for convenience.

On the other hand, the internal conditions of the chamber refers to the conditions of various environments inside the chamber in which the tray can be accommodated.

In the present invention devised in view of the above problems, a plurality of chamber internal conditions to the chamber n to which the tray is to be transferred is detected by the control unit so that the gates of the chambers are opened in a batch, and the tray is temporarily moved to the chamber n. By being able to be transported, the trays are transported to the chamber which is shortened by the stopper installed in each chamber while the trays are transported to the chamber n for the work, which is significantly shortened. The purpose is to provide a transport method of.

The transfer method of the tray to be transferred to the chamber according to the present invention for achieving the above object, of the vacuum chamber passed to any one of the vacuum chamber selected from the plurality of vacuum chambers are arranged so that the trays waiting in the waiting room to communicate with each other. The control unit detects the condition; (S10) If the output data in the detection step is normal, the tray is temporarily transferred to the selected vacuum chamber; (S20) is provided.

The chamber passed in the moving step is opened collectively for the transfer of the tray.

The chamber passed in the moving step is sequentially opened according to the transfer position of the tray.

The chambers are closed in batches or sequentially.

Hereinafter, a transfer method of a tray to be transferred to a chamber according to the present invention will be described in detail with reference to the accompanying drawings.

1 is a flowchart illustrating a method of transferring a tray to a chamber according to a preferred embodiment of the present invention, and FIG. 2 is a flowchart of determining whether or not the internal conditions of a chamber for transferring a tray are determined by the controller of FIG. 1. 3 is a flowchart differently illustrated for explaining FIG. 1.

In the tray transfer method according to the present invention, when the tray to be transported to the chamber n for operation enters the waiting room (S0), it is determined whether the tray is suitably suited for the internal conditions of the chamber from the chamber 1 to the chamber n (S10). If this determination is appropriate, the chamber 1 to chamber n are temporarily opened S 12, and the tray of the waiting room is transferred to the chamber n without stopping (S20). Chamber 1 to chamber n are closed (S22).

Naturally, the determination of whether the internal conditions of the chamber are suitable (S10) is naturally made in the controller.

In addition, the chamber S22 is closed when the tray enters the chamber n (S20).

On the other hand, the opening of the chamber (S11) may be made sequentially according to the feed rate and the transfer position of the tray, and also the closing of the chamber (S22) may be made sequentially according to the feed rate and the transfer position of the tray.

At this time, the opening and closing of the chamber (S12, S22) sequentially made of course should be made so that the tray to be transported to maintain a predetermined transfer speed.

In addition, during the determination of the internal condition from the chamber 1 to the chamber n (S10), if the internal condition of any one chamber is determined to be inadequate by the control unit, the chamber 1 to the chamber n are all kept closed, The tray is kept in the waiting state S0 in the waiting room.

2, the substrate tray or the mask tray enters the vacuum chamber in the standby state, and the control unit determines whether the tray chamber is suitable for the tray entry condition or not.

On the other hand, as shown in the flow chart of Figure 4, when the internal condition of any one chamber by the control unit is determined to be inadequate (S10), the chambers before the chamber 1 to the non-conformity is opened, the tray of the waiting room is There is another method of temporarily transferring to the entire chamber of the chamber in which the non-compliance is determined.

On the other hand, while the trays are passed through a plurality of chambers which are selectively communicatively arranged and transported to the chamber n selected for the work, the stopper installed in each chamber passed through adheres to the initial position which does not interfere with the tray, The stopper installed in n is shifted to the stop position so as to interfere with the tray so as to prevent overfeeding while detecting the entry of the tray.

A separate device including a sensor or the like may be further installed in a stopper or a separate place so as to determine the transfer speed and the transfer position of the tray, and which chamber passes.

On the other hand, according to another embodiment of the present invention shown in FIG. 5, in the state where the tray enters the waiting room and waits first, the controller first determines whether the tray entry condition is appropriate or not suitable for the inside of the chamber 1 (s10). If it is determined that it is suitable to determine whether or not the next step to the internal condition of the chamber 2 (s20), and when the non-conformance judges the internal condition of the chamber 1 (s10).

In addition, the controller determines the internal condition of the chamber 2 in the same manner as the determination of the internal condition of the chamber 1 (s10) (s20), and thus iterative determination (sn) is made to the chamber n.

In the conventional tray transfer method under the judgment of the controller 1 to n for the internal conditions of the chambers 1 to n, as shown in FIG. 2, the controller controls the internal conditions of the chamber with respect to the chamber to which the tray is to enter. Judgment is made, and based on this, the tray enters a chamber judged to be suitable.

In more detail, in order to transfer the tray to the chamber n (n) for the work, the control unit detects the internal condition of the chamber 1 in the waiting state of the tray (s0), and when the determination of the conformity (s10) is made As the gate of the chamber 1 is operated and the chamber 1 is opened S 12, the tray enters the chamber 1 (s12). When the tray is completely entered, the gate of the chamber 1 is reactivated and the chamber 1 is closed (s13).

In order for the tray accommodated in the chamber 1 to enter the chamber 2 which is the next chamber, when the control unit detects the internal condition of the chamber 2 and the suitable judgment is made (s20), the chamber 2 is opened (s21) and the tray enters the chamber 2 ( s22), the chamber 2 is closed (s23) when the tray is fully entered.

In this step, the tray is sequentially passed through the chamber and received in the desired chamber n (sn3).

In addition, when the tray enters each chamber, it is completely stopped. For this purpose, a stopper is installed and operated at a stop position of the tray, and when the tray is moved to the next chamber, the stopper is returned to its original position.

Hereinafter, the operation of the transfer method of the tray to be transferred to the chamber according to the present invention will be briefly described.

First, when the tray waits in the waiting room (S0), the chamber internal conditions from the chamber 1 to the chamber n are determined by the control unit S (10). Is open (S11), the tray is temporarily transferred (S20) to the chamber n.

When the tray is accommodated in the chamber n, all the open chambers are closed (S20).

At this time, opening and closing of the chambers 1 to n (S12, S22) is made in a batch or sequentially made according to the feed rate and the transfer position of the tray. Of course, the feed speed of the tray is maintained.

In addition, the stopper installed in each chamber through which the tray is passed is in a state where its operation is stopped.

According to the present invention configured as described above, the chambers up to chamber n for the operation of the tray are collectively opened to significantly shorten the time for the tray to be transferred to the chamber n for the operation, and each chamber passed while the tray is being transferred. The stopper installed in the stopper is stopped and the stop of the tray by this stopper is excluded, and the feed speed of the tray can be maintained continuously.

Claims (4)

Detecting, by the controller, an internal condition of the plurality of vacuum chambers passing through the selected one of the plurality of vacuum chambers arranged so that the trays waiting in the waiting room communicate with each other; (S10) A transfer step in which the tray is temporarily transferred to the selected vacuum chamber when the output data in the detection step is normal; (S20) Transfer method of the tray to be transferred to the chamber is provided. The method of claim 1, The gate of the chamber passed in the transfer step is a batch opening for the transfer of the tray (S12); The transfer method of the tray to be transferred to the chamber, characterized in that. The method of claim 1, And a gate of the chamber that is passed in the transfer step is sequentially opened according to the transfer position of the tray (S12). The method according to claim 2 or 3, The gate of the chamber is closed or sequentially closed in accordance with the transfer position of the batch or tray (S22); Transfer method of the tray to be transferred to the chamber, characterized in that.

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