KR100632936B1 - A environmental monitor system and a method for analyzing environment using thereof - Google Patents

Abstract

The present invention relates to an environmental monitoring system for monitoring the surrounding environment and an environmental analysis method using the same, wherein the period and amplitude of the data sensed by the environmental monitoring system are analyzed using a Fourier transform, and the periodic tendency of the analyzed data is analyzed. The present invention relates to an environmental monitoring system for analyzing the surrounding environment, the state of the environmental system and the environmental monitoring system, and an environmental analysis method using the same. The environmental analysis method not only outputs data monitoring the change of the surrounding environment, but also analyzes the cause of the surrounding environment by analyzing it, and based on this, predicts the change of the surrounding environment and removes the cause of the change. do. In this way, by analyzing data indicative of changes in the surrounding environment, finding the cause, predicting the change in the surrounding environment, and removing the cause of the change, the environment where a predetermined environment is required is maintained at the required level. .

Description

Environmental monitoring system and environmental analysis method using the same {A ENVIRONMENTAL MONITOR SYSTEM AND A METHOD FOR ANALYZING ENVIRONMENT USING THEREOF}

1 is a waveform diagram showing a change in data sensed by a general environmental monitoring system;

2 is a block diagram showing the configuration of an environmental monitoring system according to the present invention;

3 is a flowchart showing an environmental analysis method using an environmental monitoring system according to the present invention;

4 is a flow chart showing a subroutine of the analyzing step of FIG. 3;

5 is a waveform diagram showing a change in data converted by the environmental monitoring system according to the present invention.

The present invention relates to an environmental monitoring system and an environmental analysis method using the same. More particularly, the present invention relates to an environmental monitoring system for analyzing a change in an environment or an environmental system and a change in an environmental monitoring system and an environmental analysis method using the same.

In general, an environmental monitoring system (EMS) is operated based on data of various sensors and analytical equipment, and the results monitored by the data are plotted with graphs and maps (such as the waveform of FIG. 1). The status of the surrounding environment can be reported by outputting a map, a report, an alarm, or the like.

Therefore, when trying to analyze such a change in the state of the surrounding environment, there was a significant inconvenience of analyzing such data using another program not used in the environmental monitoring system. In addition, the alarm function is set to operate only when the threshold level or more set by the user is exceeded. As a result, even if a sudden change, a change that is not visually recognized, or a change due to an abnormality of the environmental monitoring system occurs, the environmental monitoring system does not detect the change unless the change exceeds a predetermined boundary, so that the operator There were problems such as the lack of immediate recognition of these changes and the inability to take immediate action against them.

Accordingly, it is an object of the present invention to provide an environmental monitoring system and an environmental analysis method using the same, which can analyze and prevent the causes of abnormalities in the environment or the environmental system and the environmental monitoring system.

According to one feature for achieving the above object, an environmental analysis method using an environmental monitoring system according to the present invention comprises the steps of: inputting a sensing signal to the main monitoring system; Storing sensing data corresponding to the sensing signal in a corresponding area of a storage unit of the main monitoring system; Analyzing the sensing data stored in the storage; Selectively outputting one of the sensing data and the determination data determined in the analyzing step to the outside. The analyzing may include determining whether to analyze sensing data, selecting one of a plurality of sensing data according to the determination result, setting a collected period of the selected sensing data, and Analyzing the sensing data, determining the cause of the error of the sensing data using the analysis data analyzed in the analyzing step, and storing the determination data determined in the determining step in the storage unit. .

According to another feature of the invention, the environmental monitoring system according to the present invention includes a sensing system for sensing the state of the surrounding environment and converts it into an electrical signal; A main monitoring system which receives electrical signals from the sensing system, stores them and outputs them; An output unit for outputting the electrical signal from the main monitoring system to the outside, the main monitoring system includes an input interface unit for converting the electrical signal from the sensing system into a digital signal, a storage unit for storing the digital signal; A main control unit for receiving the digital signal from the input interface unit and the digital signal from the storage unit, processing the same and storing the digital signal from the storage unit, and outputting the digital signal from the main control unit; The main controller includes an analyzer for analyzing the cause of the change in the digital signal of the time band stored in the storage.

Such an apparatus and method analyzes changes in the surrounding environment to find the cause of the transformation, predicts changes in the surrounding environment, and eliminates the causes of the change, thereby requiring an environment where a certain environment needs to be maintained. Is maintained at the level.

(Example)

Hereinafter, reference will be described in detail with reference to FIGS. 2 to 5 according to a preferred embodiment of the present invention.

Referring to FIG. 3, an environmental monitoring system and an environmental analysis method using the same may include inputting a sensing signal (S10), storing sensing data (S30), analyzing sensing data (S50), and And outputting one of the sensing data and the determination data to the outside (S70). In the step S10, the sensing signal detected by the sensing system of the environmental monitoring system is input to the main monitoring system. In step S30, sensing data corresponding to the sensing signal is stored in a corresponding area of the storage unit of the main monitoring system. In step S50, the sensing data stored in the storage unit is analyzed through a predetermined tool. In step S70, one of the sensing data and the determination data determined in the analysis step is selectively output to the outside. In this way, the environment monitoring system is used to analyze data indicative of changes in the surrounding environment to find the cause, to predict the change in the surrounding environment, and to remove the cause of the change, thereby creating an environment where a certain environment needs to be maintained. Maintained at the required level.

Referring to FIG. 2, the environmental monitoring system according to the present invention includes a sensing system 100, a main monitoring system 200, and an output system 300. On the other hand, as a monitoring system for analyzing the environment in the semiconductor manufacturing process, there is a FMS (Facility Monitoring System), LMS (Lighthouse Monitoring System), EMS (Environmental Monitoring System), etc. In the present invention, an example of an environmental monitoring system (EMS) It demonstrates only to. Fast Fourier Transform (FFT) is used as a tool for analyzing data measured by the environmental monitoring system.

The sensing system 100 includes sensors such as a temperature sensor 110, a humidity sensor 120, an air pollution sensor 130, and an optical sensor 140. The main monitoring system 200 includes a sensor interface circuit 210, a main controller 220, a storage 230, and an output interface circuit 240. The main controller 220 includes an analyzer 221 for analyzing the sensing data (S_DATA). The output system 300 includes output devices such as a printer 310, a monitor 320, a meter 330, and an alarm 340.

2 to 5, the environmental analysis method using the environmental monitoring system according to the present invention includes the steps of inputting a sensing signal (S10), storing the sensing data (S30), and analyzing the sensing data (S50). And outputting one of the sensing data and the determination data to the outside (S70). In the step S10, the sensing system 100 in the environmental monitoring system of FIG. 2 senses the state of the surrounding environment, converts it into an electrical signal, and provides it to the main monitoring system 200. In the step S30, the sensor interface circuit 210 of the main monitoring system 200 converts the sensing signals SENSE1, SENSE2, SENSE3, and SENSE4 (sensing signals) from the sensing system 100 into digital signals. Provides (S_DATA) to the main control unit 220. The main controller 220 stores the sensing data S_DATA from the sensor interface circuit 210 at a corresponding address of the storage 230.

In the step S50, the main controller 220 reads and analyzes the sensing data S_DATA stored in the storage 230. This step (S50) is a step (S51) for determining whether to analyze the sensing data (S_DATA) as shown in Figure 4, selecting the sensing data (S_DATA) (S53), setting the analysis period of the sensing data (S_DATA) In step S55, analyzing the sensing data S_DATA in step S57, determining the cause of the environment change using the analysis data A_DATA in step S59, and judgment data J_DATA; The storage is performed in the order of step S61. In step S51, the main controller 220 determines whether to analyze the sensing data S_DATA stored in the storage 230. If the main controller 220 does not analyze the sensing data S_DATA stored in the storage 230 in step S51, step S70 is performed. When the main controller 220 analyzes the sensing data S_DATA, the step S53 is performed.

In the step S53, the main controller 220 selects which data of sensing data (for example, temperature data, humidity data, air pollution data, etc.) stored in the storage 230 is to be analyzed. to be. When the step S53 is performed, an analysis period of the sensing data S_DATA is set in the step S53. That is, the analyzer 221 of the main controller 220 determines the sensing start point and the end point of the sensing data S_DATA. When the period of the sensing data S_DATA is set, the analyzer 221 of the main controller 220 may select the sensing data S_DATA selected from the sensing data S_DATA stored in the storage 230 in step S57. Analyze At this time, there may be a number of tools (tool) used in the present invention, it will be described in detail only to the Fourier transform (fourier transform). The analyzer 221 analyzes the sensing data S_DATA using a Fourier transform.

First, referring to the waveform diagram of FIG. 1 before the Fourier transform, the sensing data S_DATA measured by the environmental monitoring system for a predetermined period (for example, one month, one year, etc.), that is, the sensing data Assuming that the function corresponding to (S_DATA) is 'y = 3sin (t) + 4sin (1/2) t + 2sin (15t) + sin (10t)', the sensing data S_DATA swings irregularly in the time domain. Appears in the form of a waveform. The shape of this waveform indicates the change of environment from the required environmental reference (0). When the waveform of FIG. 1 is converted by using a Fourier transform, the waveform on the time domain of FIG. 1 is converted into a waveform on the frequency domain of FIG.

When the sensing data S_DATA for a predetermined period is transformed as shown in FIG. 5 by the Fourier transform in step S57, the analyzer 221 of FIG. 2 performs the sensing data S_DATA of FIG. 1 in step S59. Analysis of the analysis data A_DATA as shown in FIG. 5 determines the cause of change of the surrounding environment, that is, the sensing data S-DATA. In this case, the waveform having the highest peak value of the low frequency band of FIG. 5 is represented by '4sin (y = 3sin (t) + 4sin (1/2) t + 2sin (15t) + sin (10t))} in FIG. 1/2) t ', the waveform with the next highest peak represents' 3sint', the waveform with the highest peak in the high frequency range represents' 2sin15t 'and the waveform with the lowest peak represents' sin10t'. .

In general, a Fourier transform, in particular, a fast fourier transform (FFT), converts a periodic change of a waveform, that is, a waveform of a time band into a waveform of a frequency band, thereby analyzing the sensing data S_DATA. As a result, if the trend of the sensing data S_DATA converted by the Fourier transform is analyzed with a certain periodicity, it is determined that this is a change due to environmental factors. However, if the analyzed trend of the sensing data S_DATA is analyzed in an irregular or unexpected periodic tendency, it is determined that the environmental monitoring system is abnormal.

Therefore, in step S59, the change characteristics of the environment, the environmental system and the environmental monitoring system are identified by the change of the cycle of the analyzed sensing data S_DATA, and the cause of the abnormality of the environmental system and the environmental monitoring system. Can be judged.

For example, suppose that the concentration of ozone is analyzed using an environmental monitoring system. The ozone concentration is monitored as a function of time using an environmental monitoring system, and the monitored data is monitored for Fourier transformation. By analyzing them, the change in ozone concentration can be divided into change due to environmental factors and change due to environmental system, so that the state of surrounding environment, environmental system and environmental monitoring system can be known.

The method of analyzing the change of ozone is to find a factor that changes the ozone concentration. This factor is determined by the period in which ozone has the greatest change, which can be as short as 24 hours (or 12 hours) and largely as a year. Therefore, the sensing data S_DATA generally measured by such a result is analyzed by the Fourier transform, so that the state of the environmental system can be easily understood. As a result of the ozone concentration measured as described above, it is possible to change the centralized management and management method of the environmental system through the prediction of the future ozone concentration.

In addition, assuming that the temperature of the semiconductor manufacturing environment is analyzed using an environmental monitoring system, the change in temperature is monitored as a function of time using the environmental monitoring system, and the monitored sensing data S_DATA is subjected to Fourier transformation. By analyzing by using, it is possible to check the state of the environmental system and the environmental monitoring system by separating the change of temperature into the change caused by environmental factors, the change caused by the abnormality of the environmental system, and the change caused by the environmental monitoring system. Thus, such a change in temperature is analyzed as a Fourier transform, whereby the temperature is used as a monitoring element of the environmental system.

The method for monitoring the change in temperature is as follows. For example, assuming that the semiconductor clean room temperature is constantly controlled at 23 ° C. (± 0.5 ° C. or less) and analyzed using an environmental monitoring system, the temperature of the clean room for a certain period of time is measured and then the temperature is measured. The sensing data S_DATA representing the change is transformed into a waveform of a frequency band by using a Fourier transform. In this way, the change cycle for the temperature change is managed to facilitate the management of the environmental system that maintains the temperature of the clean room and the environmental monitoring system that monitors it. The temperature change, which is the management factor, is detected by the Fourier transform, and thus the coolant inflection point, the day and night temperature change, the shift period (equipment operating cycle), the seasonal temperature change, the axial fan shift period, and the like are caused. Centralized management of the requirements and problem improvement may be proposed.

In this way, the environmental system and the environmental monitoring system can be managed by analyzing the change of the sensing data S_DATA from the environmental monitoring system. In addition, if the condition of the environmental system is analyzed through an analysis tool, more factors that can affect data from the environmental system can be classified according to importance (variation). In addition, it is determined that an abnormally floating waveform of about 10 minutes, for example, a short time that occurs during abnormality of the sensor and the analysis device among the waveforms in the environmental monitoring system, is an abnormality of the environmental monitoring system. In the event of such an equipment abnormality, the environmental monitoring system can be inspected to diagnose the abnormality of the system, thereby providing efficiency in terms of immediate response and prevention of failure.

When the cause of the abnormality of the surrounding environment, the environmental system and the environmental monitoring system is determined in step S59, the corresponding determination data J_DATA is output from the analyzer 221 of the main control unit 220 to store the storage unit 230. ) When step S59 ends, step S70 is performed. In operation S70, the main controller 220 selectively outputs one of the sensing data S_DATA and the determination data J_DATA stored in the storage 230 through the output interface 240. To provide. The output system 300 displays the sensing data S_DATA or the determination data J_DATA from the main system 200 by text or the like.

As described above, by analyzing the data indicating the change of the surrounding environment by using the environmental monitoring system, finding the cause and predicting the change of the surrounding environment to remove the cause of the change, The environment is maintained at the required level.

On the other hand, the present invention is not limited to the above-described specific embodiments and can be carried out by variously modified and modified within the scope and spirit of the present application.

As described above, the environmental monitoring system and the analysis method according to the present invention analyze the change of the surrounding environment to find the cause of the transformation and predict the change of the surrounding environment to remove the cause of the change, maintaining a predetermined environment The environment where it is needed is maintained at the required level.

Claims (3)

delete Inputting a sensing signal into a main monitoring system; Storing sensing data corresponding to the sensing signal in a corresponding area of a storage unit of the main monitoring system; Analyzing the sensing data stored in the storage; Selectively outputting one of the sensing data and the determination data determined in the analyzing step to the outside; The analyzing step, Determining whether to analyze the sensing data; Selecting one of a plurality of sensing data according to the determination result; Setting a collected period of the selected sensing data; Analyzing the sensing data; Determining the cause of the error of the sensing data using the analysis data analyzed in the analyzing step, And storing the determination data determined in the determination step in the storage unit. delete

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