KR100625032B1 - Organic electroluminescent display device and manufacturing method thereof - Google Patents

Abstract

The present invention relates to an organic electroluminescent display device capable of reducing the resistance of the anode electrode and repairing the anode electrode, and a method of manufacturing the same.

The present invention is an anode electrode formed on the substrate spaced apart a predetermined interval; And an ion implantation layer in which a predetermined dopant is implanted into a substrate in a region overlapping with the anode electrode.

Description

Organic electroluminescent display device and manufacturing method thereof {Organic Electro-Luminescence Display Device And Fabricating Method Thereof}             

1 is a plan view schematically illustrating a conventional organic electroluminescent display device.

2A and 2B are cross-sectional views taken along the lines II ′ and II-II ′ of FIG. 1, respectively.

FIG. 3 is a cross-sectional view illustrating a case in which an anode is defective in FIG. 2B.

4 is a plan view schematically illustrating an organic electroluminescent display device according to an exemplary embodiment of the present invention.

5A and 5B are cross-sectional views taken along the lines III-III 'and IV-IV' shown in FIG.

FIG. 6 is a cross-sectional view illustrating a case in which the anode electrode is defective in FIG. 5B.

7A to 7D are cross-sectional views illustrating a method of manufacturing an ion implantation layer according to an exemplary embodiment of the present invention.

<Brief description of symbols for the main parts of the drawings>

2, 52: substrate 4, 54: anode electrode

6, 56: insulating film 8, 58: partition wall

10, 60: organic light emitting layer 12, 62: cathode electrode

24, 74: data driver 32, 82: scan driver

53: ion implantation layer

The present invention relates to an organic electroluminescent display device, and more particularly, to an organic electroluminescent display device capable of reducing the resistance of the anode electrode and repairing the anode electrode, and a method of manufacturing the same.

Recently, various flat panel displays have been developed to reduce weight and volume, which are disadvantages of cathode ray tubes. As flat panel displays, liquid crystal displays (hereinafter referred to as "LCDs"), field emission displays (FEDs), plasma display panels (hereinafter referred to as PDPs), and electroluminescence (Electro-luminescence: hereinafter referred to as "EL") There is a display element.

PDP is most advantageous for large screens because of its relatively simple structure and manufacturing process, but it has the disadvantages of low luminous efficiency, low luminance and high power consumption. LCD is mainly used as a display element of notebook computers, but the demand is increasing. However, the large screen is difficult and power consumption is large due to the backlight unit. In addition, LCD has a disadvantage of high light loss and a narrow viewing angle due to optical elements such as a polarizing filter, a prism sheet, and a diffusion plate. On the other hand, EL devices are classified into inorganic EL devices and organic EL devices according to the material of the light emitting layer. The EL devices are self-luminous devices that emit light by themselves and have advantages of fast response speed and high luminous efficiency, luminance, and viewing angle. Inorganic EL devices have higher power consumption and higher luminance than organic EL devices, and cannot emit various colors of R, G, and B. On the other hand, the organic EL element is driven at a low DC voltage of several tens of volts, has a fast response speed, high brightness, and emits various colors of R, G, and B, which is suitable for next-generation flat panel display devices.

1 is a plan view schematically showing a conventional organic EL display element.

Referring to Fig. 1, a conventional organic EL display device includes an anode electrode 4 and a cathode electrode 12 intersecting with each other, and an organic cell in which EL cells (not shown) are formed at each intersection and arranged in a matrix type. It has a display area A in which an image is realized when light is emitted.

In addition, the cathode electrode connected to the data pad part 24 and the cathode electrode 12 in which the data pad DP having a wider width than the anode electrode 4 in which the anode electrode 4 of the display area A is extended is formed. The non-display area B in which the scan pad part 32 in which the scan pad SP having a width wider than 12 is formed is provided.

The data pad unit 24 and the scan pad unit 32 may include a TCP (Tape Carrier Package) (not shown) mounted with a data driver (not shown) for generating a data signal and a scan driver (not shown) for generating a scan signal. Connected.

The data pad part 24 supplies a data signal supplied from the data driver to the anode electrode 4 to the corresponding anode electrode 4 through each data pad DP, and the scan pad part 32 is provided from the scan driver. The scan signal supplied to the cathode electrode 12 is supplied to the corresponding cathode electrode 12 through each scan pad SP.

2A and 2B are cross-sectional views taken along the lines II ′ and II-II ′ of FIG. 1, respectively.

2A and 2B, an organic EL display device includes an anode electrode 4 and a cathode electrode 12, an insulating film 6 having an opening on the anode electrode 4, an anode electrode 4, and a cathode. The organic light emitting layer 10 formed at each intersection of the electrodes 12 and the partition wall 8 for separating the organic light emitting layer 10 and the cathode electrode 12 are provided.

The anode electrode 4 is patterned by a photolithography process after depositing transparent conductive materials such as indium tin oxide (ITO), indium zinc oxide (IZO), and indium tin zinc oxide (ITZO) having good light transmittance of 90% or more. As a result, they are formed on the substrate 2 at regular intervals. Subsequently, an insulating material is deposited on the substrate 2 on which the anode electrode 4 is formed and then patterned by a photolithography process to form an insulating layer 6 having openings in each region where the organic light emitting layer 10 is to be formed. The partition 8 is formed on the insulating layer 6 to separate the organic light emitting layer 10 and the cathode electrode 12. The partition wall 8 is formed in a direction crossing the anode electrode 4 and has an inverted taper structure in which the upper end portion has a wider width than the lower end portion. On the substrate 2 on which the barrier rib 8 is formed, an organic light emitting material is deposited using a mask, and an organic light emitting layer 10 is formed. The cathode electrode 12 is subsequently formed through full deposition of an electrode material such as aluminum (Al). do.

The anode electrode 4 of the organic EL display device has a high resistance because it is formed of a transparent conductive material such as ITO, IZO, or ITZO, unlike the cathode electrode 12 using a low resistance metal such as aluminum (Al). For this reason, as the anode electrode 4 moves away from the data driver, a large current deviation occurs due to a voltage drop, and the organic EL display device has a problem in that image quality deteriorates.

In addition, as shown in FIG. 3, the organic EL display device has an anode electrode 4 in which a pattern defect occurs when a specific anode electrode 4 in the display area A is generated due to a process problem. Not only the EL cell directly connected to the control panel but also all the EL cells connected to the anode electrode 4 having a bad pattern cannot be driven.

Accordingly, an object of the present invention is to provide an organic electroluminescent display device capable of reducing the resistance of the anode electrode and repairing the anode electrode, and a method of manufacturing the same.

In order to achieve the above object, the organic electroluminescent display device according to an embodiment of the present invention is an anode electrode formed on the substrate at a predetermined interval apart; And an ion implantation layer in which a predetermined dopant is implanted into a substrate in a region overlapping with the anode electrode.

The dopant is any one of ions of a group 3 or 5 element.

A method of manufacturing an organic electroluminescent display device according to an embodiment of the present invention includes forming a photoresist pattern on a substrate; Injecting a predetermined dopant into the substrate using the photoresist pattern; Removing the photoresist pattern; And forming an anode on the region in which the dopant is implanted.

The dopant is any one of ions of a group 3 or 5 element.

Hereinafter, exemplary embodiments of the present invention will be described with reference to FIGS. 4 to 6E.

4 is a plan view schematically illustrating an organic EL display device according to an exemplary embodiment of the present invention.

Referring to FIG. 4, an organic EL display device according to an exemplary embodiment of the present invention includes an anode electrode 54 and a cathode electrode 62 crossing each other, and an EL cell formed at each intersection thereof and arranged in a matrix type (not shown). And a display area A in which an image is realized during organic light emission.

In addition, the cathode electrode connected to the data pad portion 74 and the cathode electrode 62 in which the data pad DP having a wider width than the anode electrode 54 in the display area A is formed is extended. The non-display area B in which the scan pad portion 82 in which the scan pad SP having a width wider than 62 is formed is provided.

The data pad unit 74 and the scan pad unit 82 may include a tape carrier package (TCP) mounted with a data driver (not shown) for generating a data signal and a scan driver (not shown) for generating a scan signal. Connected.

The data pad unit 74 supplies a data signal supplied from the data driver to the anode electrode 54 to the corresponding anode electrode 54 through each data pad DP, and the scan pad 82 is provided from the scan driver. The scan signal supplied to the cathode electrode 62 is supplied to the corresponding cathode electrode 62 through each scan pad SP.

5A and 5B are cross-sectional views taken along the lines III-III 'and IV-IV' shown in FIG.

5A and 5B, an organic EL display device includes a substrate in which an ion implantation layer 53 having semiconductor characteristics and an ion implantation layer 53 are formed through implantation of dopant ions into the substrate 52. An anode electrode 54 formed on the anode 52, a cathode electrode 62 formed in the direction crossing the anode electrode 54, an insulating film 56 having an opening on the anode electrode 54, and an anode electrode An organic light emitting layer 60 formed at each intersection of the 54 and the cathode electrode 62, and a partition 58 for separating the organic light emitting layer 60 and the cathode electrode 62 are provided.

The ion implantation layer 53 is formed by selectively implanting dopant ions through a photoresist pattern into the substrate 52 corresponding to the region where the anode electrode 54 is to be formed. On the substrate 52 on which the ion implantation layer 53 is formed, the anode electrode 54 is transparently deposited with a transparent conductive material such as ITO, IZO, ITZO having good light transmittance of 90% or more, and then patterned by a photolithography process. It is formed spaced apart. Subsequently, an insulating material is entirely deposited on the substrate 52 on which the anode electrode 54 is formed, and then patterned by a photolithography process to form an insulating layer 56 having an opening in each region where the organic light emitting layer 60 is to be formed. A partition wall 58 is formed on the insulating layer 56 to separate the organic light emitting layer 60 and the cathode electrode 62. The partition wall 58 is formed in a direction crossing the anode electrode 54 and has an inverted taper structure in which the upper end portion has a wider width than the lower end portion. On the substrate 52 on which the barrier wall 58 is formed, an organic light emitting material is deposited using a mask, and an organic light emitting layer 60 is formed, and a cathode electrode 62 is subsequently formed through full deposition of an electrode material such as aluminum (Al). do.

As a result, an ion implantation layer 53 having semiconductor characteristics through ion implantation is formed on the substrate 52 corresponding to the region where the anode electrode 54 is to be formed, so that the anode electrode 54 is formed of ITO, IZO, ITZO, or the like. High resistance due to the formation of transparent conductive materials is compensated for.

In addition, when the anode electrode 54 becomes a pattern defect E as shown in FIG. 6 due to a process problem, a repair through the ion implantation layer 53 formed on the lower substrate 52 of the anode electrode 54 is performed. This makes it possible to drive all the EL cells connected to the anode electrode 54 which has become a pattern defect.

7A through 7D are cross-sectional views illustrating a method of manufacturing an ion implantation layer formed on a substrate in a region overlapping with an anode electrode according to an exemplary embodiment of the present invention.

Referring to FIG. 7A, a photoresist is coated on the substrate 52 through a photoresist coating method such as spin coating, dipping coating, and roller coating. Thereafter, a photoresist is exposed, developed, and etched using a mask having an opening in a space where an anode electrode (not shown) is to be formed, and as shown in FIG. 7B, an area where the anode electrode is to be formed, that is, ions are implanted. The photoresist is patterned to have openings in the spaces to be formed. Then, as shown in FIG. 7C, the dopant is accelerated toward the substrate 52 by accelerating the dopant ions selectively activated in the region where the anode electrode is to be formed through the photoresist pattern on the substrate 52. Implant ions. At this time, the ion implantation implants ions into the substrate 52 by supplying energy of 500 keV or more and current of 1 mA or more. Dopant ions may be any of the ions or anions corresponding to group 3 or 5 of the periodic table that can be used in the semiconductor process. Thereafter, the ion implantation layer 53 is formed through some degree of ion implantation through implantation of dopant ions, and when the photoresist is removed, the ion implantation layer 53 is formed on the substrate 52 as shown in FIG. 7D.

As described above, the organic EL display device according to the present invention has a high resistance due to the anode electrode formed of a transparent conductive material such as ITO, IZO, ITZO by forming an ion implantation layer having semiconductor characteristics through ion implantation under the anode electrode. Will be compensated. In addition, when the anode is poor in pattern due to a process problem, it is possible to repair the anode through the ion implantation layer formed under the anode, thereby driving all the EL cells connected to the anode having a bad pattern.

Those skilled in the art will appreciate that various changes and modifications can be made without departing from the technical spirit of the present invention. Therefore, the technical scope of the present invention should not be limited to the contents described in the detailed description of the specification but should be defined by the claims.

Claims (4)

An anode formed on the substrate at predetermined intervals; And an ion implantation layer in which a predetermined dopant is implanted into a substrate in a region overlapping with the anode electrode. The method of claim 1, And the dopant is any one of ions of a group 3 or group 5 element. Forming a photoresist pattern on the substrate; Injecting a predetermined dopant into the substrate using the photoresist pattern; Removing the photoresist pattern; And forming an anode on the region in which the dopant is implanted. The method of claim 3, wherein The dopant is a method of manufacturing an organic electroluminescent display device, characterized in that any one of the ions of Group 3 or Group 5 elements.

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