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KR100580389B1 - LCD panel manufacturing method - Google Patents

LCD panel manufacturing method Download PDF

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Publication number
KR100580389B1
KR100580389B1 KR1019980039640A KR19980039640A KR100580389B1 KR 100580389 B1 KR100580389 B1 KR 100580389B1 KR 1019980039640 A KR1019980039640 A KR 1019980039640A KR 19980039640 A KR19980039640 A KR 19980039640A KR 100580389 B1 KR100580389 B1 KR 100580389B1
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metal film
film pattern
shorting bar
liquid crystal
crystal display
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KR20000020850A (en
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오병욱
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삼성전자주식회사
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1345Conductors connecting electrodes to cell terminals
    • G02F1/13458Terminal pads
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362Active matrix addressed cells
    • G02F1/136259Repairing; Defects
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362Active matrix addressed cells
    • G02F1/136286Wiring, e.g. gate line, drain line
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/441Interconnections, e.g. scanning lines

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Liquid Crystal (AREA)

Abstract

본 발명은 액정 표시 장치 패널의 제조 방법을 개시한다. 이러한 액정 표시 장치 패널의 제조 방법은 게이트 라인 패드와 쇼팅바 사이 및 데이터 라인 패드와 쇼팅바 사이에 금속막 패턴을 형성하고, 후속 공정에서 금속막 패턴을 기준으로 쇼팅바를 연마하여 커팅하는 것을 특징으로 한다. 금속막 패턴은 게이트 라인 패드 형성시 데이터 금속막 패턴을 형성하고, 데이터 라인 패드 형성시 게이트 금속막 패턴을 형성한다. 각 금속막 패턴은 쇼팅바와 평행하게 형성된다. 따라서 금속막 패턴을 기준으로 쇼팅바를 연마하여 커팅함으로서, 최적의 상태로 연마가 가능하고 연마 상태를 하나하나 확인하지 않아도 되기 때문에 연마 작업 시간이 단축된다.The present invention discloses a method of manufacturing a liquid crystal display panel. The manufacturing method of the liquid crystal display panel includes forming a metal film pattern between the gate line pad and the shorting bar and between the data line pad and the shorting bar, and then cutting the shorting bar based on the metal film pattern in a subsequent process. do. The metal film pattern forms a data metal film pattern when forming a gate line pad, and forms a gate metal film pattern when forming a data line pad. Each metal film pattern is formed in parallel with the shorting bar. Therefore, by cutting the shorting bar on the basis of the metal film pattern, the polishing can be performed in an optimal state and the polishing operation time is shortened because it is not necessary to check the polishing state one by one.

Description

액정표시장치 패널 제조 방법LCD panel manufacturing method

본 발명은 액정 표시 장치에 관한 것으로서, 더욱 상세하게는 액정 표시 장치 패널의 제조 방법에 관한 것이다.The present invention relates to a liquid crystal display device, and more particularly, to a manufacturing method of a liquid crystal display panel.

일반적으로, 액정 표시 장치의 패널(panel)은 글래스(glass) 위에 박막 트랜지스터(TFT: Thin Film Transistor, 이하 TFT라고 함)를 형성한 TFT 기판과 글래스 위에 칼라 필터(color filter)를 형성한 칼라 필터 기판을 조합하여 제작된다.In general, a panel of a liquid crystal display device includes a TFT substrate on which a thin film transistor (TFT) is formed on glass and a color filter on which a color filter is formed on the glass. It is produced by combining the substrates.

최근에 노트북 컴퓨터의 사용이 증가하고, 일반 컴퓨터의 모니터 대용으로 액정 표시 장치의 사용이 증가하고 있기 때문에, 액정 표시 장치 패널의 크기에 대한 소비자의 요구가 많아지고 있다.In recent years, as the use of notebook computers has increased and the use of liquid crystal displays has been increased in place of monitors of general computers, consumer demands for the size of liquid crystal display panels have increased.

따라서, 이러한 소비자의 요구에 따라 다양한 크기의 액정 표시 장치 패널이 개발되고 있다.Accordingly, liquid crystal display panels of various sizes have been developed in accordance with such consumer demand.

액정 표시 장치 패널 제조 공정 중에서 여러 가지 문제가 많이 있지만, 그 중에서도 액정 표시 장치 패널의 수율과 깊은 관련이 있고, 수율 감소에 직접적인 영향을 줄 수 있는 공정이 액정 표시 장치 제조 공정의 후단 공정에 해당되는 편광판 부착후에 진행되는 에지(edge) 연마(grind) 공정이다.There are many problems in the liquid crystal display panel manufacturing process, but among them, a process that is closely related to the yield of the liquid crystal display panel and directly affects the yield reduction corresponds to a subsequent process of the liquid crystal display manufacturing process. It is an edge grinding process that proceeds after the polarizer is attached.

이러한 에지 연마 공정은 데이터 라인과 게이트 라인을 하나로 묶은 쇼팅바(shorting bar)를 정확하고 최적 상태 치수에 맞게 커팅(cutting) 작업을 수행하는 것이다.The edge grinding process is to cut a shorting bar that ties the data line and the gate line together to an accurate and optimal dimension.

여기에서, 스펙(spec)에 맞게 커팅 작업을 진행하기 위하여 여러번에 걸쳐 연마 작업을 진행하여야 하며, 이때 연마 상태를 점검하기 위하여 현미경을 사용하여 외관을 정확히 가늠하고 연마 작업을 계속 수행하여야 한다.In this case, in order to proceed with the cutting operation according to the spec (spec), the polishing operation should be carried out several times, and in order to check the polishing state, it is necessary to accurately measure the appearance and continue the polishing operation using a microscope.

따라서, 액정 표시 장치 패널의 수가 많을 때에는 이와 같이 연마 상태를 현미경으로 계속 확인하면서 작업하는 것이 매우 힘들며, 작업 시간 또한 많이 걸리는 문제점이 있다.Therefore, when the number of liquid crystal display panels is large, it is very difficult to work while continuously checking the polishing state with a microscope in this way, and there is a problem in that it takes a long time.

따라서, 본 발명의 목적은 상기한 종래의 문제점을 해결하기 위한 것으로서, 액정 표시 장치 패널 에지 연마 공정 중 쇼팅바 커팅 작업에서 패널의 연마 상태를 쉽게 확인할 수 있는 액정 표시 장치 및 그 제조 방법을 제공하는 데 있다.Accordingly, an object of the present invention is to solve the above-mentioned conventional problems, and to provide a liquid crystal display device and a method of manufacturing the same, which can easily check the polishing state of a panel in a shorting bar cutting operation during a liquid crystal display panel edge polishing process. There is.

상기한 목적을 달성하기 위한 수단으로서 본 발명은 게이트 라인 및 데이터 라인의 패드와 쇼팅바 사이에 연마 목표를 나타내는 금속막 패턴을 형성하는 것을 특징으로 한다.As a means for achieving the above object, the present invention is characterized in that a metal film pattern indicating a polishing target is formed between the pad and the shorting bar of the gate line and the data line.

이하, 본 발명이 속하는 기술분야에서 통상의 지식을 가진 자가 본 발명을 용이하게 실시할 수 있는 실시예를 첨부된 도면을 참조로 하여 상세히 설명한다.DETAILED DESCRIPTION Hereinafter, exemplary embodiments of the inventive concept may be easily implemented by those skilled in the art with reference to the accompanying drawings.

도 1은 본 발명의 실시예에 따른 액정 표시 장치 패널의 평면도이고, 도 2는 도 1의 A부분의 확대도이다.1 is a plan view of a liquid crystal display panel according to an exemplary embodiment of the present invention, and FIG. 2 is an enlarged view of portion A of FIG. 1.

도 1 및 도 2에 도시되어 있듯이, 본 발명의 실시예에 따른 액정 표시 장치 패널(1)은 TFT가 다수 형성되어 있는 TFT 기판(3)과, TFT 기판(3) 위에 칼라 필터가 형성되어 있는 칼라 기판(5)을 포함한다.As shown in Figs. 1 and 2, the liquid crystal display panel 1 according to the embodiment of the present invention includes a TFT substrate 3 on which a plurality of TFTs are formed, and a color filter formed on the TFT substrate 3; The color substrate 5 is included.

TFT 기판(3)에는 게이트 라인에 게이트 전원을 공급하기 위한 게이트 라인 패드(7)가 형성되어 있고, 마찬가지로, 데이터 라인에 데이터 신호를 공급하기 위한 데이터 라인 패드(9)가 형성되어 있다.In the TFT substrate 3, a gate line pad 7 for supplying a gate power supply to the gate line is formed, and similarly, a data line pad 9 for supplying a data signal to the data line is formed.

한편, 게이트 라인 상에서 발생하는 정전기 등을 방지하기 위하여 게이트 라인의 끝을 연결하여 게이트 라인 쇼팅바(11, 13)를 형성한다. 또한, 데이터 라인의 끝을 연결하여 데이터 라인 쇼팅바(15)를 형성한다.On the other hand, the gate line shorting bars 11 and 13 are formed by connecting the ends of the gate line to prevent static electricity generated on the gate line. In addition, an end of the data line is connected to form a data line shorting bar 15.

게이트 라인 쇼팅바(11, 13)와 게이트 라인 패드(7) 사이에는 게이트 라인 쇼팅바(11, 13)를 커팅할 때 게이트 라인 패드(7)에 손상을 주지 않도록 하기 위하여, 연마 목표지점을 확실하게 나타내도록 게이트 라인 쇼팅바(11, 13)와 평행하게 게이트 금속막 패턴(17)이 형성되어 있다.Be sure to set the polishing target point between the gate line shorting bars 11 and 13 and the gate line pad 7 so as not to damage the gate line pad 7 when cutting the gate line shorting bars 11 and 13. The gate metal film pattern 17 is formed in parallel with the gate line shorting bars 11 and 13 so as to be shown.

마찬가지로, 데이터 라인 쇼팅바(15)와 데이터 라인 패드(9) 사이에도 데이터 라인 쇼팅바(15)를 커팅할 때 데이터 라인 패드(9)에 손상을 주지 않도록 하기 위하여, 연마 목표지점을 확실하게 나타내도록 데이터 라인 쇼팅바(15)와 평행하게 데이터 금속막 패턴(19)이 형성되어 있다.Similarly, the polishing target point is clearly shown between the data line shorting bar 15 and the data line pad 9 so as not to damage the data line pad 9 when cutting the data line shorting bar 15. The data metal film pattern 19 is formed in parallel with the data line shorting bar 15.

도 1 및 도 2에 도시되어 있는 바와 같이, 액정 표시 장치 패널의 연마 공정에서 쇼팅바(11, 13, 15)를 커팅할 때 그 커팅 마진(margin)(B)은 쇼팅바(11, 13, 15)와 각 패드(7, 9) 사이의 간격으로 나타내는데, 액정 표시 장치 패널의 종류에 따라 다르지만 일반적으로 0.25mm ∼ 0.8mm 정도의 범위에 속한다.As shown in FIGS. 1 and 2, when cutting the shorting bars 11, 13, and 15 in the polishing process of the liquid crystal display panel, the cutting margin B of the shorting bars 11, 13, It is shown by the space | interval between 15) and each pad 7 and 9, but it depends on the kind of liquid crystal display panel, but generally belongs to the range of 0.25 mm-0.8 mm.

이때, 금속막 패턴(17, 19)은 이러한 커팅 마진(B) 내에 형성되어 쇼팅바(11, 13, 15) 커팅시 각 패드(7, 9)에 손상을 주지 않도록 한다.In this case, the metal layer patterns 17 and 19 are formed in the cutting margin B so as not to damage the pads 7 and 9 when the shorting bars 11, 13 and 15 are cut.

이러한 금속막 패턴(17, 19)은 TFT 기판(3) 제조 공정시 게이트 패드(7) 및 데이터 패드(9) 형성시 형성된다.The metal film patterns 17 and 19 are formed when the gate pad 7 and the data pad 9 are formed in the TFT substrate 3 manufacturing process.

즉, 게이트 패드(7) 형성시 게이트 라인 및 게이트 패드(7)와 쇼트되지 않도록 데이터 금속막 패턴(19)을 형성하고, 데이터 패드(9) 형성시 데이터 라인 및 데이터 패드(9)와 쇼트되지 않도록 게이트 금속막 패턴(17)을 형성한다.That is, the data metal film pattern 19 is formed so as not to short with the gate line and the gate pad 7 when the gate pad 7 is formed, and is not shorted with the data line and the data pad 9 when the data pad 9 is formed. The gate metal film pattern 17 is formed so as not to.

금속막 패턴(17, 19)을 쇼팅바 커팅 마진(B) 내에 형성함으로써, 액정 표시 장치 패널 연마 공정시 금속막 패턴(17, 19)을 목표로 연마하기 때문에 연마 상태를 수시로 확인할 필요가 없다.By forming the metal film patterns 17 and 19 in the shorting bar cutting margin B, the polishing state is not necessary at all because the metal film patterns 17 and 19 are polished at the target during the liquid crystal display panel polishing process.

한편, 도 3에 도시되어 있듯이, 액정 표시 장치 패널(1)에 형성되어 있는 금속막 패턴(17, 19)의 양쪽 끝단에 프루브(21, 23)를 접촉시키고, 양 프루브(21, 23)에 전원(V)을 공급하였을 때 전류가 흐르면 금속막 패턴(17, 19)이 단락되지 않은 것이므로, 연마 공정에 의한 쇼팅바(11, 13, 15) 커팅시 금속막 패턴(17, 19)이 오픈되지 않았기 때문에 각 패드(7, 9)의 손상이 없다는 것을 알 수가 있다. 만일, 전류가 흐르지 않을 경우 금속막 패턴(17, 19)도 함께 커팅되었기 때문에 각 패드(7, 9)에도 손상이 있을 수가 있기 때문에 이러한 점에 있어서 검사가 수행되어야 한다.On the other hand, as shown in FIG. 3, the probes 21 and 23 are brought into contact with both ends of the metal film patterns 17 and 19 formed in the liquid crystal display panel 1, and both probes 21 and 23 are brought into contact with each other. If the current flows when the power supply V is supplied, the metal film patterns 17 and 19 are not short-circuited, and thus the metal film patterns 17 and 19 are opened when the shorting bars 11, 13 and 15 are cut by the polishing process. Since it is not, the pads 7 and 9 are not damaged. If no current flows, the metal film patterns 17 and 19 are also cut together, so that the pads 7 and 9 may be damaged, so the inspection should be performed in this regard.

이상에서와 같이 본 발명의 실시예에서, 액정 표시 장치 패널 에지 연마 공정 중 쇼팅바 커팅 작업에서 패널의 연마 상태를 쉽게 확인함으로서, 최적의 상태로 연마가 가능하고, 연마 상태를 하나하나 확인하지 않아도 되기 때문에 연마 작업 시간이 단축되는 액정 표시 장치 패널 구조를 제공할 수 있다.As described above, in the exemplary embodiment of the present invention, by easily checking the polishing state of the panel in the shorting bar cutting operation during the liquid crystal display panel edge polishing process, the polishing state can be performed in an optimal state, and the polishing states are not checked one by one. Therefore, it is possible to provide a liquid crystal display panel structure in which polishing operation time is shortened.

비록, 이 발명이 가장 실제적이며 바람직한 실시예를 참조하여 설명되었지만, 이 발명은 상기 개시된 실시예에 한정되지 않으며, 후술되는 특허청구범위 내에 속하는 다양한 변형 및 등가물들도 포함한다.Although this invention has been described with reference to the most practical and preferred embodiments, the invention is not limited to the embodiments disclosed above, but also includes various modifications and equivalents within the scope of the following claims.

도 1은 본 발명의 실시예에 따른 액정표시장치 패널의 평면도이고,1 is a plan view of a liquid crystal display panel according to an embodiment of the present invention;

도 2는 도 1의 A부분의 확대도이고,FIG. 2 is an enlarged view of portion A of FIG. 1,

도 3은 본 발명의 실시예에 따른 액정 표시 장치의 금속막 패턴을 이용하여 검사하는 것을 도시한 도면이다.3 is a diagram illustrating an inspection using a metal film pattern of a liquid crystal display according to an exemplary embodiment of the present invention.

Claims (2)

게이트 라인 패드와 게이트 라인 쇼팅바 사이 및 데이터 라인 패드와 데이터 라인 쇼팅바 사이에 각각 게이트 금속막 패턴 및 데이터 금속막 패턴을 형성하는 단계,Forming a gate metal film pattern and a data metal film pattern between the gate line pad and the gate line shorting bar and between the data line pad and the data line shorting bar, respectively; 상기 게이트 금속막 패턴 및 상기 데이터 금속막 패턴을 기준으로 상기 게이트 라인 쇼팅바 및 상기 데이터 라인 쇼팅바를 커팅하는 단계Cutting the gate line shorting bar and the data line shorting bar based on the gate metal film pattern and the data metal film pattern. 를 포함하고,Including, 상기 게이트 금속막 패턴은 상기 데이터라인 패드와 동일한 층에 형성하고,The gate metal layer pattern is formed on the same layer as the data line pad, 상기 데이터 금속막 패턴은 상기 게이트 라인 패드와 동일한 층에 형성하는The data metal layer pattern may be formed on the same layer as the gate line pad. 액정 표시 장치 패널의 제조 방법.The manufacturing method of a liquid crystal display panel. 제1항에 있어서,The method of claim 1, 상기 게이트 금속막 패턴은 상기 게이트 라인 쇼팅바와 평행하게 형성하고,The gate metal layer pattern is formed in parallel with the gate line shorting bar, 상기 데이터 금속막 패턴은 상기 데이터 라인 쇼팅바와 평행하게 형성하는The data metal layer pattern may be formed in parallel with the data line shorting bar. 액정 표시 장치 패널의 제조 방법.The manufacturing method of a liquid crystal display panel.
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