KR100359296B1 - Organic electroluminescence device and method for fabricating thereof - Google Patents

Abstract

The present invention relates to an organic electroluminescent device in which an organic electroluminescent device is assembled to a base substrate made of a synthetic resin material, and a method of manufacturing the same. According to the present invention, a base substrate is made of a light synthetic resin material, and the base substrate is formed on the base substrate. Forming an organic electroluminescent device in the display to enable display dramatically reduces the weight and volume of the organic electroluminescent device.

Description

Organic electroluminescent device and manufacturing method thereof

The present invention relates to an organic electroluminescent device and a method of manufacturing the same, and more particularly to an organic electroluminescent device and a method of manufacturing the organic electroluminescent device is assembled to a base substrate made of a synthetic resin material.

Recently, with the development of a high-performance information processing device that processes a large amount of information within a unit time, a kind of interface device that connects the information processing device and the user so that the user can recognize the result of the electrical signal processed inside the information processing device. The development of the in-display device is also in progress.

Such display devices may be broadly classified into CRT-type display devices, liquid crystal display devices, organic electroluminescence devices, and the like according to their types.

Among them, the organic electroluminescent device requires a light supply device called a "backlight assembly" by using liquid crystal, which is a passive element, and also has a faster response speed and higher brightness than a liquid crystal display device having a highly precise driving and complicated manufacturing method. It is attracting attention as a next generation display device by having simple structural characteristics, low production cost characteristics, low weight and small volume characteristics, and the like.

The simplest structure for implementing an organic electroluminescent device having such various advantages is an anode electrode formed on a transparent glass substrate, an organic electroluminescent thin film layer formed on the upper surface of the anode electrode, and formed on the upper surface of the organic electroluminescent thin film layer. It consists of a cathode electrode which is one electrode.

In this case, when a forward current is applied from the anode electrode to the cathode electrode, light having a predetermined wavelength is generated in the organic electroluminescent thin film layer through a series of processes such as a combination of electrons and holes, and is generated in the organic electroluminescent thin film layer. The light is emitted to the outside through the anode electrode and the transparent substrate and then incident to the user's eyes so that the user can recognize the light.

In order to implement such a light emitting mechanism, the anode electrode must use a light transmissive electrode. For example, the anode electrode has higher electrical resistance than metal but is conductive and has a higher transparency than metal. Indium Tin Oxide A substance called is used.

However, since the indium tin oxide material is formed in a high temperature atmosphere, in order to use such an indium tin oxide material as an anode electrode, a transparent substrate having no shape change and molecular structure deformation does not occur even at an indium tin oxide formation temperature. For this reason, a transparent substrate is used as a glass substrate in which deformation does not occur even at an indium tin oxide formation temperature.

However, the glass substrate is amorphous and the edge cracks formed at the edges of the glass substrate have a serious defect in which breakage occurs frequently due to very weak propagation or brittleness to the active area where actual display is performed even by a small external impact. There is a fatal problem as a portable display device by acting as a main cause of weight and volume increase of the light emitting device.

Accordingly, the present invention has been made in view of such a conventional problem, and an object of the present invention is to allow an organic electroluminescent element comprising a transparent electrode as a component of an organic electroluminescent device to be formed on a base substrate.

Other objects of the present invention will become more apparent from the following detailed description of the invention.

1 to 3 is a perspective view showing an intermediate substrate according to the present invention.

4 is a conceptual diagram illustrating a process of manufacturing the intermediate substrate of FIGS. 1 to 3.

5 is a side view showing the intermediate substrate manufactured by FIG.

6 is a conceptual diagram showing the relationship of the intermediate substrate according to FIGS.

7 is a conceptual diagram illustrating that a sacrificial thin film layer is formed on a red medium substrate according to the present invention.

FIG. 8 is a conceptual diagram illustrating an indium tin oxide thin film formed on an upper surface of a sacrificial thin film layer of a red medium substrate according to the present invention; FIG.

9 is a conceptual diagram illustrating that an organic electroluminescent layer is formed on an upper surface of an indium tin oxide thin film of a red medium substrate according to the present invention.

FIG. 10 is a perspective view illustrating the organic electroluminescent layer of FIG. 9 patterned. FIG.

FIG. 11 is a cross-sectional view illustrating that an intermediate electrode is formed on an upper surface of the organic electroluminescent layer patterned in FIG. 9. FIG.

12 is a perspective view showing the layout of a base substrate according to the present invention;

FIG. 13 is a conceptual diagram illustrating that a sacrificial thin film layer is etched in a state in which a group of red organic electroluminescent devices formed on a red medium substrate is attached to a base substrate according to the present invention; FIG.

FIG. 14 is a perspective view illustrating a group of red organic electroluminescent devices attached to a base substrate after FIG. 13; FIG.

15 is a cross-sectional view showing a profile of a group of blue organic electroluminescent devices formed on a blue medium substrate according to the present invention.

FIG. 16 is a perspective view illustrating a blue organic electroluminescent device group attached to a unit active region adjacent to a red organic electroluminescent device group attached to a base substrate. FIG.

17 is a cross-sectional view showing a profile of a group of green organic electroluminescent devices formed on a green medium substrate according to the present invention.

FIG. 18 is a perspective view illustrating that the green organic electroluminescent device group is attached to a unit active region adjacent to the blue organic electroluminescent device group disposed on the base substrate. FIG.

19 is a perspective view showing the appearance of the completed organic electroluminescent device according to the present invention;

The organic electroluminescent device for achieving the object of the present invention is a stripe-shaped first electrode arranged in a parallel manner at least one in the first direction, the first lead, the first lead connected to each of the first electrode, the first A base substrate having at least one second lead formed to be electrically separated from the electrode, and a stripe shape extending in a second direction crossing the first electrode in a parallel manner on the first electrode corresponding to the number of the second leads; An organic electroluminescent element group comprising an arrayed intermediate electrode, an organic electroluminescent means formed on an upper surface of the intermediate electrode corresponding to an upper surface of the first electrode, and a transparent second electrode formed to surround the organic electroluminescent means on an upper surface of the intermediate electrode; Before connecting the second electrode and the second lead, and the conductive adhesive means applied to the portion where the first electrode and the intermediate electrode contact each other. It includes.

In addition, the method of manufacturing an organic electroluminescent device according to the present invention includes at least one of an intermediary electrode extending in a first direction in a parallel manner, an organic electroluminescent layer and an organic electroluminescent layer having at least one portion formed on an upper surface of the intermediate electrode. The second electrode is formed on the element forming substrate having the sacrificial thin film layer formed on the upper surface to form an organic electroluminescent element group, and the number of the organic electroluminescent layer on one side of the substrate having a predetermined area corresponds to the number of the intermediate electrode in parallel. Forming a first electrode extending in an intersecting second direction, a first lead connected to the first electrode, and a second lead electrically separated from the first electrode, and forming an organic electroluminescent device group on the upper surface of the first electrode Aligning and adhering the intermediate electrode and the first electrode with conductive bonding means; and etching the sacrificial thin film layer to form the intermediate substrate and the organic electroluminescence. Separating the group of optical elements, and connecting the second electrode to the second lead.

Hereinafter, an organic electroluminescent device and a method of manufacturing the organic electroluminescent device according to the present invention will be described with reference to the accompanying drawings.

First, referring to the attached FIG. 12 or 18, the configuration of the organic electroluminescent device according to the present invention will be described.

Referring to FIG. 18, the organic electroluminescent device 900 according to the present invention generally includes a base substrate 100 made of a synthetic resin material and an organic electroluminescent device group 300, 400, 500; 600 formed on the base substrate 100. .

Specifically, the base substrate 100 is divided into three regions, and the region indicated by reference numeral A is an active region in which an actual image is displayed by installing the organic electroluminescent element group 600 to be described later in detail. area B is an anode electrode lead region in which an anode electrode lead 180 for applying a first signal to an organic electroluminescent element group 600 formed in an active region is formed. The region shown as is a cathode electrode lead region in which a cathode electrode lead 190 for applying a second signal to the organic electroluminescent element group 600 formed in the active region is formed.

12, an anode electrode 170 is formed in the active region, an anode electrode lead 180 is formed in the anode electrode lead region, and a cathode electrode lead 190 is formed in the cathode electrode lead region.

This will be described in more detail with reference to FIG. 12.

The active areas are divided into a plurality of parts along a direction parallel to the Y axis, which is a coordinate system defined in FIG. 12. At this time, the equal number should be matched with the resolution to be implemented. In the present invention, for convenience of description, the active area is divided into six equal parts.

Hereinafter, each active area divided into six parts will be defined as a unit active area, and reference numerals 141, 142, 143, 144, 145, and 146 will be given to each unit active area divided into six parts.

As described above, anode electrodes 110, 120, 130, 140, 150, and 160 are formed in an active region including six unit active regions.

In detail, the anode electrode 170 is formed of a predetermined pattern and a predetermined thickness inside the active region by, for example, co-deposition or sputtering.

More specifically, the anode electrode 170 is in the X-axis direction orthogonal to the unit active region 140 in the active region, for example, from the first unit active region 141 to the last unit active region 146 in the unit active region. In the embodiment, six are formed in the same direction as the number of unit active regions in a parallel manner along the Y-axis direction.

Meanwhile, an anode electrode lead 180 is formed in the anode electrode lead region, and one end of the anode electrode lead 180 is connected in a one-to-one correspondence with an end of the anode electrode 170 formed in the active region, and also has an X axis. It is formed to extend in the direction.

In addition, since the cathode electrode lead 190 is formed in the cathode electrode lead region, one end of the cathode electrode lead 190 has a direction more orthogonally orthogonal to a direction crossing the anode electrode lead 180, and each unit Parallel to the active region 140 is formed in a one-to-one corresponding position. The other end of the cathode electrode lead 190 extends long to be parallel to the anode electrode lead 180.

The anode electrode 170, the cathode electrode lead 190, and the anode electrode lead 180 having such a shape and configuration may be formed at one time through a pattern mask (not shown) opened in the shape thereof.

The organic electroluminescent device group 600 according to the present invention is formed in the unit active regions 140 of the base substrate 100 having the above configuration.

In this case, the organic electroluminescent device group 600 is divided into a red organic electroluminescent device group 300, a blue organic electroluminescent device group 400, a green organic electroluminescent device group 500, in one embodiment, these The groups are all formed in the unit active region 140 in parallel with the unit active region 140.

These organic electroluminescent device groups 600 are all formed in the unit active region 140 according to a specified rule. In one embodiment, the organic electroluminescent device groups 600 are formed of the red organic electroluminescent device group 300, The blue organic electroluminescent device group 400 and the green organic electroluminescent device group 500 are formed in the unit active region 140 so as to repeat at a predetermined cycle.

Thereafter, the cathode electrode lead 190, the red organic electroluminescent device group 300, the blue organic electroluminescent device group 400, and the green organic electroluminescent device group 500 are all connected to each other to display a predetermined image. Fabrication of the electroluminescent device 900 is complete.

In the organic electroluminescent device 900 according to the present invention, since the substrate on which the organic electroluminescent device group 600 is formed is a synthetic resin material, the organic electroluminescent device 900 is not easily broken by an external impact. The thickness can be made very thin as well as the weight can be very light.

Hereinafter, a method of manufacturing an organic electroluminescent device according to the present invention having such a configuration will be described with reference to the accompanying drawings.

In general, the method of manufacturing an organic electroluminescent device according to the present invention includes a process of manufacturing a base substrate 100, a process of manufacturing an organic electroluminescent device group 600, and a base substrate of the organic electroluminescent device group 600. Attached to (100) can be largely classified as a process of assembly.

Since the organic electroluminescent device group 600 and the base substrate 100 are manufactured separately as described above, the reason for assembling them later is not easily broken, there is no crack, and the weight of the synthetic base substrate 100 is light. In spite of various advantages, the deformation occurs at a process temperature for forming the anode electrode 180, which is a component of the organic electroluminescent device group 600, thereby forming the anode electrode 180 directly on the base substrate 100. Because it is difficult.

In the present invention, in order to overcome this, the red organic electroluminescent device group 300 on the glass substrate via a substrate, for example, a glass substrate, which can be repeatedly used without deformation even at the formation temperature of the anode electrode 180, After the blue organic electroluminescent device group 400 and the green organic electroluminescent device group 500 are respectively configured, a method of assembling them to the base substrate 100 by tricolor engraving is used.

Hereinafter, a glass substrate having such a role will be defined as an intermediate substrate.

The intermediate substrate may be a red intermediate substrate on which the red organic electroluminescent element group 300 is formed, a blue intermediate substrate on which the blue organic electroluminescent element group 400 is formed, and a green intermediate substrate on which the green organic electroluminescent element group 500 is formed. It is composed.

This red intermediate substrate is shown in FIG. 1, indicated by reference numeral 610, the blue intermediate substrate is indicated in FIG. 2, indicated by reference numeral 620, and the green intermediate substrate is shown in FIG. 3. Reference numeral 630 will be given.

More specifically, the red medium substrate 610 illustrated in FIG. 1 is a substrate having the same area as the active region formed on the base substrate 100, and corresponds to the unit active regions 141 and 143 defined above among the substrates. Except for the portion, the remaining region is etched and removed.

The blue intermediate substrate 620 is also a substrate having the same area as the active region formed on the base substrate 100, and the remaining regions except the portions corresponding to the previously defined unit active regions 142 and 144 of the substrate are etched and removed. It has the shape of 2.

In addition, the green medium substrate 630 is a substrate having the same area as the active region formed on the base substrate 100, and the remaining regions of the substrate except for the portions corresponding to the previously defined unit active regions 143 and 146 are etched and removed. It has the shape of FIG.

Meanwhile, a method of forming the red, blue, and green media substrates 610, 620, and 630 is illustrated in the attached FIGS. 4 to 5, and a method of forming the red media substrate 610 is representatively illustrated in FIG. 4 or 5. It is.

The remaining method of forming the blue medium substrate 620 and the green medium substrate 630 is the same as the process of fabricating the red medium substrate 610, and a redundant description thereof will be omitted.

Referring to FIG. 4 or FIG. 5, first, a photoresist thin film, which is not shown in a predetermined thickness, is formed over the entire surface of the substrate 611 corresponding to the body of the red medium substrate 610. The exposure-development-baking process is continuously performed such that the photoresist thin film 612 remains only in the portions corresponding to the unit active regions 141 and 143 which have been made.

Subsequently, since the substrate 611 is put in the etching solution, the portion not protected by the photoresist thin film 612 is etched by the etching solution 613, so that etching proceeds as shown in FIG. 5.

Thereafter, all of the photoresist thin film 612 remaining on the substrate 611 is removed through an ashing process to manufacture the red medium substrate 610.

At this time, a portion of the manufactured green, blue, and green media substrates 610, 620, and 630 that protrude without being etched is specifically defined as element forming pedestals 615, 625, and 635. Profiles 615, 625, and 635 have a trapezoidal shape as shown in FIGS.

At this time, the layout of these element formation pedestals 615, 625, 635 is shown in FIG. 6, and one of these element formation pedestals 615 is formed to have the same position as the unit active regions 141, 144 of the active regions.

Another element forming pedestal 625 is formed to have the same position as the unit active regions 142 and 145 among the active regions, and the other element forming pedestal 635 has the same position as the unit active regions 143 and 146 among the active regions. It is formed to have.

Hereinafter, the red organic light emitting device group 300, the blue organic light emitting device group 400, and the green organic light emitting device group 500 are formed through the green, blue, and green substrates 610, 620, and 630 formed through the above process. A process of forming the same will be described with reference to FIG. 7.

First, in FIG. 7, a process of forming a red organic electroluminescent device group 300 on a red medium substrate 610 is illustrated.

Referring to the accompanying drawings, a red film 619 is formed on the red medium substrate 610 to a predetermined thickness by a method such as co-deposition over the entire area.

In this case, poly-silicon, amorphous silicon, or the like may be used for the sacrificial thin film layer 619. In addition to the sacrificial thin film layer 619, any material etched by a specific etchant or etching gas may be used. In the present invention, amorphous silicon, which is etched by XeF ₂ gas, is used as a material for forming the sacrificial thin film layer 619.

Subsequently, an indium tin oxide film (Indium Tin Oxide film), which is a conductive material having high light transmittance and low resistance, is formed on the upper surface of the red medium substrate 610 by a method such as co-deposition over the entire area as shown in FIG. 8. ) Is formed to a predetermined thickness. Hereinafter, the indium tin oxide thin film 331 will be referred to as a cathode electrode and will be referred to by reference numeral 331 again.

Thereafter, as shown in FIG. 9, the red organic electroluminescent material is coated on the red medium substrate 610 to form the red organic electroluminescent layer 350.

At this time, the red organic electroluminescent layer 350 formed on the upper surface of the device forming pedestal 615 of the red organic electroluminescent layer 350 formed on the red medium substrate 610 is a photoresist coating process, photographic process, developing process, etching process By doing this, as shown in Fig. 10, at least one is divided.

In the present invention, the red organic electroluminescent layer 350 formed on the upper surface of the device forming pedestal 615 is patterned to be divided into six in one embodiment, but the number of the divided red organic electroluminescent layer 350 according to the resolution can be changed.

Hereinafter, reference numeral 351 is given to each divided red organic electroluminescent layer 350.

Thereafter, as illustrated in FIG. 11, a metal material is deposited on the red medium substrate 610 to form a metal thin film layer 360. At this time, the metal thin film layer 360 is an aluminum thin film in one embodiment. Hereinafter, the metal thin film layer 360 will be defined as an intermediate electrode, and reference numeral 360 will be given.

By the above process, the fabrication of the red organic electroluminescent device group 300 is completed, and the completed red organic electroluminescent device group 300 is aligned and assembled to the base substrate 100 illustrated in FIG. 12. .

As such, in order to assemble the red organic electroluminescent device group 300 to the base substrate 100, the intermediate electrode 360 of the red organic electroluminescent device group 300 and the anode electrode 170 formed on the base substrate 100 are electrically connected. Must be connected.

In order to implement this, as shown in FIG. 12, the conductive adhesive 195 is formed in a dot shape on the upper surface of the anode electrode 170 included in all the unit active regions 140 of the base substrate 100, respectively. In the applied conductive adhesive 195, the conductive adhesive applied to the unit active regions 141 and 144 of the base substrate 100 has a red medium substrate on which a red organic electroluminescent element group 300 is formed, as shown in FIG. 13. The intermediate electrodes 360 formed at 610 are attached to each other after being aligned.

Subsequently, in a state in which the base electrode 100 is bonded to the intermediate electrode 360 formed on the red intermediate substrate 610 by the conductive adhesive 195, they are etch chamber 950 having a predetermined space as shown in FIG. 13. ), And then to etch the sacrificial thin film layer 619, which serves to fix the red medium substrate 610 and the red organic electroluminescent device group 300 from the reaction gas supply device 960 of the etching chamber 950. The XeF ₂ reactant gas is supplied into the reaction chamber 950.

As a result, the sacrificial thin film layer 619 that fixes the red organic electroluminescent device group 300 and the red intermediate substrate 610 by the XeF ₂ reaction gas is etched, and as shown in FIG. 14, the red organic electroluminescent device is finally formed. Only the group 300 is attached to the unit active regions 141 and 144 formed in the base substrate 100. The etch residue is then removed by a cleaning process.

In FIG. 15, a blue organic electroluminescent layer 451 using a blue organic electroluminescent material for the blue intermediate substrate 620, a cathode electrode 431, and an intermediate electrode 460 are used. As a result, the blue organic electroluminescent device group 400 is formed.

Thereafter, the blue medium substrate 620 on which the blue organic electroluminescent device group 400 is formed is aligned with the unit active regions 142 and 145 formed on the base substrate 100, and then the base substrate ( Hardened after attaching to 100).

Subsequently, as shown in FIG. 13, the sacrificial thin film layer fixing the blue organic electroluminescent device group 400 and the blue medium substrate 620 is selectively etched by the XeF ₂ reaction gas, thereby adjoining the unit of the red organic electroluminescent device group 300. A blue organic electroluminescent device group 400 is formed in the active regions 142 and 145 as shown in FIG. 16. The etch residue is then removed by a cleaning process as well.

Subsequently, in FIG. 17, the green organic electroluminescent layer 551, the cathode electrode 531, and the intermediate electrode 560 using the green organic electroluminescent material in the green intermediate substrate 630 are the same as those of FIGS. 7 to 11 described above. As a result, the green organic electroluminescent device group 500 is formed.

Thereafter, the green medium substrate 630 on which the green organic electroluminescent device group 500 is formed is aligned in parallel with the unit active regions 143 and 146 formed on the base substrate 100, and then the base is formed through the conductive adhesive 195. After being attached to the substrate 100 is cured.

Subsequently, as shown in FIG. 13, the sacrificial thin film layer fixing the green organic electroluminescent device group 500 and the green medium substrate 630 is selectively etched by the XeF ₂ reaction gas, thereby adjoining the blue organic electroluminescent device group 400. As shown in FIG. 18, the green organic electroluminescent device group 500 is formed in the active regions 143 and 146.

Subsequently, as shown in FIG. 19, the cathodes formed on the red organic electroluminescent device group 300, the blue organic electroluminescent device group 400, and the green organic electroluminescent device group 500 that are all formed on the base substrate 100. The production of the organic electroluminescent device on the synthetic resin substrate is completed by connecting the electrodes 331, 431, 531 with the cathode electrode lead 190 and the connecting electrode 197.

As described in detail above, various effects of dramatically reducing the weight and volume of the organic electroluminescent device by making the base substrate made of a light synthetic resin material and forming an organic electroluminescent device on the base substrate to enable display are possible. Has

Claims (6)

At least one stripe-shaped first electrode arranged in a parallel manner in a first direction, a first lead corresponding to each of the first electrodes, and at least one or more second formed to be electrically separated from the first electrode A base substrate on which leads are formed; An intermediary electrode arranged in a parallel manner on the first electrode in a stripe shape extending in a second direction crossing the first electrode and corresponding to the number of the second leads, the intermediate electrode corresponding to an upper surface of the first electrode An organic electroluminescent element group comprising an organic electroluminescent means formed on an upper surface, and a transparent second electrode formed to surround the organic electroluminescent means on an upper surface of the intermediate electrode; Conductive bonding means applied to a portion where the first electrode and the intermediate electrode contact each other; An organic electroluminescent device comprising a connecting electrode connecting said second electrode and said second lead. The organic electroluminescent device according to claim 1, wherein the organic electroluminescent means formed in the organic electroluminescent element group is an organic electroluminescent layer composed of organic electroluminescent materials for generating light of different wavelengths, respectively. The organic electroluminescent device of claim 1, wherein the base substrate is made of a synthetic resin material. In the method of manufacturing an organic electroluminescent device, At least one intermediate electrode extending in a first direction in a parallel manner, an organic electroluminescent layer having at least one split on an upper surface of the intermediate electrode, and an element on which a second electrode sacrificial thin film layer is formed on an upper surface of the organic electroluminescent layer A first electrode fabricated on a substrate for forming an organic electroluminescent device group and having a number corresponding to the number of the organic electroluminescent layers on one side of the substrate having a predetermined area extending in a second direction crossing the intermediate electrode in a parallel manner; Forming a first lead connected to the first electrode and a second lead electrically separated from the first electrode; Aligning the organic electroluminescent device group on an upper surface of the first electrode and adhering the intermediate electrode and the first electrode by conductive bonding means; Etching the sacrificial thin film layer to separate the intermediate substrate from the organic electroluminescent device group; Connecting the second electrode to the second lead. The method of claim 4, wherein the sacrificial thin film layer is any one of polysilicon and amorphous silicon. The method of claim 4, wherein the sacrificial thin film layer is etched by XeF ₂ gas.