KR100261454B1 - Oxide cathode - Google Patents
Oxide cathode Download PDFInfo
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- KR100261454B1 KR100261454B1 KR1019930011344A KR930011344A KR100261454B1 KR 100261454 B1 KR100261454 B1 KR 100261454B1 KR 1019930011344 A KR1019930011344 A KR 1019930011344A KR 930011344 A KR930011344 A KR 930011344A KR 100261454 B1 KR100261454 B1 KR 100261454B1
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- 239000010410 layer Substances 0.000 claims abstract description 38
- 229910052751 metal Inorganic materials 0.000 claims abstract description 28
- 239000002184 metal Substances 0.000 claims abstract description 28
- 239000011247 coating layer Substances 0.000 claims abstract description 15
- 239000000463 material Substances 0.000 claims abstract description 15
- 239000010953 base metal Substances 0.000 claims abstract description 14
- 229910052749 magnesium Inorganic materials 0.000 claims abstract description 9
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 9
- 239000003638 chemical reducing agent Substances 0.000 claims abstract description 8
- 229910052721 tungsten Inorganic materials 0.000 claims description 4
- 229910052784 alkaline earth metal Inorganic materials 0.000 claims description 3
- 150000001342 alkaline earth metals Chemical class 0.000 claims description 3
- 229910052750 molybdenum Inorganic materials 0.000 claims description 2
- 229910052759 nickel Inorganic materials 0.000 abstract description 2
- QVQLCTNNEUAWMS-UHFFFAOYSA-N barium oxide Chemical compound [Ba]=O QVQLCTNNEUAWMS-UHFFFAOYSA-N 0.000 description 10
- 239000011777 magnesium Substances 0.000 description 9
- 238000000034 method Methods 0.000 description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- AYJRCSIUFZENHW-UHFFFAOYSA-L barium carbonate Chemical compound [Ba+2].[O-]C([O-])=O AYJRCSIUFZENHW-UHFFFAOYSA-L 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 238000006722 reduction reaction Methods 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000002784 hot electron Substances 0.000 description 2
- 230000001603 reducing effect Effects 0.000 description 2
- 238000004904 shortening Methods 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 239000000020 Nitrocellulose Substances 0.000 description 1
- 229910004283 SiO 4 Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229920001220 nitrocellulos Polymers 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000001552 radio frequency sputter deposition Methods 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/02—Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
- H01J29/04—Cathodes
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- Solid Thermionic Cathode (AREA)
Abstract
Ni 및 Si, Mg로 이루어진 기체금속층과 이 기체금속층을 피복하는 W와 같은 환원제를 포함하는 금속피복층 그리고 전자방출물질층으로 이루어진 산화물음극은 수명이 길며, 전자방출 특성이 우수하다.Oxide cathodes composed of a base metal layer made of Ni, Si, and Mg, a metal coating layer containing a reducing agent such as W covering the base metal layer, and an electron emission material layer have a long lifetime and excellent electron emission characteristics.
Description
제1도는 종래의 산화물 음극을 포함하는 전자총의 개략도이고,1 is a schematic diagram of an electron gun including a conventional oxide cathode,
제2도는 본 발명의 일실시예인 산화물 음극을 포함하는 전자총의 개략도이고,2 is a schematic diagram of an electron gun including an oxide cathode which is an embodiment of the present invention,
제3도는 본 발명의 일실시예인 산화물 음극 및 종래의 산화물 음극의 수명 특성을 측정한 그래프이다.3 is a graph measuring the life characteristics of the oxide cathode and the conventional oxide cathode of an embodiment of the present invention.
* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings
1 : 기체금속층 2 : 슬리브1: gas metal layer 2: sleeve
3 : 전자방출물질층 4 : 히터3: electron emitting material layer 4: heater
[산업상 이용 분야][Industrial use]
본 발명은 산화물 음극에 관한 것으로서, 더욱 상세하게는 산화물 피복형의 전자관용 열전자방출 음극에 관한 것이다.The present invention relates to an oxide cathode, and more particularly to a hot electron emission cathode for an oxide-coated electron tube.
[종래기술][Private Technology]
산화물 음극은 수상관이나 촬상관의 전자관용 음극으로 널리 사용되고 있다.Oxide cathodes are widely used as cathodes for electron tubes in water tubes and imaging tubes.
종래에는 이와 같은 열전자 방출 음극으로 제1도에 도시한 바와 같은 구조를 갖는 산화물 음극을 사용하였다. 제1도에 도시된 바와 같이, 종래의 음극은 원관상의 슬리브(2), 상기 슬리브 상에 원판상으로 기체(基體) 금속이 피복형성된 기체금속층(1)과 상기 기체금속층(1) 상에 전자방출물질이 피복 형성된 전자방출물질층(3) 및 음극 가열용 히터(4)로 이루어져 있다. 그리고 상기 기체금속층은 Ni(니켈)을 주성분으로 하고 Si(실리콘), Mg(마그네슘)등의 환원제를 미량 포함하고 있으며, 상기 전자방출물질층은 Ba(바륨)을 주성분으로 하는 알카리토류 금속의 산화물로 이루어져 있다.Conventionally, an oxide cathode having a structure as shown in FIG. 1 is used as such a hot electron emission cathode. As shown in FIG. 1, a conventional cathode is formed on a cylindrical sleeve 2, on a base metal layer 1 on which a base metal is coated on a disk, and on the base metal layer 1; It consists of the electron emission material layer 3 by which the electron emission material was coat | covered, and the heater 4 for cathode heating. The base metal layer contains Ni (nickel) as a main component and contains a trace amount of a reducing agent such as Si (silicon) and Mg (magnesium), and the electron-emitting material layer is an oxide of an alkaline earth metal having Ba (barium) as a main component. Consists of
이와 같은 음극, 소위 산화물 음극은 니트로셀룰로즈 등을 용해한 유기 용제에 BaCO3(탄산바륨)을 주성분으로 하는 탄산염 분말을 혼합한 후, 스프레이나 전착 등의 방법으로 기체금속층상에 피착시킴으로써 제조된다. 그리고 상기 산화물 음극은 환원제와 산화물을 반응시켜 산화물로부터 유리원자를 생성시키고 이 유리원자가 전자방출에 이용된다.Such a negative electrode, a so-called oxide negative electrode, is prepared by mixing a carbonate powder containing BaCO 3 (barium carbonate) as a main component in an organic solvent in which nitrocellulose or the like is dissolved, and then depositing on a base metal layer by a method such as spraying or electrodeposition. The oxide cathode reacts with a reducing agent and an oxide to generate glass atoms from the oxide, and the glass atoms are used for electron emission.
상기 전자방출과정을 구체적으로 설명하면 다음과 같다.The electron emission process is described in detail as follows.
상기 제조된 음극을 전자총에 장착하여 전자관내에 조립하고, 전자관 내를 진공으로 하는 배기 공정에서 음극을 히터로 약 1000℃로 가열 승온한다. 이때 전자방출물질층에 피착된 BaCO3(탄산바륨)이 하기식(1)과 같은 열분해에 의해 BaO(산화바륨)으로 분해된다.The prepared negative electrode is mounted on an electron gun, assembled into an electron tube, and the negative electrode is heated to about 1000 ° C. with a heater in an exhaust process in which the inside of the electron tube is vacuumed. At this time, BaCO 3 (barium carbonate) deposited on the electron-emitting material layer is decomposed into BaO (barium oxide) by thermal decomposition as in the following formula (1).
상기 BaO는 음극 동작 중 기체금속층과 접하는 경계면에서 기체금속 중 환원제인 Si 및 Mg등과 환원반응을 일으키며 그 반응식은 하기식(2) 및 (3)과 같다.The BaO causes a reduction reaction with Si and Mg, which are reducing agents in the gas metal, at the interface contacting the gas metal layer during the cathode operation, and the reaction formulas are represented by the following equations (2) and (3).
상기 환원반응에 의하여 생성된 유리 Ba 가 전자방출에 기여한다.The free Ba produced by the reduction reaction contributes to the electron emission.
그러나 상기 환원 반응에서는 MgO 및 Ba2SiO4등이 유리 Ba와 함께 발생하는데, 이들은 전자방출물질층과 기체금속층 사이의 경계면에 축적되어 중간층을 형성하며, 이 중간층은 환원반응에 필요한 기체금속층의 Mg, Si가 전자방출물질층의 BaO와 반응하는 것을 방해하는 장벽으로 작용한다. 이와 같은 Mg, Si의 확산의 억제는 결국 유리 Ba의 생성을 억제하여 산화물 음극의 수명을 단축시키고, 또 상기 중간층은 고저항을 갖고, 전자방출전류의 흐름을 방해하기 때문에 방출 가능 전류밀도를 제한한다는 문제점이 있다.However, in the reduction reaction, MgO and Ba 2 SiO 4 and the like are generated together with the free Ba, which accumulate at the interface between the electron-emitting material layer and the gas metal layer to form an intermediate layer, which is the Mg of the gas metal layer required for the reduction reaction. , Si acts as a barrier that prevents Si from reacting with BaO in the electron-emitting material layer. Such suppression of diffusion of Mg and Si eventually suppresses the formation of free Ba, shortening the lifetime of the oxide cathode, and limiting the dischargeable current density because the intermediate layer has high resistance and disturbs the flow of electron emission current. There is a problem.
[본 발명이 해결하려하는 과제][PROBLEMS TO BE SOLVED BY THE INVENTION]
본 발명은 상기와 같은 문제점을 해결하기 위하여 안출된 것으로서, 본 발명의 목적은 산화물 음극에 있어서 중간층 형성으로 인한 수명 단축을 억제한 장수명의 산화물 음극을 제공하고 또한 안정적인 전자방출특성을 갖는 산화물 음극을 제공하기 위함이다.The present invention has been made to solve the above problems, and an object of the present invention is to provide an oxide anode having a long life of the oxide cathode suppressing the shortening of the life due to the formation of an intermediate layer in the oxide cathode and also has an oxide cathode having stable electron emission characteristics To provide.
[과제를 해결하기 위한 수단][Means for solving the problem]
상기와 같은 본 발명의 목적을 달성하기 위하여, 본 발명은 기체금속층, 상기 기체금속층을 피복하는 금속피복층, 상기 금속피복층을 피복하는 전자방출물질층으로 이루어진 산화물 음극을 제공한다.In order to achieve the object of the present invention as described above, the present invention provides an oxide cathode consisting of a base metal layer, a metal coating layer covering the base metal layer, an electron-emitting material layer covering the metal coating layer.
상기한 금속피복층은 W(텅스텐), Mo 또는 W와 Mo의 복합물로 이루어진 군에서 선택되는 환원성 금속을 포함하는 것이 바람직하며, 상기 금속피복층의 두께는 10~10,000Å이 바람직하다.The metal coating layer preferably comprises a reducing metal selected from the group consisting of W (tungsten), Mo or a composite of W and Mo, the thickness of the metal coating layer is preferably 10 ~ 10,0001.
상기 두께가 10Å미만이면 수명 향상 효과가 미미하며, 10,000Å을 초과할 때는 음극온도 변화와 에미션 특성이 감쇠한다는 문제점이 있다.If the thickness is less than 10Å, the effect of improving the lifetime is insignificant, and when the thickness exceeds 10,000Å, there is a problem that the cathode temperature change and the emission characteristics are attenuated.
또한 상기 기체금속층은 Ni을 주성분으로 하고, Si, Mg 등의 환원제를 포함하는 것이 바람직하고, 상기 전자방출물질층은 알카리토류 금속, 더욱 바람직하게는 Ba를 포함하는 것이 바람직하다.In addition, the base metal layer preferably contains Ni, and includes a reducing agent such as Si, Mg, and the electron-emitting material layer preferably includes an alkaline earth metal, more preferably Ba.
[작용][Action]
상기와 같은 본 발명에 따라 형성된 산화물 음극의 구조는 제2도에 도시하였다. 제2도에서 알 수 있는 바와 같이 본 발명의 산화물 음극은 기체금속층(1)과 전자방출물질층(2) 그리고 이들 사이에 형성된 금속피복층(5)으로 나누어져 있다. 이와 같은 본 발명의 산화물 음극은 종래 기술에서 언급한 반응식(2),(3)을 거쳐, 유리 Ba를 생성한다. 그러나, 본 발명에 있어서는 금속피복층, 예를 들면 W를 포함하는 금속피복층은 환원성을 갖고 있어, Mg, Si와 마찬가지로 역시 BaO와 반응하여 유리 Ba를 생성시킨다. 그 반응식은 다음과 같다.The structure of the oxide cathode formed according to the present invention as shown above is shown in FIG. As can be seen in FIG. 2, the oxide cathode of the present invention is divided into a base metal layer 1, an electron-emitting material layer 2, and a metal coating layer 5 formed therebetween. Such an oxide cathode of the present invention generates free Ba through Schemes (2) and (3) mentioned in the prior art. However, in the present invention, the metal coating layer, for example, the metal coating layer containing W has a reducing property, and similarly to Mg and Si, it also reacts with BaO to generate free Ba. The scheme is as follows.
상기 반응식(4)에서 알 수 있는 바와 같이 본 발명의 금속피복층 역시 Ba3WO6라는 반응 생성물을 생산하는데, 이 반응 생성물은 산화물 음극이 동작하여 시간이 경과함에 따라 기체금속층으로부터 확산되어 나오는 Si등과 다시 반응하여 분해되며, 이때 유리 Ba를 또 생성하면서 W로 분해된다. 이 과정은 하기식(5)로 나타낼 수 있다.As can be seen in the reaction formula (4), the metal coating layer of the present invention also produces a reaction product called Ba 3 WO 6 , which reacts with Si and the like diffused from the gas metal layer as time passes by the operation of the oxide cathode. It is reacted and decomposed again, where it is decomposed into W, again producing free Ba. This process can be represented by the following equation (5).
상기 과정에서 알 수 있는 바와 같이, 상기 금속피복층내의 W은 유리 Ba를 두 번 생성시키고 다시 W로 환원되어 환원제로 재사용된다. 이와 같이 본 발명의 금속피복층내의 금속은 환원제로 재사용되므로써 음극의 수명을 연장시킴은 물론 계속적으로 안정적인 전자 방출을 가능하게 한다.As can be seen in the above process, W in the metal coating layer generates free Ba twice, and is then reduced to W and reused as a reducing agent. As described above, the metal in the metal coating layer of the present invention can be reused as a reducing agent to prolong the lifetime of the negative electrode and to enable stable electron emission continuously.
[본 발명의 실시예]Embodiment of the Invention
[실시예]EXAMPLE
Si 및 Mg를 함유한 Ni 기체금속층의 상부 표면을 세정한 다음, 박막 제조법중의 하나인 rf 스퍼터링(rf sputtering)법으로 W금속을 기체금속층의 상부표면에 1000Å의 두께로 피복하였다. 상기 금속피복층 위에 통상의 스프레이 방법으로 Ba를 포함하는 전자방출물질층을 형성하여 산화물 음극을 제조하였다.The upper surface of the Ni base metal layer containing Si and Mg was cleaned, and then W metal was coated on the top surface of the base metal layer with a thickness of 1000 mm by rf sputtering, one of thin film manufacturing methods. An oxide cathode was prepared by forming an electron-emitting material layer including Ba on the metal coating layer by a conventional spray method.
[비교예][Comparative Example]
Si 및 Mg를 함유한 Ni 기체금속층의 상부 표면을 세정한 다음, 상기 기체금속층 위에 통상의 스프레이 방법으로 Ba를 포함하는 전자방출물질층을 형성하여 산화물 음극을 제조하였다.After the upper surface of the Ni gas metal layer containing Si and Mg was cleaned, an oxide cathode was prepared by forming an electron emission material layer including Ba on the gas metal layer by a conventional spraying method.
상기한 실시예 및 비교예에서 제조한 산화물음극을 전자총에 장착하고, 음극 가열용 히터를 삽입 고정한 뒤, 전자총을 전자관에 봉지하고 일정시간 계속 동작시키면서 E5=6.3V조건하에서 Mik 측정방법으로 전자방출 전류의 감소량을 측정하여 그 결과를 제3도에 나타내었다.Above Examples and Comparative rear fixed mounting an oxide cathode produced in Example in the electron gun, and insert the cathode heating heaters, while bag and a period of time continue to operate the electron gun in the electron tube E 5 = E a Mik measurement method under the condition 6.3V The decrease in emission current was measured and the result is shown in FIG.
제3도에 있어서 Mik(Maximum Cathod Current)는 일정 구동조건하에 음극에서 방출되는 최대전류를 의미한다.In FIG. 3, Mik (Maximum Cathod Current) means the maximum current emitted from the cathode under constant driving conditions.
제3도에서 알 수 있는 바와 같이 본 발명에 따른 실시예의 음극은 종래 기술인 비교예의 음극에 비해 약 20%이상의 수명개선 효과가 있었다. 또한 본 발명의 음극은 에미션 특성의 산포도 종래에 비해 월등히 우수하였다.As can be seen in Figure 3 the negative electrode of the embodiment according to the present invention had a life improvement effect of about 20% or more compared to the negative electrode of the comparative example of the prior art. In addition, the cathode of the present invention was much better than the conventional dispersion of the emission characteristics.
[효과][effect]
본 발명의 산화물 음극은 수명이 길며, 안정적인 전자방출 특성을 갖는다.The oxide cathode of the present invention has a long life and has stable electron emission characteristics.
Claims (3)
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| Application Number | Priority Date | Filing Date | Title |
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| KR1019930011344A KR100261454B1 (en) | 1993-06-21 | 1993-06-21 | Oxide cathode |
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| KR1019930011344A KR100261454B1 (en) | 1993-06-21 | 1993-06-21 | Oxide cathode |
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| KR950001839A KR950001839A (en) | 1995-01-04 |
| KR100261454B1 true KR100261454B1 (en) | 2000-07-01 |
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| KR1019930011344A Expired - Fee Related KR100261454B1 (en) | 1993-06-21 | 1993-06-21 | Oxide cathode |
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| KR (1) | KR100261454B1 (en) |
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