KR100222330B1 - Dryer for metal thin plate - Google Patents

Abstract

When drying the elongated material of the thin metal sheet, it is possible to suppress the occurrence of crystals of the metal salt on the main surface of the elongated material.

The drying apparatus 30 is an apparatus for drying both main surfaces of the elongate material 10 to which the surface inside liquid conveyed in the longitudinal direction is attached, and is provided with the dilution apparatus 31 and the removal apparatus 32. As shown in FIG. The dilution apparatus 31 has a pair of sponge rollers 33 which are disposed in contact with the long material 10 so as to face each other. The dilution device 31 supplies water in the width direction toward both main surfaces of the long material 10 so that the surface liquid is discharged. Dilute. The removing device 32 has a pair of upper and lower air knives 50 arranged on the downstream side in the conveying direction of the dilution device 31, and blows away the residual liquids of both main surfaces of the long material 10 to remove the long material. (10) is dried.

Description

Drying apparatus of metal thin plate

1 is a perspective view of an etching line employed in one embodiment and another embodiment of the present invention,

2 is a perspective view of an apparatus in which an embodiment of the present invention is provided,

3 is a schematic side view of an embodiment of the present invention,

4 is a perspective view of a faced device employed by another embodiment of the present invention,

5 is a schematic side view of another embodiment of the present invention.

* Explanation of symbols for main parts of the drawings

10: long material 30: drying device

31 dilution device 32 removal device

33: sponge roller 35: water supply

36: drip tray 92: drying roller

47: vacuum pump 50: air knife

The present invention relates to a drying apparatus, in particular a drying apparatus of a metal thin plate for drying a metal thin plate by removing a liquid attached to the main surface of the long material of the metal thin plate while conveying the long metal thin plate in the longitudinal direction thereof.

A large number of holes for electron beam transmission formed in the aperture grill or shadow mask for a color CRT are conveyed in the longitudinal direction of a long rod-shaped material (hereinafter referred to as a long material). It is formed by going through the process of.

Nickel 36 Long-walled materials such as invar steel and low-carbon aluminized steels are first degreased and washed with water. Next, water-soluble resists are applied to both main surfaces of the elongate material to form a few μm thick resist film. Next, a mask material having a predetermined image corresponding to the hole for electron beam passage to be formed on the surface of the resist film formed on both main surfaces of the long material is matched to the image position on both main surfaces of the long material to be exposed in close contact with each other. Next, development is performed by supplying warm water or the like to the resist film after exposure. Thereafter, the long material is immersed in a solution of muscromic acid, followed by a burning process for drying and strengthening the resist film by heat treatment. The long material which has been burned is once wound in a roller shape and returned to the etching line. In the etching line, an etching process is performed in which the ferric chloride aqueous solution, which is an etching solution, is blown out to form a plurality of holes. After the etching step is completed, a thin film step of peeling the resist film or the like from both main surfaces of the long material is performed.

Originally, the resist film is removed by development and the main surface of the long material should be exposed. An extremely thin resist film or an oxide film of the long material metal is deposited on the etching target surface to be etched after the development. This oxide film is formed by the combination of a component of a long material metal and oxygen in the air during the heat treatment of the treatment. If etching is performed while such a thin film is left, the etching process becomes uneven.

Therefore, in order to uniformly etch the long material, an in-plane treatment for removing the resist film or the oxide film deposited on the etching target surface of the long material to be etched prior to etching is performed. This planarization process is performed by the planarizing apparatus arrange | positioned in front of the legal part of an etching apparatus. The surface planar apparatus is comprised with the surface planar tank which stores a surface planar liquid (an aqueous solution containing oxalic acid, hydrogen peroxide water, and sulfuric acid), and the conveyance roller which immerses a long material in a surface planar tank. The surface flattening device is provided with a drying device for drying both main surfaces of the long material to which the surface flat liquid adheres so that the surface flat liquid does not enter the etching process. As a drying apparatus of this kind, it is known that the peripheral surface of an absorbent sponge roller is brought into contact with both main surfaces of a long material to absorb surface liquid, or air is blown out by air knife on both major surfaces of a long material.

On the other hand, behind the etching apparatus, a cleaning apparatus for removing the etching liquid adhering to the etched long material is provided. This cleaning device is constituted by a plurality of nozzles that spray water onto both main surfaces of a long material. This washing apparatus is also provided with a drying apparatus as described above for drying the long material with the water and the etching liquid after washing.

Japanese Laid-Open Patent Publication No. 5-9755 discloses an etching method in which an etching process for producing a shadow mask used for a high resolution CRT such as a display for a computer is divided into two. This etching method firstly etches the etching solution on one or both main surfaces of the elongated material to form a plurality of concave portions corresponding to the electron beam through holes that do not penetrate the elongated material, and then on one main surface of the elongated material. There is a groove removing step of removing water from the resist film projecting in the center direction at the edge of the recess by flushing water at a high pressure. In this flaw removal process, water is blown out at a low pressure in order to remove the etching liquid adhering to the main surface on the other main surface of the long material. Next, after drying both main surfaces of a raw material with the above-mentioned drying apparatus, the prevention coating process of apply | coating a etch resistant film, such as an ultraviolet curable resin, is performed to the main surface of the elongate material from which the flaw was removed. Then, a second etching step is performed in which the etching liquid is blown out on the main surface on which the etch-resistant coating is not formed, thereby forming perforations through the concave portions of both main surfaces.

In the conventional drying apparatus, the metal ion of the long material and the anion of the noodle or etching solution combine to form a metal salt. For example, in the case of an iron-nickel alloy such as an INVAR material, the long surface material of the long material drawn out of the surface preparation liquid is nickel (Ni) or iron (Fe) in the long material by the surface preparation liquid. The metal salts of Ni ²⁺ or Fe ²⁺ ionized with each other and anions (eg, oxalate ions (C ₂ O ₄ ^2- ) and sulfate ions (SO ₄ ^2- )) in the surface-treating solution adhered to the long material Is generated. When this metal salt is rapidly dried by the above-mentioned drying apparatus, crystals of the metal salt (for example, nickel oxalate, iron oxalate, ferrous sulfate) precipitate. Etching the surface to be etched by spraying the etching solution on the long material with the crystals of the metal salt formed thereon results in a portion where the etching liquid contacts directly on the etching target and a portion that is blocked by the crystal and does not directly contact the etching surface. Cannot be etched.

The main surface of the long material after the flaw removal process in the above-described etching method in which the main surface of the long material which has been cleaned by the cleaning device provided behind the etching device described above or divided into two etching processes is provided to the above-mentioned drying device. When rapidly drying with water, for example, when the main composition of the long material is iron, crystallization (for example, hydroxide) is performed by iron in the long material and the etching solution (for example, ferric chloride aqueous solution) adhered to the main surface. Iron) occurs on the main surface. If the crystals formed are attached to the surface of the resist film, when the long material is immersed in the alkaline solution to peel off the resist film deposited on the main surface in the thin film process, the surface of the resist film to which the crystals are attached does not impinge on the alkaline solution. Cannot be sufficiently peeled off.

When the long material is conveyed in the longitudinal direction, the crystals of the metal salt described above adhere to the circumferential surface of the cylindrical conveying roller provided for conveying the long material. If the crystal is sandwiched between the long material and the conveying roller, the long material is conveyed under a constant tension in the conveying direction, causing a problem that a local depression is formed in the long material, resulting in a product defect. do.

An object of the present invention is to provide an apparatus for drying a metal sheet, which can suppress the generation of crystals of metal salts on the main surface of the metal sheet at the time of drying the elongate material of the metal sheet.

The drying apparatus of the metal thin plate of Claim 1 drys the metal thin plate which dries while conveying the elongate metal thin plate which the liquid which has a component which produces | generates a metal salt to the main surface by combining with the composition in the longitudinal direction. An apparatus comprising: dilution means for diluting a liquid attached to a main surface of a metal sheet by supplying water over the width direction of the metal sheet toward the main surface of the metal sheet, and on the downstream side of the conveying direction of the metal sheet in the dilution means. And removing means for removing the liquid diluted by the dilution means from the main surface of the metal sheet and drying the liquid.

In the drying apparatus of the metal thin plate of Claim 2, the drying apparatus of the metal thin plate of Claim 1 WHEREIN: The dilution means has the liquid absorption property arrange | positioned in contact with the main surface of the said metal sheet so that the axial direction may follow the said width direction. And a cylindrical first suction roller and water supply means for supplying water to the first suction roller.

The drying apparatus of the metal thin plate of Claim 3 is a drying apparatus of the metal thin plate of Claim 1 or Claim 2 WHEREIN: The removal means is a suction apparatus arrange | positioned in contact with the main surface of the said metal sheet so that the axial direction may follow along the said width direction. It is characterized by including the second liquid absorption roller of the cylindrical shape having a liquidity.

In the drying apparatus of the metal thin plate of Claim 4, the drying apparatus of the metal thin plate of Claim 3 WHEREIN: The removal means is further provided with the suction means which sucks the liquid drawn in by the 2nd suction roller.

5. The apparatus for drying a sheet of metal sheet according to claim 5, wherein the drying apparatus for sheet metal sheet according to claim 1 or 2, wherein the removing means includes an air knife that blows gas over the width direction of the sheet of metal toward the main surface of the sheet. It features.

The drying apparatus of the metal thin plate of Claim 6 is a drying apparatus of any one of the metal thin plates of Claim 1 WHEREIN: The dilution means and the removal means are arrange | positioned toward the two main surfaces of a metal thin plate, respectively, It is characterized by the above-mentioned.

The drying apparatus of the metal thin plate of Claim 7 is a drying apparatus of the metal thin plate of Claim 1 or 2 WHEREIN: It is characterized by further including the liquid receiving means which receives the liquid which falls down from a dilution means.

In the drying apparatus of the metal thin plate of Claim 1, water is supplied to the main surface of the metal thin plate conveyed in the longitudinal direction over the width direction by a dilution means, and the liquid adhering to the main surface is diluted. This diluted liquid is removed from the main surface of the metal sheet by the removing means, and the metal sheet is dried.

In the drying apparatus of the metal thin plate of Claim 2, the liquid adhered to the main surface of the metal thin plate is absorbed by the first absorption roller, and the water supplied from the water supply means is supplied to the metal thin plate through the first absorption roller. The liquid is diluted.

In the drying apparatus of the metal thin plate of Claim 3, the liquid diluted by the dilution means is sucked away by the 2nd absorption roller from the main surface of the metal thin plate.

In the drying apparatus of the metal thin plate of Claim 4, the liquid sucked in the 2nd liquid absorption roller is attracted by a suction means.

In the drying apparatus of the metal thin plate of Claim 5, the liquid diluted with the gas blown out by the air knife blows off at the main surface of the metal thin plate, and is removed.

In the drying apparatus of the metal thin plate of Claim 6, the liquid adhering to the main surface of the metal thin plate by dilution means and the removal means in both main surfaces of a metal thin plate is diluted, and is removed.

In the drying apparatus of the metal paving plate of Claim 7, the liquid falling down from the dilution means is received by the liquid receiving means.

EXAMPLE

1 is a schematic diagram showing an etching line used when manufacturing a shadow mask or an aperture grill employing a metal thin plate drying apparatus according to an embodiment of the present invention.

In Fig. 1, the etching line adjusts the tension applied to the elongated material 10 having a sheet thickness of 0.1 to 0.3 mm made of an inverted material, for example, to accumulate the elongated material 10 by accumulating the elongated material 10. (11), a surface forming apparatus (12), an etching apparatus (13), a washing apparatus (14), a thin film apparatus (15), a pure water cleaning apparatus (16), a heating and drying apparatus (17), It mainly has a cutting device 18.

The planarizing device 12 removes the remaining extremely thin resist film or the very thin oxide film generated by the burning process before etching. The etching apparatus 13 supplies an aqueous ferric chloride solution as an etching solution to the etching target surface of the long material 19 to open the hole for electron beam passage. The cleaning device 14 removes the etching liquid from the etched long material 10. The thin film device 15 peels a film such as a resist film or a etch resistant film from the washed long material. The pure water cleaning device 16 cleans the long material 10 after peeling. The heat drying apparatus 17 heats and dries the elongate material 10 cleaned purely. The cutting device 18 cut | disconnects the dried elongate material 10 with the shadow mask or aperture grill one by one.

2 is a perspective view of a planarizing device 12 employing an embodiment of the present invention. In FIG. 2, the planarizing apparatus 12 includes a planarizing tank 20 in which a surface forming solution 24 made of a dilute solution of an acid containing oxalic acid, hydrogen peroxide and sulfuric acid is stored. It is arranged in a V-shape viewed from the side of the tank 20 and the upper surface of the inner surface tank 20, three for immersing the long material 10 in the inner surface liquid 24 of the inner surface tank 20 It has the stainless rollers 21, 22, and 23. In addition, the surface planar device 12 is provided with a drying device 30 for carrying out the surface planar liquid, which is carried out from the surface planar tank 20 and attached to the long material 10, to be dried.

3 is a schematic cross-sectional view showing the configuration of one embodiment of the present invention. In FIG. 3, the drying apparatus 30 is the dilution apparatus 31 arrange | positioned above the liquid level of the surface preparation liquid 24 between the stainless roller 21 and the stainless steel roller 23, and the stainless roller. It has the removal apparatus 32 arrange | positioned at the conveyance direction downstream side of (23). The dilution device 31 is a pair of sponge rollers 33 and 33 having liquid absorbency which are press-contacted to the front and rear of the long material 10, and a sponge roller (from the upper side of the sponge rollers 33 and 33). The water supply part 35 which drops water toward 33 and 33 and the drip tray 36 which receives the liquid falling from the sponge rollers 33 and 33 are provided. The sponge rollers 33 and 33 have a structure in which a cylindrical sponge is fixed around the rotary shaft 34, and the rotary shaft 34 is disposed along the axial direction of the long material 10. In addition, the sponge rollers 33 and 33 follow the conveyance of the elongate material 10, and rotate about the respective rotating shafts 34 and 34. As shown in FIG. The drip tray 36 is disposed so as to surround the sides and sides of the sponge rollers 33 and 33, and an opening 37 and a drain 38 for allowing the long material 10 to pass through the bottom are formed. The water supply part 35 has the discharge parts 39 and 40 arrange | positioned at the upper surface in front of FIG. 2 of the sponge rollers 33 and 33. As shown in FIG. The discharge parts 39 and 40 are collectively connected and connected to the supply source of industrial water through the stop valve 41.

The removal device 32 has a pair of upper and lower air knifes 50 and 50 in which the long material 10 is inserted. Each air knife 50 blows air toward the front and back of the long material 10, respectively. The air volume of this air knife is 1-6 m <3> / min.

Next, the operation of the above-described embodiment will be described.

The metal thin plate 10 is conveyed by a conveying means (not shown) in the longitudinal direction thereof, while the planarizing device 12, the etching device 13, the cleaning device 14, the thin film device 15, and a pure water cleaning device. (16), the heat drying apparatus 17 and the cutting device 18 are continuously processed, respectively.

In the planarizing apparatus 12, the long material 10 is immersed in the planarizing liquid 24 in the planarizing tank 20 by the stainless rollers 21-23. As a result, the residual resist film or oxide film formed on the etching target surface of the long material 10 is removed. The in-plane long material 10 passes between the sponge rollers 33 and 33 of the dilution apparatus 31. When passing between the sponge rollers (33, 33), the water supplied to the sponge rollers (33, 33) by the water supply unit 35 is taken out of the surface tank (20), the amount of long material 10 The nasal solution adhering to the main surface is diluted. Then, the diluted planar liquid adhering to both main surfaces of the long material 10 is blown away by the air knife 50, 50 of the removal device 32, and the long material 10 is dried. In addition, water dripping from the sponge rollers 33 and 33 and the diluted surface liquid are collected in the drip tray 36. As a result, the concentration of the surface liquid remaining in the long material 10 is diluted with water and diluted. Then, the diluent remaining on the main surface of the long material 10 is blown away by the upper and lower pairs of air knives 50 of the removal device 32, and the long material 10 is dried.

In this case, since the inner surface liquid adhering to the long material 10 is diluted and then removed and dried, the occurrence of crystals of the metal salt on the main surface of the long material 10 can be suppressed.

Next, another embodiment of the present invention employed in the etching line shown in FIG. 1 will be described.

4 is a perspective view of a planarizing device 12 employing this embodiment, and FIG. 5 is a cross-sectional schematic diagram showing this embodiment. In FIG. 4, since the structure up to the dilution apparatus 12 is the same as that of the Example mentioned above, description is abbreviate | omitted. In addition, what the same code | symbol as the Example mentioned above has the same function.

In FIG. 4, the removal apparatus 32 has a pair of upper and lower drying rollers 42 and 42. As shown in FIG. The drying rollers 42 and 42 are arranged to be in contact with the long material 10 by sandwiching the metal thin plate 10 so that the axial direction thereof is along the width direction of the long material 10. Moreover, the drying rollers 42 and 42 follow the conveyance of the elongate material 10, and rotate around each rotating shaft 45 and 45, respectively. As shown in FIG. 5, the outer periphery of each drying roller 42 has the deerskin 44 which has a liquid absorption. Inside the drying rollers 42, a hollow rotating shaft 45 is arranged. Further, a suction hole 46 is formed in the trunk portion of the drying roller 42 to communicate the inside of the hollow rotating shaft 45 with the outer circumferential surface of the drying roller 42 (the back side of the deer leather 44). A vacuum pump 47 is connected to one end of the rotating shaft 45.

Here, the inner surface liquid diluted by the dilution device 31 and adhered to both main surfaces of the long material 10 is sucked by the deerskin 44 on the surface of the drying roller 42 of the removal device 32. The sucked in-plane liquid is sucked into the vacuum pump 47 via the suction hole 46 and the passage in the rotating shaft 45. As a result, both main surfaces of the elongate material 10 are dried.

Moreover, in order to prevent the precipitation of the crystal of the metal salt by the main component of the long-length material 10, and etching liquid, it can be used when the drying apparatus 30 of this invention is shown below.

(a) FIG. 1 shows that the drying apparatus 30 is disposed in the washing apparatus 14 shown in FIG. 1, and after the washing process, the etching liquid attached to the main surface of the long material 10 is diluted with the dilution apparatus 31. One etchant is removed from the main surface of the long material 10 by the removal device 32.

(b) The etching step is divided into two, and in the etching method, the drying apparatus 30 is disposed between the flaw removing step and the prevention coating step, and the etching solution attached to the main surface of the long material 10 is diluted with dilution means ( 31), the diluted etching solution is removed from the main surface of the long material 10 by the removal means 32.

According to the metal sheet drying apparatus according to claim 1, since the liquid adhering to the metal sheet is diluted and then removed and dried, it is possible to suppress the occurrence of crystals of the metal salt by the main composition of the metal sheet and the liquid during drying of the metal sheet. It becomes possible.

According to the drying apparatus of the metal sheet according to claim 2, since the absorption and dilution of the liquid adhered to the main surface of the long material is carried out simultaneously in the width direction of the long material, the liquid on the entire surface of the main surface of the long material can be efficiently diluted. Can be.

According to the drying apparatus of the metal sheet according to claim 3, the second liquid absorbing roller sucks up the diluted liquid attached to the main surface of the long material and can reliably dry the long material.

According to the drying apparatus of the metal thin plate according to claim 4, it is possible to suck the liquid sucked into the second liquid absorption roller by the suction means, so that the second liquid absorption roller can be always maintained in a good liquid absorption.

According to the drying apparatus of the metal sheet according to claim 5, the diluted liquid attached to the main surface of the long material can be blown out by the air knife, so that the long material can be reliably dried.

According to the drying apparatus for metal thin plates according to claim 6, both main surfaces of the long material can be dried without depositing crystals of metal salts.

According to the drying apparatus of the metal thin plate according to claim 7, it is possible to prevent the contamination around the apparatus by the liquid by receiving and recovering the liquid falling from the dilution means by the liquid receiving means.

Claims (7)

In the drying apparatus of the metal thin plate which carries out the conveyance of the elongate metal thin plate which the liquid which has a component which produces | generates a metal salt by its composition to the main surface in the longitudinal direction to the main surface of the said metal thin plate, Dilution means for diluting the liquid adhered to the main surface of the metal thin plate by supplying water over the width direction of the metal thin plate, and disposed on the downstream side of the conveying direction of the metal thin plate from the dilution means, and diluting the liquid diluted by the dilution means. Drying apparatus for removing a metal sheet, characterized in that it comprises a removal means for drying to remove from the main surface. The cylindrical liquid absorbing roller as claimed in claim 1, wherein the dilution means has a liquid absorptivity arranged to be connected to the main surface of the elongated material so that its axial direction is along the width direction. Drying apparatus of a metal sheet, characterized in that it comprises a water supply means for supplying. 3. The cylindrical suction cup according to claim 1 or 2, wherein said removing means has a cylindrical liquid absorbing roller having liquid absorptivity disposed in contact with the main surface of said elongate material such that its axial direction is along said width direction. Drying apparatus for metal foil. 4. The drying apparatus of claim 3, wherein the removing means further comprises suction means for sucking the liquid sucked into the second suction roller. The method of claim 1 or claim 2, wherein the removal means, the drying of the metal thin plate, characterized in that the main surface of the elongated material in the width direction of the elongated material having an air knife to blow out the gas over the width direction of the elongated material Device. 2. The apparatus of claim 1, wherein the dilution means and the removal means are disposed toward both main surfaces of the elongate material. 3. The apparatus of claim 1 or 2, further comprising a liquid receiving means for receiving a liquid falling downward from the dilution means.