JPWO2013183248A1 - Cleaning device - Google Patents

Abstract

An object of the present invention is to provide a cleaning device capable of efficiently removing dust, reducing the cost of the device, and reducing the size of the device, and is present on the surface (S1) of the object to be cleaned (S). A cleaning device (1) that removes dust generated by electrostatic force using a cleaning roller (2) that comes into contact with the surface (S1) to be cleaned (S) and cleaning that comes into contact with the cleaning roller (2) The roller (2) is equipped with brush rollers (3A, 3B) for removing dust on the surface. Since dust on the surface of the cleaning roller (2) is removed by the brush rollers (3A, 3B), dust can be efficiently removed.

Description

  The present invention relates to a cleaning device that removes dust existing on the surface of a cleaning object using electrostatic force. More specifically, the cleaning object includes, for example, a glass substrate, a printed circuit board (PCB, PCBA, etc.), a film, The present invention relates to a cleaning device suitable for a sheet, a plastic plate or the like having a relatively high surface smoothness.

  A cleaning system that removes foreign matters such as dust adhering to the surface of the object to be cleaned using electrostatic force while rotating the cleaning roller in contact with the surface of the object to be cleaned is known (see Patent Document 1). .

  In such a cleaning system, since dust is sequentially accumulated on the surface of the cleaning roller, it is necessary to periodically perform maintenance work for removing dust from the surface. Therefore, the applicant of the present application is not required to perform maintenance work regularly, so that the dust adsorption and removal operation by the cleaning roller can be stably continued over a long period of time. Filed for a cleaning device provided separately (see Patent Document 2).

  FIG. 8 is a side view schematically showing the layout of the main parts constituting the conventional cleaning device 100. The cleaning device 100 includes a cleaning roller 111, a transfer roller 112, a charging control roller 113, a brush roller 114, a metal roller 115, and a cleaning blade 116.

  The cleaning roller 111 can charge the surface with a charge for adsorbing dust adhering to the surface S1 of the object to be cleaned S using electrostatic force. A transfer roller 112 that rotates while contacting the surface of the cleaning roller 111 and a charge control roller 113 that rotates while contacting the surface of the transfer roller 112 are provided on the opposite side of the cleaning roller 111 from the object to be cleaned S. It has been.

  The transfer roller 112 is formed using a material capable of charging the surface with a charge for adsorbing dust adhering to the surface of the cleaning roller 111 using electrostatic force. The transfer roller 112 rotates while contacting the surface of the cleaning roller 111, thereby generating a potential difference between the cleaning roller 111 and the transfer roller 112 according to the difference in surface characteristics between the cleaning roller 111 and the transfer roller 112.

  An external power supply 120 is connected to the core metal 113a of the charge control roller 113, and the charge for adsorbing dust adhering to the surface S1 of the object to be cleaned S by electrostatic force is used as the cleaning roller 111 and the transfer roller. 112 can be given.

  The brush roller 114 rotates in a direction opposite to the rotation direction of the transfer roller 112 to scrape dust adhering to the surface of the transfer roller 112, and can rotate in contact with the transfer roller 112. Is provided.

  The metal roller 115 is installed in contact with the brush roller 114 and rotates in the direction of rotation of the brush roller 114. An external power supply 121 is connected to the metal roller 115 so that a voltage is applied so as to generate a potential difference with the transfer roller 112. A cleaning blade 116 for scraping dust is provided in the vicinity of the metal roller 115.

  In the cleaning device 100 described above, dust adhering to the surface of the cleaning roller 111 is transferred (moved) to the transfer roller 112 by electrostatic force, and the dust transferred to the transfer roller 112 is scraped off by the brush roller 114. The dust scraped off by the brush roller 114 is attracted to the metal roller 115 by electrostatic force, and the dust attracted to the metal roller 115 is scraped off from the metal roller 115 by the cleaning blade 116.

  However, in the cleaning device 100, the dust adhering to the surface of the cleaning roller 111 is transferred to the transfer roller 112, so that the transfer efficiency of the dust from the cleaning roller 111 to the transfer roller 112 is not lowered. Appropriate materials and surface characteristics must be selected and set. If these conditions are not appropriate, the transfer efficiency of dust from the cleaning roller 111 to the transfer roller 112 may be reduced, and the cleanliness of the cleaning roller 111 may be reduced.

  In addition, the cleaning device 100 is costly due to the provision of the transfer roller 112, and also requires an arrangement space. Therefore, it is desired to further improve the cost of the device and make the structure compact. It was.

  Further, the cleaning device 100 is configured assuming that the cleaning target S is transported in one direction. However, the cleaning apparatus 100 may be transported not only in one direction but also in both directions. It has been desired to realize a cleaning device that can be used appropriately.

JP 2010-99565 A Japanese Patent No. 4886097

Means for solving the problems and their effects

  The present invention has been made in view of the above problems, and can improve the removal efficiency of dust adhering to the surface of the cleaning roller, increase the cleanliness of the cleaning roller, reduce the cost of the apparatus, and make the structure compact. In addition, it is an object of the present invention to provide a highly convenient cleaning device that can be suitably used when the object to be cleaned is conveyed not only in one direction but also in both directions.

  In order to achieve the above object, a cleaning device (1) according to the present invention is a cleaning device that removes dust existing on the surface of the object to be cleaned using electrostatic force, and is a cleaning device that contacts the surface of the object to be cleaned. A roller and a brush body that contacts the cleaning roller and removes dust on the surface of the cleaning roller are provided.

  According to the cleaning device (1), since the brush body is brought into contact with the cleaning roller, dust existing on the surface of the cleaning roller can be removed by the brush body, and a conventional transfer roller is provided. The dust removal efficiency can be increased as compared with the apparatus provided, and the cleanliness of the surface of the cleaning roller can be increased. Here, the surface to be cleaned means a surface that forms a boundary between the object to be cleaned and the external space, and includes not only one (upper) surface but also the other (lower) surface. .

  The cleaning device (2) according to the present invention further comprises a metal roller that contacts the brush body and receives dust from the brush body, and dust attached to the metal roller in the cleaning device (1). And a charge applying mechanism for applying charge to the cleaning roller, the brush body, and the metal roller.

  According to the cleaning device (2), dust adhering to the surface of the cleaning roller by electrostatic force is scraped off by the brush body, and dust scraped off by the brush body is adsorbed on the metal roller by electrostatic force. The dust adsorbed on the metal roller is scraped off from the metal roller by the blade body. Therefore, the dust suction and removal operation by the cleaning roller can be stably maintained, and the cost of the apparatus can be reduced and the structure can be made compact by adopting a structure in which the conventionally used transfer roller is omitted. Can do.

  The cleaning device (3) according to the present invention is characterized in that a plurality of the brush bodies are provided in the cleaning device (1) or (2).

According to the cleaning device (3), since a plurality of the brush bodies are provided, the brush bodies can be brought into sliding contact with the cleaning roller at a plurality of locations and adhered to the surface of the cleaning roller. The dust removal efficiency can be increased, and the cleanliness of the cleaning roller can be increased.
Here, the form in which a plurality of brush bodies are provided is not only a form in which a plurality of brush bodies having substantially the same length as the cleaning roller are provided, but is shorter than the cleaning roller (for example, A configuration in which a plurality of the brush bodies having a length (about half) are disposed at positions shifted in the axial direction of the cleaning roller is also included.

  The cleaning device (4) according to the present invention is characterized in that, in the cleaning device (3), the plurality of brush bodies rotate in opposite directions.

  According to the cleaning device (4), since the plurality of brush bodies are configured to rotate in opposite directions, for example, when two brush bodies are used, the rotational speed of each brush body is adjusted. By providing the difference, the cleaning roller can be rotated in the rotation direction of the brush body having the higher rotation speed. Therefore, the cleaning roller can be rotated not only in one direction but also in the reverse direction by setting the rotation speed of each brush body, and the transport direction of the cleaning target is not selected, that is, in any transport direction. It is possible to provide a highly convenient device that can be used.

  Moreover, the cleaning device (5) according to the present invention is characterized in that, in the cleaning device (3), the plurality of brush bodies rotate in the same direction.

  According to the cleaning device (5), when the conveying direction of the object to be cleaned is only one direction, the cleaning roller only needs to be rotated in one direction, so that the plurality of brush bodies are rotated in the same direction. By adopting such a configuration, it is possible to reduce the cost by simplifying the configuration of the apparatus.

  The cleaning device (6) according to the present invention is characterized in that in any one of the cleaning devices (1) to (5), the rotational speed of the brush body can be arbitrarily set.

According to the cleaning device (6), since the rotational speed of the brush body can be arbitrarily set, the rotational speed of the cleaning roller, depending on the setting of the rotational speed of the brush body and the rotational direction thereof, and It is possible to adjust the rotation direction.
For example, when a plurality of brush bodies are configured to rotate in the same direction, the cleaning roller can be easily rotated in the rotation direction of each brush body. On the other hand, when each brush body is configured to rotate in opposite directions, for example, if the rotation speeds of the two brush bodies are set to the same speed, it is possible to control the rotation of the cleaning roller. By setting the rotation speed of each brush body to a different speed, it is possible to control the cleaning roller to rotate in a desired direction.

For example, the rotational speed of each brush body can be set to several stages (for example, low speed, medium speed, and high speed), and when the rotational speed of each brush body is set to medium speed, the rotation of the cleaning roller is stopped. When the rotation speed of one brush body is set to a low speed and the rotation speed of the other brush body is set to a high speed, the cleaning roller is rotated in the rotational direction of the other brush body. Be controlled.
Conversely, when the rotation speed of one brush body is set to a high speed and the rotation speed of the other brush body is set to a low speed, the cleaning roller is controlled to rotate in the direction of rotation of the one brush body. In this way, the transport direction of the object to be cleaned can be switched as appropriate, and it can be adapted to a transport system that requires bidirectional transport, and a highly convenient apparatus can be obtained.

  The cleaning device (7) according to the present invention is characterized in that a single brush body is provided in the cleaning device (1) or (2).

  According to the cleaning device (7), the brush body rotates in the direction opposite to the cleaning roller, and the brush body efficiently scrapes dust from the surface of the cleaning roller. The cost can be reduced by simplifying the configuration of the apparatus.

  The cleaning device (8) according to the present invention is characterized in that, in the cleaning device (7), the rotational speed of the brush body can be arbitrarily set.

  According to the cleaning device (8), the rotation speed can be set to an optimum value according to the state of dust existing on the surface of the object to be cleaned.

  The cleaning device (9) according to the present invention uses any two of the cleaning devices (1) to (8), and the cleaning roller that contacts the surface of the object to be cleaned and removes dust is It is characterized in that it is disposed on both the upper and lower surfaces of the upper surface side to be cleaned and the lower surface side of the object to be cleaned.

  According to the cleaning device (9), dust existing on both the upper and lower surfaces of the object to be cleaned can be removed simultaneously by a single operation, and a cleaning device with extremely high work efficiency can be provided.

It is a side view which shows typically the layout of the principal part which comprises the cleaning apparatus which concerns on embodiment of this invention. It is the perspective view which looked at the cleanliness apparatus which concerns on embodiment from the front lower part. It is the perspective view which looked at the cleaning device concerning an embodiment from the back lower part. FIG. 4 is a cross-sectional view taken along the line IV-IV in FIG. 3. It is the side view which showed typically the layout of the principal part which comprises the cleaning apparatus which concerns on another embodiment. It is the side view which showed typically the layout of the principal part which comprises the cleaning apparatus which concerns on another embodiment. It is the side view which showed typically the layout of the principal part which comprises the cleaning apparatus which concerns on another embodiment. It is the side view which showed typically the layout of the principal part which comprises the conventional cleaning apparatus.

  Embodiments of a cleaning device according to the present invention will be described below with reference to the drawings. FIG. 1 is a side view schematically showing a layout of a main part constituting the cleaning device according to the embodiment.

  The cleaning device 1 is moved relative to the cleaning object S while rotating the surface of the cleaning object 2 in contact with the surface (in this case, the lower surface) S1 of the cleaning object S, so that the surface S1 of the cleaning object S is moved. The dust adhering to the top (for example, minute dust such as a conductor or a dielectric) is removed using the electrostatic force applied to the cleaning roller 2.

  The cleaning device 1 includes a cleaning roller 2 that contacts the surface S1 of the object to be cleaned S, two brush rollers 3A and 3B that contact the cleaning roller 2 and remove dust on the surface of the cleaning roller 2, and these brush rollers. A metal roller 4 that receives the dust from each brush roller 3A, 3B in contact with 3A, 3B and a blade 5 that removes the dust attached to the metal roller 4 are configured.

  The cleaning roller 2, the brush rollers 3A, 3B, and the metal roller 4 are rotatably supported by an insulating member (not shown), and the cleaning device 1 includes the cleaning roller 2, the brush rollers 3A, 3B. A charge applying mechanism, which will be described later, is provided for applying a charge to the metal roller 4.

  The cleaning roller 2 can charge the surface by using electrostatic force to adsorb dust adhering to the surface S1 of the object to be cleaned S by using electrostatic force. Dust is adsorbed by electrostatic force.

  A pair of left and right brush rollers 3 </ b> A and 3 </ b> B that rotate in opposite directions while contacting the surface of the cleaning roller 2 and remove dust on the surface of the cleaning roller 2 are provided obliquely below the cleaning roller 2. The brush rollers 3A and 3B are configured so that the rotation speed can be individually set. The brush rollers 3A and 3B are configured so that a potential difference is generated between the brush rollers 3A and 3B and the cleaning roller 2 during cleaning. A potential having the same sign as the charge to be charged on the surface is applied.

  Brush roller 3A, 3B has the brush part (hair part) 3b made from a synthetic resin in the metal core 3a. The shape outside the cross section of the brush portion 3b is not particularly limited, and examples thereof include a circular shape, an elliptical shape, a polygonal shape, a wave curve shape, or a shape formed by combining a curve and a straight line. Can be employed.

  The rotation directions of the brush rollers 3A and 3B are fixed in directions that rotate in opposite directions. When the rotation direction is switched, the contact direction of the brush portion 3b that is in sliding contact with the cleaning roller 2 or the like is changed, and dust is scattered due to bounce of the hair tip at that time, and the sliding contact state with the cleaning roller 2 This is because the dust removal efficiency may be reduced due to the change of.

  Below the brush rollers 3A and 3B, there is disposed a metal roller 4 that rotates while contacting the brush roller 3A in a rotating direction while rotating while contacting the brush roller 3B in a direction opposite to the rotating direction. ing. The metal roller 4 is also configured to be applied with a potential having the same sign as the charge to be charged on the surface of the cleaning roller 2 at the time of cleaning so that a predetermined potential difference is generated between the metal roller 4 and the cleaning roller 2. The metal roller 4 removes dust from the brush rollers 3A and 3B.

  In the vicinity of the metal roller 4, a blade 5 that scrapes off dust adhering to the surface of the metal roller 4 at the tip scraping portion is disposed. The blade 5 scrapes off dust adhering to the surface of the metal roller 4. And is collected by a dust collecting unit (not shown). The blade 5 is formed of, for example, an elastic body made of synthetic resin (for example, thermosetting urethane resin) or the like, and is held by a holder (not shown).

  In the cleaning device 1 described above, the rotational speed of each of the brush rollers 3A and 3B can be set (shifted) to an arbitrary rotational speed. Therefore, depending on the setting state of the rotational speed of the brush rollers 3A and 3B, The cleaning roller 2 can be rotated not only in one direction but also in the opposite direction.

  For example, when the rotation speed of the brush roller 3A is made higher than the rotation speed of the brush roller 3B, the cleaning roller 2 can be rotated in the rotation direction (arrow α ′ direction) of the brush roller 3A having the higher rotation speed. In addition, cleaning can be performed while the object to be cleaned S is conveyed in the direction of the arrow α.

On the other hand, when the rotation speed of the brush roller 3B is made higher than the rotation speed of the brush roller 3A, the cleaning roller 2 can be rotated in the rotational direction (arrow β ′ direction) of the brush roller 3B having the higher rotation speed. In addition, cleaning can be performed while the object to be cleaned S is conveyed in the direction of arrow β.
Further, it is possible to control the rotation of the cleaning roller 2 by setting the rotation speeds of the brush roller 3A and the brush roller 3B to the same speed.

  Various methods can be used for setting the rotational speeds of the brush rollers 3A and 3B. For example, the brush rollers 3A and 3B can be set (shifted) in three stages (low speed, medium speed, and high speed) and rotated. Combination of speeds, that is, a combination in which the brush roller 3A is high speed and the brush roller 3B is low speed, a combination in which the brush roller 3A is low speed and the brush roller 3B is high speed, or a combination in which both the brush rollers 3A and 3B are medium speed As a result, the above-described switching control of the rotation direction of the cleaning roller 2 can be easily performed.

  According to the cleaning device 1 described above, when the cleaning roller 2 comes into contact with the dust adhered to the cleaning target S to be cleaned, the dust is removed from the surface S1 of the cleaning target S, and the surface of the cleaning roller 2 is removed. Adsorbed.

  When the cleaning roller 2 rotates and dust adsorbed on the surface of the cleaning roller 2 comes into contact with the brush rollers 3A and 3B, the dust is scraped off from the surface of the cleaning roller 2 by the brush rollers 3A and 3B. It is attracted to the surface of the metal roller 4. As the metal roller 4 rotates, dust adhering to the surface of the metal roller 4 is eventually scraped off by the blade 5.

  With the above configuration, the dust is efficiently scraped off from the surface of the cleaning roller 2 by the brush rollers 3A and 3B and is not returned to the surface S1 of the object to be cleaned S. Therefore, it is possible to continuously perform the dust adsorption operation over a long period of time.

  FIG. 2 is a perspective view of the cleaning device 1 according to the embodiment as viewed from the lower front side, and FIG. 3 is a perspective view of the cleaning device 1 as viewed from the lower rear side. 4 is a cross-sectional view taken along the line IV-IV in FIG.

  The cleaning device 1 is unitized as a unitary structure by a frame unit 10. The frame unit 10 connects the left and right side plate portions 11 and 12 having a rectangular shape that rotatably supports the cleaning roller 2, the brush rollers 3 </ b> A and 3 </ b> B, and the metal roller 4, and the four corners of these side plate portions 11 and 12. The upper angle members 13 and 14 and the lower angle members 15 and 16 are included.

  The side plate portions 11 and 12 are made of an insulating material (for example, a resin such as polyacetal), and the side plate portions 11 and 12 are each rotated by the cleaning roller 2, the brush rollers 3 </ b> A and 3 </ b> B, and the metal roller 4. Attachment holes for attaching the shaft are respectively formed at predetermined positions.

  Bearings 17a into which the rotation shafts of the cleaning roller 2, the brush rollers 3A and 3B, and the metal roller 4 are inserted are respectively incorporated in these mounting holes, and an electrode portion 17b is electrically connected to the outer ring portion of each of the bearings 17a. Built in contact with. Further, an insulating ring-shaped lid member 17c for fixing the bearing 17a so as not to be detached from the mounting hole is attached to the outer surface of each of the mounting holes.

  Predetermined charges can be applied to the cleaning roller 2, the brush rollers 3A and 3B, and the metal roller 4 from the electrode portion 17b via the bearing 17a. A charge applying mechanism is configured including the bearing 17a and the electrode portion 17b incorporated in each of the through holes.

  Pulleys 18 and 19 made of an insulator are attached to the ends of the rotating shafts of the brush rollers 3A and 3B inserted into the side plate portion 11, respectively. A pulley 20 made of an insulator is attached to the end of the rotating shaft of the metal roller 4 inserted into the side plate 12.

  One side of the mounting plate 21 having a substantially L shape is fixed to the bottom surface of one end side of the lower angle members 15, 16, and the brush drive motor 23 </ b> A via the auxiliary plate 22 is attached to the other side of the mounting plate 21. 23B is attached. On the other side of the mounting plate 21, insertion holes 21 a through which the rotation shafts of the brush drive motors 23 </ b> A and 23 </ b> B are inserted are formed in the shape of a long hole in two left and right sides, and a fixing member (bolt for fixing the auxiliary plate 22 ) In order to attach 41, the attachment hole 21b is formed in the shape of a long hole on both sides of the insertion hole 21a. Pulleys 24 and 25 made of an insulator are mounted on the tip ends of the rotation shafts of the brush drive motors 23A and 23B inserted through the insertion holes 21a of the mounting plate 21, respectively.

  The pulley 18 of the brush roller 3A and the pulley 24 of the brush drive motor 23A are wound around the transmission belt 26. Similarly, the pulley 19 of the brush roller 3B and the pulley 25 of the brush drive motor 23B are wound around the transmission belt 27. Yes. By individually controlling the driving of the brush drive motors 23A and 23B, the rotational speeds of the brush rollers 3A and 3B can be set (shifted) to predetermined speeds.

  Further, one side of the mounting plate 28 having a substantially L shape is fixed to the bottom surfaces of the other angle members 15 and 16, and a metal roller driving motor 30 is mounted on the other side of the mounting plate 28. The auxiliary plate 29 is attached with a fixing member (bolt) 42. On the other side of the mounting plate 28, several mounting holes 28 a for fixing the auxiliary plate 29 with fixing members (bolts) 42 are formed on the left and right, and the fixing member 42 is inserted above the auxiliary plate 29. Insertion holes 29a for attachment are formed in a long hole shape at two places on the left and right.

  An insertion hole 29b through which the rotation shaft 30a of the metal roller drive motor 30 passes is formed near the substantially central portion of the auxiliary plate 29, and is insulated from the tip of the rotation shaft 30a of the metal roller drive motor 30 inserted through the insertion hole 29b. A pulley 31 formed of a body is attached. The pulley 20 of the metal roller 4 and the pulley 31 of the metal roller drive motor 30 are wound around the transmission belt 32, and the rotation speed of the metal roller 4 is set to a predetermined speed by controlling the drive of the metal roller drive motor 30. It is possible to set.

  As shown in FIG. 4, the blade 5 is fixed to the blade attachment portion 33. A dust collecting unit (not shown) for collecting the dust separated by the blade 5 is attached to the lower side of the blade 5.

  Next, the cleaning operation of the cleaning device 1 according to the embodiment will be described with reference to FIG. In the present embodiment, it is assumed that the rotational speeds of the brush rollers 3A and 3B can be set and switched in three stages (predetermined values of low speed, medium speed, and high speed). However, the method of setting (shifting) the rotation speed of the brush rollers 3A and 3B is not limited to this form.

  First, when the object to be cleaned S is cleaned while being conveyed in the direction of the arrow α, the brush drive motor 23A is set so that the rotation speed of the brush roller 3A is high and the rotation speed of the brush roller 3B is low. , 23B drive switching control. For example, the drive switching control is preferably configured to be interlocked with an operation (conveying direction switching operation) of a conveying conveyor (not shown) that conveys the object S to be cleaned.

  Since the rotational speed of the brush roller 3A becomes larger than the rotational speed of the brush roller 3B by the drive switching control, the cleaning roller 2 rotates in the follower direction (arrow α ′ direction) of the brush roller 3A. It becomes possible to perform cleaning while conveying the cleaning body S in the direction of the arrow α.

  Further, in the case where the flow of the conveyer (not shown) is temporarily stopped, such as when the conveyance of the cleaning object S is temporarily suspended, the brush roller 3A is simultaneously rotated so that the rotation speed of the brush roller 3A becomes a medium speed. The drive switching control of the brush drive motors 23A and 23B is performed so that the rotation speed of 3B is also medium.

  By the drive switching control, the rotation speed of the brush roller 3A and the rotation speed of the brush roller 3B become the same speed, so that the rotation of the cleaning roller 2 can be stopped and the conveyance of the cleaning target S is temporarily interrupted. It becomes possible.

  Further, when the object to be cleaned S is cleaned while being conveyed in the direction of the arrow β opposite to the direction of the arrow α, the rotation speed of the brush roller 3B is high, while the rotation speed of the brush roller 3B is high. Thus, drive switching control of the brush drive motors 23A and 23B is performed. It is desirable that the drive switching control is also configured so as to be interlocked with an operation (conveying direction switching operation) of a conveying conveyor (not shown) that conveys the object S to be cleaned.

  By the drive switching control, the rotation speed of the brush roller 3B becomes higher than the rotation speed of the brush roller 3A, so that the cleaning roller 2 rotates in the follower direction (arrow β ′ direction) of the brush roller 3B. It becomes possible to perform cleaning while transporting the cleaning body S in the direction of the arrow β.

  According to the cleaning device 1 according to the above embodiment, since the brush rollers 3A and 3B are in contact with the cleaning roller 2, dust existing on the surface of the cleaning roller 2 is removed by the plurality of brush rollers 3A and 3B. As a result, the dust removal efficiency can be increased and the cleanliness of the surface of the cleaning roller 2 can be increased as compared with the conventional apparatus (see FIG. 8) provided with the transfer roller.

  Further, according to the cleaning device 1, dust adsorbed by the electrostatic force on the surface of the cleaning roller 2 is scraped off by the brush rollers 3A and 3B, and the dust scraped off by the brush rollers 3A and 3B is removed by the electrostatic force. Since the dust adsorbed by the metal roller 4 and scraped by the metal roller 4 is scraped off from the metal roller 4 by the blade 5, the dust adsorbing operation by the cleaning roller 2 is stably maintained for a long time, and the transfer used in the past is used. By adopting a structure in which the roller is omitted, the cost of the apparatus can be reduced and the structure can be made compact.

  Further, according to the cleaning device 1, the plurality of brush rollers 3A, 3B are configured to rotate in opposite directions, and the rotation speed of the brush rollers 3A, 3B can be arbitrarily set. By providing a difference in the rotation speeds of the rollers 3A and 3B, the cleaning roller 2 can be rotated not only in one direction but also in the reverse direction, and the object S to be cleaned is not only in one direction but also in the reverse direction. Can also be transported. By making the rotation speeds of the brush rollers 3A and 3B the same, the rotation of the cleaning roller 2 can be stopped, and a highly convenient apparatus that can cope with any conveyance direction can be obtained.

In the above embodiment, the case where the two brush rollers 3A and 3B are used as the brush body that removes dust on the surface of the cleaning roller 2 has been described. However, a configuration in which three or more brush rollers are used may be employed. .
For example, a multiple of two rollers (four, six, etc.) are arranged symmetrically with respect to the cleaning roller 2, and these brushes are divided into a plurality of brush roller groups on the right side and a plurality of brush roller groups on the left side. By configuring the roller groups to rotate in opposite directions, the same control as described above can be performed. In this case, it is preferable to appropriately arrange (add) metal rollers corresponding to the left and right brush roller groups.

  Further, in the above embodiment, the two brush rollers 3A and 3B are disposed and are configured to rotate in opposite directions to each other, but the rotation direction of the cleaning roller 2 may be only one direction (that is, In the case where the conveyance direction of the cleaning target S is only one direction), the brush rollers 3A and 3B may be configured to rotate in the same direction.

Further, when the rotation direction of the cleaning roller 2 may be only one direction, the brush roller may be constituted by one. In this case, the cleaning device 1A as shown in FIG. The roller 3 rotates in the opposite direction to the cleaning roller 2 so that the brush roller 3 can efficiently scrape dust from the surface of the cleaning roller 2. With the configuration of the cleaning device 1A as shown in FIG. 5, the cost of the device can be further reduced by simplifying the configuration of the device.
Conversely, a configuration in which three or more brush rollers are used may be employed.

  In the above-described embodiment, the case where the brush rollers 3A and 3B having substantially the same length as the cleaning roller 2 are used has been described. However, a configuration in which a plurality of brush rollers having different lengths from the cleaning roller 2 are used in combination. It is good. For example, a plurality of brush rollers having a length shorter than the cleaning roller 2 (for example, about half) may be employed and disposed at positions shifted in the axial direction of the cleaning roller 2. According to this form, the cost of parts can be reduced by using a short brush roller, and the structure can be made compact.

  In the above embodiment, the cleaning device 1 is disposed below the cleaning target S, and the lower surface of the cleaning target S is cleaned. However, as shown in FIG. Can be arranged on the upper side of the body S to be cleaned, and the upper surface of the body S to be cleaned can be cleaned.

  In addition, as shown in FIG. 7, the cleaning device 1A is disposed on the lower side of the object to be cleaned S, the cleaning device 1B is disposed on the upper side, and the upper and lower surfaces of the object to be cleaned S are simultaneously cleaned. May be configured. The cleaning rollers 2 are disposed on the upper and lower surfaces of the upper surface of the object to be cleaned S and the lower surface of the object to be cleaned S, so that dust present on both the upper and lower surfaces of the object to be cleaned S can be simultaneously removed with a single operation. Therefore, it is possible to provide the cleaning device 1C with extremely high work efficiency.

  When the cleaning device is disposed on the upper side of the object to be cleaned S like the cleaning device 1B, the cleaning roller 2 is provided so that the upper surface can be appropriately pressed according to the shape of the surface of the object to be cleaned S. It is preferable to have a configuration that can swing up and down. For example, the frame unit 10 as a whole can swing up and down, or a rotation support mechanism (not shown) that allows the cleaning roller 2 to swing along an arc is separately provided in the frame unit 10. A configuration in which the cleaning roller 2 is rotated (swinged) in the vertical direction around the rotation shaft of the support mechanism may be employed.

  Further, the mounting position of the blade 5 is not limited to the position shown in FIG. 4, and is arranged at a position suitable for scraping dust from the metal roller 4 in consideration of the structure of the frame unit 10 and the like. It is desirable to do.

  A cleaning device that removes dust from a substrate such as a glass substrate, a printed substrate, a film, a sheet, or a plastic plate that is frequently used for mounting a semiconductor device, and can be widely used in the field of semiconductor devices.

DESCRIPTION OF SYMBOLS 1 Cleaning apparatus 1A, 1B, 1C Cleaning apparatus 2 Cleaning roller 3A, 3B Brush roller 3 Brush roller 4 Metal roller 5 Blade 10 Frame unit 11, 12 Side plate part 13, 14 Upper angle member 15, 16 Lower angle member 23A, 23B Brush drive motor 30 Metal roller drive motor
S object to be cleaned
S1 surface

Claims (9)

A cleaning device that removes dust existing on the surface of an object to be cleaned using electrostatic force,
A cleaning roller in contact with the surface of the object to be cleaned;
A cleaning device comprising: a brush body that contacts the cleaning roller and removes dust on the surface of the cleaning roller. A metal roller that contacts the brush body and receives dust from the brush body;
A blade body for removing dust adhering to the metal roller;
The cleaning apparatus according to claim 1, further comprising: a charge applying mechanism that applies charge to the cleaning roller, the brush body, and the metal roller. The cleaning device according to claim 1, wherein a plurality of the brush bodies are provided. The cleaning device according to claim 3, wherein the plurality of brush bodies are configured to rotate in directions opposite to each other. The cleaning device according to claim 3, wherein the plurality of brush bodies are configured to rotate in the same direction. The cleaning device according to claim 1, wherein a rotation speed of the brush body can be arbitrarily set. The cleaning device according to claim 1, wherein a single brush body is provided. The cleaning device according to claim 7, wherein a rotation speed of the brush body can be arbitrarily set. Using any two of the cleaning devices (1) to (8), a cleaning roller that contacts the surface of the object to be cleaned and removes dust is provided on the upper surface side of the object to be cleaned and the lower surface side of the object to be cleaned. A cleaning device arranged on both upper and lower surfaces.

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