JPWO2011105490A1 - 炭化珪素質焼結体およびこれを用いた摺動部品ならびに防護体 - Google Patents
炭化珪素質焼結体およびこれを用いた摺動部品ならびに防護体 Download PDFInfo
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- JPWO2011105490A1 JPWO2011105490A1 JP2012501846A JP2012501846A JPWO2011105490A1 JP WO2011105490 A1 JPWO2011105490 A1 JP WO2011105490A1 JP 2012501846 A JP2012501846 A JP 2012501846A JP 2012501846 A JP2012501846 A JP 2012501846A JP WO2011105490 A1 JPWO2011105490 A1 JP WO2011105490A1
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- Prior art keywords
- silicon carbide
- sintered body
- graphite
- based sintered
- carbide particles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims abstract description 221
- 229910010271 silicon carbide Inorganic materials 0.000 title claims abstract description 214
- 230000001681 protective effect Effects 0.000 title claims abstract description 17
- 239000002245 particle Substances 0.000 claims abstract description 101
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 93
- 229910002804 graphite Inorganic materials 0.000 claims description 58
- 239000010439 graphite Substances 0.000 claims description 58
- 239000013078 crystal Substances 0.000 claims description 41
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 claims description 15
- 239000011575 calcium Substances 0.000 claims description 15
- 229910052791 calcium Inorganic materials 0.000 claims description 15
- 238000005498 polishing Methods 0.000 claims description 13
- 230000035939 shock Effects 0.000 abstract description 35
- 238000005096 rolling process Methods 0.000 description 23
- 239000000843 powder Substances 0.000 description 22
- 229910052799 carbon Inorganic materials 0.000 description 19
- 239000012530 fluid Substances 0.000 description 18
- 238000000034 method Methods 0.000 description 14
- 239000008187 granular material Substances 0.000 description 12
- 239000002270 dispersing agent Substances 0.000 description 10
- 230000001050 lubricating effect Effects 0.000 description 10
- 239000012071 phase Substances 0.000 description 10
- 238000005245 sintering Methods 0.000 description 9
- 239000010432 diamond Substances 0.000 description 8
- 238000012856 packing Methods 0.000 description 8
- 239000002002 slurry Substances 0.000 description 8
- 238000004458 analytical method Methods 0.000 description 7
- 229910003460 diamond Inorganic materials 0.000 description 7
- 238000009616 inductively coupled plasma Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 7
- 238000007789 sealing Methods 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 229910052580 B4C Inorganic materials 0.000 description 6
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 6
- 238000002441 X-ray diffraction Methods 0.000 description 6
- INAHAJYZKVIDIZ-UHFFFAOYSA-N boron carbide Chemical compound B12B3B4C32B41 INAHAJYZKVIDIZ-UHFFFAOYSA-N 0.000 description 6
- 239000007788 liquid Substances 0.000 description 6
- 238000002156 mixing Methods 0.000 description 6
- 238000013001 point bending Methods 0.000 description 6
- 239000012298 atmosphere Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 238000010304 firing Methods 0.000 description 5
- 238000010298 pulverizing process Methods 0.000 description 5
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 4
- 239000006061 abrasive grain Substances 0.000 description 4
- 229910003481 amorphous carbon Inorganic materials 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 239000011230 binding agent Substances 0.000 description 4
- 229910052796 boron Inorganic materials 0.000 description 4
- 238000009826 distribution Methods 0.000 description 4
- 238000004993 emission spectroscopy Methods 0.000 description 4
- 230000007774 longterm Effects 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- FGIUAXJPYTZDNR-UHFFFAOYSA-N potassium nitrate Chemical compound [K+].[O-][N+]([O-])=O FGIUAXJPYTZDNR-UHFFFAOYSA-N 0.000 description 4
- 229920000142 Sodium polycarboxylate Polymers 0.000 description 3
- 239000003945 anionic surfactant Substances 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 239000006229 carbon black Substances 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
- 239000012299 nitrogen atmosphere Substances 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 239000011148 porous material Substances 0.000 description 3
- 239000004696 Poly ether ether ketone Substances 0.000 description 2
- 101100371219 Pseudomonas putida (strain DOT-T1E) ttgE gene Proteins 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 238000004220 aggregation Methods 0.000 description 2
- 230000002776 aggregation Effects 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000012765 fibrous filler Substances 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 229920002312 polyamide-imide Polymers 0.000 description 2
- 229920002530 polyetherether ketone Polymers 0.000 description 2
- 235000010333 potassium nitrate Nutrition 0.000 description 2
- 239000004323 potassium nitrate Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 238000001694 spray drying Methods 0.000 description 2
- -1 sulfate ester salt Chemical class 0.000 description 2
- 230000001629 suppression Effects 0.000 description 2
- 238000010998 test method Methods 0.000 description 2
- 229920006259 thermoplastic polyimide Polymers 0.000 description 2
- 229910019142 PO4 Inorganic materials 0.000 description 1
- 239000004962 Polyamide-imide Substances 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 241001422033 Thestylus Species 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- OJMOMXZKOWKUTA-UHFFFAOYSA-N aluminum;borate Chemical compound [Al+3].[O-]B([O-])[O-] OJMOMXZKOWKUTA-UHFFFAOYSA-N 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 150000007942 carboxylates Chemical class 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 238000000280 densification Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- NJLLQSBAHIKGKF-UHFFFAOYSA-N dipotassium dioxido(oxo)titanium Chemical compound [K+].[K+].[O-][Ti]([O-])=O NJLLQSBAHIKGKF-UHFFFAOYSA-N 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 239000010452 phosphate Substances 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- XJKVPKYVPCWHFO-UHFFFAOYSA-N silicon;hydrate Chemical compound O.[Si] XJKVPKYVPCWHFO-UHFFFAOYSA-N 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- BDHFUVZGWQCTTF-UHFFFAOYSA-M sulfonate Chemical compound [O-]S(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-M 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
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- C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
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- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
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- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
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- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/34—Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
- C04B2235/9607—Thermal properties, e.g. thermal expansion coefficient
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
- C04B2235/963—Surface properties, e.g. surface roughness
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2206/00—Materials with ceramics, cermets, hard carbon or similar non-metallic hard materials as main constituents
- F16C2206/40—Ceramics, e.g. carbides, nitrides, oxides, borides of a metal
- F16C2206/56—Ceramics, e.g. carbides, nitrides, oxides, borides of a metal based on ceramic carbides, e.g. silicon carbide (SiC)
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24355—Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]
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Abstract
Description
T.D=1/(0.01×(a/3.21+b/2.26))・・・(1)
例えば、炭化珪素質焼結体を構成する成分の含有量が、炭化珪素が90質量%であり、グラファイトが10質量%であるときには、式(1)を用いて計算すると、炭化珪素質焼結体の理論密度(T.D)は、3.08g/cm3となり、JIS R 1634−1998に準拠して求めた炭化珪素質焼結体の見掛密度を、この理論密度(T.D)3.08g/cm3で除すことにより相対密度を求めることができる。
<摺動条件>
・相対速度:8m/秒
・面圧 :400kPa
・潤滑液 :水
なお、相対速度は回転軸の中心を基準として外周側に向かい、11.25mm離れた位置(以下、位置Pという。)における固定部材5aに対する可動部材5bの回転速度である。面圧は、固定部材5aに対する可動部材5bの単位面積当たりの圧力であり、固定部材5aと可動部材5bとを当接させるのに予め設定された加圧力Fを可動部材5bの摺動面15bの面積で除すことで求められ、面積は、寸法測定用のゲージを備えた光学顕微鏡を用い、倍率を50倍として可動部材5bの凸状部の外径および内径をゲージで測定し算出した。
18755−2005(MOD)),JIS R 1601−2008(ISO 14704−2000(MOD))に準拠して測定した。
1b:粗粒状炭化珪素粒子
5:メカニカルシールリング
5a:固定リング
5b:回転リング
16:フォーセットバルブ
17:固定弁体
18:可動弁体
20:転がり軸受
21:第1部材(外輪)
22:第2部材(内輪)
23:転動体
Claims (8)
- 炭化珪素粒子を主構成とし、相対密度が95%以上の炭化珪素質焼結体であり、該炭化珪素質焼結体の観察面において、面積が170μm2以上の粗粒状炭化珪素粒子が6面積%以上15面積%以下存在することを特徴とする炭化珪素質焼結体。
- 前記粗粒状炭化珪素粒子は、アスペクト比(長径/短径)の平均値が1以上2以下であることを特徴とする請求項1に記載の炭化珪素質焼結体。
- 前記炭化珪素粒子は、平均結晶粒径が2μm以上6μm以下であることを特徴とする請求項1または請求項2に記載の炭化珪素質焼結体。
- 前記粗粒状炭化珪素粒子は、カルシウムを含んでいることを特徴とする請求項1乃至請求項3のいずれかに記載の炭化珪素質焼結体。
- グラファイトを含み、該グラファイトの含有量が10質量%以下であることを特徴とする請求項1乃至請求項4のいずれかに記載の炭化珪素質焼結体。
- 前記グラファイトは、平均結晶粒径が4μm以上43μm以下であることを特徴とする請求項5に記載の炭化珪素質焼結体。
- 請求項1乃至請求項6のいずれかに記載の炭化珪素質焼結体の表面を研磨してなることを特徴とする摺動部品。
- 請求項1乃至請求項6のいずれかに記載の炭化珪素質焼結体を用いたことを特徴とする防護体。
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PCT/JP2011/054150 WO2011105490A1 (ja) | 2010-02-24 | 2011-02-24 | 炭化珪素質焼結体およびこれを用いた摺動部品ならびに防護体 |
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WO2017131159A1 (ja) * | 2016-01-27 | 2017-08-03 | 住友大阪セメント株式会社 | セラミックス材料、静電チャック装置 |
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