JPWO2010150569A1 - Radiation imaging equipment - Google Patents

Abstract

A bias current detecting means for outputting an electric signal corresponding to the current flowing through the bias line; a differentiating means for differentiating the electric signal; a comparator for outputting a result obtained by comparing a value obtained by differentiating the differentiating means with a comparison voltage; and an electric signal Integration means for integrating the value of the predetermined period, integration value comparison means for determining that the value integrated by the integration means has exceeded a predetermined threshold and outputting the result, and whether or not radiation exposure has started. Exposure start determination means for determining radiation exposure based on the fact that at least one of the output of the comparator or the output of the integrated value comparison means has changed in the standby mode. A radiographic imaging device characterized by determining that the radiography is started.

Description

  The present invention relates to a radiographic image capturing apparatus, and more particularly to a radiographic image capturing apparatus capable of detecting the start of radiation irradiation and the like.

  A so-called direct type radiographic imaging device that generates electric charges by a detection element in accordance with the dose of irradiated radiation such as X-rays and converts it into an electrical signal, or other radiation such as visible light with a scintillator or the like. Various types of so-called indirect radiographic imaging devices have been developed that convert charges into electromagnetic signals after they have been converted into electromagnetic waves of a wavelength, and then generated by photoelectric conversion elements such as photodiodes in accordance with the energy of the converted and irradiated electromagnetic waves. Yes. In the present invention, the detection element in the direct type radiographic imaging apparatus and the photoelectric conversion element in the indirect type radiographic imaging apparatus are collectively referred to as a radiation detection element.

  This type of radiographic image capturing apparatus is known as an FPD (Flat Panel Detector), and is conventionally formed integrally with a support base (or a bucky apparatus) (for example, see Patent Document 1). A portable radiographic imaging device in which an element or the like is housed in a housing has been developed and put into practical use (see, for example, Patent Documents 2 and 3).

  By the way, in these radiographic imaging apparatuses, particularly portable radiographic imaging apparatuses, information on the start and end of radiation irradiation is transmitted to the radiographic imaging apparatus from an external device such as a computer that manages the radiation irradiation apparatus and system. Accordingly, the radiation image capturing apparatus may be configured to read image data from each radiation detection element after the radiation irradiation ends.

  However, even if the radiation imaging device side completes the reset processing of the radiation detection element and enters the standby state for radiographic imaging, if it takes time to actually irradiate radiation from the radiation irradiation device, In some cases, dark charges are accumulated in the reset radiation detection element, and the quality of the obtained radiation image may deteriorate. Further, if the standby state continues for a long time, power is consumed correspondingly.

  Therefore, it is desirable to configure so that the start and end of radiation irradiation can be detected by the radiographic imaging apparatus itself, because accumulation of dark charges in the radiation detection element is suppressed. In addition, since the standby state is shortened or radiographic imaging can be performed immediately without going through the standby state, wasteful power consumption can be suppressed or avoided.

  At that time, it is possible to arrange a sensor or the like in the radiographic imaging apparatus so that the start or end of radiation irradiation is detected by the sensor, but the sensor is arranged in the radiographic imaging apparatus. Space is required, and the apparatus becomes large. Further, when the sensor is provided, there is a problem that a large amount of electric power is consumed for driving the sensor, and in particular, a portable radiographic imaging apparatus consumes a built-in battery.

  Therefore, it is proposed that the current flowing through the bias line for applying a bias voltage to each radiation detection element is converted into a voltage, and the converted voltage is compared with a comparison voltage by a comparator to detect the start and end of radiation irradiation. (See Patent Document 4). With this configuration, since current detection means can be provided in existing wiring or the like, the start and end of radiation irradiation can be started and terminated relatively easily in a state in which power consumption is suppressed compared to the case where a sensor is provided. It becomes possible to detect.

JP-A-9-73144 JP 2006-58124 A JP-A-6-342099 US Pat. No. 7,211,803

  However, since high-frequency noise and low-frequency noise are superimposed on the voltage converted from the current flowing through the bias line, the method disclosed in Patent Document 4 erroneously detects the start and end of radiation irradiation. There are things to do. In addition, when the radiation dose is small and the current flowing through the bias line is small, the converted voltage does not reach the comparison voltage of the comparator, so the start of radiation irradiation cannot be detected, or the actual radiation irradiation start is delayed. May be detected.

  Therefore, sufficient charge accumulation is not performed during a predetermined period of irradiation with radiation, and a clear image cannot be obtained, so that radiographic imaging may have to be performed again. When this happens, the radiation dose received by the patient as the subject increases, which places a heavy burden on the patient.

  The present invention has been made in view of the above-described problems, and an object of the present invention is to provide a radiographic imaging apparatus that can reliably detect the start of radiation irradiation without erroneous detection.

  In order to solve the above problems, the present invention has the following characteristics.

1. A plurality of radiation detection elements arranged in a matrix so as to generate an electric charge by radiation exposure;
An amplification circuit for amplifying an electrical signal read from the radiation detection element through a signal line;
Switch means arranged for each radiation detection element and for turning on / off the connection between the radiation detection element and the signal line in accordance with a voltage applied to a connected scanning line;
A bias power source for applying a bias voltage to the plurality of radiation detection elements via a bias line;
A standby mode in which all the switch means are turned on to release the charge generated in the radiation detection element and wait for radiation exposure, and all the switch means are turned off to generate the charge generated in the radiation detection element. A control means for switching and setting an accumulation mode for accumulating in the radiation detection element and a readout mode for sequentially turning on the switch means for a predetermined readout period and reading out the electric charge accumulated in the radiation detection element;
A radiographic imaging device comprising:
Bias current detection means for outputting an electrical signal corresponding to the current flowing through the bias line;
Differentiating means for differentiating the electric signal output by the bias current detecting means;
A comparator that outputs a result obtained by comparing a value obtained by differentiating with a comparison voltage;
Integrating means for integrating the value of the electrical signal output by the bias current detecting means for a predetermined period;
An integrated value comparing means for determining that the value integrated by the integrating means exceeds a predetermined threshold and outputting the result;
An exposure start determining means for determining whether or not radiation exposure has started;
Have
The exposure start determining means includes
In the standby mode, the output of the comparator and the output of the integral value comparison means are detected, and radiation exposure starts when the output of at least one of the comparator or the integral value comparison means changes. The radiographic image capturing apparatus according to claim 1, wherein the control unit sets the accumulation mode based on the determination.

2. The bias current detection means includes a resistance value switching means for switching a resistance value of a detection resistor provided to detect a current flowing through the bias line;
The control means includes
2. The radiographic image capturing apparatus according to 1, wherein the resistance value switching unit is controlled in accordance with a mode to be set to switch a resistance value of the detection resistor.

3. Storage means for sequentially storing values of electrical signals output by the bias current detection means;
An offset that calculates a difference value between the value of the electrical signal output by the bias current detection means and the value of the electrical signal stored in the storage means before a predetermined time, and outputs only the difference value that is equal to or greater than a predetermined value. Removal means;
Have
The integration means includes
3. The radiographic imaging apparatus according to 1 or 2, wherein the difference value output from the offset removing unit is integrated for a predetermined period as an output value of the electrical signal.

4). The exposure start determining means includes
In the accumulation mode, the output of the comparator is detected, and when the output of the comparator changes, it is determined that the radiation exposure has ended, and the control means sets the readout mode based on the determination. 4. The radiographic image capturing apparatus according to any one of 1 to 3, wherein the radiographic image capturing apparatus is characterized in that:

  5). The radiographic imaging apparatus according to 4, wherein the control unit does not set the readout mode for a predetermined period after the storage mode is set.

  According to the radiographic imaging device of the present invention, in the standby mode, the electrical signal corresponding to the current flowing through the bias line is differentiated, and the result of comparing the differentiated value with the comparison voltage, or the electrical signal is integrated and the integrated value It is determined that radiation exposure has started based on a change in one of the results of determining that the threshold value has exceeded the threshold.

  Accordingly, it is possible to provide a radiographic imaging apparatus that can reliably detect the start of radiation irradiation without erroneous detection.

It is a perspective view which shows the radiographic imaging apparatus which concerns on each embodiment. It is sectional drawing which follows the AA line in FIG. It is a top view which shows the structure of the board | substrate which concerns on this embodiment. It is an enlarged view which shows the structure of the radiation detection element, TFT, etc. which were formed in the small area | region on the board | substrate of FIG. It is sectional drawing which follows the XX line in FIG. It is a side view explaining the board | substrate with which COF, a PCB board | substrate, etc. were attached. It is a block diagram showing the equivalent circuit of the radiographic imaging apparatus which concerns on this embodiment. It is a block diagram showing the equivalent circuit about 1 pixel which comprises a detection part. It is an equivalent circuit diagram showing the structure of the circuit which detects the exposure of 1st Embodiment and 2nd Embodiment. It is explanatory drawing for demonstrating the signal of each part which detects the exposure start of a radiation. It is a flowchart for demonstrating the procedure in which the exposure start determination means 103 of embodiment determines the output of the comparator 96 and the output of the integral value comparison means 108, respectively. It is a flowchart explaining the procedure of the main routine of the radiographic imaging apparatus of 1st Embodiment and 2nd Embodiment. It is an example of each part waveform from the standby mode in 1st Embodiment to the reading mode. It is a flowchart explaining the procedure of the main routine of the radiographic imaging apparatus of 2nd Embodiment. The noise in the second embodiment is an example of a waveform of each part when the voltage V _e after differential exceeds V _T1 is a comparative voltage of the comparator 96. It is an equivalent circuit diagram showing the structure of the circuit which detects the exposure of 3rd Embodiment. It is explanatory drawing for demonstrating the signal of each part of 3rd Embodiment.

  Embodiments of a radiographic image capturing apparatus according to the present invention will be described below with reference to the drawings.

  In the following description, the radiographic imaging device is a so-called indirect radiographic imaging device that includes a scintillator or the like and converts the irradiated radiation into electromagnetic waves of other wavelengths such as visible light to obtain an electrical signal. As will be described, the present invention can also be applied to a direct radiographic imaging apparatus. Although the case where the radiographic image capturing apparatus is portable will be described, the present invention is also applicable to a radiographic image capturing apparatus formed integrally with a support base or the like.

  FIG. 1 is an external perspective view of the radiographic image capturing apparatus according to the present embodiment, and FIG. 2 is a cross-sectional view taken along line AA in FIG. As shown in FIGS. 1 and 2, the radiographic imaging apparatus 1 according to the present embodiment is configured as a portable (cassette type) apparatus in which a scintillator 3, a substrate 4, and the like are housed in a housing 2. .

  The housing 2 is formed of a material such as a carbon plate or plastic that transmits radiation at least on a surface R (hereinafter referred to as a radiation incident surface R) that receives radiation. 1 and 2 show a case in which the housing 2 is a so-called lunch box type formed by the frame plate 2A and the back plate 2B. However, the housing 2 is integrally formed in a rectangular tube shape. It is also possible to use a so-called monocoque type.

  As shown in FIG. 1, the side surface of the housing 2 is opened and closed to replace a power switch 36, an indicator 37 composed of LEDs and the like, and a battery 40 (not shown) (see FIG. 7 described later). A possible lid member 38 and the like are arranged. In the present embodiment, an antenna device 39 that is a communication unit for wirelessly communicating with an external device is embedded in the side surface of the lid member 38.

  As shown in FIG. 2, a base 31 is disposed inside the housing 2 via a thin lead plate or the like (not shown) on the lower side of the substrate 4. The disposed PCB substrate 33, the buffer member 34, and the like are attached. In the present embodiment, a glass substrate 35 for protecting the substrate 4 and the radiation incident surface R of the scintillator 3 is disposed.

  The scintillator 3 is attached to a detection unit P, which will be described later, of the substrate 4. As the scintillator 3, for example, a scintillator 3 that has a phosphor as a main component and converts it into an electromagnetic wave having a wavelength of 300 to 800 nm, that is, an electromagnetic wave centered on visible light when it receives incident radiation, is used.

  In the present embodiment, the substrate 4 is formed of a glass substrate. As shown in FIG. 3, a plurality of scanning lines 5 and a plurality of signal lines are provided on a surface 4 a of the substrate 4 facing the scintillator 3. 6 are arranged so as to cross each other. In each small region r defined by the plurality of scanning lines 5 and the plurality of signal lines 6 on the surface 4 a of the substrate 4, radiation detection elements 7 are respectively provided.

  Thus, the entire region r in which a plurality of radiation detection elements 7 arranged in a two-dimensional manner are provided in each small region r partitioned by the scanning line 5 and the signal line 6, that is, shown by a one-dot chain line in FIG. The region is a detection unit P.

  In the present embodiment, a photodiode is used as the radiation detection element 7, but other than this, for example, a phototransistor or the like can also be used. Each radiation detection element 7 is connected to the source electrode 8s of the TFT 8 serving as a switch means, as shown in the enlarged views of FIGS. The drain electrode 8 d of the TFT 8 is connected to the signal line 6.

  The TFT 8 is turned on when a turn-on voltage is applied to the connected scanning line 5 by the scanning drive means 15 described later and applied to the gate electrode 8g, and is generated and accumulated in the radiation detection element 7. The charged electric charge is discharged to the signal line 6. The TFT 8 is turned off when the off voltage is applied to the connected scanning line 5 and the off voltage is applied to the gate electrode 8g, and the discharge of the charge from the radiation detecting element 7 to the signal line 6 is stopped. Electric charges generated in the radiation detection element 7 are held and accumulated in the radiation detection element 7.

  Here, the structure of the radiation detection element 7 and the TFT 8 in this embodiment will be briefly described with reference to the cross-sectional view shown in FIG. FIG. 5 is a sectional view taken along line XX in FIG.

A gate electrode 8g of a TFT 8 made of Al, Cr or the like is formed on the surface 4a of the substrate 4 so as to be integrally laminated with the scanning line 5, and silicon nitride (laminated on the gate electrode 8g and the surface 4a). The first electrode 74 of the radiation detecting element 7 is connected to the upper portion of the gate electrode 8g on the gate insulating layer 81 made of SiN _x ) or the like via the semiconductor layer 82 made of hydrogenated amorphous silicon (a-Si) or the like. The formed source electrode 8s and the drain electrode 8d formed integrally with the signal line 6 are laminated.

The source electrode 8s and the drain electrode 8d are divided by a first passivation layer 83 made of silicon nitride (SiN _x ) or the like, and the first passivation layer 83 covers both the electrodes 8s and 8d from above. In addition, ohmic contact layers 84a and 84b formed in an n-type by doping hydrogenated amorphous silicon with a group VI element are stacked between the semiconductor layer 82 and the source electrode 8s and the drain electrode 8d, respectively. The TFT 8 is formed as described above.

  In the radiation detecting element 7, an auxiliary electrode 72 is formed by laminating Al, Cr, or the like on the insulating layer 71 formed integrally with the gate insulating layer 81 on the surface 4 a of the substrate 4. A first electrode 74 made of Al, Cr, Mo or the like is laminated on the auxiliary electrode 72 with an insulating layer 73 formed integrally with the first passivation layer 83 interposed therebetween. The first electrode 74 is connected to the source electrode 8 s of the TFT 8 through the hole H formed in the first passivation layer 83.

  On the first electrode 74, an n layer 75 formed in an n-type by doping a hydrogenated amorphous silicon with a group VI element, an i layer 76 which is a conversion layer formed of hydrogenated amorphous silicon, and a hydrogenated amorphous A p layer 77 formed by doping a group III element into silicon and forming a p-type layer is formed by laminating sequentially from below.

  When radiation enters from the radiation incident surface R of the housing 2 of the radiographic imaging apparatus 1 and is converted into an electromagnetic wave such as visible light by the scintillator 3, and the converted electromagnetic wave is irradiated from above in the figure, the electromagnetic wave is detected by radiation. The electron hole pair is generated in the i layer 76 by reaching the i layer 76 of the element 7. In this way, the radiation detection element 7 converts the electromagnetic waves irradiated from the scintillator 3 into electric charges.

  On the p layer 77, a second electrode 78 made of a transparent electrode such as ITO is laminated and formed so that the irradiated electromagnetic wave reaches the i layer 76 and the like. In the present embodiment, the radiation detection element 7 is formed as described above. The order of stacking the p layer 77, the i layer 76, and the n layer 75 may be reversed. Further, in the present embodiment, a case where a so-called pin-type radiation detection element formed by sequentially stacking the p layer 77, the i layer 76, and the n layer 75 as described above is used as the radiation detection element 7. However, it is not limited to this.

A bias line 9 for applying a bias voltage to the radiation detection element 7 is connected to the upper surface of the second electrode 78 of the radiation detection element 7 via the second electrode 78. The second electrode 78 and the bias line 9 of the radiation detection element 7, the first electrode 74 extended to the TFT 8 side, the first passivation layer 83 of the TFT 8, that is, the upper surfaces of the radiation detection element 7 and the TFT 8 are A second passivation layer 79 made of silicon nitride (SiN _x ) or the like is covered from above.

  As shown in FIGS. 3 and 4, in this embodiment, one bias line 9 is connected to a plurality of radiation detection elements 7 arranged in rows, and each bias line 9 is connected to a signal line 6. Are arranged in parallel with each other. In addition, each bias line 9 is bound to one connection 10 at a position outside the detection portion P of the substrate 4.

  In this embodiment, as shown in FIG. 3, each scanning line 5, each signal line 6, and connection 10 of the bias line 9 are input / output terminals (also referred to as pads) provided near the edge of the substrate 4. 11 is connected. As shown in FIG. 6, a COF (Chip On Film) 12 in which a chip such as a gate IC 12a functioning as a gate driver 15b of the scanning driving means 15 described later is incorporated in each input / output terminal 11 is anisotropically conductively bonded. They are connected via an anisotropic conductive adhesive material 13 such as a film or anisotropic conductive paste.

  The COF 12 is routed to the back surface 4b side of the substrate 4 and connected to the PCB substrate 33 described above on the back surface 4b side. Thus, the board | substrate 4 part of the radiographic imaging apparatus 1 is formed. In FIG. 6, illustration of the electronic component 32 and the like is omitted.

  Here, the circuit configuration of the radiation image capturing apparatus 1 will be described. FIG. 7 is a block diagram showing an equivalent circuit of the radiographic imaging apparatus 1 according to the present embodiment, and FIG. 8 is a block diagram showing an equivalent circuit for one pixel constituting the detection unit P.

  As described above, each radiation detection element 7 of the detection unit P of the substrate 4 has the bias line 9 connected to the second electrode 78, and each bias line 9 is bound to the connection 10 to the bias power supply 14. It is connected. The bias power supply 14 applies a bias voltage to the second electrode 78 of each radiation detection element 7 via the connection 10 and each bias line 9.

  In the present embodiment, as can be seen from the fact that the bias line 9 is connected to the p-layer 77 side (see FIG. 5) of the radiation detection element 7 via the second electrode 78, A voltage lower than the voltage applied to the first electrode 74 side of the radiation detection element 7 (that is, a so-called reverse bias voltage) is applied to the second electrode 78 of the radiation detection element 7 as a bias voltage via the bias line 9. Yes.

  In the present embodiment, the bias power supply 14 is connected to a control unit 22 described later, and the control unit 22 varies the bias voltage applied to each radiation detection element 7 from the bias power supply 14 as necessary. ing.

  In the present embodiment, the current flowing between the bias power supply 14 and the radiation detection element 7 is detected at the connection portion between the connection 10 of the bias line 9 and the bias power supply 14 in accordance with the start of radiation irradiation. The detection part 41 which performs the process of these is provided. The configuration and the like of the detection unit 41 will be described later.

  The first electrode 74 of each radiation detection element 7 is connected to the source electrode 8s of the TFT 8 (indicated as S in FIGS. 7 and 8), and the gate electrode 8g of each TFT 8 (FIGS. 7 and 8). Are respectively connected to the lines L1 to Lx of each scanning line 5 extending from a gate driver 15b of the scanning driving means 15 described later. Further, the drain electrode 8 d (denoted as D in FIGS. 7 and 8) of each TFT 8 is connected to each signal line 6.

  In this embodiment, the scanning drive unit 15 includes a power supply circuit 15a and a gate driver 15b. In this embodiment, the gate driver 15b is formed by arranging a plurality of the gate ICs 12a described above in parallel. Further, the scanning drive means 15 controls the voltage applied to the gate electrode 8g of the TFT 8 via each scanning line 5 connected to the gate driver 15b.

  Each signal line 6 is connected to each readout circuit 17 formed in the readout IC 16. Note that a predetermined number of readout circuits 17 are provided in the readout IC 16, and by providing a plurality of readout ICs 16, readout circuits 17 corresponding to the number of signal lines 6 are provided.

  The readout circuit 17 includes an amplifier circuit 18, a correlated double sampling circuit 19, an analog multiplexer 21, and an A / D converter 20. 7 and 8, the correlated double sampling circuit 19 is represented as CDS. In FIG. 8, the analog multiplexer 21 is omitted.

In the present embodiment, the amplifier circuit 18 is configured by a charge amplifier circuit, and is configured by connecting a capacitor 18b and a charge reset switch 18c in parallel to the operational amplifier 18a and the operational amplifier 18a. Further, the signal line 6 is connected to the inverting input terminal on the input side of the operational amplifier 18 a of the amplifier circuit 18, and the reference potential V ₀ is applied to the non-inverting input terminal on the input side of the amplifier circuit 18. ing. Note that the reference potential V ₀ is set to an appropriate value, and in this embodiment, for example, 0 [V] is applied.

  The charge reset switch 18 c of the amplifier circuit 18 is connected to the control unit 22, and is controlled to be turned on / off by the control unit 22. When the charge reset switch 18c is off and the TFT 8 of the radiation detection element 7 is turned on (that is, when an on-voltage is applied to the gate electrode 8g of the TFT 8 via the scanning line 5), the radiation The electric charge discharged from the detection element 7 flows into the capacitor 18b and is accumulated, and a voltage value corresponding to the accumulated electric charge is output from the output terminal of the operational amplifier 18a.

  In this way, the amplifier circuit 18 outputs a voltage in accordance with the amount of charge output from each radiation detection element 7, converts the charge voltage, and amplifies it. When the charge reset switch 18c is turned on, the input side and the output side of the amplifier circuit 18 are short-circuited, and the charge accumulated in the capacitor 18b is discharged to reset the amplifier circuit 18. ing.

  Note that the amplifier circuit 18 may be configured to output a current in accordance with the charge output from the radiation detection element 7. Further, as shown in FIG. 8, power is supplied from the power supply unit 42 to the amplifier circuit 18. In FIG. 7, the power supply unit 42 is not shown.

  A correlated double sampling circuit (CDS) 19 is connected to the output side of the amplifier circuit 18. In this embodiment, the correlated double sampling circuit 19 has a sample and hold function. The sample and hold function in the correlated double sampling circuit 19 is turned on / off by a pulse signal transmitted from the control unit 22. To be controlled.

  That is, the correlated double sampling circuit 19 is emitted from the radiation detection element 7 when the image data is read from each radiation detection element 7 after the amplifier circuit 18 is reset and the charge reset switch 18c is turned off. When the first pulse signal is received from the control unit 22 at the time when the charged electric charge flows into the capacitor 18b and starts to be accumulated, the voltage value output from the amplifier circuit 18 at that time is held.

  Then, after a lapse of a predetermined time from that point, when the second pulse signal is received from the control unit 22 when the charge discharged from the radiation detection element 7 flows into the capacitor 18b and is accumulated, it is amplified again at that point. The voltage value output from the circuit 18 is held, and the difference value between these voltage values is output downstream as image data.

  The image data of each radiation detection element 7 output from the correlated double sampling circuit 19 is transmitted to the analog multiplexer 21 and sequentially transmitted from the analog multiplexer 21 to the A / D converter 20. Then, the A / D converter 20 sequentially converts the image data into digital values, which are output to the storage unit 43 and sequentially stored.

  In this embodiment, the control unit 22 includes a CPU (Central Processing Unit) 101, a RAM (Random Access Memory) 107, a ROM (Read Only Memory) 106, an unillustrated input / output interface connected to a bus, An FPGA (Field Programmable Gate Array) is used.

  As shown in FIGS. 7 and 8, the control unit 22 is connected to the detection unit 41, the storage unit 43, the bias power supply 14 and the charge reset switch 18c of the amplifier circuit 18, and is illustrated in FIG. Although omitted, the power supply unit 42 is also connected.

  In the present embodiment, the above-described antenna device 39 is connected to the control unit 22, and each member such as the detection unit P, the scanning drive unit 15, the readout circuit 17, the storage unit 43, the bias power supply 14, and the like. A battery 40 for supplying electric power is connected. As described above, the battery 40 is built in the housing 2 of the radiographic image capturing apparatus 1.

  The control unit 22 controls the bias power supply 14 to set a bias voltage to be applied to each radiation detection element 7 from the bias power supply 14 and to control on / off of the charge reset switch 18c of the amplification circuit 18 of the readout circuit 17. Or transmitting a pulse signal to the correlated double sampling circuit 19 to control on / off of the sample hold function. The control unit 22 is a control unit of the present invention.

  In addition, the control unit 22 scans the scanning driving unit 15 from the scanning driving unit 15 to each scanning at the time of resetting the radiation detecting elements 7 or reading out the image data from the radiation detecting elements 7 after radiographic imaging. A pulse signal for switching the voltage applied to the gate electrode 8g of each TFT 8 between the on voltage and the off voltage via the line 5 is transmitted.

  The control unit 22 is connected to the detection unit 41 described above. The control unit 22 differentiates an electrical signal corresponding to the current flowing through the bias line 10 from the detection unit 41, and a comparator 96 generates a comparison voltage. The comparison result and digital value data obtained by A / D converting an electric signal corresponding to the current flowing through the bias line 10 are input.

  The CPU 101 of the control unit 22 includes an exposure start determining unit 103, an offset removing unit 105, an integrating unit 104, and an integrated value comparing unit 108.

  The offset removing unit 105 removes the offset included in the electrical signal. The integrating means 104 integrates the electric signal after removing the offset for a predetermined period. The integrated value comparing means 108 determines that the value integrated by the integrating means 104 has exceeded a predetermined threshold value, and outputs the result.

  In the standby mode, the exposure start determination unit 103 performs radiation exposure based on a change in at least one of the output of the comparator 96 and the output of the integral value comparison unit 108 input from the detection unit 41. Determine that it has started.

  The operation of each part will be described in detail later.

  Next, the configuration of the detection unit 41 of the first embodiment shown in FIG. 9 and its surroundings will be described with reference to the waveforms of the respective units shown in FIG. FIG. 9A is an equivalent circuit diagram illustrating the configuration of the detection unit and the feedback circuit, and FIG. 9B is a diagram illustrating a state in which the switch of the feedback circuit is switched. FIG. 10 is an explanatory diagram for explaining signals of the respective units that detect the start of radiation exposure.

  In the present embodiment, as described above, the detection unit 41 is provided at the connection portion between the connection 10 of the bias line 9 and the bias power supply 14, and the bias power supply 14, the radiation detection element 7, The electric current which flows between is detected.

  In this embodiment, the detection unit 41 includes a bias current detection unit 48, a band pass filter 94, a differentiation unit 95, a comparison voltage power source 99, and an A / D converter 98, as shown in FIG. In the figure, the band-pass filter 94 is represented by BPF, the differentiation means 95 is differentiated, the comparison voltage power supply 99 is represented by Vref power supply, and the A / D converter 98 is represented by A / D.

  In the example of FIG. 9, a feedback circuit 45 and a bias current detection means 48 are provided in series with the connection 10 connecting each radiation detection element 7 and the bias power supply 14.

  When the current flowing through the connection 10 of the bias line 9 is detected by the detection unit 41, a voltage V is generated between both terminals of, for example, the detection resistor 90 of the detection unit 41 due to the current flowing through the connection 10, and the bias voltage Vbias. Fluctuations may occur.

  Therefore, in the present embodiment, a feedback circuit 45 is provided between the detection unit 41 and each radiation detection element 7 in order to suppress fluctuations in the bias voltage Vbias.

  The feedback circuit 45 is a known circuit, and is configured, for example, by connecting the emitter of a PNP transistor 45a to the bias line 9 or the connection 10 and connecting the collector to the detection unit 41 side. Further, the inverting input terminal is connected to the emitter side of the transistor 45a, that is, the bias line 9 side, and the output of the amplifier 45b in which a predetermined bias voltage Vbias is applied from the bias power supply 14 to the non-inverting input terminal is input to the base of the transistor 45a. It is configured to be.

  With this configuration, a predetermined bias voltage Vbias is applied to the second electrode 78 side of each radiation detection element 7, and the same current as that of the connection 10 flows to the collector side of the transistor 45a.

  The feedback circuit 45 disconnects the connection between the inverting input terminal of the amplifier 45b and the connection 10 and the non-inverting input terminal and the bias power supply 14 when the current flowing through the connection 10 of the bias line 9 is not detected. A switch 45c for directly connecting the connection 10 of the bias line 9 and the bias power supply 14 is provided.

  When the current detection is no longer necessary, the switch 45c on the input side of the amplifier 45b is switched as shown in FIG. 9B, and the connection 10 of the bias line 9 and the bias power supply 14 are directly connected.

  The bias current detection unit 48 of this embodiment includes a detection resistor 90, a detection resistor 92, a resistance value switching unit 91, and a differential amplifier 93.

  The detection resistor 90 and the detection resistor 92 having different resistance values are configured to be switchable by a resistance value switching unit 91 including an analog switch, and one of the detection resistor 90 and the detection resistor 92 is connected to the bias power supply 14 and the feedback circuit 45. Are connected in series. In the present embodiment, the detection resistor 90 is connected to the bias power source 14 in the initial state, and the following description will be made assuming that the detection resistor 92 has a higher resistance value than the detection resistor 90. The same current as the bias current flowing in the connection 10 flows through the detection resistor 90 or the detection resistor 92 connected to the connection 10 by the resistance value switching unit 91.

  In the present embodiment, an example in which the feedback circuit 45 is provided will be described. However, if fluctuation of the bias voltage does not matter, one end of the detection resistor 90 and the detection resistor 92 may be directly connected to the connection 10. Alternatively, for example, the resistance value of the detection resistor 92 may be set to 0, and the resistance value switching unit 91 may be switched to the detection resistor 92 side to make a short circuit except when the bias current is detected.

The amplifier 93 amplifies the voltage generated by the bias current flowing through the detection resistor 90 or the detection resistor 92 and outputs the voltage _VA as an electric signal.

FIG. 10A is an explanatory diagram illustrating an example of a waveform of the voltage _VA . The horizontal axis in FIG. 10 is the time axis, t ₁ is the timing when radiation exposure is started, and t ₃ is the timing when radiation exposure is completed. Between t ₁ and t ₃ where radiation exposure is performed, the bias current increases and the voltage _VA increases stepwise. However, as shown in FIG. 10 (a), high-frequency noise is superimposed on the voltage _VA and fluctuates slowly due to low-frequency noise. Therefore, the timings t ₁ and t ₃ remain unchanged. It is difficult to detect accurately.

The band pass filter 94 is provided to remove such low frequency noise and high frequency noise contained in the voltage _VA . The optimum band for the bandpass filter 94 is, for example, about 100 Hz to 10 kHz, although it varies depending on mounting conditions and the like. In addition, if there is little low frequency noise, you may use not only a band pass filter but a low pass filter and various noise filters.

FIG. 10B is an explanatory diagram illustrating an example of a waveform of the voltage _VL that has passed through the band-pass filter 94. In this way, low-frequency noise and high-frequency noise are removed, and the timing of t ₁ and t ₃ can be easily detected.

Differentiating means 95 differentiates and outputs voltage _VL that has passed through bandpass filter 94.

Figure 10 (c) is an explanatory view illustrating an example of a waveform of the voltage V _e of the output of the differentiating means 95. As shown in FIG. 10 (c), the waveform of the voltage V _e, a waveform obtained by differentiating the rising and falling of the voltage V _L.

The comparator 96 is a so-called comparator, compares the comparison voltage and the voltage V _e for outputting the reference voltage source 99, and outputs the result. In the present embodiment, the comparator 96 outputs a logical value 'L' when the voltage V _e is equal to or lower than the comparison voltage, and outputs a logical value 'H' when the voltage V _e exceeds the comparison voltage.

In FIG. 10 (c), the shows an example of detecting the timing at which the irradiation of radiation is compared with the comparison voltage V _T1 starts to output the reference voltage source 99 and the voltage V _e. Voltage _{V e} at the timing of t ₁ is over the reference voltage _{V T1,} the output of the comparator 96 is in the meantime 'H'.

  The comparison voltage power source 99 is configured to be able to switch and output a plurality of comparison voltages according to a command from the control unit 22.

Meanwhile, if the voltage _{V A} at the timing of _t 1, _{t 3} as shown in FIG. 10 (a) is changed stepwise, the voltage _{V e} after differential exceeds the comparison voltage _{V T1,} the output of the comparator 96 Although it is possible to detect the timing of t ₁ from the change, it may change slowly as shown in FIG. 10 (d). Then, as shown in FIG. 10E, the differentiated voltage V _e does not exceed the comparison voltage V _T1 and the output of the comparator 96 does not change.

In the present invention, the voltage _VL is converted into a digital value by the A / D converter 98 and the offset is removed by the offset removing means 105 so that it can be detected that radiation exposure has started in such a case. The value is integrated by the integration means 104, and it is determined that the integration value comparison means 108 exceeds a predetermined threshold value. FIG. 10F conceptually shows that the start of radiation exposure can be detected when the voltage value V _I integrated by the integrating means 104 exceeds a predetermined threshold value V _TH .

A procedure for integrating the digital value from which the offset has been removed by the offset removing unit 105 by the integrating unit 104 and determining that the integrated value comparing unit 108 has exceeded a predetermined threshold will be described with reference to the flowchart of FIG. The flags F _X and F _Y are flags for storing the determination results of the outputs of the comparator 96 and the integral value comparison means 108, and are stored in the RAM 107. The values of F _X and F _Y are initialized to 0 when the power is turned on. As will be described later, the value of F _X becomes 1 when the differentiated voltage V _e exceeds the comparison voltage V _T1 , and the value of F _Y becomes 1 when the integral value V ₁ exceeds the threshold value V _TH. .

  FIG. 11 is a flowchart for explaining a procedure by which the exposure start determination unit 103 of the present embodiment determines the output of the comparator 96 and the output of the integral value comparison unit 108, respectively.

  It is assumed that the CPU 101 generates a timer interrupt at a predetermined time interval by an internal timer and starts the timer interrupt routine of FIG. In the present embodiment, the following description will be made assuming that the period of fluctuation due to offset is 1 second. The timer interruption period is 1 ms or less.

  S10: A step of determining whether or not the output of the comparator 96 is 'H'.

The output of the comparator 96 is obtained by differentiating the voltage V _e becomes the 'H' exceeds the comparison voltage V _T1 to the output of the comparison voltage power supply 99 in the differential unit 95. The exposure start determining means 103 determines whether or not the output of the comparator 96 is “H”.

  When the output of the comparator 96 is 'H' (step S10; Yes), the process proceeds to step S11.

S11: This is a step of setting F _X = 1.

Irradiation start determination unit 103 proceeds to step S12 and the _{F X} to 1.

  When the output of the comparator 96 is 'L' (step S10; No), the process proceeds to step S12.

  S12: A step of storing the digital value V (t) output from the current A / D converter 98.

  The integrating means 104 acquires the digital value V (t) output from the A / D converter 98 and temporarily stores it in the RAM 107 together with the current time information.

  S13: A step of reading the digital value V (t-1) output from the A / D converter 98 one second before.

  The offset removing unit 105 reads the digital value V (t) at the current time and the digital value V (t−1) stored at the time one second before from the RAM 107.

  S14: This is a step of calculating ΔV = V (t) −V (t−1).

  The offset removing unit 105 calculates a difference value ΔV between the digital value V (t) at the current time and the digital value V (t−1) at the time one cycle before the offset.

  S15: A step of determining whether or not ΔV> 2 mV.

  The offset removing unit 105 determines whether or not the difference value ΔV exceeds 2 mV, for example. In the present embodiment, the difference value ΔV exceeding 2 mV is determined as an increase due to factors other than the offset. The level to be determined is not limited to 2 mV, and may be determined as appropriate from the actual measured value of the circuit.

  In this embodiment, it is assumed that a sine wave-like gradual offset fluctuation with a 1-second period occurs, and a difference value ΔV is calculated by canceling the gradual offset fluctuation with a 1-second period. It is integrated as the voltage value of the difference increased from the previous one by the increase of. In this way, fluctuations due to offset can be removed, and integration can be performed for the voltage value of the difference that has increased as the bias current increases.

  When the difference value ΔV exceeds 2 mV (step S15; Yes), the process proceeds to step S16.

S16: This is a step of calculating V ₁ = V ₁ + ΔV.

The integrating means 104 adds the difference value ΔV to the integrated value V ₁ stored in the RAM 107.

  When the difference value ΔV does not exceed 2 mV (step S15; No), the process proceeds to step S17.

S17: A step of determining whether or not V ₁ > V _TH .

Irradiation start determination unit 103 determines whether the integrated value _{V 1} is greater than the threshold value _{V TH.}

If the integrated value _{V 1} is greater than the threshold value _{V TH,} (Step S17; Yes), the process proceeds to step S18.

S18: This is a step to set F _Y = 1.

The exposure start determination unit 103 sets F _Y = 1 to end the process, and returns to the original routine.

  When the difference value ΔV does not exceed 2 mV (step S15; No), the process returns to the original routine.

  This is the end of the description of the timer interrupt routine.

  Next, referring to FIGS. 12 and 13, the radiographic imaging device of the first exemplary embodiment detects the start of radiation exposure from the standby mode, starts the accumulation mode, and detects the end of radiation exposure. The procedure for shifting to the read mode will be described. FIG. 12 is a flowchart for explaining the procedure of the main routine of the radiographic image capturing apparatus according to the first embodiment, and FIG. 13 is an example of the waveform of each part from the standby mode to the readout mode in the first embodiment.

13 (a) shows an example of the waveform of the voltage _{V L} that has passed through the bandpass filter 94, FIG. 13 (b), an example of the waveform of the voltage _{V e} of the output of the differentiating means 95, FIG. 13 (c), it is an example of a change in the integrated value V _1. In Figure 13, it is assumed that the radiation exposure is started at the timing of t _1.

  Hereinafter, description will be made in the order of the flowchart of FIG. 12 with reference to FIG.

  S100: This is an initialization step.

After the radiographic imaging device 1 is powered on, the control unit 22 resets F _X , F _Y , V ₁ and variables N and M to 0 and initializes each unit.

  S101: This is a step for starting the standby mode.

  The standby mode is a mode for waiting for radiation exposure. In the power supply unit 42, the bias power supply 14 supplies power to each unit. The control unit 22 turns on the charge reset switch 18c and applies an on voltage to each scanning line 5 from the scanning drive unit 15 to turn on the gate electrode 8g of each TFT 8 connected to each scanning line 5. A voltage is applied to turn on all TFTs 8 and start a standby mode.

A reference potential V ₀ is applied to the first electrode 74 of each radiation detection element 7, and Vbias is applied to the second electrode 78. The voltage of Vbias is set lower than the reference potential V ₀ (for example, 0 V). It is a reverse bias. Therefore, the bias current ib flows from the first electrode 74 toward the second electrode 78 in accordance with the amount of radiation received by the radiation detection element 7.

The control unit 22 instructs the comparison voltage power supply 99 to output the comparison voltage V _T1 and instructs the resistance value switching means 91 to switch so that the detection resistor 90 is connected to the bias power supply 14.

  Next, the control unit 22 turns on the timer interrupt in this step. Thereafter, a timer interrupt routine is started at predetermined time intervals.

S102: A step of determining whether or not F _X = 1.

The exposure start determination unit 103 determines whether F _X = 1.

If F _X ≠ 1, (step S102; No), the process proceeds to step S103.

S103: a step of determining whether F _Y = 1.

The exposure start determination unit 103 determines whether F _Y = 1.

If F _Y ≠ 1, (step S103; No), the process proceeds to step S104.

  S104: This is a step of setting M = M + 1.

  The exposure start determination unit 103 sets a variable M = M + 1.

  S105: A step of determining whether or not M = Z.

  The exposure start determination unit 103 determines whether or not the value of the variable M is equal to the predetermined value Z after waiting for a predetermined time.

  When M ≠ Z (step S105; No), the process returns to step S102.

  If M ≠ Z, the predetermined number of times Z has not been determined, and the process returns to step S102.

  When M = Z (step S105; Yes), the process proceeds to step S106.

Even if the predetermined number of times Z is determined, F _Y = 0, and since the integral value V ₁ does not exceed V _TH , the exposure start determination unit 103 initializes the integral value V ₁ in step S106 to perform the integration again. To do.

S106: This is a step for setting M = 0 and V ₁ = 0.

The exposure start determination unit 103 sets M = 0 and V ₁ = 0, and returns to step S102.

If F _X = 1 (step S102; Yes), the process proceeds to step S110.

F _X = 1 is obtained when the output of the comparator 96 becomes “H” in the timer interrupt routine. For example, Figure 13 the voltage _{V L} increases greatly at the timing of _{t 1} as in (a), exceeds the _{V T1} voltage _{V e} after differentiation are comparative voltage of the comparator 96 as shown in FIG. 13 (b) This is a case where the output of the comparator 96 becomes “H”.

  The exposure start determination unit 103 determines that radiation exposure has started, and proceeds to step S110.

When F _Y = 1 (step S103; Yes), the process proceeds to step S110.

In this case, the timer interrupt routine is when the integrated value V ₁ is exceeds the threshold value V _TH. For example, the differentiated voltage V _e does not exceed V _T1 that is the comparison voltage of the comparator 96, but the integrated value V _I exceeds the threshold V _TH at the timing of t _d as shown in FIG. 13C. is there. Incidentally, the waveform of the voltage V _e after differentiation in this case is in Figure 13 is not shown, a level not exceeding V _T1 is a comparison voltage.

  The exposure start determination unit 103 determines that radiation exposure has started, and proceeds to step S110.

  S110: This is a step for starting the accumulation mode.

  The control unit 22 applies the off voltage to each scanning line 5 from the scanning drive unit 15 and applies the off voltage to the gate electrode 8g of each TFT 8 connected to each scanning line 5, thereby turning off all the TFTs 8. , Start the accumulation mode. Charge is accumulated in the radiation detection element 7 during the accumulation mode.

In Figure 13, the accumulation mode is started at the timing of t _2.

  S111: This is a step of waiting for a predetermined time.

Control unit 22, then before starting the determination of a termination of the radiation exposure, the voltage V _e after differentiation waits a T _X to stabilize. Undershoot occurs in the _{t 1} 'the voltage _{V e} immediately after _{t 1,} as shown in Figure 13 (b). When detecting the end of the radiation exposure, the comparison is a voltage V _ref must switch from V _T1 to V _T2, resulting in the detection wait erroneous When was switched to V _T2 to the timing of t 1 _'. Further, the voltage V _e also fluctuates because the voltage V _L fluctuates greatly even at the timing t ₂ when the accumulation mode is started. Since there is a possibility of erroneous detection similarly to the timing of t ₁ ′, it is desirable not to start the determination of the end of radiation exposure for a predetermined time after t ₂ .

In the present embodiment, the control unit 22 will wait between t ₂ after T _X, the process proceeds to step starts to determine the completion of radiation exposure in the subsequent step, is set to the reading mode based on the determination result .

S112: This is a step of setting the comparison voltage V _ref to V _T2 .

Control unit 22 instructs to output the comparison voltage V _T2 lower than the average voltage of the voltage V _e after differentiation to compare the voltage source 99. In this step, the comparison voltage is changed to V _T2 so that the end of radiation exposure can be detected.

  S113: This is a step of switching the resistance value.

The control unit 22 instructs the resistance value switching unit 91 to switch, and switches the detection resistor 90 to the detection resistor 92 to connect to the bias power source 14. In the accumulation mode, the TFT 8 is off and the reference potential V ₀ is not applied to the first electrode 74, so that the current ib flowing through the connection 10 is reduced. However, as in the standby mode, the first electrode 74 is directed to the second electrode 78. Thus, a current ib corresponding to the amount of radiation received by the radiation detection element 7 flows.

  As described above, in the present embodiment, in the accumulation mode, the detection resistor is switched to the detection resistor 92 having a large resistance value to facilitate the detection of the change in the current ib.

S114: This is a step of setting F _X = 1.

The exposure start determination means 103 sets F _X = 1 in order to detect the end of radiation exposure. Figure timing t ₃ of 13 is the end timing of the radiation exposure, the comparator 96 to compare the voltage V _T2 is lower because of t ₃ timing than the average voltage of the voltage V _e after differentiation as shown in FIG. 13 (b) The output of is “H”.

S115 is a step of determining whether or not F _X = 0.

The output of the comparator 96 becomes “L” when the differentiated voltage V _e becomes lower than the comparison voltage V _T2 . The exposure start determining unit 103 determines whether F _X = 0.

If F _X ≠ 0 (step S115; No), the process proceeds to step S116.

  S116: This is a step of determining whether or not a timeout has occurred.

  The exposure start determination unit 103 determines whether a predetermined time has elapsed from the start of the accumulation mode and a timeout has occurred.

  When it is not time-out (step S116; No), it returns to step S115.

Returning to step S115, it is detected that F _X = 0.

  In the case of timeout (step S116; Yes), the process proceeds to step S117.

  The exposure start determination unit 103 cannot detect the end timing of radiation exposure from the output of the comparator 96, but assumes that the radiation exposure has ended since a predetermined time has elapsed since the start of radiation exposure. Step S117 Proceed to

If F _X = 0 (step S115; Yes), the process proceeds to step S117.

  The exposure start determination unit 103 determines that the radiation exposure has ended, and proceeds to step S117.

  S117: This is a step of starting the reading mode.

  The control unit 22 applies a pulse signal that changes from the off voltage to the on voltage for a predetermined period from the scanning drive unit 15 to each scanning line 5, and sequentially applies the on voltage to the gate electrode 8 g of each TFT 8 connected to each scanning line 5. Then, the TFTs 8 are sequentially turned on to start the readout mode.

  Further, the control unit 22 controls on / off of the charge reset switch 18c of the amplification circuit 18 of the readout circuit 17 at a predetermined timing, or transmits a pulse signal to the correlated double sampling circuit 19 to perform the sample hold. Various processes such as controlling on / off of the function are executed.

  In the read mode, the detection unit 41 and the feedback circuit 45 do not need to be operating. Therefore, the control unit 22 switches the switch 45c of the feedback circuit 45 and directly connects the connection 10 of the bias line 9 and the bias power supply 14 via the switch 45c, and also connects the detection unit 41 and the feedback circuit 45 to the amplifier 45b. The operation of the detection unit 41 and the feedback circuit 45 may be stopped by stopping the supply of power.

  S118: This is a step of storing the read data.

  The control unit 22 reads the image data from each radiation detection element 7 and stores it in the storage unit 43.

  S119: A step of determining whether or not continuous shooting is performed.

  The control unit 22 determines whether the radiographic image capturing is single imaging or continuous imaging.

  In the case of continuous shooting (step S119; Yes), the process returns to step S100.

  The process returns to step S100 and enters the standby mode.

  In the case of single photography (step S119; No), the process proceeds to step S120.

  The image data is transmitted to the external device via the antenna device 39, and the process is terminated.

  Next, the second embodiment will be described with reference to the flowchart of FIG. 14 and FIG.

Figure 14 is a flowchart for explaining the procedure of the main routine of the radiographic imaging device of the second embodiment, FIG. 15 is a voltage V _e after differentiation by the noise in the second embodiment the comparison voltage of the comparator 96 it is an example of a waveform of each part when it exceeds a certain V _T1.

15 (a) is an example of the waveform of the voltage _{V L} that has passed through the bandpass filter 94, FIG. 15 (b), an example of the waveform of the voltage _{V e} of the output of the differentiating means 95, FIG. 15 (c) it is an example of a change in the integrated value V _I. In FIG. 15, noise is generated at which the voltage V _e after differentiation exceeds V _T1 that is the comparison voltage of the comparator 96 at the timing t ₀ , and actual radiation exposure is started at the timing t _1. And

In the flowchart of the first embodiment described with reference to FIG. 12, the accumulation mode starts when it is determined that F _X = 1 in Step 102, but the voltage V _e after differentiation due to noise is V _T1, which is the comparison voltage of the comparator 96. May exceed F _X = 1. In the present embodiment, after the start of the accumulation mode at the timing t _a of FIG. 15 to prevent such erroneous detection, if the integrated value V _I until a predetermined time T _Y does not exceed the threshold value V _TH erroneous It determines that the detection is returned to the standby mode at the timing t _b.

  The flowchart of the second embodiment will be described below, but the flowchart of the first embodiment of FIG. 12 and steps S100 to S110 are the same procedure, so the description thereof will be omitted and will be described from step S201 of FIG. Note that the same processes as those in the first embodiment are denoted by the same reference numerals, and description thereof is omitted.

  S201: This is a step of switching the resistance value.

The control unit 22 instructs the resistance value switching unit 91 to switch the detection resistor, and connects the detection resistor 92 to the bias power source 14. In the accumulation mode, the TFT 8 is off, and the reference potential V ₀ is not applied to the first electrode 74, so that the amount of current is reduced, but the second electrode changes from the first electrode 74 to the second electrode according to the amount of radiation received by the radiation detection element 7. A current ib flows toward the electrode 78.

In the present embodiment, in the accumulation mode, the detection resistor is switched to the detection resistor 92 having a large resistance value, and the voltage _VA when the radiation exposure is performed in the accumulation mode is the radiation exposure performed in the standby mode. The voltage is about the same as the case.

S202: This is a step of determining whether F _Y = 1.

The exposure start determination unit 103 determines whether F _Y = 1.

If F _Y ≠ 1, (step S202; No), the process proceeds to step S203.

If the integrated value _{V I} does not exceed the threshold value _{V TH} is a _{F Y} ≠ 1. In the example of FIG. 15, even if the storage mode is shifted to the timing t _a , radiation exposure is not actually performed, so the integrated value V _I exceeds the threshold value V _TH by the time-out timing t _b. There is nothing.

  S203: A step of determining whether or not a timeout has occurred.

The exposure start determination unit 103 determines whether or not a predetermined time _{TY has} elapsed from the start of the accumulation mode and a timeout has occurred.

  When it is not time-out (step S203; No), it returns to step S202.

Returning to step S202, it is detected that F _Y = 1.

  In the case of timeout (step S203; Yes), the process returns to step S100.

  Since no radiation exposure has been performed, the process of the control unit 22 returns to step S100 and shifts from the accumulation mode to the standby mode.

If F _Y = 1 (step S202; Yes), the process proceeds to step S112.

In the example of FIG. 15, the integral value V _I exceeds the threshold value V _TH at the timing of t _C , and F _Y = 1.

S112: a step of setting the comparison voltage _{V T2.}

Control unit 22 instructs to output the comparison voltage V _T2 lower than the average voltage of the voltage V _e after differentiation to compare the voltage source 99. In this step, the comparison voltage is changed to V _T2 so that the end of radiation exposure can be detected. Note that this step may be executed after waiting for a predetermined time in order to prevent erroneous detection.

S114: This is a step of setting F _X = 1.

The exposure start determination means 103 sets F _X = 1 in order to detect the end of radiation exposure. Figure timing t ₃ of 15 and the end timing of the radiation exposure, the comparator 96 to compare the voltage V _T2 is lower because of t ₃ timing than the average voltage of the voltage V _e after differentiation as shown in FIG. 15 (b) The output of is “H”.

  The subsequent steps are the same procedure as in the first embodiment.

S115 is a step of determining whether or not F _X = 0.

The output of the comparator 96 becomes “L” when the differentiated voltage V _e becomes lower than the comparison voltage V _T2 . The exposure start determining unit 103 determines whether F _X = 0.

If F _X ≠ 0 (step S115; No), the process proceeds to step S116.

  S116: This is a step of determining whether or not a timeout has occurred.

  The exposure start determination unit 103 determines whether a predetermined time has elapsed from the start of the accumulation mode and a timeout has occurred.

  When it is not time-out (step S116; No), it returns to step S115.

Returning to step S115, it is detected that F _X = 0.

  In the case of timeout (step S116; Yes), the process proceeds to step S117.

  Proceeding to step S117 assuming that the radiation exposure has been completed.

If F _X = 0 (step S115; Yes), the process proceeds to step S117.

  S117: This is a step of starting the reading mode.

  The control unit 22 applies a pulse signal that changes from the off voltage to the on voltage for a predetermined period from the scanning drive unit 15 to each scanning line 5, and sequentially turns on the gate electrode 8 g of each TFT 8 connected to each scanning line 5. Are sequentially turned on to turn on the TFT 8 and start the reading mode.

  Further, the control unit 22 controls on / off of the charge reset switch 18c of the amplification circuit 18 of the readout circuit 17 at a predetermined timing, or transmits a pulse signal to the correlated double sampling circuit 19 to perform the sample hold. Various processes such as controlling on / off of the function are executed.

  S118: This is a step of storing the read data.

  The control unit 22 reads the image data from each radiation detection element 7 and stores it in the storage unit 43.

  S119: A step of determining whether or not continuous shooting is performed.

  The control unit 22 determines whether the radiographic image capturing is single imaging or continuous imaging.

  In the case of continuous shooting (step S119; Yes), the process returns to step S100.

  The process returns to step S100 and enters the standby mode.

  In the case of single shooting (step S119; No), the process proceeds to step S120.

  The image data is transmitted to the external device via the antenna device 39, and the process is terminated.

  Next, a third embodiment will be described with reference to FIGS.

  FIG. 16 is an equivalent circuit diagram illustrating a configuration of a circuit for detecting exposure according to the third embodiment, and FIG. 17 is an explanatory diagram for explaining signals of respective units according to the third embodiment.

  In the third embodiment, the detection unit P of the substrate 4 is divided into two regions, and the bias lines 9a and 9b of the radiation detection elements 7a and 7b in the respective regions are bound to the connection wires 10a and 10b, respectively. Connected to a power source 14. Thereafter, the components related to the respective areas are distinguished using the symbols a and b. In this embodiment, an example in which the detection unit P is divided into two regions will be described. However, the present invention can be applied to a case where the detection unit P is divided into more regions.

  In the example of FIG. 16, bias current detection means 48a and 48b are connected to the connections 10a and 10b of the bias lines 9a and 9b connecting the radiation detection elements 7a and 7b and the bias power source 14, respectively. In this embodiment, the feedback circuit 45 is not provided, but the feedback circuits 45a and 45b and the bias current detection means 48a and 48b may be connected in series with the connections 10a and 10b, respectively, as shown in FIG.

The configuration of the bias current detection means 48a and 48b is the same as that of the first embodiment, and a description thereof will be omitted. The adder 111 adds the output voltage V _Aa of the bias current detecting unit 48a and the output voltage V _Ab delayed by the delay line 110 of the bias current detecting unit 48b.

An example of the waveform of each part will be described with reference to FIG. 17 is a time axis, FIG. 17A shows the waveform of the output voltage V _Aa , FIG. 17B shows the waveform of the output voltage V _Ab , and FIG. 17C shows the output of the adder 111. It shows the waveform of the voltage V _K, respectively. In the figure, reference numerals 150 to 153 denote noise, and reference numerals 154 to 156 denote waveforms when a bias current flows due to radiation exposure.

As can be seen from FIGS. 17A and 17B, the output voltage V _Ab is delayed by Δt from the output voltage V _Aa . Therefore, the output voltage V _K after adding the output voltage V _Ab , the output voltage V _Aa, and the adder 111 has the peak of the noise 150 to 153 shifted by Δt as shown in FIG. The peak voltage does not change even after the addition. On the other hand, since the voltages 154 and 155 at the time of radiation exposure have a long peak period, when they are added by the adder 111, the peak voltage is approximately doubled as shown by the voltage 156 in FIG.

  Thus, since the voltage at the time of radiation exposure can be approximately doubled with respect to the noise component, the S / N can be improved, and the timing of radiation exposure can be detected with high accuracy. In particular, the effect of preventing erroneous detection is high when differentiating and detecting the timing of radiation exposure.

  In this embodiment, the example in which the output of the bias current detection unit 48b is delayed by the delay line 110 has been described. However, the delay line 110 need not necessarily be provided as long as a predetermined delay Δt occurs. For example, the signal may be delayed by making the wiring from the bias current detecting means 48b to the adder 111 longer than the wiring from the bias current detecting means 48a to the adder 111.

  The configuration and processing after the band-pass filter 94 are the same as those in the first and second embodiments, and a description thereof will be omitted.

  As described above, according to the present invention, it is possible to provide a radiographic imaging apparatus that can reliably detect the start of radiation irradiation without erroneously detecting the start of radiation.

DESCRIPTION OF SYMBOLS 1 Radiographic imaging apparatus 5 Scanning line 6 Signal line 7 Radiation detection element 8 TFT (switch means)
DESCRIPTION OF SYMBOLS 9 Bias line 10 Connection 14 Bias power supply 15 Scan drive means 17 Read-out circuit 18 Amplifier circuit 22 Control part (control means)
36 power switch 40 battery 41 detection unit 42 power supply unit 43 storage unit 45 feedback circuit 48 bias current detection unit 91 resistance value switching unit 95 differentiation unit 96 comparator 99 comparison voltage power source 101 CPU
103 exposure start determining means 104 integrating means 105 offset removing means 108 integral value comparing means r region

Claims (5)

A plurality of radiation detection elements arranged in a matrix so as to generate an electric charge by radiation exposure;
An amplification circuit for amplifying an electrical signal read from the radiation detection element through a signal line;
Switch means arranged for each radiation detection element and for turning on / off the connection between the radiation detection element and the signal line in accordance with a voltage applied to a connected scanning line;
A bias power source for applying a bias voltage to the plurality of radiation detection elements via a bias line;
A standby mode in which all the switch means are turned on to release the charge generated in the radiation detection element and wait for radiation exposure, and all the switch means are turned off to generate the charge generated in the radiation detection element. A control means for switching and setting an accumulation mode for accumulating in the radiation detection element and a readout mode for sequentially turning on the switch means for a predetermined readout period and reading out the electric charge accumulated in the radiation detection element;
A radiographic imaging device comprising:
Bias current detection means for outputting an electrical signal corresponding to the current flowing through the bias line;
Differentiating means for differentiating the electric signal output by the bias current detecting means;
A comparator that outputs a result obtained by comparing a value obtained by differentiating with a comparison voltage;
Integrating means for integrating the value of the electrical signal output by the bias current detecting means for a predetermined period;
An integrated value comparing means for determining that the value integrated by the integrating means exceeds a predetermined threshold and outputting the result;
An exposure start determining means for determining whether or not radiation exposure has started;
Have
The exposure start determining means includes
In the standby mode, the output of the comparator and the output of the integral value comparison means are detected, and radiation exposure starts when the output of at least one of the comparator or the integral value comparison means changes. The radiographic image capturing apparatus according to claim 1, wherein the control unit sets the accumulation mode based on the determination. The bias current detection means includes a resistance value switching means for switching a resistance value of a detection resistor provided to detect a current flowing through the bias line;
The control means includes
The radiographic image capturing apparatus according to claim 1, wherein the resistance value switching unit is controlled in accordance with a mode to be set to switch a resistance value of the detection resistor. Storage means for sequentially storing values of electrical signals output by the bias current detection means;
An offset that calculates a difference value between the value of the electrical signal output by the bias current detection means and the value of the electrical signal stored in the storage means before a predetermined time, and outputs only the difference value that is equal to or greater than a predetermined value. Removal means;
Have
The integration means includes
3. The radiographic image capturing apparatus according to claim 1, wherein the difference value output from the offset removing unit is integrated for a predetermined period as an output value of the electrical signal. The exposure start determining means includes
In the accumulation mode, the output of the comparator is detected, and when the output of the comparator changes, it is determined that the radiation exposure has ended, and the control means sets the readout mode based on the determination. The radiographic image capturing apparatus according to claim 1, wherein the radiographic image capturing apparatus is a radiographic image capturing apparatus.   The radiographic imaging apparatus according to claim 4, wherein the control unit does not set the readout mode for a predetermined period after the storage mode is set.