JPWO2019026547A1 - Photosensitive resin composition and method for producing the same - Google Patents
Photosensitive resin composition and method for producing the same Download PDFInfo
- Publication number
- JPWO2019026547A1 JPWO2019026547A1 JP2019534001A JP2019534001A JPWO2019026547A1 JP WO2019026547 A1 JPWO2019026547 A1 JP WO2019026547A1 JP 2019534001 A JP2019534001 A JP 2019534001A JP 2019534001 A JP2019534001 A JP 2019534001A JP WO2019026547 A1 JPWO2019026547 A1 JP WO2019026547A1
- Authority
- JP
- Japan
- Prior art keywords
- meth
- acrylate
- group
- resin composition
- photosensitive resin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011342 resin composition Substances 0.000 title claims abstract description 94
- 238000004519 manufacturing process Methods 0.000 title claims description 20
- 125000001261 isocyanato group Chemical group *N=C=O 0.000 claims abstract description 93
- 229920001577 copolymer Polymers 0.000 claims abstract description 72
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims abstract description 41
- 239000002253 acid Substances 0.000 claims abstract description 40
- 239000003960 organic solvent Substances 0.000 claims abstract description 31
- 239000003085 diluting agent Substances 0.000 claims abstract description 24
- 239000003999 initiator Substances 0.000 claims abstract description 20
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 claims description 159
- -1 ethylene glycol monoalkyl ether Chemical class 0.000 claims description 123
- 239000000758 substrate Substances 0.000 claims description 33
- 238000010494 dissociation reaction Methods 0.000 claims description 26
- 230000005593 dissociations Effects 0.000 claims description 26
- 239000003086 colorant Substances 0.000 claims description 25
- 239000000049 pigment Substances 0.000 claims description 22
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 claims description 18
- DNIAPMSPPWPWGF-UHFFFAOYSA-N monopropylene glycol Natural products CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 17
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 claims description 15
- LYCAIKOWRPUZTN-UHFFFAOYSA-N ethylene glycol Natural products OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 claims description 15
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 claims description 14
- 239000003513 alkali Substances 0.000 claims description 14
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 claims description 14
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerol Natural products OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 claims description 13
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 claims description 12
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 11
- 239000002981 blocking agent Substances 0.000 claims description 10
- 238000011161 development Methods 0.000 claims description 10
- 150000001412 amines Chemical class 0.000 claims description 9
- MTHSVFCYNBDYFN-UHFFFAOYSA-N anhydrous diethylene glycol Natural products OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 claims description 9
- 235000011187 glycerol Nutrition 0.000 claims description 9
- SWXVUIWOUIDPGS-UHFFFAOYSA-N diacetone alcohol Chemical compound CC(=O)CC(C)(C)O SWXVUIWOUIDPGS-UHFFFAOYSA-N 0.000 claims description 8
- LZCLXQDLBQLTDK-UHFFFAOYSA-N ethyl 2-hydroxypropanoate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 claims description 8
- 150000001732 carboxylic acid derivatives Chemical class 0.000 claims description 7
- 238000007334 copolymerization reaction Methods 0.000 claims description 7
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 7
- WHIVNJATOVLWBW-UHFFFAOYSA-N n-butan-2-ylidenehydroxylamine Chemical compound CCC(C)=NO WHIVNJATOVLWBW-UHFFFAOYSA-N 0.000 claims description 7
- LTMRRSWNXVJMBA-UHFFFAOYSA-L 2,2-diethylpropanedioate Chemical compound CCC(CC)(C([O-])=O)C([O-])=O LTMRRSWNXVJMBA-UHFFFAOYSA-L 0.000 claims description 6
- 125000000954 2-hydroxyethyl group Chemical group [H]C([*])([H])C([H])([H])O[H] 0.000 claims description 6
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 claims description 6
- 150000004702 methyl esters Chemical class 0.000 claims description 6
- SDXAWLJRERMRKF-UHFFFAOYSA-N 3,5-dimethyl-1h-pyrazole Chemical compound CC=1C=C(C)NN=1 SDXAWLJRERMRKF-UHFFFAOYSA-N 0.000 claims description 5
- WPYMKLBDIGXBTP-UHFFFAOYSA-N benzoic acid group Chemical group C(C1=CC=CC=C1)(=O)O WPYMKLBDIGXBTP-UHFFFAOYSA-N 0.000 claims description 5
- PUPZLCDOIYMWBV-UHFFFAOYSA-N (1R)-1,3-butanediol Natural products CC(O)CCO PUPZLCDOIYMWBV-UHFFFAOYSA-N 0.000 claims description 4
- TUAMRELNJMMDMT-UHFFFAOYSA-N 3,5-xylenol Chemical compound CC1=CC(C)=CC(O)=C1 TUAMRELNJMMDMT-UHFFFAOYSA-N 0.000 claims description 4
- 229940116333 ethyl lactate Drugs 0.000 claims description 4
- OSWPMRLSEDHDFF-UHFFFAOYSA-N methyl salicylate Chemical compound COC(=O)C1=CC=CC=C1O OSWPMRLSEDHDFF-UHFFFAOYSA-N 0.000 claims description 4
- LXCFILQKKLGQFO-UHFFFAOYSA-N methylparaben Chemical compound COC(=O)C1=CC=C(O)C=C1 LXCFILQKKLGQFO-UHFFFAOYSA-N 0.000 claims description 4
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 claims description 4
- YPFDHNVEDLHUCE-UHFFFAOYSA-N 1,3-propanediol Substances OCCCO YPFDHNVEDLHUCE-UHFFFAOYSA-N 0.000 claims description 3
- WERYXYBDKMZEQL-UHFFFAOYSA-N 1,4-butanediol Substances OCCCCO WERYXYBDKMZEQL-UHFFFAOYSA-N 0.000 claims description 3
- LRHPLDYGYMQRHN-UHFFFAOYSA-N 1-butanol Substances CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 claims description 3
- BXGYYDRIMBPOMN-UHFFFAOYSA-N 2-(hydroxymethoxy)ethoxymethanol Chemical compound OCOCCOCO BXGYYDRIMBPOMN-UHFFFAOYSA-N 0.000 claims description 3
- 150000001924 cycloalkanes Chemical class 0.000 claims description 3
- 125000004494 ethyl ester group Chemical group 0.000 claims description 3
- 229920000166 polytrimethylene carbonate Polymers 0.000 claims description 3
- 125000002924 primary amino group Chemical group [H]N([H])* 0.000 claims description 3
- CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 claims description 2
- 125000004112 carboxyamino group Chemical group [H]OC(=O)N([H])[*] 0.000 claims description 2
- SUPCQIBBMFXVTL-UHFFFAOYSA-N ethyl 2-methylprop-2-enoate Chemical compound CCOC(=O)C(C)=C SUPCQIBBMFXVTL-UHFFFAOYSA-N 0.000 claims description 2
- 235000010270 methyl p-hydroxybenzoate Nutrition 0.000 claims description 2
- 229960001047 methyl salicylate Drugs 0.000 claims description 2
- 206010034972 Photosensitivity reaction Diseases 0.000 claims 1
- 230000036211 photosensitivity Effects 0.000 claims 1
- 239000002904 solvent Substances 0.000 description 37
- 239000000178 monomer Substances 0.000 description 34
- 238000000576 coating method Methods 0.000 description 24
- 239000011248 coating agent Substances 0.000 description 20
- 229920000642 polymer Polymers 0.000 description 20
- 239000000203 mixture Substances 0.000 description 19
- 238000003860 storage Methods 0.000 description 16
- 239000002270 dispersing agent Substances 0.000 description 13
- 125000003700 epoxy group Chemical group 0.000 description 12
- 238000010438 heat treatment Methods 0.000 description 12
- 239000011159 matrix material Substances 0.000 description 12
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 10
- 239000000975 dye Substances 0.000 description 10
- 230000000052 comparative effect Effects 0.000 description 9
- 230000018109 developmental process Effects 0.000 description 9
- 239000011521 glass Substances 0.000 description 9
- 238000006116 polymerization reaction Methods 0.000 description 9
- 239000007864 aqueous solution Substances 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 8
- 238000006243 chemical reaction Methods 0.000 description 8
- 239000012948 isocyanate Substances 0.000 description 8
- 238000002156 mixing Methods 0.000 description 8
- 238000003786 synthesis reaction Methods 0.000 description 8
- 150000001875 compounds Chemical class 0.000 description 7
- 239000000243 solution Substances 0.000 description 7
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 239000003505 polymerization initiator Substances 0.000 description 6
- 239000000047 product Substances 0.000 description 6
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 5
- XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Chemical compound NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 description 5
- 230000002378 acidificating effect Effects 0.000 description 5
- 125000004432 carbon atom Chemical group C* 0.000 description 5
- 238000004040 coloring Methods 0.000 description 5
- 238000013329 compounding Methods 0.000 description 5
- 239000006185 dispersion Substances 0.000 description 5
- 230000001681 protective effect Effects 0.000 description 5
- NXXYKOUNUYWIHA-UHFFFAOYSA-N 2,6-Dimethylphenol Chemical compound CC1=CC=CC(C)=C1O NXXYKOUNUYWIHA-UHFFFAOYSA-N 0.000 description 4
- WLTSXAIICPDFKI-UHFFFAOYSA-N 3-dodecene Chemical compound CCCCCCCCC=CCC WLTSXAIICPDFKI-UHFFFAOYSA-N 0.000 description 4
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Chemical compound CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 description 4
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 4
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 4
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 4
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 4
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 4
- 125000002947 alkylene group Chemical group 0.000 description 4
- KBPLFHHGFOOTCA-UHFFFAOYSA-N caprylic alcohol Natural products CCCCCCCCO KBPLFHHGFOOTCA-UHFFFAOYSA-N 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 239000007795 chemical reaction product Substances 0.000 description 4
- UAOMVDZJSHZZME-UHFFFAOYSA-N diisopropylamine Chemical compound CC(C)NC(C)C UAOMVDZJSHZZME-UHFFFAOYSA-N 0.000 description 4
- 238000011156 evaluation Methods 0.000 description 4
- 239000004973 liquid crystal related substance Substances 0.000 description 4
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 4
- HNJBEVLQSNELDL-UHFFFAOYSA-N pyrrolidin-2-one Chemical compound O=C1CCCN1 HNJBEVLQSNELDL-UHFFFAOYSA-N 0.000 description 4
- 230000009467 reduction Effects 0.000 description 4
- WLTSXAIICPDFKI-FNORWQNLSA-N (E)-3-dodecene Chemical compound CCCCCCCC\C=C\CC WLTSXAIICPDFKI-FNORWQNLSA-N 0.000 description 3
- JSGVZVOGOQILFM-UHFFFAOYSA-N 3-methoxy-1-butanol Chemical compound COC(C)CCO JSGVZVOGOQILFM-UHFFFAOYSA-N 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 239000012965 benzophenone Substances 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 3
- 238000004132 cross linking Methods 0.000 description 3
- 125000000524 functional group Chemical group 0.000 description 3
- XPFVYQJUAUNWIW-UHFFFAOYSA-N furfuryl alcohol Chemical compound OCC1=CC=CO1 XPFVYQJUAUNWIW-UHFFFAOYSA-N 0.000 description 3
- 239000001056 green pigment Substances 0.000 description 3
- 239000003112 inhibitor Substances 0.000 description 3
- 238000013035 low temperature curing Methods 0.000 description 3
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 3
- 229910052753 mercury Inorganic materials 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- 229920001223 polyethylene glycol Polymers 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 150000003839 salts Chemical class 0.000 description 3
- 238000004528 spin coating Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- RMVRSNDYEFQCLF-UHFFFAOYSA-N thiophenol Chemical compound SC1=CC=CC=C1 RMVRSNDYEFQCLF-UHFFFAOYSA-N 0.000 description 3
- DVKJHBMWWAPEIU-UHFFFAOYSA-N toluene 2,4-diisocyanate Chemical compound CC1=CC=C(N=C=O)C=C1N=C=O DVKJHBMWWAPEIU-UHFFFAOYSA-N 0.000 description 3
- MYRTYDVEIRVNKP-UHFFFAOYSA-N 1,2-Divinylbenzene Chemical compound C=CC1=CC=CC=C1C=C MYRTYDVEIRVNKP-UHFFFAOYSA-N 0.000 description 2
- UAJRSHJHFRVGMG-UHFFFAOYSA-N 1-ethenyl-4-methoxybenzene Chemical compound COC1=CC=C(C=C)C=C1 UAJRSHJHFRVGMG-UHFFFAOYSA-N 0.000 description 2
- WJFKNYWRSNBZNX-UHFFFAOYSA-N 10H-phenothiazine Chemical compound C1=CC=C2NC3=CC=CC=C3SC2=C1 WJFKNYWRSNBZNX-UHFFFAOYSA-N 0.000 description 2
- OZAIFHULBGXAKX-UHFFFAOYSA-N 2-(2-cyanopropan-2-yldiazenyl)-2-methylpropanenitrile Chemical compound N#CC(C)(C)N=NC(C)(C)C#N OZAIFHULBGXAKX-UHFFFAOYSA-N 0.000 description 2
- VBYHQOZQQATUHH-UHFFFAOYSA-N 2-[(3,5-dimethylpyrazole-1-carbonyl)amino]ethyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCNC(=O)N1N=C(C)C=C1C VBYHQOZQQATUHH-UHFFFAOYSA-N 0.000 description 2
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 2
- GJYCVCVHRSWLNY-UHFFFAOYSA-N 2-butylphenol Chemical compound CCCCC1=CC=CC=C1O GJYCVCVHRSWLNY-UHFFFAOYSA-N 0.000 description 2
- CRBJBYGJVIBWIY-UHFFFAOYSA-N 2-isopropylphenol Chemical compound CC(C)C1=CC=CC=C1O CRBJBYGJVIBWIY-UHFFFAOYSA-N 0.000 description 2
- NJWGQARXZDRHCD-UHFFFAOYSA-N 2-methylanthraquinone Chemical compound C1=CC=C2C(=O)C3=CC(C)=CC=C3C(=O)C2=C1 NJWGQARXZDRHCD-UHFFFAOYSA-N 0.000 description 2
- JEHFRMABGJJCPF-UHFFFAOYSA-N 2-methylprop-2-enoyl isocyanate Chemical compound CC(=C)C(=O)N=C=O JEHFRMABGJJCPF-UHFFFAOYSA-N 0.000 description 2
- UPMLOUAZCHDJJD-UHFFFAOYSA-N 4,4'-Diphenylmethane Diisocyanate Chemical compound C1=CC(N=C=O)=CC=C1CC1=CC=C(N=C=O)C=C1 UPMLOUAZCHDJJD-UHFFFAOYSA-N 0.000 description 2
- NDWUBGAGUCISDV-UHFFFAOYSA-N 4-hydroxybutyl prop-2-enoate Chemical compound OCCCCOC(=O)C=C NDWUBGAGUCISDV-UHFFFAOYSA-N 0.000 description 2
- UJOBWOGCFQCDNV-UHFFFAOYSA-N 9H-carbazole Chemical compound C1=CC=C2C3=CC=CC=C3NC2=C1 UJOBWOGCFQCDNV-UHFFFAOYSA-N 0.000 description 2
- HGINCPLSRVDWNT-UHFFFAOYSA-N Acrolein Chemical compound C=CC=O HGINCPLSRVDWNT-UHFFFAOYSA-N 0.000 description 2
- PAYRUJLWNCNPSJ-UHFFFAOYSA-N Aniline Chemical compound NC1=CC=CC=C1 PAYRUJLWNCNPSJ-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- KXDAEFPNCMNJSK-UHFFFAOYSA-N Benzamide Chemical compound NC(=O)C1=CC=CC=C1 KXDAEFPNCMNJSK-UHFFFAOYSA-N 0.000 description 2
- LSNNMFCWUKXFEE-UHFFFAOYSA-M Bisulfite Chemical compound OS([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-M 0.000 description 2
- KAKZBPTYRLMSJV-UHFFFAOYSA-N Butadiene Chemical compound C=CC=C KAKZBPTYRLMSJV-UHFFFAOYSA-N 0.000 description 2
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 2
- QUSNBJAOOMFDIB-UHFFFAOYSA-N Ethylamine Chemical compound CCN QUSNBJAOOMFDIB-UHFFFAOYSA-N 0.000 description 2
- VZCYOOQTPOCHFL-OWOJBTEDSA-N Fumaric acid Chemical compound OC(=O)\C=C\C(O)=O VZCYOOQTPOCHFL-OWOJBTEDSA-N 0.000 description 2
- 239000005057 Hexamethylene diisocyanate Substances 0.000 description 2
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
- RRHGJUQNOFWUDK-UHFFFAOYSA-N Isoprene Chemical compound CC(=C)C=C RRHGJUQNOFWUDK-UHFFFAOYSA-N 0.000 description 2
- PEEHTFAAVSWFBL-UHFFFAOYSA-N Maleimide Chemical compound O=C1NC(=O)C=C1 PEEHTFAAVSWFBL-UHFFFAOYSA-N 0.000 description 2
- FZERHIULMFGESH-UHFFFAOYSA-N N-phenylacetamide Chemical compound CC(=O)NC1=CC=CC=C1 FZERHIULMFGESH-UHFFFAOYSA-N 0.000 description 2
- UFWIBTONFRDIAS-UHFFFAOYSA-N Naphthalene Chemical compound C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 2
- SJEYSFABYSGQBG-UHFFFAOYSA-M Patent blue Chemical compound [Na+].C1=CC(N(CC)CC)=CC=C1C(C=1C(=CC(=CC=1)S([O-])(=O)=O)S([O-])(=O)=O)=C1C=CC(=[N+](CC)CC)C=C1 SJEYSFABYSGQBG-UHFFFAOYSA-M 0.000 description 2
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 2
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 2
- 239000002202 Polyethylene glycol Substances 0.000 description 2
- 229920002873 Polyethylenimine Polymers 0.000 description 2
- WTKZEGDFNFYCGP-UHFFFAOYSA-N Pyrazole Chemical compound C=1C=NNC=1 WTKZEGDFNFYCGP-UHFFFAOYSA-N 0.000 description 2
- 244000028419 Styrax benzoin Species 0.000 description 2
- 235000000126 Styrax benzoin Nutrition 0.000 description 2
- 235000008411 Sumatra benzointree Nutrition 0.000 description 2
- XTXRWKRVRITETP-UHFFFAOYSA-N Vinyl acetate Chemical compound CC(=O)OC=C XTXRWKRVRITETP-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- UKLDJPRMSDWDSL-UHFFFAOYSA-L [dibutyl(dodecanoyloxy)stannyl] dodecanoate Chemical compound CCCCCCCCCCCC(=O)O[Sn](CCCC)(CCCC)OC(=O)CCCCCCCCCCC UKLDJPRMSDWDSL-UHFFFAOYSA-L 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 2
- YRKCREAYFQTBPV-UHFFFAOYSA-N acetylacetone Chemical compound CC(=O)CC(C)=O YRKCREAYFQTBPV-UHFFFAOYSA-N 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- XYLMUPLGERFSHI-UHFFFAOYSA-N alpha-Methylstyrene Chemical compound CC(=C)C1=CC=CC=C1 XYLMUPLGERFSHI-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- MWPLVEDNUUSJAV-UHFFFAOYSA-N anthracene Chemical compound C1=CC=CC2=CC3=CC=CC=C3C=C21 MWPLVEDNUUSJAV-UHFFFAOYSA-N 0.000 description 2
- 150000004056 anthraquinones Chemical class 0.000 description 2
- 239000002585 base Substances 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical compound C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 2
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 2
- WQAQPCDUOCURKW-UHFFFAOYSA-N butanethiol Chemical compound CCCCS WQAQPCDUOCURKW-UHFFFAOYSA-N 0.000 description 2
- 239000004202 carbamide Substances 0.000 description 2
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 2
- 150000001735 carboxylic acids Chemical class 0.000 description 2
- BEQIIZJSZSVJJK-UHFFFAOYSA-M chembl2028372 Chemical compound [Na+].OC1=CC=C(S([O-])(=O)=O)C=C1N=NC1=C(O)C=CC2=CC=CC=C12 BEQIIZJSZSVJJK-UHFFFAOYSA-M 0.000 description 2
- 238000001723 curing Methods 0.000 description 2
- VEZUQRBDRNJBJY-UHFFFAOYSA-N cyclohexanone oxime Chemical compound ON=C1CCCCC1 VEZUQRBDRNJBJY-UHFFFAOYSA-N 0.000 description 2
- HPNMFZURTQLUMO-UHFFFAOYSA-N diethylamine Chemical compound CCNCC HPNMFZURTQLUMO-UHFFFAOYSA-N 0.000 description 2
- DMBHHRLKUKUOEG-UHFFFAOYSA-N diphenylamine Chemical compound C=1C=CC=CC=1NC1=CC=CC=C1 DMBHHRLKUKUOEG-UHFFFAOYSA-N 0.000 description 2
- 125000003438 dodecyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 2
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- 150000002989 phenols Chemical class 0.000 description 1
- 125000000951 phenoxy group Chemical group [H]C1=C([H])C([H])=C(O*)C([H])=C1[H] 0.000 description 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- XVNKRRXASPPECQ-UHFFFAOYSA-N phenyl n-phenylcarbamate Chemical compound C=1C=CC=CC=1OC(=O)NC1=CC=CC=C1 XVNKRRXASPPECQ-UHFFFAOYSA-N 0.000 description 1
- WVDDGKGOMKODPV-ZQBYOMGUSA-N phenyl(114C)methanol Chemical compound O[14CH2]C1=CC=CC=C1 WVDDGKGOMKODPV-ZQBYOMGUSA-N 0.000 description 1
- 238000000016 photochemical curing Methods 0.000 description 1
- XNGIFLGASWRNHJ-UHFFFAOYSA-L phthalate(2-) Chemical compound [O-]C(=O)C1=CC=CC=C1C([O-])=O XNGIFLGASWRNHJ-UHFFFAOYSA-L 0.000 description 1
- 150000003021 phthalic acid derivatives Chemical class 0.000 description 1
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical compound N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920002312 polyamide-imide Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920000193 polymethacrylate Polymers 0.000 description 1
- 229920001451 polypropylene glycol Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- DJEHXEMURTVAOE-UHFFFAOYSA-M potassium bisulfite Chemical compound [K+].OS([O-])=O DJEHXEMURTVAOE-UHFFFAOYSA-M 0.000 description 1
- 229940099427 potassium bisulfite Drugs 0.000 description 1
- 229910000027 potassium carbonate Inorganic materials 0.000 description 1
- 235000010259 potassium hydrogen sulphite Nutrition 0.000 description 1
- CHWRSCGUEQEHOH-UHFFFAOYSA-N potassium oxide Chemical compound [O-2].[K+].[K+] CHWRSCGUEQEHOH-UHFFFAOYSA-N 0.000 description 1
- 229910001950 potassium oxide Inorganic materials 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 125000005767 propoxymethyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])[#8]C([H])([H])* 0.000 description 1
- UORVCLMRJXCDCP-UHFFFAOYSA-N propynoic acid Chemical compound OC(=O)C#C UORVCLMRJXCDCP-UHFFFAOYSA-N 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000010526 radical polymerization reaction Methods 0.000 description 1
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- 235000012739 red 2G Nutrition 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 125000002914 sec-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- COEZWFYORILMOM-UHFFFAOYSA-M sodium 4-[(2,4-dihydroxyphenyl)diazenyl]benzenesulfonate Chemical compound [Na+].OC1=CC(O)=CC=C1N=NC1=CC=C(S([O-])(=O)=O)C=C1 COEZWFYORILMOM-UHFFFAOYSA-M 0.000 description 1
- 235000010267 sodium hydrogen sulphite Nutrition 0.000 description 1
- PVGBHEUCHKGFQP-UHFFFAOYSA-M sodium;(1z)-n-[5-amino-2-(4-aminophenyl)sulfonylphenyl]sulfonylethanimidate Chemical group [Na+].CC(=O)[N-]S(=O)(=O)C1=CC(N)=CC=C1S(=O)(=O)C1=CC=C(N)C=C1 PVGBHEUCHKGFQP-UHFFFAOYSA-M 0.000 description 1
- AXMCIYLNKNGNOT-UHFFFAOYSA-M sodium;3-[[4-[(4-dimethylazaniumylidenecyclohexa-2,5-dien-1-ylidene)-[4-[ethyl-[(3-sulfonatophenyl)methyl]amino]phenyl]methyl]-n-ethylanilino]methyl]benzenesulfonate Chemical compound [Na+].C=1C=C(C(=C2C=CC(C=C2)=[N+](C)C)C=2C=CC(=CC=2)N(CC)CC=2C=C(C=CC=2)S([O-])(=O)=O)C=CC=1N(CC)CC1=CC=CC(S([O-])(=O)=O)=C1 AXMCIYLNKNGNOT-UHFFFAOYSA-M 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 125000001424 substituent group Chemical group 0.000 description 1
- 229960002317 succinimide Drugs 0.000 description 1
- 150000005846 sugar alcohols Polymers 0.000 description 1
- 125000000020 sulfo group Chemical group O=S(=O)([*])O[H] 0.000 description 1
- 229940124530 sulfonamide Drugs 0.000 description 1
- 150000003456 sulfonamides Chemical class 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- 150000003512 tertiary amines Chemical class 0.000 description 1
- UWHCKJMYHZGTIT-UHFFFAOYSA-N tetraethylene glycol Chemical compound OCCOCCOCCOCCO UWHCKJMYHZGTIT-UHFFFAOYSA-N 0.000 description 1
- 230000003685 thermal hair damage Effects 0.000 description 1
- 238000012719 thermal polymerization Methods 0.000 description 1
- YRHRIQCWCFGUEQ-UHFFFAOYSA-N thioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3SC2=C1 YRHRIQCWCFGUEQ-UHFFFAOYSA-N 0.000 description 1
- 229960000790 thymol Drugs 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- JOXIMZWYDAKGHI-UHFFFAOYSA-N toluene-4-sulfonic acid Chemical compound CC1=CC=C(S(O)(=O)=O)C=C1 JOXIMZWYDAKGHI-UHFFFAOYSA-N 0.000 description 1
- KHPCPRHQVVSZAH-UHFFFAOYSA-N trans-cinnamyl beta-D-glucopyranoside Natural products OC1C(O)C(O)C(CO)OC1OCC=CC1=CC=CC=C1 KHPCPRHQVVSZAH-UHFFFAOYSA-N 0.000 description 1
- LDHQCZJRKDOVOX-UHFFFAOYSA-N trans-crotonic acid Natural products CC=CC(O)=O LDHQCZJRKDOVOX-UHFFFAOYSA-N 0.000 description 1
- 125000002221 trityl group Chemical group [H]C1=C([H])C([H])=C([H])C([H])=C1C([*])(C1=C(C(=C(C(=C1[H])[H])[H])[H])[H])C1=C([H])C([H])=C([H])C([H])=C1[H] 0.000 description 1
- JOHIXGUTSXXADV-UHFFFAOYSA-N undec-2-ene Chemical compound CCCCCCCCC=CC JOHIXGUTSXXADV-UHFFFAOYSA-N 0.000 description 1
- NVPYPLODXLUCNR-UHFFFAOYSA-N undec-3-ene Chemical compound [CH2]CCCCCCC=CCC NVPYPLODXLUCNR-UHFFFAOYSA-N 0.000 description 1
- BQGFQLZEZOPJFT-UHFFFAOYSA-N undec-4-ene Chemical compound [CH2]CCC=CCCCCCC BQGFQLZEZOPJFT-UHFFFAOYSA-N 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- ZTWTYVWXUKTLCP-UHFFFAOYSA-N vinylphosphonic acid Chemical compound OP(O)(=O)C=C ZTWTYVWXUKTLCP-UHFFFAOYSA-N 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
- 239000001052 yellow pigment Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Chemical class 0.000 description 1
Classifications
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
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- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2/00—Processes of polymerisation
- C08F2/44—Polymerisation in the presence of compounding ingredients, e.g. plasticisers, dyestuffs, fillers
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- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
- C08F220/02—Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
- C08F220/04—Acids; Metal salts or ammonium salts thereof
- C08F220/06—Acrylic acid; Methacrylic acid; Metal salts or ammonium salts thereof
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- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
- C08F220/02—Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
- C08F220/10—Esters
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
- C08F220/02—Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
- C08F220/10—Esters
- C08F220/34—Esters containing nitrogen, e.g. N,N-dimethylaminoethyl (meth)acrylate
- C08F220/36—Esters containing nitrogen, e.g. N,N-dimethylaminoethyl (meth)acrylate containing oxygen in addition to the carboxy oxygen, e.g. 2-N-morpholinoethyl (meth)acrylate or 2-isocyanatoethyl (meth)acrylate
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- G02B5/20—Filters
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133512—Light shielding layers, e.g. black matrix
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133514—Colour filters
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
- G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
- G03F7/033—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers
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- G—PHYSICS
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/105—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having substances, e.g. indicators, for forming visible images
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/40—Treatment after imagewise removal, e.g. baking
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/86—Arrangements for improving contrast, e.g. preventing reflection of ambient light
- H10K50/865—Arrangements for improving contrast, e.g. preventing reflection of ambient light comprising light absorbing layers, e.g. light-blocking layers
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Optics & Photonics (AREA)
- Health & Medical Sciences (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- Nonlinear Science (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Mathematical Physics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Architecture (AREA)
- Structural Engineering (AREA)
- Materials For Photolithography (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
- Optical Filters (AREA)
- Polyurethanes Or Polyureas (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Polymerisation Methods In General (AREA)
Abstract
ブロックイソシアナト基を有する構成単位(a)及び酸基を有する構成単位(b)を含有する共重合体(A)と、水酸基含有有機溶剤(B)と、反応性希釈剤(C)と、光重合開始剤(D)とを含有する感光性樹脂組成物。A copolymer (A) containing a structural unit (a) having a block isocyanato group and a structural unit (b) having an acid group, a hydroxyl group-containing organic solvent (B), a reactive diluent (C), A photosensitive resin composition containing a photopolymerization initiator (D).
Description
本発明は、感光性樹脂組成物及びその製造方法、カラーフィルター及びその製造方法、並びに画像表示素子に関する。 The present invention relates to a photosensitive resin composition and a manufacturing method thereof, a color filter and a manufacturing method thereof, and an image display device.
近年、省資源や省エネルギーの観点から、各種コーティング、印刷、塗料、接着剤などの分野において、紫外線や電子線などの活性エネルギー線により硬化可能な感光性樹脂組成物が広く使用されている。また、プリント配線基板などの電子材料の分野においても、活性エネルギー線により硬化可能な感光性樹脂組成物が、ソルダーレジストやカラーフィルター用レジストなどに使用されている。さらに、硬化可能な感光性樹脂組成物に対する要求特性は、益々多様かつ高度になってきているが、中でも、生産性を考慮した短時間硬化性、適用する部材の熱的ダメージを抑える低温硬化性が要求されている。 In recent years, from the viewpoint of resource saving and energy saving, photosensitive resin compositions curable by active energy rays such as ultraviolet rays and electron rays have been widely used in the fields of various coatings, printing, paints and adhesives. Also in the field of electronic materials such as printed wiring boards, photosensitive resin compositions curable by active energy rays are used for solder resists, resists for color filters, and the like. Furthermore, the required properties for curable photosensitive resin compositions are becoming increasingly diverse and sophisticated, but among them, short-time curability considering productivity and low-temperature curability that suppresses thermal damage to applied components. Is required.
カラーフィルターは、一般に、ガラス基板などの透明基板と、透明基板上に形成された赤(R)、緑(G)及び青(B)の画素と、画素の境界に形成されるブラックマトリックスと、画素及びブラックマトリックス上に形成される保護膜とから構成される。このような構成を有するカラーフィルターは、通常、透明基板上にブラックマトリックス、画素及び保護膜を順次形成することによって製造される。画素及びブラックマトリックス(以下、画素及びブラックマトリックスのことを「着色パターン」という。)の形成方法としては、様々な方法が提案されている。その中で、感光性樹脂組成物をレジストとして用い、塗布、露光、現像及びベーキングを繰り返すフォトリソグラフィ工法で作製される顔料/染料分散法は、耐久性に優れ、ピンホールなどの欠陥が少ない着色パターンを与えるため、現在の主流となっている。 The color filter generally includes a transparent substrate such as a glass substrate, red (R), green (G) and blue (B) pixels formed on the transparent substrate, and a black matrix formed at the boundary between the pixels. It is composed of a pixel and a protective film formed on the black matrix. A color filter having such a structure is usually manufactured by sequentially forming a black matrix, pixels and a protective film on a transparent substrate. Various methods have been proposed as a method for forming pixels and a black matrix (hereinafter, the pixels and the black matrix are referred to as “coloring patterns”). Among them, the pigment/dye dispersion method prepared by a photolithography method in which a photosensitive resin composition is used as a resist and repeating coating, exposure, development and baking is excellent in durability and coloring with few defects such as pinholes. It is the current mainstream because it gives patterns.
一般に、フォトリソグラフィ工法に用いられる感光性樹脂組成物は、アルカリ可溶性樹脂、反応性希釈剤、光重合開始剤、着色剤及び溶剤を含有する。顔料/染料分散法では、上記の利点を有している反面、ブラックマトリックス、R、G、Bのパターンを繰り返し形成することから、高い耐熱性が求められ、高いベーキング温度に耐え得る着色剤として、使用できる着色剤の種類が限られるなどの制限があることが、しばしば問題となる。 Generally, the photosensitive resin composition used in the photolithography method contains an alkali-soluble resin, a reactive diluent, a photopolymerization initiator, a colorant and a solvent. The pigment/dye dispersion method has the above-mentioned advantages, but on the other hand, because it repeatedly forms a pattern of black matrix, R, G, and B, high heat resistance is required, and as a colorant capable of withstanding a high baking temperature. However, it is often a problem that there are limitations such as the types of colorants that can be used.
特許文献1は、アルカリ可溶性樹脂、エチレン性不飽和結合を有する重合性化合物、感放射線性重合開始剤、着色剤及び3−アミノベンゼンスルホン酸エチル等の化合物を用いることで、低温硬化が可能で保存安定性を向上させた着色組成物を開示している。 In Patent Document 1, low temperature curing is possible by using a compound such as an alkali-soluble resin, a polymerizable compound having an ethylenically unsaturated bond, a radiation-sensitive polymerization initiator, a colorant and ethyl 3-aminobenzenesulfonate. A colored composition having improved storage stability is disclosed.
特許文献2は、塩基性物質によって又は塩基性物質の存在下での加熱によって最終生成物への反応が促進される高分子前駆体と、電磁波の照射及び加熱により塩基を発生する特定の塩基発生剤を含む感光性樹脂組成物を用いることで低温硬化を可能にしている。 Patent Document 2 discloses a polymer precursor in which a reaction to a final product is promoted by heating with a basic substance or in the presence of a basic substance, and a specific base generation in which a base is generated by irradiation with electromagnetic waves and heating. By using a photosensitive resin composition containing an agent, low temperature curing is possible.
近年では、電子ペーパー等のフレキシブルディスプレイが普及している。このフレキシブルディスプレイの基板としては、ポリエチレンテレフタレート等のプラスチック基板が検討されている。この基板はベーキング時に伸張又は収縮する性質があり、ベーキング工程の低温化が必要とされている。しかし、特許文献1で達成されるレベルでは、上記の要求を満たすには不十分である。また、特許文献2では、低温硬化性を向上させた反面、保存安定性が低く、実用化は困難である。 In recent years, flexible displays such as electronic paper have become popular. As a substrate for this flexible display, a plastic substrate such as polyethylene terephthalate is under study. This substrate has the property of expanding or contracting during baking, and it is necessary to lower the temperature of the baking process. However, the level achieved in Patent Document 1 is insufficient to satisfy the above requirements. Further, in Patent Document 2, although low-temperature curability is improved, storage stability is low and practical application is difficult.
本発明は、上記の課題を解決するためになされたものであり、現像性及び保存安定性が良好であると共に、低温で硬化させても耐溶剤性に優れた硬化塗膜を与える感光性樹脂組成物及びその製造方法を提供することを目的とする。
また、本発明は、耐溶剤性に優れた着色パターンを有するカラーフィルター及びその製造方法並びに該カラーフィルターを具備する画像表示素子を提供することを目的とする。The present invention has been made in order to solve the above-mentioned problems, and is a photosensitive resin which has a good developability and storage stability and gives a cured coating film excellent in solvent resistance even when cured at a low temperature. It is an object to provide a composition and a method for producing the same.
Another object of the present invention is to provide a color filter having a colored pattern with excellent solvent resistance, a method for producing the same, and an image display device equipped with the color filter.
即ち、本発明は、以下の[1]〜[15]で示される。
[1]ブロックイソシアナト基を有する構成単位(a)及び酸基を有する構成単位(b)を含有する共重合体(A)と、水酸基含有有機溶剤(B)と、反応性希釈剤(C)と、光重合開始剤(D)とを含有することを特徴とする感光性樹脂組成物。
[2]前記ブロックイソシアナト基を有する構成単位(a)が、ブロックイソシアナト基含有(メタ)アクリレート由来の構成単位であり、前記ブロックイソシアナト基含有(メタ)アクリレートのブロックイソシアナト基の解離率が100℃で30分加熱した際、5〜99質量%である[1]に記載の感光性樹脂組成物。
[3]前記ブロックイソシアナト基を有する構成単位(a)のブロック剤が、マロン酸ジエチル、3,5−ジメチルピラゾール及びメチルエチルケトオキシムからなる群から選択される1種以上である[1]又は[2]に記載の感光性樹脂組成物。
[4]前記水酸基含有有機溶剤(B)が、エチレングリコールモノアルキルエーテル、ジエチレングリコールモノアルキルエーテル、プロピレングリコールモノアルキルエーテル、プロピレングリコールモノアリールエーテル、ジプロピレングリコールモノアルキルエーテル、トリプロピレングリコールモノアルキルエーテル、3−メトキシ−1−ブタノール、1,3−プロパンジオールモノアルキルエーテル、1,3−ブタンジオールモノアルキルエーテル、1,4−ブタンジオールモノアルキルエーテル、グリセリンモノアルキルエーテル、グリセリンジアルキルエーテル、メタノール、エタノール、プロパノール、C5-6シクロアルカンジオール、C5-6シクロアルカンジメタノール、乳酸エチル及びジアセトンアルコールからなる群から選択される1種以上である[1]〜[3]のいずれかに記載の感光性樹脂組成物。
[5]前記酸基を有する構成単位(b)が、不飽和カルボン酸由来の構成単位である[1]〜[4]のいずれかに記載の感光性樹脂組成物。
[6]前記共重合体(A)が、前記ブロックイソシアナト基を有する構成単位(a)を1〜40モル%及び前記酸基を有する構成単位(b)を1〜60モル%含有する[1]〜[5]のいずれかに記載の感光性樹脂組成物。
[7]前記共重合体(A)における前記ブロックイソシアナト基を有する構成単位(a)と前記酸基を有する構成単位(b)とのモル比率が、10:90〜50:50である[1]〜[6]のいずれかに記載の感光性樹脂組成物。
[8]前記共重合体(A)が、メタクリル酸2−(3,5−ジメチルピラゾール−1−イル)カルボニルアミノエチル、メタクリル酸2−[O−(1’−メチルプロピリデンアミノ)カルボキシアミノ]エチル、マロン酸−2−[[[2−メチル−1−オキソ−2−プロペニル]オキシ]エチル]アミノ]カルボニル]−1,3ジエチルエステル、安息香酸−4−[[[[2−[(2−メチル−1−オキソ−2−プロペン−1−イル)オキシ]エチル]アミン]カルボニル]オキシ]メチルエステル、安息香酸−2−[[[[2−[(2−メチル−1−オキシ−2−プロペン−1−イル)オキシ]エチル]アミン]カルボニル]オキシ]メチルエステル、及び2−プロペン酸−2−メチル−2−[[(3,5−ジメチルフェノキシ)カルボニル]アミン]エチルエステルからなる群から選択される少なくとも1種由来の構成単位(a)と、(メタ)アクリル酸由来の構成単位(b)と、グリシジル(メタ)アクリレート、2−ヒドロキシエチル(メタ)アクリレート、ジシクロペンタニル(メタ)アクリレート及びメチル(メタ)アクリレートからなる群から選択される少なくとも1種由来の構成単位(c)とを含有する[1]〜[7]のいずれかに記載の感光性樹脂組成物。
[9]着色剤(E)をさらに含有し、カラーフィルター用である[1]〜[8]のいずれかに記載の感光性樹脂組成物。
[10]前記共重合体(A)と前記反応性希釈剤(C)との合計量100質量部に対して、前記共重合体(A)が10〜100質量部、前記水酸基含有有機溶剤(B)が30〜1,000質量部、前記反応性希釈剤(C)が0質量部超〜90質量部、前記光重合開始剤(D)が0.1〜30質量部及び前記着色剤(E)が5〜80質量部含有される[9]に記載の感光性樹脂組成物。
[11]前記着色剤(E)が、顔料を含む[9]又は[10]に記載の感光性樹脂組成物。That is, the present invention is shown in the following [1] to [15].
[1] A copolymer (A) containing a structural unit (a) having a block isocyanato group and a structural unit (b) having an acid group, a hydroxyl group-containing organic solvent (B), and a reactive diluent (C). And a photopolymerization initiator (D).
[2] The structural unit (a) having the block isocyanato group is a structural unit derived from a block isocyanato group-containing (meth)acrylate, and the block isocyanato group of the block isocyanato group-containing (meth)acrylate is dissociated. The photosensitive resin composition according to [1], which has a rate of 5 to 99 mass% when heated at 100° C. for 30 minutes.
[3] The blocking agent of the structural unit (a) having a block isocyanato group is one or more selected from the group consisting of diethyl malonate, 3,5-dimethylpyrazole and methylethylketoxime [1] or [ 2] The photosensitive resin composition as described in [2].
[4] The hydroxyl group-containing organic solvent (B) is ethylene glycol monoalkyl ether, diethylene glycol monoalkyl ether, propylene glycol monoalkyl ether, propylene glycol monoaryl ether, dipropylene glycol monoalkyl ether, tripropylene glycol monoalkyl ether, 3-methoxy-1-butanol, 1,3-propanediol monoalkyl ether, 1,3-butanediol monoalkyl ether, 1,4-butanediol monoalkyl ether, glycerin monoalkyl ether, glycerin dialkyl ether, methanol, ethanol , Propanol, C 5-6 cycloalkane diol, C 5-6 cycloalkane dimethanol, ethyl lactate and diacetone alcohol, which are one or more selected from [1] to [3]. The photosensitive resin composition of.
[5] The photosensitive resin composition according to any one of [1] to [4], wherein the structural unit (b) having an acid group is a structural unit derived from an unsaturated carboxylic acid.
[6] The copolymer (A) contains 1 to 40 mol% of the structural unit (a) having the block isocyanato group and 1 to 60 mol% of the structural unit (b) having the acid group [ The photosensitive resin composition according to any one of 1] to [5].
[7] The molar ratio of the structural unit (a) having the block isocyanato group to the structural unit (b) having the acid group in the copolymer (A) is 10:90 to 50:50 [ The photosensitive resin composition according to any one of 1] to [6].
[8] The copolymer (A) is 2-(3,5-dimethylpyrazol-1-yl)carbonylaminoethyl methacrylate, 2-[O-(1′-methylpropylideneamino)carboxaminomethacrylate. ] Ethyl, malonic acid-2-[[[2-methyl-1-oxo-2-propenyl]oxy]ethyl]amino]carbonyl]-1,3 diethyl ester, benzoic acid-4-[[[[[2-[ (2-Methyl-1-oxo-2-propen-1-yl)oxy]ethyl]amine]carbonyl]oxy]methyl ester, benzoic acid-2-[[[[2-[(2-methyl-1-oxy 2-propen-1-yl)oxy]ethyl]amine]carbonyl]oxy]methyl ester, and 2-propenoic acid-2-methyl-2-[[(3,5-dimethylphenoxy)carbonyl]amine]ethyl ester A structural unit (a) derived from at least one selected from the group consisting of, a structural unit (b) derived from (meth)acrylic acid, glycidyl (meth)acrylate, 2-hydroxyethyl (meth)acrylate, dicyclo The photosensitive resin composition according to any one of [1] to [7], containing a structural unit (c) derived from at least one selected from the group consisting of pentanyl (meth)acrylate and methyl (meth)acrylate. object.
[9] The photosensitive resin composition according to any one of [1] to [8], which further contains a colorant (E) and is for a color filter.
[10] 10 to 100 parts by mass of the copolymer (A), 100 parts by mass of the copolymer (A) and the reactive diluent (C), the hydroxyl group-containing organic solvent ( B) is 30 to 1,000 parts by mass, the reactive diluent (C) is more than 0 parts by mass to 90 parts by mass, the photopolymerization initiator (D) is 0.1 to 30 parts by mass, and the colorant ( The photosensitive resin composition according to [9], which contains 5 to 80 parts by mass of E).
[11] The photosensitive resin composition according to [9] or [10], wherein the colorant (E) contains a pigment.
[12][9]〜[11]のいずれかに記載の感光性樹脂組成物の硬化物からなる着色パターンを有することを特徴とするカラーフィルター。 [12] A color filter having a colored pattern made of a cured product of the photosensitive resin composition according to any one of [9] to [11].
[13][12]に記載のカラーフィルターを具備することを特徴とする画像表示素子。 [13] An image display device comprising the color filter according to [12].
[14][9]〜[11]のいずれかに記載の感光性樹脂組成物を基板に塗布し、露光し、アルカリ現像した後、160℃以下の温度でベーキングして着色パターンを形成する工程を含むことを特徴とするカラーフィルターの製造方法。 [14] A step of applying a photosensitive resin composition according to any one of [9] to [11] to a substrate, exposing it to light, developing it with an alkali, and baking it at a temperature of 160° C. or lower to form a colored pattern. A method for producing a color filter, comprising:
[15]水酸基含有有機溶剤(B)の存在下でブロックイソシアナト基含有(メタ)アクリレートと不飽和カルボン酸とを共重合反応させて共重合体(A)を合成し、次いで、反応性希釈剤(C)及び光重合開始剤(D)を配合する工程を含むことを特徴とする感光性樹脂組成物の製造方法。 [15] A block isocyanato group-containing (meth)acrylate and an unsaturated carboxylic acid are subjected to a copolymerization reaction in the presence of a hydroxyl group-containing organic solvent (B) to synthesize a copolymer (A), and then reactive dilution. A method for producing a photosensitive resin composition, which comprises a step of blending the agent (C) and the photopolymerization initiator (D).
本発明によれば、現像性及び保存安定性が良好であると共に、低温で硬化させても耐溶剤性に優れた硬化塗膜を形成する感光性樹脂組成物及びその製造方法を提供することができる。
また、本発明によれば、耐溶剤性に優れた着色パターンを有するカラーフィルター及びその製造方法並びに該カラーフィルターを具備する画像表示素子を提供することができる。According to the present invention, it is possible to provide a photosensitive resin composition having good developability and storage stability, and forming a cured coating film having excellent solvent resistance even when cured at a low temperature, and a method for producing the same. it can.
Further, according to the present invention, it is possible to provide a color filter having a colored pattern having excellent solvent resistance, a method for producing the same, and an image display device including the color filter.
<感光性樹脂組成物>
本発明の感光性樹脂組成物は、ブロックイソシアナト基を有する構成単位(a)及び酸基を有する構成単位(b)を含有する共重合体(A)と、水酸基含有有機溶剤(B)と、反応性希釈剤(C)と、光重合開始剤(D)とを含有することを特徴とする。<Photosensitive resin composition>
The photosensitive resin composition of the present invention comprises a copolymer (A) containing a structural unit (a) having a block isocyanato group and a structural unit (b) having an acid group, and a hydroxyl group-containing organic solvent (B). , A reactive diluent (C) and a photopolymerization initiator (D).
<共重合体(A)>
<ブロックイソシアナト基を有する構成単位(a)>
共重合体(A)が含有するブロックイソシアナト基を有する構成単位(a)は、ブロックイソシアナト基含有モノマー由来の構成単位である。該モノマーとしては、エチレン性不飽和結合とブロックイソシアナト基とを有するモノマー等、例えば、分子中にビニル基、(メタ)アクリロイルオキシ基等を有するイソシアネート化合物におけるイソシアナト基を、ブロック剤でブロック化した化合物が挙げられる。イソシアネート化合物とブロック剤との反応は、溶剤の存在の有無に関わらず行うことができる。溶剤を用いる場合、イソシアナト基に対して不活性な溶剤を用いる必要がある。ブロック化反応に際して、錫、亜鉛、鉛等の有機金属塩、3級アミン等を触媒として用いてもよい。反応は、一般に−20〜150℃で行うことができるが、0〜100℃で行うことが好ましい。前記イソシアネート化合物の例としては、下記式(1)で表される化合物を挙げることができる。<Copolymer (A)>
<Structural Unit (a) Having Block Isocyanato Group>
The structural unit (a) having a block isocyanato group contained in the copolymer (A) is a structural unit derived from a block isocyanato group-containing monomer. Examples of the monomer include a monomer having an ethylenically unsaturated bond and a blocked isocyanato group, such as a vinyl group in the molecule, an isocyanato group in an isocyanate compound having a (meth)acryloyloxy group, etc., blocked with a blocking agent. Examples of the compound include The reaction between the isocyanate compound and the blocking agent can be carried out regardless of the presence or absence of a solvent. When using a solvent, it is necessary to use a solvent which is inactive to the isocyanato group. In the blocking reaction, organic metal salts of tin, zinc, lead, etc., tertiary amines, etc. may be used as catalysts. The reaction can generally be carried out at -20 to 150°C, preferably 0 to 100°C. Examples of the isocyanate compound include compounds represented by the following formula (1).
上記式(1)中、R1は、水素原子又はメチル基を示し、R2は、−CO−、−COOR3−(ここで、R3は炭素原子数1〜6のアルキレン基である)又は−COO−R4O−CONH−R5−(ここで、R4は炭素原子数2〜6のアルキレン基であり、R5は置換基を有していてもよい炭素原子数2〜12のアルキレン基又は炭素原子数6〜12のアリーレン基である)を示す。R2は、好ましくは−COOR3−であり、ここで、R3は、好ましくは炭素原子数1〜4のアルキレン基である。In the above formula (1), R 1 represents a hydrogen atom or a methyl group, R 2 is —CO—, —COOR 3 — (wherein R 3 is an alkylene group having 1 to 6 carbon atoms). Or —COO—R 4 O—CONH—R 5 — (wherein R 4 is an alkylene group having 2 to 6 carbon atoms, and R 5 is 2 to 12 carbon atoms which may have a substituent). Is an alkylene group or an arylene group having 6 to 12 carbon atoms). R 2 is preferably —COOR 3 —, where R 3 is preferably an alkylene group having 1 to 4 carbon atoms.
上記式(1)で表されるイソシアネート化合物としては、具体的には、2−イソシアナトエチル(メタ)アクリレート、2−イソシアナトプロピル(メタ)アクリレート、3−イソシアナトプロピル(メタ)アクリレート、2−イソシアナト−1−メチルエチル(メタ)アクリレート、2−イソシアナト−1,1−ジメチルエチル(メタ)アクリレート、4−イソシアナトシクロヘキシル(メタ)アクリレート、メタクリロイルイソシアネート等が挙げられる。また、2−ヒドロキシアルキル(メタ)アクリレートとジイソシアネート化合物との等モル(1モル:1モル)反応生成物も使用できる。前記2−ヒドロキシアルキル(メタ)アクリレートのアルキル基としては、エチル基又はn−プロピル基が好ましく、エチル基がより好ましい。前記ジイソシアネート化合物としては、例えば、ヘキサメチレンジイソシアネート、2,4−(又は2,6−)トリレンジイソシアネート(TDI)、4,4’−ジフェニルメタンジイソシアネート(MDI)、3,5,5−トリメチル−3−イソシアナトメチルシクロヘキシルイソシアネート(IPDI)、m−(又はp−)キシレンジイソシアネート、1,3−(又は1,4−)ビス(イソシアナトメチル)シクロヘキサン、リジンジイソシアネート等が挙げられる。 As the isocyanate compound represented by the above formula (1), specifically, 2-isocyanatoethyl (meth)acrylate, 2-isocyanatopropyl (meth)acrylate, 3-isocyanatopropyl (meth)acrylate, 2 -Isocyanato-1-methylethyl (meth)acrylate, 2-isocyanato-1,1-dimethylethyl (meth)acrylate, 4-isocyanatocyclohexyl (meth)acrylate, methacryloyl isocyanate and the like can be mentioned. Further, an equimolar (1 mol:1 mol) reaction product of 2-hydroxyalkyl (meth)acrylate and a diisocyanate compound can also be used. The alkyl group of the 2-hydroxyalkyl (meth)acrylate is preferably an ethyl group or an n-propyl group, more preferably an ethyl group. Examples of the diisocyanate compound include hexamethylene diisocyanate, 2,4-(or 2,6-)tolylene diisocyanate (TDI), 4,4′-diphenylmethane diisocyanate (MDI), 3,5,5-trimethyl-3. -Isocyanatomethylcyclohexyl isocyanate (IPDI), m-(or p-)xylene diisocyanate, 1,3-(or 1,4-)bis(isocyanatomethyl)cyclohexane, lysine diisocyanate and the like can be mentioned.
これらのイソシアネート化合物の中でも、2−イソシアナトエチル(メタ)アクリレート、2−イソシアナトプロピル(メタ)アクリレート、3−イソシアナトプロピル(メタ)アクリレート、2−イソシアナト−1−メチルエチル(メタ)アクリレート、2−イソシアナト−1,1−ジメチルエチル(メタ)アクリレート、4−イソシアナトシクロヘキシル(メタ)アクリレート及びメタクリロイルイソシアネートが好ましく、2−イソシアナトエチル(メタ)アクリレート及び2−イソシアナトプロピル(メタ)アクリレートがより好ましい。 Among these isocyanate compounds, 2-isocyanatoethyl (meth)acrylate, 2-isocyanatopropyl (meth)acrylate, 3-isocyanatopropyl (meth)acrylate, 2-isocyanato-1-methylethyl (meth)acrylate, 2-isocyanato-1,1-dimethylethyl (meth)acrylate, 4-isocyanatocyclohexyl (meth)acrylate and methacryloyl isocyanate are preferable, and 2-isocyanatoethyl (meth)acrylate and 2-isocyanatopropyl (meth)acrylate are preferable. More preferable.
なお、本明細書において(メタ)アクリレートと表記したものは、アクリレート及びメタクリレートのいずれでもよいことを意味しており、また、(メタ)アクリル酸の表記はアクリル酸及びメタクリル酸のいずれでもよいことを意味している。 In addition, what is described as (meth)acrylate in this specification means that either acrylate or methacrylate may be used, and the description of (meth)acrylic acid may be either acrylic acid or methacrylic acid. Means
前記イソシアネート化合物におけるイソシアナト基をブロック化するブロック剤としては、例えば、ε−カプロラクタム、δ−バレロラクタム、γ−ブチロラクタム、β−プロピオラクタム等のラクタム系;メタノール、エタノール、プロパノール、ブタノール、エチレングリコール、メチルセロソルブ、ブチルセロソルブ、メチルカルビトール、ベンジルアルコール、フェニルセロソルブ、フルフリルアルコール、シクロヘキサノール等のアルコール系;フェノール、クレゾール、2,6−キシレノール、3,5−キシレノール、エチルフェノール、o−イソプロピルフェノール、p−tert−ブチルフェノール等のブチルフェノール、p−tert−オクチルフェノール、ノニルフェノール、ジノニルフェノール、スチレン化フェノール、2−ヒドロキシ安息香酸メチル、4−ヒドロキシ安息香酸メチル、チモール、p−ナフトール、p−ニトロフェノール、p−クロロフェノール等のフェノール系;マロン酸ジメチル、マロン酸ジエチル、アセト酢酸メチル、アセト酢酸エチル、アセチルアセトン等の活性メチレン系;ブチルメルカプタン、チオフェノール、tert−ドデシルメルカプタン等のメルカプタン系;ジフェニルアミン、フェニルナフチルアミン、アニリン、カルバゾール等のアミン系;アセトアニリド、アセトアニシジド、酢酸アミド、ベンズアミド等の酸アミド系;コハク酸イミド、マレイン酸イミド等の酸イミド系;イミダゾール、2−メチルイミダゾール、2−エチルイミダゾール等のイミダゾール系;ピラゾール、3,5−ジメチルピラゾール等のピラゾール系;尿素、チオ尿素、エチレン尿素等の尿素系;N−フェニルカルバミン酸フェニル、2−オキサゾリドン等のカルバミド酸塩系:エチレンイミン、ポリエチレンイミン等のイミン系;ホルムアルドオキシム、アセトアルドオキシム、アセトオキシム、メチルエチルケトオキシム、メチルイソブチルケトオキシム、シクロヘキサノンオキシム等のオキシム系;重亜硫酸ソーダ、重亜硫酸カリウム等の重亜硫酸塩系などが挙げられる。これらのブロック剤は、単独で用いてもよく、2種以上を組み合わせて用いてもよい。 Examples of the blocking agent that blocks the isocyanato group in the isocyanate compound include lactams such as ε-caprolactam, δ-valerolactam, γ-butyrolactam, β-propiolactam; methanol, ethanol, propanol, butanol, ethylene glycol. , Methyl cellosolve, butyl cellosolve, methyl carbitol, benzyl alcohol, phenyl cellosolve, furfuryl alcohol, cyclohexanol, and other alcohols; phenol, cresol, 2,6-xylenol, 3,5-xylenol, ethylphenol, o-isopropylphenol , Butylphenol such as p-tert-butylphenol, p-tert-octylphenol, nonylphenol, dinonylphenol, styrenated phenol, methyl 2-hydroxybenzoate, methyl 4-hydroxybenzoate, thymol, p-naphthol, p-nitrophenol, Phenols such as p-chlorophenol; active methylenes such as dimethyl malonate, diethyl malonate, methyl acetoacetate, ethyl acetoacetate and acetylacetone; mercaptans such as butyl mercaptan, thiophenol, tert-dodecyl mercaptan; diphenylamine, phenyl Amines such as naphthylamine, aniline and carbazole; acid amides such as acetanilide, acetanisidide, acetic acid amide and benzamide; acid imides such as succinimide and maleic acid imide; imidazole, 2-methylimidazole, 2-ethylimidazole and the like Imidazole type; pyrazole type such as pyrazole and 3,5-dimethylpyrazole; urea type such as urea, thiourea and ethylene urea; carbamate type such as phenyl N-phenylcarbamate and 2-oxazolidone: ethyleneimine, polyethyleneimine And the like; oximes such as formaldoxime, acetoaldoxime, acetoxime, methylethylketoxime, methylisobutylketoxime and cyclohexanoneoxime; bisulfite such as sodium bisulfite and potassium bisulfite. These blocking agents may be used alone or in combination of two or more.
ブロック剤は反応性の高いイソシアナト基を保護しているが、加熱によりブロックイソシアナト基が解離してイソシアナト基が再生される。本発明では、そのイソシアナト基が共重合体(A)や反応性希釈剤(C)に含まれる反応性の官能基、すなわち、酸基や所望により含まれるヒドロキシ基、アミノ基などと反応して、架橋密度の高い硬化物を形成する。 The blocking agent protects the highly reactive isocyanato group, but the heating dissociates the blocked isocyanato group to regenerate the isocyanato group. In the present invention, the isocyanato group reacts with a reactive functional group contained in the copolymer (A) or the reactive diluent (C), that is, an acid group or a hydroxy group or amino group optionally contained. , To form a cured product having a high crosslinking density.
後述の感光性樹脂組成物の低温硬化性及び保存安定性の観点から、ブロックイソシアナト基を有する構成単位(a)を与えるモノマーとしては、ブロックイソシアナト基含有(メタ)アクリレートを用いることが好ましい。100℃で30分加熱処理した場合の該ブロックイソシアナト基の解離率が好ましくは5〜99質量%、より好ましくは8〜97質量%、最も好ましくは10〜95質量%となるブロックイソシアナト基含有(メタ)アクリレートを用いることが好ましい。なお、ブロックイソシアナト基含有(メタ)アクリレートのブロックイソシアナト基の解離率は、該ブロックイソシアナト基含有(メタ)アクリレートの濃度が20質量%のn−オクタノール溶液を調製し、その溶液に1質量%相当のジブチルスズラウレート及び3質量%相当のフェノチアジン(重合防止剤)を加えた後、100℃で30分加熱した後の該ブロックイソシアナト基含有(メタ)アクリレートの質量減少割合をHPLC分析により測定した値とする。解離率が上記範囲のブロックイソシアナト基含有(メタ)アクリレートを用いると、合成の際の共重合体の安定性を十分に確保することができ、硬化塗膜作製の際のベーキング温度を十分に下げることができ硬化塗膜の耐溶剤性も十分に確保できる。このような解離率を有するブロックイソシアナト基含有(メタ)アクリレートのブロック剤としては、γ−ブチロラクタム、1−メトキシ−2−プロパノール、2,6−ジメチルフェノール、ジイソプロピルアミン、メチルエチルケトオキシム、3,5−ジメチルピラゾール及びマロン酸ジエチルが挙げられる。これらのブロック剤の中でも、低温硬化性の観点から、マロン酸ジエチル、3,5−ジメチルピラゾール及びメチルエチルケトオキシムがより好ましい。 From the viewpoint of low-temperature curability and storage stability of the photosensitive resin composition described below, it is preferable to use a block isocyanato group-containing (meth)acrylate as the monomer that gives the structural unit (a) having a block isocyanato group. .. A block isocyanato group having a dissociation rate of the block isocyanato group of preferably 5 to 99% by mass, more preferably 8 to 97% by mass, and most preferably 10 to 95% by mass when heat-treated at 100° C. for 30 minutes. It is preferable to use a containing (meth)acrylate. The dissociation rate of the block isocyanato group of the block isocyanato group-containing (meth)acrylate was determined by preparing an n-octanol solution in which the concentration of the block isocyanato group-containing (meth)acrylate was 20% by mass, and adding 1 to the solution. HPLC analysis of the mass reduction ratio of the block isocyanato group-containing (meth)acrylate after heating at 100° C. for 30 minutes after adding dibutyltin laurate of mass% and phenothiazine (polymerization inhibitor) of 3 mass% The value measured by When the block isocyanato group-containing (meth)acrylate having a dissociation rate in the above range is used, the stability of the copolymer at the time of synthesis can be sufficiently ensured, and the baking temperature at the time of producing a cured coating film can be sufficiently increased. It can be lowered, and the solvent resistance of the cured coating film can be sufficiently secured. Examples of the blocking agent of a block isocyanato group-containing (meth)acrylate having such a dissociation rate include γ-butyrolactam, 1-methoxy-2-propanol, 2,6-dimethylphenol, diisopropylamine, methylethylketoxime, 3,5. -Dimethylpyrazole and diethyl malonate. Among these blocking agents, diethyl malonate, 3,5-dimethylpyrazole and methylethylketoxime are more preferable from the viewpoint of low temperature curability.
また、ブロックイソシアナト基含有(メタ)アクリレートのブロックイソシアナト基の解離温度が80℃以上であるブロックイソシアナト基含有(メタ)アクリレートを用いることも好ましい。解離温度が80℃以上であるブロックイソシアナト基含有(メタ)アクリレートを用いると、合成の際の共重合体の安定性を十分に確保することができ、後述する変性反応の際に意図しない架橋反応を低減することができる。一方、ブロックイソシアナト基の解離温度が160℃以下であると、ベーキング温度を十分に下げることができ硬化塗膜の耐溶剤性も十分に確保できる。なお、ブロックイソシアナト基含有(メタ)アクリレートのブロックイソシアナト基の解離温度は、該ブロックイソシアナト基含有(メタ)アクリレートの濃度が20質量%のn−オクタノール溶液を調製し、その溶液に1質量%相当のジブチルスズラウレート及び3質量%相当のフェノチアジン(重合防止剤)を加えた後、所定の温度で加熱して、30分後の該ブロックイソシアナト基含有(メタ)アクリレートの質量減少割合をHPLC分析により測定し、その質量減少割合が80質量%以上となる温度をブロックイソシアナト基の解離温度とする。 It is also preferable to use a block isocyanato group-containing (meth)acrylate having a block isocyanato group dissociation temperature of 80°C or higher in the block isocyanato group-containing (meth)acrylate. When a block isocyanato group-containing (meth)acrylate having a dissociation temperature of 80° C. or higher is used, the stability of the copolymer at the time of synthesis can be sufficiently ensured, and unintended crosslinking at the time of the modification reaction described later The reaction can be reduced. On the other hand, when the dissociation temperature of the block isocyanato group is 160° C. or lower, the baking temperature can be sufficiently lowered and the solvent resistance of the cured coating film can be sufficiently secured. The dissociation temperature of the block isocyanato group of the block isocyanato group-containing (meth)acrylate was determined by preparing an n-octanol solution having a concentration of the block isocyanato group-containing (meth)acrylate of 20% by mass, and adding 1 to the solution. After the addition of dibutyltin laurate in an amount of 3% by mass and phenothiazine (a polymerization inhibitor) in an amount of 3% by mass, the mixture is heated at a predetermined temperature and the mass reduction ratio of the block isocyanato group-containing (meth)acrylate after 30 minutes. Is determined by HPLC analysis, and the temperature at which the mass reduction rate is 80% by mass or more is defined as the dissociation temperature of the block isocyanato group.
前記ブロックイソシアナト基含有(メタ)アクリレートの例としては、下記式(2)で示されるカレンズ(登録商標)MOI−DEM(メタクロイルオキシエチルイソシアネートとマロン酸ジエチルとの反応生成物、昭和電工株式会社製、ブロックイソシアナト基の解離温度:90℃、解離率:90質量%)、下記式(3)で示されるカレンズMOI−BP(メタクロイルオキシエチルイソシアネートと3,5−ジメチルピラゾールとの反応生成物、昭和電工株式会社製、ブロックイソシアナト基の解離温度:110℃、解離率:70質量%)、下記式(4)で示されるカレンズMOI−BM(メタクロイルオキシエチルイソシアネートとメチルエチルケトオキシムとの反応生成物、昭和電工株式会社製、ブロックイソシアナト基の解離温度:130℃、解離率:18質量%)のようなメタクリレート及びこれらに対応するアクリレートなどが挙げられる。これらのブロックイソシアナト基含有(メタ)アクリレートは、単独で用いてもよく、2種以上を組み合わせて用いてもよい。 Examples of the block isocyanato group-containing (meth)acrylate include Karenz (registered trademark) MOI-DEM (reaction product of metacloyloxyethyl isocyanate and diethyl malonate, represented by the following formula (2), Showa Denko KK Made by company, dissociation temperature of block isocyanato group: 90° C., dissociation rate: 90% by mass, reaction of Karenz MOI-BP (methacryloyloxyethyl isocyanate and 3,5-dimethylpyrazole represented by the following formula (3): Product, manufactured by Showa Denko KK, dissociation temperature of block isocyanato group: 110° C., dissociation rate: 70 mass %, and Karenz MOI-BM (methacryloyloxyethyl isocyanate and methyl ethyl ketoxime) represented by the following formula (4): And a acrylate corresponding to these, such as the reaction product of the product of Showa Denko KK, dissociation temperature of block isocyanato group: 130° C., dissociation rate: 18% by mass). These block isocyanato group-containing (meth)acrylates may be used alone or in combination of two or more kinds.
共重合体(A)が含有するブロックイソシアナト基を有する構成単位(a)の割合は、特に制限はないが、好ましくは1〜40モル%、より好ましくは2〜30モル%、最も好ましくは3〜25モル%である。ブロックイソシアナト基を有する構成単位(a)の割合が1〜40モル%であると、硬化塗膜の耐溶剤性が改善され、共重合体(A)の保存安定性も保持される。 The proportion of the structural unit (a) having a block isocyanato group contained in the copolymer (A) is not particularly limited, but is preferably 1 to 40 mol%, more preferably 2 to 30 mol%, and most preferably It is 3 to 25 mol %. When the proportion of the structural unit (a) having a block isocyanato group is 1 to 40 mol %, the solvent resistance of the cured coating film is improved and the storage stability of the copolymer (A) is also maintained.
<酸基を有する構成単位(b)>
共重合体(A)が含有する酸基を有する構成単位(b)は、酸基含有モノマー由来の構成単位である(ただし、前記ブロックイソシアナト基を有する構成単位(a)に該当するものは除く)。酸基としては、カルボキシル基、スルホ基、ホスホ基等が挙げられ、これらの中でも、入手しやすさの面からカルボキシル基が好ましい。酸基を有する構成単位(b)を与えるモノマーとしては、重合性不飽和結合と酸基とを有するモノマー、例えば、不飽和カルボン酸又はその無水物、不飽和スルホン酸、不飽和ホスホン酸等が挙げられる。好ましいモノマーの具体例としては、(メタ)アクリル酸、α−ブロモ(メタ)アクリル酸、β−フリル(メタ)アクリル酸、クロトン酸、プロピオール酸、ケイ皮酸、α−シアノケイ皮酸、マレイン酸、無水マレイン酸、マレイン酸モノメチル、マレイン酸モノエチル、マレイン酸モノイソプロピル、フマル酸、イタコン酸、無水イタコン酸、シトラコン酸、無水シトラコン酸等の不飽和カルボン酸又はその無水物;2−アクリルアミド−2−メチルプロパンスルホン酸、tert−ブチルアクリルアミドスルホン酸、p−スチレンスルホン酸などの不飽和スルホン酸;ビニルホスホン酸などの不飽和ホスホン酸;などが挙げられる。これらのモノマーは、単独で用いてもよく、2種以上を組み合わせて用いてもよい。これらの中でも、アルカリ現像性に優れること及び入手の容易性の観点から、不飽和カルボン酸が好ましく、(メタ)アクリル酸がより好ましい。<Structural unit (b) having an acid group>
The structural unit (b) having an acid group contained in the copolymer (A) is a structural unit derived from an acid group-containing monomer (provided that the structural unit (a) having a block isocyanato group is except). Examples of the acid group include a carboxyl group, a sulfo group, a phospho group and the like, and among these, the carboxyl group is preferable from the viewpoint of easy availability. Examples of the monomer that provides the structural unit (b) having an acid group include a monomer having a polymerizable unsaturated bond and an acid group, such as unsaturated carboxylic acid or its anhydride, unsaturated sulfonic acid, and unsaturated phosphonic acid. Can be mentioned. Specific examples of preferable monomers include (meth)acrylic acid, α-bromo(meth)acrylic acid, β-furyl(meth)acrylic acid, crotonic acid, propiolic acid, cinnamic acid, α-cyanocinnamic acid, maleic acid. , Unsaturated carboxylic acids such as maleic anhydride, monomethyl maleate, monoethyl maleate, monoisopropyl maleate, fumaric acid, itaconic acid, itaconic anhydride, citraconic acid, and citraconic anhydride; -Unsaturated sulfonic acids such as -methyl propane sulfonic acid, tert-butyl acrylamide sulfonic acid and p-styrene sulfonic acid; unsaturated phosphonic acids such as vinyl phosphonic acid; These monomers may be used alone or in combination of two or more. Among these, unsaturated carboxylic acids are preferable, and (meth)acrylic acid is more preferable, from the viewpoints of excellent alkali developability and easy availability.
本発明では、酸基を有する構成単位(b)が共重合体(A)に含まれることにより、共重合体(A)を感光性材料として使用する際のアルカリ現像性が大きく改善される。 In the present invention, the constitutional unit (b) having an acid group is contained in the copolymer (A), whereby the alkali developability when the copolymer (A) is used as a photosensitive material is greatly improved.
共重合体(A)が含有する酸基を有する構成単位(b)の割合は、特に制限はないが、好ましくは1〜60モル%、より好ましくは10〜50モル%、最も好ましくは15〜40モル%である。酸基を有する構成単位(b)の割合が1〜60モル%であると、適当なアルカリ現像の速度となり、精緻なパターンの形成が可能となる。 The proportion of the structural unit (b) having an acid group contained in the copolymer (A) is not particularly limited, but is preferably 1 to 60 mol%, more preferably 10 to 50 mol%, and most preferably 15 to It is 40 mol %. When the proportion of the structural unit (b) having an acid group is from 1 to 60 mol %, an appropriate alkali development rate can be obtained and a fine pattern can be formed.
共重合体(A)において、ブロックイソシアナト基を有する構成単位(a)と酸基を有する構成単位(b)とのモル比率は、例えば、1:99〜99:1であることができ、硬化塗膜の耐溶剤性と共重合体(A)の保存安定性の観点から、より好ましくは5:95〜75:25、最も好ましくは10:90〜50:50である。 In the copolymer (A), the molar ratio of the structural unit (a) having a block isocyanato group and the structural unit (b) having an acid group can be, for example, 1:99 to 99:1, From the viewpoint of solvent resistance of the cured coating film and storage stability of the copolymer (A), it is more preferably 5:95 to 75:25, most preferably 10:90 to 50:50.
<その他の構成単位(c)>
本発明においては、共重合体(A)が含有する構成単位として、ブロックイソシアナト基を有する構成単位(a)及び酸基を有する構成単位(b)と共に、これらと共重合可能なその他の構成単位(c)が含有されてもよい(ただし、前記ブロックイソシアナト基を有する構成単位(a)及び前記酸基を有する構成単位(b)に該当するものは除く)。その他の構成単位(c)の具体例としては、エポキシ基を有する構成単位(c−1)、水酸基を有する構成単位(c−2)、(c−1)及び(c−2)以外の構成単位(c−3)などが挙げられる。共重合体(A)が含有するその他の構成単位(c)の割合は、特に制限はないが、好ましくは0〜80モル%、より好ましくは0〜70モル%、最も好ましくは0〜60モル%である。<Other structural units (c)>
In the present invention, the constitutional unit contained in the copolymer (A) is a constitutional unit (a) having a block isocyanato group and a constitutional unit (b) having an acid group, and other constitutions copolymerizable therewith. The unit (c) may be contained (excluding those corresponding to the structural unit (a) having the block isocyanato group and the structural unit (b) having the acid group). Specific examples of the other structural unit (c) include a structural unit (c-1) having an epoxy group, a structural unit (c-2) having a hydroxyl group, and a constitution other than (c-1) and (c-2). A unit (c-3) etc. are mentioned. The proportion of the other structural unit (c) contained in the copolymer (A) is not particularly limited, but is preferably 0 to 80 mol%, more preferably 0 to 70 mol%, and most preferably 0 to 60 mol. %.
エポキシ基を有する構成単位(c−1)を導入するのに用いるモノマーとしては、重合性不飽和結合とエポキシ基とを有するモノマー、例えば、オキシラニル(メタ)アクリレート、グリシジル(メタ)アクリレート、2−メチルグリシジル(メタ)アクリレート、2−エチルグリシジル(メタ)アクリレート、2−オキシラニルエチル(メタ)アクリレート、2−グリシジルオキシエチル(メタ)アクリレート、3−グリシジルオキシプロピル(メタ)アクリレート、グリシジルオキシフェニル(メタ)アクリレート等のエポキシ基を含む(メタ)アクリル酸エステル誘導体;3,4−エポキシシクロヘキシル(メタ)アクリレート、3,4−エポキシシクロヘキシルメチル(メタ)アクリレート、2−(3,4−エポキシシクロヘキシル)エチル(メタ)アクリレート、2−(3,4−エポキシシクロヘキシルメチルオキシ)エチル(メタ)アクリレート、3−(3,4−エポキシシクロヘキシルメチルオキシ)プロピル(メタ)アクリレートなどの3,4−エポキシシクロヘキサン環等のエポキシ基含有脂環式炭素環を含む(メタ)アクリル酸エステル誘導体;エポキシ基を含むビニルエーテル化合物;エポキシ基を含むアリルエーテル化合物等が挙げられる。これらのモノマーは、単独で用いてもよく、2種以上を組み合わせて用いてもよい。これらの中でも、オキシラニル(メタ)アクリレート、グリシジル(メタ)アクリレート、2−メチルグリシジル(メタ)アクリレート、2−エチルグリシジル(メタ)アクリレート、2−オキシラニルエチル(メタ)アクリレート、2−グリシジルオキシエチル(メタ)アクリレート、3−グリシジルオキシプロピル(メタ)アクリレート、グリシジルオキシフェニル(メタ)アクリレート等のエポキシ基含有(メタ)アクリレートが好ましく、グリシジル(メタ)アクリレートがより好ましい。 As a monomer used for introducing the structural unit (c-1) having an epoxy group, a monomer having a polymerizable unsaturated bond and an epoxy group, for example, oxiranyl (meth)acrylate, glycidyl (meth)acrylate, 2- Methylglycidyl (meth)acrylate, 2-ethylglycidyl (meth)acrylate, 2-oxiranylethyl (meth)acrylate, 2-glycidyloxyethyl (meth)acrylate, 3-glycidyloxypropyl (meth)acrylate, glycidyloxyphenyl (Meth)acrylic ester derivative containing an epoxy group such as (meth)acrylate; 3,4-epoxycyclohexyl (meth)acrylate, 3,4-epoxycyclohexylmethyl (meth)acrylate, 2-(3,4-epoxycyclohexyl) ) 3,4-epoxycyclohexane such as ethyl (meth)acrylate, 2-(3,4-epoxycyclohexylmethyloxy)ethyl (meth)acrylate, and 3-(3,4-epoxycyclohexylmethyloxy)propyl (meth)acrylate Examples thereof include (meth)acrylic acid ester derivatives containing an epoxy group-containing alicyclic carbon ring such as a ring; vinyl ether compounds containing an epoxy group; and allyl ether compounds containing an epoxy group. These monomers may be used alone or in combination of two or more. Among these, oxiranyl (meth)acrylate, glycidyl (meth)acrylate, 2-methylglycidyl (meth)acrylate, 2-ethylglycidyl (meth)acrylate, 2-oxiranylethyl (meth)acrylate, 2-glycidyloxyethyl Epoxy group-containing (meth)acrylates such as (meth)acrylate, 3-glycidyloxypropyl (meth)acrylate, and glycidyloxyphenyl (meth)acrylate are preferable, and glycidyl (meth)acrylate is more preferable.
エポキシ基を有する構成単位(c−1)が共重合体(A)に含まれることにより、共重合体(A)を感光性材料として使用する際の耐溶剤性が大きく改善される。 By including the structural unit (c-1) having an epoxy group in the copolymer (A), the solvent resistance when the copolymer (A) is used as a photosensitive material is greatly improved.
エポキシ基を有する構成単位(c−1)を共重合体(A)に導入する場合、エポキシ基を有する構成単位(c−1)の割合は、特に制限はないが、好ましくは0モル%超〜60モル%、より好ましくは0モル%超〜50モル%、最も好ましくは0モル%超〜40モル%である。 When the constitutional unit (c-1) having an epoxy group is introduced into the copolymer (A), the proportion of the constitutional unit (c-1) having an epoxy group is not particularly limited, but preferably more than 0 mol%. -60 mol%, more preferably more than 0 mol% to 50 mol%, most preferably more than 0 mol% to 40 mol%.
水酸基を有する構成単位(c−2)を導入するのに用いるモノマーとしては、重合性不飽和結合と水酸基とを有するモノマー、例えば、2−ヒドロキシエチル(メタ)アクリレート、2−ヒドロキシプロピル(メタ)アクリレート、2−ヒドロキシブチル(メタ)アクリレート、2,3−ジヒドロキシプロピル(メタ)アクリレート、2−ヒドロキシ−3−フェノキシプロピルアクリレート、4−ヒドロキシブチルアクリレート、2−アクリロイルオキシエチルーコハク酸、2−アクリロイルオキシエチルヘキサヒドロフタル酸、2−アクリロイルオキシエチルフタル酸、2−アクリロイルオキシエチル−2−ヒドロキシエチル−フタル酸などが挙げられる。これらのモノマーは、単独で用いてもよく、2種以上を組み合わせて用いてもよい。これらの中でも、2−ヒドロキシエチル(メタ)アクリレート、2−ヒドロキシプロピル(メタ)アクリレート、2−ヒドロキシブチル(メタ)アクリレート、2,3−ジヒドロキシプロピル(メタ)アクリレート、2−ヒドロキシ−3−フェノキシプロピルアクリレート、4−ヒドロキシブチルアクリレート等の水酸基を含む(メタ)アクリル酸エステル誘導体が好ましく、2−ヒドロキシエチル(メタ)アクリレートがより好ましい。 The monomer used for introducing the structural unit (c-2) having a hydroxyl group is a monomer having a polymerizable unsaturated bond and a hydroxyl group, for example, 2-hydroxyethyl (meth)acrylate, 2-hydroxypropyl (meth). Acrylate, 2-hydroxybutyl (meth)acrylate, 2,3-dihydroxypropyl (meth)acrylate, 2-hydroxy-3-phenoxypropyl acrylate, 4-hydroxybutyl acrylate, 2-acryloyloxyethyl-succinic acid, 2-acryloyl Examples thereof include oxyethylhexahydrophthalic acid, 2-acryloyloxyethylphthalic acid and 2-acryloyloxyethyl-2-hydroxyethyl-phthalic acid. These monomers may be used alone or in combination of two or more. Among these, 2-hydroxyethyl (meth)acrylate, 2-hydroxypropyl (meth)acrylate, 2-hydroxybutyl (meth)acrylate, 2,3-dihydroxypropyl (meth)acrylate, 2-hydroxy-3-phenoxypropyl. A (meth)acrylic acid ester derivative containing a hydroxyl group such as acrylate or 4-hydroxybutyl acrylate is preferable, and 2-hydroxyethyl (meth)acrylate is more preferable.
水酸基を有する構成単位(c−2)が共重合体(A)に含まれることにより、共重合体(A)を感光性材料として使用する際の耐溶剤性が大きく改善される。 By including the structural unit (c-2) having a hydroxyl group in the copolymer (A), the solvent resistance when the copolymer (A) is used as a photosensitive material is greatly improved.
水酸基を有する構成単位(c−2)を共重合体(A)に導入する場合、水酸基を有する構成単位(c−2)の割合は、特に制限はないが、好ましくは0モル%超〜50モル%、より好ましくは0モル%超〜40モル%、最も好ましくは0モル%超〜30モル%である。 When the structural unit (c-2) having a hydroxyl group is introduced into the copolymer (A), the ratio of the structural unit (c-2) having a hydroxyl group is not particularly limited, but preferably more than 0 mol% to 50. Mol%, more preferably more than 0 mol% to 40 mol%, most preferably more than 0 mol% to 30 mol%.
上記したエポキシ基を有する構成単位(c−1)及び水酸基を有する構成単位(c−2)以外の構成単位(c−3)を導入するのに用いるモノマーの具体例としては、スチレン、α−メチルスチレン、o−ビニルトルエン、m−ビニルトルエン、p−ビニルトルエン、o−クロロスチレン、m−クロロスチレン、p−クロロスチレン、o−メトキシスチレン、m−メトキシスチレン、p−メトキシスチレン、p−ニトロスチレン、p−シアノスチレン、p−アセチルアミノスチレンなどの芳香族ビニル化合物;ノルボルネン(ビシクロ[2.2.1]ヘプト−2−エン)、5−メチルビシクロ[2.2.1]ヘプト−2−エン、5−エチルビシクロ[2.2.1]ヘプト−2−エン、テトラシクロ[4.4.0.12,5.17,10]ドデカ−3−エン、8−メチルテトラシクロ[4.4.0.12,5.17,10]ドデカ−3−エン、8−エチルテトラシクロ[4.4.0.12,5.17,10]ドデカ−3−エン、ジシクロペンタジエン、トリシクロ[5.2.1.02,6]デカ−8−エン、トリシクロ[5.2.1.02,6]デカ−3−エン、トリシクロ[4.4.0.12,5]ウンデカ−3−エン、トリシクロ[6.2.1.01,8]ウンデカ−9−エン、トリシクロ[6.2.1.01,8]ウンデカ−4−エン、テトラシクロ[4.4.0.12,5.17,10.01,6]ドデカ−3−エン、8−メチルテトラシクロ[4.4.0.12,5.17,10.01,6]ドデカ−3−エン、8−エチリデンテトラシクロ[4.4.0.12,5.17,12]ドデカ−3−エン、8−エチリデンテトラシクロ[4.4.0.12,5.17,10.01,6]ドデカ−3−エン、ペンタシクロ[6.5.1.13,6.02,7.09,13]ペンタデカ−4−エン、ペンタシクロ[7.4.0.12,5.19,12.08,13]ペンタデカ−3−エンなどのノルボルネン構造を有する環状オレフィン;ブタジエン、イソプレン、クロロプレンなどのジエン;メチル(メタ)アクリレート、エチル(メタ)アクリレート、n−プロピル(メタ)アクリレート、イソ−プロピル(メタ)アクリレート、n−ブチル(メタ)アクリルレート、sec−ブチル(メタ)アクリレート、イソ−ブチル(メタ)アクリレート、tert−ブチル(メタ)アクリルレート、ペンチル(メタ)アクリレート、ネオペンチル(メタ)アクリレート、ベンジル(メタ)アクリレート、イソアミル(メタ)アクリレート、ヘキシル(メタ)アクリレート、2−エチルヘキシル(メタ)アクリレート、ラウリル(メタ)アクリレート、ドデシル(メタ)アクリレート、シクロペンチル(メタ)アクリレート、シクロヘキシル(メタ)アクリレート、メチルシクロヘキシル(メタ)アクリレート、エチルシクロヘキシル(メタ)アクリレート、1,4−シクロヘキサンジメタノールモノ(メタ)アクリレート、ロジン(メタ)アクリレート、ノルボルニル(メタ)アクリレート、5−メチルノルボルニル(メタ)アクリレート、5−エチルノルボルニル(メタ)アクリレート、ジシクロペンテニル(メタ)アクリレート、ジシクロペンタニル(メタ)アクリレート、ジシクロペンテニルオキシエチルアクリレ−トイソボルニル(メタ)アクリレート、アダマンチル(メタ)アクリレート、テトラヒドロフルフリル(メタ)アクリレート、1,1,1−トリフルオロエチル(メタ)アクリレート、パーフルオロエチル(メタ)アクリレート、パーフルオロ−n−プロピル(メタ)アクリレート、パーフルオロ−イソプロピル(メタ)アクリレート、3−(N,N−ジメチルアミノ)プロピル(メタ)アクリレート、トリフェニルメチル(メタ)アクリレート、フェニル(メタ)アクリレート、クミル(メタ)アクリレート、4−フェノキシフェニル(メタ)アクリレート、フェノキシエチル(メタ)アクリレート、フェノキシポリエチレングリコール(メタ)アクリレート、ノニルフェノキシポリエチレングリコールモノ(メタ)アクリレート、ビフェニルオキシエチル(メタ)アクリレート、ナフタレン(メタ)アクリレート、アントラセン(メタ)アクリレートなどの(メタ)アクリル酸エステル;(メタ)アクリル酸アミド、(メタ)アクリル酸N,N−ジメチルアミド、(メタ)アクリル酸N,N−ジエチルアミド、(メタ)アクリル酸N,N−ジプロピルアミド、(メタ)アクリル酸N,N−ジ−イソプロピルアミド、(メタ)アクリル酸アントラセニルアミドなどの(メタ)アクリル酸アミド;(メタ)アクリル酸アニリド、(メタ)アクリロニトリル、アクロレイン、塩化ビニル、塩化ビニリデン、フッ化ビニル、フッ化ビニリデン、N−ビニルピロリドン、ビニルピリジン、酢酸ビニル、ビニルトルエンなどのビニル化合物;シトラコン酸ジエチル、マレイン酸ジエチル、フマル酸ジエチル、イタコン酸ジエチルなどの不飽和ジカルボン酸ジエステル;N−フェニルマレイミド、N−シクロヘキシルマレイミド、N−ラウリルマレイミド、N−(4−ヒドロキシフェニル)マレイミドなどのモノマレイミド;などが挙げられる。これらの中でも、(メタ)アクリル酸エステルが好ましく、メチル(メタ)アクリレート及びジシクロペンタニル(メタ)アクリレートが特に好ましい。これらのモノマーは、単独で用いてもよく、2種以上を組み合わせて用いてもよい。Specific examples of the monomer used to introduce the structural unit (c-3) other than the structural unit (c-1) having an epoxy group and the structural unit (c-2) having a hydroxyl group are styrene and α- Methylstyrene, o-vinyltoluene, m-vinyltoluene, p-vinyltoluene, o-chlorostyrene, m-chlorostyrene, p-chlorostyrene, o-methoxystyrene, m-methoxystyrene, p-methoxystyrene, p- Aromatic vinyl compounds such as nitrostyrene, p-cyanostyrene, p-acetylaminostyrene; norbornene (bicyclo[2.2.1]hept-2-ene), 5-methylbicyclo[2.2.1]hept- 2-ene, 5-ethylbicyclo[2.2.1]hept-2-ene, tetracyclo[4.4.0.1 2,5 . 1 7,10 ]dodeca-3-ene, 8-methyltetracyclo[4.4.0.1 2,5 . 1 7,10 ]dodec-3-ene, 8-ethyltetracyclo[4.4.0.1 2,5 . 1 7,10 ]dodeca-3-ene, dicyclopentadiene, tricyclo[5.2.1.0 2,6 ]deca-8-ene, tricyclo[5.2.1.0 2,6 ]deca-3 -Ene, tricyclo[4.4.0.1 2,5 ]undec-3-ene, tricyclo[6.2.1.0 1,8 ]undec-9-ene, tricyclo[6.2.1.0] 1,8 ]undec-4-ene, tetracyclo[4.4.0.1 2,5 . 1 7,10 . 0 1,6 ]dodec-3-ene, 8-methyltetracyclo[4.4.0.1 2,5 . 1 7,10 . 0 1,6 ]dodeca-3-ene, 8-ethylidene tetracyclo[4.4.0.1 2,5 . 1 7,12 ] Dodeca-3-ene, 8-ethylidenetetracyclo[4.4.0.1 2,5 . 1 7,10 . 0 1,6 ]dodec-3-ene, pentacyclo[6.5.1.1 3,6 . 0 2,7 . 0 9,13] pentadeca-4-ene, pentacyclo [7.4.0.1 2,5. 1 9,12 . 0 8,13] pentadeca-3-ring having a norbornene structure such as ene-olefin; butadiene, isoprene, dienes such as chloroprene; methyl (meth) acrylate, ethyl (meth) acrylate, n- propyl (meth) acrylate, iso - Propyl (meth)acrylate, n-butyl (meth)acrylate, sec-butyl (meth)acrylate, iso-butyl (meth)acrylate, tert-butyl (meth)acrylate, pentyl (meth)acrylate, neopentyl (meth) Acrylate, benzyl (meth)acrylate, isoamyl (meth)acrylate, hexyl (meth)acrylate, 2-ethylhexyl (meth)acrylate, lauryl (meth)acrylate, dodecyl (meth)acrylate, cyclopentyl (meth)acrylate, cyclohexyl (meth) Acrylate, methylcyclohexyl (meth)acrylate, ethylcyclohexyl (meth)acrylate, 1,4-cyclohexanedimethanol mono(meth)acrylate, rosin (meth)acrylate, norbornyl (meth)acrylate, 5-methylnorbornyl (meth) Acrylate, 5-ethylnorbornyl (meth)acrylate, dicyclopentenyl (meth)acrylate, dicyclopentanyl (meth)acrylate, dicyclopentenyloxyethyl acrylate isobornyl (meth)acrylate, adamantyl (meth)acrylate, Tetrahydrofurfuryl (meth)acrylate, 1,1,1-trifluoroethyl (meth)acrylate, perfluoroethyl (meth)acrylate, perfluoro-n-propyl (meth)acrylate, perfluoro-isopropyl (meth)acrylate, 3-(N,N-dimethylamino)propyl (meth)acrylate, triphenylmethyl (meth)acrylate, phenyl (meth)acrylate, cumyl (meth)acrylate, 4-phenoxyphenyl (meth)acrylate, phenoxyethyl (meth) (Meth)acrylic acid ester such as acrylate, phenoxy polyethylene glycol (meth)acrylate, nonylphenoxy polyethylene glycol mono(meth)acrylate, biphenyloxyethyl (meth)acrylate, naphthalene (meth)acrylate, anthracene (meth)acrylate; ) Acrylic amide, (meth)acrylic acid N,N-di Methylamide, (meth)acrylic acid N,N-diethylamide, (meth)acrylic acid N,N-dipropylamide, (meth)acrylic acid N,N-di-isopropylamide, (meth)acrylic acid anthracenylamide, etc. (Meth)acrylic acid amide; (meth)acrylic acid anilide, (meth)acrylonitrile, acrolein, vinyl chloride, vinylidene chloride, vinyl fluoride, vinylidene fluoride, N-vinylpyrrolidone, vinylpyridine, vinyl acetate, vinyltoluene, etc. Unsaturated dicarboxylic acid diesters such as diethyl citraconic acid, diethyl maleic acid, diethyl fumarate, and itaconic acid diethyl; N-phenylmaleimide, N-cyclohexylmaleimide, N-laurylmaleimide, N-(4-hydroxyphenyl) Monomaleimides such as maleimide; and the like. Among these, (meth)acrylic acid ester is preferable, and methyl (meth)acrylate and dicyclopentanyl (meth)acrylate are particularly preferable. These monomers may be used alone or in combination of two or more.
<共重合体(A)の製造方法>
共重合体(A)の製造に際して使用されるブロックイソシアナト基含有モノマー(a0)及び酸基含有モノマー(b0)の割合は、特に制限はないが、好ましくは、(a0)1〜40モル%及び(b0)1〜60モル%、より好ましくは、(a0)2〜30モル%及び(b0)10〜50モル%、最も好ましくは、(a0)3〜25モル%及び(b0)15〜40モル%である。共重合体(A)がその他の構成単位(c)をさらに含有する場合、共重合体(A)の製造に際して使用されるブロックイソシアナト基含有モノマー(a0)、酸基含有モノマー(b0)及びその他のモノマー(c0)の割合は、好ましくは、(a0)1〜40モル%、(b0)1〜60モル%及び(c0)0モル%超〜80モル%、より好ましくは、(a0)2〜30モル%、(b0)10〜50モル%及び(c0)0モル%超〜70モル%、最も好ましくは、(a0)3〜25モル%、(b0)15〜40モル%及び(c0)0モル%超〜60モル%である。<Method for producing copolymer (A)>
The ratio of the block isocyanato group-containing monomer (a0) and the acid group-containing monomer (b0) used in the production of the copolymer (A) is not particularly limited, but preferably (a0) 1 to 40 mol%. And (b0) 1 to 60 mol%, more preferably (a0) 2 to 30 mol% and (b0) 10 to 50 mol%, and most preferably (a0) 3 to 25 mol% and (b0) 15 to. It is 40 mol %. When the copolymer (A) further contains another structural unit (c), the block isocyanato group-containing monomer (a0), the acid group-containing monomer (b0), and the acid group-containing monomer used in the production of the copolymer (A). The proportion of the other monomer (c0) is preferably (a0) 1 to 40 mol%, (b0) 1 to 60 mol% and (c0) more than 0 mol% to 80 mol%, more preferably (a0). 2 to 30 mol%, (b0) 10 to 50 mol% and (c0) more than 0 mol% to 70 mol%, most preferably (a0) 3 to 25 mol%, (b0) 15 to 40 mol% and ( c0) It is more than 0 mol% to 60 mol %.
ブロックイソシアナト基含有モノマー(a0)、酸基含有モノマー(b0)及びその他のモノマー(c0)の共重合反応は、当該技術分野において公知のラジカル重合方法に従って重合溶剤の存在下又は不存在下で行うことができるが、異常な重合を防止し、重合反応を安定して行うことができるというという観点から、後述する水酸基含有有機溶剤(B)の存在下で行うことが好ましい。水酸基含有有機溶剤(B)の存在下で共重合反応を行うことで、ブロックイソシアナト基が解離してイソシアナト基が生じたとしてもイソシアナト基と水酸基含有有機溶剤(B)の水酸基とが反応して異常な重合が防止される。こうして得られる共重合体(A)では、イソシアナト基をブロックしていたブロック剤の一部が水酸基含有有機溶剤(B)で置換されていると考えられる。例えば、これらのモノマーを水酸基含有有機溶剤(B)に溶解した後、その溶液に重合開始剤を添加し、50〜100℃で1〜20時間にわたり重合反応を行えばよい。この際、ブロックイソシアナト基含有モノマー(a0)のブロックイソシアナト基が解離する温度で重合反応を行うと、ブロックイソシアナト基が解離して生じるイソシアナト基が酸基と反応してゲルが生じるので、ブロックイソシアナト基の解離温度を下回る温度、好ましくは、ブロックイソシアナト基の解離温度を20〜50℃程度下回る温度で重合を行うことが好ましい。 The copolymerization reaction of the block isocyanato group-containing monomer (a0), the acid group-containing monomer (b0) and the other monomer (c0) can be carried out in the presence or absence of a polymerization solvent according to a radical polymerization method known in the art. Although it can be carried out, it is preferably carried out in the presence of a hydroxyl group-containing organic solvent (B) described later, from the viewpoint that abnormal polymerization can be prevented and the polymerization reaction can be carried out stably. By carrying out the copolymerization reaction in the presence of the hydroxyl group-containing organic solvent (B), the isocyanato group reacts with the hydroxyl group of the hydroxyl group-containing organic solvent (B) even if the block isocyanato group is dissociated to form an isocyanato group. Abnormal polymerization is prevented. In the copolymer (A) thus obtained, it is considered that a part of the blocking agent that blocked the isocyanato group was replaced with the hydroxyl group-containing organic solvent (B). For example, these monomers may be dissolved in the hydroxyl group-containing organic solvent (B), a polymerization initiator may be added to the solution, and the polymerization reaction may be performed at 50 to 100° C. for 1 to 20 hours. At this time, when the polymerization reaction is performed at a temperature at which the block isocyanato group of the block isocyanato group-containing monomer (a0) dissociates, the isocyanato group generated by the dissociation of the block isocyanato group reacts with the acid group to form a gel. It is preferable to carry out the polymerization at a temperature lower than the dissociation temperature of the block isocyanato group, preferably about 20 to 50° C. lower than the dissociation temperature of the block isocyanato group.
また、この共重合反応に用いることが可能な重合開始剤としては、特に限定されないが、例えば、アゾビスイソブチロニトリル、アゾビスイソバレロニトリル、過酸化ベンゾイル、t−ブチルパーオキシ−2−エチルヘキサノエートなどが挙げられる。これらの重合開始剤は、単独で用いてもよく、2種以上を組み合わせて用いてもよい。重合開始剤の使用量は、モノマーの全仕込み量を100質量部とした場合に、一般に0.5〜20質量部、好ましくは1.0〜10質量部である。 The polymerization initiator that can be used in this copolymerization reaction is not particularly limited, but for example, azobisisobutyronitrile, azobisisovaleronitrile, benzoyl peroxide, t-butylperoxy-2- Examples include ethyl hexanoate. These polymerization initiators may be used alone or in combination of two or more kinds. The amount of the polymerization initiator used is generally 0.5 to 20 parts by mass, preferably 1.0 to 10 parts by mass, when the total amount of the monomers charged is 100 parts by mass.
共重合体(A)のポリスチレン換算の重量平均分子量は、特に制限されないが、上記した製造方法により、好ましくは1,000〜50,000、より好ましくは3,000〜40,000の重量平均分子量を有する共重合体(A)を得ることができる。共重合体(A)の重量平均分子量が1,000以上であると、感光性樹脂組成物として用いる際のアルカリ現像後に着色パターンの欠けが発生し難くなる。一方、共重合体(A)の重量平均分子量が50,000以下であると、現像時間が適切になり、実用性が確保される。 The polystyrene-equivalent weight average molecular weight of the copolymer (A) is not particularly limited, but is preferably 1,000 to 50,000, more preferably 3,000 to 40,000 by the production method described above. It is possible to obtain a copolymer (A) having When the weight average molecular weight of the copolymer (A) is 1,000 or more, the colored pattern is less likely to be chipped after alkali development when used as a photosensitive resin composition. On the other hand, when the weight average molecular weight of the copolymer (A) is 50,000 or less, the developing time becomes appropriate and the practicality is secured.
また、共重合体(A)の酸価(JIS K6901 5.3)は、適宜選択できるが、感光性樹脂組成物に配合する場合には、好ましくは20〜300KOHmg/g、より好ましくは30〜200KOHmg/gの範囲である。共重合体(A)の酸価が20KOHmg/g以上であると、感光性樹脂組成物として用いる際のアルカリ現像性が良好となる。一方、共重合体(A)の酸価が300KOHmg/g以下であると、アルカリ現像液に対して露光部分(光硬化部分)が溶解し難いため、パターン形状が良好となる。 Further, the acid value (JIS K6901 5.3) of the copolymer (A) can be appropriately selected, but when blended in the photosensitive resin composition, it is preferably 20 to 300 KOHmg/g, more preferably 30 to 300 KOHmg/g. It is in the range of 200 KOHmg/g. When the acid value of the copolymer (A) is 20 KOHmg/g or more, the alkali developability when used as a photosensitive resin composition becomes good. On the other hand, when the acid value of the copolymer (A) is 300 KOHmg/g or less, the exposed portion (photocured portion) is difficult to dissolve in the alkali developing solution, and the pattern shape becomes good.
本発明において、共重合体(A)は、分子中にブロックイソシアナト基を含んでいる。ブロックイソシアナト基の含有量は、適宜選択すればよいが、通常、ブロックイソシアナト基当量が400〜6,000、好ましくは1,000〜5,000となるような範囲で選択される。ブロックイソシアナト基当量は、重合体に含まれるブロックイソシアナト基1モル当たりの重合体の質量であり、重合体の質量を重合体に含まれるブロックイソシアナト基のモル数で除することにより求めることが可能である(g/mol)。本発明において、ブロックイソシアナト基当量は、ブロックイソシアナト基含有モノマーの仕込み量から計算した理論値である。 In the present invention, the copolymer (A) contains a block isocyanato group in the molecule. The content of the block isocyanato group may be appropriately selected, but it is usually selected in the range such that the block isocyanato group equivalent is 400 to 6,000, preferably 1,000 to 5,000. The block isocyanato group equivalent is the mass of the polymer per 1 mol of the block isocyanato group contained in the polymer, and is determined by dividing the mass of the polymer by the number of moles of the block isocyanato group contained in the polymer. It is possible (g/mol). In the present invention, the block isocyanato group equivalent is a theoretical value calculated from the charged amount of the block isocyanato group-containing monomer.
<水酸基含有有機溶剤(B)>
水酸基含有有機溶剤(B)は、水酸基を含有する有機溶剤であればよく、例えば、エチレングリコールモノアルキルエーテル、ジエチレングリコールモノアルキルエーテル、プロピレングリコールモノアルキルエーテル、プロピレングリコールモノアリールエーテル、ジプロピレングリコールモノアルキルエーテル、トリプロピレングリコールモノアルキルエーテル、3−メトキシ−1−ブタノール、1,3−プロパンジオールモノアルキルエーテル、1,3−ブタンジオールモノアルキルエーテル、1,4−ブタンジオールモノアルキルエーテル、グリセリンモノアルキルエーテル、グリセリンジアルキルエーテル、メタノール、エタノール、プロパノール、C5-6シクロアルカンジオール、C5-6シクロアルカンジメタノール、乳酸エチル及びジアセトンアルコールなどが挙げられる。これらの中でも、硬化塗膜作製時の製膜性及び入手の容易性の観点から、乳酸エチル、ジアセトンアルコール、3−メトキシ−1−ブタノール及びプロピレングリコールモノメチルエーテルが好ましく、プロピレングリコールモノメチルエーテルが特に好ましい。これらの水酸基含有有機溶剤(B)は、単独で用いてもよく、2種以上を組み合わせて用いてもよい。<Hydroxyl group-containing organic solvent (B)>
The hydroxyl group-containing organic solvent (B) may be any organic solvent containing a hydroxyl group, and examples thereof include ethylene glycol monoalkyl ether, diethylene glycol monoalkyl ether, propylene glycol monoalkyl ether, propylene glycol monoaryl ether, and dipropylene glycol monoalkyl ether. Ether, tripropylene glycol monoalkyl ether, 3-methoxy-1-butanol, 1,3-propanediol monoalkyl ether, 1,3-butanediol monoalkyl ether, 1,4-butanediol monoalkyl ether, glycerin monoalkyl Examples thereof include ether, glycerin dialkyl ether, methanol, ethanol, propanol, C 5-6 cycloalkane diol, C 5-6 cycloalkane dimethanol, ethyl lactate and diacetone alcohol. Among these, ethyl lactate, diacetone alcohol, 3-methoxy-1-butanol and propylene glycol monomethyl ether are preferable, and propylene glycol monomethyl ether is particularly preferable, from the viewpoint of film formability during production of a cured coating film and easy availability. preferable. These hydroxyl group-containing organic solvents (B) may be used alone or in combination of two or more.
本発明では、ブロックイソシアナト基を有する構成単位(a)及び酸基を有する構成単位(b)を含有する共重合体(A)と水酸基含有有機溶剤(B)とを併用することで、感光性樹脂組成物の保存安定性が改善される。 In the present invention, by using the copolymer (A) containing the structural unit (a) having a block isocyanato group and the structural unit (b) having an acid group in combination with the hydroxyl group-containing organic solvent (B), The storage stability of the resin composition is improved.
また、本発明の感光性樹脂組成物では、水酸基含有有機溶剤(B)以外の溶剤を併用してもよい。 Further, in the photosensitive resin composition of the present invention, a solvent other than the hydroxyl group-containing organic solvent (B) may be used in combination.
<反応性希釈剤(C)>
反応性希釈剤(C)は、分子内に重合性官能基として少なくとも一つの重合可能なエチレン性不飽和基を有する化合物であり、中でも重合性官能基を複数有する化合物が好ましい。このような反応性希釈剤(C)を共重合体(A)と併用することにより、粘度を調整したり、形成される硬化物の強度や、基材に対する密着性を向上させることができる。<Reactive diluent (C)>
The reactive diluent (C) is a compound having at least one polymerizable ethylenically unsaturated group as a polymerizable functional group in the molecule, and among them, a compound having a plurality of polymerizable functional groups is preferable. By using such a reactive diluent (C) in combination with the copolymer (A), the viscosity can be adjusted, and the strength of the cured product to be formed and the adhesion to the substrate can be improved.
反応性希釈剤(C)として用いられる単官能モノマーとしては、(メタ)アクリルアミド、メチロール(メタ)アクリルアミド、メトキシメチル(メタ)アクリルアミド、エトキシメチル(メタ)アクリルアミド、プロポキシメチル(メタ)アクリルアミド、ブトキシメトキシメチル(メタ)アクリルアミド、メチル(メタ)アクリレート、エチル(メタ)アクリレート、ブチル(メタ)アクリレート、2−エチルへキシル(メタ)アクリレート、2−ヒドロキシエチル(メタ)アクリレート、2−ヒドロキシプロピル(メタ)アクリレート、4−ヒドロキシブチル(メタ)アクリレート、2−フェノキシ−2−ヒドロキシプロピル(メタ)アクリレート、2−(メタ)アクリロイルオキシ−2−ヒドロキシプロピルフタレート、グリセリンモノ(メタ)アクリレート、テトラヒドロフルフリル(メタ)アクリレート、グリシジル(メタ)アクリレート、2,2,2−トリフルオロエチル(メタ)アクリレート、2,2,3,3−テトラフルオロプロピル(メタ)アクリレート、フタル酸誘導体のハーフ(メタ)アクリレートなどの(メタ)アクリレート類;スチレン、α−メチルスチレン、α−クロロメチルスチレン、ビニルトルエンなどの芳香族ビニル化合物類;酢酸ビニル、プロピオン酸ビニルなどのカルボン酸エステル類などが挙げられる。また、これらのモノマーは、単独で用いてもよく、2種以上を組み合わせて用いてもよい。 Examples of the monofunctional monomer used as the reactive diluent (C) include (meth)acrylamide, methylol (meth)acrylamide, methoxymethyl (meth)acrylamide, ethoxymethyl (meth)acrylamide, propoxymethyl (meth)acrylamide, butoxymethoxy. Methyl (meth)acrylamide, methyl (meth)acrylate, ethyl (meth)acrylate, butyl (meth)acrylate, 2-ethylhexyl (meth)acrylate, 2-hydroxyethyl (meth)acrylate, 2-hydroxypropyl (meth) Acrylate, 4-hydroxybutyl (meth)acrylate, 2-phenoxy-2-hydroxypropyl (meth)acrylate, 2-(meth)acryloyloxy-2-hydroxypropyl phthalate, glycerin mono(meth)acrylate, tetrahydrofurfuryl (meth ) Acrylate, glycidyl (meth)acrylate, 2,2,2-trifluoroethyl (meth)acrylate, 2,2,3,3-tetrafluoropropyl (meth)acrylate, phthalic acid derivative half (meth)acrylate, etc. (Meth)acrylates; aromatic vinyl compounds such as styrene, α-methylstyrene, α-chloromethylstyrene and vinyltoluene; carboxylic acid esters such as vinyl acetate and vinyl propionate. Further, these monomers may be used alone or in combination of two or more kinds.
反応性希釈剤(C)として用いられる多官能モノマーとしては、エチレングリコールジ(メタ)アクリレート、ジエチレングリコールジ(メタ)アクリレート、テトラエチレングリコールジ(メタ)アクリレート、プロピレングリコールジ(メタ)アクリレート、ポリプロピレングリコールジ(メタ)アクリレート、ブチレングリコールジ(メタ)アクリレート、ネオペンチルグリコールジ(メタ)アクリレート、1,6−へキサングリコールジ(メタ)アクリレート、トリメチロールプロパントリ(メタ)アクリレート、グリセリンジ(メタ)アクリレート、ペンタエリスリトールジ(メタ)アクリレート、ペンタエリスリトールトリ(メタ)アクリレート、ジペンタエリスリトールペンタ(メタ)アクリレート、ジペンタエリスリトールヘキサ(メタ)アクリレート、2,2−ビス(4−(メタ)アクリロキシジエトキシフェニル)プロパン、2,2−ビス(4−(メタ)アクリロキシポリエトキシフェニル)プロパン、2−ヒドロキシ−3−(メタ)アクリロイルオキシプロピル(メタ)アクリレート、エチレングリコールジグリシジルエーテルジ(メタ)アクリレート、ジエチレングリコールジグリシジルエーテルジ(メタ)アクリレート、フタル酸ジグリシジルエステルジ(メタ)アクリレート、グリセリントリアクリレート、グリセリンポリグリシジルエーテルポリ(メタ)アクリレート、ウレタン(メタ)アクリレート(すなわち、トリレンジイソシアネート)、トリメチルヘキサメチレンジイソシアネートとヘキサメチレンジイソシアネート等と2−ビドロキシエチル(メタ)アクリレートとの反応物、トリス(ヒドロキシエチル)イソシアヌレートのトリ(メタ)アクリレートなどの(メタ)アクリレート類;ジビニルベンゼン、ジアリルフタレート、ジアリルベンゼンホスホネートなどの芳香族ビニル化合物類;アジピン酸ジビニルなどのジカルボン酸エステル類;トリアリルシアヌレート、メチレンビス(メタ)アクリルアミド、(メタ)アクリルアミドメチレンエーテル、多価アルコールとN−メチロール(メタ)アクリルアミドとの縮合物などが挙げられる。これらのモノマーは、単独で用いてもよく、2種以上を組み合わせて用いてもよい。 Examples of the polyfunctional monomer used as the reactive diluent (C) include ethylene glycol di(meth)acrylate, diethylene glycol di(meth)acrylate, tetraethylene glycol di(meth)acrylate, propylene glycol di(meth)acrylate, polypropylene glycol. Di(meth)acrylate, butylene glycol di(meth)acrylate, neopentyl glycol di(meth)acrylate, 1,6-hexane glycol di(meth)acrylate, trimethylolpropane tri(meth)acrylate, glycerin di(meth) Acrylate, pentaerythritol di(meth)acrylate, pentaerythritol tri(meth)acrylate, dipentaerythritol penta(meth)acrylate, dipentaerythritol hexa(meth)acrylate, 2,2-bis(4-(meth)acryloxydi Ethoxyphenyl)propane, 2,2-bis(4-(meth)acryloxypolyethoxyphenyl)propane, 2-hydroxy-3-(meth)acryloyloxypropyl(meth)acrylate, ethylene glycol diglycidyl ether di(meth) Acrylate, diethylene glycol diglycidyl ether di(meth)acrylate, phthalic acid diglycidyl ester di(meth)acrylate, glycerin triacrylate, glycerin polyglycidyl ether poly(meth)acrylate, urethane (meth)acrylate (that is, tolylene diisocyanate), Reaction products of trimethylhexamethylene diisocyanate, hexamethylene diisocyanate and the like with 2-vidroxyethyl (meth)acrylate, (meth)acrylates such as tri(meth)acrylate of tris(hydroxyethyl)isocyanurate; divinylbenzene, diallyl phthalate, diallyl Aromatic vinyl compounds such as benzenephosphonate; Dicarboxylic acid esters such as divinyl adipate; Triallyl cyanurate, methylenebis(meth)acrylamide, (meth)acrylamide methylene ether, polyhydric alcohol and N-methylol(meth)acrylamide And the like. These monomers may be used alone or in combination of two or more.
<光重合開始剤(D)>
光重合開始剤(D)としては、特に限定されないが、例えば、ベンゾイン、ベンゾインメチルエーテル、ベンゾインエチルエーテル、ベンゾインブチルエーテルなどのベンゾイン類;アセトフェノン、2,2−ジメトキシ−2−フェニルアセトフェノン、1,1−ジクロロアセトフェノン、4−(1−t−ブチルジオキシ−1−メチルエチル)アセトフェノン、2−メチル−1−[4−(メチルチオ)フェニル]−2−モルホリノ−プロパン−1−オン、2−ベンジル−2−ジメチルアミノ−1−(4−モルホリノフェニル)ブタノン−1などのアセトフェノン類;2−メチルアントラキノン、2−アミルアントラキノン、2−t−ブチルアントラキノン、1−クロロアントラキノンなどのアントラキノン類;キサントン、チオキサントン、2,4−ジメチルチオキサントン、2,4−ジイソプロピルチオキサントン、2−クロロチオキサントンなどのチオキサントン類;アセトフェノンジメチルケタール、ベンジルジメチルケタールなどのケタール類;ベンゾフェノン、4−(1−t−ブチルジオキシ−1−メチルエチル)ベンゾフェノン、3,3’,4,4’−テトラキス(t−ブチルジオキシカルボニル)ベンゾフェノンなどのベンゾフェノン類;アシルホスフィンオキサイド類;などが挙げられる。これらの光重合開始剤(D)は、単独で用いてもよく、2種以上を組み合わせて用いてもよい。<Photopolymerization initiator (D)>
The photopolymerization initiator (D) is not particularly limited, but for example, benzoins such as benzoin, benzoin methyl ether, benzoin ethyl ether, benzoin butyl ether; acetophenone, 2,2-dimethoxy-2-phenylacetophenone, 1,1 -Dichloroacetophenone, 4-(1-t-butyldioxy-1-methylethyl)acetophenone, 2-methyl-1-[4-(methylthio)phenyl]-2-morpholino-propan-1-one, 2-benzyl-2 -Acetophenones such as dimethylamino-1-(4-morpholinophenyl)butanone-1; anthraquinones such as 2-methylanthraquinone, 2-amylanthraquinone, 2-t-butylanthraquinone and 1-chloroanthraquinone; xanthone, thioxanthone, Thioxanthones such as 2,4-dimethylthioxanthone, 2,4-diisopropylthioxanthone, and 2-chlorothioxanthone; ketals such as acetophenone dimethyl ketal and benzyl dimethyl ketal; benzophenone, 4-(1-t-butyldioxy-1-methylethyl) ) Benzophenones such as benzophenone and 3,3′,4,4′-tetrakis(t-butyldioxycarbonyl)benzophenone; acylphosphine oxides; and the like. These photopolymerization initiators (D) may be used alone or in combination of two or more.
本発明の感光性樹脂組成物は、上記の成分に加えて、所定の特性を付与するために、公知のカップリング剤、レベリング剤、熱重合禁止剤などの公知の添加剤を配合してもよい。これらの添加剤の配合量は、本発明の効果を阻害しない範囲であれば特に限定されない。 In addition to the above components, the photosensitive resin composition of the present invention may contain known additives such as known coupling agents, leveling agents, and thermal polymerization inhibitors in order to impart predetermined properties. Good. The blending amount of these additives is not particularly limited as long as the effects of the present invention are not impaired.
<カラーフィルター用感光性樹脂組成物>
また、本発明の感光性樹脂組成物には、着色剤(E)をさらに含有させて、カラーフィルター用感光性樹脂組成物とすることができる。<Photosensitive resin composition for color filter>
Further, the photosensitive resin composition of the present invention can further contain a colorant (E) to give a photosensitive resin composition for a color filter.
着色剤(E)は、水酸基含有有機溶剤(B)に溶解又は分散するものであれば特に限定されず、例えば、染料や顔料などが挙げられる。染料としては、水酸基含有有機溶剤(B)やアルカリ現像液に対する溶解性、感光性樹脂組成物中の他の成分との相互作用、耐熱性などの観点から、カルボン酸やスルホン酸などの酸性基を有する酸性染料、酸性染料の窒素化合物との塩、酸性染料のスルホンアミド体などを用いることが好ましい。 The colorant (E) is not particularly limited as long as it can be dissolved or dispersed in the hydroxyl group-containing organic solvent (B), and examples thereof include dyes and pigments. As the dye, from the viewpoint of solubility in a hydroxyl group-containing organic solvent (B) or an alkaline developer, interaction with other components in the photosensitive resin composition, heat resistance, etc., an acidic group such as carboxylic acid or sulfonic acid is used. It is preferable to use an acidic dye having a salt, a salt of the acidic dye with a nitrogen compound, a sulfonamide body of the acidic dye, or the like.
このような染料の例としては、acid alizarin violet N;acid black1、2、24、48;acid blue1、7、9、25、29、40、45、62、70、74、80、83、90、92、112、113、120、129、147;acid chrome violet K;acid Fuchsin;acid green1、3、5、25、27、50;acid orange6、7、8、10、12、50、51、52、56、63、74、95;acid red1、4、8、14、17、18、26、27、29、31、34、35、37、42、44、50、51、52、57、69、73、80、87、88、91、92、94、97、103、111、114、129、133、134、138、143、145、150、151、158、176、183、198、211、215、216、217、249、252、257、260、266、274;acid violet 6B、7、9、17、19;acid yellow1、3、9、11、17、23、25、29、34、36、42、54、72、73、76、79、98、99、111、112、114、116; food yellow3及びこれらの誘導体などが挙げられる。これらの中でも、アゾ系、キサンテン系、アンスラキノン系もしくはフタロシアニン系の酸性染料が好ましい。これらの染料は、目的とする画素の色に応じて、単独で用いてもよく、2種以上を組み合わせて用いてもよい。 Examples of such dyes include acid alizarin violet N; acid black 1, 2, 24, 48; acid blue 1, 7, 9, 25, 29, 40, 45, 62, 70, 74, 80, 83, 90, 92, 112, 113, 120, 129, 147; acid chrome violet K; acid Fuchsin; acid green 1, 3, 5, 25, 27, 50; acid orange 6, 7, 8, 10, 12, 50, 51, 52, 56, 63, 74, 95; acid red 1, 4, 8, 14, 17, 18, 26, 27, 29, 31, 34, 35, 37, 42, 44, 50, 51, 52, 57, 69, 73. , 80, 87, 88, 91, 92, 94, 97, 103, 111, 114, 129, 133, 134, 138, 143, 145, 150, 151, 158, 176, 183, 198, 211, 215, 216. , 217, 249, 252, 257, 260, 266, 274; acid violet 6B, 7, 9, 17, 19; acid yellow 1, 3, 9, 11, 17, 23, 25, 29, 34, 36, 42, 54, 72, 73, 76, 79, 98, 99, 111, 112, 114, 116; food yellow 3 and derivatives thereof. Among these, azo, xanthene, anthraquinone or phthalocyanine acid dyes are preferable. These dyes may be used alone or in combination of two or more, depending on the intended color of the pixel.
顔料の例としては、C.I.ピグメントイエロー1、3、12、13、14、15、16、17、20、24、31、53、83、86、93、94、109、110、117、125、128、137、138、139、147、148、150、153、154、166、173、194、214などの黄色顔料;C.I.ピグメントオレンジ13、31、36、38、40、42、43、51、55、59、61、64、65、71、73などの橙色顔料;C.I.ピグメントレッド9、97、105、122、123、144、149、166、168、176、177、180、192、209、215、216、224、242、254、255、264、265などの赤色顔料;C.I.ピグメントブルー15、15:3、15:4、15:6、60などの青色顔料;C.I.ピグメントバイオレット1、19、23、29、32、36、38などのバイオレット色顔料;C.I.ピグメントグリーン7、36、58、59などの緑色顔料;C.I.ピグメントブラウン23、25などの茶色顔料;C.I.ピグメントブラック1、7、カーボンブラック、チタンブラック、酸化鉄などの黒色顔料などが挙げられる。 Examples of pigments include C.I. I. Pigment Yellow 1, 3, 12, 13, 14, 15, 16, 17, 20, 24, 31, 53, 83, 86, 93, 94, 109, 110, 117, 125, 128, 137, 138, 139, Yellow pigments such as 147, 148, 150, 153, 154, 166, 173, 194, 214; C.I. I. Pigment Orange 13, 31, 36, 38, 40, 42, 43, 51, 55, 59, 61, 64, 65, 71, 73 and the like; I. Pigment Red 9, 97, 105, 122, 123, 144, 149, 166, 168, 176, 177, 180, 192, 209, 215, 216, 224, 242, 254, 255, 264, 265 and the like; C. I. Pigment Blue 15, 15:3, 15:4, 15:6, 60 and other blue pigments; C.I. I. Pigment Violet 1, 19, 23, 29, 32, 36, 38 and other violet color pigments; C.I. I. Pigment Green 7, 36, 58, 59 and other green pigments; C.I. I. Pigment Brown 23, 25 and other brown pigments; C.I. I. Pigment Black 1 and 7, black pigments such as carbon black, titanium black and iron oxide.
これらの着色剤(E)は、目的とする画素の色に応じて、単独で用いてもよく、2種以上を組み合わせて用いてもよい。なお、目的とする画素の色に応じて、上記の染料及び顔料を組み合わせて用いることもできる。 These colorants (E) may be used alone or in combination of two or more, depending on the intended color of the pixel. The above dyes and pigments may be used in combination depending on the intended color of the pixel.
着色剤(E)として顔料を用いる場合、顔料の分散性を向上させる観点から、公知の分散剤を感光性樹脂組成物に配合してもよい。分散剤としては、経時の分散安定性に優れる高分子分散剤を用いることが好ましい。高分子分散剤の例としては、ウレタン系分散剤、ポリエチレンイミン系分散剤、ポリオキシエチレンアルキルエーテル系分散剤、ポリオキシエチレングリコールジエステル系分散剤、ソルビタン脂肪族エステル系分散剤、脂肪族変性エステル系分散剤などが挙げられる。このような高分子分散剤として、EFKA(エフカーケミカルズビーブイ(EFKA)社製)、Disperbyk(ビックケミー社製)、ディスパロン(楠本化成株式会社製)、SOLSPERSE(ゼネカ社製)などの商品名で市販されているものを用いてもよい。分散剤の配合量は、使用する顔料などの種類に応じて適宜設定すればよい。 When a pigment is used as the colorant (E), a known dispersant may be added to the photosensitive resin composition from the viewpoint of improving the dispersibility of the pigment. As the dispersant, it is preferable to use a polymer dispersant having excellent dispersion stability over time. Examples of polymer dispersants include urethane dispersants, polyethyleneimine dispersants, polyoxyethylene alkyl ether dispersants, polyoxyethylene glycol diester dispersants, sorbitan aliphatic ester dispersants, and aliphatic modified esters. Examples include a system dispersant. As such a polymer dispersant, EFKA (manufactured by EFKA CHEMICALS BV (EFKA)), Disperbyk (manufactured by Big Chemie), DISPARON (manufactured by Kusumoto Kasei Co., Ltd.), and SOLSPERSE (manufactured by Zeneca) are commercially available. You may use what has been. The blending amount of the dispersant may be appropriately set according to the type of pigment or the like used.
カラーフィルター用感光性樹脂組成物における共重合体(A)、水酸基含有有機溶剤(B)、反応性希釈剤(C)、光重合開始剤(D)及び着色剤(E)の配合量は、カラーフィルター用感光性樹脂組成物中の共重合体(A)と反応性希釈剤(C)との合計量100質量部に対して、共重合体(A)が10〜100質量部、水酸基含有有機溶剤(B)が30〜1,000質量部、反応性希釈剤(C)が0質量部超〜90質量部、光重合開始剤(D)が0.1〜30質量部、着色剤(E)が5〜80質量部であり、好ましくは、共重合体(A)が20〜80質量部、水酸基含有有機溶剤(B)が50〜800質量部、反応性希釈剤(C)が20〜80質量部、光重合開始剤(D)が0.5〜20質量部、着色剤(E)が5〜70質量部であり、より好ましくは、共重合体(A)が30〜75質量部、水酸基含有有機溶剤(B)が100〜700質量部、反応性希釈剤(C)が25〜70質量部、光重合開始剤(D)が1〜15質量部、着色剤(E)が10〜60質量部である。この範囲の配合量であれば、適切な粘度を有するカラーフィルター用感光性樹脂組成物となる。また、着色剤(E)を含まない感光性樹脂組成物の場合でも、共重合体(A)、水酸基含有有機溶剤(B)、反応性希釈剤(C)及び光重合開始剤(D)の配合量は、上記の数値範囲が適用可能である。 The blending amounts of the copolymer (A), the hydroxyl group-containing organic solvent (B), the reactive diluent (C), the photopolymerization initiator (D) and the colorant (E) in the photosensitive resin composition for color filters are as follows: 10-100 parts by mass of the copolymer (A) and a hydroxyl group-containing group based on 100 parts by mass of the total amount of the copolymer (A) and the reactive diluent (C) in the photosensitive resin composition for a color filter. The organic solvent (B) is 30 to 1,000 parts by mass, the reactive diluent (C) is more than 0 parts by mass to 90 parts by mass, the photopolymerization initiator (D) is 0.1 to 30 parts by mass, and the colorant ( E) is 5 to 80 parts by mass, preferably 20 to 80 parts by mass of the copolymer (A), 50 to 800 parts by mass of the hydroxyl group-containing organic solvent (B), and 20 of the reactive diluent (C). To 80 parts by mass, the photopolymerization initiator (D) is 0.5 to 20 parts by mass, the colorant (E) is 5 to 70 parts by mass, and more preferably the copolymer (A) is 30 to 75 parts by mass. Parts, the hydroxyl group-containing organic solvent (B) is 100 to 700 parts by mass, the reactive diluent (C) is 25 to 70 parts by mass, the photopolymerization initiator (D) is 1 to 15 parts by mass, and the colorant (E) is 10 to 60 parts by mass. If it is the compounding quantity of this range, it will be a photosensitive resin composition for color filters which has suitable viscosity. Even in the case of a photosensitive resin composition containing no colorant (E), the copolymer (A), the hydroxyl group-containing organic solvent (B), the reactive diluent (C) and the photopolymerization initiator (D) The above numerical range can be applied to the compounding amount.
<感光性樹脂組成物の製造>
本発明の感光性樹脂組成物は、公知の混合装置を用い、上記の成分を混合することによって製造することができる。また、水酸基含有有機溶剤(B)の存在下でブロックイソシアナト基含有(メタ)アクリレートと不飽和カルボン酸とを共重合反応させることにより、共重合体(A)及び水酸基含有有機溶剤(B)を含む組成物を調製した後、反応性希釈剤(C)、光重合開始剤(D)及び任意成分である着色剤(E)を混合して製造することも可能である。<Production of photosensitive resin composition>
The photosensitive resin composition of the present invention can be produced by mixing the above components using a known mixing device. Further, by copolymerizing the block isocyanato group-containing (meth)acrylate and the unsaturated carboxylic acid in the presence of the hydroxyl group-containing organic solvent (B), the copolymer (A) and the hydroxyl group-containing organic solvent (B) are obtained. It is also possible to prepare a composition containing the above by mixing the reactive diluent (C), the photopolymerization initiator (D) and the colorant (E) which is an optional component.
上記のようにして得られる感光性樹脂組成物は、アルカリ現像性を有しているので、レジストとして好適なものである。感光性樹脂組成物の硬化は、ベーキング温度を250℃以下の範囲で適宜選択すればよいが、本発明で用いる共重合体(A)は低温での硬化性に優れているので、従来の材料に比較してベーキング温度を低くすることができる。感光性樹脂組成物において着色剤(E)として顔料を用いた場合、ベーキング温度は160℃以下においても十分な硬化性が得られる。本発明の感光性樹脂組成物は、ベーキング温度を低くしても架橋反応が十分に進行するため、エネルギー消費の面で有利である。また、耐熱性が劣る着色剤(E)や基板であっても使用することが可能になり、着色剤本来の特性が得られたり、様々な基板への応用も可能となる。そのような見地から、ベーキング温度は、160℃以下とすることが好ましく、より好ましくは150℃以下である。ベーキング温度の下限は、共重合体(A)に含まれるブロックイソシアナト基の種類によって必ずしも一様ではないが、該ブロックイソシアナト基の解離温度以上であることが必要であり、通常は80℃以上、好ましくは90℃以上、より好ましくは100℃以上である。ベーキング温度が低くなり過ぎると、塗膜の耐溶剤性を十分に改善し難くなる。また、ベーキング時間は適宜選択できるが、通常は10分〜4時間、好ましくは20分〜2時間である。 The photosensitive resin composition obtained as described above has alkali developability and is therefore suitable as a resist. To cure the photosensitive resin composition, the baking temperature may be appropriately selected within the range of 250° C. or lower. However, since the copolymer (A) used in the present invention has excellent curability at low temperatures, conventional materials can be used. The baking temperature can be lowered as compared with. When a pigment is used as the colorant (E) in the photosensitive resin composition, sufficient curability can be obtained even at a baking temperature of 160°C or lower. The photosensitive resin composition of the present invention is advantageous in terms of energy consumption because the crosslinking reaction sufficiently proceeds even if the baking temperature is lowered. Further, it becomes possible to use even a colorant (E) or a substrate having poor heat resistance, the original characteristics of the colorant can be obtained, and application to various substrates becomes possible. From this viewpoint, the baking temperature is preferably 160° C. or lower, more preferably 150° C. or lower. The lower limit of the baking temperature is not necessarily uniform depending on the type of block isocyanato group contained in the copolymer (A), but it is necessary that the lower limit is not less than the dissociation temperature of the block isocyanato group, and usually 80°C. Or higher, preferably 90° C. or higher, more preferably 100° C. or higher. When the baking temperature becomes too low, it becomes difficult to sufficiently improve the solvent resistance of the coating film. The baking time can be appropriately selected, but is usually 10 minutes to 4 hours, preferably 20 minutes to 2 hours.
本発明の感光性樹脂組成物は、各種レジスト、特に、有機ELディスプレイ(ブラックPDL用)、液晶表示装置、CCDやCMOSなどの固体撮像素子などに組み込まれるカラーフィルターを製造するために用いられるレジストとして好適である。また、本発明の感光性樹脂組成物は、耐溶剤性、低温での硬化特性などに優れた硬化塗膜を与えるので、各種コーティング、接着剤、印刷インキ用バインダーなどに用いることもできる。 INDUSTRIAL APPLICABILITY The photosensitive resin composition of the present invention is used for producing various types of resists, particularly color filters incorporated in organic EL displays (for black PDL), liquid crystal display devices, solid-state imaging devices such as CCD and CMOS, and the like. Is suitable as Further, since the photosensitive resin composition of the present invention gives a cured coating film having excellent solvent resistance and curing characteristics at low temperatures, it can be used for various coatings, adhesives, binders for printing inks and the like.
本発明の感光性樹脂組成物は、現像性及び保存安定性が良好であると共に、パターン形成時のベーキング温度を低くしても耐溶剤性に優れた着色パターンを形成することができるので、カラーフィルター用の感光性材料として極めて有用である。また、本発明の感光性樹脂組成物は、低温硬化に伴いフレキシブルディスプレイの発展、製造工程におけるエネルギー消費の低減、そして、使用する着色剤の制限緩和についても貢献できる。 The photosensitive resin composition of the present invention has good developability and storage stability, and can form a colored pattern having excellent solvent resistance even when the baking temperature during pattern formation is lowered, It is extremely useful as a photosensitive material for filters. In addition, the photosensitive resin composition of the present invention can contribute to the development of flexible displays, the reduction of energy consumption in the manufacturing process, and the relaxation of the restriction of the coloring agent to be used with the low temperature curing.
<カラーフィルター>
次に、本発明のカラーフィルター用感光性樹脂組成物の硬化物からなる着色パターンを有するカラーフィルターについて説明する。本発明のカラーフィルターは、上記したカラーフィルター用感光性樹脂組成物を用いて形成される着色パターンを有する。カラーフィルターは、通常、基板と、その上に形成されるRGBの画素、それぞれの画素の境界に形成されるブラックマトリックス及び画素とブラックマトリックスの上に形成される保護膜とから構成される。この構成において、画素及びブラックマトリックス(着色パターン)が上記したカラーフィルター用感光性樹脂組成物を用いて形成されることを除けば、その他の構成は公知のものを採用することができる。<Color filter>
Next, a color filter having a colored pattern made of a cured product of the photosensitive resin composition for a color filter of the present invention will be described. The color filter of the present invention has a colored pattern formed by using the above-described photosensitive resin composition for a color filter. The color filter is usually composed of a substrate, RGB pixels formed on the substrate, a black matrix formed at the boundaries of the respective pixels, and a protective film formed on the pixels and the black matrix. In this structure, a known structure can be adopted as the other structure except that the pixel and the black matrix (coloring pattern) are formed by using the above-described photosensitive resin composition for color filter.
次に、カラーフィルターの製造方法の一実施形態について説明する。まず、基板上に着色パターンを形成する。具体的には、基板上に、ブラックマトリックス及びRGBの画素を順次形成する。基板の材質は、特に限定されるものではなく、ガラス基板、シリコン基板、ポリカーボネート基板、ポリエステル基板、ポリアミド基板、ポリアミドイミド基板、ポリイミド基板、アルミニウム基板、プリント配線基板、アレイ基板などを適宜用いることができる。 Next, an embodiment of a method of manufacturing a color filter will be described. First, a colored pattern is formed on the substrate. Specifically, a black matrix and RGB pixels are sequentially formed on the substrate. The material of the substrate is not particularly limited, and a glass substrate, a silicon substrate, a polycarbonate substrate, a polyester substrate, a polyamide substrate, a polyamideimide substrate, a polyimide substrate, an aluminum substrate, a printed wiring board, an array substrate, or the like can be used as appropriate. it can.
着色パターンは、フォトリソグラフィ法により形成することができる。具体的には、上記の感光性樹脂組成物を基板上に塗布して塗布膜を形成した後、所定のパターンのフォトマスクを介して塗布膜を露光して露光部分を光硬化させる。そして、未露光部分をアルカリ水溶液で現像した後、ベーキングすることにより、所定の着色パターンを形成することができる。 The colored pattern can be formed by a photolithography method. Specifically, after coating the above-mentioned photosensitive resin composition on a substrate to form a coating film, the coating film is exposed through a photomask having a predetermined pattern to photo-cur the exposed portion. Then, the unexposed portion is developed with an alkaline aqueous solution and then baked to form a predetermined colored pattern.
感光性樹脂組成物の塗布方法としては、特に限定されないが、スクリーン印刷法、ロールコート法、カーテンコート法、スプレーコート法、スピンコート法などを用いることができる。また、感光性樹脂組成物の塗布後、必要に応じて、循環式オーブン、赤外線ヒーター、ホットプレートなどの加熱手段を用いて加熱することにより水酸基含有有機溶剤(B)を揮発させてもよい。加熱条件は、特に限定されず、使用する感光性樹脂組成物の種類に応じて適宜設定すればよい。一般には、50℃〜120℃の温度で30秒〜30分加熱すればよい。 The method for applying the photosensitive resin composition is not particularly limited, but a screen printing method, a roll coating method, a curtain coating method, a spray coating method, a spin coating method or the like can be used. Further, after the application of the photosensitive resin composition, the hydroxyl group-containing organic solvent (B) may be volatilized by heating with a heating means such as a circulation oven, an infrared heater or a hot plate, if necessary. The heating conditions are not particularly limited and may be appropriately set depending on the type of photosensitive resin composition used. Generally, heating may be performed at a temperature of 50° C. to 120° C. for 30 seconds to 30 minutes.
次いで、形成された塗膜にネガ型のマスクを介して紫外線、エキシマレーザー光等の活性エネルギー線を照射して部分的に露光する。照射するエネルギー線量は、感光性樹脂組成物の組成に応じて適宜選択すればよく、例えば、30〜2000mJ/cm2であることが好ましい。露光に用いられる光源としては、特に限定されないが、低圧水銀ランプ、中圧水銀ランプ、高圧水銀ランプ、キセノンランプ、メタルハライドランプなどを用いることができる。Then, the formed coating film is partially exposed by irradiating it with an active energy ray such as ultraviolet rays or excimer laser light through a negative mask. The energy dose for irradiation may be appropriately selected according to the composition of the photosensitive resin composition, and is preferably 30 to 2000 mJ/cm 2 , for example. The light source used for the exposure is not particularly limited, but a low pressure mercury lamp, a medium pressure mercury lamp, a high pressure mercury lamp, a xenon lamp, a metal halide lamp and the like can be used.
現像に用いられるアルカリ水溶液としては、特に限定されないが、炭酸ナトリウム、炭酸カリウム、炭酸カルシウム、水酸化ナトリウム、水酸化カリウムなどの水溶液;エチルアミン、ジエチルアミン、ジメチルエタノールアミンなどのアミン系化合物の水溶液;テトラメチルアンモニウム、3−メチル−4−アミノ−N,N−ジエチルアニリン、3−メチル−4−アミノ−N−エチル−N−β−ヒドロキシエチルアニリン、3−メチル−4−アミノ−N−エチル−N−β−メタンスルホンアミドエチルアニリン、3−メチル−4−アミノ−N−エチル−N−β−メトキシエチルアニリン及びこれらの硫酸塩、塩酸塩又はp−トルエンスルホン酸塩などのp−フェニレンジアミン系化合物の水溶液などを用いることができる。なお、これらの水溶液には、必要に応じて消泡剤や界面活性剤を添加してもよい。また、上記のアルカリ水溶液による現像の後、水洗して乾燥させることが好ましい。 The alkaline aqueous solution used for the development is not particularly limited, but an aqueous solution of sodium carbonate, potassium carbonate, calcium carbonate, sodium hydroxide, potassium hydroxide or the like; an aqueous solution of an amine compound such as ethylamine, diethylamine or dimethylethanolamine; tetra. Methylammonium, 3-methyl-4-amino-N,N-diethylaniline, 3-methyl-4-amino-N-ethyl-N-β-hydroxyethylaniline, 3-methyl-4-amino-N-ethyl- N-β-methanesulfonamidoethylaniline, 3-methyl-4-amino-N-ethyl-N-β-methoxyethylaniline and p-phenylenediamine such as sulfate, hydrochloride or p-toluenesulfonate thereof An aqueous solution of a system compound can be used. In addition, an antifoaming agent or a surfactant may be added to these aqueous solutions, if necessary. Further, it is preferable to wash with water and dry after the development with the above alkaline aqueous solution.
ベーキングの条件は、特に限定されず、使用する感光性樹脂組成物の種類に応じて加熱処理を行えばよい。従来の感光性樹脂組成物では、ベーキング温度が200℃以下になると着色パターンの耐溶剤性が不足するが、本発明のカラーフィルター用感光性樹脂組成物では、120℃以下の温度でベーキングした場合であっても十分な耐溶剤性を示す着色パターンを形成することができる。そのため、ベーキング温度を低くすることができ、また、高温でベーキングする場合には処理時間を短縮することができ、製造上の大きな利点となる。このような見地から、ベーキング温度を、通常は210℃以下、好ましくは160℃以下、より好ましくは120℃以下とし、ベーキング時間を、通常は10分〜4時間、好ましくは20分〜2時間として行われる。 The baking conditions are not particularly limited, and heat treatment may be performed depending on the type of the photosensitive resin composition used. In the conventional photosensitive resin composition, when the baking temperature is 200° C. or lower, the solvent resistance of the colored pattern is insufficient, but in the photosensitive resin composition for a color filter of the present invention, when baking is performed at a temperature of 120° C. or lower. Even in this case, a colored pattern exhibiting sufficient solvent resistance can be formed. Therefore, the baking temperature can be lowered, and the processing time can be shortened when baking at a high temperature, which is a great advantage in manufacturing. From this viewpoint, the baking temperature is usually 210° C. or lower, preferably 160° C. or lower, more preferably 120° C. or lower, and the baking time is usually 10 minutes to 4 hours, preferably 20 minutes to 2 hours. Done.
上記のような塗布、露光、現像及びベーキングを、ブラックマトリックス用の感光性樹脂組成物、及び赤色、緑色、青色の画素用感光性樹脂組成物を用いて順次繰り返すことにより、所望の着色パターンを形成することができる。なお、上記では、光硬化による着色パターンの形成方法を説明したが、光重合開始剤(D)の代わりに、硬化促進剤及び公知のエポキシ樹脂を配合した感光性樹脂組成物を用いれば、インクジェット法により塗布した後、加熱することにより、所望の着色パターンを形成することもできる。次に、着色パターン(RGBの各画素及びブラックマトリックス)上に保護膜を形成する。保護膜としては、特に限定されず、公知のものを用いて形成すればよい。 Application, exposure, development and baking as described above are sequentially repeated using the photosensitive resin composition for black matrix and the photosensitive resin composition for red, green and blue pixels to obtain a desired coloring pattern. Can be formed. In the above, the method for forming a colored pattern by photocuring has been described, but if a photosensitive resin composition containing a curing accelerator and a known epoxy resin is used instead of the photopolymerization initiator (D), an inkjet method is used. It is also possible to form a desired colored pattern by applying the coating method and then heating. Next, a protective film is formed on the colored pattern (each pixel of RGB and the black matrix). The protective film is not particularly limited, and a known film may be used.
このようにして製造されるカラーフィルターは、感度や現像性に優れると共に、低温での硬化が可能で耐溶剤性に優れた着色パターンを与える感光性樹脂組成物を用いて製造しているため、色変化の少ない優れた着色パターンを有する。 The color filter produced in this manner has excellent sensitivity and developability, and is produced using a photosensitive resin composition that can be cured at a low temperature and gives a colored pattern having excellent solvent resistance. It has an excellent coloring pattern with little color change.
<画像表示素子>
本発明の画像表示素子は、上記のカラーフィルターを備えた画像表示素子であり、その具体例として、液晶表示素子、有機EL表示素子、CCD素子やCMOS素子などの固体撮像素子などが挙げられる。本発明の画像表示素子の製造は、上記のカラーフィルターを使用すること以外、常法に従って行えばよい。例えば、液晶表示素子を製造する場合には、基板上に、上記カラーフィルターを形成し、次いで、電極、スペーサー等を順次形成する。そして、もう一枚の基板上に電極等を形成し、両者を張り合わせて所定量の液晶を注入、封止すればよい。<Image display device>
The image display device of the present invention is an image display device provided with the color filter described above, and specific examples thereof include a liquid crystal display device, an organic EL display device, a solid-state imaging device such as a CCD device or a CMOS device, and the like. The image display device of the present invention may be manufactured by a conventional method except that the above color filter is used. For example, in the case of manufacturing a liquid crystal display element, the color filter is formed on a substrate, and then electrodes, spacers and the like are sequentially formed. Then, an electrode or the like may be formed on the other substrate, and the two may be attached to each other to inject and seal a predetermined amount of liquid crystal.
以下、実施例を参照して本発明を詳細に説明するが、本発明はこれらの実施例により限定されない。なお、この実施例において、部及びパーセントとあるのは特に断らない限り、全て質量基準である。また、酸価及び重量平均分子量の測定法は以下のとおりである。
(1)酸価:JIS K6901 5.3に従って測定された共重合体(A)の酸価であって、該共重合体(A)1g中に含まれる酸性成分を中和するのに要する水酸化カリウムのmg数を意味する。
(2)重量平均分子量(Mw)とは、ゲルパーミエーションクロマトグラフィー(GPC)を用いて、下記条件にて測定した標準ポリスチレン換算重量平均分子量を意味する。
カラム:ショウデックス(登録商標) LF−804+LF−804(昭和電工株式会社製)
カラム温度:40℃
試料:共重合体の0.2%テトラヒドロフラン溶液
展開溶媒:テトラヒドロフラン
検出器:示差屈折計(ショウデックス RI−71S)(昭和電工株式会社製)
流速:1mL/minHereinafter, the present invention will be described in detail with reference to examples, but the present invention is not limited to these examples. In this example, all parts and percentages are based on mass unless otherwise specified. The methods for measuring the acid value and the weight average molecular weight are as follows.
(1) Acid value: Acid value of the copolymer (A) measured according to JIS K6901 5.3, and water required to neutralize the acidic component contained in 1 g of the copolymer (A). It means the number of mg of potassium oxide.
(2) The weight average molecular weight (Mw) means a standard polystyrene equivalent weight average molecular weight measured by gel permeation chromatography (GPC) under the following conditions.
Column: Showdex (registered trademark) LF-804+LF-804 (Showa Denko KK)
Column temperature: 40°C
Sample: 0.2% solution of copolymer in tetrahydrofuran Developing solvent: Tetrahydrofuran Detector: Differential refractometer (Showdex RI-71S) (Showa Denko KK)
Flow rate: 1 mL/min
[合成例1]
攪拌装置、滴下ロート、コンデンサー、温度計及びガス導入管を備えたフラスコに、149.3gのプロピレングリコールモノメチルエーテルを入れた後、窒素置換しながら攪拌し、78℃に昇温した。次に、22.4gのジシクロペンタニルメタクリレート、17.2gのメタクリル酸及び50.2gのメタクリル酸2−(3,5−ジメチルピラゾール−1−イル)カルボニルアミノエチル(カレンズMOI−BP、昭和電工株式会社製、ブロックイソシアナト基の解離率:70質量%)からなる単量体混合物と、11.2gの2、2’−アゾビス(2、4−ジメチルバレロニトリル)(重合開始剤)を62.8gのプロピレングリコールモノメチルエーテルアセテートに添加し溶解させたものをそれぞれ滴下ロートからフラスコ中に滴下した。滴下終了後、78℃で3時間攪拌して共重合反応を行い、共重合体を生成させ、試料No.1の重合体組成物(溶剤以外の成分濃度35質量%)を得た。得られた重合体組成物中の共重合体の重量平均分子量は9,100であり、酸価は121.5KOHmg/gであった。[Synthesis example 1]
149.3 g of propylene glycol monomethyl ether was placed in a flask equipped with a stirrer, a dropping funnel, a condenser, a thermometer, and a gas introduction tube, and the mixture was stirred while substituting with nitrogen and heated to 78°C. Next, 22.4 g of dicyclopentanyl methacrylate, 17.2 g of methacrylic acid and 50.2 g of 2-(3,5-dimethylpyrazol-1-yl)carbonylaminoethyl methacrylate (Karenz MOI-BP, Showa, Japan). Denko Corporation, dissociation rate of block isocyanato group: 70 mass%) and 11.2 g of 2,2'-azobis(2,4-dimethylvaleronitrile) (polymerization initiator) What was added and dissolved in 62.8 g of propylene glycol monomethyl ether acetate was dropped into the flask from the dropping funnel. After completion of dropping, the mixture was stirred at 78° C. for 3 hours to carry out a copolymerization reaction to produce a copolymer, and the sample No. Polymer composition 1 (concentration of components other than solvent: 35% by mass) was obtained. The weight average molecular weight of the copolymer in the obtained polymer composition was 9,100, and the acid value was 121.5 KOHmg/g.
[合成例2〜9及び比較合成例1〜2]
表1及び2に記載の原料を用いる以外は合成例1と同様の条件で共重合反応を行い、試料No.2〜11の重合体組成物(溶剤以外の成分濃度35質量%)を得た。得られた重合体組成物中の共重合体の重量平均分子量及び酸価を表1及び2に示す。なお、表1及び2において、メタクリル酸2−[O−(1’−メチルプロプリデンアミノ)カルボキシアミノ]エチルは、昭和電工株式会社製、カレンズMOI−BM、ブロックイソシアナト基の解離率:18質量%)であり、マロン酸−2−[[[2−メチル−1−オキソ−2−プロペニル]オキシ]エチル]アミノ]カルボニル]−1,3ジエチルエステルは、昭和電工株式会社製、カレンズMOI−DEM、ブロックイソシアナト基の解離率:90質量%であり、安息香酸−4−[[[[2−[(2−メチル−1−オキソ−2−プロペン−1−イル)オキシ]エチル]アミン]カルボニル]オキシ]メチルエステルは、ブロックイソシアナト基の解離率:40質量%であり、安息香酸−2−[[[[2−[(2−メチル−1−オキシ−2−プロペン−1−イル)オキシ]エチル]アミン]カルボニル]オキシ]メチルエステルは、ブロックイソシアナト基の解離率:75質量%であり、2−プロペン酸−2−メチル−2−[[(3,5−ジメチルフェノキシ)カルボニル]アミン]エチルエステルは、ブロックイソシアナト基の解離率:28質量%である。[Synthesis Examples 2-9 and Comparative Synthesis Examples 1-2]
A copolymerization reaction was performed under the same conditions as in Synthesis Example 1 except that the raw materials shown in Tables 1 and 2 were used, and Sample No. Polymer compositions 2 to 11 (concentration of components other than solvent: 35% by mass) were obtained. The weight average molecular weight and acid value of the copolymer in the obtained polymer composition are shown in Tables 1 and 2. In Tables 1 and 2, 2-[O-(1′-methylproprideneamino)carboxyamino]ethyl methacrylate was produced by Showa Denko KK, Karenz MOI-BM, and the dissociation rate of block isocyanato groups: 18% by mass), and malonate-2-[[[2-methyl-1-oxo-2-propenyl]oxy]ethyl]amino]carbonyl]-1,3 diethyl ester is produced by Showa Denko K.K. MOI-DEM, dissociation rate of block isocyanato group: 90% by mass, and 4-[[[[[2-[(2-methyl-1-oxo-2-propen-1-yl)oxy]ethyl benzoate. ]Amine]carbonyl]oxy]methyl ester has a dissociation ratio of the block isocyanato group: 40% by mass, and is benzoic acid-2-[[[[[2-[(2-methyl-1-oxy-2-propene- 1-yl)oxy]ethyl]amine]carbonyl]oxy]methyl ester has a dissociation rate of the block isocyanato group: 75% by mass, and is 2-propenoic acid-2-methyl-2-[[(3,5- Dimethylphenoxy)carbonyl]amine]ethyl ester has a dissociation rate of the block isocyanato group of 28% by mass.
[実施例1〜9及び比較例1〜2]
<感光性樹脂組成物(顔料タイプ)の調製>
直径0.5mmのジルコニアビーズ200gを充填したステンレス製容器に、C.Iピグメントグリーン36(着色剤)を100質量部、プロピレングリコールモノメチルエーテルアセテートを44.98質量部、分散剤(ビッグケミー・ジャパン株式会社製Disperbyk−161)を25質量部投入して、ペイントシェーカーで2時間混合して分散させることにより、緑色顔料分散液を調製した。
この緑色顔料分散液を、表3に示すその他の配合成分(即ち、重合体組成物、反応性希釈剤、光重合開始剤及び溶剤)と混合して感光性樹脂組成物を調製した。それぞれの成分の配合割合は、表3に示すとおりである。なお、実施例1〜9の感光性樹脂組成物は、試料No.1〜9の重合体組成物それぞれを用いて調製し、比較例1〜2の感光性樹脂組成物は、試料No.10〜11の重合体組成物それぞれを用いて調製した。また、重合体組成物の量は共重合体反応終了時に含まれる溶剤を含み、各試料に含まれる溶剤の量も、配合成分としての溶剤の中に合算されている。[Examples 1-9 and Comparative Examples 1-2]
<Preparation of photosensitive resin composition (pigment type)>
In a stainless steel container filled with 200 g of zirconia beads having a diameter of 0.5 mm, C.I. 100 parts by mass of I Pigment Green 36 (coloring agent), 44.98 parts by mass of propylene glycol monomethyl ether acetate, and 25 parts by mass of a dispersant (Disperbyk-161 manufactured by Big Chemie Japan Co., Ltd.) were added, and 2 with a paint shaker. A green pigment dispersion was prepared by mixing and dispersing for a period of time.
This green pigment dispersion was mixed with the other compounding ingredients shown in Table 3 (that is, the polymer composition, the reactive diluent, the photopolymerization initiator and the solvent) to prepare a photosensitive resin composition. The compounding ratio of each component is as shown in Table 3. The photosensitive resin compositions of Examples 1 to 9 were sample No. Sample Nos. 1 to 9 were used to prepare the photosensitive resin compositions of Comparative Examples 1 and 2. Prepared using each of 10-11 polymer compositions. Further, the amount of the polymer composition includes the solvent contained at the end of the copolymer reaction, and the amount of the solvent contained in each sample is also included in the solvent as the compounding component.
<感光性樹脂組成物の評価>
(1)アルカリ現像性
実施例1〜9及び比較例1〜2の感光性樹脂組成物それぞれを、5cm角のガラス基板(無アルカリガラス基板)上に、露光後の厚さが2.5μmとなるようにスピンコートした後、90℃で3分間加熱することで溶剤を揮発させた。次に、塗布膜から100μmの距離に所定のパターンのフォトマスクを配置し、このフォトマスクを介して塗布膜を露光(露光量150mJ/cm2)し、露光部分を光硬化させた。次に、0.1質量%の炭酸ナトリウムを含む水溶液を23℃の温度及び0.3MPaの圧力でスプレーすることによって未露光部分を溶解して現像した後、100℃で20分間ベーキングすることで所定のパターンを形成した。アルカリ現像後の残渣は、アルカリ現像後のパターンを、(株)日立ハイテクノロジーズ製電子顕微鏡S−3400を用いて観察することにより確認した。この評価の基準は以下の通りである。
○:残渣なし
×:残渣あり
アルカリ現像性の評価結果を表4に示す。<Evaluation of photosensitive resin composition>
(1) Alkali developability Each of the photosensitive resin compositions of Examples 1 to 9 and Comparative Examples 1 and 2 was applied onto a 5 cm square glass substrate (alkali-free glass substrate) with a thickness after exposure of 2.5 μm. After spin-coating so as to be formed, the solvent was volatilized by heating at 90° C. for 3 minutes. Next, a photomask having a predetermined pattern was arranged at a distance of 100 μm from the coating film, and the coating film was exposed (exposure amount 150 mJ/cm 2 ) through the photomask to photo-cur the exposed portion. Then, an unexposed portion was dissolved and developed by spraying an aqueous solution containing 0.1% by mass of sodium carbonate at a temperature of 23° C. and a pressure of 0.3 MPa, and then baked at 100° C. for 20 minutes. A predetermined pattern was formed. The residue after alkali development was confirmed by observing the pattern after alkali development using an electron microscope S-3400 manufactured by Hitachi High-Technologies Corporation. The criteria for this evaluation are as follows.
◯: No residue X: Residue is shown in Table 4 below.
(2)耐溶剤性の評価
5cm角のガラス基板(無アルカリガラス基板)上に、実施例1〜9及び比較例1〜2の感光性樹脂組成物それぞれを、ベーキング後の厚さが2.5μmとなるようにスピンコートした後、90℃で3分間加熱して溶剤を揮発させた。次に、塗布膜に波長365nmの光を露光し、露光部分を光硬化させたのち、ベーキング温度100℃の乾燥器中に20分間放置して硬化塗膜を作製した。容量500mLの蓋付きガラス瓶に200mLのプロピレングリコールモノメチルエーテルアセテートを入れ、80℃の条件下に静置した。その中に上記の硬化塗膜付き試験片を浸漬した後、80℃に維持した状態で、5分静置した。試験片をプロピレングリコールモノメチルエーテルアセテートへ浸漬させる前後の色変化(ΔE*ab)を分光光度計UV−1650PC(株式会社島津製作所製)にて測定した。ΔE*abの測定結果を表4に示す。ΔE*abが1.5以下であれば耐溶剤性に優れているといえる。(2) Evaluation of solvent resistance Each of the photosensitive resin compositions of Examples 1 to 9 and Comparative Examples 1 and 2 had a thickness after baking of 2 on a 5 cm square glass substrate (alkali-free glass substrate). After spin coating so as to have a thickness of 5 μm, the solvent was volatilized by heating at 90° C. for 3 minutes. Next, the coating film was exposed to light having a wavelength of 365 nm to photo-cure the exposed portion, and then left in a dryer at a baking temperature of 100° C. for 20 minutes to prepare a cured coating film. 200 mL of propylene glycol monomethyl ether acetate was placed in a glass bottle with a lid having a capacity of 500 mL, and the glass bottle was left standing at 80° C. The test piece with the cured coating film was immersed therein, and then allowed to stand for 5 minutes while being maintained at 80°C. The color change (ΔE * ab) before and after the test piece was dipped in propylene glycol monomethyl ether acetate was measured with a spectrophotometer UV-1650PC (manufactured by Shimadzu Corporation). Table 4 shows the measurement results of ΔE * ab. If ΔE * ab is 1.5 or less, it can be said that the solvent resistance is excellent.
(3)保存安定性の評価
合成例1〜9及び比較合成例1〜2の共重合体を、ガラス容器に等量ずつ計り取り、ほこりなどが入らないようにアルミニウム箔で口を閉じた。次に、これらのサンプルをそれぞれ23℃に保った恒温器の中に静置し、サンプルの1ヶ月後の重量平均分子量(Mw)を測定した。1ヶ月後のMwの変化率を表5に示す。1ヶ月後のMwの変化率が20%以内であれば、共重合体の保存安定性が優れているといえる。(3) Evaluation of storage stability The copolymers of Synthesis Examples 1 to 9 and Comparative Synthesis Examples 1 and 2 were weighed in equal amounts in a glass container, and the mouth was closed with an aluminum foil so as to prevent dust from entering. Next, each of these samples was allowed to stand in a thermostat kept at 23° C., and the weight average molecular weight (Mw) of the sample after one month was measured. Table 5 shows the change rate of Mw after one month. If the change rate of Mw after 1 month is within 20%, it can be said that the storage stability of the copolymer is excellent.
表4の結果から分かるように、試料No.1〜9の重合体組成物を用いた実施例1〜9の感光性樹脂組成物は、アルカリ現像性及び耐溶剤性が良好であった。更に、共重合体の保存安定性は、それを配合した感光性樹脂組成物の保存安定性と相関があるので、表5の結果から、試料No.1〜9の重合体組成物を用いた実施例1〜9の感光性樹脂組成物は保存安定性も良好であるといえる。これに対して、試料No.10〜11の重合体組成物を用いた比較例1〜2の感光性樹脂組成物は、保存安定性が良好であるものの、試料No.10の重合体組成物を用いた比較例1の感光性樹脂組成物は、耐溶剤性が十分でなく、また、試料No.11の重合体組成物を用いた比較例2の感光性樹脂組成物は、アルカリ現像性及び耐溶剤性が十分でなかった。 As can be seen from the results in Table 4, the sample No. The photosensitive resin compositions of Examples 1 to 9 using the polymer compositions of 1 to 9 had good alkali developability and solvent resistance. Furthermore, since the storage stability of the copolymer has a correlation with the storage stability of the photosensitive resin composition containing the copolymer, the results of Table 5 show that the sample No. It can be said that the photosensitive resin compositions of Examples 1 to 9 using the polymer compositions of 1 to 9 also have good storage stability. On the other hand, sample No. The photosensitive resin compositions of Comparative Examples 1 and 2 using the polymer compositions of 10 to 11 have good storage stability, but Sample No. The photosensitive resin composition of Comparative Example 1 using the polymer composition of Example 10 did not have sufficient solvent resistance, and Sample No. The photosensitive resin composition of Comparative Example 2 using the polymer composition of Example 11 had insufficient alkali developability and solvent resistance.
以上の結果から分かるように、本発明によれば、現像性が良好であると共に、耐溶剤性及び保存安定性に優れた感光性樹脂組成物を提供することができる。 As can be seen from the above results, according to the present invention, it is possible to provide a photosensitive resin composition having excellent developability, solvent resistance and storage stability.
なお、本国際出願は、2017年8月3日に出願した日本国特許出願第2017−150502号に基づく優先権を主張するものであり、この日本国特許出願の全内容を本国際出願に援用する。 This international application claims priority based on Japanese Patent Application No. 2017-150502 filed on August 3, 2017, and the entire contents of this Japanese patent application are incorporated into this international application. To do.
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