JPWO2018168912A1 - Grinding fluid generating device, grinding fluid generating method, grinding device and grinding fluid - Google Patents

Abstract

The grinding fluid generator (1) includes a mixed liquid generator (3) and a liquid delivery part (2). A mixed liquid production | generation part (3) mixes gas with the liquid which is a raw material of the grinding liquid (74), and produces | generates a mixed liquid. The liquid delivery part (2) generates ultra fine bubbles having a diameter of less than 1 μm in the mixed liquid, and delivers a grinding liquid (74) containing ultra fine bubbles at a concentration of 100 million / ml or more. Thereby, the grinding fluid (74) which suppresses clogging of a grindstone part suitably can be provided.

Description

  The present invention relates to a grinding fluid, generation of the grinding fluid, and grinding of an object using the grinding fluid.

  2. Description of the Related Art Conventionally, in an apparatus that performs cutting or the like on a workpiece, a cooling medium is supplied to a cutting point. Japanese Patent Laying-Open No. 2015-98079 (Reference 1) discloses a technique of mixing air millibubbles and microbubbles into strong alkaline water that is a cooling medium stored in a cooling medium tank. Also, in Japanese Patent No. 3791827 (Document 2), in a cutting apparatus, a bubble generator is provided in the vicinity of the tip of a nozzle for supplying a coolant liquid, and a bubble-containing coolant liquid containing bubbles having a size of 0.3 μm to 10 μm. A technique for supplying a cutting point to a cutting point is disclosed.

  By the way, as described in Document 1, millibubbles and microbubbles are held only for several seconds in the liquid. Therefore, as in Documents 1 and 2, in order to supply a cooling medium containing microbubbles to a cutting point, it is necessary to continuously generate microbubbles in the cooling medium, and immediately after the generation of microbubbles. It is necessary to supply the cooling medium to the cutting point. For this reason, in the apparatus of the literature 1 and the literature 2, the cooling medium whose temperature has increased due to the continuous generation of microbubbles is supplied to the cutting point, which may cause a reduction in machining accuracy and a reduction in the life of the cutting tool. There is.

  In the apparatus of Literature 2, since the coolant liquid immediately after the bubbles are mixed by the bubble generator provided at the nozzle tip is supplied to the cutting point, there is a limit to the increase of the bubble concentration in the coolant liquid. Further, in Document 2, it is described that the cooling performance and lubrication performance of the coolant liquid in the cutting device are improved by mixing bubbles in the coolant liquid, but the coolant necessary for improving the cooling performance and the lubrication performance. There is no disclosure about the bubble concentration in the liquid. Furthermore, Document 2 does not include knowledge about devices other than the cutting device (for example, a grinding device).

  The present invention is directed to a grinding fluid generating device that generates a grinding fluid supplied to a contact portion between a grindstone and an object in a grinding device, and provides a grinding fluid that improves production efficiency in the grinding device. It is aimed.

  A grinding fluid generating apparatus according to a preferred embodiment of the present invention generates ultra fine bubbles having a diameter of less than 1 μm in a liquid that is a raw material of the grinding fluid, and includes ultra fine bubbles at a concentration of 100 million / ml or more. A grinding fluid generator for generating a grinding fluid and a grinding fluid delivery unit for delivering the grinding fluid are provided. ADVANTAGE OF THE INVENTION According to this invention, the grinding fluid which improves the production efficiency in a grinding device can be provided.

  A grinding liquid generating apparatus according to another preferred embodiment of the present invention includes a mixed liquid generating section that generates a mixed liquid by mixing a gas with a liquid that is a raw material of the grinding liquid, and an ultra-small diameter less than 1 μm in the mixed liquid A liquid delivery unit that produces fine bubbles and delivers a liquid containing ultrafine bubbles at a concentration of 100 million / ml or more. ADVANTAGE OF THE INVENTION According to this invention, the grinding fluid which improves the production efficiency in a grinding device can be provided.

  Preferably, the grinding fluid generating device further includes a circulating unit that returns the liquid sent from the liquid sending unit to the mixed solution generating unit.

  Preferably, the grinding fluid generating device further includes a storage portion that stores the liquid delivered from the fluid delivery portion before being supplied to a contact portion between the grindstone portion of the grinding device and the object.

  Preferably, the liquid delivery part is connected to a taper part in which a flow path area gradually decreases from upstream to downstream of the nozzle flow path to which the mixed liquid is supplied, and to a downstream end of the taper part, and the taper part It is an ultra fine bubble production | generation nozzle provided with the throat part which ejects the fluid from a jet nozzle, and the enlarged part which connects to the said jet nozzle and expands a flow-path area.

  The present invention is also directed to a grinding fluid generating method for generating a grinding fluid supplied to a contact portion between a grindstone and an object in a grinding apparatus. A grinding fluid generating method according to a preferred embodiment of the present invention includes: a) a step of mixing a gas with a liquid that is a raw material of the grinding fluid to generate a mixed solution; and b) a diameter of less than 1 μm in the mixed solution. Producing ultra fine bubbles and delivering a liquid containing ultra fine bubbles at a concentration of 100 million / ml or more. ADVANTAGE OF THE INVENTION According to this invention, the grinding fluid which improves the production efficiency in a grinding device can be manufactured easily.

  Preferably, the liquid sent in step b) is circulated to perform step a) and step b).

  The present invention is also directed to a grinding apparatus that performs grinding on an object. A grinding apparatus according to a preferred embodiment of the present invention includes a grindstone unit, a holding unit that holds an object, a drive unit that slides the grindstone unit relative to the object, and the grindstone unit. A liquid supply unit for supplying a grinding liquid to a contact part with the object, and the grinding liquid contains ultra fine bubbles having a diameter of less than 1 μm at a concentration of 100 million / ml or more. According to the present invention, the production efficiency in the grinding apparatus can be improved.

  A grinding apparatus according to another preferred embodiment of the present invention includes a grindstone portion, a holding portion that holds an object, a drive portion that causes the grindstone portion to slide relative to the object, and the above-described grinding liquid. A generating device; and a liquid supply unit that supplies the grinding fluid generated by the grinding fluid generating device to a contact portion between the grindstone unit and the object. According to the present invention, the production efficiency in the grinding apparatus can be improved.

  The present invention is also directed to a grinding liquid supplied to a contact portion between a grindstone portion and an object in a grinding apparatus. The grinding fluid which concerns on one preferable form of this invention contains the ultra fine bubble whose diameter is less than 1 micrometer in the density | concentration of 100 million piece / ml or more. According to the present invention, the production efficiency in the grinding apparatus can be improved.

  The above object and other objects, features, aspects and advantages will become apparent from the following detailed description of the present invention with reference to the accompanying drawings.

It is a figure which shows the structure of the grinding device which concerns on one embodiment. It is a figure which shows the structure of a grinding fluid production | generation apparatus. It is a figure which shows the flow of the production | generation of the grinding fluid by a grinding fluid production | generation apparatus. It is sectional drawing of a mixing nozzle. It is sectional drawing of a liquid delivery part. It is a figure which shows the relationship between the processing number of a target object, and processing accuracy. It is the surface photograph of the target object ground. It is a figure which shows the relationship between the diameter and density | concentration of an ultra fine bubble.

  FIG. 1 is a diagram showing a configuration of a grinding apparatus 8 according to an embodiment of the present invention. The grinding device 8 is a device that performs grinding on an object 9 (that is, a workpiece) that is an object of grinding. In the example shown in FIG. 1, cylindrical grinding is performed by the grinding device 8 to grind the outer peripheral surface of the substantially cylindrical object 9.

  The grinding device 8 includes a grindstone unit 81, a holding unit 82, a driving unit 83, a liquid supply unit 84, a feeding unit 85, and the grinding liquid generating device 1. The grindstone portion 81 is a substantially disk-shaped or substantially columnar member centered on a central axis J3 that faces in a direction perpendicular to the paper surface in FIG. A grindstone 811 for grinding is provided on the outer peripheral surface of the grindstone portion 81. The holding part 82 holds the substantially cylindrical object 9 extending in a direction perpendicular to the paper surface in FIG. The grindstone 811 of the grindstone 81 is in contact with the outer peripheral surface of the object 9. In the following description, a portion where the grindstone 81 and the object 9 are in contact is referred to as a “contact portion 88”.

  The drive unit 83 slides the grindstone unit 81 relative to the object 9. Specifically, the drive unit 83 rotates the grindstone unit 81 around the central axis J3. The drive unit 83 also rotates the object 9 held by the holding unit 82 around a central axis J4 perpendicular to the paper surface in FIG. In the example shown in FIG. 1, the grindstone unit 81 rotates clockwise in the figure, and the object 9 rotates counterclockwise in the figure. In addition, the drive part 83 may rotate the target object 9 hold | maintained at the holding | maintenance part 82 centering on the central axis J4 perpendicular | vertical to the paper surface in FIG. 1, without rotating the grindstone part 81. FIG. The feed unit 85 moves the object 9 together with the holding unit 82 in a direction perpendicular to the paper surface in FIG. 1 (that is, a direction parallel to the central axis J3).

  The grinding fluid generator 1 generates a grinding fluid 74 (that is, a coolant fluid) that is used for grinding the object 9. The grinding fluid 74 generated by the grinding fluid generator 1 is supplied to the contact portion 88 between the grindstone 81 and the object 9 by the fluid supply unit 84. The liquid supply part 84 is a grinding liquid nozzle that injects the grinding liquid 74 toward the contact part 88 between the grindstone part 81 and the object 9, for example.

  The grinding liquid 74 supplied to the contact part 88 from the liquid supply part 84 contains ultra fine bubbles at a predetermined concentration. “Ultra fine bubbles” are bubbles having a diameter of less than 1 μm (micrometers) and are also called nanobubbles. The “concentration” of ultra fine bubbles refers to the number of ultra fine bubbles contained in a liquid per unit volume. The number of ultra fine bubbles in the liquid is measured by, for example, a laser diffraction / scattering method. In the present embodiment, the number of ultra fine bubbles is measured by a laser diffraction particle size distribution analyzer SALD-7500X10 manufactured by Shimadzu Corporation.

  The concentration of ultra fine bubbles in the grinding liquid 74 supplied from the liquid supply unit 84 is 100 million / ml (milliliter) or more, and preferably 400 million / ml or more. The upper limit of the concentration of ultra fine bubbles in the grinding liquid 74 is not particularly limited, but considering the time required for generation, etc., 1 billion / ml or less is practical. The diameter of the ultra fine bubble contained in the grinding liquid 74 is mainly 200 nm (nanometer) or less. For example, paying attention to the number of ultra fine bubbles contained in the grinding liquid 74 per unit volume, the number of ultra fine bubbles having a diameter of 50 nm or more and 200 nm or less is 80% or more and 100% or less of the number of all ultra fine bubbles. It is.

  FIG. 2 is a diagram showing the configuration of the grinding fluid generator 1. FIG. 3 is a diagram illustrating a flow of generation of the grinding fluid by the grinding fluid generator 1. In FIG. 2, a part of the configuration of the grinding fluid generator 1 is drawn in cross section. The grinding fluid generator 1 mixes a liquid (hereinafter referred to as “raw material fluid”) that is a raw material of the grinding fluid 74 and a gas, and contains the ultrafine bubbles of the gas at the above-described predetermined concentration. Is a device that generates The raw material liquid is, for example, a grinding liquid used in a conventional grinding apparatus (hereinafter referred to as “conventional grinding liquid”), and does not include the ultrafine bubbles having a predetermined concentration or more. The conventional grinding fluid is generated, for example, by diluting a stock solution of grinding fluid with water.

  The grinding fluid generation device 1 includes a liquid delivery unit 2, a mixed liquid generation unit 3, a storage unit 5, and a circulation unit 6. In the grinding fluid generating apparatus 1, first, the mixed liquid generating unit 3 mixes a gas with the raw material liquid to generate a mixed liquid (step S11). Subsequently, ultra fine bubbles are generated in the liquid mixture generated by the liquid mixture generating unit 3 by the liquid sending unit 2, and a liquid containing ultra fine bubbles at a concentration of 100 million / ml or more is sent out. (Step S12). The liquid delivered from the liquid delivery part 2 is temporarily stored in the storage part 5 before being supplied from the liquid supply part 84 (see FIG. 1) to the contact part 88 (step S13).

  The liquid stored in the storage unit 5 is returned to the mixed liquid generation unit 3 via the circulation path 61 of the circulation unit 6. That is, the liquid delivered from the liquid delivery part 2 in step S12 is circulated to the mixed liquid production | generation part 3 by the circulation part 6, and step S11-S13 are performed (step S14, S15). In the grinding fluid production | generation apparatus 1, the grinding fluid 74 which contains an ultra fine bubble by the above-mentioned predetermined density | concentration is produced | generated by repeating step S11-S15 (step S14). The grinding liquid 74 is supplied from the reservoir 5 to the contact portion 88 via the liquid supply portion 84.

  The mixed liquid generating unit 3 includes a mixing nozzle 31, a pressurized liquid generating container 32, and a pump 33. The mixing nozzle 31 mixes the liquid pressure-fed by the pump 33 and the gas flowing in from the gas inlet, and ejects the liquid into the pressurized liquid generation container 32. The liquid and gas mixed by the mixing nozzle 31 are the above-mentioned raw material liquid and air. In the mixing nozzle 31, instead of air, another gas (for example, nitrogen gas) may be mixed with the raw material liquid.

  FIG. 4 is an enlarged sectional view showing the mixing nozzle 31. The mixing nozzle 31 includes a liquid inlet 311, a gas inlet 319, and a mixed fluid outlet 312. The liquid pumped by the pump 33 flows from the liquid inlet 311. A gas flows from the gas inlet 319. From the mixed fluid outlet 312, a mixed fluid 72 (see FIG. 2) in which the liquid flowing in from the liquid inlet 311 and the gas flowing in from the gas inlet 319 are mixed is ejected. The liquid inlet 311, the gas inlet 319, and the mixed fluid outlet 312 are each substantially circular.

  The flow path cross section of the nozzle flow path 310 from the liquid inlet 311 to the mixed fluid outlet 312 and the flow path cross section of the gas flow path 3191 from the gas inlet 319 to the nozzle flow path 310 are also substantially circular. The channel cross section means a cross section perpendicular to the central axis of the flow path such as the nozzle flow path 310 and the gas flow path 3191, that is, a cross section perpendicular to the flow of fluid flowing through the flow path. In the following description, the area of the channel cross section is referred to as “channel area”. The nozzle flow path 310 is a Venturi tube having a flow path area that becomes smaller in the middle of the flow path.

  The mixing nozzle 31 includes an introduction portion 313, a first taper portion 314, a throat portion 315, a gas mixing portion 316, and a second portion that are sequentially arranged from the liquid inlet 311 toward the mixed fluid outlet 312. A tapered portion 317 and a lead-out portion 318 are provided. The mixing nozzle 31 also includes a gas supply unit 3192 in which a gas flow path 3191 is provided.

  In the introduction part 313, the flow path area is substantially constant at each position in the direction of the central axis J1 of the nozzle flow path 310. In the first taper portion 314, the flow path area gradually decreases in the liquid flow direction (that is, toward the downstream). In the throat 315, the flow path area is substantially constant. The channel area of the throat 315 is the smallest in the nozzle channel 310. In the nozzle channel 310, even if the channel area slightly changes in the throat 315, the entire portion having the smallest channel area is regarded as the throat 315. In the gas mixing unit 316, the flow channel area is substantially constant and is slightly larger than the flow channel area of the throat 315. In the second taper portion 317, the flow path area gradually increases toward the downstream. In the derivation unit 318, the flow path area is substantially constant. The channel area of the gas channel 3191 is also substantially constant, and the gas channel 3191 is connected to the gas mixing unit 316 of the nozzle channel 310.

  In the mixing nozzle 31, the liquid that has flowed into the nozzle channel 310 from the liquid inlet 311 is accelerated by the throat portion 315 and the static pressure is lowered, and the pressure in the nozzle channel 310 is reduced in the throat portion 315 and the gas mixing portion 316. Becomes lower than atmospheric pressure. As a result, gas is sucked from the gas inlet 319, passes through the gas flow path 3191, flows into the gas mixing unit 316, and is mixed with the liquid to generate the mixed fluid 72. The mixed fluid 72 is decelerated at the second tapered portion 317 and the outlet portion 318 to increase the static pressure, and is ejected into the pressurized liquid generating container 32 through the mixed fluid ejection port 312 as described above.

  The pressurized liquid generating container 32 shown in FIG. 2 is pressurized and has a pressure higher than atmospheric pressure (hereinafter referred to as “pressurized environment”). In the pressurized liquid generation container 32, while the mixed fluid 72 ejected from the mixing nozzle 31 flows in a pressurized environment, the gas is pressurized and dissolved in the liquid to generate a pressurized liquid. The pressurizing liquid is the above-described mixed liquid generated by the mixed liquid generating unit 3.

  The pressurized liquid generating container 32 includes a first flow path 321, a second flow path 322, a third flow path 323, a fourth flow path 324, and a fifth flow path 325 that are stacked in the vertical direction. . In the following description, the first flow path 321, the second flow path 322, the third flow path 323, the fourth flow path 324, and the fifth flow path 325 are collectively referred to as “flow paths 321 to 325”. The flow paths 321 to 325 are pipelines extending in the horizontal direction, and the cross section perpendicular to the longitudinal direction of the flow paths 321 to 325 is substantially rectangular.

  The above-described mixing nozzle 31 is attached to the upstream end of the first flow path 321 (that is, the left end in FIG. 2), and the mixed fluid 72 ejected from the mixing nozzle 31 is In a pressurized environment, it flows toward the right side in FIG. In the present embodiment, the mixed fluid 72 is ejected from the mixing nozzle 31 above the liquid level of the mixed fluid 72 in the first flow path 321. The mixed fluid 72 immediately after being ejected from the mixing nozzle 31 directly collides with the liquid surface before colliding with the downstream wall surface (that is, the right wall surface in FIG. 2) of the first flow path 321.

  In the pressurized liquid generation container 32, a part or the whole of the mixed fluid ejection port 312 of the mixing nozzle 31 may be located below the liquid level of the mixed fluid 72 in the first flow path 321. As a result, in the same manner as described above, the mixed fluid 72 immediately after being ejected from the mixing nozzle 31 directly collides with the mixed fluid 72 flowing in the first channel 321 in the first channel 321.

  A substantially circular opening 321 a is provided on the lower surface of the downstream end portion of the first flow path 321, and the mixed fluid 72 flowing through the first flow path 321 is located below the first flow path 321. It falls to the two flow paths 322 through the opening 321a. In the second flow path 322, the mixed fluid 72 that has dropped from the first flow path 321 flows from the right side to the left side in FIG. 2 in a pressurized environment, and on the lower surface of the downstream end of the second flow path 322. The liquid drops to the third flow path 323 located below the second flow path 322 through the provided substantially circular opening 322a. In the third flow path 323, the mixed fluid 72 that has dropped from the second flow path 322 flows from the left side to the right side in FIG. 2 in a pressurized environment, and on the lower surface of the downstream end of the third flow path 323. It drops to the fourth flow path 324 located below the third flow path 323 through the provided substantially circular opening 323a. As shown in FIG. 2, in the first channel 321 to the fourth channel 324, the mixed fluid 72 is divided into a liquid layer containing bubbles and a gas layer located thereabove.

  In the fourth flow path 324, the mixed fluid 72 dropped from the third flow path 323 flows from the right side to the left side in FIG. 2 in a pressurized environment, and on the lower surface of the downstream end portion of the fourth flow path 324. It flows (i.e., falls) into the fifth flow path 325 located below the fourth flow path 324 through the provided substantially circular opening 324a. In the fifth channel 325, unlike the first channel 321 to the fourth channel 324, there is no gas layer, and the fifth channel 325 is in the liquid that fills the fifth channel 325. There are slight bubbles in the vicinity of the upper surface. In the fifth channel 325, the mixed fluid 72 flowing in from the fourth channel 324 flows from the left side to the right side in FIG.

  In the pressurized liquid generating container 32, mixing is performed in the flow paths 321 to 325 while flowing gradually down and down in stages (ie, flowing while alternately repeating a horizontal flow and a downward flow). In the fluid 72, the gas gradually dissolves in the liquid under pressure. In the fifth flow path 325, the concentration of the gas dissolved in the liquid is substantially equal to 60% to 90% of the (saturated) solubility of the gas under a pressurized environment. And the excess gas which did not melt | dissolve in the liquid exists in the 5th flow path 325 as a bubble of the magnitude | size which can be visually recognized. Since the flow direction of the mixed fluid 72 in the horizontal channels 321 to 325 adjacent to each other in the upper and lower directions is reversed, the pressurized liquid generating container 32 can be reduced in size. In the pressurized liquid generating container 32, the number of flow paths stacked vertically may be changed as appropriate.

  The pressurized liquid generation container 32 further includes an excess gas separation unit 326 extending upward from the upper surface on the downstream side of the fifth flow path 325. The surplus gas separation unit 326 is filled with the mixed fluid 72. The cross section perpendicular to the vertical direction of the surplus gas separation part 326 is substantially rectangular, and the upper end of the surplus gas separation part 326 is opened to the atmosphere via a pressure adjustment throttle part 327. The bubbles of the mixed fluid 72 flowing through the fifth horizontal flow path 325 rise in the surplus gas separation unit 326 and are released into the atmosphere.

  In this way, the excess gas of the mixed fluid 72 is separated together with a part of the mixed fluid 72, thereby generating a pressurized liquid that substantially does not include bubbles of a size that can be at least easily visually recognized. The liquid is supplied to the liquid delivery unit 2 that is directly connected to the downstream end of the flow path 325. In the present embodiment, the pressurized liquid dissolves a gas that is about twice or more the gas (saturated) solubility under atmospheric pressure. The liquid of the mixed fluid 72 flowing through the flow paths 321 to 325 in the pressurized liquid generation container 32 can also be regarded as a pressurized liquid that is being generated.

  FIG. 5 is an enlarged cross-sectional view of the liquid delivery unit 2. The liquid delivery unit 2 is an ultra fine bubble generating nozzle that generates ultra fine bubbles. The liquid delivery unit 2 is a multistage nozzle in which three nozzles 28 are connected in series. The liquid delivery unit 2 includes a liquid inlet 21 and a liquid outlet 22. From the liquid inlet 21, the pressurized liquid flows from the fifth flow path 325 of the pressurized liquid generation container 32. The liquid delivery port 22 is connected to the storage tank 51 of the storage part 5 through the liquid delivery path 52 (refer FIG. 2). The liquid inlet 21 and the liquid outlet 22 are each substantially circular, and the cross section of the nozzle channel 20 from the liquid inlet 21 toward the liquid outlet 22 is also substantially circular.

  The liquid delivery part 2 has three sets of taper part 24 and throat part 25 that are sequentially arranged from the liquid inlet 21 toward the liquid delivery outlet 22 (that is, from upstream to downstream of the nozzle flow path 20). And an enlarged portion 26. In the taper portion 24, the flow path area gradually decreases in the direction in which the pressurized liquid flows (that is, from upstream to downstream of the nozzle flow path 20). The inner surface of the tapered portion 24 is a part of a substantially conical surface with the central axis J2 of the nozzle channel 20 as the center. In the cross section including the central axis J2, the angle formed by the inner surface of the tapered portion 24 is preferably 10 ° or more and 90 ° or less.

  The throat portion 25 is connected to the downstream end of the taper portion 24 and connects the taper portion 24 and the enlarged portion 26. The inner surface of the throat portion 25 is a substantially cylindrical surface, and the flow path area is substantially constant in the throat portion 25. The diameter of the channel cross section in the throat 25 is the smallest in the nozzle channel 20, and the channel area of the throat 25 is the smallest in the nozzle channel 20. The length of the throat 25 is preferably 1.1 to 10 times the diameter of the throat 25, and more preferably 1.5 to 2 times. In the nozzle channel 20, even if the channel area slightly changes in the throat portion 25, the entire portion having the smallest channel area is regarded as the throat portion 25.

  The enlarged portion 26 is connected to a spout 29 that is the downstream end of the throat portion 25. The enlarged portion 26 connects the upstream throat portion 25 and the downstream tapered portion 24. The inner surface of the enlarged portion 26 is a substantially cylindrical surface, and in the enlarged portion 26, the flow path area is substantially constant. The diameter of the enlarged portion 26 is larger than the diameter of the throat portion 25. Between the throat portion 25 and the enlarged portion 26, the flow path area is rapidly enlarged. In the cross section including the central axis J2, the angle formed between the central axis J2 and the substantially annular surface 27 between the downstream end of the throat 25 and the upstream end of the enlarged portion 26 is about 90 °. In other words, the surface 27 is substantially perpendicular to the central axis J2. The said angle is 45 degrees or more and 90 degrees or less, for example.

  In the liquid delivery part 2, the pressurized liquid that has flowed into the nozzle channel 20 from the liquid inlet 21 flows to the throat 25 while being gradually accelerated in the taper part 24, and a jet outlet 29 that is the downstream end of the throat 25. To the enlarged portion 26 as a jet. The flow rate of the pressurized liquid in the throat 25 is preferably 10 m to 30 m per second. In the throat 25, since the static pressure of the pressurized liquid is reduced, the gas in the pressurized liquid becomes supersaturated and precipitates in the liquid as ultrafine bubbles. Also, precipitation of ultrafine bubbles occurs while the pressurized liquid passes through the enlarged portion 26. In the liquid delivery part 2, the pressurized liquid sequentially passes through the three sets of the taper part 24, the throat part 25, and the enlargement part 26, thereby producing a liquid containing a high concentration ultrafine bubble, and the liquid delivery shown in FIG. 2. It is sent to the storage tank 51 through the path 52.

  A circulation path 61 of the circulation unit 6 connects the storage tank 51 of the storage unit 5 and the liquid inlet 311 (see FIG. 4) of the mixing nozzle 31. The liquid containing ultrafine bubbles sent from the liquid delivery unit 2 to the storage tank 51 is returned to the mixing nozzle 31 via the circulation path 61. The liquid returned to the mixing nozzle 31 passes through the pressurized liquid generation container 32 and the liquid delivery part 2 and is delivered to the storage tank 51. In the grinding fluid generating apparatus 1, a liquid containing ultrafine bubbles circulates through the mixed liquid generating unit 3, the liquid delivery unit 2, the storage tank 51, and the circulation unit 6. Thereby, the density | concentration of the ultra fine bubble in the liquid in the storage tank 51 increases to the above-mentioned predetermined density | concentration. In other words, the grinding fluid 74 containing the ultrafine bubbles at the above-described predetermined concentration is stored in the storage tank 51.

  In the grinding fluid generating apparatus 1, when the concentration of the ultra fine bubbles in the liquid in the storage tank 51 reaches the above-described predetermined concentration, the pump 33 is stopped and the above-described liquid circulation (that is, generation of the grinding fluid 74). Is stopped. Since the ultra fine bubble can exist in the liquid for a long time, it continues to exist in the grinding liquid 74 even after the generation of the grinding liquid 74 is stopped. In the grinding fluid generating apparatus 1, the concentration of the ultra fine bubbles in the liquid sent out from the liquid sending unit 2 is set to the above-mentioned predetermined concentration by the raw material liquid passing through the mixed solution generating unit 3 and the liquid sending unit 2 only once. The above circulation through the circulation unit 6 may not be performed. In this case, the raw material liquid supplied from the liquid inlet 311 of the mixing nozzle 31 passes through the mixing nozzle 31, the pressurized liquid generation container 32, and the liquid delivery unit 2, and includes the ultrafine bubbles at the above-described predetermined concentration. The liquid 74 is delivered from the liquid delivery port 22 of the liquid delivery unit 2. In this case, the circulation unit 6 may be omitted from the grinding fluid generator 1.

  In the grinding apparatus 8 shown in FIG. 1, the grinding liquid 74 stored in the storage tank 51 of the grinding liquid generating apparatus 1 passes through the liquid supply section 84 with respect to the contact section 88 between the grindstone section 81 and the object 9. In this state, the grindstone 81 and the object 9 are rotated by the drive unit 83, and the object 9 is ground. In addition, in the grinding apparatus 8, the production | generation of the grinding fluid 74 by the grinding fluid production | generation apparatus 1 may be continued in parallel with the grinding process with respect to the target object 9. FIG.

  Since the grinding fluid 74 supplied to the contact portion 88 between the grinding wheel portion 81 and the object 9 contains ultrafine bubbles at a concentration of 100 million / ml or more, the surface tension is higher than that of the conventional grinding fluid. Is low. For this reason, the grinding liquid 74 is likely to penetrate between the grindstone 811 of the grindstone 81 and the surface of the object 9. As a result, the contact portion 88 between the grindstone portion 81 and the object 9 is efficiently cooled. Moreover, the lubricity in the contact part 88 of the grindstone part 81 and the target object 9 is improved.

  Further, the polishing liquid 74 containing ultrafine bubbles at a concentration of 100 million pieces / ml or more is supplied to the contact portion 88, whereby polishing scraps adhering to the pores of the grindstone 811 (that is, polishing powder, Abrasive grains, crushed abrasive grains, and the like) are physically removed by the ultra fine bubbles and removed from the grindstone 811. Further, since negative charges are present on the surface of the ultra fine bubble, the polishing dust adhering to the grindstone 811 is adsorbed by the electric potential and removed from the grindstone 811. Thereby, clogging of the grindstone 811 in the grindstone portion 81 is suitably suppressed. As a result, it is possible to improve the accuracy of grinding by the grinding device 8 (hereinafter simply referred to as “processing accuracy”). Moreover, the fall of the processing precision at the time of performing the grinding process continuously in the grinding device 8 can be suppressed, and the dressing interval of the grindstone part 81 (that is, the interval of the adjustment of the grindstone 811) can be lengthened.

  6 and 7 are diagrams showing the results of grinding in the grinding apparatus 8 for Examples 1 and 2 and Comparative Examples 1 and 2. FIG. In Example 1, the grinding fluid 74 containing ultrafine bubbles at a concentration of about 100 million / ml was supplied to the contact portion 88 between the grinding stone portion 81 and the subject 9 to perform grinding of the subject 9. . In Example 2, the grinding fluid 74 containing ultrafine bubbles at a concentration of about 400 million / ml was supplied to the contact portion 88 between the grinding wheel portion 81 and the subject 9 to perform grinding of the subject 9. . In Examples 1 and 2, Noritake Cool SEC-Z, which is a water-soluble grinding oil for grinding machines (Type A2: Soluble Type) manufactured by Noritake Company Limited, was used as a raw material liquid for the grinding liquid 74. Specifically, 700 ml (that is, 3.5%) of Noritake Cool SEC-Z was dissolved in 20 l (liter) of tap water as raw water to prepare a raw material solution.

  The grinding liquid 74 of the first embodiment is generated when the raw material liquid passes through the mixed liquid generation section 3 and the liquid delivery section 2 only once without being circulated by the circulation section 6 in the grinding liquid generation apparatus 1. The grinding liquid 74 of the second embodiment is generated when the liquid in the storage tank 51 circulates the mixed liquid generation unit 3 and the liquid delivery unit 2 about 10 times by the circulation unit 6.

  In Comparative Example 1, the grinding of the object 9 was performed by supplying the conventional grinding liquid to the contact portion 88 between the grindstone 81 and the object 9. As a conventional grinding fluid, Noritake Cool SEC-Z which is a raw material liquid of the above-mentioned grinding fluid 74 was used.

  FIG. 8 is a diagram showing the relationship between the diameter and concentration of ultrafine bubbles contained in the grinding fluid 74 of Examples 1 and 2 and the conventional grinding fluid of Comparative Example 1. The horizontal axis in FIG. 8 indicates the diameter of the ultra fine bubble, and the vertical axis indicates the concentration of the ultra fine bubble. In FIG. 8, Example 1 is indicated by a thin solid line 96, Example 2 is indicated by a thick solid line 97, and Comparative Example 1 is indicated by a broken line 98. As shown in FIG. 8, compared to the grinding fluid 74 of Examples 1 and 2, the conventional grinding fluid contains almost no ultrafine bubbles. Moreover, the diameter of the ultra fine bubble contained in the grinding fluid 74 of Examples 1 and 2 is mainly 50 nm or more and 200 nm or less as described above.

  In Comparative Example 2, microbubbles having a diameter of 1 μm or more in the same conventional grinding fluid as in Comparative Example 1 were generated at a concentration of about 1 million / ml and supplied to the contact portion 88. The object 9 was ground. In the following description, the conventional grinding fluid containing microbubbles used in Comparative Example 2 is referred to as “MB grinding fluid”.

  In Examples 1 and 2 and Comparative Examples 1 and 2, grinding was sequentially performed on 80 objects 9. The object 9 is a cylindrical member having a diameter of 25 mm and a length of 50 mm. The material of the object 9 is S45C of carbon steel for machine structure, and the quenching hardness (HRC) is 32. The grindstone 811 of the grindstone 81 is a TA grindstone manufactured by Noritake Co., Ltd. and has a particle size of 80. The feed speed of the object 9 is 2 μm / sec, and the grinding amount is 0.1 mm. The processing time is about 40 seconds per object 9.

  In Comparative Example 1, the temperature of the conventional grinding liquid supplied from the liquid supply part 84 to the contact part 88 between the grindstone part 81 and the object 9 was about 17 ° C. In Examples 1 and 2, the temperature of the grinding liquid 74 supplied from the liquid supply part 84 to the contact part 88 was about 19 ° C. In Comparative Example 2, since the temperature of the MB grinding fluid rose during the grinding of 80 objects 9, the MB grinding fluid was used while being cooled. The average temperature of the MB grinding liquid in the grinding process for 80 objects 9 is about 22 ° C. The cause of the temperature rise of the MB grinding liquid is that it is necessary to continuously generate a large amount of microbubbles so that the concentration of the microbubbles disappearing in a short time in the MB grinding liquid is maintained substantially constant. . In Examples 1 and 2 and Comparative Example 1, cooling of the grinding fluid 74 and the conventional grinding fluid is not performed during grinding of the 80 objects 9.

  FIG. 6 is a diagram showing the relationship between the number of objects 9 processed and the processing accuracy. The horizontal axis in FIG. 6 indicates the number of objects 9 processed (that is, the number of objects 9 subjected to grinding). The vertical axis in FIG. 6 represents the difference between the dimension of the number of objects 9 ground by the number indicated by the horizontal axis and the dimension of the object 9 ground first (ie, the first one) out of 80 pieces. (Hereinafter referred to as “dimensional displacement”). In FIG. 6, the dimensional displacement of Examples 1 and 2 is indicated by solid lines 91 and 92, the dimensional displacement of Comparative Example 1 is indicated by a broken line 93, and the dimensional displacement of Comparative Example 2 is indicated by a two-dot chain line 94.

  As shown in FIG. 6, in Examples 1 and 2, although the temperature of the grinding fluid 74 is higher than that in Comparative Example 1, the dimensional displacement is small. For example, the dimensional displacement of the 80th object 9 in Example 1 is reduced by about 25% from the dimensional displacement of the 80th object 9 of Comparative Example 1. In addition, the dimensional displacement of the 80th object 9 of Example 2 is reduced by about 50% from the dimensional displacement of the 80th object 9 of Comparative Example 1.

  FIG. 7 shows a surface photograph of the object 9 ground in the first (ie, first) out of 80 pieces and a surface photograph of the object 9 ground in the last (ie, 80th). Show. As shown in FIG. 7, the surface of the object 9 that is ground first shows substantially the same grinding result in any of Examples 1 and 2 and Comparative Examples 1 and 2. On the other hand, with respect to the surface of the object 9 that has been ground last, there is no particular problem in Examples 1 and 2, but in Comparative Example 1, it is caused by clogging of the grindstone 81 in the lower half of the photograph. Possible grinding burn is seen. Further, on the surface of the object 9 ground at the end of Comparative Example 2, surface roughness (for example, relatively large recesses or protrusions) considered to be caused by clogging of the grindstone portion 81 or deterioration of the surface condition is observed on the entire photograph. Part).

  Therefore, as in Examples 1 and 2, the grinding fluid 74 containing ultrafine bubbles at a concentration of 100 million / ml or more is supplied to the contact portion 88 between the grindstone 81 and the object 9. Thus, it can be seen that even when a plurality of objects 9 are continuously ground, a reduction in processing accuracy is suppressed. This is because cavitation due to ultrafine bubbles is likely to occur at the contact portion 88 between the grindstone portion 81 and the object 9 as compared with the case where the conventional grinding fluid as in Comparative Example 1 is supplied. It is considered that the clogging of the grinding fluid is suitably suppressed, and when the grinding fluid 74 is generated (that is, when the ultra fine bubble is generated), the temperature rise of the grinding fluid is suppressed. Conceivable. On the other hand, in Comparative Example 2, the dimensional displacement shown in FIG. This is considered to be caused by the fact that the MB grinding fluid has an excessively high temperature, resulting in a decrease in the lubrication performance of the MB grinding fluid compared to the conventional grinding fluid.

  As described above, the grinding fluid generating apparatus 1 includes the mixed liquid generating unit 3 and the liquid sending unit 2. The mixed liquid generating unit 3 generates a mixed liquid by mixing a gas with a liquid that is a raw material of the grinding liquid 74. The liquid delivery part 2 produces | generates the ultra fine bubble whose diameter is less than 1 micrometer in the said liquid mixture, and sends out the grinding fluid 74 which contains an ultra fine bubble by the density | concentration of 100 million piece / ml or more. Thereby, the grinding fluid 74 which suppresses suitably the clogging of the grindstone part 81 (namely, clogging of the grindstone 811) can be provided.

  The grinding fluid generating apparatus 1 further includes a circulation unit 6 that returns the liquid delivered from the liquid delivery unit 2 to the mixed solution production unit 3. Thereby, the grinding fluid 74 containing ultra fine bubbles at a high concentration can be generated.

  The grinding fluid generator 1 further includes a reservoir 5 that stores the liquid delivered from the fluid delivery part 2 before supplying the liquid to the contact part 88 between the grindstone part 81 and the object 9. Thereby, the grinding liquid 74 can be generated independently of the grinding process in the grinding device 8. For example, a required amount of the grinding fluid 74 can be generated and stored in advance before the start of grinding in the grinding device 8. As described above, since the ultra fine bubble can exist in the liquid for a long time, the concentration of the ultra fine bubble in the grinding liquid 74 in the reservoir 5 hardly decreases. Moreover, in the storage part 5, the temperature adjustment of the grinding fluid 74 before supply to the contact part 88 can also be performed as needed.

  In the grinding device 8, if the grinding liquid 74 is sent directly from the liquid delivery part 2 to the liquid supply part 84, it is matched with the flow rate and pressure of the liquid in the liquid delivery part 2 (that is, the ultrafine bubble generation conditions). It is necessary to adjust the supply amount and supply pressure of the grinding fluid 74 from the liquid supply part 84 to the contact part 88. For this reason, the adjustment of the grinding device 8 may be complicated. On the other hand, when the reservoir 5 is provided as described above, the ultra fine bubble in the grinding fluid generator 1 is independent of the supply amount and supply pressure of the grinding fluid 74 from the fluid supply portion 84 to the contact portion 88. Can be generated. As a result, the grinding fluid 74 containing ultra fine bubbles at a desired concentration can be generated stably and easily. Further, the adjustment in the grinding device 8 can be simplified.

  As described above, the mixed liquid generating unit 3 is a pressurized liquid generating unit that generates a pressurized liquid by pressurizing and dissolving a gas in a liquid that is a raw material of the grinding liquid 74. Moreover, the liquid delivery part 2 produces | generates the ultra fine bubble in a pressurization liquid by ejecting the said pressurization liquid, and sends out the grinding fluid 74 which contains an ultra fine bubble by the density | concentration of 100 million piece / ml or more. To do. By making the mixed-liquid production | generation part 3 and the liquid delivery part 2 into the said structure, the grinding fluid 74 which contains an ultra fine bubble in high concentration can be produced | generated rapidly.

  The liquid delivery unit 2 is an ultra fine bubble generating nozzle that includes a tapered portion 24, a throat portion 25, and an enlarged portion 26. In the taper portion 24, the flow path area gradually decreases from the upstream side to the downstream side of the nozzle flow path 20 to which the mixed liquid is supplied. The throat portion 25 is connected to the downstream end of the taper portion 24 and ejects the liquid from the taper portion 24 from the ejection port 29. The enlarged portion 26 is connected to the jet outlet 29 and enlarges the flow path area. Thereby, it is possible to easily generate the grinding fluid 74 containing ultrafine bubbles at a high concentration while suppressing the temperature rise of the grinding fluid 74.

  The grinding device 8 includes a grindstone unit 81, a holding unit 82, a drive unit 83, a liquid supply unit 84, and the grinding liquid generation device 1. The holding unit 82 holds the object 9. The drive unit 83 slides the grindstone unit 81 relative to the object 9. The liquid supply part 84 supplies the grinding liquid 74 generated by the grinding liquid generating apparatus 1 to the contact part 88 between the grindstone part 81 and the object 9. Thus, clogging of the grindstone portion 81 is suitably suppressed by supplying the grinding fluid 74 containing ultrafine bubbles having a diameter of less than 1 μm at a concentration of 100 million / ml or more to the contact portion 88. Can do. Therefore, even when grinding is continuously performed in the grinding device 8, it is possible to suppress a decrease in processing accuracy and to increase the dress interval. Moreover, the depth which can be processed by one grinding process can also be enlarged. As a result, the production efficiency of the grinding device 8 can be improved.

  The grinding device 8 is not necessarily provided with the above-described grinding fluid generating device 1, and grinding may be performed using the above-described grinding fluid 74 prepared outside the grinding device 8. In this case, the grinding device 8 includes a grindstone unit 81, a holding unit 82, a drive unit 83, and a liquid supply unit 84. The holding unit 82 holds the object 9. The drive unit 83 slides the grindstone unit 81 relative to the object 9. The liquid supply part 84 supplies the grinding liquid 74 to the contact part 88 between the grindstone part 81 and the object 9. As described above, the grinding fluid 74 contains ultrafine bubbles having a diameter of less than 1 μm at a concentration of 100 million / ml or more. For this reason, clogging of the grindstone 81 can be suitably suppressed. As a result, the production efficiency of the grinding apparatus 8 can be improved as described above.

  Next, the effect of the addition of the emulsifier on the grinding liquid 74 was verified by Example 3. Some grinding fluids currently in use contain emulsifiers depending on the properties of the grinding fluid. For example, in some cases, an emulsifier such as a surfactant is added to the stock solution in advance so that the stock water and the stock solution of the grinding fluid can be easily mixed when preparing the grinding fluid. In addition, a small amount of an emulsifier may be added during mixing of the raw water and the grinding liquid.

  In Example 3, 700 ml of Noritake Cool SEC-Z (raw solution) and a very small amount of surfactant were dissolved in 20 l of tap water as raw water to prepare a raw material solution. And in the grinding fluid production | generation apparatus 1, the grinding fluid 74 was produced | generated by circulating the mixed-solution production | generation part 3 and the liquid delivery part 2 about 10 times by the circulation part 6 in the raw material liquid in the storage tank 51. FIG. Thereafter, the number of ultra fine bubbles in the grinding fluid 74 was measured by the above-described laser diffraction particle size distribution analyzer SALD-7500X10. As a result, it was confirmed that the grinding fluid 74 of Example 3 contained ultrafine bubbles of the same degree as in Example 1 described above. That is, even when an emulsifier is added to the grinding fluid 74, the generation of ultra fine bubbles in the grinding fluid 74 was suitably performed.

  Therefore, even when the grinding liquid 74 to which the emulsifier is added is used in the grinding apparatus 8, clogging of the grindstone 81 is suitably suppressed and the production efficiency of the grinding apparatus 8 is improved as described above. I think it can be done. In addition, in the grinding liquid 74 of Example 3, since the density | concentration of the ultra fine bubble increased from Example 1, it is thought that the grinding effect (for example, suppression of clogging) of the grinding liquid 74 can be maintained for a long time.

  Next, Example 4 and Example 5 verified the influence of the type of stock solution when the grinding fluid 74 was generated. In Example 4 and Example 5, the grinding liquid 74 was produced | generated using the emulsion type (A1 type) stock solution. Specifically, in Example 4, a raw material solution was prepared by dissolving 700 ml of an emulsion-type stock solution in 20 liters of tap water as raw water. And in the grinding fluid production | generation apparatus 1, the grinding fluid 74 was produced | generated by circulating the mixed-solution production | generation part 3 and the liquid delivery part 2 about 10 times by the circulation part 6 in the raw material liquid in the storage tank 51. FIG. Thereafter, the number of ultra fine bubbles in the grinding fluid 74 was measured by the above-described laser diffraction particle size distribution analyzer SALD-7500X10. As a result, the concentration of ultra fine bubbles in the grinding fluid 74 of Example 4 was about 100 million / ml, as in Example 1. That is, even when the grinding liquid 74 was generated using an emulsion type stock solution, the generation of ultra fine bubbles in the grinding liquid 74 was suitably performed. Therefore, even when the grinding fluid 74 generated using the emulsion type stock solution is used in the grinding device 8, clogging of the grindstone portion 81 is suitably suppressed similarly to the above, and the grinding device 8 is used. It is thought that the production efficiency can be improved.

  In Example 5, a raw material solution was prepared by dissolving 700 ml of an emulsion-type stock solution and an extremely small amount of a surfactant in 20 l of tap water as raw water. And in the grinding fluid production | generation apparatus 1, the grinding fluid 74 was produced | generated by circulating the mixed-solution production | generation part 3 and the liquid delivery part 2 about 10 times by the circulation part 6 in the raw material liquid in the storage tank 51. FIG. Thereafter, the number of ultra fine bubbles in the grinding fluid 74 was measured by the above-described laser diffraction particle size distribution analyzer SALD-7500X10. As a result, the concentration of ultra fine bubbles in the grinding fluid 74 of Example 4 was about 350 million / ml. That is, even when the emulsion type stock solution was used and the emulsifier was added to produce the grinding liquid 74, the generation of ultra fine bubbles in the grinding liquid 74 was suitably performed. Therefore, even when the grinding liquid 74 generated by adding an emulsifier and using an emulsion type stock solution is used in the grinding apparatus 8, clogging of the grindstone portion 81 is suitably suppressed as described above. Thus, it is considered that the production efficiency of the grinding device 8 can be improved.

  Various modifications can be made in the above-described grinding fluid generating apparatus 1 and grinding apparatus 8.

  For example, in the grinding fluid generating apparatus 1, the liquid delivery unit 2 is not necessarily connected directly to the pressurized liquid generating container 32. The liquid delivery part 2 may be provided on a liquid delivery path 52 that connects the pressurized liquid production container 32 and the storage tank 51. Moreover, the liquid delivery part 2 may be arrange | positioned in the downstream end of the said flow path, and may be directly connected to the storage tank 51. FIG.

  In the liquid delivery part 2, two sets or four or more sets of the taper part 24, the throat part 25, and the expansion part 26 which continue from upstream to downstream may be provided. Or in the liquid delivery part 2, only one set of the taper part 24, the throat part 25, and the expansion part 26 which are continuous toward the downstream from upstream may be provided. The liquid delivery part 2 does not necessarily need to be equipped with the taper part 24, the throat part 25, and the expansion part 26, and may be an ultra fine bubble generating nozzle having another structure.

  In the grinding fluid generator 1, the reservoir 5 is omitted, and the grinding fluid 74 delivered from the fluid delivery part 2 may be supplied to the fluid supply part 84 of the grinding device 8 without being temporarily stored. .

  In the grinding fluid generating apparatus 1, the raw material fluid used for generating the grinding fluid 74 is not limited to the conventional grinding fluid. For example, the raw material liquid may be water used for diluting the above-mentioned stock solution when producing a conventional grinding fluid, or the stock solution. For example, when the raw material liquid is the dilution water, the liquid delivered from the liquid delivery unit 2 of the grinding fluid generating apparatus 1 is not the grinding fluid 74 itself, but ultrafine bubbles at a concentration of 100 million / ml or more. The so-called ultra fine bubble water is mixed, and the above-mentioned stock solution is mixed with the ultra fine bubble water, so that a grinding liquid 74 containing ultra fine bubbles at a concentration of 100 million / ml or more is generated. The

  The stock solution has different characteristics depending on the manufacturer and application. In addition, there are a wide variety of situations in which the grinding liquid 74 is used (for example, the type of grinding object, type of grinding device, etc.). Therefore, in the grinding fluid production | generation apparatus 1, in order to produce | generate the grinding fluid 74 containing the ultrafine bubble of desired density | concentration, the frequency | count of circulation by the circulation part 6, the kind (for example, raw | natural water) of the raw material liquid which produces | generates an ultrafine bubble, The presence or absence of the addition of an emulsifier or the type of the added emulsifier may be changed as appropriate.

  The grinding fluid generator 1 may be used for generating the grinding fluid 74 as a device independent of the grinding device 8.

  The grinding fluid 74 is not necessarily generated by the above-described grinding fluid generator 1. For example, in the mixed liquid generation unit 3, it is not always necessary to pressurize and dissolve the gas in the raw material liquid to generate the pressurized liquid, and it is sufficient that the mixed liquid is generated by mixing the gas in the raw material liquid. Also in the liquid delivery part 2, it is not always necessary to generate ultrafine bubbles in the pressurized liquid by ejecting the pressurized liquid, and ultrafine bubbles may be generated by various known generation methods. For example, an ultra fine bubble is generated by applying an ultrasonic wave to the liquid mixture generated by the liquid mixture generating unit 3 in the liquid sending unit 2 or applying a shearing force by the internal structure of the liquid sending unit 2. May be.

  Moreover, the grinding fluid 74 does not necessarily have to be generated by the grinding fluid generating device 1 including the mixed liquid generating unit 3 and the liquid delivery unit 2, and may be generated by various grinding fluid generating devices having other structures. The grinding fluid generating apparatus, for example, produces a grinding fluid that generates ultra fine bubbles having a diameter of less than 1 μm in a liquid that is a raw material of the grinding fluid, and includes ultra fine bubbles at a concentration of 100 million / ml or more. A liquid generation part and a grinding liquid sending part for sending the grinding liquid are provided. In the grinding fluid generation unit, ultra fine bubbles may be generated by various known generation methods. In the said grinding fluid production | generation part, an ultra fine bubble is produced | generated, for example by giving a shearing force to the liquid in which gas is dissolved.

  The grinding liquid 74 may be used for grinding the object 9 having various shapes in various types of grinding devices (for example, a planar grinding device) other than the cylindrical grinding device 8. The grinding fluid generating device 1 may also be provided in various types of grinding devices.

  The configurations in the above-described embodiments and modifications may be combined as appropriate as long as they do not contradict each other.

  Although the invention has been illustrated and described in detail, the foregoing description is illustrative and not restrictive. Therefore, it can be said that many modifications and embodiments are possible without departing from the scope of the present invention.

DESCRIPTION OF SYMBOLS 1 Grinding liquid production | generation apparatus 2 Liquid delivery part 3 Mixed liquid production | generation part 5 Reservation part 6 Circulation part 8 Grinding device 9 Target object 20 Nozzle flow path 24 Taper part 25 Throat part 26 Expansion part 29 Jet nozzle 74 Grinding liquid 81 Grinding stone part 82 Holding | maintenance Part 83 Drive part 84 Liquid supply part 88 Contact part S11-S15 Step

Preferably, the liquid delivery part is connected to a taper part in which a flow path area gradually decreases from upstream to downstream of the nozzle flow path to which the mixed liquid is supplied, and to a downstream end of the taper part, and the taper part It is an ultra fine bubble production | generation nozzle provided with the throat part which ejects the fluid from a jet nozzle, and the enlarged part which connects to the said jet nozzle and expands a flow-path area.
Preferably, the liquid that is a raw material of the grinding liquid contains a surfactant.

Preferably, the liquid sent in step b) is circulated to perform step a) and step b).
Preferably, in the step a), the liquid that is a raw material of the grinding liquid contains a surfactant.

The present invention is also directed to a grinding apparatus that performs grinding on an object. A grinding apparatus according to a preferred embodiment of the present invention includes a grindstone unit, a holding unit that holds an object, a drive unit that slides the grindstone unit relative to the object, and the grindstone unit. A liquid supply unit for supplying a grinding liquid to a contact part with the object, and the grinding liquid contains ultra fine bubbles having a diameter of less than 1 μm at a concentration of 100 million / ml or more. According to the present invention, the production efficiency in the grinding apparatus can be improved.
Preferably, the grinding fluid contains a surfactant.

The present invention is also directed to a grinding liquid supplied to a contact portion between a grindstone portion and an object in a grinding apparatus. The grinding fluid which concerns on one preferable form of this invention contains the ultra fine bubble whose diameter is less than 1 micrometer in the density | concentration of 100 million piece / ml or more. According to the present invention, the production efficiency in the grinding apparatus can be improved.
Preferably, the grinding fluid contains a surfactant.

Claims (10)

A grinding fluid generating device that generates a grinding fluid supplied to a contact portion between a grindstone and an object in a grinding device,
A grinding fluid generator that generates ultrafine bubbles having a diameter of less than 1 μm in a liquid that is a raw material of the grinding fluid, and generates a grinding fluid containing ultrafine bubbles at a concentration of 100 million / ml or more,
A grinding fluid delivery section for delivering the grinding fluid;
A grinding fluid generating apparatus comprising: A grinding fluid generating device that generates a grinding fluid supplied to a contact portion between a grindstone and an object in a grinding device,
A mixed liquid generating unit that generates a mixed liquid by mixing a gas with a liquid that is a raw material of the grinding liquid;
A liquid delivery part for producing an ultra fine bubble having a diameter of less than 1 μm in the mixed liquid and delivering a liquid containing the ultra fine bubble at a concentration of 100 million / ml or more;
A grinding fluid generating apparatus comprising: The grinding fluid generating device according to claim 2,
A grinding fluid generating apparatus, further comprising a circulation unit that returns the liquid delivered from the fluid delivery unit to the mixed solution producing unit. It is a grinding fluid generating device according to claim 2 or 3,
A grinding fluid generator, further comprising a reservoir for storing the liquid delivered from the fluid delivery unit before supplying the fluid to a contact portion between the grindstone of the grinding device and the object. A grinding fluid generating device according to any one of claims 2 to 4,
The liquid delivery part is
A taper part in which the channel area gradually decreases from the upstream side to the downstream side of the nozzle channel to which the mixed liquid is supplied;
Connected to the downstream end of the taper portion, and a throat portion for ejecting fluid from the taper portion from a spout;
An enlarged portion connected to the jet outlet and enlarging the flow path area;
An ultrafine bubble generating nozzle comprising: a grinding fluid generating device. A grinding fluid generating method for generating a grinding fluid supplied to a contact portion between a grindstone and an object in a grinding apparatus,
a) a step of mixing a gas with a liquid that is a raw material of the grinding liquid to generate a mixed liquid;
b) producing ultrafine bubbles having a diameter of less than 1 μm in the mixed solution, and delivering a liquid containing ultrafine bubbles at a concentration of 100 million / ml or more;
A grinding fluid generating method comprising: It is a grinding fluid production | generation method of Claim 6, Comprising:
A method for producing a grinding fluid, comprising circulating the liquid delivered in the step b) and performing the steps a) and b). A grinding apparatus for performing grinding on an object,
Grinding wheel,
A holding unit for holding an object;
A drive unit that slides the grindstone portion relative to the object;
A liquid supply part for supplying a grinding liquid to the contact part between the grinding wheel part and the object;
With
The grinding apparatus characterized in that the grinding liquid contains ultrafine bubbles having a diameter of less than 1 μm at a concentration of 100 million / ml or more. A grinding apparatus for performing grinding on an object,
Grinding wheel,
A holding unit for holding an object;
A drive unit that slides the grindstone portion relative to the object;
A grinding fluid generating device according to any one of claims 1 to 5,
A liquid supply section for supplying the grinding liquid generated by the grinding liquid generating apparatus to the contact portion between the grindstone section and the object;
A grinding apparatus comprising: A grinding fluid supplied to a contact portion between a grindstone and an object in a grinding device,
A grinding fluid comprising ultrafine bubbles having a diameter of less than 1 μm at a concentration of 100 million / ml or more.

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