JPS6364613A - Manufacture of thin film magnetic head - Google Patents

Abstract

PURPOSE:To widen gap length between tips of the second magnetic poles by forming the first magnetic pole on which both side edges facing a gap layer are etched slantingly on a base body and after forming a level difference correcting film around it, forming the second magnetic pole having rectangular sectional form on the first magnetic pole through the gap layer. CONSTITUTION:A magnetic layer 31 is formed on a substrate 11 that becomes a slider, etching peripheral side edge of the magnetic layer 31 excepting the side facing a medium slantingly, and the first magnetic pole 21 having trapezoidal sectional form is formed. it is covered with a nonmagnetic material 32 of the same thickness with the magnetic pole 21, and a resist pattern 33 is formed on it. The surface of the magnetic pole 21 is exposed by etching making the pattern a mask. Then, the resist pattern 33 is removed, and a level difference correcting film 34 is formed. The film 34 is covered with a gap layer 13, and a thin film coil, the second magnetic pole 16 having rectangular sectional form and a protective film 35 are formed on it successively. By cutting and grinding exposed tip faces of magnetic poles 21, 16, wide gap length is constituted.

Description

[Detailed Description of the Invention] [Summary] The present invention provides a method for manufacturing a thin-film magnetic head that reduces side crosstalk and is used for mounting magnetic disks. After forming a first magnetic pole having a trapezoidal cross section by etching it in an inclined manner, and forming a step correction film that is flush with the surface of the first magnetic pole around the first magnetic pole, a step correction film is formed on the first magnetic pole. By forming the second magnetic pole with a rectangular cross section through the gap layer, the gap length between the first magnetic pole tip and the second magnetic pole tip facing each other through the gap layer can be widened on both sides. It was formed.

[Industrial application field]

The present invention relates to a method for manufacturing a thin-film magnetic head used in magnetic disk drives, etc., and in particular to a thin-film magnetic head having a magnetic pole tip structure capable of reducing side crosstalk during reproduction of magnetic disk media with high track densities. The present invention relates to a method for manufacturing a head.

In recent years, magnetic disk drives have rapidly become faster and larger in capacity, and as a result, the crank density of magnetic disk media has tended to increase. For this reason, there is a need for a thin film magnetic head free from so-called side crosstalk, which reproduces recorded signals from adjacent tracks as noise in response to narrower tracks.

Under these circumstances, the present inventors have already proposed a new thin film magnetic head that satisfies the above requirements in Japanese Patent Application No. 61,654/1982.

[Conventional technology and its problems]

A conventional thin film magnetic head has a thin film coil 15 with a first magnetic pole 12, a gap layer 13 and an interlayer insulating layer 14 interposed on a substrate 11 serving as a slider, as shown in a sectional view of the main part in FIG.
, the second magnetic pole 16, and the insulating protective film 17 are laminated in this order. The end surfaces of the tip portions of the pair of magnetic poles 12.16 directly facing each other with the gap layer 13 in between are the slider (substrate) 11.
The magnetic pole tip is exposed on the air bearing surface 18 of the magnetic disk and faces the magnetic disk medium 19, and the shape of the tip of the magnetic pole when viewed from the medium 19 side is rectangular as shown in FIG. In the figure, E
indicates the gap length.

However, in such conventional thin-film magnetic heads, when reproducing recorded information on the magnetic disk medium 19, so-called side crosstalk occurs in which recorded information on tracks adjacent to the trunk to be reproduced is also reproduced as noise. There are drawbacks to doing so.

This side crosstalk is 5μm between each recording disc.
This can be reduced by providing a non-recording/reproducing area called a guard band with a certain width, but in the magnetic disk media with high trunk density described above, the width of the guard band is also greatly narrowed, so side crosstalk can be reduced. will be difficult to reduce.

Therefore, as mentioned above, the present inventors have proposed a new thin film magnetic head that can reduce side crosstalk for this high trunk density magnetic disk medium.

FIGS. 2 and 3 are a perspective view showing the magnetic pole tip of this thin-film magnetic head and a diagram showing the shape of the magnetic pole tip seen from the magnetic disk medium side.

As is clear from these figures, both side edges of the tip of the first magnetic pole 21 located on the air inflow end side of the slider are diagonal as shown by 21a and 21b with respect to the tip of the opposing second magnetic pole 16. The gap length between the notch and the magnetic poles 21°16 at that part is 7! s is the standard gap length! It is shaped more like a fan.

By widening the gap length on both side edges of the magnetic pole tip in this way, when reproducing the recorded signal on the recording track 22a of the magnetic disk medium 22, the guard band 23
a noise signal from the adjacent recording trunk 22b via the
That is, the side crosstalk signal is reduced as gap loss.

However, in the conventional method for manufacturing a thin film magnetic head, after forming the first magnetic pole 12, the second magnetic pole 16 is directly formed with the gap layer 13 interposed therebetween. Even if the above-mentioned inclined opening is formed on both side edges of the tip of the first @ pole 12, the gap layer 13 deposited on that part is simply provided diagonally, and the gap length is not determined. Unchanged. In other words, it is not easy to partially widen only the gap length at both side edges of the magnetic pole tip, making it difficult to manufacture the newly proposed thin film magnetic head mentioned above.

In view of the above-mentioned circumstances, the present invention provides a magnetic head having a first magnetic pole in which both side edges of the gap-opposing surface side of the magnetic pole tip are cut out in an inclined shape, so as to face the notched portion of the first magnetic pole tip. It is an object of the present invention to provide a novel manufacturing method suitable for forming a magnetic pole tip structure in which the gap length between the first magnetic pole tips is widened.

[Means for solving problems]

In order to achieve the above object, the present invention includes a step of etching a first magnetic pole provided on a substrate serving as a slider in a slanted manner on both side edges facing the gap layer to form a trapezoidal cross-sectional shape. , after depositing a non-magnetic material layer on and around the first magnetic pole, only a portion of the non-magnetic material layer on the trapezoidal upper surface of the first magnetic pole is removed by a selective etching method so as to cover the first magnetic pole. A step of forming a step correction film that is flush with the surface of the first magnetic pole is performed, and the gap length between the tip of the first magnetic pole and the tip of the second magnetic pole facing each other via the gap layer is determined. Create a wide structure on both sides.

[For production]

In the manufacturing method of the present invention, the step correction film that is flush with the surface of the first magnetic pole is formed around the first magnetic pole having a trapezoidal cross-sectional shape with inclined side edges. By forming the second magnetic pole tip on the tip of one magnetic pole so as to face each other with a gap layer interposed therebetween, the gap layer can be arranged obliquely along the cross-sectional formation of the first magnetic pole tip. (The gap length between the opposing magnetic pole tips can be partially widened at both side edges.

〔Example〕

Embodiments of the present invention will be described in detail below with reference to the drawings.

FIG. 1 is a plan view, viewed from the medium facing surface side, showing the process order of an embodiment of the method for manufacturing a thin film magnetic head according to the present invention.

First, as shown in FIG. 1(a), a substrate 11 that will become a slider is prepared.
A magnetic layer 31 made of permalloy, for example, is formed thereon,
The magnetic layer 31 is formed by a photolithography process as shown in FIG.
As shown in b), the first magnetic pole 21 is formed to have a trapezoidal cross-sectional shape with the surrounding side edges, excluding the side facing the medium, inclined.

As a method for forming the first magnetic pole 21 having a trapezoidal cross section, for example, a magnetic layer 31 made of permalloy is formed on the substrate 11 by a sputtering method or a curved deposition method.
A two-layer structure is formed in which a second W film is formed at a substrate temperature of about 30°C on a first magnetic film formed at a substrate temperature of about 0°C, and a resist for forming a magnetic pole is formed on this magnetic layer 31. A pattern is provided and the pattern is used as a light-shielding mask, for example, H2SO4+ H2O21H20+ NH4F,
By performing etching using an etching solution consisting of CRH2n+10H, the first magnetic pole 21 having a trapezoidal cross section is formed by taking advantage of the fact that the etching rate varies depending on the film forming temperature.
can be easily formed.

Next, as shown in FIG. 1 fc), a 5i02. Alternatively, a nonmagnetic material layer 32 made of M2O3 is deposited, and a resist pattern 33 is formed on the surface thereof, exposing a region corresponding to the first magnetic pole 21.

Next, as shown in FIG. 1(d), the resist pattern 33
When the non-magnetic material layer 32 is made of 5i02, etching is performed using an etching solution consisting of HF, N1-14F and ethylene glycol so that the surface of the first magnetic pole 210 is exposed using a light-shielding mask. For this etching process, instead of the above process, for example, an M mask pattern may be used and a plasma etching process using etching gases of CFa and 02 may be used.

Thereafter, by removing the resist pattern 33, a step correction film 34 is formed around the -M1 pole 21 to have a plane on the same level as the surface of the magnetic pole 21, as shown in FIG. 1(e). .

Therefore, as shown in FIG. 1 (fl), 5i02,
Alternatively, a thin film coil on which a gap layer 13 made of Al2O3 is deposited and a glabella insulating layer (not shown) interposed on the surface thereof, and second magnetic poles 16 and 5iO7 having a rectangular cross section, or Aj20. A protective film 35 consisting of the following is sequentially formed.

Then, the exposed surfaces of the first and second magnetic poles 21 and 16 are cut and polished into a desired floating shape surface, thereby forming the first and second magnetic poles 21 and 16 facing each other with the gap layer 13 interposed therebetween. It is now possible to widen the gap length between the tips of the two magnetic poles 16 at both side edges.

〔Effect of the invention〕

As is clear from the above description, according to the method for manufacturing a thin film magnetic head according to the present invention, the surface of the first magnetic pole and the surface of the first magnetic pole are By forming step correction films that are on the same plane and arranging the second magnetic pole facing each other on the first magnetic pole and the difference correction film with a gap layer interposed therebetween, the gap length between the opposing first and second magnetic pole tips can be reduced. It is possible to easily manufacture a thin film magnetic head in which the width is partially widened at both side edges.

Therefore, it is extremely advantageous for use in recording and reproducing magnetic disk media with high track density.

[Brief explanation of drawings]

FIG. 1 is a plan view of an embodiment of a method for manufacturing a thin film magnetic head according to the present invention, viewed from the medium facing surface side, showing the process order, and FIG. 2 is a diagram showing the tip of a magnetic pole of a thin film magnetic head to which the present invention is applied. A perspective view, FIG. 3 is a diagram showing the shape of the magnetic pole tip of a thin film magnetic head to which the present invention is applied, FIG. FIG. 3 is a diagram for explaining the shape of the magnetic pole tip of the head. 1 to 3, 11 is a substrate (slider), 13 is a gap layer, 16 is a second magnetic pole, 21 is a first magnetic pole, 31 is a magnetic layer, 32 is a non-magnetic material layer, 33 is a resist pattern, 34 is a step correction film;
35 indicates a protective film. Ichiki ■ N-8

Claims (1)

[Claims] A first magnetic pole (21) and a gap layer (13) are formed in this order on a substrate (11) that becomes a slider, and a thin film coil and a second magnetic pole (16) are formed on the surface of the substrate through an interlayer insulating layer, respectively. ) of the first magnetic pole (21), prior to forming the gap layer (13) on the first magnetic pole (21), the gap layer (13) of the first magnetic pole (21) is laminated.
3) A step of etching the opposite side edges in an inclined manner to form a trapezoidal cross-sectional shape, and depositing a non-magnetic material layer (32) on and around the first magnetic pole (21). After that, only the non-magnetic material layer (32) portion on the trapezoidal upper surface of the first magnetic pole (21) is etched away to remove the first magnetic pole (21).
21) to form a step correction film (34) that is flush with the surface of the first magnetic pole (21), and a gap layer (13) is formed on the tip of the first magnetic pole (21). A method for manufacturing a thin-film magnetic head, characterized in that the gap length between the opposite end of the second magnetic pole (16) is made wider on both sides.