JPS6357759A - Method and apparatus for surface treatment in vacuum - Google Patents

Abstract

PURPOSE:To permit surface treatment of works having various shapes and sizes by positioning the work in a vacuum by lifting, rotating, tilting or horizontal moving, then subjecting the treatment surface to a desired treatment while rotating or lifting the work. CONSTITUTION:Mechanisms 6, 7, 8 for rotating, lifting and tilting are mounted to a horizontally movable upper frame 3 in a vacuum vessel 2. A lifting supporting member 5 is further mounted to the bottom end of a hollow shaft 11 which is lifted by means of a motor gear 12, gear 13, screw 9 and nut 10, etc., of the lifting mechanism 6 and a mounting plate 4 for the work is freely rotatably and liftably mounted thereto. The plate 4 is driven to rotate by the rotating mechanism 7 and is further tilted by the tilting mechanism 8. The work set on the plate 4 of the surface treatment device constituted in the above- mentioned manner is positioned to an optimum position by lifting, rotating, tilting and horizontal moving according to the purpose of the treatment, shape, size, etc., and while the work is rotated or lifted at need, the work is subjected to the desired surface treatment by a vapor source A.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a surface treatment method in vacuum and an apparatus therefor.

[Prior art and its problems]

Surface treatments in vacuum include ion blating, which deposits ions on the surface of the object to be treated, ion implantation, which causes ions to penetrate, or ion beam mixing, which uses these two If.

In the method for treating stiff shins, the treatment is carried out while moving the object to be treated in order to ensure uniformity of the film thickness and enlargement of the treated surface.

For example, in ion brating, a motion mechanism as shown in Figures 1 and 9 is used. In this mechanism, a large number of workpiece mounting plates 52 are attached to a rotary plate 51 rotated by a motor 50 and rotated, and a ring-shaped fixed gear 53 having the same center and upper part as the rotary plate 51 and a gear 54 meshing therewith. Accordingly, the mounting plate 52 is configured to rotate along with the revolution.

Conventional movement mechanisms have this configuration, so in ion brating where ion evaporation source A is installed below, the processing surface is set horizontally, and in the case of ion implantation, it is set so that the processing surface is horizontal. Since the ion beam is projected B, the processing surface must be set vertically. Furthermore, in the case of ion beam mixing, in order to make the processing surface compatible with the above-mentioned 20,000 times, the processing surface must be set at an angle.

Therefore, in the conventional movement mechanism, the attachment of the object to be processed must change the direction of the position depending on the processing method, and there is a problem in that only a single process can be performed. Furthermore, since the purpose of this method is to simultaneously process a large number of small objects of the same shape, there is a problem in that it is difficult to apply to irregularly shaped or large objects.

This invention was proposed to solve these problems, and its purpose is to be able to easily perform the various processes described above with one device, and to process objects of various shapes and sizes. An object of the present invention is to provide a method and apparatus for surface treatment in vacuum that can perform surface treatment on objects.

[Means and effects for solving the problem] The surface treatment method according to the present invention is capable of lifting, rotating, tilting, or horizontally processing a workpiece in a vacuum depending on the purpose of treatment and the shape and size of the workpiece. Move and position the workpiece to the optimal position, rotate or raise and lower the workpiece, and perform ion blating, ion implantation, or ion beam mixing on the processing surface of the workpiece, making the aforementioned clumsy processing easier with one device. In addition, it is possible to perform surface treatment on objects of divine shape and size.

The surface treatment apparatus according to the present invention includes an upper part of a vacuum chamber that is horizontally movable, a mounting plate that is placed in the vacuum chamber and to which a workpiece is attached, and an elevator on which the mounting plate is rotatably and tiltably mounted. a support member, an elevating mechanism that is vertically provided from the top of the vacuum chamber to the elevating support member and that raises and lowers the elevating support member; It consists of a rotating mechanism and a tilting mechanism that transmit rotational force from one drive shaft on the top to the mounting plate, and rotate and tilt the mounting plate. The device is moved up and down, rotated, tilted, or horizontally moved to position it at an optimal position, and rotated or moved up and down to perform the necessary treatment on the surface of the object to be processed.

〔Example〕

The present invention will be described below based on illustrated embodiments.

As shown in Figures 6 to 8, the workpiece 1 can be moved up and down, rotated, tilted, and horizontally moved within the vacuum chamber 2, and the above-mentioned changes can be made depending on the processing purpose and the shape and size of the workpiece. The workpiece 1 is positioned at the optimal position by appropriately combining the four movements,
Ion blating, ion implantation, or ion beam mixing is performed while rotating or raising and lowering the object 1 to be processed.

Figure 6 shows a case where ion blating is performed on the surface of a flat plate.The flat plate is raised and lowered and set at the optimal position horizontal to the evaporation surface of the ion evaporation source, and the ion evaporation is performed while rotating the flat plate. The aim is to make the film thickness uniform.

Fig. 4 shows a case where ion blating is performed on the tip surface of a long rod-shaped material, and the long material is raised and lowered, set, and rotated so that the treated surface of the long material and the evaporation surface are at a predetermined distance.

Figure 5 shows the case where ion blating is performed on the side surface of a long rod-shaped material, and the ion evaporation is performed by horizontally moving, raising and lowering, and tilting the material so that the evaporation surface and the treatment surface are approximately equidistant, and then rotating the material. Do the following.

Fig. 6 shows a case where ion beam mixing is performed on a flat plate, and the flat plate is moved horizontally and raised and lowered, and the flat plate is tilted at 45° to correspond to vapor deposition from the bottom and ion implantation from the side, and mixing is performed by rotating.

Figure 7 shows the case where ions are implanted into the side surface of a long material, and since the surface to be treated is wider than the width of the ion beam 8, the ion implantation is performed by repeatedly raising and lowering the beam in the vertical direction and rotating it.

Figure 8 shows the case where ions are implanted into a flat plate, and the plate is raised and lowered, tilted vertically, centered, and rotated for ion implantation.

Next, an apparatus suitable for performing the various surface treatments described above will be described.

]・As shown in Figure 1 and Figure 2, this device is installed on the top of a vacuum chamber 2, and has an upper frame 3 installed to be horizontally movable with respect to the -X2 tank body, and a workpiece 1 attached to it. a mounting plate 4 that is attached to the mounting plate 4; a lifting support member 5 to which the mounting plate 4 is rotatably and tiltably mounted; a lifting mechanism 6 that lifts and lowers the lifting support member 5; and a rotation mechanism 7 that rotates the mounting plate 4.
It consists of a tilting mechanism 8 that tilts the mounting plate 4.

The elevating mechanism 6 is vertically installed from the upper frame 3 to the elevating support member 5, and includes an elevating drive screw 9 rotatably supported by the upper frame 3, an elevating transmission nut 10 that meshes with the screw 9, and the nut 10 and elevating support. It has a lifting transmission intermediate shaft 11 that connects the member 5, and a lifting motor shaft gear 1.
2. Rotate the screw 9 by rotating the gear 13,
Oak) Move 10 up and down. As a result, the five lifting support members, that is, the mounting plate 4, move up and down with a predetermined stroke. During this elevation, a rotation mechanism 7 and a tilting mechanism 8 on both sides, which will be described later, prevent the rotation of the nut 10 and the like and serve as a guide.

The mounting plate 4 is rotatably attached to a tilting frame 15 by its rotation shaft 14, and the tilting frame 15 is supported by the lifting support member 5 so as to be tiltable.

The rotation mechanism 7 is vertically installed from the upper frame 3 to the elevating support member 5, and is rotatably supported by the upper frame 3.
Drive Shaft 16, Upper End 17 A rotates and engages with the drive shaft 16, and the lower end is rotatably attached to the lifting support member 5 via a bearing 18. A rotation transmitting hollow shaft 17.
It has a transmission gear 19 that transmits the rotation of the hollow shaft 17 to the mounting plate 40 and the rotating shaft 14, and a horizontal transmission gear. 17, transmission gear 19,
During horizontal transmission, the mounting plate 4 rotates via the rotation axis 14.

Here, the rotary drive shaft 16 has a rectangular cross section, for example, and the engagement hole of the upper end 17A of the hollow shaft 17 has a rectangular shape that engages with the engagement hole. The hollow shaft 17 is allowed to move freely.

As a result, rotational force is transmitted to the mounting plate 4 while expanding and contracting as the lifting support member 5 moves up and down.

The tilting mechanism 8 is also vertically installed like the rotating mechanism 7, and the structures of the rotary drive shaft 16 and the hollow shaft 17 are also similar to the rotating mechanism 7. , rotates the rotary drive shaft 16. The rotational force is transmitted via the hollow shaft 17 and the rotation transmission gear 5 to rotate the tilting shaft 26 connected to the tilting frame 15, thereby causing the mounting plate 4 to tilt.

Here, the center of the tilting shaft 26, that is, the center of tilting, and the center of the horizontal transmission shaft 20 are made to coincide with each other, so that rotational force transmission and tilting of the rotating mechanism 70 can be performed without any trouble.

Further, the upper frame 3 is horizontally movable by appropriate means not shown.

In the above configuration, the mounting plate 4, that is, the workpiece 1, is positioned at the optimum position by each mechanism alone or in appropriate combination as shown in Figs. Ion blating, ion implantation, or ion beam mixing is performed while rotating or moving up and down.

〔Effect of the invention〕

As described above, according to the present invention, the object to be processed can be moved up and down, rotated, tilted, and moved horizontally within the vacuum chamber, and the above four movements can be adjusted as appropriate depending on the purpose of processing and the shape and size of the object to be processed. In combination, the object to be treated is positioned at the optimum position, and the object to be treated is rotated or raised and lowered while ion brating,
Since ion implantation or ion beam mixing is performed, the following effects are achieved.

(1) One device performs ion brating, ion implantation, and ion beam mixing.

(11) Restrictions on the thickness and shape of objects to be processed are significantly expanded compared to conventional methods.

(iii) The processing surface can be easily set at the optimum position for objects to be processed of various shapes.

(iv) Four movement mechanisms greatly expand the processing area.

[Brief explanation of drawings]

A□ Figure 1 is a longitudinal sectional view showing the surface treatment apparatus according to the present invention, Figure 2 is a sectional view taken along the line ■-■ of Figure 1, Figures 6 to 8 are views of the surface treatment method of the present invention. Schematic diagrams showing various aspects, Figure 9 is a schematic diagram showing an example of a conventional surface treatment apparatus. 1... Workpiece, 2... Vacuum chamber, 3.
...Upper frame, 4...Mounting plate, 5.
... Lifting support member, 6... Lifting mechanism, 7
...Rotating mechanism, 8...Tilt mechanism, 9.
... Screw for lifting and lowering drive, 10 ... Nut for lifting and lowering transmission, 11 ... Lifting and lowering transmission hollow shaft, 12 ... Motor shaft gear for lifting and lowering, 13 ...・
... Gear, 14 ... Rotating shaft, 15 ...
・Tilt frame, 16... Rotation drive shaft,
17... Rotation transmission hollow shaft, 17 A...
...Top end, 18...Bearing, 19...
...Transmission gear, Mr....Horizontal transmission shaft, 21...
...Rotating motor shaft gear, n...Gear, strict...
...Motor shaft gear for tilting, 24...Gear, 5...Transmission gear, 26...Tilting shaft

Claims (2)

[Claims] (1) In a vacuum, the object to be processed is moved up and down, rotated, tilted, or horizontally moved depending on the processing purpose and the shape and size of the object to be positioned at the optimal position, and while the object is rotated or raised and lowered. Ion plating on the processing surface of the processed object,
A surface treatment method in vacuum characterized by performing ion implantation or ion beam mixing. (2) an upper part of the vacuum chamber that is horizontally movable; a mounting plate that is placed in the vacuum chamber and to which the workpiece is attached; an elevation support member to which the mounting plate is rotatably and tiltably mounted; and the vacuum chamber. an elevating mechanism that is vertically installed from the upper part of the vacuum tank to the elevating support member and raises and lowers the elevating support member; a rotation mechanism that transmits rotational force from a rotational drive source to the mounting plate and rotates the mounting plate; and a rotation mechanism that is vertically disposed from the upper part of the vacuum chamber to the lifting support member and that expands and contracts as the lifting support member moves up and down. 1. A surface treatment apparatus in a vacuum, comprising: a tilting mechanism that transmits rotational force from a drive source to the mounting plate and tilts the mounting plate;