JPS6355430U - - Google Patents
Info
- Publication number
- JPS6355430U JPS6355430U JP14849586U JP14849586U JPS6355430U JP S6355430 U JPS6355430 U JP S6355430U JP 14849586 U JP14849586 U JP 14849586U JP 14849586 U JP14849586 U JP 14849586U JP S6355430 U JPS6355430 U JP S6355430U
- Authority
- JP
- Japan
- Prior art keywords
- reduction projection
- exposure apparatus
- projection exposure
- automatic focus
- automatic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
Description
第１図、第２図は本考案に係る縮小投影露光装
置用自動焦点機構の要部正面図である。第２図は
在来の自動焦点機構の略示正面図である。
１１…半導体ウエハー、１２…投影レンズ、１
３…レチクル、１５ａ，１５ｂ…ビームスプリツ
タ、１６…ライトガイド、１７…参照光受光器、
１８…検出光受光器。
1 and 2 are front views of essential parts of an automatic focusing mechanism for a reduction projection exposure apparatus according to the present invention. FIG. 2 is a schematic front view of a conventional autofocus mechanism. 11... Semiconductor wafer, 12... Projection lens, 1
3... Reticle, 15a, 15b... Beam splitter, 16... Light guide, 17... Reference light receiver,
18...Detection light receiver.
補正 昭６２．２．５
図面の簡単な説明を次のように補正する。
明細書第９頁第４行の「第２図」を、「第３図
」に訂正する。Amendment February 5, 1982 The brief description of the drawing is amended as follows. "Figure 2" on page 9, line 4 of the specification is corrected to "Figure 3."
Claims (1)
において、 レチクル上方に自動焦点センシング用の検出光
学系を配設し、縮小投影レンズを通し、半導体ウ
エハーから反射される光を検出することにより、
自動合焦動作を行うことを特徴とする縮小投影露
光装置用自動焦点。[Claim for Utility Model Registration] In a reduction projection exposure apparatus used in the semiconductor manufacturing process, a detection optical system for automatic focus sensing is provided above the reticle, and the light reflected from the semiconductor wafer is transmitted through the reduction projection lens. By detecting
An automatic focus for a reduction projection exposure apparatus characterized by performing an automatic focusing operation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14849586U JPS6355430U (en) | 1986-09-26 | 1986-09-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14849586U JPS6355430U (en) | 1986-09-26 | 1986-09-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6355430U true JPS6355430U (en) | 1988-04-13 |
Family
ID=31062818
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14849586U Pending JPS6355430U (en) | 1986-09-26 | 1986-09-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6355430U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02207520A (en) * | 1989-02-07 | 1990-08-17 | Canon Inc | Aligner |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56130707A (en) * | 1980-03-18 | 1981-10-13 | Canon Inc | Photo-printing device |
| JPS5759326A (en) * | 1980-09-29 | 1982-04-09 | Hitachi Ltd | Method for detection of image-forming position and device thereof |
| JPS60158624A (en) * | 1984-01-27 | 1985-08-20 | Hitachi Ltd | Detection of focal point |
-
1986
- 1986-09-26 JP JP14849586U patent/JPS6355430U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56130707A (en) * | 1980-03-18 | 1981-10-13 | Canon Inc | Photo-printing device |
| JPS5759326A (en) * | 1980-09-29 | 1982-04-09 | Hitachi Ltd | Method for detection of image-forming position and device thereof |
| JPS60158624A (en) * | 1984-01-27 | 1985-08-20 | Hitachi Ltd | Detection of focal point |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02207520A (en) * | 1989-02-07 | 1990-08-17 | Canon Inc | Aligner |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS57158826A (en) | Automatic focusing device for stereoscopical microscope | |
| JPS6355430U (en) | ||
| JPS6315739B2 (en) | ||
| KR19980029709A (en) | Autofocusing system using double reflection | |
| JPS57150808A (en) | Focus detecting device | |
| CA2058044A1 (en) | Device for detecting uneven diameter on a wire | |
| JPS5916786U (en) | Automatic focus laser processing machine | |
| JPS53105223A (en) | Optical system of distance detector for automatic focusing | |
| JPS62174790U (en) | ||
| JPH01227431A (en) | Projection aligner | |
| JPS57130006A (en) | Focus detector | |
| JPS6339963Y2 (en) | ||
| JPS6237529B2 (en) | ||
| JPH0244258Y2 (en) | ||
| JPS5885339U (en) | Reduction projection exposure equipment | |
| JPH02117719U (en) | ||
| JPS552232A (en) | Focusing optical device for camera | |
| JPS57172326A (en) | Exposure control system using focusing detecting device | |
| JPS57128312A (en) | Optical system for focus detection | |
| JPS6181640U (en) | ||
| JPS55106427A (en) | Single-lens reflex camera | |
| JPH0711622B2 (en) | Projection system for automatic focus detection | |
| JPS5720709A (en) | Method and apparatus for automatic focusing | |
| JPH0236813U (en) | ||
| JPS62167210U (en) |