JPS6348482A - Magnetic sensor device - Google Patents
Magnetic sensor deviceInfo
- Publication number
- JPS6348482A JPS6348482A JP61193343A JP19334386A JPS6348482A JP S6348482 A JPS6348482 A JP S6348482A JP 61193343 A JP61193343 A JP 61193343A JP 19334386 A JP19334386 A JP 19334386A JP S6348482 A JPS6348482 A JP S6348482A
- Authority
- JP
- Japan
- Prior art keywords
- alloy layer
- magnetosensitive element
- magnetic sensor
- sensor device
- nickel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 claims abstract description 6
- 230000035699 permeability Effects 0.000 claims abstract description 3
- 230000000694 effects Effects 0.000 abstract description 7
- 230000035945 sensitivity Effects 0.000 abstract description 7
- 239000006185 dispersion Substances 0.000 abstract description 4
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 abstract description 3
- 229910045601 alloy Inorganic materials 0.000 abstract description 3
- 239000000956 alloy Substances 0.000 abstract description 3
- 238000000034 method Methods 0.000 abstract description 3
- 230000005355 Hall effect Effects 0.000 abstract description 2
- 229910000889 permalloy Inorganic materials 0.000 abstract description 2
- 238000007740 vapor deposition Methods 0.000 abstract description 2
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 238000007747 plating Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 6
- 229910000859 α-Fe Inorganic materials 0.000 description 3
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910000640 Fe alloy Inorganic materials 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Landscapes
- Measuring Magnetic Variables (AREA)
- Hall/Mr Elements (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、磁気集束効果により高感度化した磁気センサ
装置に関する。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a magnetic sensor device with increased sensitivity due to a magnetic focusing effect.
従来の技術
磁気集束効果により高感度化した磁気センサ装置には、
従来、第３図の組立図に示すように、コムリード１の上
にフェライト４をダイスボンドし、その上にホール素子
や磁気抵抗素子等の磁気センサ２をダイスボンドして、
金属細線（ワイヤ）で各リードに接続したものが知られ
ている。Conventional technology Magnetic sensor devices with high sensitivity due to magnetic focusing effects include
Conventionally, as shown in the assembly diagram of FIG. 3, a ferrite 4 is die-bonded onto a com lead 1, and a magnetic sensor 2 such as a Hall element or a magnetoresistive element is die-bonded thereon.
It is known that each lead is connected to a thin metal wire.
発明が解決しようとする問題点
磁気集束効果を窩めるためには、フェライト４のチップ
の大きさと磁気センサ２のチップの大きさとが、同じ大
きさであることが好適であるが、反面、これら両チップ
を同じ大きさにした場合、ダイスボンド位置のばらつき
により、しばしば、位置ずれという問題が生じた。Problems to be Solved by the Invention In order to capture the magnetic focusing effect, it is preferable that the size of the chip of the ferrite 4 and the size of the chip of the magnetic sensor 2 are the same size. When both chips were made to have the same size, variations in die bond position often caused misalignment problems.
問題点を解決するための手段
この問題を解決するために、本発明は、コムリードの所
定位置に高透磁率のニッケル・鉄合金層を設け、この合
金層上に感磁素子を載置した構造の磁気センサ装置であ
る。Means for Solving the Problem In order to solve this problem, the present invention provides a nickel-iron alloy layer with high magnetic permeability at a predetermined position of the com lead, and a magnetic sensing element is placed on this alloy layer. This is a magnetic sensor device with a structure.
作用
この構造により、ニッケル・鉄合金層の磁気集束効果に
よって磁気センサ装置の高感度化が容易に図られると同
時に、感度のばらつきも極めて小さくすることができる
。Function: With this structure, it is possible to easily increase the sensitivity of the magnetic sensor device due to the magnetic focusing effect of the nickel-iron alloy layer, and at the same time, it is possible to extremely reduce variations in sensitivity.
実施例
第１図は、本発明の一実施例による磁気センサ装置の組
立図であり、コムリード１の先端部に、商品名パーマロ
イで知られるニッケル・鉄合金層３を局部めうき法ある
いはスパッタ蒸着法で、感磁素子の寸法より大きい面積
に形成し、この上に感磁素子２を接着し、感磁素子２上
の各電極と各コムリードとの間をワイヤで接続したもの
である。第２図は、感磁素子として、ガリウム・ヒ素（
ＧａＡｓ）ホール効果素子を用いた実施例製品と前述の
従来例とを対比して、それぞれのロット間でのホール出
力電圧のばらつきを示した頻度特性図である。本実施例
製品は、この相対値の比較からもわかるように、小さな
分散で、高いホール出力電圧を得ることができた。Embodiment FIG. 1 is an assembly diagram of a magnetic sensor device according to an embodiment of the present invention, in which a nickel-iron alloy layer 3 known as Permalloy (trade name) is applied to the tip of a com lead 1 by local coating or sputtering. It is formed using a vapor deposition method to have an area larger than the dimensions of the magnetically sensitive element, the magnetically sensitive element 2 is glued onto this, and each electrode on the magnetically sensitive element 2 and each com lead are connected with wires. . Figure 2 shows gallium arsenide (
FIG. 3 is a frequency characteristic diagram showing the variation in Hall output voltage between lots, comparing an example product using a Hall effect element (GaAs) and the conventional example described above. As can be seen from the comparison of these relative values, the product of this example was able to obtain a high Hall output voltage with small dispersion.
発明の効果
以上のように、本発明の磁気センサ装置によれば、小さ
な分散で、高感度特性を得ることができ、また、大きい
面積に感磁素子を接着できるので高い製造歩留が達成で
きるという効果も得られる。Effects of the Invention As described above, according to the magnetic sensor device of the present invention, high sensitivity characteristics can be obtained with small dispersion, and a high manufacturing yield can be achieved because the magnetic sensing element can be bonded over a large area. This effect can also be obtained.
第１図は本発明の一実施例による磁気センサ装置の組立
図、第２図は同実施例装置の特性比較図、第３図は従来
の磁気センサ装置の組立図である。
１・・・・・・コム、２・・・・・・ホール素子等の磁
気センサ、３・・・・・・ニッケル・鉄合金層、４・・
・・・・フェライト、５・・・・・・ワイヤ。FIG. 1 is an assembly diagram of a magnetic sensor device according to an embodiment of the present invention, FIG. 2 is a characteristic comparison diagram of the same embodiment device, and FIG. 3 is an assembly diagram of a conventional magnetic sensor device. 1... Comb, 2... Magnetic sensor such as Hall element, 3... Nickel/iron alloy layer, 4...
...Ferrite, 5...Wire.
Claims (1)
感磁素子を載置した構成の磁気センサ装置。A magnetic sensor device in which a magnetic sensing element is mounted on a com lead having a nickel-iron alloy layer with high magnetic permeability.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61193343A JPS6348482A (en) | 1986-08-19 | 1986-08-19 | Magnetic sensor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61193343A JPS6348482A (en) | 1986-08-19 | 1986-08-19 | Magnetic sensor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6348482A true JPS6348482A (en) | 1988-03-01 |
Family
ID=16306317
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61193343A Pending JPS6348482A (en) | 1986-08-19 | 1986-08-19 | Magnetic sensor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6348482A (en) |
-
1986
- 1986-08-19 JP JP61193343A patent/JPS6348482A/en active Pending
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